baber/WOPTO huggingface dataset:
Patent KR-840001702-B1 (KR)
Title: Method and apparatus for fabricating surface treating and cutting thermo plastic polymer sheet
Inventor: ERDEN DONALD L VAN
IPC: B29C55/04
Filed: 1981-04-21
Granted: 1984-10-16
Abstract: A manufacturing appts. for thermoplastic polymer sheets can process polymer materials into sheets to obtain the orientation of macromolecular chains, treat the surfaces of the oriented sheets, and cut the sheets into narrow pieces. The appts. comprises extrusion devices (10,12), molding rolls (16,18,20), molding devices(14), a cooling device (24), pressing rolls(34,36), a pressing device (30), a tensionapplying device (40,42,50,52,54,60), cooling rools (40,42) treating rools (50,54), and stress-stabilizing rolls (60).
Patent KR-890000925-B1 (KR)
Title: Sleeve preparation method
Inventor: KOCHKA EDGAR L
IPC: B23K1/20
Filed: 1982-09-30
Granted: 1989-04-14
Abstract: A method is claimed for preparing a metal sleeve to be brazed to a tube.  The outer surface of the sleeve is cleaned and a braze material placed on it.  An adhesive is applied to the braze material by means of the adhesive.  The method enables leaktight joints to be poured which are suitable for heat exchange tubes in nuclear steam generators.  The method is quick, efficient and can be carried out in areas where access is limited.
Patent KR-900002555-B1 (KR)
Title: Light-scattering safety glass
Inventor: OKGADA YOSIO
IPC: B32B17/10
Filed: 1983-09-29
Granted: 1990-04-20
Abstract: A light scattering safety glass is prepd. by glueing sheets using the mixt. of a thermoplastic resin and a light-transmitting opalizing agent.  The resin is pref. alpha-olefin-vinylester copolymer, ethylen-acrylic acid copolymer, polyurethane resin, vinylchloride resin or polyamide resin.  The opalizing agent is pref. Ca carbonate, alumina, kaolin, Ca silicate, magnesia or Al hydroxide.  The glass has a high safety and resistance to weathering, high durability and low combustibility.
Patent KR-860000476-B1 (KR)
Title: Manufacturing method of lead wire
Inventor: HWANG SONG-PAK
IPC: H01B5/02
Filed: 1984-02-20
Granted: 1986-04-28
Abstract: The manufacturing method of lead wire for the electron parts coats 100% tin(2) on the circumferential surface of copper wire or copper alloys wire. Then the coated surface is coated again with 5% lead(3) of about 1 - 2. thickness. By this method, a lead wire is attached easily to the print plate by plastic and drying operations of the electron parts. The electron parts are welded easily because the surface heat-resisting temperature of the lead wire(1) is maintained at the optimum temperature of 220≰C. This lead wire(1) improves the operation efficiency.
Patent KR-930001135-B1 (KR)
Inventor: DANIDOMI SHINAO
IPC: E02B7/40
Filed: 1984-07-13
Granted: 1993-02-18
Abstract: 내용 없음.
Patent KR-860002177-B1 (KR)
Title: Hydraulic actuator for control of valves
Inventor: SOENDERGAARD JOERGEN
IPC: F16K31/72
Filed: 1984-09-15
Granted: 1986-12-22
Abstract: A valve is hydaulically actuated by a piston (4) operating in a cylinder(1). The piston skirt has a multi-start thread(8) which causes it to rotate as it moves axially so that the valve spindle (10) is rotated. The piston is returned to its initial position by a gas spring formed by high pressure gas in the second cylinder (2) acting on the extension (13) of the piston. Should the gas spring fail, due to gas leakage, the piston can be actuated. For this, a pressure medium is introduced into the annular chamber(17) between the end face of the piston (4) and the wall(11) which separates the two cylinders.
Patent KR-920007406-B1 (KR)
Inventor: STAHL HOWARD D
IPC: C13K3/00
Filed: 1984-10-05
Granted: 1992-08-31
Abstract: 내용 없음.
Patent KR-880000782-B1 (KR)
Title: Attaching method of figures on an acryl board
Inventor: CHOE BONG-SUK
IPC: B41M1/30
Filed: 1985-01-28
Granted: 1988-05-09
Abstract: A transparent resin adhesive is coated on a surface of an acrylate resin board and on the printed surface of a paper and is dried for about 30 min.  The coated surfaces are put together with the application of toluene to be roll-pressed for joining and dried for 2 hours.  The joined body is then immersed in a sodium hydroxide solution to swell the fibre of the paper and apply jet sprays of the sodium hydroxide for removing the fibre of the paper and wash-drying it to obtain a transfered photo on the board. After repeating the process for one or more times, the surface is given a protective coating.
Patent KR-890000168-B1 (KR)
Title: Temperature-regenerating method for an aqueous solution and apparatus therefor
Inventor: GOSEKGI YASUO
IPC: B01D61/36
Filed: 1985-02-19
Granted: 1989-03-09
Abstract: A process for recovering temp. of an aq. soln. comprises (a) contacting the aq. soln. contg. a solute at a concentration of at least 30% with a hydrophobic porous membrane, (b) evaporating water contained in the aq. soln. at an interface with the membrane, (c) permeating through the membrane, (d) heating the aq. soln. to a temp. below boiling point in an aq. soln. concentration step, and (e) diluting the concentrated soln. from the concentration step so as to obtain a temp. higher or lower than that of the aq. soln.
Patent KR-910006332-B1 (KR)
Inventor: KOYAMA TORU
IPC: C08G59/00
Filed: 1985-03-29
Granted: 1991-08-20
Abstract: 내용 없음.
Patent KR-870001215-B1 (KR)
Title: Refrigerator for kimchi fermentation and storage
Inventor: KIM I-KYONG
IPC: A23B7/02
Filed: 1985-05-25
Granted: 1987-06-22
Abstract: A refrigerator for kimchi is presented.  This refrigerator can be used as a chamber for kimchi fermentation and then as a cool sturage chomher axyer yermn.
Patent KR-940003452-B1 (KR)
Inventor: DIFFRIENT NIELS
IPC: A47B23/04
Filed: 1985-06-07
Granted: 1994-04-22
Abstract: 내용 없음.
Patent KR-880001323-B1 (KR)
Title: Ammonium lignosulfonates and the process thereof
Inventor: OILLING PETER
IPC: C09K23/50
Filed: 1985-10-05
Granted: 1988-07-23
Abstract: Ammonium salts of Lignosulfonic acids are prepared by the following processes; ionization process of phenol component from lignin in alkali solution; methylolation process at ortho position of the phenol; precipitation process of the methylolated lignin by lowering the pH of solution to acidic pH; removing process of inorganic salts and residues from the precipitate; sulfonation process with sulfur- oxygen-containing compound to ammonium salt.
Patent KR-890004258-B1 (KR)
Title: Magnetic recording carrier and its method
Inventor: NAKAMURA HIROKI
IPC: G11B5/73
Filed: 1985-11-05
Granted: 1989-10-28
Abstract: A perpendicular magnetic recording medium with improved durability comprises a polymer film substrate (1) containing 0.7 wt.% or less of residual solvent and a ferromagnetic alloy layer (2) formed on the substrate.  The film substrate is made of a polyamide, an aromatic polyamide and a polyparabanic acid.  The ferromagnetic alloy is Co- Cr, Co-Cr-Ph, Co-Ru, Co-Co.  The residual solvent content of the film is regulated to 0.7 wt.% or less by heating at 260≰C or more in the atmosphere.  Low solvent film substrate overcomes problems of migration of residual solvent to the surface.
Patent KR-890003221-B1 (KR)
Title: Separation intergrated circuit for high frequency digital signal
Inventor: MYONG CHAN-GYU
IPC: H04N7/08
Filed: 1985-12-16
Granted: 1989-08-26
Abstract: The circuit includes a first comparator unit (16) having a high frequency buffer circuit (10) of which output signal is feedbacked to the base of a transistor (Q2), and a second comparator unit (18) having differential transistors (Q35, Q36) for switching operation according to DC level from the first comparator and digital data signal.  The first comparator (16) extracts digital data signal by comparing output signals of a sample and hold circuit (14) and a high frequency buffer (10) and provides the digital data signal after adding certain DC level. A constant current source including transistors (Q37-Q39), zenor diodes (ZD1, ZD2), and registors (R16, R17) is connected to the second comparator unit (18).
Patent KR-930010536-B1 (KR)
Inventor: MEUNIER JEAN-PAUL
IPC: A01G31/00
Filed: 1986-05-06
Granted: 1993-10-28
Abstract: 내용 없음.
Patent KR-900008860-B1 (KR)
Inventor: TSANG CHING-HWA
IPC: G01R33/09
Filed: 1986-07-31
Granted: 1990-12-11
Abstract: 내용 없음.
Patent KR-940011162-B1 (KR)
Inventor: BROEKHOVEN JOHANNES A M VAN
IPC: C08G67/02
Filed: 1986-08-26
Granted: 1994-11-24
Abstract: 내용 없음.
Patent KR-910002869-B1 (KR)
Title: Wear-resistered fe-sintered alloy
Inventor: KIM JAE-PUNG
IPC: C22C33/02
Filed: 1986-08-31
Granted: 1991-05-06
Abstract: The iron type sintered alloy having an abrasion resistance is composed of 1.0-5.0 wt.% Cr, 3.0-15.0 wt.% Mo, below 5.0 wt.%  Ni, 0.1-2.0 wt.% V, 0.6-1.5 wt.% C, 8.0-18.0 wt.% Cu, below  1.5  wt.% of manganese sulfide, and the remainder of  Fe.  Ferromolybden  is dispersed in the mixtured  structure  of  pearlite,  bainite,  and martensite.  The  alloy  has  a   good   abrasion-resistance   and workability, and is useful for valve seats of an exhaust valve.
Patent KR-910001216-B1 (KR)
Title: Character editing circuit using on-screen display
Inventor: CHUNG TAE-HONG
IPC: G11B27/02
Filed: 1986-12-26
Granted: 1991-02-26
Abstract: The circuit is for editing the  character  displayed  on  the television screen with the video signal. The user enters the  data (date, time, editor or title) to a microprocessor  (2)  through  a keyboard (1). The microprocessor scans the input data and provides it to a mixer (5) by controlling an on screen data generator  (3). The mixer also receives the video  signal  from  an  image  signal processor (4) so that  both  the  signals  are  mixed.  The  mixer provides the mixed signal or separated signal to the  screen  with the control signal (VBLK) of the  data  generator.  The  mixed  or separated signal is provided to an peripheral apparatus like a VCR through an A/V output circuit (6).
Patent KR-900007979-B1 (KR)
Inventor: BONE ARNOLD R
IPC: A41F1/00
Filed: 1985-12-10
Granted: 1990-10-23
Abstract: 내용 없음.
Patent KR-900007064-B1 (KR)
Title: Remote control system for mutting tv volume while responding the call
Inventor: HWANG KYU-DONG
IPC: H04M1/00
Filed: 1987-04-22
Granted: 1990-09-27
Abstract: The telephone handset being controllable to the television volume equips a mute switch (K1) on the handset. The switch is connected to a remote control IC installed in the handset. The output of the IC is connected to a transistor whose collector is connected to a infrared LED (LR) to radiate the infrared for volume control. The output of the IC is also connected to a LED (LED) indicating the using state of the mute control function of the handset.
Patent KR-900008338-B1 (KR)
Title: Fuel using method for diesel engine
Inventor: BAE KI-DONG
IPC: C10L1/06
Filed: 1987-05-14
Granted: 1990-11-15
Abstract: The mixture of gasoline and fish oil is used for the diesel engine. The mixt. contains 70 vol. % or less fish oil and is used without a change of structure. It us deodorized with bacteria. The mixed fuel easily starts the engine in winter if the engine is preheated.
Patent KR-900008787-B1 (KR)
Inventor: KASANO AKIRA
IPC: G06V10/50
Filed: 1987-06-16
Granted: 1990-11-29
Abstract: 내용 없음.
Patent KR-900002715-B1 (KR)
Title: Ram sharing circuit for data inter-transmission
Inventor: LEE YUL-KI
IPC: G06F13/18
Filed: 1987-08-20
Granted: 1990-04-23
Abstract: The circuit for sharing a memory region by two CPU in a multiprocessor system includes a control circuit comprising decoders (21,22), a JK flipflop (23), and OR gates (OR1-4).  The flipflop performs a logical operation to provide buffer enable signals (CS1-2) corresponding to the access signal of the two CPU. The OR gates performs the operation to be accessed only by one signal of the two signals of the CPUs and to send a wait signal to the other CPU so that the bus crash of two CPUs is prevented.
Patent KR-960005176-B1 (KR)
Inventor: CZEREPINSKI RALPH G
IPC: C09J113/02
Filed: 1987-10-20
Granted: 1996-04-22
Abstract: 내용 없음.
Patent KR-900008634-B1 (KR)
Inventor: SIMIZU GIITSIBO
IPC: G01B21/06
Filed: 1987-10-26
Granted: 1990-11-26
Abstract: 내용 없음.
Patent KR-950011659-B1 (KR)
Title: Black level stability circuit in crt
Inventor: LEE KI-SOK
IPC: H04N5/57
Filed: 1987-11-28
Granted: 1995-10-07
Abstract: The device prevents the irregularity of the display and achieves accurate contrast signal by automatically controlling the black level of the CRT according to the video level. The device comprises: an adder which sums video signal of the color matrix with level signal of the measured pulse; a limiter which restricts the amplitude of the adder output; a mixer which mixes the limiter output, the external white level adjust signal, and feedback signal; an amplifier which amplifies the mixer output; transistor and resistor which bypasses the cathode current to ground.
Patent KR-930006192-B1 (KR)
Inventor: UENO RYUJO
IPC: C07C405/00
Filed: 1988-01-28
Granted: 1993-07-08
Abstract: 내용 없음.
Patent KR-0130207-B1 (KR)
Inventor: ODAKA KENTARO
IPC: G11B20/12
Filed: 1988-09-13
Granted: 1998-04-17
Abstract: 내용없음.
Patent KR-920002135-B1 (KR)
Inventor: KONDO TOSHIRO
IPC: B60G15/06
Filed: 1988-10-25
Granted: 1992-03-12
Abstract: 내용 없음.
Patent KR-960012178-B1 (KR)
Inventor: SAITO YOSHIHIRO
IPC: C07D239/46
Filed: 1988-11-04
Granted: 1996-09-16
Abstract: 내용없음
Patent KR-920003088-B1 (KR)
Title: Sub-screen channel indication method in multi-channel
Inventor: RYU JAE-CHEON
IPC: H04N5/445
Filed: 1988-12-08
Granted: 1992-04-13
Abstract: First, row and column addresses are  outputted  to  designate the relevant OSD (on-screen display) picture  and  the  place  for positioning the OSD picture. Then a sub-routine of "CALL  OSD  CH" is carried out  to  output  channel  display  data,  and  then,  a conversion is made to a multiplex channel  picture.  The  row  and column addresses for designating the OSD picture and the place for it are outputted upon receiving a request for the OSD  number  and the place for it. The invention displays the  channel  number  for the OSD picture, thereby providing a convenience.
Patent KR-910001597-B1 (KR)
Title: Manufacturing method of mat
Inventor: LEE DONG-WOO
IPC: B60N3/04
Filed: 1988-12-20
Granted: 1991-03-16
Abstract: Rubber powders are scattered properly on  the  mold  surface. Then the mold is heated at 110-130 deg.C, which makes  the  rubber powder be gelled. An auxiliary mat material laid above the  gelled rubber powder, then the whole laminate goes through  the  pressing process under  pressure  of  120-200  kg/cm2  for  2-6  min.  The laminated structure functions as a floorcovering in the automobile without slippage phenomenon which causes  obstruction  during  car driving.
Patent KR-940004026-B1 (KR)
Inventor: BOSSAERT BERNARD L L
IPC: B32B27/32
Filed: 1987-05-29
Granted: 1994-05-11
Abstract: 내용 없슴.
Patent KR-920002053-B1 (KR)
Inventor: KOBARI KATSUO
IPC: H05K1/14
Filed: 1987-12-18
Granted: 1992-03-10
Abstract: 내용 없음.
Patent KR-950001615-B1 (KR)
Title: Method of fixing the first position for recording
Inventor: HONG SANG-BOM
IPC: G11B27/029
Filed: 1989-03-30
Granted: 1995-02-27
Abstract: The method includes a first step of entering into a record initial position setting mode by a record blank key inputting and clearing when the blank set amount is more than 180 minutes, by increasing each 10 minutes according to the blank set amount, in case of a length key inputting; a second step of judging again whether the length key is inputted or not if a start key is not inputted, and setting a timer if the start key is inputted; a third step of stopping in case of the end sensor and for judging whether there is a video signal or not in case of no end sensor; a fourth step of putting on the timer if there is no video signal in the third step, increasing a reel pulse signal, judging whether the timer is zero, and again performing the third step in case of not zero; and a fifth step of rewinding if the timer is zero in the fourth step, receiving the reel pulse signal, and reducing a counting, and of performing again the rewinding if this counting value is not zero and stopping and record-posing in case of zero.
Patent KR-960008584-B1 (KR)
Inventor: UTSUMI SHIGEO
IPC: B32B27/36
Filed: 1989-04-17
Granted: 1996-06-28
Abstract: 내용없음.
Patent KR-960014416-B1 (KR)
Inventor: NISHIJIMA KAZUO
IPC: H04B3/54
Filed: 1989-04-21
Granted: 1996-10-15
Abstract: 내용없음.
Patent KR-920001684-B1 (KR)
Title: Voice service method in keyphones
Inventor: LEE YONG-SANG
IPC: H04M1/64
Filed: 1989-05-31
Granted: 1992-02-22
Abstract: The method provides an audio guide function  by  connecting an automatic responding device to a keyphone  system.  The  method includes the steps of: checking whether a calling is  made  to  an automatic responding apparatus or to an  intra-station  subscriber line, or whether a calling is made  from  an  inter-station  line; checking  whether  the  calling  contains  an   absence   message; recording the absence message; regenerating the  absence  message; checking whether the calling from an inter-station line  wants  to hear the  recorded  message  or  to  talk  with  an  intra-station subscriber; outputting the recorded message  upon  encountering  a request for the  recorded  message;  and  recording  the  caller's message to a tape upon encountering a caller's desire to  talk  to the subscriber.
Patent KR-910002639-B1 (KR)
Title: Liquid composition having low temperature stability
Inventor: NISHITA YUWOOICHI
IPC: A61K47/32
Filed: 1989-06-30
Granted: 1991-04-27
Abstract: A liquid composition containing a crystalline compound dissolved in a solvent, which comprises at least one kind of amphoteric polymers containing a structural unit represented by the following formula [I]: <CHEM> wherein R<1> is a hydrogen atom or a methyl group, R<2> is an alkyl group having a carbon number of 8 to 20 or a cycloalkyl group having a carbon number of 5 to 7,  formulated in said composition. The liquid composition according to the present invention is excellent in a low-temperature stability, with turbidity of the solution or precipitation of the crystals being hardly observed even when stored at a low temperature over a long period.
Patent KR-920000734-B1 (KR)
Inventor: GASAI MASAKI
IPC: A61B5/154
Filed: 1989-07-29
Granted: 1992-01-21
Abstract: 내용 없음.
Patent KR-920010100-B1 (KR)
Title: Red color fluorescent substance
Inventor: KIM MIN-HO
IPC: C09K11/77
Filed: 1989-09-07
Granted: 1992-11-14
Abstract: The red fluorescent material composed  of  (Al,Ln,Eu):BO3  is produced by adding Sc, Lu, La and/or Y cpd.  to  Al2O3  and  boron cpd. (B2O3 or H3BO3) to obtain a basic material, mixing the  basic material with europium oxide and Li2CO3, Na2CO3, Li2B4O7 or alkali (earth)metal halide in the ball mill, first-firing the mixture  in the quartz or alumina crucible at 450-800 deg.C for 1-3 hr, second firing the fired material at 1100-1600 for 1-6  hr,  cleaning  the fluorescent material with 10  %  HCl  soln,  and  drying  it.  The fluorescent material has a  good  luminance,  and  is  used  in  a cathode ray tube.
Patent KR-920006850-B1 (KR)
Inventor: NISHITA KENJI
IPC: H01L21/225
Filed: 1989-09-27
Granted: 1992-08-20
Abstract: 내용 없음.
Patent KR-970003946-B1 (KR)
Title: Far-infrared radiator material and production thereof
Inventor: LEE DON-HEE
IPC: C04B26/04
Filed: 1989-10-14
Granted: 1997-03-24
Abstract: The ceramic far infrared emission is produced by blending a ytrria( Y2O6), a lanthanum trioxide( La2O6) and a cerium oxide( CeO2) with 30 weight% of 3% PVA solution and 100 weight% of zirconium oxide( ZrO2) powder which is treated with the solid solution beforehand. The produced ceramic far infrared emission is shaped as a tubular tube through an extruding machine and has an inhibitory effect on the occurrence of the fissure and the detachment by the heat shock.
Patent KR-0125778-B1 (KR)
Inventor: YOSHIDA TETSUSHI
IPC: C09K19/44
Filed: 1988-10-15
Granted: 1997-12-18
Abstract: 없음
Patent KR-960014380-B1 (KR)
Inventor: BENEKE ULRICH
IPC: E05F/
Filed: 1988-11-25
Granted: 1996-10-15
Abstract: 내용 없음.
Patent KR-930011624-B1 (KR)
Title: Process for the production of materials and materials producted by the process
Inventor: KOSLOW EVAN E
IPC: B29C67/24
Filed: 1990-02-23
Granted: 1993-12-16
Abstract: A method of forming a composite material by providing a quantity of first particles of a binder material and a quantity of second particles of a primary material having a softening temperature substantially in excess of the softening temperature of the binder material. The first and second quantities of particles are combined into a substantially uniform mixture. The uniform mixture is heated in the absence of pressure or shear sufficient to convert the binder particles, to a temperature substantially above the softening point of the binder material but less than the softening temperature of the primary material. Thereafter, pressure and shear are applied to the heated mixture sufficient substantially immediately to convert at least a portion of the binder material particles into a substantially continuous webbing structure or force the formation of point-bonds. Substantially immediately after formation of the binder particles into this unique structure, the mixture is rapidly cooled to below the softening point of the binder material to retain the converted binder material in its continuous form or forced point-bonded condition. This produces the composite material composed of primary particles, a binder resin phase forming a continuous web matrix or point bonds, and a volume of empty pores. Also disclosed are products formed by the method.
Patent KR-930003877-B1 (KR)
Inventor: TANAKA MASATO
IPC: H01L21/306
Filed: 1990-04-25
Granted: 1993-05-14
Abstract: 내용 없음.
Patent KR-930011691-B1 (KR)
Inventor: SHIMODASHIRO MASAFUMI
IPC: G11B5/48
Filed: 1990-07-20
Granted: 1993-12-18
Abstract: 내용 없음.
Patent KR-0145700-B1 (KR)
Title: Tube bundle heat exchanger
Inventor: LACHMANN HELMUT
IPC: F28D7/16
Filed: 1990-09-03
Granted: 1998-08-17
Abstract: A nested-tube heat exchanger with tubes (1) secured at each end in tube plates (3 & 4) for transferring heat between a hot gas that flows through the tubes (1) and a liquid or vaporous contact that flows around the pipes. The tube plates are secured to a jacket (2) that surrounds the nest of tubes. One of the tube plates has parallel cooling channels (7) in the half that faces away from the jacket with coolant flowing through the cooling channels. The tube plate has bores (15) that open into the jacket, communicate with the cooling channels, and concentrically surround the tubes. The tube plate that has the cooling channels is at the gas-intake end of the heat exchanger. The tubes in each row extend through cooling channels. The base (12) of the cooling channels on the side that is impacted by the gas is uniformly thick.
Patent KR-940006686-B1 (KR)
Inventor: SONG KANG-HYON
IPC: H01L27/14
Filed: 1990-10-29
Granted: 1994-07-25
Abstract: 내용 없음.
Patent KR-930007656-B1 (KR)
Title: Process for preparation of transparent toothpaste containing crystal salt
Inventor: CHO SANG-HYON
Filed: 1990-12-13
Granted: 1993-08-18
Abstract: The transparent  tooth  paste  compsn.  is  produced  by  (a) dissolving 3-15 wt.% salt in a  liquid  component  composed  of  a refined water and a polyalcohol to a saturated state,  (b)  adding the water and the polyalcohol  to  the  dissolved  soln.  to  have 1.42-1.47 refractive index, (c) adding 5-30 wt.% silica  abrasive, a foaming agent,  a  perfume,  a  sweetner,  a  pH  regulator,  an antiseptic,  a  coloring   agent,   a   binder   and   a   carious tooth-preventing agent  to  make  a  tooth  paste  base,  and  (d) dispersing 2-15 wt.% granular or crystalline salt  of  250-800 μm particle size into the base.
Patent KR-100196625-B1 (KR)
Inventor: ANDERSON ROGER N
IPC: C23C16/44
Filed: 1991-03-08
Granted: 1999-06-15
Abstract: 웨이퍼상에 에피택셜 침전을 위한 열반응기는 두 개의 반구형 용기와 두 개의 열원들을 포함한다. 각 열원들은 적외선 램프들의 내부 및 외부 배치부들을 포함한다. 원주방향의 가열 균일성은 용기의 원통형 대칭 및 열원들에 의하여 보장된다. 방사방향의 가열 균일성은 상부 및 하부 열원들을 위한 내부 및 외부 가열배치부들의 독자적인 제어에 의하여 제공된다. 웨이퍼 및 서셉터 및 상대적인 온도 및 뒷면 이동이 상부 및 하부 열원들에 의하여 제공된 상대적인 에너지들을 조정하는 것에 의하여 제어된다. 감소된 압력 작용은 볼록한 상부 및 하부 반구형체들에 의하여 제공된다. 전달된 에너지 분산 이상 제공된 제어에 기인하여, 서셉터는 상승된 온도가 보다 빠르게 성취될 수 있고 냉각이 용이하게 될 수 있도록 저열량체를 가진다. 이러한 것은 처리량을 개선하고 웨이퍼당 제조비용을 감소시킨다. 반응가스 주입은 방사상 또는 축선방향 어느 방향으로도 가능하다.