Patent SG-11201407234Q-A (SG)
Title: Compact ampoule thermal management system
Inventor: CARLSON DAVID K
IPC: H01L21/02
Filed: 2013-06-05
Abstract: (12) INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property Organization International Bureau (43) International Publication Date 12 December 2013 (12.12.2013) WIPOIPCT (10) International Publication Number WO 2013/184760 A1 (51) International Patent Classification: H01L 21/02 (2006.01) (21) International Application Number: PCT/US2013/044256 (22) International Filing Date: 5 June 2013 (05.06.2013) (25) Filing Language: English (26) Publication Language: English (30) Priority Data: 61/655,767 5 June 2012 (05.06.2012) US 13/902,304 24 May 2013 (24.05.2013) US 13/902,310 24 May 2013 (24.05.2013) US (71) Applicant: APPLIED MATERIALS, INC. [US/US]; 3050 Bowers Avenue, Santa Clara, California 95054 (US). (72) Inventors: CARLSON, David K.; 4054 Claitor Way, San Jose, California 95132 (US). SANCHEZ, Errol Antonio C.; 324 Jill Drive, Tracy, California 95377 (US). CHOI, Kenric; 1115 South Daniel Way, San Jose, California 95128 (US). JOSEPHSON, Marcel E.; 7090 Martwood Way, San Jose, California 95120 (US). DEMARS, Den­ nis; 3180 Humboldt Avenue, Santa Clara, California 95051 (US). CUVALCI, Emre; 3 River Oaks Circle, Apt. 823, San Jose, California 95134 (US). SAMIR, Mehmet Tugrul; 1019 Ashbury Way, Mountain View, California 94043 (US). (74) Agent: TABOADA, Alan; Moser Taboada, 1030 Broad Street, Suite 203, Shrewsbury, New Jersey 07702 (US). (81) Designated States (unless otherwise indicated, for every kind of national protection available)'. AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (84) Designated States (unless otherwise indicated, for every kind of regional protection available)'. ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, [Continued on next page] (54) Title: COMPACT AMPOULE THERMAL MANAGEMENT SYSTEM (57) Abstract: Apparatus for thermal management of precursor a for use in substrate processing are provided herein. In some embodiments, an apparatus for thermal management of precursor a for use in substrate processing may include body a having an opening sized to receive a storage container having a liquid or solid precursor disposed therein, the body fabricated from thermally conductive material; one or more thermoelectric devices coupled to the body proximate the opening; and heat sink coupled a to the one or more thermoelectric devices. FIG. 1 WO 2013/184760 Al I lllll llllllll II llllll lllll III lllll III III III lllll lllll lllll llll lllll lllll llll lllllll llll llll TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, Pu EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, _ LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, — GW, KM, ML, MR, NE, SN, TD, TG). with international search report (Art. 21(3)) before the expiration of the time limit for amending the claims and to be republished in the event of receipt of amendments (Rule 48.2(h))