Patent SG-11201407211V-A (SG)
Title: Wafer container with door interface seal
Inventor: GREGERSON BARRY
IPC: H01L21/673
Filed: 2013-05-06
Abstract: (12) INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property Organization International Bureau (43) International Publication Date 7 November 2013 (07.11.2013) WIPOIPCT (10) International Publication Number WO 2013/166514 A1 (51) International Patent Classification: H01L 21/673 (2006.01) (21) International Application Number: (22) International Filing Date: (25) Filing Language: (26) Publication Language: PCT/US2013/039768 6 May 2013 (06.05.2013) English English (30) Priority Data: 61/642,922 4 May 2012 (04.05.2012) US (71) Applicant: ENTEGRIS, INC. [US/US]; 129 Concord Road, Billerica, MA 01821 (US). (72) Inventors: GREGERSON, Barry; 19550 Excelsior Boulevard, Deephaven, MN 55113 (US). FULLER, Mat­ thew, A.; 1731 North Nevada Avenue, Colorado Springs, CO 80907 (US). (74) Agents: CHRISTEN SEN, Douglas, J. et al.; Christensen Fonder P.A., 33 South Sixth Street, Suite 3940, Min­ neapolis, MN 55402 (US). (81) Designated States (unless otherwise indicated, for every kind of national protection available)'. AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (84) Designated States (unless otherwise indicated, for every kind of regional protection available)'. ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG). Published: — with international search report (Art. 21(3)) •rt i-H i-H cn i-H o CJ o & (54) Title: WAFER CONTAINER WITH DOOR INTERFACE SEAL (57) Abstract: The present invention ad­ dresses the need of the industry for a better performing and longer lasting seal struc­ ture for a wafer container by providing an elastomeric seal that has enhanced sealing capabilities with respect separating the in­ terior and exterior of the container, en­ hanced retention of the seal in the groove characteristics, and enhanced sealing of the groove by the seal to preclude leakage through the seal groove engagement and to minimize or eliminate water from entering the groove during washing. The wafer con­ tainer may be a front opening wafer con­ tainer comprising container portion a and a door, one of the container portion and the door having a radially installed seal with a plurality of opposing lateral projections that deflect from a normal position in a dir­ ection away from an install direction when the seal is installed in a groove, the lateral projections resisting removal of the seal after the seal is seated in the groove. A core portion and a canti levered finger member engages the other of the door and container portion when the door is seated in the container portion. Other lateral projections on the seal effectively seal the path between the seal and groove surfaces.