Patent DE-102010056343-A1 (DE)
Title: Device for vacuum-thin film coating of rod- or tubular-shaped solid substrates, comprises magnetron as source for coating, where magnetron is aligned on destination and comprises target arranged in sequence starting from destination
Inventor: POTFAJOVA JAROSLAVA DR
IPC: C23C14/56
Filed: 2010-12-29
Abstract: The device comprises a magnetron as source for a coating, where the magnetron is aligned on a destination and comprises a target (3) arranged in a sequence starting from the destination. The target has uniform thickness with a storage of solid coating material and adjoins to hold-, magnet as well as coolant. A straight transport line (2) in a transport direction is moved by the destination of a substrate (1) at the coating predetermined on an axis of symmetry. A magnetron casing (4) surrounds the target of the transport line. The device comprises a magnetron as source for a coating, where the magnetron is aligned on a destination and comprises a target (3) arranged in a sequence starting from the destination. The target has uniform thickness with a storage of solid coating material and adjoins to hold-, magnet as well as coolant. A straight transport line (2) in a transport direction is moved by the destination of a substrate (1) at the coating predetermined on an axis of symmetry. A magnetron casing (4) surrounds the target of the transport line shaped geometry of a coating space (5) to which the destination in the coating space is turned/aligned to a respective target surface whose magnetron is placed proportionately overleaf the transport line in the magnetron envelope. The coating space is formed in cylindrical manner and comprises two truncated cones whose large base surfaces stand itself opposite to the coating space. The base surface stands both truncated cones. A magnetron section is provided as functional spatial division of the magnetron casing and the coating space to which the magnetron placed into the magnetron casing is assigned to the magnetron section, and is used within the magnetron section of a coating material. The division in the magnetron sections geometrically, spatially based on parting planes is given. The magnetron casing and the coating space are divided with the parting planes orthogonal to the transport line in the two magnetron sections. The magnetron sections are assigned to a truncated cone-shaped part of the coating space. The magnetron sections are provided for sputtering a material mixture made of ceramic and metal on a substrate surface. The magnetron sections are spaced apart to each other in a position of the parting planes. A parting plate is designed within the coating space between the magnetron sections in the position of the parting planes. The target surface facing the coating space of an individual magnetron corresponds to a planar default of the coating space, to which the target surface is formed perpendicular to the transport line. A target in the magnetron is moved rotating around its stops-, magnet- und coolant with a rotational axis vertical to a target bearing. A field-forming magnet agent is annularly arranged transverse to the transport line around the targets. The field-forming magnet agent over the targets is arranged longitudinal to the transport line. An independent claim is included for a method for vacuum-thin film coating of rod- or tubular-shaped in principle outward rotationally symmetrical elongated solid substrates.