baber/WOPTO huggingface dataset:
Patent KR-20030057795-A (KR)
Title: Method for preparing polyethyleneterephthalate resin and the resin
Inventor: KIM HEON SU
IPC: C08G63/78
Filed: 2001-12-29
Abstract: PURPOSE: Provided are a method for producing a PET(polyethylene terephthalate) resin which generates little acetaldehyde during injection molding of preform for producing a bottle, and which shows transparency and color comparable to those of glass. CONSTITUTION: The method for producing a PET resin chip by using a solid phase polymerization, is characterized by comprising the steps of (i) sequentially adding a polymerization catalyst, a hindered phenol as a primary antioxidant, and a trivalent phosphorus compound as a secondary antioxidant, to bis(2-hydroxyethyl)terephthalate monomer obtained by transesterification of dimethylterephthalate and ethylene glycol; and (ii) polymerizing the monomers.
Patent KR-20010079832-A (KR)
Title: System and method for the recording and processing of information in a wireless communication device
IPC: H04M1/56
Filed: 1999-09-15
Abstract: A wireless communication device provides streamlined access to recording functions that allow a user to readily record information from a called directory information service provider or other predetermined number. Directory service provider numbers and other predetermined numbers are stored in the system and compared with a user selected destination telephone number. If a match is detected, the system display automatically enables a recording function or prompts the user to manually activate the recording function to permit the user to manually record information obtained from the directory information service provider. Alternatively, the information may be automatically transferred directly into the system without user intervention through a communication link using a formatted data exchange. The system includes options for editing the recorded information, permanently storing the recorded information, and completing a call to the telephone number provided by the service.
Patent KR-20010082288-A (KR)
IPC: B65G17/06
Filed: 1999-10-28
Abstract: 본 발명은 다양한 플러그 접속식 또는 스냅 결합식의 너클, 다양한 스프로킷 구동 성능 및 교환 가능한 적재물 반송 플랫폼 부속물을 통해 연장하는 스핀들 로드의 신속한 삽입으로 특징 지어진 곧거나 만곡된 경로 상을 이송하는 벨트를 허용하기 위해 보편적인 조인트 크기의 개선된 길고 마모성 높은 적재물 베어링 결합 조인트를 갖는 일체형의 너클 구동 링크 컨베이어 벨트 시스템을 제공한다.  적재된 벨트가 장력을 받을 때, 원통형 너클은 최대 적재를 처리하는 실질적으로 반원통형인 마모성 높은 접촉면을 갖는다.  그런 너클은 너클의 일치하는 수동 방위 없이, 선단 모듈 링크의 후단 모서리 분기 아암을 통하여 연결 스핀들 로드를 수용하는 장착 작동 위치에서, 너클을 놓는 링크의 노우즈 단부의 시트가 포함되어 특정 내부 끼워 맞춤 지그를 구성하는 단부 대 단부로 연결된 링크 사이의 조인트에서 신속하게 장착된다.  다양한 스프로킷 구동 구조는 측면들 중 하나의 아래 또는  위에서부터 구동되도록 벨트를 허용한다.  너클 및 둘러싸는 시트는 각각의 링크 조인트에서 보편적인 조인트형 작동을 제공하는 3차원 이동 내성을 제공한다.  다른 특징은 내부 곡률 반경 상에서 마찰을 줄이는 측면 롤러와, 기부 지지면의 요동으로부터 벨트를 유지하는 유지 플랜지를 포함한다.  성형으로 얻어진 강건한 플라스틱 링크는 긴 마모와 격심한 파손을 방지한다.  시스템의 다양성과 강건함은 중공업 이용을 위하여 재거 가능한 플랫폼 구조에 의해 현저하게 강화된다.
Patent KR-20010101716-A (KR)
IPC: C23C16/50
Filed: 2000-01-26
Abstract: 본 발명에 따르면, 반도체 웨이퍼 적재대와 거의 동일한 높이로 주위를 둘러싸는 링 구조체의 상면 부근에 온도 조절 수단이 매설되어 있고, 이 온도 조절 수단은 웨이퍼 표면과 링 구조체의 상면 부근 각각이 일정한 온도가 되도록 프로세스 조건을 설정하는 레시피에 따라 링 구조체 온도 제어부(61)에 의해 제어된다. 이때, 웨이퍼 상측과 링 구조체 상면 상측과의 온도 차이가 작아져서 균일성이 높은 막 형성이 가능해지는 것을 특징으로 한다.
Patent KR-20010101766-A (KR)
Title: Helical antenna for frequencies in excess of 200 MHz
IPC: H01Q11/08
Filed: 2000-02-03
Abstract: A UHF antenna has an electrically insulative cylindrical core of a solid material having a relative dielectric constant greater than 5, and a three-dimensional antenna element structure disposed on or adjacent the outer cylindrical surface of the core. The antenna element structure is coupled to a coaxial feeder passing axially through the core. To reduce the effect of unwanted resonant modes associated with the resonant length of the feeder inside the core, the core is spaced from the outer conductor of the feeder by an intervening layer of insulative material having a relative dielectric constant which is much lower that that of the core material.
Patent KR-20020007299-A (KR)
Title: 펌프 액츄에이터를 구비한 사운드 발생기
IPC: H04R23/00
Filed: 2000-01-28
Abstract: 본 발명은 사운드 흡입 수단에 의해 간섭을 제거하며 신호, 스피치 및 음악을 재현하는 사운드 발생기를 제공하는 것을 목적으로 한다. 상기 사운드는 마이크로- 및 나노형 기체 펌프(12) 수단에 의해 바람직하게 발생되는 것으로, 여기서 이의 출력유동은 사운드 채널(11)을 매개로 퇴거하며 요구된 사운드 시그널에 따르는 액츄에이터(16)에 의해 제어된다; 근접 버퍼 볼륨(15)상에서 동작하는 보충채널(11'). 일반적인 라우드스피커 엔클로져와 같이, 상기 버퍼 볼륨(15)의 기능은 사운드 채널(11) 및 상기 채널(11')의 비효과적인 쌍극자를 벗어나는 음향 단극자 방사기를 제조하기 위한 것이다. 고압력 비율을 갖는 기체 펌퍼(12)의 경우, 필수요건인 버퍼 볼륨은 대응적으로 적다. 상기 사운드-발생하는 볼륨 유동은 마이크로형 유동미터(18)의 수단을 통해 사운드 채널(11)에서 측정되며 요구된 값 및 활성값의 비교에 따라 재조정될 수 있다. 결과적으로, 높은 유동 저항을 갖는 보어(19)는 버퍼 볼륨(15)에서 기체 압력 변동 및 드리프트 에러를 평준화한다.
Patent KR-20010101834-A (KR)
IPC: G02B3/00
Filed: 1999-05-26
Abstract: 본 발명은 필름을 사용하는 표시장치에서 광학적 결함의 발생을 감소시키는 표면을 갖는 광학필름에 관한 것이다.  특히, 이 표면은 왯 아웃(wet-out), 뉴톤링 (Newton's ring) 및 모아레효과 (Moire effect)와 같은 결함을 감소시키는 무작위화된 특징을 갖는다.  필름은 규칙적인 구조가 없는 제 1 표면을 가지는데, 이 제 1 표면은 다수의 국소최고점을 가지며, 이것은 제 1 표면의 특징적인 척도로서 예정된 범위내의 무작위 값을 갖는다.  필름은 또한 제 1 표면에 대향하는 제 2 표면을 갖는다.  광학필름을 제조하는 방법에는 필름의 제 1 표면 상에 규칙적 구조가 결여된 패턴을 엠보싱하는 것이 포함되는데, 여기에서 제 1 표면은 다수의 국소최고점을 가지며, 이것은 제 1 표면의 특징적인 척도로서 예정된 범위내의 무작위 값을 갖는다.  특징적 척도는 필름표면의 실제 높이와 공칭 높이 사이의 차이, 표면 상의 국소최고점들 사이의 평균간격, 또는 국소최고점에 근접하는 제 1 표면의 기울기각일 수 있다.
Patent KR-20020000776-A (KR)
IPC: B67D7/02
Filed: 2000-03-07
Abstract: 본 발명에 따른 분배기는 적어도 하나의 캐비넷형 공급 모듈(1)과; 그것에 연결되는 캐비넷형 분배 모듈(2)로 구성된다. 인발식 트롤리(3)는, 상기 공급 모듈(1)의 정면에서 꺼낼 수 있으며, 2 개의 개방 측면(6) 중 하나를 통해 삽입되는 공급 컨테이너(8)를 수용할 수 있다. 상기 분배 모듈은 정면으로부터 접근할 수 있는 분배 공간(17)을 구비한다. 상기 공급 모듈(1)은 평면도의 관점에서 직사각형 외형으로 설계된 상기 분배 모듈(2)의 깊이(t)와 같은 모서리 길이(a)를 갖는 평면도의 관점에서 정사각형 외형을 가진다. 상기 분배 모듈(2)은 상기 공급 모듈(1)의 3 개의 측면(11, 18, 19) 각각에 선택적으로 연결될 수 있다.
Patent KR-20020001827-A (KR)
IPC: G07F11/44
Filed: 2001-02-14
Abstract: 약제공급장치의 편리성을 높인다.  약제를 수납하는 수납용기로부터 약제를 배출하는 배출드럼을 갖는 타블렛 케이스(1)와, 상기 배출드럼을 구동하는 모타와, 상기 모타의 운전을 제어하는 제어수단과, 상기 타블렛 케이스(1)로부터의 약제의 배출을 검지하는 배출검지수단을 구비한 약제공급장치에 있어서, 제어수단은 약제를 배출하기 위하여 상기 모타를 회전시켜도 상기 배출검지수단이 정상상태의 약제배출을 검출하지 않는 경우에 상기 모타를 역전시킨다.
Patent KR-20010111319-A (KR)
IPC: C07C39/16
Filed: 2001-03-02
Abstract: The invention relates to an inexpensive and simple method for producing a starting material for polycarbonate resin and for producing polycarbonate resin. In the method for producing a starting material for polycarbonate resin production through interfacial polymerization, a molten bisphenol compound is without being solidified, directly mixed with water to be in liquid at a temperature not higher than the melting point of the bisphenol compound, and then dissolved in an aqueous alkali solution.
Patent KR-20020006545-A (KR)
Title: Polycarbonate articles and adhesive composition
IPC: B32B27/36
Filed: 1999-10-29
Abstract: An article is disclosed that includes:a) a first polycarbonate substrate;b) a second polycarbonate substrate; andc) an adhesive composition disposed between the first polycarbonate substrate and the second polycarbonate substrate such that the first polycarbonate substrate is bonded to said second polycarbonate substrate through the adhesive composition; the adhesive composition includes an adhesive polymer that includes the reaction product of1) an N-vinyl containing monomer selected from the group consisting of N-vinyl caprolactam, N-vinyl pyrrolidone, and N-vinyl imidazole, and combinations thereof, and2) an acrylic acid ester monomer of a non-tertiary alcohol having an alkyl group that includes 4 to 20 carbon atoms.
Patent KR-20030059934-A (KR)
Title: Pneumatic injection top
Inventor: SHIN KOANG YONG
IPC: A63H1/00
Filed: 2002-01-03
Abstract: PURPOSE: A pneumatic injection top is provided to achieve a pneumatic injection mechanism capable of continuously generating strong pneumatic pressure using only small amount of energy. CONSTITUTION: The pneumatic injection top comprises a rotating shaft(1), an inner disk body(2) installed at the middle position of the rotating shaft, a pneumatic body bolted at both front and rear sides of the inner disk body, a pneumatic compression pipe(4) around the inner disk body, a pneumatic compression plate(5) inside the pneumatic compression pipe, a concave pneumatic injection top cover(6), and an air suction propeller(7).
Patent KR-20020023249-A (KR)
Title: Stand along type liquid discharge pouch designed to receive pump
Inventor: LEE JEONG MIN
IPC: B65D47/34
Filed: 2002-01-01
Abstract: PURPOSE: A stand along type liquid discharge pouch designed to receive a pump is provided to eliminate the use of a separate hard case or container in use, and to reduce the amount of wastes. CONSTITUTION: The stand along type liquid discharge pouch(1) consists of a body(100), a discharge opening(200) attached to the top end of the body, and a pump(300) assembled to the discharge opening for pumping content received in the body. A discharger set(201), composed of an upper section(203) and a lower section(204), is connected to the discharge opening by using a support(202), and the lower section is designed to be moved vertically. The end of the lower section is fixed to a bottom surface of the body, and has a bottom hole for allowing the upward movement of the content. The lower end of a pump housing(301) is assembled with a discharge hole of the upper section of the discharge set.
Patent KR-20030060124-A (KR)
Title: Manufacturing method of herb remedy
Inventor: KIM JUN WON
IPC: A61K36/539
Filed: 2002-01-07
Abstract: PURPOSE: A method of preparing a herbal drug composition of a semi-solid form by blending a herbal drug extract with rice flour or wheat flour. Therefore, the composition is easily packed during production, allows a user to carry it easily and is capable of being easily absorbed by the human body. CONSTITUTION: About 25 to 35% by weight of honey syrup and 5 to 15% by weight of one of rice flour and wheat flour are added to a herbal extract to produce a herbal drug composition of a semi-solid form. For an example, 9.6kg of Rehmanniae Radix, 960g of Panax Ginseng and 1,920g of Poria cocos are added with 6kg of honey syrup. Thereafter, the mixture is heated in a double-boiling vessel for 3 to 4 days, added with 4.62kg of honey syrup and 924g of wheat flour and heated in a double-boiling vessel for 24 hr to produce kyeongok-ko of a semi-solid form.
Patent KR-20030064110-A (KR)
Title: Cooling apparatus for microwave lighting system
Inventor: CHOI JUN SIK
IPC: H01J65/04
Filed: 2002-01-25
Abstract: PURPOSE: A cooling apparatus is provided to radiate heat transferred from the magnetron or high voltage generator to the casing even when the casing is formed into a closed type, while preventing ingress of water into the casing. CONSTITUTION: An electrodeless illumination system comprises a casing(10); an electric bulb(5) arranged in the outside of the casing and which has a material for generating light; a resonator(6) arranged in the outside of the casing in such a manner that the resonator accommodates the electric bulb, cuts off microwave and allows light emitted from the electric bulb to exit; a magnetron(20) including an anode, a cathode and a magnet and which is mounted in the casing in such a manner that the magnetron generates microwave when the cathode is applied with a current; and a waveguide(40) interposed between the magnetron and the resonator and which guides microwave to the resonator. A cooling apparatus includes a blower fan(60) mounted on the casing and which sucks external air and blows the sucked air to the outer surface of the casing.
Patent KR-20030025158-A (KR)
Inventor: AHN MYEONG JIN
IPC: H01B11/18
Filed: 2002-01-30
Abstract: PURPOSE: A foamed cable is provided to reduce the amount of attenuation and improve a transmission rate by reducing a dielectric constant and increasing stress against external force. CONSTITUTION: A foamed cable(30) has a twist structure which is formed by twisting a foam insulator(20) of two strands. The foam cable(30) is formed with a conductor(10) and the foam insulator(20) for covering the conductor(10). The conductor(10) is formed with a copper cable. The foam insulator(20) is formed by performing a foaming process using Freon gas, N2, or CO2. The foam insulator(20) includes high density polyethylene resin and fluorinated ethylene propylene resin as base resin. The foam insulator(20) is used as an unshielded twisted paired copper cable, a foiled twisted paired copper cable, a shielded twisted paired copper cable or a coaxial cable.
Patent KR-20030065875-A (KR)
Title: System and Method for Goods Sale with Reservation Regulation
Inventor: JUNG JIN GYUN
Filed: 2002-02-01
Abstract: PURPOSE: A system and method for selling a commodity through a reservation system is provided to enable a user to select a commodity with correct information by reserving a commodity, selected by the user by off-line, by on-line using an inherent number of the commodity. CONSTITUTION: A communication network server(202) is communicated with a wireless terminal and a wire terminal and processes a request of each terminal. A user management unit(220) stores user information of the wireless terminal and the wire terminal in a database(206) and manages the information. In the case that the user connects to the commodity selling system using the wireless terminal or the wire terminal, a user authentication unit(222) authenticates the user. In the case that the user wants to reserve a desired commodity, a commodity reservation processing unit(224) requests that the user inputs an inherent number of the corresponding commodity and stores the corresponding commodity in the database(206). The user connects to the commodity selling system using the wireless terminal or the wire terminal and purchases a commodity. A commodity sale processing unit(226) presents all commodity details or reserved commodity details, pays a price, and stores a purchase result in the database(206).
Patent KR-20030066965-A (KR)
Inventor: HA JAE YEONG
IPC: H01J29/48
Filed: 2002-02-06
Abstract: PURPOSE: An electron gun for a cathode ray tube is provided to achieve improved voltage withstanding characteristics by maximizing the distance from the resistor to the inner surface of the neck portion. CONSTITUTION: An electron gun(1) comprises a pair of bead glasses(20) for supporting a cathode assembly(2) for emitting electron beams and a plurality of electrodes(3,4,5,6,7,8,9) constituting an electronic lens for focusing and accelerating electron beams emitted from the cathode assembly; a resistor(21) arranged on the side surface of one of bead glasses, in the direction parallel to the lengthwise direction of the bead glass; and a connector(22) for applying the voltage applied to the resistor from the resistor to the electrodes.
Patent KR-20030068639-A (KR)
Inventor: KIM DO WAN
IPC: G11B17/038
Filed: 2002-02-15
Abstract: PURPOSE: A disk clamp of a hard disk drive is provided to prevent a slip of a disk although a shock is applied to the disk drive from the outside, thereby preventing damage of a spindle motor due to the slip of the disk. CONSTITUTION: When a plurality of screws are joined to a spindle motor(30), a disk clamp(160) is transformed by being pressed by the plurality of screws. By the transformation of the disk clamp, a vertical pressurizing unit(166) vertically pressurizes the top side of a disk(20). A plurality of horizontal pressurizing units(168) are protruded downward to be inserted between an outer periphery of the spindle motor and an inner periphery of the disk for horizontally pressurizing an inner surface of the disk outward, so that the disk is firmly mounted at the spindle motor. A plurality of screw coupling holes are formed inside the plurality of horizontal pressurizing units to be coupled with a top end of the spindle motor.
Patent KR-20030075116-A (KR)
Title: Apparatus for enhancing starting discharge in plasma lighting system
Inventor: CHOI JUN SIK
IPC: H01J65/04
Filed: 2002-03-16
Abstract: PURPOSE: An auxiliary turn-on device is provided to allow for a smoothness of initial turn-on operation of electrodeless lamp, while reducing power consumption and costs. CONSTITUTION: An auxiliary turn-on device comprises an electrodeless lamp(60) disposed in a resonator(50) which generates an electric field by the electromagnetic wave generated from an electromagnetic wave generating unit, wherein the electrodeless lamp generates a plasma by the electric field generated in the resonator; an ignite wire(120) disposed in the vicinity of the electrodeless lamp; and an ignite power supply for supplying a power to the ignite wire in such a manner that the ignite wire generate an electric field.
Patent KR-20020075250-A (KR)
Inventor: POMPL GERHARD
IPC: C01B23/00
Filed: 2002-03-20
Abstract: PURPOSE: Provided are a process and an apparatus for low-temperature fractionation of air using the three-column system which is particularly economically favorable. CONSTITUTION: A process for the low-temperature fractionation of air using a three-column system, which has a high-pressure column(11), a low-pressure column(13) and a medium-pressure column(12), in which process (a) a first charge air stream is introduced into the high-pressure column(11), where it is separated into a first oxygen-enriched liquid and a first nitrogen top gas, (b) a first oxygen-enriched fraction(23,24,26) from the high-pressure column(11) is introduced into the medium-pressure column(12) where it is separated into a second oxygen-enriched liquid and a second nitrogen top gas, (c) a second oxygen-enriched fraction(33,35) from the high-pressure column and/or from the medium-pressure column(12) is introduced into the low-pressure column(13), where it is separated into a third oxygen-enriched liquid and a third nitrogen top gas, (d) a nitrogen product stream and/or an oxygen product stream is removed from the low-pressure column(13), (e) at least a portion(36) of the second nitrogen top gas from the medium-pressure column(12) is at least partially condensed by indirect heat exchange(37) with a cooling fluid, characterized in that (f1) a second charge air stream is liquefied and is then used as cooling fluid(78) for the condensation of the second nitrogen top gas(36) from the medium-pressure column(12), and/or (f2) a liquid from an intermediate point of the high-pressure column(11) is used as cooling fluid for the condensation of the second nitrogen top gas(36) from the medium-pressure column(12).
Patent KR-20030080278-A (KR)
Title: Broadcasting information receiving system and method using common interface module
Inventor: YANG MIN YEONG
IPC: H04N7/08
Filed: 2002-04-04
Abstract: PURPOSE: A system and a method for receiving broadcasting information by using a CI(Common Interface) module are provided to supply additional information to a user while operating independently from a digital broadcasting receiver by processing received broadcasting information with the CI module. CONSTITUTION: A system for receiving broadcasting information by using a CI module includes an information server(130) for providing digital broadcasting information, and a digital broadcasting receiver(120) for carrying out the reservation recording and reproducing of a PVR for a certain broadcasting by the received broadcasting information. Further, a CI module(110) provided between the information server and the digital broadcasting receiver to be periodically connected to the information server, thereby receiving the broadcasting information from the information server and transmitting the received broadcasting information to the digital broadcasting receiver.
Patent KR-20030080720-A (KR)
Title: Water softener having an improved mesh net
Inventor: NOH EUNG SEOK
IPC: C02F1/42
Filed: 2002-04-10
Abstract: PURPOSE: A water softener into which an agent for regenerating ion exchange resin is injected more promptly is provided. CONSTITUTION: In a water softener comprising a column(100) which is equipped with water inlet and water outlet for flowing in and out raw water, on the upper part of which a port(117) for introducing regenerating agent is installed, and in which ion exchange resin(120) for removing hard water constituents of raw water introduced through the water inlet is filled between mesh nets(113) installed at certain upper and lower positions of the column, the water softener is characterized in that the mesh net comprises at least one block part vertically formed in a convex shape at a certain position of the mesh net(113) so that the regenerating agent is easily supplied into the ion exchange resin.
Patent KR-20030080806-A (KR)
Title: Cam shaft
Inventor: OH CHANG SEOK
IPC: F01M1/06
Filed: 2002-04-11
Abstract: PURPOSE: A cam shaft structure is provided to achieve improved cooling performance of cylinder head, while reducing costs for manufacture of engine by eliminating the necessity of using an oil cooler and oil passage. CONSTITUTION: A cam shaft structure comprises oil flow increasing holes(14) formed at both sides of a cam bearing oil supply hole(13) in such a manner that the oil is supplied to both sides of a lower portion(31) of a cam bearing(30) where a small width portion is formed into a recess by the formation of a valve hole(22). The oil is directly supplied to a middle deck(21) of the cam bearing in case where the oil flow increasing holes pass through the small width portion during the rotation of a cam shaft(10). The oil is supplied to the inner surface of the cam bearing when the oil flow increasing holes pass through the position other than the small width portion.
Patent KR-20030082175-A (KR)
Title: alignment apparatus in the equipment for manufacturing semiconductor device
Inventor: KIM GYEONG SU
IPC: H01L23/36
Filed: 2002-04-17
Abstract: PURPOSE: An alignment apparatus of semiconductor fabricating equipment is provided to prevent a defective product by accurately aligning the position of a ground plane and a heat spreader, and to control formation of a void by exhausting the air between the ground plane and the heat spreader. CONSTITUTION: The heat spreader(110) is vacuum-absorbed to a heat spreader block(100). A plurality of guide pins(104) for guiding the heat spreader and a plurality of align pins(106) for aligning the ground plane(112) are respectively formed on the heat spreader block. The ground plane is positioned on the guide pins of the heat spreader block. A light emitting sensor(120) irradiates light, installed in one side of the heat spreader block. A light receiving sensor(130) detects the light irradiated from the light emitting sensor, installed in the other side of the heat spreader block.
Patent KR-20030083257-A (KR)
Inventor: WON IN HO
IPC: B44C5/06
Filed: 2002-04-19
Abstract: PURPOSE: A framework constructed in a desired form and having a constant space to contain mineral powder, moderate and small particles and sand framework in order to form a variety of natural pictures and patterns. CONSTITUTION: The framework comprises a frame(A); a supporting body(1) having concave eddy part(2) on top side of the supporting body(1); transparent materials(4,4') on both sides; an opening/closing mineral entrance(5) formed on the top plate. A mixture to be entered into a picture body(3) through the entrance(5) comprises 30% of mineral powder; 20% of moderate and small particles having various colors and 50% of sands. Then, a colored transparent solution(11) is fully introduced into the picture body(3). After plugging the entrance(5), by moving the picture body(3) in any directions and attaching the body to the eddy part(5) to give different shapes and forms of the natural picture(10).
Patent KR-20030085915-A (KR)
Inventor: KIM HONG RAE
IPC: H01L21/28
Filed: 2002-05-02
Abstract: PURPOSE: A photo process for copper dual damascene is provided to be capable of simultaneously forming a via pattern and a metal pattern by using the etching selectivity between an insulating layer and a photoresist layer. CONSTITUTION: The second insulating layer(14) is formed on the entire surface of the first insulating layer(10) having a copper line(12). The first photoresist pattern is formed on the resultant structure so as to cover selectively the center portion of the copper line(12). The second insulating layer(14) is partially etched using the first photoresist pattern as a mask. The second photoresist is formed on the entire surface of the resultant structure. The second and first photoresist and the second insulating layer(14) of a via region are selectively etched. Then, a copper interconnection is formed.