Patent EP-2006883-B1 (EP)
Inventor: PIECHULLA ALEXANDER
IPC: H01L21/67
Filed: 2008-05-21
Granted: 2013-12-18
Abstract: The device for doping and coating of semiconductor element at low pressure in a process tube (3), comprises a tube closure (2) and/or an arrangement with which the process tube is equipped for supply line and discharge line of process gas and for generating a low pressure in the process tube. A gas tight closure of the process area (1) with regards to the process gases and vacuum tight sealing of tube fastener are arranged against the atmosphere in coaxial arrangements spatially separated from one another at a side of the process tube. The device for doping and coating of semiconductor element at low pressure in a process tube (3), comprises a tube closure (2) and/or an arrangement with which the process tube is equipped for supply line and discharge line of process gas and for generating a low pressure in the process tube. A gas tight closure of the process area (1) with regards to the process gases and vacuum tight sealing of tube fastener are arranged against the atmosphere in coaxial arrangements spatially separated from one another at a side of the process tube. The arrangement exists itself for the supply- and discharge line of the process gas at oppositively lying ends of the process tube. A collar (4) is adapted at the process tube on the side of the tube fastener and consists of a coaxial tube piece. The collar mounts the process tube at front side of the tube piece. For the closure of the process area, a quartz pot is tightly arranged at the front of the process tube. A door is arranged under interposition of a sealing at the front of the collar for vacuum tight sealing of the tube closure. The quartz pot is secured at the inside of the door in detachable and spring-loaded manner. The fastening of the quartz pot is carried out at the door by a bayonet fastener. The door is made of aluminum and is water-cooled. The door is arranged with gas inlet and gas outlet for through-conduction of flushing gases through the collar area within the collar between the quartz pot and inner side of the door. A ring-shaped groove is intended at the inside of the door for the distribution of flushing gases. The gas inlet is connected with a source for nitrogen. An excess pressure exists in the collar area against the process area in the process tube. A joint pump is arranged for the evacuation of process area and the collar area and for developing pressure difference of zero to 50 mbar between the process area and the collar area. The connection of the collar area to the pump with a pipeline with a slight cross-section in comparison to processing line suction is carried out for developing the pressure difference. A suitable leak rate of the contact point is adjusted by quartz plug and process tube through a plan bow of self-touching areas. The process gas outlet is arranged to the supply- and discharge line of the process gas in the middle of the process tube at the side lying opposite to the tube closure. The process gas outlet is equipped with a ball bow and is tended towards the bottom at 5 [deg] or horizontally aligned. The ball bow is arranged at the gas outlet for the connection and guiding a gas outlet shaft. The suction of the collar area takes place through the gas outlet shaft over a T-piece that is led by the outlet.