baber/WOPTO huggingface dataset:
Patent KR-20190107165-A (KR)
Inventor: TICEHURST MARTYN DAVID
IPC: C07J31/00
Filed: 2012-07-06
Abstract: 본 발명은 조절된 입자 크기를 가지며 마이크로화에 적합한 결정질 형태 1 다형체로서의 플루티카손 프로피오네이트를 제조하기 위한 신규 결정화 방법에 관한 것이다.  상기 방법은 아세톤 또는 아세톤과 물의 혼합물에 플루티카손 프로피오네이트를 용해시킨 다음 이 용액을 물 또는 물 10과 아세톤의 혼합물에 첨가함으로써 플루티카손 프로피오네이트가 결정질 형태로서 용액으로부터 결정화되도록 하는 단계를 포함한다.
Patent KR-20190116562-A (KR)
Inventor: TAKAHASHI SHU
IPC: C07K16/28
Filed: 2012-04-24
Abstract: 본 발명은 종양에 대해 치료 효과를 갖는 항체에 관한 것이다.     즉, 본 발명은 B7-H3 에 결합하여 항종양 활성을 나타내는 항체에 관한 것이다.     본 발명의 과제는 종양에 대해 치료 효과를 갖는 의약품을 제공하는 것이다.     B7-H3 에 결합하여 항종양 활성을 나타내는 항 B7-H3 항체를 얻고, 당해 항체를 함유하는 종양 치료용 의약 조성물 등을 얻는다.
Patent KR-20190137808-A (KR)
Title: 트리테르펜 사포닌, 중간체 및 보조제 배합물
Inventor: CHAN AMANDA
IPC: C07H1/08
Filed: 2018-04-13
Abstract: 본 출원은 트리테르펜 글리코시드 사포닌-유래 보조제, 이의 합성 및 이의 중간체에 관한 것이다. 본 출원은 또한 본 발명의 화합물을 포함하는 약학적 조성물 및 감염성 질환의 치료 및 면역화에서 상기 화합물 또는 조성물을 사용하는 방법을 제공한다.
Patent KR-20190127914-A (KR)
Title: 모바일 통신 네트워크의 무선 액세스 네트워크의 엔티티들 간의 신뢰할 수 있는 데이터 패킷 송신
Inventor: WIRTH THOMAS
IPC: H04L5/00
Filed: 2018-03-13
Abstract: 모바일 통신 네트워크를 위한 사용자 장비가 제공된다.  모바일 통신 네트워크는 복수의 셀들을 포함하며 셀 내에서 사용자 장비를 서빙하도록 구성되는 무선 액세스 네트워크를 갖는다.  무선 액세스 네트워크로부터 데이터 패킷을 수신하기 위해, 사용자 장비는 무선 액세스 네트워크에 의해 사용자 장비로 송신된 데이터 패킷의 복수의 서로 다른 버전들을 서로 다른 물리 자원들을 통해 동시에 수신하도록 구성된다.  무선 액세스 네트워크에 데이터 패킷을 제공하기 위해, 사용자 장비는 데이터 패킷의 복수의 서로 다른 버전들을 제공하도록 그리고 데이터 패킷의 복수의 서로 다른 버전들을 서로 다른 물리 자원들을 통해 동시에 무선 액세스 네트워크에 송신하도록 구성된다.
Patent KR-20190132548-A (KR)
Title: 생산 시스템에서 파이프 조인트들의 위치를 모니터링을 위한 시스템 및 방법
Inventor: SANCHEZ SOTO GERARDO ALONSO
IPC: E21B47/09
Filed: 2018-03-23
Abstract: 파이프 조인트가 생산 시스템의 유정구의 종축을 따라 생산 시스템을 통해 이동할 때 파이프 조인트의 위치를 모니터링하기 위한 시스템은 파이프 조인트를 검출하도록 구성된 초음파 센서를 포함한다. 시스템은 또한 초음파 센서로부터 신호를 수신하도록 구성된 제어기를 포함한다. 제어기는 신호에 기초하여 제 1 시간에 종축을 따라서의 파이프 조인트의 제 1 위치를 결정하도록 구성된 프로세서를 포함한다. 프로세서는 파이프 조인트의 제 1 위치로부터의 변위를 결정하고, 변위에 기초하여 제 2 시간에 종축을 따라서의 파이프 조인트의 제 2 위치를 결정하도록 추가로 구성된다. 제어기는 또한 제 1 위치 및 제 2 위치를 저장하도록 구성된 메모리를 포함한다.
Patent KR-20210002322-A (KR)
Title: 카메라 부재 및 이동 단말
Inventor: ZHU HEMING
IPC: G03B30/00
Filed: 2019-10-15
Abstract: 본 출원의 실시예는 카메라 부재 및 이동 단말을 제공하며, 상기 카메라 부재는 카메라 모듈, 제1 무선 전송 모듈 및 제1 자성체를 포함하며, 상기 카메라 모듈은 이미지를 획득하도록 구성되고, 상기 제1 무선 전송 모듈 및 상기 카메라 모듈은 전기적으로 연결되어 데이터를 전송하도록 구성된다.
Patent KR-20190135568-A (KR)
Inventor: ZISIMOPOULOS HARIS
IPC: H04L12/18
Filed: 2016-07-08
Abstract: 본 개시의 양상들은 무선 통신 시스템에서 MBMS(multimedia broadcast and multicast service) 동작들을 제공하기 위한 시스템, 방법 및 장치를 제공한다.  본 개시의 일부 양상들에서, 시스템, 방법 및 장치는, 애플리케이션 서버가 모바일 디바이스로의 멀티미디어 콘텐츠의 송신을 위해 네트워크 디바이스에 의해 지원되는 하나 이상의 MBMS 서비스 전달 기능들을 선택하기 위한 유연성을 제공할 수 있다.  애플리케이션 서버에 의해 선택된 MBMS 서비스 전달 기능들은 네트워크 디바이스에 의해 지원되는 복수의 MBMS 서비스 전달 기능들의 서브세트일 수 있다.
Patent KR-20200037752-A (KR)
Title: 연속 주조 시스템에서 주조 갭을 측정하기 위한 측정 장치 및 주조 갭을 측정하기 위한 이와 같은 측정 장치의 용도
Inventor: LANG OLIVER
IPC: G01B5/14
Filed: 2018-07-24
Abstract: 본 발명은 연속 주조 시스템(3)에서 주조 갭(casting gap)(2)을 측정하기 위한 측정 장치(1) 및 주조 갭(2)을 측정하기 위한 이와 같은 측정 장치(1)의 용도에 관한 것이다.  연속 주조 시스템(3)에서 주조 갭(2)을 측정하기 위한 상기 측정 장치(1)는 공동 회전 축(4)을 중심으로 회전 가능한 2개의 암(arm)(5, 6), 다시 말해 제1 암(5) 및 제2 암(6)을 포함하고, 그리고 상기 2개의 암(5, 6)의 상호 상대적인 (비틀림각)회전각(8)을 측정하기 위한 회전각 센서(rotation angle sensor)(7)를 포함한다.  상기 2개의 암(5, 6) 각각은 하나 이상의 세그먼트(segment)(9, 10)를 포함하고, 상기 세그먼트들의 개별적인 세그먼트 외부면(11, 12)은 공동 볼(ball)(14)의 표면(13)의 하나의 섹션(section)이다.
Patent KR-20200014373-A (KR)
Title: 담배를 쉽게 인출할 수 있는 전기 가열 장치
Inventor: LIU HUACHEN
IPC: A24F40/20
Filed: 2018-05-30
Abstract: 본 발명은 담배를 쉽게 인출할 수 있는 전기 가열 장치를 제공하며, 상기 전기 가열 장치는 가열 조립체 및 담배 인출 조립체를 포함하며, 상기 가열 조립체는 발연 제품을 수용하도록 구성되는 가열 챔버 및 가열 챔버 내에 위치되는 가열 소자를 포함하며, 상기 담배 인출 조립체는 슬라이딩 부재 및 슬라이딩 부재와 함께 이동 가능한 푸시앤풀 부재를 포함하며, 상기 슬라이딩 부재는 푸시앤풀 부재에 의해 구동되어 가열 챔버의 축 방향을 따라 가열 소자로부터 멀어지는 방향으로 이동하여, 가열 챔버 내의 발연 제품을 밖으로 이동시키도록 구성된다. 슬라이딩 부재는 푸시앤풀 부재에 의해 구동되어 이동하고, 발연 제품은 슬라이딩 부재의 이동에 의해 가열 챔버 밖으로 이동하도록 구동되며, 종래 기술에 비하면, 본 발명은 저온 연초 제품이 삽입되어 소비된 후의 연초 인출 문제를 해결함으로써, 가열 챔버 내의 잔류 연초를 용이하게 제거할 수 있다.
Patent KR-20210088866-A (KR)
Title: Application that improve the use of the closet
Inventor: WI SEUNG YEON
IPC: G06Q50/10
Filed: 2020-01-07
Abstract: As an application that helps to efficiently manage a wardrobe, the present invention allows a user to organize their clothes as data types within the app, and a recommendation system is provided together by converting the information of various users into big data.
Patent KR-20200088779-A (KR)
Title: Led device and light emitting apparatus including the same
Inventor: SHI JUNPENG
IPC: H01L33/62
Filed: 2020-01-14
Abstract: An LED device comprises multiple LED chips (110L1, 110L2, 110L3, 110L4) individually including opposite first and second surfaces (S21, S22), a side surface (S24), and an electrode assembly (1120) disposed on the second surface (S24) and including first and second electrodes (1121, 1122). The first surface (S21) of each of the LED chips (110L1-110L4) is a light exit surface. The LED device (100) further includes an electric circuit layer assembly (130) disposed on the second surfaces (S22) of the LED chips (110L1-110L4) and having opposite first and second surfaces (S31, S32) and a side surface (S33). The first surface (S31) is electrically connected to the first and second electrodes (1121, 1122). The LED device (100) further includes an encapsulating layer (120) enclosing the LED chips (110L1-110L4) and the electric circuit layer assembly (130) to expose the second surface (S32) of the electric circuit layer assembly (130).
Patent KR-20200028907-A (KR)
Title: AI English learning method
Inventor: PARK CHAN YONG
IPC: G09B19/06
Filed: 2020-01-22
Abstract: The present invention relates to an artificial intelligence English learning method. According to an embodiment of the present invention, the artificial intelligence English learning method including a server for providing English learning content to a learner and a device for displaying the English learning content provided from the server, comprises the following steps of: collecting an initial learning state of the device; grading the initial learning state based on the collected learning state data; providing the device with learning content suitable for the degree of difficulty and importance of learning based on the graded learning state; transmitting an answer to the provided learning content to the server, and calculating learning data in the server through a statistical algorithm based on the answer provided from the device; and making a graph of data after learning based on the calculated data and displaying the graph on the device. Accordingly, the present invention can display a learning status of the device in detail by separately calculating data according to a learning result and displaying, on the device, a graph (or a forgetting curve) according to the calculated data.
Patent KR-20210098749-A (KR)
Title: A gas hydrate promoter and Method of carbon dioxide separation by using gas hydrate
Inventor: PARK YOUNG JUNE
IPC: C10L3/10
Filed: 2020-02-03
Abstract: One embodiment of the present invention provides a gas hydrate formation promoter including a 3,3-dimethyl-1-butanol substance as a material for forming an sH gas hydrate. An sH structure can be maintained even after combustion in a coal-fired power plant by forming an sH gas hydrate using a formation promoter according to an embodiment of the present invention, so that a carbon dioxide capturing process can be repeated, and carbon dioxide can be captured to be contained up to about 95% in a mixed gas containing nitrogen and carbon dioxide.
Patent KR-20210099403-A (KR)
Title: Apparatus of transfering semiconductor single crystal ingot
Inventor: CHEONG IN SEOP
IPC: C30B35/00
Filed: 2020-02-04
Abstract: The present invention relates to an apparatus of transferring semiconductor single crystal ingot, capable of aligning and transporting a semiconductor single crystal ingot in a desired crystal direction. An apparatus of transferring semiconductor single crystal ingot, according to an embodiment of the present invention, comprises: a plurality of rollers rotating in an axis parallel to a height direction of a column of the cylindrical semiconductor single crystal ingot and supporting the semiconductor single crystal ingot in contact with a cylindrical side surface of the semiconductor single crystal ingot; a distance sensor installed at a location spaced apart by a predetermined distance from the semiconductor single crystal ingot supported by the plurality of rollers to detect a distance from the semiconductor single crystal ingot; and a controller configured to align the semiconductor single crystal ingot by rotating the plurality of rollers based on a distance signal detected by the distance sensor to rotate the semiconductor single crystal ingot.
Patent KR-20210101386-A (KR)
Title: Short Distance Target Checking Method In Laser Sensor of Transceiving and receiving monolithic Type and System Thereof
Inventor: JUNGWOO BAIK
IPC: G01J1/44
Filed: 2020-02-08
Abstract: According to the present invention, a short-distance target position detection method in a transmission/reception-integrated laser sensor includes: generating, by a transmission pulse driving unit of the transmission/reception-integrated laser sensor, a transmission pulse based on a trigger signal, and emitting the generated transmission pulse to a monitoring region via a laser diode; transmitting, by the transmission pulse driving unit, the generated transmission pulse to a firmware module; generating, by the firmware module, a virtual transmission triangle wave based on a width of the received transmission pulse; receiving, by a reception pulse sensing unit of the laser sensor, a reception pulse received after being reflected by a target located in the monitoring region through a photodiode; transmitting, by the reception pulse sensing unit, the received reception pulse to the firmware module; generating, by the firmware module, a virtual reception triangle wave based on a width of the received pulse; calculating, by the firmware module, a pulse width difference during td by comparing the transmission triangle wave and the reception triangle wave with each other; and calculating a distance to the target based on the pulse width difference. Accordingly, the distance to the target is easily obtained without using an expensive switching control element.
Patent KR-20210102749-A (KR)
Title: Method and Apparatus for Selecting Uplink Path in Mobile Communication Network
Inventor: LEE DEOK HUI
IPC: H04W40/36
Filed: 2020-02-12
Abstract: The present embodiment provides a communication terminal, which comprises: a signal receiving unit for receiving a specific signal from a base station; a first information calculating unit configured to calculate first information based on the specific signal; an uplink path selecting unit for selecting an uplink path of the communication terminal according to the first information; and an uplink information transmitting unit for transmitting information on the uplink path to the base station. The first information is at least one of a movement speed of the communication terminal, transmission delay information of the specific signal, and an attenuation degree of the specific signal. According to the present embodiment, when the uplink path is changed, there is an effect of minimizing occurrence of a transmission delay or communication disconnection problem between the base station and the terminal.
Patent KR-20200019653-A (KR)
Title: Electronic system driving distributed file system using different types of storage mediums, and data storing method and managing method thereof
Inventor: LEE JAEHWAN
IPC: G06F15/16
Filed: 2020-02-13
Abstract: The present invention provides an electronic system including a plurality of data nodes each including at least one between a first storage medium and a second storage medium operating slower than the first storage medium, and storing a piece of data in at least one between the first storage medium and the second storage medium. In the electronic system, a plurality of copies of an activated piece of data are stored in two or more data nodes among the plurality of data nodes, a fast copy among the plurality of copies of the activated piece of data is stored in the first storage medium of a first data node among the plurality of data nodes, and one or more slow copies among the plurality of copies of the activated piece of data are stored in the second storage medium of one or more data nodes other than the first data node among the plurality of data nodes. According to the present invention, data stored in a distributed file system can be efficiently managed and accessed.
Patent KR-20210104482-A (KR)
Title: Extremely low temperature camera assembly
Inventor: JO EUN AH
IPC: H04N5/225
Filed: 2020-02-17
Abstract: The present invention relates to a camera assembly for cryogenic use. The camera assembly for cryogenic use includes: an outer case having an outer window on one side and exposed to the outside; an inner case provided inside the outer case and provided with an inner window at a position corresponding to the outer window and spaced apart from the outer case by a predetermined distance; an elastic member provided between the outer case and the inner case; a camera module provided inside the inner case; and a control board controlling the inner state of the outer case and the inner case.
Patent KR-20200110175-A (KR)
Inventor: JANG JAE YOUNG
IPC: H01L35/24
Filed: 2020-02-20
Abstract: The present invention relates to an organic thermoelectric material and, more particularly, as a composite consisting of a thermoplastic elastomer, a conjugated polymer, and a dopant, to an organic thermoelectric material which comprises a nanostructure formed by self-assembly of the conjugated polymer doped in a thermoplastic elastomer matrix, and a manufacturing method thereof. The organic thermoelectric material has excellent thermoelectric properties, self-healing properties and elasticity.
Patent KR-20200024182-A (KR)
Title: Method for providing rural tour service
Inventor: PARK YONG CHAN
IPC: G06Q30/02
Filed: 2020-02-21
Abstract: Provided is a method for providing a rural tourism service, capable of providing a plurality of rural tour courses and rural experiences. The method for providing a rural tourism service comprises the steps of: receiving a tour course from a server; activating account information; providing a first place and a mission at the first place; receiving a mission performance result; changing the account information; and providing a second place and a mission at the second place.
Patent KR-20210108071-A (KR)
Title: Inflatable helmet
Inventor: KIM JAE WOOK
IPC: A42B3/04
Filed: 2020-02-25
Abstract: The present invention relates to an air inflatable portable safety helmet which is unfolded by air blowing with a mouth to protect the head of a bicycle rider, and discharges the air after use and is folded to be easily carried and stored.
Patent KR-20200104246-A (KR)
Inventor: SAUERTEIG FRANK
IPC: G08C17/02
Filed: 2020-02-25
Abstract: The present invention relates to a sensor unit. The sensor unit (2) includes: a hydraulic housing (4) including a fluid inlet (10), a fluid outlet (12) and a fluid duct (16) between the fluid inlet (10) and the fluid outlet (12), wherein the fluid inlet (10) and the fluid outlet (12) comprise quick couplings; and a sensor housing (6) storing a sensor element (8), and attached to the hydraulic housing (4) such that the sensor element (8) is allocated to the fluid duct (16), wherein the sensor housing (6) is mounted in the hydraulic housing (4) to be separable therefrom, and includes a plug connection part (40) into which a plug element (38) can be inserted, and which enables the transmission of a signal of the sensor element (8). Therefore, the sensor unit is capable of reducing manufacturing costs by eliminating the need for the embedment of terminal contact parts.
Patent KR-20210109715-A (KR)
Title: Manufacturing method of display apparatus
Inventor: BANG KI HO
IPC: H01L51/52
Filed: 2020-02-27
Abstract: According to one embodiment of the present invention, a manufacturing method of a display device comprises the following steps of: forming a thin film transistor on a substrate and forming a planarization layer covering the thin film transistor; forming a pixel electrode electrically connected to the thin film transistor and a pixel defining film exposing at least a central portion of the pixel electrode on the planarization layer; and forming at least one groove having a closed curve shape at a position corresponding to a second non-display area. The manufacturing method of the display device forms a voltage line together at a position corresponding to a first non-display area when the thin film transistor is formed and removes the planarization layer together at a corresponding position between a pad area and a display area when the at least one groove is formed, thereby preventing damage to an exposed voltage line.
Patent KR-20210110044-A (KR)
Title: Mass production method for cronobacter sakazakii bacteriophage
Inventor: SUNG SIK YOON
IPC: C12M1/33
Filed: 2020-02-28
Abstract: The present invention relates to a method for mass production of bacteriophages, specifically Chronobacter sakazakii bacteriophages, and more specifically to the method of the present invention, which comprises a two-stage self-cycling (TSSC) process and thus can set an optimal time of bacteriophage inoculation and harvest by adding a nutrient medium necessary for culturing Chronobacter sakazakii at the beginning of the process, and measuring a pH change of the culture medium, thereby simply and continuously mass-producing high-concentration bacteriophages compared to a conventional process.
Patent KR-20210113823-A (KR)
Title: Alternator of load setting for each pedal angle in electric bicycle, and control method thereof
Inventor: HONG KYUNG HO
IPC: B62M6/90
Filed: 2020-03-09
Abstract: The present invention relates to a method and an apparatus for setting a load of an alternator for charging an electric bicycle battery. According to the present invention, the torque applied to the pedal is analyzed for each angle of the pedal, and according to the analysis result, the optimal power generation load for power generation for each angle of the pedal is set so that the battery can be charged within maximum efficiency even if a user rotates the pedal with the same force. The alternator for an electric bicycle according to the present invention comprises: a sensor unit for measuring the angle and torque of the electric bicycle pedal; a load setting unit for adjusting the power generation load applied to the pedal; and a control unit that determines the power generation load for each angle of the pedal differently according to the angle and torque value of the pedal by receiving an input from the sensor unit, and sets the power generation load for each angle of the pedal through the load setting unit.
Patent KR-20200115139-A (KR)
Inventor: NAKAYAMA TAKAHIRO
IPC: G03F7/16
Filed: 2020-03-11
Abstract: The present invention relates to an imprinting method in which a mold is brought into contact with an imprinting material disposed on a underlying layer on a substrate, and the imprinting material is cured to obtain a cured product to which a shape of the mold is transferred. In addition, the imprinting method includes the steps of: adjusting the position of the mold and the substrate while the mold and the underlying layer of the substrate are in contact with the imprinting material; measuring the in-plane distribution of shear force generated during the position adjustment; and determining application conditions of the underlying layer based on a measurement result.
Patent KR-20210052146-A (KR)
Title: an ecofriendly bio-plastic using a jellyfish and the ecofriendly bio-plastic
Inventor: LEE SU JI
IPC: C08J3/075
Filed: 2020-03-12
Abstract: The present invention relates to a method for preparing an eco-friendly bioplastic, and more particularly, to a method for preparing an eco-friendly bioplastic by extracting collagen from jellyfish and an eco-friendly bioplastic thereby. The present invention provides a method for preparing an eco-friendly bioplastic by using jellyfish, which comprises: a process of extracting collagen from jellyfish (step 1); a process of gelatinizing the jellyfish collagen extracted from the above (step 2); and a process of solidifying the jellyfish gelatin obtained from the above into plastic (step 3). In addition, the present invention provides a method for preparing an eco-friendly bioplastic by using jellyfish, wherein the process of gelatinizing jellyfish collagen (step 2) is performed by a process of mixing jellyfish collagen, natural additives and water, in which the natural additives are a composition having agar, sugar and cellulose mixed therein; and the process of solidifying jellyfish gelatin into plastic (process 3) comprises: a process of forming a first layer of jellyfish gelatin plastic by spraying or applying a thin layer of jellyfish gelatin to a mold for molding (process 3-1); a process of forming a second layer of jellyfish gelatin plastic layer by spraying or applying a thin layer of jellyfish gelatin on the first solidified jellyfish gelatin plastic layer (process 3-2); and a process of repeating a process of forming several layers of jellyfish gelatin plastic layer by the same method as a process of forming a first layer of jellyfish gelatin plastic (process 3-3). In addition, the present invention provides an eco-friendly bioplastic manufactured by the above method.
Patent KR-20210116084-A (KR)
Title: Smartphone accessory
Inventor: SHIN SEUNG CHEOL
IPC: H04M1/21
Filed: 2020-03-17
Abstract: Provided is a smartphone accessory, which includes: a base module forming a first magnetic coupling unit attached to one side of the smartphone, and providing a coupling force by magnetic force, and a first physical coupling unit providing a physical coupling force; and a holder module or a case module forming a second magnetic coupling unit coupled to the base module and coupled by a magnetic force to the first magnetic coupling unit, and a second physical coupling unit having a shape corresponding to the first physical coupling unit and being physically shape-matched with the first physical coupling unit.
Patent KR-20210117615-A (KR)
Title: The apparatus for power line tunnel and the control method thereof
Inventor: HYUN SEUNG YOON
IPC: H02G9/10
Filed: 2020-03-19
Abstract: The present invention relates to an underground power tunnel monitoring system and method, and more specifically, to an underground power tunnel monitoring system and method, which can add a fire extinguisher condition monitoring device to a temperature data collection device connected to a power tunnel, and integrate a method for checking the operation state of a fire extinguisher to reduce signal line installation cost and material cost, and to simultaneously monitor a plurality of fire extinguishers. The underground power tunnel monitoring system includes: a contact signal input unit for measuring the contact state of a bimetal sensor; a state monitoring processing unit for storing and managing the contact state measured by the contact signal input unit; a state information communication unit for transmitting the contact state stored in the state monitoring processing unit; a temperature measuring unit; a measurement data processing unit; a measurement information communication unit; and a communication processing unit.
Patent KR-20210117828-A (KR)
Title: wafer for measuring plasma condition
Inventor: BAE JEONG WOON
IPC: H05H1/00
Filed: 2020-03-20
Abstract: The present invention relates to a wafer for monitoring a semiconductor process. Specifically, the present invention relates to a wafer for measuring plasma that measures a state of the plasma, wherein the invention the characterized in being configured with: a wafer main body formed by coupling a lower part first wafer and an upper part second wafer and having a work space therein; a substrate equipped with the work space formed inside of the wafer main body; and a plasma sensor formed on the substrate within the work space to measure a state of the plasma. Therefore, the present invention is capable of allowing the state of the plasma (uniformity or density and the like) to be measured.