baber/WOPTO huggingface dataset:
Patent JP-2006184642-A (JP)
Title: Speech synthesizer
Inventor: KOJIMA HIDEKI
IPC: G10L13/08
Filed: 2004-12-28
Abstract: <P>PROBLEM TO BE SOLVED: To provide a speech synthesizer which does not repeatedly read aloud a part or all of face mark/pictorial symbol/sign even when part or all of those reading is described directly before or directly after the face mark/pictorial symbol/sign, in a device for voice-synthesizing a text including the face mark/the pictorial symbol/the sign.  <P>SOLUTION: The speech synthesizer pre-registers the sign, the pictorial symbol, the face mark, and reading in a language dictionary in pairs, and inputs the text to retrieve the sign, pictorial symbol, and face mark, and when a word in agreement with a part or all of those reading is present before and after them, it is deleted from the text, and the text deleting the word is input and translated into a text for reading using the language dictionary, and the text for reading is input to the synthesizer to voice-synthesize it, and thereby the synthesizer reads the sign, pictorial symbol, and face mark without repetition.  <P>COPYRIGHT: (C)2006,JPO&NCIPI
Patent JP-2005524978-A (JP)
Title: ボトムゲート型ｔｆｔを含む電子装置およびその製造方法
IPC: H01L21/20
Filed: 2003-04-25
Abstract: ボトムゲート型ＴＦＴ（１２）を含む電子装置を製造する方法であって、ゲート（２６）を画成するドープトアモルファスシリコンゲート層（２６’）を基板上に形成するステップと、ゲートの上にゲート絶縁層（３２）を形成するステップと、ゲート絶縁層の上に少なくともゲートの一部分に重なるアモルファスシリコンアクティブ層（２８’）を形成するステップと、ポリシリコンアクティブ層（２８）を形成するためにアモルファスシリコンアクティブ層をアニーリングするステップとを具備する方法が提供される。より薄いゲート絶縁層が使用可能になり、低閾値電圧を有するＴＦＴが得られる。
Patent JP-2005532667-A (JP)
IPC: H01J61/86
Filed: 2003-07-03
Abstract: A discharge lamp, and particularly a high-pressure gas-discharge lamp (an HID (high-intensity discharge) lamp or UHP (ultra-high performance) lamp), having a reflector and a cooling means is described. The cooling means comprises at least one nozzle ( 3 ) by which a flow of gas can be directed onto the discharge lamp, the at least one nozzle ( 3 ) being so arranged that it does not extend, at least to any substantial degree, into a beam path produced by the lamp ( 2 ) and the reflector ( 1 ). In this way, the cooling means does not produce any obstacles on the beam path for the light. With preferred embodiments, it is possible to produce a turbulent flow that surrounds particularly the discharge vessel ( 21 ) of the lamp and that considerably increases the effectiveness of the cooling means. Further embodiments also allow the discharge lamp to be operated in a plurality of different positions without individual regions of the lamp being too little or too severely cooled.
Patent JP-2005533956-A (JP)
IPC: F03G7/06
Filed: 2003-07-21
Abstract: A shape memory alloy actuator comprising a body 30 arranged displaceable between a first and a second position, releasable holding means 47, 48 adapted for holding the body in the first position, a first wire 31 and a second wire 49 made of a shape memory alloy such as nitinol, the first wire being at one end connected to the body such that shortening of the length of the first wire exerts a force on the body for moving it from the second position to the first position, a tension spring 43 for biasing the body for moving it from the first to the second position, the second wire having one end connected to the holding means such that shortening of the length of the second wire releases the holding means for allowing the spring to move the body from the first position to said second position, and the actuator further comprising an intermediate two-armed lever 32 having the end of one arm attached to the tension spring 43 and the end of the other arm 39 abutting a projection 40 on the body 30 such that the force of the spring 43 is transmitted to the body by the lever 32.
Patent JP-2005534474-A (JP)
Title: ムライト・チタン酸アルミニウム製ディーゼル微粒子フィルタ
IPC: F01N3/02
Filed: 2003-07-07
Abstract: 本発明は、全体の重量パーセントで表して、６０〜９０％、好ましくは７０〜８０％、最も好ましくは７０％の、ｘが０〜０．１であるＡｌ 2（１−ｘ） Ｆｅ 2x ＴｉＯ 5 の化学量を有する鉄・チタン酸アルミニウム固溶体、および１０〜４０％、好ましくは２０〜３０％、最も好ましくは３０％のムライト（３Ａｌ 2 Ｏ 3 ・２ＳｉＯ 2 ）（２２）を含有し、酸化物基準の重量パーセントで表して、３から１５％のＳｉＯ 2 、５５から６５％のＡｌ 2 Ｏ 3 、２２から４０％のＴｉＯ 2 、および０から１０％のＦｅ 2 Ｏ 3 から実質的になる多孔質セラミック体から構成され、ディーゼル排気物質の濾過に有用なムライト・チタン酸アルミニウム製多孔質ディーゼル微粒子フィルタに関する。本発明のディーゼル微粒子フィルタは、高い耐熱衝撃性および良好な濾過性能と共に、１６５０から１７００℃の温度まで焼成されたときの高い透過度と組み合わされた、高度に相互連絡した開気孔率および大きなメジアン孔径を有する。
Patent JP-2005536836-A (JP)
Title: 電気ヒューズリレーボックス及びその製造方法
IPC: B60R16/02
Filed: 2003-07-30
Abstract: 【解決手段】仮組立された電気ヒューズリレーボックスはフレームを有する。フレームは、上側区画、下側区画及び少なくとも１個のロック受け部を有する。ヒューズボックスは、上側区画内に仮組立された複数の電気部品、下側区画内に仮組立された複数のコネクタモジュール、上側区画に回転取付けされた上側カバー、及び下側区画に回転取付けされた下側カバーを更に有する。コネクタモジュールは、電線と電気的に係合する寸法に構成される。上側及び下側カバーの各々は、ロック受け部と係合する寸法に構成されたロック部材を有する。さらに、電気部品は、リレー、回路遮断器、Ｊケースヒューズ及びブレードヒューズを有する。コネクタモジュールは、フレームを貫通すると共に電気部品と電気接続する接続コンタクトを有する。
Patent JP-2005535687-A (JP)
IPC: A61K47/24
Filed: 2003-07-28
Abstract: An improved Transdermal Delivery System (TDS) comprising a backing layer inert to the components of the matrix, a self-adhesive matrix containing rotigotine and a protective foil or sheet to be removed prior to use, characterized in that the self-adhesive matrix consists of a solid or semi-solid semi-permeable polymer  (1) wherein rotigotine in its free base form has been incorporated, (2) which is saturated with rotigotine and contains said rotigotine as a multitude of microreservoirs within the matrix, (3) which is highly permeable for the free base of rotigotine, (4) which is impermeable for the protonated form of rotigotine, (5) wherein the maximum diameter of the microreservoirs is less than the thickness of the matrix.  is provided. Said TDS provides for enhanced flux of rotigotine across the TDS/skin interface.
Patent JP-2005536657-A (JP)
Title: 多成分繊維及びそれにより形成された不織ウエブ
IPC: D04H3/14
Filed: 2003-06-25
Abstract: フィラメントから形成される二成分スパンボンドフィラメント及び不織ウエブが示されている。スパンボンドフィラメントは、芯ポリマー及び鞘ポリマーを含む。芯ポリマー及び鞘ポリマーのどちらも主にポリプロピレンポリマーから形成される。例えば、鞘ポリマーはポリプロピレン及びエチレンのランダムコポリマーとすることができる。エチレンは、約２重量％より小さい量で鞘ポリマー内に存在することができる。一方、芯ポリマーは、鞘ポリマーより高い溶融温度を持つポリプロピレンポリマーとすることができる。
Patent JP-2005537670-A (JP)
Title: 異方性Ｈｉｇｈ−Ｋゲート誘電体を有するトランジスタエレメント
IPC: H01L21/02
Filed: 2003-08-29
Abstract: 電界効果トランジスタ３００は異方性誘電体３０５を含むゲート絶縁層を有する。ゲート絶縁層に対して平行である第一誘電率が、ゲート絶縁層に対して垂直である第二誘電率よりも実質的に低くなるよう、方向が選択される。
Patent JP-2005537426-A (JP)
IPC: F02M37/20
Filed: 2003-02-13
Abstract: A pump unit for the metered delivery of fuel to internal combustion engines. The pump unit comprises a housing which comprises a longitudinal bore. Located in the longitudinal bore is an overflow valve, via which fuel flows back through a channel into a fuel tank. The passage can be opened or closed by a spring-loaded closing element. Fastened to the valve shaft of the overflow valve is a ring fitting. In the longitudinal bore of the housing there is an additional thread section, via which air flows out through vent gaps into a cavity of the ring fitting.
Patent JP-2006501072-A (JP)
Title: 単結晶基板から微細構造物を形成する方法
IPC: B81C1/00
Filed: 2003-09-25
Abstract: 基板から微細構造物を形成する方法が提供される。その方法は、（１００）配向を有する単結晶基板を設ける段階、及びイオン注入を所望貫通深さまで行うように基板の第１部分をイオン衝撃に曝す段階を含む。基板の第２部分が、所望貫通深さと少なくとも同じ大きさの深さまで腐食される。次いで、基板が熱処理されて、基板の表面に微細構造物を形成し且つ微細構造物と基板との間の少なくとも部分的分離を行う。
Patent JP-2006505543-A (JP)
IPC: C07D401/12
Filed: 2003-08-22
Abstract: Various carbonyl amides are employed in vitro and in vivo as non-nucleoside inhibitors of a reverse transcriptase, and particularly of HIV reverse transcriptase. Therefore, contemplated compounds may be employed in the treatment of HIV infected patients. Further contemplated aspects include pharmaceutical compositions comprising therapeutically effective amounts of contemplated compounds.
Patent JP-2006502582-A (JP)
Title: 半田めっきにおけるボイド発生を除去する方法
IPC: C23F1/34
Filed: 2003-09-30
Abstract: 本発明は、半田をめっきする方法に関する。本発明の方法によって、上面に金属シード層を有するダイが提供される。金属シード層は、酸および酸化剤を含有する溶液を用いてマイクロエッチング（８５）されることによって、エッチングされた金属シード層を形成する。その後、エッチングされた金属シード層上にバンプ下金属層（ＵＢＭ）が電気めっきされ（８７）、ＵＢＭ上にＳｎＣｕなどの鉛フリー半田組成物が電気めっきされる（９１）。半田をめっきする方法と共に用いられ得る、半田をリフローする方法もまた提供される。この後者の方法によって、基板は金属シード層をエッチングされ（１３７）、続いてマイクロエッチングされる（１４１）。その後、半田フラックスが基板上に塗布され（１４７）、半田がリフローされる（１４９）。
Patent JP-2006516171-A (JP)
Title: 高密度データ記憶用原子プローブおよび媒体
IPC: G11B7/004
Filed: 2003-10-15
Abstract: 本発明の態様による媒体デバイスは、高密度データ記憶を行うことができる。一態様では、このような媒体デバイスは、媒体にデータが書き込まれた場合に比抵抗が変化する相変化媒体を含んでよい。媒体は、媒体に対する書込みまたは読取りに用いられる分子メモリ集積回路内のカンチレバー・チップなどのデバイスから媒体に加えられる物理的な損傷を軽減するオーバーコートを含む。媒体に書き込まれたデータは、複数の状態で存在する（たとえば、複数の比抵抗測定値を有する）ことができ、したがって、デジタルおよび／またはアナログ・データを媒体上に記憶するのが可能になる。本発明の他の目的、局面、および利点は、図、明細書、および特許請求の範囲を検討することによって得ることができる。この説明は、本発明を完全に説明するものでも、本発明の範囲を制限するものでもない。
Patent JP-2006507586-A (JP)
Title: 埋め込みシステムの解析装置及び方法
IPC: G06F11/34
Filed: 2003-11-12
Abstract: ＣＰＵ（１）、ＣＰＵバス（２）及びメモリ（３）を有する埋め込みシステム（９）の解析装置を記載している。この埋め込みシステムは、解析データを試験インタフェース（５）を介して入力又は出力するために、少なくとも一つの通信モジュール（４）を有する。この通信モジュールを用いて、ＣＰＵ（１）のクロックサイクルを使用することなく、埋め込みシステムの内部メモリ及びＩ／Ｏアクセスを監視及び／又は記録することができる。
Patent JP-2006508279-A (JP)
Title: 高い嵩、柔らかさ、及び堅さを有するロールティッシュ製品
IPC: D21F11/14
Filed: 2003-11-26
Abstract: 【課題】  ティッシュ製品のような螺旋状に巻いた紙製品、及び、せん断カレンダ加工装置及びこの装置を用いる方法を提供する。 【解決手段】  望ましいロール堅さ特性及び柔らかさ特性を有する螺旋状に巻いた紙製品。このロール製品は、様々な工程によって形成された単一プライティッシュウェブから製造することができる。形成されると、ティッシュウェブは、せん断カレンダ加工装置の作用を受け、この装置は、ウェブのファズ・オン・エッジ特性を増大し、巻かれた時のウェブの嵩を保つ。
Patent JP-2006191263-A (JP)
Title: Communication apparatus and method, and program
Inventor: NAKANO TAKAYUKI
IPC: H04L9/16
Filed: 2005-01-05
Abstract: <P>PROBLEM TO BE SOLVED: To provide a communication environment with higher security with respect to a communication apparatus and method, and a program.  <P>SOLUTION: The communication apparatuses 10, 20 use a fixed setting common-key key stored respectively in them and a variable variation common key T whose value is identical to each of the communication apparatuses 10, 20 in an optional timing, determine at least either of the port or the protocol used for communication and carry out the communication by using the port or the protocol. Further, the communication apparatuses 10, 20 use at least either of the setting common-key key or the variation common key T to carry out encryption processing of communication data. The technology disclosed herein is applicable to, e.g. www servers and www clients or the like.  <P>COPYRIGHT: (C)2006,JPO&NCIPI
Patent JP-2006195700-A (JP)
Title: Information terminal device and its program
Inventor: KAMON KENICHI
IPC: G06Q50/10
Filed: 2005-01-13
Abstract: <P>PROBLEM TO BE SOLVED: To solve the problem that a storage part 202 provided in an electric appliance 200 does not store detail information (color or door opening direction) of an exterior, thereby when image data for the appearance of the electric appliance is to be displayed on an information terminal apparatus 100 connected to the electric appliance 200, the information such as the color or the door opening direction do not coincide with each other.  <P>SOLUTION: A server 300 holds the image data on the appearance of the electric appliance 200. When the electric appliance 200 having the same appliance identification information has a different appearance, the difference of the appearance can be discriminated by the information terminal apparatus 100 by counting the number of URL showing the storage location of the image data transmitted by the server 300. Furthermore, if the server 300 transmits a character string showing a feature of the appearance along with the URL to the information terminal apparatus 100, the information terminal apparatus 100 displays types thereof on a screen of a notification part 405. The image data showing the same appearance can be displayed by having a user select one.  <P>COPYRIGHT: (C)2006,JPO&NCIPI
Patent JP-2006192106-A (JP)
Title: Kitchen chair
Inventor: SATO MINORU
IPC: A47C7/00
Filed: 2005-01-14
Abstract: <P>PROBLEM TO BE SOLVED: To provide a kitchen chair suppressing the rotation of a wheel when no person sits thereon and releasing the suppression in a sitting action.  <P>SOLUTION: In the sitting action, a load applied to the lower part of a seat face of a kitchen chair is gradually grown according to the sitting movement of a seated person, so that a rotary roller 115 engaged with a recess part 135a of a rotation suppressing groove 135 gradually gets out of the groove 135a, slowly goes over a projection part 135b and moves to an adjacent recess 135a, and the rotation suppressing force is sequentially reduced with the sitting action of the user without being released at once. When the person is fully seated on the kitchen chair 1, the rotary roller 115 does not make contact with the projection part 135b of the rotation suppressing groove 135 of the wheel 130 and the rotation of the wheel 130 is not prevented by the rotary roller 115 so that the wheel 139 can be freely rotated.  <P>COPYRIGHT: (C)2006,JPO&NCIPI
Patent JP-2006193062-A (JP)
Title: Wheel loader
Inventor: KUDO TATSU
IPC: B62D25/16
Filed: 2005-01-14
Abstract: <P>PROBLEM TO BE SOLVED: To provide a wheel loader capable of attaching and detaching a rear fender covering a rear wheel with a cab mounted on a machine body frame.  <P>SOLUTION: A front cab mount seat 17 and a rear cab mount seat 18L in which the cab is attached and supported are secured onto side frames 22L, 22R, and the cab 11 is attached onto the cab mount seats 17, 18L, 18R. Under this condition, the rear fenders 27L, 27R covering the rear wheel are detachably attached onto the side frames 22L, 22R from outward of the cab mount seats 17, 18L, 18R.  <P>COPYRIGHT: (C)2006,JPO&NCIPI
Patent JP-2006197756-A (JP)
Title: Regenerative braking controller for vehicle
Inventor: TAKEDA YASUSHI
IPC: B60L7/16
Filed: 2005-01-14
Abstract: <P>PROBLEM TO BE SOLVED: To provide a regenerative braking controller for vehicles capable of continuously applying regenerative braking force for a long time when the driver expects regeneration.  <P>SOLUTION: In a hybrid vehicle, a second motor-generator MG2 is coupled with left and right front wheels, regenerative braking force is applied to the left and right front wheels by operation of the second motor-generator MG2, and regenerative electric power is charged into a battery 4. The hybrid vehicle is provided with a range position sensor 28 that detects a range position selected by the driver's selecting operation; and a charge amount reducing means that reduces the amount of charging of the battery 4, when the regeneration strong range has been selected according to a regenerative braking force request.  <P>COPYRIGHT: (C)2006,JPO&NCIPI
Patent JP-2006192198-A (JP)
Title: Token lending system, token lending method and token lending program
Inventor: FUJITA YUICHI
IPC: A63F7/02
Filed: 2005-01-17
Abstract: <P>PROBLEM TO BE SOLVED: To smoothly and effectively lend tokens when lending tokens from a Pachislo machine.  <P>SOLUTION: A mode management part 216 manages the three conditions (modes) of a lending-prohibiting mode 310, a lending-preparing mode 320, and a lending-processing mode 330. When a lending button 101 is pushed in the condition that the credit is not zero, the mode management part 216 recognizes this action as a lending-preparing action, and switches its mode from the lending-prohibiting mode 310 to the lending-preparing mode 320. Immediately after the credit becomes zero, the mode is further switched to the lending-processing mode 330.  <P>COPYRIGHT: (C)2006,JPO&NCIPI
Patent JP-2006203306-A (JP)
Title: Home electric appliance remote control system
Inventor: TERAUCHI TORU
IPC: H04M11/00
Filed: 2005-01-18
Abstract: <P>PROBLEM TO BE SOLVED: To configure a home electric appliance remote control system suitable for transmitting an authentication information such as a password or a home electric appliance control signal by using a secrecy function of an existing cellular phone system.  <P>SOLUTION: The system is provided with a cellular phone set 1 for using a short message service to transmit a short message including at least personal authentication information expressed by text data; a short message receiver 2 for receiving the short message transmitted from this cellular phone; an interface unit 3 for analyzing the short message received by the short message receiver 2 to read personal authentication information, and executing authentication processing on the basis of the personal authentication information; and a home electric appliance control unit 4 for controlling a predetermined apparatus to be controlled in response to a control signal outputted from this interface unit 3.  <P>COPYRIGHT: (C)2006,JPO&NCIPI
Patent JP-2006199743-A (JP)
Title: Thermoplastic resin composition and molded article
Inventor: HAYATA YUSUKE
IPC: C08L51/00
Filed: 2005-01-18
Abstract: <P>PROBLEM TO BE SOLVED: To provide a thermoplastic resin composition capable of obtaining a molded article having improved resistance to hydrolysis and further improved impact resistance and thin-wall falling weight impact strength for a resin composition which is composed of a polycarbonate resin and a polylactic acid resin and has both the mechanical properties of the polycarbonate and the excellent flowability of the polylactic acid.  <P>SOLUTION: This thermoplastic resin composition comprises 100 pts.mass polycarbonate resin composition composed of (A) 50-95 mass% polycarbonate resin and (B) 50-5 mass% polylactic acid resin and (C) 5-65 pts.mass vinyl graft copolymer.  <P>COPYRIGHT: (C)2006,JPO&NCIPI
Patent JP-2006201665-A (JP)
Title: Information processing apparatus, information processing method, and program
Inventor: AOYAMA KAZUMI
IPC: G10L15/00
Filed: 2005-01-24
Abstract: <P>PROBLEM TO BE SOLVED: To make a robot or the like adapt self action to stimuli given by others.  <P>SOLUTION: In an information processing apparatus, a recognition part 5 recognizes utterance of a user by an auditory sensation SOM stored in a storage part 4, and a generation part 6 changes articulation parameters which are obtained from an articulation SOM stored in the storage part 4 in order to output a synthetic sound obtained by imitating the utterance, and a driving part 8 actually outputs the synthetic sound by performing speech synthesis according to the articulation parameters after the change. Moreover, the recognition part 5 recognizes the synthetic sound, and decides whether the synthetic sound is close to the utterance of the user or not. When the synthetic sound is close to the utterance of the user, a learning part 7 strengthens the coupling between the node of the articulation SOM which can generate the synthetic sound close to the utterance of the user and the node of the auditory sensation SOM which is the recognition result of the synthetic sound or the utterance of the user. This invention is applicable to, for example, the robot or the like.  <P>COPYRIGHT: (C)2006,JPO&NCIPI
Patent JP-2006207673-A (JP)
Title: Liquid sealing type vibration control device
Inventor: HATAKEYAMA SHINGO
IPC: B60K5/12
Filed: 2005-01-27
Abstract: <P>PROBLEM TO BE SOLVED: To provide a liquid sealing type vibration control device capable of preventing a bottom fitting from falling down for a vibration body or a supporting body irrespective of excellent or bad precision of flatness of an outer face of the bottom fitting and providing desired vibration control performance sufficiently.  <P>SOLUTION: This liquid sealing type vibration control device is provided with a first mounting device, a second mounting device, a vibration control basic body, a diaphragm provided in the second mounting device to form a liquid sealing chamber between the vibration control basic body and it, a partitioning body, and an orifice. The second mounting device is composed of a cylindrical fitting and the cup-like bottom fitting 14, which is formed by aluminum alloy. The outer face 62 of a bottom wall 20 of the bottom fitting 14 is divided into a first outer face part 63 on an outer peripheral part side of the bottom wall 20 and a second outer face part 64 on an inward side in the radial direction more than the first outer face part 63 to form the outer face 62 so that the second outer face part 64 is positioned on an inward side X1 in the direction of shaft core of the bottom fitting 14 for the first outer face part 63.  <P>COPYRIGHT: (C)2006,JPO&NCIPI
Patent JP-2006211224-A (JP)
Title: Moving image reproducing system
Inventor: KUDO ATSUSHI
IPC: H04N5/765
Filed: 2005-01-27
Abstract: <P>PROBLEM TO BE SOLVED: To provide a moving image reproducing system capable of easily recording/regenerating moving image information obtained by a moving image imaging apparatus by use of a QR code (R), and capable of supplying pleasure as moving image, in place of a still image in a "Print Club".  <P>SOLUTION: The moving image playback system includes transfer means (1A, 2A, C) for transferring the moving image information recorded by a moving image imaging apparatus 1 to the server side, a coding means (8) for coding the above moving image information stored and preserved in the server side into the QR code, and a print data output means (7) for outputting data so as to print out the above QR code to the printer 3 side. The moving image reproducing system also includes a code read means (4) for fetching the QR code output by the above print data output means (7) to a portable telephone K, and a reproducing means (6) for enabling the above portable telephone K to play back the moving image based on the QR code information fetched by the above code read means (4).  <P>COPYRIGHT: (C)2006,JPO&NCIPI
Patent JP-2005212481-A (JP)
Title: Multilayer plastic pipe
Inventor: FAHRENHOLZ FRANK
IPC: B29C48/18
Filed: 2005-01-28
Abstract: <P>PROBLEM TO BE SOLVED: To provide a multilayer plastic pipe capable of achieving an improvement in barrier performance for use of a prescription for a different fuel of each country and a domestic fuel and/or a multilayer line for a motor vehicle.  <P>SOLUTION: The multilayer plastic pipe, in particular the multilayer line for the motor vehicle, is provided with the following layers from the outer side to the inner side: a base layer composed of polyamide and/or a blend of polyamide, a barrier layer plastic selected from the group consisting of (EVOH), (PVDF) and (ETFE) or a first barrier layer composed of metal foil, at least one separation layer, and the barrier layer plastic selected from the group consisting of (EVOH), (PVDF) and (ETFE) or a second barrier layer composed of the metal foil.  <P>COPYRIGHT: (C)2005,JPO&NCIPI
Patent JP-2005252241-A (JP)
Title: Method and apparatus for processing semiconductor substrates
Inventor: OOSTERLAKEN THEODORUS G M
IPC: H01L21/31
Filed: 2005-01-31
Abstract: <P>PROBLEM TO BE SOLVED: To provide a method of effectively removing gas in a reaction chamber to exchange gas atmospheres while minimizing an influence that a change of a gas atmosphere will exert on a resultant product of a process.  <P>SOLUTION: Substrates in a reaction chamber are sequentially exposed to at least three gas atmospheres: a first atmosphere of a first purge gas, a second atmosphere of a process gas and a third atmosphere of a second purge gas. The gases are introduced into the reaction chamber from one end of the reaction chamber and discharged from the opposite end. Successive gases entering the chamber are selected so that a stable interface with the immediately preceding gas can be maintained. For example, when the gases are fed into the chamber at the chamber's top end and are exhausted at the bottom end, the gases are chosen with successively lower molecular weights. In effect, each gas atmosphere stays on top of the previously introduced gas atmosphere and pushes the gas atmosphere from the top down to exhaust out of the reaction chamber.  <P>COPYRIGHT: (C)2005,JPO&NCIPI