baber/WOPTO huggingface dataset:
Patent KR-20110024091-A (KR)
Title: Substrate processing apparatus
Inventor: LEE JUNG HWAN
IPC: H01L21/683
Filed: 2009-09-01
Abstract: PURPOSE: A substrate processing apparatus is provided to prevent the quality degradation of a substrate by preventing the misalignment of the substrate. CONSTITUTION: A chamber(10) comprises a space and a gate for inputting and outputting a substrate. A plurality of receiving units which receive the substrate are formed around a susceptor(20). A lift pin hole is formed at each receiving unit and is lifted and rotated in a space of a chamber. A plurality of lift pins are lifted in the lift pin hole and support the substrate in loading and unloading processes. A gas supply unit sprays process gas to the substrate. A support plate(40) is arranged on the lower side of the susceptor and supports the lift pin.
Patent KR-20110024889-A (KR)
Title: System and method for verifing translation knowledge customized for domain
Inventor: PARK EUN JIN
IPC: G06F17/28
Filed: 2009-09-03
Abstract: PURPOSE: A device and a method for verifying translation knowledge which is specialized in a domain are provided to automatically classify translation knowledge which is most adaptive in a corresponding domain by using parallel corpus per domain. CONSTITUTION: A lemma indexer(106) disperse a plurality of lemma indexed parallel corpus to a plurality of cluster servers. Through constructed translation knowledge, a reference translator automatically translates the lemma indexed parallel corpus. Through translation knowledge of a verification target, an evaluation translator(121) automatically translates the lemma indexed parallel corpus. An auto evaluation unit(118) compares a translation performance difference of a reference translation result(116) and an evaluation translation result(123).
Patent KR-20110025372-A (KR)
Title: Reciprocating compressor with multi-stage cylinders
Inventor: SHIN JAE HEE
IPC: F04B1/00
Filed: 2009-09-04
Abstract: PURPOSE: A reciprocating compressor with multi-stage cylinders is provided to improve the energy efficiency by efficiently utilizing the power of the driving unit which is wasted in the initial time of a compression process. CONSTITUTION: A reciprocating compressor with multi-stage cylinders comprises a cylinder part and an outlet valve(70). The cylinder part comprises a plurality of cylinders(110,120,130). A plurality of cylinders has different diameters and successively connected with each other. The larger diameter cylinder is bigger than the small one by 1.5 or 2.5 times.
Patent KR-20110025409-A (KR)
Inventor: LEE DONG HOON
IPC: H04B1/38
Filed: 2009-09-04
Abstract: PURPOSE: A spring module is provided to reduce the thickness of the spring module and to prevent the spring module from being twisted or deformed in an operation. CONSTITUTION: A torsion spring(20) includes a first supporter and a second support which are extended to both sides of a winding unit. A housing(30) includes the winding unit. A first opening and a second opening are formed in both sides of the housing in order to operate the first and second supporters. The winding unit includes first and second winding units. The center part of the second winding unit is connected to the center part of the first winding unit.
Patent KR-20110027482-A (KR)
Title: Sleeve for anchorage of continuity reinforcing bar in precast concrete structural wall
Inventor: OH JAE KEUN
IPC: E04C5/16
Filed: 2009-09-10
Abstract: PURPOSE: A sleeve for fixing a connecting bar of a precast concrete structural wall is provided to enable construction even in case of a thin foundation by high fixing performance despite a short length of fixture. CONSTITUTION: A sleeve(10) for fixing a connecting bar of a precast concrete structural wall comprises a body(20) and a fixing member(30). A connecting bar is inserted into the body, and a mortar injection port(21) is formed on the side thereof. The fixing member is formed on the lower part of the body to reduce the length of a sleeve and supports the sleeve inside a foundation(60).
Patent KR-20110029365-A (KR)
Title: 친환경 텍스
Inventor: KIM SEOUNG JU
IPC: E04B9/22
Filed: 2009-09-15
Abstract: 본 발명은 건축물의 내부 천장에 시공되는 텍스로서, 그 구성은 직사각형 형태이고, 복수 개의 홈이 형성되는 기저판과; 기저판 하면의 네 가장자리에서 상부로 절곡된 형태이고, 기저판의 긴 변에 구비되는 제1 및 제3 측면판과, 기저판의 짧은 변에 구비되고 제1 및 제3 측면판을 연결하는 제2 및 제4 측면판으로 구성되는 측면판; 및 기저판과 제1 및 제3 측면판이 접하는 모서리 부분에 복수 개가 구비되고, 피스가 삽입되는 지지부;를 포함하고, 기저판, 측면판, 및 지지부는 준불연 열경화성 수지로 제조되는 것에 특징이 있다. 종래 석면이 검출되었던 텍스를 준불연 열경화성 수지로 제조하므로 친환경적이고 안전하며, 기저판에 복수 개의 홈을 형성함으로써, 홈으로 소음이 흡수되어 흡음 및 소리의 울림 방지의 효과도 있다. 
       
     텍스, 천장, 친환경, 준불연, 열경화성
Patent KR-20100018480-A (KR)
Title: A washtub having a seat
Inventor: PARK SUNG BAE
IPC: D06F5/04
Filed: 2009-09-16
Abstract: PURPOSE: A washing drum for hand-wash is provided to prevent a washboard from being sliding forward by holding the washboard on a support hole. CONSTITUTION: A washing drum for hand-wash comprises a body(100) and a cylindrical seat(200). The body is composed of a container(110) and a supporting plate(130). The seat can be inserted and lead out from the inside of the body. The seat moves back and forth between the supporting plates. The container is opened upward. The supporting plate supports left and right bottom of the container.
Patent KR-20100124194-A (KR)
Title: Method of using temporomandibular joint balancing appliance
Inventor: LEE YOUNG JUN
IPC: A61C19/05
Filed: 2009-09-17
Abstract: PURPOSE: A method for performing a temporomandibular joint balancing appliance is provided to enable more precisely temporomandibular joint balance and to control the height of a support part touching with molar tooth. CONSTITUTION: A method for performing a temporomandibular joint balancing appliance comprises a step for generating a left balance inserted into the left molar and a right balance inserted into the right molar; inserting the right and left balances into the left and right molar tooth, and inputting the shape of the front tooth; combining a first support in which the shape of the front tooth is inputted, with a second support(200) and a third support(300); and inputting the shape of the rest tooth.
Patent KR-20110032850-A (KR)
Title: Automatic welding robot
Inventor: LEE KYU YEUL
IPC: B23K37/02
Filed: 2009-09-24
Abstract: PURPOSE: An automatic weld robot is provided to weld T-shaped welding part by simple manipulation. CONSTITUTION: An automatic weld robot comprises a welding rod(365), a weaving part(340), a straight line conveying part(310), a mainframe(311) and a longi fixing part(390). The weaving part fixes the welding rod and embodies the weaving motion of the welding rod. The straight line conveying part transfers straightly the weaving part in the longitudinal direction of the welding part. The mainframe fixes the straight line conveying part. The longi fixing part is connected to the mainframe and is fixed to the upper front side of the longi.
Patent KR-20110033397-A (KR)
Title: Pipe bending device
Inventor: BAEK EUN HO
IPC: B21D7/08
Filed: 2009-09-25
Abstract: PURPOSE: A pipe bending device capable of controlling the interlocking state of chain in a drive part rotating a forming roll is provided to perform a bending process for pipes of different diameter by replacing a pair of forming rolls according to the diameter of a target pipe. CONSTITUTION: A pipe bending device comprises a molding part(T), a power transmission part(D), a driving part(L) and an elastic member(S). A first forming roll(2) and second forming roll(3) are mounted on the molding part to be close to the upper surface part of a worktable(1). The driving part fixes a gear(9) at end of a rotary shaft. The drive part mounts a main gear(13) to a driving shaft of a hydro part(11) and is meshed with the gear. The elastic member is composed of a plurality of chain elasticity controllers for controlling the tensile force of the chain.
Patent KR-20110034051-A (KR)
Inventor: KIM HAN SOL
IPC: F16C33/00
Filed: 2009-09-28
Abstract: 본 발명은 회전 관절 부위에 삽입되고 있는 플랜지 부시에 대한 것으로 플랜지 부시가 링크 구멍에 밀착 고정되어 조립을 용이하게 하고 원가를 절감할 수 있도록 한 것이다. 
     본 발명은 링크 구멍에 플랜지 부시를 조립할 때 플랜지 부시에 구비된 돌기부가 링크 구멍에 삽입된 후 밀착 고정됨으로써 후속 공정에서 핀(15)이나 샤프트 등을 손쉽게 조립할 수 있어 공정 단축과 비용 절감 효과를 기대할 수 있도록 한 것이다.  
       
     플랜지 부시, 돌기부, 링크
Patent KR-20110035065-A (KR)
Title: 렌치연결수단을 구비한 자키
Inventor: JEONG DO YOUNG
IPC: B60S9/06
Filed: 2009-09-29
Abstract: 본 발명은 자동차에 필수적으로 구비되는 타이어 교환을 위한 자키에 관한 것으로, 더욱 구체적으로는 자키의 일측에 노출되는 자키작동편에 렌치를 결합하여 작동시킬 수 있는 렌치연결수단을 구비한 자키에 관한 것으로, 
     작동편(2)에 형성된 연결공(3)에 자키작동바(4)를 결합하여 작동하도록 된 통상의 자키(1)에 있어서, 
     상기 작동편(2)에는 통상의 렌치(L)를 결합하여 회전시킬 수 있는 렌치연결수단을 구비하는 것을 특징으로 하는 것으로, 
     상기 렌치연결수단은 렌치(L)의 손잡이부(L1)가 삽입되는 지름을 가진 단축의 파이프형 렌치연결구(10)를 리벳(11)으로 작동편(2)에 자유회동 가능하게 장착하여 구성한 렌치연결수단을 구비한 자키를 제공하여, 자동차에 필수적으로 구비된 타이어 교체 공구세트의 부품 수를 줄임으로써 저가로 공급할 수 있도록 하는 것이다. 
       
     작동편, 자키, 자키작동바, 렌치, 렌치연결구, 리벳
Patent KR-20110035430-A (KR)
Title: Negative composition for lithium secondary battery using lithium vanadium oxide and manufacturing method thereof
Inventor: KIM YOUNG JUN
IPC: H01M4/48
Filed: 2009-09-30
Abstract: PURPOSE: A negative electrode composition for a lithium secondary battery is provided to ensure high discharge capacity, cycle property and charge and discharge efficiency, and low discharge potential for lithium. CONSTITUTION: A method for preparing a negative electrode composition for a non-aqueous lithium secondary battery comprises the steps of: (S61) mixing lithium materials and banadium materials according to Li_aV_bO_2 to form a solution, wherein 0.5<=a<=1.5, 0.9<=b<=1.1; (S64) forming an intermediate of lithium vanadium metal oxides through spray pyrolysis of the solution at 900-1100 °C; and (S69) thermally treating the intermediate in an inactive atmosphere or reducing atmosphere at 800-1050 °C.
Patent KR-20110036208-A (KR)
Title: Centering apparatus of glass
Inventor: MYEONG HYEONG JOON
IPC: H01L21/68
Filed: 2009-10-01
Abstract: PURPOSE: A glass substrate centering device is provided to move a plate through a slide cam with a moving guide groove, thereby preventing the plate from being shaken. CONSTITUTION: An air cylinder is installed on each base of both sides of a stage unit. A slide rail is installed in the same direction as a piston. A slide cam(130) slides on each slide rail. An LM guide is made of LM blocks with guide protrusions. A plate with a fixed length is supported by a leading end of an LM block. A plurality of support units(160) is installed on the plate at a fixed interval. A plurality of centering rollers(170) rotates on a rotation axis.
Patent KR-20090122165-A (KR)
Title: Method and system for providing addressing in ocean sensor networks
Inventor: HAN CHANG SUK
IPC: H04W8/26
Filed: 2009-10-12
Abstract: PURPOSE: A method and a system for providing addressing in an ocean sensor network are provided to reduce unnecessary energy consumption of sensor nodes. CONSTITUTION: The first sensor node(110) receives an address for network configuration. The first sensor node assigns an address to at least one sensor node per a type of a node. An address per a type of the node is assigned to the second sensor node(120) from the first sensor node. The second sensor node assigns the address to at least one sensor node per a type of the node. An address per a type of the node is assigned to the third sensor node(130) from the second sensor node. The third sensor node collects information corresponding to a type of the node.
Patent KR-20110041887-A (KR)
Title: Bearing unit
Inventor: SHIN KWANG JIN
IPC: F16C33/74
Filed: 2009-10-16
Abstract: PURPOSE: A bearing unit is provided to improve a cooling effect on a bearing and a bearing housing since oil in an oil retainer coupled between the inside of a bearing housing and a rotary shaft is effectively supplied. CONSTITUTION: A bearing unit comprises a pulley bearing(20-1), an impeller bearing(20-2), a bearing housing(30), and an oil retainer(40). The pulley bearing and the impeller bearing are axis-connected to a rotary shaft(10) with being separated from each other. The pulley bearing and the impeller bearing support the rotary shaft to be rotatable. The rotary shaft passes through the bearing housing. A bearing is coupled with both inner ends of the bearing housing. The oil retainer is opened so multiple oil outlets(41) connect to a space. The multiple oil outlets are coupled with the inside of the bearing housing. The multiple oil outlets are located between the bearing housing and the rotary shaft.
Patent KR-20110044101-A (KR)
Title: Watching apparatus using dual camera
Inventor: OH JONG OH
IPC: H04N7/18
Filed: 2009-10-22
Abstract: PURPOSE: A real time watching apparatus using a dual camera is provided to monitor large area in real time and transmit the photographed image. CONSTITUTION: A first camera(111) has a first viewing angle, and a second camera(115) has a narrower viewing angle. The second camera is capable of controlling a zoom-in, a pan, and a tilt adjustment. A surveillance process unit(120) determines the existence of a moving object from the first camera image. The surveillance process unit extracts the location information of the moving object through the main image information from the first camera. The surveillance process unit controls the operation of the second camera in order to trace and photograph the moving object.
Patent KR-20110046923-A (KR)
Title: An emergency diesel generator digital excitation system for nuclear power plant using digital triplication controller and duplication rectifier, method for changing operating mode thereof and method for rapidly starting thereof
IPC: H02J3/38
Filed: 2009-10-29
Abstract: PURPOSE: An emergency diesel generator digital excitation system of a nuclear power plant, an operation mode changing method, and a rapid starting method thereof are provided to increase the reliability of a facility by comprising a three channel controller and a two channel rectifier. CONSTITUTION: An input and output signal processing unit(40) outputs a standard signal corresponding to an input module of a triplication controller(60). The triplication controller controls the voltage of a generator terminal. First and second rectifiers(1-1,1-2) receive a thyristor on signal and turns on the gate of the thyristor. First and second switches(72-1,72-2) switch the input terminal of the first and second rectifiers. An initial excitation resistor drops 125V storage voltage in an initial start process and supplies dropped voltage to a field magnet. A field current X-DCR outputs a field current signal.
Patent KR-20110047004-A (KR)
Title: Method of fabricating thin film transistor
IPC: H01L29/786
Filed: 2009-10-29
Abstract: PURPOSE: A method for manufacturing a thin film transistor is provided to apply a micro crystalline silicon thin film to an active layer, thereby obtaining fast response speed by increasing charge mobility. CONSTITUTION: A gate electrode(121) is formed on a substrate(110). A gate insulating film(115a), an amorphous silicon thin film(120), and an n+ amorphous silicon thin film(125) are formed on the substrate. A part of the amorphous silicon thin film is crystallized into a micro crystalline silicon thin film by irradiating a diode laser. An active layer made of the micro crystalline silicon thin film is formed on the gate electrode. Source/drain electrodes are electrically connected to the source/drain areas of the active layer on the substrate.
Patent KR-20110047616-A (KR)
IPC: A01K63/04
Filed: 2009-10-30
Abstract: 본 발명은 산소공급 자동 제어장치에 관한 것으로서, 이는 PSA 방식의 산소발생기를 활어차, 활어 운송 선박, 컨테이너 등 이동 수송 수단과 양식장, 양어장, 수조 등 고정 보관 장소에 설치하여 활어와 같은 수산물의 생존 및 신선도 유지에 필수적인 용존산소(Dissolved Oxygen) 농도를 실시간 모니터링 및 제어하기 위한 것이다. 이를 위해 본 발명은, 복수개의 격실(11)로 이루어진 수조(10) 내 DO 농도를 제어하는 장치로서, 제1 격실(11)에서 물을 개별적으로 인출 또는 인입시키고 각 격실(11)의 DO를 측정하기 위한 DO탐침부(100)와; DO탐침부(100)를 제어하여 격실(11) 내 물의 순환 이송과 DO 농도를 조절하고, DO 측정값을 외부로 전송하며, 그 DO 측정값을 표시하는 데이터처리부(200)와; 데이터처리부(200)의 신호에 따라 격실(11)로 산소를 공급하는 산소공급부(300)와; DO탐침부(100), 데이터처리부(200) 및 산소공급부(300)에 전원을 공급하는 전원공급부(400);로 구성되는 것을 특징으로 하여, 격실 내 용존산소의 실시간 모니터링 및 DO 농도제어를 가능하게 한다. 
       
     	용존산소, 수조, 모니터링, 순환
Patent KR-20110048598-A (KR)
Inventor: JO IN SU
IPC: B42D15/00
Filed: 2009-11-03
Abstract: PURPOSE: A diary is provided to record various records and expenditures for many years on one page as well as lunar calendar together with solar calendar, day, and weather. CONSTITUTION: A diary comprises a main sheet(10) and a record display portion(12). The main sheet is partitioned by years in a lengthwise direction. The record display portion includes a finance record section(15), a date display section, a weather confirmation section(16) and a other memo section(17).
Patent KR-20090123841-A (KR)
Title: Policy-based call service
Inventor: PARK JAE WOO
IPC: H04M3/493
Filed: 2009-11-12
Abstract: PURPOSE: A subscriber policy based a telephone connection service using a general directory number and CID is provided to prevent the exposure of the telephone number of a subscriber and efficiently prevent each crime using the telephone number by using the general directory number and CID. CONSTITUTION: A security of a caller is evaluated and stored in database. The tenderloin class of a caller is inquired in database by using CID(Caller ID)(70). A call is automatically connected by a predetermined connection policy according to the level of the caller. The safety of the subscriber is confirmed by a safety confirmation policy.
Patent KR-20110054110-A (KR)
Title: Ｒｆｉｄ에 기반한 유가 증권 제작 방법
Inventor: YANG HEE SUN
IPC: G06K1/12
Filed: 2009-11-17
Abstract: 본 발명에서는 RFID에 기반한 유가 증권 제작 방법에 관해 개시한다. 본 발명에 따른 유가 증권 제작 방법은, RFID 모듈을 용지에 전도성 잉크를 사용하여 인쇄전자(Printed Electronic) 기법으로 인쇄하는 단계; RFID 모듈이 인쇄된 용지에 안테나를 전도성 잉크를 사용하여 인쇄전자(Printed Electronic) 기법으로 인쇄하는 단계; 및 유가 증권 내에 RFID 모듈 및 안테나가 인쇄된 용지를 삽입하는 단계; 를 포함한다. 또한, 본 발명에 따른 유가 증권 제작 방법은, 투명 재질의 고분자 필름 위에 RFID 모듈을 전도성 잉크를 사용하여 인쇄전자(Printed Electronic) 기법으로 인쇄하는 단계; RFID 모듈이 인쇄된 투명 재질의 고분자 필름 위에 안테나를 전도성 잉크를 사용하여 인쇄전자(Printed Electronic) 기법으로 인쇄하는 단계; 및 RFID 모듈 및 안테나가 인쇄된 투명 재질의 고분자 필름에 점착제를 도포하여 유가 증권의 상면 또는 하면에 부착하는 단계; 를 포함한다. 
     따라서, 본 발명은, 유가증권의 위변조를 방지함과 더불어 유가 증권의 보안성을 확보할 수 있는 효과가 있으며, 인쇄전자 기법을 활용한 RFID 시스템의 구축이 용이하게 가능한바, RFID의 활용도 및 위상을 제고하는 효과도 있다.  
       
     RFID, 인쇄 전자, 유가 증권, Printed Electronics
Patent KR-20110059054-A (KR)
Title: Integrated passive device assembly
Inventor: PARK SANG WOOK
IPC: H01L27/04
Filed: 2009-11-27
Abstract: PURPOSE: An integrated passive device assembly is provided to have a recess part with a fixed depth between a connecting unit and a mounting unit, thereby preventing an adhesive used in the mounting unit from being inserted into the connecting unit. CONSTITUTION: A wire pattern(12) is formed in a substrate(10). A mounting unit(20) is made of an insulating material on the substrate. A conductive pattern(22) is formed in the mounting unit. A connecting unit(30) is formed on the substrate and electrically connected to an integrated passive device. The connecting unit and the conductive pattern are electrically connected to the wire pattern.
Patent KR-20110062404-A (KR)
Title: Intake sound generator
Inventor: YUN TAE MIN
IPC: F02M35/10
Filed: 2009-12-03
Abstract: PURPOSE: A sound generator on an air intake path is provided to replace a proper tuning cap when tuning the sound quality and tone of the sound generator since a variety of kinds of tuning caps having a variety of lengths of pressure control protrusions are supplied. CONSTITUTION: A sound generator on an air intake path comprises a membrane and a pressure control unit. The membrane is interposed between a lower cap and an upper cap. The membrane receives and vibrates the dynamic pressure of inflow air to generate sound. The pressure control unit presses the membrane and comprises a tuning cap with a variety of lengths of pressure control protrusions. The sound generator further comprises a high-frequency sound attenuating unit, which absorbs and attenuates high-frequency sound. The high-frequency sound attenuating unit includes a sound-absorbing form.
Patent KR-20110065610-A (KR)
Title: Condensing type optical sheet
Inventor: JEONG SUNG CHUL
IPC: G02F1/1335
Filed: 2009-12-10
Abstract: PURPOSE: A light condensing type optical sheet is provided to secure the adequate brightness by forming three dimensional patterns on the interlayer interfacial surfaces of a plurality of diffusing layers. CONSTITUTION: A structure layer(20) is formed at one side of a base layer(10) and arranges a plurality of three dimensional structure. A plurality of diffusing layers(30) is formed on the rear side of the base layer. Three dimensional patterns are regularly or irregularly formed on the interlayer interfacial surface of the diffusing layers. The longitudinal sections of the patterns are polygonal shape, embossed shape, and streamlined shape.
Patent KR-20100067624-A (KR)
Title: Display device, method for driving the same, and electronic apparatus
Inventor: IIDA YUKIHITO
IPC: G09G3/20
Filed: 2009-12-10
Abstract: PURPOSE: A display device, a driving method, and an electronic device of the display device are provided so that the electrical short between the second electrode of the gate electrode of the driving transistor and the electro-optic device can be avoided effectively. CONSTITUTION: A scanning line is wired at the pixel row of the pixel array. A scanning signal is offered to the gate electrode of the write transistor. The power supply line(DSL) is wired at the pixel row of the pixel array. The first electric potential and the second electric potential lower than the first electric potential are offered selectively to the drain electrode of the driving transistor.
Patent KR-20110066320-A (KR)
Title: Method and system for supporing multi mode terminal in wireless communication system
Inventor: KIM HYE JEONG
IPC: H04W48/16
Filed: 2009-12-11
Abstract: PURPOSE: A method and system for supporting a multi mode terminal in a wireless communication system are provided to process a voice call without using a CS fallback. CONSTITUTION: A first modem searches a first system. When the first system is searched, the first modem checks information which directs the availability of a second system. The first modem transmits second information directing the usability of the second system. The second modem starts booting by the information of the usability of the second system.
Patent KR-20110067412-A (KR)
Title: Imaging apparatus
Inventor: YU DONG KUK
IPC: H04N5/225
Filed: 2009-12-14
Abstract: PURPOSE: An image forming device with a vibration unit is provided to conveniently monitor a focus control operation before photographing by photographer. CONSTITUTION: An optical unit(11) controls a focus for photographing the subject. An input unit generates a first signal and a second signal. Through a first signal, the focus is controlled. The second signal, the subject is photographed/stored. When generating a first signal, a vibration unit(70) vibrates.
Patent KR-20110068313-A (KR)
Title: Texturing module and appratus of manufacturing for solar cell having the texturing module and method of manufacturing for solar cell using the same
Inventor: AN KYOUNG JOON
IPC: H01L31/18
Filed: 2009-12-16
Abstract: PURPOSE: A texturing module and apparatus of manufacturing for solar cell having the texturing module and method of manufacturing for solar cell using the same are provided to control a texturing process by controlling the reaction of the surface of a transparent electrode according to processes conditions. CONSTITUTION: A substrate having an electrode in one side is arranged in a chamber. A pump(108) is arranged on one side of the chamber and is connected to the chamber. A bubbler(112) is arranged on the other side of the chamber is connected to the chamber A reaction solution is kept inside the bubbler and is supplied into the chamber. The pump comprises a vacuum pump to make the inside of the chamber vacuum. A pressure control valve controls a vacuum gage and the degree of vacuum. A heater(120) controls the temperature of the substrate which is arranged inside the chamber.