baber/WOPTO huggingface dataset:
Patent KR-20090037772-A (KR)
Title: Thermostat for automobile
Inventor: HA SI BONG
IPC: F01P11/16
Filed: 2007-10-13
Abstract: A cover integrated thermostat for vehicle is provided to use an adaptor supporting a main spring in order to remove a frame supporting the main spring. A cover integrated thermostat for vehicle comprises: a cover(5) of a tube shape in which a protrusion(4) is in the inside, and the cooling water flows; an element(7) in which an end part of a rod(6) is supported with the protrusion, inserted to the inside of the cover; a plate(8) inserted in the element, opening and closing an inner duct of the cover; a main spring(9), whose one end contacts the plate, inserted to the outer side of the element in order for the plate to block the inner duct of the cover; and an adaptor(11) installed between a conduit line(2) and the cover of a main body(1). The adaptor has a stopper(13) hanging on an inlet part of the conduit line in the main body; a spiral extended portion(10) in the inside of the adaptor; and an element insertion hole located at one end of the main spring. The other side of the main spring is supported with the adaptor.
Patent KR-20090038981-A (KR)
Title: Method and apparatus for managing fault
Inventor: KIM BOM SOO
IPC: G06F11/00
Filed: 2007-10-17
Abstract: A method and an apparatus for managing an error are provided to supply essential information for handling an error to operators, support an organic cooperation system for handling an error and support quick and accurate diagnosis and process about the error. An accident management unit(110) searches a plurality of error recovery path information corresponding to error information from a known error database. The accident management unit applies one error recovery path information to handle an error. If error information is not searched in the known error database, a problem management unit(120) analyzes a cause about the error information and searches a handling method. The problem management unit generates new error recovery path information for solving the error information. A changing management unit(130) distinguishes the error recovery path information and the new error recovery path information to verify feasibility and evaluate error influence.
Patent KR-20090040162-A (KR)
Title: Masking member
Inventor: HWANG SUNG YOUN
IPC: B24C1/04
Filed: 2007-10-19
Abstract: A masking member is provided to reduce defect rate of a product and working times by being easily separated from a sheet part. A masking member(100) comprises a main body(110) covering the place not to be surface-treated among sheet parts and a groove formed on the main body. The main body is assembled to the groove. The surface of the sheet is treated with flat. The main body is made of fluorine rubber. The groove is fitted into the edge of the sheet parts.
Patent KR-20090041500-A (KR)
Title: Thrust washer
Inventor: HUH KI SOO
IPC: F16B43/00
Filed: 2007-10-24
Abstract: A thrust washer is provided to vary the thickness of the thrust washer by varying the projection amount of an inner circumference body based on an outer circumference body. A thrust washer comprises: an outer circumference body(100) of a ring shape in which a stepped protrusion(120) with a male thread(110) is formed in the inner circumference; and an inner circumference body(200) in which a female thread(210) screwed into the male thread is formed in the outer circumference. The inner circumference body is located within the stepped projection of the outer circumference body. A groove is formed to distribute oil in the single-side of the inner circumference body and the outer circumference body.
Patent KR-20090026709-A (KR)
Title: Apparatus and method for channel encoding and decoding in communication system using variable-length ldpc codes
Inventor: MYUNG SE HO
IPC: H03M13/11
Filed: 2007-10-26
Abstract: A method and an apparatus for encoding/decoding a channel in a communication system are provided to generate a LDPC(Low Density Parity Check) code having a different block length by using information of a parity check matrix. A first parity check matrix information is detected(S510). A block length of a necessary LDPC code is confirmed(S520). A grouping size for an information word of a second parity check matrix is determined. A sub matrix corresponding to the information word of the second parity check matrix is comprised from the first parity check matrix(S530). A sub matrix corresponding to a parity of the second parity check matrix is comprised(S540). A coding is performed by using one among the first parity check matrix and the second parity check matrix.
Patent KR-20070112094-A (KR)
Title: Apparatus and method for converting control information
Inventor: OZAWA KAZUNORI
IPC: H04L29/06
Filed: 2007-10-29
Abstract: An apparatus and a method for converting control information are provided to perform a voice/video communication between terminals although types of capability information of the terminals are different. A converter(400) for converting control information or media information for video/voice communication is installed between the first and second terminals(301,302) which are connected to different networks. The converter(400) includes a control information converter(420), a transcoder(450) and a capability information converter(460), and when capability information extracted from decoded information received from the first terminal(301) is not identical to capability information extracted from control information received from the second terminal(302), the converter(400) checks whether screen sizes do not correspond to each other. If the screen sizes do not correspond to each other in one direction, the converter(400) converts a portion of the decoded information or the control information without operating the transcoder(450). When the screen sizes do not correspond to each other, the converter(400) operates the transcoder(450) to convert a beat stream.
Patent KR-20090043403-A (KR)
Inventor: PARK SUN YONG
IPC: A42B1/24
Filed: 2007-10-29
Abstract: 초음파 거리측정기를 모자와 결합함으로써, 모자를 쓰면 키를잴수있다. 
     
     키재는모자
Patent KR-20090045963-A (KR)
Inventor: KIM MYUNG SEOK
IPC: C11D9/60
Filed: 2007-10-30
Abstract: 본 발명은 노각오이를 이용한 비누의 제조 방법에 관한 것으로, 보다 상세하게는 노각오이를 이용한 식물성 유지 45%(코코넛유 10, 팜유 25, 피마자유 10%), 가성소다 8%, 첨가제 (에탄올 16, 글리세린 5, 설탕 12%) 및 오이 혼합액 14%(물 80%, 오이 즙 20%)을 포함함으로써 색도 및 보습성 등의 품질이 가장 양호한 노각오이 기능성 원료 배합 및 보습 효과가 있는 노각오이를 이용한 비누의 제조 방법에 관한 것이다. 
       
     노각오이, 비누
Patent KR-20090044932-A (KR)
Inventor: LEE IN KWE
IPC: B22D41/00
Filed: 2007-11-01
Abstract: 본 발명은 자동차 강판을 생산할 때 슬라그 조성상태를 확인하기 위해서 슬라그를 채취하는 슬라그 샘플러에 관한 것으로서, 슬라그 샘플작업시 베르누이 법칙을 이용하여 점성이 높은 슬라그가 용이하게 채취되도록 하는 래들슬라그 샘플러에 관한 것이다. 
     상기 목적을 달성하기 위해 본 발명은 래들 슬라그 샘플러에 있어서, 슬라그 샘플러의 지관의 선단에 설치되고 슬라그 집중부에 연결되어 슬라그를 주입하는 슬라그 주입부, 상기 슬라그 주입부를 통해서 슬라그가 몰드에 주입되도록 하는 몰드주입부와 성형링으로 구성되고, 홀더에 설치된 가스관과 연결된 가스연결부, 상기 가스연결부와 연결된 가스관로, 가스가 배출될 수 있도록 하는 가스배출부로 구성된 슬라그 샘플러; 상기 슬라그 샘플러에 질소가스를 공급하는 공급관과 공급가스 유량제어 밸브에 연결된 공급가스 유량 자동밸브로 구성된 공급가스부; 및 상기 슬라그 샘플링시 사용하는 측정온도계와 홀더 및 상기 측정온도계를 제어하는 제어기; 를 포함하는 것을 특징으로 한다.  
       
     슬라그, 샘플러, 공급가스부, 제어기
Patent KR-20090046094-A (KR)
Inventor: CHOI YEONG HA
IPC: H04B7/14
Filed: 2007-11-05
Abstract: 와이브로 중계기에서 출력신호가 반향되어 다시 입력되는 간섭신호를 처리하는 피드백 채널 간섭제거장치 및 방법과, 이를 구비한 중계기가 개시된다.  OFDM 방식의 수신신호를 중계하는 본 발명에 따른 와이브로 중계기는, 수신신호에서, 피드백 채널 추정을 통해 계산된 간섭신호를 제거하되, 상기 수신신호에 포함된 파일럿 신호를 이용하여 상기 피드백 채널의 특성을 추정함으로써 상기 수신신호에서 원신호를 분리하는 간섭제거부; 및 상기 간섭 제거된 원신호를 증폭하여 송출하는 증폭부를 포함하는 것을 특징으로 한다.  본 발명에 따르면 간단한 구조로 용이하게 간섭제거장치 및 방법을 구현할 수 있다. 
       
     와이브로, 간섭제거, 중계기
Patent KR-20090047651-A (KR)
Inventor: SONG KYEONG SUB
IPC: G01C21/34
Filed: 2007-11-08
Abstract: 본 발명은 차량용 내비게이션 단말기에 관한 것으로, 더욱 상세하게는 차량 연료 소모량을 줄일 수 있는 경로를 탐색하는 내비게이션 단말기의 연료 소모량에 따른 경로 선택 방법에 관한 것이다. 이러한 본 발명은 연료 소모량이 적은 경로를 탐색하기 위해 교통정보, 신호등 수, 회전 턴 수 및 도로 경사도 등의 연료 소모 요소들을 고려하여 경로를 탐색하는 내비게이션 단말기의 연료 소모량에 따른 경로 선택 방법을 제공한다. 
       
     내비게이션, 연료 소모량, 경로탐색
Patent KR-20090048059-A (KR)
Inventor: YOU JI HA
IPC: G07F13/06
Filed: 2007-11-09
Abstract: 본 발명은 자동판매기용 믹싱장치를 개시한다. 
     본 발명의 자동판매기용 믹싱장치는 상부 중앙에 분말원료와 물이 유입되는 유입구가 형성되고 하부 일측에는 혼합 음료가 외부로 유출되는 유출구를 형성한 중공의 관형상을 갖는 믹싱볼 바디 및 상기 유입구를 기준으로 전·후 설치되는 것으로 상기 믹싱볼 바디의 외부에 설치된 혼합 모터로부터 구동력을 전달받아 회전되는 전·후 임펠러를 포함하여 구성된다. 
     본 발명에 따른 자동판매기용 믹싱장치는, 원료와 물을 교반하는 회전요소로서 원료 투입구를 기준으로 전·후 소정의 간격을 두고 한쌍의 임펠러를 구성하는 구조를 통해 각 임펠러에 가해지는 부하를 최소화하면서 협소한 공간에서도 비교적 큰 와류를 생성하여 혼합효율을 높일 수 있어 종전의 원료 미 섞임으로 인한 여러 문제점을 해소할 수 있는 이점이 있다. 또한, 상기 믹싱볼 바디를 음료 출구 방향으로 비스듬하게 기울이는 간소한 구조변경을 통해 혼합 음료가 원활하게 흘러내릴 수 있어 상기 믹싱볼 바디 내부에 음료가 잔존하는 것을 방지하여 양호한 청결성을 조성할 수 있는 효과가 기대된다. 
       
     자동판매기, 믹싱, 거품
Patent KR-20090049645-A (KR)
Inventor: JO JUNG HWAN
IPC: G06F3/03
Filed: 2007-11-14
Abstract: 본 발명은 카메라가 위치가 위치한 좌표지정장치를 어떤 면에 고정시킬 필요가 없이 삼차원 공간에서 작동시켜 임의의 크기를 가진 기준4각형을 임의의 위치에서 카메라로 촬영하여 기준4각형의 정해진 좌표 체계로 환산하도록 설계 제작된 좌표지정장치에 관한 것이다. 
     본 발명은 삼차원 공간에서 사용할 수 있는 좌표지정장치를 이루기 위하여 삼차원 공간에서 목표평면의 영상을 잡아내는 카메라를 구비하며, 카메라에서 촬영한 영상 데이터를 가공 처리하여 원하는 목표좌표와 회전 각도를 추출해 내는 프로세서 부를 구비하고, 추출한 좌표 데이터를 컴퓨터로 보내거나 컴퓨터의 명령을 수신하는 데이터송수신 부를 구비하며, 각종 작동을 제어하기 위하여 사용자들이 이용할 수 있도록 설계 제작된 다수의 동작 및 제어버튼을 구비하고, 전후 성분 및 회전성분을 추출 연산하는 수단을 구비한 절대좌표 개념으로 동작하는 좌표지정장치를 제공하는데 있다. 
     본 발명은 카메라에 의하여 목표좌표를 지정하거나 3차원 또는 4차원으로 정보를 입력할 수 있으므로 게임, 자동판매기, 프로젝터 프리젠테이션 및 방위산업 분야 등에 광범하게 응용할 수 있는 작용효과가 있다. 
       
     카메라, 좌표지정장치, 3차원, 4차원, 절대좌표
Patent KR-20090050290-A (KR)
Title: 도난 방지 경보기
Inventor: JOUNG SUK WON
IPC: G08B21/00
Filed: 2007-11-15
Abstract: 본 발명은 범죄의 초기구성인 침입의 방지하고자 초기의 침입을 방지하는 기기로서 집 또는 사무실을 비우고자 할 때 2개가 한조로 이루어져있는 경보기를 본인의 임의의 자리에 부착 설치 후 상측에 있는 임의의 번호 중 본인만이 알 수 있는 번호를 각각에 누른 후 외출 시 임의의 기기는 작동하며 타인이 설치자의 숫자와 상의하게 눌리면 80db의 소음과 위치를 알 수 있도록 빛을 발하며 고의의 파손 시 또는 임의의 와이어를 절단 시 충격으로 상기와 같은 소리와 빛을 발하는 기기로 구성되어 있어 인가치 않은 외부인의 출입을 초기에 예방하는 것이 특징이다 
     
     도난방지기기, 소리, 빛, 숫자판
Patent KR-20090053255-A (KR)
Inventor: AHN BYUNG CIK
IPC: G09G3/20
Filed: 2007-11-23
Abstract: 본 발명은 유기발광 다이오드의 이미지 편차 보정장치 및 보정방법에 관한 것으로서, 더욱 상세하게는 OLED패널을 그 특성값에 의해 저항모델화 하고 이미지 정보가 표출되는 각 픽셀에서의 저항을 연산한 후 그 저항을 기반으로 우수라인과 기수라인의 계조 값을 조절함으로써 인접 라인간의 이미지 편차를 보정할 수 있게 한 수동형 유기발광 다이오드의 이미지 편차 보정장치 및 보정방법에 관한 것이다. 
       
     수동형 유기발광 다이오드, 이미지 편차, 저항모델, 감마보정
Patent KR-20080047992-A (KR)
Title: Zoom lens and imaging apparatus
Inventor: SUZAKI MITSUHIRO
IPC: G02B7/00
Filed: 2007-11-26
Abstract: A zoom lens and an imaging apparatus are provided to suppress deterioration of imaging performance due to eccentricity through decrease of lens groups movable along an optical axis. A zoom lens(1) includes first to fifth lens groups(L1~L5). The fifth lens group is composed of a fifth-a lens group(L5a) with negative refractive power, a fifth-b lens group(L5b) with positive refractive power, and a fifth-c lens group(L5c) with negative refractive power, which are sequentially located from an object to an image. The fifth-a lens group is composed of a negative lens(L51) with a strong concave surface facing the image and a negative lens(L52) with a strong concave surface facing the object, which are sequentially located from the object to the image. The image is displaced by moving the fifth-b lens to have a component vertical to an optical axis. The zoom lens satisfies the following conditional expression: -4.0<f5c/f5a<-1.5, wherein the f5a is a focal length of the fifth-a lens group, and the f5c is a focal length of the fifth-c lens group.
Patent KR-20090056705-A (KR)
Title: 유학생 통합 관리 장치
Inventor: KIM JONG DU
IPC: G06Q50/20
Filed: 2007-11-30
Abstract: 본 발명은 유학예정자의 수속 진행, 유학 대상국 및 지역 선정, 학교 선정, 유학 경비 산출 등 유학 수속에 필요한 모든 절차를 능률적으로 처리할 수 있는 유학원용 유학생 통합 관리 장치를 개시한다. 본 발명의 유학생 통합 관리 장치는 복수의 유학원 서버를 통해서 접속한 유학 예정자들의 유학 관련 정보, 학교 정보, 보험 정보, 항공 정보, 숙박 정보 및 국제 통신 정보 등을 등록하고, 본 발명의 서비스에 제휴한 외국의 학교 서버, 보험사 서버, 여행사 서버, 숙박 중계 서버 및 국제 통신 서버 등의 제휴사 서버가 접속할 때마다 해당 서버로 서비스를 신청한 유학 예정자의 목록 및 유학 예정자의 정보를 제공하고, 해당 서버에서 서비스 신청을 처리한 결과를 수신하여 등록한 후, 해당 서비스를 신청한 유학 예정자가 접속한 유학원 서버로 처리 결과를 다운로드한다. 이로 인해, 유학 예정자 및 유학원 운영자는 학교 신청, 항공권 예약 등의 각각의 서비스 절차를 별도로 밟지 않고, 한 번의 접속으로 유학에 필요한 모든 신청 절차를 처리할 수 있는 효과가 있다.
Patent KR-20080051091-A (KR)
Title: System and method for wireless communication of uncompressed media data packet synchronization
Inventor: SHAO HUAI RONG
IPC: H04N7/24
Filed: 2007-12-03
Abstract: A system and a method for the wireless communication of uncompressed media data including the media data packet synchronization are provided to detect the electric wave of the media data packets and to determine the delay of the electric wave of the media data packets. An A/V(Audio/Video) station uses a low speed wireless channel or a high speed wireless channel to perform the communication between arbitrary devices. A device coordinator(112) also uses the low speed wireless channel or the high speed wireless channel to perform the communication with the A/V station. Each station uses the low speed wireless channel to perform the communication with another station. The high speed channel supports the single direction uni-cast transmission through the directional beam established by beam-forming to apply the non-compression HD(High Definition) video transmission. The device coordinator is a receiver of video information and the station is a transmitter of video information.
Patent KR-20080052426-A (KR)
Title: Liquid crystal display and driving method thereof
Inventor: YOSHIDA YASUNORI
IPC: G09G3/20
Filed: 2007-12-05
Abstract: An LCD device and a driving method thereof are provided to reduce power consumption by lowering the voltage amplitude value of signals for turning on/off a switch. An LCD(Liquid Crystal Display) device displays images by applying signal voltages of image signals to liquid crystal elements. A first voltage(VS1) is applied to the liquid crystal elements during a first sub-frame(taua) of a first frame period. A second voltage(VS2) for performing the black color display of the liquid crystal elements is applied to the liquid crystal elements during a second sub-frame(taub) of the first frame period. The level of the first voltage is determined based on the difference between the second and the signal voltages and the length of the first sub-frame period.
Patent KR-20090059638-A (KR)
Title: Drum type steam drier
Inventor: JO DUK GYU
IPC: A23N12/10
Filed: 2007-12-07
Abstract: A drum drier is provided to maximize thermal efficiency to save the energy with a small heater while increasing the initial temperature in a short time by circulating the heat passed through a drum and discharging the heat to the outside on demand. A drum drier comprises: a suction motor(4) which sucks the air within a drier body; an exhaust duct(6) connected to the suction motor; a suction duct(10) combined with the exhaust duct by a first damper(8); a heater(14) connected to the suction duct by a second damper(12); a drum(16) located near the outlet of the heater; a temperature sensor controlling the temperature of the drum; a humidifying sensor controlling the humidity of the drum; and a controller. The first damper is placed on one side of the exhaust duct. The second damper is placed near the outlet of the suction duct. A heat collecting unit is needed for the exhaust duct and suction duct.
Patent KR-20090060034-A (KR)
Title: Sky rockdrill
Inventor: KIM DO GON
IPC: E21B7/00
Filed: 2007-12-07
Abstract: A high-altitude rock-drill is provided to perform drilling of high spots easily by raising the punching unit and to adjust the direction of the punching unit by moving the punching unit in the horizontal direction. A high-altitude rock-drill(100) comprises a vehicle body equipped with a belt of endless track and a hydraulic system, an extension boom(20) which is mounted on the vehicle body and moves a punching unit to high spots where drilling takes places, the punching unit(30) which is connected to the end of the extension boom and drills the four sides with the hydraulic pressure of the hydraulic system, and an angle adjusting unit(40) which connects the punching unit to the extension boom and adjusts the extension angle of the punching unit.
Patent KR-20090060658-A (KR)
Title: El material and organic light emitting device comprising the same
Inventor: KIM HYUN SUK
IPC: C09K11/06
Filed: 2007-12-10
Abstract: A light emitting material is provided to radiate blue color even by using only host without a dopant, and to improve luminous efficiency and lifetime of an organic electroluminescence device. A light emitting material has a structure represented by chemical formula 1. In chemical formula 1, R1-R7 are independently hydrogen, C1-C12 alkyl, C1-C12 alkoxy, halogen, cyano, silyl or hydrogen position-substituted or unsubstituted C2-C30 aromatic group; and X is carbon or nitrogen. The aromatic group comprises a hetero aromatic ring. The organic electroluminescence device has a light-emitting layer including a luminescent material.
Patent KR-20090061825-A (KR)
Title: Apparatus for cleaning heat exchanger
Inventor: LEE HEE CHOON
IPC: F28G1/14
Filed: 2007-12-12
Abstract: An apparatus for cleaning a heat exchanger is provided to wash the inside of the tube by moving an insertion bar inserted into each tube and a cleaning tip equipped in the end of the insertion bar inside each tube by using the active force of the driving part. An apparatus for cleaning a heat exchanger(100) comprises a frame part(110), a controller(120), a driving part(130), a cleaning part(140) and a tip guide part(180). The frame part supports the generated repulsive power in the washing. The controller is mounted on the frame part. The driving part is connected to the controller and is mounted on the frame part and generates active force which is necessary for moving forward and rearward. The cleaning part comprises a moving block(150), a plurality of insertion bars(160) and a cleaning tip(170). The driving part is mounted on the moving block. A plurality of insertion bars are installed at the lower part of the moving block. The cleaning tip is connected to the end of the insertion bar. The tip guide part comprises a plurality of guide pipes(182). The guide pipe guides the cleaning tip.
Patent KR-20090062832-A (KR)
Title: A manufacturing method for the perovskite ion transport membrane of separating process of oxygen using the same
Inventor: PARK JUNG HOON
IPC: B01D69/00
Filed: 2007-12-13
Abstract: Provided are a method of manufacturing a Perovskite-type ion conductive oxygen membrane having a hexahedral structure or rhombohedral structure instead of a simple cubic structure to obtain a high oxygen permeability, and a process of separating oxygen using the oxygen membrane. A method of manufacturing a Perovskite-type ion conductive oxygen membrane comprises: a first step of adding citric acid into a metal nitrate solution and dissolving distilled water into the metal nitrate solution to prepare a mixed solution; a second step of evaporating water of the mixed solution to dry the mixed solution; a third step of milling and calcining the dried mixture to prepare a synthesized powder; and a fourth step of compression molding the synthesized powder to manufacture a membrane. The membrane has a hexahedral structure or rhombohedral structure.
Patent KR-20090063852-A (KR)
Title: Disk i/o scheduler for server virtualization environment and scheduling method thereof
Inventor: KANG DONG JAE
IPC: G06F3/06
Filed: 2007-12-14
Abstract: A disk I/O scheduler for server virtualization environment and a scheduling method thereof are provided to enhance performance of a virtual system by strictly isolating the allocated I/O resource among virtual systems. Plural queues(110-1,110-2,110-3) performs an I/O(Input/Output) request. When an input request occurs in each system, an I/O request adding unit(120) adds the I/O request to a correspondent queue among the queues. The I/O request extracting unit(130) extracts the I/O request from the queues. The extracted I/O request is added to a device queue(200). The I/O request adding unit includes a queue hash based on the identifier of a virtual system to search the currently-registered I/O queues.
Patent KR-20090064173-A (KR)
Title: Ring seal for sealing up pipes
Inventor: MYUNG JAE SUNG
IPC: F16J15/00
Filed: 2007-12-15
Abstract: A ring seal for pipe sealing is provided to improve air tightness by preventing leakage of gas fundamentally through a sealing protrusion. A ring seal for pipe sealing includes a pair of rings(11). The ring has an assembly gap and a sealing protrusion. The sealing protrusion of the other ring is inserted into the assembly gap of the ring. Each ring forms a cylindrical channel. A front end of an exhaust pipe(12) is inserted into the front end of the other exhaust pipe. Two exhaust pipes are connected each other.
Patent KR-20090064251-A (KR)
Title: Boat
Inventor: LEE BONG GYUN
IPC: B63B7/00
Filed: 2007-12-15
Abstract: A boat is provided to offer desired driving force by adjusting size and a rate of a diameter of a gear and to improve driving efficiency of the gear by arranging the gear on a proper direction. A boat includes a pedal gear(9), a rear wheel gear(16), and at least a pair of intermediate gears. The pedal gear includes a sprocket gear. The intermediate gear is arranged between the pedal gear and the rear wheel gear. The intermediate gear is comprised of sprocket gears having different diameters. The sprocket gears are fixed on a fixing shaft.
Patent KR-20090064801-A (KR)
Title: Method of manufacturing a semiconductor device
Inventor: KIM YANG HWAN
IPC: H01L21/76
Filed: 2007-12-17
Abstract: A manufacturing method of a semiconductor device is provided to reduce a thermal budget by manufacturing a T type MOS device without a spacer process. An isolation film(120) is formed on a semiconductor substrate(110). A gate insulation film(130) is grown on the semiconductor substrate. A TEOS(Tetraethoxy silane) layer(140) is deposited on the gate insulation film. The TEOS layer is patterned by a photolithography process and an etching process. A T type gate pattern is formed on the exposed gate insulation film. The TEOS layer laminated on the semiconductor substrate is removed by the etching process. A T type gate(150) is formed on the gate insulation film.
Patent KR-20090066929-A (KR)
Title: Monitoring pattern of semicondutor device using spacer and method for fabricating the same
Inventor: CHO BYEONG HO
IPC: H01L21/66
Filed: 2007-12-20
Abstract: A monitoring spacer pattern of a semiconductor device using a spacer and a forming method thereof are provided to control pattern uniformity within a wafer by feeding back a measured result thereof in a manufacturing process. A monitoring spacer pattern of a semiconductor device includes a substrate and monitoring spacer patterns(131, 132, 133). The substrate has a scribe lane region for defining a main chip region. The monitoring spacer patterns having various pitch sizes are formed in the scribe lane region. The semiconductor device forms fine patterns by using a spacer. The monitoring spacer patterns have a structure for monitoring a CD(Critical Dimension) of main patterns formed in the main chip region. The monitoring spacer patterns are split in the various pitch sizes within a monitor box having a constant size.
Patent KR-20090070343-A (KR)
Title: Method for manufacturing semiconductor device
Inventor: SHIN MIN JUNG
IPC: H01L21/76
Filed: 2007-12-27
Abstract: A method for manufacturing a semiconductor device is provided to manufacture a semiconductor with high production yield by removing a particle and a defect through a plasma treatment. An insulating layer is formed in on a semiconductor substrate(10), and a photosensitive pattern exposing a domain in which an element isolation film is arranged is formed on the insulating layer. A recess is formed by performing dry etch of an insulating layer with a photosensitive pattern as an etch mask. The recess is included and a spacer material layer(30A) is formed on the whole insulating layer, and a spacer is formed on an interior wall of the recess by etching the spacer material through a blanket etch. A defect generated in the blanket etch is processed through a plasma, and a trench is formed by etching the semiconductor substrate with a spacer as an etch mask.