baber/WOPTO huggingface dataset:
Patent KR-100788306-B1 (KR)
Title: Vacuum low temperature extraction equipment with ultrasonic vibrator
Inventor: BAEK KWAN WOONG
IPC: A47J31/44
Filed: 2006-08-30
Granted: 2007-12-27
Abstract: A vacuum low temperature extraction device with an ultrasonic vibrator for herbal medicine is provided to accelerate vaporizing an effective ingredient and to collect optimum extract by installing ultrasonic vibrators to destroy cell membrane and a first and a second condenser to collect vapor generated from dried herbal medicine. A vacuum low temperature extraction device(100) with an ultrasonic vibrator for herbal medicine comprises the followings: an extraction tank storing dried herbal medicine and water with a predetermined ratio, and containing an external vessel with many ultrasonic vibrators and a cover(114); a first condenser(120) collecting vapor generated from the heated dried herbal medicine, condensing, and flowing condensed liquid to a liquid storing tank(140); and a second condenser(130) collecting the vapor from the extraction tank secondarily, condensing and extracting remaining liquid, and flowing the liquid to an outside. An ultraviolet sterilizer lamp(141) is installed in the liquid storing tank.
Patent KR-101339866-B1 (KR)
IPC: H01L21/205
Filed: 2006-09-06
Granted: 2013-12-10
Abstract: 특정 양상에서, 가스 소스, RF 전력 소스 및 기판 프로세싱 챔버에 커플링되는 가스 튜브를 포함하는 기판 증착 장치가 제공된다.  가스 튜브는 가스 소스/원격 플라즈마 가스 소스로부터 기판 프로세싱 챔버로 프로세스 가스 및 세정 플라즈마를 운반하도록 구성되며 RF 전력 소스는 RF 전력을 기판 프로세싱 챔버로 커플링하도록 구성된다.  더욱이, RF 초크는 RF 전력 소스와 가스 소스에 커플링되고 RF 초크는 기판 프로세싱 동안 가스 튜브 내의 플라즈마 형성을 방지하도록 RF 전력 소스와 가스 소스 사이의 전압 차를 감쇄시키도록 구성된다.  다수의 다른 양상들이 제공된다.
Patent KR-100781018-B1 (KR)
Title: Lumbar support device for a vehicle
Inventor: PARK SANG SOO
IPC: B60N2/90
Filed: 2006-09-06
Granted: 2007-11-30
Abstract: A lumbar support device for a vehicle is provided to improve operating performance by hinging a first plate with a second plate so as to form an acute angle and applying bending force to a pad. A lumbar support device for a vehicle comprises a lumbar cable(140), a first plate(150) and a second plate(151). The first plate has a bent portion(151') formed in an upper end connected to the lumbar cable. The second plate has an upper end hinged to a lower end of the first plate and the bent portion formed in a lower end connected to the lumbar cable. When the lumbar cable is shrunk, a portion hinged with the first and second plates forms an acute angle and applies bending force to a pad(110).
Patent KR-100712045-B1 (KR)
Inventor: PARK TAE KYO
IPC: A44B11/00
Filed: 2006-09-12
Granted: 2007-04-27
Abstract: 본 발명은 버클의 본체 외면 일측에 가죽외피를 부착시켜 미적 질감을 향상시킨 버클의 제조방법에 관한 것이다. 이러한 본 발명은 금형장치로부터 중앙에 중공부(12)를 구비함과 아울러 몸체의 상면에 수용홈(14)을 갖는 사각형상의 본체(16)를 만들어 일정한 장소에 위치시키는 단계와; 접착력을 향상시키기 위해, 상기 사각형상의 본체(16) 상에 묻은 기름, 불순물 및 선지의 이물질을 고압장치로부터 나오는 모레(sand)를 이용하여 제거하는 단계와; 이물질이 제거된 사각형상의 본체(16)를 에폭시수지로 칠한 후, 상기 사각형상의 본체(16)를 연마하는 단계와; 연마가 완료된 사각형상의 본체(16)를 니켈 또는 골드 또는 니켈과 골드가 혼합된 칼라로 도금한 후 건조하는 단계와; 상기 사각형상의 본체(16)의 수용홈(14)의 모양에 따라 가죽외피(18)를 재단하는 단계와; 상기 사각형상의 본체(16)의 수용홈(14)의 상면과 재단된 가죽외피(18)의 저면에 접착제를 골고루 바르는 단계와; 접착제가 도포된 상기 사각형상의 본체(16)의 수용홈(14)의 상면에 접착제가 도포된 가죽외피(18)를 밀착시키는 단계를 포함하여 이루어진다. 
       
     버클, 본체, 수용홈, 가죽외피, 금형장치
Patent KR-100761298-B1 (KR)
Title: Plasma display device
Inventor: PARK HUN GUN
IPC: G02B5/20
Filed: 2006-09-25
Granted: 2007-09-27
Abstract: A plasma display device is provided to display effectively a black image and to improve light room contrast by attaching an external light shielding sheet for absorbing and shielding external incident light on a front surface of a panel. A plasma display device includes a plasma display panel, a transparent substrate, a first base part(110), a first pattern part(120), and a second pattern part. The transparent substrate is separated from or attached to a front side of the plasma display panel. The first base part is formed on the transparent substrate. The first pattern part is formed on the first base part. The second pattern part is formed on the transparent substrate and is formed of a metallic material. In the first pattern part, a width of a lower end is larger than a width of an upper end and the lower end is positioned adjacently to the panel in comparison with the upper end. In the first pattern part, the width of the lower end is 1.2 times to 3.5 times greater than the width of the upper end.
Patent KR-100773781-B1 (KR)
Title: Multi access protocol device using a living body authentication and a control method thereof
Inventor: KIM YOUNG HO
IPC: G06K19/07
Filed: 2006-09-28
Granted: 2007-11-12
Abstract: A multi access protocol device using a living body authentication and a control method thereof are provided to protect data and maintain a high security at the time of using one time password. A multi access protocol device using a living body authentication includes a main body and a cap. The main body includes a memory(130), a fingerprint authentication module(120), a living body authentication unit(110), a USB connector(150), a USB control unit(140), a display unit(190), a wireless communication unit(180), an OTP control unit(160), an open/close sensing unit(170), and first and second light emitting diodes(200,210). The memory stores an authorized user's fingerprint according to a predetermined registration process. The living body authentication unit carries out an authentication by comparing a finger print input from the fingerprint authentication module with the fingerprint stored in the memory. The USB control unit controls the USB connector. The display unit displays information according to an OTP control unit's control. The open/close sensing unit senses whether or not the cap is opened. The wireless communication unit transmits and receives the information to and from a server, a CD machine(320), or an ATM(310) of a bank.
Patent KR-100694855-B1 (KR)
Title: Putting trainning equipment
Inventor: PARK JONG SOO
IPC: A63B69/36
Filed: 2006-10-25
Granted: 2007-03-14
Abstract: An indoor putting training equipment is provided to form a backsight to enable a user to do correct putting while using a flat mat and to enable a user to exercise short putting of less than 200cm intensively. The indoor putting training equipment includes a putting pad(10), a target block(20), an valid target portion(22) and a mirror(30). The putting pad(10) has a level surface. The target block(20) is installed on the best position of the imagination putting line of the putting pad(10) and is made of a solid material. The valid target portion(22) made of a sound absorbing material is installed on the center portion of the target surface of the target block(20). The mirror in a standing state is positioned on the forefront of the putting pad(10).
Patent KR-100783761-B1 (KR)
Title: Vacuum dry apparatus
Inventor: HUH YUN SUNG
IPC: H01L21/304
Filed: 2006-10-27
Granted: 2007-12-07
Abstract: A vacuum dry apparatus is provided to prevent a spot from being formed on a substrate due to a vacuum pressure difference in a chamber by using a pressure regulating member, when a small or large area substrate is dried. A dry vessel(2) has a chamber(C) in which a drying operation is carried out. An exhaust port(P) is provided on an outer surface of the dry chamber, and communicates with the dry chamber. A vacuum pump(P1) is connected to the exhaust port, and generate vacuum pressure in the dry chamber via the exhaust port. A pressure regulating member(6) has a pressure regulating wall(W) protruding downwardly from an upper surface of the dry chamber to reduce the vacuum pressure.
Patent KR-100827878-B1 (KR)
Title: Vacuum cleaner
Inventor: HYUN KIE TAK
IPC: A47L9/10
Filed: 2006-10-31
Granted: 2008-05-07
Abstract: A vacuum cleaner is provided to decrease the height of the vacuum cleaner and enhance cleaning efficiency by reducing flow resistance in a space wherein cyclone flow generates. A vacuum cleaner comprises a first cyclone part(110), a second cyclone part(120), and a first passage divider(131). The first cyclone part primarily separates debris by the first cyclone flow of suction air. The second cyclone part secondarily separates the debris by the second cyclones flow inside plural second cyclones of the suction air passed through the first cyclone part. The first passage divider seals a space from an inlet of the first cyclone part to outlets of each second cyclone, and also has an area having plural through-holes. The second cyclones, whose surface contacted to the first passage divider is horizontal, collect the debris from the center of the first cyclone part, and has the outlets and a dust discharging port inclined toward two ends in an axial direction. A vortex splitter has the outlets of the second horizontal cyclones to prevent vortex of air discharged through the outlets of the second horizontal cyclones.
Patent KR-100751862-B1 (KR)
Title: Track type slim voice-coil former
Inventor: YEOUM KANG MOON
IPC: H04R9/02
Filed: 2006-11-01
Granted: 2007-08-23
Abstract: A track type slim voice-coil former is provided to couple the voice-coil former with the vibration plate by directly coupling a reinforcing plate with the voice-coil former. A track type slim voice-coil former(10) includes reinforcing plates(20) at regular intervals. Cut units(21) are formed at both sides of the reinforcing plate(20). The voice-coil former(10) has cut units(12) engaged with the cut units(21) of the reinforcing plate(20). A voice-coil(30) is wound around a lower end of the voice-coil former(10). The cut units(12) of the voice-coil former(10) are formed at regular intervals only at an upper part of the voice-coil former(10).
Patent KR-101072120-B1 (KR)
IPC: C08L55/02
Filed: 2006-11-07
Granted: 2011-10-10
Abstract: 본 발명은 내약품성(ESCR) 및 강인성(Toughness)이 우수한 아크릴로니트릴-부타디엔-스티렌 수지 조성물에 관한 것으로, 보다 상세하게는 아크릴로니트릴-부타디엔-스티렌 공중합체 아크릴레이트-스티렌-아크릴로니트릴 공중합체 초대구경 괴상중합 아크릴로니트릴-부타디엔-스티렌 공중합체 및 스티렌-아크릴로니트릴 공중합체를 포함하여 이루어지는 것을 특징으로 하는 아크릴로니트릴-부타디엔-스티렌 수지 조성물에 관한 것이다. 
     	본 발명에 따르면, 냉장고 내상의 우레탄 단열층에 사용되는 발포제에 대한 내약품성, 강인성 및 충격강도가 우수한 아크릴로니트릴-부타디엔-스티렌 수지 조성물을 제공하는 효과가 있다. 
     	내약품성, 충격강도, 아크릴로니트릴-부타디엔-스티렌, 아크릴레이트-스티렌-아크릴로니트릴, 스티렌-아크릴로니트릴, 괴상중합
Patent KR-100815754-B1 (KR)
Title: Driving circuit and organic electro luminescence display therof
Inventor: PARK YONG SUNG
IPC: G09G3/20
Filed: 2006-11-09
Granted: 2008-03-20
Abstract: A driving circuit and an organic electro-luminescence display device are provided to implement various display devices by converting a digital data signal to an analog data signal corresponding to the number of data lines of the display device. A first decoder(251) outputs plural first decoding signals by using upper bits of a digital data signal. A first selector(252) generates plural first select signals and plural first sub-select signals corresponding to the first decoding signals. A switch(253) selects first and second reference voltages from plural reference voltages by using the first select and sub-select signals. A second decoder(254) outputs plural second decoding signals by using lower bits of the digital data signal. A second selector(255) generates plural second select signals and plural second sub-select signals corresponding to the second decoding signals. A data voltage generator(256) includes plural voltage dividers, which divide the first and second reference voltages. The voltage divider receives the second select and sub-select signals and generates the data voltage.
Patent KR-100728377-B1 (KR)
Title: Method for real-time updating gis of changed region vis laser scanning and mobile internet
Inventor: KIM HYUN JUNG
IPC: G09B29/00
Filed: 2006-11-09
Granted: 2007-06-13
Abstract: A method for updating geographic information of changed local facilities in real-time by using a laser scanner and the mobile Internet is provided to quickly and precisely update the geographic information of a changed region with corrected coordinates, and make a GIS(Geographic Information System) photo drawing by obtaining the numeric coordinates and 3D point coordinates, and correcting the obtained coordinates. Image data, numeric data, and the 3D point coordinates for a target region is obtained by using a CCD(Charge Coupled Device) camera, a GPS(Global Positioning System)/IMU(Inertial Measurement Unit), and a laser scanner. The digital photo survey coordinates are obtained by modeling the obtained data and a digital terrain model is made by using the 3D point data. The digital coordinates are obtained by orthographically correcting the digital photo survey coordinates. The corrected coordinates are obtained by obtaining reference point coordinates through survey, obtaining the reference point coordinates from a GIS server, and removing error coordinates between the reference point coordinates from the obtained digital coordinates.
Patent KR-100837467-B1 (KR)
IPC: F16K11/07
Filed: 2006-11-27
Granted: 2008-06-12
Abstract: 본 발명은 스풀 밸브로 유입되는 공급압을 고압과 저압으로 선택적으로 유입되도록 하여, 저압에 의한 정밀제어도 가능하도록 하는 비례제어 솔레노이드 밸브에 관한 것이다. 
     이를 위한 본 발명은, 오일 펌프로부터 토출되는 작동유에 의한 라인압이 유입되는 제1포트와, 제1포트의 근접 위치에 장착되어 상기 라인압보다 저압의 작동유가 공급되는 제2포트와, 제1포트 및 제2포트로 유입되는 작동유를 선택적으로 흐름 전환되도록 하는 스풀 밸브와, 스풀 밸브의 일측을 탄성력으로 가압하도록 장착되는 리턴 스프링과, 전류 공급에 따라 상기 스풀 밸브를 선택적으로 슬라이딩 가능하도록 가압하는 가압부와, 제1포트 및 상기 제2포트로 유입된 라인압 또는 저압이 분기되어 상기 스풀 밸브의 측면으로 유입되도록 하는 피드백 포트를 제공한다. 
       
     비례제어 솔레노이드 밸브, 스플 밸브, 랜드, 리텅 스프링
Patent KR-100783469-B1 (KR)
Title: Mobile device
Inventor: CHOI MIN WOONG
IPC: H04B1/38
Filed: 2006-11-29
Granted: 2007-12-07
Abstract: A mobile device is provided to implement slimness and free replacement and to simplify assembly process by combining a housing with a case through a hook. A mobile device comprises an operation part(110), a magnet(114), an elastic body(120), a substrate(140), a magnetic sensor(144), a housing(130), and a case(150). On the upper surface of the operation part(110), a contact part a user touches is formed. The magnet(114) is coupled to the operation part(110). The elastic body(120), combined with the lower surface of the operation part(110), supplies elastic force to the operation part(110). One side of the substrate(140) confronts the lower surface of the operation part(110). The magnetic sensor(144), combined with the other side of the substrate(140), detects magnetic force from the magnet(114). The housing(130), at which an opening part and plural coupling bosses are formed, covers a portion of the operation part(110). The contact part is exposed to the external through the opening part. The case(150) has plural coupling slots corresponding to the coupling bosses so as to be combined with the housing(130).
Patent KR-100857178-B1 (KR)
IPC: G06Q30/00
Filed: 2006-12-14
Granted: 2008-09-05
Abstract: 본 발명은 코디네이팅을 통한 상품 중개 시스템 및 그 중개방법에 관한 것으로, 구매자가 체형, 치수, 스타일, 색상 등의 코디변수를 입력하고, 코디네이터의 제안서 콘테스트를 통한 권장구매 또는 코디네이터의 포트폴리오를 통한 모방구매, 전속 코디네이터의 지정을 통한 전속 코디구매 중 어느 한 구매방법을 지정하면, 중개서버가 해당 구매방법에 따라 판매자모드에서 해당 코디변수 정보를 로딩시키고, 그 코디변수 정보에 따라 다수의 판매자로부터 코디네이팅 화상데이터를 제안서로 접수받아 이를 구매자에게 전달하여 구매여부 및 결제처리를 행하도록 한 코디네이팅을 통한 상품 중개 시스템 및 그 중개방법을 제공함에 그 목적이 있다. 
     본 발명을 적용하면, 구매자는 자신의 체형이 적용되어 전문가적 시각으로 제작된 다수의 코디제안서를 열람할 수 있으므로 온라인 쇼핑시의 구매자의 안목 결여 및 착용한 듯한 가상체험을 할 수 없다는 단점을 해소할 수 있게 되며, 판매자는 코디네이팅을 통해 판매가 활성화된다는 장점이 있다.
Patent KR-100851373-B1 (KR)
IPC: F16H63/30
Filed: 2006-12-14
Granted: 2008-08-08
Abstract: 본 발명에 따른 수동 변속기용 자동 변속 조작 장치는, 실렉트 샤프트 및 이 실렉트 샤프트를 직선 이동시키는 실렉트 액츄에이터와, 상기 실렉트 샤프트에 설치되어 복수개의 시프트 러그 중 하나를 선택하는 콘트롤 핑거와, 시프트 샤프트 및 이 시프트 샤프트를 직선 이동시키는 시프트 액츄에이터와, 이 시프트 샤프트에 설치되어 상기 콘트롤 핑거를 상기 실렉트 샤프트를 중심으로 회전시키면서 상기 시프트 러그들 중 어느 하나를 움직여 각 변속단의 변속이 이루어지도록 하는 시프트 캡을 포함하여 구성됨으로써, 기구적 연결 방식이 아닌 두 개의 액츄에이터를 이용하여 변속 작동이 가능하도록 구성되어, 전체적인 구성이 간단해지고, 레이아웃 구조도 유리해지며, 특히 변속 조작감이 향상되고 변속 작동의 정확성 및 신뢰성이 높아지는 효과를 갖는다. 
       
     변속 레버, 액츄에이터, 콘트롤 핑거, 실렉트, 시프트, 시프트 러그
Patent KR-100827361-B1 (KR)
Title: Windbreak using the plant with water storage
Inventor: KANG YEE SEOG
IPC: A01G9/02
Filed: 2006-12-19
Granted: 2008-05-06
Abstract: A windbreak road structure using vegetation with a water collecting part is provided to enable the storing of rainfall against a dry season and shut off exhaust gas and traffic din effectively. A windbreak road structure using vegetation with a water collecting part comprises: (a) planting the trunk of vegetation(20) with base soil in a vegetation box(10), wherein the base soil is covered with a water-permeative film and a hollow space is formed between the water-permeative film and the bottom of the vegetation box; (b) laying the vegetation box under the ground at the edge of a road(40), parallel to the driving direction, thereby allowing only the branches and leaves of the vegetation to be exposed above the road surface; and (c) installing a drain pipe(30) extended from the road surface to the base soil of the vegetation.
Patent KR-100799424-B1 (KR)
Title: A simultaneous heat recovery and pre-reduction method of hot sinter
Inventor: CHO KIL WON
IPC: C22B1/16
Filed: 2006-12-19
Granted: 2008-01-30
Abstract: A method for partially reducing red-hot sintered ore and recovering waste heat of red-hot sintered ore is provided to reduce the consumption of coke by injecting red-hot sintered ore in the form of partially reduced iron oxide into a blast furnace, and enhance the energy efficiency in an ironmaking process by recovering waste heat generated in a partial reduction process of the red-hot sintered ore and using the recovered waste heat in the other process. A method for partially reducing red-hot sintered ore and recovering waste heat of red-hot sintered ore comprises the steps of: (a) primarily crushing sintered ore to obtain red-hot sintered ore(22), injecting the red-hot sintered ore and reduction gas into a reduction furnace(30) to perform a reduction reaction; (b) injecting sintered ore(32) partially reduced by the injected reduction gas into a blast furnace; and (c) recovering waste heat of reduction gas heated by the red-hot sintered ore in a process of partially reducing the red-hot sintered ore. The step(c) comprises the steps of: (c1) injecting the reduction gas heated by the red-hot sintered ore in the process of partially reducing the red-hot sintered ore into the reduction furnace again through a high temperature gas circulation system(40); (c2) integrally attaching a waste heat vapor generator(41) to the high temperature gas circulation system to generate vapor from the waste heat vapor generator by temperature of gas passing through the high temperature gas circulation system, and driving an electric generator(42) using the generated vapor to produce electricity(E); and (c3) exhausting a portion of the reduction gas injected again into the reduction furnace through a gas exhaust system(45) such that the portion of the reduction gas is used as a heat source of the other process.
Patent KR-100796614-B1 (KR)
Title: Fabricating of thin film transistor
Inventor: PARK BYOUNG KEON
IPC: H01L29/786
Filed: 2006-12-19
Granted: 2008-01-22
Abstract: A method for manufacturing a thin film transistor is provided to obtain excellent characteristics by forming a polycrystalline silicon layer having a good crystalline characteristic. A substrate(200) is provided. An amorphous silicon layer is formed on the substrate. A diffusion layer is formed on the amorphous silicon layer. A polycrystalline silicon layer is crystallized by heat-treating the substrate at atmosphere of a metallic mixing solution. The diffusion layer is removed therefrom. A gate insulating layer(220), a gate electrode(230), and source/drain electrodes(251,252) are formed on the polycrystalline silicon layer. The diffusion layer is formed with a silicon oxide layer, a silicon nitride layer or an organic layer. The diffusion layer has a thickness of 5 to 5000 angstrom.
Patent KR-100728862-B1 (KR)
Title: Slip prevention material and construction method thereby
Inventor: LEE KWANG LEY
IPC: C09D1/06
Filed: 2006-12-22
Granted: 2007-06-15
Abstract: Provided are an antislip composition applied to a median bus lane, a school zone, an antislip equipment, etc., and a method for constructing an antislip structure by using the composition. The antislip composition comprises: a powder composition which comprises 20-70 wt% of at least one cement selected from five kinds of portland cement (common portland cement, moderate heat portland cement, high-early-strength cement, low heat portland cement, sulfate-resisting portland cement), a mixed cement and a specific cement, 0.02-1.5 wt% of a water-reducing agent, 0.005-0.08 wt% of a thickener, 1-10 wt% of a swelling agent and 20-75 wt% of aggregate; and a liquid composition which comprises 2.5-50 wt% of at least one selected from a polymer latex, a water-soluble polymer, a liquid resin and a monomer, 0.5-2 wt% of a shrinkage controller, 0.5-20 wt% of an aqueous pigment and 45-90 wt% of water.
Patent KR-100839341-B1 (KR)
Title: Limiting panel structure of blast fan of boiler
Inventor: SIM YOUNG SUB
IPC: F24H9/00
Filed: 2006-12-26
Granted: 2008-06-17
Abstract: A regulator plate installed on a blower of the boiler is provided to reduce air inducing noise further by having a structure for guiding air and to improve reliability and convenience in using the regulator plate. A boiler having a blower equipped with a regulator plate for reducing noise includes a combustion chamber which is located beneath a heat exchanger of a boiler to burn fuel with a burner, a blower(30) which is located at a side of the combustion chamber to induce air from outside to burner, a regulator plate(40) which is located at an end of discharge opening(31) of the blower to reduce noise at the time of operating the blower, and an air guide which is located at the regulator plate to guide air. The air guide has an installation surface at the upper portion of the regulator plate, a contact surface(42) extended downward from the installation surface with an angle, and a rounded surface which connects the contact surface with a guide surface.
Patent KR-100835421-B1 (KR)
Title: Method for fabricating a metal wire in a semiconductor
Inventor: JO BO YEOUN
IPC: H01L21/28
Filed: 2006-12-27
Granted: 2008-06-04
Abstract: A method for fabricating a metal line of a semiconductor device is provided to secure reliability by improving a gap-fill characteristic of an interlayer dielectric between metal lines. An interlayer dielectric(202) and an etch-stop layer are sequentially formed on a semiconductor substrate(200) having a base layer. A contact hole is formed at the semiconductor substrate by etching selectively the etch-stop layer and the interlayer dielectric. A conductive layer is formed to bury the contact hole. A contact plug(206) is formed by removing the conductive layer and the etch-stop layer. A buffer layer(208) is formed to cover a part of both sides of the contact plug. A metal line(216) is formed by depositing a metal layer and patterning the metal layer.
Patent KR-100853147-B1 (KR)
IPC: H01L21/68
Filed: 2006-12-27
Granted: 2008-08-20
Abstract: 본 발명은 습식세정장비의 웨이퍼 정렬장치에 관한 것으로, 수평상태에서 순차적으로 공급되는 제1 및 제2 웨이퍼 그룹 중 어느 하나를 수평축을 중심으로 180도 회전시켜 경면반전시키는 전환유닛과, 상기 전환유닛에서 제1 및 제2웨이퍼 그룹을 연속 전달받아 제1 및 제2웨이퍼 그룹의 웨이퍼들이 상호 경면을 마주보며 수납되는 푸셔유닛을 포함하는 습식세정장비의 웨이퍼 정렬장치를 제공한다. 본 발명에 의하면, 복수의 웨이퍼를 페이스 투 페이스 방식으로 수납하면서도 푸셔유닛의 동작을 간소화하여 이에 소요되는 시간을 최소화하므로 전체 공정에 소요되는 텍트타임을 단축시켜 스루풋을 향상시키는 효과가 있다. 
       
     웨이퍼, 정렬장치, 경면반전, 페이스 투 페이스, 자세전환
Patent KR-100834240-B1 (KR)
Title: Heating system for semiconductor device fabricating equipment
Inventor: KIM YOUNG MI
IPC: H01L21/027
Filed: 2006-12-28
Granted: 2008-05-30
Abstract: A heating system of equipment for manufacturing a semiconductor device is provided to improve uniformity by easily diffusing acid. A heating system of equipment for manufacturing a semiconductor device includes a housing(102), a plate(108), a lamp(110), a condensing lens(112), and a driver(114). The plate is positioned on a wafer and includes a hot wire and a heat sensor for sensing heat. The lamp is installed in an upper portion of the plate. The lamp has a wavelength band in which a resist coated on the wafer does not react in order to diffuse acid formed on the wafer after exposure. The condensing lens condenses light from the lamp. The driver supports and adjusts the condensing lens to control a concentration position of the light from the lamp on the wafer so as to partially adjust line width precision of the wafer.