baber/WOPTO huggingface dataset:
Patent KR-20220033301-A (KR)
Title: Camera Module
Inventor: SHIN JUN SUP
IPC: G03B5/00
Filed: 2020-09-09
Abstract: According to an embodiment of the present invention, a camera module includes: a housing; a lens barrel disposed in the housing; a driving unit including a driving magnet and a driving coil and configured to drive the lens barrel in an optical axis direction; a position restoration member disposed to face the driving magnet and configured to limit movement displacement of the lens barrel in the optical axis direction. The present invention provides the camera module configured to minimize movement of the lens barrel due to an external impact.
Patent KR-20210037557-A (KR)
Title: Safe device for food input and apparatus for food preparation comprising such a device
Inventor: RAGOT DIDIER
IPC: A23N1/02
Filed: 2020-09-22
Abstract: The present invention relates to a food inserting device (1) for a device (100) including an operation zone (106) for receiving a rotation tool (102). The food inserting device (1) comprises a food inserting groove container (4) including a first opening (9) and a first conduit (13) allowing the passage of food from the first opening (9) to the operation zone (106). A first valve (15) is mounted for translation between a first position for closing the first opening (9) and a second position for releasing the first opening (9). The second valve (16) is mounted to pivot between a first position for releasing the first conduit (9) and a second position for closing the first conduit (9). At least one transmission device (17a) is arranged between the first valve (15) and the second valve (16). Translation of the first valve (15) from the first position to the second position causes a pivoting movement of the second valve (16) from the first position to the second position, and vice versa, a pivoting movement from the second position to the first position is caused.
Patent KR-20220039378-A (KR)
Inventor: KIM JUNG NAM
IPC: A61H33/06
Filed: 2020-09-22
Abstract: As a hot water mat formed by connecting three unit mats to be foldable to form a triangular prism-shaped sauna mat by folding a folding line to a boundary, the present invention relates to a foldable hot water sauna mat capable of preventing a heat concentration phenomenon during heating by disposing hot water pipes arranged in a form of a symmetrical square wave or a rounded symmetrical square wave having different pitches inside of each unit mats.
Patent KR-20220040316-A (KR)
Inventor: KIM YONG GAP
IPC: A61B17/06
Filed: 2020-09-23
Abstract: The present invention relates to an elastic thread for plastic surgery with excellent elasticity, which comprises: a crossing part having spiral twists made up of two strands of the thread within at regular intervals; a disused region formed by the separation of the thread; and a sharp protrusion attached to the crossing part. The surgical elastic thread is elongated and made up of a plurality of crossing parts, disused regions, and sharp protrusions. It is possible to naturally lift a sagging skin to a desired direction by having a large area that is in contact with the skin and excellent elasticity, and also possible to move by being interlocked with a tissue due to structural elasticity of the thread. The present invention has advantages for maximizing a lifting effect by which the protrusions provided vertically on the crossing part of the thread are tightly fastened to a skin tissue.
Patent KR-20220042549-A (KR)
Inventor: KANG KYUNG WAN
IPC: H05K13/04
Filed: 2020-09-28
Abstract: The present invention relates to a power control device for a component mounting apparatus, which comprises: at least one line in which equipment for component mounting is configured; a power control module which controls the power of the equipment; a line power controller which applies the power of each line to be turned on/off through at least a first method with the power control module, or receives an on/off state of the power control module; and a remote control module which controls the power of the line and power controller through Ethernet. In addition, the power control device for a component mounting apparatus as described above can be implemented in various ways according to embodiments.
Patent KR-20220046286-A (KR)
Inventor: KANG SHIN GUN
IPC: H01M50/30
Filed: 2020-10-07
Abstract: The present invention relates to a secondary battery capable of improving safety. According to one embodiment, disclosed is a secondary battery including: an electrode assembly; a case for accommodating the electrode assembly; an electrode terminal electrically connected to the electrode assembly and protruding from the outside of the case; a groove formed in the electrode terminal; and an adhesive member applied to the groove.
Patent KR-20220046387-A (KR)
Title: One-step synthesized method of black oxide particle
Inventor: YOUNGIN LEE
IPC: C01G25/02
Filed: 2020-10-07
Abstract: The present invention relates to a method for preparing black oxide particles, and particularly, to a method for preparing black oxide particles through a unified process. The unified method for preparing black oxide particles according to the present invention includes the steps of: adding a precursor containing a metal ion to a solvent to prepare a precursor solution; forming the precursor solution into droplets by using ultrasonic waves; spraying the droplet-state precursor solution into a furnace by using a carrier gas; and pyrolyzing and oxidizing the droplets inside of the furnace.
Patent KR-20220046948-A (KR)
Inventor: LEE YOUNG MIN
IPC: G06F13/16
Filed: 2020-10-08
Abstract: The technical problem to be solved by the present invention is to provide a storage controller connected to a host device by reflecting an internal state of a memory device. Provided are a storage controller and a storage system thereof. The storage controller connected between the host device and a plurality of storage devices comprises: a resource management IP that returns a query response including a resource descriptor according to a query request received from the host device. The storage controller is connected with the host device according to link attribute reset based on the resource descriptor. In the reset link attribute, the connection between transmission path domain and reception path domain is established independently.
Patent KR-20220047023-A (KR)
Inventor: LEE JONG HYUK
IPC: H01M4/62
Filed: 2020-10-08
Abstract: According to embodiments of the present invention, provided is a negative electrode active material for a lithium secondary battery including carbon-based particles and a coating layer bonded to at least a part of the surface of the carbon-based particles, wherein the coating layer includes boron and a conductive material. Due to the coating layer, an electrolyte decomposition reaction is suppressed, and the capacity and cycle life of a battery can be improved.
Patent KR-20220055250-A (KR)
Title: A motion recognition-based manless parcel delivery system and control method thereof
Inventor: WOO SEONG CHEOL
IPC: G06Q50/28
Filed: 2020-10-26
Abstract: Provided are a motion recognition-based unmanned parcel service management system and a control method thereof. The motion recognition-based unmanned parcel service management system comprises: a sensing unit that generates recognition information including vision information generated by photographing visitors and parcels and voice information generated by detecting voices of the visitors; and an operation server unit that stores parcel matching information for a recipient who needs to receive a parcel among the visitors, and analyzes the parcel matching information and the recognition information transmitted from the sensing unit. The operation server unit extracts motion information on a motion of a visitor through object information extracted from the vision information and determines a possibility of a parcel being stolen depending on whether the motion information matches the parcel matching information. According to the present invention, a motion of a visitor can be recognized more accurately since the motion is recognized based on vision information obtained by photographing the visitor from different angles and locations.
Patent KR-20220056676-A (KR)
Title: Metamaterial muffler for noise reduction in wide bandfrequencies
Inventor: AN BYUNG HUN
IPC: F02M35/12
Filed: 2020-10-28
Abstract: The present invention is to provide a meta muffler, which can increase the transmission loss of noise flowing inside a flow pipe by maximizing the sound energy loss of noise entering a resonance chamber of a meta structure, and can effectively attenuate broadband noise from a low frequency domain to a high frequency domain. To this end, according to the present invention, the meta muffler comprises: a flow pipe through which a fluid flows; an outer cylinder disposed spaced apart from and outside the flow pipe; and meta structures. Each of the meta structures includes: an opening portion open in parallel to the flow direction of the fluid; the resonance chamber disposed between the flow pipe and the outer cylinder and communicating with the flow pipe via the opening portion; and a neck adjustment member disposed in the flow direction so as to be spaced apart from the opening portion, and extending from the outer cylinder toward the flow pipe. The plurality of meta structures are arranged in the flow direction.
Patent KR-20220057189-A (KR)
Inventor: JUNG SEJIN
IPC: H01L51/00
Filed: 2020-10-29
Abstract: The present specification relates to an organic light emitting device, comprising: an anode; a cathode; and a light emitting layer provided between the anode and the cathode. The organic light emitting device comprises: a first organic material layer including a composition containing a compound of a formula 1 and an ionic compound containing an anionic group of a formula 2 or a cured product thereof between the light emitting layer and the anode; and a second organic material layer including a composition containing a copolymer represented by a chemical formula 3 between the first organic material layer and the light emitting layer or a cured product thereof.
Patent KR-20220059229-A (KR)
Inventor: JUNG HA YUN
IPC: A61Q19/00
Filed: 2020-11-02
Abstract: The present invention relates to a composition for strengthening hair-root and preventing hair-loss, comprising a compound represented by formula 1. More specifically, a compound represented by formula 1 can be advantageously used as a material for strengthening hair-root, preventing hair-loss and ameliorating hair-loss since the compound has remarkable antibacterial activity at a small dose with respect to Malassezia sp., has high bioavailability, has low toxicity, and is easy to produce in volume.
Patent KR-20220060727-A (KR)
Title: Retardation plate and anti-reflection film with the same
Inventor: LEE MANHOAN
IPC: G02B1/08
Filed: 2020-11-05
Abstract: The present invention relates to a retardation plate, which prevents a phenomenon in which a contrast ratio (C/R) is lowered due to reflection by a metallic surface when external light reaches the surface of a display, such as an OLED, on which the metallic material is deposited to improve frontal reflectance characteristics and side (viewing angle) color characteristics, and an antireflection film including the same. According to the present invention, the retardation plate comprises a retardation layer including a mixed liquid crystal composition formed of a plurality of first liquid crystal molecules having normal wavelength dispersion and a plurality of second liquid crystal molecules having reverse wavelength dispersion. The first liquid crystal molecules and the second liquid crystal molecules are arranged in a twisted structure and is configured to satisfy a weight ratio according to A : B = 90 : 10 to 50 : 50, wherein A is total weight of the first liquid crystal molecules, and B is total weight of the second liquid crystal molecules.
Patent KR-20220063959-A (KR)
Title: Antioxidant effect on flavonoids and polyphenols of Ceratopteris thalictroides extract, and cosmetic composition for preventing skin aging, or for preventing or improving skin wrinkles
Inventor: LIM BEONG OU
IPC: A61K8/9789
Filed: 2020-11-11
Abstract: The present invention relates to an antioxidant effect with respect to flavonoids and polyphenols contained in Ceratopteris thalictroides, and a cosmetic composition for the prevention of skin aging, or the prevention or improvement of skin wrinkles. The composition according to the present invention not only has an antioxidant effect, but also promotes collagen production, inhibits elastase activity, and improves wrinkles and elasticity of the skin, so that it can be effectively used as a cosmetic for preventing skin aging and ameliorating skin wrinkles.
Patent KR-20220064174-A (KR)
Title: Pharmaceutical composition with reduced gastrointestinal disorder comprising novel salt of pelubiprofen as an active ingredient
Inventor: OH DONG HO
IPC: A61P29/00
Filed: 2020-11-11
Abstract: A pharmaceutical composition containing pelubiprofen tromethamine salt represented by chemical formula 2 as a main component is provided. The pharmaceutical composition according to the present invention has an effect of reducing a single dose and reducing side effects of gastrointestinal disorders.
Patent KR-20210063238-A (KR)
Title: Ceramic electronic component and method of manufacturing the same
Inventor: KOWASE YUSUKE
IPC: H01G4/12
Filed: 2020-11-16
Abstract: Provided are a ceramic electronic component capable of suppressing the peeling of external electrodes, and a manufacturing method thereof. The ceramic electronic component includes: a multilayer chip having a rectangular parallelepiped shape and including a plurality of dielectric layers mainly composed of ceramic and a plurality of internal electrode layers alternately stacked, wherein the plurality of internal electrode layers, which are stacked, are alternately exposed to two edge faces of the multilayer chip opposite to each other; and the pair of external electrodes, respectively formed on the two edge faces. An average crystal grain size of the ceramic as the main component in a cross section is 200 nm or less in a dielectric portion, and a CV value of a grain size distribution of crystal grains of the ceramic in the cross section is less than 38% in the dielectric portion, wherein the dielectric portion is in contact with one of the pair of external electrodes.
Patent KR-20220060443-A (KR)
Inventor: KANG SUNG ILL
IPC: B05B11/00
Filed: 2020-11-25
Abstract: The present invention relates to a locking device for a content discharge pump and comprises: a container (10) in which contents are stored; a shoulder (20) which is a cylindrical member screwed to an upper opening (11) of the container (10); a housing (30) which is a cylindrical member covering the upper surface of the inlet of the container (10) and inserted into the inner periphery of the inlet; a pump set (40) which pumps the contents of the container (10) while moving up and down along the inner periphery of the housing (30); a push button (50) which is a member coupled to the upper end of a stem (41) of the pump set (40) to discharge the contents to the outside when pressed; and a stopper (60) which is a cylindrical member inserted into the outer periphery of a lower center bar (51) of the push button (50) and the upper inner periphery of the shoulder (20) to control the vertical movement of the stem (41) of the pump set (41) depending on the left and right rotation of the push button (50). The present invention makes the push button not operate in the locked state to prevent the contents from being discharged unnecessarily, and at the same time, makes the push button of the content discharge pump not easily separated from the container by allowing the push button to idle in the closing direction to prevent the leakage of the contents.
Patent KR-20220073221-A (KR)
Inventor: KIM JIN HAE
IPC: H04L65/40
Filed: 2020-11-26
Abstract: 본 발명은 웹 서비스 서버의 하드웨어 자원과 API 서비스 상태를 실시간으로 모니터링하고 장애 발생시 상황이 즉시 통보될 수 있도록 하는 웹 서비스 서버의 모니터링 시스템에 관한 것으로, 관제 대상인 웹 서비스 서버; 및 상기 웹 서비스 서버의 하드웨어 자원과 API 서비스 상태를 실시간 모니터링하여 지정된 관리자 단말로 보고하고, 모니터링 중 하드웨어 자원 혹은 API 서비스에 장애 발생시 지정된 관리자 단말로 장애 발생을 통보하는 모니터링 서버; 를 포함하는 것을 특징으로 한다.
Patent KR-20220074303-A (KR)
Title: 웨이퍼 및 링의 회수 시스템
Inventor: HAN KEE WOONG
IPC: H01L21/67
Filed: 2020-11-27
Abstract: 본 발명의 일 측면에 의한 웨이퍼 및 링의 회수 시스템은, 로딩 스테이션; 필름 부착 링을 로딩 스테이션으로부터 꺼내어 대기 스테이지로 이동시키는 인출 이송 장치; 상기 대기 스테이지로부터 받은 필름 부착 링을 웨이퍼 필름과 링으로 분리하는 분리 장치; 상기 분리 장치에 의해 웨이퍼 필름과 분리된 링을 받아 세척하는 링 세척 장치; 및 상기 분리 장치에 의해 링과 분리된 웨이퍼 필름을 필름 수거 스테이지로 이송하는 필름 이송 장치;를 포함한다.
Patent KR-20220079764-A (KR)
Inventor: LEE SUNG KOO
IPC: C09D11/03
Filed: 2020-12-04
Abstract: 본 발명은 유기전기소자의 제1전극과 제2전극 사이에 배치되는 유기박막을 형성하기 위한 유기화합물로서, 그 말단에 적어도 하나 이상의 벤조시클로부텐기(benzocyclobutene)를 포함하는 것을 특징으로 한다.
Patent KR-20220080604-A (KR)
Title: 고소작업용 합벽지지대 설치장치
Inventor: LEE HO GEUN
IPC: E04G17/14
Filed: 2020-12-07
Abstract: 본 발명은 고소작업용 합벽지지대 설치장치에 관한 것으로서, 더욱 상세하게는, 고소 위치에 합벽지지대를 간편하고 안전하게 설치하여 사용할 수 있도록 함으로써 전고가 높은 합벽을 안전하고 신속하게 시공할 수 있는 고소작업용 합벽지지대 설치장치에 관한 것이다. 
본 발명에 따른 고소작업용 합벽지지대 설치장치는 합벽지지대가 올려져 설치되는 고소작업용 합벽지지대 설치장치에 있어서, 합벽부 외면에 안착되는 종부재; 상기 종부재의 상부에 형성되는 지지대고정부재; 상기 지지대고정부재를 상기 합벽부에 고정시키는 앵커부재; 상기 합벽지지대가 올려지도록 상기 지지대고정부재에 일단이 접속되는 횡부재; 및 상기 종부재와 상기 횡부재 사이에 형성되는 보강부재;를 포함하는 것을 특징으로 한다.
Patent KR-20220083013-A (KR)
Title: 낮은 점도성을 포함한 카본 블랙
Inventor: KIM JAE CHIL
IPC: C09C1/48
Filed: 2020-12-11
Abstract: 본 발명은, 예를 들어 압착 오일 흡수가 대 비압착 오일 흡수가 비율이 비교적 높은 것으로 입증된 바와 같이, 압착 상태에서 양호한 그의 구조를 보유하는 것을 특징으로 하는 신규 카본 블랙 물질에 관한 것이다. 이 물질은 특히 분산 상태에서 점도가 낮고 전기 저항이 낮은 것을 특징으로 할 수 있다. 이러한 물질은 다양한 응용예, 예를 들어 리튬 이온 전지와 같은 전기화학적 셀의 제조 또는 중합체 복합 물질에서 전도성 첨가제로서 유리하게 사용될 수 있다. 본 개시는 또한 이러한 물질을 제조하기 위한 절차뿐만 아니라 상기 카본 블랙 물질을 포함하는 하위 용도 및 제품을 기술한다.
Patent KR-20220083025-A (KR)
Title: 전지 셀의 충방전 장치 및 이를 이용한 전지 셀의 충방전 방법
Inventor: HONG SUK HYUN
IPC: G01R31/385
Filed: 2020-12-11
Abstract: 본 발명은 전지 셀의 활성화 공정에서 전지 셀의 바디와 가스 포켓 사이 영역의 부품 현상을 억제할 수 있는 전지 셀의 충방전 장치 및 이를 이용한 전지 셀의 충방전 방법에 관한 것이다.
Patent KR-20220088167-A (KR)
Inventor: KIM JU PYOUNG
IPC: F23R3/14
Filed: 2020-12-18
Abstract: 본 발명의 일 측면에 따르면, 외부 관상 부재와, 상기 외부 관상 부재의 안쪽에 배치되어 상기 외부 관상 부재의 내면과 함께 액체 연료 통로를 형성하는 내부 관상 부재와, 상기 외부 관상 부재의 내면과 상기 내부 관상 부재의 외면 사이에 배치되어 상기 액체 연료 통로에 흐르는 액체 연료의 흐름을 분산시키는 유동 분산부를 포함하고, 상기 유동 분산부는, 상기 액체 연료의 흐름의 방향에 따라 서로 떨어져 배치되는 적어도 2개의 분산 벽부를 포함하고, 상기 각각의 분산 벽부는, 상기 내부 관상 부재의 둘레를 따라 서로 떨어져 배치되는 복수개의 개별 벽부들을 포함하고, 상기 분산 벽부들 중 어느 하나의 분산 벽부를 이루는 개별 벽부들의 사이의 공간에, 상기 어느 하나의 분산 벽부에 이웃하는 분산 벽부의 개별 벽부들이 대응하도록 배치되는 연료 공급 장치를 제공한다.
Patent KR-20220089528-A (KR)
Inventor: SUNG MIN KYUNG
IPC: C12N9/10
Filed: 2020-12-21
Abstract: 3-히드록시프로피온산(3-HP)의 생산을 향상시킨 미생물 및 이를 이용한 3-HP 생산 방법에 관한 것이다.
Patent KR-20220091695-A (KR)
Title: Novel starter of Lactobacillus reuteri EFEL6901 with probiotic activity
Inventor: HAN NAM SOO
IPC: C12N1/20
Filed: 2020-12-23
Abstract: The present invention relates to Lactobacillus reuteri EFEL6901 (KACC 81105BP) which showed suitability as a fermentation starter and excellent probiotics properties. The strain of the present invention can grow in the Kimchi environment and low temperature (15 ℃), produces an appropriate amount of acid, and was suitable as a fermentation starter by having the characteristic of producing abundant aroma components and metabolites similar to Le. mesenteroides DRC1506, which is a natural fermentation and commercial Kimchi starter. In addition, acid bile resistance and intestinal adhesion are excellent, and as antioxidant activity and anti-inflammatory activity are high, the strain of the present invention has probiotic properties and has been shown to have excellent anti-inflammatory activity in an animal model with induced colitis. In addition, the strain of the present invention does not have a biogenic amine gene and is safe for use in food fermentation because the strain does not have hemolytic properties. In conclusion, Lactobacillus reuteri EFEL6901 is suitable as a fermentation strain for vegetables, fruits, grains, and the like, and can be used as a healthy functional probiotic starter with anti-inflammatory activity.
Patent KR-20220093909-A (KR)
Inventor: LIM JONG MIN
IPC: B05D3/02
Filed: 2020-12-28
Abstract: The present invention relates to a coating device having a hot insulation unit and a coating method, which comprises: a water drying unit (100) kept at a predetermined temperature in order to dry moisture of a workpiece (P); a coating unit (300) disposed at a rear side of the water drying unit (100) to coat the dried workpiece (P); a drying unit (400) kept at a predetermined temperature in order to dry and cure a paint coated on the workpiece (P); and a main transfer rail (500) having a type of a closed loop for transferring the workpiece (P), wherein a hot insulation unit (200) is further interposed between the water drying unit (100) and the coating unit (300) to minimize cooling of the workpiece (P) heated to the predetermined temperature. Accordingly, heat loss which can occur in a transfer process of the workpiece can be minimized to improve process efficiency.
Patent KR-20220009311-A (KR)
Title: Fan rod installation structure and air conditioner guide fan
Inventor: LU JIAN (FRANK)
IPC: F04D25/08
Filed: 2020-12-31
Abstract: Disclosed is a fan rod installation structure which comprises: a fixing base where an installation hole is provided to an outer circumference; and a fan rod, of which one end is installed in the installation hole to be connected to the fixing base. The installation hole is installed in the outer circumference of the fixing base, and one end of the fan rod is inserted into the installation hole to be buckle-connected to the fixing base, thereby rapidly connecting the fan rod and the fixing base. Moreover, the present invention does not need any tool in an installation process and does not need to be fixated by a component such as a screw to facilitate and rapidly perform installation work to reduce a level of installation difficulty and improve installation efficiency to save human and material cost.
Patent KR-20210102832-A (KR)
Title: Image text broadcasting method and device, electronic circuit and storage medium
Inventor: Feng Xuanyang
IPC: G10L15/26
Filed: 2020-12-31
Abstract: Provided are an image text broadcasting method, a device, an electronic circuit, and a storage medium thereof. The image text broadcasting method comprises the following steps of: receiving a designated broadcast instruction; determining a current broadcast progress status regarding broadcast data in response to the designated broadcast instruction; and acquiring the next broadcast data from a first text according to the current broadcast progress status and the designated broadcast instruction - the first text is composed of text data stored by identifying text in the text area of an image.
Patent KR-20200041311-A (KR)
Title: 면역원성 조성물
Inventor: AMBROSINO DONNA
IPC: A61P31/04
Filed: 2018-06-22
Abstract: 병원 내 감염의 예방 및/또는 치료를 위한 기술.
Patent KR-20200032103-A (KR)
Title: 실크-히알루론산 기초 조직 충전제 및 이를 사용하는 방법
Inventor: ALTMAN GREGORY H
IPC: A61L27/20
Filed: 2018-06-26
Abstract: 히알루론산 및 실크 단백질 단편 기초 조직 충전제 및 이를 사용하는 방법이 여기서 제공된다.
Patent KR-20200054944-A (KR)
Title: 올레핀류 중합용 촉매, 올레핀류 중합용 촉매의 제조 방법, 올레핀류 중합체의 제조 방법 및 프로필렌-α-올레핀 공중합체
Inventor: HOSAKA MOTOKI
IPC: C08F210/06
Filed: 2018-08-10
Abstract: α-올레핀류의 중합시에, 중합 활성 지속성이 우수하고, 입체 규칙성 및 MFR이 높고, 성형성이 양호한 α-올레핀 (공)중합체를 바람직하게 제조할 수 있는 올레핀류 중합용 촉매를 제공한다. 마그네슘, 티탄, 할로겐 및 내부 전자 공여성 화합물을 함유하는 고체 촉매 성분, 유기 알루미늄 화합물, 각각 일반식 (I) 및 일반식 (II)로 표시되는 특정 구조를 갖는 2종류의 알콕시실란 화합물로 이루어지는 외부 전자 공여성 화합물을 포함하고, 양 외부 전자 공여성 화합물의 합계량에 대해, 일반식 (I)로 표시되는 외부 전자 공여성 화합물을 51∼99몰％, 일반식 (II)로 표시되는 외부 전자 공여성 화합물을 1∼49몰％ 포함하는 것을 특징으로 하는 올레핀류 중합용 촉매이다.
Patent KR-20200030110-A (KR)
Title: 탄소 화합물들의 증착 또는 처리를 위한 마이크로파 반응기
Inventor: LIANG QIWEI
IPC: H01J37/32
Filed: 2018-08-08
Abstract: 워크피스를 프로세싱하기 위한 플라즈마 반응기는 유전체 윈도우를 갖는 챔버, 챔버에 워크피스를 유지하기 위한 워크피스 지지부, 마이크로파 소스에 커플링되도록 구성된 고정 스테이지 및 회전 축을 갖는 회전가능 스테이지를 포함하는 회전식 커플링, 챔버의 유전체 윈도우 위에 놓인 마이크로파 안테나, 마이크로파 안테나를 회전시키기 위한 회전식 액추에이터, 및 워크피스 지지부를 둘러싸는 가스 분배 링을 포함하는 프로세스 가스 분배기를 포함한다.  마이크로파 안테나는 회전가능 스테이지에 커플링된 적어도 하나의 도관을 포함한다.  가스 분배 링은 챔버로부터 원형 도관을 분리하는 원통형 챔버 라이너 및 도관을 챔버에 연결하도록 라이너를 통해 반경방향으로 연장되는 복수의 애퍼처들을 포함한다.