Patent SG-11201906205U-A (SG)
Title: Systems and methods for improved waste gas abatement
Inventor: SILBERSTEIN MICHAEL J
IPC: B01D53/00
Filed: 2018-01-04
Abstract: INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property Organization International Bureau (43) International Publication Date 12 July 2018 (12.07.2018) WIP0 1 PCT omit IIl °nolo Oil Oil IIIII OH OH mo oimIE (10) International Publication Number WO 2018/129111 Al (51) International Patent Classification: BOLD 53/00 (2006.01) (21) International Application Number: PCT/US2018/012279 (22) International Filing Date: 04 January 2018 (04.01.2018) (25) Filing Language: English (26) Publication Language: English (30) Priority Data: 62/443,062 06 January 2017 (06.01.2017) US (71) Applicant: ALZETA CORPORATION [US/US]; 2343 Calle Del Mundo, Santa Clara, California 95054 (US). (72) Inventors: SILBERSTEIN, Michael J.; 210 S 1st St #508, San Jose, California 95113 (US). BARTZ, David Freder- ick; 361 Maplewood Avenue, San Jose, California 95054 (US). (74) Agent: GOLDMAN, Berrie; c/o Bryan Cave LLP, 211 North Broadway, Suite 3600, St. Louis, Missouri 63102 (US). (81) Designated States (unless otherwise indicated, for every kind of national protection available): AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (84) Designated States (unless otherwise indicated, for every kind of regional protection available): ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG). Published: with international search report (Art. 21(3)) before the expiration of the time limit for amending the claims and to be republished in the event of receipt of amendments (Rule 48.2(h)) (54) Title: SYSTEMS AND METHODS FOR IMPROVED WASTE GAS ABATEMENT (57) : The present disclosure generally relates to systems and methods for the combustive abatement of waste gas formed during the manufacture of semicon- 21 ductor wafers. In particular, the systems described herein are capable of combusting 20 air-polluting perfluorocarbons, including those having high greenhouse gas indexes 4 such as hexafluoroethane (C ) and tetrafluoromethane (CF 2 F 6 4 ), as well as particu- 22 late-forming silicon dioxide precursors, such as silane (Sit1) and tetraethoxysilane 4 (Si(OC2H5)4, abbreviated TEOS), with greater efficiency and lower energy usage than prior abatement systems. More particularly, and in one preferred embodiment, 30 U : the present disclosure is directed to a waste gas abatement system that utilizes a combination of non-combustible and combustible gases (or gas mixtures) for ther- mal combustion, which are directed through multiple permeable interior surfaces of a reaction chamber, efficiently combusting waste gas and preventing undesirable accumulation of solid particulate matter on the chamber surfaces. FIG. 1