baber/WOPTO huggingface dataset:
Patent KR-20000056667-A (KR)
Inventor: SONG SEUNG KOO
IPC: G01N21/00
Filed: 1999-02-24
Abstract: PURPOSE: A design of a circuit for manufacturing a mixed liquor suspended solid meter is provided to precisely measure a concentration of a floating material suspended in a mixed liquor. CONSTITUTION: A design of a circuit for manufacturing a mixed liquor suspended solid meter includes a power supply for supplying a uniform power and mounted with a noise filter for removing noise generated around the power supply, a detecting part having a light source composed of a light emitting diode(LED) of 530nm and a light receiving part composed of CdS cells and attached with a resistor for preventing damage of the LED due to an excessive current flow and a variable resistor for controlling the strength of the LED, and an output part for outputting a voltage value detected by the detecting part by using a DC volt meter.
Patent KR-20000056693-A (KR)
Inventor: CHO JEONG RAE
IPC: H01J29/46
Filed: 1999-02-25
Abstract: PURPOSE: An electrode of an electron gun for a cathode ray tube is provided to prevent a deformation of a periphery of an aperture after a process of heat treatment, thereby increasing a reliability of a product. CONSTITUTION: An electron gun for a cathode ray tube, in which electrons discharged from a cathode are radiated through an aperture of a plate type electrode and condensed through a cylindrical electrode, comprises a frame(20) formed at a periphery of the aperture to be extended from a center portion of the aperture toward the outside. The frame is formed into a cross type. The plate type electrode is formed of a plate type parent metal and comprised of a first and second electrode having three apertures through which red, green and blue colored electron beams are respectively passed. The plate type electrode is formed with an embossing portion(14) at a circumference apart from the center of the aperture at a distance to have a mechanical strength.
Patent KR-20000061495-A (KR)
Inventor: YOON GAP SIK
IPC: B41J25/304
Filed: 1999-03-26
Abstract: PURPOSE: A device is provided to enhance the quality of printings by maintaining the head gap of an ink-jet printer regardless of the position of a carriage which is adjustable in the height of a carriage shaft. CONSTITUTION: In an initial assembly, a head gap sensor(20) senses a head gap while a carriage(8) is reciprocated. The sensed value is over an error range and a controller drives a driving motor to rotate a driving gear clockwise. Thus, power of the driving gear is delivered to a paper supplying gear through an intermediate gear to rotate the paper supplying gear clockwise. Due to the rotation of the paper supplying gear, an idler arm butts an idler gear into a connecting gear and the rotation is delivered to a cam gear(28) through the connecting gear.
Patent KR-19990078549-A (KR)
Title: 가스밥솥자동취반기의점화에러발생환기회로
IPC: A47J27/62
Filed: 1999-04-02
Abstract: 본 발명은 가스밥솥 자동취반기의 제어 기술에 관한 것으로서, 특히 취반동작중 점화실패 등으로 인한 에러가 발생된후 재가동 명령이 입력되면 먼저 환기팬이 작동되어 취반기 내부에 잔존해 있는 가스를 우선적으로 배출시킴으로써 점화에러시 발생할 수 있는 폭발의 위험을 피할 수 있도록 한 가스밥솥 자동취반기의 점화에러 발생 환기회로에 관한 것이다. 
     본 발명은 특히, 운전 또는 정지중 자기 고장 진단 기능에 의해 각종 안전장치의 작동 또는 연소중의 화염소실이나, 착화 실패 등의 이상 상태가 발생한 경우 즉시 운전을 중지하고 해당 에러코드를 디지탈로 점멸 표시 한후 우선적으로 가스배출 환기신호를 인가하는 마이컴(1)과, 환기팬의 작동시간을 설정하기 위한 시간설정부(21)와, 상기 마이컴(1)으로부터 환기신호가 인가되면 상기 시간설정부(21)에서 설정된 시간만큼 환기팬 작동 신호를 발생하는 타이머(20)와, 상기 타이머(2 0)의 출력신호에 따라 취반기의 일측에 설치된 환기팬(f)을 온시키는 팬모터(M) 구동용 릴레이(RY)로 구성된 특징이 있다.
Patent KR-20000065785-A (KR)
Inventor: SUNG JUN BAE
IPC: G11C11/407
Filed: 1999-04-09
Abstract: PURPOSE: A delay synchronization circuit is provided, which additionally includes a digital delay and oscillation means capable of generating a high frequency signal to generate a signal having various phase delays, thereby overcoming operation range limit. CONSTITUTION: A delay synchronization circuit includes a phase detector(400) for detecting the phase of an external clock signal, a controller(410) for receiving the output signal of the phase detector to control the state of reset and control signals, and a first delay(420) for transmitting the external clock signal, having a predetermined delay time. There is also included first and second oscillators(430,440) for generating high frequency signals, a second delay(450) for receiving the delayed clock signal sent through the first delay to generate a plurality of clock signals having different phase delays under the control of the output signal of the first oscillator and the reset signal, a third delay(460) for receiving the delayed clock signal transmitted through the first delay to generate a plurality of clock signals having different phase delays under the control of the output signal of the second oscillator and the reset signal, a selector(470) for selecting a pair of clock signals having the same phase delay, and a logic means(480) for combining the pair of clock signals selected by the selector to generate an inner reference clock signal having the same period as that of the external clock signal.
Patent KR-19990088010-A (KR)
Title: 모선보호계전장치
IPC: H02H3/44
Filed: 1999-04-30
Abstract: 본 발명은 CT 포화 대책 부착 분할 보호용 계전기를 삭감하고, 간단한 구성으로 하는 모선 보호 계전 장치에 관한 것이다. 
     전력 계통의 변류기로부터의 샘플링 데이터를 사용해서 동작량 및 억제량을 산출하고, 복수의 보호 영역을 포함하는 영역의 내부·외부 사고를 판정하는 연산 수단(12)과, 개별 보호 영역에 대응하는 샘플링 데이터로부터 얻어지는 동작량의 변화량이 연산 수단으로 얻어지는 동작량의 변화량에 계수를 곱한 값보다도 클 때, 그 변화량이 큰 개별 보호 영역을 사고 발생 영역으로 판정하는 동작량 판정 수단(13)과, 전 보호 영역에 대응하는 샘플링 데이터의 변화분으로부터 사고 발생을 검출하는 사고 검출 수단(14)과, 동작량 판정 수단의 판정 결과와 사고 검출 수단의 검출 결과로부터 사고의 발생을 판정하여 출력하는 사고 모선 판정 수단(15)과, 연산 수단의 연산 결과와 사고 모선 판정 수단의 판정 결과로부터 사고 발생 영역으로의 차단 출력을 송출하는 차단 모선 판정 수단을 설치한 모선 보호 계전 장치이다.
Patent KR-20000073104-A (KR)
Inventor: PARK KI JONG
IPC: B29C53/58
Filed: 1999-05-06
Abstract: PURPOSE: A structure of power transmission in apparatus for making synthetic resin pipe is provided to improve silence and power transmission efficiency by constituting the apparatus for making synthetic resin pipe in such a way that the apparatus uses gear engagement to transmit power to a roller and is also provided to make synthetic resin pipe without difficulty by making revolution speed of the roller equally. CONSTITUTION: A structure of power transmission in apparatus for making synthetic resin pipe comprises a drive shaft(52) being driven by a drive motor(50), a drive pinion(53) inserted around the outer periphery of the drive shaft(52) to rotate therewith, a center gear(54) inserted around outer periphery of a central axis(55) and geared to the drive pinion(53) to rotate therewith, a plurality of driven pinions(56) mounted along and geared to the outer periphery of the center gear(54) to rotate therewith, axis support members(58) for rotatively supporting the opposite ends of the central axis(55) and also rotatively supporting the opposite ends of the drive shaft(52) and a driven shaft(57) through bearings, an air tube(59) of which one end is engaged with the axis support members(58) and another end is connected to a blower(80) to supply cooling air, and universal joints(61) connecting the drive shaft(52), the driven shaft(57), and rotating roller(75) to transmit rotating power.
Patent KR-19990088219-A (KR)
Title: 흡수체제조방법
IPC: A61F13/15
Filed: 1999-05-12
Abstract: 본 발명은 흡수체 제조 방법에 관한 것이다.  이 방법은 외면에 예정된 형상의 요면이 마련되어 있는 회전 패턴 드럼의 외면에 제1 커버 시트를 공급하는 단계와, 상기 제1 커버 시트를 요면의 형상과 맞게 하여 제1 커버 시트 상에 요면의 형상과 일치하는 흡수재 층을 형성하도록 흡수재를 상기 요면으로 공급하는 단계와, 상기 패턴 드럼의 외면을 향해 제2 커버 시트를 공급하는 단계와, 상기 패턴 드럼의 외면으로부터 흡수재 층과 함께 제1 커버 시트를 분리시켜, 제1 커버 시트와, 제2 커버 시트와, 그리고 이들 시트들 사이에 개재된 흡수재 층으로 구성되는 흡수체를 제조하기 위해 제1 커버 시트를 흡수재 층과 함께 제2 커버 시트에 중첩시키는 단계를 포함한다.  이러한 방법으로 제조된 흡수체는 향상된 흡수성을 가지며 일회용 기저귀, 위생 냅킨 등에 사용할 수 있다.
Patent KR-20000074846-A (KR)
Inventor: LEE SEUNG GWON
IPC: G11C19/00
Filed: 1999-05-26
Abstract: PURPOSE: A power on reset circuit of a semiconductor device is provided which is stable to the change of the external environment. CONSTITUTION: A power on reset circuit of a semiconductor device includes a power on reset signal generating circuit(100) and an output driving circuit(200). The power on reset circuit includes a load circuit and a power on reset signal generating circuit. The load circuit transfers charges corresponding to a power source voltage to the power on reset signal generating circuit. The power on reset signal generating circuit includes MOS transistors, and receives the charges from the load circuit and generates a power on reset signal activated during a period of the power source voltage from the first voltage level to the second voltage level. The output driving circuit outputs the power on reset signal. Like that, the power on reset circuit generates the power on reset signal without the charge/discharge operation using the MOS transistors, and therefore the mis-operation of an internal circuit generated by the variation of the power source voltage is prevented.
Patent KR-19990088666-A (KR)
Title: 진동형액추에이터장치
IPC: H02N2/06
Filed: 1999-05-28
Abstract: 본 발명은 진동형 액추에이터장치용 펄스형성회로에 관한 것이다.   이 회로는 출력이 주파수분할회로에 의해서 발생될 때마다 주파수분할회로로부터의 출력을 변경하는 링오실레이터를 사용한 시간지연회로의 변화량을 변경하면서 주파수분할회로로부터의 출력을 변경함으로써 펄스를 형성한다.   이러한 구성에 의해서 액추에이터는 고해상도의 펄스신호를 사용해서 구동될 수 있다.
Patent KR-20000005866-A (KR)
Inventor: UE YOSHIHISA
IPC: H01J37/06
Filed: 1999-06-03
Abstract: PURPOSE: The electron gun is provided to improve the uniformity of the electro-beam irradiated to the wafer by using 4-electrode electron gun. CONSTITUTION: The electron gun is comprising; a cathode for irradiating an electron beam when a high negative acceleration voltage is applied; a first greed which is presented at the lower part of the cathode for concentrating crossover images of the electro-beam, is arranged at the side of high voltage of a high-voltage insulator; an anode for collecting the electro-beam passing through the first greed which is arranged at the side of low voltage of the high-voltage insulator; and a second greed with a predetermined aperture for limiting the amount of the electro-beam, being formed between the first greed and the anode. Voltage to be a forward bias against the cathode is applied to the second greed, the crossover image is concentrated on the aperture of the second greed.
Patent KR-20010002028-A (KR)
Inventor: LEE KAP SIK
IPC: C01B13/11
Filed: 1999-06-10
Abstract: PURPOSE: An apparatus for generating ozone(O3) for use in water supply and drainage, and sludge treatment or foods sterilization is provided, which is characterized in that several thermal radiating plates surrounding a dielectric quartz tube are installed to prevent the internal temperature of an ozone generating tube from elevating so that it is possible to be used in a high temperature. CONSTITUTION: The apparatus comprises an ozone generating tube(1), that is, a dielectric quartz tube(10) whose inside is installed with a coil and whose circumference is surrounded by a copper plate(30) linking with several radiating plates(40) in a radial manner; a transformer generating high voltage; a case(90) with electronic parts, on which a cooling fan(50) is backside. Also, this apparatus designed for supplying ozone into water has a connecting tube(80) projecting outside through the ozone generating tube.
Patent KR-20010000008-A (KR)
Inventor: AN YUNG PUO
IPC: A41D1/06
Filed: 1999-06-18
Abstract: PURPOSE: A decorative band of trouser base hem for clothes prevents abrasion and damage of trouser base hem, creates unique fashion by emphasizing point in trouser base end by matching color, design of personal accessories like clothes, neck tie, high shoes and belt, maximizes use of brand, reduces time and cost due to clothes purchase and repair by increasing wear term. CONSTITUTION: The Decorative band of trouser base hem for clothes comprises a pair of sticking submaterial(20) to be formed with receiving hole(21) to insert whole trouser base hem(10) of selected end part in trouser and to be correspond to wrap inside and outside along the length direction, to be formed with identical shape to be symmetric, the sticking submaterial(20) is flexible material of belt shape, is formed with a pair of sticking band(30) with numerous fit hole(31) at fixed interval along the length direction; connecting submaterial(40) to be confronted by bending or folding lower end part of the sticking submaterial(20) to be connected along the length direction; the connecting submaterial(40) is thin and strong elastic to have connecting part(41a) in the middle part, connecting clip(41) with each inserting part(41b), fisture(42) formed to connect with the top end of inserting part(41b); locking submaterial(50) to be fixed by confronting both end of a pair of sticking submaterial(20) to wrap the trouser base hem(10); the locking submaterial(50) to be formed with a pair of elastic band(51) having thin sheet with elasticity and cover body(52) having flexible material to be fixed one end in the end part of sticking band(30).
Patent KR-20000006528-A (KR)
Inventor: BRUGER ROLANT
IPC: A23L29/00
Filed: 1999-06-28
Abstract: PURPOSE: An anhydrous and liquid phytase prepared by a)inject-drying or granulating in the presence of selected stabilizer or b)cross-linking chemically, are provided which are useful as feed. CONSTITUTION: The compound comprises a phytase and a stabilizing agent containing one or more compounds selected from a)20-60 weight% of C5 saccharide alcohol such as xylitol or libitol, b)10-50 weight% of polyethylene glycol having a molecular weight of 600-4,000 Da(preferably 1,000-3,350 Da), c)10-30 weight% of disodium salt of glutaric acid and succinic acid, d)1-10 weight% of carboxymethylcellulose and/or sodium alginate. The anhydrous phytase is stabilized by reacting with glutaraldehyde or adding adipic acid dihydrazide followed by oxidizing phytase carbohydrate residual group with sodium periodate. The compound has stability for long-term storage and heat stability for the high temperature(below 80-120°C) risen in the various feed treatment process such as a pelletizing, an extrusion and a swelling.
Patent KR-20010004493-A (KR)
Inventor: AN JANG HONG
IPC: F16K25/02
Filed: 1999-06-29
Abstract: PURPOSE: A drive hydraulic conduit assembly of a seat is provided to offer reliability of a structure and convenience in operation by preventing a hydraulic conduit from being exposed outside and composing a hydraulic conduit in a shortest distance. CONSTITUTION: A spherical opening and shutoff ball(10) with a fluid hole(2) is interposed between a shaft receiving portion(3) and a stem(4) in a ball valve body(1). A pair of caps(5) is fixed on both ends of the ball valve body. Between the balls, a pair of seat rings(20) is interposed by the application of elasticity of a seat spring(11). A hydraulic ring groove(30) is formed in the circumference of the seat ring to drive the seat ring by the hydraulic pressure flowing into an operation hydraulic inlet conduit(40) punched through the cap. Herein, the application of hydraulic pressure to the operation hydraulic inlet conduit is performed by a single path and branched. Thus driving hydraulic pressure is transferred to the operation hydraulic conduit. The respective conduit members are closed by a stem cover pipe.
Patent KR-20000011409-A (KR)
Inventor: BIORENPON BARPAL BARPALPI
IPC: E03C1/122
Filed: 1999-07-01
Abstract: PURPOSE: The drain system is provided to increase solid ingredient ratio of toilet foul water, to have economy to manage by separating the toilet foul water from other foul water. CONSTITUTION: The operation method of a drain system has the steps of: connecting a drain pipe(3) to a flush-type toilet(1) and an air delivery exhaust device(4); the exhaust device generating about 10% of vacuum to a pipe(3) while supplying air through a supply pipe(7) to a ventilator(10); moving to flush-type toilet by the liquid and sewage of a water trap(2) being supplied to the flush-type toilet; the exhaust device(4) continuously generating the vacuum while maintaining the air flow to the supply pipe(7); exhausting the sewage of the toilet(1) to the drain pipe.
Patent KR-20010010960-A (KR)
Inventor: BAEK JONG BONG
IPC: H01J9/227
Filed: 1999-07-23
Abstract: PURPOSE: A producing method for a fluorescent film is provided not to lose and not to exclude a fluorescent pattern by having an excellent adhesive force with a fluorescent member and a PVA-ADC(Poly Vinyl Alcohol-AmmoniumDiChromate). CONSTITUTION: A preprocessing film is formed on a transparent electrode. A fluorescent pattern is formed thereon. A material of the preprocessing film contains a high polymer of acrylic group. The high polymer of acrylic group is used in an emulsion state. The preprocessing film is formed by spreading, drying and washing a preprocessing solution of a PVA and the high polymer of acrylic group. Thereby, the adhesive force between the transparent electrode and the high polymer is excellent. The preprocessing film is not lost at a developing after exposing. A fluorescent pattern is not excluded by the excellent adhesive force between a fluorescent member and the PVA-ADC.
Patent KR-20000012134-A (KR)
Inventor: GOULD ANTONY JAMES
IPC: G06T15/00
Filed: 1999-07-31
Abstract: PURPOSE: A video processing device is provided to render an image or data value of an output video sequence according to a priority order. CONSTITUTION: In the video processing device, an input image of an input video sequence is processed according to a user-adjustable video effect parameter in order to generate an output image of an output video sequence. The video processing device comprises a rendering part(352) which render an image of the output video sequence according to the priority order of: i) a present displayed image for a viewing by the user, ii) first and final images of the output video sequence, and iii) the remaining image of the output video sequence.
Patent KR-20000023446-A (KR)
Inventor: MATSUOKA TOORU
IPC: C30B29/48
Filed: 1999-09-22
Abstract: PURPOSE: A method for cleaning a surface of a chemical compound is provided to obtain smoothness and cleanness of a substrate surface and to reduce the number of crystal defects newly occurring on the substrate surface. CONSTITUTION: An epitaxial wafer is obtained by forming a ZnSe epitaxial layer(2) on a ZnSe substrate(1). The ZnSe substrate surface is etched to remove a thickness of 0.5 micrometer by using an etching solution. The ZnSe substrate is introduced in a thin film growth room and undergoes a hydrogen plasma cleaning for 30 minutes at a temperature of 350°C. The etching solution is composed of potassium I chromate, sulfuric acid, and water. And a thickness of 0.01-3 micro meter of the substrate is etched.
Patent KR-20010028817-A (KR)
Inventor: KIM NAM O
IPC: H01L21/8242
Filed: 1999-09-27
Abstract: PURPOSE: A method for manufacturing a semiconductor device is provided to improve reliability of a highly integrated semiconductor memory, by increasing capacitance of a capacitor caused by a broad surface area of a storage electrode. CONSTITUTION: A source/drain region and a gate electrode are formed on a substrate(1). An interlayer dielectric is stacked on the substrate. A storage electrode(10) electrically connected to the source region across a partial region of the interlayer dielectric is formed. A part of the upper surface of the storage electrode is etched by a desired depth to form a temporary pattern, so that a surface area of the storage electrode is increased without increasing an area of a wafer occupied by a capacitor.
Patent KR-19990084208-A (KR)
Title: 상부·하부 앵커볼트가 체결된 앵커볼트를 이용한교좌장치의 설치 및 보수공법
IPC: E01D19/04
Filed: 1999-09-28
Abstract: 본 발명은 앵커볼트를 상부·하부 앵커볼트로 구분하여 체결함으로서 어떠한 손상에 의해 교좌장치의 앵커볼트를 교체할 필요가 있는 경우, 손상된 상부 앵커볼트 부분만을 교체하도록 하여 교좌장치의 유지·보수가 용이한 상부·하부 앵커볼트가 체결된 앵커볼트를 이용한 교좌장치의 설치 및 보수공법에 관한 것이다. 
     본 발명의 상부·하부 앵커볼트가 체결된 앵커볼트를 이용한 교좌장치는 교대 또는 교각의 코핑부(13)에 기 형성된 구멍(4), 받침 콘크리트(7), 상부·하부 앵커볼트가 서로 체결된 앵커볼트(14), 상기 상부 앵커볼트(5)의 나사부(15)에 삽입되는 베이스플레이트(8), 상기 베이스 플레이트에 돌출 된 상부 앵커볼트의 나사부(15)에 체결되는 와샤(10)와 너트(9), 상기 베이스플레이트(8)의 상부에 설치되는 교량받침(11)과 교량의 상부구조물(12)로 구성된다. 
     본 발명에 의한 교좌장치 보수시, 받침 콘크리트를 소량 제거하고, 하부 앵커볼트(6)는 제거하지 않으면서 상부 앵커볼트(5)만 교체함으로서 보수작업 공기가 단축되며 공사비가 절감되고, 앵커볼트를 수직으로 재설치할 수 있어 정밀한 앵커볼트 시공이 가능하다.  또한 기존의 앵커볼트(1)를 교체해야하는 경우에도 손상된 부분만 제거하고 남은 앵커볼트의 상부에 본발명을 구성하는 상부 앵커볼트(5)만 체결시킴으로서 앵커볼트를 수직으로 재설치 할 수 있다.
Patent KR-20010037954-A (KR)
Inventor: PARK SEONG EUL
IPC: A01K97/04
Filed: 1999-10-21
Abstract: PURPOSE: A fishing bait composition is provided to adjust the cohesion of the bait according to the feature of fishing place, and to prevent water from being contaminated by using vegetable materials. CONSTITUTION: A fishing bait composition comprises sesame dregs of 20-26 wt.%, parched soybean flour of 15-18 wt.%, parched barley flour of 13-16 wt.%, starch of 9-10 wt.%, arrowroot of 4-5 wt.%, corn flour of 17-21wt.%, wheat flour of 9-10 wt.%, parched peanut flour of 1-2 wt.%, charcoal powder of 1-2 wt.%, a very small amount of spice or pigment, and fibers extracted from the arrowroot. The charcoal powder serves to prevent water from being contaminated by its self purification ability. The sesame dregs, parched soybean flour, parched barley flour, starch having relatively strong smell serve to stimulate the sense of smell of fishes.
Patent KR-20010045060-A (KR)
Inventor: CHO GWANG HWI
IPC: H01L29/78
Filed: 1999-11-02
Abstract: PURPOSE: A structure of a depletion-type metal-oxide-semiconductor(MOS) transistor for improving a capacitance characteristic is provided to maintain constant capacitance within a desired range of an operating voltage, by forming an n-type well to compensate for a surface potential. CONSTITUTION: A semiconductor substrate(40) is of a p-type. An n-type well(39) is formed in the upper portion of the semiconductor substrate. A depletion layer(38) is formed inside the n-type well. An n-type source region(34) is formed inside the depletion layer. An n-type drain region(36) is formed inside the depletion layer, separated from the source region by a predetermined distance. A gate oxide layer(32) is formed in the upper portion of the depletion layer. A p-type gate region(30) is formed in the upper portion of the gate oxide layer.
Patent KR-20010045109-A (KR)
Inventor: LEE BEOM HWAN
IPC: C09D5/02
Filed: 1999-11-02
Abstract: PURPOSE: Disclosed is emulsion thermal paints composition which has high emissivity and is suitable for building inner part like wall of ceiling of building. CONSTITUTION: The emulsion thermal paints composition is composed of synthetic resin emulsion paints of 70-95 parts of weight as base paint; powdery inorganic substance of 5-30 parts of weight. The powdery inorganic substance with emissivity 0.90 is crushed to 300 mesh after being plastic at the temperature of 1200deg.C or higher and is selected from ocher, elvan or gem stone. Synthetic resin emulsion paints composition is selected from vinylacetate copolymerization based, acryl copolymerization based, urethane denaturation based emulsion paints.
Patent KR-20010045386-A (KR)
Inventor: HAN SANG JUN
IPC: G03F7/20
Filed: 1999-11-04
Abstract: PURPOSE: An exposure method for a semiconductor device is provided to realize a process automation and a process stabilization, by automating an exposure process and a monitoring process of exposure equipment by an overlay apparatus to embody best energy and focus. CONSTITUTION: A monitoring mark has a cell matching adaptor(40) composed of a line and space having the same size as a cell pattern. The monitoring mark is formed in a scribe line. After an exposure process, the variation of the length of the line and space of the cell-matching adaptor is measured by using an overlay apparatus. The measured value of the variation is compared with a reference value to calculate an energy value and a focus value used in the exposure process.