Patent SG-11201903903X-A (SG)
Title: Use of silyl bridged alkyl compounds for dense osg films
Inventor: VRTIS RAYMOND
IPC: C23C16/56
Filed: 2017-10-26
Abstract: International Publication Date (19) World Intellectual Property Organization International Bureau (10) International Publication Number WO 2018/085117 Al omit °nolo omm IIIIII O IIOHDIDum° oimIE 120 100 7' 3 80 o_ 60 0 40 20 (12) INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) 11 May 2018 (11.05.2018) WIPO I PCT (51) International Patent Classification: LEY, William, Robert; 1351 S. Claiborne Avenue, Gilbert, C23C 16/40 (2006.01) C23C 16/50 (2006.01) AZ 85296 (US). SINATORE, Dino; 3322 S. Ruch Street, C23C 16/34 (2006.01) C23C 16/56 (2006.01) Whitehall, PA 18052 (US). THEODOROU, Kathleen, Es- C23C 16/32 (2006.01) C23C 16/448 (2006.01) ther; 4108 Rexford Drive, Bethlehem, PA 18020 (US). C23C 16/30 (2006.01) H01L 21/02 (21) International Application Number: (2006.01) ADAMCZYK, Andrew, J.; 19550 N. Grayhawk Drive, Unit 1018, Scottsdale, AZ 85255 (US). PCT/US2017/058577 (22) International Filing Date: 26 October 2017 (26.10.2017) (25) Filing Language: English (26) Publication Language: English (30) Priority Data: 62/416,302 02 November 2016 (02.11.2016) US 15/789,790 20 October 2017 (20.10.2017) US (71) Applicant: VERSUM MATERIALS US, LLC [US/US]; 8555 S. River Parkway, Tempe, AZ 85284 (US). (72) Inventors: VRTIS, Raymond, Nicholas; 7820 E. Serene Street, #900, Carefree, AZ 85377 (US). RIDGEWAY, Robert, Gordon; 2255 W. Germann Road, #1055, Chan- dler, AZ 85286 (US). ACHTYL, Jennifer Lynn, Anne; 394 W. Weatherby Place, Chandler, AZ 85286 (US). ENT- (74) Agent: ROSSI, Joseph, D. et al.; Stradley Ronon Stevens & Young, LLP, 30 Valley Stream Parkway, Great Valley Corporate Center, Malvern, PA 19355 (US). (81) Designated States (unless otherwise indicated, for every kind of national protection available): AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (84) Designated States (unless otherwise indicated, for every kind of regional protection available): ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, — (54) Title: USE OF SILYL BRIDGED ALKYL COMPOUNDS FOR DENSE OSG FILMS -4-- -CH 2- -CH(CH3)- -C(CH3)2- -CH2CH2- -ar- -C H =CH - -X- -CEC- -CH(CH3)CH2- -0- -CH3 CH3- 0 0.2 0.4 0.6 0.8 Fraction of oxygen replacement FIG. 1. Predicted Bulk Modulus for various doped amorphous Si0 systems 2 (57) : Low dielectric materials and films comprising same have been identified for improved performance when used as N interlevel dielectrics in integrated circuits as well as methods for making same. O [Continued on next page] WO 2018/085117 Al MIDEDIMOMOIDEIREIDIONIMBROHMERVOIS UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG). Published: — with international search report (Art. 21(3))