Patent SG-11201900146V-A (SG)
Title: Tool health monitoring and matching
Inventor: JAYANTHA RAO RAVICHANDER
IPC: G05B23/02
Filed: 2017-07-26
Abstract: INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property :::` , Organization 3 MD HIM 01E101011M 011E10 01111110111 OM 1101011111011110 1111 MI International Bureau (10) International Publication Number (43) International Publication Date .../- WO 2019/013828 Al 17 January 2019 (17.01.2019) WIPO I PCT (51) (21) (22) (25) Filing Language: (26) (30) (71) (72) International Patent Classification: 94622 (US). BIAGINI, Karen; 91 Lilly Way, Watsonville, G05B 19/418 (2006.01) G05B 23/02 (2006.01) California 95076 (US). BRAUER, Bjorn; 16698 NW Tuc- son Street, Beaverton, Oregon 97006 (US). International Application Number: PCT/US2017/044030 (74) Agent: MCANDREWS, Kevin et al.; KLA-Tencor Corp., International Filing Date: Legal Department, One Technology Drive, Milpitas, Cali- fornia 95035 (US). 26 July 2017 (26.07.2017) English (81) Designated States (unless otherwise indicated, for every kind of national protection available): AE, AG, AL, AM, Publication Language: English AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, Priority Data: CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, 15/646,808 11 July 2017 (11.07.2017) US DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, Applicant: KLA-TENCOR CORPORATION [US/US]; KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, Legal Department, One Technology Drive, Milpitas, Cali- MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, fornia 95035 (US). OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, Inventors: JAYANTHA RAO, Ravichander; 7A, SR TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. Layout, Windtunnel Road, Murugeshpalaya, Banglore 560017 (IN). TAAN, Gary; 342 Adeline Avenue, San Jose, (84) Designated States (unless otherwise indicated, for every California 95136 (US). RUSS, Andreas; 355 Boiceville kind of regional protection available): ARIPO (BW, GH, Road, Brooktondale, New York 14817 (US). DAVIS, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, Roger; 3607 NW 163rd Terrace, Beaverton, Oregon 97006 UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, (US). MANTIPLY, Bryant; 119 Frederick Court, Moun- TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, taro View, California 94043 (US). RAMANATHAN, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, Swati; 100 Grand Avenue, Apt. 702, Oakland, California MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, Title: TOOL HEALTH MONITORING AND MATCHING 1 00 (57) : Systems and methods for tool health monitoring and matching -\. through integrated real-time data collection, event prioritization, and automat- (54) ~<ei~e production data from semiconductor mane aetudn g toa~ ed determination of matched states through image analysis are disclosed. Data En from the semiconductor production tools can be received in real-time. A control ,I, limit impact (CLI) of the parametric data and the defect attributes data can be determined and causation factors can be prioritized. Image analysis techniques attributes data 102 can compare images and can be used to judge tool matching, such as by iden- 1 tifying one of the states at which the two or more of the semiconductor manu- facturing tools match. 103 Identify a relationship between a trend of the defect attributes da~ and the pa ra metric data 104 i Pr7or7Hze ca usa Hon factors ( 145 11 cc 1-1 © —.... OT 1-1 0 ei cc / Collect par semico data at d anufa states for two or more onductormanufaauring Cools //J 1 106 ei M more ofthe semico nductor 12 FIG. 1 C [Continued on next page] WO 2019/013828 Al MIDEDIMOHNOIROMOINEHOMENIMMEHOIS TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG). Published: — with international search report (Art. 21(3))