baber/WOPTO huggingface dataset:
Patent KR-20010076658-A (KR)
Inventor: SON JEONG HWAN
IPC: H01L21/28
Filed: 2000-01-27
Abstract: PURPOSE: A semiconductor device is provided to improve a short channel effect, by preventing the reduction of an effective channel length at a channel edge of a transistor by varying the length of a gate electrode partially. CONSTITUTION: A semiconductor substrate(300) is divided into an active region(301) where a transistor will be fabricated and an isolation region(302) to isolate active regions electrically. A word line(303) is formed crossing vertically the active region, and a source(304) and a drain(305) are formed in the active region on both sides of the word line. A part formed on an upper part of the active region among the word line is a gate electrode(303a). A length(L1) of the gate electrode on an upper surface of the edge of the active region is longer than a length(L2) of the gate electrode on an upper surface of the center part of the active region.
Patent KR-20010076711-A (KR)
Title: Channel estimation apparatus cosidering I/Q mismatching error and digital signal receiver comprising it
Inventor: KIM YEONG SU
IPC: H04B1/10
Filed: 2000-01-27
Abstract: PURPOSE: A channel predicting apparatus considering an I/Q(in-phase/quadrature-phase) mismatch error and a digital signal receiver therewith are provided to improve the signal to noise ratio by predicting and correcting a channel distortion by the I/Q mismatch error. CONSTITUTION: A preprocessor samples and synchronizes a reference signal received through a predetermined channel, and transforms the synchronized sample signal by FFT(Fast Fourier Transform). A channel predicting unit(205) makes the odd reference signal Xn into 0 in the case that the symbol size of the reference is N and the frequency n of the reference signal is 0< n< N/2. On the other hand, the channel predicting unit(205) makes the even reference signal Xn into 0 in the case that the frequency n of the reference signal is N/2< n< N. Further, the channel predicting unit(205) calculates the output value of the preprocessor to predict a channel for a signal component and a channel for a distortion component due to an I/Q mismatch error.
Patent KR-20000057958-A (KR)
Inventor: CICOTTE EDMOND BURTON
IPC: B60T7/04
Filed: 2000-02-08
Abstract: PURPOSE: An adjustable vehicle pedal system is provided selectively to adjust a pedal to the most suitable position for a driver. CONSTITUTION: An adjustable vehicle pedal system comprises: for a pedal adjustment system (10) of an vehicle having an accelerator cable (22) and a master cylinder push rod(20) with a free end, a brake pedal arm(14) to be secured to a free end of the master cylinder push rod at a location between an uppermost end of a brake pedal arm and a lowermost end of the brake pedal arm; a brake pedal(12) to be secured to the brake pedal arm near a lowermost end of the brake pedal arm; devices for pivoting the brake pedal arm attached to the uppermost end of the brake pedal arm to pivot the brake pedal arm about the free end of the master cylinder push rod; an accelerator pedal arm(18) to engage the accelerator cable near an uppermost end of the accelerator pedal arm; an accelerator pedal(16) to be secured to the accelerator pedal arm near a lowermost end of the accelerator pedal arm; an accelerator adjustment link (32) to have an uppermost end coextending with the uppermost end of the brake pedal arm and a lowermost end pivotally attached to the accelerator pedal arm at a location between the uppermost end of the accelerator pedal arm and the lowermost end of the accelerator pedal arm.
Patent KR-20010084156-A (KR)
Title: Device for locking the door of wireless local loop system
Inventor: KIM SE GI
IPC: E05B3/04
Filed: 2000-02-24
Abstract: PURPOSE: A locking device for a door of a communication base terminal is provided to simplify locking/releasing process of the door through automatically operating the locking device in opening and closing of the door. CONSTITUTION: A left door(10) is slowly closed for inserting an insert rod(12) on an inner surface of the left door to a first sliding hole(30) of a locking device(1). By closing a right door(20), an inner surface of the right door pushes a transfer rod(50) to an upper direction while overcoming elastic force of a leaf spring(52). Herein, a locking pin(60) attached on a recessed groove(51) of the transfer rod is pushed to a left direction. Therefore, an insert protrusion(61) of the locking pin is inserted to a locking hole(11) of an insert rod(12) in the first sliding hole. Then, the left door is fixed by the insert protrusion of the locking pin. To open a door of a communication base terminal, the right door is opened. Then, the transfer rod is returned into an initial state. The insert protrusion of the locking pin is withdrawn from the locking hole of the insert rod by elastic force of a return spring(63). Then, a rounding head unit(62) of the locking pin is inserted to the recessed groove of the transfer rod. Therefore, the left door is opened.
Patent KR-20010084296-A (KR)
Title: Consumable garbage recovering with sterirization and deodorizing elements in sink stand and method thereof
Inventor: KIM HYEON U
IPC: B65F1/00
Filed: 2000-02-24
Abstract: PURPOSE: A disposable container for collecting the garbage of a sink having sterilizing and deodorizing functions and a production method thereof are provided to filter garbage at a dish-washing and to remove bacteria and bad smell from the garbage. CONSTITUTION: Thermosetting plastic(13) is printed on the opposite side of a vinyl coating layer(12). Detergent(14) is coated between the Thermosetting plastic. Many drain holes(15) are punched in the printed portions of the washing agent. Each end of a side paper sheet(11) is thermally fused. A bottom paper sheet(16) is fused under the side paper sheet. The upper part of the side paper sheet is widened by pressurizing. A completed garbage collecting container(10) is dried. By throwing away garbage with the container, environment is cleanly maintained. Moreover, a hygienic state is improved.
Patent KR-20010084642-A (KR)
Title: Feeforward Linearizer with Auto Gain Control Loop
Inventor: PARK YEONG SEOK
IPC: H03F1/32
Filed: 2000-02-28
Abstract: PURPOSE: A feedforward linearized having an auto gain control unit is provided to obtain a stabilized gain a linearity by compensating the instability of a gain due to a temperature and the degradation of a component through an auto gain control loop. CONSTITUTION: A signal amplification unit is composed of a main path(1), an error correction path(2), and a divider(3), and performs an amplification of an input signal and an elimination of the distortion of the amplified signal to transmit it. An auto gain control unit(30) comprises a first input unit(31) for receiving the input signal, a second input unit(32) for receiving the amplified signal, a control unit for generating a control signal in order to control an attenuation gain of the input signal by comparing a reference amplification of the signal amplification unit the difference of a receive sensitivity between the input signals provided to the first and second input units(31,32), and a variable attenuator(21). The auto gain control unit(30) further comprises a temperature sensor(20) for measuring the temperature of each component and providing the difference between the measured temperature and a reference temperature to the control unit.
Patent KR-20010086528-A (KR)
Title: Grinding paper and leather manufacturing process changing color by user's temperature
Inventor: LEE JONG HEON
IPC: C09K3/14
Filed: 2000-03-02
Abstract: PURPOSE: A method for preparing a polishing paper or leather whose color is changed according to the body temperature of a user and its polishing paper or leather are provided, to prevent the separation of a liquid pigment. CONSTITUTION: The method comprises the steps of mixing an urethane adhesive, a yellowing resistant epoxy resin and sand or diamond powder; attaching the mixture to paper to obtain the first-stage polishing paper; and coating the first-stage polishing paper with a mixture of 10-30 wt% of a liquid pigment, 50-60 wt% of an urethane-based adhesive and 10-40 wt% of toluene or water, or a mixture of 40-80 wt% of a liquid pigment and 20-60 wt% of toluene or water to obtain a polishing paper. Also the method comprises the steps of mixing 10-30 wt% of a liquid pigment, 50-60 wt% of an urethane-based adhesive and 10-40 wt% of toluene; and attaching the mixture to leather to obtain a polishing leather.
Patent KR-20010091484-A (KR)
Title: Business Card and Business Card Reader For Easy Database Input
Inventor: KIM CHUNG HWA
IPC: G06F15/02
Filed: 2000-03-15
Abstract: PURPOSE: A visiting card and a visiting card reader capable of easily inputting data to a database is provided to classify and insert detail contents being printed on a visiting card into a database by a visiting card reader automatically without an additional process for increasing a production cost as a using of a bar code or a magnetic tape. CONSTITUTION: An input unit(92) capable of inputting information necessary for an operation of a visiting card reader and a command necessary for constructing and using of a database is connected to an epu(electronic processing unit)(91) as a control unit. A bus line of a visiting card feeding unit(95) is connected to the epu(91). In the bus line, a luminescence element(94) and a visiting card feeding unit(95) being adjusted the operation thereof by the epu(91), a light-receiving element(96) transmitting information with respect to a light and darkness caused by characters of a visiting card to the epu(91) when the visiting card is read, a memory unit(97) storing a program necessary for reading the visiting card, information of the visiting card, and the read character, a displaying element(98) arraying the read characters, and an external communication unit(99) capable of outputting characters read according to areas to an external electronic device are connected.
Patent KR-20000062901-A (KR)
Title: 장수명 금속 할라이드 램프
IPC: H01J61/073
Filed: 2000-03-16
Abstract: 본 발명의 금속 할로겐 램프는 전극의 온도가 과도하게 상승되는 방지할 수 있기 때문에 긴 수명을 갖는다. 본 발명의 금속 할라이드 램프는 발광부(1)와 발광부(1)의 각 단부에 있는 밀봉부(2)로 구성되는 아크관(3)을 구비한다. 한 쌍의 전극(4)은 전극(4)의 방전측 단부가 서로 대향하도록 아크 관(3)의 단부로부터 발광부(1)의 방전실로 연장된다. 각 전극의 다른 단부는 밀봉부(2)에 밀봉된 도체(5)에 접속된다. 발광부(1)와 밀봉부(2) 사이의 경계로부터 도체(5)의 방전측 단부까지 밀봉부(2)에 밀봉된 전극(4)의 부분은 전극 밀봉부 L로 나타낸다. 금속부재(7)는 전극 밀봉부 L을 부분적으로 덮는다. 전극 밀봉부 L의 중량 B(mm)에 대한 금속부재(7)의 중량 A(mm)의 비는 부등식 0.2≤A/B로 정의된다.
Patent KR-20010094521-A (KR)
Title: A System and Method for Advertisement Using Wireless Communication Terminal
Inventor: JUN JONG UK
IPC: H04W4/12
Filed: 2000-03-31
Abstract: PURPOSE: An advertising system and method using a wireless communication terminal is provided to display an advertisement to a member's wireless communication terminal before he executes telephone conversation or when he accesses a radio Internet service. CONSTITUTION: An ad server(100) comprises a member database(101) managing members who watch advertisements and an ad database(102) managing advertisement agents and advertisement contents. A download server(110) disperses the load of the ad server(100) so that members can download advertisement contents from not the ad server(110) but the download server(110). A communication part(120), embodied as a WAP gateway, enables member information or advertisement contents to be transmitted and received through a wired Internet(150) or a wireless Internet(130). A wireless communication terminal(140) receives advertisement contents from the ad server(100) or the download server(110) and displays them in case that they meets a preset condition.
Patent KR-20010094541-A (KR)
Title: A reflection treatment apparatus of feet installed a magetic needles and infrared lamp
Inventor: JANG SEONG CHEOL
IPC: A61N5/00
Filed: 2000-03-31
Abstract: PURPOSE: A foot reflex point treatment machine including a magnet needle and an infrared rays lamp is provided to do pressing treatment and magnet treatment around the bottom of the foot simultaneously and to make a user control the quantity and the time of exercise by displaying numbers of walking, the time of exercise and the calorie consuming quantity. CONSTITUTION: The foot reflex point treatment machine including the magnet needle and the infrared rays lamp includes a body(10), pressing tools(11), body sensors(12a, 12b), magnet needles(13), a grip(14), a display portion(15), an operating portion(16), a control portion(17) and an infrared rays lamp(18). The pressing tools(11) are formed in the body with the regular space. The body sensors(12a, 12b) are formed on the pressing tools(11) and senses the contact with the sole of the foot and generates the electrical signal. The magnet needles(13) are formed on the upper part of the pressing tools(11). The grip(14) is installed for maintaining the balance of the body. The numbers of walking, the time of exercise and the calorie consuming quantity are displayed in the display portion(15). The control portion(17) is composed of the operating portion(16). The infrared rays lamp(18) is formed on a side of the control portion(17) and activates the circulation of the blood around the top side of the foot.
Patent KR-20010096083-A (KR)
Title: Data download system using a terminal apparatus having a approved device and an operating method
Inventor: LEE HA GYUN
IPC: G11B20/00
Filed: 2000-04-17
Abstract: PURPOSE: A system for downloading data through terminal including authorization unit and an operating method of the same are provided to download valid data and information from a server only within an extent of authority by offering an authorization unit which has identification information of a terminal and downloading admission information of valid data. CONSTITUTION: A server(40) transmits valid data through a communication interface unit. A master terminal(100) downloads only the wanting valid data by using valid data downloading admission information, and renews data in itself. A slave terminal reads the valid data by using the valid data downloading admission information, and renews data in itself. An authorization unit(110) reads each identification information from the master terminal(100) and the slave terminal, reads the valid data downloading admission information from a sub-memory, and renews the data of the master terminal(100) and the slave terminal.
Patent KR-20010097706-A (KR)
Inventor: LEE SANG GEUN
Filed: 2000-04-25
Abstract: 개시된 본 발명은 관리 메뉴 적시 생성 기능을 가지는 전자 상거래 사이트 시스템에 관한 것으로서, 사이트 운영자가 전자 상거래 사이트를 관리할 수 있는 사용자와 전자 상거래 사이트를 관리할 수 있는 사용자별 권한 및 관리대상별 관리 등급을 체계적으로 설정하여 해당 사용자가 관리자 사이트에 로그인할 경우 사용자를 인증하고, 해당 사용자에게 부여된 권한에 대한 관리 대상을 적시에 생성하여 제공함으로써, 전자 상거래 사이트에 소속된 관리자가 아닌 일반 사용자, 예컨데 상품공급업체나, 또는 배송업체에 소속된 사용자가 관리 사이트에 접속하여 관리 사이트에서 부여한 제한적인 권한을 행사하여 상품 관리 및 배송 관리 업무를 수행할 수 있도록 함으로써 전자상거래 사이트를 효율적으로 관리할 수 있도록 한다.
Patent KR-20000053866-A (KR)
Inventor: LEE JEA U
IPC: B22D23/00
Filed: 2000-04-29
Abstract: PURPOSE: A method and a device for producing a kitchen container are provided to prevent molten aluminium from letting in between a floor face of a lower metal mold and a magnetic plate and to mold a good kitchen container by equally distributing the molten aluminium between upper and lower metal molds. CONSTITUTION: A lower die(32) is heated by a heater at a certain temperature. Molten aluminium is supplied to an injection port(31) of an upper die(30) in a moment by using a die casting method. The molten aluminium let in the upper die is equally distributed to the lower die by pressure. A certain time after the molten aluminium is let in through the injection port, a magnetic plate(38) is integrally molded with the molten aluminium. The magnetic is secondly fixed on the floor face(34) of the lower die by the elastic rebound force of a spring(40) in a state of firstly being adhered on the floor face(34). Thus, the aluminium is not let in between the floor face and the magnetic plate.
Patent KR-20010029680-A (KR)
Title: A process for the preparation of chiral imidazolinone herbicides
Inventor: DRABB THOMAS WALTER
IPC: C07D401/04
Filed: 2000-05-01
Abstract: PURPOSE: Provided is a process to prepare essentially enantiomerically pure imidazolinone herbicidal agents directly from (R)2-amino-2,3-dimethylbutyramide in a simple manner and good yield and with substantially complete retention of optical purity. CONSTITUTION: The process for the preparation of a chiral compound of formula(1), wherein Y and z are each independently H, C1 -C4 alkyl optionally substituted with one C1 -C4 alkoxy group or Y and Z may be taken together to form a group -CH=CH-CH=CH-. The process comprises: reacting a compound of formula(2), wherein Y and Z are as described hereinabove and R1 and R2 are each independently C1 -C8 alkyl, phenyl or phenyl(C1 -C4)alkyl with at least one molar equivalent of (R)2-amino-2,3-dimethylbutyramide in the presence of a strong base and a non-polar, essentially water-free solvent to form a salt of the formula(1) compound; and treating the salt with aqueous acid to obtain the chiral free carboxylic acid of formula(1).
Patent KR-20010107181-A (KR)
Inventor: CHOI YONG SEOK
IPC: G06F17/00
Filed: 2000-05-25
Abstract: 개시된 내용은 인터넷상에서 직접 영상정보를 제공하되 별도의 타이머기능 및 복사방지기능을 갖도록 하여 사용자에게는 집안에서 편안하게 영상을 제공받아 시청할 수 있도록 하며, 운영자에게는 인터넷 인구를 모두 고객으로 확보할 수 있는 2중의 이점을 갖게 하는 인터넷 영상정보 제공방법에 관한 것이다. 
     이를 위해 본 발명은 인터넷상에 영상정보 제공을 위한 중계 사이트를 개설하고, 일반 영상정보를 압축함과 동시에 영상정보의 복제를 방지하기 위해 암호화하고 시청시간 및 횟수 제한을 위해 타이머를 설치한 후 중계 사이트에 공개하며, 사용자가 중계 사이트에 접속하여 원하는 영상정보를 다운로드받고, 다운로드받은 컴퓨터상에서 전용프로그램을 통해 이곳에서만 작동되는 해독키이를 사용하여 영상정보의 암호 및 압축을 해제한 후 타이머에 의해 제한된 시간내에 제한된 횟수로 시청하도록 한 것으로, 다양한 영상정보를 저작권을 보호하면서 다양한 사용자에게 제공할 수 있게 됨은 물론 모든 인터넷 인구를 고객으로 유치할 수 있어 고객확보에 유리하고 고객 신상정보가 자동으로 입력되게 하여 고객관리가 용이해지며, 사용자의 입장에서는 원하는 시간에 원하는 영상정보를 집안에서 편안하게 제공받을 수 있으므로 사용상 편리해지는 것이다.
Patent KR-20010111939-A (KR)
Inventor: HUH SAM SIK
Filed: 2000-06-14
Abstract: 본 발명은 ADSL DSLAM시스템 운영 중 랙에서 발생되는 열을 방출하기 위해 사용되는 팬(Fan)에서 발생되는 소음을 효율적으로 규제시킬 수 있도록 한 DSLAM 시스템의 소음 규제장치에 관한 것이다. 
     본 발명은 ADSL DSLAM 시스템에서, 시스템의 방열을 위해서 냉각 장치용 팬을 랙 내부에 장치하여 공기를 흡입하는 방식으로 시스템에서 열을 방출하게 되는데 이러한 팬(6)(7)으로부터 발생되는 소음을 규제하기 위하여 팬의 상하단에 각각 소음 규제부(4)(5)를 구비하여 구성되는 것으로, 신호검출기(4)(5)에서 현재 발생되고 있는 노이즈 신호를 검출하면, 필터(11)를 통하여 고주파를 차단하고 20000Hz이하의 신호만을 통과시켜 가청 주파수만을 얻게 되며, 이러한 필터(11)를 통해 출력되는 미약한 신호가 이득조절기(12)를 통하여 일정 레벨 이상으로 증폭된 후, 신호반전 증폭기(13)를 통하여 입력된 신호의 위상이 180도 바뀌어 증폭 및 입출력 임피던스 매칭이 이루어지며, 상기 신호반전증폭기(13)를 통하여 위상이 반전된 저주파 음성신호가 출력발생기(14)를 통하여 출력하도록 이루어진 것이다.
Patent KR-20010007542-A (KR)
Inventor: NUMATA KOICHI
IPC: G11B17/03
Filed: 2000-06-27
Abstract: PURPOSE: To realize the optimization or the like of a loading operation or an ejecting operation. CONSTITUTION: This device is provided with a disk loading part 13 for loading a disk 300 (400), a chucking plate 150 for chucking a disk with the disk loading part, having a disk engaging part 151a engaged with the disk at the time of starting disk loading, and a supporting slider 200 for supporting the chucking plate, moved in the radial direction of the disk to move the chucking plate between a chucking preparation position for chucking the disk and a loading preparation position for starting disk loading.
Patent KR-20010007606-A (KR)
Inventor: JANG FRANCEWA KWENGTRIC
IPC: H01H51/06
Filed: 2000-06-30
Abstract: PURPOSE: A contactor for starting a vehicle and a starting device including the same are provided to fix a bobbin and improve a waterproof characteristic of a contactor by using a fixing ring including a crossing oriented face and a ring-shaped face. CONSTITUTION: A bobbin(44) is installed on a bobbin body(38). A mobile core(50) is moved in an inside of the bobbin(44) by a guide tube(36). A fixing ring(46)located on the same axes and guide tube(50) include the case(12). The fixing ring(46) is formed with a waterproof elastomer member. The fixing ring(46) is tightly inserted between an inner face(22) of a rear bottom portion(24) of a case(12) and a rear face of the bobbin body(38). The first waterproof characteristic is provided by the fixing ring(46) and the case(12). A crossing oriented rear ring-shaped face(47) of the fixing ring(46) is faced to the inner face(22) of the rear bottom portion(24) of the case(12). A crossing oriented front ring-shaped face(49) of the fixing ring(46) is faced to a rear face(48) of the bobbin body(38). The fixing ring(46) is mounted tightly around the guide tube(36). The second waterproof characteristic is provided by the fixing ring(46) and the guide tube(36).
Patent KR-20000072033-A (KR)
Inventor: LEE SUNG HYU
IPC: C02F5/00
Filed: 2000-07-11
Abstract: PURPOSE: Cycle cooling water treatment chemical using silicate is provided to remove corrosion, scale, and organism hindrance at the same time. Also, slime is removed by above cycle cooling water treatment chemical. CONSTITUTION: The cycle cooling water treatment chemical using silicate contains: 30 wt.% of water heated at 65-70°C, 35 wt.% of Na2SiO3, 26 wt.% of Na2CO3, 0.7 wt.% of NaOH, 5.5 wt% of NaCl2(NCO)3, 1.5 wt% of Na5P3O10, 1 wt.% of Na2SO3, and 0.3 wt% of EDTA. The mixture is adhered in a mold to dry for 6 hours, so, the cycle cooling water treatment chemical is produced.
Patent KR-20010015275-A (KR)
Title: Color cathode-ray tube device
Inventor: TAKEGAWA TSUTOMU
IPC: H01J29/48
Filed: 2000-07-11
Abstract: PURPOSE: Disclosed is a color cathode-ray tube device displaying satisfactory quality images by reducing elliptical distortions of beam spots at the periphery of a screen. CONSTITUTION: A main lens of an electron gun(14) is formed of a focusing electrode(G3), a final accelerating electrode(G4), and at least one intermediate electrode (Gm) placed between these electrodes. At least one additional electrode (Gs) is placed, covering and electrically insulating at least one of the electrodes forming an electron lens. The additional electrode (Gs) is electrically connected to the intermediate electrode (Gm). To the focusing electrode(G3), a dynamic voltage raised with increase in the deflection amount of the electron beam of a deflection yoke is applied.
Patent KR-20020008266-A (KR)
Title: Angle sensor using photonic quantum ring laser
Inventor: KIM JUN YEON
IPC: G01C17/00
Filed: 2000-07-20
Abstract: PURPOSE: An azimuth angle sensor by using PQR(Photonic Quantum Ring) laser is provided to conveniently produce the azimuth angle sensor by simplifying structure and to extend measuring range of the azimuth angle. CONSTITUTION: An azimuth angle sensor by PQR laser comprises a PQR laser changing output spectrum wave according to the azimuth angle; an optical spectrum analyzer measuring wave of the output spectrum of the PQR laser; and an angle changing algorithm; a first DBR formed on a semiconductor base plate; a cavity layer installed on the first DBR; a second DBR formed on the cavity layer; and a unit element containing the second DBR. The cavity layer and the second DBR are mesa structure by having a smaller diameter than the semiconductor case plate and the first DBR. The mesa structure of the cavity structure and the second DBR is formed by a CAIBE(Chemically Assisted Ion Beam Etching) method. Thereby, the azimuth angle sensor by the PQR laser extends a measuring range of the azimuth angle.
Patent KR-20020009248-A (KR)
Title: Apparatus and method for a local cleaning wafer
Inventor: LIM DONG SU
IPC: H01L21/304
Filed: 2000-07-25
Abstract: PURPOSE: An apparatus and a method for cleaning locally a wafer are provided to remove the remaining particles from an outer portion of a wafer by using plasma generator for local cleaning. CONSTITUTION: A reaction chamber(100) for local cleaning is used for forming a reaction space to a vacuum state. A stage(200) is used for loading a wafer(W). A rotary motor(300) is used for rotating the stage(200). The rotary motor(300) is connected with the stage(200) by using a rotary shaft. In order to rotate the stage(200). A reaction gas exhaust portion(400) is connected with an outer portion of the reaction chamber(100) for local cleaning in order to exhaust the reaction gas. A plasma generator(500) for local cleaning is used for supplying a cleaning gas of a plasma state to an outer portion of the wafer(W). An exhaust gas supply tube(600) is used for transferring an exhaust gas from a center of the wafer(W) to the outer portion of the wafer(W).