baber/WOPTO huggingface dataset:
Patent KR-20080055596-A (KR)
Title: Thin film transistor and method for fabricating the same, and display device using the same
Inventor: KIMURA SHINICHI
IPC: H01L29/786
Filed: 2007-07-12
Abstract: A TFT is provided to avoid the deterioration caused by existence of a corner part by preventing a drain electrode and a source electrode from having an end part(a corner part). In first and second thin film transistors, a semiconductor layer(20) made of amorphous silicon is formed on one gate electrode(10). A plurality of circular electrode front parts of a drain electrode(30) and a plurality of circular electrode front parts of a source electrode(40) are arranged on a corresponding semiconductor layer. A plurality of thin film transistors to which a source and a drain are commonly connected can serially be connected between the drain electrode and the source electrode wherein the thin film transistors adjoining each other in the right-and-left direction are interconnected in parallel.
Patent KR-20090007183-A (KR)
Title: 클립겸용필기도구꽂이
Inventor: CHO KWAN YOUNG
IPC: B43K23/00
Filed: 2007-07-13
Abstract: 본 발명은 클립(일명'집게')를 기본으로 상위에 필기도구를 고정시킬 수 있는 꽂이에 관한 것으로서, 자세히는 물건을 집는 클립과 일체형으로 된 필기도구꽂이 등에 관한 것이다. 
     기존에는 클립밑에 자석을 연결 냉장고에 수시로 보고자 하는 영수증이나 전달 메모지를 끼워쓰는 형태로 진행되어 왔으나, 즉시 메모나 체크해야할 필기도구가 없어 매우 불편하게 하는 문제점이 있다. 
     본 발명은 상술한 문제점을 해결하기 위한 것으로서, 여러형태의 클립(11)에 다양한 모양의 필기도구꽂이들(21,22)로 일체형(23) 또는 접속형(23)으로 연결 구성되어 있다. 
     이렇게 구성된 발명은 다양한 재질과 모양으로 부착면에 부착될 수 있도록 자석 또는 흡착구(큐방)등의 방법으로 부착 사용하며, 생활주변에 집게역활과 필기도구 꽂이 역할을 동시에 할 수 있는 재질과 모양에 제한없는 여러 형태의 특징을 갖고 있는 클립겸용필기도구꽂이로 가정, 상가, 사무실 등에 적용된다. 
       
     클립, 필기도구, 필기도구꽂이, 필기도구꽂이입구
Patent KR-20090010538-A (KR)
Title: Phosphor for light emitting diode and its surface coating method
Inventor: KIM JAE PIL
IPC: H01L33/50
Filed: 2007-07-23
Abstract: The phosphor for the light emitting diode and its surface coating method is provided to prevent oxidation of the active material in the encapsulating material and deterioration of the crystalline of phosphor and to improve the efficiency of phosphor. The surface coating method of phosphor for the light emitting diode comprises as follows. The surface is coated by using the coating material to improve the reliability of the fluorescent substance for the light emitting diode. The coating material is manufactured by using the sol-gel materials as a precursor(S200). The fluorescent substance is dipped in the coating material to coating the surface of the fluorescent substance(S210). The coated fluorescent substance is dried and then heated by the thermal process(S220).
Patent KR-20090012287-A (KR)
Title: Control system for antenna of mobile communication base station
Inventor: KIM DUK YONG
IPC: H04B7/10
Filed: 2007-07-27
Abstract: A mobile communication base station antenna control system capable of reducing a cost is provided to mount a sensor sensing the slope of the base station antenna and control the sensor at remote place. An antenna remotely controls the vertical tilting and horizontal steering of beam. A slope detect sensor senses the slope of the antenna. The slope detect sensor senses the variation of sector poring angular of the antenna. A controller inputs the sensing signal of a sensor and the slope detect sensor. The amount of change is produced and transmitted to the remote monitoring center. According to the first arbitration part is the control signal of controller, the vertical tilting of beam is controlled. According to the second control unit is the control signal of controller, the horizontal direction steering is controlled.
Patent KR-20090011977-A (KR)
Title: Method of manufacturing silicon contactor for testing semiconductor device
Inventor: MOON HAE JOONG
IPC: G01R1/067
Filed: 2007-07-27
Abstract: A manufacturing method of a silicon contactor for testing a semiconductor device is provided to miniaturize a gal between conductive layers and to form easily a desired size of the conductive layer. A support plate(12) is prepared by forming a main through-hole for advance and retreat guide in a center thereof and forming a coupling through-hole at a location separated from the main through-hole. The support plate is mounted in a molder. The coupling through-hole is filled with an insulating silicon material. A peripheral supporting part(22) is attached to an upper surface and a lower surface of the support plate. A main body(24) is extended from the peripheral supporting part to a top direction in the size smaller than the size of the main through-hole.
Patent KR-20090012440-A (KR)
Title: Preparation method of 99mtc-labeled fe2o3 nanoparticle and diagnostic imaging agents or therapeutic agents for cancer diseases comprising thereof
Inventor: PARK SANG HYUN
IPC: C01G49/00
Filed: 2007-07-30
Abstract: A method of manufacturing technetium-99m cover iron oxide nanoparticle is provided to inject iron oxide nanoparticles easily into a body using acid solution or borohydride anion exchange resin as a reducing agent and to grasp easily particle distribution location and exhaustion course to vitro etc. A method of manufacturing technetium-99m cover iron oxide nanoparticle indicated as a chemical formula 1 comprises a step of reacting ferric oxide(Fe2O3) with sodium pertchenetate(Na99mTcO4) under acid solvent. In the chemical formula 1, M is alkali metal. The acid catalyst is one selected from a group consisting of hydrochloric acid, nitric acid and sulfuric acid. The reaction is performed in 98 ~ 100 °C. The reaction time is 20 ~ 40 minutes.
Patent KR-20090017099-A (KR)
Title: Smart card having function of one time password generation and electronic banking system using that
Inventor: TAK SEUNG HO
IPC: G06Q20/30
Filed: 2007-08-14
Abstract: A smart card having function of one time password generation and an electronic banking system using the same are provided to achieve the high security using OTP by generating the OPT using the key value of smart card itself. If the user connects the smart card to PC, the monitor screen displays 'the place for inputting PIN' by operating the CSP of the kernel bootstrap of the operating system of PC. If the user inputs the wrong PIN, the PC is not driven. If the user inputs the right PIN, the PC is normally driven. At this time, the PC is completely isolated from the outside. The keyboard input information of PC cannot leak. The smart card generates the OTP.
Patent KR-20090020880-A (KR)
Title: The cable unit of arm robot
Inventor: KIM KYEONG MIN
IPC: B25J19/00
Filed: 2007-08-24
Abstract: A cable supporting unit of the robot arm is provided to minimize the rubbing with the cable and to protect the cable by accommodating the interlocking movement. As to the cable supporting unit of the robot arm, the cable supporter housing(10) comprises the cable supporter insertion part(12) having the fitting groove after one side; the inner circumference stepped projections(13) protruded to the regular interval to the end to the inner circumference; and the tube insertion part(15) having the circumference stepped projection(14) protruded according to the outer circumference. The cable supporter(20) comprises a plurality of cable hole(22) of the other diameter formed as the circumference of the central part(21); the insertion hole(23) formed in the central part; a plurality of support holes(24) formed outside the insertion hole; and the gap connecting the insertion hole and the support hole.
Patent KR-20090022205-A (KR)
Title: Mobile phone for display of an advertisement, method and system for an offer of an advertisement to mobile phone, and recording medium
Inventor: KIM JAE HYUNG
IPC: H04W84/16
Filed: 2007-08-29
Abstract: A cellular phone for outputting advertisement data, a method and system for providing the advertisement to the cellular phone, and an advertisement processing server and recording medium therefor are provided to output the advertisement data regardless of the screen size of the cellular phone by making the advertisement data outputted on an assigned advertisement output region. A region from which a web page is outputted and a region from which advertisement data is outputted are separated and outputted on a screen. A control station controls at least one or more base stations. A server controls and operates a wireless communication network including the base stations and control station. An accounting server(105) charges various communication fees and additional service use fees corresponding to a communication rate system which a user uses. The wireless communication network establishes wireless links with at least one or more wireless terminals(100).
Patent KR-20090022491-A (KR)
Title: Air conditioning system for automotive vehicles
Inventor: LEE JEONG JAE
IPC: B60H1/00
Filed: 2007-08-30
Abstract: An air conditioning system for a vehicle is provided to dry wet footwear efficiently though low cost and a few facilities without offering discomfort to an operator and a passenger. An air conditioning system for a vehicle comprises: an air conditioner case(10); an evaporator(20) and a heater(30) installed inside the air conditioner case; a shower duct installed within the air conditioner case; a first outlet(60); a second outlet(62); a door unit(70). The shower duct has an inner gateway transferring cold air and hot air passed through the evaporator or the heater to knees. The first outlet discharges the air in the inner gateway to the knees of a passenger and a driver.
Patent KR-20090025892-A (KR)
Title: Direct connection type water cleaner
Inventor: KANG KYUNG SEOK
IPC: B01D35/00
Filed: 2007-09-07
Abstract: A water purifier connected with waterworks directly is provided to prevent contamination of water and increase life span of a filter by discharging a foreign material and sterilizing the filter automatically. A water purifier connected with waterworks directly comprises the followings: a first cooler(20) heat-exchanged with tap water and directly with a inlet tube(10) of tap water; a solenoid valve(30) shielding and supplying the tap water; a filter(40) purifying the tap water and installed on a rear side of the first solenoid valve; a second solenoid valve(50) shielding and supplying the purified water into the first cooler; a heater(60) heating the supplied water; a hot water supply pipe(70) supplying the heated water; a second cooler(80) cooling the water; and a cold water supply pipe(90) supplying the cooled water.
Patent KR-20090029947-A (KR)
Title: Braket of electric railway
Inventor: YANG BYONG NAM
IPC: B60M1/20
Filed: 2007-09-19
Abstract: A bracket of electric railway is provided to secure electric insulation spaced distance between the end of the horizontal tubes and the tunnel wall by shortening the length of the rod and horizontal pipes. The support beam(110) is set up vertically in the center upper part of tunnel. The long rod insulator(120) is combined to support beam. The rod(190) is combined in the end of the horizontal main pipe(140). One side end of the supporting angle(150) is combined to the intermediate position of the horizontal main pipe. The other side end of the supporting angle is combined with the horizontal pipes(160) to support the horizontal pipes. The rounded pulling device support fitting(180) is combined to the central part of the horizontal pipes. The curve pulling mechanism(170) is combined to the end of rounded pulling device support fitting.
Patent KR-20090034258-A (KR)
Title: Exercise bicycle
Inventor: LEE MOO YOUNG
IPC: B62L1/02
Filed: 2007-10-02
Abstract: A bicycle for exercise is provided to use in freight or exercise by controlling the rotary resistance of a wheel through using a brake system of a bicycle according to the selection of a user. A bicycle for exercise comprises a nose wheel and a back wheel, a saddle, a steering wheel, a frame, a power train and a brake device including a brake lever. The bicycle for exercise comprises a lever control device(60) rotating a lever body(20) of the brake lever at fixed level. The bicycle driver manipulates the lever control device in driving and rotates the lever body at the fixed level and the brake operates and the rotary resistance of the wheel is controlled to fixed level. The lever body of the brake lever comprises: a central part(22) having an inlet hole; a handle part(21) formed in one side of the central part; and a protrusion(23) formed in the other one side of the central part. The lever control device comprises: a pipe male screw(61) fixed to a part of outer circumference of a handle bar(10); and a pipe female screw(62) joined with the pipe male screw.
Patent KR-20090038135-A (KR)
Title: Resistor for controlling motor
Inventor: CHOI IN SUB
IPC: H02K11/00
Filed: 2007-10-15
Abstract: A resistor for controlling a motor is provided to facilitate quality management and automation by connecting an end of a resistance coil member to a constant position of a terminal member. A housing member(10) includes a coil storage room(11). One side of a coil storage room is opened. A resistance coil member(20) is inserted to the inside of the coil storage room. The both ends of the resistance coil member are protruded to the outside of the housing member. A molding material(30) is filled in the coil storage room of the housing member. A connection terminal member is positioned in both sides of the housing member. One end of the connection terminal member is a terminal connection unit(41). The other end of the connection terminal member is a coil fixing unit(42). A terminal guide groove is formed in both sides of the housing member. The connection terminal member is inserted into the terminal guide groove.
Patent KR-20090039017-A (KR)
Title: Method and system for downloading contents by reservation using mobile terminal and the mobile terminal therefor
Inventor: YOON YOUNG SHIN
IPC: H04W8/24
Filed: 2007-10-17
Abstract: A method and a system for downloading contents by reservation using a mobile terminal and a mobile terminal for the same are provided to improve the availability of a mobile terminal by downloading contents through an access at a reserved time. A terminal agent receives the information about one or more contents(S400). The terminal agent uses an alarm API(Application Program Interface) and a download reservation time of the contents is set to the alarm unit of the mobile terminal(S404). If it is the set up time for content download as described above, the alarm part activates the terminal agent of the idle state(S412,S416). The mobile terminal connects to the content server(S418). The mobile terminal downloads the corresponding contents(S420).
Patent KR-20090039232-A (KR)
Title: Method for encoding and decoding moving images
Inventor: LEE CHANG HO
IPC: H04N5/93
Filed: 2007-10-17
Abstract: A method for encoding and decoding moving pictures is provided to increase network adaptability and to implement backward reproduction easily by skipping certain P frames of video frames for transmitting over a network depending on a network transmission situation. A video frame is encoded and generates I frame at a constant interval. One or more P frames referring to each I frame is generated through a forward prediction encoding at a constant interval. Each P frame is generated in an equal interval by referring to the same I frame. A B frame is generated through a forward prediction encoding at a constant interval with reference to each I frame or each P frame. A B frame referring to a P frame is generated through a forward prediction encoding or a backward prediction encoding. Each B frame is generated with reference to among an I frame or a P frame whichever is near in terms of time.
Patent KR-20080063704-A (KR)
Title: A system for providing result of urine analysis
Inventor: PARK YI SEUL
IPC: G01N33/493
Filed: 2007-10-22
Abstract: A system for providing result of urine analysis is provided to test urine conveniently while the urine is secreted and provide an advertisement corresponding to the test result in real time to a user of a urinal. A system for providing result of urine analysis(10) comprises: a sensor portion(11) which contacts directly with urine in order to analyze the urine and obtains numerical value information of urine ingredients; a processing portion(12) which draws analysis result from the obtained numerical value information and generates an outputted signal in accordance with the result; and a display portion(13) which outputs the output signal of the processing portion into image or sound. A method for providing an advertisement using the urine analysis result comprises the steps of: (a) downloading an advertisement from the advertisement providing server and storing the advertisement; (b) analyzing urine of a user to obtain result information; (c) searching an advertisement corresponding to the result information; and (d) displaying the searched advertisement.
Patent KR-20090041199-A (KR)
Title: Electrolytic disinfection device for purifying water
Inventor: LEE IN TAK
IPC: C02F1/467
Filed: 2007-10-23
Abstract: An electrolytic sterilizing device for water treatment is provided to offer easy assembility and strong durability and to implement effective disinfecting performance. An electrolytic sterilizing device for water treatment includes a case(100), an outer barrel electrode and an inner barrel electrode. Purified water in a filter unit passes through the case. The outer barrel electrode and the inner barrel electrode are arranged inside the case. The case includes an inlet part(110) and an outlet part(111). The case includes an upper case(105) of a half circle form, a lower case(106), a connecting member(115) and an annular member(120). A flowing pipe(116) is formed on one side of the connection member and semicircular rims are formed on both sides of the connection member.
Patent KR-20090041251-A (KR)
Title: Fuel tank
Inventor: AHN JUNG HWAN
IPC: B60K15/03
Filed: 2007-10-23
Abstract: A fuel tank is provided to prevent the leakage of vaporized fuel gas through the integration of the nipple and the flange of the fuel pump. A fuel tank comprises a housing(110) made of plastic or thin steel sheet, a spud(120) which is formed on one side of the housing and is connected to a fuel injection pipe, and a fuel pump(130) for delivering the fuel in the housing to an engine. The fuel pump includes a flange(131) sealing a hole formed on the top of the housing, a reservoir(132) performing a pumping function, and a connection part(133) for connecting the flange and the reservoir.
Patent KR-20090043849-A (KR)
Inventor: KANG IN WON
IPC: G06F15/16
Filed: 2007-10-30
Abstract: 본 발명은 근거리 또는 원거리에서 광 전송 매체인 플라스틱 또는 유리 광케이블을 통해 전송된 영상, 음성, 제어신호 등의 매체가 다른 멀티미디어 데이터들을 수신하여 처리하도록 한 멀티미디어 데이터 수신기에 관한 것으로서, 이러한 본 발명은, 광케이블에 접속된 광 모듈에 의해 광-전 변환된 단일 전송 방식 포맷의 수신 신호를 증폭하여 처리하고, 송신용 직렬 데이터를 아날로그 신호로 변환하여 상기 광 모듈을 통해 광전송을 수행하는 광 드라이버와; 상기 광 드라이버를 통해 수신한 수신신호로부터 포맷 변환을 위한 컨트롤 데이터를 추출하고, 컨트롤 데이터의 인터페이스를 수행하는 인터페이스 제어 로직과; 상기 광 드라이버를 통해 수신한 수신신호를 디지털 데이터로 변환하고 복조하여 원래의 전송 방식 포맷 데이터로 변환하며, 직렬로 구성된 영상 데이터를 비 직렬화하여 접속된 디스플레이 기기로 전송하는 디지털 신호처리 로직으로, 멀티미디어 데이터 수신기를 구현하게 된다. 
       
     멀티미디어 데이터, 광전송, 광전송 수신기, 인터페이스, 광드라이버
Patent KR-20090046219-A (KR)
Inventor: KWON GI HO
IPC: B60J7/02
Filed: 2007-11-05
Abstract: 본 발명은 폴리우레탄의 투입량을 줄이면서도 선루프 글라스의 강도를 확보하기 위해서 상기 선루프 글라스의 하부에 배치되는 지지패널의 종방향 및 횡방향 비틀림에 대응하기 위해 상기 폴리우레탄이 상기 선루프 글라스와 상기 지지패널에 투입 사출되는 차량의 선루프 글라스 보강 구조에 있어서, 상기 선루프 글라스의 강성을 확보하기 위해 상기 지지패널 테두리부를 'ㄱ' 자형으로 만들고, 상기 폴리우레탄을 상기 지지패널의 테두리부에 투입하여 도포함으로서, 적은 양의 상기 폴리우레탄을 투입하고도 상기 지지패널이 상기 선루프 글라스에 강하게 고정되어 종방향 및 횡방향의 비틀림에 충분히 대응하는 이점이 있는 선루프 글라스 보강구조에 관한 것이다. 
           
       
     테두리부, 지지패널, 폴리우레탄, 선루프 글라스
Patent KR-20090047053-A (KR)
Inventor: MIN TAE SIK
IPC: F24F7/08
Filed: 2007-11-07
Abstract: 본 발명은 설치 및 유지보수가 용이하고 공간의 효율적인 활용이 가능한 벽걸이형 환기장치를 제공하고자 함에 그 목적이 있다. 
     이를 구현하기 위한 본 발명은, 실내공기를 실외로 배출시키고 신선한 실외공기를 실내로 유입시키기 위한 송풍기와, 실내로 유입되는 상기 실외공기를 정화하기 위한 필터와, 상기 실외로 배출되는 실내공기와 실내로 유입되는 실외공기 사이에 열교환이 이루어지는 열교환기를 구비한 환기장치에 있어서, 상기 실내공기가 흡입되는 실내공기흡입구와 실외로부터 흡입된 실외공기를 실내로 배출하기 위한 실외공기배출구는 상기 열교환기의 공기유로에 대하여 실내방향으로 직각이고, 상기 실내공기흡입구를 통해 흡입된 실내공기가 실외로 배출되는 실내공기배출구와 상기 실외공기가 흡입되는 실외공기흡입구는 상기 열교환기의 공기유로에 대하여 실외 방향으로 직각인 것으로 구성된다. 
       
     환기, 벽걸이, 송풍기, 열교환기, 흡입구, 배출구
Patent KR-20080042007-A (KR)
Title: Optical module
Inventor: OKAMURA YUKITOSHI
IPC: G02B6/42
Filed: 2007-11-07
Abstract: An optical module is provided to reduce non-uniformity in curing UV(Ultraviolet)-curable resin when combining a light receiving device or a light emitting device and a receptacle by using UV-curable resin. An optical module is composed of a device(200) equipped with a photoelectric element and a receptacle(300) for optically connecting the device and an optical fiber(400). The receptacle has a device holder(320) at one end. The front end of the device is fitted to the device holder and fixed by applying UV-curable resin(500). The device holder has a window region of relatively high-UV ray transmissivity dispersively arranged around the entire fitted part of the device. The window region of the device holder is a cut part recessed around the periphery of an aperture.
Patent KR-20090047284-A (KR)
Inventor: SOHN BYUNG KON
IPC: G05D1/02
Filed: 2007-11-07
Abstract: 본 발명에 따른 인공 표식 위치 검출 장치는, 특정 공간에 설치되며, 고유의 식별 ID를 갖는 다수의 인공 표식들과, 다수의 인공 표식들 중 임의의 인접한 두 개의 인공표식들간 거리값이 저장되어 있는 메모리와, 카메라에 의해서 촬영된 적어도 두 개 이상의 인공 표식에 대한 영상 좌표를 검출하는 영상 처리 수단과, 이동체에 장착된 위치 인식 수단의 위치를 검출하는 위치 검출 수단과, 촬영된 인공 표식들이 설치된 높이값을 측정하는 높이 측정 수단과, 센서의 위치, 높이값을 토대로 정규화된 영상 좌표 및 메모리에 저장된 거리값을 토대로 촬영된 인공 표식들의 각각에 대한 위치를 산출하여 메모리에 저장하는 표식 위치 검출 수단을 포함한다. 
     이와 같이, 본 발명은 이동체의 위치 인식에 사용되는 위치 인식 센서를 이용하여 인공 표식의 위치를 계산하여 인공 표식 맵을 생성함으로서, 인공 표식의 위치를 사람이 실측해야하는 번거러움을 해소하여 인공 표식 설치 작업을 단순화시킬 수 있다. 
       
     위치, 인식, 로봇, 인공표식
Patent KR-20090050149-A (KR)
Inventor: OH CHOON HWAN
IPC: H01L21/60
Filed: 2007-11-15
Abstract: 본 발명은 동 적층판(CCL) 상에 드릴을 이용하여 복수의 도통홀을 형성하고, 베이스 기판의 전면을 동도금하여, 상기 기판상에 드라이 필름을 적층하고 현상한 뒤 식각에 의해 동박을 제거하여 회로패턴을 형성하는 비오씨 반도체 패키지 기판의 제조방법에 있어서, 상기 회로패턴의 소정부위에 솔더 레지스트를 도포한 후 노광, 현상 및 건조시키는 1단계와, 상기 1단계에서 건조를 통해 와이어 본딩 패드 및 솔더볼 패드를 노출시키는 2단계와, 상기 2단계에서 노출된 솔더볼 패드 및 와이어 본딩 패드의 접합을 위하여 니켈ㆍ 금도금하는 3단계와, 상기 3단계 후, 기판 중앙부위의 윈도우를 라우터로 가공하는 4단계를 포함하되, 상기 기판 중앙부 윈도우에 접하고 상기 윈도우 절단면으로부터 50~500um 폭을 갖는 솔더레지스트 댐을 형성하여 제조되는 것을 특징으로 하는 솔더레지스트 댐이 형성된 비오씨 반도체 패키지 기판 및 그 제조방법에 관한 것이다. 
       
     비오씨, 기판, 솔더 레지스트 댐
Patent KR-20090054553-A (KR)
Title: The embedded on-line monitoring and diagnosing devices and operating algorithm for power apparatus
Inventor: KIM KWANG HWA
IPC: H04L12/24
Filed: 2007-11-27
Abstract: An embedded online power device, a monitoring and diagnosing device and an operating algorithm for the power device are provided to process a result measured at a field with an optimization signal processing algorithm and to transmits the processed result to a server or a client through a common network. An A/D(Analog to Digital) converter(4) converts a signal sensed in a sensor(S1) into a digital signal, and an input/output unit(5) is connected to the analog digital converter. A communication device(6) performs communication with a network by being connected to the input/output unit. An initialization code input unit(11) inputs an initialization code, and a device driver unit(12) operates a hardware based on a command of a driving program.
Patent KR-20080053212-A (KR)
Title: Substrate heating apparatus and semiconductor fabrication method
Inventor: SHIBAGAKI MASAMI
IPC: H01L21/324
Filed: 2007-12-07
Abstract: A substrate heating apparatus and a semiconductor manufacturing method are provided to improve exhaust conductance around a substrate by forming a through-hole for connecting a space between a cap and the substrate with a space in a process chamber. A heating member(4) heats a substrate(3) positioned in a process chamber(1). A susceptor(2) is interposed between the heating member and the substrate. A heat receiving member is installed opposite to the susceptor to receive the heat generated by the heating member through the susceptor. A space between the heat receiving member and the substrate is communicated with a space(13b) in the process chamber via a ventilation portion.