baber/WOPTO huggingface dataset:
Patent KR-20040049034-A (KR)
Title: Method of producing polyester air-textured yarn with high-thermal-insulation and light-weight
Inventor: HAN SEON JU
IPC: D02G1/16
Filed: 2002-12-03
Abstract: PURPOSE: A manufacturing method of polyester air textured yarn is characterized by controlling pneumatics properly in air-texturing, not passing through a heat setting process and reducing a change of hollow ratio of hollow fiber. The polyester air textured yarn is characterized by having excellent thermo-keeping property and being lightweight. Drawn polyester fiber is capable of weaving textile having soft touch. CONSTITUTION: Polyester air textured yarn is obtained by: preparing polyester hollow fiber as core yarn; preparing drawn polyester fiber as sheath yarn; and then air-texturing the fibers with 6-9bar of pneumatics. A discharge velocity of the air textured yarn is 350-400m/min.. Over feed ratio of the sheath yarn on the core yarn is 10-12%. Single fineness of the drawn polyester fiber is 0.3-0.6denier.
Patent KR-20040050344-A (KR)
Inventor: LEE CHANG U
IPC: C12N15/85
Filed: 2002-12-10
Abstract: PURPOSE: A cancer apoptotic indication vector and a cancer apoptotic expression promoter are provided, thereby screening compounds selectively inducing the apoptosis of various cancer cells. CONSTITUTION: The cancer apoptotic indication vector comprises p53 DNA binding motif comprising the common DNA binding sequence of p53 having the nucleotide sequence set forth in SEQ ID NO: 1; a minimum promoter of thymine kinase gene of Herpes simplex virus at nucleotide position -81 to +52; and a detection marker bound to the promoter selected from luciferase, beta-galactosidase and green fluorescent protein, wherein the vector may further comprises a selection marker selected from zeosine, hygromycine and neomycin. The cancer apoptotic expression promoter hBubR1/hMad3 has the nucleotide sequence set forth in SEQ ID NO: 2.
Patent KR-20040053401-A (KR)
Title: An apparatus for blocking dust from break flange of electric furnace
Inventor: HUH BEOM YONG
IPC: F27B3/10
Filed: 2002-12-14
Abstract: PURPOSE: An apparatus for blocking leakage of dust from break flange of electric furnace is provided to reduce environmental pollution and prevent safety accident by blocking leakage of dust generated on flange contact surface between flange of pickup elbow side and break flange and cutting off adhesion of slag to the flange surface. CONSTITUTION: The apparatus(1) comprises first close adhesion part(10) comprising a fixed cover(12) mounted on an upper part of a side of pickup elbow(320), resting plates(20) erected on an upper side of the fixed cover, and a pressing surface plate which is installed on the resting plates in such a way that the pressing surface plate is movable side to side, and which is supported by a spring(24); second close adhesion part(60) comprising a fixed cover mounted on an upper part of break flange(310) correspondingly to the first close adhesion part, resting plates(70) erected on an upper side of the fixed cover, and a pressing surface plate which is installed on the resting plates in such a way that the pressing surface plate is movable side to side, which is supported by a spring(74), and a rear part of which is movable by a magnet; and a binding part comprising cylindrical binding bars(172) respectively installed at both sides of the fixed covers of the first and second close adhesion parts, and binding bar resting ports(174) into which the binding bars are inserted, and which are sequentially mounted and connected to each other to support a side direction of the fixed cover(12).
Patent KR-20040055080-A (KR)
Title: Real-Time Research System and method Using HTML Tags via Internet
Inventor: OH KI YOUNG
Filed: 2002-12-20
Abstract: PURPOSE: A system and a method for the real-time questionnaire using an HTML(Hyper Text Markup Language) tag insertion method on the Internet are provided to perform a survey, and collect/analyze a result by presenting the questionnaire to the many and unspecified user visiting a web site as the HTML tag for the questionnaire is inserted into a homepage. CONSTITUTION: A survey requester registers the questionnaire to a questionnaire application server(10). A questionnaire verification/registration server(20) registers the questionnaire to a database server(40) after deciding the effectiveness of the questionnaire and checking an error. A questionnaire performing server(50) displays the questionnaire to a questionnaire target by using the registered questionnaire and stores the result to the database server. A report server(30) provides an analysis result to the survey requester in real-time.
Patent KR-20040056331-A (KR)
Title: Ceramic tube for circulating-type radiant tube and method of preparing same
Inventor: BAE WON SU
IPC: C04B35/10
Filed: 2002-12-23
Abstract: PURPOSE: A ceramic tube used in a circulating radiant rube and its preparation method are provided, to obtain a ceramic tube having excellent mechanical properties by simple process. CONSTITUTION: The method comprises the steps of mixing a sintering auxiliary comprising alumina and yttria in the ratio of 8:2 to 6.5:3.5 by weight with silicon carbide; mixing the obtained mixture with a dispersant, a binder and a dispersion medium to prepare a slip; controlling the pH of slip; molding the slip to prepare a molded product; and sintering the molded product at a temperature of 1,800-1,850 deg.C under inert atmosphere. Preferably the ratio of silicon carbide and sintering auxiliary is 80-97 : 3-20 by weight; and the pH of slip is controlled to be 8.3-9.3.
Patent KR-20030080999-A (KR)
Title: Composition containing an extract of processed Panax Species plant or saponin derivatives therefrom for preventing and treating a gastrointestinal disease
Inventor: KIM DONG HYEON
IPC: A61P1/04
Filed: 2002-12-28
Abstract: PURPOSE: An extract of a plant belonging to Panax genus having effects of inhibiting the proliferation of Helicobacter pylori, and H+/K+ is provided. A composition containing the extract obtained through heat treatment, physicochemical treatment such as acid treatment and biological treatment such as lactic acid bacteria, intestinal bacteria culture can be effectively used as a therapeutic or preventive agent for disease associated with the gastrointestinal tract or a functional food. CONSTITUTION: The composition contains 0.02 to 90% by weight of an extract of a plant belonging to Panax genus and saponin derivatives as an effective ingredient and a pharmaceutically acceptable carrier, based on the total weight of the composition. The acid treatment is achieved by adding the plant extract 1 to 50 times(weight/volume) with 0.01 to 50% acid and then culturing at 20 to 80deg.C for 1 to 2 days, the heat treatment is achieved by heating it at 110 to 180deg.C for 0.5 to 20hr. Thereafter, the extract is cultured in lactic acid bacteria or intestinal bacteria at 30 to 50deg.C for 8hr to 8 days.
Patent KR-20040059764-A (KR)
Title: Semiconductor Memory Device having a plurality of core voltage source
Inventor: LEE GEUN IL
IPC: G11C5/14
Filed: 2002-12-30
Abstract: PURPOSE: A semiconductor memory device having plural core supply powers is provided to provide a stable core voltage in spite of voltage, temperature and process change. CONSTITUTION: According to the semiconductor memory device having plural core supply powers, a plurality of core voltage generation circuits generate a plurality of core voltages. A multiplexer(MUX) multiplexes the plurality of core voltages, and operates in response to the input of a control signal. And a sense amp driver supplies a high operation voltage of a sense amplifier(SA1) by inputting the output of the multiplexer.
Patent KR-20040060338-A (KR)
Title: Backlight unit and driving apparatus of liquid crystal display device using the same
Inventor: CHOI JONG HYEON
IPC: G09G3/34
Filed: 2002-12-30
Abstract: PURPOSE: A driving device of an LCD device using a backlight unit is provided to irradiate light on an LCD panel as rotating each of plural lamps, in order to narrowly irradiate much light on a wide area of the LCD panel in impulse type, thereby preventing a motion blurring and improving contrast. CONSTITUTION: An LCD panel(110) forms a TFT on a crossed point of data lines and gate lines. A data driver(112) supplies data to the data lines of the LCD panel(110). A gate driver(114) supplies gate pulses to the gate lines of the LCD panel(110). A perpendicular fall-type backlight unit(120) sequentially drives plural lamps(130a-130n) as rotating the lamps(130a-130n), and irradiates light emitted from the lamps(130a-130n) on the LCD panel(110). A timing controller(116) controls the backlight unit(120), and controls the data driver(112) and the gate driver(114).
Patent KR-20040061621-A (KR)
Inventor: KIM YEONG PIL
IPC: H01L27/108
Filed: 2002-12-31
Abstract: PURPOSE: A method for fabricating a MIM(metal insulator metal) capacitor is provided to transform a Si-H bond into a Si-N bond in a conventional PECVD(plasma enhanced chemical vapor deposition) process and to control a dangling bond by using an N-rich silicon nitride layer as a dielectric layer. CONSTITUTION: A semiconductor substrate(100) having a lower electrode(104) is prepared. A silicon nitride layer for a dielectric layer is formed on the substrate, covering the lower electrode. An N2 ion implantation process(120) and an anneal process(122) are sequentially performed on the silicon nitride layer for the dielectric layer so as to enrich the silicon nitride layer with an N component. A metal layer for an upper electrode is formed on the silicon nitride layer for the dielectric layer. The metal layer for the upper electrode and the silicon nitride for the dielectric layer are selectively etched to form the dielectric layer and the upper electrode sequentially.
Patent KR-20040062039-A (KR)
Inventor: KIM SU HYEON
IPC: A47L11/00
Filed: 2002-12-31
Abstract: PURPOSE: A cleaning area setting method of a robot cleaner is provided to set a map for cleaning in parallel with a wall surface to clean every cleaning area. CONSTITUTION: A robot goes around along wall surfaces of a cleaning area to record the positions of the walls and robot at every period(SP1,SP2). A position vector is calculated between respective control periods using the positions of the robot at every period(SP3). Among the position vectors, the number of the vectors being within a certain range at the inclination is determined(SP4). The wall having the largest number of the position vectors is set into a reference wall surface to be the X-axis of the central axis(SP5). Other wall surfaces are rotated and parallel-transferred according to the reference wall surface to present grids on the cleaning area so as to form a map for cleaning(SP6).
Patent KR-20020035561-A (KR)
IPC: G06F11/26
Filed: 2000-06-12
Abstract: 리시버/디코더, 예를 들면, 텔레비젼 시스템을 위한 애플리케이션을 테스트하는 장치가 개시되며, 이 장치는 리시버/디코더의 기능을 시뮬레이션하는 수단을 포함한다. 애플리케이션을 편집 및 테스트하는 장치와, 관련 워크스테이션도 개시된다. 리시버/디코더의 기능이 시뮬레이션되는 애플리케이션을 테스트하는 방법도 개시된다.
Patent KR-20020029927-A (KR)
IPC: H03H9/54
Filed: 2001-06-07
Abstract: 벌크 음파 디바이스는 디바이스의 공진 주파수에서 하나의 공진기 소자(14 1 )에 인가되는 신호(26)가 공진기 소자(14)의 압전층 사이를 음향적으로 결합시킴으로서 다른 공진기 소자(14 2 , 14 3 , 14 4 )에 결합되도록 횡방향으로 이격된 다수의 공진 소자(14)를 갖는다.  두 개의 외부 공진기 소자(14 1 , 14 5 )와 적어도 하나의 내부 공진기 소자(14 2 , 14 3 , 14 4 )가 존재한다.  내부 공진기 소자의 단자는 전기적으로 함께 접속된다.  이러한 접속은 입력과 출력 상부 전극 사이의 기생 캐패시턴스를 줄임으로써 내부 공진기 소자의 기생 캐패시턴스의 효과를 제거하는 AC 단락을 제공하고, 디바이스의 입력과 출력 사이에 전자기 차폐를 제공한다.
Patent KR-20020053840-A (KR)
IPC: H01L21/306
Filed: 2001-10-22
Abstract: 웨이퍼 외주부의 휘어짐을 억제하고, 특히 근래 요구되고 있는 나노토폴로지(nano-topology)의 값을 좋게 한 웨이퍼의 제조방법 및 연마장치 및 웨이퍼를 제공한다. 웨이퍼 표면을 경면화하는 연마공정에 있어서, 웨이퍼의 기준면을 제공하기 위해 웨이퍼의 이면연마를 행하도록 했다.
Patent KR-20020060227-A (KR)
IPC: A61P3/04
Filed: 2000-11-09
Abstract: PPARδ아고니스트 유사 물질, 예컨대 하기 화학식 I 의 화합물을 함유하는, PPARγ아고니스트 유사 물질로부터 유래한 체중 증가 억제제는 당뇨병 등의 치료에 유용하다: 
     [화학식 I] 
     
       
     
     [식 중, R 1 은 임의 치환된 히드로카르빌 등을 나타내며; X 는 결합 등을 나타내며; Y 는 산소 등을 나타내며; 고리 A 는 복소환 등을 나타내며; R 2 는 수소 등을 나타내며; R 3 은 -OR 9 등을 나타내며; R 4 및 R 5 는 각각 수소 등을 나타낸다].
Patent KR-20020084424-A (KR)
IPC: A61P37/04
Filed: 2000-12-28
Abstract: This present invention relates to the field of biology. In particular, it relates to polyepitopic vaccines and methods of designing such vaccines to provide increased immunogenicity. In certain embodiments, the polyepitopic vaccines is encoded by a minigene that provides optimized immunogenicity of the construct.
Patent KR-20020066343-A (KR)
IPC: C03B37/027
Filed: 2000-12-22
Abstract: 본 발명은 광섬유가 인발될 때 그 광섬유의 온도를 측정하기 위한 장치(100)에 관한 것이다. 상기 광섬유는 상단 통로(113)를 통하여 진입하여 다른 통로(115)를 통하여 빠져나온다. 상기 광섬유의 온도를 측정하는데 열전대열(120)이 사용된다. 상기 열전대열(120)의 기준 접합부분은 또 다른 통로(132)를 통하여 일정온도의 유체를 순환시킴으로써 균일하게 유지된다.
Patent KR-20020097148-A (KR)
Title: 언트레이닝을 가지는 로드에 대한 저장 포워딩 예측기
IPC: G06F9/38
Filed: 2000-08-08
Abstract: 프로세서(10)는 로드들을 디스패치 하기위하여 대한 저장 상의 종속성을 표시할 수 있는 로드에 대한 저장 포워드(store to load forward:STLF) 예측기(60)를 이용한다. 상기 종속성은 이전 실행 중에 상기 로드의 실행과 간섭되는 저장에 관해 표시된다. 종속성이 상기 저장 상에 표시되기 때문에, 상기 로드는 상기 저장 이전에 스케줄링 그리고/또는 실행되지 않는다. 상기 STLF 예측기(60)는 로드와 저장을 실행하고 간섭을 검출함에 응답하여 특정 로드와 저장에 대한 정보로 트레이닝된다. 부가적으로, 만일 상기 STLF 예측기(60)에의해 로드가 특정 저장에 종속한다는 것이 표시되고 종속성이 실질적으로 발생하지 않으면, 상기 STLF 예측기(60)는 언트레인될 수 있다(예를 들어, 특정 로드 및 저장에 대한 정보가 삭제될 수 있음).
Patent KR-20020081421-A (KR)
Title: 능동 매트릭스 일렉트로크로믹 디스플레이 디바이스
IPC: G02F1/19
Filed: 2001-12-13
Abstract: 일렉트로크로믹 능동 매트릭스 디스플레이 디바이스는 반사 상태와 투과 또는 흡수 상태 사이에서 가역적으로 스위칭가능한 일렉트로크로믹 광 스위칭 소자를 포함한다. 각 소자는, 스위칭이 수소의 농도를 변화시킴으로써 달성되는 물질의 스위칭가능 층(3)을 포함한다. 각 소자는, 사이에 소자가 연결되는 2개의 상보 스위칭 소자{TFT(31, 32. 31', 32')}의 2개의 직렬 연결부와, 스위칭 소자를 제어하기 위한 선택 및 저장 수단{TFT(34)+커패시터(33)}을 갖는 구동기 회로(21)를 추가로 또한 포함한다.
Patent KR-20030005281-A (KR)
Title: A process for the preparation of highly crystalline sodium cefoperazone
IPC: C07D501/36
Filed: 2001-04-10
Abstract: Highly crystalline, highly filterable sodium Cefoperazone in the form of needle crystal aggregates, obtainable by a process comprising the controlled addition of acetone to a solution of water/acetone/alcohols/sodium Cefoperazone at 20~40° C.
Patent KR-20030023628-A (KR)
Title: Toothbrush
IPC: A46B5/00
Filed: 2001-05-10
Abstract: The toothbrush comprises a head (11) of two movable independent portions (2,3) having bristle tufts (5,6,7) implanted, of which at least two tufts cross to allow the bristles to intermingle, and two other tufts (5) located adjacent the long side of the head. The head portion includes alternating projections and recesses and a top surface allowing the tufts to tilt inwardly.
Patent KR-20030011338-A (KR)
IPC: H04N3/16
Filed: 2001-05-22
Abstract: 예를 들어, 16:9의 비를 갖는 스크린에 4:3의 비를 갖는 화상을 재생하기 위해, 화상의 종횡비를 변화시키는 경우에, 화상의 좌편 에지와 우편 에지에서 고의로 스트레칭이 일어나도록 하기 위하여 S 정정이 감소되거나 완전히 스위치오프되는 것이 바람직하다. 이것은, S 커패시터(CS1)와 병렬로 연결된, 인덕턴스(L1)와 커패시턴스(C1)를 가지는 직렬 공진 회로에 의해 달성된다. 이 네트워크는, 화상의 좌편 에지와 우편 에지에서 바람직한 라인 스트레칭이 일어나며 S 정정이 상당히 감소하도록 하는 방식으로 S 커패시터(CS1) 양단의 전압(UC)을 변화시킨다.
Patent KR-20040064958-A (KR)
Inventor: KIM SEONG EUN
IPC: H02J7/00
Filed: 2003-01-13
Abstract: PURPOSE: A mis-operation prevention circuit is provided to maintain output of battery pack constant by automatically returning to an active mode in a slip mode. CONSTITUTION: A mis-operation prevention circuit comprises a first diode(D1) having an anode connected to the PS terminal of a battery management IC(11) and a cathode connected to the PLS terminal of the battery management IC, wherein the first diode operates when the battery management IC enters a slim mode and automatically returns the battery management IC to an active mode; a return condenser(C5) connected between the VSS terminal of the battery management IC and the PS terminal of the battery management IC, wherein the return condenser supplies voltages with delay to the PS terminal of the battery management IC and returns the battery management IC to an active mode, in such a manner that the PS terminal of the battery management IC maintains a high potential and instantaneously returns to a high potential from a low potential so as to prevent on/off repetition of the output of battery pack; and a second diode(D2) having a cathode connected to the VDD terminal of the battery management IC and an anode connected to the VSS terminal of the battery management IC, wherein the second diode operates and returns the battery to a static potential when the battery is turned into an inverse potential by an electro-static discharge.
Patent KR-20040007225-A (KR)
Inventor: HAN SEON HWA
IPC: H04W88/00
Filed: 2003-01-14
Abstract: PURPOSE: A computer system and a controlling method thereof are provided to easily connect and disconnect with the wireless network by withdrawing and inserting an antenna. CONSTITUTION: A wireless network connecting module(10) outputs a program operating signal for connecting to the network in a case that the antenna(12) is withdrawn. A CPU executes a program according to the program operating signal applied from the wireless network connecting module. The wireless network connecting module includes the antenna and a wireless transceiver(22) for transmitting/receiving a wireless signal, a data processor(24) processing the transmitting/receiving data, an antenna detector(26) detecting the withdrawal or the insertion of the antenna, a signal generator(28) generating a system signal, a controller(20), and a system interface(30) for inputting/outputting the data with the system.
Patent KR-20040069408-A (KR)
Inventor: KIM HONG IK
IPC: H01L27/146
Filed: 2003-01-29
Abstract: PURPOSE: A CMOS image sensor and a method for manufacturing the same are provided to improve photo sensitivity by using a biconvex microlens. CONSTITUTION: The first OCL(Over Coating Layer)(27) is formed on a substrate having a photodiode(23). A plurality of color filters(28) are formed on the first OCL. The second OCL(29) is formed on the color filters. A barrier line(30) with constant width is formed on the second OCL. The fourth OCL(31) with convex curvature is formed on the second OCL including the barrier line. A biconvex microlens(32) is formed on the fourth OCL.
Patent KR-20030069843-A (KR)
Title: 공유 글로벌 워드 라인 자기 랜덤 액세스 메모리의 구조
IPC: H01L21/8246
Filed: 2003-02-19
Abstract: 본 발명은 공유 글로벌 워드 라인 MRAM 구조를 제공하는 장치 및 방법을 포함한다.  MRAM 구조는 제 1 방향으로 향하는 제 1 비트 라인 도전체(342)를 포함한다.  제 1 센스 라인 도전체(360)는 제 2 방향으로 향한다.  제 1 메모리 셀(322)은 제 1 비트 라인 도전체(342)와 제 1 센스 라인 도전체(360) 사이에 물리적으로 접속된다.  글로벌 워드 라인(310)은 실질적으로 제 2 방향으로 향하고, 제 1 메모리 셀(322)과 자기적으로 결합되어 있다.  제 2 비트 라인 도전체(352)는 실질적으로 제 1 방향으로 향한다.  제 2 센스 라인 도전체(362)는 실질적으로 제 2 방향으로 향한다.  제 2 메모리 셀(332)은 제 2 비트 라인 도전체(352)와 제 2 센스 라인 도전체(362) 사이에 물리적으로 접속된다.  또한, 글로벌 워드 라인(310)은 제 2 메모리 셀(332)에 자기적으로 결합된다.  제 1 메모리 셀(322)과 제 2 메모리 셀(332)은 MRAM 장치가 될 수 있다.  MRAM 장치의 논리 상태(logic state)는 MRAM 장치의 자화 방향(orientation of magnetization)에 따라 결정될 수 있다.  제 1 메모리 셀(322)의 자화 방향은 제 1 비트 라인(342)과 글로벌 워드 라인(310)에 의해 도전된 전류에 의해 결정될 수 있다.  제 2 메모리 셀(332)의 자화 방향은 제 2 비트 라인(352)과 글로벌 워드 라인(310)에 의해 도전된 전류에 의해서 결정될 수 있다.  제 1 메모리 셀(322)의 논리 상태는 제 1 비트 라인(342)과 제 1 센스 라인(360)에 의해 감지될 수 있다.  제 2 메모리 셀(332)의 논리 상태는 제 2 비트 라인(352)과 제 2 센스 라인(362)에 의해 감지될 수 있다.
Patent KR-20030022246-A (KR)
Inventor: KIM SEONG HYEON
IPC: A23G9/32
Filed: 2003-02-24
Abstract: PURPOSE: A method for producing functional ice cream by adding Citrus junos Tanaka juice and Grand mania liquor to ice cream material is provided. Whereby, the prepared ice cream is removed from an unpleasant bitter or astringent taste and maintains the flavor and taste peculiar to Citrus junos Tanaka. CONSTITUTION: The method for producing functional ice cream is characterized by adding 0.5 to 10% by weight of Citrus junos Tanaka juice and 1 to 20% by weight of Grand mania liquor to general conventional ice cream material including milk, fresh cream, starch sugar, condensed milk and gelatin, based on 100% by weight of ice cream.
Patent KR-20040079292-A (KR)
Inventor: AHN SEUNG UK
IPC: B25J9/00
Filed: 2003-03-07
Abstract: PURPOSE: A function integration type transfer module robot is provided to reduce installation area and to prevent vibration and noise by removing a running shaft from the robot. CONSTITUTION: A function integration type transfer module robot is composed of a FOUP opener(20) connected to a wafer ejecting cassette, a controller(30) connected to the FOUP opener, a frame(40) to which the FOUP opener and the wafer ejecting cassette are mounted, an articulated robot(50) installed in the frame, a pre-aligner for centering a wafer ejected from the cassette, a transfer module controller(70) connected to the controller and the frame, and a wafer holding cassette mounted to the frame and holding the wafers.
Patent KR-20040082888-A (KR)
Inventor: LEE WOO HEE
Filed: 2003-03-20
Abstract: PURPOSE: A method and a system for an address window AD(ADvertisement) of a web browser using the Nth sub domain name are provided to effectively expose a web site of an advertiser to the web browser by using the Nth sub domain name including diverse text strings such as an advertising keyword. CONSTITUTION: A database server(140) stores/manages the Internet address information according to the Nth sub domain name. A user terminal(170) includes the web browser(180) enabling the address window AD by installing an address window AD plug-in(190) receiving the Internet address information from the database server and updating a connection address information storage referenced from the web browser. The Nth DNS(Domain Name Server)(210) stores the IP(Internet Protocol) address information for the Nth sub domain name. A basic DNS(230) responds an IP address to the web browser by referencing the Nth DNS if a user selects the Internet address according to the Nth sub domain name after the address window AD is output to the web browser. A web server(110) provides a web page if the web browser requests a web page according to the Nth domain name based on the IP address.
Patent KR-20040083577-A (KR)
Inventor: EOM SE HUN
IPC: H01L21/304
Filed: 2003-03-24
Abstract: PURPOSE: A remote plasma cleaning system for semiconductor device and a cleaning method thereof are provided to obtain uniformly a cleaning effect by using a radical cleaning method. CONSTITUTION: A reaction gas supply unit(110) supplies reaction gas into a chamber(100). An exhaust unit(120) exhaust the reaction gas from the chamber to the outside. The first electrode(140) is installed in the inside of the chamber. An RF power supply(130) is connected to the first electrode. The second electrode(150) is arranged in parallel to the first electrode and is connected to the ground. A shield(160) includes a plurality of through-holes for receiving radicals and is installed between the first and the second electrodes. The shield is formed with an inner shield(160a) and an outer shield(160b). A cleaning target is loaded into the inside of the inner shield including an internal space.
Patent KR-20030082472-A (KR)
IPC: H01L21/683
Filed: 2003-04-16
Abstract: 본 출원은, 흡착 전극이 완화층 및 덮개층에 의해 샌드위치된 ESC 스테이지의 구조를 개시한다.  완화층 및 덮개층은 유전체 판과 흡착 전극 사이의 열팽창 계수를 가진다.  본 출원은 또한, 흡착 전극이 흡착 전극의 내부 응력에 반대로 향하는 내부 응력을 갖는 완화층 및 덮개층에 의해 샌드위치되는 ESC 스테이지의 구조를 개시한다.  본 출원은, 가공 동안 기판을 고정하기 위한 정전 흡착 스테이지를 포함하며, 기판이 실온보다 높은 온도로 유지될 때 기판에 대해 가공을 수행하기 위한, 기판 처리 장치를 더욱 개시한다.