Patent SG-11201900864R-A (SG)
Title: Visible alignment markers/landmarks for cad-to-silicon backside image alignment
Inventor: SALEM Rami
IPC: H01L27/02
Filed: 2017-08-21
Abstract: Title: VISIBLE ALIGNMENT MARKERS/LANDMARKS FOR CAD-TO-SILICON BACKSIDE IMAGE ALIGNMENT 300 328 A 0.782 Vss h • 316 41A 33 ‘ 318 336 340 r h 338 Vdd .41----346 342 05 Vss 324 334 326 / 0.6 2 314\ 308 310 320 2\" direction t direction 302 306 3,12 3 r, 4 322\ — ( - FIG. 3 330 (12) INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property Organization International Bureau (43) International Publication Date 22 March 2018 (22.03.2018) WIP0 I PCT 0111111010 0111 °nolo III m nom oiloo Immo oimIE (10) International Publication Number WO 2018/052664 Al (51) International Patent Classification: HOlL 23/544 (2006.01) HOlL 27/02 (2006.01) (21) International Application Number: PCT/US2017/047847 (22) International Filing Date: 21 August 2017 (21.08.2017) (25) Filing Language: English (26) Publication Language: English (30) Priority Data: 15/265,744 14 September 2016 (14.09.2016) US (71) Applicant: QUALCOMM INCORPORATED [US/US]; ATTEN: International IP Administration, 5775 Morehouse Drive, San Diego, California, US 92121-1714 (US). (72) Inventors: SALEM, Rami; c/o QUALCOMM INCOR- PORATED, 5775 Morehouse Drive, San Diego, Califor- nia 92121-1714 (US). ENDRINAL, Lesly Zaren V.; c/o QUALCOMM INCORPORATED, 5775 Morehouse Drive, San Diego, California 92121-1714 (US). LIM, Hyeokjin; c/ o QUALCOMM INCORPORATED, 5775 Morehouse Dri- ve, San Diego, California 92121-1714 (US). BUNNALIM, Hadi; c/o QUALCOMM INCORPORATED, 5775 More- house Drive, San Diego, California 92121-1714 (US). KIM, Robert; 1025 Via Vera Cruz, San Marcos, California 92078 (US). RANGANATHAN, Lavakumar; c/o QUAL- COMM INCORPORATED, 5775 Morehouse Drive, San Diego, California 92121-1714 (US). MALABRY, Mick- ael; c/o QUALCOMM INCORPORATED, 5775 More- house Drive, San Diego, California 92121-1714 (US). (74) Agent: HODGES, Jonas J. et al.; c/o ARENT FOX LLP, 1717 K Street NW, Washington, District of Columbia 20006-5344 (US). (81) Designated States (unless otherwise indicated, for every kind of national protection available): AE, AG, AL, AM, O cc O C (57) : A MOS IC includes a first standard cell including first and second power rails, first and second active regions, and a plurality of metal interconnects. The first power rail extends in a first direction and provides a first voltage to the first standard cell. The second power rail extends in the first direction and provides a second voltage to the first standard cell. The first active region is between the first and second power rails on a first side of the first standard cell. The second active region is between the first and second power rails on a second side of the first standard cell. The second active region is separated from the first active region. The plurality of metal interconnects extend in a second direction between the first and second active regions and between the first and second power rails. The second direction is orthogonal to the first direction. [Continued on next page] WO 2018/052664 Al 11111111111111111110101011111011111011111111111111110111111111001111111110111111111111 AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (84) Designated States (unless otherwise indicated, for every kind of regional protection available): ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG). Declarations under Rule 4.17: as to applicant's entitlement to apply for and be granted a patent (Rule 4.17(11)) as to the applicant's entitlement to claim the priority of the earlier application (Rule 4.17(iii)) Published: — with international search report (Art. 21(3))