Patent SG-11201902745R-A (SG)
Title: Optimizing training sets used for setting up inspection-related algorithms
Inventor: PLIHAL MARTIN
IPC: H01L21/66
Filed: 2017-10-17
Abstract: INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property :::` , 111111101111 0 1110101011111 011101 0 011111H11 1111110011111111111111011110111111 Organization International Bureau (10) International Publication Number i (43) International Publication Date .....•\"\"- WO 2018/075547 Al 26 April 2018 (26.04.2018) WIP0 I PCT (51) International Patent Classification: (71) Applicant: KLA-TENCOR CORPORATION [US/US]; HO1L 21/66 (2006.01) Legal Department, One Technology Drive, Milpitas, Cali- fornia 95035 (US). (21) International Application Number: PCT/US2017/057029 (72) Inventors: PLIHAL, Martin; 2728 Alpina Ct., Pleasanton, (22) International Filing Date: California 94588 (US). SOLTANMOHAMMADI, Erfan; 17 October 2017 (17.10.2017) 215 Union Avenue, Apt. 455, Campbell, California 95008 (US). PARAMASIVAM, Saravanan; Plot No 13, Shah (25) Filing Language: English Avenue, Rajakilpakkam, Chennai 600073 (IN). RAVU, (26) Publication Language: English Sairam; KG2, Trinity Garden, Mettukuppam, Chennai 600096 (IN). JAIN, Ankit; 41 Skylark Drive, Ballston Spa, (30) Priority Data: New York 12020 (US). SHEKKIZHAR, Sarath; 2045 201641035490 17 October 2016 (17.10.2016) IN Latham Street, Apt. 3, Mountain View, California 94040 62/477,248 27 March 2017 (27.03.2017) US (US). UPPALURI, Prasanti; 13425 Kodiac Place, Sarato- 15/782,820 12 October 2017 (12.10.2017) US ga, California 95070 (US). (54) Title: OPTIMIZING TRAINING SETS USED FOR SETTING UP INSPECTION-RELATED ALGORITHMS = = _ = Computer subsystem(s) 102 1 = 1 = 1 = — = Computer subsystem 36 __ = = _ _ = — = 28 _ 26 20 24 \" 411 n 0 • 6 18 21 ss 34 / -10 = 1 A og I T EL VA 3 2 = 14 JO — 22 = = Fig. 1 1-1 (57) : Methods and systems for training an inspection-related algorithm are provided. One system includes one or more IN computer subsystems configured for performing an initial training of an inspection-related algorithm with a labeled set of defects thereby I generating an initial version of the inspection-related algorithm and applying the initial version of the inspection-related algorithm to c e ; an unlabeled set of defects. The computer subsystem(s) are also configured for altering the labeled set of defects based on results of the IN applying. The computer subsystem(s) may then iteratively re-train the inspection-related algorithm and alter the labeled set of defects --.., © until one or more differences between results produced by a most recent version and a previous version of the algorithm meet one GC or more criteria. When the one or more differences meet the one or more criteria, the most recent version of the inspection-related 1-1 C algorithm is outputted as the trained algorithm. ei C [Continued on next page] WO 2018/075547 Al MIDEDIMOMMIDIREEMOMMIIMIMMIIIIIIIIIIII11111111 (74) Agent: MCANDREWS, Kevin et al.; KLA-Tencor Corp., Legal Department, One Technology Drive, Milpitas, Cali- fornia 95035 (US). (81) Designated States (unless otherwise indicated, for every kind of national protection available): AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (84) Designated States (unless otherwise indicated, for every kind of regional protection available): ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG). Published: — with international search report (Art. 21(3))