baber/WOPTO huggingface dataset:
Patent KR-20030058600-A (KR)
Title: Method for manufacturing a transistor
Inventor: PARK SEONG HYEONG
IPC: H01L21/336
Filed: 2001-12-31
Abstract: PURPOSE: A method for fabricating a transistor is provided to prevent a leakage current by performing a selective etch process of a non-salicide thin film after an epitaxial layer is formed on a gate electrode and a semiconductor substrate in an active region such that the epitaxial layer has a thickness etched in the selective etch process of the non-salicide thin film. CONSTITUTION: By interposing a gate insulation layer, a gate electrode(47) having insulation layer spacers at both sides is formed on a semiconductor substrate(41) in which a salicide formation region and a non-salicide formation region are defined. A source/drain impurity region of a lightly-doped-drain(LDD) structure is formed in the surface of the semiconductor substrate at both sides of the gate electrode. The epitaxial layer(56) is grown on the gate electrode and the exposed semiconductor substrate. An insulation layer is formed on the resultant structure. The insulation layer in the salicide formation region is etched while the epitaxial layer in the salicide formation region is etched. A salicide layer(59) is formed on the gate electrode in the salicide formation region and on the source/drain impurity region.
Patent KR-20020003349-A (KR)
IPC: A61P35/00
Filed: 1999-07-13
Abstract: 본 발명은 치료적으로 유효한 양의 플라보노이드, 특히 구조식(I)의 화합물들중에서 선택되는 화합물을 포함하는, 종양내 클론원성(clonogenic) 세포들의 증식에 대한 활성을 갖는 조성물에 관한 것으로, 구조식 (I)에서 R 1 , R 2 , R 3 와 R 4 , R 5 및 R 6 는 청구항 2에 정의된 바와 같다. 상기 조성물은 종양의 세포독성물질 처리에 사용되는 것을 목적으로 한다.
Patent KR-20010079526-A (KR)
IPC: A61K48/00
Filed: 1999-07-13
Abstract: 폴리[α-(4-아미노부틸)-L-글리콜산](PAGA)은 유전자를 세포에 전달하는데 적합한 생분해성 조성물로 공개한다.  또한, PAGA를 만들고 이용하는 방법을 또한 공개한다.
Patent KR-20010073000-A (KR)
IPC: C07D213/52
Filed: 1999-08-25
Abstract: Arylpiperazines of formula (I) useful as metalloproteinase inhibitors, especially as inhibitors of MMP 13
Patent KR-20010074998-A (KR)
Title: 밀링용 공구 및 커팅 인써트
IPC: B23C5/10
Filed: 1999-09-02
Abstract: 본 발명은 밀링용 공구 및 커팅 인써트에 관한 것이다. 커팅 인써트는 밀링 머신에서 회전하도록 밀링 몸체에 장착된다. 밀링 몸체는 평행육면체형 커팅 인써트를 수납하기 위한 적어도 하나의 포켓을 포함한다. 커팅 인써트는 2 개의 주측면(11)과 이들과 결합된 부측면(14) 및 상·하부면(15, 16)을 포함하고, 상부면(15)의 전이부 및 커팅 인써트의 주측면과 부측면에 형성되는 적어도 한 쌍의 절삭날(17, 19; 18, 20)을 포함한다. 상부면은 칩 면을 구성하고, 주측면과 부측면은 클리어런스면을 구성한다. 각 쌍의 절삭날은 절삭 모서리 부분에서 교차하는 주측면의 주절삭날(17, 18)과 부측면의 부절삭날(19, 20)로 구성된다. 상기 모서리는 부측면의 주요 부분의 가상의 연장선 안쪽에 제공된다. 부절삭날은 피삭재의 표면을 생성하는데 제공된다. 주절삭날은 하부면(16)과 예각을 형성하도록 경사져 있다. 각 쌍의 절삭날(17, 19; 18, 20)은 부측면과 주측면(11)의 주요 부분을 포함하는 평면에 대해 돌출되어 있는 제 1 클리어런스면(22A, 22B)에 하부면쪽 방향으로 연결된다. 오목부(30)는 주측면(11)으로 제공된 표면(24)에 형성된다.
Patent KR-20010079838-A (KR)
IPC: G06F19/00
Filed: 1999-09-10
Abstract: 제품 개발 설계를 위해 컴퓨터로 구현된 시스템(10)이다.  이 시스템(10)은 상사 기업(business enterprise)의 제안된 제품과 태스크 및 제품 개발에 사용될 자원을 모델링한다.  생성 알고리즘(13)과 제약조건 엔진(14)으로 구성되는 최적화 엔진은 후보 제품의 포트폴리오들과 스케줄들을 구성하도록 모델에 대해 실행된다.  각 스케줄은 평가되고 생성 프로세스에 따른 "향상된(improved_" 후보 포트폴리오(candidate portfolio)를 생성하기 위해 사용된다.  이 프로세스는 이익 최대화와 같은 목표 기준(objective criterion)에 대해 측정됨으로써 제품의 우선순위 부여 (prioritization) 및 파이프라인 스케줄(pipeline schedule)을 개선하기 위해 계속된다.
Patent KR-20010080994-A (KR)
IPC: H01L21/302
Filed: 1999-11-11
Abstract: 본 발명은 염소 함유 가스와 탄화수소 함유 가스를 포함하는 공급 가스로부터 생성된 플라즈마를 사용하여 알루미늄 또는 알루미늄 합금의 기본적으로 잔류물 없는 이방성 에칭을 위한 방법이다.  에칭은 플라즈마 생성원과 기판 바이어스 수단의 분리된 전력 제어를 제공하는 처리 장치 내에서 발생한다.  에칭은 고밀도 플라즈마(10 11 e - /㎤ 이상)와 낮은 기판 바이어스(약 200V 이하)를 사용하여 수행된다.  본 발명에 따른 방법은 마스크 층의 수명을 연장하면서, 수용할 수 있는 에칭 속도와 양호한 에칭 프로파일을 제공한다.  본 발명에 따른 방법은 높은 합금 함유량(즉, 0.5% 이상)을 갖는 알루미늄 합금의 에칭에 특히 유용하다.  본 발명에 따른 방법은 또한 큰 개방 영역(즉, 개방 영역은 웨이퍼 표면적의 65% 이상을 포함)을 갖는 기판 상에 증착된 알루미늄 또는 알루미늄 합금 층의 기본적으로 잔류물 없는 에칭에 특히 유용하다.
Patent KR-20020018998-A (KR)
IPC: H01M50/133
Filed: 2000-12-01
Abstract: 본 발명은 종래의 합금보다 얇게 형성되는 기계적 작업성이 우수한 마그네슘계 합금을 사용한다.  본 발명은 금속재킷에 조절된 전극 어셈블리와 비수용성 전해질을 포함하여 구성되며, 금속재킷은 리튬 7 내지 20 중량%을 함유하는 마그네슘계 합금으로 이루어지고, 금속재킷의 부식을 방지하는 금속층이나 절연층이 그 내부벽에 금속재킷으로 완전히 형성되는 것을 특징으로 하는 리튬2차전지를 제공한다.
Patent KR-20020007324-A (KR)
IPC: G06F3/12
Filed: 2001-01-12
Abstract: 본 발명은 네트워크 상의 상세 정보를 손쉽게 입수하는 데에 적합한 데이터 출력 제어 장치 및 휴대 단말을 제공하는 것을 목적으로 한다. 
     데이터 출력 제어 단말(300)은 이용자가 소지하는 휴대 단말(100)과, 각지에 점재하여 설치된 인쇄 장치(PR 1 ∼PR n )와, WWW 서버(DS 1 ∼DS m )에 인터넷(400)을 통해서 통신가능하게 접속하고, 휴대 단말(100)에서 생성한 휴대 단말 위치 데이터를 포함하는 데이터 인쇄 요구를 휴대 단말(100)로부터 받아서, 그 데이터 인쇄 요구에 포함되는 휴대 단말 위치 데이터를 기초로 기억장치(62)의 인쇄 장치 위치 데이터를 검색하고, 휴대 단말(100)의 위치를 기준으로 하여 거리적 또는 시간적으로 가장 가깝게 있다고 생각되는 인쇄 장치(PR)를 선택하여, 데이터 인쇄 요구에 관한 데이터를 그 선택한 인쇄 장치(PR)에 출력하도록 되어 있다.
Patent KR-20020006527-A (KR)
IPC: H04W64/00
Filed: 1999-09-03
Abstract: The present inventation provides a base station comprising: 
a plurality of antennas, each of the antennas separated by a known distance; 
means for transmitting a first spread spectrum signal having a first code; 
means for receiving, using the plurality of antennas, a second spread spectrum signal having a second code, the second spread spectrum signal time synchronized with the first spread spectrum signal; 
means for making a distance determination based on in part a timing difference between the second code of the received second spread spectrum signal and the first code of the base station's transmitted first spread spectrum signal; 
means for comparing a phase difference of a carrier signal of the second spread spectrum signal as received by each of the plurality of antennas; and 
means for determining an angle of the received second spread spectrum signal using the known distance between the antennas and the phase difference; and 
means for determining a location of a source of the second spread spectrum signal using the determined angle and the distance determination.
Patent KR-20010111581-A (KR)
IPC: C07D307/58
Filed: 2000-03-16
Abstract: 본 발명은 α-메틸렌락톤, 특히 α-메틸렌-γ-부티로락톤을 제조하기 위하여 락톤의 α탄소 원자에 포름알데히드를 부가하는 방법에 관한 것이다.
Patent KR-20020027304-A (KR)
Title: Process for preparing polyphenylene ether thermoplastic resin compositions and articles made therefrom
IPC: C08J3/20
Filed: 2000-03-17
Abstract: The invention relates to a process for the manufacture of a thermoplastic composition comprising a polyphenylene ether resin and optionally, a styrenic resin wherein the processes comprises a polyphenylene ether resin in a particulate form having less than about 5% by weight, preferably less than about 2% by weight, more preferably less than about 1% by weight, and most preferably essentially no particles less than about 75 microns in size. The particulate form allows for ease of handling of polyphenylene ether resin with a substantially reduced risk of dust ignition while obtaining substantially the same physical properties as obtained with polyphenylene ether resin powder.  The invention also relates to articles formed out of the compositions made by the process of the invention.
Patent KR-20020003242-A (KR)
IPC: A44B18/00
Filed: 1999-08-23
Abstract: 본 발명의 경화 가능한 기계적인 체결구는 경화 가능한 재료를 함유한 체결면을 포함하며, 이 체결면은 상호 보완적인 체결면에 반복적으로 부착되고 해제될 수 있으며, 상호 보완적인 체결면에 부착되어 경화될 때, 경화 가능한 기계적인 체결구는 상호 보완적인 체결면에 영구적으로 부착될 수 있다.  경화 가능한 기계적인 체결구는 상호 보완적인 체결면을 더 포함할 수도 있다.
Patent KR-20020025872-A (KR)
IPC: B28B3/22
Filed: 2000-05-19
Abstract: 본 발명은 세라믹 분말 성분을 주성분으로서, 용매가 없는 적어도 하나의 유기 성분을 부성분으로서 포함하는 세라믹 그린 바디, 즉 세라믹 그린 시트를 제조하기 위한 방법에 관한 것이다.  상기 세라믹 분말 성분은 유기 성분과 함께 우선 용매가 없는 고점성의 출발 물질로 처리된다.  그 후 상기 출발 물질은 압출기에 의해 그린 바디 또는 그린 시트로 형성된다.
Patent KR-20020036956-A (KR)
Title: Spin-on-glass anti-reflective coatings for photolithography
IPC: C08K5/00
Filed: 2000-06-08
Abstract: Anti-reflective coating materials for deep ultraviolet photolithography include one or more organic dyes incorporated into spin-on-glass materials. Suitable dyes are strongly absorbing over wavelength ranges around wavelengths such as 248 nm and 193 nm that may be used in photolithography. A method of making dyed spin-on-glass materials includes combining one or more organic dyes with alkoxysilane reactants during synthesis of the spin-on-glass materials.
Patent KR-20020033104-A (KR)
IPC: F25D23/00
Filed: 2000-06-26
Abstract: 공조 또는 냉동 공정 및 시스템의 선택된 상태를 실시간 감시하기 위한 바이오센서(10)가 제공된다.  바이오센서(10)는 감시될 환경 제어 공정의 선택된 상태를 나타내는 하나 이상의 검체를 검출하도록 작동하는 생체시약(22)을 보유한 생체성분 요소(20)를 포함한다.
Patent KR-20030060316-A (KR)
Inventor: KIM SAENG WOON
IPC: E04H15/44
Filed: 2002-01-08
Abstract: PURPOSE: A temporary house structure is provided to simplify the assembly of frames and connecting blocks, therefore to cut down on the cost and the time of fabrication time and increase structural stability. CONSTITUTION: The temporary house structure contains: numbers of access holes that the end of a horizontal frame(20) is inserted into; a cylindrical hinge shaft(33b) crossing the access holes; a connecting block containing a main body(32) made by synthetic resin, which unifies all components; a horizontal frame(20) made of a hollow rectangular pipe with a hinge hole(h) corresponding to the diameter of a hinge shaft; a vertical frame forming the column of the temporary house. Therefore the hinge hole of the horizontal frame is inserted into the cylinder-shaped hinge shaft.
Patent KR-20030061987-A (KR)
Title: Bankbook Smart System
Inventor: KIM DONG CHEUL
Filed: 2002-01-14
Abstract: PURPOSE: A system for issuing a standardized financial account is provided to easily issue an offline bankbook by linking a web server with a computerization system of a financial organization. CONSTITUTION: After a request on the web, a required item on a local system is given. After a user satisfying the required item on the web uses a deposit part of the bankbook not held by the user, the user draws out the money through a procedure for confirming a real name and the identification when the user wants to draw out the money.
Patent KR-20030065626-A (KR)
Title: Tube connecter for tube of needle set used in insulin pump
Inventor: CHOI SU BONG
IPC: A61M39/00
Filed: 2002-01-30
Abstract: PURPOSE: Provided is a conduit middle connection device for insulin automatic syringe which is separated and combined by moving the conduit for supplying the injection solution of insulin automatic syringe only in the longitudinal direction. The conduit middle connection device is easy in separation and combination and is used safely without a helper. CONSTITUTION: The conduit middle connection device for insulin automatic syringe comprises a male connecting part(60) and a female connecting part(70). The male connecting part is in communication with the conduit(1-1,1-2) connected to a needle element, and has a setting protuberance receiving a septum(61) bonded by injection to a connecting injection needle of the female connecting part. The female connecting part has a groove(72) receiving the setting protuberance, and a connecting injection needle. On the both sides of the setting protuberance, a hook lever(64) is installed with a hook protuberance(63) for horizontal separation and combination. A groove(73) receiving a push bar is formed in the female connecting part. In the groove receiving the push bar, the push bar is located to provide the elastic force so that the hook is released by pushing the hook protuberance horizontally.
Patent KR-20020069136-A (KR)
Inventor: HOHENWARTER HARALD
IPC: G02F1/133
Filed: 2002-02-21
Abstract: PURPOSE: An arrangement for driving display units with an adaptive start sequence is provided which has a low power consumption and occupies a small space in the circuit. CONSTITUTION: A circuit arrangement(15) for generating at least one voltage value(Vmult), which circuit arrangement includes a subvoltage generating unit(40) and a voltage multiplier(20), it being arranged to switch the voltage multiplier to a direct mode in order to control the voltage multiplier during a start time (ts). A circuit arrangement is characterized in that it is arranged to supply the voltage multiplier with an activation signal(32) formed from a subvoltage(Vdac) generated by the subvoltage generating unit and from a reference signal(Vref), and that it is arranged to supply the voltage multiplier with an initial start signal(36) formed from the activation signal(32) during the start time (ts). A circuit arrangement is characterized in that there is provided a start control unit for controlling the voltage multiplier, which start control unit includes at least one comparator(31) and a logic unit (35), the comparator being arranged to compare a subvoltage(Vdac) generated by the subvoltage generating unit and a reference voltage (Vref), and to generate the activation signal(32), the logic unit(35) generating an initial start signal(36) so as to switch the voltage multiplier to a direct mode.
Patent KR-20030070701-A (KR)
Title: Method for fabricating semiconductor device having storage node contact plugs
Inventor: PARK BYEONG JUN
IPC: H01L21/768
Filed: 2002-02-26
Abstract: PURPOSE: A method for fabricating a semiconductor device with a storage node contact plug is provided to prevent a short-circuit between the storage node contact plug and a bitline and prevent contact sheet resistance of the storage node contact plug from increasing by filling a conductive material in storage node contact holes whose lower width extends more than upper width. CONSTITUTION: Bitlines are formed on a semiconductor substrate(90) including cell pads(115a,115b) isolated from each other by an insulation layer. A bitline passivation layer(130) is formed on the substrate, having such a thickness not to fill the gap between the bitlines. The first interlayer dielectric(140) whose upper surface is flat is formed on the substrate, filling the gap between the bitlines and having a thickness not lower than those of the bitlines. The second interlayer dielectric(150) is formed on the first interlayer dielectric, etched more slowly by wet etchant. The second and first interlayer dielectrics between the bitlines are dry-etched to form narrow storage node contact holes exposing each cell pad. The second and first interlayer dielectrics are wet-etched to extend the width of the storage node contact holes wherein the lower width of the storage node contact holes more extends than the upper width. An insulation layer spacer is formed on the inner wall of the storage node contact hole with extended width. The conductive material is filled in the storage node contact hole to form separated storage node contact plugs.
Patent KR-20030071216-A (KR)
Title: Printing paper for preventing of forgery and the manufacturing method of it
Inventor: HWANG HYE JA
IPC: B42D25/40
Filed: 2002-02-28
Abstract: PURPOSE: A printing paper with anti-forging performance and a process for producing thereof are provided to eliminate forgery accidents of official documents by applying a simple idea to printing paper for documents such as license, certificate of residence, etc. CONSTITUTION: The printing paper is prepared by printing letters, signs, and figures on general printing paper(1) with specified printing ink extracted from benzoxazinone reacting to UV light to form part or entire of patterns(2) to prevent forgery. Such printed patterns express fluorescent white color(3) along outline of the patterns according to angles of light(4) at naked eye. The prepared paper is written by general prinking inks same as other common papers and shows specific colors identified depending on the angles of light to inhibit forgery accidents.
Patent KR-20030073457-A (KR)
Title: Evolutionary problem-presenting system by which study-achievement is effectively and objectively evaluated and the method for the same
Inventor: KIM YON BO
Filed: 2002-03-11
Abstract: PURPOSE: A system for giving an effective progressive question for measuring a learning achievement degree objectively and a method thereof are provided to evaluate a learning achievement degree of a learner effectively and secure objectivity of an evaluation by automatically evolving a difficulty degree assignment of a set question according as time is passed. CONSTITUTION: In the case that the applicant has an examination actually, it is checked whether the level of the applicant is relatively possessed at a position in a large group(S201). An additional score acquired by answering a question having a classified difficulty degree in detail with respect to many questions is checked(S202). The final score is checked by adding a score corresponded to the basic level to the additional score(S203). A difficulty degree of a question is readjusted according to a correct answering rate of applicants with respect to the set questions. An additional question is set. An initial difficulty degree of the additional question is set according to correct answering rates(S204).
Patent KR-20020072800-A (KR)
Inventor: KURODA KAZUO
IPC: G06F21/10
Filed: 2002-03-11
Abstract: PURPOSE: To provide a duplicate managing method, etc., for dissolving problems accompanying delay in detection of control information. CONSTITUTION: The duplicate managing method is for managing duplicate by embedding a digital watermark to indicate the control information regarding the duplicate in the contents consisting of digital information. A table including changed positions of the control information to the contents within a prescribed range and the contents of the control information to be changed at the respective changed positions is distributed with the contents.
Patent KR-20030074948-A (KR)
Title: the prevention structure of explosive for Gas can
Inventor: LEE WON MYUNG
IPC: F17C13/12
Filed: 2002-03-14
Abstract: PURPOSE:An explosion preventing structure of a gas container is provided to prevent the explosion by discharging internal pressure outside through a through hole of the container and by separating a stem from the gas container. CONSTITUTION:A lower member is located inside a gas container by locating under a gasket insertion member. The diameter of the lower member is smaller than a through hole of the gas container. An inclined hanging sill is integrated with the lower side of the gasket insertion member. The inclination hanging sill increase the separating ability from a stem gasket(3) under the certain pressure condition inside the gas container. Many incision portions for discharging gas are penetrated through the stem gasket. The incision portions function as passages to discharge pressure under the certain pressure condition of the gas container. Thereby, the inner pressure is discharged before an explosion.
Patent KR-20020081551-A (KR)
Inventor: CHOI BYEONG RYONG
IPC: B82Y20/00
Filed: 2002-03-23
Abstract: PURPOSE: A light emitting device and a method for manufacturing the same are provided to improve luminous efficiency and light intensity by forming a shallow doping region having quantum confinement effect at p-n junction. CONSTITUTION: The light emitting device comprises a first and a second substrate(11,21), a first and a second doping region(15,25) formed at both surfaces of the substrates, a reflective film(30) formed on the second doping region(25), and electrodes(17,27). The light emitting device further includes control layers(13,23) for controlling the depth of the first and second doping regions(15,25) so as to have an ultra-shallow depth. Thereby, light emitting due to the quantum confinement effect is generated at p-n junction parts(14,24) between the substrates(11,21) and the doping regions(15,25).
Patent KR-20020077827-A (KR)
Inventor: MIYACHI MAMORU
IPC: H01S5/323
Filed: 2002-04-02
Abstract: PURPOSE: To provide a III-nitride semiconductor laser element and the manufacturing method therefor, where it has superior light-emitting characteristic and it is manufactured without processes requiring a high assembling accuracy. CONSTITUTION: In the semiconductor laser element where a III-nitride multilayered product and the substrate made of an easily cleavable material are bonded to each other, the substrate has a cutting portion for positioning the outgoing end portion of the laser beam of the multilayer product in the periphery of the cutting portion of the substrate.
Patent KR-20030080440-A (KR)
Title: An edible coloring-agent extracted from Opuntia ficus-indica
Inventor: KANG JONG OK
IPC: A23L5/40
Filed: 2002-04-08
Abstract: PURPOSE: Provided is a coloring agent for foods which replaces, in part, nitric or nitrous acid salt generating nitrosamine and carcinogen. The coloring agent is extracted from Opuntia ficus-indica and its main ingredient is betalein. Betacyanin in betalein shows red color and prevents transformation or onset of liver cancer. CONSTITUTION: A method for extracting a coloring agent from Opuntia ficus-indica comprises the steps of: extracting fruits of Opuntia ficus-indica with 30-70% ethanol and 0.1wt.%-1wt,% of citric acid; and concentrating, freezing or powdering the extract.
Patent KR-20020062232-A (KR)
Inventor: HWANG IL SANG
IPC: E02B13/00
Filed: 2002-04-16
Abstract: PURPOSE: A protective section of ecosystem for water channel is provided to serve as an apparatus for protecting ecosystem without eliminating previous water channel for supplying/discharging water and to save production cost involving manufacture thereof. CONSTITUTION: The protective section comprises a horizontal component(100) made of concrete enclosing both side wall with respective slits(110) and provided with a coupling depression(120) having at least one grooves(121); an escaping component(200) having projection interposed into the groove(121) and integrally formed with a standing component(220) over entire length of upper end of the component(200) in order to retain contacting condition to bottom side of a water channel(300) at lower end of the component. The escaping component(200) has a special shape with tapered side and smooth side and has the standing component.
Patent KR-20030084213-A (KR)
Title: Contents displaying method for portable communication terminal
Inventor: RYU WAN CHANG
IPC: H04B1/40
Filed: 2002-04-25
Abstract: PURPOSE: A method for displaying contents of a portable communication terminal is provided to remove a title region when displaying the contents, and to obtain a wider navigation region, thereby showing more contents to users on one screen. CONSTITUTION: When a key pressed by a user is equal to a specific key in a navigation region display state(10), a terminal displays a title bar on an upper end of a navigation region(20). If the user takes off hand from the specific key, the terminal removes the title bar, and recovers a region covered by the title bar(30). The terminal operates a timer when displaying the title bar, and calls the step of recovering the region covered by the title bar after a certain time elapses(40).
Patent KR-20030089745-A (KR)
Title: Hydrogen barrier and method for fabricating semiconductor device having the same
Inventor: YOON DONG SU
IPC: H01L21/02
Filed: 2002-05-18
Abstract: PURPOSE: A hydrogen barrier layer and a method for manufacturing a semiconductor device with the same are provided to be capable of preventing the diffusion of hydrogen into a capacitor by using a ZrTiO layer as the hydrogen barrier layer. CONSTITUTION: A zirconium target(104) and a titanium target(105) are mounted in a deposition chamber(100). Mixed gases of argon and oxygen are supplied into the deposition chamber(100). Argon plasma is generated by ionization of argon gas. Thereby, a ZrTiO layer(108) is deposited on a wafer(102) loaded in the deposition chamber(100). Then, the ZrTiO layer(108) is densified, and oxygen is filled on the surface of the ZrTiOn layer(108).