baber/WOPTO huggingface dataset:
Patent KR-20000046163-A (KR)
Title: Software framework's organization for decentralized multimedia data processing
Inventor: KIM DONG SEONG
IPC: G06F15/00
Filed: 1998-12-31
Abstract: PURPOSE: A software framework's organization for decentralized multimedia data processing is disclosed to easily materialize the decentralized network programming by using CORBA and to minimize the overhead occurred in-band module's transfer of stream by using UDP/ID to create, process, and transmit data instead of using CORBA. CONSTITUTION: A software framework's organization for decentralized multimedia data processing is composed of application program(30), CORBA, out-of-band module(40), in-band module(50), CORBA ORB(60), and message passing interface(70). Out-of-band module provides API(Application Processing Interface), which is designed to form a stream graph that has been magnified from application program to the decentralized environment. In-band module composed of serve modules that create, process, transmit, regenerate, and terminate video/audio or video or audio's stream data. CORBA ORB mediates the transmission of data between application program and out-of-band module. Message passing interface mediates the data transmission between out-of-band module and in-band module. Out-of-band module and in-band module are composed of thread A and B. In-band module is composed of processing serve module(51) and transmission serve module between networks(52).
Patent KR-20000046378-A (KR)
Title: Improved inter processor communication apparatus in full electronic switching system
Inventor: KIM MIN SOO
IPC: H04L12/40
Filed: 1998-12-31
Abstract: PURPOSE: An improved inter processor communication apparatus in the full electronic switching system is provided to achieve the inter processor communication structure of a dual network type. CONSTITUTION: To an HIPCU(HIgh Inter Processor Communication Unit) network(320), OMP's(Operation and Maintenance Processors)(304a,304b) and NTP's(Number Translation Processors)(305a,305b) are directly connected. The HIPCU(320) is connected with an INS(Interconnection NeTwork Subsystem)(330) by a cable. Each IPCU network(310-1-310-n) comprises maximum two ASP's(ASP A,ASP B) connected directly in the cross-linked form. PP's(Peripheral Processors)(302,303) are connected to the each IPCU(310-1-310-n) network through a buffered global bus by a PP global bus gateway node in the crossed form.
Patent KR-19990044471-A (KR)
Title: 개량의 유기점토 조성물을 포함하는 제제
IPC: C09D7/12
Filed: 1996-09-06
Abstract: 점토 100 g(활성 기제) 당 적어도 50 meq. wt.의 이온교환 용량을 가진 스멕타이트형 점토와, 0-10 몰의 에틸렌옥시드와 3-15 몰의 프로필렌 또는 부틸렌 옥시드 잔류물들을 함유하는 일 또는 이의 알콕실화 연쇄를 가진 알콕실화 제4급 암모늄 화합물의 반응생성물을 함유하고 있는 유기점토 조성물들은, 유액 페인트 제제 따위의 특히 수성계통의 조제에, 유용한 요변성 물질이다.
Patent KR-19990044640-A (KR)
Title: 온 스크린 디스플레이 타이밍 장치
IPC: H04N5/92
Filed: 1996-09-13
Abstract: 소비자 디지탈 레코더 플레이어(200)에서 MPEG 처리의 부재는 레코더 상태의 온 스크린 메시지 디스플레이를 방해할 수 있다.  그러한 레코더 플레이어 상태 메시지의 온 스크린 디스플레이를 용이하게 하는 다양한 방법이 개시되어 있다.  제1 실시예는 상태 메시지의 삽입을 위해 재생된 디코딩 아날로그 비디오 신호(102)를 디지탈 레코더 플레이어(200)에 복귀시킨다.  추가의 실시예에서, 레코더 메시지 데이타(221)는 상기 디코딩 아날로그 비디오 신호(102)와 함께 포함하기 위해 디지탈 신호 디코더(100, 117, 520)에 결합된다.  다른 실시예에서, 레코더 메시지 명령(TAG/CMD)은 레코더 특정 그래픽 메시지를 액세스하도록 디코더(100, 510)에 결합된다.  또 다른 실시예에서,  레코더 메시지 데이타(271)는 태그되고 사용가능한 경우 레코더 특정 그래픽 메시지를 선택하거나 레코더 메시지 데이타를 디스플레이하도록 상기 디코더(100, 510)에 결합된다.  또 다른 실시예에서, 디지탈 또는 아날로그 동작 모드는 재생된 디코딩 비디오 신호에 대하여 레코더(200) 메시지 디스플레이 타이밍을 결정한다.
Patent KR-19990082144-A (KR)
IPC: F24F11/00
Filed: 1997-12-23
Abstract: Improved alarm clork comprising a clock or watch, time display means, alarm means, means for generating a first number, said number being a random number, means for displaying the random number when the alarm goes off, means for displaying a second number, means for manually modifying said second number and/or said first number, and means for stopping the alarm sound when a predetermined relationship between the first number and the second number is displayed, for example when the first number coincides with the second number. <IMAGE>
Patent KR-19990087670-A (KR)
Title: 판금 보수용 광경화성 퍼티
Filed: 1997-03-06
Abstract: 본 발명은 무해 가시광선에 의해 빠르게 경화되는 판금 보수용 광경화성 일액형 퍼티를 제공한다. 
     본 발명의 판금 보수용 광경화성 퍼티는 (a) 비스페놀 A형 에폭시 디(메트)아크릴레이트 100 중량부 [성분 (a) 내지 (c)의 총량을 기준으로 33.3 중량% 내지 73.5 중량%]; 
     (b) 광중합성 (메트)아크릴레이트 1 내지 100 중량부 [성분 (a) 내지 (c)의 총량을 기준으로 0.7 중량% 내지 33.3 중량%]; 
     (c) 분자 당 두 개 이상의 (메트)아크릴로일옥시기를 갖는 광중합성 우레탄 올리고머 35 내지 100 중량부 [성분(a) 내지 (c)의 총량을 기준으로 25.7 중량% 내지 33.3 중량%]; 및 
     (d) 성분 (a) 내지 (c)의 총량 100 중량부를 기준으로 광개시제로서 α-디케톤 0.01 내지 10 중량부, 감광제로서 3차 아민 0.01 내지 10 중량부 및 광반응 촉진제로서 오늄염 0.01 내지 5 중량부를 포함한다.
Patent KR-20000005434-A (KR)
Title: Apparatus and method for measuring ventilation flow exiting a spinning rotor
Inventor: BERRONG DAVID B
IPC: G01F1/72
Filed: 1996-04-10
Abstract: PURPOSE: An apparatus and method is provided to measure the circumferential flow distributions around the rotor shaft. CONSTITUTION: An apparatus and method employs a hot anemometer(50) to measure flow distributions around the rotor shaft, i.e., circumferential flow distributions. A hot film anemometer has a sensor generating signals indicating an operating speed of circumferential rotor body vent holes(26).
Patent KR-20000010589-A (KR)
Title: Improved chemical process for preparing amide derivatives of antibiotic a40926
Inventor: PANZONE GIANBATTISTA
IPC: C07K1/02
Filed: 1997-04-15
Abstract: PURPOSE: A compound of formula (I) is provided a more convenient process for preparing amide derivatives of antibiotic A40926. CONSTITUTION: The process comprises the steps of: preparing an intermediate compound of formula (III) by reacting a compound of formula (I) with an alkanol, the number of carbons of which is 1-4, in the presence of a concentrated mineral acid, using the same alkanol as the reaction solvent, followed by submitting the obtained ester compound to a reductive process by adding an alkali metal borohyde into the same reaction mixture; reacting a compound of formula (III) with a suitable amine of formula (IV) (NHR3-alk1-(NR4-alk2)-(NR5-alk3)q-W), in an inert organic solvent, in the presence of a condensing agent and setting the initial pH of the mixture at a value of from 6.5 to 9.0. In the formula I, II, III and IV, R1 is C9-C12 alkyl; M is hydrogen, alpha-D-mannopyranosyl or 6-O-acetyl-alpha-D-mannopyranosyl; Y is NR2-alk1-(NR3-alk2)p-(NR5-alk3)q-W.
Patent KR-20000010625-A (KR)
Title: Absorbent materials having improved structural stability in dry and wet states and making methods therefor
Inventor: REZAI EBRAHIM
IPC: C09J7/00
Filed: 1997-04-24
Abstract: PURPOSE: An absorbent material having improved structural stability in the dry and wet states is provided, which is not subject to shifting of the absorbent gelling particles during or after swelling by fluids. Also provided are a manufacturing method of the absorbent materials, and the absorbent products comprising the absorbent materials. CONSTITUTION: The absorbent material is comprised of:(a) absorbent gelling particles comprising a water-insoluble absorbent hydrogel-forming polymer(WAHP; 50-90wt.%); (b) a polycationic polymer bonded to the absorbent gelling particles at the surface thereof(0.1-10wt.%); (c) glue microfibers dispersed in the absorbent gelling particles(1-10wt.%); and (d) a carrier layer bonded to the absorbent gelling particles through the glue microfibers(5-50wt.%); which is manufactured by apparatus of drawing 1.
Patent KR-20000016081-A (KR)
Title: Reinforcement device of wrinkle packing material for convex object
Inventor: GAVY GIBERT
IPC: B65D65/12
Filed: 1997-05-27
Abstract: PURPOSE: A reinforcement device of a wrinkle packing material for a convex material is provided to make a thin film sheet having a fold unit that is fixed in the end part for having resistance or a vertical load. CONSTITUTION: A reinforcement device is fixed in areas(5,6) by cutting and fixing the center part of the areas that are divided by a fold unit(4) of a thin film sheet(1), and is reinforced by a semi-steel material strip(19) that is connected by a hinge(3) folding the sheet by a folding device, connecting the fold unit and composed of the thin film sheet. A width(9) of a hinge(12) is bigger than each thickness(10,11) of reinforcing pieces(7,8) if the reinforcing pieces are directly contacted by folding the packing material. The reinforcing piece has a cutting unit that is placed in parallel with the fold unit of the thin film sheet by aligning in the fold unit corresponding to AB distance(36) from the section of a width A area(32).
Patent KR-20000016349-A (KR)
Title: Connecting telephones, fax machines and computers in intelligent network
Inventor: HASSELGREN JOAKIM
IPC: H04Q3/545
Filed: 1997-06-03
Abstract: PURPOSE: A method of setting up a connection between a first terminal (A), which may be a calling telephone, telefax machine, computer or other equipment that can make a call, and a second terminal (Ct, Cf) which may be a called telephone (Ct) on the one hand or, on the other hand, a called telefax machine (Cf), a computer (Cf) or other equipment that can receive a call, is provided. CONSTITUTION: The first terminal calls a subscriber number, a fictitious response is sent to the first terminal and monitoring of the first terminal is commenced so as to identify the type of terminal concerned with the aid of possible signals and/or a possible message, while a called telephone is ordered to commence ringing. When signals or a message are/is detected, the called telephone is ordered to stop ringing and the possible message is received and sent to a second terminal or else the called telephone is connected to the first terminal.
Patent KR-20000050390-A (KR)
Inventor: MA BYONG IN
IPC: G11B7/08
Filed: 1999-01-08
Abstract: PURPOSE: A method for detecting tangential tilt of an optical disk drive and suitable apparatus thereof are provided not to necessary for an additional tilt detecting sensor by detecting a tangential tilt using a synchronous signal recorded in a header region of a disk. CONSTITUTION: A reproduction signal generator(140) generates signals, a subtracted signal and an added signal generated in light receiving devices of 4-divided optical detector. A header interval signal generator(152) generates a header interval signal for indicating a header region from a push-pool signal generated in the reproduction signal generator (140). A first synchronous signal level detector(144) detects a size (V1) of a synchronous signal among signals provided from a switch(S3) after being synchronized to the header interval signal(12) generated by the header interval signal generator(142). A second synchronous signal level detector(146) detects a size (V3) of a synchronous signal among signals provided from a switch(S1) after being synchronized to the header interval signal(34) generated by the header interval signal generator(142). A balance operating unit(154) operates a ratio between the V1 detected by the first synchronous signal level detector(144) and the V3 detected by the second synchronous signal level detector(146). A comparing unit(156) compares a balance value(T1) operated by the balance operating unit(164) with a predetermined reference value(T0) and outputs a difference of two values(T0,T1). A polarity inverting unit(160) inverts a polarity of the difference value outputted from the comparing unit(156). A tangential tilt adjusting unit(134) adjusts a tangential tile according to the polarity-inverted difference value. A mirror interval signal generator(150) generates a mirror interval signal for indicating a mirror region from the addition signal generated from the reproduction signal generator (140).
Patent KR-19990067969-A (KR)
Title: 액정 디스플레이 셀에 있는 액정 주입홀을 충전하는 장치 및 방법
IPC: G02F1/1341
Filed: 1999-01-19
Abstract: 액정 디스플레이 셀 (2) 내부로 액정을 주입하기 위하여 액정 디스플레이 셀 (2) 에 형성된 홀 (32) 를 충전시키기 위한 장치가 제공되며,  상기 장치는 (a)   자외선이 조사될 때 경화되는 수지 (31) 를 홀 (32) 에 도포하는 수지 도포부 (5) 와,  (b) 수지에 자외선을 조사하는 자외선 조사부 (7) 를 포함하며,  (c) 수지가 도달하는 홀에서의 위치를 검출하는 위치 검출부 (6) 를 또한 포함하며,  자외선 조사부는 수지가 소정의 위치 (30) 에 도달했는지를 위치 검출부가 검출하는 경우에 수지에 자외선을 조사하는 것을 특징으로 한다.    상기 장치는  홀에서의 소정 위치에 수지가 도달할 수 있게 하고,  수지를 홀에 자동적으로 도포하며,  이 수지를 경화시킬 수 있다.
Patent KR-20000055980-A (KR)
Inventor: HONG HYO JUNG
IPC: A61K39/00
Filed: 1999-02-12
Abstract: PURPOSE: A humanized antibody to surface antigen free-S 2 of hepatitis B virus(HBV) is provided, which maintains similar antigen-binding abilities with existing humanized antibody, but diminishes immune-causing abilities than existing humanized antibody obviously, so which can be used to prevent HBV infection and to treat the chronic hepatitis B. CONSTITUTION: A process for the preparation of humanized antibody to HBV surface antigen free-S 2 comprises of: preparing humanized heavy-chained genes; preparing humanized light-chained genes; preparing representing vector(pCMV-HS2(II)HC) producing humanized heavy-chain; preparing representing vector(pKC-dhfr-HS2(II)) producing humanized light-chain; culturing COS7 cells, and washing with OPTI MEM I; mixing pCMV-HS2(II)HC, pKC-dhfr-HS2(II) and Lipofectamine, adding OPTI MEM I, and pouring the mixture over the COS7 cells, culturing, concentrating, and measuring the concentration of the humanized antibody in COS7 cell; investigating binding ability of humanized antibody to HBV surface antigen free-S2; and investigating binding affinity to antigen of humanized antibody.
Patent KR-20000059818-A (KR)
Inventor: KIM SUN SIK
IPC: C08J7/04
Filed: 1999-03-09
Abstract: PURPOSE: A method for preparing an antireflection film is provided, which antireflection film is hardly polluted by or a fingerprint or impurities, is used to a flat display apparatus, and is easily produced massively. CONSTITUTION: The method comprises the steps of preparing the coating solution which is made by mixing the UV curing resin composition consisting of a UV curing acryl urethane-based resin, a photopolymerization initiator and a solvent; the silica dispersion composition consisting of an acryl-based resin having intramolecular hydrophilic groups, silica particle, a dispersing agent and a solvent; and a diluent; coating a substrate sheet(1) with the coating solution; drying the coating; exposing the coating to UV to cure the coating to form UV curing resin layer(2) where silica particles(3) are dispersed; and coating the resin layer with a fluorine-based silane coupling agent to form the fluorine-containing layer(4).
Patent KR-19990046449-A (KR)
Title: 고형얼음성형기
Filed: 1999-03-13
Abstract: 본 발명은 고형얼음을 짧은 시간내에 다량으로 성형할수 있도록 함과 아울러, 성형된 고형얼음이 녹지 않도록 장시간동안 보관시켜 줄 수 있도록 한 고형얼음 성형기에 관한 것으로, 이는 본체(200)의 내부 하단에 상,하 좌,우로 이동하면서 담겨진 물을 분사시켜 줄수 있도록 하는 물분사부재(300)를 형성하고, 상기 물분사부재의 직 상단에 위치하여 분사되는 물이 얼려져 고형얼음을 성형시켜 줄수 있도록 하는 고형얼음성형부재(400)를 형성하며, 상기 고형얼음성형수단의 일측 하단부에는 성형된 고형얼음을 저장시켜 주는 저장부재(500)로 형성하여 물의 공급에서 부터 얼음의 성형및 저장을 순차적으로 이루질수 있도록 한 것을 특징으로 한다.
Patent KR-20000061448-A (KR)
Inventor: BAEK SEONG SIK
IPC: G06F9/00
Filed: 1999-03-26
Abstract: PURPOSE: A melody update system and method is provided to make it easy updating a melody of a wireless communication terminal by connecting the communication terminal to a serial port of a computer. CONSTITUTION: A melody update method comprises steps of a computer starting a melody update according to a user's request(300), loading a melody file on a memory of the computer(302), selecting the user's desired melody from the melody file(304), connecting a wireless communication terminal to a serial IO port of the computer(306), converting a current mode of the communication terminal into a melody update mode(308), selecting one title number among the melodies stored in the communication terminal to replace with an updated melody(310), transmitting the selected melody from the computer to the communication terminal(312), and assuring the transmission of the selected melody.
Patent KR-20000062009-A (KR)
Inventor: LEE CHANG JIN
IPC: A61K8/97
Filed: 1999-03-30
Abstract: PURPOSE: A cosmetic compact containing ginseng that has anticancer functions as well as fortifies immune system of human is provided. CONSTITUTION: To achieve the above object, original ginseng get through several processes such as washing, trimming and the like. After the processes, ginseng is processed in the forms of powder, granule, and liquid phase. The obtained ginseng is added in the preparation process of the cosmetic compact.
Patent KR-19990083075-A (KR)
IPC: H01L21/316
Filed: 1999-04-09
Abstract: 친수성 산화막을 성장시키기 위한 실리콘 웨이퍼의 예열처리 공정은 이 웨이퍼를 프리-클린 SC-1 중탕과 접촉시키는 초기 단계를 포함하고, 이로써 상당히 입자가 제거된 실리콘 웨이퍼 표면을 생성한다.  탈이온수 린스 이후에, 웨이퍼 표면에서 금속-함유 산화물을 제거하기 위하여 플루오르화수소산 및 염산을 함유한 수용액으로 이 웨이퍼를 세척한다.  친수성 산화막을 성장시키기 위하여, (과산화수소 및 묽은 농도의 금속-세척 HCl을 함유한) SC-2 중탕을 이용한다.  결합된 SC-1 → HF/HCl → SC-2 웨이퍼 세정공정을 이용하여 실리콘 웨이퍼 표면상에 성장된 결과로써 생긴 친수성 실리콘 산화막은 1×10 9 보다 크지 않은 금속 농도를 갖는다.  소수 캐리어의 확산 길이는 500-600 미크롱 차수의 범위로부터 800-900 미크롱 차수의 범위까지 증가된다.
Patent KR-19990064566-A (KR)
Title: 바이오 소닉 초음파겔 및 그의 용도
Filed: 1999-04-12
Abstract: 본 발명은 소디움카르복시메틸셀룰로오스(SodiumCarboxymethycellulose), 알로에베라 및 DL-Panthenl 등으로 제조된 바이오소닉(Biosonic) 초음파 겔 및 그의 용도에 관한 것이다. 
     초음파 검사용 겔의 제조방법에 있어서, 
     소디움카복시메닐셀룰로오스(SodiumCarboxymethycellulose) 0.2∼5중량부,알로에추출액0.2∼5중량부,디엘펜타놀(DL-Panthenol)0.2∼2중량부,카보폴940 0.2∼5중량부, 카보폴941 0.2∼5중량부, 글리세린 0.2∼5, 트리에탄올아민0.2∼5중량부, 색소0.1∼0.5중량부 및 안식향산 나트륨(Sodium Benzoate)0.02∼0.5중량부를 상기에서 준비한 3차증류수를 상온에서(25∼30℃) 넣어 혼합기에 투입한 후 10∼20rpm의 속도로 약 2시간 정도 교반하여 제조된 조성물을 진공 살균과정 및 포장과정을 통하여 제조됨을 특징으로 하는 초음파 검사용 겔 및 그의 제조방법과, 초음파 검사용겔을 피부보습제, 임산부의 배나 엉덩이 트임방제제 및 물리치료실에서 사용하는 겔로 사용하는 방법
Patent KR-20000066310-A (KR)
Inventor: PARK CHANG WON
IPC: C09K11/00
Filed: 1999-04-15
Abstract: PURPOSE: Provided is a composition for forming a pigment-adhered fluorescent material, which improves falling off of a pigment and reduces a fault in the pigment film. Also the manufacturing time of a pigment-adhered fluorescent material is shortened. CONSTITUTION: The composition contains a pigment, a fluorescent material, a dispersion agent, a binding agent and 0.01-1.0wt%(based on total weight of fluorescent material) of a hardening agent. The hardening agent is carboxylate selected from the group consisting of sodium acetate and ammonium acetate. The process for producing the pigment-adhered fluorescent material comprises the steps of: i)preparing pigment dispersion solution produced by mixing a pigment, a first binding agent and purified water; ii)preparing mixed dispersion solution produced by adding the fluorescent material and a second binding agent to the pigment dispersion solution; iii)controlling pH of the mixed dispersion solution with isoelectric point; and then iv)adding carboxylate selected from sodium acetate and ammonium acetate to the pH-controlled solution.
Patent KR-20000072852-A (KR)
Inventor: KIM JU TAE
IPC: E01C23/08
Filed: 1999-05-01
Abstract: PURPOSE: A structure is provided to restrain high speed passage of a vehicle on a paved road and to prevent a vehicle from slippage. CONSTITUTION: A slippage preventing structure(100) is formed by the following sequence. A main seat(110) is formed by coating liquid unsaturated polyester resin on a fiberglass. Protrusions(120) made of mixture of unsaturated polyester resin, sand and stone powder are formed onto the main seat. On the upper front and rear of the main seat, liquid unsaturated polyester resin is coated to form a slant guide unit(130). An adhesive agent(140) is coated on the bottom of the main seat. Finally, a removal sheet is attached on the adhesive agent. According to the application of the adhesive agent, an adhesive force is strengthened.
Patent KR-19990088067-A (KR)
Title: 세팔로스포린계화합물및이의제조방법
Filed: 1999-05-06
Abstract: 본 발명은 다음 화학식 1의 세팔로스포린계 화합물, 약제학적으로 허용되는 그의 무독성 염, 생리학적으로 가수분해 가능한 그의 에스테르, 수화물 및 용매화물, 또는 이들의 이성질체 및 이의 제조방법과 이 화합물을 함유한 항생제 조성물에 관한 것이다: 
     [화학식 1] 
     
       
     
     상기식에서, A는 수소 또는 아미노 보호기이며, R 1 은 수소이거나, 산소 또는 할로겐이 한 개 내지 세 개를 포함할 수 있는 C 1-6 알킬기, C 3-4 알케닐기, 질소 원자 하나를 포함할 수 있는 C 3-4 알키닐기, C 3-6 의 시클로알킬기 또는 시클로알킬메틸기이거나, 질소원자나 산소 원자를 한 개 내지 두 개를 포함하는 C 5-6 헤테로아릴메틸기를 나타내고, R 2 는 수소 또는 카르복실 보호기이며, W는 치환 또는 비치환된 아민기, 히드록실기, C 1-4 알킬기를 나타내며, Y, Z는 각각 서로 다르며, C 또는 N을 나타내며, Q는 CH, CX 또는 N이며, 여기서 X는 할로겐을 나타낸다.  본 발명의 화합물은 강력한 항미생물 활성과 광범위한 항균 스펙트럼 및 약물 동력학적 특성이 크게 향상되며 또한 경구투여용으로 사용하는 경우에도 효과가 우수한 세팔로스포린계 항생제이다.
Patent KR-20000073541-A (KR)
Inventor: KIM SANG SU
IPC: E02D29/02
Filed: 1999-05-12
Abstract: PURPOSE: A tree-planting retaining wall is provided to be partly planted on exposed portions to be harmonized with nature. CONSTITUTION: A tree-planting retaining wall(30) forms a composition ground(50) on a mountain or slant ground and installs anchor girders at regular intervals on the composition ground. The anchor girder installs an inserting groove(38) and a concrete rack(40) is inserted into the groove. The anchor girder installs an anchor groove near the inserting groove and a ground anchor or a lock bolt is inserted into the groove as a fixer. Thus, the anchor girder is fixed to the mountain or the slant ground.
Patent KR-20000074726-A (KR)
Inventor: PARK JEONG GYU
IPC: H01L21/66
Filed: 1999-05-25
Abstract: PURPOSE: A single wafer type semiconductor manufacturing apparatus is provided to maintain and control temperature of a wafer suitable for a real process temperature during a process, by precisely and directly measuring the temperature of the wafer. CONSTITUTION: A single wafer type semiconductor manufacturing apparatus comprises a susceptor(32), a heating unit and a temperature measuring unit. A wafer(34) to be processed is placed in the susceptor. The heating unit controls the temperature of the wafer, established in a lower part of the susceptor. The temperature-measuring unit is established in a lower part of the heating unit. The single wafer type semiconductor manufacturing apparatus further comprises a wafer temperature-measuring unit which directly measures the temperature of a rear surface of the wafer.
Patent KR-20010003112-A (KR)
Inventor: JANG U HYEOK
IPC: G02F1/01
Filed: 1999-06-21
Abstract: PURPOSE: A method for manufacturing a hot optical switch is provided to have a switch speed lower than a specific degree and to have a low driving power by decreasing a distance of an electrode, waveguide and heat sink as well as reducing combination loss with an optical fiber lower than 0.5dB/facet. CONSTITUTION: Both specific areas for positioning input/output tapers on a heat sink substrate(610) are etched to 10-15 micrometers in depth. A lower clad layer(620) is formed on the substrate. The input/output tapers are formed by photolithography and etching of the lower clad layer. A core layer(630) with a specific thickness is formed on the lower clad layer by using a material having a refractive index of 1-2% with the lower clad layer. A rib core is formed on the core layer through photolithography and etching. Then, an upper clad layer(640) is formed on the core layer by using a material having a refractive index of 1-15% with the core layer. Finally, a conductive metal film is put on the upper clad layer and an electrode(650) is formed by photolithography and etching.