Patent SG-11201807177V-A (SG)
Title: Apparatus for exhaust cooling
Inventor: MICHAEL S COX
IPC: H01L21/02
Filed: 2016-04-13
Abstract: INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property -, Organization 11111111011110111010101111101011111011101011101111100111111101111101111011111 International Bureau 0.. .... .. ..... ..,,,i (10) International Publication Number (43) International Publication Date WO 2017/177398 Al 19 October 2017(19.10.2017) WIPO I PCT (51) International Patent Classification: No. 48 Jia Zhichun Road, Haidian District, Beijing 100098 H01L 21/02 (2006.01) (CN). (21) International Application Number: (81) Designated States (unless otherwise indicated, for every PCT/CN2016/079153 kind of national protection available): AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, (22) International Filing Date: BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, 13 April 2016 (13.04.2016) DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, (25) Filing Language: English HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, (26) Publication Language: English MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, (71) Applicant: APPLIED MATERIALS, INC. [US/US]; PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, 3050 Bowers Avenue, Santa Clara, California 95054 (US). SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (72) Inventor; and (71) Applicant (for KP only): DUSTIN W., Ho [US/CN]; Rm (84) Designated States (unless otherwise indicated, for every 904, No. 2, Alley 99, FangLi Road, Shanghai 201802 kind of regional protection available): ARIPO (BW, GH, (CN). GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, (72) Inventors: MICHAEL S., Cox; 7090 Church, St.Gilroy, TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, California 95020 (US). BRIAN T., West; 4780 Grimsby DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, Drive, San Jose, California 95130 (US). ROGER M., LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, _ Johnson; 1242 Deep Creek Road, Livermore, California SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, — 94550 (US). YAN, Rozenzon; 3383 Lubich Drive, Moun- GW, KM, ML, MR, NE, SN, TD, TG). _ taro View, California 94040 (US). DINKESH, Somanna; 400 East Remington Dr.Apt.D313, Sunnyvale, California Published: = 94087 (US). — with international search report (Art. 21(3)) (74) Agent: LECOME INTELLECTUAL PROPERTY _ — AGENT LTD.; Floor 16, Tower B of IN.DO Mansion, = = = = = = = = (54) Title: APPARATUS FOR EXHAUST COOLING = = — i ,— 170 = 190 117 I 193---„, 100 192 / 194 196 I I I 11 .4 -191 J r ----'- GC C:7 M Ir ... ' Ir...' 114 - ,-1 -115 -182 Fig. 1 IN 1-1 (57) : An exhaust cooling apparatus (117) includes at least one cooling plate (314,412,514,614,814,914) for introducing 0 turbulence to the exhaust flowing within the exhaust cooling apparatus (117). The device (318,518,618,818,918) may be a plurality \" of fins (320,322,324,326,328), a cylinder (518,618) with a curved top portion (544,644), or a diffuser (824,925) with angled blades C (826,926). The turbulent flow of the exhaust within the exhaust cooling apparatus (117) causes particles to drop out of the exhaust, minimizing particles forming in equipment downstream of the exhaust cooling apparatus (117).