baber/WOPTO huggingface dataset:
Patent KR-20010071892-A (KR)
Title: 기판 가공 시스템에서의 기체 흐름 제어
IPC: C23C16/455
Filed: 1999-07-13
Abstract: 기판 가공 시스템은 공정 챔버에 인접한 진공가능 챔버 및 등을 맞대고 연속한 공정 챔버들 또는, 진공가능 챔버 및 공정 챔버들의 다른 조합을 포함할 수 있다.  가공 챔버는 기체 흐름 밸브 및 진공 밸브뿐만 아니라 인접한 챔버들 사이에 배치된 다양한 격리 밸브를 포함한다.  제어기는 다양한 기체 흐름 밸브 및 진공 밸브의 각 위치를 다양한 격리 밸브가 개방 위치 또는 밀봉 위치에 있는가에 부분적으로 의존하여 제어한다.  밸브의 위치를 제어함으로써, 상이한 챔버를 오가는 기체의 흐름이 제어될 수 있고 예를 들어, 처리율을 최대로 하고, 능률을 증가시키며, 챔버 사이의 상호 오염의 가능성을 감소시키게 된다.
Patent KR-20010093105-A (KR)
Title: Method for galvanizing and galvannealing employing a bath of zinc and aluminum
IPC: C23C2/36
Filed: 1999-11-05
Abstract: The present application discloses a method for hot-dip galvanizing and galvannealing which employs a bath of zinc and aluminum. Strips are immersed in the bath to produce substantially dross-free galvannealed and galvanized strips. The bath can have substantially the same effective aluminum concentration during galvannealing as during galvanizing, and the temperature set-point of the bath is at a temperature of about 440° C. to about 450° C.
Patent KR-20010107991-A (KR)
Title: Improved formulation for topical non-invasive application in vivo
IPC: A61P17/06
Filed: 1998-12-23
Abstract: A formulation comprising molecular arrangements capable of penetrating pores in a barrier, owing to penetrant adaptability, despite the fact that the average diameter of said pores is smaller than the average penetrant diameter, provided that the prenetrants can transport agents or else enable agent permeation through the pores after penetrants have entered pores, characterized in that the formulation comprises at least one consistency builder in an amount that increases the formulation to maximally 5 Nm/s so that spreading over, and retention at, the application area is enabled and/or at least one antioxidant in an amount that reduces the increase of oxidation index to less than 100% per 6 months and/or at least one microbiocide in an amount that reduces the bacterial count of 1 million germs added per g of total mass of the formulation to less than 100 in the case of aerobic bacteria, to less than 10 in the case of entero-bacteria, and to less than 1 in the case of Pseudomonas aeruginosa or Staphilococcus aureus, after a period of 4 days.
Patent KR-20010101149-A (KR)
IPC: H01H89/00
Filed: 1999-12-08
Abstract: 전화, 이동전화, 원격제어장치, 텍스트 및 문자전송기, 계산기, 전자 플래너를 위한 키이 패드장치에서, 사용자에 의해 수동으로 작동될 때, 제어소자가 적어도 2개의 기능명령을 실행시키며, 상기 제어소자의 이동은 손가락의 느낌에 의해 알 수 있거나 선택적으로 사운드 및/또는 광 및/또는 LCD 디스플레이와 같은 디스플레이에 의해 표시된다.   상기 장치는 제어휘일이 피봇가능하게 지지되는 장치하우징과, 장치하우징에서 회전가능하게 정지되어 있지만 하우징에 대해서는 경사질 수 있는 고정용 브래킷장치와, 광학적 마킹이 구비된 원주측이나 하부측에 위치된 제어휘일의 회전동작을 검출하기 위한 적어도 하나의 검출기와, 장치하우징의 발광기/수광기 세트의 위치에서 제어휘일의 하방경사에 따라 발광기와 수광기 사이의 광비임의 통로를 작동시키며, 상기 제어휘일의 하부측으로부터 일정한 거리에 위치된 적어도 하나의 발광기/수광기 세트와, 장치하우징의 경사검출기의 위치에서 제어휘일의 하방경사에 따라 경사검출기를 작동시키는 제어휘일의 하부측으로부터 일정한 거리에 위치되는 적어도 하나의 경사검출기를 포함하며, 상기 제어휘일은 탄성가능하게 지지되고 그 적어도 3개의 부분에서 장착되며; 상기 검출기는 마킹의 대향측에 위치되며; 상기 고정용 브래킷장치는 제어휘일에 피봇가능하게 연결되고, 고정용 브래킷장치의 회전동작을 방지하고 그 경사동작을 제한하기 위해 하우징에서 슬롯내로 연장되는 적어도 2개의 핀을 구비하는 것을 특징으로 하는 키이 패드장치.
Patent KR-20020003870-A (KR)
IPC: C04B41/87
Filed: 2000-04-18
Abstract: 본 발명은 규소 함유 기재 및 지르콘 코팅을 포함하는 제품에 관한 것이다.  상기 제품은 탄화규소/규소(SiC/Si) 기재, 지르콘(ZrSiO 4 ) 중간 코팅 및 외부의 환경적/열적 장벽 코팅을 포함할 수 있다.
Patent KR-20020001865-A (KR)
Title: 면역반응을 증강시키기 위한 가용성 공동자극 분자의 용도
IPC: A61P37/04
Filed: 2000-05-05
Abstract: 공동자극 분자 예를 들어, B7 분자의 가용성 형태가 항원 예를 들어, 종양세포 및 감염성 제제에 대한 면역반응의 증대를 위해 투여되는 면역반응 증강 방법이 제공된다.  본 발명의 방법은 피험자의 예방적 및 치료적 면역화 둘 모두에 유용하다.
Patent KR-20020012217-A (KR)
IPC: B60C9/18
Filed: 1999-05-14
Abstract: 비연장성이면서 실질적인 래디얼 보강물 요소의 추가 보강물(33)의 폭(L 33 ) 보다 큰 축방향 폭(L 32 ,L 34 )을 갖는 적어도 두 개의 워킹 크라운 플라이로 형성된 크라운 보강물(3)을 포함하는, 최대 축방향 폭(S o )의 래디얼 카카스 보강물(1)을 구비한 타이어에 있어서, 
     상기 추가 보강물은 상기 플라이(32,34) 사이에서 반경방향으로 배열되고 축방향으로 3개의 부분으로 구성되는데, 중앙 부분은 비연장성이면서 실질적인 래디얼 보강물 요소로 형성되고 폭을 갖는 플라이(33')의 형태이고, 두 측방향 부분은 원주방향의 탄력적인 금속성 보강물 요소로 각각 형성된 스트립(33")의 형태이고, 측방향 스트립(33")의 단위 폭당 정지마찰(traction) 시의 탄성 계수(the modulus of elasticity)가 기껏해야 동일 조건에서 측정되는 가장 연장가능한 워킹 플라이(32,34)의 정지 마찰 시의 탄성 계수와 동일하다.
Patent KR-20020022683-A (KR)
IPC: A23L21/18
Filed: 2001-03-27
Abstract: 아르테필린 C 및 그 유도체의 효율적이고도 안전한 유기합성법에 의한 제조방법을 제공함을 과제로 하고, 아르테필린 C 및 그 유도체의 제조원료로서 유용한 신규의 페놀 유도체와 그 제조방법 및 이 페놀 유도체와 아크릴산 에스테르 또는 아크릴산을 반응시키는 공정을 경유하는 아르테필린 C 및 그 유도체의 제조방법을 제공함으로써 해결한다.
Patent KR-20020060072-A (KR)
IPC: F16L9/12
Filed: 2001-06-05
Abstract: 폴리아미드 12, 폴리아미드 11, 폴리아미드 1010, 폴리아미드 1012 또는 폴리아미드 1212를 주성분으로 하는 몰딩 화합물로 만들어진 적어도 한 개의 인접하는 막을 가지면서, 코폴리아미드 6/12, 블록 코폴리아미드 6/12, 폴리아미드 612, 폴리아미드 610, 폴리아미드 6과 폴리아미드 12 그리고 융화제의 혼합물, 폴리아미드 6과 폴리아미드 11 그리고 융화제의 혼합물의 그룹에서 선택된 폴리아미드를 주성분으로 하는 몰딩 화합물로 만들어지는 적어도 한 개의 접착 개선막을 통해 결합되는, 폴리아미드를 주성분으로 하는 몰딩 화합물들로 만들어진 막들 사이의, 에틸렌/비닐 알콜 공중합체를 주성분으로 하는 몰딩 화합물로 만들어진 적어도 한 개의 중간막을 포함하는, 특히 다층 호스, 다층 파이프 또는 다층 콘테이너의 형태인, 열가소성 다층 복합물.
Patent KR-20020029866-A (KR)
IPC: G01S13/72
Filed: 2001-03-31
Abstract: 차량(1)의 속도를 조절하기 위한 방법이 개시되고, 여기서 특히 주행 궤도의 곡률(k)을 결정하기 위하여 차량(1)의 잘 조정된 요잉율 또는 회전율이 검출되고, 검출은 선행 차량(5, 8)에 대하여 또는 센서 검출 영역(7) 내의 적어도 하나의 대상에 대하여, 특히 조절되는 차량 경로에 관한 오프셋에 관해서 이루어진다.  선행 차량(5)의 경로에 관한 오프셋(yc)은 소정의 측정 사이클 내에서 결정되고 주어진 시간 동안 지연된다.  주행 궤도의 각각의 현재의 곡률(k)과 과거의 경로 오프셋(yc hist )이 결정되어, 조절되는 차량 경로의 쉽고 빠른 예측이 가능하다.
Patent KR-20030060388-A (KR)
Title: Converting Apparatus for converting internet protocol address and Communicating Method using thereof
Inventor: HWANG PIL YONG
IPC: H04L29/12
Filed: 2002-01-08
Abstract: PURPOSE: An internet protocol address converter and a communication method using the same are provided to solve a depletion of a common IP address by an IPv4 terminal using a common IP address. CONSTITUTION: An interface device(120) receives a signal transmitted from an IPv4 terminal and transmits the received signal to a terminal corresponding to a destination address of the received signal. An address allotting section(130) allots a first private IPv4 address of an IPv4 system to the IPv4 terminal. An address generator(140) generates a first public IPv4 address of the IPv4 system of the IPv4 terminal from a hardware address of the IPv4 terminal. An address acquiring section(150) acquires a second public IPv6 address of an IPv6 system corresponding to a domain name of an IPv6 terminal. A controller(110) transmits an access request signal to the IPv6 terminal through the interface device(120) by using the first and second public IPv 6 addresses corresponding to the first and second private IPv 4 and IPv 6 addresses, respectively.
Patent KR-20030062002-A (KR)
Title: Spiral Hose Using Polyethylene
Inventor: JEONG IN SEON
IPC: F16L11/00
Filed: 2002-01-15
Abstract: PURPOSE: A spiral hose made of polyethylene is provided to improve productivity by simplifying a manufacturing process, and to increase the coupling force of coupled parts. CONSTITUTION: A band-shaped polyethylene member(50) has a uniform side section, and is wound and forms a spiral hose. The side section of the polyethylene member is composed of a plurality of bent parts so that a protrusion unit(52) is contacted with a groove unit(54). The end of the protrusion unit is overlapped with the end of the groove unit.
Patent KR-20030062579-A (KR)
Title: The lab animal isolation cage with integrated cover fixing apparatus
Inventor: PAR CHEON KWE
IPC: A01K1/03
Filed: 2002-01-17
Abstract: PURPOSE: An experimental animal breeding cage with a combined cap fixing device is provided to achieve simple and easy detachment of a cap and a box of the cage without a separate fixing device thereof, to improve the convenience of washing and management of the cage, and to extend the use life thereof. CONSTITUTION: The experimental animal breeding cage comprises a cap(10) centrally formed at the front lower end with a holding handle(11), which extends downward and outward to the inner surface of a fixing step(32) of a box(30). The cap is further formed at the rear end with a holding bar(12), which is bent toward the inner surface of the fixing step. The fixing step is integrally formed at the upper rim of the box.
Patent KR-20020066977-A (KR)
Title: Thin film transistor liquid crystal display
Inventor: CHANG WEI-CHIH
IPC: G02F1/1368
Filed: 2002-02-07
Abstract: PURPOSE: A TFT(Thin Film Transistor) liquid crystal display is provided to reduce the number of chips for driving by producing voltage through capacitive coupling and by forming a multiple domains, to simplify design of TFT array, and to simplify the manufacturing process. CONSTITUTION: A TFT liquid crystal display includes a first substrate(40) and a second substrate(50), a liquid crystal layer(60), an upper electrode(42), a lower electrode, and a plurality of polarizers(70). An enclosed space is formed between the first substrate and the second substrate. The liquid crystal layer is filled in the enclosed space. The upper electrode is formed on the inner surface of the first substrate. The lower electrode is formed on the inner surface of the second substrate having a narrow electrode(52) and a pixel electrode(54) beside the narrow electrode. The narrow electrode is coupled to a drain/source of a thin film transistor, and a portion of the pixel electrode is overlapped on the drain/source of the thin film transistor but insulated to the drain/source of the thin film transistor. The polarizers are formed on the outer surface of the first substrate and the second substrate respectively.
Patent KR-20020069502-A (KR)
Inventor: UEDA TAKASHI
IPC: H01L29/49
Filed: 2002-02-26
Abstract: PURPOSE: To provide a method for readily using a salicide technology as to a method for manufacturing a semiconductor device for suppressing an increase in wiring resistance of a gate electrode, by replacing the gate electrode with a metallic material. CONSTITUTION: A barrier layer is formed by oxidizing a antireflection film which is stacked before a resist application for preventing a constriction on a transfer pattern formed at the time of optical pattern transfer of a photoresist.
Patent KR-20020022746-A (KR)
Inventor: WON JONG KAB
Filed: 2002-02-27
Abstract: PURPOSE: A method for managing an electronic shopping mall using the Internet is provided to perform a branch management and to provide the convenience of electronic commerce to a user by managing the headquarter and branch shopping malls through a common domain address. CONSTITUTION: The electronic shopping mall managing server(10) enables a headquarter and branch shopping mall to be linked with each other on the Internet(20) and be communicated to an individual customer computer(30) through the Internet, and possesses a database(11). The database stores the data for managing the headquarter and branch shopping mall, the unique branch code data of each branch shopping mall in order to manage the headquarter and branch shopping mall by a common domain address, and the order management data for sharing a profit produced by an automatic order management according to the products purchases. The database records the changed data in real time and freely executes the addition/deletion of data.
Patent KR-20020040704-A (KR)
Inventor: CHO SEUNG YEON
IPC: C09K5/04
Filed: 2002-03-05
Abstract: PURPOSE: Provided is a non-combustible coolant mixture friendly to environment, which replaces Freon coolant R502 and R22 and contains a hydrocarbon-based coolant gas and a hydrofluorocarbon-based coolant gas. CONSTITUTION: The coolant mixture replacing the Freon coolant R502 contains 15-35wt% of propane and 65-85wt% of pentafluoroethane, wherein the total amount of the propane and the pentafluoroethane is 100wt% based on the total coolant mixture. And the coolant mixture replacing the Freon coolant R22 contains 15-30wt% of propane, 60-75wt% of pentafluoroethane, and 10-25wt% of 1,1-difluoroethane, wherein the total amount of the propane, the pentafluoroethane, and the 1,1-difluoroethane is 100wt% based on the total coolant mixture.
Patent KR-20020042769-A (KR)
Inventor: JU YUN SIK
IPC: B01F27/91
Filed: 2002-03-08
Abstract: PURPOSE: A stirrer having stirring degree control system according to the change of density and a control method thereof is provided to control the rotation/stirring degree of an impeller in stirring tank according to a change of density of contents inputted within the tank so to maximize the stirring efficiency. CONSTITUTION: In the stirrer consisting of a housing(3); a motor(1) and a speed reducer(2) provided upon the housing and; an impeller shaft(10) and an impeller(11) provided in an output rod: the stirrer having stirring degree control system according to a change of density comprises a velocity indicator(5) and a stirring degree control device(6) in a side of the stirrer; a control means(8) having a density analyzer(7) and an inverter; an RPM sensor(4) attached to the speed reducer(2) and; an MLSS measuring sensor(9) provided in the stirring tank to be submerged, wherein the output of the control means(8) are connected to the motor(1) via the inverter by the stirring degree control device(6).
Patent KR-20030047648-A (KR)
Title: Head light for motorcycle and mounting structure thereof
Inventor: NISHIMURA SEIJI
IPC: B62J6/00
Filed: 2002-03-11
Abstract: PURPOSE: To reduce the number of part items and enhance the decorative effect of a headlamp for a motorcycle. CONSTITUTION: An expanded part 63 is formed in the edge 62a of a reflector 62, an emblem 64 is installed in the expanded part 63, and the expanded part 63 and the emblem 64 are covered with a lens 53 in the headlamp for the motorcycle composed of a bulb 51, the reflector 62, and the lens 53.
Patent KR-20030074962-A (KR)
Title: Attachment within shoes having sound production means and identity confirmation means
Inventor: AHN SONG YOUNG
IPC: A43B3/00
Filed: 2002-03-15
Abstract: PURPOSE: A sticking tool having an identity proving device and a melody generating device for a shoe is provided to identify an identity in an accident and to input and output additional information with melody by equipping the identity proving device and the melody generating device in one case. CONSTITUTION: An identity proving device and a melody generating device are formed in one housing. The housing has a base(100), a main body(200) and a fixing device. The base is fixed to an outer cover of a shoe. The main body having a recording playback device(70) and a recording plate for proving identity(40) is attached to and detached from the base with the fixing device. Thereby, a sticking tool having an identity proving device and the melody generating device is stuck to the shoe of a child or an aged man to check identity fast in an accident and to input and output information.
Patent KR-20030077085-A (KR)
Inventor: JANG HAENG SU
IPC: F23D14/32
Filed: 2002-03-25
Abstract: PURPOSE: A gas burner is provided to improve combustion efficiency by having double mixing structure of air and fuel gas. CONSTITUTION: A burner casing(10) includes a first and a second air supply port(11a,13a), a first and a second reduced unit(11b,14a) reduced in inner diameter, and a first and a second mixing chamber(12a,15a), and mixed fuel gas and air. A gas supply tube(40) is coupled with the rear of the burner casing, and has a gas injection unit(50) for injecting fuel gas into the burner casing quickly. A stabilizer(20) is installed at the front of the burner casing, and has a nozzle unit(20a). An ignition plug(30) is installed at one side of the stabilizer, and burns mixed gas in the stabilizer.
Patent KR-20020076132-A (KR)
Inventor: DAIKOKU AKIHIRO
IPC: H02K1/14
Filed: 2002-03-25
Abstract: PURPOSE: To provide a core device which allows enhancement of assembly work. CONSTITUTION: The ends of a plurality of core pieces are coupled with one another to form an annular shape. The core pieces 11 are made by stamping, and have magnetic pole teeth 11a protruded at a substantially right angle in the direction of coupling and coupling portions 11b and 11c formed at either ends thereof. First core members 12 formed by arranging the core pieces in a band shape and second core members 13 formed by arranging the core pieces 11 in a band shape so that the first core members 12 and the second core members 13 are staggered in the direction of coupling are laminated so that the ends of the core pieces 11 adjoining to each other in the direction of lamination are overlapped. The core pieces 11 adjoining to each other in the direction of lamination are bonded together and integrated with each other by extraction caulking, and further the coupling portions 11b and 11c thereof are coupled with each other to annularly form a core 14 with magnetic pole teeth 11a positioned inside. The core is bonded to and integrated with the inner circumferential surface of an annular frame by shrink fit to obtain a core device 16. The core 14 is provided in specified positions in the circumferential direction with a plurality of holes 15 for tightening which penetrate the core pieces 11 in the direction of lamination.
Patent KR-20030077854-A (KR)
Title: Short message transmitting method for mobile communication terminal
Inventor: LEE GA EUN
IPC: H04B1/38
Filed: 2002-03-27
Abstract: PURPOSE: A method for transmitting a short message in a portable communication terminal is provided so that a user writes the short message and conveniently inputs a telephone number of a recipient by using an abbreviated number. CONSTITUTION: If a user inputs an abbreviated number in a standby picture of a portable communication terminal and pushes a message key(S21,S22), the portable communication terminal recognizes the abbreviated number. The portable communication terminal automatically inputs a corresponding number in a receiving number field, and locates a cursor in a contents input field(S23). If the user inputs a short message and pushes a send key, the portable communication terminal transmits the inputted short message to a recipient.
Patent KR-20030084202-A (KR)
IPC: F15B1/00
Filed: 2002-04-25
Abstract: 본 발명은 축압기를 이용한 유압장치의 재생시스템에 관한 것으로서, 보다 상세하게는 부하상승시의 위치에너지를 회수하기 위해 축압기를 이용한 에너지 재생시스템에 관한 것이다. 
     본 발명에 따른 유압장치의 에너지 재생시스템은 동력원에 연결되고 상기 동력원의 구동력을 전달받아 작동유를 가압하는 펌프와 상기 펌프에서 실린더로 출력되는 상기 작동유의 방향을 조절하는 방향제어밸브수단과 상기 작동유를 저장하는 액체저장수단내에 위치하고 상기 실린더의 다른 일단에 연결되어 작동유의 압력을 저장하는 축압기와 상기 축압기의 하류에 설치되어 작동유의 흐름을 제한하는 방향제한수단으로 구성된다. 
     본 발명은  축압기의 장착을 용이하게 하고 작동유의 누설등으로 인한 위험을 제거하여 안전성을 높임으로 대형, 고압의 축압기가 실제 장비에 적용가능하게 되어 실용화를 용이하게 할 수 있다.
Patent KR-20020040716-A (KR)
Inventor: NA YONG GYUN
IPC: F24H7/00
Filed: 2002-04-25
Abstract: PURPOSE: A boiler utilizing infrared material is provided to prevent the air pollution and to save an energy by applying a radiation heat of infrared material into a combustion chamber of a boiler. CONSTITUTION: A boiler includes a burner(3) for injecting and heating fuel. The burner heats infrared material and a heat exchanger(5) so as to generate radiation heat. A combustion chamber(4) is provided in the boiler. Hot water and heating water are stored in the heat exchanger(5). An exhaust port(6) is provided to exhaust gas when the combustion operation of the boiler is carried out. By utilizing infrared material, radiation heat having the high temperature is generated, so that the combustion effect is improved and the energy is saved. In addition, the life span of the boiler is increased.
Patent KR-20030085431-A (KR)
Title: 3-D Dip
Inventor: CHOI YUN SEOK
IPC: A63B23/02
Filed: 2002-04-30
Abstract: PURPOSE: A tool for three dimensional anaerobic exercise of the lower chest is provided to safely and diversely exercise the lower chest and maximize the growth of muscle of the lower chest by using various resistant systems. CONSTITUTION: The tool for three dimensional anaerobic exercise of the lower chest exercises the lower chest along the three-dimensionally twisted movement caused by angular movement of a handle(3) using the distance between a handle link(1) and a sub link(2). The handle link(1) is disposed at both sides of the upper part of a base frame. The sub link(2) is fixed onto the base frame at a distance from the handle link(1) by a ball joint(6). Over the handle link, a handle side lever of L-shape having a plurality of handles is disposed. A tangent line at the center of the three-dimensionally twisted movement caused by the angular movement of the handle(3) forms 60 to 120 degrees to a support pad.
Patent KR-20030090096-A (KR)
Title: Cooling Device for CRT Flat Panel Forming Apparatus
Inventor: CHOI SEONG YUL
IPC: H01J9/24
Filed: 2002-05-21
Abstract: PURPOSE: A cooling device of a molding apparatus for flat panel of a cathode ray tube is provided to prevent the deformation of a cooled and molded product and improve the quality of the productivity of the product by using a distribution plate and an inflow tube. CONSTITUTION: A cooling device of a molding apparatus for flat panel of a cathode ray tube includes a distribution plate(37) and an inflow tube(23). The distribution plate(37) is formed at a predetermined position apart from circumferences of a front molding portion(17) and a skirt molding portion(19). The distribution plate(37) is parallel to the front molding portion(17). A through-hole(39) is formed at a center region of the distribution plate(37) to distribute the cooled air to the inside or the outside. A plurality of fillet portions are formed at each edge of the distribution plate(37). The inflow tube(23) is connected to the through-hole(39) of the distribution plate(37) in order to receive and guide the cooled air.
Patent KR-20030095010-A (KR)
Title: Driving balance auto control device of reclaimer for bucket out blending
Inventor: JUNG YANG GI
IPC: B65G65/20
Filed: 2002-06-11
Abstract: PURPOSE: An automatic driving balance controller of a reclaimer is provided to prevent the distortion of the distance between driving rails, thereby preventing driving wheels from escaping from the driving rails. CONSTITUTION: An automatic driving balance controller of a reclaimer is composed of a symmetric rail guide(9) installed along driving rails with spacing to a driving main beam(3), a detecting bar(8) rotatably fixed on the symmetric rail guide, a steady state detecting plate, high and low speed limiting plates at the end of the detecting bar, an unbalance detecting unit, an unbalance sensor unit, and a pair of elastic bodies for centering the detecting bar. The unbalance sensor unit has a plurality of sensors to detect the unbalance of the driving main beam.
Patent KR-20030096471-A (KR)
Title: Sputtering plants
Inventor: LEE SEUNG GWANG
IPC: H01L21/203
Filed: 2002-06-12
Abstract: PURPOSE: Sputtering equipment is provided to be capable of preventing the generation of useless deposition at an electrostatic chuck by coating carbon at the lateral portion of the electrostatic chuck. CONSTITUTION: Sputtering equipment is provided with a process chamber(1), a target(10) installed at the inner portion of the process chamber, an electrostatic chuck(20) installed opposite to the target for loading a wafer(W), a deposition ring(30) installed at the edge portion of the electrostatic chuck when fixing the electrostatic chuck, and a dark space shield part(41) installed at both inner sides of the process chamber. The sputtering equipment further includes a carbon coating layer(c) formed at the lateral portion of the electrostatic chuck between the deposition ring and the electrostatic chuck. At this time, the carbon coating layer has a low friction coefficient and a high intensity.