Patent SG-11201809349S-A (SG)
Title: System and method for in-line monitoring of airborne contamination and process health
Inventor: CHOU TSUNG- KUAN A
IPC: G01N33/00
Filed: 2017-04-26
Abstract: INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property 1#11101111011101010111110101111101110111110111101110111011111110111011# Organization International Bureau (10) International Publication Number (43) International Publication Date .....0\"\" WO 2017/189747 Al 02 November 2017 (02.11.2017) W I PO I PCT (51) International Patent Classification: (72) Inventors; and G01N 33/00 (2006.01) (71) Applicants (for US only): CHOU, Tsung- Kuan A. (21) International Application Number: [US/US]; 4861 Montreal Drive, San Jose, California 95130 PCT/US2017/029674 (US). CHUNG, Pei-Wen; 3rd Floor, No.1-2, Aly.6, Lane 187, Yongji Road, Xinyi District, Taipei City, 110 (TW). (22) International Filing Date: WANG, Li-Peng [US/ ]; 3rd Floor, No. 40, Lane 83, Sec- 26 April 2017 (26.04.2017) tion 1, Chongqing North Road, Datong District, Taipei City, 103 (TW). (25) Filing Language: English (74) Agent: BECKER, Todd M. et al.; Blakely, Sokoloff, Tay- (26) Publication Language: English lor & Zafman, 1279 Oakmead Parkway, Sunnyvale, Cali- (30) Priority Data: fornia 94085 (US). 62/329,791 29 April 2016 (29.04.2016) US (81) Designated States (unless otherwise indicated, for every 15/496,931 25 April 2017 (25.04.2017) US kind of national protection available): AE, AG, AL, AM, (71) Applicant: TRICORNTECH TAIWAN; Building C, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, No.18, Siyuan Street, Zhongzheng District, Taipei City, 100 CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, (TW). DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, = (54) Title: SYSTEM AND METHOD FOR IN-LINE MONITORING OF AIRBORNE CONTAMINATION AND PROCESS HEALTH = = = — z sr, Remo:e Data/Control Server 228 —232- 200 = = = — 206 . . or = 04 — .— ....— —, —___ _ = = — : TAMC 226 2..z4 22;c2 Nligh 6 _ N I i ll i lla bh... NIIW .— -- — Process Load Process Chamber 202 4 ---- Va 4 = = = = _ = 11 .4 IN ii- IN c:( (57) : The disclosure describes GO apparatus includes a manifold having a plurality 1-1 --.... the sampling tube bus comprising a plurality of individual sampling IN of the plurality of inlets. One or more analyzers C 1-1 fluid drawn into the manifold through one or more N coupled to the one or more analyzers. Other embodiments of 'IN are each fluidly embodiments 22 214 of an inlets and one of the plurality 222 ' are - N...- -- 222 N airborne molecular contamination (AMC) monitoring described and claimed. FOUP ® -=- ---' [cad Pod 204 or more of tubes, each coupled F Interface rct 208 2 - 0 outlets. to one of the one or individual sampling tubes. Lock Chamber 210 , O A sampling tube individual sampling tube being fluidly coupled to one 212 bus fluidly more outlets A control 16 2 Fig. 2 apparatus. The AMC is coupled to the manifold, of the manifold to analyze and communication system C [Continued on next page] WO 2017/189747 Al MIDEDIMOMOIDEIROIDEMOMMEIMOBEIMOVOIMIE PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (84) Designated States (unless otherwise indicated, for every kind of regional protection available): ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG). Published: — with international search report (Art. 21(3))