baber/WOPTO huggingface dataset:
Patent KR-19990067515-A (KR)
IPC: A61K31/551
Filed: 1997-04-09
Abstract: PCT No. PCT/EP97/01830 Sec. 371 Date Oct. 6, 1998 Sec. 102(e) Date Oct. 6, 1998 PCT Filed Apr. 9, 1997 PCT Pub. No. WO97/39001 PCT Pub. Date Oct. 23, 1997This invention concerns the compounds of formula (I), the N-oxide forms, the pharmaceutically acceptable addition salts and the stereochemically isomeric forms thereof, wherein n is zero to 6; p is zero to 3; q is zero to 3; r is zero to 3; R1 and R2 each independently are hydrogen; optionally substituted C1-6alkyl; C1-6alkylcarbonyl; trihalomethylcarbonyl; or R1 and R2 taken together with the nitrogen atom to which they are attached may form a morpholinyl ring or an optionally substituted heterocycle; each R3 and R4 independently are halo, cyano, hydroxy, trihalomethyl, trihalomethoxy, carboxyl, nitro, amino, mono- or di(C1-6alkyl)amino, C1-6alkylcarbonylamino, aminosulfonyl, mono- or di(C1-6alkyl)-aminosulfonyl, C1-6alkyl, C1-6alkyloxy, C1-6alkylcarbonyl or C1-6alkyloxycarbonyl; each R5 independently is C1-6alkyl, cyano or trihalomethyl; X is CR6R7, NR8, O, S, S(=O) or S(=O)2; each independently represents a bivalent aromatic heterocycle wherein the heterocycle may be selected from the group consisting of pyrrole, pyrrazole, imidazole, triazole, furane, thiophene, isoxazole, oxazole, isothiazole, thiazole, pyridine, pyridazine, pyrimidine, pyrazine and triazine; or one of the two bivalent aromatic heterocycles in the compounds of formula (I) may be 1,2-benzenediyl; and aryl is optionally substituted phenyl; it further relates to compositions comprising thesae compounds, as well as their use as therapeutic agents in the treatment or the prevention of CNS disorders, cardiovascular disorders or gastrointestinal disorders.
Patent KR-19990087483-A (KR)
Title: 유압작동크러치릴리스(clutchrelease)장치의링피스톤패킹(ringpistonpacking)
IPC: F16D25/08
Filed: 1996-12-13
Abstract: 본 발명은 차량용 마찰크러치에  대한 유압작동식릴리스장치에 관한 것으로 변속기축(3)에 동심으로 배열되어 있는 압축실(2)을 포함하며 그안에 가이드스리브가 환형의 압실을 형성하기위하여 반경방향으로 거리를 두고 배열되어 있으며 그안에는 링피스톤(7)이 축방향에 따라 스라이딩이 되도록 되어 있고 압실측으로 보강된 패킹(8a)이 있고 그의 패킹립(14,15)은 반경방향에 따라서 벌려져 있다. 
     발명에 따라서 패킹(8a)의 보강재(18a)는 축방향 및 반경방향에 따르는 자유도를 가지고 링피스톤(7)에 끼워마춤으로 지지되어 있다.
Patent KR-20000016067-A (KR)
Title: Amorphous precipitated silica
Inventor: BOYER JAMES L
IPC: H01M50/434
Filed: 1997-04-24
Abstract: PURPOSE: An amorphous precipitated silica is provided to have a BET surface area in the range of from 60 to 200 m2/g, a CTAB surface area in the range of from 40 to 150 m2/g, and a DBP oil absorption in the range of from to 180 to 300 cm¬3/100g. CONSTITUTION: Amorphous precipitated silica which may be used to form battery separators of very low shrinkage is characterized by (a) a BET surface area in the range of from 60 to 200 m2/g; (b) a CTAB surface area in the range of from 40to 150 m2/g; (c) a DBP oil absorption in the range of from to 180 to 300 cm¬3/100g; (d) a mean ultimate particle size in the range of from 20 to 30 nm; (e) a total intruded volume in the range of from 2.5 to 4 cm¬3/g; (f) an intruded volume in the range of from 0.3 to 1.2 cm¬3/g for pores having diameters in the range of from 20 to 100 nm; and (g) a pore diameter at the maximum of the volume pore size distribution function in the range of from 30 to 200 nm.
Patent KR-20000016549-A (KR)
Title: Hole transporting material
Inventor: NISHIDA RYOICHI
IPC: G03G5/07
Filed: 1997-06-06
Abstract: PURPOSE: Disclosed is a hole transporting material having excellent in film forming and hole transporting properties. CONSTITUTION: The hole transporting material having a structure represented by general formula (1) or (2) and being excellent in film forming and hole transporting properties. In formula (1) R1's represent each a hydrogen atom or an alkyl group, provided that they may be the same or different from each other; and n is in the range of from 10 to 20,000; and in formula (2) R1's represent each a hydrogen atom or an alkyl group; R2's and R3's represent each a hydrogen atom, an alkyl group, an aryl group, an alkoxy group, an amino group, or a silyl group, provided that R1's, R2's and R3's may be the same or different from each other; n is a positive number; and m is 0 or a positive number, provided that 1 + m is in the range of from 10 to 20,000.
Patent KR-20000051433-A (KR)
Inventor: GANG SANG WOO
IPC: H01L21/027
Filed: 1999-01-22
Abstract: PURPOSE: A method for forming a fine pattern of a semiconductor device by reflowing a photoresist pattern is provided to widen a room for selection of photoresist material, to improve a process margin, and further to improve a profile of the pattern. CONSTITUTION: To use a photoresist pattern as an etch mask for a fine pattern, a photoresist layer is first formed on a wafer(61). The photoresist layer is then exposed and developed, resulting in a first photoresist pattern(62) partly exposing the wafer(61). Next, a property of the first photoresist pattern(62) is changed by implanting impurities such as silicon or germanium. The first photoresist pattern(62) is then reflowed above a glass transition temperature thereof, so that a second photoresist pattern(63) having a smaller critical dimension is formed from the first photoresist pattern(62). In particular, since the first photoresist pattern(62) has the changed property, the free volume of the first photoresist pattern(62) is slowly increased at the reflowing temperature. Therefore, an excellent profile of the second photoresist pattern(63) is obtained.
Patent KR-20000059701-A (KR)
Inventor: LEE YEON HWI
IPC: H01L21/30
Filed: 1999-03-08
Abstract: PURPOSE: A processor chamber for fabricating a semiconductor device is to exactly monitor a pressure of a position in the processor chamber, thereby precisely and equally controlling the pressure in the processor chamber. CONSTITUTION: A processor chamber(100) for fabricating a semiconductor device comprises a cathode and anode(110,130) disposed at an upper and lower portion of the processor chamber to form a plasma in a desired area of the processor chamber, a pressure detecting sensor(160,161) disposed on an outer wall to detect a pressure in the processor chamber, and a pumping line for controlling the pressure in the processor chamber according to a result detected by the sensor. In the chamber, at least two pressure detecting sensors and the pumping lines are provided. The processor chamber is an etching chamber or a chemical depositing chamber for treating of a semiconductor wafer(120) of 300mm or more.
Patent KR-20000059969-A (KR)
Inventor: CHAE SANG HO
IPC: G06F15/00
Filed: 1999-03-10
Abstract: PURPOSE: A method for information on demand(IonD) through a user's menu edit is provided to reduce the time spent on receiving the final information and the transmission time of an IonD menu between the device and the IonD server by enabling the user to edit the IonD menu when accessing the IonD server, transmit the edited IonD menu to the device, and use the IonD menu stored in the device. CONSTITUTION: A method for information on demand through a user's menu edit is composed of connection, completion, transmission, and storing or menu. The user connects to the web server through internet by using a computer with a web browser(401) and edits the information on demand menu in the web server(402). At the same time, the web server authenticates the connected user's ID number, and if a saved user's menu exists, it is loaded to the user. The completed message is prepared in the form of a message and transmitted to the device through the communication network(403). The device reads the received menu structure through the communication network and stores it in its non-volatile memory(404).
Patent KR-19990077784-A (KR)
Title: 송신방법 및 송신장치
IPC: H04J13/00
Filed: 1999-03-11
Abstract: 송신방법 및 송신장치에 있어서, 음성데이터의 정보량에 따른 압축율로 각각의 일정한 시간주기동안 음성데이터를 압축부호화함으로써 얻어진 가변레이트 음성패킷데이터(variable-rate audio packet data)는 소정의 제어데이터와 함께 송신된다.    송신되기 위한 음성패킷데이터가 최대의 송신가능한 데이터량을 갖고, 상술된 시간주기내에 상기 음성패킷데이터와 상기 제어데이터를 동시에 송신하기 위한 제어데이터에 대하여 빈영역(free area)이 존재하지 않는 경우에, 각 시간주기동안 발생된 음성패킷데이터의 데이터량은 소정의 값으로 압축율(compression rate)을 상승시킴으로써 제한되고, 그것의 데이터량이 제한되는 음성패킷데이터를 합성함으로써 발생된 프레임데이터와 제한된 데이터량에 대하여 빈영역에 삽입된 제어데이터는 시간주기에서 송신된다.
Patent KR-19990077904-A (KR)
IPC: H01C7/112
Filed: 1999-03-16
Abstract: 본 발명은 전기 특성의 변동이 작으며, 정전기방전에 대한 내전압이 향상되고, 저온소성이 가능한 적층 바리스터 및 이의 제조방법을 제공한다. 이 적층 바리스터는, ZnO를 주성분으로 부성분으로 적어도 Bi 산화물을 함유하는 반도체 세라믹과, Pt를 주성분으로 필연적인 불순물로 Pd를 함유한 내부전극을 교대로 적층시켜 형성된 적층 소결체; 및 이 내부전극과 전기적 접촉을 유지하는 외부전극을 포함하고 있다. 여기에서, Pd의 함유량은 이 내부전극의 주성분인 Pt의 함유량을 토대로 0.1중량% 이하로 조정된다.
Patent KR-20000060567-A (KR)
Inventor: SEO CHANG SEOK
IPC: H04B7/155
Filed: 1999-03-17
Abstract: PURPOSE: An apparatus for delivering propagations of a base station is provided to maintain calls even when a terminal is out of a base station coverage or a repeater coverage as maintaining widow length of a traffic channel in the base station, by generating terminal time delaying components received through a base station antenna and terminal time delaying components received through a repeater antenna within the window length obtained/demodulated in the traffic channel. CONSTITUTION: A signal(Si) inputted from a card end is amplified through a transceiver(402). A directional coupler(404) delays a signal(St) of the transceiver with a signal(Scop) delivered to an optical repeater, and separates a signal(Sdelay) delivered to the air. A delayer(406) delays the signal(Sdelay) to a delay time corresponding to a difference between a base station time delay and a repeater time delay. The signal(Sdelay) is amplified in a high power amplifier(HPA)(408), and a delayed propagation(412) is delivered through an antenna(410).
Patent KR-20000060824-A (KR)
Inventor: NA GI UN
IPC: G02F1/39
Filed: 1999-03-19
Abstract: PURPOSE: An amplification rate controlling device of an optical amplifier is provided to be capable of smoothly performing an optical communication by controlling an amplification rate without using an optical filter, with an optical detector scarcely used. CONSTITUTION: An amplification rate controlling device of an optical amplifier comprises a channel signal generator(100) which consists of a plurality of optical converter(LS11-LSn) each of which receives corresponding channel data(DAT1-DATn) to be transferred to modulate the received data using a corresponding modulation signal(f1-fn). An optical multiplexing circuit(200) receives a signal from the channel signal generator(100), and multiplexes the received signals to output the multiplexed signal as an optical signal. An optical amplifier(300) amplifies an output signal of the optical multiplexing circuit(200), and a tap coupler(400) extracts a signal, not affecting a signal transfer, from output signal of the optical amplifier(300). An optical detector(500) converts a signal from the tap coupler(400) into an electrical signal. A controller(600) demodulates a signal from the optical detector(500), parses information of each channel, and outputs a control value according to the parsed information.
Patent KR-20000060864-A (KR)
Inventor: LEE YUK RAE
IPC: G02F1/13
Filed: 1999-03-20
Abstract: PURPOSE: A gross test equipment for testing a liquid crystal panel is provided to maintain a constant reference brightness by constructing a light source of supplying a backlight with a cooling cathode tube. CONSTITUTION: A gross test equipment for testing a liquid crystal panel a plurality of cassettes(12) which are arranged in series and carry a liquid crystal panel. A robot(14) is installed which carries the liquid crystal panel loaded on the cassette(12). The robot(14) reciprocates on a guide rail(16), which is constructed in parallel with a direction where the cassette(12) is arranged, and loads/unloads the liquid crystal panel on work stages(18,20). A test region(22) is provided oppositely to a region where the cassette is disposed with the guide rail(16) in the center. A module-type backlight(24) is provided at the test region(22), and a light source of supplying a backlight is constructed using a cooling cathode tube.
Patent KR-20000061022-A (KR)
Inventor: MUN CHA JEONG
IPC: H04L12/28
Filed: 1999-03-23
Abstract: PURPOSE: A cell bus clock signal supply apparatus for a cell bus connection board in an asymmetric digital subscriber line network connection system and a method for controlling the same are provided for stabilizing a system by supplying a cell bus clock signal through other cell bus clock supply board when an error occurs in a cell bus clock supply board by forming a cell bus clock supply line in a dual structure. CONSTITUTION: A modem self back board(300) includes a plurality of subscriber matching boards(10) in an asymmetric digital subscriber line connection system, and a cell bus capable of transmitting and receiving an ATM cell between an optical interface board(20) and a maintaining and management board(30). A pattern line is formed in the cell bus so that the interfaced boards(10, 20, 30) receive a cell bus read/write clock signal selectively generated in the first and second cell bus clock signal supply boards(100, 200).
Patent KR-20000066019-A (KR)
Inventor: KIM SONG GANG
IPC: H03H1/00
Filed: 1999-04-12
Abstract: PURPOSE: A variable attenuation filter is provided which is a combination of a filter for passing frequencies at a desired band and a variable attenuator for controlling the level of a signal to a desired level. CONSTITUTION: A variable attenuation filter includes a first low pass filter(100), a first variable resistor(110), a second low pass filter(120), a second variable resistor(130) and a first bias voltage application part(140). The first low pass filter passes a low-band frequency of an input signal to the second low pass filter. The first variable resistor converts the level of the low-band frequency into a desired level. The second low pass filter receives the low-band frequency from the first low pass filter to perform double low pass filtering operation. The second variable resistor converts the level of the low-band frequency passing the second low pass filter into a desired level. The first bias voltage application part applies a level control bias voltage to the first and second variable resistors.
Patent KR-19990064582-A (KR)
Title: 춤추는 노래 반주기
Filed: 1999-04-14
Abstract: ① 발명이 속한 기술분야 : 모션캡처를 통한 가상현실 및 인공지능 사이버 
     캐릭터 및 압력감지 및 기타장비(적외선 센서 등)을 통한 실시간 모션 입력 
     ② 발명의 목적 : 기존 혹은 신개발된 가요반주기에 장착 사이버 캐릭터를 
     이용하여 종래 반주기의 오락성을 극대화한 특허 노래방 체인사업을 도모. 
     ③ 발명의 구성 : 발스텝을 통한 동작입력(키네틱스사의 3DMAX 프로그램에 
     응용된 캐릭터 스튜디오)으로 사이버 캐릭터의 춤을 따라 하고 이를 컴퓨터 
     가 판단하여 정확도 및 사용자레벨을 검색하여 노래반주기와 함께 점수로 표 
     시하는 체감머신형 노래반주기. 
     ④ 발명의 효과 : 특허기술을 통한 상품성 고취 및 사이버 캐릭터 사업 연계 
     로 국내 사이버 캐릭터 사업의 부가가치 생산 및 실용적 상품화를 통해 해외 
     수출 모색 방안 제시.
Patent KR-20000066746-A (KR)
Inventor: YOO DEOK SU
IPC: H05K3/34
Filed: 1999-04-20
Abstract: PURPOSE: A ball supply device in ball dispenser is provided to consume balls by first-in-first-out principle without depositing the balls, thereby greatly decreasing failure rate. CONSTITUTION: A ball supply device in ball dispenser comprises a ball dispenser bed(20), a solder ball supply box(7), a roller(5), an arm screw(10), a screw shaft(9), a guide plate(23), a bottom support rod(11), a tension spring(25) and a ball upward feeder(33). Absorbing holes(18) are penetrated on the top surface of the ball dispenser bed(20). The solder ball supply box(7) opposes the bed(20) and the bottom face of the box is downwardly inclined. The roller(5) is mounted on the rear top end of the box to oppose a recessed rod(3). The arm screw(10) is connected to the box(20) and attached the bottom support rod(11). The screw shaft(9) is screwed with the arm screw.
Patent KR-19990046766-A (KR)
Title: 직물가공방법
IPC: D06Q1/02
Filed: 1999-04-23
Abstract: 본 발명은 직물의 가공방법에 관한 것으로서, 직물에 다양한 형상의 구멍을 형성하면서 동시에 구멍의 둘레부와 일치되게 발포수지부를 형성할 수 있는 새로운 직물가공방법에 대한 것이다. 
     본 발명에 따르면, 중앙부(10)와 둘레부(20)로 구획되는 도안을 가진 직물(1)의 중앙부(10)에 구멍(12)을 형성하는 직물의 가공방법에 있어서, 상기 중앙부(10)에는 황산이 함유된 산성잉크를 프린트하고, 상기 둘레부(20)에는 발포성수지를 프린트한 다음, 열처리과정을 통해서 상기 산성잉크에 함유된 황산성분을 가열농축하여 상기 중앙부(10)를 탄화시킴과 동시에 상기 둘레부(20)에 프린트된 발포성수지를 발포시킨 다음에, 수세 등의 과정을 통해서 상기 탄화된 중앙부(10)를 탈락시켜 구멍(12)을 형성하는 것을 특징으로 하는 직물의 가공방법이 제공된다.
Patent KR-19990083545-A (KR)
Title: 엔진의기통판정장치
IPC: G01B7/30
Filed: 1999-04-27
Abstract: 본 발명은 캠축에 장착된 기통 판정용 신호 부재에 대해 크랭크각 센서를 배치하고, 마찬가지로 캠축에 장착된 신호 부재에 대해 밸브 개폐 타이밍을 검출하는 캠각 센서를 배치한 것에 있어서, 기통 단위에 복수 종류의 검출 신호를 출력시켜 이 검출 신호를 연산함으로써, 신속하면서 오판정이 없는 상태에서 확실히 기통 판정을 행하고, 엔진의 조기 시동이 가능한 엔진의 기통 판정 장치의 제공을 목적으로 한다. 
     엔진의 기통 판정 장치가 캠축에 장착된 제1 신호 부재와 제2 신호 부재 및 상기 제1 신호 부재와 제2 신호 부재에 각각 대향하여 배치된 크랭크각 센서와 캠각 센서를 구비한 다기통 엔진에 적용하는 것으로서, 상기 제1 신호 부재가 엔진의 기통수와 같은 수의 오목부군 또는 볼록부군을 구비하고, 상기 오목부군 또는 볼록부군 중의 한 개의 군이 그 오목부 또는 볼록부의 수를 다른 군의 수와 다른 수로 하는 동시에, 상기 제2 신호 부재가 엔진의 기통수와 같은 수의 밸브 개폐 타이밍용 오목부 또는 볼록부를 구비하고, 상기 제1 신호 부재와 제2 신호 부재에 의거한 신호를 상기 크랭크각 센서와 캠각 센서로 검출하여 기통 판정을 한다.
Patent KR-19990083555-A (KR)
IPC: G10L13/08
Filed: 1999-04-28
Abstract: The mixed decision tree includes a network of yes-no questions about adjacent letters in a spelled word sequence and also about adjacent phonemes in the phoneme sequence corresponding to the spelled word sequence. Leaf nodes of the mixed decision tree provide information about which phonetic transcriptions are most probable. Using the mixed trees, scores are developed for each of a plurality of possible pronunciations, and these scores can be used to select the best pronunciation as well as to rank pronunciations in order of probability. The pronunciations generated by the system can be used in speech synthesis and speech recognition applications as well as lexicography applications. <IMAGE>
Patent KR-20000075079-A (KR)
Inventor: KIM DONG GYU
IPC: H04J11/00
Filed: 1999-05-28
Abstract: PURPOSE: A system for performing fine frequency synchronizations in an orthogonal frequency division multiplexing(OFDM) communications system is provided to make a transmitter insert and transmit a repetition pattern whose front end and back end are the same, and to make a receiver perform the fine frequency synchronizations by using the repetition pattern, so as to obtain an improved quality of speech. CONSTITUTION: A carrier frequency synchronizer(131) outputs an orthogonal frequency division multiplexing(OFDM) signal. The OFDM signal is inputted to an analog to digital(A/D) converter(133) to be converted into a digital OFDM signal. The digital OFDM signal is inputted to a frame synchronizer(135). The frame synchronizer(135) adjusts a frame of the inputted digital OFDM signal, and outputs the digital OFDM signal. A pattern detector(141) detects a repetition pattern included in the digital OFDM signal to output the repetition pattern to a fine frequency offset calculator(143). The fine frequency offset calculator(143) calculates phase differences between a first pattern and a second pattern. The offset calculator(143) finds a fine frequency offset 'delta f' from the first/the second patterns, and outputs the 'delta f' to an offset frequency generator(145). The offset frequency generator(145) inputs the 'delta f' to generate an offset frequency, and outputs the offset frequency to a multiplier(137), then compensates a fine frequency offset of the OFDM signal outputted from the frame synchronizer(135) to output the compensated fine frequency offset to a fast Fourier transformer(139).
Patent KR-20000075142-A (KR)
Inventor: CHONG JONG PYONG
IPC: A61L27/00
Filed: 1999-05-29
Abstract: PURPOSE: A biodegradable porous marrow grafting materials which is able to be well united with tissue of transplanted part and also induces generation of a regenerated marrow and a method for preparing thereof which is able to easily produce porous calcium metaphosphate having various pore sizes are provided. CONSTITUTION: The marrow grafting material or a marrow supporting body are composed of calcium metaphosphate. The porous calcium metaphosphate ceramics is prepared by: (i) surface-modifying a sponge of high molecular polyurethane; (ii) preparing a calcium metaphosphate slurry by mixing calcium metaphosphate powder with water and then adding 1-3 wt.% of a dispersion stabilizer, 3-7 wt.% of a crack preventing agent and 3-7 wt.% of a binder thereto; (iii) immersing the sponge of step (i) in the calcium metaphosphate slurry of step (ii) and then drying; and (iv) sintering and cooling down the sponge of step (iii).
Patent KR-20000005922-A (KR)
Inventor: HAUSLER ALEXANDER
IPC: G05D16/00
Filed: 1999-06-04
Abstract: PURPOSE: A device and a method are provided to inspect a pressure change and a volume change with a reaction of an outer change. CONSTITUTION: The method for inspecting the pressure change inside an inflow pressure system comprises the steps of:giving the pressure difference between the first and the second volume storages; calculating the replaced volume using a valve in the prepared input time interval between the first and the second volume storages, to a pressure difference value that corresponds to the initial time interval; and calculating the volume for replacing two storages to contain the same pressure in both volume storages.
Patent KR-20010001951-A (KR)
Inventor: MUN JEONG MIN
IPC: G02F1/1335
Filed: 1999-06-10
Abstract: PURPOSE: A reflective LCD(liquid crystal display) having an auxiliary light source is provided to improve display quality and light efficiency by adopting a fine preferable structure formed on the surface of an auxiliary light source of a reflective LCD as well as a design method. CONSTITUTION: A reflective LCD includes a transparent light panel(501), an auxiliary light source(503), upper/lower substrates and a reflective LCD panel(507). The transparent light panel(501) has plural protrusion ends parallel to the rear side with an obtuse angle with the rear side. The auxiliary light source(503) is positioned near the incident surface of the light panel(501) to emit light toward the light panel(501). The upper substrate is transparent and parallel to the rear side of the auxiliary light source(503) while the lower substrate has a reflector(505) for the incident light through the upper substrate. Finally, the reflective LCD panel(507) includes a liquid crystal between the upper and lower substrates.
Patent KR-20010002273-A (KR)
Inventor: AHN BYEONG JAE
IPC: H01L29/786
Filed: 1999-06-14
Abstract: PURPOSE: A method for manufacturing a TFT(Thin Film Transistor) is provided to possess a micro crystal silicon film, containing high mobility, without pollution at a low temperature. CONSTITUTION: A seed layer(200) such as a CaF2 or CeO2 is vaporized by PVD(Physical Vapor Deposition) or sputtering method on a washed glass substrate(100). A micro crystal silicon is grown at a low temperature using PECVD(Plasma Enhanced Chemical Vapor Deposition) and a micro crystal silicon active layer(300) is formed. n+ micro crystal silicon layers(400, 450) are formed on the active layer(300). On the n+ micro crystal silicon layers(400, 450), a gate insulation layer(500) is built. After vaporizing Al and patterning, a gate electrode(600) is made. Using a photo resist as a mask, a drain(700) and a source(750) is formed by a dry etching method. A top gate TFT(Thin Film Transistor)(10) is completed. In case of making a bottom gate type TFT, the gate electrode is built on the washed glass substrate. After creating the gate electrode, the seed layer is vaporized. The next steps are same to the manufacturing steps of the top gate TFT(10).