baber/WOPTO huggingface dataset:
Patent TW-202143224-A (TW)
Inventor: TAGAMI MASAYOSHI
IPC: H01L27/11524
Filed: 2018-09-17
Abstract: According to one embodiment, a semiconductor memory device includes a first memory chip, a circuit chip, and an external connection electrode on a surface of the first memory chip. The first memory chip comprises first conductors stacked via an insulator, and a first pillar passing the first conductors. The circuit chip comprises a substrate, a control circuit, and a second conductor connected to the control circuit, the circuit chip being attached to the first memory chip. The external connection electrode comprises a portion extending from a side of the surface of the first memory chip through the first memory chip and connected to the second conductor. Part of the first conductors is between the external connection electrode and the substrate.
Patent TW-202208816-A (TW)
Title: Tactile sensor
Inventor: NABETO MISATO
IPC: G01L1/14
Filed: 2021-08-03
Abstract: A tactile sensor includes an electrostatic capacitance sensor unit that has a laminated structure in which a first electrode layer, an elastic layer, and a second electrode layer are laminated. The first electrode layer includes plural first electrodes, and the second electrode layer is configured by a single layer of one or plural second electrodes. Two or more of the plural first electrodes are partially overlapping electrodes that partially overlap with the one or plural second electrodes as viewed in a normal direction of a contact surface of the sensor unit, and a number of one or plural openings formed on one second electrode, or a number of one or plural insular parts formed by the one or plural second electrodes, is less than a number of the plural first electrodes.
Patent TW-202219255-A (TW)
Title: Liquid-crystal composition, method for producing liquid-crystal display element, and liquid-crystal display element
Inventor: MIYAKE KAZUTOSHI
IPC: C09K19/38
Filed: 2021-08-06
Abstract: A method for producing a liquid-crystal display element, the method including a step in which a liquid-crystal composition comprising a liquid crystal and a radial-polymerizable compound represented by formula (A) is brought into contact with a radical-generating film and the radical-polymerizable compound is polymerized while maintaining the contact. (In formula (A), M represents a radical-polymerizable group, R1 to R3 each independently represent a single bond or an alkylene group having 1-6 carbon atoms and optionally having a linking group inserted thereinto, Ar represents an optionally substituted aromatic hydrocarbon group, X1 and X2 each independently represent a hydrogen atom or an optionally substituted aromatic hydrocarbon group, and the R1X1 and R2X2 moieties and the carbon atom bonded to the R1X1 and R2X2 moieties may have together formed a ring, with the proviso that the total number of carbon atoms of R1X1, R2X2, and R3 is 1 or larger.).
Patent TW-202214054-A (TW)
Inventor: AN SEUNG-BAE
IPC: H05K1/02
Filed: 2021-08-12
Abstract: The present invention relates to a flexible printed circuit board and a method for manufacturing the same. The flexible printed circuit board of the present invention may include a base film layer; a conductive pattern layer formed on the upper side of the base film layer; an upper film layer formed on the upper side of the conductive pattern layer; and a protective layer formed on the lower side of the base film layer. At least one end of the flexible circuit board is formed with a plurality of protrusions formed by bending the base film layer and the conductive pattern layer at a certain interval; the plurality of protrusions include: a first protruding part, which is used directly in the test process; and at least one second protruding part, which is provided on the rear side of the first protruding part, and is used after removing the first protruding part when the first protruding part is used up and exhausted.
Patent TW-202312887-A (TW)
Inventor: CHEN LI-LI
IPC: A23K10/16
Filed: 2021-09-29
Abstract: 一種蠅蛆載體飼料之製造方法包含：於一細菌以一細菌分泌系統形成細菌表達至少一重組蛋白，以便形成一具重組蛋白之細菌；將該具重組蛋白之細菌投放餵食一蠅蛆，以便該蠅蛆攝食該具重組蛋白之細菌；在該蠅蛆攝食該具重組蛋白之細菌後形成一具重組蛋白之載體；及將該具重組蛋白之載體製成一具重組蛋白之飼料或一營養補充劑。
Patent TW-202249450-A (TW)
Inventor: CHAN YUAN-CHEN
IPC: H04L1/00
Filed: 2021-10-27
Abstract: 本發明提供一種用於在單向傳輸中報告受損狀態的通訊系統及通訊方法。通訊方法包含：藉由第一埠接收封包；將錯誤檢查電路耦接至第一埠，其中錯誤檢查電路檢查封包的標頭；將第一單向耦合器耦接至第一埠及錯誤檢查電路，且將第二單向耦合器耦接至第一埠及錯誤檢查電路；回應於錯誤位於標頭中，藉由錯誤檢查電路關閉第一單向耦合器及資料檢測電路且開啟第二單向耦合器；藉由接收伺服器自通訊裝置接收封包；以及回應於藉由接收伺服器判定所接收的封包不完整，藉由接收伺服器輸出受損狀態。
Patent TW-202320398-A (TW)
Inventor: WU JUI-HSUAN
IPC: H01M50/409
Filed: 2021-11-10
Abstract: 一種應用於鋁電池的正極與負極之間的鋁電池隔離膜包括高分子材料層，其中鋁電池的正極與負極之間包括電解液。高分子材料層包括一種或一種以上的高分子材質，且鋁電池隔離膜不包括玻璃纖維材質。
Patent TW-202225140-A (TW)
Title: Compositions comprising alkylated diphenylamines with improved properties
Inventor: DONG JUN
IPC: C08K5/18
Filed: 2021-11-16
Abstract: The present invention relates to a composition comprising alkylated diphenylamines of the structural formulas (I), (II), (III) and (IV): wherein R is a branched C4-C16-alkyl group and wherein the total amount of tetra-alkylated diphenylamines of the structural formula (IV) is in the range from 0.20 to 3.5 wt.-%, based on the total weight of alkylated diphenylamines of the structural formula (I), (II), (III) and (IV) in the composition. The invention also relates to industrial products such as additive blends, engine oils and polymer compositions comprising this mixture of alkylated diphenylamines and to the use of this mixture as an additive such in industrial products such as additive blends, engine oils and polymer compositions.
Patent TW-202226836-A (TW)
Inventor: CHANG YAO-JEN
IPC: H04N19/51
Filed: 2021-11-24
Abstract: 公開了用於重疊區塊運動補償（OBMC）的系統和技術。一種方法可以包括：確定針對視頻資料的當前子區塊啟用OBMC模式；針對與當前子區塊鄰接的相鄰子區塊，確定是否滿足第一條件、第二條件和第三條件，第一條件包括用於預測當前子區塊的所有參考圖片列表用於預測相鄰子區塊；第二條件包括相同的參考圖片用於確定與當前子區塊和相鄰子區塊相關聯的運動向量，以及第三條件包括當前子區塊和相鄰子區塊的運動向量之間的差不超過閾值；以及基於確定啟用OBMC模式並且滿足第一條件、第二條件和第三條件，來確定不將相鄰子區塊的運動資訊用於當前子區塊的運動補償。
Patent TW-202323069-A (TW)
Title: Printing device with document organizing function and document organizing method applied thereto
Inventor: WU KUN-LIN
IPC: B41J13/00
Filed: 2021-12-02
Abstract: The present invention relates to a printing device with a document organizing function and a document organizing method applied thereto. The device has a paper collecting platform, an organizing module, a discharging module and a tray. The method includes the following steps: organizing the multi-page paper on the paper collecting platform by the organizing module; discharging a first part of the paper at a first speed and then discharging a second part of the paper at a second speed by the discharging module, so that the paper are discharged from the paper collecting platform; and opening the organizing module, so that the paper fall to the tray; wherein the first speed is greater than the second speed, a first length of the first part is greater than a second length of the second part, and the first length plus the second length is equal to a platform length of the paper collecting platform.
Patent TW-202326462-A (TW)
Title: 自動載入參數的方法和系統及其服務端伺服器和客戶端伺服器
Inventor: TSAI SHANG-HUA
IPC: G06F16/11
Filed: 2021-12-16
Abstract: 一種自動載入參數的方法和系統及其服務端伺服器和客戶端伺服器，該方法和系統利用可逆式資訊隱藏技術，將需要的各種參數隱藏地夾帶於工程圖中，以產生已加密檔；然後，利用預存的密鑰對該已加密檔解密後，便可取得並自動載入該些參數。藉此，可快速、準確又安全地自動載入參數。
Patent TW-202231925-A (TW)
Title: Method for treating transition metal semiconductor, and reducing agent-containing treatment liquid for transition metal oxide
Inventor: SAITO KOHEI
IPC: C23F1/10
Filed: 2021-12-16
Abstract: The present invention addresses the problem of providing a method for removing a transition metal oxide attached to a transition metal film, and a treatment liquid in a process for manufacturing a semiconductor element. Specifically, provided is a method for treating a transition metal semiconductor, the method comprising a step for removing a transition metal oxide and a step for removing a transition metal, in a semiconductor formation process. Moreover, provided is a reducing agent-containing treatment liquid for a transition metal oxide, wherein the concentration of a reducing agent contained in the reducing agent-containing treatment liquid is 0.01-50 mass%.
Patent TW-202327214-A (TW)
Inventor: YANG CHIEH-FAN
IPC: H02J1/14
Filed: 2021-12-24
Abstract: A power management system and method are provided and suitable for maintaining stable conditions of a power grid. The power management system includes a management unit configured for executing the following steps. A frequency prediction model is executed to obtain a predictive operation frequency within a period of time in the future of the power grid. The frequency prediction model is established based on power data and meteorological data by a machine learning method. After that, an energy unit is charged or discharged to provide power to the power grid or consume power in the power grid. Therefore, automatic frequency control can be achieved in a faster and more economical manner.
Patent TW-202322339-A (TW)
Title: Diode test module for monitoring leakage current and its method thereof
Inventor: YEH CHIH-TING
IPC: H01L23/60
Filed: 2022-01-06
Abstract: A diode test module and method applicable to the diode test module are provided. A substrate having first conductivity type and an epitaxial layer having second conductivity type on the substrate are formed. A well region having first conductivity type is formed in the epitaxial layer. A first and second heavily doped region having second conductivity type are theoretically formed in the well and connected to a first and second I/O terminal, respectively. Isolation trench is formed there in between for electrical isolation. A monitor cell comprising a third and fourth heavily doped region is provided in a current conduction path between the first and second I/O terminal when inputting an operation voltage. By employing the monitor cell, the invention achieves to determine if the well region is missing by measuring whether a leakage current is generated without additional testing equipment and time for conventional capacitance measurements.
Patent TW-202316646-A (TW)
Title: Image sensor
Inventor: TUNG YAO-CHUNG
IPC: H01L27/146
Filed: 2022-01-28
Abstract: An image sensor includes: a plurality of sensing portions; a color filter layer disposed on the sensing portions; and a micro-lens disposed on the color filter layer. The micro-lens includes a positive radius of curvature, and a dish structure including a negative radius of curvature is formed within the micro-lens.
Patent TW-202236687-A (TW)
Inventor: TSAI WU-WEI
IPC: H01L29/786
Filed: 2022-02-17
Abstract: A thin film transistor includes an active layer and at least one gate stack. The active layer may be formed using multiple iterations of a unit layer stack deposition process, which includes an acceptor-type oxide deposition process and a post-transition metal oxide deposition process. A surface of each gate dielectric within the at least one gate stack contacts a surface of a respective layer of the oxide of the acceptor-type element so that leakage current of the active layer may be minimized. A source electrode and a drain electrode may contact an oxide layer providing lower contact resistance such as a layer of the post-transition metal oxide or a zinc oxide layer within the active layer.
Patent TW-202300652-A (TW)
Inventor: NAKATANI TAKESHI
IPC: C12P13/04
Filed: 2022-02-24
Abstract: 本發明能夠廉價且大量地以生合成的方式製造麥角硫因或其相關物質。本發明有關一種麥角硫因或其相關物質的製造方法、及腺苷激酶(Adk)的活性增加且具有生產麥角硫因或其相關物質的能力之微生物，該製造方法包含培養Adk的活性增加的微生物的步驟。
Patent TW-202301488-A (TW)
Title: Substrate processing apparatus and substrate processing method
Inventor: FUKUOKA TETSUO
IPC: H01L21/56
Filed: 2022-03-01
Abstract: The substrate processing apparatus and the substrate processing method can form a processing film with uniform film thickness on the substrate. A substrate processing apparatus for forming a processing film on the surface of a substrate according to the present invention comprises: a spin chuck (21) which serves as a substrate holding unit for holding the substrate to which a pre-drying processing liquid for forming the processing film is applied; and a gas supply unit (40) that supplies a first gas (F1) having a first temperature higher than normal temperature to the peripheral edge of the surface of the substrate held by the substrate holding unit.
Patent TW-202236915-A (TW)
Title: Temporary carrier plate and manufacturing method thereof, and manufacturing method for packaging substrate
Inventor: Chen xian-ming
IPC: H05K3/22
Filed: 2022-03-02
Abstract: A temporary carrier plate according to an embodiment of the present disclosure includes a first carrier core layer, a first copper foil layer on the first carrier core layer, a second carrier core layer on the first copper foil layer, and a second copper foil layer on the second carrier core layer, wherein the first copper foil layer includes physically press-fitted first outer-layer copper foil and first inner-layer copper foil, and the second copper foil layer includes physically press-fitted second outer-layer copper foil and second inner-layer copper foil.
Patent TW-202242327-A (TW)
Inventor: CHA CHANG YUL
IPC: F24F3/14
Filed: 2022-03-25
Abstract: 一種空氣淨化裝置包含經組態以容置一乾燥的材料過濾器的一殼體及耦接至該殼體且經組態以使氣流通過該乾燥的材料過濾器的一風扇。水汽將由該乾燥的材料過濾器自該氣流收集。該水汽將經由熱量或微波能量中的一或多者而自該乾燥的材料過濾器移除。
Patent TW-202241156-A (TW)
Title: Positioning method and apparatus, and storage medium
Inventor: LI HUI
IPC: H04W64/00
Filed: 2022-04-06
Abstract: The present application provides a positioning method and apparatus, and a storage medium. The method comprises: a terminal receives PRSs of a plurality of access network devices, each access network device corresponding to a plurality of PRSs; for each access network device, the terminal determines at least two spatially adjacent target PRS resources from PRS resources of the plurality of PRSs transmitted by the access network device; and the terminal sends measurement results of the target PRS resources to a positioning server, the measurement results of the target PRS resources being used to instruct the positioning server to determine position information of the terminal. Therefore, the terminal reports the measurement results of spatially adjacent PRS resources to the positioning server, so that main lobe information and side lobe information of the PRS resources are fully utilized during positioning, thereby improving the positioning accuracy of the positioning server on the terminal.
Patent TW-202241567-A (TW)
Title: Pulse wave detection device, pulse wave detection method, and pulse wave detection program
Inventor: ZHANG CHAO
IPC: A61B5/0245
Filed: 2022-04-07
Abstract: A contents assessment device (10) is a pulse wave detection device for detecting the pule wave of a player playing a game, and comprises an image acquisition unit (11), a detection region setting unit (12), and a pulse wave detection unit (13). The image acquisition unit (11) acquires an image including the player. The detection region setting unit (12) sets up a detection region that includes the skin of the player included in the image acquired by the image acquisition unit (11). The pulse wave detection unit (13) detects the pulse wave of the player from the detection region set up by the detection region setting unit (12).
Patent TW-202302718-A (TW)
Inventor: PYEON BO-RAM
IPC: B32B7/02
Filed: 2022-04-07
Abstract: 本發明之課題為提供一種光學積層體，其係不會因為與外在因素的接觸而於表面產生凹陷。
 
     
     
       本發明對於上述課題之解決手段為一種光學積層體，其係包含由聚醯亞胺系樹脂膜所構成之基材層、及包含硬化性樹脂的硬化物之功能層，且前述光學積層體之拉伸速度為100mm/分鐘時的降伏應力為100MPa以上。
Patent TW-202311260-A (TW)
Title: Sulfoximine-containing ATR inhibitor compound
Inventor: ZHANG YINSHENG
IPC: A61P35/00
Filed: 2022-05-12
Abstract: A sulfoximine-containing ATR inhibitor compound as represented by formula (I), a preparation method therefor, a pharmaceutical composition containing same, and the use thereof in the treatment of ATR-related or ATR-mediated diseases and/or conditions.
Patent TW-202310233-A (TW)
Title: Substrate supporting tool, substrate processing apparatus, and method for producing semiconductor device
Inventor: TANIGUCHI DAIKI
IPC: H01L23/32
Filed: 2022-05-20
Abstract: The present invention provides a substrate supporting tool which comprises a metal top plate, a metal bottom plate, and a plurality of metal columns that are interposed between the top plate and the bottom plate, wherein a plurality of substrates are supported by at least some of the columns in a multistage manner. With respect to this substrate supporting tool, the top plate and the columns as well as the bottom plate and the columns are respectively positioned by spigot structures, while being affixed to each other by fixing tools in a detachable manner.
Patent TW-202248781-A (TW)
Title: Maintenance scheduling device and maintenance scheduling method
Inventor: Xie shu-xiao
IPC: G05B23/02
Filed: 2022-05-23
Abstract: When performing maintenance of a machine pertaining to required maintenance items for a robot, a machine tool, and a peripheral apparatus, etc., periodic component replacement work and inspection work of another machine is automatically added and an optimal maintenance schedule is established. The present invention is a maintenance scheduling device that: acquires a work time period pertaining to additional work required for inspection other than the maintenance pertaining to the required maintenance items; and when the additional work can be implemented within a remaining work time period obtained by subtracting the work time period for maintenance pertaining to the required maintenance items from the entire work time period set for the maintenance day, establishes a maintenance schedule to which the additional work is added.
Patent TW-202313961-A (TW)
Title: Shewanella bacteria and use thereof
Inventor: SOBUE FUMIAKI
IPC: C12N1/20
Filed: 2022-06-01
Abstract: Shewanella woodyi strain GS001 (accession number NITE BP-03460) or mutant strains thereof. A composition containing shewanella woodyi strain GS001 or mutant strains thereof. A dry powder or extract of shewanella woodyi strain GS001 or mutant strains thereof.
Patent TW-202248458-A (TW)
Title: Roughened copper foil, copper clad laminate, and printed wiring board
Inventor: KATO TSUBASA
IPC: C25D3/38
Filed: 2022-06-02
Abstract: Provided is a roughened copper foil having excellent transmission characteristics and circuit linearity and capable of achieving high peel strength when used in a copper clad laminate or a printed wiring board. This roughened copper foil has a roughened surface on at least one side. The roughened surface has a value Rdc/Rku, which is the ratio of the cut level difference Rdc of the roughness curve to the kurtosis Rku of the roughness curve, of 0.180 [mu]m or less, and has a value of the maximum cross-sectional height Wt of the undulation curve of 2.50 [mu]m or more and 10.00 [mu]m or less. Rku and Wt are values measured in accordance with JIS B0601-2013, and Rdc is a value obtained as the difference in cut level c in the height direction between a load length ratio of 20% and a load length ratio of 80% in accordance with JIS B0601-2013.
Patent TW-202309916-A (TW)
Inventor: KANEKO FUJIMI
IPC: G06F11/16
Filed: 2022-07-13
Abstract: 本發明提供一種半導體儲存裝置，可實現錯誤檢測、糾正的處理時間的縮短。本發明的快閃記憶體（100）具有NAND晶片（200）及ECC晶片（300）。NAND晶片（200）具有可在與ECC晶片（300）之間傳輸資料的、專用的輸入輸出端子（220），ECC晶片（300）具有可在與NAND晶片（200）之間傳輸資料的、專用的輸入輸出端子（320）。在NAND晶片（200）中進行讀出動作時，NAND晶片（200）經由專用的輸入輸出端子（220）將包含同位資料的讀出資料傳輸至ECC晶片（300），ECC晶片（300）基於同位資料進行讀出資料的錯誤檢測、糾正，將糾正資料經由輸入輸出端子（330）傳輸至控制器（400）。
Patent TW-202318921-A (TW)
Title: 用於多頻率、多位準、多狀態脈波之包含rf匹配電路的基板處理系統
Inventor: JAFARIAN-TEHRANI SEYED JAFAR
IPC: H05H1/36
Filed: 2022-08-08
Abstract: 一種連接至電漿處理系統之RF產生器的RF匹配網路，其包含：第一RF匹配電路，其配置係用以接收在第一RF頻率操作之第一RF源的輸出。第二RF匹配電路係配置用以接收在大於第一RF頻率的第二RF頻率下操作之第二RF源的輸出。第二RF匹配電路係包含阻抗轉換電路，其配置係用以在高於共振下操作且用以改變第二RF匹配電路之調諧空間的斜率以降低反射功率。RF輸出節點係與第一RF匹配電路、第二RF匹配電路以及位於電漿處理系統之處理室內的一電極通訊。
Patent TW-202320247-A (TW)
Title: 用於支援更高連接密度的多晶粒（多－晶粒）積體電路（ｉｃ）封裝和相關製造方法
Inventor: POPOVIC DARKO
IPC: H01L23/28
Filed: 2022-08-19
Abstract: 用於支援更高連接密度的多晶粒（多-晶粒）積體電路（IC）封裝，以及相關製造方法。多晶粒IC封裝包括在相應晶粒封裝中提供的分離晶粒，該等晶粒封裝彼此堆疊以節省封裝面積。為了支援信號路由，包括延伸穿過晶粒封裝的貫穿封裝信號路由，每個晶粒封裝包括垂直互連，垂直互連設置在其相應晶粒附近並且耦合到該封裝基板中的相應封裝基板（若提供內插器基板的話亦耦合至內插器基板）。以此方式，作為實例，不需要在多晶粒IC封裝中製造延伸穿過晶粒本身以提供相應晶粒封裝之間的信號路由的穿矽通孔（TSV）。在另一實例中，在堆疊晶粒封裝的相鄰內插器基板之間產生的空間（經由互連凸塊彼此隔開）提供了用於散熱的區域。
Patent TW-202326426-A (TW)
Inventor: DAVIS JEFFREY MARK
IPC: G06F9/44
Filed: 2022-09-26
Abstract: In one embodiment, an operating system of a computing system determines, by an application instance manager of the operating system, that a first instance corresponding to a first application is to be activated according to an instance database managed by the operating system, where the first application includes several application components, including the first instance and a presenter. The application instance manager invokes the first instance and the presenter, the presenter being managed by the first instance. The operating system determines that the presenter is configured to present data obtained by a data provider, the data provider being one of several application components of a second application. The data provider accesses data from a data store and populates a dataset defined by the second application. The presenter of the first application generates a user interface to present the data from the dataset defined by the second application.
Patent TW-202327518-A (TW)
Title: 用於偵測血液泵中之抽吸事件的系統及方法
Inventor: ALWATBAN MOHAMMED
IPC: A61B5/349
Filed: 2022-10-24
Abstract: 用於藉由監測泵馬達電流偵測血液泵中之抽吸事件的系統及方法。基於脈動指數（基於經濾波之泵馬達電流信號計算）與第一預定閾值的比較，或基於所計算之指數（與正規化經帶通濾波之泵馬達電流信號相關聯）與第二預定閾值的比較，偵測泵抽吸事件。亦基於所計算之脈動指數及與正規化經帶通濾波之泵馬達電流信號相關聯的所計算之指數兩者與各別第一及第二預定閾值的比較，偵測抽吸事件。
Patent TW-202320816-A (TW)
Title: Hydrogel
Inventor: YAMAZAKI YOSHIKO
IPC: A61K33/44
Filed: 2022-10-31
Abstract: The purpose of the present invention is to provide a hydrogel containing amorphous carbons. This hydrogel can be used as a hydrogel for eyes. If the hydrogel for eyes takes the form of a contact lens, the amorphous carbons are preferably disposed in an annular shape on the surface, excluding an optical region, and/or inside. If the hydrogel for eyes has an annular shape or a comma shape, the amorphous carbons are preferably disposed uniformly over the entirety of the hydrogel on the surface and/or inside.
Patent TW-202323601-A (TW)
Inventor: KU KAP-RYEOL
IPC: C30B23/00
Filed: 2022-11-03
Abstract: Disclosed is a method of manufacturing a silicon carbide wafer. The method of manufacturing a silicon carbide wafer includes a step of disposing a silicon carbide block in a crucible; a step of sublimating a silicon carbide included in the silicon carbide block to form a silicon carbide ingot; and a step of processing the silicon carbide ingot.
Patent TW-202336524-A (TW)
Inventor: HOUWELING ZOMER SILVESTER
IPC: G03F1/62
Filed: 2022-11-24
Abstract: A method for forming a pellicle for use in a lithographic apparatus is disclosed. The method comprises: providing a porous membrane formed from a first material; applying at least one layer of two-dimensional material to at least one side of the porous membrane; and applying a capping layer to the at least one layer of two-dimensional material on at least one side of the porous membrane such that the at least one layer of two-dimensional material is disposed between the or each capping layer and the porous membrane. The at least one layer of two-dimensional material acts to close the adjacent side of the porous membrane and to form a smoother and flatter exterior surface of the pellicle. Advantageously, this allows the porous membrane to be protected from etching whilst reducing EUV flare, regardless of the material used for the capping layer.