baber/WOPTO huggingface dataset:
Patent JP-2003189691-A (JP)
Title: Driving method for step motor
Inventor: OSAKAMA CHIKA
IPC: H02P8/08
Filed: 2001-12-11
Abstract: <P>PROBLEM TO BE SOLVED: To provide a driving method for step motor to prevent step out reliably which may occur due to the state of load in terms of mechanism.  <P>SOLUTION: When a step motor is stopped, a stop phase in which the motor should be stopped is held for a predetermined time and then excitation is stopped. When driving of the step motor is restarted, the stop phase is not taken as a start phase. Instead, a phase in a position back from the stop phase by an amount equivalent to phases in which at least phase shift due to the state of load in terms of mechanism can be absorbed is taken as a start phase and held for a predetermined time before excitation is started.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2003189652-A (JP)
Title: Servomotor controllor
Inventor: SUGIURA MASAKI
IPC: H02P27/08
Filed: 2001-12-11
Abstract: <P>PROBLEM TO BE SOLVED: To provide a servomotor control device which can perform stable operation in all the regions with magnetic saturation appearing so as to sufficiently attain miniaturization.  <P>SOLUTION: A control gain reduction part 13 receiving a detected speed ωof a motor 1 is provided, a proportional gain Kp of a current control integration arithmetic part in a current control unit 9 is made to be reduced in accordance with decrease in a rotational speed of the motor 1. Including the situation even when it is servo locked, the motor 1 is controlled so as to suppress generation of control instability due to magnetic saturation of the motor 1 in a low speed condition.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2003177338-A (JP)
Title: Mirror deflection device, method of driving the same and optical exchanging device
Inventor: OTAKA KOICHI
IPC: B81B3/00
Filed: 2001-12-13
Abstract: <P>PROBLEM TO BE SOLVED: To provide a mirror deflection device which has a broad deflection range and is driven at a low voltage.  <P>SOLUTION: The front end of a projected part 112 on the side of a substrate 107 is engaged in the recessed part 102 provided at the rear face of a mirror board 101, the mirror board 101 is movably supported at the end of the projected part 112 as a supporting point. A plurality of driving electrodes, which are opposing to the mirror board 101, are provided at the recessed part of the substrate 107. The mirror board 101 is kept at a neutral position when it is not driven by a supporting part 103 which has a foldable structure connected to the end of the mirror board 101 and the substrate 107.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2003187372-A (JP)
Title: Roadside antenna for communication between road and vehicle
Inventor: FURUTA NORITOSHI
IPC: H01Q7/00
Filed: 2001-12-17
Abstract: <P>PROBLEM TO BE SOLVED: To satisfactorily perform matching by suppressing an impedance increase in a roadside antenna even when the roadside antenna for communication between vehicle and road is installed in a section with a long communicable section length.  <P>SOLUTION: In this roadside antenna 1, one conductive loop made of a conductive line formed in a rectangular shape is divided into two small loops (loop antenna elements 11 and 12) with an intersecting point of the conductive lines by twisting the conductive loop at a center part in a longitudinal direction, and power feeding is parallelly performed to the respective small loops from one power feeding point in the vicinity of the intersecting point. It is possible to suppress the impedance of the roadside antenna lower than that of a loop antenna with the same coil length as that of the roadside antenna 1, singly structured as a roadside antenna by making the two small loops having a configuration that the small loops are adjacently arranged (electrically parallelly connected) in this way. It is therefore possible to satisfactorily match with a power feeding side.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2002224052-A (JP)
Title: Telecommunication type medical system and method
Inventor: SCHWARTZ YITZHACK
IPC: A61B5/00
Filed: 2001-12-17
Abstract: PROBLEM TO BE SOLVED: To provide a novel telecommunication type medical system used for various medical uses for internal organs of various types. SOLUTION: This telecommunication type medical system has a telecommunication type medical sensor implanted for measuring an in vivo parameter of a patient. This sensor has a housing, and a membrane arranged on one end, and deformable according to the parameter. A microchip is arranged inside the housing, and transmits a signal for indicating the parameter through the membrane. This system has a signal reading and charging device arranged outside the body of the patient, and communicating with the sensor. This device has a casing, and the external circuit. The circuit has a logical control unit, and a processing unit. The logical control unit transmits a power supply signal for remotely supplying electric power to the sensor, and receives a signal transmitted from the sensor. The processing unit is connected to the logical control unit, and converts the signal from the sensor into the measuring parameter.
Patent JP-2003186699-A (JP)
Title: Trace information outputting method of information processing device, and trace information outputting system
Inventor: TSUTSUMI AKIMICHI
IPC: G06F11/28
Filed: 2001-12-17
Abstract: <P>PROBLEM TO BE SOLVED: To provide a trace information outputting method of an information processing device which can prevent missing of trace information, and to provide a system therefor.  <P>SOLUTION: The interface device 15 of a microcomputer 12 is provided with a storage 15a and an address-converting circuit 15b, and an ICE (In-Circuit Emulator) 13 is provided with an address-restoring means 13a. The address- converting circuit 15b converts an absolute branch destination address, outputted from a CPU 14, into an optional number having less amount of data allotted to the absolute branch destination address preliminarily stored in the storage 15a, and then the address-restoring means 13a restores outputted optional number to the pre-conversion absolute branch destination address.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2002265489-A (JP)
Title: Nucleic acid reagents compriseing new 3',4'-crosslinked nucleoside and oligonucleotide analogs respectively
Inventor: KANEKO MASAKATSU
IPC: A61K48/00
Filed: 2001-12-18
Abstract: PROBLEM TO BE SOLVED: To provide a nucleic acid reagent or medicament comprising a 2-5A(i.e., 2',5'-oligoadenylic acid) analog having been known as an in vivo substance with antiviral activity, stable and excellent antisense or antigene medicament, or new 3'4'-crosslinked oligonucleotide analog having high activity as a detective agent(probe) for a specific gene or as a primer for initiating amplification, and to provide a 2nd nucleic acid reagent comprising a new 3',4'- crosslinked nucleoside analog as the intermediate for producing the 3'4'- crosslinked oligonucleotide analog. SOLUTION: This new analog is a compound (salt thereof) shown by the general formula(1) (R<1> and R<2> are each H, a protective group for hydroxy group, phosphate group or the like; A is a 1-4C alkylene; B is a purin-9-yl or 2-oxo-1,2-dihydropyrimidin-1-yl group optionally bearing substituent(s) selected from the α-group mentioned as follows: the α-group consisting of OH, amino, mercapto, alkoxy, alkyl, alkylthio, halogen atom, etc.).
Patent JP-2003180102-A (JP)
Title: Underdrain-forming apparatus
Inventor: MINAGAWA ISAO
IPC: A01B35/18
Filed: 2001-12-20
Abstract: <P>PROBLEM TO BE SOLVED: To provide an underdrain-forming apparatus by which a vertical port passage is kept even if both opposite surfaces of bored groove trace is made closely narrow and blocked by passage of time, capable of favorably keeping draining property and air ventilation of an underdrain by presence of the vertical port passage.  <P>SOLUTION: This underdrain-forming apparatus is obtained by connecting a machine frame 3 to a traveling machine body 1 by a connecting mechanism 2, swingably vertically installing boring beam 4 in advancing direction by a swinging mechanism 5 in the machine frame and installing a bullet body 14 capable of forming the underdrain in the soil in the lower part of boring beam, installing an enlarging member 15 capable of forming, alternately to right and left, a vertical port passage T opening on the ground surface by enlarging the opposite surfaces of a boring trace groove S extended and formed in the vertical direction in the soil by the boring beam at the backward position in the advancing direction of the boring beam and installing an alternately enlarging mechanism 16 for carrying out alternate enlarging action of the enlarging member.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2003181148-A (JP)
Title: Server for providing prize game service, program storage medium to be utilized for server, game system utilizing server, and prize game service providing method
Inventor: NARA TOSHIOMI
IPC: A63F13/79
Filed: 2001-12-21
Abstract: <P>PROBLEM TO BE SOLVED: To provide a server which can be contributed to the improvement of the will of access while keeping the passion for gambling of a player to a game.  <P>SOLUTION: The server provides various kinds of services to both a terminal on the side of a user and a terminal on the side of a member store dealing with articles, or the like, on a network. At such a time, on the condition that a game site registered on the network is accessed from the user of the user terminal within a prize period, the server gives an opportunity for the same user to play the game and to acquire the article, or the like, provided by the member store as a gift. The winning average of this game is varied by the server correspondingly to the number of remaining days in the prize period.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2003181815-A (JP)
Title: Fiber-reinforced cement board and method for manufacturing the same
Inventor: WATANABE HIROSHI
IPC: C04B111/20
Filed: 2001-12-21
Abstract: <P>PROBLEM TO BE SOLVED: To provide a fiber-reinforced cement board where a silica fume is blended with higher strength and higher durability.  <P>SOLUTION: In manufacturing the fiber-reinforced cement board by preparing an aqueous slurry, only silica fume is stirred beforehand to prepare an even slurry made of silica fume, and pulp fibers are then charged into the slurry to disentangle the fibers.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2003196744-A (JP)
Title: Receipt issuing device and receipt reader
Inventor: MISAKI KIYOSHI
IPC: G07G1/12
Filed: 2001-12-25
Abstract: <P>PROBLEM TO BE SOLVED: To provide a receipt issuing device and a receipt reader with which additional information obtained from a POS system can be utilized at low cost in inventory management in a house.  <P>SOLUTION: The receipt issuing device is provided with an inputting means for inputting sales information specifying sold merchandise and the sales price of the merchandise, an electronic watermark encoding means for encoding information specific to the sold merchandise into electronic watermark data, and an issuing means for a receipt on which the sales information is printed and the electronic watermark data encoded by the electronic watermark encoding means is printed so as to overlap on the printed sales information.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2003197997-A (JP)
Title: Method of manufacturing laminate type piezoelectric ceramic element
Inventor: KACHI TOSHIAKI
IPC: H01L41/22
Filed: 2001-12-26
Abstract: <P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a laminate type piezoelectric ceramic element, which is superior in piezoelectric characteristics and shows high reliability.  <P>SOLUTION: In the laminate type piezoelectric ceramic element where inner electrodes containing alloy, which has Ag as main component, are formed via ceramic layers, the ceramic layers and the inner electrodes are simultaneously baked and are re-baked in atmosphere having oxygen concentration of 10% or less.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2003197949-A (JP)
Title: Photodetector, circuit built-in photodetection device, and optical disk device
Inventor: HAYASHIDA SHIGEKI
IPC: G11B7/13
Filed: 2001-12-26
Abstract: <P>PROBLEM TO BE SOLVED: To enable a photodetector to be improved both in operation speed and sensitivity.  <P>SOLUTION: A photodetector is equipped with a p-type diffusion layer 101, a p-type semiconductor layer 102, an n-type diffusion layer 103 serving as a photodetection layer, and a light transmission film 104 laminated on a p-type silicon substrate 100. The n-type diffusion layer 103 is larger in thickness than the absorption length of incident light having a wavelength of 400 nm, 0.8 to 1.0 μm in thickness, and has an impurity concentration of 1E19 cm<SP>-3</SP>or below at its surface. The layer 103 has a concentration profile which indicates that impurities are maximum near the surface. Carriers which are generated by incident light are prevented from being recombined near the surface of the n-type diffusion layer 103, so that the photodetector can be improved in sensitivity and also in response speed by the n-type diffusion layer 103 that has a deep junction and a low resistance.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2003190875-A (JP)
Title: Apparatus and method for removing coating liquid in glass globe
Inventor: IRISAWA HIROYUKI
IPC: B05C11/10
Filed: 2001-12-27
Abstract: <P>PROBLEM TO BE SOLVED: To provide an apparatus for removing a coating material in a glass globe with which the removal of excess coating liquid retained in an opening part of the glass globe is surely and sufficiently performed and time and labor for maintenance is saved and to provide a method for removing the coating liquid in the glass globe.  <P>SOLUTION: The apparatus for removing the coating liquid retained in an opening part 49 during the coating liquid is applied on the inside surface of the glass globe and the glass globe is intermittently transported while facing the glass globe opening 49 downward by a conveyer apparatus 2 is provided with a coating liquid suction part 4 in contact with the opening part 49 and for sucking the coating material retained in the opening part, a nozzle member 32 for exhausting the inside of the globe when the opening part 49 is in contact with the coating liquid suction part 4, an exhausting mechanism 15 connected to the nozzle member 32 and for exhausting the inside of the globe, a globe rotation part 6 for rotating the glass globe 5 held in a contact state with the coating liquid suction part 4 around the vertical axis, a 1st elevating mechanism 14 for the coating liquid suction part 4, a moving forward and backward mechanism 12 for moving the coating liquid suction part 4 forward and backward from a position below the glass globe 6 and a solvent supply part 7 for supplying a solvent for removing the coating liquid to the coating liquid suction part 4.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2003193278-A (JP)
Title: Apparatus for producing and supplying gaseous fluorine
Inventor: COLIN KENNEDY
IPC: C25B15/02
Filed: 2001-12-27
Abstract: <P>PROBLEM TO BE SOLVED: To provide an apparatus for producing and supplying gaseous fluorine which is disposed in a gas supply system of a semiconductor treating system and can back up the abnormality of the apparatus with inexpensive and safe constitution.  <P>SOLUTION: The apparatus 30 for forming and supplying the gaseous fluorine disposed in the gas supply system 20 of the semiconductor treating system includes an electrolytic cell 34 for forming the gaseous fluorine and a cylinder 62 for storing the substitute gas selected from the group consisting of nitrogen fluoride, sulfur fluoride and chlorine fluoride. The electrolytic cell 34 and the cylinder 62 are connected to a gas switching section 56 for selectively supplying the gaseous fluorine from the electrolytic cell 34 and the substitute gas from the cylinder 62 to a gas use section. A controller 40 controls the gas switching section 56 so as to supply the substitute gas from the cylinder 62 to the gas use section when the abnormal state of the electrolytic cell 34 is detected by an electrolytic cell detector 36.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2003173692-A (JP)
Title: Bootstrap circuit
Inventor: HWANG TAE SUN
IPC: G11C16/06
Filed: 2001-12-28
Abstract: <P>PROBLEM TO BE SOLVED: To provide a word line bootstrap circuit for realizing a high speed flash memory and a memory cell having excellent data holding capability.  <P>SOLUTION: This bootstrap circuit is constituted so that a high potential power source voltage HVCC and a low potential power source voltage LVCC are sensed, clamp is performed at only the high potential power source voltage HVCC, and normal operation is performed at the low potential power source voltage LVCC, and read-out operation of a flash memory cell can be performed stably by controlling easily a level of word line boost voltage.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2003164364-A (JP)
Title: Chopstick with decorative body
Inventor: TSUCHIKURA AKIO
IPC: A47G21/10
Filed: 2001-11-30
Abstract: <P>PROBLEM TO BE SOLVED: To provide a chopstick with a decorative body which brings about a great decorative effect, can be easily attached to a top part of a chopstick body, can be prevented from being caught in another object, and can be prevented from falling off easily.  <P>SOLUTION: The top part of the chopstick body is provided with a decorative body attaching part; and the decorative body is composed of a rivet-shaped decorative body having a sheetlike decorative part whose under surface is provided with an inserting protrusive leg part.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2003501854-A (JP)
Title: 受信器チューニング周波数の選択のための方法
IPC: H03J1/00
Filed: 2000-02-11
Abstract: (57)【要約】
番組に関連するデータ及び送信局に関連するデータを使用することによるＦＭ-ＲＤＳ送信局におけるラジオ放送信号の受信のチューニングのための方法及び予め決定された受信品質レベルを超えるＦＭ-ＲＤＳ送信局の識別のための帯域探索を行うこの方法を実施する受信器。データ処理及び記憶容量の使用における効率を改善するために、チューニングデータを含む送信局に関連するデータが番組に関連するＲＤＳデータとは別個に記憶される。識別された各送信局毎に、送信局の受信品質の安定度を示す安定度ファクタが相応のチューニングデータに第１のメモリバンクにおいて記憶される。このようにして識別された送信局のＲＤＳデータにおいて送信された送信局識別コード毎に、番組に関連するＦＭ-ＲＤＳデータが第２のメモリバンクに記憶され、相応のＦＭ-ＲＤＳ送信局から送信された番組データを含む第２のメモリバンクにおいてメモリアドレスを定義する連結コードは、各ＦＭ-ＲＤＳ送信局の送信局データに割り当てられて、第１のメモリバンクに記憶される。
Patent JP-2003503326-A (JP)
Title: 水相中にラメラ分散構造を含む油中水型頭髪コンディショナー
IPC: A61K8/58
Filed: 2000-05-17
Abstract: (57)【要約】
本発明は、（ａ）（ｉ）水と、（ｉｉ）水相の約０．１−約１０％で存在しラメラ分散構造を形成し得るカチオン性界面活性剤と、から成る約４０−９５％の水相と、（ｂ）揮発性シリコーン化合物、不揮発性シリコーン化合物、揮発性炭化水素化合物、不揮発性炭化水素化合物またはそれらの混合物から成る約０．５−約３０％の油と、（ｃ）約０．１−約２０％のシリコーン界面活性剤と、（ｄ）任意にＣ １０ −Ｃ ２２ の炭素鎖を有する長鎖ジアルキルアミン、Ｃ １０ −Ｃ ２   ２ の炭素鎖を有する長鎖脂肪アルコール、または、エトキシル化脂肪アルコールと、から成る油中水型エマルジョンの形態の水性不連続相中にラメラ分散構造を有している不透明な頭髪コンディショナー組成物に関する。
Patent JP-2003504455-A (JP)
Title: アミログルコシダーゼ酵素を含んでなる洗剤組成物
IPC: C11D17/06
Filed: 2000-06-30
Abstract: (57)【要約】
本発明は、アミログルコシダーゼ酵素を含んでなる、洗濯、食器洗浄、および／または硬質表面洗浄剤組成物を包含する洗剤組成物に関する。その様な組成物は、デンプンを含む染みや汚れの除去性能が優れ、洗濯用組成物に処方した時は、白さの維持および薄汚れ洗浄性能が優れている。
Patent JP-2003505870-A (JP)
Title: 直接接着を使用して電荷補償半導体素子を製造する方法およびその素子
IPC: H01L21/336
Filed: 2000-07-04
Abstract: (57)【要約】
高電圧ＭＯＳＦＥＴなどの半導体素子は、遮断接合部（４０）からの空乏時に電圧維持空間電荷区域を与える交互のｐ型（１１）およびｎ型（１２）領域を有する空乏可能多領域半導体材料（１０）を含むことが知られている。本発明は、光学的平坦主面において交互のｐ型およびｎ型ウェーハ（１１０、１２０）を互いに直接接着することによって空乏可能多領域半導体材料を製造する、低費用でありながら信頼度の高いこのような材料を製造する方法を提供する。生成された材料は、ｐ型およびｎ型領域（１１、１２）間に接着接合部を有する接着スタックの形を取っている。接着接合部（２１）はｐ−ｎ接合であってよく、あるいは酸化界面層を含んでいてもよい。接着スタックは接合部（２１）に対して横方向にスライスされて、垂直型素子の素子ウェーハを形成する。
Patent JP-2003529049-A (JP)
IPC: G01S13/76
Filed: 2000-08-24
Abstract: A system for determining the position of a transponder transmitting a signal and moving along a route is disclosed. The route includes a measuring station with at least two measuring points having on each side of the route and along a line generally perpendicular to the route. The measuring station includes a first receiver that receives the signal at one measuring point and a second receiver that receives the signal at the other measuring point. Each receiver provides an output. A circuit measures the phase difference between the outputs of the first and second receivers, and the transponder location along the line between the measuring points is determined based on the measured phase difference.
Patent JP-2003508156-A (JP)
Title: 吸収性物品のためのエンボス加工されたライナ
IPC: A61F13/53
Filed: 2000-08-14
Abstract: (57)【要約】
互いに向かい合わせの関係にある少なくとも２つの層を有し、少なくとも１つのエンボス加工された凹面形態と好ましくはそのような形態の列とを有するパーソナルケア製品のためのライナが提供される。これらの凹面形態は、正方形、ダイヤモンド形、円形、又は、美的感覚を有するデザインといった異なる形態を有することができる。しかし、最大の恩典を得るためには、この凹面形態は、流体吸収を可能にし、同時に流体に対してその拡がりを低減する物理的障壁を作り出すための必要な深さと互いの間の距離とを有する必要がある。前記ライナは、一緒にエンボス加工された上面シート材料、サージ層、及び、吸収性コアの組み合わせから製造することができる。
Patent JP-2003512117-A (JP)
Title: カートリッジ排出装置
IPC: A47J31/06
Filed: 2000-09-28
Abstract: (57)【要約】
本発明は、固定部品（２）および可動部品（１）を有するジョー（２０）を備えた、コーヒー・マシンのカートリッジ排出装置に関するものである。ジョーは、閉じた位置において、前部にカートリッジ用のハウジング（１０）を形成し、可動部品は、固定部品の後部で回動可能となるように取り付けられている。カートリッジ排出装置は、固定部品上のカートリッジ・ハウジングの領域にイジェクタ（５）を有し、また可動部品の回転軸の上方で可動部品に取り付けられる牽引アーム（３）を有している。牽引アーム（３）は、その端部に、該イジェクタの受け部材（１２，１３）と協働するよう設計された第１のピン（１１）を備えている。
Patent JP-2003512983-A (JP)
Title: 子供にとって安全なブリスター包装体
IPC: B65D83/04
Filed: 2000-10-27
Abstract: (57)【要約】
丸剤の形をした薬剤用に改良され、子供にとって安全なブリスター包装体は、個々の丸剤を受け入れるためにブリスターシート内に形成されたブリスター（１４）のパターンを有するブリスターシート（１２）及び前記ブリスターを被覆して密閉する、ブリスターシートに積層された破壊出来る蓋用の箔（１８）を含む。強度の低い刻み目入りの線（２４）によって強化板紙の中に形成された打抜き区画（２２）の対応するパターンを有する強化板紙（２０）は、各ブリスターに重なる打抜き区画付きの蓋用の箔に積層され、高強度の柔軟な材料の強化フィルム（２６）は、剥離し易い接着剤を使って前記板紙に積層される。前記強化フィルムは、打抜き区画及び各打抜き区画を取り囲む板紙の領域を被覆し、そして各打抜き区画に重なる領域を分離して、残りの打抜き区画に重なる部分を妨げることなく個々の打抜き区画に重なる包装体の部分から前記強化フィルムが剥離出来るように、前記強化フィルムの中に形成された強度の低い刻み目入りの線（３０）を有する。強化フィルムと打抜き区画との間の接着層によって上層の強化フィルムから剥離する時に打抜き区画は取り外される。
Patent JP-2004501860-A (JP)
Title: ノルエピネフリン、ドーパミンおよびセロトニンの再取り込みを遮断するための、４−フェニル置換テトラヒドロイソキノリン類およびその利用
IPC: A61K45/00
Filed: 2000-11-03
Abstract: 式ＩＡ−ＩＦの化合物が本明細書において提供される。これらの化合物は構造式（Ａ）のテトラヒドロイソキノリン類であり、ここで式ＩＡ、ＩＢ、ＩＣ、ＩＤ、ＩＥおよびＩＦのそれぞれの化合物に対するＲ １ −Ｒ ８ は、本明細書に記載されているとおりである。化合物は、種々の神経学的および精神医学的な障害、例えばＡＤＨＤの治療の際に特に役立つ。 【化９】
Patent JP-2003513670-A (JP)
IPC: C12Q1/6897
Filed: 2000-11-13
Abstract: The invention relates to methods and compositions utilizing diphtheria toxin for screening purposes. The invention is particularly useful in screening for modulators of IgE synthesis, secretion and switch rearrangement.
Patent JP-2003516524-A (JP)
IPC: G01J3/02
Filed: 2000-11-22
Abstract: A device (1) for use in optical spectroscopy and a method for its manufacture are described. The device includes at least one light source (8) and at least one spectrometer (3) fabricated integratively, the optical components of the at least one spectrometer (3) being optical microcomponents (11,13,16,19,20,21) which are mounted integratively on the top and/or bottom side (9,12) of a substrate board (2). In the method according to the present invention, at least one light source (8) is mounted on a substrate board (2), and at least one spectrometer (3) is produced monolithically in a three-dimensional integration on the substrate board (2). In this context, the spectrometer (3) that is produced according to the method is assembled from optical microcomponents (11,13,16,19,20,21).
Patent JP-2003517207-A (JP)
Title: タングステン・シリサイドをエッチングする方法
IPC: H01L29/78
Filed: 2000-12-15
Abstract: (57)【要約】
本発明のタングステン・シリサイドのエッチング方法は、エッチング側面の90度の側壁形状および速いエッチング速度を可能とする。本実施の形態によれば、基板はエッチング・ゾーン内へ位置付けられ、ＳＦ ６ 、ＨＢｒ、Ｈｅおよび塩素含有ガスを含むプロセスガスはそのエッチング・ゾーンへ導入される。タングステン・シリサイド層を異方的にエッチングするプロセスガスからエッチングガスを生成するために、プラズマがエッチング・ゾーンで発生される。