Complex sentence: While several inorganic semiconducting materials such as Si, Ge, and metal oxides (e.g. In2O3, SnO2, ZnO, etc.) have been used for the preparation of nanowires, Si is usually the material of choice when fabricating nanowire FET-based chemo/biosensors.
Split into simpler sentences: While several inorganic semiconducting materials such as Si, Ge, or metal oxides (e.g. In2O3, SnO2, ZnO, etc.) have been used for the preparation of nanowires. Silicon nanowires are usually the material of choice when fabricating nanowire FET-based chemo/biosensors.