baber/WOPTO huggingface dataset:
Patent JP-2008512773-A (JP)
IPC: G06F1/18
Filed: 2005-08-30
Abstract: Embodiments of the present invention include dense, but accessible and well-interconnected component arrangements within multi-component systems, such as high-end multi-processor computer systems, and methods for constructing such arrangements. In a described embodiment, integrated-circuit-containing processing components, referred to as a “flat components,” are arranged into local blocks of intercommunicating flat components. The local flat-component blocks are arranged into interconnected, primitive multi-local-block repeating units, and the primitive local-block repeating units are layered together in a three-dimensional, regularly repeating structure that can be assembled to approximately fill any specified three-dimensional volume. The arrangement provides for relatively short, direct pathways from the surface of the specified volume to any particular local block and flat component within the three-dimensional arrangement.
Patent JP-2008512955-A (JP)
Title: 無線通信システムにおけるスマートアンテナに対する測定サポート
IPC: H04B7/26
Filed: 2005-09-07
Abstract: 複数のＳＴＡを有する無線（ワイヤレス）通信システムにおいてスマートアンテナを用いて測定を行なう方法は、測定要求を第１のＳＴＡから第２のＳＴＡに送信することから開始される。少なくとも２つの測定パケットは、第２のＳＴＡから第１のＳＴＡに送信される。各測定パケットは異なるアンテナビームを使用して第１のＳＴＡにおいて受信される。第１のＳＴＡは、各測定パケットについて測定を実行し、その測定結果に基づいてアンテナビーム方向を選択する。
Patent JP-2008515167-A (JP)
IPC: H01R13/648
Filed: 2005-09-28
Abstract: An electrical connector with electrically lossy materials bridging ground members. The lossy conductive members may be formed by filling a settable binder with conductive particles, allowing the partially conductive members to be formed through an insert molding process. Connectors assembled from wafers that contain signal conductors held within an insulative housing may incorporate lossy conductive members by having filled thermal plastic molded onto the insulatative housing. The lossy conductive members may be used in conjunction with magnetically lossy materials. The lossy conductive members reduce ground system do resonance within the connector, thereby increasing the high frequency performance of the connector.
Patent JP-2008518630-A (JP)
Title: リボスイッチ、リボスイッチによる、構造を基礎とする化合物設計、ならびにリボスイッチの使用方法およびリボスイッチを伴う組成物
IPC: C12N15/115
Filed: 2005-11-08
Abstract: リボスイッチおよびリボスイッチの改変型を、特異的エフェクター化合物により制御されるデザイナー遺伝スイッチとして使用できる。リボスイッチを活性化するこのようなエフェクター化合物を、本明細書においてトリガー分子と称する。天然スイッチは、抗生物質およびその他の小分子療法の標的である。さらに、リボスイッチの構造は、天然スイッチの実際の断片が、新たな非免疫原性遺伝的制御エレメントの構築に使用される事を可能にする。例えば、新たな認識ドメインが、ユーザーの規定したエフェクター化合物によって遺伝調節を惹起するよう、アプタマー(分子認識)ドメインを他の非天然アプタマーに交換（またはそれ以外の態様で修飾）することができる。変化したスイッチは治療計画の一部となり、蛋白合成を始動、停止または調節する。新たに構築された遺伝調節ネットワークは、生体バイオセンサー、生物の代謝改変のような領域に、そして遺伝子治療処置の先進形態に応用できる。化合物は、リボスイッチを刺激、活性化、阻害、および／または不活性化するのに利用できる。リボスイッチの原子構造は、リボスイッチを刺激、活性化、阻害、および／または不活性化する新たな化合物の設計に利用できる。
Patent JP-2008519626-A (JP)
IPC: A61L27/00
Filed: 2005-11-15
Abstract: A method for preparing a biomaterial containing at least one bioactive molecule from a base biomaterial, comprising the following successive operations carried out on the base biomaterial: a) application of a solid mixture of: cyclodextrin(s) and/or cyclodextrin derivative(s) and/or cyclodextrin inclusion complex(es) and/or cyclodextrin derivative inclusion complex(es), at least one poly(carboxylic) acid, and optionally a catalyst; b) heating at a temperature between 100° C. and 200° C. for a period of 1 to 60 minutes; c) washing with water; d) drying, wherein at least one bioactive agent is incorporated in the biomaterial by impregnation of the biomaterial after the drying step in a concentrated solution of the bioactive agent.
Patent JP-2008530517-A (JP)
Title: 反復的制約デコンボリューションによる核医学２次元平面画像の復元
IPC: G01T1/161
Filed: 2005-11-04
Abstract: 医療イメージングシステム１０は、対象からの放射線を検出するために対象受信開口１８に隣接して配置された少なくとも１つの放射線検出ヘッド１６を含む。検出された放射線は、少なくとも１つの初期２次元投影画像μに再構成される。各初期２次元画像μにおける解像度は、システム応答関数の異なる推定値を組み入れることにより拡張された反復的制約デコンボリューションアルゴリズムを使用することにより復元され、前記推定値が前記検出ヘッドと前記検出された放射線の原点との間の異なる距離に対応する。測定された応答関数は、画像の系列を復元するのに使用される。最適な画像は、性能指数で自動的に検索することにより、ユーザの観測により、又は前記システム応答関数を同時に推定し、元の画像を更新するブラインドデコンボリューションを使用することにより決定される。
Patent JP-2008520702-A (JP)
Title: Ｈｓｐ９０活性を調節するトリアゾール化合物
IPC: C07D403/04
Filed: 2005-11-17
Abstract: 本発明は、置換トリアゾール化合物および置換トリアゾール化合物を含む組成物に関する。本発明はさらに、本発明の置換トリアゾール化合物、またはかかる化合物を含む組成物を被験体に投与する工程を含む、その必要のある被験体においてHsp90の活性を阻害する方法およびその必要のある被験体において癌等の過剰増殖性障害を予防または処置する方法に関する。
Patent JP-2008522225-A (JP)
Title: 投影システム・方法
IPC: G03B21/00
Filed: 2005-11-29
Abstract: 微細機械ミラーとフォトルミネセントスクリーンの組み合わせは、光源からの光を効率的に利用することができる。このような機器においては、光源は微細機械ミラーへ向けられる光を生成する。微細機械ミラーはその後、光を選択的にフォトルミネセントスクリーンへ反射する。光はフォトルミネセントスクリーンを励起して、望ましい画像を生成する。フォトルミネセントスクリーンは、光源からの光を変換して望ましい画像を生成する画素群を含んでもよい。典型的には、各画素群は赤色、緑色、青色の部分を含むが、任意の適切な色の組み合わせおよび画素数を利用してもよい。画素群の各部分は、光源から受け取った光をフォトルミネセンスにより各々の色に変換する。その代わりに、光源が一色に限定されるスペクトルの場合に、フォトルミネセントスクリーンは、ある色のフォトルミネセント部分の代わりに、透明および／または散乱部分を含んでもよい。 （段落００１３参照） 【選択図】図１
Patent JP-2008523869-A (JP)
Title: ティース支持帯片を把持するスライダ付き密封ジップファスナ
IPC: A44B19/32
Filed: 2005-11-30
Abstract: 密封ジップファスナ（１）を記載する。前記ジップファスナは圧縮弾性材料の２つの帯片（５、６）に取り付けられた２列の対面するティース（３、４）を備え、前記ティースは、外方に突出する把持部材（８）によって変位させることのできる可動スライダ（７）によって一体に接合されたり、分離される。本発明に係るジップファスナ（１）では、帯片（５、６）の両側に、スライダ（７）は、相互に略鏡像の形状を有しかつそれらの陥凹部の周縁（１２、１３）が相互に対向して配設された、第１凹状カプセル（１０）および第２凹状カプセル（１１）を具備し、第１カプセル（１０）は、それに対して垂直であってスライダ（７）内部のキャビティ（１５）内および第２カプセル（１１）に形成された穴（１６）内を滑動することのできる上向きのピン（１４）を有し、把持部材（８）は、作動したときに、ジップファスナ（１）の面（α）に対して垂直に、第１カプセル（１０）を第２カプセル（１１）の方向にかつ第２カプセル（１１）を第１カプセル（１０）の方向に同時に変位させる手段（１７、１８）に接続されるかそれらを有し、それにより、それらの周縁（１２、１３）の端部（１２ｔ、１３ｔ）が、所望の圧力で帯片（５、６）をそれらの間に把持するのに充分な程度に相互に向かって移動する。 【選択図】図１
Patent JP-2008526772-A (JP)
Title: ガリウム塩の製剤
IPC: A61K33/24
Filed: 2005-12-29
Abstract: 本発明は、薬学的に許容されるガリウム塩(硝酸ガリウム等)、送達剤、ならびに、場合によっては1種または複数の化学療法剤および/または補助化学療法剤を含有する製剤に関する。
Patent JP-2008527371-A (JP)
Title: 微小流体輸送導管の中で両親媒性高分子物質と一緒に反応物を共輸送するための方法
IPC: G01N33/531
Filed: 2006-01-17
Abstract: 実験プロトコルの反応物を含む液体のアリコートを、微小流体輸送マイクロ導管の中で輸送する方法。特色的な特徴は、両親媒性高分子物質と一緒に反応物を共輸送すること、および／もしくは当該マイクロ導管の内部表面がそのような高分子物質で被膜されることを含んでいる。
Patent JP-2008528836-A (JP)
IPC: E02B17/08
Filed: 2006-01-27
Abstract: The device has a motorization whose output shaft corresponds to an input shaft of a primary reducing gear system (4) whose output shaft corresponds to an input shaft of a secondary planetary differential reducing system (6). Planet carrier of the system (6) drives a pinion on one side of a rack. An outer tooth of an outer ring gear of the system (6) drives a toothed wheel (17) that then drives another pinion on another side of the rack. An independent claim is also included for an installation for handling a structure in lifting or lowering with respect to a support, including handling devices.
Patent JP-2009160275-A (JP)
Title: Adhesive tape for forming double eyelid and its manufacturing method
Inventor: KANEKO ISAO
IPC: A45D44/22
Filed: 2008-01-08
Abstract: <P>PROBLEM TO BE SOLVED: To provide an adhesive tape for forming an double eyelid which is capable of being attached to an eyelid by holding both ends of the tape and which has a structure that the holding part can easily be cut off after being attached to the eyelid.  <P>SOLUTION: An adhesive tape is formed by having a mount stuck to both ends of a tape which has an adhesive layer at least on one surface, and by having a separation type sheet pasted on the adhesive layer side. On this adhesive tape, cuts are provided intermittently along the mount, and cuts are provided form one end of the mount to the other opposing end of the mount. The problem is solved by providing this adhesive tape for double eyelid formation.  <P>COPYRIGHT: (C)2009,JPO&INPIT
Patent JP-2009164454-A (JP)
Title: Method of manufacturing semiconductor device, and semiconductor device
Inventor: HAYASHI TAKESHI
IPC: H01L29/417
Filed: 2008-01-09
Abstract: <P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a CMOS transistor using a DSL, which does not cause damage to a silicide layer in removing a stress film.  <P>SOLUTION: The method of manufacturing the semiconductor device includes: a step of forming the silicide layer 30 selectively on a p-MOS transistor region 41; a step of forming the stress film 23 selectively on a surface of the p-MOS transistor region 41 after the foregoing step; a step of forming the silicide layer 31 selectively on an n-MOS transistor region 40; and a step of forming a stress film 27 selectively on a surface of the n-MOS transistor region 40 after the foregoing step.  <P>COPYRIGHT: (C)2009,JPO&INPIT
Patent JP-2008178289-A (JP)
Title: Power supply device for x-ray tube, and method to operate the same
Inventor: ERNEST PHILIPPE
IPC: H02M3/00
Filed: 2008-01-11
Abstract: <P>PROBLEM TO BE SOLVED: To provide a power supply device for an X-ray tube, and a method to operate the tube.  <P>SOLUTION: The power supply device (1) for the X-ray tube (2)includes a current source (3) and a transformer (6) having a primary circuit (8) and a secondary circuit (9) with a resistor (R). This unit is constituted so that it may supply power to a high-voltage generator (7) with an equivalent input capacitor (11). The power supply device (1) is used when the generator operates ON, and limits intensity of a rush current which appears in the circuits.  <P>COPYRIGHT: (C)2008,JPO&INPIT
Patent JP-2009168892-A (JP)
Title: Lens barrel and imaging apparatus including it
Inventor: OMORI KATSUMI
IPC: G02B7/08
Filed: 2008-01-11
Abstract: <P>PROBLEM TO BE SOLVED: To provide a lens barrel, effectively restraining an influence of a leak magnetic flux generated from an electromagnetic actuator upon peripheral devices in the case of using a plurality of electromagnetic actuators as driving means for driving various kinds of members.  <P>SOLUTION: This lens barrel for use in an imaging apparatus includes: first and second functional units disposed spaced from each other in the direction of the optical axis to drive the photographing members by the electromagnetic actuators; and a lens-barrel unit holding a photographing lens, wherein the magnetic driving parts constituting the first and second functional units are disposed opposite to each other in the same phase in the circumferential direction of the lens barrel, and a magnetic substance is disposed in the same phase of the magnetic driving parts constituting the first and second functional units in a space up to the magnetic driving parts.  <P>COPYRIGHT: (C)2009,JPO&INPIT
Patent JP-2009170250-A (JP)
Title: Paired connector
Inventor: KATO RINTARO
IPC: H01R13/639
Filed: 2008-01-16
Abstract: <P>PROBLEM TO BE SOLVED: To provide a paired connector increasing locking reliability without increasing its size.  <P>SOLUTION: The paired connector includes a receptacle connector and a plug connector which can be mutually fitted in the Z direction. The receptacle connector has a shell 250 partially having a metallic locking part 252 formed with a locked hole 254. The plug connector has an insulator 340 and a pull bar (a locking member) having a locking part 375 protruding from a Y-directional end face 340a of the insulator 340. In a fitted state of the receptacle connector with the plug connector, the locking part 375 is positioned within the locked hole 254 to lock the fitted state.  <P>COPYRIGHT: (C)2009,JPO&INPIT
Patent JP-2009170292-A (JP)
Title: Card connector
Inventor: ITO MASASHI
IPC: H01R12/18
Filed: 2008-01-17
Abstract: <P>PROBLEM TO BE SOLVED: To provide a card connector with further thinning promoted, and capable of effectively reinforcing a housing rear-wall part located at the depth side of a card mounting area.  <P>SOLUTION: The card connector is provided with a resin-made housing 21 equipped with a card mounting area 29 into which a card can be inserted, a terminal member 55, and a metal cover 22 covering the card mounting area 29. At the metal cover 22, a rear-side plate 22b folded from a ceiling plate 22a located on the card mounting area 29 toward an inner face of a rear-wall part 25 headed for the card mounting area 29 is provided. On an inner face 25c of the rear-wall part 25 of the housing 21, a protruded-shape stepped part 30 is provided in opposition to an underside of the rear-side plate 22b of the metal cover 22 between the rear-side plate 22b of the metal cover 22 and the terminal member 55.  <P>COPYRIGHT: (C)2009,JPO&INPIT
Patent JP-2009171393-A (JP)
Title: Broadcast receiver, broadcast receiving method and broadcast receiving program
Inventor: NAKAJIMA HIROHARU
IPC: H04N5/445
Filed: 2008-01-18
Abstract: <P>PROBLEM TO BE SOLVED: To provide a broadcast receiver capable of easily specifying a speaker of a speaking content shown by closed caption information.  <P>SOLUTION: When strong hierarchy is selected as an output video image upon determination through a simultaneous broadcasting determination unit 10 that both strong hierarchy and weak hierarchy are simultaneous broadcasts as the result of decoding a broadcasting signal through a decoder unit 5 received and modulated so as to be the strong hierarchy and the weak hierarchy through a tuner unit 1 and an OFDM modulating unit 2, the closed caption information of the weak hierarchy which is broadcasted simultaneously is converted into edited closed caption information to display by a closed caption display position operating unit 11 as for the strong hierarchy and displayed by synchronizing with the video information of the strong hierarchy through a delay circuit control unit 12 instead of the closed caption information of the selected strong hierarchy. The closed caption display position operating unit 11 converts the display position of the closed caption information of the weak hierarchy, a display region and the closed caption control information which comprises at least the display position of closed caption of the weak hierarchy, a display region and a letter size into the edited closed caption control information for the strong hierarchy by the video format information of the strong hierarchy and the video format information of the weak hierarchy whereby the edited closed caption information is generated.  <P>COPYRIGHT: (C)2009,JPO&INPIT
Patent JP-2009167358-A (JP)
Title: Heat-dissipating resin composition
Inventor: FUJIOKA SHINSUKE
IPC: H01L33/64
Filed: 2008-01-18
Abstract: <P>PROBLEM TO BE SOLVED: To provide a heat-dissipating resin composition excellent in heat-dissipating property, thermal deformation resistance, toning property, glossiness, impact resistance and flexural strain characteristics, and to provide a molded article containing the same.  <P>SOLUTION: The heat-dissipating resin composition comprises polytetramethylene adipamide and boron nitride, wherein the amount of the former and the amount of the latter are 15 to 95 mass% and 5 to 85 mass% (the total amount of both the components is 100 mass%), respectively.  <P>COPYRIGHT: (C)2009,JPO&INPIT
Patent JP-2009176778-A (JP)
Title: Semiconductor apparatus, semiconductor substrate and method of inspecting monitor device
Inventor: TORII YASUNOBU
IPC: H01L27/04
Filed: 2008-01-21
Abstract: <P>PROBLEM TO BE SOLVED: To provide a method for executing highly reliable inspection by unfailingly preventing short circuit between a probe needle and a pad in overdrive using a simple configuration while satisfying requests of easiness in manufacturing probe needles and reduction in parasitic capacity between adjacent probe needles and suppressing the area occupied by the inspection instrument without using the special probe needles of the inspection instrument when a wiring forming position for the pads is very strongly restricted.  <P>SOLUTION: A monitor device 10 is disposed, for example, on a scribe region in semiconductor substrate. The monitor device 10 is provided with a plurality of pads 1 sequentially arranged in a line, a plurality of elements 3 disposed in a region of adjacent pads 1, and wirings 2 used to connect the pads 1 to the elements 3 and extending meanderingly in a single column direction while detouring each of the pads 1 on right and left.  <P>COPYRIGHT: (C)2009,JPO&INPIT
Patent JP-2009175263-A (JP)
Title: Optical writing type image forming apparatus, and controller for optical writing type image forming apparatus
Inventor: ISHII TSUTOMU
IPC: G02F1/133
Filed: 2008-01-22
Abstract: <P>PROBLEM TO BE SOLVED: To shorten the time from quitting of optical writing halfway in the optical writing till erasure of a written image when image writing by scan movement of an image writing head and entire-area simultaneous initialization light irradiation of a photoconducting layer of an optical writing type display medium are combined with each other.  <P>SOLUTION: When quitting of writing is instructed, writing to areas of electrodes 5A and 5B is already completed and images are visible. Then, initialization processing is carried out targeting the electrodes 5A and 5B. After the initialization processing on the electrodes 5A and 5B, images in the areas of the electrode 5A and 5B are erased. Then an operation to put a light source for image writing back 32 toward a standby position is started. If a deviation from an electrode 5C is recognized in the operation, initialization processing on the electrode 5C is performed. After the initialization processing on the electrode 5C, an image in an area of the electrode 5C is erased.  <P>COPYRIGHT: (C)2009,JPO&INPIT
Patent JP-2009177344-A (JP)
Title: Imaging element driving unit, and imaging element
Inventor: SUGAWARA KYOKO
IPC: H04N5/378
Filed: 2008-01-22
Abstract: <P>PROBLEM TO BE SOLVED: To image a desired object with a high resolution while maintaining a high frame rate.  <P>SOLUTION: The imaging element has an image feature determination part, a register, and a timing control part. The image feature determination part detects a main object in the entire image on the basis of image signals generated by prior imaging. The register sets the region of receiving light of the main object on a light receiving surface as a first region, and the register sets the other area as a second region. The timing control part makes the simultaneous read of 2 pixels be executed in 9-17 columns set in the first region. The timing control part makes the simultaneous read of 4 pixels be executed in 1-8 and 17-24 columns set in the second region.  <P>COPYRIGHT: (C)2009,JPO&INPIT
Patent JP-2009172869-A (JP)
Title: Resin molding
Inventor: TANAKA ATSUSHI
IPC: B29C33/44
Filed: 2008-01-24
Abstract: <P>PROBLEM TO BE SOLVED: To enhance flexibility for the direction of blanking for a resin molding 1 having a specific shape which has a cylindrical part 5 and a second cylindrical part 8 perpendicular to each other, two flange parts 6 and 7 positioned with one on top of the other and extending from the outer circumferential surface of the cylindrical part 5 in the outside direction and a bridge connecting the cylindrical part 5 with the second cylindrical part 8 by the flange 6 jointed with the second cylindrical part 8.  <P>SOLUTION: The bottom end surface 23 of the second cylindrical part 8 is positioned vertically in the same position with the bottom end surface 24 of the flange 6. This places the second cylindrical part 8 above the flange 6 and makes it available to form a space V by blanking the cylindrical part 5 in the direction of the outer circumferential surface of the cylindrical part 5 (blanking in the direction b as illustrated). The flexibility in the direction of blanking for the formation of the space V is enhanced.  <P>COPYRIGHT: (C)2009,JPO&INPIT
Patent JP-2008150038-A (JP)
Title: Minesweeping device
Inventor: THEOBALD ALAN
IPC: B63J3/04
Filed: 2008-01-28
Abstract: <P>PROBLEM TO BE SOLVED: To provide a minesweeping device for controlling the magnetic moment of an superconducting material magnet structure.  <P>SOLUTION: A magnetic signature minesweeping device 10 comprises a controllable superconducting material magnet structure 14, a control unit 24, and a power supply and one connection to the power supply for supplying a driving current to the superconducting material magnet structure 14, and further comprises at least one sensor for determining at least one of the azimuth, the position, the depth, and the speed of a magnetic minesweeping constitution. The control unit 24 receives the determination and controls the supply of the driving current to the superconducting material magnet structure 14 in response the determination.  <P>COPYRIGHT: (C)2008,JPO&INPIT
Patent JP-2008118725-A (JP)
Title: Adaptive array base station
Inventor: SAGARA KIMIYOSHI
IPC: H04B7/10
Filed: 2008-01-29
Abstract: <P>PROBLEM TO BE SOLVED: To provide an adaptive array base station capable of guaranteeing the telephone call quality of other base station connection terminal and a present base station connection terminal.  <P>SOLUTION: The adaptive array base station 202 receives a synchronous burst in a 3rd slot (S701) of one frame from a terminal, performs synchronous burst beam transmission to the terminal in the direction of receiving the synchronous burst in a sixth slot (S703) of the one frame. Continuously, the adaptive array base station 202 receives a TCH burst in a 3rd slot (S705) of two frames from the terminal. The adaptive array base station 202 performs synchronous burst NULL transmission to the terminal in the direction of receiving the TCH burst in a 6th slot (S707) of the two frames.  <P>COPYRIGHT: (C)2008,JPO&INPIT
Patent JP-2009182105-A (JP)
Title: Semiconductor device and manufacturing method thereof
Inventor: SUGIOKA SHIGERU
IPC: H01L21/8234
Filed: 2008-01-30
Abstract: <P>PROBLEM TO BE SOLVED: To provide a semiconductor device having an improved longitudinal MOS transistor, and the manufacturing method thereof.  <P>SOLUTION: The semiconductor device has a channel region 22 extending substantially perpendicularly to the main surface of a semiconductor substrate 10, a first diffusion layer region 22a provided to the lower part of the channel region 22, a second diffusion layer region 22b provided to the upper part of the channel region, a first gate electrode 34 extending substantially perpendicular to the main surface of the semiconductor substrate 10 and provided to the side surface of the channel region 22 with a gate insulating film 30 interposed, a second gate electrode 35a extending substantially in parallel with the main surface of the semiconductor substrate 10 and connected to the top of the first gate electrode 34, and buried wiring 21 connected to the first diffusion layer region 22a and crossing the second gate electrode. The plane position of the second gate electrode 35a is offset from the plane position of the first gate electrode 34.  <P>COPYRIGHT: (C)2009,JPO&INPIT
Patent JP-2009182175-A (JP)
Title: Method for forming resist pattern, and recording medium
Inventor: TOZAWA SHIGEKI
IPC: H01L21/027
Filed: 2008-01-31
Abstract: <P>PROBLEM TO BE SOLVED: To form a resist pattern without causing a sidewall spacer to fall down.  <P>SOLUTION: A method for forming the resist pattern F' on a base film C formed on a surface of a substrate W includes steps of: forming a sacrificial film D of silicon oxide on the base film C; processing the sacrificial film D in a prescribed pattern; forming the sidewall spacer F' made of a material other than the silicon oxide on the sidewall of the sacrificial film D processed in a prescribed pattern; and removing the sacrificial film D processed in the prescribed pattern. The step of removing the sacrificial film D includes: a step of changing the sacrificial film D into reaction products by holding the substrate W at first processing temperature, supplying a gas containing a halogen element and a basic gas and subjecting the sacrificial film D, and the gas containing the halogen element and basic gas to chemical reaction; and a step of selectively removing the sacrificial film D changed into the reaction products by holding the substrate W at the second processing temperature higher than the first processing temperature.  <P>COPYRIGHT: (C)2009,JPO&INPIT