Patent SG-11201804995U-A (SG)
Title: Automatic deskew using design files or inspection images
Inventor: JAIN ARPIT
IPC: H01L21/67
Filed: 2017-01-31
Abstract: INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property -, Organization MD 1111101110101011111 HO 11111 01110111001101101101110111110 ill OEN International Bureau ... .jd (10) International Publication Number (43) International Publication Date ..... .....!;,' WO 2017/136359 Al 10 August 2017(10.08.2017) WIPO I PCT (51) International Patent Classification: jasekhar; 1065 Alta Mira Drive #A, Santa Clara, Califor- HO1L 21/66 (2006.01) HO1L 21/67 (2006.01) nia 95051 (US). PRASAD, Hema; C208 Ceebros Belvedere, School Main Road, Kumarasamy Nagar Main (21) International Application Number: Road, Sholinganallur, Chennai 600119 (IN). MOMULA, PCT/US2017/015880 Saiyashwanth; 17-117/1, Sri Nagar Colony, Nagarkur- (22) International Filing Date: nool, Mahabubnagar, Telangana 509209 (IN). LOBO, 31 January 2017 (31.01.2017) Arun; 'Empire' Kalpana Road, Kankanady Post, Man- galore, Karnataka 575002 (IN). (25) Filing Language: English (74) Agents: MCANDREWS, Kevin et al.; KLA-TENCOR (26) Publication Language: English CORPORATION, Legal Department, One Technology (30) Priority Data: Drive, Milpitas, California 95035 (US). 201641004030 4 February 2016 (04.02.2016) IN (81) Designated States (unless otherwise indicated, for every 62/309,623 17 March 2016 (17.03.2016) US kind of national protection available): AE, AG, AL, AM, 15/258,546 7 September 2016 (07.09.2016) US AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, (71) Applicant: KLA-TENCOR CORPORATION [US/US]; BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, Legal Department, One Technology Drive, Milpitas, Cali- DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, fornia 95035 (US). HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, (72) Inventors: JAIN, Arpit; 203-A Paramount, 8 Gyan Park, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, Telephone Nagai, Indore, Madhya Pradesh 452016 (IN). NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, _ YATI, Arpit; 1/480 Vardan Khand, Gonti Nagar, Luc- RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, — _ know, Uttar Pradesh 226010 (IN). JAYARAMAN, Thiru- TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, purasundari; Apt 9J, West Block, SIS Merdian,7, Gangai ZA, ZM, ZW. Nagar, Velacherry 100 Feet Bypass Road, Chennai 600042 KONURU, Raghavan; 40-814-6, Srinivasa Nagar, (84) Designated States (unless otherwise indicated, for every = (IN). Kurnool, Andra Pradesh 518004 (IN). KUPPA, Ra- kind of regional protection available): ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, [Continued on next page] Title: AUTOMATIC DESKEW USING DESIGN FILES OR INSPECTION IMAGES = (54) = 100 (57) : Deskew for image review, such as SEM review, aligns in- spection and review coordinate systems. Deskew can be automated using design files or inspection images. A controller that communicates with a re- view tool can align a file of the wafer, such as a design file or an inspection = = = lin image, to an image of the wafer from the review tool; compare alignment sites of the file to alignment sites of the image from the review tool, and gen- erate a deskew transform of coordinates of the alignment sites of the file and - = 102 105 coordinates of alignment sites of the image from the review tool. The image of the wafer may not contain defects. = = 111061137j = 108 = 103 \. 11 11 in cr) cr) ,—, 104 FIG. 1 IN ,—, © ei O WO 2017/136359 Al MIDEDIM01101 DIVIIMOID1301110011011111111111111111111111111111111111 TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, Published: TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, DE, LT, SE, GA, with international search 21(3)) report (Art. GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG).