baber/WOPTO huggingface dataset:
Patent JP-2004520671-A (JP)
Title: 複合コンテントアドレッサブルメモリ
IPC: G11C15/00
Filed: 2001-01-30
Abstract: 複数のコンテントアドレッサブルメモリを、より大きな複合コンテントアドレッサブルメモリへ、個々のメモリの元の応答時間からほとんど遅延なく、統合することを可能にする高速インタフェース用の方法と回路。このインタフェースは、バスシステムのみへの接続を提供し、異なるＣＡＭデバイス間での接続を必要としない。これにより、一つのＣＡＭと一つのＣＡＭインタフェースとの組み合わせ（例えばチップ）が可能となる。このようなチップは、ＲＡＭのような標準的なメモリチップとして知られているように、他の追加インタフェースを用いずにそれらのチップを直接にバスシステムに取り付けることにより、ＣＡＭメモリを増加させるためのモジュールとして用いられる。この新規なインタフェースは、メモリセルを、より大きな統合ＣＡＭデバイスに本発明にかかるインタフェースを介して接続されたグループに分割することにより、ＣＡＭデバイス内に階層構造を生成するためにも用いられる。このような構成において、各グループにおけるプライオリティ機能は、より少数のセル上で動作し、このインタフェースを構成するために必要なゲートが比較的少数であることにより、少数ゲートによるＣＡＭデバイスの実装が可能である。複合ＣＡＭデバイスにおいて、複数のＣＡＭは、各々のインタフェースを介して、アドレスバスとデータバスに接続される。読み出しおよび書き込みモードにおいて、インタフェースは、二組のラインを接続し、これにより、読み出しまたは書き込み動作に対して透過的になる。サーチモード（コンテントアドレッシングモード）では、インタフェースは、予め定められた方向において最も高い、一つのマッチングセルのアドレスを出力するために、ＣＡＭの応答に応じてデータバス数を選択し、設定する。インタフェース回路は、ＣＡＭモジュールのコンテントアドレス機能を、より広範囲のアドレスに拡張するために必要な論理機能とラインとを追加し、セルのアドレスをより広い範囲に書き込むために追加のバスライン数を設定し、ＣＡＭアドレスのビットがより高いアドレスを持つセルのアドレスを変更しようとする場合は、それらのビットをマスクすることによって、システム中でより高いアドレスを持つ他のセルが応答しないことを確認する。これにより、ＣＡＭの全体構成が、より大きなサイズの単一のＣＡＭとして機能することが可能となる。
Patent JP-2004522588-A (JP)
IPC: B21B1/46
Filed: 2002-02-20
Abstract: A casting-rolling plant and a method of operating a casting-rolling plant are disclosed. At least one slab production line ( 40, 50 ) and at least one mill train ( 4 ) as well as at least one slab feeding device ( 20 ) that is independent of the slab production line ( 40, 50 ) with respect to the production process are provided. In order to achieve a higher throughput in the production of strip material, the slab feeding device ( 20 ) takes over slab feed to the mill train ( 4 ) during a production break of the slab production line ( 40, 50 ) in accordance with logistic and/or manufacturing standards up to a maximum output possible.
Patent JP-2004525261-A (JP)
Title: 高多孔性焼結体及びその製造方法
IPC: B22F3/11
Filed: 2002-02-16
Abstract: 本発明は、焼結することが可能で繊維を含有する材料から製造される、少なくとも一つの層を有する高多孔性焼結体に関する。本発明の目的は、向上したバーンオフ特性と向上した火炎の粘着性の数値を有する上記高多孔性焼結体を提供することにある。この目的のために、使用される繊維は、一方および／または両方の側面が湾曲し、約１mmより短い主軸と約２００μｍより短い第二軸とを有しており、主軸は第二軸より長い。本発明は、また、上記高多孔性焼結体の製造方法及びその使用に関する。
Patent JP-2004523671-A (JP)
Title: 高い光沢を有する溶融紡糸糸
IPC: D03D15/00
Filed: 2002-03-13
Abstract: 本発明は、５〜３００デシテックスの糸重量と、０．５〜７デシテックスのフィラメント重量と、非円形の輪郭形成フィラメント横断面とを有する輪郭形成ポリアミド糸であって、中に溶融分散された０．０１〜３重量パーセントの非白色顔料を含むポリアミド糸を提供する。糸は、輪郭形成と非白色顔料との組合せ効果のために高い金属光沢を有する。本発明はまた、該糸を含む織編布、および前記布を含む衣類をも提供する。本発明はまた、それの中に非白色顔料が分散されたポリアミド溶融物を紡糸することによって本発明の糸を製造する方法も提供する。
Patent JP-2004525244-A (JP)
Title: 透明フィルムを製造するためのポリアミド成形用組成物
IPC: C08L77/02
Filed: 2002-04-15
Abstract: 本発明は、コポリアミド、およびタルクと、アミドワックスと、エトキシル化カルボン酸との懸濁液を含有する成形用組成物およびその製造法、およびフィルムを製造するための前記成形用組成物の使用に関する。
Patent JP-2004532238-A (JP)
Title: 保存安定性改善殺虫組成物
IPC: A01N57/12
Filed: 2002-05-02
Abstract: 保存安定性の改善された殺虫組成物を開示する。当該殺虫組成物は無水マレイン酸で安定化したジメトエートを含有してなる。また、昆虫の抑制方法を開示する。該殺虫組成物は可能な限り希釈した後、作物が生育する地域に散布する。
Patent JP-2004210977-A (JP)
Title: Curable resin composition
Inventor: OKUDAIRA HIROYUKI
IPC: C08G18/38
Filed: 2003-01-06
Abstract: <P>PROBLEM TO BE SOLVED: To provide a two-pack curable resin composition capable of ensuring sufficient pot life and excellent in curability, especially in deep curability.  <P>SOLUTION: The two-pack curable resin composition has an isocyanate group and an alkoxysilyl group in one molecule and is composed of a first liquid containing a silyl group-modified urethane prepolymer having ≥500 weight average molecular weight and a second liquid containing a curing agent.  <P>COPYRIGHT: (C)2004,JPO&NCIPI
Patent JP-2004210995-A (JP)
Title: Polychloroprene adhesive composition and adhesive structure
Inventor: SUNADA KIYOSHI
IPC: C09J201/10
Filed: 2003-01-07
Abstract: <P>PROBLEM TO BE SOLVED: To provide a polychloroprene adhesive composition containing silica finely dispersed in the composition and having excellent adhesiveness and provide an adhesive structure.  <P>SOLUTION: The polychloroprene adhesive composition contains silica, a chloroprene polymer, an alkoxysilyl-containing polymer and an organic solvent. The amounts of the silica, the alkoxysilyl-containing polymer and the organic solvent are 2-100 pts. mass, 0.5-25 pts. mass and 150-1,900 pts. mass based on 100 pts. mass of the chloroprene polymer, respectively. The adhesive structure is produced by bonding the structure members with the adhesive composition.  <P>COPYRIGHT: (C)2004,JPO&NCIPI
Patent JP-2004210745-A (JP)
Title: Method for producing (meth)acrylic ester
Inventor: KENMOCHI HIROYUKI
IPC: C07D307/33
Filed: 2003-01-08
Abstract: <P>PROBLEM TO BE SOLVED: To provide a safe method for producing a (meth)acrylic ester of a cyclic secondary or tertiary alcohol in good handling nature and workability as well as in a high yield.  <P>SOLUTION: The (meth)acrylic ester of a cyclic secondary or tertiary alcohol is produced by reacting a mixed acid anhydride represented by the formula: CH<SB>2</SB>=C(R<SP>1</SP>)-CO-OA [wherein, R<SP>1</SP>is H or CH<SB>3</SB>; A is represented by the formula: -CO-R<SP>2</SP>(wherein, R<SP>2</SP>is a t-butyl group, 2,3-dimethyl-2-butyl group, 2-methyl-2-pentyl group, 3-methl-3-pentyl group, 4-nitrophenyl group or 2,4,6-trichlorophenyl group)] and a cyclic secondary or tertiary alcohol-based compound selected from a metal alkoxide of a cycloaliphatic alcohol, a hydroxylactone and an alcohol containing a condensed cycloaliphatic lactone in which an alcoholic hydroxyl is linked to a carbon atom constituting an aliphatic ring.  <P>COPYRIGHT: (C)2004,JPO&NCIPI
Patent JP-2004218253-A (JP)
Title: Structure for preventing bathroom unit room from interfering with piping
Inventor: OKAMOTO KOICHIRO
IPC: A47K4/00
Filed: 2003-01-14
Abstract: <P>PROBLEM TO BE SOLVED: To provide a structure for preventing a bathroom unit room from interfering with piping or an elbow, when the bathroom unit room interferes with the piping or the elbow.  <P>SOLUTION: This bathroom unit room is constituted by combining a waterproof pan which constitutes a bottom surface, a ceiling panel which constitutes a ceiling, and a side surface panel which constitutes a side wall. In the structure for preventing the bathroom unit room from interfering with the piping, the side surface panel and the ceiling panel corresponding to parts interfering with the elbows of various types of the pipings, are cut, and a box member is mounted on a cut part so as to constitute a piping box for securing a space for the piping or the elbow. In relations between components and symbols, ceiling piping is numbered 3, the elbow of the ceiling piping is numbered 3a; the bathroom unit room is numbered 10; the ceiling panel is numbered 11; the side surface panel is numbered 12; the piping box is numbered 20; the box member is numbered 21; vertical surfaces of the box member are numbered 21a and 21b; an inclined plane of the box member is numbered 21c; and X and Y represent cut parts.  <P>COPYRIGHT: (C)2004,JPO&NCIPI
Patent JP-2004217821-A (JP)
Title: Seal product using elastomer which magnetic substance is formulated
Inventor: SAEGUSA SHIGEHARU
IPC: F16J15/10
Filed: 2003-01-16
Abstract: <P>PROBLEM TO BE SOLVED: To provide an inexpensively produceable seal product in which magnetic force of the seal product formulating a magnetic substance is enhanced and dispersion of magnetic force is reduced and kneading can readily be carried out when produced and handling is facilitated by lowering adhesion between products.  <P>SOLUTION: The seal product is formed by using a material obtained by kneading a magnetic substance having 0.9-1.3 μm particle diameter with an elastomer. A material composed of isotropic ferrite particles is preferably used as the magnetic substance.  <P>COPYRIGHT: (C)2004,JPO&NCIPI
Patent JP-2004196277-A (JP)
Title: Disaster prevention system for bulk ship
Inventor: OUCHI KAZUYUKI
IPC: B63B25/04
Filed: 2003-01-16
Abstract: <P>PROBLEM TO BE SOLVED: To eliminate scattering of dust sticking to the surface of a cutout conveyor to prevent explosion or ignition, and to extinguish flames quickly while preventing the spread of flames in case of fire.  <P>SOLUTION: In a space 3 formed between a plurality of cargo holds 1 for receiving a bulk cargo C and a ship bottom 2, an air suction passage 9 connected onto a ship 6 is formed in the end of the opposite side to a vertical passage 7 connected onto the ship 6 that is formed at a prescribed part in a bow or a stern. There further formed a ventilation passage 10 communicating the suction passage 9, the space 3, and the vertical passage 7. The space 3 is partitioned into a plurality of sections for extinguishing flames by a plurality of fire shutter devices 13 capable of fastening the conveyor 5 having proper intervals in its cross direction and shutting water and air tightly.  <P>COPYRIGHT: (C)2004,JPO&NCIPI
Patent JP-2004217491-A (JP)
Title: Optical element
Inventor: MORI MOTOHISA
IPC: C03B11/00
Filed: 2003-01-17
Abstract: <P>PROBLEM TO BE SOLVED: To provide an optical element capable of certainly and easily recognizing a correct optical axis position when it is assembled and manufactured.  <P>SOLUTION: The optical element 11 is formed by transferring its lens faces M1 and M2 from respective molds and used for an observation optical system. The outline profile of the optical element 11 is circular, polygonal or a combined form of both. The optical axis I of the optical element formed by the lens faces M1 and M2 is eccentric from the center O of the circular arc or the center O of the polygon and the optical element has a discrimination means based on the profile 17 at least at a part of the outline profile.  <P>COPYRIGHT: (C)2004,JPO&NCIPI
Patent JP-2003221591-A (JP)
Title: Utilization of unsaturated ester as perfuming ingredient, perfume composition, perfumed product and unsaturated ester compound
Inventor: MARTY MAURUS
IPC: C07C69/007
Filed: 2003-01-17
Abstract: <P>PROBLEM TO BE SOLVED: To provide an unsaturated ester usable as a perfuming ingredient.  <P>SOLUTION: The compound is expressed by formula (1) [R' is a 1-5C straight- chain, branched chain, unsaturated or saturated hydrocarbon group; R<SP>1</SP>, R<SP>2</SP>, R<SP>3</SP>, R<SP>4</SP>and R<SP>5</SP>are each independently H, methyl, ethyl or methoxy; R<SP>6</SP>and R<SP>7</SP>are each independently H, methyl, ethyl, n-propyl or isopropyl; and R<SP>5</SP>and R<SP>6</SP>may together with the bonding carbon atom form a 6-membered ring). The compound is useful as a perfuming ingredient for the preparation of perfuming compositions and perfumed products imparting the odor notes of the floral and indole type without coloring problems in the final product.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2003230317-A (JP)
Title: Method for culturing plant
Inventor: OKA HIROYUKI
IPC: A01G7/00
Filed: 2003-01-21
Abstract: <P>PROBLEM TO BE SOLVED: To provide a method for culturing plants for increasing specific plant components effective in the human body without changing the shapes of plants such as the growth acceleration of the plants or the production rise of the edible portions of the plants.  <P>SOLUTION: This method for culturing plants is carried out under irradiation of natural light. In this method, the plants are simultaneously irradiated with red light having a wavelength range of 620-760 nm and with blue light having a wavelength range of 400-480 nm to increase the production of specific plant components effective in the human body.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2004223140-A (JP)
Title: Protecting structure for hall ceiling in pachinko game hall
Inventor: SUMIYOSHI KENICHI
IPC: A63F7/02
Filed: 2003-01-27
Abstract: <P>PROBLEM TO BE SOLVED: To suppress the cost from becoming high, and in the meantime, to prevent pachinko balls from falling on a ceiling even when storage tanks or replenishing gutters or the like are broken.  <P>SOLUTION: This protecting structure for the hall ceiling in a pachinko game hall comprises an internal structure unit (33) and an external structure unit (35) which receives pachinko balls fallen from the internal structure unit. Also, the protecting structure for the hall ceiling is equipped with a circulating path component (25) for pachinko balls which is arranged on the hall attic (13b), and an alarm means (41) which detects the entrance of pachinko balls to the external structure unit and emits an alarm.  <P>COPYRIGHT: (C)2004,JPO&NCIPI
Patent JP-2004230584-A (JP)
Title: Thermal printer
Inventor: MOTO YOICHI
IPC: B41J2/335
Filed: 2003-01-28
Abstract: <P>PROBLEM TO BE SOLVED: To provide a highly reliable thermal printer capable of forming a good print by stabilizing the carrying state of a recording medium.  <P>SOLUTION: The thermal printer comprises a thermal head T where a plurality of heating elements 3 are arranged on the upper surface of a substrate 1 and coated with a protective film 5, and a platen roller P disposed above the heating elements 3 and perform printing while feeding a print medium between the thermal head T and the platen roller P. Overcoat layers 6 and 9 of a water repellent material are applied to the surface of the protective film and the surface of the platen roller located above the heating elements 3.  <P>COPYRIGHT: (C)2004,JPO&NCIPI
Patent JP-2004206035-A (JP)
Title: Heat developable photosensitive material
Inventor: OZEKI TOMOYUKI
IPC: G03C1/74
Filed: 2003-01-29
Abstract: <P>PROBLEM TO BE SOLVED: To provide heat developable photosensitive material having high sensitivity and low fog, excellent in suitability of an image to printout, and excellent also in raw stock preservability.  <P>SOLUTION: The heat developable photosensitive material having at least a photosensitive silver halide, a non-photosensitive organic silver salt, a reducing agent for a silver ion and a binder on one surface of a support contains (1) a compound whose one-electron-oxidized product generated by a one electron oxidation can further emit one or more electrons upon a succeeding reaction, (2) a compound represented by a general formula (T), and (3) a heteroatom-containing macrocyclic compound.  <P>COPYRIGHT: (C)2004,JPO&NCIPI
Patent JP-2004229791-A (JP)
Title: Hydrant device
Inventor: TAKAHIRA TOMOHIRO
IPC: A62C35/20
Filed: 2003-01-29
Abstract: <P>PROBLEM TO BE SOLVED: To provide a hydrant device having a mechanism of opening/closing a front door in the vertical direction, capable of being miniaturized and facilitating the inspection from an inspection opening above the front door.  <P>SOLUTION: The hydrant device 1 has the front door 11 to be opened/closed by moving a front opening 5 of a housing 2 in the vertical direction. The door opening/closing mechanism 15 comprising a guide means 12 for guiding the vertical movement of the front door 11 and a power application means 14 for applying the power for moving upward to the front door is located sideways of the front door 5.  <P>COPYRIGHT: (C)2004,JPO&NCIPI
Patent JP-2004230506-A (JP)
Title: Positioning method of electrode lower guide on electrical discharge fine hole processing machine
Inventor: HANABUSA HIROSHI
IPC: B23H7/26
Filed: 2003-01-30
Abstract: <P>PROBLEM TO BE SOLVED: To provide a method for easy positioning.  <P>SOLUTION: A contact sensitive electrode 9B to make contact with a lower end surface of an electrode lower guide 21 is provided, an electrode head end is positioned on a lower guide lower end surface by contacting and detecting a head end of a pore processing electrode 18 to insert into the electrode lower guide 21, the pore processing electrode 18 is lowered by specified length from the electrode lower guide 21 by a processing axis, thereafter, the electrode head end and a surface of a processing body 1 are made contact with each other and sensed by lowering a guide axis, furthermore, the pore processing electrode 18 is pulled up by a length slightly smaller than specified length by a processing Z axis and the guide axis is lowered by a length further slightly smaller than the length slightly smaller than the specified length.  <P>COPYRIGHT: (C)2004,JPO&NCIPI
Patent JP-2004232746-A (JP)
Title: Pipe coupling
Inventor: MIZUKAWA KENJI
IPC: F16L21/08
Filed: 2003-01-30
Abstract: <P>PROBLEM TO BE SOLVED: To provide a pipe coupling for performing the work connection while confirming that an end part of a synthetic resin pipe is inserted up to the proper innermost part in a socket with a sound as a standard by a sounding mechanism.  <P>SOLUTION: This pipe coupling has a pipe coupling body 11, an outer cylinder part 12 continuously arranged in the pipe coupling body 11, a box nut 13 continuously arranged in a tip part of the outer cylinder part 12 and the socket surrounded by the outer cylinder part 12 and an inner cylinder part extending inside the box nut 13 from the pipe coupling body 11, and installs a slipping-out preventive ring 15 and a sealing rubber ring 16 in the socket, and can be connected in a slipping-out preventable state by the slipping-out preventive ring 15 in a single operation of only inserting an inserting port P1 of the connecting synthetic resin pipe P into the socket. The sounding mechanism capable of confirming insertion by generating a sound when the tip of the inserting port P1 of the synthetic resin pipe P comes into contact, is arranged in the innermost side part of an installing position of the slipping-out preventive ring 15 and the sealing rubber ring 16 in the socket.  <P>COPYRIGHT: (C)2004,JPO&NCIPI
Patent JP-2004006650-A (JP)
Title: System, process and program for manufacturing electronic device
Inventor: SHIOZAWA MASAKUNI
IPC: H01L21/603
Filed: 2003-01-31
Abstract: <P>PROBLEM TO BE SOLVED: To perform multiple reflow processing while enhancing productivity.  <P>SOLUTION: Any one of heat blocks 71a-71c, 72a-72c, 73a-73c, 74a-74c, or cooling blocks 75a-75c is matched to the product pitch of a circuit board 51 by moving a reflow furnace 61 along the carrying direction of a tape substrate 50 and securing it at a position matching the product pitch of the circuit board 51. Since a thermal processing time is not required to be set for each circuit board 51 having a different product pitch, the tape substrate 50 connecting the circuit boards 51 having a different product pitch can be subjected to reflow processing continuously.  <P>COPYRIGHT: (C)2004,JPO
Patent JP-2004234597-A (JP)
Title: Keyword extraction device, program and storage medium
Inventor: BOSU MASAKO
IPC: G06F17/30
Filed: 2003-02-03
Abstract: <P>PROBLEM TO BE SOLVED: To extract a word with high relevancy with a specified word as a keyword by enabling the selection of a keyword candidate cooccurring with the specified word in a specified range of a document as the keyword.  <P>SOLUTION: This keyword extraction device 1 comprises a keyword candidate extraction part 2, a keyword candidate evaluation part 6 and a specified word extraction part 7, in which a word or word string is extracted from the document as a keyword candidate of the document, an appearance frequency in the document of the extracted keyword candidate is calculated, the appearance frequency is scored and given to the keyword candidate, and a predetermined number of specified words are extracted from the scored keyword candidates in descending order of scores. The keyword extraction device 1 examines whether or not each specified word appears in the specified range, and when the specified word appears, the keyword candidates present in the same range are selected, a specified score is added to the scores of the selected keyword candidates, and the resulting candidates are arranged in descending order of scores, and a predetermined number of the candidates from the top are extracted as keywords.  <P>COPYRIGHT: (C)2004,JPO&NCIPI
Patent JP-2004241141-A (JP)
Title: Separator for fuel battery
Inventor: MIYAZAWA ATSUSHI
IPC: H01M8/10
Filed: 2003-02-03
Abstract: <P>PROBLEM TO BE SOLVED: To provide a separator for a fuel battery which is thin and has high reliability.  <P>SOLUTION: Grooves 33 for gas channels and grooves 34 for cooling medium channels are respectively formed on both surfaces of the separator for the fuel battery via ribs 32 at an equal interval. Non-continuous protrusions 31 each for connecting between the adjacent ribs 32 are provided at the bottoms of the grooves 34. In the case of an anode side gas channel, the protrusion height 35 from the bottom of the groove is set so that the height is raised as a reaction gas partial pressure is lowered. In the case of a cathode side gas channel, the protrusion height 35 from the bottom of the groove is set so that the height is lowered as the reaction gas partial pressure is lowered.  <P>COPYRIGHT: (C)2004,JPO&NCIPI
Patent JP-2004238104-A (JP)
Title: Automatically casting system of glass sheet into bending furnace
Inventor: MORI TAKESHI
IPC: B65G49/06
Filed: 2003-02-03
Abstract: <P>PROBLEM TO BE SOLVED: To supply glass sheets taken out of a pallet at a high speed, in a facility for automatically casting the glass sheets continuously into a heating/bending furnace for the glass sheets.  <P>SOLUTION: This automatically casting system of the glass sheets into the bending furnace comprises a transfer means 10 for sucking and supporting with a suction pad 13 for transfer the front row of the glass sheet from a plurality of glass sheets 1 vertically stacked on the pallet 4 and for transferring it onto a positioning table 32, a position detecting means 30 for detecting a position coordinate of the glass sheet on the positioning table, and a supply means 50 for transferring the glass sheet from the positioning table to a predetermined position on a conveying table while correcting the position of the glass sheet based on differential information between the position coordinate of the glass sheet on the positioning table and a reference position coordinate. The automatically casting system of the glass sheets into the bending furnace simultaneously performs in parallel an operation of taking the glass sheet out of the pallet and transferring it onto the positioning table, a position detecting operation of the glass sheet on the positioning table, and an operation of setting the glass sheet on the positioning table to the predetermined position on the conveying table.  <P>COPYRIGHT: (C)2004,JPO&NCIPI
Patent JP-2004238014-A (JP)
Title: Resin-made container
Inventor: ADACHI YOSHIKAZU
IPC: B65D6/18
Filed: 2003-02-05
Abstract: <P>PROBLEM TO BE SOLVED: To provide a resin-made container of an excellent cleaning property when polluted, and of easy assembly.  <P>SOLUTION: The resin-made container is formed of a hollow plate 3 having inner ribs 2 formed between hollow double walls, and the hollow plate 3 has a flat plate part 4 disposed in the center, and side wall parts 6 are continuously provided on right and left sides via a hinge part 5. A projecting part 8 for erection and a recessed part 9 for erection to be fitted to the projecting part 8 for erection are provided on right and left sides close to each other across the hinge part 5 to integrally join the flat plate part 4 in the center with the side wall parts 6. When the side wall parts 6 are erected by substantially 90°, the projecting part 8 for erection is fitted to the recessed part 9 for erection, and the entire structure is maintained in a U shape. The resin-made container is completed by facing two U-shaped members in this state with 90° deviated from each other, and fitting them to each other.  <P>COPYRIGHT: (C)2004,JPO&NCIPI
Patent JP-2004241597-A (JP)
Title: Wafer holding body for semiconductor manufacturing device and semiconductor manufacturing device mounted with the same
Inventor: NATSUHARA MASUHIRO
IPC: H01L21/027
Filed: 2003-02-06
Abstract: <P>PROBLEM TO BE SOLVED: To provide a wafer holding body for semiconductor manufacturing device having a wafer mounting surface improved in soaking property, and to provide a semiconductor manufacturing device mounted with the holding body.  <P>SOLUTION: A shaft which supports the wafer holding body having the wafer mounting surface is joined to the wafer holding body. When the heat capacity of the shaft is adjusted to ≤40% of that of the wafer holding body, the temperature distribution on the wafer holding surface of the wafer holding body can be controlled to ≤±1.0%. It is preferable that the wafer holding body is a ceramic heater having at least a resistance heating element.  <P>COPYRIGHT: (C)2004,JPO&NCIPI