baber/WOPTO huggingface dataset:
Patent WO-2020203254-A1 (WO)
Inventor: MARUMO KAZUHIRO
IPC: G03F7/038
Filed: 2020-03-17
Abstract: La présente invention aborde le premier problème consistant à fournir un procédé de production d'une composition de résine sensible aux rayons de lumière active ou sensible au rayonnement, grâce à laquelle un motif ayant un excellent LWR peut être formé même dans les cas où la composition de résine est préparée à l'aide d'une procédure comprenant la préparation à l'avance d'une solution de polymère contenant une résine dissociable par un acide et un solvant, le stockage de la solution de polymère pendant une période de temps prescrite, puis le mélange de la solution de polymère avec d'autres matières premières telles qu'un générateur de photo-acide. De plus, la présente invention aborde le second problème consistant à fournir : un procédé de formation d'un motif à l'aide d'une composition de résine sensible aux rayons de lumière active ou sensible au rayonnement obtenue à l'aide du procédé de production ; et un procédé de production d'un dispositif électronique. Le présent procédé de production d'une composition de résine sensible aux rayons de lumière active ou sensible au rayonnement comprend une étape A de préparation d'une solution de polymère qui contient un solvant et une résine dont la polarité augmente lors de la décomposition sous l'action d'un acide ; une étape B de production d'un corps de réception de solution qui comprend un récipient de réception et la solution de polymère logée dans le récipient de réception, et dans lequel la teneur en gaz inerte est de 85 % en volume ou plus de l'espace à l'intérieur du récipient de réception qui n'est pas rempli avec la solution de polymère, et de stockage de la solution de polymère dans le corps de réception de solution ; et une étape C de mélange de la solution de polymère stockée dans le corps de réception de solution avec un composé qui génère un acide lors de l'irradiation avec des rayons de lumière active ou un rayonnement. La résine dont la polarité augmente lors de la décomposition sous l'action d'un acide est une résine qui comprend une structure prescrite.
Patent WO-2020196212-A1 (WO)
Inventor: SEKIYA HIROSHI
IPC: G03B17/55
Filed: 2020-03-18
Abstract: [Problem] To provide a monitoring camera device that is capable of stable imaging in high-temperature conditions. [Solution] A monitoring camera device A used for monitoring a device in high-temperature conditions, comprising: a monitoring camera 1; a housing 3 having the monitoring camera 1 housed therein; and a cooling air tube 8 for guiding air inside the housing 3. The housing 3 has a cylindrical main body 31 and a rear lid 7 attached to the rear end of the main body 31. The cooling air tube 8 is attached to the rear lid 7.
Patent WO-2020196625-A1 (WO)
Inventor: DAIGAKU NORITSUGU
IPC: C09J5/00
Filed: 2020-03-25
Abstract: The purpose of the present invention is to provide a method for continuously and reliably manufacturing a polarizing film having excellent adhesiveness between a polarizer/transparent protective film and an adhesive layer. The method for manufacturing a polarizing film according to the present invention is characterized by comprising: a first coating step for forming a first wet coating film by applying a solvent-containing easy-adhesion composition onto the laminating surface of the polarizer while conveying the polarizer; a second coating step for forming a second coating film by applying an adhesive composition onto the laminating surface of the transparent protective film while conveying the transparent protective film; a first thickness measurement step for in-line measuring the thickness of the first wet coating film; a drying step for forming a first dry coating film by removing the solvent from the first wet coating film using a dryer after the first thickness measurement step; a second thickness measurement step for in-line measuring the thickness of the first dry coating film after the drying step; and a dryness adjusting step for adjusting the dryness of a newly formed first dry coating film by adjusting the temperature and/or the flow rate of the dryer such that the ratio of the thickness of the first wet coating film to the thickness of the first dry coating film as obtained by the in-line measurement satisfies expression (A) below. (A): (thickness of first dry coating film/thickness of first wet coating film)-(content of solvent in easy-adhesion composition)≤0.05
Patent WO-2020196656-A1 (WO)
Title: モータ
Inventor: KIDO NAOHIRO
IPC: H02K1/14
Filed: 2020-03-25
Abstract: モータ（１）のステータ（１０）およびロータの少なくとも一方は、圧粉磁心によって構成される鉄心（１１）を備える。第１端板部（６１）は、鉄心（１１）において、軸方向の一方の端面（１０Ｂ）に接触するように配置され、第２端板部（６２）は、鉄心（１１）において、軸方向の他方の端面に接触するように配置される。棒状部（６３）が鉄心（１１）の貫通孔に挿入され、鉄心（１１）が第１端板部（６１）及び第２端板部（６２）によってロータの軸方向に挟まれた状態で、棒状部（６３）と第１端板部（６１）及び第２端板部（６２）とが固定される。
Patent WO-2020204165-A1 (WO)
Title: Powder rate measuring method and device
Inventor: TSUBOI TOSHIKI
IPC: G01N33/00
Filed: 2020-04-03
Abstract: According to the present invention, the proportion (powder rate) of powder adhering to the surface of a lumpy substance is measured in real time with high accuracy.　The present invention comprises: a step S1 for measuring a distance between a distance measuring device and the lumpy substance; a step S2 for calculating a feature amount from distance data obtained in step S1; and a step S3 for converting the feature amount calculated in the step S2 into a powder rate, wherein the feature amount calculated in step S2 represents the distance variation calculated from the distance data obtained in step S1. When the powder rate of the lumpy substance increases, a minute distance fluctuation due to a minute unevenness in a three-dimensional shape in a height direction on the surface of the lumpy substance becomes large, and thus by using this as a feature amount, the powder rate of the lumpy substance can be measured in real time with high accuracy.
Patent WO-2020261720-A1 (WO)
Inventor: SAITO HIDEYUKI
IPC: C07C67/44
Filed: 2020-04-15
Abstract: L'invention concerne un procédé de production de méthacrylate de méthyle, le procédé comprenant une étape de distillation qui consiste : à fournir un mélange réactionnel liquide obtenu en faisant subir une estérification oxydative à de la méthacroléine, à du méthanol, et à de l'oxygène moléculaire dans un réacteur d'estérification oxydative, le mélange réactionnel liquide contenant du méthacrylate de méthyle en tant que produit de réaction, à une première colonne de distillation, qui est située en aval du réacteur d'estérification oxydative ; à retirer une fraction comprenant de la méthacroléine et du méthanol à partir d'une partie centrale de la première colonne de distillation ; et à retirer les résidus comprenant le méthacrylate de méthyle à partir du fond de la première colonne de distillation, les résidus ayant une concentration en méthanol de 1 à 30 % en masse.
Patent WO-2021220397-A1 (WO)
Inventor: KONDO YASUNAGA
IPC: F16K11/052
Filed: 2020-04-28
Abstract: Provided is a three-way valve in which a valve body can be integrally formed and which has excellent maintainability. This three-way valve is provided with: a first disk recessed section 14c provided with a recessed groove that extends in a direction symmetrical to a center line OA that passes through a rotation axis about which a disk 14 rotates, wherein an O-ring can be fitted into the recessed groove along an inner circumferential surface on an outlet port 12 side of a valve chamber 22; and a second disk recessed section 14d provided with a recessed groove into which an O-ring can be fitted along an inner circumferential surface on an outlet port 13 side of the valve chamber 22. The disk 14 rotates, and the O-ring 15 in the first disk recessed section 14c seals the inner circumferential surface on the outlet port 12 side of the valve chamber 22 and closes the outlet port 12, or the O-ring 16 in the second disk recessed section 14d seals the inner circumferential surface on the outlet port 13 side of the valve chamber 22 and closes the outlet port 13, whereby the two outlet ports 12 and 13 can be switched.
Patent WO-2020235426-A1 (WO)
Inventor: NAGATOMI KENJI
IPC: G01N21/65
Filed: 2020-05-13
Abstract: A Raman spectroscopic analysis device (100) comprises: a light source (10) for irradiating an analyte with excitation light; a spectrometer (20) for measuring a spectrum of light by dispersing the light; and a processor (30) connected to the spectrometer (20). The spectrometer (20) includes a measurement unit (22) for acquiring a spectrum of the excitation light emitted from the light source (10) and for measuring a spectrum of scattered light scattered from the analyte due to irradiation with the excitation light. The processor (30) includes an analysis unit (40) for calculating the degree of correlation between the spectrum of the excitation light and the spectrum of the scattered light, and for analyzing the spectrum of the scattered light on the basis of the calculated degree of correlation.
Patent WO-2020230854-A1 (WO)
Inventor: KURITA DAISUKE
IPC: H04W16/26
Filed: 2020-05-14
Abstract: A first wireless segment is set up between an IAB node (10B) and a parent IAB node (10A), while a second wireless segment is set up between the IAB node (10B) and a child IAB node (10C) and/or an UE (20). The IAB node (10B) is provided with: a reception unit (104) which receives, from the parent IAB node (10A), configuration information of wireless resources used for the first wireless segment or the second wireless segment; and a control unit (100) which, in the case of an MT (102), recognize that the configuration information represents at least one of downlink, uplink, and flexible, and, in the case of a DU (103), recognize that the flexible portion indicates availability of wireless resources.
Patent WO-2020235524-A1 (WO)
Inventor: FUKAUMI HIROKI
IPC: C08G77/14
Filed: 2020-05-18
Abstract: The present invention pertains to a resin composition containing: (A) 100 parts by weight of an organopolysiloxane comprising a glycidyloxy group; (B) 0.001 parts by weight to 1 part by weight, inclusive, of a neutral salt; (C) 0.5 parts by weight to 10 parts by weight, inclusive, of a β-dicarbonyl compound; and (D) 20 parts by weight to 300 parts by weight, inclusive, of a solvent. The present invention also pertains to a multi-component curable resin composition comprising a first component and a second component, wherein the first component is the abovementioned resin composition, and the second component includes (E) an organoaluminum compound and/or an organotitanium compound.
Patent WO-2020235560-A1 (WO)
Inventor: MATSUMOTO TAKAHIRO
IPC: D06P5/24
Filed: 2020-05-19
Abstract: （Ａ）Ｃ．Ｉ．ディスパースオレンジ　２５と、（Ｂ）Ｃ．Ｉ．ディスパースオレンジ　４９、６２、７１、７３、１４８等の特定の色素と、水とを含有し、（Ａ）Ｃ．Ｉ．ディスパースオレンジ　２５と（Ｂ）特定の色素との合計の含有量を１００質量部としたときの（Ｂ）特定の色素の含有量が２０質量部未満である着色分散液を提供する。また、その着色分散液が付着した記録メディア、及びその着色分散液を用いた疎水性繊維の捺染方法を提供する。
Patent WO-2021019873-A1 (WO)
Title: パージング剤およびそれを用いた成形機のパージング方法
Inventor: ITO YU
IPC: C08K3/00
Filed: 2020-05-19
Abstract: 本発明のパージング剤は、親水性樹脂（Ａ）、水（Ｂ）、および塩基性化合物（Ｃ）を含有する樹脂組成物であって、親水性樹脂（Ａ）と水（Ｂ）との質量比（Ａ）／（Ｂ）が６６／３４～９０／１０であり、親水性樹脂（Ａ）１００質量部に対して、塩基性化合物（Ｃ）の含有量が０．２５～７質量部である樹脂組成物を含有する。
Patent WO-2021131099-A1 (WO)
Title: 透明導電フィルムの製造方法
Inventor: YAMAKI SHIGERU
IPC: H01B13/00
Filed: 2020-05-29
Abstract: 【課題】良好な光学特性、電気特性に加えて面内の抵抗値異方性がほとんど無い金属ナノワイヤを含む透明導電フィルムを提供する。 【解決手段】金属ナノワイヤおよびバインダー樹脂を含む導電層を備える透明導電フィルムの製造方法において、前記金属ナノワイヤおよびバインダー樹脂を含む塗布液を調製する調製工程と、透明基材の一主面に前記塗布液を塗布する塗布工程と、を含み、前記塗布工程は、バー表面を構成する材質の摩擦係数が０．０５～０．４５であるバーを用いてバーコーターにて行い、前記塗布液を前記透明基材の一主面に塗布する際のバーに対する前記透明基材の相対移動速度（塗布速度）をＶ（ｍｍ／ｓｅｃ）としたとき２０００≧Ｖ≧３５０且つ、前記バーに形成された溝のピッチ（Ｐ）と深さ（Ｈ）の比率Ｐ／Ｈが９～３０且つ、バーの長手方向と溝の形成方向とのなす角が６０°～８８°の範囲で傾斜していることを特徴とする。
Patent WO-2020255866-A1 (WO)
Inventor: ASADA NAOKI
IPC: A61K8/67
Filed: 2020-06-11
Abstract: [Problem] The purpose of the present invention is to provide a topical composition capable of improving skin barrier function. [Solution] This topical composition contains: (A) ceramide; and (B) carnitine, a salt thereof, and/or a derivative thereof. The topical composition can effectively promote maturation of CE and is remarkably effective in improving skin barrier function.
Patent WO-2021255935-A1 (WO)
Inventor: ITOU NORIKAZU
IPC: G01M7/02
Filed: 2020-06-19
Abstract: A sway estimation system is provided which can accurately estimate the sway of a building while keeping the number of sensors down. This sway estimation system (1) is provided with multiple vibration sensors (21) and a building sway estimation unit (23). The vibration sensors (21) are provided on the building (2). The vibration sensors (21) detect vibration. The building sway estimation unit (23) estimates sway of the building (2) on the basis of the detection results of the vibration sensors (21). The vibration sensors (21) include first vibration sensors (21a) and second vibration sensors (21b). The first vibration sensors (21a) are provided on first antinode sections. The first antinode sections are antinode sections of the fundamental vibration mode of the building (2). The second vibration sensors (21b) are provided on second antinode sections. The second antinode sections are those antinode sections of higher vibration modes of the building 2 that are farthest from the first antinode sections. The higher vibration modes are the vibration modes that are higher than the fundamental vibration mode.
Patent WO-2020262612-A1 (WO)
Inventor: TSUKAGOSHI YUKI
IPC: A01N25/14
Filed: 2020-06-26
Abstract: La présente invention aborde le problème de la fourniture d'un agent pour lutter contre une maladie induite dans une plante par une bactérie sélectionnée parmi le genre  Rhizoctonia , le genre  Fusarium , le genre  Pythium , le genre  Microdochium , le genre  Tilletia , le genre  Ustilago , le genre  Streptomyces , le genre  Erwinia  et le genre  Aphanomyces , la plante étant choisie parmi les plantes crucifères, les haricots, le maïs, le blé, les pommes de terre et les betteraves sucrières.<i /> Dans la présente invention, cette maladie peut être contrôlée par traitement de graines, de semis ou d'un sol de ces plantes à l'aide d'un champignon appartenant au genre  Talaromyces .
Patent WO-2021014971-A1 (WO)
Title: Beverage serving apparatus
Inventor: NAKAO KEITO
IPC: G07F13/06
Filed: 2020-07-08
Abstract: Provided is a beverage serving apparatus that is capable of shortening the waiting time of a purchaser. This beverage serving apparatus is provided with: a beverage supply part; a storage part which has an area for retaining two or more containers containing a beverage supplied from the beverage supply part; a serving part which includes an extraction port; a transfer part which transfers, at least to the storage part, the containers containing the beverage supplied from the beverage supply part; a front face provided at least with the extraction port; and an exterior wall part that includes a lateral face of the front face. The storage part, the transfer part, and at least a portion of the beverage supply part are all arranged in an area enclosed by the front face, the lateral face, a face parallel to the front face, and a face parallel to the lateral face. The containers holding the beverage supplied from the beverage supply part are set to be receivable through the extraction port from the opposite side of the side where the beverage supply part, the transfer part, and the storage part are located with respect to the front face.
Patent WO-2022014000-A1 (WO)
Inventor: KATSURADA TAKEHARU
IPC: A61M25/00
Filed: 2020-07-16
Abstract: 湾曲時に方向性が出るのが防止することができ、操作性を向上させたカテーテルを提供することを目的とする。 カテーテル１は、中空シャフト５１と、中空シャフト５１の外周に配置されるアウターシャフト４１と、を備える。中空シャフト５１は、複数の螺旋状に延びるスリット５２ｂが形成されたスリット部５２を有する。スリット部５２において、各スリット５２ｂの基端は、軸方向の同じ位置および円周方向に等間隔に形成されている。
Patent WO-2021065197-A1 (WO)
Title: System and design of derivative-free model learning for robotic systems
Inventor: ROMERES DIEGO
IPC: G06N3/08
Filed: 2020-07-29
Abstract: A manipulator learning-control apparatus for controlling a manipulating system that includes an interface configured to receive manipulator state signals of the manipulating system and object state signals with respect to an object to be manipulated by the manipulating system in a workspace, wherein the object state signals are detected by at least one object detector, an output interface configured to transmit initial and updated policy programs to the manipulating system, a memory to store computer-executable programs including a data preprocess program, object state history data, manipulator state history data, a Derivative-Free Semi-parametric Gaussian Process (DF-SPGP) kernel learning program, a Derivative-Free Semi-parametric Gaussian Process (DF-SPGP) model learning program, an update-policy program and an initial policy program, and a processor, in connection with the memory, configured to transmit the initial policy program to the manipulating system for initiating a learning process that operates the manipulator system manipulating the object while a preset period of time.
Patent WO-2022044150-A1 (WO)
Title: 画像生成装置、画像生成方法およびプログラム
Inventor: TAKEMOTO HIROSHI
IPC: G01N29/06
Filed: 2020-08-26
Abstract: 画像生成装置は、欠陥(D)が写された検査画像である欠陥画像(PD)と、当該欠陥画像に前記欠陥の種類及び形状に対応するラベル(Lr)が付されたラベル画像(PL)とに基づいて学習された画像生成アルゴリズム(AR)を用いて、背景画像に所望のラベルを付して作成された画像生成用ラベル画像を入力し、前記画像生成用ラベル画像に付されたラベルに対応する疑似欠陥を前記背景画像に描画して疑似欠陥画像を生成する画像生成部、を備え、前記画像生成部は、前記ラベルの色に対応する種類の疑似欠陥を描画する。
Patent WO-2021171672-A1 (WO)
Inventor: UEKI NORIYUKI
IPC: H01Q9/16
Filed: 2020-09-28
Abstract: This RFIC module (101) comprises: an RFIC (2); an antenna connection first electrode (11); an antenna connection second electrode (12); an RFIC connection first electrode (31); an RFIC connection second electrode (32); an impedance matching circuit that matches the impedance of the RFIC and the impedance of an antenna; and a substrate (1). The impedance matching circuit has a first coil (LA) and a second coil (LB) having coil openings that extend along the surface of the substrate (1), and the first coil (LA) and the second coil (LB) are juxtaposed on the substrate (1) with the antenna connection first electrode (11) and the antenna connection second electrode (12) interposed therebetween.
Patent WO-2021131274-A1 (WO)
Inventor: IWATA KUNIHIRO
IPC: H01B5/02
Filed: 2020-10-20
Abstract: This conducting member has a bus bar constituted by a metal plate and a braided wire formed by braiding a metal wire. The braided wire is welded to the bus bar in a state in which the braided wire is disposed on the surface of the bus bar. A weld portion where the bus bar and the braided wire are to be welded to each other is disposed in an intermediate portion except both end portions in the extending width direction of the braided wire.
Patent WO-2021171692-A1 (WO)
Inventor: ITO YOSHINOBU
IPC: B62D25/20
Filed: 2020-10-22
Abstract: This underfloor structure for a vehicle is provided with a skeleton member (30), door (20), and a noise reducing member. The skeleton member (30) constitutes a lower edge part of a door opening (12) of a vehicle body, and extends in the vehicle front-rear direction. The door (20) covers the skeleton member (30) from outside when the door opening (12) is closed, and is formed such that a door parting portion extends vertically at the position of the skeleton member (30). The noise reducing member is provided at the lower side of the skeleton member (30). The noise reducing member is provided with: a diffraction start point (K) where a noise emitted to the outside in the vehicle width direction along the road surface changes the propagation direction thereof to obliquely upward; and a planar sound absorbing material (50) that covers the lower surface of the skeleton member (30) and that reduces energy of the noise, the propagation direction of which has been changed to obliquely upward at the diffraction start point (K). A space (S) is formed between the sound absorbing material (50) and the lower surface of the skeleton member (30).
Patent WO-2021149324-A1 (WO)
Title: Substrate processing apparatus
Inventor: KIMURA ATSUO
IPC: H01L21/306
Filed: 2020-11-05
Abstract: Provided is a substrate processing apparatus which makes it possible to improve substrate processing uniformity by using inert gas bubbles formed in a processing liquid. A plurality of liquid-supply pipes 31 and a plurality of air bubble pipe sections 37 are arranged in the floor section of a processing tank. The liquid supply pipes 31 have liquid discharge holes 31a, 31b formed therein which discharge the processing liquid downward and inward, and downward and outward. The air bubble pipe sections 37 have gas discharge holes 37a formed therein which discharge a nitrogen gas downward and inward. The air bubble pipe sections 37 are divided between a first discharge section 41 and a second discharge section 42 by a partitioning plate 40 located in the approximate center of the substrate 11 layout range. The air bubble pipe sections 37 in the first discharge section 41 and in the second discharge section 42 are supplied with a nitrogen gas, the flow of which is independently adjusted by flow adjustment units 52 which are respectively connected thereto in each of said discharge sections.
Patent WO-2021106643-A1 (WO)
Title: メスコネクタ、コネクタ対、コネクタ付きワイヤーハーネス、及び基板ユニット
Inventor: YOKOI SHOTA
IPC: H01R13/516
Filed: 2020-11-16
Abstract: 複数のメス端子と、ハウジングとを備えるメスコネクタであって、前記メス端子の数が４０以上であり、前記ハウジングは、前記複数のメス端子を保持する本体部と、フード部とを備え、前記フード部は、前記本体部の外周を囲み、オスコネクタとの接続側とは反対側が閉じた四角筒状であり、前記フード部において、ゲート痕が設けられた第一の側壁部と前記第一の側壁部に隣り合う第二の側壁部との角部は、厚肉部と薄肉部とを備え、前記薄肉部は、前記角部において、前記第一の側壁部と前記第二の側壁部との稜線方向に沿って、前記オスコネクタとの接続側の端面及び前記オスコネクタとの接続側とは反対側の端面のうち、一方の端面から他方の端面にいたらない中間位置までに設けられており、前記厚肉部は、前記角部において、前記薄肉部を囲むようにＵ字状に設けられており、前記角部の内周面は、凹凸を有さない一様な面である、メスコネクタ。
Patent WO-2021112005-A1 (WO)
Inventor: FUNABASHI JUNICHIROU
IPC: B60L58/12
Filed: 2020-11-27
Abstract: According to the present invention: a transition determining unit 103 determines whether to perform remote processing, on the basis of an acquired residual amount of energy; if it is determined that remote processing is not to be performed, a vehicle-mounted recognition unit 104 recognizes a target object inside a vehicle, and a vehicle-mounted determining unit 105 determines the situation inside the vehicle on the basis of the recognition result; and if it is determined that remote processing is to be performed, a vehicle-mounted communication unit 106 transmits sensor information to an in-vehicle monitoring support device which performs the same processing as the recognition performed by the vehicle-mounted recognition unit and the determination performed by the vehicle-mounted determining unit, and receives a determination result relating to the situation inside the vehicle, obtained by the in-vehicle monitoring support device, and a vehicle-mounted control unit 107 performs control with respect to the inside of the vehicle on the basis of the determination result.
Patent WO-2021112205-A1 (WO)
Title: 画像解析方法、画像解析装置、画像解析システム、制御プログラム、記録媒体
Inventor: NUMASAKI HODAKA
IPC: G06T7/00
Filed: 2020-12-04
Abstract: 組織に生じた変化を精度良く判定する。解析対象の画像から、二値化の基準値が異なる複数の二値化画像を生成する二値化部（４１）と、複数の二値化画像のそれぞれについて、第１画素値と第２画素値とに二値化された後における第１画素値の画素に囲まれた、第２画素値の画素からなる穴形状の領域の数を示す１次元ベッチ数を算出するベッチ数算出部（４２）と、１次元ベッチ数が最大となる二値化画像における二値化の基準値と該二値化画像における１次元ベッチ数とに基づいて、組織に生じた変化を判定する判定部（４４）と、を備える。
Patent WO-2021157178-A1 (WO)
Title: Motor control device
Inventor: MATSUBARA MITSURU
IPC: H02P21/05
Filed: 2020-12-04
Abstract: This motor control device receives a speed command from an upper layer system control device having a position controller, the motor control device having: a position command estimator that calculates an estimate of a position command on the basis of a speed command and a motor axis position response; and a speed command generator that generates an actual speed command on the basis of the estimate so that an end section of a machine connected to the motor does not oscillate, wherein the actual speed command is output from the speed command generator to a speed controller.
Patent WO-2022123648-A1 (WO)
Inventor: CHANG SHAO HUA
IPC: C25D7/12
Filed: 2020-12-08
Abstract: 隔膜の下面に滞留したプロセスガスに起因して基板のめっき品質が悪化することを抑制することができる技術を提供する。　めっき装置１０００は、アノード室１３にアノード１１が配置されためっき槽１０と、アノード室よりも上方に配置されてカソードとしての基板Ｗｆを保持する基板ホルダ３０と、を備えるめっき装置であって、アノードは上下方向に延在する円筒形状を有し、めっき装置は、アノードとの間に空間を有しつつ、アノードの上端、外周面、及び、内周面を覆うようにアノード室に設けられて、アノードから発生したプロセスガスを貯留するガス貯留部６０と、ガス貯留部に貯留されたプロセスガスをめっき槽の外部に排出させる排出機構７０と、をさらに備える。