baber/WOPTO huggingface dataset:
Patent KR-20160032448-A (KR)
Inventor: MOON BYUNG SEUK
IPC: H01L51/56
Filed: 2014-09-16
Abstract: The present invention relates to a manufacturing method of an organic light-emitting diode (OLED) substrate and an OLED substrate manufactured by the same and, more specifically, to a manufacturing method of an OLED substrate by forming ceramic granules to form a ceramic thin film, having an amorphous nano-rippling structure, on at least one between an upper and a lower surface of a substrate through a room-temperature spraying procedure, and by polishing or sol-gel coating the ceramic thin film to make the same flat to prevent total reflection and improve external quantum efficiency, and an OLED substrate manufactured by the same.
Patent KR-20160035899-A (KR)
Title: Robot cleaner
Inventor: KIM JONG SU
IPC: A47L5/22
Filed: 2014-09-24
Abstract: Disclosed is a robot cleaner capable of efficiently separating dust from suctioned air and having an improved cleaning function. The robot cleaner comprises: a cleaner main body forming an appearance; an operation unit mounted on the cleaner main body and generating suction force; a suction unit provided in the cleaner main body and suctioning air including dust by an operation of the operation unit; a first guide member and a second guide member communicating with the suction unit and disposed to be separated; and a cyclone unit which is formed to separate dust from the air suctioned through the suction unit using centrifugal force and includes a first and a second intake port communicating with the first and second guide members and a first cyclone and a second cyclone formed so that the air separated from the dust passes therethrough.
Patent KR-20150083007-A (KR)
Inventor: PARK KUN WOO
IPC: A61H23/02
Filed: 2014-10-02
Abstract: A massage device includes: a housing which is curved toward first and second massage members, and is tapered from the first massage member toward the second massage member; a first vibration body joined with the first massage member; a second vibration body which is joined with the second massage member and has vibration force weaker than that of the first vibration body; and a driving switch which can selectively drives the first and the second vibration bodies. Therefore, the massage device can selectively control two vibration bodies having different degrees of intensity by using one switch and can massage various portions of a human body with proper vibration force.
Patent KR-20160043178-A (KR)
Title: Narrow Bezel Flat Panel Display
Inventor: YOO DUK KEUN
IPC: G02F1/1333
Filed: 2014-10-10
Abstract: The present invention relates to a flat panel display device having a narrow bezel structure. According to the present invention, the flat panel display device comprises: upper and lower panels including a display area and a non-display area arranged outside the display area; a protective film coated on the entire surface of the lower panel; a color filter coated on the non-display area on the protective film; a planarization film coated on the non-display area on the color filter; a lower trench arranged on the color filter and the planarization film in the non-display area; and a sealing material coated on the lower trench to bond the upper panel and the lower panel to each other.
Patent KR-20160043748-A (KR)
Inventor: LEE SOO HWAN
IPC: G01R27/18
Filed: 2014-10-14
Abstract: The present invention relates to an apparatus and a method for measuring and analyzing soil resistivity to control the switchover and activation of a first lead line and a second lead line. The apparatus includes: a soil resistivity measuring part which measures soil resistivity; a soil resistivity analyzing part which analyzes the measured value of the soil resistivity; a display part which displays an analysis result; an error determining part which determines whether an error exists in the analysis result; a re-measurement requiring part which requires the re-measurement of the soil resistivity when there is an error in the analysis result; and a storage part which stores the analysis result when there is no error in the analysis result.
Patent KR-20150101910-A (KR)
Inventor: CHO SAENG HYUN
IPC: H01L21/68
Filed: 2014-10-18
Abstract: The present invention is to provide an aligner structure capable of quickly and precisely aligning a substrate and a mask, by performing secondary relative displacement between a substrate (S) and a mask (M) with a relatively small displacement scale after finishing primary relative displacement between the substrate (S) and the mask (M) with a relatively large displacement scale. The aligner structure according to the present invention aligns the mask (M) and the substrate (S) before performing a process of depositing a thin film on the surface of the substrate (S). The aligner structure comprises: a primary alignment unit (100) for primarily aligning the substrate (S) and the mask (M) sequentially by the primary relative displacement between the substrate (S) and the mask (M); and a secondary alignment unit (200) for secondarily aligning the substrate (S) and the mask (M) sequentially by the secondary relative displacement between the substrate (S) and the mask (M) after the primary alignment by the primary alignment unit (100). The displacement scale of the secondary relative displacement is smaller than that of the primary relative displacement, thus the substrate and the mask can be quickly and precisely aligned by performing the secondary relative displacement between the substrate (S) and the mask (M) with the relatively small displacement scale after finishing the primary relative displacement between the substrate (S) and the mask (M) with the relatively large displacement scale.
Patent KR-20160048253-A (KR)
Inventor: JUNG SUNG HYUN
IPC: E05B47/00
Filed: 2014-10-23
Abstract: 본 발명은 잠금 장치의 일종인 디지털 도어락 장치에 사용되는 도어락 장치용 내부 핸들에 관한 것으로서 더욱 상세하게는 도어의 실내 쪽에 설치되어 어린아이나 치매환자 등 판단력이 충분하지 않은 사용자가 혼자 도어락의 잠금을 해제하고 외부로 나가는 것을 막을 수 있는 도어락 장치용 내부 핸들에 관한 것이다. 
본 발명은, 도어락 장치의 내부 쪽에 설치되어 도어를 개방하기 위하여 사용되는 도어락 장치용 내부 핸들에 있어서, 일단부는 상기 도어락 장치와 결합하고 타단부는 도어의 내부 쪽으로 노출되며 그 내부에 일방향으로 길게 형성되며 도어락 장치쪽 단부에 형성되는 돌기가 형성된 관통공을 포함하는 축부와 상기 축부의 타단부쪽에 결합하여 사용자가 상기 축부를 회전시키는 힘을 가하기 위한 가압부를 포함하는 핸들; 상기 관통공의 돌기와 체결가능한 홈과 그 내부에 형성되며 일방향으로 긴 수용홈을 포함하며, 상기 도어락 장치쪽으로 이동하여 상기 돌기와 홈이 체결되는 제1위치와 상기 도어락 장치의 반대쪽으로 이동하여 상기 돌기와 홈의 체결이 해제되는 제2위치 사이에서 이동할 수 있도록 상기 핸들 축부의 관통공 내에 수용되는 커플러; 상기 커플러를 상기 제1위치에서 제2위치로 이동시키기 위한 것으로서 상기 핸들에 결합하는 이동부재; 일단부는 도어락 장치와 결합하고 타단부는 커플러의 수용홈을 관통하여 상기 커플러에 결합하며 상기 커플러의 회전을 상기 도어락 장치에 전달하는 로드;를 포함하는 것을 특징으로 하는 도어락 장치용 내부 핸들을 제공한다.
Patent KR-20160049644-A (KR)
Inventor: LEE SEUNG HEON
IPC: G06F3/041
Filed: 2014-10-28
Abstract: The embodiment provides a touch panel having improved reliability. According to the embodiment, the touch panel includes: a substrate including an active area and an inactive area; first and second ground electrodes provided in the inactive area; and a pad part connected with at least one of the first and second ground electrodes.
Patent KR-20160052872-A (KR)
Inventor: KIM KI JUNG
IPC: H01M8/02
Filed: 2014-10-29
Abstract: Disclosed is a flow channel member for a fuel cell. The flow channel member for a fuel cell according to the present invention comprises: a base plate which comes into contact with a separation plate coupled to electrodes of a fuel cell, is formed to have a predetermined thickness, and is formed to be extended in widthwise and lengthwise directions thereof; a plurality of protruding flow path portions which are formed to protrude from one side surface of the base plate in a thickness direction of the base plate, and through which flow paths, through which gas flows, are formed in the lengthwise direction of the base plate; and a plurality of plane flow path portions which are formed adjacent to the protruding flow path portions to form the same plane along with the base plate. The individual plane flow path portions and the individual protruding flow path portions are alternately arranged in the widthwise and lengthwise directions of the base plate.
Patent KR-20160053603-A (KR)
Title: Mounting angle changeable band cable
Inventor: NOH SEUNG HUN
IPC: B60R16/02
Filed: 2014-11-05
Abstract: The preset invention relates to a mounting angle changeable band cable. According to an embodiment of the present invention, the mounting angle changeable band cable comprises: a body covering a cable to be fixed and having a curved part formed thereon; and a clip capable of moving along the outer circumferential surface of the curved part and coupled to the body. The mounting angle changeable band cable can improve durability of a product.
Patent KR-20160059108-A (KR)
Title: Hemodialysis apparatus and method
Inventor: CHO TAE BEOM
IPC: A61M1/14
Filed: 2014-11-18
Abstract: The present invention relates to a hemodialysis apparatus wherein the hemodialysis apparatus is configured to comprise: a hemodialysis filter; a blood flow tube, connecting the hemodialysis filter and the patient; a blood flow control valve, installed in the blood flow tube, for controlling the blood flow; a dialysis fluid pump for supplying a dialysis fluid to the hemodialysis pump; a discharge pump for discharging the dialysis fluid which has passed through the hemodialysis filter. The hemodialysis apparatus of the present invention is capable of swiftly modifying the pressure of the dialysis fluid inside the hemodialysis filter, and improving the exchange of moisture and material between the blood and the dialysis fluid and the hemodialysis efficiency. Moreover, the present invention transports blood without using a blood pump, which allows the apparatus to be simplified and miniaturized, and thus can ultimately provide a portable hemodialysis apparatus.
Patent KR-20160061657-A (KR)
Inventor: LEE SANG WOOK
IPC: F21V21/08
Filed: 2014-11-24
Abstract: The present invention relates to a lighting apparatus for camping with extended functions for use. According to the present invention, the lighting apparatus for camping can be used as an indoor lamp emitting light from various angles when being hung inside a tent for camping, and can be used for a lantern when being carried by a user. The lighting apparatus for camping includes: a main body including a power supply part inside thereof; a hanging part which is formed on a side of the main body, is hung in a tent to function for the installation of the lighting apparatus for camping when the lighting apparatus for camping is used as an indoor lamp, and functions as a grip when the lighting apparatus for camping is carried by a user; and a lighting part which has a light source unit installed in a housing hinged on the main body to emit light to a side, and a transmission cover which transmits the light of the light source unit and protects the light source unit, on one side of the housing where the light is emitted.
Patent KR-20160061721-A (KR)
Inventor: JANG JI UK
IPC: G01K7/22
Filed: 2014-11-24
Abstract: The present invention relates to an abnormal temperature sensing assembly for sensing abnormal temperatures at multiple points and a battery pack including the same, wherein the assembly comprises: two or more serially connected positive temperature coefficient (PTC) thermistors; a voltage detection unit measuring an electric potential difference between both ends of each of the serially connected PTC thermistors; a control unit sensing the abnormal temperatures based on the electric potential difference transmitted by the voltage detection unit and outputting an abnormality occurrence signal when the abnormal temperatures are detected; and a sheet type conductive member, made by burying conductive line in a base film with electric insulation, provided with one or more mounting branches extended from a main body of the base film corresponding to mounting positions of the PTC thermistors, which are mounted on the base film and connected to the voltage detection unit in a state of being serially connected by the conductive line.
Patent KR-20160067280-A (KR)
Inventor: AN OCD KYU
IPC: A63G31/00
Filed: 2014-12-03
Abstract: The present invention relates to a multi-functional clamp to fixate a side of a circular pillar. The clamp to connect other structures by being coupled to the circular pillar comprises: a body (100) formed on a round surface (120) having the same shape as an outer surface of the pillar (H) such that one surface adheres to an outer surface of the pillar (H), and having fastening holes (140, 150) formed on an upper and a lower portion of the outer side thereof to be coupled through a coupling unit (160) on the pillar (H); and a connection holder (200) formed to protrude from a center of the body (100) to connect other structures. The multi-functional clamp to fixate the side of the circular pillar is able to conveniently connect and fixate structures, such as a chin-up bar, by being attached and fixated to one side surface of the circular pillar which is a column when playground facilities are installed; and is able to remarkably reduce workability of a worker by attaching and fixating to one side surface of the circular pillar.
Patent KR-20160069149-A (KR)
Title: Latch circuit and latch circuit array including the same
Inventor: KIM CHANG HYUN
IPC: H03K3/356
Filed: 2014-12-08
Abstract: Embodiments of the present invention provide a technology to prevent a latch circuit from losing data in a read operation. The latch circuit comprises: first to fourth storage nodes; first to fourth transistor pairs, wherein each of the first to fourth transistor pairs comprises a PMOS transistor and an NMOS transistor which are serially connected via a corresponding storage node among the first to fourth storage nodes, and wherein each of the first to fourth storage nodes is connected to a gate of the NMOS transistor of the transistor pair of a front end and a gate of the PMOS transistor of the transistor pair of a rear end; a first connection unit to electrically connect a data bus to a K-th storage node (K is larger than or equal to integer of one and is smaller than or equal to integer of four) among the first to fourth storage nodes in read and write operations; and one or more second connection units to electrically connect the data bus to at least one node among the storage nodes except for the K-th storage node among the first to fourth storage nodes in the write operation.
Patent KR-20160070467-A (KR)
Title: A multi robot system for avoding obstacle and a method using switching formation strategy for obstable avoidandce
Inventor: Dai yan yan
IPC: B25J9/16
Filed: 2014-12-10
Abstract: According to an embodiment of the present invention, a method of avoiding an obstacle of a multi-robot comprises: a step of providing a multi-robot including at least one following robot and one leading robot forming a formation in a row; a step of forming a predetermined formation by the multi-robot, and running while maintaining the formation; a step of detecting a situation wherein the robot should avoid an obstacle by a sensor attached to the leading robot; a step of calculating a waypoint for avoiding the obstacle using a control method for avoiding a geometrical obstacle by a control unit of the leading robot; a step of checking the distance between the following robots by the sensor attached to the following robot, and determining whether a collision problem is caused or not by the control unit of the following robot; and a step of changing the formation into an obstacle avoiding formation by cooperating with the leading robot by the following robots.
Patent KR-20160072566-A (KR)
Title: Valve system for heating water using temperature sensor and a pump
Inventor: PARK SANG HOON
IPC: E03C1/04
Filed: 2014-12-15
Abstract: The present invention relates to a hot water control valve system using a temperature sensor and a pump, which: prevents the waste of water by allowing water in pipes to pass through a boiler and circulate when a temperature does not reach a desired temperature by sensing the temperature of water in the pipes; and allows a user to use water by discharging the water at a desired temperature by recognizing the temperature of the water in the pipes through an LED. The hot water control valve system of the present invention comprises: a faucet which discharges water to the outside by receiving hot water and cold water individually through hot water pipes connected with a boiler and cold water pipes connected with a water tank; a temperature sensor which senses the temperature of water by being installed in a part of mixing hot water supplied through the hot water pipes and cold water supplied through the cold water pipes; circulation pipes of which one end is connected to the hot water pipes and the other end is connected to water supply pipes connected to an inlet of the boiler; a circulation pump which circulates water in the hot water pipes and the circulation pipes through the boiler by being installed in the circulation pipes; an operation knob which opens or stops the operation of the circulation pump by being installed in the faucet to be operated by a user and controls the discharge of water through the faucet; a light emitting unit which emits light in accordance with the temperature sensed by the temperature sensor by being installed in the faucet; and a controller which controls the operation of the circulation pump and the operation of the light emitting unit.
Patent KR-20160079192-A (KR)
Title: 교체시기를 확인 가능한 삽입형 흡수용품
Inventor: SEO JAE WON
IPC: A61F13/20
Filed: 2014-12-26
Abstract: 본 발명은 체내에 삽입하는 일회용 흡수용품에 관한 것으로, 삽입형 흡수용품에 있어서, 흡수체;와 상기 흡수체 하단에 구비되어 상기 흡수체를 회수하는 회수끈; 및 일단이 상기 흡수체 내부에 삽입되어 교체시기를 알려주는 교체알림끈;을 포함하는 것을 특징으로 한다. 
더욱 상세하게는 체내에 삽입하는 흡수용품이 교체시기를 확인할 수 있는 교체알림끈를 구비하여 교체시기를 체크함으로써 적절한 시기에 흡수용품을 교체 가능하게 하는 발명에 관한 것이다.
Patent KR-20160079383-A (KR)
Title: Apparatus for Heat Treatment of Coating Layer having Multiple Heat Source and Method for Heat Treat Using the Same
Inventor: KIM BYUNG KUK
IPC: G06F3/041
Filed: 2014-12-26
Abstract: Disclosed is a device for heat treatment on a coating layer having a plurality of heat sources, comprising: a flash lamp; a top reflector; a first auxiliary heat source; and a second auxiliary heat source, and a method using the same. Since the first auxiliary heat source preheats a coating layer formed on the top surface of a substrate before plastification, a binder included in the coating layer is removed in advance. A channel is formed between metal oxide powders for the coating layer to receive more efficient plastification. The second auxiliary heat source additionally performs heat treatment of the coating layer, which has received plastification, to remove a binder remaining on the coating layer or remaining stress. The present invention aims to provide a device for heat treatment on a coating layer having a plurality of heat sources, which is able to increase the heat treatment efficiency of the coating layer, to minimize the remaining binder, and to reduce the remaining stress, and method using the same.
Patent KR-20160080710-A (KR)
Title: Artificial turf, file for Artificial turf and manufacturing method thereof
Inventor: KWON YOUNG HOON
IPC: D01F1/10
Filed: 2014-12-30
Abstract: The present invention relates to artificial turf, pile threads for the artificial turf, and a manufacturing method thereof. The pile threads include any one between a UV sensitive polymer of changing color in response to ultraviolet rays and a shape memory polymer of changing a shape in response to ultraviolet rays. Thus, the present invention is able to: display various visual designs by changing color and design in response to ultraviolet rays; and be used in various fields.
Patent KR-20160081146-A (KR)
Title: Blocking gutters outlet for Dehumidifiers
Inventor: CHOE GI TAE
IPC: F24F3/14
Filed: 2014-12-30
Abstract: The present invention relates to a method to block an outlet of gutters for a dehumidifier, to prevent discharging of remaining water in the gutter through the outlet at the time of separating a water tank from the dehumidifier to empty the water tank of the dehumidifier. The method comprises: a step of detecting a separation of the water tank by a magnetic sensor provided on a main body of the dehumidifier; a step of blocking the outlet of the gutter in response to a detection signal of separating the water tank by the magnetic sensor; and a step of reopening the outlet of the gutter in response to the detection signal of integrating the separated water tank back with the main body. As such, the present invention has effects of preventing damage to or breakdown of various components or devices caused by drops of water on the bottom of the main body of the dehumidifier and eliminating the inconvenience of removing the drops of water.
Patent KR-20160083422-A (KR)
Title: Substrate treating apparatus and substrate treating method
Inventor: PARK MIN JUNG
IPC: H01L21/02
Filed: 2014-12-31
Abstract: The present invention provides a method for treating a substrate. According to an embodiment of the present invention, the method for treating a substrate comprises: a cleaning step of spraying a cleaning liquid onto a substrate; a rinse step of spraying a rinse liquid onto the substrate which is completely cleaned; and a drying step of drying the substrate which is completely rinsed. The rinse step comprises: a first rinse step of rotating the substrate at a first speed; and a second rinse step of rotating the substrate at a second speed different from the first speed. Therefore, a substrate treatment device for reducing environment contamination can be provided.
Patent KR-20140060285-A (KR)
Inventor: SHARON ERAN
IPC: G06F11/10
Filed: 2012-07-20
Abstract: 데이터를 저장하기 위한 시스템들 및 방법들이 개시된다.
Patent KR-20140068938-A (KR)
Inventor: SETHI MANISH
IPC: G06F3/01
Filed: 2012-08-10
Abstract: 터치 입력이 스프레드시트 내의 셀에 대한 다중 선택을 위해 사용된다.  예를 들어, 사용자는 자신이 선택하고자 하는 스프레드시트의 셀을 가로질러 손가락을 드래그할 수 있다.  셀의 다중 선택은 스프레드시트의 하나 이상의 행 및 하나 이상의 열 내의 셀을 포함할 수 있다.  다중 선택은 다중 선택 내에서 더 많거나 적은 셀을 선택하도록 조절될 수 있다.  다중 선택은 다른 목적을 위해 사용될 수 있다.  예를 들어, 다중 선택은 다중 선택에 관한 요약 정보(예, 합계, 평균, 중앙값, 최솟값, 최댓값, 카운트 등)를 디스플레이하는 데 사용될 수 있다.  또한, 다중 선택이 사용되어 현재 편집 중인 공식으로 입력을 제공할 수 있다.
Patent KR-20140042928-A (KR)
Inventor: CARLSSON PONTUS
IPC: G10L19/005
Filed: 2011-04-06
Abstract: 본 발명은 주파수 영역에서 복소수 예측을 사용하여 스테레오 엔코딩 및 디코딩하기 위한 방법들 및 장치들을 제공한다. 일실시예에서, 복소수 예측 코딩에 의해 엔코딩되고 2개의 입력 채널들의 제1 주파수-영역 표현들을 포함하는 입력 스테레오 신호로부터 출력 스테레오 신호를 얻기 위한 디코딩 방법은 (i) 제1 입력 채널의 제2 주파수-영역 표현을 계산하고, (ii) 제1 입력 채널의 제1 및 제2 주파수-영역 표현들, 제2 입력 채널의 제1 주파수-영역 표현 및 복소수 예측 계수에 기초하여 출력 채널을 계산하는, 업믹스 단계를 포함한다. 업믹스는 제어 데이터에 따라 중단될 수 있다.
Patent KR-20140043847-A (KR)
Inventor: MEHDI KALLUDRA
IPC: H02K53/00
Filed: 2011-03-17
Abstract: 새로운 에너지 법칙이 새로운 발견을 거쳐 확립되었으며, 이것은 에너지 증가(확대)의 법칙이다. 이러한 증가는 새로운 에너지 법칙에 관한 지식 및 기회 등을 더 제공하는 신규한 발전 장치인 "퍼페툼 모바일"에 의해 달성된다. 
이를 가능하게 하는 장치가 발명되었다. 이 장치는 에너지를 20배까지 증가시키며 무제한의 횟수만큼 반복할 수 있다. "퍼페툼 모바일"은 계수 20을 따라 작동하며, 어떠한 비용도 들지 않고 무제한의 동력으로 작동한다.
Patent KR-20140069147-A (KR)
Inventor: SAKA TAKASHI
IPC: H02H7/20
Filed: 2012-08-28
Abstract: 1차 권선(N1)과 2차 권선(N2)과 3차 권선(N3)을 가지는 트랜스(104)와, 교류 전력을 직류 전력으로 변환해서 평활화하는 1차측 정류 평활화 회로(103)와, 2차 측의 전력을 평활화하는 2차측 정류 평활화 회로(106)와, 3차 권선의 전력을 평활화하는 3차측 정류 평활화 회로(107)와, 1차 권선을 개폐하는 스위칭 회로(108)와, 상기 스위칭 회로의 개폐를 제어하는 펄스 폭 제어 회로(109)와, 2차측 직류 출력 전압과 기준 전압과의 편차를 검출하는 출력 오차 검출 회로(110)와, 상기 2차측 직류 출력 전압의 리플 전압을 검출하여 상기 출력 오차 검출 회로를 정지 제어하는 리플 전압 검지 제어 회로(171)를 구비하며, 상기 리플 전압 검지 제어 회로의 정지 제어 신호로 상기 출력 오차 검출 회로의 출력을 정지하여 상기 스위칭 회로로의 구동 신호를 정지하여 스위칭 전원 회로의 동작을 멈춘다.
Patent KR-20140066762-A (KR)
Inventor: MYLLYMAEKI VESA
IPC: C23C14/06
Filed: 2012-09-17
Abstract: 코팅 재료는 레이저 어블레이션에 의해 기판을 코팅하는데 사용된다.  코팅 재료는, 순수 탄소 질화물의 코팅에 비해 생성된 코팅의 특성들을 변경하기 위해 도펀트 및 흑연질 탄소 질화물을 함유한다.
Patent KR-20140090198-A (KR)
Title: 플라즈마 시스 전압 제어를 위한 시스템, 방법 및 장치
Inventor: MARAKHTANOV ALEXEI
IPC: C23F1/08
Filed: 2012-10-31
Abstract: 플라즈마로부터 방출된 이온들의 에너지 레벨을 증가시키기 위한 시스템들, 방법들 및 장치는 상단 전극 및 하단 전극을 포함하는 플라즈마 챔버; 복수의 RF 소스들로서, 상기 복수의 RF 소스들 중 적어도 하나는 상기 하단 전극에 접속되는, 상기 복수의 RF 소스들을 포함한다.  위상 록킹 회로가 상기 복수의 RF 소스들 중 적어도 2 개에 접속되며, 상기 상기 복수의 RF 소스들 중 적어도 2 개는 제 1 RF 소스 및 제 2 RF 소스로서 지정된다.  제어기가 상기 플라즈마 챔버, 상기 복수의 RF 소스들 각각 및 상기 위상 록킹 회로에 접속된다.  상기 제어기는, 동작 시스템 소프트웨어; 복수의 로직 회로들; 및 프로세스 레시피를 포함한다.