baber/WOPTO huggingface dataset:
Patent KR-20010099408-A (KR)
Title: 자동차용 햇빛 가리개
Inventor: NAM CHUL WOO
IPC: B60J3/00
Filed: 2001-09-25
Abstract: (1)발명이 속한 기술분야 
     자동차용 햇빛 가리개 
     (2)발명의 목적 
     선행인 실용신안공개96-4428호의 경우,햇빛 가리개가 앞면 유리창의 상부에 고정된 체로 있기 때문에 불필요시 이를 제거 하기가 난이한 단점이 제기 되었던 것이다. 
     또한 실용신안등록211108호의 경우,루프캐리어 구조를 갖춘 형태인 바,그 구조가 복잡하여 제조 단가가 고가인 패단이 있었다. 
     이상과 같은 종래의 단점을 해결하기 위하여, 제출된 본원 발명은 루프패널 또는 빗물받이구에 장착되어 전후진 하거나 또는 접철되는 형태의 햇빛 가리개를 두어 상기한 단점을 해결하고자 한 것이다. 
     (3)발명의 구성 
     그물망을 갖고 있는 햇빛가리개(10)는 루프패널(1)의 상방에 장착되고,전원 장치에 의해 전후로 이동되는 것이다. 
     (4)발명의 효과 
     본 발명의 햇빛가리개는 운전자가 필요시 햇빛가리개를 전후방으로 이동시킬 수 있는 특징과,상기한 햇빛가리개는 운전자의 전방 상면을 그늘망 형태의 구조로 햇빛을 차단 하는 바,안전 운전을 할 수 있는 특징이 있는 것이다.
Patent KR-20030027601-A (KR)
Title: A jitter detecting circuit of optical disc
Inventor: BYUN HYEONG GU
IPC: G11B19/02
Filed: 2001-09-29
Abstract: PURPOSE: A jitter measuring circuit for an optical disc is provided to prevent the synchronization of a digital signal at a zero crossing point of an optical pickup wave signal and reduce the range of deviation, thereby reducing the deviation between analog signal and digital signal without using a high frequency clock cycle. CONSTITUTION: A jitter measuring circuit for an optical disc includes an A/D converter(401), a zero crossing detection part(405) for detecting a zero crossing point by detecting a position of polarity conversion from a digital signal output from the A/D converter, a counter part(407) for counting the number of clocks of an optical pickup wave signal and four times clocks from the zero crossing point to a system clock edge point, a zero crossing time operation part(403) for operating Tnj and Tpj from the zero crossing point information output from the zero crossing point detection part, and a jitter calculation part(409) for outputting flag information for representing the system clock number of the optical pickup wave, deviation information and the polarity of the deviation information. Tnj represents a cycle from the zero crossing point to a first 4-times clock and Tpj represents a cycle from a final 4-times clock to the zero crossing point.
Patent KR-20030031314-A (KR)
Title: Device and control method for cooling fan for microwave oven
Inventor: LEE SANG GI
IPC: F24C7/08
Filed: 2001-10-13
Abstract: PURPOSE: A method and a device for controlling a cooling fan of a microwave oven are provided to prevent waste of power caused due to the unnecessary operation of the cooling fan, while achieving optimized cooling effect. CONSTITUTION: A method comprises a first step(100) of detecting the internal temperature of the cavity after completion of cooking operation performed by the heater of the microwave oven; a second step(110) of operating the cooling fan so as to prevent a temperature rise of the reflector plate caused due to the latent heat of the heater, if the temperature detected in the first step is higher than a first predetermined temperature; and a third step(120,130) of stopping operation of the cooling fan, if the temperature detected in the first step is lowered to a second predetermined temperature.
Patent KR-20030032228-A (KR)
Title: Molding structure for footwear mid-sole
Inventor: CHO HYEON MAN
IPC: B29D35/12
Filed: 2001-10-17
Abstract: PURPOSE: Provided is a midsole of shoes which includes several columns with various sizes, patterns, colors and solidity to absorb shock so that it is produced in various forms as the alignment of the columns is changed. CONSTITUTION: The molding structure for the midsole of the shoes is characterized by comprising the parts of: a core(12) which includes a hole(14) to insert the columns(10) with different size and color; a lower mold(22) which is inserted into the core with forming an insertion groove(24) for filling a raw material for the midsole; and an upper mold(18) which forms ribs(20) which are inserted into the hole of the columns to prevent the core from being moved when the columns are inserted into the hole.
Patent KR-20030039770-A (KR)
Title: Encoding method for status information
Inventor: HAN HYO SANG
IPC: H03M13/00
Filed: 2001-11-14
Abstract: PURPOSE: A method of coding state information is provided to analyze sectional error types by receiving a PDU from a transmission end in a receiving end, and to transmit state information by coding the information with an RLIST(Relative LIST) super field method, or by coding with an LIST super field coding method, thereby being adaptively operated in a current traffic state. CONSTITUTION: When a PDU is received from a transmission end, a receiving end confirms whether a current SN(Sequence Number) is the same as a VR(R) to be transmitted. If so, the receiving end updates a maximum sequence VR(US) and the VR(R), and returns to the first state(S1-S3). If the two values are not the same, the receiving end updates the received maximum sequence VR(US), and calculates a 'VR(US)-VR(R)' to obtain a total sectional distance(S4). The receiving end calculates a 'current error SN - previous SN', and obtains an error sectional distance(S5). The receiving end calculates 'error sectional distance/total sectional distance', and confirms whether a calculated value is bigger than a preset threshold value(S6). If so, the receiving end codes state information with an LIST super field coding method, and if not, the receiving end codes the information with an RLIST super field method, then transmits the coded state information to an RLC entity side(S7-S9).
Patent KR-20030043041-A (KR)
Title: Indoor unit of ducted convertible air conditioner
Inventor: KIM MYEONG CHEOL
IPC: F24F1/00
Filed: 2001-11-26
Abstract: PURPOSE: An indoor unit of a convertible air conditioner of a duct-type is provided to reduce the material cost and the number of working processes in a cover panel and to reduce the weight of the indoor unit. CONSTITUTION: An indoor unit of a convertible air conditioner of a duct-type includes a cabinet(52) with a blower and a heat exchanger(53) within, and a cover panel(70). The cabinet forms a discharge port(54) to the top and suction ports(56,62) to the front and the rear. The cover panel selectively closes up one of the suction ports tight. The suction ports are the same in the shape and size. If the cover panel is joined to the front(52a) or the bottom surface of the cabinet, one cover panel closes up one of the suction ports tight, with interchangeableness.
Patent KR-20030028693-A (KR)
Title: Plating bath and method for depositing a metal layer on a substrate
Inventor: COBLEY ANDREW J
IPC: H05K3/24
Filed: 2001-12-14
Abstract: PURPOSE: A plating bath and a method for improving deposition of a metal on a substrate by including hetero atom containing organic compounds in the plating bath that prevent the degradation of plating bath components are provided. CONSTITUTION: The metal plating bath comprises metal salts and an additive consumption inhibiting compound having the following formula 1, R1-X-R2, where X is -S(O)n-, -S(O)n-S(O)p-, -S(O)n-S(O)p-S(O)q-, -S(O)n-S(O)p-S(O)q-S(O)u-, -S(O)n-S(O)p-S(O)q-S(O)u-S(O)v, -S(O)n-S(O)p-S(O)q-S(O)u-S(O)v-S(O)w-, -(S(O)z)m-(CH2)y-(S(O)z')m'-, or -SO2-S-(CH2)y-S-SO2-, where n, p, q, u, v, w, z and z' are each independently an integer from 0 to 2, and m and m' are independently an integer from 1 to 6 and y is an integer of from 2 to 4; R1 and R2 are each independently halogen; -OH; (C1-C20) linear, branched, or cyclic alkyl; (C2-C20) linear, branched, or cyclic alkenyl; or (C2-C20) linear, or branched alkynyl; or (C1-C20) alkyl-O(C2-C3O)tR5, (C1-C12) alkylphenyl-O(C2-C3O)tR5, or -phenyl-O(C2-C3O)tR5, where t is an integer of from 1 to 500 and R5 is hydrogen, (C1-C4) alkyl or phenyl; the alkyl, alkenyl or alkynyl are unsubstituted, or substituted; or X is a hetero atom selected from S, O, N, or N substituted with (C1-C6) alkyl or a tosyl group, and R1 and R2 may be taken together along with the atoms to which they are attached to form a 5 to 18 membered heterocyclic ring that may be unsubstituted or substituted, saturated or unsaturated comprising 1 to 8 hetero atoms, the heterocyclic ring optionally containing one or more carbonyls; and the metal salts are salts of metals selected from the group consisting of copper, gold, silver, platinum, palladium, cobalt, chromium, cadmium, bismuth, indium, lead, tin, rhodium, iridium, ruthenium, zinc, and mixtures thereof.
Patent KR-20030049614-A (KR)
Title: Manufacturing method of biodiesel fuel using animal fats
Inventor: CHOI BYEONG CHEOL
IPC: C10G3/00
Filed: 2001-12-15
Abstract: PURPOSE: A process for preparing bio-diesel oil by using animal oil is provided to simplify the working process, decrease the amount of methanol and save the manufacturing cost so that substantially optimized ecologic bio-diesel oil can be obtained. CONSTITUTION: The process for preparing bio-diesel oil starting from animal oil such as a beef tallow and pork tallow comprises the steps of: pretreating the animal oil by heating in a bath and filtrating, adding an emulsifying agent and methanol to the animal oil and heating them to 65-70 deg.C, introducing a catalyst into the heated mixture and carrying out esterification, cooling to room temperature in order to separate a bio-diesel layer and a glycerol layer, recovering the upper bio-diesel layer, and then carrying out post-treatment of the recovered bio-diesel by washing and drying.
Patent KR-20020052970-A (KR)
Title: Liquid crystal display device
Inventor: TAKENAKA YUICHI
IPC: G02F1/13
Filed: 2001-12-24
Abstract: PURPOSE: To improve the reliability of connection between a semiconductor integrated circuit to be mounted and a signal line. CONSTITUTION: This liquid crystal display device is provided with respective signal lines which are extended in one direction and are arranged in a direction intersecting the one direction and a semiconductor chip which is mounted at one end sides of these signal lines while its bump formation side is directed toward the downward at the surface of the liquid crystal side of one substrate of the substrates disposed oppositely via a liquid crystal. In the device, respective output bumps of the semiconductor chip are connected to corresponding signal lines with an anisotropic conductive layer and have a first output bump group which is arranged at a side becoming close to the signal lines and a second output bump group which is arranged at a side becoming far off from the signal lines and, facing areas with the signal lines of respective bumps of the second output bump group are constituted so as to be larger than those of facing areas with the signal lines of respective bumps of the first output bump group.
Patent KR-20030055799-A (KR)
Title: A method for forming copper layer of semiconductor device
Inventor: KWON SEONG SU
IPC: H01L21/304
Filed: 2001-12-27
Abstract: PURPOSE: A method for forming a copper wiring of a semiconductor device is provided to be capable of improving the uniformity of the copper wiring. CONSTITUTION: An interlayer dielectric(103) having the first and second via hole is formed on a semiconductor substrate(101) having a lower copper wiring(102). After depositing a barrier layer and a copper film on the resultant structure, an insulating layer is formed on the copper film by using spin-coating. The copper film is planarized by CMP(Chemical Mechanical Polishing) using a slurry, wherein the polishing selectivity of the slurry between the copper film and the insulating layer is 1: 1. By removing the barrier layer, an upper copper wiring(108a) is formed in the first and second via hole.
Patent KR-20030056088-A (KR)
Title: Method for selecting frequently accessed menu in mobile phone
Inventor: LEE EUN SEON
IPC: H04B1/40
Filed: 2001-12-27
Abstract: PURPOSE: A method for selecting a frequently used menu in a mobile communication terminal is provided to easily use the mobile communication terminal by directly using frequently used functions. CONSTITUTION: If a user inputs a menu key signal in a standby state, a control unit provides an upper menu. If the user selects a desired menu in the upper menu, the control unit provides a subordinate menu window of the selected menu including a 'favorites' command to a command line. If the user selects a 'menu' command in the command line, a new window of a favorite menu. If the user selects a deletion menu from the favorite menu, the current menu is removed from the favorites. If the user selects an addition menu, the current menu is added to the favorites, and the picture added to the favorites is provided.
Patent KR-20030056177-A (KR)
Title: Neon sign of Luminous device using LED
Inventor: BAEK JUNG HO
IPC: G09F9/30
Filed: 2001-12-27
Abstract: PURPOSE: A radiating apparatus of a sign board using a light emitting diode is provided to obtain maximum advertisement effect at various angles. CONSTITUTION: A light source part(20) comprises a case(22), and an LED assembly part(24) comprising a number of LEDs in the case and a circuit configuration part(26) controlling light emission state of the LEDs arranged in the LED assembly part. A number of optical fibers(30) receives light from the light source part and transfer it. And a light emitting part(40) comprises a diffusion lens being connected to the optical fiber respectively and radiating the light transferred from the optical fibers, and a panel part comprising the diffusion lens.
Patent KR-20030056180-A (KR)
Inventor: JUNG BONG GI
IPC: H04N5/225
Filed: 2001-12-27
Abstract: PURPOSE: A PC camera is provided to improve the assembly structure of a PC camera lens unit so as to reduce the cost and increase reliability of the PC camera. CONSTITUTION: A PC camera includes a lens unit, a housing(4), a USB connector and cable(6,7), a main body case(8), and a stand(9). The lens unit has a barrel(2) having a lens(2a), a lens ring(3) for preventing the lens from colliding with an image sensor(5), and a knob(1) having an inner space where the barrel and the lens ring are combined with each other. The knob has a hook(1a) for preventing the barrel from being detached from the lens unit, and a boss(1b) combined with the lens ring. The housing accommodates the barrel, lens ring and knob and includes an image plane. The USB connector and cable are used for interfacing with a PC. The main body case is connected to the PC through the cable and includes the lens unit and housing. The stand support the case.
Patent KR-20020055428-A (KR)
Inventor: KAWASHIMA SHINGO
IPC: H05B44/00
Filed: 2001-12-27
Abstract: PURPOSE: To reduce a current for turning into reverse biased state the organic EL element of a scanning line in an unselected state as to a passive organic EL display device. CONSTITUTION: For the passive matrix organic EL display panel, which has organic EL elements arranged in matrix along rows and columns, a disclosed organic EL drive circuit is equipped with multiple drive sources 21, 22, 23, ..., 2n, which supply a drive current from a 1st power source 5 to data lines selected for every scan, multiple discharge switches 31, 32, 33,..., 3n, which connect all data lines to a voltage-holding circuit 4 in the beginning of scanning timing, the voltage-holding circuit 4 which holds each data line at a specific voltage, and horizontal drive changeover switches 11A, 12A, 13A, 14A..., 1mA which are provided by the scanning lines of the respective rows and switch to hold unselected scanning lines in a high-impedance state, by grounding or connecting the selected scanning lines to a 2nd power source 6.
Patent KR-20030056932-A (KR)
Title: Method for manufacturing of semiconductor device
Inventor: CHA HAN SEOP
IPC: H01L21/336
Filed: 2001-12-28
Abstract: PURPOSE: A method for manufacturing a semiconductor device is provided to be capable of preventing leakage current of a low power device and restraining RC delay of a high speed operation device. CONSTITUTION: Gate electrodes(23,23a) and a source and drain region(27) are formed at a semiconductor substrate(21) defined to the first and second region by an isolation layer(22), respectively. The first and second insulating spacer(25,26) are sequentially formed at both sidewalls of the gate electrodes(23,23a). An oxide layer(28) is formed on the resultant structure to expose the gate electrodes. A silicon layer(29) is then formed on the exposed surface of the gate electrodes. By selectively removing the oxide layer(28) located on the second region, the source and drain region(27) of the second region are exposed. A metal silicide layer(31) is then formed on the silicon layer(29) and the source/drain region(27) of the second region.
Patent KR-20030057618-A (KR)
Inventor: KIM GWAN EON
IPC: G11C29/00
Filed: 2001-12-29
Abstract: PURPOSE: A synchronous semiconductor memory device is provided to further simplify the hardware configuration of the data input path so as to implement the parallel test for supplying all of the solid pattern mode and the checker board pattern mode. CONSTITUTION: A synchronous semiconductor memory device includes a plurality of DQ pins(200), a plurality of bit lines(240), a data input structure(210) placed between the plurality of DQ pins(200) and the plurality of bit lines(240), a plurality of multiplexers(221,222) and a plurality of data input driving blocks(230). The test mode rising mode is inputted to the multiplexer(221) corresponding to the representative DQ pin(DQ0) and the sub DQ pin(DQ2), whereas the test mode rising data is inputted to the multiplexer(222) corresponding to the representative DQ pin(DQ0) and the sub DQ pin(DQ1,DQ3).
Patent KR-20030058659-A (KR)
Title: The aparatus and method of agenting Official service
Inventor: KANG GYEONG HUI
IPC: G06Q99/00
Filed: 2001-12-31
Abstract: PURPOSE: A device and method for acting electronic civil appeal is provided to request and manage a civil affair and to pay a charge by on-line through the Internet without visiting a government office directly. CONSTITUTION: A user inputs basic information on a web screen for requesting a civil affair service and presses a button(40). A portal server creates an electronic signature based on the inputted information(42). A civil affair management event receiving unit searches and extracts data necessary for the requested civil affair service(44). At this time, the data are converted into XML data. A government office for receiving the XML data is designated based on an address of the user. An XML/EDI message is created, and the created XML/EDI message is transmitted to an XML/EDI relay server(46). If the XML/EDI message is received(48), an identity of the user is authenticated(50). An XML/EDI message is created for supplying civil affair XML data including an electronic government seal to the user, and the created XML/EDI message is transmitted to a portal server(52). If the XML/EDI message is received, the XML/EDI message is verified(54). A payment method with respect to the civil affair management is selected(56). The selected method is transmitted to a payment agency server through a payment agency server interface unit(58).
Patent KR-20010071076-A (KR)
IPC: A61K8/49
Filed: 1999-07-29
Abstract: The present invention relates to compositions suitable for use as sunscreens which provide excellent stability, efficiency, and UV protection efficacy in a safe, economical and aesthetically appealing manner (on-skin transparency, low skin irritation). Methods of use for these compositions are also disclosed. The compositions comprise: a) a safe and effective amount of a UVA-absorbing dibenzoylmethane sunscreen active; b) a safe and effective amount of a stabilizing agent having the formula  wherein R1 and R1' are independently in the para or meta position and are independently a hydrogen atom or a straight- or branched chain C1-C8 alkyl radical, R2 is a straight- or branched-chain C1-C12 alkyl radical; and R3 is a hydrogen atom or a -CN radical; c) a safe and effective amount of a UVB sunscreen selected from the group consisting of organic sunscreen actives, inorganic physical sunblocks, and mixtures thereof, wherein the inorganic physical sunblock is present in a total amount of less than or equal to about 5%; and d) a carrier suitable for application to the skin wherein the mole ratio of the stabilizing agent to the UVA-absorbing dibenzoylmethane sunscreen active is less than 0.8 and wherein the composition is substantially free of benzylidene camphor derivatives.
Patent KR-20010079687-A (KR)
IPC: C14C1/06
Filed: 2000-06-03
Abstract: 이 발명은 동물원피의 석회침과 탈모를 위한 참가제에 대한 것임.  이 는 수용액상에서 10-50중량% 폴리사카라이드 용액; 5-25중량% 머캅토카복실산 또는 그 염; 1-10중량% 머캅토알코올 또는 그 알카리염을 포함함.  전술한 보조제에는 동물원피를 석회침 하는 동안 알카리, 무기 설파이드, 또는 하이드로설파이드 및 음이온 또는 비이온계 계면활성제를 추가할 수 있음.
Patent KR-20010074985-A (KR)
Title: 정보매체 주사장치 및 그 장치의 동작방법
IPC: G11B21/08
Filed: 2000-07-04
Abstract: 본 발명에 따른 장치는 축(11) 주위에 트랙을 갖는 정보매체(10)를 주사하는데 적합하다. 이 장치는 정보매체의 주사 스폿(21)에 및 이 스폿으로부터 정보를 전송하는 수단(20)을 구비한다. 또한, 이 장치는, 접선 방향으로 주사 스폿(21)을 이동시키는 접선 변위수단(30)과 방사방향으로 주사 스폿(21)을 이동시키는 방사 변위수단(40)을 구비한다. 이 장치는, 방사 변위수단(40)과, 주사 스폿(21)의 순간 방사 위치의 측정값인 방사 위치 신호(cos(9β r ), sin(9β r ))를 발생하는 방사 위치 측정수단(61, 62)를 제어하기 위한 제어수단(50)을 구비한다. 이 장치는, 주사 스폿이 트랙을 따라가는 주사 모드와 트랙이 교차된 변위 모드를 구비한다. 본 발명에 따른 장치는, 주사 스폿(21)의 접선 위치(α)를 나타낸 접선 위치 신호(Sα)를 발생하는 접선위치 검출수단(70)에 특징이 있다. 이 제어수단(50)에 의해, 변위 모드에서, 방사 방향으로 주사 스폿을 이동시킨다.  원하는 접선 위치(α e )와 순간 접선 위치(α b )간의 차이의 함수인 방사 변위 시간(T r )을 갖는 시간 간격에서 변위가 이루어진다.
Patent KR-20010085786-A (KR)
IPC: F16H61/32
Filed: 2000-07-18
Abstract: 본 발명은 최소한 하나의 구동 샤프트(drive shaft)와 하나의 출력 샤프트(output shaft) 그리고 각 샤프트에 배치된 다수의 톱니바퀴를 구비한 자동차용 기어박스(gear box)에 관한 것이다. 이때 톱니바퀴는 액추에이터(actuator)를 통해 맞물려지고 해체된다. 이 기어박스(gear box)는 또한 출력 샤프트(output shaft)를 차단시키기 위해 액추에이터(actuator)에 의해 작동되는 주차 브레이크 장치(parking brake device)를 갖추고 있다.
Patent KR-20010086043-A (KR)
IPC: A61K31/70
Filed: 1999-11-09
Abstract: 본 발명은 하기 화학식 1 및 그의 약학적으로 허용가능한 염의 제조 방법에 관한 것이다.  화학식 1의 화합물은 다양한 박테리아 및 원생동물의 감염을 치료하는데 사용될 수 있는 항생제이다.  또한, 본 발명은 화학식 1의 화합물을 포함하는 약학 조성물 및 화학식 1의 화합물을 투여하여 박테리아 및 원생동물 감염을 치료하는 방법에 관한 것이다.  또한, 본 발명은 화학식 1의 화합물 및 그 제조에 유용한 중간체의 제조 방법에 관한 것이다: 
     화학식 1 
     
       
     
     상기 식에서, 
     R 1 , R 2 , R 6 , R 7 , R 8 및 R 9 는 각각 본원 명세서에 정의된 바와 같다.
Patent KR-20010080564-A (KR)
IPC: A61K31/4709
Filed: 1999-11-22
Abstract: 본 발명은 각종 균에 대하여 강력한 항균력을 가지며 안전성이 높은 퀴놀론 유도체를 제공할 수 있는 화학식 I의 화합물, 이의 염 및 이들의 수화물에 관한 것이다. 
     화학식 I 
     
       
     
     위의 화학식 I에서, 
     R 1 및 R 2 는 수소원자 또는 알킬기이며, 
     n은 1 내지 4이며, 
     Q는 화학식 Ia의 구조이다. 
     화학식 Ia 
     
       
     
     위의 화학식 Ia에서, 
     R 3 은 알킬기, 알케닐기 등이며, 
     R 4 는 수소원자 또는 알킬티오기이며, 
     R 5 는 수소원자, 아미노기 등이며, 
     X 1 은 할로겐 원자 또는 수소원자이며, 
     A 1 은 질소원자 또는 화학식 II의 구조이며, 
     Y는 수소원자 또는 에스테르 형성기이다. 
     화학식 II 
     
       
     
     위의 화학식 II에서, 
     X 2 는 수소원자, 아미노기 등이며, 
     R 4 와 R 3 및 X 2 와 R 3 은 일체화하여 환상 구조를 형성할 수 있다.
Patent KR-20010089722-A (KR)
IPC: H01L21/304
Filed: 2000-09-13
Abstract: 본 발명은 CMP 후 세정(post-CMP scrubbing)과 결합된 기체 형태의 화학 세정 유체(chemical cleaning fluids)를 이용하여, 이로 인하여 화학 물질의 세정 효율(the cleaning efficiency)을 향상시키는 방법에 관한 것이다.  추가적인 장점은 이다.  화학 유체의 이용 또한 감소될 것이라는 점이다.  본 발명의 실시예에 따르면, 변화하는 시간 범위에 대한 다양한 세정 단계동안에 증기 생성기(vapor generator)는 화학 용액(예를 들면, 불화수소산(hydrofluoric acid))의 증기를 밀폐된 브러쉬 스테이션(a sealed brush station)에 유입시킨다.  증기는 웨이퍼 표면상의 오염 물질(contaminants) 또는 결함(defects)과 상호 작용한다.  이러한 결함은 증기의 반응(reaction) 또는 액화(condensation)에 대하여 차별적인 위치(preferential sites)를 제공하므로, 증기는 이들 결함 및 오염 물질과 선택적으로 상호 작용한다.  그러므로, 화학 물질의 세정 효율이 향상된다.  세정 프로세스는 밀폐된 브러쉬 스테이션(a sealed brush station)내에서 수행되므로, 이용되는 화학 물질의 양을 보존하는 것 또한 가능하다.  다른 실시예에서, 웨이퍼 표면을 젖은 상태로 유지할 필요가 있는 경우에는 화학 증기(the chemical vapors)는 탈이온수(deionized water)와 함께 유입될 수 있다.  기체 형태의 화학 물질의 이용은 흐름 제어 관점으로부터의 장점 또한 제공하는데, 이는 웨이퍼 표면상의 화학 반응의 정확한 제어가 용이하게 이루어질 수 있기 때문이다.
Patent KR-20010101384-A (KR)
IPC: H01H33/66
Filed: 2000-06-05
Abstract: 본 발명은 용기내의 스페이스의 유효활용이 가능하고, 장치의 소형화 및 저코스트화가 도모되고, 신뢰성 및 안전성이 높은 스위치기어를 얻는다. 
     진공용기(1)는 금속제 탱크(2)를 절연성 수지(5)로 몰드해서 구성되고, 그 절연성 수지(5)의 일부가 진공용기(1)에서 연출하는 접지접점측 가동도체(13)의 연출부를 둘러싸도록 통상으로 형성되어 절연배리어(20)를 구성하고 있다. 
     그리고, 접지겸 시험용 단자(21)가 그 일단을 절연배리어(20)내로 연출시키고, 또 타단을 절연성 수지(5)외로 연출시키도록 배치되고, 접지겸 시험용 단자 (21)와 접지접점측 가동도체(13)가 절연배리어(20)내에서 제 2의 플렉시블도체 (22)에 의해 전기적으로 접속되어 있다.