Talk:Electron-beam lithography

message: This www.nanodaddy.com link is popping up in a lot of nanotechnology-related articles. It appears to be a legitimate source of nanotechnology news, but shouldn't be added to articles which focus on a particular topic. Guiding light 14:46, 6 March 2006 (UTC)
thread_title: Link popping up

message: The article lists system costs for commercial units, but doesn't say anything about the costs for the kind of equipment used for prototyping in schools etc.. Does anyone know what the rough costs are?
Zuiram 19:03, 3 November 2006 (UTC)
thread_title:  system cost 

message: The definition says "the practice of using a beam of electrons to generate patterns on a surface.[1]".
* I would narrow this down and say 'to create patterns in a resist'.
* If the application of the resist is defined to be part of the process one could say 'to create resist patterns on a surface' but I would in favor of the first (the word lithography refers to the writing itself).
Guiding light (talk) 04:42, 1 April 2008 (UTC)
thread_title:  Definition 

message: * I would say this IS part of EBL. The article is quite detailed on electron processes but does not mention polymer chain scission in positive resists, crosslinking in negative resists, the developer, development rate(dose) function, contrast and resolution. I think a section could be dedicated to resists so that the remark about ZEP can go there and the article can say that the resolution of the process is 10-15 nm.
Guiding light (talk) 04:42, 1 April 2008 (UTC)
thread_title:  Resist & development 

message: * Having a section with this name does not necessitate the rest to be called 'conventional'
* EBID (electron beam induced deposition) is a new frontier
* scanning tunneling microscope requires conducting resist, otherwise tip crashes. For insulating resists: conducting AFM.
* Some of these are a bit far fetched...
Do you want to mention complementary EBL here? Multibeam is not proposing full EBL, just parallel line cuts and vias, which drastically reduces the requirements.  — Preceding unsigned comment added by 128.194.141.222 (talk) 21:27, 13 February 2015 (UTC)
thread_title:  New frontiers 

message: What does people think of having different recipes listed at Wikipedia? E.g. to make wafer marks on a thermally grown SiO2 wafer of 400 nm spin coat MMA(8.5)MAA-EL10 at 3000 rpm for 1 min, bake at 160 C,... , expose with 600 uC/Cm2 dose... Those kind of things?
I believe this would be very appreciated by many users...
--129.16.110.105 (talk) 08:19, 25 May 2009 (UTC)
replies: text: Recipes are explicitly covered by WP:WWIN. I love to see recipes on the web, but I am afraid that Wikipedia is not the right place for them. --DrTorstenHenning (talk) 06:54, 27 May 2009 (UTC)
thread_title:  Recipes 

message: This sentence in the intro isn't clear (at least to me).   "Also, the turn-around time for reworking or re-design is lengthened unnecessarily if the pattern is not being changed the second time."  Additionally, there is no further discussion of the topic below.  If it isn't introducing something that is discussed below, it shouldn't be in the introduction IMHO.  —Preceding unsigned comment added by 97.126.151.201 (talk) 18:03, 20 October 2010 (UTC)
thread_title:  Sentence in intro needs work 

message: This article is too commercial, that is it puts too much emphasis on highlighting disadvantages and has an unnecessarily negative tone, apparently due to someone happy with a micronic maskless optical tool. EBL has a significantly higher resolution and is also a pattern generating technique. It is uniquely suited for certain R&D and mask writing applications. It is clearly not a mass production technique and should not be compared to those. I'll make changes to restore neutrality. Focus should be on information, not product comparisons.
Mhesselb (talk) 18:07, 7 November 2010 (UTC)
thread_title:  EBL vs photolithography

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thread_title:  External links modified 

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thread_title:  External links modified 

message: From ACE magazine issue 10 (1998): Flare One's custom chips... made-to-measure RISC processors... Until recently, prototype custom chips have been produced by photographic methods at intial cost of around 20000$ per design. New techniques meant that Cambridge firm Qudos could knock them out at tenth of the price by using an E-beam to cut the pattern directly into the silicon.  Setenzatsu.2 (talk) 22:08, 5 June 2024 (UTC)
thread_title:  Cheap, prototyping?