Patent TW-401334-B (TW)
Title: The method for manufacturing a punch mold for punching integrated micro objects
Inventor: WU DUNG-CHIUAN
IPC: B23K26/00
Filed: 1997-10-16
Granted: 2000-08-11
Abstract: A method for making a punch mold for punching integrated micro objects comprises the following steps: (a) making a mask with a transparent profile of the integrated micro object; (b) coating a photoresist layer on the substrate; (c) allowing the light source to illuminate the photoresist through the mask such that the light passes through the transparent profile of the mask and illuminates on the photoresist; (d) developing the irradiated photoresist to remove the portion of the irradiated photoresist and obtaining a photoresist template (female mold) with a concave opening formed by the profile of the micro object; (e) repeating the above steps (a) to (d) to produce plural (N) pieces of the same photoresist templates; (f) superimposing N pieces of the photoresist templates, making the photoresist templates with concave opening profile of the micro object to overlap, and resulting in a concave profile opening with a depth larger than the opening of a single photoresist template; (g) applying the metal ceramic compound electroforming on the concave profile opening with a larger depth formed by stacking photoresist templates in order to form the metal ceramic compound punch mold (male mold) with the profile of the integrated micro object and with a considerable thickness after removing the photoresist templates. Further, this invention also discloses another method (second method), which is different from the above-mentioned implementation mode (first method). After producing the photoresist template with a concave profile opening of the micro object according to steps (a') to (d') which are the same steps (a) to (d) as in the first method, then proceed with step (e') applying the metal ceramic compound electroforming on the photoresist template for forming a metal ceramic compound punch mold (male mold) with the profile of the integrated micro object (that is the shape of the concave opening of the photoresist template) but with a smaller thickness; (f') then produce N pieces of the plastic templates having a concave opening of the micro object profile by using plastic injection molding or hot embossing with the metal ceramic compound punch mold; (g') Further, superimposing N pieces of the same plastic templates so that the concave openings with the profile of the micro object in all plastic templates overlap to formn a concave opening with a depth larger than the opening of a single plastic template; (h') applying the metal ceramic compound electroforming on the stacked plastic templates metal ceramic compound punch mold (male mold) with the integrated micro object profile and with a considerable thickness after removing the plastic template. And then, this invention further discloses another method for a punch mold for punching integrated micro objects (third method), which comprises the following steps. It consists of the steps from (a) to (g) as in the first method, or the steps from (a') to (h') as in the second method to produce the metal ceramic compound punch mold (male mold) having a considerable thickness with the profile shape of the integrated micro object, then producing N pieces of the plastic templates (female mold) with the same shape by the plastic injection molding or the plastic hot embossing. Then applying metal ceramic compound electroforming on the plastic templates to mass-produce the metal ceramic compound punch mold having the profile shape of the integrated micro object with a considerable thickness. And there is the fourth method for producing the punch mold for punching integrated micro objects in this invention to form the photoresist templates with an slightly increasing or decreasing opening of the integrated micro object profile and to stack and combine the photoresist templates onto the substrate, and then perform the metal ceramic compound electroforming to form the metal ceramic compound punch mold with the stepped profile of the integrated micro object. In addition, this invention also discloses the punch mold formed by the said producing methods, wherein the mold is constituted by a plurality of the individual punch edges of the shape of the integrated micro object, and each punch edge having a uniform stepped profile with a slightly increasing or decreasing dimension.