Patent SG-11201808024R-A (SG)
Title: Apparatus and method for providing a uniform flow of gas
Inventor: JALLEPALLY RAVI
IPC: H01L21/683
Filed: 2017-03-30
Abstract: INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property -, - Organization MD 1101111 0 11101 010 11111 010 1111 1 0 111 010I1111 100 !HMO 1111111110 HOED International Bureau ... ...., ..... ...,/ (10) International Publication Number (43) International Publication Date WO 2017/173097 Al 5 October 2017 (05.10.2017) WIP0 I PCT (51) International Patent Classification: (72) Inventors: JALLEPALLY, Ravi; 3030 Sweetviolet H01L 21/02 (2006.01) HO1L 21/683 (2006.01) Drive, San Ramon, California 94582 (US). RASHEED, H01L 21/205 (2006.01) Muhammad M.; 4059 Beebe Circle, San Jose, California (21) International Application Number: 95135 (US). DURUKAN, Ilker; 1201 Sycamore Terrace PCT/US2017/025045 #22, Sunnyvale, California 94086 (US). (22) International Filing Date: (74) Agent: BLANKMAN, Jeffrey I.; SERVILLA WHITNEY 30 March 2017 (30.03.2017) LLC, 33 Wood Ave. South, Suite 830, Iselin, New Jersey 08830 (US). (25) Filing Language: English (81) Designated States (unless otherwise indicated, for every (26) Publication Language: English kind of national protection available): AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, (30) Priority Data: BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, 62/317,433 1 April 2016 (01.04.2016) US DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, (71) Applicant: APPLIED MATERIALS, INC. [US/US]; HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, 3050 Bowers Avenue, Santa Clara, California 95054 (US). KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. [Continued on next page] (54) Title: APPARATUS 2062-N AND METHOD FOR PROVIDING A UNIFORM FLOW OF GAS (57) : Outer distribution rings and gas distribution apparatus with out- er distribution rings to deliver a gas flow to a process region of a process chamber are described. The outer distri- 1840 bution rings include at least one plenum 1904 / in fluid communication with a plurality of openings forming a plurality of 2060 2070 1903a 1903a trenches to allow gas to flow from the plenum through the openings and down — 1902 1903b an inner peripheral face of the outer dis- tribution ring. 2052 2054 ► , iiii 1 / /////4 k 1830 2016 2000 2030 74 ifro 9 + • , s, N ktttt.si 1908a I ttitZ 1900 2018 000(D 0 0 0 1820 1804 , ,-1 .4 1906 1,>\\\\ / 77\\ 1810 IN C:7 1822 © IN en FIG. 19 ,—, IN ,—, © ei O WO 2017/173097 Al MIDEDIMOMOIDEIRMEMOMMEMORDERVOIMIE (84) Designated States (unless otherwise indicated, for every SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, kind of regional protection available): ARIPO (BW, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, GH, SZ, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG). TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, RU, KZ, Published: TJ, TM), European (AL, AT, BE, BG, CH, CY, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, CZ, IT, RS, DE, — LT, SE, with international search report (Art. 21(3))