Patent SG-11201810277U-A (SG)
Title: An anti-stiction flexible mold and a method for fabricating the same
Inventor: MOXEY MARK ALLEN
IPC: B29C33/50
Filed: 2017-05-19
Abstract: INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property MD 1101/110 111010101111101011111 0 11111111111111111111111111111111111111111111 Organization International Bureau (10) International Publication Number (43) International Publication Date ......0\" WO 2017/200491 Al 23 November 2017 (23.11.2017) WIPO I PCT (51) International Patent Classification: (74) Agent: SPRUSON & FERGUSON (ASIA) PTE LTD; B29C 33/50 (2006.01) CO8K 3/36 (2006.01) P.O. Box 1531, Robinson Road Post Office, Singapore B29C 33/62 (2006.01) CO8K 5/5415 (2006.01) 903031 (SG). B32B 7/06 (2006.01) G03F 7/00 (2006.01) (81) Designated States (unless otherwise indicated, for every (21) International Application Number: kind of national protection available): AE, AG, AL, AM, PCT/SG2017/050262 AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, (22) International Filing Date: CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, 19 May 2017 (19.05.2017) DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, KP, KR, (25) Filing Language: English KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, (26) Publication Language: English MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, (30) Priority Data: SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, 10201604029Y 19 May 2016 (19.05.2016) SG TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (71) Applicants: AGENCY FOR SCIENCE, TECHNOLO- (84) Designated States (unless otherwise indicated, for every GY AND RESEARCH [SG/SG]; 1 Fusionopolis Way, kind of regional protection available): ARIPO (BW, GH, #20-10 Connexis North Tower, Singapore 138632 (SG). GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, WANGI INDUSTRIAL CO. PTE LTD [SG/SG]; 29 Ubi UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, Road 4, Singapore 408619 (SG). TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, (72) Inventors: MOXEY, Mark Allen; c/o Institute of Ma- MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, terials Research and Engineering, 2 Fusionopolis Way, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, #08-03, Innovis, Singapore 138634 (SG). SAIFULLAH, KM, ML, MR, NE, SN, TD, TG). = Mohamed Sultan Mohiddin; c/o Institute of Materials Re- search and Engineering, 2 Fusionopolis Way, #08-03, limo- Declarations under Rule 4.17: _ vis, Singapore 138634 (SG). CHONG, Karen Siew Ling; — inventorship (Rule 4.17(iv)) c/o Institute of Materials Research and Engineering, 2 Fu- — of = - sionopolis Way, #08-03, Innovis, Singapore 138634 (SG). Published: KHOO, Tian Poh; c/o Wangi Industrial Co. Pte Ltd, 29 — with international search report (Art. 21(3)) = Ubi Road 4, Singapore 408619 (SG). CHEW, Ker Yee; c/ o Wangi Industrial Co. Pte Ltd, 29 Ubi Road 4, Singapore = 408619 (SG). = = = = Title: AN ANTI-STICTION FLEXIBLE MOLD AND A METHOD FOR FABRICATING THE SAME (54) [Fig. 1] = = 110 102 = — = 104 = 106 ,—, c:r ii- ..z. , , :. ...:, 108 © © \" (57) : This application relates to an anti-stiction flexible mold comprising a layer of an anti-stiction silicon dioxide deposited \"I r z onto a flexible substrate. There is also provided a method for fabricating an anti-stiction flexible mold comprising the steps of a) depositing a layer of silicon dioxide on a flexible substrate; and b) interacting the layer of silicon dioxide with an anti-stiction agent to 0 form the anti-stiction flexible mold. The resulting anti-stiction flexible mold may have superior anti-stick properties and may enable \" easy separation of mold and substrates after imprinting. [Fig. 1]