Patent SG-11201903005S-A (SG)
Title: Carbon bridged aminosilane compounds for high growth rate silicon-containing films
Inventor: WANG MEILIANG
IPC: C23C16/455
Filed: 2017-10-13
Abstract: WO 18/07 183 2 A8 (12) INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) CORRECTED VERSION (19) World Intellectual Property Organization International Bureau (43) International Publication Date 11111111111101101010111110111101011 1011011111100101BOVE# (10) International Publication Number WO 2018/071832 A8 19 April 2018 (19.04.2018) Wi P 0 I PCT 4.0 3.5 3.0 2.5 2.0 1.5 1.0 0.5 0.0 (51) International Patent Classification: C23C 16/40 (2006.01) C07F 7/10 (2006.01) C23C 16/455 (2006.01) (21) International Application Number: PCT/US2017/056615 (22) International Filing Date: 13 October 2017 (13.10.2017) (25) Filing Language: English (26) Publication Language: English (30) Priority Data: 62/408,310 14 October 2016 (14.10.2016) US 15/725,122 04 October 2017 (04.10.2017) US (71) Applicant: VERSUM MATERIALS US, LLC [US/US]; 8555 S. River Parkway, Tempe, AZ 85284 (US). (72) Inventors: WANG, Meiliang; 363 Avenida La Cuesta, San Marcos, CA 92078 (US). LEI, Xinjian; 1928 Cherrywood Street, Vista, CA 92081 (US). XIAO, Manchao; 5534 Ca- ballos Place, San Diego, CA 92130 (US). RAJARAMAN, Suresh, Kalpatu; 1640 Windemere Drive, San Marcos, CA 92078 (US). (74) Agent: ROSSI, Joseph, D. et al.; Stradley Ronon Stevens & Young, LLP, 30 Valley Stream Parkway, Great Valley Corporate Center, Malvern, PA 19355 (US). (81) Designated States (unless otherwise indicated, for every kind of national protection available): AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (84) Designated States (unless otherwise indicated, for every kind of regional protection available): ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, (54) Title: CARBON BRIDGED AMINOSILANE COMPOUNDS FOR HIGH GROWTH RATE SILICON-CONTAINING FILMS 1-di-iso-propylam ino-4,4-ciimethy4-1,4-disilimentane 11; 1-diethylamino-4,4-dimettiy1-1A-disilapentane 0 4 6 Precursor Pulse {seconds) Figure 1 R 3 1=0 R 2 A (57) : Described herein are compositions and methods for forming silicon oxide films. In one aspect, the film is deposited from at least one precursor, wherein the at least one precursor has a structure represented by Formula A: wherein R, R1, R 2 , R, R 3 4 , and R are defined herein. 5 [Continued on next page] WO 2018/071832 A8 MIDEDIM01101 DIDIREEM0011111111111111111111111111011111110#10# TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG). Published: — with international search report (Art. 21(3)) (48) Date of publication of this corrected version: 30 August 2018 (30.08.2018) (15) Information about Correction: see Notice of 30 August 2018 (30.08.2018)