baber/WOPTO huggingface dataset:
Patent KR-20020041994-A (KR)
Title: Road protection apparatus
Inventor: MUN JI HUN
IPC: E01F15/00
Filed: 2000-11-29
Abstract: PURPOSE: A road protector is provided to reduce expenses on installation and maintenance works and to protect vehicles and passengers. CONSTITUTION: The road protector comprises a road protector body(100) containing a median strip, an add-on material(200) added on the outside of the road protector body(100) and provided with a height adjusting part(201), and a fixture(300) for fixing the add-on material(200). The add-on material consists of a pair of both side add-on materials(210,220) which are made of elastic material and have reinforcing material(230) inside.
Patent KR-20020045893-A (KR)
Title: A method for manufacturing a semiconductor device
Inventor: AHN MYEONG GYU
IPC: H01L21/28
Filed: 2000-12-11
Abstract: PURPOSE: A method for fabricating a semiconductor device is provided to improve the characteristic and reliability of the semiconductor device, by performing a planarization while using a stacked structure of the first and second photoresist layers of low viscosity and by performing a subsequent process. CONSTITUTION: The first conductive interconnection(43) is formed on a semiconductor substrate(41), and an oxide layer(45) is formed on the first conductive interconnection. The oxide layer is etched to form a via contact hole exposing the first conductive interconnection. The first photoresist layer(47) of low viscosity is applied on the resultant structure. The second photoresist layer(49) for planarization is applied on the first photoresist layer. The second conductive interconnection mask is etched by a photolithography process to etch a predetermined thickness of the first photoresist layer and the oxide layer inside the via contact hole. The first and second photoresist layers are removed to guarantee the second metal interconnection region. The second conductive interconnection material for filling the via contact hole is deposited and planarization-etched to form the second conductive interconnection.
Patent KR-20020049352-A (KR)
Title: Method of manufacturing a semiconductor device
Inventor: HAN CHANG HUI
IPC: H01L21/324
Filed: 2000-12-19
Abstract: PURPOSE: A method for fabricating a semiconductor device is provided to delay diffusion of dopants contained in a junction region, by adding nitrogen to atmospheric gas to perform a reoxidation process or by performing a heat treatment process while using only nitrogen gas. CONSTITUTION: A gate oxide layer(3) and a gate electrode(6) are sequentially deposited on a semiconductor substrate(1) having a predetermined structure. The gate oxide layer and the gate electrode are patterned. The upper portion of the entire structure including the gate electrode is reoxidized in a gas atmosphere including nitrogen. The gate electrode is a stack structure in which polycrystalline silicon(4) and a conductive layer(5) are sequentially deposited.
Patent KR-20020051748-A (KR)
Title: A shift lever of folder type for a car
Inventor: SHIN JAE YEONG
IPC: B60K20/02
Filed: 2000-12-23
Abstract: PURPOSE: A folding shift lever of a vehicle is provided to move a driver from a driver's seat conveniently without interference with the shift lever, and to improve convenience by folding a first lever from a second lever. CONSTITUTION: A folding shift lever for a vehicle is composed of a first shift lever(11) having an assembling end(11-1) and a guide groove(11-2); a guide(20) having four guide protrusions in the upper inner periphery, and a footboard(20-2) in the lower outer periphery; a second shift lever(12) having an assembling part(12-1) connected to the assembling end, a guide groove(12-2), a coil spring(12-3) surrounding the outer periphery, and a spring stop end(12-4) restricting the coil spring; and a pin(40) connecting the assembling end to the assembling part. The shift lever is divided into two parts, and folded. The driver moves from the driver's seat conveniently without obstacles with folding the shift lever simply.
Patent KR-20020055905-A (KR)
Title: Enol form compounds of alpha-keto carboxylates derivatives and method for preparing thereof
Inventor: BAEK HEUNG SU
IPC: C07C59/42
Filed: 2000-12-29
Abstract: PURPOSE: Provided are an enol form of compound of alpha-keto carboxylic acid capable of absorbing all of UVA and UVB regions, and a method for preparing the same. CONSTITUTION: The enol form of compound of alpha-keto carboxylic acid is represented by the formula. In the formula, R1 represents an aryl group or an aryl group substituted with aromatic ring having C6-C30, and R2 represents OR or NR'R"(wherein R represents hydrogen, aryl group, alkali metal or alkali earth metal, R' and R" represent hydrogen, alkyl group or aryl group). The compound is prepared by the steps of (i) reacting aldehyde with N-acylglycine, anhydrous sodium acetate in the presence of acetic anhydride solvent to obtain a compound having a structure of 1,3-oxazoline-5-on; (ii) hydrolyzing the compound having a structure of 1,3-oxazoline-5-on obtained from the step(i) under acidic condition to obtain a compound of alpha-keto carboxylic acid; and (iii) crystallizing the compound with polar organic solvent.
Patent KR-20020058510-A (KR)
Title: Method for forming capacitor
Inventor: YANG U SEOK
IPC: H01L21/311
Filed: 2000-12-30
Abstract: PURPOSE: A fabrication method of a ferroelectric capacitor is provided to prevent an oxidation of a plug by reducing temperature of recovery annealing using multi-step recovery annealing processes. CONSTITUTION: A recessed polysilicon plug(18) is formed in a contact hole. A silicide layer(19) and a diffusion barrier(20) are sequentially formed on the recessed polysilicon plug. After depositing an adhesive layer(21) on the resultant structure, the diffusion barrier(20) is exposed by selectively etching the adhesive layer. A lower electrode(22), a ferroelectric film(23) and an upper electrode(24) are sequentially formed on the resultant structure. Then, multi-step recovery annealing processes are performed for recovering properties of ferroelectric thin film.
Patent KR-20010022623-A (KR)
Title: 세리신이 정착된 생사를 이용한 제직물 또는 편성물의 제조 방법 및 이 방법으로 제조된 제직물 또는 편성물
IPC: D06M16/00
Filed: 1997-08-07
Abstract: 본 발명은 생사의 세리신 정착법을 사용하여 트리아신 골격을 형성시키는 가교결합 반응을 수행하여 내수축성, 내크리성 및 형태 안정성을 향상시킨 후, 특수 정련으로 세리신을 제거함으로써 제직물 또는 편성물을 개질하는 단계를 포함하는 제직물 또는 편성물을 제조하는 방법을 제공한다. 
     본 발명의 제직물 또는 편성물을 제조하는 방법은 생사의 세리신 정착법으로 생사 및/또는 셀룰로오스 섬유를 가공 및 처리하는 단계; 상기 가공 및 처리된 생사 및/또는 셀룰로오스 섬유를 합연하여 합연사를 제조하는 단계; 상기 합연사를 제직 또는 편성하는 단계; 천을 형성하는 상기 제직물 또는 편성물을 욕조에 침지시켜 팽윤시키는 단계; 및 상기 팽윤된 제직물 또는 편성물을 욕조내에서 효소 정련하는 단계를 포함하고, 이 방법에 따라 제조된 제직물 또는 편성물은 내수축성, 크리스 내성 및 형태 안정성을 가진다.
Patent KR-20010022650-A (KR)
Title: 연속기재의 제조방법 및 그 장치
IPC: B29L7/00
Filed: 1998-06-04
Abstract: 본 발명은, 금속박의 처리, 금속-플라스틱복합막재료의 처리 및 폴리이미드류 등의 열가소성 수지막의 처리를 포함한 각종 분야에 있어서 사용되는 시트재료를 접속함으로써 연속기재를 제조하는 방법 및 상기 방법을 수행하는 데 사용되는 장치에 관한 것이다. 
     핫프레스, 재료로킹장치 및 축적기를 구비한 접속장치를 이용해서, 시트재료의 후미단부와 다른 시트재료의 선두단부사이에 수지결합층을 삽입하고, 이 부분을 열압착시킴으로서 연속기재를 제조하는 방법을 발견하였다.  또한, 열압착동안에, 재료로킹장치를 작동시켜 열압착에 의해 결합될 부분을 핫프레스내의 정지대로 가져가고, 또, 축적기를 작동시켜, 하류측에서의 시트재료의 공급속도를 소정값으로 조정한다.   이와 같이 해서, 완전히 접속된 시트재료를 연속적으로 가공할 수 있다.   본 발명은, 상기 방법에 있어서 시트재료를 접속함으로써 연속기재를 제조하는 방법 및 이 방법을 행하는 데 사용하는 장치를 제공한다.
Patent KR-20010023379-A (KR)
Title: 변속 기어박스를 위한 기어변속장치
IPC: F16H61/30
Filed: 1998-08-07
Abstract: 변속 기어박스, 변속 작욜기, 선택 작용기를 위한 기어 변속 장치에서, 작욕기는 하우징에 대하여 축상에서 배타적으로 변위될 수 있고 보조변속기는 회전운동을 왕복운동으로 변환하며 브레이크는 선택 작용기에 연결되고 연결가능하고 해제가능한 잠금장치는 동작에 따라 세 작용기중 둘이 서로에 관해 운동에 대해 고정되어 배치되고 보조 변속기에 의해 제 3작용기에 연결되고 선택 작용기는 회전가능하게 고정되거나 하우징에 대해 변위되지 않는 방법으로 고정된다. 
     고정된 슬롯이 형성된 가이드는 단일로 또는 변속 작용기를 위한 슬롯 형성 변화 연동 가이드와 함께 제공되고 가이드 플레이트는 브레이크 및 잠금장치로 사용된다.
Patent KR-20010034709-A (KR)
Title: 유사한 구성의 데이터 처리 유니트를 사용하는 자동차의억제 장치 제어용 장치
IPC: B60R21/01
Filed: 1999-03-18
Abstract: 본 발명은 상기 억제 시스템의 신뢰할만한 실시간 동작을 보장하며 모든 개별 동승자를 위해 가능한 한 확실한 보호를 제공하는 장치에 관한 것이다.  상기 장치는 모두 유사하게 구성되는 데이터 처리 유니트(DV)를 포함하며, 그 각각은 다수의 억제 장치(RH1,...,RHk)를 제어하며 그것에 할당된 상기 억제 장치(RH1,... ,RHk)의 트리거를 다른 데이터 처리 유니트에 독립하여 자주적으로 결정한다.
Patent KR-20010042779-A (KR)
Title: 디스크 드라이브 래치
IPC: G11B33/12
Filed: 1999-04-14
Abstract: 엔클로우져로부터 디스크 디라이브를 설치 및 제거하기 위한 래치는 한 쌍의 가이드 부재(14, 16), 디스크 드라이브 지지부(12) 및 엑츄에이터(40, 140)를 포함하고 있다.  이 엑츄에이터는 선형 방향으로 디스크 드라이브를 이동시키기 위한 가이드 부재(14, 16)상에 치형부와 맞물림하는 한 쌍의 피니언(42, 142)를 포함하고 있다.
Patent KR-20010043272-A (KR)
Title: 압전 엑추에이터
IPC: H01L41/083
Filed: 2000-02-24
Abstract: 본 발명은 압전 재료로 이루어지고 적층 배열되는 층과 상기 층 사이에 위치하면서 금속성 또는 전기 전도성을 가지고 교대로 배열되며 전극으로서 이용되는 제 1, 제 2 전극층(10, 11)으로 형성된 다층의 박층물의 형태인 원통형 압전 엑추에이터 몸체(1)를 가지며 상기 제 1, 제 2 전극층이 상기 제 1, 제 2 도전성 공동의 전극 단자(12, 13)를 통해 교대로 접촉하는, 특히 자동차의 내연 기관에서 분사 밸브의 제어 또는 가동을 위한 압전 엑추에이터에 관한 것이다.  상기 엑추에이터 몸체(1)는 내부 종방향 홀(2)을 가지며 상기 엑추에이터 몸체(1)의 내부 종방향 홀(2)에 형성된 내부벽(3)에 적어도 제 1 공동의 전극 단자(12)가 제공되고, 상기 단자는 내부벽에서 각각의 제 1 전극층(10)과 접촉된다.  선택적으로, 상기 엑추에이터 몸체(1)는 내부 종방향 홀을 포함하지 않으며, 상기 제 1, 제 2 전극층(10, 11)은 상기 엑추에이터 몸체(1)의 원통형 외부벽(4)에 서로 마주보는 각 지점에 노출되고 외부벽에서 상기 층 각각은 상기 제 1, 제 2 전극 단자(12, 13)와 접촉된다.
Patent KR-20010043509-A (KR)
Title: ｐ38의 헤테로시클릭 억제제
IPC: C07D213/73
Filed: 1999-05-11
Abstract: 본 발명은 세포 증식, 세포 소멸 및 세포 외 자극에 대한 반응과 관련된 포유동물의 단백질 키나아제인 p38의 억제제에 관한 것이다. 또한, 본 발명은 상기 조성물을 각종 질환의 치료 및 예방에 사용하는 방법에 관한 것이다.
Patent KR-20010072594-A (KR)
IPC: A61M5/14
Filed: 1999-06-08
Abstract: A PCA device includes a fluid conduit having an upstream portion and a downstream portion, a first flow-restricting orifice in the upstream portion, a second flow-restricting orifice in the downstream portion, a pressure-responsive check valve in the downstream portion in parallel with the second flow-restricting orifice, and a bolus dose delivery mechanism including a chamber in fluid communication between the upstream portion and the downstream portion. Continuous flow is provided through the first flow-restricting orifice, the chamber, and the second flow-restrictive orifice, the continuous flow serving to fill the chamber at a controlled rate through the first flow-restrictive orifice. The bolus dose delivery mechanism is manually actuable to express the contents of the chamber through the check valve to supplement the continuous flow through the downstream portion. The bolus dose delivery mechanism includes a resilient diaphragm that forms a sealed closure for the chamber. The diaphragm is movable from a decompressed position to a compressed position by a plunger that directly engages the diaphragm, and it is restored to the decompressed position by the flow of fluid into the chamber.
Patent KR-20010052836-A (KR)
Title: 성장호르몬 분비 억제인자 수용체중 하나가 관련된병리학적 상태 또는 질병을 치료하기 위한 약제 제조용디아제핀의 용도
IPC: A61P17/06
Filed: 1999-06-15
Abstract: 본 발명은 성장호르몬 분비 억제인자 수용체중 하나가 관련된 병리학적 상태 또는 질병 치료용 약제를 제조하기 위한 피리도-티에노-트리아졸로-디아제핀의 용도에 관한 것이다.  본 발명은 또한 신규한 피리도-티에노-트리아졸로-디아제핀 및 이를 함유하는 치료적 조성물에 관한 것이다.
Patent KR-20020057319-A (KR)
Inventor: JUNG GYU HWANG
IPC: G02F1/1345
Filed: 2001-01-04
Abstract: PURPOSE: A flat panel display is provided to improve reliability of products while minimizing emission of electromagnetic waves. CONSTITUTION: A flat panel display includes a liquid crystal display module(17) for displaying images, a chassis(19) surrounding the liquid crystal display module, and a circuit board(25) that has a connector(27) connected to an external system through a connection cable(51) and is grounded to one side of the chassis. The flat panel display further includes a liquid crystal display controller(29) arranged at one side of the circuit board to drive the liquid crystal display module, a ground region(35) formed around the liquid crystal display controller, and a reinforcement connector(41) connected to the ground region to reinforce the grounding of the circuit board.
Patent KR-20010076242-A (KR)
Title: Bus control system for integrated circuit device with improved bus access efficiency
Inventor: HIROSE YOSHIO
IPC: G06F13/28
Filed: 2001-01-10
Abstract: PURPOSE: To enable the operation of a bus in a high speed frequency. CONSTITUTION: An issue side LSI has a counter, to which a value showing how many commands can be simultaneously processed by a receiving side LSI or how many pieces of data can be simultaneously received is loaded at the time of initialization and when issuing a command or data, the counter is decremented. When a ready signal is received, the counter is incremented and when the counter is turned to '0', the issue of the command or data is suppressed. Therefore, the issue side LSI can issue the command or data to the receiving side LSI without confirming a busy signal from the receiving side LSI. Since the command or data issue side LSI can manage the state of the command buffer or data buffer of the receiving side LSI, even when the bus is operated at high speed, the command or data can be efficiently issued.
Patent KR-20020040523-A (KR)
Title: A method for enlargement real income of MoO3 in steel making process
Inventor: KIM YONG HWAN
IPC: C21B5/02
Filed: 2001-01-16
Abstract: PURPOSE: A method is provided which increases an actual yield of molybdenum in molten steel through prevention of evaporation loss of the molybdenum trioxide(MoO3) using a material containing CaO or MgO as a means for restraining evaporation of molybdenum trioxide(MoO3). CONSTITUTION: The method for increasing an actual yield of molybdenum trioxide(MoO3) during steelmaking operation is characterized in that an actual yield of the molybdenum trioxide(MoO3) is increased by mixing calcium oxide(CaO) or magnesium oxide(MgO) with the molybdenum trioxide(MoO3) so as to form CaMoO4 or MgMoO4, thereby restraining evaporation of the molybdenum trioxide(MoO3), wherein weight ratios of the calcium oxide or magnesium oxide and the molybdenum trioxide(MoO3) are CaO/MgO3>0.38, and MgO/MoO3>0.28 respectively when they are mixed. The method comprises the process of injecting the compression molded material between a second melting furnace and a temperature increasing machine after compression molding CaO-SiO2 based flux containing the calcium oxide or magnesium oxide, CaO-Al2O3 based flux, waste slag containing CaO or MgO, steelmaking dust containing CaO or MgO, dolomite(CaO-MgO) powder and the molybdenum trioxide(MoO3).
Patent KR-20020061378-A (KR)
Title: Underwater optical communication apparatus
Inventor: AHN HYEONG SU
IPC: H04B10/00
Filed: 2001-01-16
Abstract: PURPOSE: An under water optical communication apparatus is provided to allow divers to mutually transmit their intentions under the water by displaying various contents using a display unit and using an optical signal as a transmission/reception signal. CONSTITUTION: A light receiving unit(40) receives an optical signal from an external source. An input unit(10) inputs a content to be transmitted. A controller(50) encodes the content inputted to the input unit and transmits a transmission data, and decodes the optical signal received by the light receiving unit(40) and outputs a reception data. A light transmitting unit(20) transmits an optical signal according to the transmission data. A display unit(30) displays the transmission data or the reception data.
Patent KR-20010113454-A (KR)
IPC: E04D3/366
Filed: 2001-01-19
Abstract: 본 발명은 세로 지붕이음형 금속지붕판간의 연결구조에 관한 것으로 빗물이 지붕판 상호간의 연결부로부터 건물의 지붕벽 내로 새는 것을 방지하고, 강풍이 야기하는 부압에 의해 지붕판이 건물의 지붕벽으로부터 잡아당겨져서 벗겨지는 것을 방지하며, 계류편의 횡방향 고정피치의 예비 줄표시 작업을 생략하기 위해, 
     캡(3)의 좌우 각 측판(10)의 각 물막이 오목부(11)로부터 각 스커트(12)를 횡방향 외측 하방위치까지 연장시켜, 스커트(12)의 하단테두리(13)를 지붕판(1)에 접촉시키고, 상기 스커트(12)와 지붕판(1)과 기립 연결테두리(4)로 둘러싸인 내부에 넓은 완충공간(14)을 형성하며, 지붕판(1)의 기립 연결테두리(4)에 있어서, 상기 기립 기초부(15)에 대해서 그 기립 중도부(16) 및 기립 상부(17)가 계류편(2)쪽으로 진출하지 않은 형태로 형성한 것을 특징으로 한다.
Patent KR-20020063065-A (KR)
Title: Car subsidiary side-mirror including aroma diffusion device
Inventor: LEE SEUNG YEOP
IPC: B60R1/04
Filed: 2001-01-26
Abstract: PURPOSE: An auxiliary side mirror including an apparatus for generating an aroma is provided to obtain an air cleaning effect and an aromatherapy effect by constituting the auxiliary side mirror in order to generate an aroma of a perfume or essential oil. CONSTITUTION: An auxiliary side mirror having an aroma generation apparatus comprises a case(7) for storing a perfume therein, a convex mirror(10) provided at a front side of the case, and a base(6) for supporting the case. The case(7) is a barrel for storing the perfume and a pumping device, and serves as the auxiliary side mirror by attaching a convex mirror at the front side thereof. The case is fixed at a desired position of user through the base. A button(15) is provided at an outside of the case, the button is connected to the pumping unit of the case, and a nozzle(15a) for projecting the perfume of a fine hole is provided at an outside thereof.
Patent KR-20020063406-A (KR)
Title: Dust Cleaning Apparatus for Embroidery Machine
Inventor: YOON JAE DU
IPC: D05C13/00
Filed: 2001-01-29
Abstract: PURPOSE: A dust collector of an embroidering machine is provided which is characterized by removing fine dust by using a multi-head, preventing a falling-off in durability of the machine and maintaining a working condition cleanly. CONSTITUTION: On the embroidering machine containing plural heads(12) in a main body(10), the dust collector is comprised of: a main duct(20) installed on the main body(10) and connected with many branch pipes(21) having each suction head(22); an auxiliary duct(30) installed on the main body(10) and connected with a puckered pipe(31) having each suction head(32); an exhaust duct(41) which is installed with a pump(42), sucking through the main duct(20) and the auxiliary duct(30); a valve(40) connecting the main duct(20) and the auxiliary duct(30) with the exhaust duct(41) selectively; and an operating panel(50) controlling working of the pump(42).
Patent KR-20010082034-A (KR)
Title: Apparatus for continuation oxtdation operation
Inventor: ALREKSANDEURABEURIKOPEU
IPC: B01J8/18
Filed: 2001-01-31
Abstract: PURPOSE: An apparatus for carrying out continuous oxidation work is provided to employ the apparatus in various applications to produce high purity and amorphous silicone dioxide and to thermally process organic and/or inorganic powdery materials. CONSTITUTION: The apparatus comprises a main body(100); a combustion chamber(200) in the body; an intermediate porous plate(220) jointed into a center part of the chamber; connection pipes(301) to supply and discharge raw material; gas providing line(311) and gas exhausting line; gas control devices(320)(330) working in cooperation with a mobile working gas stream; a blowing passage of oxidation gas; and multiple plates(230) arranged in order at top and bottom sides of the combustion space portion(201). The apparatus has also a cooling device(350); a receiving tank(360); a discharging pipe(340) and an air exhausting pipe(370) at one end of the combustion chamber and an electrical heating device(400) and a heater installed on the internal side of the chamber.
Patent KR-20020066122-A (KR)
Title: gold yarn produce a method and gold yarn structure
Inventor: LEE JUNG PYO
IPC: D02G3/22
Filed: 2001-02-09
Abstract: PURPOSE: A golden yarn having high strength, not being slippery, not being broken, not discoloring and having beautiful appearance, and a manufacturing method thereof having a simple work process and reducing production cost are provided. CONSTITUTION: The tubular golden yarn(30) is obtained by a process containing the steps of: coating an upper side of thick polyethylene(PE) film(10) having golden electrodeposition coating layer with resin adhesive; doubling thin polyethylene(PE) film(20) and the thick polyethylene film(10); and then heating at 150-400deg.C to be rolled up to a thin part. Thickness ratio of the thick polyethylene film and the thin polyethylene film is about 2:1-1.1:0.9.
Patent KR-20010044430-A (KR)
Inventor: JUNG BYUNG HEE
IPC: H04M1/21
Filed: 2001-02-20
Abstract: PURPOSE: A wire telephone is provided to enable data communication with other data communication devices such as mobile phones. CONSTITUTION: A wire telephone is connected to a PSTN network, is provided with a voice call module for enabling a voice call, is provided with a modem, and is capable of data communication with other wire telephones, computers or mobile phones via the PSTN network. The wire telephone is provided with an input unit for inputting characters, numbers and symbols, memory and display device for thereby storing and displaying data inputted by a user or data received through the modem. The memory has a communication emulator mounted and is capable of data communication with other computers or telephones by using the communication emulator.
Patent KR-20020068606-A (KR)
Title: Wafer surface inspection system and inspection method using this system
Inventor: YOON GI DEOK
IPC: H01L21/66
Filed: 2001-02-21
Abstract: PURPOSE: An apparatus for testing a surface of a wafer and a testing method using the same are provided to detect an error of the surface of the wafer without loss in a fabrication process. CONSTITUTION: A wafer surface test system checks a surface of a wafer by using a cooling period of a wafer in a cool down chamber. A digital camera and a lighting apparatus are loaded on an upper end portion of the cool down chamber. The digital camera is used for scanning a surface of wafer loaded on a cooling plate of the cool down chamber(S10). Data of the scanned images are transmitted to a microcomputer through an interface. The micro computer analyzes the scanned images of the surface of the wafer by comparing the scanned images with reference data(S20). The data compared and analyzed from the microcomputer are displayed on an equipment monitor(S30).
Patent KR-20020068675-A (KR)
Title: transfer apparatus in a semiconductor fabricating
Inventor: SEO GWANG WON
IPC: H01L21/68
Filed: 2001-02-22
Abstract: PURPOSE: A transfer apparatus used for a semiconductor fabrication process is provided to minimize an area of a vacuum leakage part by using a simple connection structure. CONSTITUTION: A transfer apparatus includes a robot arm(20) and a fan(22). The fan(22) is contacted with a back side of a substrate when the transfer apparatus transfers a substrate. The back side of the substrate is seized by using a vacuum absorption method. The robot arm(20) is used for providing a drive force to the fan(22). The transfer apparatus including the robot arm(20) and the fan are used for transferring the substrate in a substrate transfer process of an etch apparatus and an ashing apparatus. The fan(22) is directly connected with the robot arm(20). The fan(22) has a vacuum line(26).
Patent KR-20020071089-A (KR)
Inventor: CHA SUNG JUN
IPC: C04B28/02
Filed: 2001-03-02
Abstract: PURPOSE: Provided is a manufacturing method of floor finishing materials and tennis court which are excellent in far infrared emission, thermal conductivity, deodorization and humidity by mixing natural inorganic materials with low alkaline solidifying agent. CONSTITUTION: The floor finishing materials and tennis court are manufactured by the following steps of: (i) mixing 0-80%(based on the weight of solidifier) of natural materials such as quartz porphyry, germanium oxides, jade or clay with low alkaline solidifying agent; (ii) preparing fluidifying agent-added water by adding 0.3-2%(based on the weight of solidifier) of fluidifier of melamine sulfonic aldehyde or naphthalene sulfonic aldehyde to 30-70%(based on the weight of solidifier) of water; (iii) mixing mixture from step (i) with water from step (ii), and forming in the form or constructing within 3-60min; and (iv) drying for 2-48hrs.