Patent SG-11201806820U-A (SG)
Title: Correction of fabricated shapes in additive manufacturing
Inventor: YAMAMURA MAYU FELICIA
IPC: H01L21/321
Filed: 2017-03-09
Abstract: INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property Organization International Bureau (43) International Publication Date 14 September 2017 (14.09.2017) WIPO I PCT (10) International Publication Number WO 2017/156342 Al 1111111111111101110111111111110101111101110111111111011011111111011111111111110111111 W O 20 17 / 15 63 42 Al (51) International Patent Classification: H01L 21/306 (2006.01) HO1L 21/321 (2006.01) H01L 21/304 (2006.01) (21) International Application Number: PCT/US2017/021686 (22) International Filing Date: 9 March 2017 (09.03.2017) (25) Filing Language: English (26) Publication Language: English (30) Priority Data: 62/305,973 9 March 2016 (09.03.2016) US (71) Applicant: APPLIED MATERIALS, INC. [US/US]; 3050 Bowers Avenue, Santa Clara, California 95054 (US). (72) Inventors: YAMAMURA, Mayu Felicia; 593 Cedar Dr., San Carlos, California 94070 (US). FUNG, Jason Garch- eung; 2050 Royal Dr., Apt. 43, Santa Clara, California 95050-3666 (US). REDFIELD, Daniel; 1445 Kelly Park Circle, Morgan Hill, California 95037 (US). BAJAJ, Ra- jeev; 43651 Skye Road, Fremont, California 94539 (US). NG, Hou T.; 4068 Keith Dr., Campbell, California 95008 (US). (74) Agent: GOREN, David J.; Fish & Richardson P.C., P.O. Box 1022, Minneapolis, Minnesota 55440-1022 (US). (81) Designated States (unless otherwise indicated, for every kind of national protection available): AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. [Continued on next page] = (54) Title: CORRECTION OF FABRICATED SHAPES IN ADDITIVE MANUFACTURING (57) : A method of fabricating a polishing pad using an additive manu- 200 facturing system includes receiving data indicative of a desired shape of the pol - ishing pad to be fabricated by droplet ejection. The desired shape defines a pro - file including a polishing surface and one or more grooves on the polishing pad. Data indicative of a modified pattern of dispensing feed material is generated to at least partially compensate for distortions of the profile caused by the additive Receive data indicative of manufacturing system, and a plurality of layers of the feed material are dis- desired shape of a polishing pensed by droplet ejection in accordance to the modified pattern. pad to be fabricated. 202 Generate or receive data indicative of modified pattern of dispensing feed material to compensate for polishing pad distortions. 204 Dispense layers of feed material by droplet ejection in accordance to the -----\ modified pattern. 206 FIG. 4 WO 2017/156342 Al MIDEDIMOMOIDIONOIDEMOMOMOIMOIRVOIMIE (84) Designated States (unless otherwise indicated, for every kind of regional protection available): ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG). Declarations under Rule 4.17: as to applicant's entitlement to apply for and be granted a patent (Rule 4.17(11)) as to the applicant's entitlement to claim the priority of the earlier application (Rule 4.17(iii)) Published: with international search report (Art. 21(3))