Patent SG-11201807552Y-A (SG)
Title: Solid-state impedance matching systems including a hybrid tuning network with a switchable coarse tuning network and a varactor fine tuning network
Inventor: COUMOU DAVID J
IPC: H05H1/46
Filed: 2017-03-21
Abstract: INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property C.--.` MD HIM 01E111 11111 111111111100111111111111111IIMIDE MIMI Organization International Bureau (10) International Publication Number 03 (43) International Publication Date ......P' WO 2017/204889 Al 30 November 2017 (30.11.2017) WIPO I PCT (51) International Patent Classification: (72) Inventors: COUMOU, David J.; 852 Arlberg Circle, Web- H03H 7/40 (2006.01) H05H 1/46 (2006.01) ster, New York 14580 (US). BROWN, Dennis M.; 4 HO3H 7/01 (2006.01) Pittsford Manor Lane, Pittsford, New York 14534 (US). RADOMSKI, Aaron T.; 6275 Marrowback Road, Cone- (21) International Application Number: PCT/US2017/023403 sus, New York 14435 (US). OLDZIEJ, Mariusz; 1790 Athena Drive, Avon, New York 14414 (US). CHAWLA, (22) International Filing Date: Yogendra K.; 2 Callaway Ridge, Fairport, New York 21 March 2017 (21.03.2017) 14450 (US). LINCOLN, Daniel J.; 755 Shumway Road, Brockport, New York 14420 (US). (25) Filing Language: English (26) Publication Language: English (74) Agent: LAFATA, Joseph M. et al.; Harness, Dickey & Pierce, P.L.C., P.O. Box 828, Bloomfield Hills, Michigan (30) Priority Data: 48303 (US). 15/162,960 24 May 2016 (24.05.2016) US (81) Designated States (unless otherwise indicated, for every (71) Applicant: MKS INSTRUMENTS, INC. [US/US]; 2 kind of national protection available): AE, AG, AL, AM, Tech Drive, Suite 201, Andover, Massachusetts 01810 AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, (US). CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, (54) Title: SOLID-STATE IMPEDANCE MATCHING SYSTEMS INCLUDING SWITCHABLE COARSE TUNING NETWORK AND A VARACTOR FINE TUNING NETWORK 500 -- 808 _S --° A HYBRID TUNING NETWORK WITH A RFIN r . i = \ r Coarse Tuning Network c 502 _, LRF 1 , 504 N — R1c, C1 e , — 1 = _1 _2 c1 C1,,,_=°=_C2,,, —+—U T T r Fine Tuning Network 5101, L11 ::I L1 m : (girl @Ti n , D1 • A D3 D1 f , A D3 f3 L2 , • - ,L ci • • • 4 4 . , D2 Y Y D4 D2f2 I D‘ L3 o1 I L3 c „, I I F21 11 *--. R2r, Rif, R21, L4 ' :1L5cL= L4,,, I .1 I- 5 m , = • —•— • • • = — 1 • --s — R2,1 C3,1 C4, 1 506 R2,,, \" C 3 ,. C4c,, 506 L ' 1 C10 _C2f1 1-4' C3f, Cif, C2fr, C3 f,, 508 —1 R3,1 GND or RFou r .) f- 512 508 R3c,, GND or RFour J 509 _1 506 520 or GND RFour 506 GND L 509 or RFouT J 0 1-1 FIG. 12 CN (57) : An eVC including coarse and fine tuning networks. The coarse tuning network includes a circuit: receiving a RF input X) GC signal from a RF generator; outputting a RF output signal to a reference terminal or load; and receiving a DC bias voltage. The circuit 7 1. is switched between first and second states. A capacitance of the circuit is based on the DC bias voltage while in the first state and 0 is not based on the DC bias voltage while in the second state. The fine tuning network is connected in parallel with the coarse tuning N network and includes a varactor. The varactor includes: a first diode receiving the RF input signal; and a second diode connected in a IN back-to-back configuration with the first diode and outputting a RF output signal to the reference terminal or load. A capacitance of 1-1 c: , the varactor is based on a second received DC bias voltage. ei o [Continued on next page] WO 2017/204889 Al MIDEDIMOMOIDEIROIDEM001010111111HRIONVOIS HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (84) Designated States (unless otherwise indicated, for every kind of regional protection available): ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG). Declarations under Rule 4.17: — as to applicant's entitlement to apply for and be granted a patent (Rule 4.17(11)) — as to the applicant's entitlement to claim the priority of the earlier application (Rule 4.17(iii)) Published: — with international search report (Art. 21(3))