Patent SG-11201808962R-A (SG)
Title: Method for treating graphene sheets for large-scale transfer using free-float method
Inventor: HEISE SCOTT
IPC: C23C16/26
Filed: 2016-04-14
Abstract: INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property -, Organization 11111111011110111010101111101011111011101111110111110111111111111101111011111 International Bureau 0.. .... .. ..... ...,/ (10) International Publication Number (43) International Publication Date WO 2017/180137 Al 19 October 2017(19.10.2017) WIPO I PCT (51) International Patent Classification: (74) Agents: THOMPSON, Eley 0. et al.; c/o Foley & Lardner C01B 31/04 (2006.01) B01J 19/08 (2006.01) LLP, 3000 K Street NW, Suite 600, Washington, District C23C 16/26 (2006.01) of Columbia 20007-5109 (US). (21) International Application Number: (81) Designated States (unless otherwise indicated, for every PCT/US2016/027623 kind of national protection available): AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, (22) International Filing Date: BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, 14 April 2016 (14.04.2016) DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, (25) Filing Language: English HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, (26) Publication Language: English MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, (30) Priority Data: PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, 15/099,464 14 April 2016 (14.04.2016) US SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (71) Applicant: LOCKHEED MARTIN CORPORATION [US/US]; 6801 Rockledge Drive, Bethesda, Maryland (84) Designated States (unless otherwise indicated, for every 20817 (US). kind of regional protection available): ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, (72) Inventors: HEISE, Scott, E.; c/o Lockheed Martin Cor- TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, poration, 6801 Rockledge Drive, Bethesda, Maryland TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, 20817 (US). BEDWORTH, Peter V.; c/o Lockheed Mar- DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, tin Corporation, 6801 Rockledge Drive, Bethesda, Mary- LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, land 20817 (US). SINTON, Steven W.; c/o Lockheed SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, Martin Corporation, 6801 Rockledge Drive, Bethesda, GW, KM, ML, MR, NE, SN, TD, TG). Maryland 20817 (US). SWETT, Jacob L.; c/o Lockheed Martin Corporation, 6801 Rockledge Drive, Bethesda, Published: Maryland 20817 (US). — international 21(3)) with search report (Art. (54) Title: METHOD FOR TREATING GRAPHENE SHEETS FOR LARGE-SCALE TRANSFER USING FREE-FLOAT METH- OD 1-1 IN M Il 0 FIG. 5 GC ---- (57) : A method for transferring a graphene sheet from a copper substrate to a functional substrate includes forming the graphene sheet on the copper substrate using chemical vapor deposition, and irradiating the graphene sheet disposed on the copper ::::; substrate with a plurality of xenon ions using broad beam irradiation to form a prepared graphene sheet. The prepared graphene sheet N is resistant to forming unintentional defects induced during transfer of the prepared graphene sheet to the functional substrate. The O method further includes removing the copper substrate from the prepared graphene sheet using an etchant bath, floating the prepared ,-1 graphene sheet in a floating bath, submerging the functional substrate in the floating bath, and decreasing a fluid level of the floating bath to lower the prepared graphene sheet onto the functional substrate.