baber/WOPTO huggingface dataset:
Patent KR-20160039367-A (KR)
Title: Elevator device
Inventor: GU CHEON WOO
IPC: B66B5/02
Filed: 2014-10-01
Abstract: The present invention relates to an elevator device which can detect a temperature of a traction machine to display the temperature to the outside. The elevator device comprises: a traction machine to lift and lower an elevator car by a drive force of a motor; a temperature detection unit to detect the temperature of the traction machine to output temperature detection information; and a drive control unit to control drive of the traction machine in response to an output of the temperature detection unit, and output the temperature detection information detected by the temperature detection unit to the outside.
Patent KR-20160040359-A (KR)
Title: 암 및 혈관질환 치료제의 효과적인 전달과 확산을 위해 광감응제를 이용한 겸형 적혈구의 활용 방법
Inventor: CHOE SE WOON
IPC: A61K9/00
Filed: 2014-10-02
Abstract: 본 발명은 겸형적혈구의 내부에 치료용 약물이 담지되고, 광감응제가 상기 겸형적혈구 표면에 코팅된  겸형적혈구 복합체를 제공한다.  본 발명은, 겸형적혈구를 준비하는 단계; 상기 겸형적혈구 내에 치료용 약물을 담지시키는 단계; 및 광감응제용액에 상기 치료용 약물이 담지된 겸형적혈구를 투입 후 배양하여 겸형적혈구 표면에 광감응제를 코팅시키는 단계;를 포함하는 겸형적혈구 복합체 제조방법을 제공한다.  

본 발명은 생체적합성(biocompatibility) 과 생분해성(biodegradability)을 유지할 뿐 아니라 선택적으로 고형 종양(solid tumoer), 저산소 종양등에   주변 혈관에 축적될 수 있는 새로운 겸형적혈구 복합체를 제안하고, 상기 겸형적혈구 복합체를 이용한 약물전달시스템을 제안한다.
Patent KR-20160040920-A (KR)
Inventor: KIM KYUNG SIK
IPC: H03H9/64
Filed: 2014-10-06
Abstract: The present invention relates to a DMS saw filter having a separate ground terminal, which is capable of improving a high frequency-side skirt characteristic and a low frequency-side skirt characteristic while having an equivalent pass-band characteristic. A DMS saw filter having a separate ground terminal, in which a plurality of IDT electrodes are arranged in a propagation direction of a surface acoustic wave, according to the present invention comprises: an input terminal which receives an electric signal; a first DMS filter unit which is electrically connected to the input terminal, and converts a surface acoustic wave, obtained using the electric signal input from the input terminal, back into an electric signal; a second DMS filter unit which is electrically connected to the first DMS filter unit and converts a surface acoustic wave, obtained using the electric signal transferred from the first DMS filter unit, back into an electric signal; and an output terminal which is electrically connected to the second DMS filter unit and outputs the electric signal received from the second DSM filter unit. The present invention may have an effect of improving a high frequency-side skirt characteristic and a low frequency-side skirt characteristic while having an equivalent pass-band characteristic, and an effect of simplifying a process because the number of bridge electrodes can be reduced by separating a ground terminal.
Patent KR-20150083009-A (KR)
Inventor: LEE IN HO
IPC: H02K13/00
Filed: 2014-10-10
Abstract: The present invention relates to a flat motor, and more specifically, to a brush having a novel structure whose length is longer than an installation area, and a flat motor comprising the same. The brush according to the present invention comprises: a support unit which is electrically connected to a current source to supply current to arms, supports a brush, and is formed in a flat plate shape; a connection unit extended from one end of the support unit; and the one or more arms which is extended from an end of the connection unit, is directed towards an outside direction of the one end of the support unit and directed away from the other end of the support unit, and contacts a flat commutator on a practically identical surface.
Patent KR-20160042606-A (KR)
Inventor: KIM YOUNG SANG
IPC: H01L27/146
Filed: 2014-10-10
Abstract: The present invention relates to an apparatus for manufacturing a semiconductor chip package, and more specifically, to an optical system including an infrared light capable of detecting a crack generated on a die, and a die bonding apparatus including the same. The optical system including an infrared light comprises a first lighting part, a second lighting part and an image sensor. The first lighting part emits a light in a visible light zone from a lower part of a die, which is supported by a pick-up member, to a surface of the die. The second light part emits a light in an infrared light zone from the lower part of the die to the surface of the die. The image sensor part obtains a first image reflected by the light emitted from the first lighting part, and a second image reflected by the light emitted from the second lighting part.
Patent KR-20160043210-A (KR)
Inventor: JUNG WOO CHUL
IPC: C25D17/00
Filed: 2014-10-10
Abstract: Provided is an electroplating apparatus of a horizontal cell, comprising: a horizontal cell including an upper plating electrode and a lower plating electrode arranged on top and bottom, having a steel plate therebetween to store a plating solution inside to maintain an amount of the plating solution at optimal conditions around a conduct roll, regardless of a moving speed of the steel plate; a conduct roll and a back-up roll arranged on a rear end of the horizontal cell, and adhered to an upper and a lower surface of the steel plate; a solution supply unit to supply the plating solution inside the horizontal cell; a speedometer to detect the moving speed of the steel plate; and a solution adding supply unit to additionally supply the plating solution to the conduct roll, when necessary, with respect to a signal of the speedometer. According to the present invention, the apparatus is capable of supplying and maintaining a sufficient amount of plating solution to the conduct roll in a case of decreasing the speed of the steel plate.
Patent KR-20160044122-A (KR)
Inventor: KIM KI HYUN
IPC: G03B17/12
Filed: 2014-10-14
Abstract: A filter-replacement camera module is provided. The filter-replacement camera module according to the present invention comprises: a lens barrel which has at least one lens; a barrel housing in which the lens barrel is accommodated; a filter unit which includes a substrate on which an iris recognition chip and an image sensor photographing an image by receiving light passing through a lens hole of the lens barrel are mounted, included is a filter base in which an opening portion corresponding to the lens hole is formed on the bottom surface to penetrate, and includes an operation plate having at least one filter on the filter base such that one end thereof rotates; and a driving unit which generates magnetic force with a predetermined intensity of turning the operation plate at the time of applying power such that the lens hole and the filter are overlapped through the opening portion.
Patent KR-20160044705-A (KR)
Inventor: MIN SUNG WOOK
IPC: G03F7/20
Filed: 2014-10-15
Abstract: The present invention relates to an edge exposure apparatus using a light emitting diode (LED) light source. More specifically, provided is an edge exposure apparatus using an LED light source, which comprises: an LED light source unit including a plurality of LED packages and emitting light within the ultraviolet (UV) wavelength range; a heat radiation unit releasing heat generated from the LED light source unit to the outside; an optical unit installed between the LED light source unit and a stage unit, collecting UV light entered from the LED light source unit, and allowing the collected light to exit after improving uniformity of the light; a mask unit exposing only a desired region of the substrate to be treated to UV light; a stage unit supporting the substrate to be treated; and a controlling unit controlling the motion of the LED light source unit and the stage unit.
Patent KR-20160044711-A (KR)
Inventor: LEE HAK SOO
IPC: F17D5/06
Filed: 2014-10-15
Abstract: The present invention relates to a system for monitoring damage and leak of a pipeline in real-time, including: a first sensing part which is installed to cover the pipeline and the outside of the pipeline formed by connecting a plurality of unit water pipes to transfer a liquid by being buried underground, and senses damage; a second sensing part to sense leak due to the damage of the pipeline by being located at a lower part of the pipeline; a site sensing device to receive a damage and leak position signal of the first sensing part and the second sensing part by being installed at a site where the pipeline is installed; and a management center part which is delivered with position information and generation information of the damage and leak generation from the site sensing device through a communication network by matching the position information and the generation information. The system of the present invention can reduce secondary damage by preventing further damage since the system informs a nearby manager under construction that the pipeline constructed underground is sensed to be damaged in real-time. Also, in case the leak occurs, the system can grasp the leak economically by grasping flow of a current, by melting a solid electrolyte by leaked water.
Patent KR-20160047016-A (KR)
Inventor: MOON HYEONG SOON
IPC: G01N21/3504
Filed: 2014-10-21
Abstract: The present invention relates to a method and an apparatus to measure a hazardous gas, especially, to an amount of hydrogen sulfide included in crude oil or a natural gas. More specifically, the present invention relates to the method and apparatus to measure the hazardous gas which grasps the amount of hazardous gas included in the oil or the natural gas using characteristics of diffraction or a wavelength of a molecule constituting each material by projecting a laser or an infrared ray to the collected oil or natural gas selectively. As such, the method and the apparatus to measure the hazardous gas of the present invention detects most components since the apparatus is able to irradiate the laser or the infrared ray selectively, and is able to prevent environmental pollution by preventing leakage of the crude oil or the natural gas due to corrosion of a pipeline since the method and the apparatus is able to cope with the hydrogen sulfide by grasping the exact amount of hydrogen sulfide corroding the pipeline transferring the crude oil or the natural gas, and is able to reduce costs for recovering the pipeline.
Patent KR-20160050261-A (KR)
Inventor: YUN JUNG A
IPC: H01L21/683
Filed: 2014-10-29
Abstract: 대면적 기판을 처리할 수 있는 원자층 증착장치가 개시된다.  대면적 원자층 증착장치는, 복수의 기판이 수용되어 증착공정이 수행되는 프로세스 챔버, 상기 프로세스 챔버 내부에서 상기 복수의 기판이 수평으로 지지되고 회전 가능하게 구비되는 서셉터, 상기 서셉터 상부에 구비되며, 상기 기판에 복수의 증착가스를 각각 제공하는 가스제공부 및 상기 가스제공부에서 상기 기판을 향해 구비되어서, 상기 증착가스가 제공되는 부분을 격리시키도록 형성된 격벽을 포함하여 구성된다.
Patent KR-20160051265-A (KR)
Inventor: LEE DONG WOO
IPC: B66C11/12
Filed: 2014-11-03
Abstract: The present invention relates to a satellite lifting apparatus capable of adjusting a center of gravity and a satellite lifting method using the same. Specifically, the satellite lifting apparatus capable of adjusting a center of gravity comprises a weight adjustment unit disposed on each portion of a trolley on which a satellite is mounted, and adjusts a position of a connection ring to properly position the center of gravity of the satellite when transporting the satellite to stably lift and lower the satellite to improve assembly precision.
Patent KR-20160054796-A (KR)
Title: Method for fabricating semiconductor package and semiconductor package using the same
Inventor: CHO EUN NA RA
IPC: H01L23/00
Filed: 2014-11-07
Abstract: The present invention relates to a method for manufacturing a semiconductor package capable of reducing manufacturing costs and making manufacturing time efficient and a semiconductor package using the same. According to an embodiment of the present invention, the method for manufacturing a semiconductor package comprises the following steps of: (A) placing a first semiconductor die and a second semiconductor die on a substrate; (B) placing a frame on the substrate to surround the first semiconductor die and the second semiconductor die respectively; and (C) encapsulating the inside of the frame by an encapsulant.
Patent KR-20160054916-A (KR)
Title: A relay device for providing electric power for an electric apparatus and recording a state resulted from provision of electric power
Inventor: LEE CHUL KYU
IPC: H02H3/08
Filed: 2014-11-07
Abstract: A relay device according to the present invention includes: a relay element; a first sensor for detecting a current flowing in an electric wire in a state that the relay element is shorted; a second sensor for detecting the temperature around the relay; a storage unit for storing data; and an alarming unit for generating an alarm signal. The first sensor and the second sensor periodically detect the current and the temperature, and values with respect to the detected current and the detected temperature are stored to the storage unit as a file form with data according to a date and a time of detection. In addition, if at least one of the detected values deviates from a predetermined limit standard value, the alarming unit is controlled to generate an alarm signal, and if the value deviated from the limit standard value is respecting the current, the relay element is open to break whole or a part of a supplied current. The file form has a data structure, which is able to be read by a commercial program executed in a laptop and such.
Patent KR-20160058486-A (KR)
Inventor: KIM GUN WOO
IPC: B60R21/26
Filed: 2014-11-17
Abstract: According to an embodiment of the present invention, an airbag deployment method comprises: a collision recognition step of sensing a vehicle collision; a passenger detection step of sensing whether a passenger seated in a seat of the vehicle is a child or an adult; and an airbag deployment step of deploying an airbag depending on the sensed type of passengers. In the passenger detection step, if the sensed passenger is a child, a low-pressure first chamber is deployed in the airbag deployment step.
Patent KR-20160059106-A (KR)
Inventor: CHOI YONG SEOK
IPC: G06Q30/02
Filed: 2014-11-17
Abstract: 모바일 리서치를 효과적으로 진행할 수 있는 모바일 리서치 시스템이 개시된다. 개시된 모바일 리서치 시스템은 모바일 리서치 앱이 설치된 모바일 리서치 단말기로 이벤트 정보를 전송하고, 전송된 이벤트에 따라 사용자가 제품, 서비스를 이용하면, 제품, 서비스에 대한 설문 조사를 진행할 수 있다. 개시된 모바일 리서치 시스템에 따르면, 좀더 효과적이고 신뢰할 수 있는 설문 조사 결과를 얻을 수 있다.
Patent KR-20160062905-A (KR)
Inventor: KIM HYUN SUB
IPC: G02F1/137
Filed: 2014-11-26
Abstract: The present invention relates to a smart glass system and a method for manufacturing the same, and more specifically, to a smart glass system that can switch between a transparent state and an opaque state of a window, a mirror, or the like, using an electrical signal and a method for manufacturing the same. That is, the present invention provides a smart glass system and a method for manufacturing the same. When a smart glass is manufactured using a polymer dispersed liquid crystal (10) in which liquid crystal drops are dispersed in a polymer, the smart glass having an asymmetrical structure in which a refractive index layer such as a medium layer having a small refractive index (for example, an air layer) or a medium layer having a great refractive index (for example, TiO_2) is formed on a surface of the smart glass. Thus, light scattered from the liquid crystal drops is refracted and then totally reflected to the medium layer to reduce transmittance, and conversely, light received from the medium layer transmits the liquid crystal drops to have a high level of transmittance, exhibiting optical characteristics in which the smart glass system has different transmittances in the front and rear surfaces thereof.
Patent KR-20160066102-A (KR)
Inventor: MOON SEUNG EON
IPC: A61B3/16
Filed: 2014-12-01
Abstract: An intraocular pressure sensor according to the present invention comprises: a substrate having a contact lens shape; a capacitor unit formed on the substrate and having a capacitance changing depending on an external pressure; and an inductor unit formed on the substrate and connected to the capacitor unit. The capacitor unit includes a piezoelectric element whose permittivity changes depending on the external pressure, and the capacitor unit and the inductor unit constitute a resonance circuit having a resonant frequency corresponding to the capacitance. The intraocular pressure sensor outputs a reflection signal corresponding to the resonant frequency in response to a wireless input signal from the outside, and the reflection signal includes information about the external pressure.
Patent KR-20150008358-A (KR)
Inventor: YOO JUN SANG
IPC: A61B8/00
Filed: 2014-12-08
Abstract: Provided are an ultrasound diagnosis apparatus and a method of controlling the same, in which the apparatus haptically outputs a bio-signal or a movement signal of a target object so a state of the target object can be felt through tactile senses. The ultrasound diagnosis apparatus includes: a signal obtaining unit to obtain an ultrasound signal of a target object; a signal generating unit to generate a bio-signal or a movement signal of the target object from the ultrasound signal; a signal converting unit to convert the bio-signal or the movement signal of the target object into a sensory signal; and a signal transmitting unit to transmit the sensory signal to a haptic device.
Patent KR-20160082725-A (KR)
Title: Wire wrapping device and method for fuel rods using a weight
Inventor: WOO YOON MYEOUNG
IPC: G21C3/338
Filed: 2014-12-29
Abstract: The purpose of the present invention is to provide an apparatus and a method for winding a wire around a fuel rod by using a weight, capable of winding the wire around the fuel rod while maintaining the tension of the wire by a preset pitch. The apparatus for winding a wire around a fuel rod by using a weight comprises: a fixing part which fixes both ends of the fuel rod and rotates the fixed fuel rod; a transfer part which moves in a longitudinal direction such that the wire is wound around the rotating fuel rod by the preset pitch; the weight which gives the tension to the wire; a fuel rod support roll which is provided on the upper side of the transfer part and prevents the fuel rod from being deformed by the tension of the wire; a wire support part which is provided on the upper side of the transfer part and supports the wire by using a roller; a welding part which is provided on the upper side of the transfer part and welds the fuel rod and the wire; and a support part which includes the fixing part and the transfer part on an upper side thereof.
Patent KR-20160080261-A (KR)
Title: Roll to roll printing apparatus and method for manufacturing orgarnic solar cell
Inventor: PARK HONG KWAN
IPC: H01L51/48
Filed: 2014-12-29
Abstract: The present invention relates to a roll to roll slot die which can perform various types of printing combination regardless of the sequence of a slot die, facilitate management and operation because of a short web pass, and improve the operation and maintenance property of a device. The slot die includes a dryer mounted on the moving pass of a web, a first slot-die and a second slot-die which face each other with the dryer as the center, and a transfer part which transfers the web. The transfer part returns a printing region to the dryer when the web forms the printing region by coating the first slot-die or the second slot-die with a material.
Patent KR-20150085466-A (KR)
Inventor: OKUMURA AYAKA
IPC: H01L21/318
Filed: 2014-12-31
Abstract: [Subject] The characteristic of a semiconductor device can be improved. [Method of solution] An opening unit (OA1) capable of exposing a pad area (PD1) of a wire (M4) is formed in a protection film (PRO) on a wire (M4) of the top floor containing aluminum. An aluminum nitride is formed on the surface of the exposed wire (M4). Moreover, a nitride silicon film is formed on the other side of a semiconductor device including the wire (M4). Thus, foreign substances which are formed on the pad area (PD1) by the nitride silicon film of the other side of the semiconductor substrate can be prevented by forming an aluminum nitride film (M4e) on the pad area (PD1). Especially, a production reaction of the foreign substances in the pad area (PD1) can be prevented after a formation process of the pad area (PD1) even if the time until a testing process or a bonding process is required. Thus, the characteristic of the semiconductor device can be improved.
Patent KR-20140054388-A (KR)
Inventor: DE BOER WOLFGANG
IPC: F03D1/02
Filed: 2012-08-14
Abstract: 본 발명은 선택적으로 제 1 또는 제 2 작동 모드로 작동되는 풍력 에너지 설비의 작동 방법에 관한 것이다. 제 1 작동 모드에서 풍력 에너지 설비는 탁월풍과 풍력 에너지 설비의 설계에 따라 되도록 많은 전력을 생성하고, 제 2 작동 모드에서는 제 1 작동 모드에서보다 적은 전력을 생성하고, 이 경우 제 1 작동 모드에서 풍력 에너지 설비는 제 1 조절 파라미터 세트에 의해 그리고 제 2 작동 모드에서는 제 1 조절 파라미터 세트와 다른 제 2 조절 파라미터 세트에 의해 제어되고, 풍력 에너지 설비가 제 2 작동 모드에서 작동되는 경우, 제 1 조절 파라미터 세트를 이용해서 최대로 생성 가능한 전력 또는 상기 최대로 생성 가능한 전력과 제 2 작동 모드에서 실제로 생성된 전력 사이의 차이인 차동 전력이 제 2 조절 파라미터 세트에 의존해서 결정되고, 및/또는 제 2 조절 파라미터 세트는 소정의 전력 축소에 의존해서 선택된다.
Patent KR-20140068118-A (KR)
Inventor: SEKINE TAKAYUKI
IPC: H01L21/768
Filed: 2012-09-25
Abstract: 산화실리콘막의 질화실리콘막에 대한 선택비를 높게 할 수 있는 에칭 방법 및 장치를 제공한다.  처리 용기(10)에, 플라즈마 여기용 가스 및 CHF계 가스를 포함하는 처리 가스를, CHF계 가스의 플라즈마 여기용 가스에 대한 유량비가 1/15 이상이 되도록 도입한다.  처리 용기(10)내에 플라즈마를 발생시키는 것에 의해, 처리 용기(10)내의 기판 W에 형성된 산화실리콘막(5)을 상기 질화실리콘막(1)에 대해서 선택적으로 에칭한다.
Patent KR-20140069203-A (KR)
Inventor: ZHANG XIAOXIN
IPC: H04W4/029
Filed: 2012-09-19
Abstract: 무선 네트워크 디바이스의 계산된 초기 위치를 이용하는 TOA 포지셔닝 시스템이 구현될 수 있다.  복수의 레퍼런스 무선 네트워크 디바이스들 각각에 대해, 무선 네트워크 디바이스와 레퍼런스 무선 네트워크 디바이스 사이의 거리가 무선 네트워크 디바이스와 레퍼런스 무선 네트워크 디바이스 사이의 라운드 트립 통과 시간에 적어도 부분적으로 기초하여 결정된다.  무선 네트워크 디바이스의 초기 위치가 복수의 레퍼런스 무선 네트워크 디바이스들 각각의 위치에 적어도 부분적으로 기초하여 계산될 수 있다.  무선 네트워크 디바이스의 위치가 계산된 초기 위치, 레퍼런스 무선 네트워크 디바이스들 각각에 대한 거리, 및 초기 거리 교정 상수에 적어도 부분적으로 기초하여 추정될 수 있다.
Patent KR-20140092820-A (KR)
Title: 원심 팬
Inventor: DE FILIPPS PIETRO
IPC: F04D25/08
Filed: 2012-09-21
Abstract: 본 발명에서 개시하는 원심 팬(1)은, 회전축(R) 주위를 회전할 수 있는 원심 임펠러(4); 원심 임펠러(4)의 구동 모터(3); 그리고 모터(3)와 원심 임펠러(4)를 하우징하기 위한 중앙부(17) 및 상기 중앙부(17)와 연통되는 접선방향 출구 채널(18)을 포함하며, 중앙부(17)에 입구 개구부(15)와 접선방향 출구 채널(18)에 출구 개구부(16)를 구비하는 케이싱(2)을 포함한다. 상기 원심 팬(1)은 모터(3)를 냉각하기 위한 시스템(4, 14, 28, 29)을 포함하는데, 이 시스템은, 임펠러(4)와, 냉각 공기의 흐름을 생성하기 위하여 접선방향 출구 채널(18)과 중앙부(17) 사이에서 작동하는 환기 채널(30, 31)과, 원심 임펠러(4)에서 모터(3) 주위로 축방향으로 연장되고 원심 임펠러(4)와 일체화된 칼라(28)와, 모터(3) 주위에 나선형 볼텍스를 생성하는 냉각 흐름과 합쳐지는 접선방향 냉각 성분을 생성하기 위한 복수의 반경반향 블레이드(29)를 포함한다.
Patent KR-20140094517-A (KR)
Title: 질소 스캐빈징 약물들의 치료학적 모니터링 방법들
Inventor: SCHARSCHMIDT BRUCE
IPC: G01N33/52
Filed: 2012-03-09
Abstract: 본 기재내용은 단일의 절식 암모니아 혈액 수준 측정을 기준으로 한 1일 암모니아 노출을 평가하는 방법들, 및 또한 상기 기술을 이용하여 질소 스캐빈징 약물의 용량을 조절하고, 질소 스캐빈징 약물을 투여할지의 여부, 및 질소 보유 장애들을 치료할지의 여부를 결정하는 방법들을 제공한다.
Patent KR-20140081855-A (KR)
Inventor: ANDERSEN CARSTEN
IPC: C12N9/28
Filed: 2012-10-17
Abstract: 본 발명은 알파-아밀라아제 변이체에 관한 것이다. 또한, 본 발명은 변이체를 암호화하는 폴리뉴클레오티드; 폴리뉴클레오티드를 포함하는 핵산 작제물, 벡터 및 숙주 세포; 및 변이체의 사용 방법에 관한 것이다.
Patent KR-20140077194-A (KR)
Title: 분립체 살균 장치
Inventor: SAITO JUNJI
IPC: A23L3/28
Filed: 2012-08-31
Abstract: 다량의 분립체를 불균일없이 균등하면서 효율적으로 살균하는 것이 가능한 분립체 살균 장치를 제공하는 것을 목적으로 한다.  분립체 살균 장치(1)는, 분립체가 도입되는 도입구(29), 이 도입구(29)로부터 도입된 분립체류(W1)에 살균성 전자파를 쏘여 살균 처리하기 위한 살균 처리 공간(37), 및 이 살균 처리 공간(37)에서 살균 처리된 분립체를 배출하기 위한 배출구(31)를 갖는 살균용 수송관(23)과, 도입구(29)로부터 배출구(31)를 향하여 살균 처리 공간(37) 내를 흘러 분립체류(W1)를 도입구(29)부터 배출구(31)까지 수송하기 위한 공기류를 발생시키는 기류 발생 장치(9)와, 이 기류 발생 장치(9)에 의해 발생된 공기류가 살균용 수송관(23) 내에서 흐르는 방향을 조정하는 기류 조정 부재(39)를 구비하고 있다.
Patent KR-20140079869-A (KR)
Inventor: YOKOKAWA NATSUMI
IPC: G03F7/039
Filed: 2012-11-30
Abstract: 페놀성 히드록실기 및 페놀성 히드록실기에 있어서의 수소 원자가 특정 식으로 나타내어지는 기에 의해 치환되어 형성된 기를 갖는 화합물(P)을 포함하는 감활성광선성 또는 감방사선성 조성물, 특정 감활성광선성 또는 감방사선성 조성물을 사용하여 형성된 레지스트 필름, 상기 레지스트 필름을 노광하고 현상하는 공정을 포함하는 패턴 형성 방법, 상기 패턴 형성 방법을 포함하는 전자 디바이스의 제조 방법, 및 전자 디바이스의 특정 제조 방법에 의해 제조된 전자 디바이스가 제공된다.