Complex sentence: EUV is currently being targeted for use at the 7 nm post-silicon node with customized off-axis illumination and multiple patterning, although it was first targeted for 100 nm conventional patterning.
Split into simpler sentences: EUV is currently targeted for use at the 7 nm post-silicon node with customized off-axis illumination and multiple patterning. It was first targeted for 100 nm conventional patterning.