Complex sentence: Multiple patterning (or multi-patterning) is a class of technologies for manufacturing integrated circuits (ICs), developed for photolithography to enhance the feature density, which is expected to be necessary for upcoming semiconductor processes.
Split into simpler sentences: Multiple patterning (or multi-patterning) is a class of technologies for manufacturing integrated circuits (ICs), developed for photolithography to enhance the feature density. It is expected to be necessary for upcoming semiconductor processes.