Patent SG-11201804637U-A (SG)
Title: Composition for post chemical-mechanical-polishing cleaning
Inventor: DÄSCHLEIN CHRISTIAN
IPC: H01L21/321
Filed: 2016-12-20
Abstract: INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property -' Organization International Bureau (43) International Publication Date ..... ...sr ,„,„1 29 June 2017(29.06.2017) WIPO I PCT (10) WO International 111111111111311111111111111111111111111111111111111111111111111111111311111111111111111 2017/108743 Publication Number Al (51) International Patent Classification: (74) Agent: EISENFUHR SPEISER PATENTANWALTE C11D 3/37 (2006.01) H01L 21/02 (2006.01) RECHTSANWALTE PARTGMBB; Postfach 10 60 78, C11D 11/00 (2006.01) HOlL 21/321 (2006.01) 28060 Bremen (DE). (21) International Application Number: (81) Designated States (unless otherwise indicated, for every PCT/EP2016/081847 kind of national protection available): AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, (22) International Filing Date: BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, 20 December 2016 (20.12.2016) DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, (25) Filing Language: English HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, (26) Publication Language: English MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, (30) Priority Data: NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, 15201910.5 22 December 2015 (22.12.2015) EP RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, (71) Applicant: BASF SE [DE/DE]; Carl-Bosch-StraBe 38, ZA, ZM, ZW. 67056 Ludwigshafen am Rhein (DE). (84) Designated States (unless otherwise indicated, for every (72) Inventors: DASCHLEIN, Christian; Markgrafenstr. 4, kind of regional protection available): ARIPO (BW, GH, 44791 Bochum (DE). SIEBERT, Max; Voelklinger GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, Strasse 20, 67063 Ludwigshafen (DE). LAUTER, Mi- TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, chael; GontardstraBe 6, 68163 Mannheim (DE). TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, PRZYBYLSKI, Peter; LenaustraBe 8, 67063 Ludwig- DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, shafen (DE). PROELSS, Julian; Bennigsenstr. 40, 67549 LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, Worms (DE). KLIPP, Andreas; Viktoriaring 15, 67245 SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, Lambsheim GUEVENC, Haci Osman; Langer An- GW, KM, ML, MR, NE, SN, TD, TG). (DE). 109, 69115 Heidelberg LEUNISSEN, Leonar- ger (DE). Published: dus; Buergermeister-Fries-Strasse 13a, 67069 Ludwig- BAUMANN, Roelf-Peter; L8, 1, 68161 — international 21(3)) shafen (DE). with search report (Art Mannheim (DE). WEI, Te Yu; 6F.-23, No.111, Wenhua before the expiration of the time limit for amending the 7th Rd., Taoyuan City, 333 (TW). claims and to be republished in the event of receipt of amendments (Rule 48.2(h)) Il .4t M i t IN GC C:: , 1-1 (54) Title: COMPOSITION FOR POST CHEMICAL-MECHANICAL-POLISHING CLEANING L 3 / 4 -- (57) : Described is a post chemical-mechanical-polishing (post-CMP) cleaning composition comprising or consisting of: ::::, (A) polyethylene glycol (PEG) with a mass average molar mass (Mw) in the range of from 400 to 8,000 g/mol, (B) an anionic poly - ei mer selected from the group consisting of poly(acrylic acid) (PAA), acrylic acid-maleic acid copolymers, polyaspartic acid (PASA), 0polyglutamic acid (PGA), polyvinylphosphonic acid, polyvinylsulfonic acid, poly(styrenesulfonic acid), polycarboxylate ethers 5 (PCE), PEG-phosphorous acids, and copolymers of said polymers, and (C) water, wherein the pH of the composition is in the range of from 7.0 to 10.5.