Patent SG-11201908696T-A (SG)
Title: Coating liquid for forming metal oxide film, oxide film, field-effect transistor, and method for producing the same
Inventor: UEDA NAOYUKI
IPC: H01L21/336
Filed: 2018-03-22
Abstract: 7\"/...!••••••••• 11111111111111 (12) INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property Organization International Bureau (43) International Publication Date 27 September 2018 (27.09.2018) WIPO I PCT o Ens °nolo olo mo Emol ono iflo ois (10) International Publication Number WO 2018/174218 Al (51) International Patent Classification: HO1L 21/336 (2006.01) HO1L 21/368 (2006.01) HO1L 21/316 (2006.01) HO1L 29/786 (2006.01) (21) International Application Number: PCT/JP2018/011557 (22) International Filing Date: 22 March 2018 (22.03.2018) (25) Filing Language: English (26) Publication Language: English (30) Priority Data: 2017-054766 21 March 2017 (21.03.2017) JP 2018-051783 19 March 2018 (19.03.2018) JP (71) Applicant (for all designated States except US): RICOH COMPANY, LTD. [JP/JP]; 3-6, Nakamagome 1-chome, Ohta-ku, Tokyo, 1438555 (JP). (72) Inventors; and (71) Applicants (for US only): UEDA, Naoyuki [JP/JP]; c/o Ricoh Company, Ltd., 3-6, Nakamagome 1-chome, Oh- ta-ku, Tokyo, 1438555 (JP). NAKAMURA, Yuki [JP/JP]; c/o Ricoh Company, Ltd., 3-6, Nakamagome 1-chome, Oh- ta-ku, Tokyo, 1438555 (JP). ABE, Yukiko [JP/JP]; c/o Ri- coh Company, Ltd., 3-6, Nakamagome 1-chome, Ohta-ku, Tokyo, 1438555 (JP). MATSUMOTO, Shinji [JP/JP]; c/ o Ricoh Company, Ltd., 3-6, Nakamagome 1-chome, Oh- ta-ku, Tokyo, 1438555 (JP). SONE, Yuji [JP/JP]; c/o Ri- coh Company, Ltd., 3-6, Nakamagome 1-chome, Ohta-ku, Tokyo, 1438555 (JP). SAOTOME, Ryoichi [JP/JP]; c/o Ricoh Company, Ltd., 3-6, Nakamagome 1-chome, Oh- ta-ku, Tokyo, 1438555 (JP). ARAE, Sadanori [JP/JP]; c/ o Ricoh Company, Ltd., 3-6, Nakamagome 1-chome, Oh- ta-ku, Tokyo, 1438555 (JP). KUSAYANAGI, Minehide [JP/JP]; c/o Ricoh Company, Ltd., 3-6, Nakamagome 1- chome, Ohta-ku, Tokyo, 1438555 (JP). ANDO, Yuichi [JP/JP]; c/o Ricoh Company, Ltd., 3-6, Nakamagome 1- chome, Ohta-ku, Tokyo, 1438555 (JP). (74) Agent: HIROTA, Koichi; HIROTA, NAGARE & ASSOCIATES, 4th Floor, TS Bldg., 1-24-10, Yoyogi, Shibuya-ku, Tokyo, 1510053 (JP). (81) Designated States (unless otherwise indicated, for every kind of national protection available): AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (84) Designated States (unless otherwise indicated, for every kind of regional protection available): ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG). Published: with international search report (Art. 21(3)) — (54) Title: COATING LIQUID FOR FORMING METAL OXIDE FILM, OXIDE FILM, FIELD-EFFECT TRANSISTOR, AND METHOD FOR PRODUCING THE SAME 1 3 2 1 -1 (57) : A coating liquid for forming a metal oxide film, the coating liquid including: a metal source, which is at least one © selected from the group consisting of inorganic salts, oxides, hydroxides, metal complexes, and organic acid salts; at least one alkali selected from the group consisting of organic alkalis and inorganic alkalis; and a solvent. C