baber/WOPTO huggingface dataset:
Patent KR-20020044195-A (KR)
Title: E-cash and money transfer system and e-money payment systems, e-commerce payment methode on the wireless terminal adapted for multi commbi-card
Inventor: JEONG MYEONG DEOK
IPC: H04B5/00
Filed: 2000-12-05
Abstract: PURPOSE: An apparatus for giving a charge of money using a mobile terminal having a multi-combination card and an electronic settlement system and method are provided to embody an electronic money concept through a user authentication and security algorithm as well as various electronic financial settlements on-line and off-line. CONSTITUTION: An electronic financial settlement system consists of a wireless terminal(10), a VAN system(40), a financial institute(50), and a plurality of affiliated stores(20). The wireless terminal(10) is used when a user gives a charge of electronic money or settles service charges. The VAN system(40) retrieves the user's credit standing through a wireless network(30) from the wireless terminal(10) and issues a usage certificate associated with electronic settlement. The financial institute(50) processes the financial transaction information of the VAN system(40). Using electronic money, the user executes settlement in the affiliated stores(20).
Patent KR-20020043925-A (KR)
Title: Triple mass vibration damping flywheel for vehicles
Inventor: SONG YEONG RAE
IPC: F16F15/12
Filed: 2000-12-05
Abstract: PURPOSE: A triple mass vibration damping flywheel is provided to sufficiently damp the torsional vibration of an engine before the torsional vibration approaches a transmission by installing a compressive coil spring, a tensile coil spring and a sliding mass and to easily realize the optimal hysteresis loop by the combination of the compressive coil spring and the tensile coil spring. CONSTITUTION: A triple mass vibration damping flywheel includes a primary mass(1) having a circumferential spring guide on the face facing a transmission, a secondary mass(2) supported on the primary mass and a ball bearing, a compressive coil spring(5) inserted to the spring guide, slide masses inserted between compressive coil springs at a specific interval, and a tensile coil spring(6) to connect the primary mass with the slide mass. If the torque of an engine is changed, the rotational force of the primary mass increases. Thus, relative rotation with a drive plate(4) occurs. Then, the tensile coil spring is stretched, while the compressive coil spring is compressed by the slide mass and the drive plate. The secondary mass also rotates by the rotational force of the primary mass and the drive plate. The force transmitted to the springs varies by the centrifugal force applied variably depending on the rotational speed of the engine. Therefore, operating torque is varies corresponding to the rotational speed of the engine.
Patent KR-20020044353-A (KR)
Title: A test socket
Inventor: LEE GYEONG JUN
IPC: H01R33/76
Filed: 2000-12-05
Abstract: PURPOSE: A test socket is provided to prevent a damage of a lead of a semiconductor package in the process of testing the semiconductor package and to maintain stable contact between the semiconductor package and the test socket. CONSTITUTION: A test socket electrically connects a semiconductor package loaded on a transfer carrier with a test board to test the semiconductor package. The test socket includes an air block(20), a plurality of connectors(21) and an air compressor. The air block is set on the test board. Each of the connectors is arranged in the air block in such a manner that one end of the connector corresponds to a lead or a ball of the semiconductor package and the other end corresponds to a connection terminal of the test board. The air compressor compresses air of the air block to support the connectors according to the air.
Patent KR-20020049860-A (KR)
Inventor: PARK YONG
IPC: H01L27/14
Filed: 2000-12-20
Abstract: PURPOSE: A complementary-metal-oxide-semiconductor(MOS) image sensor is provided to prevent the quality of an image from being deteriorated by noise, by making a photodiode n+ region control electrons generated by the heat on the surface of a photodiode region so that the electrons are prevented from being recombined or migrating to a photodiode n region. CONSTITUTION: Transfer gates(36) are formed on a semiconductor substrate(31). Photodiode n regions(33) are positioned in the first depth at one side of the transfer gates, separated from the transfer gates by a predetermined interval. Photodiode surface p regions(34) has an interface of the same area as the photodiode n region, corresponding to the photodiode n region and having the second depth shallower than the first depth. Photodiode n+ regions(38) are positioned in the second depth in a portion where a photodiode surface p region is separated from the transfer gate. Floating regions are formed at the other side of the transfer gates.
Patent KR-20020051262-A (KR)
Title: Apparatus for piling up the sheets
Inventor: KIM JI YONG
IPC: B21B39/14
Filed: 2000-12-22
Abstract: PURPOSE: An apparatus for piling up sheets is provided to prevent quality deterioration of the sheets and stopping of production and safety accidents by improving piling conditions of the sheets and automatically correcting defectively piled sheets by sensing the piling conditions. CONSTITUTION: In an apparatus for piling up sheets comprising an air blowing part blowing air to the lower surface of a sheet(1) to be transferred which is positioned at the discharge end of a transfer belt, a top part guiding guide(A) with which the front part of the sheet transferred by the transfer belt is collided, and a sheet piling stand which is positioned between the air blowing part and the top part guiding guide, the apparatus for piling up sheets further comprises an elastic support means elastically supporting the rear surface of the top part guiding guide to reduce impact force due to collision of the sheet(1), wherein the apparatus further comprises a first driving means moving the top part guiding guide(A) back and forth, a second driving means moving the top part guiding guide up and down and a first sensing means selectively operating the first or second driving means by sensing piling conditions of sheets piled.
Patent KR-20020052366-A (KR)
Title: an assistant charging equipment of hybrid electric vehicle
Inventor: KIM YEONG ROK
IPC: H02J7/14
Filed: 2000-12-26
Abstract: PURPOSE: An auxiliary charging apparatus is provided to charge battery without fuel consumption and lengthen travel duration by permitting battery to be charged even in the travel condition where an engine is not in operation. CONSTITUTION: An auxiliary charging apparatus is characterized in that a ferrite magnet core(27) is arranged at a side of a disk(25) of a retarder(20), and the ferrite magnet core is connected to a charger device(7) constituted by a rectifier(7a), a booster(7b) and a voltage stabilizer(7c). When a vehicle travels, a propeller shaft(10) rotates, and the disk fixed to the propeller shaft rotates in sequence, to thereby generate an induction current at the ferrite magnetic core. Thus-generated induction current is charged to a battery(4) through the charger device.
Patent KR-20020053893-A (KR)
Title: remote control relay
Inventor: PARK TAE KN
IPC: H04B1/59
Filed: 2000-12-26
Abstract: PURPOSE: A remote controller repeater is provided to simply and remotely control a device without a necessity of moving with a remote controller to a position of the device which is somewhat distanced from the remote controller or limited in an operation distance or in a reception angle by installing a repeater having an infrared ray receiving unit and emitting unit around the device manipulated by the remote controller. CONSTITUTION: A remote controller(10) manipulates a TV set, an audio set, a video set, an air-conditioner. A repeater(20) is placed near the TV set, the audio set, the video set or the air-conditioner to receive an operation signal of the remove controller(10) and transmits a light receiving signal to the devices by wire. The repeater(20) includes a light receiving unit(21) for receiving an operation signal(infrared ray light) radiated from the remote controller(10), an amplifier unit(22) for amplifying the signal received from the receiving unit(21), a transmitting unit(23) for transmitting the signal amplified by the amplifier(22) to the devices by wire; and a light emitting unit(24) for emitting the signal amplified by the amplifier(22) to the devices. The repeater(20) connects the devices through the transmitting unit(23). If the devices operated by the remote controller(10) are distanced from each other or installed at a site beyond the operation distance or reception angle, the repeater(20) is installed for every device closely. The repeaters(20) for each device are mutually connected by wire.
Patent KR-20020052810-A (KR)
Title: Method for providing a purchase service through mobile communication network
Inventor: KWON HYEOK JIN
IPC: G06Q20/16
Filed: 2000-12-26
Abstract: PURPOSE: A method for providing a product buying service using a mobile communication network is provided to enable a user to pay a product price remotely through the mobile communication network after picturing or scanning a price tag of a barcode format by using a camera or a barcode reader attached to a mobile communication terminal. CONSTITUTION: The method comprises the steps of receiving the barcode information transmitted from the mobile communication terminals(10-12) connecting through the mobile communication network(100), providing the product price matching to the received barcode information after confirming the product price, and calculating the product price by receiving the barcode information transmitted from the mobile terminal together with a payment request. The calculated product price is processed as the charge data by linking with the identification information of the mobile terminal.
Patent KR-20020054554-A (KR)
Title: The on land vehicle tax calculation method based on the driving distance and system thereof
Inventor: LEE SANG HYUN
IPC: G06Q50/30
Filed: 2000-12-28
Abstract: PURPOSE: A method for calculating a tax of a ground transporting device based on a mileage and a system thereof are provided to calculate a tax of a ground transporting device based on a mileage of the ground transporting device for displaying a movement amount of the ground transporting device directly. CONSTITUTION: A plurality of relay devices(51A...51N) is connected to a traveling tax calculating server(21) through a network(41). A plurality of vehicle terminals(90A...90N) performs a wireless communication with the traveling tax calculating server(21) or the relay device through the network(41). As the network(41), the Internet, a LAN, a WAN, a PSDN(Public Switched Data Network), a cable TV network, or a wireless communication network is used. A wireless communication network must be constituted between the vehicle terminal(90) and the relay device and between the vehicle terminal(90) and the network(41). The vehicle terminals(90A...90N), the relay device, and the traveling tax calculating server(21) must has a communication program corresponded to the network(41).
Patent KR-20010062846-A (KR)
Inventor: HONG YOUNG SU
IPC: B08B3/12
Filed: 2000-12-29
Abstract: PURPOSE: A washing device for a curtain is provided to efficiently eliminate dirt on the curtain by using a supersonic wave washing instrument and a rinse washing instrument. CONSTITUTION: A control unit(22) is operated to operate a pump for filling water to a supersonic wave washing tub(13) and a rinse washing tub(14). Separated vertical curtains are stored in the supersonic wave washing tub for eliminating dirt and bacteria in the curtain by using a supersonic wave generator. Herein, a protecting instrument is installed around the supersonic wave generator for protecting the curtain. The curtain is transferred to the rinse washing tub for being soaked. The curtain is hung in a first roller unit(16) and a sub roller unit(36) for being withdrawn by a first motor(15). The curtain is dehydrated while passing through the roller units. The curtain is deposited in a guide plate(62) for being completely dehydrated by a dehydrator(40).
Patent KR-20020057190-A (KR)
Title: Method for service data processing in intelligent network for mobile communication
Inventor: YOON CHEONG RO
IPC: H04W88/18
Filed: 2000-12-30
Abstract: PURPOSE: A method for processing service data in a mobile telecommunication intelligent network system is provided to maintain agreement of SMS(Service Management System) and SCP(Service Control Point) DBs by preventing message loss due to shortage of message queue resources, thereby improving the reliability of service data. CONSTITUTION: A message queue monitor processor monitors the size and the number of whole message queue of a system(ST11). It is determined whether the monitored message queue resources reach the maximum threshold or the minimum threshold(ST12). In the case of the maximum threshold, it is checked whether a congestion control flag is set(ST13). The message queue monitor processor transmits a message queue use-limiting signal to a message distribution processor(ST14). In the case of the minimum threshold, the message queue monitor processor transmits a message queue use-allowing signal to the message distribution processor(ST15). A communication processor receiving the message queue use-limiting signal drives a temporary processor to process a shared memory buffer. A message registered at a message distribution table is transmitted to the shared memory buffer and non-registered message are transmitted through message queue. The temporary processor analyzes the message transmitted to the shared memory buffer for performing database process.
Patent KR-20010030626-A (KR)
IPC: B65B43/14
Filed: 1998-09-21
Abstract: An apparatus and method for storing two different types of carton, and for selecting and transferring cartons (10, 30) to be packaged, which apparatus comprises a first hopper (58) for storing a first carton type, a second hopper (60) for storing a second carton type, carton engaging means incorporating means to provide a first position for engaging cartons from the first hopper and a different second position for engaging cartons from the second hopper and transfer means to transfer the cartons from its respective first or second hopper from the infeed end of a packaging machine.
Patent KR-20010031892-A (KR)
IPC: H01M10/0525
Filed: 1999-09-10
Abstract: 하기 화학식(1) 또는 (2)로 표시되는 불소 함유 에테르 화합물을 함유하는 안전성과 전기 특성이 뛰어난 비수전해액 및 이 비수전해액으로 된 2차 전지. 
     RO-(AO) n -CH 2 -X		(1) 
     X-CH 2 O-(AO) n -CH 2 -X		(2) 
     식 중, R은 C 1~20 탄화수소기를 나타내고; X는 C 1~10 불소 치환 탄화수소기를 나타내며; A는 C 2~4 알킬렌기를 나타내고; n은 1~30의 정수이다.
Patent KR-20010034223-A (KR)
Title: 다수의 관리 층을 가진 관리 네트워크를 사용한 알람 처리방법 및 통신 시스템
IPC: H04M3/00
Filed: 1999-01-14
Abstract: 본 발명은 관리 레벨(B,C)의 에이전트와 다음으로 가장 높은 관리 레벨(A,B)의 적어도 하나의 관리자(MA1,MA2) 사이의 알람 데이터를 조정하기 위하여 활성 알람 데이터를 전송하는 데에 기초한다.  본 발명에 따라, 메시지(alaAS,alaSC)는 관리자(MA1,MA2)에 의해 에이전트(AG)로 전송되고, 상기 에이전트에 의해 반복적으로 초기화되는 알람 데이터의 자동적인 조정을 요구하는 데에 사용된다.  상기 관리자(MA1,MA2)는 각각의 개별적인 요구를 에이전트(AG)에 의해 연속적으로 전송된 상기 메시지에 할당하기 위한 상관관계 데이터(aliNI)를 수신한다.  상기 관리자는 상기 에이전트로 전송된 적어도 하나의 파라미터에 기초하여 상기 알람 데이터의 조정을 제어한다.  본 발명에 따라, 알람 데이터의 조정은 에이전트에 의해 자동적 및 순환적으로 초기화되며, 이에 의해 상기 조정은 기본 기능에 관련하여 관리자에 대하여 파라미터로 설정될 수 있으며, 즉 모든 활성 알람이 에이전트에 의해 전송될 필요는 없고; 전송된 파라미터에 의해 단지 보다 정확한 방식으로 정의된 것만이 전송된다.  이러한 파라미터는 관리자에 의한 초기화를 요구하지 않고 관리자가 주기적 시간 간격으로 에이전트에 의해 독립적으로 제공되는 많은 부분적인 알람에 대한 선택 기능을 수행하는 것을 가능케 한다.  이는 인터페이스 상에서의 리소스 전송에 대한 최적의 사용을 가능케 한다.
Patent KR-20010024916-A (KR)
Title: 차량 부품용 전기 구동 유닛
IPC: H01R39/39
Filed: 1999-06-26
Abstract: 본 발명은 윈도우 리프터 또는 윈도우 와이퍼 등과 같은 차량 부품용 전기 구동 유닛에 관한 것으로서, 이 전기 구동 유닛은 정류자(16) 및 정류자 브러시(17)를 갖는 정류자 전동기(11)와 전동기 전자 부품용 전기 소자(18 내지 21)를 구비하며, 여기서 비용 절감과 조립의 간편함을 위하여 전기 소자(18 내지 21)들은 이 소자(18 내지 21)들과 정류자 전동기(11) 사이에서 전기적인 접속을 형성하는 천공 격자(22)에 고정되고, 정류자 브러시(17)는 이 브러시의 지지판(23)이 천공 격자와 일체로 형성되며 천공 격자로부터 밖으로 뻗어 나와 외측으로 구부러진 해머 브러시로서 제작된다.
Patent KR-20010041748-A (KR)
Inventor: PALUMBO GIANFRANCO
IPC: A61F13/15
Filed: 1998-03-13
Abstract: The present invention is an absorbent structure to be used in absorbent articles, having at least a first region for acquisition/distribution of fluid and a second region for storage of fluid. The first region can contain materials which have a relatively high capillary desorption pressure, as the materials in the second region exhibit a sufficiently high capillary absorption pressure so as to still efficiently drain the first region. The first region material has a Capillary Sorption Desorption Height (CSDH 90) of more than 40 cm and the second region material satisfies at least one of following requirements: (a) an absorption capacity of at least 15 g/g at 35 cm in the capsorption test; (b) an absorption capacity of at least 15 g/g at 0 cm in the capsorption test and an absorption efficiency of at least 55 % at 40 cm; (c) a Capillary Sorption Absorption Height at 50 % of its capacity at 0 cm absorption height (CSAH 50) of at least 35 cm in the capsorption test.
Patent KR-20010042514-A (KR)
Title: Liquid radiation-curable composition, especially for stereolithography
IPC: C08G59/14
Filed: 1999-03-25
Abstract: The present invention provides a liquid resin composition comprising:     (a) at least one cationically curable compound comprising an alicyclic polyepoxide having at least two epoxy groups per molecule with a monomer purity of over 94%; (b) at least one photoinitiator for the cationically cured componds;     (c) a free-radically-curable component and   (d) a free radical photoinitiator.   The use of the high purity alicyclic polyepoxide provides unusually good thermal performance
Patent KR-20010042623-A (KR)
Title: 액세서리 홀더를 포함하는 진공 청소기
IPC: A47L9/00
Filed: 2000-01-13
Abstract: 본 발명은 흡입 유닛(7)을 수용하는 하우징(1)을 포함하는 진공 청소기에 대한 것이다.  이 진공 청소기는 흡입 튜브(13)와 흡입 호스(15)를 통해 하우징에 연결될 수 있는 흡입 노즐(9)을 포함한다.  이 진공 청소기는 흡입 호스와 흡입 튜브 사이에 커플링(69) 근처에 위치하는 핸들(17)과, 제 1 단부(37)와 제 2 단부(39) 근처에서 핸들에 끼워 맞춰지고 분리가능하게 연결되는 액세서리(27, 29)용 홀더(25)를 더 포함한다.  본 발명에 따라, 상기 홀더(25)는 홀더의 제 1 단부(37)와 제 2 단부(39)를 상호연결하는 브리지 부분(41)을 포함하고, 홀더는 제 1 단부와 제 2 단부로부터 일정거리에 위치되는 브리지 부분의 일부분 상에 위치하는 커플링 부재(51)만을 사용하여 핸들(17)에 분리가능하게 연결된다.  그러므로, 홀더는 핸들로부터 해제될 수 있고, 이 홀더는 큰 수고없이 간단하게 핸들에 연결될 수 있다.  작동 중에, 사용자는 핸들과 브리지를 합께 잡으므로, 홀더가 부주의로 예를 들어 조작시의 힘의 영향에 의해 핸들로부터의 연결이 해제되는 것을 방지한다.  양호한 실시예에서, 핸들(17)은 튜브이며, 브리지 부분(41)은 적어도 제 1 단부(37)와 제 2 단부(39)에 위치하고, 거의 간극없이 핸들에 부분적으로 끼워 맞춰지는 쉘(shell)형 부분(41)을 포함한다.  그러므로, 홀더(25)는 핸들에 이 홀더가 연결될 때 커플링 부재(51) 주위의 비틀림 운동에 대해 고정된다.
Patent KR-20010042676-A (KR)
Title: 고벌크 종이
IPC: D21H25/00
Filed: 1999-04-08
Abstract: 높은 롤 벌크 및 롤 경도를 갖는, 부엌용 타올과 같은 롤로 감긴 크레이핑된 종이 생성물은 대응 강철 엠보싱 롤 사이에서 엠보싱하기 직전에 크레이핑된 건조 종이 시트를 증기처리하여 제조할 수 있다.  증기처리는 얻어지는 시트 엠보싱이 그의 모양과 구조적 강도를 유지하도록 시트를 예비컨디셔닝시켜 감긴 생성물 롤에 보다 큰 벌크와 경도를 부여한다.  또한, 시트는 엠보싱 결과 기계 횡방향 강도 감소도 줄어들게 된다.
Patent KR-20010025080-A (KR)
IPC: B02C13/14
Filed: 1999-05-12
Abstract: In order to make it possible for an inhomogeneous residue generated in a pyrolysis plant to be separated continuously and in as fully graded a way as possible, specially selected components are combined with one anther in an advantageous configuration. An essential element of the plant is the separation of a coarse residue in a coarse screen and the subsequent separation of the remaining residue in a zigzag separator into a light residue and a heavy residue. By use of the plant, in particular, the carbon-containing constituents are separated from the remaining residue. The individual components are mostly configured to be self-cleaning for fault-free operation.
Patent KR-20010052763-A (KR)
Title: 디하이드로에피안드로스테론(ｄｈｅａ) 또는 그 동족체와복합한 선택적인 에스트로겐 수용체 조절자
IPC: A61K31/475
Filed: 1999-06-10
Abstract: 인간을 포함하여 허용가능한 온혈 동물에게, 특히 일반식 (1)의 선택적인 에스트로겐 수용체 조절자와 디하이드로에피안드로스테론, 디하이드로에피안드로스테론 술페이트, 안드로스트-5-엔-3β,17β-디올 및 생체내에서 상기의 전구체 중 하나로 전환되는 화합물로 구성된 군으로부터 선택되는 어떠한 양의 성 스테로이드 전구체를 투여하는 것을 포함하는, 골다공증, 유방암, 고콜레스테롤증, 고지방혈증 또는 아테롬성 동맥경화증을 저해 및/또는 의료적 치료하는 신규한 방법. 골다공증의 발전을 저해 및/또는 의료적 치료하기 위해, 선택적인 에스트로겐 수용체 조절자 및/또는 성 스테로이드 전구체와 함께 추가로 비스포스포네이트의 투여가 제시된다. 또한 본 발명에서 활성 성분(들)의 전달을 위해 유용한 약리적 조성물 및 키트(들)를 제시한다. 
     일반식 (1)
Patent KR-20010071482-A (KR)
Title: 유체 수송 소스에 부착되는 개방 구조 표면을 갖는 유체안내 장치
IPC: A47L9/02
Filed: 1999-05-18
Abstract: 본 발명에 따르면 유체 수송 소스(16)로부터 이 유체 수송 소스(16)의 도관(18)의 개구보다 대체로 넓은 구역에 퍼텐셜을 균일하고 효율적으로 분배하는 유체 안내 장치(10)가 제공된다.  이 유체 안내 장치(10)는 복수 개의 흐름 채널(20)이 형성된 구조 표면을 갖는 제1 주면(15)을 포함한다.  상기 흐름 채널(20)은 구조 표면(15)을 따라 제1 지점으로부터 제2 지점까지 연장되며, 최소 종횡비는 대략 10:1 이고 수력 반경은 300㎛ 이하이다.  상기 유체 안내 장치(10)는 또한 중합체 구조 표면의 외부에 위치하는 능동 유체 수송 소스(16)를 포함하며, 이에 따라 흐름 채널(20)에 퍼텐셜이 형성되어 흐름 채널을 통해 물질이 제1 퍼텐셜로부터 제2 퍼텐셜까지 이동하는 것이 촉진된다.  상기 유체 수송 소스(16)는 매니폴드(26)를 통해 복수 개의 흐름 채널(20)과 연결되어 있다.
Patent KR-20010071543-A (KR)
IPC: C07C319/20
Filed: 1999-06-16
Abstract: Processes for the preparation of derivatives of hydroxyphenylsulfanylbenzoic and hydroxyphenylsulfanylarylacetic acids of Formula (I) and pharmaceutical compositions including these compounds are provided:wherein X is H, halogen or NO2 group, n is 0 or 1, and m is 2 to 4 if Z is either 4-acetyl-3 -hydroxy-2-propylphenoxy of Formula (II):or a piperazinyl residue, or m is 1 if Z is quinolin-2-yl or 6-chloroquinoli-2-yl.
Patent KR-20020057610-A (KR)
Title: Apparatus for processing spherical surface and method thereof
Inventor: JO HOUNG DEK
IPC: B24B11/00
Filed: 2001-01-02
Abstract: PURPOSE: A method and an apparatus for processing a spherical surface are provided to precisely process the spherical surface by processing the spherical surface while allowing a grindstone to make contact with a workpiece at a predetermined angle. CONSTITUTION: An assembling member(200) is installed in an installing space(101). A groove(102) is formed at a predetermined portion of the installing space(101) so as to receive a protrusion(202) of the assembling member(200). An angle adjusting hole is formed at an upper portion of the installing space(101). A fixing section(10) including a fixing die(100) and a stopper(110) is fixed to a movable table. The protrusion(202) is assembled into the groove(102). A grinder(210) for grinding a workpiece is fixed by using a fixing iron plate(201). Grindstone(220,211) are rotated by a motor so as to grind the workpiece.
Patent KR-20010086322-A (KR)
Title: Manufacturing method of semiconductor integrated circuit including simultaneous formation of via hole reaching metal wiring and concave groove in interlayer film and semiconductor integrated circuit manufactured with the manufacturing method
Inventor: NISHIZAWA ATSUSHI
IPC: H01L21/3065
Filed: 2001-01-12
Abstract: PURPOSE: To leave no deposition around a via hole even if an upper interlayer film and an organic layer are simultaneously etched by plasma by the dual damascene method so as to form a recessed groove on the via hole. CONSTITUTION: The etching rate of an etching gas for an organic film 118 is made higher than that for an upper interlayer film 102, and the organic film 118 is allowed to be projected over the upper interlayer film 102 so that plasma etching may not progress. Thus, no deposition is left on the side surface of the organic film 118.