Patent DE-102009042103-A1 (DE)
Title: Method for treating a surface, comprises producing a plasma beam from a process gas or flame beam from burning gas, by which the surface is coated with plastic, glass, metal, ceramics, glass ceramics, wood or textile
Inventor: HORN KERSTIN
IPC: C23C16/52
Filed: 2009-09-21
Abstract: The method for treating a surface, comprises producing a plasma beam from a process gas or flame beam from burning gas, by which the surface is coated with plastic, glass, metal, ceramics, glass ceramics, wood or textile. The surface treatment is carried out at atmospheric pressure. An optical emission of the plasma beam or flame beam or the surface is measured by using a spectrometer (3). The characteristics of the plasma beam or flame beam are determined. The parameters of the surface treatment is controlled and/or regulated based on the characteristics. The method for treating a surface, comprises producing a plasma beam from a process gas or flame beam from burning gas, by which the surface is coated with plastic, glass, metal, ceramics, glass ceramics, wood or textile. The surface treatment is carried out at atmospheric pressure. An optical emission of the plasma beam or flame beam or the surface is measured by using a spectrometer (3). The characteristics of the plasma beam or flame beam are determined. The parameters of the surface treatment is controlled and/or regulated based on the characteristics. The optical emissions are measured in real time. The surface is activated by the plasma beam or flame beam. The process gas and/or the plasma beam or the fuel gas and/or flame beam is introduced into a precursor material, which is subjected to a reaction, where the reaction product of the precursors is deposited on the surface and/or a layer arranged on the surface. The parameters such as plasma power, burner power, contact time, composition of burning gas or process gas, throughput of burning gas or process gas, throughput of the precursors are controlled or regulated. The characteristics such as progress of a spectral volume, presence of certain particles, particle density and temporal variation of the particle density are obtained. The optical emissions of two different locations of the plasma beam or flame beam are measured and the spectrometer is guided in two canals. The optical emissions of the spectrometer are fed over an optical fiber (6.1, 6.2, 6.3). The optical fiber is provided with a collimator lens (5.1, 5.2, 5.3) for coupling the optical emissions. The production of plasma is carried out in a free jet plasma source or dielectric barrier discharge or through a microwave excitation. A gaseous, liquid or solid precursor is used. The precursor is transported before introducing into the process gas or in the plasma beam or into the fuel gas or flame beam in the gaseous state. The properties of the substrate such as scratch resistance, self-healing ability, barrier behavior, reflective behavior, transmission behavior, refractive index, transparency, light dispersion, electric conductivity, anti-bacterial behavior, friction, liability, hydrophilicity, hydrophobicity, repellency, surface tension, surface energy, anticorrosion effect, dirt-repellent effect, self-cleaning ability, photocatalytic behavior, anti-stress behavior, wear characteristics, chemical resistance, biocidal behavior, biocompatible behavior, electrostatic behavior, electrochromic activity, photochromic activity and gasochrome activity are changed by the deposited layers. Silicon organic and/or a titanium organic compound are used as a precursor. The layer is deposited as gradient layer. A first layer has a barrier effect. Propane is used as fuel gas, where air or oxygen is supplied for combustion.