Patent SG-11201806199Y-A (SG)
Title: Gyroscope devices and methods for fabricating gyroscope devices
Inventor: WU GUOQIANG
IPC: G01C19/5733
Filed: 2017-01-24
Abstract: NM; 413 452 400C 405 __d= 45 452 406 302 4 10 FIG. 4C W O 20 17 / 135 89 1 Al (12) INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property Organization International Bureau (10) International Publication Number (43) International Publication Date WO 2017/135891 Al 10 August 2017 (10.08.2017) WIPO I PCT 1111111111111101110111111111110101111101111111101111111111011111 011111111111110111111 (51) International Patent Classification: GO1C 1 9 / 5 733 (2012.01) GO1C 19/56 (2012.01) (21) International Application Number: PCT/SG2017/050036 (22) International Filing Date: 24 January 2017 (24.01.2017) (25) Filing Language: English (26) Publication Language: English (30) Priority Data: 10201600758W 1 February 2016 (01.02.2016) SG (71) Applicant: AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH [SG/SG]; 1 Fusionopolis Way, #20-10 Connexis, Singapore 138632 (SG). (72) Inventors: WU, Guoqiang; c/o Industry Development, In- stitute of Microelectronics, 2 Fusionopolis Way, #08-02 Innovis Tower, Singapore 138634 (SG). FERNANDO, Sanchitha Nirodha; c/o Industry Development, Institute of Microelectronics, 2 Fusionopolis Way, #08-02 Innovis Tower, Singapore 138634 (SG). GU, Alex Yuandong; c/o Industry Development, Institute of Microelectronics, 2 Fu- sionopolis Way, #08-02 Innovis Tower, Singapore 138634 (SG). CHUA, Geng Li; c/o Industry Development, Insti- tute of Microelectronics, 2 Fusionopolis Way, #08-02 In- novis Tower, Singapore 138634 (SG). (74) Agent: VIERING, JENTSCHURA & PARTNER LLP; P.O. Box 1088, Rochor Post Office, Rochor Road, Singa- pore 911833 (SG). (81) Designated States (unless otherwise indicated, for every kind of national protection available): AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (84) Designated States (unless otherwise indicated, for every kind of regional protection available): ARIPO (BW, GH, [Continued on next page] (54) Title: GYROSCOPE DEVICES AND METHODS FOR FABRICATING GYROSCOPE DEVICES (57) : According to various embodiments, there is provided a gyroscope device including: an outer frame; and four cells arranged within the outer frame, each cell of the four cells including: a proof mass arranged at least substan- tially in a centre region of the cell; and four electrode frames, 450 each electrode frame of the four electrode frames arranged at a corner region of the cell and coupled to a respective side of 412 the proof mass. WO 2017/135891 Al MIDEDIMOMOIDEIR0101301110MMEIHNOVOIMIE GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG). Published: — with international search report (Art. 21(3))