baber/WOPTO huggingface dataset:
Patent KR-20100013829-A (KR)
Title: Cutting apparatus mounted on the arm of excavator
Inventor: KIM JAE SIK
IPC: E02F3/96
Filed: 2008-08-01
Abstract: PURPOSE: A detachable cutter for a construction vehicle is provided to use cutter blades attached to actuating arms for longer time. CONSTITUTION: A detachable cutter for a construction vehicle comprises a turn table(2), a main body(4), actuating arms(6,8), cylinders(10,12), and blades(14). The turn table is selectively attached to the leading end of an arm of an excavator. The main body is integrated with the turn table. The actuating arms are hinged on the main body to have a crossing action like scissors. The cylinders are connected to the main by on one end and to the actuating arms on the other. The blades are installed on the actuating arms.
Patent KR-20100013875-A (KR)
Title: Vacuum container having pump
Inventor: JUEN SOON LEE
IPC: B65D81/20
Filed: 2008-08-01
Abstract: PURPOSE: A vacuum container with a pump member is provided to easily vacuum the vacuum container by installing the pump member as one body, and to prevent foods inside a base member from flowing in into the inner structure of housing through a second connection hole. CONSTITUTION: A vacuum container comprises the following: a base member(10) forming a receiving unit(15) with an opened upper side; a cover member(20) connected to the upper side of the base member; and a pump member combined with the base member or the cover member. The pump member comprises: a housing(31) combined with the base member or the cover member with an opened one side including a second connection hole(33) connected to the receiving unit; a piston member(32) installed inside the housing to slide to discharge air inside the receiving unit through the second connection hole by a reciprocation; and a check valve(40) installed in the second connection hole to open when the air from the receiving unit moves to the housing direction.
Patent KR-20100015145-A (KR)
Title: Fluid clarification filter unit
Inventor: PARK SUNG HO
IPC: B01D35/30
Filed: 2008-08-04
Abstract: PURPOSE: A fluid purification filter unit is provided to rapidly change a flow path of fluid in case overpressure generates within an oil filter due to clogging of through-holes of the filter, and to conveniently assemble the filter and a bypass unit. CONSTITUTION: A fluid purification filter unit comprises the following: a first housing(21) with an inlet(21a) and a receiving space(21b); a second housing(22) with an outlet(22a) and the receiving space; a supporting holder(23) with a disk(23a) and a partition part(23b,23c); a filter(24) filtering foreign materials included in fluid; and at least one or more bypass device capable of discharging the fluid to an outlet of the second housing.
Patent KR-20100020286-A (KR)
Title: 프로브 카드
Inventor: PARK HO JOON
IPC: H01L21/66
Filed: 2008-08-12
Abstract: 프로브 카드가 개시된다. 본 프로브 카드는, 회로 기판, 및 회로 기판 상에 형성되며 일단이 신호라인과 연결된 프로브 몸체와 프로브 몸체의 타단에 형성된 프로브 팁을 갖는 프로브 핀 및, 프로브 몸체 주위를 둘러싸도록 프로브 몸체를 수용하기 위한 내부 구멍을 포함하는 가이드를 포함한다.  
       
     프로브 카드, 가이드, 탄성
Patent KR-20100030278-A (KR)
Title: Facility house heating electric hot air
Inventor: LEE HYUNG CHUL
IPC: A01G9/24
Filed: 2008-09-10
Abstract: PURPOSE: A fan heater for greenhouse facilities is provided to rapidly increase temperature of the greenhouse facility by supplying hot wind to the exterior of the greenhouse while circulating and heating heat-medium oil. CONSTITUTION: A fan heater for greenhouse facilities comprises the following: a chamber(10) in which a heater rod heated by electricity is built; a flange heater(20) heating the heater rod with the electricity; a circulation pump(30) circulating heat-medium oil; a fan coil emitting the circulating heat to the outside; and a control device(60) circulating the heat-medium oil. A circulating fan(41) is fixed on the front surface of a body of a heat-medium oil circulation part. The chamber includes a heat-medium oil circulation inlet(12), a heat-medium oil circulation outlet(13), and heat-medium oil inlet(14).
Patent KR-20090086293-A (KR)
Title: Radio relay station and radio terminal
Inventor: OKUDA MASATO
IPC: H04W52/10
Filed: 2008-10-09
Abstract: A radio relay station and a wireless terminal called as a multi-hop relay are provided to use radio resource efficiently in radio relay communications and wireless terminal as the multi-hop relay. A duplexer(33) outputs transmission wireless signal to an antenna(32) from a transmission processor(31) and outputs the wireless signal to a reception processor(34). A MAP data generate unit(36) produces access link MAP data. The MAP data generate unit applies the MAP data to a PDU buffer of the transmit processor.
Patent KR-20100043320-A (KR)
Title: A pedestrian crossing indicator
Inventor: CHO DEOG SU
IPC: E01F9/588
Filed: 2008-10-20
Abstract: PURPOSE: A pedestrian crossing indicator is provided to safely guide a disabled person, especially a blind person, and to reduce unnecessary power consumption. CONSTITUTION: A pedestrian crossing indicator comprises advertising banners(12b), indicating lamps(10c), human body sensors(17a,17b), speakers(16), a signal lamp, and solar panels(13a,13b). Photo-luminescent print parts(19) are formed in the advertising banners. The indicating lamps are installed in the top ends of first posts, and are protected by acryl transparent panels(10d). The human body sensors and the speakers are installed on the side surface of the first posts. The signal lamp is installed in the side of one first post. The solar panels are installed in the top ends of second posts(16).
Patent KR-20100044393-A (KR)
Title: Superconducting motor having cooling device for armature coil
Inventor: KIM HO MIN
IPC: H02K55/00
Filed: 2008-10-22
Abstract: PURPOSE: A superconductive motor with a cooling unit is provided to efficiently absorb heat generated from an armature coil by forming a cooling channel on one side of the armature coil. CONSTITUTION: A superconductive motor comprises a rotor(20) and a stator(40). A superconductive field coil(22) is wound around a rotor. An armature slot(42) is formed on the stator. An armature coil(44) is inserted into the armature slot. A cooling channel(46) is formed on one side of the armature coil. The cooling channel is made of the material with higher resistivity and high conductivity than the armature coil. The cooling channel is made of stainless steel or copper alloy.
Patent KR-20100045049-A (KR)
Title: Method of transforming combustible wastes into energy fuel
Inventor: KIM YONG HAK
IPC: B07B1/22
Filed: 2008-10-23
Abstract: PURPOSE: A method for transforming combustible waste into energy fuel is provided to obtain pyrolysis synthetic gas which is used as fuel of high effectiveness for power plant including a micro gas turbine, a gas engine, and a gas turbine. CONSTITUTION: A method for transforming combustible waste into energy fuel comprises: a step(S100) separating combustible waste from waste; a step(S200) synthesizing pyrolysis synthetic gas by gasifying the combustible waste through pyrolysis; and a step(S300) refining the pyrolysis synthetic gas. The pyrolysis synthetic gas comprises hydrogen 20 ~ 30 volume %, carbon monoxide 25 ~ 40 volume %, and methane 5 ~ 10 volume %.
Patent KR-20090052802-A (KR)
Inventor: YOON HEE SOO
IPC: H01M50/529
Filed: 2008-10-30
Abstract: 본 발명은 다수의 전지셀 또는 단위모듈들이 상호 밀착 또는 인접한 적층 상태로 직렬 연결되어 있는 고출력 대용량의 전지모듈로서,	충방전시의 부피 변화에도 전지셀 또는 단위모듈들의 적층 상태가 유지될 수 있도록 고정되어 있고, 전지셀의 스웰링에 의한 팽창 응력이 전지셀 또는 단위모듈의 전극단자 연결부위로 집중되어, 스웰링이 소정값 이상일 때, 상기 전극단자 연결부위가 파열되면서 단전이 이루어지도록, 전극단자 연결부위의 일부는 부피 팽창에 대해 취약한 구조로 이루어진 전지모듈을 제공한다.
Patent KR-20100049754-A (KR)
Title: Transparent conducting film structure and manufacturing method of transparent conducting film
Inventor: KIM OK RYUL
IPC: H01B1/24
Filed: 2008-11-04
Abstract: PURPOSE: A method for manufacturing a transparent conducting film is provided to reduce length and volume of carbon nanotubes and to prevent chemical damage of carbon nanotubes. CONSTITUTION: A transparent conducting film comprises: a substrate and conductive layer coated on the substrate. A method for manufacturing the transparent conducting film comprises: a step of adding collision energy to the carbon nanotubes to disperse the carbon nanotubes; a step of mixing the dispersed carbon nanotubes in an adhesive solution to make mixture solution; a step of coating the mixture solution on a substrate; and a step of drying the substrate.
Patent KR-20100053122-A (KR)
Inventor: BAE IN SU
IPC: G06F1/00
Filed: 2008-11-12
Abstract: 본 발명은 마이컴의 개발 및 학습을 위해 사용되는 학습용 마이컴 개발 보드에 관한 것으로, 학습용 마이컴 개발 보드에 장착시킨 USB를 통해 호스트 컴퓨터(100)로부터 학습용 마이컴 개발 보드에 전원을 공급하고, 학습 대상 마이컴(700)의 프로그래밍을 수행하고, 호스트 컴퓨터(100)와의 터미널용 직렬 통신 기능을 지원하고, 호스트 컴퓨터(100)로부터의 원격 리셋을 지원하며, 아울러 호스트 컴퓨터(100)로부터 USB를 통해 전달된 칩 셀렉트(chip select) 정보로 학습용 마이컴 개발 보드 내부의 칩 셀렉트(chip select) 신호 구성을 변경하는 기능을 수행한다. 따라서 본 발명에 의하면 별도의 추가 외부 전원 공급 장치와, 추가 직렬 케이블과, 추가 마이컴 프로그래밍 장치 없이도 호스트 컴퓨터(100)와의 USB 연결만으로 마이컴 개발 학습에 필요한 기본 기능 구현이 가능하도록 한 것이다. 
       
     마이컴, 보드, 개발, 학습, USB, 프로그래밍
Patent KR-20100054226-A (KR)
Title: Biodegradability container of molding device
Inventor: KIM HYUN SUK
IPC: B29C43/32
Filed: 2008-11-14
Abstract: PURPOSE: A biodegradable container molding device is provided to reduce the failure rate of biodegradable containers due to moisture and shorten the molding time. CONSTITUTION: A biodegradable container molding device comprises a main frame(10), a transfer frame(20), lower and upper mold parts, a circular plate(50), and a raw material processing unit(60). The main frame is equipped with a plurality of rollers(11) on either side. The transfer frame is transferred by a first driving part along the main frame. The lower mold part is fixed to the lower side of the transfer frame. The upper mold part is connected through the lower mold part through a guide shaft on the upper side of the transfer frame, and moved up and down by a second driving part for molding a raw material. The circular plate is equipped with placing frames(51) arranged at regular intervals to load a water-absorbent material and a raw material. The raw material processing unit is provided with a raw material from a storage, wraps the raw material with the water-absorbent material, presses them, and then puts the pressed water-absorbent material and raw material into the lower mold part.
Patent KR-20090052810-A (KR)
Inventor: MORI SHOGO
IPC: H01L23/34
Filed: 2008-11-19
Abstract: 절연 기판, 열 싱크 및 응력 감소 부재를 포함하는 방열장치에 관한 것이다.     절연 기판은 가열체 수용면의 역할을 하는 제 1 면과 제 1 면의 반대측의 제 2 면을 포함한다.     열 싱크는 절연 기판의 제 2 면에 열적으로 연결된다.      열 싱크는 상부 케이스와 하부 케이스를 포함하고, 냉각 통로를 포함하는 액체 냉각 장치로서의 역할을 한다.     응력 감소 부재는 절연 기판의 금속층과 상부 케이스 사이에 배치된다.     응력 감소 부재는 응력 흡수 공동을 포함한다.     상부 케이스는 응력 감소 부재와 접촉하는 제 1 부분과 상부 케이스의 나머지 부분으로 규정되는 제 2 부분을 포함한다.     제 1 부분의 두께가 제 2 부분의 두께보다 적다. 
       
     방열장치
Patent KR-20100004832-A (KR)
Title: Method of forming a curved shape
Inventor: LEE LEE KI
IPC: B21D5/02
Filed: 2008-11-19
Abstract: PURPOSE: A method of forming a curved surface is provided to minimize the bending radius of a bent material when molding the bent material. CONSTITUTION: A method of forming a curved surface comprises the steps of: placing a bent material on top of a pad installed between both side dies of a lower die(S200), press-fitting the side die to the bottom of the material(S210), and lowering a push plate of an upper die toward above the fixed die so that the upper part of the material is bent inward and compressed to have a small bending radius(S220,S230).
Patent KR-20100059190-A (KR)
Title: Image sensor and driving method the same
Inventor: KI AN DO
IPC: H04N5/355
Filed: 2008-11-26
Abstract: PURPOSE: An image sensor and a driving method of the same are provided to add barrier device at addition of electrical storage device and reset of floating diffusion area in overflow of electric charge, thereby reducing PD(Photo Diode) capacity. CONSTITUTION: The first electricity storage device(Cp) collect electric charge by light sensing of light receiving device. The second electricity storage device(Co) collects electric charge which is overflowed at the first electric charge device. The second switching element(Rx) transmits a signal which resets a floating diffusion area to supply voltage level. When the floating diffusion area is reset to supply voltage level, the third switching element(Bx) preserves the stored electric charge of the second electric storage device.
Patent KR-20100059384-A (KR)
Title: Variable type regulator and injector test equipment comprising variable type regulator
Inventor: BOK MYONG SOON
IPC: G01M15/00
Filed: 2008-11-26
Abstract: PURPOSE: A variable regulator and a device for testing an injector therewith are provided to enable a user to visually confirm a washing state and a spraying state of an injector body in an injector correcting device. CONSTITUTION: A variable regulator comprises a first body(310), a second body(320), a first installation member(340), a guide body(350), a first pin(360), a second pin(370), a third pin(380), a pressure regulating handle(390), and a spring(379). The first installation member is screwed on in a hole(331) formed into the other side of the second body. The guide body is located in the first body, and is in contact with the end part of the second body. The first pin is slidably inserted into the guide body. The second pin is movably located in the second body, and one end of the second pin is in contact with the first pin. The third pin is slidably inserted into the first installation member to be separated from the second pin. The pressure regulating handle is screwed on the first installation member.
Patent KR-20100060278-A (KR)
Title: Light-absorptive device, fixing unit using the light-absorptive device and image forming apparatus
Inventor: OH SEUNG JIN
IPC: G03G15/00
Filed: 2008-11-27
Abstract: PURPOSE: A light-absorptive device, a fixing unit using the light-absorptive device and an image forming apparatus are provided to use nano composite coated form keeping material on nano particle, thereby curbing thermal transformation of nano particle at the high temperature. CONSTITUTION: A light source(180) examines light(L) in a light absorbing layer(110). A light absorbing device(100) absorbs light of the light source. The light absorbing device includes the light absorbing layer and a substrate(150). A nano composite(140) is dispersed in the light absorbing layer. The light absorbing layer transforms energy of the light into thermal energy. The nano composite includes nano particle and form keeping material. In order to improve thermal stability of the nano particle, the form keeping material is coated on the nano particle.
Patent KR-20100064074-A (KR)
Title: Device for supporting worm gear shaft of motor driven power steering system
Inventor: PARK SANG DON
IPC: B62D5/04
Filed: 2008-12-04
Abstract: PURPOSE: A device for supporting a worm gear shaft of a motor-driven power steering system is provided to control the movement of a worm gear shaft by elastically supporting one end of the worm gear shaft. CONSTITUTION: A device for supporting a worm gear shaft of a motor-driven power steering system comprises a worm wheel gear(2), and a worm gear(3). The worm wheel gear is integrally and rotatably installed on the outer surface of a steering column(1). The worm gear is formed in a work gear shaft(3a) and is geared with the worm wheel gear. Both ends of the worm gear shaft are rotatably supported by bearings(4a,4b). The bearings are elastically supported by springs. Bushes(11) are installed on the outer surface of the bearings. Support yokes(12) are placed on the outer surface of the bushes.
Patent KR-20100064092-A (KR)
Title: Method and apparatus for transmitting and receiving packet capable of detecting system of data
Inventor: CHOI EUN YOUNG
IPC: H04B7/26
Filed: 2008-12-04
Abstract: PURPOSE: A method and a device for transmitting and receiving packet capable of detecting system of data are provided to conveniently perform system detection about data transmitted by a new system and maintain compatibility about existing system at the same time. CONSTITUTION: A pattern decision unit(506) determines a pattern of a real number part and an imaginary number part corresponding to a system about transmitting data. A transmitting unit(508) transmits subcarrier according to combination of the determined real number part and imaginary number part. A receiving unit(512) receives the subcarrier through the transmitting unit of a packer transmitting unit(502). A system decision unit(510) determines system data received by the received subcarrier.
Patent KR-20100067412-A (KR)
Title: Apparatus for plasma processing
Inventor: SON HYOUNG KYU
IPC: H05H1/24
Filed: 2008-12-11
Abstract: PURPOSE: A plasma processing apparatus is provided to gain a spatially uniform plasma density by sanctioning a power source of a VHF frequency range in an electrode of a large area. CONSTITUTION: A chamber(110) has a process space for occurring a plasma. An upper electrode(120) of a plate shape is formed inside of the chamber. A single side of the upper electrode forms a Gaussian curve. A lower electrode(130) is formed in a location faced with the upper electrode inside of the chamber. A plurality of power sources supplies a voltage having the different frequency on the upper electrode through a plurality of feeding points. The power sources include a first power supply unit(140) supplying an electricity having the frequency within 27MHz to 300MHz range and a second power supply unit(150) supplying the electricity having the frequency within 10KHz to 600KHz range.
Patent KR-20100067725-A (KR)
Inventor: PARK MIN KYU
IPC: A01F12/46
Filed: 2008-12-12
Abstract: 본 발명은 곡물 이송기에 관한 것으로, 수확된 곡물을 곡물저장몸체에 저장하여 차량으로 원거리 목적지까지 운반하고, 목적지에서 상기 곡물저장몸체에 저장된 곡물을 수평이송부, 수직이송부 및 곡물배출부를 순차적으로 통하여 외부로 배출시키되 곡물의 배출량을 조절할 수 있도록 고정판과 이동판에 의해 곡물통과면적이 조절되는 배출량조절판을 구비하고, 상기 곡물통과면적을 조절할 수 있도록 이동판구동수단을 구비한 곡물 이송기에 관한 것이다. 
     본 발명에 따른 곡물 이송기는, 상부에 곡물투입구가 구비된 상단몸체와, 하부방향 내측으로 경사지고 하부 말단은 길이방향으로 길게 개구된 곡물유출구를 형성하는 경사벽이 구비된 하단몸체로 이루어진 곡물저장몸체와; 상기 곡물저장몸체의 저면에 상기 곡물유출구를 통해 유입되는 곡물을 수평이송스크류에 의해 수평방향의 일단으로 이송시키는 수평이송부와; 상기 수평이송부의 일단에 연결되어 상기 수평이송부에 의해 이송된 곡물을 수직이송스크류에 의해 상부방향으로 이송시키는 수직이송부와; 상기 수직이송부의 상단에 하부방향으로 경사지게 연결되어 상기 수직이송부에 의해 이송된 곡물을 중력에 의해 외부로 배출시키는 곡물배출부와; 상기 곡물유출구의 상부에 길이방향으로 길게 상기 곡물저장몸체에 고정되고 길이방향을 따라 소정의 간격으로 제1곡물통과홈이 형성된 고정판과, 상기 고정판에 포개져 상기 고정판을 따라 길이방향으로 슬라이딩 이동 가능하게 설치되고 상기 고정판의 제1곡물통과홈에 대응되는 제2곡물통과홈이 형성된 이동판이 구비되어, 상기  이동판이 이동되는 경우 상기 제1곡물통과홈과 상기 제2곡물통과홈이 상호 교차되며 형성하는 곡물통과면적이 조절되는 배출량조절판과; 상기 이동판이 상기 고정판을 따라 길이방향으로 슬라이딩 이동되도록 상기 이동판을 이동시키는 이동판구동수단을 포함하는 것을 특징으로 한다. 
       
     곡물이송기, 곡물적재함, 이송스크류, 배출량조절
Patent KR-20100070416-A (KR)
Title: An autobile window control appratus which can prevent seizure
Inventor: JANG NAM JEONG
IPC: B60J5/04
Filed: 2008-12-18
Abstract: PURPOSE: A power window control device for a vehicle, which includes a caught preventing function, is provided to descend a power window by reversely rotating a motor if being caught is detected so that the damage of body is prevented. CONSTITUTION: A power window control device for a vehicle, which includes a caught preventing function, comprises: a voltage regulator(103) which maintains a voltage supplied from a battery of a vehicle to a fixed voltage; a voltage sensor part(105) which monitors the battery voltage supplied from the voltage regulator; a switch(107) which inputs the manipulation of operator; a motor driver part which controls a window motor according to the inputted value of the switch; and motor current sense resists(125,129) which senses current flowing to the motor from the motor driver part.
Patent KR-20100070894-A (KR)
Title: Connector assembly for box
Inventor: KIM CHANG DEOK
IPC: H01R13/639
Filed: 2008-12-18
Abstract: PURPOSE: A connector assembly for a box is provided to securely maintain bonding of the first and second connectors. CONSTITUTION: The first terminal hole penetrates the first housing(31). A combination space is opened toward one side of the first housing. A combination maintaining fixture(50) is combined with the first housing to be rotatable. The combination maintaining fixture is selectively hooked in the rear end of the second housing when the combination maintaining fixture is inserted in the combination space. The combination maintaining fixture securely maintains bonding of the first and the second housing.
Patent KR-20100072887-A (KR)
Title: Method for manufacturing semiconductor device
Inventor: JEONG MUN MO
IPC: H01L21/28
Filed: 2008-12-22
Abstract: PURPOSE: A manufacturing method of a semiconductor device is provided to prevent the bowing phenomenon of the upper part of a contact by expanding the size of the lower part of a first contact hole through a wet cleaning process after a first etching. CONSTITUTION: A first insulating layer(220) and a second insulating layer(230) are formed into a laminated structure on the upper part of a lower conductive layer(210). A first contact hole(255) is formed by partly etching the first and the second insulating layer using a contact mask. The lower part of the first contact hole is expanded by additionally etching the second insulating layer and the first insulating layer through a cleaning process. A second contact hole is formed by additionally etching the first insulating layer which is exposed by the first contact hole until the lower conductive layer is exposed.
Patent KR-20100073672-A (KR)
Title: Branched polycarbonate resin composition
Inventor: SHIN CHAN GYUN
IPC: C08L69/00
Filed: 2008-12-23
Abstract: PURPOSE: A branched polycarbonate resin composition is provided to be applied to various molded products including auto parts, a computer housing, and other office supplies due to excellent impact strength, heat resistance, mechanical strength, and workability. CONSTITUTION: A branched polycarbonate resin composition comprises: 80-99 weight% of a polycarbonate resin; 0.5-20 weight% of a polymer having a reactive group and carbon-carbon double bond; and 0.0001-0.8 weight% of an ionic compound including an ion which is selected from an alkali metal ion and an organic cation. The average molecular weight of the polycarbonate resin is 10,000-200,000 g/mol.
Patent KR-20100077945-A (KR)
Title: Method for controlling air conditionner
Inventor: LEE JONG HYOK
IPC: F24F11/02
Filed: 2008-12-29
Abstract: PURPOSE: A method of controlling an air conditioner operation is provided to blow natural wind by varying air volume depending on an indoor temperature variation. CONSTITUTION: A method of controlling an air conditioner operation is as follows. In a natural wind mode, an indoor temperature variation is detected(S31,S32). If the indoor temperature variation is less than a given value, blowing operation is executed by varying air volume depending on the indoor temperature variation(S35). The indoor temperature variation includes an indoor temperature variation per minute. At the step of blowing by varying air volume, as the indoor temperature variation diminishes, the blowing operation is executed by reducing air volume. At the step of blowing by varying air volume, as the indoor temperature variation diminishes, blowing operation is made by varying air volume by gradually decreasing the duty ratio of a first air volume to a second air volume less than the first air volume.
Patent KR-20100078946-A (KR)
Title: Method of manufacturing semiconductor device
Inventor: OH KEE JOON
IPC: H01L21/31
Filed: 2008-12-30
Abstract: PURPOSE: A method of manufacturing a semiconductor device is provided to increase production yield and improve a device property by preventing a short circuit due to the loss of a nitride layer and SAC fault. CONSTITUTION: An inter-layer insulating layer(104) is formed on a semiconductor substrate(100) in order to cover conductive patterns. A conductive pattern comprises a gate(G). The inter-layer insulating layer is etched to form a contact hole exposing a semiconductor substrate area between the conductive patterns and the conductive pattern. The semiconductor substrate including the hole for the contact plug is dried and washed. An exposed part of the semiconductor substrate which is dry-washed is etched. The conductive layer is formed on the etched semiconductor substrate area in order to fill in the hole for the contact plug.