baber/WOPTO huggingface dataset:
Patent CN-114420104-A (CN)
Title: 自动生成字幕的方法及其相关产品
Inventor: GAO SHENGZHOU
IPC: G10L15/06
Filed: 2022-01-27
Abstract: 本发明的实施方式提供了一种自动生成字幕的方法及相关产品。其中，该方法包括：获取与多媒体文件中语音时序相关的音频信息；获取所述音频信息的语音识别文本；对所述语音识别文本进行文本可读性增强处理；以及基于处理后的所述语音识别文本，生成与所述多媒体文件中语音对照的字幕文本。通过本发明的方案，可自动生成与多媒体文件中语音对照的字幕文本，不仅能够有效节省人力成本和时间成本，而且有能够确保字幕文本与语音的高度匹配。此外，还提供了一种设备和计算机可读存储介质。
Patent CN-114392524-A (CN)
Title: 多功能超大训练平台安全绳断电逃生系统装置
Inventor: WU XIONGHUI
IPC: A63B71/00
Filed: 2022-02-11
Abstract: 本发明提供多功能超大训练平台安全绳断电逃生系统装置，其特征在于：基座和压紧盖之间顶抵压缩弹簧的外端；外盖固定在基座上；外盖的安全绳通孔位于压紧盖和基座之间的空间的上方；外盖的外板上开设有一个螺孔，一个旋钮的螺杆部穿过螺孔并与螺孔配合螺设，旋钮的内端部顶抵在压紧盖的外侧面；基座固连在活动座的外侧面；活动座的翼板铰接在机台的一个杆体上；微动开关位于活动座的上方并位置与杆体对应；扭力弹簧的固定在杆体和活动座上；安全绳与背式安全带连接后穿过挂钩，从安全绳通孔伸入压紧盖和基座之间的空间，旋钮顶抵压紧盖，基座和压紧盖夹紧安全绳。本发明能在锻炼者摔倒的危险情况下自动断电停机，提高安全性。
Patent CN-114382811-A (CN)
Inventor: WANG LIQUN
IPC: F16D66/02
Filed: 2022-03-02
Abstract: 一种电梯闸瓦厚度及间隙的测量装置及其测量方法，包括底座、设置在底座上的制动轮组，还包括制动件，其至少设置有闸瓦，闸瓦适与制动轮组抵接制动；以及检测件，其包括测厚件和测隙件，测厚件设置有测厚探头，测厚探头固接在闸瓦的顶面；测隙件包括磨损块、第一测隙探头、第二测隙探头，磨损块通过筋板固接在闸瓦的一侧；第一测隙探头固接在筋板上，用于检测磨损块的厚度；第二测隙探头贯穿于筋板并伸入磨损块内，用于检测第二测隙探头与制动轮组的距离。本申请可实现自动化测量闸瓦厚度与间隙，减少人工测量频率及不确定度，同时，本申请可实现后期加装，闸瓦无需出厂内置检测装置。
Patent IN-2014DN10250-A (IN)
Inventor: PARK BYUNG CHUN
IPC: C01G45/00
Filed: 2013-07-03
Abstract: The present invention relates to a precursor for preparing a lithium composite transition metal oxide a method for preparing the same and a lithium composite transition metal oxide and more specifically to a transition metal precursor and a method for preparing the same the transition metal precursor comprising a composite transition metal compound expressed by chemical formula 1: NiaMbMn1-(a+b)(OH1-x)2, the Mn content of which is 60 to 85 mol %. In the formula, M is one or more selected from the group consisting of Ti, Co, Al, Cu, Fe, Mg, B, Cr, Zr, Zn, and second row transition metals; 0.15≤a≤0.3; 0≤b≤0.1; and 0<x<0.5.
Patent MY-168203-A (MY)
Title: Bioconversion of milk with bifidobacterium breve for treatment of allergic manifestations in infants
Inventor: AUBERT-JACQUIN CECILE
IPC: A61K35/745
Filed: 2008-10-02
Abstract: The present invention relates to the use of a Bifidobacterium strain for the preparation of compositions, in particular of an infant formula, intended for the prevention and/or treatment of allergic-type manifestations. These compositions are obtained from a Bifidobacterium culture, without hydrolyzing milk proteins. The bacteria, which preferably belong to the species Bifidobacterium breve, may be killed or removed from the composition during the process.   Fig. 1
Patent MY-162205-A (MY)
Title: Combustion method for fluidized bed boiler, and fluidized bed boiler
Inventor: AGAWA RYUICHI
IPC: F23C10/04
Filed: 2009-07-13
Abstract: DISCLOSED IS A COMBUSTION METHOD FOR A CFB BOILER (1) USING BIOMASS FUEL. THE COMBUSTION METHOD IS CHARACTERIZED BY ADDING A FERRONICKEL SLAG TO THE BIOMASS FUEL THAT IS BURNED IN THE FLUIDIZED BED BOILER. GENERATION OF ALKALI SILICATE CAN BE SUPPRESSED BECAUSE MAGNESIUM OXIDE IS CONTAINED IN THE FERRONICKEL SLAG. ACCORDINGLY, A POSSIBILITY THAT POOR FLUIDITY OCCURS IN CONJUNCTION WITH GENERATION OF LOW-MELTING-POINT COMPOUNDS DECREASES AND THE OPERATION OF THE CFB (1) BOILER AT HIGH TEMPERATURES IS POSSIBLE. AS A RESULT, IT BECOMES EASIER TO IMPROVE ENERGY RECOVERY EFFICIENCY.
Patent MY-164407-A (MY)
Title: Filling connector, corresponding container and corresponding filling method
Inventor: FRENAL ANTOINE
IPC: F17C13/04
Filed: 2011-01-04
Abstract: FILLING CONNECTOR COMPRISING AN ISOLATION VALVE ELEMENT (7) ABLE TO MOVE RELATIVE TO A SEAT (8) BETWEEN UN UPSTREAM CLOSED POSITION AND A DOWNSTREAM OPEN POSITION, SAID ISOLATION VALVE ELEMENT (7) BEING URGED INTO ITS UPSTREAM POSITION BY A RETURN MEMBER (9), THE CONNECTOR (1) FURTHER COMPRISING A DUST VALVE ELEMENT (10) POSITIONED UPSTREAM OF THE ISOLATION VALVE ELEMENT (7), SAID DUST VALVE ELEMENT (10) COMPRISING A DOWNSTREAM END (101) AND BEING ABLE TO MOVE RELATIVE TO THE BODY (2) BETWEEN AN UPSTREAM CLOSED POSITION AND A DOWNSTREAM OPEN POSITION, SAID DUST VALVE ELEMENT (10) BEING URGED INTO ITS UPSTREAM POSITION BY A RETURN MEMBER (14), CHARACTERIZED IN THAT THE DUST VALVE ELEMENT (10) IS ABLE TO BE MOVED SELECTIVELY DOWNSTREAM EITHER INTO A DETERMINED FIRST DOWNSTREAM POSITION THAT OPENS THE UPSTREAM END (3), IN WHICH POSITION THE DOWNSTREAM END (101) OF THE DUST VALVE ELEMENT (10) DOES NOT PRESS ON THE UPSTREAM END (107) OF THE ISOLATION VALVE ELEMENT (7), OR INTO A DETERMINED SECOND DOWNSTREAM POSITION THAT OPENS THE UPSTREAM END (3), IN WHICH POSITION THE DOWNSTREAM END (101) OF THE DUST VALVE ELEMENT (10) COMES TO PRESS AGAINST AN UPSTREAM END (107) OF THE ISOLATION VALVE ELEMENT (7) THAT CAN MOVE IN ORDER, THROUGH CONTACT, TO MOVE THE ISOLATION VALVE ELEMENT (7) INTO ITS DOWNSTREAM OPEN POSITION, AND IN THAT THE DUST VALVE ELEMENT (10) COMPRISES ONE OR MORE PASSAGES (103) FOR GUIDING AT LEAST SOME OF THE FLOW OF FLUID PASSING FROM UPSTREAM (3) TO DOWNSTREAM (4) THROUGH THE BODY OF SAID DUST VALVE ELEMENT (10). THE MOST ILLUSTRATIVE DRAWING IS
Patent MY-186010-A (MY)
Title: Rolling method
Inventor: HARA KOJI
IPC: B21B1/16
Filed: 2012-12-31
Abstract: In a method wherein a material having a quadrangular section that is 80 to 400 mm on one side while 80 to 600 mm on the other side and an aspect ratio of not more than 1.5 is rolled into a wire rod or a bar steel through a continuous rolling mill line (S?, S?, S?, S?) when the material is passed through a plurality of flat roll pairs (1, 1?, 2, 2?, n, n?) to conduct an area reduction process alternately from a longitudinal direction and a lateral direction in the quadrangular section, at least 70% of plural passes through the flat roll pairs are configured to have such a roll gap that an aspect ratio in a cross-section of a rolled material after each pass is not more than 1.5.
Patent MY-166816-A (MY)
Title: Coupling Assemblies With Enhanced Take Up
Inventor: BRISCOE TERRY L
IPC: E02F9/28
Filed: 2011-04-15
Abstract: Coupling assemblies for releasably holding separable parts together, and in particular for releasably securing a wear member (106) to a support structure (102) in excavating equipment are formed so as to provide increased take up to ensure a tight fit of the wear member (106) on the support structure (102) even if considerable deviation between the parts exists due to wearing, manufacturing variations or the like. The coupling assemblies are suitable for securing points, adapters, shrouds, or other replaceable component to various excavating equipment. The components of the coupling assembly include a wedge (350) and a spool (200) that pivots about a fulcrum when the wedge (350) is driven into assembly for increased take up capabilities. The spool (200) is rotatably engaged around a fulcrum of the support structure (102) and has a bearing portion that bears against and moves the wear member to be secured to thereby take up any gaps between the engaging surfaces of these members. A movable insert (250) may be provided to improve the cooperation between the wedge (350) and the spool (200) to further increase the available take up. Fig. 8C & Fig. 8E
Patent MY-164716-A (MY)
Title: Advanced air bearing slider with modulation decreasing stiffness
Inventor: JAMES RONALD KROLNIK II
IPC: G11B21/20
Filed: 2013-04-02
Abstract: A DATA STORAGE DEVICE MAY HAVE AT LEAST A SLIDER (170: 190) CONSTRUCTED WITH AT LEAST ONE FEATURE (174, 176; 194, 196) POSITIONED ON AN AIR BEARING REGION (182; 198) AND SEPARATED FROM A DATA TRANSDUCER. THE AT LEAST ONE FEATURE CAN BE CONFIGURED TO PROVIDE A SLIDER STIFFNESS THAT DECREASES MODULATION WHILE THE AT LEAST ONE FEATURE IS FLOATING ABOVE OR IN CONTACT WITH A DATA STORAGE MEDIA (168).
Patent MY-174287-A (MY)
Title: Optical fiber for highly sensitive dosimeter
Inventor: DR GHAFOUR AMOUZAD MAHDIRAJI
Filed: 2013-09-12
Abstract: The present invention discloses a method of fiber pulling that the output optical fiber can sense radiation dose with very high sensitivity. In a specific embodiment, the method comprising steps of applying temperature with or without vacuum pressure onto a preform during optical fiber fabrication to form collapsed air holes optical fiber. The collapsed or fused area made in the invented fiber increases radiation dose sensitivity. The output fiber is not limited to any specific diameter, shape, single mode or multimode. The method can be applied for any diameter size, any shapes (flat, circle, hollow or solid), single mode, multi-mode and microstructured optical fibers. Also, the method can be used for doped or undoped or combination of them. The invented fiber can be used for detecting irradiation dose using either thermoluminescence or photo luminescence approaches.
Patent MY-185354-A (MY)
Title: A method and system for automated entity recognition
Inventor: Benjamin Chu Min Xian
Filed: 2013-11-27
Abstract: The present invention provides a system for extracting concept and named-entities from a text-containing document. An entity recognition engine (102) is provided to process an entity with a Rule-based Named-Entity Recognition (NER) (122), a Natural-Language-Processing (NLP) based NER (124), and a knowledge-based NER (126). The NERs are further scored and weighted, wherein the highest weighted score will be taken. A method thereof is also provided. (Figure 1)
Patent MY-164020-A (MY)
Title: Aromatic transformation using uzm-39 aluminosilicate zeolite
Inventor: NICHOLAS CHRISTOPHER P
IPC: C07C4/18
Filed: 2012-12-13
Abstract: A NEW FAMILY OF COHERENTLY GROWN COMPOSITES OF TUN AND IMF ZEOTYPES HAS BEEN SYNTHESIZED AND SHOWN TO BE EFFECTIVE CATALYSTS FOR AROMATIC TRANSFORMATION REACTIONS. THESE ZEOLITES ARE REPRESENTED BY THE EMPIRICAL FORMULA. NanMmk+TtAl1-xExSiyOz WHERE “n” IS THE MOLE RATIO OF NA TO (Al + E), M REPRESENTS AT LEAST ONE METAL, “m” IS THE MOLE RATIO OF M TO (Al + E), “k” IS THE AVENGE CHARGE OF THE METAL OR METALS M, T IS THE ORGANIC STRUCTURE DIRECTING AGENT OR AGENTS, “T” IS THE MOLE RATIO OF N FROM THE ORGANIC STRUCTURE DIRECTING AGENT OR AGENTS TO (Al + E), AND E IS A FRAMEWORK ELEMENT SUCH AS GALLIUM. THE PROCESS INVOLVES CONTACTING AT LEAST A FIRST AROMATIC WITH THE COHERENTLY GROWN COMPOSITES OF TUN AND IMF ZEOTYPES TO PRODUCE AT LEAST A SECOND AROMATIC. THE MOST ILLUSTRATIVE DRAWING IS
Patent MY-175221-A (MY)
Title: Magnetic toner
Inventor: MICHIHISA MAGOME
Filed: 2012-12-26
Abstract: The magnetic toner includes magnetic toner particles comprising a binder resin and a magnetic body and inorganic fine particles present on the surface of the magnetic toner particles, wherein the inorganic fine particles present on the surface of the magnetic toner particles comprise metal oxide fine particles, the metal oxide fine particles containing silica fine particles, and optionally containing titania fine particles and alumina fine particles, and a content of the silica fine particles being at least 85 mass% with respect to a total mass of the silica fine particles, the titania fine particles and the alumina fine particles, wherein;  when a coverage ratio A (%) is a coverage ratio of the magnetic toner particle's surface by the inorganic fine particles and a coverage ratio B (%) is a coverage ratio of the magnetic toner particle' surface by the inorganic fine particles that are fixed to the magnetic toner particle's surface, the magnetic toner has a coverage ratio A, a coefficient of variation on the coverage ratio A, a ratio of the coverage ratio B to the coverage ratio A, and a compression ratio in a specific range.      Figure 6.
Patent MY-171600-A (MY)
Title: Alkali developing type photosensitive resin composition, dry film, cured product, and printed circuit board
Inventor: KATO KENJI
Filed: 2012-08-15
Abstract: Provided is an alkaline developable photosensitive resin composition which does not contain crude particles, has excellent storage stability, can avoid the deterioration of working environments, and contains few substances toxic to human bodies. The alkaline developable photosensitive resin composition is characterized by comprising (A) a resin containing a carboxyl group, (B) a photopolymerization initiator, (C) a compound having at least two ethylenically unsaturated groups per molecule, and (D) a dibasic acid ester.
Patent MY-173571-A (MY)
Title: Hair dye product
Inventor: LAN HONGYING
Filed: 2013-08-23
Abstract: The invention relates to a hair dye product, in particular to a hair dye product comprising at least two natural dye substances, and the use of the at least two natural dye substances in human or animal hair dyeing or in preparation of hair dye product for human or animal, wherein at least one of the natural dye substances displays yellow or yellowish brown color series; preferably, the natural dye substance displaying the yellow or yellowish brown color series is selected from quercetin or a derivative thereof, or an extract containing the quercetin or the derivative thereof, or a mixture thereof. The at least two natural dye substances of the invention are combined as dyeing ingredient, compared with those used alone, the range of the color is very different, and the color of the dyed hair is natural, which is yellowish black and consistent with human real hair, moreover, the hair dyeing effect is stable and the color is not easy to fade.
Patent MY-188276-A (MY)
Title: Fired clay brick incorporated with recycled toxic waste
Inventor: Aeslina Abdul Kadir
IPC: C09K17/00
Filed: 2015-11-02
Abstract: A method of producing a construction material comprising the steps of disinfecting a toxic waste by heating for 24 hours providing a mixture of the disinfected toxic waste, clay soil, and water; compacting and drying the homogenised mixture in a mould; and heating the dried mixture to 1000-1050 ?C at a heating rate of 0.7-10 ?C/min.
Patent MY-175635-A (MY)
Title: Absorbent article
Inventor: HANAO HIROYUKI
Filed: 2015-12-09
Abstract: An absorbent article is provided, which effectively utilizes the entire absorber by quickly diffusing a body fluid, and reduces discomfort in a wearer by suppressing unpleasant dampness and twisting after absorption of the body fluid. An absorbent article (10) of the present invention includes a liquid permeable top surface sheet (14), a liquid impermeable back surface sheet (12), and an absorber (13) disposed between the top surface sheet (14) and the back surface sheet (12). A top surface sheet (14) side of the absorbent article is provided with extending a plurality of compressed lines (23) in each of which a plurality of recess portions (22) formed by compressing the top surface sheet (14) and the absorber (13) are arranged. The plurality of compressed lines (23) form intersection regions (21D) where the compressed lines intersect with each other. The compressed recess portions (22) are not formed in the intersection regions (21D).
Patent MY-195824-A (MY)
Title: A Pharmaceutical Composition for Treating Gastrointestinal Diseases
Inventor: JO YOUNG HO
IPC: A61K31/702
Filed: 2016-01-28
Abstract: The present invention provides a pharmaceutical composition for treating gastrointestinal diseases comprising ranitidine, sucralfate and bismuth subcitrate as active ingredients and a preparation method thereof. According to the present invention, when a combination drug of ranitidine, sucralfate and bismuth subcitrate is prepared, it is possible to address a hygroscopicity problem of ranitidine and increase formulation stability and drug bioavailability by controlling particle sizes of sucralfate and bismuth subcitrate.
Patent MY-194827-A (MY)
Title: Hinge
Inventor: WATERSON CHEN
IPC: E05F1/12
Filed: 2018-12-18
Abstract: A hinge includes a leaf unit (2), two action units (3, 6, 7) and an axle unit (4). The leaf unit (2) includes first and second leaves (21, 22) that are rotatable relative to each other. The first leaf (21) has a first barrel (211). The second leaf (22) has a second barrel (221). The action units (3, 6, 7) are co-rotatable with the first leaf (21). The axle unit (4) includes a fixing member (41) mounted in the second barrel (221) and co-rotatable with the second leaf (22), and two axles (42, 43, 44) respectively associated with the action units (3, 6, 7) and co-rotatable with the fixing member (41) .
Patent MY-190187-A (MY)
Title: Polishing process method and polishing composition
Inventor: TOMOHIDE KAMIYA
IPC: C09K3/14
Filed: 2018-09-20
Abstract: Provided is a polishing process method that allows effectively reducing the number of defects in a polished surface while maintaining favorably Ni ion removability. The polishing process method provided herein includes: a step (1) of polishing a magnetic disk substrate containing nickel while supplying a polishing composition, containing a silica abrasive, a polishing accelerator, an oxidant, and a chelating agent, to the substrate; and a step of bringing a waste solution of the polishing composition into contact with a chelating resin, and allowing nickel to become adsorbed onto the chelating resin. A value pH4- pH4 obtained by subtracting an apparent stability constant pH4 of the chelating agent for Ni ions at pH 4 from an apparent stability constant pH4 of the chelating resin for Ni ions at pH4 is larger than 0.5.
Patent MY-194990-A (MY)
Title: Electronic device including a plurality of touch displays and method for changing status thereof
Inventor: CHO KWANGIK
IPC: G06F3/048
Filed: 2017-08-21
Abstract: Disclosed is an electronic device (101) including a plurality of touch displays. The electronic device (101) includes a first touch display (310) configured to face a first direction and comprise a first touch panel (312) and a first display panel (311), a second touch display (320) configured to face a second direction opposite the first direction and comprise a second touch panel (322) and a second display panel (321), a rotation detection sensor (350) configured to sense a rotation of the electronic device (101), a processor (120) electrically connected to the first touch display (310), the second touch display (320) and the rotation detection sensor (350), and memory electrically connected to the processor (120). The memory (130) may store instructions which control the processor (120) so that the processor (120) changes each of the first touch panel (312) and the first display panel (311) from an on state to an off state and changes each of the second touch panel (322) and the second display panel (321) from the off state to the on state based on at least one rotation value received from the rotation detection sensor (350) when the electronic device (101) turns on a virtual axis. (Figure 3)
Patent MY-192105-A (MY)
Title: Package substrate processing method
Inventor: Chisato Yamada
IPC: H01L21/56
Filed: 2019-07-23
Abstract: A package substrate processing method for processing a package substrate (11) having a division line (17), an electrode (19) being formed on the division line (17) includes a cutting step of cutting the package substrate (11) along the division line (17) by using a cutting blade (50) and a burr removing step of removing burrs (19b) produced from the electrode (19) in the cutting step by spraying a fluid (76) to the package substrate (11) along the division line (17) after performing the cutting step. The cutting step includes a step of supplying a cutting liquid (74) containing an organic acid and an oxidizing agent to a cutting area (11b) where the package substrate (11) is to be cut by the cutting blade (50).
Patent MY-157032-A (MY)
Title: Enhanced substrate holding frame structure
Inventor: CHIANG CHIH-MAO
IPC: H01L21/673
Filed: 2011-06-23
Abstract: AN ENHANCED SUBSTRATE HOLDING FRAME STRUCTURE COMPRISES AT LEAST ONE PLASTIC FIXING ELEMENT (12) AND AT LEAST ONE SUPPORTING ELEMENT (13) DISPOSED AT LEFT AND RIGHT SIDES AND A LOWER SIDE BETWEEN TWO FRAME PLATES (11) RESPECTIVELY, AND EACH PLASTIC FIXING ELEMENT (12) , EACH SUPPORTING ELEMENT (13) AND EACH FRAME PLATE (11) ARE FIXED TO DEFINE A CONTAINING SPACE (14), AND EACH PLASTIC FIXING ELEMENT (12) INCLUDES A ROD (122) FOR REINFORCING THE PLASTIC FIXING ELEMENT (12) AND A STRUCTURE CAPABLE OF SECURING FIXING PLASTIC INSTALLED AT THE EXTERNAL PERIPHERY OF THE ROD (122), SUCH THAT THE INTERNAL WALL OF THE PLASTIC FIXING ELEMENT (12) CAN BE SECURED INTO THE STRUCTURE, AND EACH PLASTIC FIXING ELEMENT (12) INCLUDES ASLANT EQUIDISTANT PARALLEL FIXING RIBS (124) FOR LATCHING SUBSTRATES BETWEEN THE FIXING RIBS (124). THE PLASTIC FIXING ELEMENT (12) WITH ITS ROD (122) CAN PREVENT A SIZE DEVIATION CAUSED BY THERMAL EXPANSION AND CONTRACTION BETWEEN FIXING RIBS (124) OF THE PLASTIC FIXING ELEMENT (12).
Patent MY-192000-A (MY)
Title: Shoe cabinet
Inventor: NG TECK LAI
IPC: A47B57/00
Filed: 2019-10-04
Abstract: The present invention discloses a storage unit suitable for receiving footwear comprising an opened top container (100) with at least one hinged lid (200) to open and close the top of the container; means to support at least one partition (300) held in the container (100) so that the space within the container (100) is divided into multiple compartments for storing footwear; wherein the bottom panel of the container (100) includes means for facilitating the removal of unwanted matter that accumulates within the container (100), and wherein the unit further includes a supporting panel (400) connecting the end panels (101, 102) of the container to create a space between the supporting panel (400) and the container (100), into which space articles of footwear can be held in view; characterized in that the partition (300) is being supported in a slanted manner with a predetermined angle in respective to the bottom panel (103). (Figure 1)
Patent SG-10201804964T-A (SG)
Title: Target and process sensitivity analysis to requirements
Inventor: ADEL MICHAEL E
Filed: 2014-12-10
Abstract: PROCESS PARAMETERS 110-, \ INPUT MODULE CURRENT LAYER (SIMULATION OR DATA) PREVIOUS LAYER {SIMULATION OR DATA) WAFER PRODUCER 49 - \"\" OR TARGET DESIGNER 94- 1 TARGET PARAMETERS 96-. P ETROLOGY CONDITIDNS 4 h\"NRESHOLD 132 ,>c •1 2 92 P I40, TARGET OPI1MIZATION MODULE ORMAICF MORN i -129 7 123-- UROLOGY METMCS MODULE P 124-z- METROLOGY NEIRCS PROCESS ERIC'S 13°- \ SENSITNITY ANALYSIS MODULE 11 \ 20 \ - tRAW DATA METROLOGY SIMUALTION 78. \"\ t COARSE TARGET FILTDRING ure 1 TARGET AND PROCESS SENSITIVITY ANALYSIS TO REQUIREMENTS . Systems and method are provided for analyzing target, process and metrology configuration sensitivities to a wide range of parameters, according to external requirements or inner development and verification neals. Systems comprise the follow- ing elements. An input module is arranged to receive parameters relating to targets, target metrology conditions and production pro- cesses, to generate target data. A metrology simulation unit is arranged to simulate metrology measurements of targets from the tar- get data and to generate multiple metrics that quantify the simulated target measurements. A sensitivity analysis module is arranged to derive functional dependencies of the metrics on the parameters and to define required uncertainties of the parameters with respect to the derived functional dependencies. Finally, a target optimization module is arranged to rank targets and target metrology condi- tions with respect to the simulated target measurements. 90, 25
Patent SG-10201809269W-A (SG)
Title: Process kit having reduced erosion sensitivity
Inventor: KIM JONG MUN
Filed: 2009-10-27
Abstract: PROCESS KIT HAVING REDUCED EROSION SENSITIVITY Process kits for use in a semiconductor process chambers have been provided herein. In some embodiments, a process kit for a semiconductor process chamber includes a body configured to rest about a periphery of a substrate support and having sidewalls defining an opening corresponding to a central region of the substrate support. A lip extends from the sidewalls of the body into the opening, wherein a portion of an upper surface of the lip is configured to be disposed beneath a substrate during processing. A first distance measured between opposing sidewalls of the body is greater than a width across the upper surface of a substrate to be disposed within the opening by at least about .87 mm. Figure 1. 12