Complex sentence: Chemical Mechanical Polishing/Planarization is a process of smoothing surfaces with the combination of chemical and mechanical forces, it can be thought of as a hybrid of chemical etching and free abrasive polishing.
Split into simpler sentences: Chemical Mechanical Polishing/Planarization is a process of smoothing surfaces with the combination of chemical and mechanical forces. It can be thought of as a of chemical etching and free abrasive polishing.