baber/WOPTO huggingface dataset:
Patent KR-20000001016-A (KR)
Title: INTERNAL power SUPPLY VOLTAGE CONVERTING CIRCUIT
Inventor: SON KYO MIN
IPC: G11C11/413
Filed: 1998-06-08
Abstract: PURPOSE: A voltage converting circuit is provided to prevent the transistors of a boosting circuit or a clock generating circuit from being broken by applying a stable voltage downed below an external power supply voltage as a power supply voltage of the voltage converting circuit, not by applying the external power supply voltage as the power supply voltage thereof. CONSTITUTION: The internal power supply voltage converting circuit comprises: an internal power supply voltage generating part(18) for comparing a voltage difference between a reference voltage and a first internal power supply voltage by use of an external power supply voltage(VEXT) as a power supply, wherein the internal power supply voltage generating part maintains the reference voltage; a clock signal generating part(10) for receiving the first internal power supply voltage as a power supply to generate a clock signal(CLK); a boosting part(12) for receiving the external power supply voltage as a power supply to boost the external power supply voltage in response to the clock signal; a differential comparator(14) for receiving the boosted voltage(Vp) as a power supply to compare a voltage difference between the reference voltage and a second internal power supply voltage, wherein the differential comparator(14) increases its output voltage when the second internal power supply voltage is lower than the reference voltage and decreases the output voltage when the second internal power supply voltage is higher than the reference voltage; and a driver for converting the external power supply voltage in response to the output voltage from the differential amplifier to generate the converted voltage as the second internal power supply voltage.
Patent KR-19990062426-A (KR)
Title: 로킹와셔 및 이를 이용한 로킹장치
IPC: F16B39/36
Filed: 1998-06-16
Abstract: 본 발명의 로킹장치는 구조물 요소간을 조여서 고정하는 고정구의 볼트를 삽통시켜 테이퍼 모양 외형형상을 갖는 인너링과, 인너링을 수용하는 테이퍼 구멍이 형성된 아우터 플레이트와, 인너링을 아우터 플레이트에 가압하는 코일스프링과 코일스프링의 외부방향 끝단에서 볼트에 나사 겹합되는 너트를 포함한다.  구조물에 외력이 가해져 아우터 플레이트가 구조물요소와 함께 너트 쪽으로 변위하여 아우터 플레이트에서 인너링에 볼트 축선방향으로 너트쪽으로 작용하는 힘이 가해지면 이 작용력의 볼트 반경방향 분력에 의해 인너링의 직경이 감소하여 볼트를 조이고, 아우터 플레이트 및 구조물요소의 추가적인 변위를 방지한다.
Patent KR-20000003058-A (KR)
Title: Tracking error signal generator
Inventor: CHO KYE GOK
IPC: G11B7/09
Filed: 1998-06-25
Abstract: PURPOSE: Generator is provided to generate a tracking error signal according to a phase difference caused by a pit depth. CONSTITUTION: The tracking error signal generator comprises a first addition part for outputting a first diagonal line addition signal(A+C) among light detecting signals(A,B,C,D) output from four elements that detects a light reflected from a light dist, a second addition part for outputting a second diagonal line addition signal(B+D) among the light detecting signals(A,B,C,D), a multiplexer for inputting the light detecting signals(A,B,C,D), the first diagonal addition signal(A+C) and the second diagonal addition signal(B+D), selecting "A+C, B+D", "A+B", or "C+D" and outputting a selected one, a phase detector for yielding an addition signal of signal output from the multiplexer and outputting thereof as a tracking error signal concurrently determining whether the tracking error signal is normal or not, and a selective control part for controlling selecting operation of the multiplexer according to the result by the phase difference part.
Patent KR-20000003182-A (KR)
Title: Lcd(liquid crystal display)
Inventor: CHOI KYO HUN
IPC: G02F1/1345
Filed: 1998-06-26
Abstract: PURPOSE: LCD(Liquid Crystal Display) is provided to block EMI(electromagnetic interference) not only at the back side of the LCD panel but also front side of the LCD panel. CONSTITUTION: The LCD(Liquid Crystal Display) includes a lower substrate having a TFT and a pixel electrode, a gate PCB(Printed Circuit Board) and a data PCB connected to the lower substrate and applying an electrical signal thereto, an upper substrate opposing and being connected to the lower substrate and having a black matrix, a color filter and a corresponding electrode on the black matrix and the color filter, and transfers formed on an edge of the lower substrate and electrically connecting thereof to the upper substrates. Edge portions of the black matrix are connected by a first pattern of a photo fame configuration, the first pattern is connected to a conducive pattern that is in contact with the transfers. The transfers are connected to each other by a second pattern of a photo frame configuration, and also connected to a ground terminal of neighboring gate PCB and data PCB.
Patent KR-20000004448-A (KR)
Title: Differential amplification apparatus having offset reducing function, and method for reducing offset.
Inventor: CHANG JONG BAEK
IPC: H03F3/45
Filed: 1998-06-30
Abstract: PURPOSE: A differential amplification apparatus is provided to reduce an offset so that output distortion is prevented. CONSTITUTION: The apparatus comprises a first bipolar transistor(Q1), a second bipolar transistor(Q2), a first current mirror(10), a second current mirror(12). The first bipolar transistor(Q1) inputs a first input voltage. The second bipolar transistor(Q2) inputs a second input voltage. The first current mirror(10) supplies a first current to each output of the first and second bipolar transistors(Q1, Q2). The second current mirror(12) supplies a second current to each output of the first and second bipolar transistors(Q1, Q2) according to a control signal from external. Here, the second current is inversely proportional to an output current of the first bipolar transistor(Q1). A differential output signal is generated by amplifying a differential input signal of a difference between the first and second input voltages.
Patent KR-19990076471-A (KR)
Title: 무선 통신기기의 수신된 메시지 확인방법 및 그 장치
Filed: 1998-07-01
Abstract: 본 발명은 핸드폰이나 무선 호출기에서 수신된 음성 혹은 문자 메시지를 미확인시 핸드폰이나 무선 호출기에 설치된 메시지 확인용 스위치의 작동에 의해 경보음이나 진동을 출력하여 음성이나 문자 메시지의 수신상태를 알릴 수 있도록 하는 무선 통신기기의 수신된 메시지 확인방법 및 그 장치에 관한 것으로, 이는 수신된 음성이나 문자 메시지 미확인시 메시지 확인모드로 전환되어서 메시지 확인용 스위치가 조작되기를 대기하다가, 메시지 확인용 스위치 조작시 핸드폰이나 무선 호출기의 경보모드에 따라 메시지 수신상태를 알리는 경보음이나 진동을 출력함으로써, 호주머니나 가방 혹은 사용자가 핸드폰이나 무선 호출기의 수신된 메시지 상태를 직접 확인할 수 없는 공간으로부터 꺼내지 않고도 음성이나 문자 메시지의 수신상태를 확인할 수 있는 것이다.
Patent KR-19980071926-A (KR)
Title: 바베큐 구이기
Filed: 1998-07-03
Abstract: 본 발명은 황토용기에서 구워지도록 하여 특유의 뛰어난 미각을 즐길 수 있도록 하는 바베큐 구이기에 관한 것이다. 
     통상적으로 고기를 통째로 굽는 바베큐 구이기는 육질의 표면부터 익히는 직접가열방식이기 때문에 고기의 맛이 떨어지고, 조리시간이 오래 걸리는 문제점이 있었고, 바베큐요리의 맛을 향상시키기 위해 고기에 한지 등의 종이로 싼 후, 황토를 싸발라서 불 위에서 굽는 황토구이가 있으나, 고기기름으로 오염된 황토를 양산하게 되어 환경을 파괴하고, 요리작업도 번거로워 실용화되지 못하는 문제점이 있었다. 
     본 발명은, 두 개의 통부재가 결합되어 조리물을 재치하기 위한 내부공간을 형성하는 통으로 이루어지고, 상기 통의 주면에 기름배출을 위한 다수개의 통공을 형성하며, 상기 두 개의 통부재를 밀착시키기 위한 체결수단을 구비한 구이통과; 
     상기 구이통을 회동시켜주기 위한 다수의 다각형봉 롤러와 상기 다각형봉 롤러를 구동시키기 위한 동력전달수단을 포함하는 구동수단과; 상기 구이통 하방에 설치되어 구이통에 열을 가해주기 위한 그릴을 포함하는 가열수단과; 상기 구이통과, 구동수단과, 가열수단을 내장하며, 구이실을 형성하고 하방에 기름받이를 구비한 하우징을 포함하여 구성되며, 상기 구이통은 황토옹기통으로 구성되는 것임.
Patent KR-20000008125-A (KR)
Title: Method of forming contact hole of semiconductor device
Inventor: KIM JAE EU
IPC: H01L21/28
Filed: 1998-07-10
Abstract: PURPOSE: A method of forming contact hole is provided to prevent contact hole not open phenomenon by non perfect photo lithography process in a highly integrated semiconductor device. CONSTITUTION: The method of forming contact hole comprises the steps of forming dielectric layer on a semiconductor substrate and photo sensitive layer, forming contact hole pattern in the photo sensitive layer by photo lithography, doing first etching to rid coproduct generated in the process of the lithography, doing the second etching to rid the revealed dielectric layer and to form contact hole in the dielectric layer. the first and the second etching process may be done by in- situ process.
Patent KR-19990013900-A (KR)
Title: 전자사진용 감광체 기판 및 전자사진용 감광체
IPC: G03G5/00
Filed: 1998-07-15
Abstract: 기판 상에 양극 산화 필름을 갖는 전자사진용 감광체 기판은 실링제로서 플루오르화니켈에 이어서 실링제로서 아세트산니켈로 실링처리하는 2 단계 실링 처리된다.  따라서 전자사진용 감광체 기판을 이용하는 전자사진용 감광체는 1차 회전 및 2차 회전 이후 사이의 전하 전위차가 작으며 인쇄 전에 예비 대전시키지 않고도 흐린 화상 등의 결함을 일으키지 않는다.
Patent KR-20000010073-A (KR)
Title: Manual operating device of electric power shutter
Inventor: PARK HEE SUNG
IPC: E06B9/74
Filed: 1998-07-30
Abstract: PURPOSE: A manual operating device of an electric shutter is provided to manually elevate a shutter(1) by a simple operation when the electricity is intercepted or a motor is damaged. CONSTITUTION: The electric shutter for elevating a shutter(1) by rotating a shutter wheel(6)(7)(8) having a shutter(1) fixed by being delivered the rotating power of a motor(11) to an electric gear(12) has the structure by the steps of: controlling the driving power delivery to an electric gear(13) as transferring on the strut plate(15) for fixing the fixing plate(14) having a motor(11) fixed on a fixing axle(5); fixing an operating string(19) at one side of the motor(11) or the fixing plate(14); the operating string established to be pulled with an operating lever(3) through the inside of the fixing axle(5); establishing a guide plate(16) at one side of a strut plate(15); constructing a guide rod(17) fixed at the motor(11) to be inserted at the guide plate(16) by a spring.
Patent KR-20000015054-A (KR)
Title: Catalysis for ionization of liquid fuel and preparing ceramics bar and ball for far-infrared radiation
Inventor: JEONG DU JIN
IPC: C04B38/00
Filed: 1998-08-27
Abstract: PURPOSE: A porous ceramics is provided which has a good energy emission property. CONSTITUTION: A natural antigorite, amphibole and zirconium silicate are sintered at 1,150- 1,300°C, powdered to 3 micrometer size of base material, and molded, dried and sintered. Obtained product comprises silicon oxide and alumina, radiates the 90 % far-infrared spectrum by sintering with ferrum, calcium, molybdenum, manganese, zirconium and potassium.
Patent KR-20000021760-A (KR)
Title: Oil fan integrated with axle and transfer device of four-wheel drive vehicle with it
Inventor: CHO JAE YEONG
IPC: F16D3/00
Filed: 1998-09-30
Abstract: PURPOSE: An oil fan is provided to decrease the height of a power train and to obtain the gain in designing a vehicle by reducing the height between an engine center and a front axle. CONSTITUTION: An oil fan installs: an oil fan body(100) provided on the lower face of a cylinder block(32) in an engine(30); a connecting housing(110) installed to support an axle input shaft(82) to the oil fan body; and the connecting housing and the oil fan body fixed on an engine mounting bracket(32a) through a connecting unit and a supporting bracket(130). The height between the engine center and the axle center can be reduced through the integration of the front axle with the engine oil fan to decrease the height of a power train.
Patent KR-19990044837-A (KR)
Title: 광학적으로 다양한 제품의 제조를 위한 중합체 코팅 기질
IPC: C09D5/29
Filed: 1998-10-02
Abstract: 가요성 중합체 필름 또는 웨브와 같은 기질 표면상에 스트립성 또는 가용성 박리(release) 코팅을 형성하는 방법을 제공한다.   박리 코팅은 차후 물질층으로 코팅된 다음 용매에 용해되어 층을 박리시킨다.   박리 코팅은 메틸메타크릴레이트 및 에틸아크릴레이트의 공중합체 또는 폴리아크릴산의 단일중합체로 구성된다.   약 60℃ 이상의 유리 전이 온도를 지닌 메틸메타크릴레이트 및 에틸아크릴레이트 공중합체로 구성되거나, 약 100℃ 이상의 유리 전이 온도를 지닌 폴리아크릴산 단일중합체로 구성된 박리 코팅도 또한 제공된다.   박리 코팅은 오버코팅 금속화층의 형성을 위한 우수한 지지 기질을 제공하고, 아세톤에서 쉽게 스트립될 수 있으며, 용융된 중합 물질로부터 가요성 필름 또는 웨브의 인출을 개시하는 인라인 공정 동안 형성될 수 있다.   또한 광학적으로 다양한 플레이크 및 장치의 생성에 이용되는 금속화층의 제조 방법도 제공되고 있다.
Patent KR-19990037340-A (KR)
Title: 발진신호의 충격계수를 점검하기 위한 테스트 회로를 내장한발진회로
IPC: H03K3/0231
Filed: 1998-10-23
Abstract: CR 발진기 (11) 는  커패시터 (11f) 및 저항 (12a) 에 의해 결정되는 소정의 주파수로 클럭신호 (CLK2) 를 생성하고,  테스트 회로 (12) 는  클럭신호를 출력하기 위한 한 쌍의 신호단자 (14a/14b) 및 CR 발진기 (11) 사이에 접속되는데,  외부제어신호 (CTL10/CTL11/CTL12) 가 상기 테스트 회로 (12) 에 공급되는 경우  테스트 회로 (12) 는,  상기 한 쌍의 신호단자 (14a/14b) 를 CR 발진기로부터 격리시키고,  외부 테스트 장치가  CR 발진기의 클럭신호의 생성뿐만 아니라 충격 계수를 쉽게 진단할 수 있도록  클럭신호 (CLK2) 를 점검하여  클럭신호의 충격 계수가 타깃 범위 내로 강하하는지 여부를 확인한다.
Patent KR-19990037411-A (KR)
Title: 반도체 플라즈마 처리 장치
IPC: H05H1/46
Filed: 1998-10-27
Abstract: 피처리체를 플라즈마에 의해 처리하는 반도체 플라즈마 처리 장치는 피처리체를 내부에서 처리하기 위한 배기된 반응실과, 반응실 내부에 있어서, 복수의 직선형 도체로 이루어지는 안테나와, 복수의 직선형 도체의 하나의 단에 접속된 RF 고주파 전원으로 이루어진다.  그 안테나는 상호 등간격으로 안테나의 중심으로부터 방사형으로 배치된 적어도 3개의 직선형 도체로부터 이루어지고, 그 직선형 도체의 각각은 하나의 단이 접지되고 다른 단은 상기 RF 고주파 전원에 접속되어진다.  또 상기 안테나의 직선형 도체의 표면은 절연 처리된다.  또한, 본 발명에 따른 플라즈마 처리 장치는 유도 전기장과 직교하는 방향으로 자기장을 발생시키기 위한 전자석으로 구성되며, 이것을 통해, 안정되고 동시에 고밀도인 플라즈마를 생성하는 유도 결합 플라즈마 처리 장치를 제공한다.
Patent KR-20000032191-A (KR)
Title: Device for dividing weight sinker of underwater equipment by using explosion bolt
Inventor: GONG SANG SIK
IPC: B63G8/24
Filed: 1998-11-13
Abstract: PURPOSE: A device for dividing a weight sinker is provided to secure the exact rise of equipment by increasing the reliability of a displacement action of the weight sinker. CONSTITUTION: When an equipment reaches a regular depth of water, a certain signal is fed into an explosion bolt(16) by a pressure sensor or a pressure switch, and the explosion bolt is disjointed while the gunpowder inside the explosion bolt is exploded by the signal. If the explosion bolt is disjointed, the force for supporting a space between a fixing tool(20) and a bolt fixing stand, and the fixing tool and the bolt fixing stand become free. Then, a weight sinker(12) is sprung out of an equipment main body(10) by the elasticity of the spring interposed between the weight sinker and the equipment main body so that the equipment main body leaves alone.
Patent KR-20000032444-A (KR)
Title: Spin coater for manufacturing semiconductor
Inventor: KIM GANG SOO
IPC: H01L21/027
Filed: 1998-11-14
Abstract: PURPOSE: A spin cater for manufacturing a semiconductor is provided to perform a preliminary and a final alarms before a solution bottle is short of solution. CONSTITUTION: A spin cater for manufacturing a semiconductor injects a photoresist solution on a wafer set at a chuck, and rotates the chuck so that the photoresist solution is coated on the wafer by a centrifugal force. The spin cater comprises plural photo-sensors(48a, 48b), a control portion(52) and an alarm portion(54). The photo-sensors(48a, 48b) are installed at the solution bottle to check volume of residual photoresist solution. Signals from the photo-sensors(48a, 48b) are inputted to the control portion(52). The alarm portion(54) is driven by the control portion(52) which executes an input program to transmit an alarm signal.
Patent KR-20000034471-A (KR)
Title: Symbol demapping device of cable modem termination system
Inventor: YUN SANG HO
IPC: H04L27/34
Filed: 1998-11-30
Abstract: PURPOSE: A symbol demapping device of a cable modem termination system is provided to apply all three methods of I-Q demappings such as a QPSK(quadrature phase shift keying) method, a 16QAM(quadrature amplitude modulation) gray-coded method, a 16QAM differential-coded method by equipping one 16QAM symbol demapper. CONSTITUTION: A 16QAM gray-coded symbol demapper or a 16QAM differential-coded symbol demapper is outputs data of four bit by I-Q demapping with a 16QAM gray-coded method or a 16QAM differential-coded method. A distinguishing unit of symbol distinguishes if an input symbol is a symbol to be demapped to data that differs each other in the 16QAM gray-coded method and the 16QAM differential-coded method by using data of four bits. The converting unit of data outputs the data of four bits or outputs a position of the data of lower two bits according to a control signal to direct one of the 16QAM gray-coded method, the 16QAM differential-coded method and the distinguished result of the symbol distinguishing unit. Because three methods of symbol demapping are applied all by equipping one 16QAM gray-coded demapper or the 16QAM differential-coded demapper, it is very effective in a hardware.
Patent KR-20000037907-A (KR)
Title: Circuit for shielding emi
Inventor: JEONG IL HOON
IPC: H04N5/44
Filed: 1998-12-03
Abstract: PURPOSE: A circuit for shielding emitting of a harmfulness radiation is provided to prevent EMI(Electromagnetic Interference) into electron gun of CPT(Cathode Picture Tube). CONSTITUTION: A circuit for shielding EMI includes a pre-amplifier(10) and an image amplifier(20). The pre-amplifier firstly amplifies a noise component introduced into R, G, and B lines and, secondly, the amplified noise component and a noise component which is second amplified by the image amplifier. The image amplifier amplifies the amplified signal with an image signal and then an electron beam is displayed with a CPT electron gun(30).
Patent KR-20000038006-A (KR)
Title: Device for cooling rod wire
Inventor: KANG SEONG GU
IPC: B21B43/00
Filed: 1998-12-03
Abstract: PURPOSE: A device for cooling a rod wire is provided to evenly cool the rod wire by forming a hollow roller to transfer the rod wire, by densely forming spraying apertures at the both edge units of the hollow roller, and by sparsely forming spraying apertures in the central unit. CONSTITUTION: When rod wires produced in a rod wire producing factory are settled on a hollow roller(30) while maintaining heat, air and cooling water are supplied to an air supplying pipe(34) and a cooling water supplying pipe(35) installed in a swivel joint(33). The air and the cooling water progress along a hollow roll shaft(31) for mixing the air and the cooling water to be mist. The mixed air and cooling water is sprayed through a spraying aperture(36) formed in the hollow roller. Herein, the spraying apertures are densely formed at the edge portions of the rod wires for spraying a large amount of mist, because the rod wires are overlapped at the edge portions. The spraying apertures are sparsely formed in the central portion of the hollow roller. Therefore, the rod wires are evenly cooled regardless of overlapped state.
Patent KR-20000038442-A (KR)
Title: Process for producing phenol
Inventor: KIM JIN EOK
IPC: C07C37/58
Filed: 1998-12-07
Abstract: PURPOSE: Method for preparing phenol from benzene by direct oxidation that uses iron (III) chloride hexahydrate as a catalyst and hydrogen peroxide as a hydroxy radical donor is provided. CONSTITUTION: A phenol is produced by reacting the benzene, 30-50 % of a hydrogen peroxide, 1-100 mol% (based on the benzene) of Fe(III) compound as a main catalyst such as iron(+3)chloride hexahydrate, iron(+3)acetylacetonate, iron(+3)oxalate dihydrate and etc., 1-100 wt% (based on the catalyst) of a promoter such as CuCl2, Cu(+2)acetate, Co(+2)sulfate and etc. in a mixed solvent comprising sulfuric acid of 0.05-0.2 N and polar organic solvent such as acetonitrile, alcohol, acetone in a volume ratio of 1:0.5-0.5:1 under nitrogen or oxygen at 20-50°C.
Patent KR-20000040312-A (KR)
Title: Method for displaying picture in cellular phone
Inventor: LEE BYONG KOOK
IPC: H04B1/38
Filed: 1998-12-17
Abstract: PURPOSE: A method for displaying a picture in a cellular phone is provided to download the picture stored in a computer to display it on the cellular phone after inputting the picture desired by a user to the computer, thereby improving the function of the cellular phone. CONSTITUTION: After a picture desired by a user inputted to a computer, a controller of the cellular phone checks whether a selection key in a key input unit is pressed(401), and displays a menu by which one of pictures can be selected(402). The controller detects the press of the selection key, for example, one of numeric keys(403). If the selection key has been pressed, the controller displays a picture corresponding to the selected number on a display unit of the cellular phone(404). At this time, various icons or photographs of a user can be selected to be displayed. If the display unit supports a color LCD, a color photograph can be displayed.
Patent KR-20000040660-A (KR)
Title: Television having headphone signal transmitter
Inventor: LEE HYEON CHEOL
IPC: H04N5/62
Filed: 1998-12-18
Abstract: PURPOSE: A television having a headphone signal transmitter is provided to enable general AM/FM receiver such as walkman to receive wired/wireless headphone output of a television. CONSTITUTION: A television having a headphone signal transmitter includes a voice processor(10), a voice amplifier(11), a remote controller(7), a microcomputer(9), a switch(21), a signal amplifier(22), an AM/FM modulator(23) and a signal transmitter(24). The voice processor(10) processes the voice signal from an antenna(1). The voice amplifier(11) outputs amplified voice signal to a speaker(12) coupled with a headphone jack. The switch(21) outputs audio signal from the voice processor selectively. The signal amplifier(21) amplifies the output from the switch. The AM/FM modulator(23) modulates the output from the signal amplifier according to a control signal from the microcomputer into radio frequency band. The signal transmitter(24) transmits high frequency signal from the modulator.
Patent KR-20000043822-A (KR)
Title: Method for etching polysilicon layer for forming storage node
Inventor: KIM EUN HYUNG
IPC: H01L21/306
Filed: 1998-12-29
Abstract: PURPOSE: A method for etching a polysilicon layer for forming a storage node is provided to enhance productivity by improving a low etch rate of a polysilicon layer. CONSTITUTION: A method for etching a polysilicon layer for forming a storage node comprises the following steps. A dry etch process for a polysilicon layer is performed by using a polysilicon layer and a photoresist pattern(18) having an etch selectivity as a mask. The dry etch process is performed by etching gases containing an O2 gas. The etch gases comprises the O2 gas of 1 sccm to 10 sccm, a Cl2 gas of 40 sccm to 200 sccm, and an SF6 gas of 3 sccm to 10 sccm.
Patent KR-20000045355-A (KR)
Title: Overlay mark of semiconductor device
Inventor: BAEK SEUNG WON
IPC: H01L21/027
Filed: 1998-12-30
Abstract: PURPOSE: An overlay mark of a semiconductor device is provided to measure simultaneously a critical dimension and an overlay rate between processes by forming overlay marks. CONSTITUTION: An overlay mark of a semiconductor device comprises a first overlay mark(15) and a second overlay mark. The first overlay mark comprises an inner box and an outer box. The inner box and the outer box have a uniform thickness and the same size. An edge portion one side of the inner box is adjacent to an edge portion of one side of the outer box toward a diagonal line direction. The second overlay mark is formed by the same shape as the first overlay mark. The second overlay mark is overlaid with the second overlaid mark when the second overlay mark is rotated as much as 90°.
Patent KR-20000045412-A (KR)
Title: Method for etching oxide layer of semiconductor device
Inventor: PARK CHAN RO
IPC: H01L21/306
Filed: 1998-12-30
Abstract: PURPOSE: A method for etching oxide layer of semiconductor device is provided to use other replace gas instead PFC in etching an oxide layer to decrease the discharge amount of contamination material, thereby previously preventing environmental pollution and enhancing productivity of the device. CONSTITUTION: A method for etching oxide layer of semiconductor device is characterized in that CH3F gas is basically used as etching gas used in etching the oxide layer when the oxide layer used as an interlayer dielectric is etched during fabrication process of the semiconductor device. The etching gas of the oxide layer may be used the mixed gas of CH3F gas and Cl2 gas. Further, mixed gas in which any one of Ar, N2, He, Hi is added to the basic CH3F gas may be used as etching gas.