baber/WOPTO huggingface dataset:
Patent KR-20020039695-A (KR)
Title: An antenna device for transmitting and/or receiving rf waves
IPC: H01Q3/24
Filed: 2000-10-24
Abstract: An antenna device for transmitting and/or receiving RF waves connectable to a radio communication device and including a radiating structure with at least two switchable antenna elements. At least one switching element, arranged in a central switching unit, selectively connects and disconnects the at least two switchable antenna elements. The at least two antenna elements can be individually switched between different coupling states by the central switching unit. The central switching unit has a control port for reception of control signals enabling the central switching unit to effect a centralized switching of said at least two switchable antenna elements.
Patent KR-20020049033-A (KR)
IPC: H04L1/06
Filed: 2000-10-25
Abstract: 복수의 안테나(ANT 1 , …, ANT n )를 이용하여 수신한 신호에 대하여, 웨이트 벡터 계산기(4)에 의해 계산되어 메모리(3)에 기억되어 있던 이전의 프레임의 웨이트 벡터를 적용하여 간섭파 성분의 제거를 행한다.  간섭파 성분이 제거된 신호로부터 상관 동기의 방법에 의해 동기 위치를 검출하고, 웨이트 벡터 계산기(4)에 입력한다.  웨이트 벡터 계산기(4)는 검출된 동기 위치를 개시 위치로 하여 웨이트 벡터의 계산 처리를 실행한다.  이에 의해 동일 주파수의 신호가 중첩되어 CS에서 수신된 경우에 소망의 PS로부터의 수신 신호의 동기 위치를 정확하게 특정할 수 있다.
Patent KR-20020070439-A (KR)
Title: 전기화학 전지 장치에 사용하기 위한 격리판의 처리 방법
IPC: H01M50/426
Filed: 2000-10-19
Abstract: 본 발명은적층된 다층 전기화학 전지 장치 구조물에 사용하기 위한 격리판의 처리 방법에 관한 것이다.  장치는 중합체 매트릭스 조성물의 양극(12) 및 음극(18)과 사이에 삽입된 미세다공성 폴리올레핀 막 격리판 부재(16)를 포함한다.  격리판은 중합체 코팅 층 및 가소제 층이 제공되도록 처리된다.  가소제는 이어서 격리판으로부터 휘발되나; 이의 일시적인 존재로 인하여 전극 및 격리판 사이의 접합이 촉진된다.
Patent KR-20020062316-A (KR)
IPC: A01M1/20
Filed: 2000-10-03
Abstract: 장치는 선택적으로 단일 몸체(1)에 기초를 두는데, 플라스틱 몰딩으로 만들어지며 실린더형 구조이고 심지가 통과하는 축방향 중앙넥(3)과 오프닝을 갖으며, 상기 심지는 하단부가 용기에 있는 활성성분에 잠기고, 심기가열저항을 위치시키고 고정시키기 위한 선택적인 리브(4)를 포함할 뿐만 아니라 전기저항 전선의 단부를 위치시키기 위한 십자가형 채널(7)을 갖는 돌출부를 포함하는데, 클립 역할을 하는 단편(8)으로 보완되며, 그 안에 형성된 플랩 혹은 암(9)으로 저항의 단부는 둥근홈(7)에 유지되며, 가열저항기에 전기가 공급되는 접촉기를 위치시키며, 접촉기 연결 플랩(11)을 갖는 단편(8)에 설치된 상단 슬롯(10)을 위치시키며, 선택적으로 덮개는 클립(8)의 변부를 눌러서 좀더 확실키 고정되도록 한다.
Patent KR-20020081268-A (KR)
IPC: G01K1/02
Filed: 2001-11-16
Abstract: A data carrier (1) for contactless communication with a communication station (2) has an integrated circuit (7) and has a direct voltage generation circuit (20), and has detection means (28) for detecting a temperature prevailing in the data carrier (1) and in the integrated circuit (7), with the aid of which detection means (28) a representation signal (RS) representative of the prevailing temperature can be generated, which representation signal causes an initiation of a change of the temperature in the data carrier (1) and in the integrated circuit (7).
Patent KR-20020077470-A (KR)
Title: Gas-liquid contact tray
IPC: B01D3/22
Filed: 2001-02-16
Abstract: Gas-liquid contact tray comprising a bubble area and a plurality of downcomers having a downcomer opening, which downcomer openings are spaced in the bubble area, such that, when in use, a liquid enters the downcomer opening from opposite sides of the downcomer opening, wherein the downcomer opening and downcomer is provided with at least two flow directing plates, wherein each flow directing plate has an upper end which extends above the tray and is inclined towards the direction of the liquid flowing towards the downcomer opening.
Patent KR-20030034048-A (KR)
IPC: B01F3/08
Filed: 2001-03-01
Abstract: 유합 영역에 의해 분리되어 있는 짧은 정적 혼합 부재를 갖는 것을 특징으로 하는 관형 반응기는 혼상 액체/액체 반응을 수행하는 데 사용된다.  특정한 상의 소적은 정적 혼합 부재에 의해 다른 상으로 분산된다.  당해 혼합물이 후속의 유합 영역을 통과함으로써 이들 액적은 유합되고 적어도 부분적으로는 상이 분리된다.  관형 반응기는 부적절하게 니트로화된 부산물과 니트로페놀계 화합물을 소량으로 형성하면서 유기 화합물을 니트로화시키는 데 적합하다.
Patent KR-20030034049-A (KR)
IPC: G03F7/20
Filed: 2002-01-04
Abstract: 본 발명은 레티클을 현장에서 세척하기 위한 방법 및 시스템에 관한 것이다.  이온화된 가스는 운반 장치에 의해 레티클 상으로 유입된다.  이온화된 가스는 레티클과 레티클 상의 미립자 오염물 사이의 정전기적 인력을 상쇄하여, 레티클로부터 오염물을 제거한다.  그후, 이온화된 가스 및 미립자 오염물은 진공 펌프에 의해 레티클로부터 제거되고 오염물 수집기에 의해 시스템으로부터 운반된다.  현장에서 세척하는 방법 및 시스템의 결과로, 레티클 미립자 오염물에 의한 칩 결함의 전체적인 위험이 감소되고, 칩 및 웨이퍼 생산이 개선된다.
Patent KR-20020092979-A (KR)
IPC: G01F1/712
Filed: 2001-03-05
Abstract: The present invention relates to a method and a device for measuring volume flow rates of liquid phase components and gas and determination their volume concentrations in a multiphase mixture along a pipeline. Measurements are executed with an ultrasonic system which includes a set of local acoustic transducers arranged in the interior of the pipeline. Each pair of an emitter and a receiver of the transducer forms a sampling volume of a medium being under control. Volume concentrations of mixture components are determined by timing of passage of acoustic pulses through the sampling volume of the medium. Volume flow rates of the mixture components are calculated by measuring phase velocities and volume concentrations in two pipeline divisions with different cross-section areas located in series at a distance one from the other in flow direction.
Patent KR-20030074115-A (KR)
IPC: C12N5/074
Filed: 2001-06-01
Abstract: 본 발명은, 헤마글루티닌 활성을 갖는 막단백질을 포함하는 레트로바이러스 벡터를 제공한다. 본 발명자 등은, 헤마글루티닌 활성을 갖는 막단백질에 의해 슈도타입화된 레트로바이러스 벡터를 구축했다. 상기 바이러스 벡터는, 숙주세포로의 높은 유전자 도입효율을 나타냈다. 특히, 조혈간세포를 포함하는 혈구계 ·조혈계 세포 및 점막 상피세포를 포함하는 점액을 갖는 세포 등의, 종래에는 유전자 도입이 곤란했던 세포에 대해 높은 효율로 유전자를 도입할 수 있는 것이 나타내어졌다. 본 발명의 바이러스 벡터는 유전자 치료용 벡터로서 지극히 유용하다.
Patent KR-20030011347-A (KR)
IPC: B60L50/16
Filed: 1999-04-26
Abstract: 내연 기관(10)의 출력 토크와 전동기(19)의 출력 토크를 합성 또는 절환하여 구동륜에 전달하는 수단(22)을 갖는 하이브리드 차량 구동 장치에 있어서, 상기 내연 기관(10)의 배기 에너지를 전기 에너지로 변환하는 터보 제너레이터(7)와, 상기 터보 제너레이터(7)와 상기 전동기(19)를 전기적으로 접속하는 수단(1)을 구비한다.  하이브리드 차량에 있어서, 희박 상태로 엔진을 가능한 한 오래 구동시킴으로써 효율이 향상된다.
Patent KR-20030013468-A (KR)
IPC: C08K5/41
Filed: 2001-05-22
Abstract: 본 발명은 
     (A) 하기 화학식 I로 표시되는 가교성 반응기 I을 2개 이상 함유하는 화합물, 및 
     (B) 상기 가교성 반응기 I과 반응 가능한 가교 부위를 갖는 엘라스토머로 이루어진 가교용 엘라스토머 조성물에 관한 것으로, 기계적 강도 및 내열성이 개선된 가교물을 제공하는 가교용 엘라스토머 조성물을 제공한다. 
     <화학식 I>
Patent KR-20030036263-A (KR)
Title: Water purifier with rice refrigerator
Inventor: PARK SUNG CHUL
IPC: F25D11/00
Filed: 2003-01-22
Abstract: PURPOSE: A water purifier with rice refrigerator is provided to miniaturize the product and to reduce manufacturing cost. CONSTITUTION: A water purifier includes a first evaporator cooling water in a cold water tank(204); and a second evaporator comprising evaporation pipes(232) installed in a rice storage space of a rice storage part(231). The first evaporator and the second evaporator are connected with each other so that refrigerant flows from the second evaporator to the first evaporator. A temperature controller(235) is installed to keep temperature in a rice refrigerator constant. High temperature and high pressure refrigerant compressed in a compressor(201) is liquefied in a condenser(202) and decompressed in a capillary, flows to the evaporation pipe(232) on a lower end of the second evaporator to circulate, flows out through the evaporation pipe on an upper end of the second evaporator, and circulates in an evaporation pipe(206) of the first evaporator. Refrigerant having circulated in the evaporation pipe of the first evaporator is returned to the compressor to be compressed. The temperature controller controls the compressor based on temperature of the rice storage part or the evaporation pipe of the second evaporator to keep temperature of the rice storage part constant.
Patent KR-20040068647-A (KR)
Inventor: OH BONG UK
IPC: G06F17/00
Filed: 2003-01-27
Abstract: PURPOSE: A system and a method for operating an electronic bulletin board using the Internet and a wire/wireless communication device are provided to make a client easily confirm desired information quickly by automatically transmitting response contents converted into a text in a main server of the bulletin board to a mail address of the client. CONSTITUTION: The main server(20) is connected to a communication terminal or a computer equipped with an Internet browser through the Internet. A bulletin board database(10) stores the request information inputted from the communication terminal or the computer as a text file. A database searching/transceiving tool(70) transmits the text file to a voice synthesizing system(30) or receives a voice file from the voice synthesizing system. An ARS(Auto Response System)(50) transmits a manager of the bulletin board to the request information of the client converted into a voice in the voice synthesizing system. A voice converting system(40) converts the voice response of the manager recorded to the ARS through the communication device(60) into the text file and transmits the text fie to the bulletin board database.
Patent KR-20040073058-A (KR)
Inventor: JO CHUN HO
IPC: E02F9/20
Filed: 2003-02-13
Abstract: PURPOSE: A safety device of a control lever for the heavy equipment is provided to prevent wrong operation of the heavy equipment in operating or touching the control lever by automatically shutting off the electric signal connected to the control lever with the safety lever in tilting the console box downward for getting off. CONSTITUTION: A safety device of a control lever(11) comprises a console box(12) tilted and installed at the side of a driver's seat(10) and composed of the control lever, a safety lever(13) tilted and fixed to a first support for fixing the console box, a console box tilting lever(14) fixed to the first support, an operation switch assembly connected to a joint fixed to the first support to horizontally support the safety lever and to shut off power of a first limit switch by tilting the safety lever in turning the console box tilting lever, and a latch assembly having a latch detachably combined with a second support(19) and shutting off power of a second limit switch by tilting the console box upward.
Patent KR-20040073221-A (KR)
Inventor: CHO IN CHANG
IPC: G01C21/34
Filed: 2003-02-13
Abstract: PURPOSE: A route guiding method in a navigation system is provided to precisely guide a route of a moving vehicle from a present position to a destination by displaying a map and information related to a travelling direction of the moving vehicle. CONSTITUTION: Initial information including present position information and destination information is transmitted to an information center through a mobile network(S110). Then, a travelling route of a moving vehicle and a map are searched(S120), thereby creating and transmitting route guide data and map data(S130). Then, it is determined whether the moving vehicle is positioned in a start point of the travelling route(S140). If the moving vehicle is positioned in the start point of the travelling route, the map is displayed(S150). If the moving vehicle is not positioned in the start point of the travelling route, route entrance guide data is created and transmitted(S170).
Patent KR-20030074153-A (KR)
Title: 표시구동 제어장치 및 표시장치를 구비한 전자기기
IPC: G09G5/00
Filed: 2003-02-24
Abstract: 변화가 적은 표시와 변화가 많은 표시가 혼재하는 표시 구동에 최적이고, 또한, 칩 면적의 절감, 소비전력이나 코스트의 저감이 도모되는 표시구동 제어장치를 제공한다. 내부 표시 메모리(20)의 기억용량을 구동 대상의 표시 패널(140)의 1 화면 분의 데이터량보다도 작도록 구성함과 함께, 표시 데이터의 전송 방식으로서, 외부로부터 입력된 표시 데이터를 일단 표시 메모리(20)에 저장한 후에 구동회로(37)로 전송하여 구동신호를 출력하는 방식과, 표시 메모리(20)를 통하지 않고 직접 구동회로로 전송하여 구동신호를 출력하는 방식과의 양 방식을 가능케 하고, 또한, 이들 양 방식을 시분할로써 실행하는 것을 가능케 한다.
Patent KR-20040077124-A (KR)
Inventor: KO GYEONG HAK
IPC: G06F17/00
Filed: 2003-02-28
Abstract: PURPOSE: A digital printing system and a method thereof are provided to always print a photo at a near printing shop regardless of time and space, and to insert diverse background screens with an image editor by selecting the needed photo. CONSTITUTION: A digital printing web server(10) includes a CPU of a workstation, a memory needed for member management and extension request, an interface connecting to the Internet and the VAN(Value Added Network), and the GUI(Graphic User Interface) enabling a server manager to manage a server. A digital printing server automatically updates a system management/application program by the digital printing web server. The printing shops(20-20n) print the photo and stores an image file in a storing medium by equipping with the digital printing server. User PCs(30-30n) communicate with the digital printing web server by connecting to the digital printing web server through the online. A photo printing shop(40) prints the ordered photo by connecting to the digital printing web server if the user PC orders the on-demand printing. A delivery server(50) delivers the on-demand printing to a user. A bank(70) makes the user pay price by linking with the delivery server.
Patent KR-20040077201-A (KR)
Inventor: KIM SEONG SU
IPC: B60B17/00
Filed: 2003-02-28
Abstract: PURPOSE: A wheel of a train for a railroad track in different width and a method for installing a railway in the overlapped portion of different railroad tracks are provided to travel the train on the railroad tracks in different width continuously without transferring by using the single kind of the wheel, and to minimize impact in crossing by forming the stepped overlap portion of different railroad tracks. CONSTITUTION: A wheel(1) installed to an axle of a train is composed of a flange(10) formed at the side to prevent deviation; a first contact part(20) integrally formed at the side of the flange and composed of an arc outer surface(22) formed corresponding to the upper part of a railroad track in the standard width; and a second contact part(30) stepped integrally from the side of the first contact part with the diameter smaller than the diameter of the first contact part, and composed of an arc outer surface(32) formed corresponding to the upper part of the wide railroad track. The standard railroad track and the wide railroad track are stepped as the height between the first contact part and the second contact part.
Patent KR-20040078839-A (KR)
Inventor: KIM IN SIK
IPC: C08K5/39
Filed: 2003-03-05
Abstract: PURPOSE: A rubber composition for the rim flange of a truck tire is provided, to reduce the deterioration of tensile properties due to thermal aging and to prevent the reversion of rubber, thereby increasing the number of use of a tire. CONSTITUTION: The rubber composition employs sulfur as a curing agent, wherein some of the sulfur is replaced with an anti-reversion agent. Preferably the anti-reversion agent is 1,6-bis(N,N'-dibenzylthiocarbamoyldithio)hexane, and the amount is 0.5-2.5 parts by weight.
Patent KR-20040082831-A (KR)
Inventor: KIM GIL HO
IPC: H01L27/04
Filed: 2003-03-20
Abstract: PURPOSE: A layout of an ESD(electrostatic discharge) protection device is provided to optimize capacitance and a resistance value necessary for gate coupling in which a resistor is connected between a gate and a power supply terminal or a ground terminal by connecting a capacitor between the gate and an input pad and by extending the poly line of the gate in embodying the gate coupling. CONSTITUTION: Each gate of an NMOSFET(n-channel metal-oxide-semiconductor field-effect-transistor)/PMOSFET is widely extended by a poly material so as to separately form the lower electrode(24) of a coupling capacitor. A gap between the drains of the NMOSFET/PMOSFET is widely extended by a metal material to cover the lower electrode by a width of an active region so that the upper electrode(22) of the coupling capacitor is connected to the drain. A coupling resistor is connected to the gate of the NMOSFET/PMOSFET and the power supply terminal/the ground terminal by a poly line of a winding type.
Patent KR-20040083737-A (KR)
Inventor: KWON GIL SUN
IPC: H04N5/655
Filed: 2003-03-24
Abstract: PURPOSE: A panel device for an image display device is provided to be applied to image display devices with various standards by voluntarily varying set fixing positions of all directions. CONSTITUTION: A pair of wall fixing brackets(110) are separated at a uniform distance, and are installed to be horizontal with a wall surface. Width adjustment bars(120) adjust a separation distance of the wall fixing brackets. One ends of slant adjustment brackets(130) faced with the wall fixing brackets are combined by hinge, and are rotated. Angle adjustment links(140) adjust an open angle of the slant adjustment brackets and the wall fixing brackets. Set fixing brackets(150) are mounted on the slant adjustment brackets to fix a set.
Patent KR-20040087678-A (KR)
Inventor: HUH JONG TAE
IPC: F04B39/00
Filed: 2003-04-07
Abstract: PURPOSE: A reciprocating compressor is provided to reduce the number of frames and the number of assembling components for combining the frames by directly fixing a spring supporting a mover and a piston at a casing, thereby reducing the production cost for a compressor. CONSTITUTION: A frame unit(120) is elastically installed inside a casing(110). A reciprocating motor(130) is fixed inside the casing, installing a stator at the frame unit so that a mover(133) reciprocates in a straight line. A compression unit(140) has a piston(142) combined with the mover of the reciprocating motor for reciprocating inside a cylinder in a straight line. A spring unit(150) elastically supports the mover and the piston for inducing resonance motion.
Patent KR-20040088176-A (KR)
Inventor: KIM JUNG HWAN
IPC: E06B7/23
Filed: 2003-04-09
Abstract: PURPOSE: An automatic inserting device of a windbreak is provided to make mass operation possible in a short term by executing sequential progresses automatically and to promote productivity by reducing the working force. CONSTITUTION: The automatic inserting device of a windbreak comprises: a main body(10) provided with a workbench(11) where a window frame(1) is placed, and a guide rail(13) formed longitudinally; a push bar(20) installed on the workbench(11) and moved forward and backward by a cylinder(C) to make the window frame(1) fixed to the workbench(11) adhere closely to a stopping wall(15) of the guide rail; a push member(30) installed on the workbench(11) and moved vertically by a cylinder(C) to press/fix the window frame(1) adhered toward a stopping; an inserter(50) installed to be movable along the guide rail to fix a windbreak(4) toward the front end(F) from the rear end(R) of the window frame(1); and a cutter(60) installed to the main body(10) to cut off one end of the windbreak fixed to a windbreak inserting groove to set to the length of the rear end of the window frame(1).
Patent KR-20040088203-A (KR)
Inventor: CHOI JAE SEOK
IPC: B60G7/02
Filed: 2003-04-09
Abstract: PURPOSE: A bracket for fixing a suspension of a vehicle is provided to improve the durability of the suspension and the quality of the vehicle by reducing the initial stress in assembling with the bent buffering unit of the U-shaped bracket. CONSTITUTION: A link(110) is protruded at a side of a bracket(100), and the other side of the bracket is divided into both sides to fasten an assembling portion of a buffering member(200) with an assembling unit(300). A buffering unit(120) is formed by bending the middle of the divided portion of the bracket. The bracket is fastened to the vehicle body with the buffering member to relieve impact or vibration transmitted to the vehicle body through the link. The U-shaped bracket is formed to prevent concentration of stress on the specific portion, and damage of the bracket is prevented by bending the buffering unit.
Patent KR-20040092101-A (KR)
Inventor: NAM CHUNG HUI
IPC: G06F3/02
Filed: 2003-04-24
Abstract: PURPOSE: A method for preventing keyboard hacking using virtual keyboard data transmission is provided to protect keyboard input information of a user by making a hacking program simultaneously receive keyboard data actually inputted from the user and virtual data repeatedly generated from a keyboard security system when the user uses a keyboard. CONSTITUTION: A virtual keyboard data generator generates the virtual keyboard data(202). The virtual keyboard data is stored to a virtual keyboard data buffer(203). The virtual keyboard data generator generates the keyboard data with a virtual key pushing effect(204) or the keyboard data is generated by user's key input. A keyboard driver transmits the keyboard data to a virtual keyboard data comparator. The virtual keyboard data and the actual keyboard data are separated by comparing the keyboard data received to the keyboard data comparator with a value of the virtual keyboard data buffer. In case of the virtual keyboard data, a keyboard data processor blocks the keyboard data transmission by ignoring the keyboard input. In the case of the actual keyboard data, the keyboard data is transmitted to the keyboard data processor.
Patent KR-20030041121-A (KR)
Inventor: KIM YONG BAE
IPC: B60S3/04
Filed: 2003-05-06
Abstract: PURPOSE: A side drying apparatus of an automatic car-wash machine is provided to efficiently remove wetness formed on the sides of a vehicle while minimizing the operational electric power of the automatic car-wash machine, regardless of the kind of vehicles. CONSTITUTION: A side drying apparatus of an automatic car-wash machine includes main side nozzles(220) installed on the inner sides of a body(1); auxiliary side nozzles(230) installed to the upper parts of the main side nozzles; and blower devices(20,20') mounted to the body, to supply high-pressure air. The blower devices are formed separately, corresponding to each main and auxiliary side nozzle. The side drying apparatus further includes a height-detecting sensor sensing the height of a vehicle advancing into the body, and a PLC(Programmable Logic Controller) making high-pressure air injected through just the main side nozzles if the height of the advancing vehicle is under the predetermined height, and making high-pressure air injected through the main and side nozzles if the height of the advancing vehicle is over the predetermined height.
Patent KR-20040096716-A (KR)
Inventor: SIM HO CHANG
IPC: B62D25/12
Filed: 2003-05-10
Abstract: PURPOSE: A hood switch mounting structure for a vehicle is provided to reduce the number of parts, to easily assemble, and to mount a hood switch without damaging rigidity of a carrier by reducing the number of through-holes formed at the carrier. CONSTITUTION: A hood switch mounting structure for a vehicle is composed of a carrier mounted in an engine room of the vehicle; a socket integrally molded at the predetermined part of the carrier and formed with a circumferential portion(46b) and a female screw unit(46a); and a switch assembly body(41) having a pressure sensing unit(42), a male screw unit(48a) formed outside, a fixing case disposed inside to support and receive elastically a pressure switch; and a cable(45). The switch assembly body is combined and fixed to the socket on the carrier. A buffer unit made from an elastic material is integrated at the circumferential portion formed on the upper part of the socket.
Patent KR-20030091774-A (KR)
Title: 비전도성 캐리어에서 전기전도성 재료들을 노출시키기위한 노출 장치 및 상기 노출 장치의 제어 방법
IPC: H05K3/00
Filed: 2003-05-23
Abstract: 본 발명은 비전도성 캐리어(1)에서 전기전도성 재료(2)를 노출시키기 위한 노출 장치에 관한 것으로서, 상기 노출 장치는 상기 비전도성 캐리어(1)의 재료를 제거하기 위한 전기전도성 제거 장치(15)를 구비하고 있으며, 상기 제거 장치의 인입은 제어된다. 차폐 전극(7, 8, 9)은 처리될 상기 캐리어(1)에 제공된 위치 근처에 배치되며, 상기 제거 장치(15)와 상기 차폐 전극(7, 8, 9) 사이에 교류 전압이 인가된다. 수신 전극(10)은 처리될 캐리어(1)를 위해 제공된 위치 근처에 배치된다. 상기 인입 제어 장치(12)는 상기 수신 전극에 인가된 전압에 따라서 상기 제거 장치의 인입을 제어한다. 또한, 본 발명은 교류 전압이 상기 수신 전극(10)과 상기 차폐 전극들 사이에 인가되고, 상기 제거 장치(15)에 인가된 전압이 상기 인입 제어 장치에 공급되도록 구성된 노출 장치, 및 상기 노출 장치의 제어 방법에 관한 것이다.
Patent KR-20040102262-A (KR)
Inventor: KIM GWANG SU
IPC: H01L21/28
Filed: 2003-05-27
Abstract: PURPOSE: A method of manufacturing a metal line layer of a semiconductor device is provided to reduce remarkably the hillock by depositing an anti-reflective coating on a metal film within predetermined temperature range. CONSTITUTION: A metal film is deposited on an interlayer dielectric with contact holes(S200). An anti-reflective coating is deposited on the resultant structure at a temperature of 200 to 390 °C(S202). A photoresist pattern is formed on the anti-reflective coating(S206). The anti-reflective coating and the metal film are selectively etched by using the photoresist pattern as an etching mask(S208). The photoresist pattern and the anti-reflective coating are removed therefrom.