Patent SG-11201407231P-A (SG)
Title: Replaceable wafer support backstop
Inventor: FULLER MATTHEW
IPC: B65D85/38
Filed: 2013-05-06
Abstract: (12) INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property Organization International Bureau (43) International Publication Date 7 November 2013 (07.11.2013) WIPOIPCT (10) International Publication Number WO 2013/166512 A1 (51) International Patent Classification: H01L 21/673 (2006.01) B65D 85/38 (2006.01) B65D 85/86 (2006.01) (21) International Application Number: (22) International Filing Date: (25) Filing Language: (26) Publication Language: PCT/US2013/039763 6 May 2013 (06.05.2013) English (30) Priority Data: 61/643,091 4 May 2012 (04.05.2012) English US (71) Applicant: ENTERGRIS, INC. [US/US]; 129 Concord Road, Billerica, MA 01821 (US). (72) Inventors: FULLER, Matthew; 1731 North Nevada Av­ enue, Colorado Springs, CO 80907 (US). BURNS, John; 6046 Bow Ridge Drive, Colorado Springs, CO 80918 (US). (74) Agent: CHRISTEN SEN, Douglas J.; CHRISTENSEN FONDER P.A., 33 South Sixth Street, Suite 3940, Min­ neapolis, Minnesota 55402 (US). (81) Designated States (unless otherwise indicated, for every kind of national protection available)'. AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (84) Designated States (unless otherwise indicated, for every kind of regional protection available)'. ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG). Published: — with international search report (Art. 21(3)) [Continued on next page] (54) Title: REPLACEABLE WAFER SUPPORT BACKSTOP CJ i-H Fig. 2 102--' \ \ -• \ V_126 11 V -114 (57) Abstract: A wafer container an enclos­ ure portion including a top wall, a bottom wall, a pair of side walls, a back wall, and a door frame opposite the back wall, the door frame defining a front opening, and wafer a support structure including two side wafer supports 5 each side wafer support including a removable backstop. The invention includes maintaining wafer containers by replacing the removable backstop. The invention includes converting shipping containers that ship large diameter wafers vertically to containers to be used in fabrication facilities that store wafers horizontally for robotic pickup for pro­ cessing. i-H o CJ o & WO 2013/166512 A11 lllll llllllll II llllll III lllll lllll III III III lllll lllll lllll lllll lllll llll llll lllllll llll llll — before the expiration of the time limit for amending the claims and to be republished in the event of receipt of amendments (Rule 48.2(h))