baber/WOPTO huggingface dataset:
Patent JP-2009136942-A (JP)
Title: Fall prevention device of robot arm coupling device
Inventor: TSUTSUMI MIKIO
IPC: B25J19/06
Filed: 2007-12-04
Abstract: <P>PROBLEM TO BE SOLVED: To improve a hydraulic circuit of a fall prevention device of a robot arm coupling device.  <P>SOLUTION: In a coupling structure where the weight or the like of a tool is applied in the separation direction in an operation state, a mechanically fixing mechanism for preventing a separation pressure from being applied to the hydraulic circuit is realized in a single valve structure as a mechanism for avoiding a falling risk due to malfunction. This fall prevention mechanism for the robot arm coupling device which avoids the falling risk and has the improved safety is attained in a simple mechanism. This fall prevention mechanism, as a mechanism for operating the safety valve, is provided by effectively using a two-position changeover valve by separately providing a mechanism for detecting a tool plate and operating a spool, and a mechanism for detecting a tool base and operating a valve body.  <P>COPYRIGHT: (C)2009,JPO&INPIT
Patent JP-2009137691-A (JP)
Title: Speed controller of permanent magnet type synchronous motor, and door controller and door controlling method of elevator
Inventor: SUZUKI TAKANORI
IPC: H02P6/06
Filed: 2007-12-05
Abstract: <P>PROBLEM TO BE SOLVED: To enable door control of its opening and closing even when the velocity pulses from a speed sensing rotary encoder of a door motor (permanent magnet type synchronous motor) are in failure.  <P>SOLUTION: Door speed is calculated using the magnetic pole position pulses ϕU, ϕV, ϕW to sense the magnetic pole position of a permanent magnet type synchronous motor 2 when the velocity pulses ϕA and ϕB from the rotary encoder 3 for sensing of the door motor speed are in failure, and thereby the speed of the permanent magnet type synchronous motor 2 as door motor is controlled, and controlling the door opening and closing is continued.  <P>COPYRIGHT: (C)2009,JPO&INPIT
Patent JP-2009140211-A (JP)
Title: Network system, processing apparatus, information processing method and program for the processing apparatus
Inventor: INABA YUICHI
IPC: G06Q20/00
Filed: 2007-12-06
Abstract: <P>PROBLEM TO BE SOLVED: To provide a new network system, or the like, that improves the profit of both a communication carrier and a provider of a content, without having to depend on a communication fee related to the content distribution.  <P>SOLUTION: A fictitious point accumulated inside a fictitious point distribution server device VP corresponding to a content distributed from the fictitious point distribution server device VP in the past is diverted to the content distribution from an official site server device CP. Specifically, when an exchange request is performed from a terminal device T, a part or all of the fictitious points inside the fictitious point server device VP are subtracted from the fictitious points, official site points inside the official site server device CP is increased, by an amount corresponding to the subtracted fictitious points and are supplied for a following content which is download from the official site server device CP.  <P>COPYRIGHT: (C)2009,JPO&INPIT
Patent JP-2008100100-A (JP)
Title: Slot machine
Inventor: TERAO TORU
IPC: A63F5/04
Filed: 2007-12-06
Abstract: <P>PROBLEM TO BE SOLVED: To provide a slot machine having many variations of play and enabling a player to play with a feeling of tension for a long time without increasing the amount of money spent.  <P>SOLUTION: A specific reel R4 out of four rotating reels R1-R4 is set as an allotment reel to determine the amount of allotment when a combination is made up in the main reels R1-R3.  <P>COPYRIGHT: (C)2008,JPO&INPIT
Patent JP-2009139701-A (JP)
Title: Zoom lens and imaging device using the same
Inventor: WATANABE MASAHITO
IPC: G02B13/18
Filed: 2007-12-07
Abstract: <P>PROBLEM TO BE SOLVED: To provide a high variable power zoom lens, which is advantageous for miniaturization in collapsing.  <P>SOLUTION: The zoom lens has, in order from the object side thereof, a positive first lens group G1, a negative second lens group G2, a positive third lens group G3, a fourth lens group G4, and an aperture stop S disposed closer to the image side than the second lens group and closer to the object side than the lens surface closest to the image side in the third lens group. During zooming from the wide angle end to the telephoto end, the distance between the first lens group G1 and the second lens group G2 is larger at the telephoto end than at the wide angle end, the distance between the second lens group G2 and the third lens group G3 is smaller at the telephoto end than at the wide angle end, the distance between the third lens group G3 and the fourth lens group G4 changes, and the first lens group G1, the third lens group G3 and the aperture stop S move in such a way that they are located closer to the object side at the telephoto end than at the wide angle end. The zoom lens satisfies prescribed conditional expressions.  <P>COPYRIGHT: (C)2009,JPO&INPIT
Patent JP-2009139797-A (JP)
Title: Light guide device
Inventor: HORI TAKASHI
IPC: G09F13/18
Filed: 2007-12-10
Abstract: <P>PROBLEM TO BE SOLVED: To provide a light guide device capable of suppressing propagation of light while reducing the number of parts.  <P>SOLUTION: The light guide device is equipped with a plurality of light guide parts 41 to 44 composed of light transmissive material and having a light entering surface 45, a light outgoing surface 46 and a light guide surface 47. The light guide parts 41 to 44 comprise the first and second light guide parts 41 and 42 adjacent to each other while leaving a first space part S1 in between and coupled through a first coupling part 48 bypassing the first space part S1, and the third and fourth light guide parts 43 and 44 adjacent to each other while leaving a second space part S2 in between and coupled through a second coupling part 49 bypassing the second space part S2. The third light guide part 43 is arranged in the first space part S1 and the second light guide part 42 is arranged in the second space part S2 so that the light outgoing surface 46 of the third light guide part 43 may be located between the respective light outgoing surfaces 46 of the first and second light guide parts 41 and 42, and the light outgoing surface 46 of the second light guide part 42 may be located between the respective light outgoing surfaces 46 of the third and fourth light guide parts 43 and 44.  <P>COPYRIGHT: (C)2009,JPO&INPIT
Patent JP-2009146948-A (JP)
Title: Fin for heat exchanger, and manufacturing method therefor
Inventor: SUZUKI FUMIO
IPC: H01L23/473
Filed: 2007-12-11
Abstract: <P>PROBLEM TO BE SOLVED: To provide a fin for heat exchanger which is low in distribution resistance to a heat exchanging medium and is so simple in structure that it can be press-formed from a comparatively thick metal plate.  <P>SOLUTION: A number of slits 3 are formed parallel to each other on a metal plate 13 except on end portions 2 thereof, and the slits 3 adjoining at the end portions 2 are twisted by 90 degrees, forming a number of band portions 4 that are set in a state of being erect and parallel to one another.  <P>COPYRIGHT: (C)2009,JPO&INPIT
Patent JP-2008218973-A (JP)
Title: Method of manufacturing light-emitting device, and the light-emitting device manufactured by the same
Inventor: NAKAMURA NOBUHIRO
IPC: H01L33/54
Filed: 2007-12-11
Abstract: <P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a light-emitting device in which bubbles generated in the interface between glass and substrate are suppressed.  <P>SOLUTION: The method of manufacturing a light-emitting device includes steps of: heating at a first temperature a substrate on which a light-emitting device is mounted; mounting a glass on the heated light-emitting device, where the glass containing in an oxide standard mol% representation TeO<SB>2</SB>40 to 53%, B<SB>2</SB>O<SB>3</SB>5 to 30%, ZnO 3 to 30%, and any one, or a combination of any two or more oxides, selected from among a group including Y<SB>2</SB>O<SB>3</SB>, La<SB>2</SB>O<SB>3</SB>, Gd<SB>2</SB>O<SB>3</SB>, and Bi<SB>2</SB>O<SB>3</SB>, 0.1 to 5%; and heating the light-emitting device on which a sealing material is mounted at a second temperature which is equal to or lower than the first temperature.  <P>COPYRIGHT: (C)2008,JPO&INPIT
Patent JP-2009143311-A (JP)
Title: Heat exchanger for vehicle
Inventor: TAKAHASHI HIROYUKI
IPC: B60H1/32
Filed: 2007-12-12
Abstract: <P>PROBLEM TO BE SOLVED: To satisfy both of inhibiting deterioration of heat exchanging performance of an internal heat exchanger by turning-around of hot air of an engine and the like and improving mountability of the internal heat exchanger.  <P>SOLUTION: In a heat exchanger for a vehicle applied to a refrigeration cycle device for a vehicle comprising a radiator 3 exchanging the heat between high pressure coolant and the air flowing in from the vehicle outside and cooling the high pressure coolant and an inner heat exchanger 6 exchanging the heat between the high pressure coolant and low pressure coolant, the radiator 3 comprises an air guide 30 forming an air passage for the air flowing in to the radiator from the vehicle outside, the air guide 30 is formed so as to extend from an outer peripheral part of the radiator 3 toward the vehicle front, and the internal heat exchanger 6 is arranged so as to constitute a part of the air guide 30.  <P>COPYRIGHT: (C)2009,JPO&INPIT
Patent JP-2009142193-A (JP)
Title: Method for synthesizing cell-free protein using adenosine 3',5'-biphosphate, and synthetic reaction solution for cell-free protein
Inventor: YOMO MASAMITSU
IPC: C12P21/02
Filed: 2007-12-13
Abstract: <P>PROBLEM TO BE SOLVED: To provide a method for synthesizing a cell-free protein by simply carrying out suppression of mRNA degradation, and to provide a reaction solution capable of conducting synthesis of the cell-free protein by simply carrying out the suppression of the mRNA degradation.  <P>SOLUTION: The synthetic reaction solution for the cell-free protein comprises at least a living cell-derived extract liquid, a potassium salt, a magnesium salt, adenosine triphosphate, guanosine triphosphate, creatine phosphate, creatine kinase, an amino acid, a tRNA, an mRNA, a buffer, and adenosine 3',5'-biphosphate. The method for synthesizing the cell-free protein comprises using the reaction solution.  <P>COPYRIGHT: (C)2009,JPO&INPIT
Patent JP-2008180070-A (JP)
Title: Material loading container for pump handling dense materials
Inventor: GOEGGELMANN GERNOT
IPC: E04G21/04
Filed: 2007-12-13
Abstract: <P>PROBLEM TO BE SOLVED: To improve a material loading container for a pump handling dense materials, of which the maintenance can be performed more easily and its worn part can be replaced easily.  <P>SOLUTION: A material loading container for a pump 18 handling dense materials is equipped with a material supply hole 64 directed upward; two carrying cylinder holes 24 located at a container end wall 22; and a pipe changeover device 34 opened to a discharge nozzle 30 at its outlet side and being made rotatable alternately toward the front of the two carrying cylinder holes 24 at its inlet side with a discharge nozzle 30 opened at its outlet side, wherein a flap cover 110 for covering a material supply hole 64 hinged with a plastic and/or lightweight structural member is installed to a container wall or more desirably to the container end wall 22.  <P>COPYRIGHT: (C)2008,JPO&INPIT
Patent JP-2009145663-A (JP)
Title: Encryption system, encryption method, program and information recording medium
Inventor: YAMAMURA AKIHIRO
IPC: G09C1/00
Filed: 2007-12-14
Abstract: <P>PROBLEM TO BE SOLVED: To provide an encryption system or the like by which different messages to a plurality of destinations can be made into one ciphertext and which can be applied to secret voting.  <P>SOLUTION: In the encryption system 101, a secret key calculation part 102 calculates secret keys p[1], ..., p[s]; a public key calculation part 103 calculates public keys g[1], ..., g[s]; a sampling part 104 selects a sample based on a product n=p[1]...p[s] of secret keys; an encoding part 105 encodes x[1], ..., x[s] into g[1]<SP>x[1]</SP>... g[s]<SP>x[s]</SP>; a coding part 106 multiplies a plaintext by a result given to the encoding part 105 and the sample selected by the sampling part 104 to form a ciphertext z; and a decoding part 107 applies a function based on a logarithmic function of Okamoto-Uchiyama to the ciphertext z so as to obtain a decryption.  <P>COPYRIGHT: (C)2009,JPO&INPIT
Patent JP-2009143471-A (JP)
Title: Seat for vehicle
Inventor: INAGAKI YORINAGA
IPC: B60N2/90
Filed: 2007-12-17
Abstract: <P>PROBLEM TO BE SOLVED: To provide a seat for a vehicle capable of preventing a pad from being caught by an end part of a frame and being cut off.  <P>SOLUTION: This seat has the frame 2 and the pad 3. The frame 2 has right and left side frames 2a. The pad 3 has a body part 3a mounted to stretch over the right and left side frames 2a and a swollen part 3c swollen toward a space between the side frames 2a from a rear face of the body part 3a. An end part evading part 3d to evade the end parts of the side frames 2a is formed between the swollen part 3c and the side frames 2a. In the swollen part 3c, a projecting part 3e projecting toward the side frames 2a is formed. When the pad 3 is deformed, the projecting part 3e is constituted to abut on the side frames 2a.  <P>COPYRIGHT: (C)2009,JPO&INPIT
Patent JP-2009150571-A (JP)
Title: Water heater
Inventor: WATANABE YUZURU
IPC: F23N5/24
Filed: 2007-12-19
Abstract: <P>PROBLEM TO BE SOLVED: To provide a water heater for safely stopping the reuse of the water heater.  <P>SOLUTION: A solenoid valve driving circuit 91 disposed on a control board 62 of the water heater includes a transistor 93 for controlling a conduction state of a battery 76 and a coil 47 of a solenoid valve 92. In a case when CPU 71 detects electromotive force of thermocouple, and it is determined that there is a possibility of occurrence of incomplete combustion, the coil 47 is conducted by controlling a base signal of the transistor 93, and a plunger 46 is driven to close a gas flow channel to have an interlock state for forbidding the reuse of the water heater. The unexpected interlock releasing operation is prevented as it is impossible to have an opening state by driving the plunger 46 by CPU 71, when once the water heater is kept in a close state.  <P>COPYRIGHT: (C)2009,JPO&INPIT
Patent JP-2009152346-A (JP)
Title: Thin film transistor, method of manufacturing the same, and electronic devices using thin film transistor
Inventor: UKEDA TAKAAKI
IPC: H01L21/28
Filed: 2007-12-20
Abstract: <P>PROBLEM TO BE SOLVED: To improve productivity of a thin film transistor.  <P>SOLUTION: The thin film transistor includes: a substrate 1; two or more source/drain electrodes 2 arranged at predetermined intervals on this substrate 1; a semiconductor layer 3 prepared on the substrate 1 so as to cover those multiple source/drain electrodes 2; an insulating layer 4 covering this semiconductor layer 3; and a gate electrode 6 prepared on a portion corresponding to a channel region of the semiconductor layer 3 on the insulating layer 4, wherein a silicide layer 9 of a crystallization inductive metal is located between the upper surface of the source/drain electrodes 2 and the source/drain region 8 on both sides of the channel region 5 of the semiconductor layer 3.  <P>COPYRIGHT: (C)2009,JPO&INPIT
Patent JP-2009153786-A (JP)
Title: Suture needle
Inventor: ASANO HIROYUKI
IPC: A61B17/06
Filed: 2007-12-27
Abstract: <P>PROBLEM TO BE SOLVED: To provide a suture needle smoothly moving to a tube and reducing damage of tissues when suturing an affected site by a suture thread.  <P>SOLUTION: This suture needle 10 is provided with: a needle section 20 which has a distal end 21 of a pointed shape and a needle hole 23 formed at the distal end for allowing the insertion of a suture thread; and an operating line 30 connected to the proximal end of the needle section 20 via a connection section 25 and moving the needle section 20 to a predetermined direction, wherein the needle section 20 consists of a shape-memory alloy, a portion to be inserted into an affected site is formed of a flat line or a triangular line having a triangular cross section and the plane side of the flat line or the triangular line at the distal end is formed into a shape bent outward.  <P>COPYRIGHT: (C)2009,JPO&INPIT
Patent JP-2009157871-A (JP)
Title: Production management method
Inventor: HOSOE SHOJI
IPC: G06Q50/04
Filed: 2007-12-28
Abstract: <P>PROBLEM TO BE SOLVED: To provide a lot despatch method, capable of complying with a delivery date while maximizing facility operation.  <P>SOLUTION: The method comprises a process (a) for forming an evaluation reference for evaluating a progress of lots (S1-S4); a process (b) for evaluating the progress of lots in each step based on data showing the lot in-process state and the evaluation reference (S5); a process (c) for determining a despatch rule of lots in each step based on the evaluation result (S7); and a process (d) for despatching the lots based on the determined despatch rule (S8). According to this, processing of lots is executed while maximizing the facility operation according to the progress of lots in each step, and further selecting an optimum lot despatch rule so as to comply with the delivery date.  <P>COPYRIGHT: (C)2009,JPO&INPIT
Patent JP-2009160731-A (JP)
Title: Inkjet head
Inventor: KATO MASAHITO
IPC: B41J2/045
Filed: 2007-12-28
Abstract: <P>PROBLEM TO BE SOLVED: To facilitate adjustment of an ink channel to suitably deform according to a temperature change.  <P>SOLUTION: An ink is refilled from a sub-manifold flow channel 105a to a nozzle 108 side via an aperture 112. A diaphragm 151 which defines an inner wall surface of the aperture 112 is formed. A branch flow channel 141a is opposed to the aperture 112 holding the diaphragm 151 between. A pump which changes a pressure of the air in the branch flow channel 141a is equipped. The pump is controlled so as to change the pressure in the branch flow channel 141a on the basis of an ink temperature in the ink flow channel. Accordingly, the diaphragm 151 can be deformed to make a flow channel resistance of the aperture 112 large when the ink temperature is high, and to make the flow channel resistance of the aperture 112 small when the ink temperature is low.  <P>COPYRIGHT: (C)2009,JPO&INPIT
Patent JP-2009164306-A (JP)
Title: Calibration method, device and method for driving movable body, device and method for exposure, device and method for forming pattern, and device manufacturing method
Inventor: SHIBAZAKI YUICHI
IPC: H01L21/027
Filed: 2007-12-28
Abstract: <P>PROBLEM TO BE SOLVED: To correct drive accuracy of a movable body moving in a prescribed plane.  <P>SOLUTION: A reference wafer WF having a known position relation and a mark M<SB>ijk</SB>is placed on a wafer stage WST. The wafer stage WST is driven based on the known position relation and the position measurement result of the wafer stage WST, which is obtained using a position measuring system, and a detection pattern m<SB>ijk</SB>is exposed over again on the mark M<SB>ijk</SB>on the reference wafer WF. After finishing exposure, displacement between the mark M<SB>ijk</SB>and the detection pattern m<SB>ijk</SB>(ΔX<SB>ijk</SB>, ΔY<SB>ijk</SB>) is detected, and calibration information to correct stage driving accuracy is prepared by the detected result. All errors of stage drive control including measurement errors in the position measuring system is incorporated in the displacement (ΔX<SB>ijk</SB>, ΔY<SB>ijk</SB>). Accordingly, highly accurate stage drive control becomes possible by improving stage drive accuracy using the calibration information.  <P>COPYRIGHT: (C)2009,JPO&INPIT
Patent JP-2007527579-A (JP)
Title: セキュリティで保護されたコンパクト・フラッシュ
IPC: G06F21/79
Filed: 2005-02-22
Abstract: 本発明の実施形態は、コントローラと、そのコントローラに結合された不揮発性メモリとを含む不揮発性メモリ・カードを含み、コントローラは、不揮発性メモリとホストの間の通信を生じさせ、不揮発性メモリは、そのカードへのアクセスをセキュリティで保護するためのアクティブ・メモリを含む。
Patent JP-2007529523-A (JP)
IPC: A61P27/02
Filed: 2005-03-09
Abstract: The present invention relates to compounds of formulae (I) and (II) useful as opioid receptor antagonists for the treatment of obesity, wherein p is 0, 1, or 2; y is 0, 1, or 2; and z is 0, 1, or 2; X1 is CH2, CH, or N; to form a indolinyl, indolyl, or benzimidazole ring respectively and including applicable double bonds and/or hydrogen atoms; X2 is CH or N; R1 to R7, R3′, p, y, and z are as defined in the claims.
Patent JP-2007532631-A (JP)
Title: 光学活性ｌ−エリトロ−２−アミノ−１−フェニル−１−プロパノールの製造方法
IPC: C07B61/00
Filed: 2005-03-09
Abstract: ｌ−１−フェニル−１−ヒドロキシ−２−プロパノンからｌ−エトリロ−２−アミノ−１−フェニル−１−プロパノールを製造する効率的で費用効率の高い方法。この方法は、ｌ−１−フェニル−１−ヒドロキシ−２−プロパノンをｌ−１−フェニル−１−ヒドロキシ−２−プロパノンオキシムに変換することと、このオキシムを微粉化したニッケル金属およびアルミニウム金属を含む触媒で還元することとを含み、良好なジアステレオマー純度および収率が得られる。 【選択図】  なし
Patent JP-2007534271-A (JP)
Title: Ｍｉｍｏ通信システムのための反復固有ベクトル計算
IPC: H04L25/03
Filed: 2005-03-15
Abstract: 固有ベクトルの行列（Ｉ）は、反復手続きを使用して求められる。手続きにおいて、固有モード行列 Ｖ   ｉ は、最初に、例えば、恒等行列に初期設定される。固有モード行列 Ｖ   ｉ は、次に、ＭＩＭＯチャネルのためのチャネル応答行列（ＩＩ）に基づいて更新され、更新された固有モード行列 Ｖ   ｉ＋１ を得る。固有モード行列は、一定または可変数の反復において更新され得る。更新された固有モード行列の列は、定期的に直交させられ、性能を向上し、反復手続きの安定性を保証し得る。１つの実施形態では、全反復の完了後に、最後の反復における更新された固有モード行列が、行列（ＩＩＩ）として与えられる。 【選択図】    図４
Patent JP-2007534549-A (JP)
IPC: B60G17/052
Filed: 2005-02-14
Abstract: In a self-contained ride level control system for a motor vehicle, the accumulator pressure is controlled as follows: determination of the current pressure Ps(current) of the compressed air accumulator (4); definition of at least one level whereto the vehicle can be lifted or lowered; determination os the air volume required for lifting or lowering the motor vehicle from the current level and bringing it to a given level; determination of the subsequent accumulator pressure Ps(later) for reducing the current accumulator pressure Ps(current) if the motor vehicle is lifted from its current level up to the given level or determination of the subsequent accumulator pressure Ps(later) for increasing the current accumulator pressure Ps(current) if the motor vehicle has been lowered from the current level to the given level; filling the compressed air accumulator (4) with compressed air if the subsequent pressure Ps(later) is below a lower threshold value Ps (U) and emptying the compressed air accumulator if the subsequent pressure Ps(later) is higher than an upper threshold value (0).
Patent JP-2007535279-A (JP)
IPC: H03H9/205
Filed: 2005-04-13
Abstract: Plural band film bulk acoustic resonators may be formed on the same integrated circuit using lithographic techniques. As a result, high volume production of reproducible components can be achieved, wherein the resonators, as manufactured, are designed to have different frequencies.
Patent JP-2007535999-A (JP)
Title: 胃の容量を制御するための方法およびシステム
IPC: A61F2/04
Filed: 2005-05-03
Abstract: 胃内バルーンが、足場構造体、該足場構造体内の１つ以上の内部の膨張可能区画、および該空間占有区画を覆って形成された１つ以上の膨張可能袋を備えている。この胃内バルーンは、胃鏡を使用して食道経由で配置することが可能であり、好ましくは液体および気体の膨張用媒体の組み合わせを使用して体内で膨張させられる。１つの実施形態において、これらの空間占有区画は、流体によって少なくとも部分的に膨張させられたときに、おおむね三日月形状を有する。
Patent JP-2007536597-A (JP)
Title: 電子写真印刷用の記録媒体
IPC: B41M5/52
Filed: 2005-04-21
Abstract: 電子写真印刷プロセスに用いられる記録媒体の抵抗率を制御するための電荷制御添加剤がここに開示される。電荷制御添加剤は、記録媒体の基板（１２）に塗布された１つ以上の層（１８、２０）に含有される。電荷制御添加剤は、電解質、溶媒、有機キャリヤー、及び共有機キャリヤーの混合物である。有機キャリヤーは、溶媒との少なくとも何らかの物理的及び／又は化学的結合を形成し且つ維持するよう選択され、そのため、有機キャリヤーは、高温融解処理中、溶媒のフラクションを維持する。共有機キャリヤーは、有機キャリヤーより小さい分子量を有し、そしてまた溶媒との少なくとも何らかの物理的及び／又は化学的結合を形成する。
Patent JP-2008501232-A (JP)
Title: マスク基板のクリーニング
IPC: G03F1/00
Filed: 2005-05-18
Abstract: この発明は、マスク基板（１１０）をクリーニングするためのマスククリーニング装置（１０１）及び方法に関する。本発明に係る実施の一形態は、トラップが冷却トラップ（１２０）を構成するマスククリーニング装置（１０１）である。更なるヒータ（１３０）が加熱機能を果たす。マスククリーニング装置（１０１）は、支持手段（１０５）と、エアロゾル（１５５）をマスク基板（１１０）へ吹き出すためのエアロゾルノズル（１５０）とを更に備えている。クリーニングプロセスの第１段階では、マスク基板（１１０）がヒータ（１３０）に接近し、マスク基板（１１０）が加熱される。クリーニングプロセスの第２段階では、ガス流（１７０）が停止され、マスク（１１０）が冷却トラップ（１２０）の近傍へ搬送される。冷却トラップ（１２０）は冷却される。クリーニングプロセスの第３段階では、エアロゾルノズル（１５０）がマスク基板（１１０）に向けてエアロゾル（１５５）を吹き出し、それにより、粒子がマスク基板（１１０）から分離されるようになる。この実施の形態は、分離された粒子を捕捉するためにサーモフォレティック力（ｔｈｅｒｍｏｐｈｏｒｅｔｉｃ：温度便乗性）を使用する。本発明に係る他の実施の形態は、分離された粒子を捕捉するために真空、静電力及び／又はゲッター金属を使用する。