Patent SG-11201809631U-A (SG)
Title: Compact microwave plasma applicator utilizing conjoining electric fields
Inventor: KAMAREHI MOHAMMAD
IPC: H01J37/32
Filed: 2017-05-05
Abstract: INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property Organization International Bureau (43) International Publication Date 30 November 2017 (30.11.2017) WIPO I PCT omit VIII VIII lII D III ovialooluil Immo (10) International Publication Number WO 2017/205034 A2 (51) International Patent Classification: HO1J 37/32 (2006.01) (21) International Application Number: PCT/US2017/031275 (22) International Filing Date: 05 May 2017 (05.05.2017) (25) Filing Language: English (26) Publication Language: English (30) Priority Data: 15/166,777 27 May 2016 (27.05.2016) US (71) Applicant: MKS INSTRUMENTS, INC. [US/US]; 2 Tech Drive, Suite 201, Andover, Massachusetts 01810 (US). (72) Inventors: KAMAREHI, Mohammad; 504 Katandin Dri- ve, Lexington, Massachusetts 02421 (US). HU, Chaolin; 6 Dove Lane, North Billerica, Massachusetts 01862 (US). KELLER, Olivia; 14 Boxford Road, Topsfield, Massachu- setts 01983 (US). (74) Agent: MILLS, Steven M. et al.; Burns & Levinson LLP, 125 Summer Street, Boston, Massachusetts 02110 (US). (81) Designated States (unless otherwise indicated, for every kind of national protection available): AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (84) Designated States (unless otherwise indicated, for every kind of regional protection available): ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG). Declarations under Rule 4.17: as to applicant's entitlement to apply for and be granted a patent (Rule 4.1700) (54) Title: COMPACT MICROWAVE PLASMA APPLICATOR UTILIZING CONJOINING ELECTRIC FIELDS (57) : A plasma applicator includes a plasma discharge tube and a mi- 100 crowave cavity at least partially surrounding a portion of the plasma discharge tube. Microwave energy is coupled to the microwave cavity via a coupling iris. At least two orthogonal dimensions of the microwave cavity are selected such that //6 the microwave energy in the microwave cavity propagates in a transverse electric 192 (TE) mode. Primary electric fields generated from the microwave energy com- 118 bine with an evanescent electric field generated from the coupling iris, such that a combined electric field in the microwave cavity is substantially uniform along the longitudinal axis of the plasma discharge tube. A plurality of radial microwave chokes is disposed over an exterior of the plasma discharge tube. Positions of the W O 20 17 / 205 03 4 A2 microwave chokes are such that microwave energy propagating in the TE mode and a transverse electric magnetic (TEM) mode is attenuated. L-120 Fig. [Continued on next page] 122 WO 2017/205034 A2 MIMMOMMIONMEOMION100111100HIMOEMIE Published: without international search report and to be republished upon receipt of that report (Rule 48.2(g))