baber/WOPTO huggingface dataset:
Patent KR-20140005952-A (KR)
Inventor: ZHONG WEI
IPC: A01M1/20
Filed: 2012-01-04
Abstract: 모기향 연소 케이스는 수용 공간(10, 20)의 측벽과 함께 접촉하지 않고 수직 방향을 따라 상기 수용 공간(10, 20) 내에 지지되는 모기향을 수용하기 위해 둘러싸인 수용 공간(10, 20)을 구비하는 케이스 몸체를 포함하고, 연기 안내 메커니즘이 연기의 올라가는 방향을 따라 상기 케이스 몸체 상에 제공되고, 입구 포트(11)는 입구 포트(11)의 개방을 조절하기 위해 조절 메커니즘(12)을 구비한다. 연기 안내 메커니즘은 모기향의 연소로부터 발생되는 연기를 케이스 몸체로부터 밖으로 방출시키고 안내하기 위해 케이스 몸체의 수용 공간(10, 20)과 소통된다. 입구 포트(11)는 케이스 몸체의 하부 부분에 제공된다. 연소로부터 발생되는 유효 성분들을 포함하는 연기는 연기 안내 메커니즘을 통해 케이스 몸체로부터 방출되며, 그에 의해 케이스 몸체의 내부 벽 표면 상에 유효 성분들의 응결을 효과적으로 감소시키고 유효 성분들의 기화 효율을 향상시킨다. 모기향의 연소에 대한 속도 및 시간은 입구 포트(11)의 개방을 조절하는 것에 의해 효과적으로 조절될 수 있다.
Patent KR-20140032992-A (KR)
Inventor: HAEGEL HELENE
IPC: A61P35/00
Filed: 2012-02-07
Abstract: 본 발명은 CSF-1R에 대해 특이적인 항체, 상기 항체를 포함하는 조성물, 및 상기 조성물을 사용하는 치료 방법을 제공한다.
Patent KR-20130119485-A (KR)
Inventor: BEJERANO YIGAL
IPC: H04W40/24
Filed: 2012-01-24
Abstract: 기지국이 자신의 셀 내의 모바일 노드들의 집합 중에서 컴팩트 토폴로지 그래프를 유추하는 것을 가능케 하는 방법이 제공되는데, 상기 모바일 노드들은 노드간 통신을 가능케 하는 제 2 무선을 갖는다. 이러한 방법론은 노드 구성원 정보가 대략 100 ㎳ 내에서 수집되고, 추가적인 토폴로지 정보가 Wi-Fi 무선들을 통해 대략 300㎳ 내에서 모든 모바일 노드들로부터 수집되는 것을 보장한다. 조밀한 네트워크들에 있어서, 이러한 시간은 100 ㎳ 내로 감소될 수 있다.
Patent KR-20140009324-A (KR)
Inventor: SUOMINEN ARI
IPC: F01N3/08
Filed: 2012-02-15
Abstract: 본 발명은, 선체 (2) 를 갖고 배기 가스 소스 (4) 를 포함하는 해양 선박 (1) 에서 물 기반 용액으로 배기 가스를 처리하기 위한 스크러버 시스템 (8) 으로서, 제 1 스크러버 유닛 (8.1) 및 제 2 스크러버 유닛 (8.2), 상기 제 1 스크러버 유닛의 배기 가스 입구 (16) 및 상기 제 2 스크러버 유닛의 배기 가스 출구 (26) 및 상기 제 1 스크러버 유닛을 상기 제 2 스크러버 유닛에 연결하는 제 2 도관부 (14), 제 1 스크러빙 매체 순환로 (20) 및 제 2 스크러빙 매체 순환로 (22) 를 포함하는 상기 스크러버 시스템 (8) 에 있어서, 상기 제 1 스크러빙 매체 순환로 (20) 는 상기 해양 선박의 수선 아래 상기 선체 (2) 의 외부에 대한 제 1 연결부를 포함하는 스크러빙 용액 소스를 구비하고, 상기 제 2 스크러빙 매체 순환로 (22) 는 상기 해양 선박 내 담수 소스 (48) 를 포함하는 스크러빙 용액 소스를 구비하는 스크러버 시스템 (8) 에 관한 것이다.     또한 본 발명은 해양 선박의 스크러버 시스템 (8) 에서 배기 가스를 처리하는 방법에 관한 것이다.
Patent KR-20130129473-A (KR)
Inventor: MORI Yasujiro
IPC: G02B5/30
Filed: 2012-03-19
Abstract: 연신성 및 편광 필름의 생산성이 양호한, 하기 식 (I) 및 (II) 를 만족하는 PVA 필름：Δn(MD)Ave - 0.1 × 10 -3  ≤ Δn(TD)Ave ≤ Δn(MD)Ave + 0.25 × 10 -3  (I) Δn(TD)Ave ≤ 2.5 × 10 -3  (II) [식 중, Δn(MD)Ave 는 PVA 필름의 길이 방향의 복굴절률을 필름 두께 방향으로 평균화한 값, Δn(TD)Ave 는 PVA 필름의 폭 방향의 복굴절률을 필름 두께 방향으로 평균화한 값을 나타낸다], 및 (a) 복수의 건조 롤을 구비하는 막제조 장치의 제 1 건조 롤 상에 PVA 함유 막제조 원액을 막상으로 토출시켜 부분 건조시킨 후에 후속의 건조 롤로 순차 건조시켜 제조할 때에, (b) 제 1 건조 롤의 주속 (S 1 ) 에 대한 PVA 막의 휘발 분율이 13 질량％ 가 되었을 때의 건조 롤의 주속 (S T ) 의 비 (S T /S 1 ) 를 0.990 ∼ 1.050 으로 하고, (c) 주속 (S T ) 에 대한 최종 건조 롤의 주속 (S L ) 의 비 (S L /S T ) 를 0.960 ∼ 0.980 으로 하고, (d) 비 (S L /S 1 ) 를 0.970 ∼ 1.010 으로 하는 필름의 제조 방법.
Patent KR-20130122021-A (KR)
Inventor: FAGG RUSSELL JOHN
IPC: H02M3/02
Filed: 2010-03-22
Abstract: 제 1 및 제 2 입력 전압들 간의 차동 입력 전압의 2배인, 제 1 및 제 2 출력 전압들 간의 차동 출력 전압을 생성하기 위한 기술들이 개시된다.  일 양상에서, 구성요소 배전압 회로의 제 1 및 제 2 커패시터들은 충전 위상 동안 차동 입력 전압으로 충전된다.  충전 위상과 시간적으로 중첩하지 않는 출력 위상 동안, 제 1 및 제 2 커패시터들은 차동 출력 전압을 생성하기 위하여 직렬로 적층된다.  제 1 및 제 2 커패시터들은 미리 정의된 공통-모드 출력 전압을 제공하기 위하여 단일 공통-모드 전압에 모두 연결된다.  출력 위상을 연장시키기 위하여 2개 이상의 구성요소 배전압 회로들을 제공하기 위한 추가 기술들이 제시된다.
Patent KR-20140020986-A (KR)
Inventor: SHINTO HISAO
IPC: B29C43/30
Filed: 2012-03-26
Abstract: 적층시트 제조장치(30)는 제1 수지층(3) 및 제2 수지층(4)을 섬유기재(2)의 양면에 접합하여 적층시트(40)를 제조하는 것이다. 이 적층시트 제조장치(30)는 제1 수지층(3)과 섬유기재(2)와 제2 수지층(4)을 이 순서로 겹치게 한 적층체(40')를 사이에 끼우는 시트재(91a), (91b)와, 적층체(40')가 시트재(91a), (91b) 사이에 끼워진 상태에서 시트재(91a), (91b) 사이의 공간을 감압하는 감압수단(8)을 구비하고, 감압수단(8)의 작동에 의해 상기 공간이 감압되었을 때, 적층체(40')를 시트재(91a), (91b)마다 눌러, 제1 수지층(3)과 섬유기재(2)와 제2 수지층(4)을 압착하여, 적층시트(40)를 얻는다.
Patent KR-20140027202-A (KR)
Inventor: BJORNARD ERIK
IPC: C03C17/09
Filed: 2012-03-26
Abstract: 기판 상에 리튬의 균일한 코팅을 제공하는 방법 및 장치가 제공된다. 본 발명의 일특징은, 스퍼터 챔버 내의 지정된 영역에 걸쳐 일정한 양의 반응성 가스를 도입함으로써 스퍼터 공정에서의 금속 또는 리튬의 증착의 균일성 및/또는 속도를 선택적으로 제어하는 방법에 있다. 이 방법은 평면형 타겟 및 회전하는 타겟에 적용할 수 있다.
Patent KR-20140041562-A (KR)
Inventor: YU HSIANG CHIH
IPC: H04R5/033
Filed: 2011-05-31
Abstract: 본 발명에 따른 다중 트랙 세라믹 스피커 이어폰 구조체는 주로 박스와, 상기 박스의 서로 다른 음역에 위치하고 박형화된 세라믹 스피커를 포함한다. 상기 박스는 수용실이 형성되고, 상기 수용실에는 저음 세라믹 스피커가 형성되며, 상기 저음 세라믹 스피커의 가장자리는 탄성부재를 통해 수용실의 내벽에 서스펜드된다. 박스의 내측 가장자리의 상부 및 하부에는 내측으로 돌출되고 적절한 경사각을 가진 지지대가 형성되어, 전, 후 트랙 세라믹 스피커를 상기 받침판에 고정하며, 프론트 커버에는 복수의 관통홀이 형성되어 있다. 상기 부품에 의해 다중 트랙 발성모듈이 조립되며, 2개의 다중 트랙 발성모듈은 각각 이어폰에 조립된다. 저음 세라믹 스피커 및 전, 후 트랙 세라믹 스피커를 통해 오디오 신호를 수신한 후 서로 다른 음역의 사운드를 출력함으로써 이어폰으로 하여금 다중 트랙에 의한 리슨 효과를 이루도록 한다.
Patent KR-20140033442-A (KR)
Inventor: VELA HERNANDEZ JOSE MIGUEL
IPC: A61P25/02
Filed: 2012-05-18
Abstract: 본 발명은, 제 2 형 당뇨병 관련 통증 및 관련 증상의 예방 및/또는 치료를 위한 시그마 리간드 특히, 화학식 I의 시그마 리간드의 이용에 관한 것이다. 
[화학식 I]
Patent KR-20150085633-A (KR)
Inventor: PARK JONG CHUN
IPC: E02B9/02
Filed: 2014-01-16
Abstract: The present invention relates to a spiral type channel to improve generating efficiency of a power generation type breakwater system which improves generating efficiency of a generator installed in a channel of seawater exchange type breakwater, and moreover improves a water purification function. According to the present invention, a power generation type breakwater system comprises: a channel connecting an outside and an inside of a harbor at a seawater exchange type breakwater; and an impeller type generator installed in the channel to produce electric power using the flow of seawater flowing in the channel. The channel is formed to be in a spiral type to induce rotation in the flow of seawater, and in a state wherein the seawater flowing inside the channel is rotated, passing through an impeller of the impeller type generator.
Patent KR-20150085904-A (KR)
Title: 플라즈마 발생 시스템의 가스분사 제어시스템 및 이를 이용한 가스분사 제어방법
Inventor: NAM YOUNG WOOK
IPC: H05H1/34
Filed: 2014-01-17
Abstract: 플라즈마 발생 시스템의 가스분사 제어시스템 및 이를 이용한 제어방법이 개시된다. 유전체창을 지지하는 프레임의 분할 구역 각각에 공급되는 반응 가스 유량을 독립적으로 제어할 수 있기 때문에 반응 가스 분포의 균일성이 향상되는 효과가 있다.
Patent KR-20150086822-A (KR)
Inventor: CHAE MIN YUP
IPC: G09G3/36
Filed: 2014-01-20
Abstract: A display device includes: multiple pixels; a data driving unit which applies data voltage to multiple data lines connected to the multiple pixels; a signal control unit which delivers, to the data driving unit, image data signals and data control signals controlling the operation of the data driving unit; and a data processing unit which detects moving patterns from a first signal, which applies a first DCC with respect to moving pattern regions including the moving patterns, which produces a second image signal by applying a second DCC with respect to the other regions other than the moving pattern regions, and which delivers the second image signal to the signal control unit, wherein in order for the rising time that is required for the brightness change from a lower tone to a higher tone due to the data voltage with the application of the first DCC and the polling time that is required for the brightness change from a higher tone to a lower tone to be same, a higher or lower gradation value is produced, compared to the gradation value that the data voltage wants to display; and with the application of the second DCC, regardless of the rising time and the polling time, a higher or lower gradation value is produced, compared to the gradation value that the data voltage wants to display.
Patent KR-20150087045-A (KR)
Inventor: SON HYO SUK
IPC: C09K11/06
Filed: 2014-01-21
Abstract: The present invention relates to a novel compound having excellent hole injection performance, hole transport performance, and light emitting performance, and to an organic electroluminescent device having improved light emitting efficiency, driving voltage, lifespan, etc. by comprising the novel compound in an organic layer. The organic compound is represented by chemical formula 1 or chemical formula 2.
Patent KR-20150050297-A (KR)
Inventor: LU FANG YEN
IPC: B23Q7/04
Filed: 2014-01-22
Abstract: A bidirectional door-type automatic drawing device according to the present invention comprises: a drawing means comprising a supply table installed between two machine tools; a lift unit; a linear movement unit, and a robot arm. The lift unit comprises a fixed member, a sliding member, and a location determination member. The fixed member is installed and fixed on the supply table. The sliding member can move vertically relative to the fixed member. The location determination member is installed between the fixed member and the sliding member to limit a location of the sliding member with respect to the fixed member. The linear movement unit is installed on the sliding member to enable the robot arm to draw and load a workpiece between the supply table and each machine tool. Accordingly, the present invention can lower device installation costs and allow standardization and quantification to improve economic benefits.
Patent KR-20150087622-A (KR)
Inventor: KIM YOUNG CHUL
IPC: G06F17/30
Filed: 2014-01-22
Abstract: The present invention relates to a distributed file system and operating method thereof. The distributed file system includes: a metadata server which manages the metadata information of files and the metadata information of snap shot files at the file level; and multiple data servers which divide the file data in chunk units to store and manage the file data, stores and manages the delta chunks of the snapshot files for the chunks of original files, and manages the input and output of the snapshot files or the original files.
Patent KR-20150088354-A (KR)
Inventor: YOON YOUNG SOO
IPC: F16L9/18
Filed: 2014-01-23
Abstract: The present invention relates to a multi-pipe intermediate and a multi-pipe manufactured thereby and a method for manufacturing the same. Moreover, the method for manufacturing a multi-pipe comprises: a step of coating a middle layer on an inner pipe; a step of filling the inside of the inner pipe wherein the middle layer is coated with a filling material, and forming a multi-pipe intermediate by inserting the inner pipe filled with a filling material inside an outer pipe; and a step of applying pressure to the inside in a circumferential direction from the outside of the multi-pipe intermediate. As a multi-pipe is manufactured by dissolving a filler material in a multi-pipe intermediate after the multi-pipe intermediate is manufactured, defects can be suppressed in a pipe reduction process, and the multi-pipe with excellent corrosion resistance and diffusion resistance can be manufactured. As the filling material inside the inner pipe in the multi-pipe intermediate supports a pipe in order to maintain a shape of the pipe from external pressure applied to the multi-pipe intermediate, adhesion between multiple pipes is increased between a supporting force of a filling material and pressure applied from an outside, and thereby occurrence of defect caused by reducing adhesion between pipes can be suppressed.
Patent KR-20150088455-A (KR)
Inventor: KIM JIN KUK
IPC: B60H1/00
Filed: 2014-01-24
Abstract: The present invention relates to an air conditioner for a vehicle and, more specifically, relates to a connection duct coupled with an intake duct installed in one side surface of a scroll case and a motor housing installed in an other side surface of the scroll case in order to share the remaining components, except the intake duct to a right side handle vehicle or the left side handle vehicle; and to reduce investment costs, development costs, and a development period. Moreover, a resonance muffler of a Helmholtz resonator method is formed on the connection duct in order to reduce a rumble joint generated when air introduced to the intake duct flows along the connection duct.
Patent KR-20150089154-A (KR)
Inventor: NA HYEOUNG BAE
IPC: A47J37/04
Filed: 2014-01-27
Abstract: The present invention includes: a frame having a heat source capable of roasting meat on the inside of the frame; and a smoke case which is disposed on the inside of the frame, is disposed with a plurality of wood chips of wood material therein and enables a smoke generated by incompletely burning the wood chips using the heat source to be reached towards meat.
Patent KR-20150089597-A (KR)
Inventor: KIM DONG HYUK
IPC: H01L21/336
Filed: 2014-01-28
Abstract: A method for manufacturing a semiconductor device comprises the steps of: partially removing an upper portion of an active fin of a substrate disposed inside a chamber to form a trench and a source and drain layer; supplying a silicon source gas, the germanium source gas, the etching gas and the carrier gas to perform a selective epitaxial growth process using an upper surface of an active region exposed by the trench as a seed in order to enable the silicon-germanium layer to be grown when the source and drain layer is formed; and supplying the carrier gas while purging the chamber in order to etch the silicon-germanium layer.
Patent KR-20150092505-A (KR)
Inventor: CHO YOUNG HA
IPC: B60W30/16
Filed: 2014-02-05
Abstract: The present invention relates to a method for warning a distance between vehicles and a device for detecting a forward collision. The method for warning a distance between vehicles comprises the steps of: setting one or more areas of interest in one or more images among a plurality of images; detecting a first feature point corresponding to a vehicle from the areas of interest, and setting vehicle candidates based on the detected first feature point; detecting one or more vehicles from tracking candidates by using reference data obtained based on the geometry of the vehicle; and tracking one or more vehicles detected by the above step.
Patent KR-20140037164-A (KR)
Title: Method for manufacturing semiconductor light emitting element
Inventor: SATO TAISUKE
IPC: H01L33/36
Filed: 2014-02-10
Abstract: According to an embodiment, a manufacturing method of a semiconductor light emitting device is disclosed. The method can include a step of bonding a laminated main body of a structure to a substrate main body. The structure comprises a growth substrate and the laminated main body which is installed on the growth substrate. The laminated main body comprises a first nitride semiconductor film; a light emitting film installed on the first nitride semiconductor film; and a second nitride semiconductor film installed on the light emitting film. The method can include a step of eliminating the growth substrate. The method can include a step of forming multiple laminated bodies. The method can include a step of forming an uneven part on the surface of the first nitride semiconductor film. The method can include a step of forming multiple semiconductor light emitting devices.
Patent KR-20150094097-A (KR)
Inventor: YOUN SANG CHUL
IPC: H01L21/285
Filed: 2014-02-10
Abstract: The present invention is to provide a manufacturing method including a process to form a nickel containing film having excellent embedding characteristics and excellent step coverage characteristics on a structure having a relatively large aspect ratio. In the manufacturing method of a semiconductor device, a substrate including a structure wherein a hole is formed is prepared. A precursor including a nickel alkoxide compound is evaporated. A nickel containing film is formed inside the hole by supplying the precursor including the evaporated nickel alkoxide compound to the substrate.
Patent KR-20150094229-A (KR)
Inventor: LEE SANG GO
IPC: B05B1/02
Filed: 2014-02-11
Abstract: The present invention relates to a lens module bonding device having a rotation-type bonding dispenser, and an object of the present invention is to improve productivity of a lens module bonding operation by performing a bonding operation in a tray state without moving a lens module. The present invention relates to lens module bonding device having a rotation-type bonding dispenser, the lens module bonding device comprising: a support frame which is vertically provided on both sides of an upper portion of a frame body having an outer shape; an X-axis moving device which is horizontally provided on one face of an upper end on one side of the support frame; a Y-axis moving device which is provided perpendicularly to the downside of the X-axis moving device and is provided with a tray fixing portion on the upside of a slider moving in a longitudinal direction; and a bonding dispenser which is provided vertically on one side of the slider of the X-axis moving device and bonds a lens module on a tray provided in the tray fixing portion. According to the invention, a bonding operation is performed in a tray state having multiple numbers without moving the lens module, and productivity of the lens module bonding operation is improved.
Patent KR-20150098978-A (KR)
Inventor: KIM HONG SUK
IPC: H01L51/50
Filed: 2014-02-21
Abstract: The present invention relates to a novel compound and an organic electroluminescent element comprising the same. The compound according to the present invention is used in an organic material layer of the organic electroluminescent element, preferably a light emission layer, thereby improving light-emitting efficiency, a driving voltage and a lifespan of the organic electroluminescent element.
Patent KR-20150099279-A (KR)
Inventor: BAEK GUK SIL
IPC: G06F15/16
Filed: 2014-02-21
Abstract: According to an embodiment of the present invention, a system for providing environment for developing applications includes: an apparatus for providing environment for developing applications; and a server for providing one or more components for the apparatus for providing environment for developing applications. The apparatus for providing environment for developing applications includes: a form slicing part to store a form page separated into two or more pages; a display part to display a first screen including a form tab area for setting the connection between the pages and a second screen for showing the connection between multiple components for taking care of each screen or function in one page among the multiple pages; a control part to control a first component including event information to be connected to a second component including action information on the second screen; a generation part to generate a first code composed of an intermediate language corresponding to the connection between the first component and the second component when the first component including the event information is connected to the second component including the action information by an arrow on the second screen; and a conversion part to convert the first code into a second code.
Patent KR-20140111613-A (KR)
Inventor: JOYE MARC
IPC: G06F21/55
Filed: 2014-03-07
Abstract: A processor (100) in an apparatus (100) uses a deductively selected integer (r) to execute an error-resistance exponentiation by using an input (x) and a secret component (d) to acquire a result and is formed with a selected random component to form an extended base. In generalization, if the deductively selected integer (t=br2, where b is an integer) and a coefficient (N) are relatively disjoint, a processor (110) has a reverse module (iN=N-1modt). The processor (12) forms the extended base from the calculation (S2), calculates the extended coefficient (S3, S4), and identifies whether Sr≡1+dar(modr2). If the result is necessary and sufficient, the result (S=SrmodN) is reversed through an interface (110) (S6).
Patent KR-20150105827-A (KR)
Inventor: KANG DONG HYUN
IPC: A23L3/00
Filed: 2014-03-10
Abstract: The present invention relates to a sterilization apparatus for a powdered infant formula including: a sterilization chamber which has an inlet to allow the powdered infant formula to be inserted therethrough and an outlet to allow the powdered infant formula to be discharged therethrough and includes an agitation space for the powdered infant formula formed therein; an agitation unit which is arranged in the agitation space, rotates, and agitates the powdered infant formula; a UV ray lamp which is arranged on an upper portion of the sterilization chamber and irradiates the powdered infant formula with UV rays; and a near-infrared ray lamp which is arranged on one side of the UV ray lamp and irradiates the powdered infant formula with near-infrared rays.
Patent KR-20150105833-A (KR)
Inventor: LEE SANG HYUN
IPC: G09B25/08
Filed: 2014-03-10
Abstract: The present invention relates to an indoor butterfly garden for ecological experience and, more specifically, to an indoor butterfly garden for ecological experience, which can show a user live butterflies by maintaining an internal environment thereof to be constant. The indoor butterfly garden for ecological experience comprises: an upper side unit and an outer side unit separating an experience space from the outside to maintain the temperature and the intensity of light in an easy manner; a temperature increasing device, a temperature decreasing device, and a light intensity adjusting device which can adjust the temperature and the intensity of light to maintain butterflies to be active; real flowers, which can provide feed and a rest space to enable the butterflies to maintain life and activity; a garden unit in which the real flowers can be arranged; an entrance through which the user can go in and out; and an insect blocking curtain unit which prevents the butterflies from going out of the experience space when the user goes in and out through the entrance. According to the present invention, the user can watch the butterflies, which are alive and actively fly, in the experience space, while feeling like the user stays in nature.
Patent KR-20150108963-A (KR)
Inventor: LEE DONG WOO
IPC: G01N15/10
Filed: 2014-03-18
Abstract: The present invention relates to a cell analyzing apparatus and a cell analyzing method. The cell analyzing apparatus of the present invention includes: an image processing unit converting the imaged cell colonies into digital signals by photographing cultured cell colonies; an outline extracting unit extracting outlines of the cell colonies from image data obtained from the image processing unit; a size calculating unit calculating sizes of the cell colonies from the extracted outlines; and a selecting unit selecting the grown cell colonies by comparing the sizes of the cell colonies with a preset value.
Patent KR-20150110072-A (KR)
Title: Manufacturing Method of MEMS Device
Inventor: HAN JONG WOO
IPC: B81C3/00
Filed: 2014-03-24
Abstract: A method for manufacturing a MEMS device is provided. The present invention comprises: a MEMS device forming step of forming a plurality of MEMS devices having a sensor unit having a diaphragm and having a hollow portion provided to a lower side of the sensor unit; a cutting groove forming step of forming a cutting groove in the lower side between the MEMS devices; and MEMS device separating step of separating each MEMS device with a mechanical method along the cutting groove. The present invention is capable of minimizing an impact or stress applied to the MEMS device during a dicing process.
Patent KR-20150091207-A (KR)
Inventor: TOYODA KAZUYUKI
IPC: H01L21/205
Filed: 2014-03-26
Abstract: The present invention relates to a substrate processing apparatus which is to maintain the high operation efficiency even in an apparatus using a shower head. To this end, the substrate processing apparatus of the present invention comprises: a first gas supply system connected to a raw gas source, and including a raw gas supply pipe installed with a raw gas supply control unit; a second gas supply system connected to a reaction gas source, and including a reaction gas supply pipe installed with a reaction gas supply control unit; a third gas supply system connected to a cleaning gas source, and including the reaction gas supply pipe installed with a cleaning gas supply control unit; a shower head unit including a buffer chamber connected with the first, second, and third gas supply systems; a process chamber installed below the shower head, and accommodating a substrate holding unit for holding a substrate; a plasma generation area switching unit for switching the plasma generation of the buffer chamber and the process chamber; a plasma generation unit including the plasma generation area switching unit and power; and a control unit for controlling at least the raw gas supply unit, the reaction gas supply control unit, and the plasma generation unit.