baber/WOPTO huggingface dataset:
Patent JP-2003165763-A (JP)
Title: Fiber reinforced acid resistant concrete
Inventor: SUZUKI YASUYUKI
IPC: C04B111/23
Filed: 2001-11-28
Abstract: <P>PROBLEM TO BE SOLVED: To provide an acid resistant concrete having an increased bending strength.  <P>SOLUTION: (g) Fiber is mixed to the acid resistant concrete containing (a) 10-85 wt.% fused slag powder whose CaO/SiO<SB>2</SB>molar ratio is 0.10-1.20, (b) 5-50 wt.% alkali silicate as solid content, (c) 1-30 wt.% alkali metals salt, (d) 5-50 wt.% alumina cement, (e) 2-40 wt.% binder selected among a blast furnace slag, a converter slag, a dephosphorized slag, a desilicinized slag and a desulfulized slag and (f) fine aggregate, coarse aggregate and water.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2003163104-A (JP)
Title: Organic ptc composition
Inventor: INABA YOSHIJI
IPC: H05B3/14
Filed: 2001-11-28
Abstract: <P>PROBLEM TO BE SOLVED: To provide a PTC composition which has low resistance and excellent conductivity when carrying a normal current, and does not cause an increase in resistivity at room temperature due to local damage to a conductive circuit even after PTC characteristics manifest under a large current, high voltage condition, and moreover which can repeatedly protect a circuit from an overcurrent.  <P>SOLUTION: The organic PTC composition is formed by dispersing carbon nanotubes and a conductive metal and/or a conductive metallic compound in a crystalline organic polymer. It is preferable that the carbon nanotubes of 1-25 wt.% are included in the PTC composition.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2003164551-A (JP)
Title: Golf putter head
Inventor: TERAMOTO SEIICHIRO
IPC: A63B53/04
Filed: 2001-11-30
Abstract: <P>PROBLEM TO BE SOLVED: To provide a countermeasure for the top spin of a golf club putter.  <P>SOLUTION: This golf club putter is regulated in the centroid meeting the individuality of individual persons of golfers to the ordinate and abscissa of a sole and face and further in the shape of the sole in order to logically achieve the smooth flow of a swing of the putter of a golf club and the resistance to the shock of an impact, the decreased number of revolutions of the backspin and the stroke to impart overspin rotation desirable to the putter.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2003166538-A (JP)
Title: Hydrodynamic bearing unit
Inventor: UESUGI MASAKAZU
IPC: F16C17/04
Filed: 2001-11-30
Abstract: <P>PROBLEM TO BE SOLVED: To provide a hydrodynamic bearing unit which prevents in a simple structure solid contact between a rotary member and fixed member on starting and a stopping when using a liquid as a lubricating fluid.  <P>SOLUTION: The hydrodynamic bearing unit comprises: the rotary members 2 and 5 rotating together with a rotary shaft 1; the fixed member 4 opposing to the rotary members 2 and 5 through a designated bearing gap; and a driving means 6 rotating the rotary shaft 1. The rotary members 2 and 5 are supported against the fixed member 4 in a non-contact state by applying pressure to lubricating fluid L led to the bearing gap in proportion to rotation speed of the rotary members 2 and 5. A heating member 10 of the lubricating fluid L faced to the bearing gap is arranged on the fixed member 4 or rotary members 2 and 5. A starting timing control means 14 starting the driving means 6 is also arranged in designated timing synchronized with heat applying timing of the heating member 10.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2003171887-A (JP)
Title: Steel cord for reinforcing rubber product and method for producing the same
Inventor: ANDO ITARU
IPC: D07B1/06
Filed: 2001-12-04
Abstract: <P>PROBLEM TO BE SOLVED: To provide a steel cord for reinforcing rubber products having strong adhesiveness and capable of suppressing deterioration of vulcanized rubber and reduction of durability of a tire, and provide a method for producing the steel cord for reinforcing the rubber products.  <P>SOLUTION: The steel cord for reinforcing the rubber products is produced by intertwisting several filaments. As the filament, a brass-plated steel wire 13 adhered with cobalt on its surface is used. The brass-plated steel wire is adhered with the cobalt just after wire drawing in a cobalt-adding oil treatment process by using an oiling device 20, which process is arranged after a wire drawing process by using a final dies 14Z in the wet wire drawing by using multiple step type wet wire drawing equipment 10.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2003173989-A (JP)
Title: Method for manufacturing ic chip
Inventor: HATAKEI MUNEHIRO
IPC: H01L21/301
Filed: 2001-12-04
Abstract: <P>PROBLEM TO BE SOLVED: To provide a method for manufacturing an IC chip which prevents a damage, etc., of a wafer even in about 50 μm thick thin wafer, improves handling quality, processes well for the IC chip, and further is not affected by charges.  <P>SOLUTION: A method for manufacturing an IC chip comprises: the step of fixing a wafer to a support plate by an adhesive nonsupport tape which is formed with at least an adhesive layer (A) layer which lowers an adhesive power by giving stimulation due to heat to one surface, and with an adhesive (B) layer on the other surface, or a support tape composed of a both-side adhesive tape which is formed with the adhesive (A) layer which lowers an adhesive power by giving stimulation due to heat to one surface of a substrate, and with the adhesive (B) layer on the other surface of the substrate; the step of polishing the wafer by the support tape in a state of being fixed to the support plate; the step of adhering a dicing tape to the polished wafer; the step of giving stimulation due to heat to the adhesive (A) layer; the step of peeling off the support tape from the wafer; and the step of dicing. In the method for manufacturing an IC chip, the support plate is subjected to a charge preventing processing, and in the step of fixing the wafer to the support plate by the support tape, the adhesive (A) layer is adhered to the wafer. Further, the adhesive (B) layer is adhered to the support plate.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2003083329-A (JP)
Title: Precise positioning device and precise linearly moving mechanism
Inventor: ONISHI KAZUMASA
IPC: F16C32/00
Filed: 2001-12-07
Abstract: PROBLEM TO BE SOLVED: To provide a precise positioning device capable of positioning with high resolution (high accuracy). SOLUTION: A positioning device is composed of a rod linearly moving driving device having an article support table, a linearly moving rod fixed to the support table, and a mechanism connected to the linearly moving rod, and advancing or retreating the linearly moving rod. A linear movement control device connects the linearly moving rod and the rod linearly moving driving device via a shock absorbing mechanism, and includes an elastic material, an ultrasonic vibrator, and an ultrasonic wave radiating surface in a position along a side surface of the linearly moving rod, and is constituted so that the elastic material can press the ultrasonic wave radiating surface to a rod side surface when the ultrasonic vibrator is not put in a vibrating state.  While, this precision positioning device is characterized by arranging the linear movement control device constituted so that the ultrasonic wave radiating surface can be separated from the rod side surface by using ultrasonic vibration when the ultrasonic vibrator is put in the vibrating state.
Patent JP-2003176752-A (JP)
Title: Load controller
Inventor: FUTAMURA YOSHIYASU
IPC: F02M25/07
Filed: 2001-12-11
Abstract: <P>PROBLEM TO BE SOLVED: To properly control drive of loads while simplifying a structure.  <P>SOLUTION: In this controller, a microcomputer 10 has a CPU 11, an EEPROM 12 and timer modules 13, 14. The CPU 11 controls the drive of a stepping motor 20 through the timer module 13, and controls the drive of lamps 41, 42 through the timer module 14. The stepping motor 20 is composed of a four-phase motor and has motor coils 21, 22, 23, 24. Filter circuits 31-34 are provided between the microcomputer 10 and the stepping motor 20 correspondingly to the respective motor coils 21-24, and filter circuits 35, 36 are respectively provided between the microcomputer 10 and the lamps 41, 42. The microcomputer 10 outputs load control signals having different frequencies in the respective loads such as the motor coils 21-24 or the lamps 41, 42, and controls the drive of the loads through the filter circuits 31-36.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2003178624-A (JP)
Title: Resin-coated metal particle, joining material, electronic circuit board, and manufacturing method thereof
Inventor: MATSUZAKI SHIGEO
IPC: H05K3/34
Filed: 2001-12-12
Abstract: <P>PROBLEM TO BE SOLVED: To provide a joining material suitable for joining an electronic component to a wiring pattern formed on a board.  <P>SOLUTION: A joining pattern is formed by printing resin-coated metal particles 10 each comprising a metal particle 1 having a melting point of 250°C or below and an average diameter of 0.1-20 μm and a resin layer 2 covering it and having a melt viscosity of 500 Pa*s or less at 200°C on a circuit board 40 by using an electrophotography method. The electronic component 42 is disposed on the circuit board 40 by bringing it into contact with the metal particles 10. When they are heated to a temperature of 200-230°C, the metal material 1 and the resin 2 are melted, and the metal material 1 is fused together. When they are cooled, the metal material 1 is solidified, and the electronic component 42 is joined to the circuit board 40. The resin 2 is easy to separate from the metal particle 1 as a layer because its melt viscosity is low, so that the metal particles 1 are made easy to fuse together.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2003176342-A (JP)
Title: Flame-retardant seamless belt
Inventor: TANAKA MASAKAZU
IPC: C08G63/199
Filed: 2001-12-13
Abstract: <P>PROBLEM TO BE SOLVED: To provide a flame-retardant seamless belt having excellent productivity and flame-retardance while keeping various physical properties such as strength and durability.  <P>SOLUTION: The seamless belt is produced by using a polyester resin composed of an aromatic dicarboxylic acid as the dicarboxylic acid component and a 1-6C diol and a diol containing a fluorene derivative having a cardo- structure as the diol component and having an average molecular weight of 20,000-100,000. Preferably, the aromatic dicarboxylic acid is terephthalic acid and the 1-6C diol is ethylene glycol.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2003181258-A (JP)
Title: Whirling type fine bubble formation apparatus
Inventor: NASHIKI HISATSUNE
IPC: C02F1/20
Filed: 2001-12-13
Abstract: <P>PROBLEM TO BE SOLVED: To provide a high efficiency whirling type fine bubble formation apparatus in which a large quantity of fine bubbles are formed while preventing the occurrence of cavitation erosion.  <P>SOLUTION: The whirling type fine bubble formation apparatus 1 is provided with a gas liquid whirling chamber 3 of a space which is formed inside a cylindrical casing 2 and in which a gas and a liquid can whirl, a liquid introducing port 4 for introducing the liquid 10 into the gas liquid whirling chamber 3, a gas introducing port 5 for introducing the gas 11 into the gas liquid whirling chamber 3 arranged in the center of one end part wall surface of the casing 2 and a gas liquid discharge port 6 disposed in the center of the end part wall surface of the casing 2 facing the gas introducing port 5. The gas liquid whirling chamber 3 is provided with a preliminary whirling part 7 for rectifying the flow of the gas and liquid whirled by the liquid 10 introduced from the liquid introducing port 4 and a main whirling part 8 for bringing the liquid 11 flow- rectified by the preliminary whirling part 7 into contact with the gas 11 introduced from the gas introducing port 5.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2003148178-A (JP)
Title: Engine with adjustable cylinder capacity
Inventor: YOSHIMURA KIYONOBU
IPC: F02M61/14
Filed: 2001-11-09
Abstract: PROBLEM TO BE SOLVED: To improve the fuel efficiency and to reduce the emission of harmful gas by continuously adjusting the cylinder capacity of an engine to be reduced when the large output is not required or to be increased when the output is required of the engine. SOLUTION: An exhaust control valve is attached inside a cylinder of the engine to be operated by a computer sequentially so that it is closed when the output is required or temporarily opened and closed when the output is not required.
Patent JP-2003186574-A (JP)
Title: Notebook type personal computer
Inventor: KUBOTA NAOMOTO
IPC: G06F1/16
Filed: 2001-12-19
Abstract: <P>PROBLEM TO BE SOLVED: To provide a notebook type personal computer having high commercial value and innovative.  <P>SOLUTION: In this notebook type personal computer, a main body 1 provided with operation keys and a CPU and a display part 2 are coupled rotatably for opening and closing, and the main body 1 and the display part 2 are detachable.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2002269492-A (JP)
Title: Method and system for writing common music notation(cmn) by using digital pen
Inventor: MOHAMMAD BEIGI HOMAYOON SADR
IPC: G06K9/62
Filed: 2001-12-20
Abstract: PROBLEM TO BE SOLVED: To provide a structure and a method for writing a common music notation by using an input device such as a digital pen and a writing stylus. SOLUTION: This musical composition method realized by a computer includes a stage for starting the menu on the basis of the input from the input device, a stage for selectively inputting musical notes on the basis of items of the menu and the unconstraint handwriting by a composer, and a stage for displaying the musical notes.
Patent JP-2003191394-A (JP)
Title: Anti-newtonian ring film
Inventor: KURISHIMA SUSUMU
IPC: C08J7/04
Filed: 2001-12-25
Abstract: <P>PROBLEM TO BE SOLVED: To provide an anti-Newtonian ring film which is the anti-Newtonian ring film with high transparency and prevents a scratch caused by rubbing of a contact member by projected parts of a coating film surface of the anti- Newtonian ring film from being generated and in addition, prevents a scratch caused by pressing the contact member by the projected parts of the coating film surface of the anti-Newtonian ring film from being generated when brought into tight contact with the contact member.  <P>SOLUTION: The anti-Newtonian ring film is provided with a resin layer comprising a transparent binder resin and resin particles on at least one face of a transparent plastic film and the resin particles covered with the transparent binder resin and having a compression strength of 0.5-10 N/mm<SP>2</SP>as a resin particle are used.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2003192347-A (JP)
Title: Titanium oxide, and photocatalyst body and photocatalyst coating agent obtained by using the same
Inventor: DOUMEN KAZUNARI
IPC: B01D53/86
Filed: 2001-12-26
Abstract: <P>PROBLEM TO BE SOLVED: To provide a photocatalyst body exhibiting high catalytic activity in response to visible light irradiation, and provide titanium oxide as the above catalyst component and a photocatalyst coating agent obtained by using the titanium oxide.  <P>SOLUTION: This titanium oxide includes metal elements selected from those of groups IIa and IIb, and lanthanoid, and is characterized in that the index X calculated by the formula, X=B/A is 0.98 or less, when the titanium oxide is analyzed eight times by an X-ray photoelectron spectroscopy; the integrated spectra of first and second time analyses and those of seventh and eighth time analyses are obtained in the electronic state of titanium; the peaks in the bond energy of 458-460 eV are obtained in respective integrated spectra; the half value width of the peak in the first and second analyses integrated spectra is made to be A; and that of the peak in the seventh and eighth is made B.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2003194176-A (JP)
Title: Direct acting device
Inventor: NAKAGAWA HIROMICHI
IPC: F16H25/22
Filed: 2001-12-27
Abstract: <P>PROBLEM TO BE SOLVED: To provide a direct acting device capable of reducing noises and vibrations through the damping effect of a damping alloy even if rolling bodies collide against end caps or with one another while rolling in a circulation path.  <P>SOLUTION: The direct acting device comprises a threaded shaft 3 having on its outer peripheral surface a spiral ball thread groove 2; a ball nut 5 having on its inner peripheral surface a ball thread groove 4 corresponding to the ball thread groove 2 of the threaded shaft 3 and moving linearly along the axis of the threaded shaft 3; a number of rolling bodies 6 rolling between the ball thread groove 2 of the threaded shaft 3 and the ball thread groove 4 of the ball nut 5; and the end caps 7a and 7b provided on the ball nut 5 and having the circulation path 8 through which the rolling bodies 6 are circulated from one end of the ball thread groove 4 to the other. The end caps 7a and 7b are made from the damping alloy.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2003192176-A (JP)
Title: Conveyance device for recording medium
Inventor: YOSHIMURA AKIRA
IPC: B65H5/06
Filed: 2001-12-27
Abstract: <P>PROBLEM TO BE SOLVED: To easily and inexpensively suppress rotation unevenness of a conveyance roller to a small extent and reduce deviation of the center of gravity of the conveyance roller to prevent resonance of a constituent member caused by the deviation of the center of gravity.  <P>SOLUTION: A conveyance device 51 for conveying a film F in substantially orthogonal direction to a direction of optical scanning is constituted as follows. That is, a drive system is formed by a rotating and driving motor shaft 511a of a motor 511 that is a three phase stepping motor, a motor shaft pulley 512 attached to the motor shaft 511a, and a rotary damper 513 for preventing vibration due to the rotation of the motor 511. Moreover, a deceleration system is formed by a deceleration pulley 512 which is a deceleration mechanism for decelerating the rotation of the motor 511 and a lower inlet roller 514b and a lower outlet roller 514d which are the rollers for conveying the film F. Furthermore, a ratio of inertia of the drive system to that of the deceleration system is set to 1:10 or 1:30.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2003194252-A (JP)
Title: Fluid control device
Inventor: YAMAGUCHI MASAKI
IPC: F16K31/04
Filed: 2001-12-28
Abstract: <P>PROBLEM TO BE SOLVED: To provide a fluid control device equipped with an enhanced operating reliability by improving its long-term stability.  <P>SOLUTION: The fluid control valve is composed of a stepping motor (rotational mechanism) 21, a straight motion converting means 22 and a controlling means 30, and works with the shutoff sequence as shown in (b) including a shutoff stress relieving process in which a certain reverse rotation is made after the completion of shutting off followed by a pause and the return sequence as shown in (c) including a restitution stress relieving process in which a certain reverse rotation is made after the restituting motion followed by a pause, and thereby even in case the valve closed condition is continued for a long time, there is less risk such that a permanent strain is generated in the valve element 23 to lead to a drop of the closing function or that sticking is generated to result in the valve opening disable condition, and further even in case a thermal stress is given in the full closed/full open condition, no large stress will be applied on the valve element, straight motion converting mechanism, or rotational mechanism, to allow lessening of the disabling likelihood caused by a creeping deformation or a lock due to difference in the coefficient of thermal expansion.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2002358618-A (JP)
Title: Magnetic recording medium, manufacturing method therefor, and magnetic recording and reproducing device
Inventor: SHIMIZU KENJI
IPC: G11B5/667
Filed: 2001-12-28
Abstract: PROBLEM TO BE SOLVED: To provide a magnetic recording medium whose error rate is improved by preventing a spike noise and to provide a manufacturing method therefore, and a magnetic recording and reproducing device. SOLUTION: The magnetic recording medium provided with at least a non- magnetic substrate 1, a soft magnetic base film 2, an orientation controlling film 3 for controlling the orientation of the direct above film and a perpendicular magnetic film 4 whose easily magnetized axis is oriented principally perpendicularly to the non-magnetic substrate is characterized in that the soft magnetic base film 2 consists of a multi layer structure having a plurality of soft magnetic layers 21 (a) and 21 (b) which consist of a soft magnetic material and one or more separating layers 22 interposed between the soft magnetic layers and one or more layers of the soft magnetic layers 21 (a) and 21 (b) consists of a non-magnetic domain wall structure material. The manufacturing method therefor and the magnetic recording and reproducing device are also provided.
Patent JP-2003190236-A (JP)
Title: Walking aid for knee joint
Inventor: HISAGAI TACHIO
IPC: A61H3/00
Filed: 2001-12-27
Abstract: <P>PROBLEM TO BE SOLVED: To provide a walking aid for a knee joint, capable of immediately coping with a disease of a knee joint suddenly occurring while the walking aid is made by order according to an individual patient taking much time for manufacture.  <P>SOLUTION: This waking aid includes a walking aid body 1, an aid body lower part 2, a thigh inside contact plate 3 mounted on the walking aid body, a cruris inside contact plate mounted on the aid body lower part, a knee joint inside rotating part 5 journaled to the thigh inside contact plate and the cruris inside contact plate, a thigh part winding part 1a and a cruris part winding part 2a, which are extended to the walking aid body and the aid body lower part and fitted with hook-and-loop fasteners, a thigh outside contact plate 6, a cruris outside contact plate 7, a knee joint outside rotating part 8 to which the thigh outside contact plate and the cruris outside contact plate are journaled, and a fitting means for fitting the thigh outside contact plate to the thigh part winding part and the cruris outside contact plate to the cruris part winding part to move the fitting position.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2003501574-A (JP)
Title: スキッドステアローダ用のオペレータインターフェース
IPC: E02F9/26
Filed: 2000-05-24
Abstract: (57)【要約】
本発明は、パワー機械１０の液圧及び／又は電子機械式アクチュエータ又は電動アクチュエータ６４、６６、６７を制御するコンピュータ利用の制御装置５０に対するユーザインターフェースに関するものである。該ユーザインターフェースは、ユーザインターフェースにおける機能性又は有用性を増す１つ以上の特徴を提供する。
Patent JP-2003502296-A (JP)
Title: スルホニルアミド及びカルボキサミド並びに不斉触媒作用におけるそれらの使用
IPC: C07C33/22
Filed: 2000-06-15
Abstract: (57)【要約】
本発明の第１の主題は、特に光学活性形態において金属錯体のリガンドとして有用な一般式（I）の新規のジアミン誘導体又はその類似体にある。本発明はまた、前記錯体、それらの製造方法、不斉合成におけるそれらの使用、特にケトン誘導体のエナンチオ選択的水素化のための不斉合成におけるそれらの使用にもマンする。
【化１】
Patent JP-2003502939-A (JP)
Title: デジタル音声放送信号の伝送モード及び同期を突き止める方法及び装置
IPC: H04L27/26
Filed: 2000-06-22
Abstract: (57)【要約】
デジタル音声放送方式の制御情報を送信する方法。この方法は、複数の制御フレームの各々において複数の制御ビットを送信するステップを、第1の制御ビット系列は伝送モードを表し、第２の制御ビット系列は制御データ同期ワードを表す。複数の制御ビットはさらに、インターリーバ同期ワードを表すビットの第３の時系列を含むことができる。無線受信機において、デジタル音声放送信号について伝送モード及び同期をチェックする方法も提供される。この方法は、デジタル情報を含む複数のインターリーバフレームを受信するステップを含み、第1の制御ビット系列は伝送モードを、第２の制御ビット系列は制御データ動機ワードを含む。複数の制御ビットはさらに、インターリーバ同期ワードを表す第３の時系列も含むことができる。第1の制御ビット系列を処理して伝送モードがわかり、第２の制御ビット系列を処理すると制御データ同期がわかる。第３の制御ビット系列を処理すると、インターリーバの境界がわかる。上記方法を利用する無線周波数送信機及び受信機も開示されている。
Patent JP-2003503249-A (JP)
Title: 付箋紙
IPC: C09J7/02
Filed: 2000-05-25
Abstract: (57)【要約】
本発明は、記入可能な上面（１０Ａ、１１Ａ）、底面（１０Ｂ、１１Ｂ）および側縁部（１０Ｃ、１１Ｃ）をそれぞれ備え、互いに着脱自在に接着されている複数枚の紙片および台紙を含む付箋紙（１）であって、その底面が、厚さが１００μｍ未満であり、ステンレス鋼表面上にて２００ｇの静止摩擦荷重を用いてＤＩＮ５３．３７５−Ｂにより測定した場合の静摩擦係数が少なくとも１であり、かつステンレス鋼表面上にてＦＩＮＡＴ試験Ｍｅｔｈｏｄ  ｎｏ．２にしたがって測定した場合の９０°剥離接着力が０．１Ｎ／１．２７ｃｍ未満である滑り抵抗層を露出させて担持する付箋紙に関する。
Patent JP-2003504865-A (JP)
Title: ウエハ状物体の加熱及び冷却処理用熱処理チャンバ
IPC: H01L21/00
Filed: 2000-07-12
Abstract: (57)【要約】
ウエハ状物体を熱処理する処理チャンバおよびこの処理チャンバを使用する方法。チャンバは、二重壁シェル、ペデスタル型ヒータ、冷却ガスを供給して排気ガスを排出すると共に、個々にガス導入パターンを可変自在の内部通路及びチャンバを密閉する可動扉を備えている。チャンバは、ウエハ状物体をそのままの位置で冷却できるように設計されており、最適に冷却する手段を提供する。また、ウエハ状物体を処理する方法は、温度、温度の変化率、ガス組成及びこれらをチェンジするタイミングを、ウエハ状物体或はこのウエハ状物体に含まれる膜の特性が所望の特性になるように制御可能である。