baber/WOPTO huggingface dataset:
Patent KR-20020045658-A (KR)
Title: Test method of semiconductor device for optimizing test time
Inventor: CHO BYEONG HWAN
IPC: G11C29/54
Filed: 2000-12-09
Abstract: PURPOSE: A method of testing a semiconductor device for optimizing a test time is provided to reduce costs for test by minimizing a time for test. CONSTITUTION: Test variables are initialized and test information is read(S10). A test process is performed by using a fuzzy algorithm(S20). An ending state of the test is checked(S30). A changing state of order is checked and an order change process is determined(S40). The orders of test items are changed by using an order change algorithm if the order change process is determined(S50). An item addition/subtraction process is performed by using an item addition/subtraction algorithm(S60). A fuzzy condition setup process is performed(S70). A storing process of obtained test information is determined(S80). The test information is stored selectively(S90). The test process is finished(S95).
Patent KR-20020046299-A (KR)
Title: Internet service provider connection method for common remote access server
Inventor: SON SEONG PIL
IPC: G06F17/00
Filed: 2000-12-12
Abstract: PURPOSE: A method for connecting many Internet service providers is provided to output each Internet service provider(ISP) menu screen according to called numbers and supply a corresponding service in accordance with a user's selection. CONSTITUTION: Each connection number and provision menu of a plurality of Internet service providers(ISP A,B,C) is stored in advance(S10). If a calling number is inputted by a dialing of a subscriber, the calling number is analyzed(S11-S12). It is judged whether the calling number is an ISP A, an ISP B, or an ISP C according to the analysis result(S13-S15). If the calling number is not an ISP C, the calling number is recognized as a wrong number and a corresponding message is transmitted(S16). If a corresponding number is existed in the judging process, a connection is connected to the corresponding IP and a pre-stored provision menu is read and displayed on a screen of the subscriber, and a service is provided in accordance with a user's selection(S17-S19).
Patent KR-20020047851-A (KR)
Title: Method for forming the bit line contact of semiconductor device
Inventor: KO JAE HONG
IPC: H01L21/28
Filed: 2000-12-14
Abstract: PURPOSE: A formation method of a bit line contact hole of semiconductor devices is provided to reduce a manufacturing temperature by forming an SOG(Spin On Glass) as an interlayer dielectric and to secure a compact SOG by annealing the SOG using an electron beam. CONSTITUTION: After depositing and etching a gate poly layer(110), a tungsten silicide(120) and a nitride(130) on a semiconductor substrate(100), gates are formed. A first soft bake is performed, after forming nitride spacers(140) and depositing a first organic SOG(150). After depositing a second organic SOG(155) on the resultant structure, an electron beam curling(158) is performed. Before forming a bit line contact hole, a second soft bake is performed and a photoresist pattern is formed. After removing the photoresist pattern, a poly layer(180) is deposited. Then, the poly layer(180) is etched to the upper portion of the nitride(130) and a tungsten(190) is deposited.
Patent KR-20020049314-A (KR)
Title: Panel lifter for press
Inventor: KIM IL CHEOL
IPC: B30B1/00
Filed: 2000-12-19
Abstract: PURPOSE: A panel lift device for a press is provided to ensure the smooth separation of a molded panel from a lower mold cushion pad by adopting a lift plate driven by a gas spring. CONSTITUTION: The panel lift device for a press comprises a gas spring(19) installed in a lower mold die of a guide die(17); a spring bar penetrating the guide die with being connected to the gas spring; a lift plate(23) mounted to the upper end of the spring bar on its center portion so as to lift a panel along the guide die upwardly and downward; a stopper(27) fitted in a hole formed in the lift plate so as to guide the lift plate and formed with a stop plate(29) for preventing the secession of the lift plate; and a lift plate pushing plate(31) corresponding to the lift plate.
Patent KR-20020050509-A (KR)
Title: Controller of defrosting method for vehicles
Inventor: KONG HUI DONG
IPC: B60H1/00
Filed: 2000-12-21
Abstract: PURPOSE: A device for controlling defrosting device for vehicle is provided to control discharge of hot air of each of outlets. CONSTITUTION: A damper(4) is installed on a hot air supply part of a manifold(2). The damper is controlled by an operating button(6) installed on a control panel(5) of a driver's seat of a vehicle to control discharge area and discharge amount of hot air of an outlet(3). A wire(7) has one end connected to the damper and the other end connected with the operating button to control opening and closing of the damper. Discharge of hot air to the outlet is freely controlled to defrost the whole or a part of a windshield.
Patent KR-20020051230-A (KR)
Title: Piston for automobile engine
Inventor: CHO DONG HYEON
IPC: F02F3/04
Filed: 2000-12-22
Abstract: PURPOSE: A piston of a vehicle engine is provided to improve the fuel ratio with the engine durability improvement and the thermal insulation efficiency. CONSTITUTION: A piston of a vehicle engine is separately composed of a ring shaped insertion(120) forming an outer periphery on the top of the piston(100) having lands(121) and ring grooves(122), and a piston main body(102). The thermal expansion and insulation of the ring shaped insertion(120) is more than these of the piston main body(102). The ring shaped insertion(120) is pressed toward a piston head(120) in the piston main body(102). An oil galley forming portion(126a) formed along the entire circumference at one side of the inner periphery of the ring shaped insertion(120) forms an oil galley(126) with the oil galley forming portion(126a).
Patent KR-20020054189-A (KR)
Title: Method for detecting gear state by using frequency demodulation method
Inventor: KIM YEONG SU
IPC: G01M13/02
Filed: 2000-12-27
Abstract: PURPOSE: A gear state diagnosis method is provided to analyze the cause of erroneous operation of gear in an early stage and improve reliability for development by managing data in an accurate and reliable manner during the high speed rotation of the gear. CONSTITUTION: A gear state diagnosis method comprises the step(ST21 to ST25) of permitting a pulse generator to detect the voltage value which changes in accordance with the change of rotation speed of the gear to be checked, permitting a monitoring unit to frequency modulate the detected voltage value, and demodulating the frequency modulation signal which is sampled during sampling time, in accordance with the frequency demodulation method; and the step(ST26 to ST28) of judging the occurrence of erroneous operation of gear by permitting the monitoring unit to monitor the demodulated frequency and the rotation variation of the gear.
Patent KR-20020054956-A (KR)
Title: Lead renewal device of tantal pellet
Inventor: KIM GEUN BAE
IPC: H01G13/00
Filed: 2000-12-28
Abstract: PURPOSE: An apparatus for extending a lead of a tantalum element is provided to reduce an unevenness bed or a small projection generated on a cutting part of the lead. CONSTITUTION: An apparatus connects a supporter(2) to a base(1), and also a motor(3) to the supporter(2). The apparatus transmits power by using a pulley(4). A main fixed bracket(10) is established upper of the supporter(2) so that a central shaft(11) is inserted and also is connected with the pulley(4). First and second roller(12,13) are located in front of the central shaft(11) and coupled with pins(14) on keeping an angle of 15 degree. A lead presser(15) is located in front of the main fixed bracket(10) and presses a lead of tantalum element(5) upward and downward. Therefore, stability of quality is improved by reducing an unevenness bed or a small projection generated on a cutting part of the lead.
Patent KR-20020056149-A (KR)
Title: Fuel supply apparatus for fc
Inventor: HWANG YONG JUN
IPC: H01M8/04
Filed: 2000-12-29
Abstract: PURPOSE: Provided is a fuel cell with air supply device which supplies purified air to the anode of the stack so that reduction reaction at the cathode is activated and effective generation of electricity is enhanced. CONSTITUTION: The fuel cell is obtained the power through the electro-chemical reaction by supplying hydrogen to the anode of the stack and supplying air to the cathode. The air-purifying device(15) located on the air line(12) for the above fuel cell includes: water storage tank(42) and the separator plate(44) situated at the surface of the water with a certain clearance(43) and stored in the tank; and the turbidity detector sensor(45) at the bottom of the inside of the water tank.
Patent KR-20010021599-A (KR)
Title: 기체투과형 하드 콘택트 렌즈의 제조 방법 및 기체투과형하드 콘택트 렌즈
IPC: B29K27/12
Filed: 1999-04-30
Abstract: 5 내지 50 % 의 압축성 및 300 내지 1,500 g 의 압축 가요 파괴 강도를 갖도록 가열하여 압연된 가교 기체 투과형 하드 콘택트 렌즈 재료로 구성된 기체 투과형 하드 콘택트 렌즈를, 가교 기체 투과형 하드 콘택트 렌즈 재료를 가열하여 압연한다음 압연된 재료를 기계 가공하여 수득하는 것으로 이루어진 기체 투과형 하드 콘택트 렌즈 제조 방법.     상기 방법은 광학적 왜곡이 없고, 투명도가 우수하며, 내부 응력이 작고, 설치가 용이하고 내구성 강도가 향상된 기체 투과형 하드 콘택트 렌즈를 효율적으로 제조할 수 있다.
Patent KR-20010022393-A (KR)
IPC: B05B17/06
Filed: 1998-07-15
Abstract: The present invention relates to an ultrasonic device for atomizing liquids. This device is comprised of at least one atomization unit (1) wherein an approximately upward directed ultrasonic transducer (2) is located at the bottom of each unit (1) and the top of each unit (1) is open (covered by gas), and is characterized by a reservoir (3) connected to all of the units (1), means for maintaining a minimum liquid level in each unit during atomization, a high frequency electric supply connected to each transducer (2), and means (6) for circulating the liquid to be atomized through the reservoir (3), across each transducer (2), and back to the reservoir (3).
Patent KR-20010023475-A (KR)
IPC: B66F11/04
Filed: 1998-08-28
Abstract: A work assist vehicle (10) includes a self propelled, steerable body (20) having a chassis (24) and a drive mechanism (30) supported on the chassis; a mast assembly (40) coupled to the body; and, a personnel compartment (50) attached to the mast assembly and being movable by the mast assembly toward and away from the body. The body further includes a cover (80) adapted to extend over a portion of the chassis and a weight sensor assembly (90) coupled to the chassis and the cover. The weight sensor assembly is capable of detecting if someone or something is located on the cover.
Patent KR-20010024121-A (KR)
Title: 개질된 알룸옥산 촉매 활성화제
IPC: C07F5/06
Filed: 1998-09-16
Abstract: 본 발명은, 하기 화학식 3에 상응하는 알루미늄-함유 루이스산의 혼합물을 포함하는 조성물을 포함하는, 에틸렌성 불포화 중합가능한 단량체(특히 올레핀)를 중합시키기 위한 3 내지 10족의 금속중 금속 착체를 활성화시키는데 사용하기 위해 특별히 채택된 촉매 활성화제에 관한 것이다: 
     화학식 3 
     [(-AlQ 1 -O-) z (-AlAr f -O-) z' ](Ar f   z" Al 2 Q 1   6-z" ) 
     상기 식에서, 
     Q 1 은 각 경우 독립적으로 C 1-20 알킬로부터 선택되고; 
     Ar f 는 6 내지 30개의 탄소원자로부터의 플루오르화된 방향족 하이드로카빌 잔기이고; 
     z는 1 내지 50, 바람직하게는 1.5 내지 40, 보다 바람직하게는 2 내지 30이고, 잔기 (-AlQ 1 -O-)는 2 내지 30개의 반복 단위를 갖는 환형 또는 선형 올리고머이고; 
     z'는 1 내지 50, 바람직하게는 1.5 내지 40, 보다 바람직하게는 2 내지 30이고, 잔기 (-AlAr f -O-)는 2 내지 30개의 반복 단위를 갖는 환형 또는 선형 올리고머이고; 
     z"는 0 내지 6이고, 잔기 (Ar f   z" Al 2 Q 1   6-z" )는 트리(플루오로아릴알루미늄), 트리알킬알루미늄, 또는 트리알킬알루미늄의 화학량론적 양 이하의 양 내지 화학량론적 양을 초과하는 양을 갖는 트리(플루오로아릴알루미늄)의 부가물이다.
Patent KR-20010024251-A (KR)
Title: 비행 시간형 질량 분석계용 2차 이온 발생기 검출기
IPC: H01J49/02
Filed: 1998-09-22
Abstract: 본 발명에 따른 이온 검출기에는 2차 하전 입자 발생기가 포함되며, 이 발생기는 그 발생기에 접촉하는 1차 이온에 응답하여 2차 하전 입자를 발생시킨다.  상기 2차 하전 입자 발생기는, 전자 방출 검출기에 접촉하는 1차 이온 및 2차 하전 입자에 응답하여 전자를 발생시키는 전자 방출 검출기를 향해 2차 하전 입자를 반발시키는 정전기 전위를 갖는다.  상기 전자 방출 검출기는 2차 하전 입자를 끌어 당기는 전계를 갖는다.  상기 전자 방출 검출기에 의해 발생된 전자를 검출하고 신호를 발생시키는 애노드가 제공된다.
Patent KR-20010015610-A (KR)
IPC: H01J37/063
Filed: 1998-09-24
Abstract: A charged particle beam column assembly for mounting to an evacuated charged particle beam source chamber. The assembly has a sequence of controlled pressure chambers (55-57), each having inlet and outlet apertures (51A-54A) through which a charged particle beam can pass and an evacuation port (59) for connection to a pump to enable the pressure in the chamber to be controlled. The pressure in successive chambers (55-57) increases in use. An evacuation port (59) is connected to a downstream chamber via a conduit (145,146) which extends within the assembly past at least one upstream chamber. <IMAGE>
Patent KR-20010033066-A (KR)
IPC: B01J23/52
Filed: 1998-12-03
Abstract: 본 발명은, 팔라듐 및 금 금속; 유리 금속 또는 아세트산 구리로서의 구리; 및 산화물 또는 산화물과 유리 금속의 혼합물로서의 마그네슘, 칼슘, 바륨 및 지르코늄으로 이루어진 군으로부터 선택된 제 4 금속이 다공성 표면상에 촉매 효과량으로 침착된 다공성 지지체를 포함하는, 반응물로서 에틸렌, 산소 및 아세트산의 반응에 의한 비닐 아세테이트의 제조를 위한 촉매에 관한 것이다.
Patent KR-20010033629-A (KR)
Title: 광학 픽업 및 광학 재생 장치
IPC: G11B7/09
Filed: 1999-10-27
Abstract: 광학 픽업 및 광학 재생 장치에 있어서, 그 광학 부품 갯수의 삭감 및 광학적인 배치 설정시에 얼라인먼트의 간단화를 가능하게 하고, 장치 ㅈ너체의 ㅅ간소화, 소형화를 도모하는 동시에, 모든 피트 깊이의 광학 기록 매체에 대해 트래킹 에러 신호가 안정되게 얻어지고, 반도체 프로세스에 의한 제조가 용이하게 이루어질 수 있게 한다.  구체적으로는, 발광부(LD, M)와, 광 검출 소자(PD1, PD2)로 이루어지는 수광부와, 발광부로부터의 출사광(L F )를 광학 기록 매체(2)에 수속 조사하고, 또 이 광학 기록 매체(2)로부터 반사된 복귀광(L R )을 수속시키는 수속 수단(3)을 갖고, 발광부(LD, M)와 수광부(PD1, PD2)가 동일 반도체 기체(7)에 형성되고, 이 반도체 기체(7)에 수속 수단(3)의 공통 초점이 설정되고, 복귀광(LR)의 수속 수단(3)에 의한 공통 초점 위치 근방의, 복귀광(L R )의 수속 한계 이내의 위치에 광 검출 소자(PD1, PD2)가 배치형성되고, 광학 기록 매체(2)의 정보 기록이 이루어진 피트(P) 혹은 영역의 단부에 의해 생기는 복귀광(L R )을 광 검출 소자(PD1, PD2)에 의해 수광 검출하여 트래킹 에러 신호를 점검하는 광학 픽업 장치 및 광학 재생 장치(10)를 구성한다.
Patent KR-20010086239-A (KR)
Title: 광파이버관찰용 화상처리장치와 그것을 구비한광파이버융착접속장치
IPC: G01B11/27
Filed: 1999-12-06
Abstract: 본 발명의 광파이버관찰용 화상처리장치(10)는, 텔레비전카메라(1)의 촬영화상 및 그 화상을 처리해서 얻게되는 광파이버(2),(3)에 관한 정보를 텔레비전모니터(4)출력가능한 광파이버관찰용 화상처리장치(10)에 있어서, 텔레비전모니터(4)에, 텔레비전카메라(1)로부터의 화상을 90°회전시킨 화상과, 회전시키고 있지 않는 화상을 절환출력가능하게 하였다. 
     본 발명의 광파이버융착접속장치는 본체에, 2개의 광파이버(2),(3)를 융착접속하기 위한 융착접속기구와, 청구의 범위 제 1항∼제 7항의 어느 한 항에 기재된 광파이버관찰용 화상처리장치(10)를 구비하고, 동화상처리장치(10)의 텔레비전모니터(4)는 본체에 대한 방향을 자유롭게 변경가능하며, 또한, 반전표시기능을 구비하고 있다.
Patent KR-20010041572-A (KR)
Title: 협대역 간섭 신호 존재시 수신기의 동적 범위를향상시키기 위한 장치, 시스템 및 방법
IPC: H04B1/10
Filed: 1999-03-04
Abstract: 본 발명에 따른 장치, 시스템 및 방법은 협대역 간섭 신호의 존재시 수신기의 동적 범위를 향상시킨다.  수신된 신호의 오류율이 계산되고, 수신기에서 저 잡음 증폭기의 입력 차단점이 오류율에 의거하여 조절된다.  전송 전력 레벨이 검축되고, 입력 차단점은 상기 전송 전력 레벨에 의거하여 역시 조절된다.  수신된 신호 강도 역시 검출괴고, 저 잡음 증폭기의 이득은 상기 수신된 신호 강도에 의거하여 조절된다.  이러한 방법에 있어서, 상기 수신된 신호의 혼변조 효과는 감소된다.
Patent KR-20010043125-A (KR)
Title: 피부 보호 조성물이 배치된 흡수제품
IPC: A61F13/472
Filed: 1999-04-30
Abstract: 본 발명은 피부 보호 조성물이 상부에 배치된 커프스를 갖는 기저귀와 같은 흡수제품에 관한 것이다.  커프스상에 배치된 피부 보호 조성물은 정상적인 접촉 및/또는 착용자 움직임 및/또는 체열에 의해 착용자의 피부로 옮겨갈 수 있다.  커프스는 물질 친화성 및 공정 친화성인 내유성 접착제를 사용하여 일부이상으로 조립된다.
Patent KR-20010025103-A (KR)
Title: 로봇 장치 및 그 제어 방법
IPC: B25J13/08
Filed: 1999-11-25
Abstract: 가속도 센서나 회전각 센서에 의해 가속도 정보나 회전각 정보나 회전각 속도 정보를 검출하고, 검출된 신호를 시계열적(時系列的)으로 기억부에 기억시킨다. 기억된 시계열 신호로부터 분산 등의 특정 정보를 산출하고, 이 특정 정보로부터 로봇 장치의 상태를 판정한다. 또 이 상태로서 들어 올려진 것을 인식했을 때에는, 외부에 작용하는 소정 가동부(可動部)의 움직임을 정지시킨다.
Patent KR-20010052525-A (KR)
Title: 세포내에서 아폽토시스를 유발하는 방법
Filed: 1999-06-02
Abstract: 본 발명은 아폽토시스를 유발하는 방법에 관한 것으로, C1D 유전자는 세포내, 특히 종양 세포에서 과도발현된다. 이것은 예를 들어 세포에서 대응하는 발현 구조체를 도입함으로써, 또는 세포 자신의 C1D 유전자의 발현의 외생적 자극에 의해 발생한다.
Patent KR-20020061346-A (KR)
Title: Apparatus and method for indicating direction of camera viewer point in mobile wireless terminal
Inventor: CHUN EON SEOK
IPC: H04N5/232
Filed: 2001-01-16
Abstract: PURPOSE: A method and a device for indicating a camera direction in a mobile wireless terminal are provided to automatically adjust a view angle to a size of a subject, and to make a center of the subject located in a center of a screen without viewing the screen of the mobile wireless terminal. CONSTITUTION: A controller decides whether a key corresponding to the driving of a camera is inputted from a key input unit(400). If not, a corresponding function is provided(402), and if inputted, the controller drives a laser emitting unit(404). The controller checks whether a pointer of the laser emitting unit is located in a center of a subject(406). If so, the controller informs a user that the subject is located in a center of a display unit(408). The controller decides whether a key corresponding to an operation of a camera shutter by a user is inputted(410). If so, the controller suspends the driving of the laser emitting unit(412).
Patent KR-20020061966-A (KR)
Title: Multi-purpose mixing blade for setting vertical lining wall in deep mixing method in civil and environment
Inventor: JUNG MUN GYEONG
IPC: E02D3/12
Filed: 2001-01-19
Abstract: PURPOSE: A blade for stirring of a deep admixing apparatus for distributing and admixing enhancer is provided to improve nature of soil and earth by continuously introducing the enhancer into the ground. CONSTITUTION: The blade comprises a spiral agitating blade(30) and rod(40); a band section(10) vertically on outer circumferential side of the rod; and a grinding blade(20) below the band section(10) inclined at 10-20 degrees relative to an axial center line of the rod(40). The blade(30) is positioned apart from the rod(40) to form an aperture(50) in order to efficiently accomplish the breaking and admixing performance by rotational force of the rod(40). A supporting bar(60) is mounted on the grinding blade(20) to be connected with the rod(40). The supporting bar(60) is prepared of alloy metal having superior abrasion-resistance and strength.
Patent KR-20020061996-A (KR)
Title: Mold for injection molding
Inventor: JUNG JAE HYEOK
IPC: B29C45/44
Filed: 2001-01-19
Abstract: PURPOSE: A mold for injection is provided to produce a helical gear of high quality by precisely assembling combining portions with combining recesses and to easily release a form of a complicated shape from a mold by individually rotating a first rotating member and a second rotating member. CONSTITUTION: An injection mold includes a first and a second molds(10,20) adjacent to each other and forming an inside forming space, a first rotating member(13) rotatably combined to the first mold and having a first helical gear tooth profile(13c), and a second rotating member(23) rotatably combined to the second mold and having a second helical gear tooth profile(23c) of which direction of a tooth profile is different from that of the first helical gear tooth profile. A first combining portion(11) having a tapered outer face is formed in the first mold. A fist combining recess(13a) combined with the first combining portion is formed on one face of the first rotating member. A second combining recess(22a) is formed in the second mold. A second combining portion(23a) combined with the second combining recess is formed on the outer face of the second rotating member. The first and second combining portions are precisely combined with the first and second combining recesses. When the mold is split, the first and second rotating members are rotated individually.
Patent KR-20020063088-A (KR)
Inventor: LIM TAEK SOON
IPC: F41B11/62
Filed: 2001-01-26
Abstract: PURPOSE: An air rifle is provided to reduce a manufacturing cost and labor force by simplifying the components of the air rifle and to continuously shoot the air rifle without causing the malfunction of the air rifle. CONSTITUTION: An air rifle includes a barrel, a plunger, a trigger and a butt plate. A plurality of pressurized air chambers(2) is formed in the butt plate. An exhaust valve(3) is formed at a front of the pressurized air chambers(2) and a filling valve(4) is formed at a rear of the pressurized air chambers(2). A pressurized pump(5) is attached to a lateral portion of the pressurized pump(5). An exhaust port(6) is formed at an upper end of the exhaust valve(3). A cylinder(11) communicated with the exhaust port(6) is provided in an engine section. A plunger cylinder(7) is formed at a lower end of the cylinder(11). A piston(12) is accommodated in the cylinder(11). A lever(14) is installed in a lever hole(13). A bullet supplying section(17') is inserted into a cutting part of a bracket(17). A pressure adjusting section(9) is attached to a spring shaft of a plunger(8).
Patent KR-20020065023-A (KR)
Title: System and method for an internet auction
Inventor: LIM SUNG SIK
Filed: 2001-02-05
Abstract: PURPOSE: A system and a method for the Internet auction are provided to make a user buy a bidding article before the closure of the auction and compensate the difference between the bidding price and the paid article price after fixing the bidding price. CONSTITUTION: The Internet auction system comprises an auction DB(120), an auction system(110) linking with the DB, an auction operation server(100) including the DB and the auction system and providing the wire/wireless communication environment, and a bank BMS for confirming the reception of the transfer from a winning bidder by linking with the auction system. A PG server(300) of an electronic payment cooperating company provides a payment service through a payment tool by linking with the auction operation server. The auction DB(120) stores and manages the member information, the auction registration information, the bidding information, the auction management code information, the delivery information, the instant purchase information, the price payment information and so on.
Patent KR-20010082072-A (KR)
Title: Solid-state image pickup device
Inventor: MASUKANE KAZUYUKI
IPC: H04N5/369
Filed: 2001-02-08
Abstract: PURPOSE: To solve the problem of the manufacturing cost from rising accompanying with that a more high microprocessing technology is required for forming A/D conversion parts in the conventional MOS solid state image sensing elements containing the A/D conversion parts as the integration degree of the photoelectric conversion element is more elevated. CONSTITUTION: A number of photoelectric conversion elements are arranged so as to offset pixels over a plurality of rows and a plurality of columns, and analog/digital conversion parts are disposed one to one on two columns among the plurality of photoelectric conversion element columns to obtain a MOS solid state image sensing element.
Patent KR-20010078795-A (KR)
Title: Active anti-vibration apparatus and exposure apparatus
Inventor: IWAI ISAO
IPC: G03F7/22
Filed: 2001-02-09
Abstract: PURPOSE: To further inhibit the remaining inclination of a body structure in order to enhance the performance of an active vibration-resisting device and an exposure device using it. CONSTITUTION: An air spring type vibration-resisting device is provided with a plurality of active support legs having an air spring actuator for supporting a vibration-resisting stand, a vibration measurement means for measuring a vibration of the vibration-resisting stand and a position measurement means of measuring a position of the vibration-resisting stand, an acceleration feed back loop based on an output of the vibration measurement means, and a position feed back loop based on an output of the position measurement means. The device is provided with speed profilers 8, 9 for producing a speed profile for driving a stage placed on the vibration-resisting stand, and PI compensators 10X, 10Y as a compensator against the speed profile. The inclination of a body structure including the vibration-resisting base generate by a driving of the stage placed on the vibration-resisting stand is corrected by feed-forwarding an output of the PI compensators 10X, 10Y to the air spring type vibration- resisting device.