Patent SG-11201804019Q-A (SG)
Title: Process for the generation of metallic films
Inventor: ABELS FALKO
IPC: C23C16/455
Filed: 2016-11-29
Abstract: INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property -' Organization International Bureau res., 00) (43) International Publication Date ..... ..sr.1 8 June 2017 (08.06.2017) W I P0 1 PCT ID Hit (10) 11111111111111111111 WO International Ell 1111111111 2017/093265 Publication 1111111111111111 IIII Number Al RIO IIII IIIIIIII (51) International Patent Classification: ger Str. 8, 67117 Limburgerhof (DE). GASPAR, Boris; C23C 16/455 (2006.01) CO7F 5/02 (2006.01) Rheinallee 8, 67061 Ludwigshafen (DE). C23C 16/06 (2006.01) CO7F 7/02 (2006.01) CO7F 9/547 (2006.01) C23C 16/18 (2006.01) (74) Agent: BASF IP ASSOCIATION; BASF SE, ZRX - C6, 67056 Ludwigshafen (DE). (21) International Application Number: PCT/EP2016/079156 (81) Designated States (unless otherwise indicated, for every kind of national protection available): AE, AG, AL, AM, (22) International Filing Date: AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, 29 November 2016 (29.11.2016) BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, (25) Filing Language: English HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, (26) Publication Language: English KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, (30) Priority Data: OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, 62/260,672 30 November 2015 (30.11.2015) US SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, 15198196.6 7 December 2015 (07.12.2015) EP TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, 16156733.4 22 February 2016 (22.02.2016) EP ZW. (71) Applicant: BASF SE [DE/DE]; Carl-Bosch-Str. 38, 67056 (84) Designated States (unless otherwise indicated, for every Ludwigshafen am Rhein (DE). kind of regional protection available): ARIPO (BW, GH, (72) Inventors: ABELS, Falko; Gutenbergstrasse 2a, 67354 GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, Roemerberg (DE). SCHWEINFURTH, David, Domin- UG, TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, ique; Elisabethenstr. 64, 64283 Darmstadt (DE). MATOS, Karl; 1921 Colonial Court, Sewickley, 15143 DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, (US). LOEFFLER, Daniel; Heinrich Heine Str. 2b, 67134 LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, Birkenheide (DE). AHLF, Maraike; Eichenweg 15, 69198 GW, KM, ML, MR, NE, SN, TD, TG). Schriesheim (DE). BLASBERG, Florian; Rotlintstr 120, 60389 Frankfurt (DE). SCHAUB, Thomas; Froebelstrasse Published: 11, 67433 Neustadt (DE). SPIELMANN, Jan; Rosenstr. — with international search report (Art 21(3)) 17, 68199 Mannheim (DE). KIRSTE, Axel; Brandenbur- 1-1 .4t in ei M ct\ O IN (54) Title: PROCESS FOR THE GENERATION OF METALLIC FILMS 1-1 C (57) : The present invention is in the field of processes for the generation of thin inorganic films on substrates, in particular ei atomic layer deposition processes. It relates to a process for preparing metal films comprising (a) depositing a metal-containing com - ega ) pound from the gaseous state onto a solid substrate and (b) bringing the solid substrate with the deposited metal-containing com- : f pound in contact with a reducing agent in the gaseous state, wherein the reducing agent is or at least partially forms at the surface of the solid substrate a carbene, a silylene or a phosphor radical.