baber/WOPTO huggingface dataset:
Patent KR-20020069320-A (KR)
Title: kitchen implements and possess all the same auto wash to rice
Inventor: KANG YANG HEE
IPC: A47J43/24
Filed: 2001-02-24
Abstract: PURPOSE: An automatic rice washing machine is provided to reduce the moving line of a housewife and to save the time for the household affairs by integrally forming the automatic rice washing machine with a sink table. CONSTITUTION: A door is formed at an upper end of a rice washing machine(1). A rice discharging device(110) is provided to take out a measured amount of rice. A rice storing section(100) is formed at the upper portion of the rice washing machine(1). A rice receiving/withdrawing box(300) is provided at a lower end of the rice washing machine(1). A rice washing box(200) is formed below the rice storing section(100). The rice washing box(200) includes an inner tub(210) having a drain port(213), an outer tub(220) having a drain(221) and a cylinder(230) for moving a shielding plate(232). A rice washing device is provided to wash rice inputted into the inner tub(210).
Patent KR-20010088384-A (KR)
Title: Antimicrobial agent and production process thereof
Inventor: INAGAKI YASUHITO
IPC: A01N61/00
Filed: 2001-03-05
Abstract: PURPOSE: To obtain a resin containing acrylonitrile and styrene and/or a conjugated diene as constituent units. CONSTITUTION: This antimicrobial agent contains a metal salt-containing copolymer which forms an acid group in the copolymer by treating a copolymer containing acrylonitrile, styrene and/or a conjugated diene as constituent units with an acid and in which at least a part of the acid group is made into one or more kinds of metal salts selected from among Ag, Cu and Zn.
Patent KR-20010092367-A (KR)
Inventor: IRISAWA JUN
IPC: G03F1/64
Filed: 2001-03-15
Abstract: PURPOSE: Provided is a pellicle which contains a fluorine-containing polymer having a high durability and a high transmission of a laser light for irradiation which has a wavelength of less than 200 nm(particularly, less than 180 nm). CONSTITUTION: The pellicle comprises a frame and a pellicle membrane bonded to the frame by means of an adhesive, wherein the pellicle membrane or the adhesive comprises the fluorine-containing polymer(A). The fluorine-containing polymer(A) is a substantially linear fluorine-containing polymer having a chain of carbon atoms as the main chain, and containing as carbon atoms in its main chain, a carbon atom having one or two hydrogen atoms bonded thereto and a carbon atom having no hydrogen atom bonded thereto and having a fluorine atom or a fluorine-containing organic group bonded thereto.
Patent KR-20010044772-A (KR)
Inventor: CHO CHEOL HWI
IPC: C02F3/08
Filed: 2001-03-23
Abstract: PURPOSE: Disclosed is an apparatus for treating wastewater using rotating circular plate made of polypropylene. Surface of the rotating circular plate made of polypropylene is flat and smooth, so microorganism having high activity is adhered thin on the surface of the rotating plate. Therefore, load of adhered microorganisms per unit surface area of the rotating circular plate is small, thereby transfer efficiency of oxygen is increased. Also efficiency of nitrification is improved. CONSTITUTION: The shown apparatus is composed by follow parts: a part (1) composed of several rotating circular plates (9) arranged horizontally; an axis (5) for rotating and fixing the part (1); a bearing (2) for sustaining the axis (5); and a device (7)(8) for rotating the axis (5).
Patent KR-20020075686-A (KR)
Title: The composite liquefying the main ingredients contained in the brown rice
Inventor: LEE MIN GEUN
IPC: A23L2/38
Filed: 2001-03-27
Abstract: PURPOSE: A composition containing liquified components of the unpolished rice is provided, thereby essential nutrient components in the unpolished rice can be easily used. CONSTITUTION: The composition containing liquified components of the unpolished rice comprises phytic acid in the amount of 400 to 1000 mg per 100 g of an aqueous solution and inositol in the amount of 100 to 250 mg per 100 g of the aqueous solution which are main components of rice bran and embryo, in which the liquified components of the unpolished rice are produced by extracting the unpolished rice with a solvent selected from water or phytic acid; and the liquified components of the unpolished rice contains phytic acid, inorganic matters, edible fibers, inositol, vitamin B family and proteins.
Patent KR-20020027153-A (KR)
Inventor: HANADA SAIKO
IPC: G06Q10/00
Filed: 2001-04-07
Abstract: PURPOSE: A method for managing product information and method for requesting repairs are provided to manage production information. CONSTITUTION: The customer selects one product to be repaired from the purchased product list displayed at the customer-cellular phone. The purchased product list creates a repaired repair request form including the purchase number indicated by the number "01" and then sends to the service center. However, if there is no purchased product list, which is created by the customer-cellular phone(40), because a model of the customer-cellular phone(40) is changed, the customer connects to the service center(100) and then the purchased product list is downloaded to the customer-cellular phone(40) from the service center(100). The service center(100) obtains the purchase number from e-mail of the repair request received from the customer and then retrieves the customer information from the customer information DB(52) and repair history information from a repair history information DB(53) based on e-mail address of a sender. Also, the service center(100) searches for information showing that the product is repaired within a predetermined period.
Patent KR-20020078997-A (KR)
Inventor: CHO GWANG RAE
IPC: H01L21/316
Filed: 2001-04-12
Abstract: PURPOSE: A structure of an interconnection insulating layer using Hydrogen Silsesquioxane(HSQ) is provided to improve filling-up characteristic of via holes by filling HSQ only between neighboring wires. CONSTITUTION: The interconnection insulating layer(100) is covered with plural interconnection patterns(200) composed of a conducting pattern(120), a barrier metal pattern(130) and a diffusion barrier pattern(140) and an interconnection insulating pattern(151) is surrounded by them. The plural interconnection patterns are covered with an interlayer dielectric(160), containing via holes(170) through it ,exposing the metal barrier layer and filled up by a via plug.
Patent KR-20020080796-A (KR)
Title: Method for detecting multi media card in MP3 player
Inventor: JUNG GANG WON
IPC: G11B33/10
Filed: 2001-04-17
Abstract: PURPOSE: A method for distinguishing multimedia card insertion of a portable player is provided to simply confirm insertion or separation of an MMC by changing value of ports designated in a microcomputer if the MMC is inserted. CONSTITUTION: A method for distinguishing multimedia card insertion of a portable player includes the steps of continuously confirming the state of an inner port 1 and an inner port 2 to distinguish insertion of an MMC(Multi Media Card)(S10), confirming whether each inner ports is connected with a ground terminal(S20), determining insertion of an MMC1 according to the ground state of the inner port 1 and insertion of an MMC2 according to the ground state of the inner port 2(S21), displaying distinguished insertion state of the MMC through a display part(S22).
Patent KR-20010069694-A (KR)
Inventor: JUNG BYEONG YUN
IPC: H05K3/00
Filed: 2001-04-27
Abstract: PURPOSE: A manufacturing method for flexible printed circuit board(PCB) used folder type personal communication assistants is provided to improve the flexibility and to remove the slope between the folder unit and the main body at the exposure process and to implement the infinitesimal pattern by forming the laminated copper film on the polyimide. CONSTITUTION: The manufacturing method for flexible PCB includes the steps of laminating the copper film(133) with the polyimide film(111) of the main body(bbb) and the folder unit(aaa) without using the glue, and patterning the copper thickness less than 10 micrometer. The main body(bbb) and the folder(aaa) has the same vertical cut end structure. The manufacturing method does not use a glue, which decreases the copper plating thickness on the via hole and weakens the brittleness of the copper thin film caused by the electro plating.
Patent KR-20020083711-A (KR)
Title: Flame Retardant Thermoplastic Polycarbonate Resin Composition
Inventor: HONG SANG HYEON
IPC: C08L69/00
Filed: 2001-04-30
Abstract: PURPOSE: Provided is a resin composition based on polycarbonate, which has the improved physical property and fire retardancy, and which does not generate stress crack due to bleeding when being molded, without its heat retardancy being not decreased. CONSTITUTION: The resin composition comprises (a) 45-95 parts by weight of thermoplastic polycarbonate resin of formula 1; (b) 1-50 parts by weight of rubber modified vinyl graft copolymer obtained by graft polymerizing (b1) 5-95 parts by weight of monomer mixture consisting of 50-95 parts by weight of styrene, alpha-methylstyrene, halogen or alkyl substituted styrene or mixture thereof and 5-50 parts by weight of acrylonitrile, methacrylonitrile, C1-C8 methacrylic acid alkyl esters, C1-C8 acrylic acid alkyl esters, maleic anhydride, C1-C4 alkyl or phenyl N-substituted maleimide or mixture thereof, into (b2) 5-95 parts by weight of any one selected from the group consisting of butadiene rubber, acrylic rubber, ethylene/propylene rubber, styrene/butadiene rubber, acrylonitrile/butadiene rubber, isoprene rubber, ethylene-propylene-diene rubber(EPDM), polyorganosiloxane/polyalkyl(meta)acrylate rubber complex, and mixture thereof; (c) 0-50 parts by weight of vinyl copolymer consisting of (c1) 50-95 parts by weight of styrene, alpha-methylstyrene, halogen or alkyl substituted styrene or mixture there, and (c2) 5-50 parts by weight of acrylonitrile, methacrylonitrile, C1-C8 methacrylic acid alkyl esters, C1-C8 acrylic acid methyl esters, maleic anhydride, C1-C4 alkyl or phenyl N-substituted maleimide or mixture thereof; (d) 1-30 parts by weight of mixture of organo phosphoric compound consisting of (d1) 5-90 parts by weight of phosphagen compound and (d2) 95-10 parts by weight of compound based on phosphoric ester morpholide; and (e) 0.05-5 parts by weight of fluorinated polyoleifinic resin having average particle size of 0.05-1000 micrometer and density of 1.2-2.3 g/cm¬3.
Patent KR-20010074296-A (KR)
Inventor: KIM JEONG SANG
IPC: H05K13/00
Filed: 2001-05-04
Abstract: PURPOSE: An editable PCB function test system and method is provided to allow the PCB function tester to be used regardless of type of test model by allowing environment of the test to be edited in a computer. CONSTITUTION: A test system comprises a computer(1) for editing data and storing function test information; a micro controller for receiving the edited data, setting the operating environment for the tester, controlling input/output and mapping addresses; and a jig for mounting a connector assembly(6) and a PCB with components mounted onto the PCB. The computer classifies data into digital, analog and pulse, and edits the classified data. The edited data is transmitted to a main controller(2) through a serial communication(7). The transmitted data is encoded by the micro computer which is embedded in the main controller, and system operating conditions for a digital input/output controller(3) and an analog input/output controller(4) are set. Subsequently, the micro computer embedded in an address selector(5) decodes the received codes and maps pins of the connector assembly.
Patent KR-20010102946-A (KR)
Title: 롤링 안내 장치용 롤링 요소 스페이서
IPC: F16C19/20
Filed: 2001-05-08
Abstract: 본 발명은 볼의 무한 순환로를 포함하는 롤링 안내 장치에 사용되며,  복수개의 볼과 교대로 정렬되고 볼을 따라 무한 순환로를 순환하는 롤링 요소 스페이서를 제공한다. 본 롤링 요소 스페이서는 볼이 접촉된 상태로 미끄러지는 한쌍의 볼 지지 시트를 포함하는 판형 내부 부재와 상기 내부 부재의 외주면을 감싸는 환형의 외부 부재를 포함하며, 외부 부재와 내부 부재는 굽힘 탄성율이 다른 수지 재료로 성형된다.
Patent KR-20010107780-A (KR)
Title: 화상 작성 방법과, 화상 전시 및 판매 방법과, 그 방법을실현하기 위한 서버, 작업용 단말기, 기록 매체 및프로그램 데이터신호
IPC: G06T1/00
Filed: 2001-05-26
Abstract: 접수 서버(5)는 네트워크를 통해 사용자 단말기(1)로부터 화상을 작성하기 위한 작성 요청을 접수한다. 판매자는 최초 화상의 디지털 데이터에 기초하여 디지털 화상을 작성하고, 그 작성된 디지털 화상을 아트 데이터베이스(7)에 등록한다. 상기 판매자는 상기 디지털 화상 작성 완료에 관하여 상기 작성 요청의 요청자에게 통지한다. 상기 접수 서버(5)는 상기 사용자 단말기(1)로부터의 요청에 응답하여, 상기 아트 데이터베이스(7)로부터 대응하는 디지털 화상을 판독하고, 상기 사용자 단말기(1) 상에 그 판독된 디지털 화상을 표시한다. 버튼 "OK"가 상기 사용자 단말기(1) 상에 클릭되면, 상기 접수 서버(5)는 소정의 지불 처리를 실행한다. 상기 요청자가 상기 요청된 화상에 대한 요금을 지불했는지를 확인한 후에, 상기 접수 서버(5)는 상기 사용자 단말기(1)가 상기 디지털 화상을 다운로드하는 것을 허락한다. 그 다음에, 상기 요청자는 상기 사용자 단말기(1)를 사용하여 다운로드된 상기 디지털 화상을 프린터를 사용하여 출력한다.
Patent KR-20010110118-A (KR)
Title: 소수 모드형 광학 도파관에서 광학 도파관 모드 변환기를포함하는 제품
IPC: G02B6/34
Filed: 2001-05-29
Abstract: 소수 모드형 광학 도파관에서 파장 λ의 광선을 주어진 피유도 모드(예컨대, LP 01,f )로부터 또 다른 피유도 모드(예컨대, LP 02,b )로 변환하는 광학 도파관 모드 변환기를 포함하는 제품이 포함된다. 변환기는 도파관의 코어에서 경사진 굴절률 격자를 포함한다. 굴절률 프로파일 n(r), 광감도 p(r) 및 경사각 θ의 적절한 선택은 일부 피유도 모드(예컨대, LP 01,f /LP 01,b , 및 LP 01,f /LP 11,b )간의 결합을 실질적으로 무효화하고 다른 피유도 모드(예컨대, LP 01,f /LP 02,b )간의 결합을 실질적으로 최대화하는 것을 가능하게 한다. 본 발명에 따르는 모드 변환기는 광섬유 통신 시스템에서의 부가/제거 멀티플렉서에서 유익하게 이용될 수 있다.
Patent KR-20010110328-A (KR)
Title: 다층 제어 아키텍쳐를 갖는 멀티미디어 고객 관리 센터 및지시를 포함하는 컴퓨터로 판독가능한 미디어
IPC: G06Q10/06
Filed: 2001-06-05
Abstract: 멀티미디어 고객 관리 센터(100)의 아키텍쳐는 3개의 개별적인 응용 층인 컨택트 층(104), 통신층(106), 및 비지니스층(108)으로 분할된다. 컨택트 층(104)은, 특정 미디어 자원을 관리하고, 고객 컨택트를 자원(220)에 결합하며 상황을 포함하는 이벤트를 통신층에 보고하는 특정 미디어 핸들러(200-212)를 포함한다. 통신층은, 공유 자원을 관리하고, 컨택트 층에 의해 보고되는 이벤트를 추적, 축적, 및 보고하며, 비지니스 정보에 따른 컨택트 층에 의해 이벤트를 직접 관리하는 미디어 독립 소프트웨어(106)를 포함한다. 비지니스층은 센터에 의해 서비스받는 비지니스용 고객 컨택트 센터에 인터페이스를 제공하는 소프트웨어(108)를 포함한다. 이것은 서비스 및 비지니스 목적을 규정하는 비지니스 정보를 통신층에 제공함으로써 비지니스 서비스를 관리하고, 통신층에 의해 축적된 정보로부터 보고를 발생시킨다. 또한 스케쥴링 및 인접 자원 추적에 영향을 끼친다. 이것은 또한 작업흐름 제어 기능 또는 인터페이스를 기존의 작업흐름 시스템에 제공한다.
Patent KR-20020095575-A (KR)
Title: Method for addressor allotment for virtual channel connection in ATM network
Inventor: YOO DONG YEOL
IPC: H04L12/50
Filed: 2001-06-14
Abstract: PURPOSE: A method for assigning an address for accessing a virtual channel in an ATM network is provided to set a virtual access channel to an ATM end point only from an ATM start point, and to set VCs(Virtual Circuits) by using an SVC(Switched Virtual Circuit) system, thereby easily assigning the VCs. CONSTITUTION: A mobile communication system decides whether communication is performed inside a base station(S101), and assigns VPI/VCI to an ATM end point from a base station channel card according to a decided result(S103). The system fixes assigned VP/VC values, and transmits data in the base station(S105). The system decides whether an ATM cell is transmitted to a control station(S107). If so, the system transmits data including a destination address that has to arrive within an information area of a cell(S109). If the communication is not performed inside the base station, the system decides whether the communication is performed between the base station and the control station(S111). If so, the system sets VCs between ATM nodes(S113). The system decides whether an ATM cell is transmitted to the base station(S115). If so, the system sets the VP/VC values in the ATM cell, and transmits the data(S117).
Patent KR-20010079117-A (KR)
Title: The method and apparatus of rapid installing nut
Inventor: BAEK SOO GON
IPC: F16B37/08
Filed: 2001-06-14
Abstract: PURPOSE: A prompt assembling nut is provided to promote safety in the radiation zone or under the water by promptly assembling many connecting devices used for construction and renewal and to reduce cost by shortening connecting time. CONSTITUTION: A nut is split into two pieces. One part of the nut is integrated with a nut fixing body(11) while the other part is used for adjusting diameter of a female screw. When a nut stator is in an upper portion, a moving nut is movable. For assembling a bolt, the nut stator is lifted up to move the moving nut toward a nut fixing wall(15) and to increase the diameter of the nut by spacing the moving nut from a fixed half-nut. Since the diameter of the nut is increased, the bolt is naturally inserted to a nut thread pitch even without rotation of the bolt. After pushing the bolt to the end, the moving nut is pushed toward the fixed half-nut. And then, the nut stator is lifted down to remove a void between the moving nut and the nut fixing wall. The two half-nuts contact with each other, and function of a single nut is realized. Upon rotation of the bolt, complete connection of the bolt with the nut is secured.
Patent KR-20020002219-A (KR)
Title: Resol-type phenol resin composition and process for curing the same
Inventor: INOUE TADASHI
IPC: C08K3/22
Filed: 2001-06-18
Abstract: PURPOSE: Provided are a resol-type phenol resin composition which can be cured even in a low temperature range of from 10 to 110 deg.C, using a curing accelerator which has no adverse effect on other materials or substances with which the resulting cured article is in contact, and which requires a small amount of an additive, and a method for curing the same. CONSTITUTION: The resol-type phenol resin composition comprises a resol-type phenol resin(A), an alkali earth metal oxide and/or an alkali earth metal hydroxide(B), and a salt(C) of a sulfur atom-containing oxo acid and a nitrogen atom-containing base. The alkali earth metal oxide and/or the alkali earth metal hydroxide(B) are an oxide and/or a hydroxide of magnesium, calcium or barium. The salt(C) of the sulfur atom-containing oxo acid and the nitrogen atom-containing base is sodium thiosulfate. The method for curing a resol-type phenol resin, comprises curing the resol-type phenol resin composition at a temperature of from 10 to 110 deg.C.
Patent KR-20020096517-A (KR)
Title: Surface mounted chip inductor and manufacturing method therefor
Inventor: AHN BYEONG JUN
IPC: H01F27/25
Filed: 2001-06-20
Abstract: PURPOSE: A surface mounted type chip inductor and a method for fabricating the same are provided to improve a characteristic of radio frequency by forming a hollow coil. CONSTITUTION: A remover(110) is coated on the outside of a cylindrical rod(100). A coil(120) is wound around the cylindrical rod coated with the remover(110). A green sheet(400) is formed by mixing ceramic powders with an organic binder. A plurality of hemispheric grooves are formed on a longitudinal direction of the green sheet(400). The cylindrical rod(100) including the coil(120) is inserted into the green sheet(400) having the hemispheric grooves. A couple of green sheets(400) are bonded to each other. A combination body is formed by applying a pressure to the bonded green sheets(400). A hollow coil is formed by separating the cylindrical rod(100). The combination body is cut according to a predetermined size. A ceramic layer(500) of a low dielectric constant is coated on the coil(120).
Patent KR-20020096712-A (KR)
Inventor: PARK U CHEOL
IPC: B60R7/04
Filed: 2001-06-21
Abstract: PURPOSE: A device for locking a console box of a vehicle is provided to prevent an accident due to the opening of a console box by suppressing the easy unlocking of the console box when an external shock is applied. CONSTITUTION: A device for locking a console box of a vehicle comprises a pair of locking bars(120) inserted to locking recesses(102) of a console box body or separated from the locking recesses, a moving unit to horizontally move the locking bars, and a handle(130) to operate the moving unit and to lift up a lid of the console box. The moving unit is an operating member(110) having a pair of guide units(112). Since the console box is locked by the locking bars at both sides, the console box is locked firmly.
Patent KR-20030000679-A (KR)
Title: Plate block for children teaching tools
Inventor: JUN SU KWANG
IPC: G09B1/04
Filed: 2001-06-26
Abstract: PURPOSE: A plate block of teaching tools for a baby is provided to increase commodity feature and minimize wood consumption by preventing bending or breakage of the plate block. CONSTITUTION: A wood is cut in a longitudinal direction to obtain a necessary square wooden stick(20). The square wooden stick is cut in a width direction to manufacture a plate block(10) wherein an annual ring is arranged at a surface of the plate block(10). Although the plate block(10) is dry, it is not bent but maintains a flat status. Since the annual ring is arranged at the surface of the plate block(10), an external appearance is beautiful and babies and children use it for an education with respect to the annual ring of the wood. Since the plate block(10) is not easily broken during using it, a repair operation is not required.
Patent KR-20030000994-A (KR)
Title: Strip-type fiber sheet and structure reinforcement method using the same
Inventor: CHOI GEUN DO
IPC: E04G23/02
Filed: 2001-06-28
Abstract: PURPOSE: A reinforcing method for a structure using a strip type fiber reinforced sheet is provided to prevent the lowering of adhesive stress of a fiber reinforced sheet and to secure reinforcing efficiency by scattering adhesive stress by external load. CONSTITUTION: The reinforcing method for a structure using a strip type fiber reinforced sheet comprises the steps of: surfacing the reinforcing parts of structures(11) to be reinforced; attaching a strip type fiber reinforced sheet(100) to the reinforcing parts of the structures(11); and finishing up the attaching part of the strip type fiber reinforced sheet(100).
Patent KR-20030002794-A (KR)
Title: Method for forming the contact hole of semiconductor device
Inventor: KIM HYEONG GYUN
IPC: H01L21/28
Filed: 2001-06-29
Abstract: PURPOSE: A method for fabricating a contact hole of a semiconductor device is provided to control the stress applied to a semiconductor substrate in a subsequent process for etching a self-aligned contact hole by forming a barrier layer on the entire semiconductor substrate in a chamber wherein the volume of the chamber is minimized and SiH2 gas and NH3 gas are mixed in a proper ratio. CONSTITUTION: The barrier layer(120) is formed on the semiconductor substrate(100) having a wordline(110) in a single chamber whose volume is minimized. An interlayer dielectric(130) is stacked on the barrier layer. An exposure and development process are carried out to form a self-aligned contact(140).
Patent KR-20030004879-A (KR)
Title: A method of preparing colored and flavored ice flakes and ice candy made of them
Inventor: JANG YEONG RYEOL
IPC: A23G9/32
Filed: 2001-07-07
Abstract: PURPOSE: Provided are a method of preparing colored and flavored ice flakes used as an additive for an ice candy. Therefore, an ice candy can be effectively manufactured minimizing the loss of ice flakes and increasing appearance thereof. CONSTITUTION: The colored and flavored ice flakes is characterized by comprising 0.06-0.08 wt.% of aspartame, 0.1-0.2 wt.% of refined white sugar, 0.1-0.2 wt.% of a stabilizing agent(Locust bean gum 45 wt.%, guar gum 48.1 wt.% and carrageenan 6.9 wt.%), 0.2-0.4 wt.% of citric acid, 0.001-0.004 wt.% of edible coloring agent, 0.2-0.4 wt. % of a flavoring agent and 98.716-99.336 wt.% of mixing water.
Patent KR-20020096798-A (KR)
Title: A method of forming silicon containing thin films by atomic layer deposition utilizing trisdimethylaminosilane
Inventor: KIM YEONG GWAN
IPC: H01L21/318
Filed: 2001-07-10
Abstract: PURPOSE: A method for forming a thin film including silicon by stacking atomic layers using tris-dimethyl-aminosilane is provided to form a Si3N4 layer and a SiO2 layer by using tris-dimethyl-aminosilane as a reactant. CONSTITUTION: A substrate(1) is loaded in a chamber. A chemical adhesion layer of tris-dimethyl-aminosilane is formed on a surface of the substrate(1) by absorbing chemically the first part of tris-dimethyl-aminosilane. The second part of tris-dimethyl-aminosilane are adhered on the chemical adhesion layer of tris-dimethyl-aminosilane. A purge process is performed in the chamber by using N2. The non-adhesive part of the chemical adhesion layer of tris-dimethyl-aminosilane are removed by the purge process. Ar including NH3 is introduced into the chamber. A Si3N4 layer(8) is formed on the substrate(1) by reacting NH3 with tris-dimethyl-aminosilane.