baber/WOPTO huggingface dataset:
Patent JP-2004271166-A (JP)
Title: Refrigeration air conditioning system and its operation method
Inventor: YAMASHITA KOJI
IPC: F25B1/00
Filed: 2003-12-08
Abstract: <P>PROBLEM TO BE SOLVED: To provide a refrigeration air conditioning system requiring a small space and having simple construction permitting stable operation and reducing energy without using wasteful energy in any operating condition, and its operating method.  <P>SOLUTION: The refrigeration air conditioning system comprises a first heat exchanger for heat exchange between room-temperature air and a first refrigerant, a second heat exchanger for heat exchange between low-temperature air and a second refrigerant, a third heat exchanger where refrigerants are heat exchangeable with each other passing through mutually independent flow paths, a first flow path connected to the first heat exchanger and a second flow path connected to the second heat exchanger, and a bypass flow path provided in the second flow path for bypassing the second refrigerant to the third heat exchanger.  <P>COPYRIGHT: (C)2004,JPO&NCIPI
Patent JP-2005172321-A (JP)
Title: High humidity storage apparatus
Inventor: KAWAKADO SAKICHI
IPC: F25D17/06
Filed: 2003-12-09
Abstract: <P>PROBLEM TO BE SOLVED: To secure high humidity and to perform efficient humidification and cooling.  <P>SOLUTION: This high humidity storage apparatus 10 is basically composed of: an auger type ice machine 11 for making compressed ice; an ice storing room 12 storing the compressed ice made by the ice machine 11; and a refrigerating room 13 where cold water stored in the ice storing room 12 is circulated and supplied. A spray pump 28 sucking cold water stored in the interior is disposed in the ice storing room 12, whereby cold water sucked in the pump 28 is sprayed through a spraying pipe 30 disposed on the upper side in the interior of the ice storing room 12 to the compressed ice. The ice storing room 12 is provided with a circulating pump 34 disposed to suck cold water stored in the interior, and the cold water sucked in the pump 34 is supplied to a space formed in the interior of the refrigerating room 13. The air in the refrigerating room comes into contact with the cold water flowing down through the space to thereby cool and humidify the interior of the room.  <P>COPYRIGHT: (C)2005,JPO&NCIPI
Patent JP-2005169461-A (JP)
Title: Method for manufacturing extremely low carbon steel plate for galvanizing having excellent surface property
Inventor: NAKAMOTO TAKEHIRO
IPC: B21B45/00
Filed: 2003-12-11
Abstract: <P>PROBLEM TO BE SOLVED: To provide a method for manufacturing an extremely low carbon steel plate for galvanizing having excellent surface property in which a bamboo grass leaf pattern on a surface of a galvanized steel plate is eliminated, very small scale flaws on the surface of a steel plate for plating are extinguished, and the productivity of a hot rolling line of the steel plate for plating is enhanced.  <P>SOLUTION: In a method for manufacturing a very low carbon steel plate for galvanizing by hot-rolling a steel slab, (a) the steel slab heated at a temperature > 1,180°C and ≤ 1,220°C is roughly rolled to form a steel plate, (b) the steel plate is coiled and uncoiled, (c) the uncoiled steel plate is heated, and (d) the heated uncoiled steel plate is subjected to finish-rolling.  <P>COPYRIGHT: (C)2005,JPO&NCIPI
Patent JP-2005171922-A (JP)
Title: Variable valve mechanism
Inventor: KISHITANI TAKAO
IPC: F01L13/00
Filed: 2003-12-12
Abstract: <P>PROBLEM TO BE SOLVED: To provide a variable valve mechanism in which a lift can be continuously changed by a simple mechanism.  <P>SOLUTION: The variable valve mechanism comprises a rocker arm 3 swinging with rotation of a cam 2, and a valve 4 provided at one end of the rocker arm 3, and opened/closed by swing of the rocker arm 3. The rocker arm 3 is supported by a fixed shaft 5 for fixing a position in the orthogonal direction to the rocking movement of the rocker arm 3, and a variable shaft 6 provided movably in the orthogonal direction to the rocking movement of the rocker arm 3. The variable shaft 6 is inserted in a slot 8 for the variable shaft 6 extending in the orthogonal direction to the rocking movement for the rocker arm 3. The variable shaft 6 is provided with a variable-shaft-moving means which allows the variable shaft 6 to move in the slot 8.  <P>COPYRIGHT: (C)2005,JPO&NCIPI
Patent JP-2005173369-A (JP)
Title: Method for removing resist pattern
Inventor: ONISHI HIROYUKI
IPC: G03F7/26
Filed: 2003-12-12
Abstract: <P>PROBLEM TO BE SOLVED: To provide a method for removing a chemically amplified positive resist composition having heat resistance.  <P>SOLUTION: As the chemically amplified positive resist composition, a composition prepared by dissolving (A) an alkali-soluble resin having a hydroxyl group in a side chain, (B) a photoacid generating agent and (C) a compound expressed by general formula (I) in an organic solvent is used. In formula (I), R<SP>1</SP>represents an alkylene group or a group having a specified structure. The method includes a heat treating step of heat treating the resist at 150 to 400°C between a step of forming a resist pattern and a step of peeling the resist pattern.  <P>COPYRIGHT: (C)2005,JPO&NCIPI
Patent JP-2005178940-A (JP)
Title: Tower crane stand and tower crane supporting method
Inventor: ONO HIDEO
IPC: E04G21/16
Filed: 2003-12-17
Abstract: <P>PROBLEM TO BE SOLVED: To provide a tower crane stand capable of being used without dimension change or reinforcement of a beam material constituting a building skeleton, and a tower crane supporting method.  <P>SOLUTION: This stand 22 is provided with a stand body 30 for supporting a mast 10, a leg 40 protruding to a side part from the stand body 30, a hinge 50 for turnably connecting the leg 40 with respect to the stand body 30, and an attachment member 60 supporting the leg 40 respectively and attached to a pillar 101 of the building skeleton 100.  <P>COPYRIGHT: (C)2005,JPO&NCIPI
Patent JP-2004195647-A (JP)
Title: Device and method for measuring polishing amount of liquid crystal display panel
Inventor: HAN-JUN CHUU
IPC: C03B33/02
Filed: 2003-12-17
Abstract: <P>PROBLEM TO BE SOLVED: To provide device and method for measuring polishing amount of a liquid crystal display panel which decides a polishing defective by measuring polishing amount of upper surface and lower surface edge parts of a unit liquid crystal display panel.  <P>SOLUTION: This device comprises a polishing part 110 for polishing the upper surface and lower surface edge parts of the unit liquid crystal display panel 100, a first camera 120 for photographing a polishing surface of the upper surface edge part of the unit liquid crystal display panel 100, and a second camera 130 for photographing a polishing surface of the lower surface edge part of the unit liquid crystal display panel 100.  <P>COPYRIGHT: (C)2004,JPO&NCIPI
Patent JP-2005179813-A (JP)
Title: Wall paper and method for producing the same
Inventor: IKEDA HIDEKI
IPC: D06N7/00
Filed: 2003-12-18
Abstract: <P>PROBLEM TO BE SOLVED: To provide wall paper having high processability and workability, emitting no endocrine-disruptive substances and maintaining its long-term aesthetic property with weatherability.  <P>SOLUTION: The wall paper consists of a laminate composed of a polyolefin laminate lining paper layer, a water-repellent pulp fiber nonwoven fabric layer 0.05-0.3 g/cm<SP>3</SP>in bulk density and a surface nonwoven fabric layer with printability, wherein these three layers are mutually hot-melt bonded. The wall paper has an uneven pattern formed by heat embossing on the surface nonwoven fabric layer side.  <P>COPYRIGHT: (C)2005,JPO&NCIPI
Patent JP-2005182359-A (JP)
Title: Method for designing data processor and recording medium
Inventor: OTSUKI NORIMASA
IPC: G06F11/26
Filed: 2003-12-18
Abstract: <P>PROBLEM TO BE SOLVED: To provide a method for designating a data processor for easily performing function correction related with data transmission/reception with a bus at the time of evaluating system performance.  <P>SOLUTION: This method for designing a data processor having a plurality of circuit modules connected to a bus is configured to model functions obtained by the circuit modules, and to evaluate this by using API functions(DataRead, DataWrite) for descriptions for performing data transmission/reception to the bus in program descriptions for evaluation to model the functions. In this case, the API functions are provided with variables made common by a plurality of types of bus specifications. The API functions are made common by the plurality of types of bus specifications so that even when the bus of the connection destination of the circuit module for obtaing the modeled functions is changed, or even when the functions are obtained by software or hardware, it is not necessary to perform the correction/change of the program description for evaluation.  <P>COPYRIGHT: (C)2005,JPO&NCIPI
Patent JP-2005177072-A (JP)
Title: Drum type washing machine
Inventor: HONDA KUNIOKI
IPC: D06F39/14
Filed: 2003-12-18
Abstract: <P>PROBLEM TO BE SOLVED: To securely prevent a foreign material such as a coin from slipping out of a drum into an outer tub through a gap between lids and cover which covers a link body interlocking two forward and backward lids for opening/closing a drum opening.  <P>SOLUTION: A rib 221 is installed upright toward the drum inside from the link body cover 220. In the portion where the rib 221 cannot be formed in proximity to a side edge end of lid 204, a recess 222 is provided on the inner wall surface of the link body cover 220 to avoid the range where the front lid sinks when the drum lid opens. The coin P which happens to enter into the space between the rib 221 and a gap 215, is prevented from proceeding further or changes the direction by being caught on a step in the periphery formed by the recess 222. Therefore, the coin P is prevented from going approximately perpendicular to the gap 215 and coming out through the gap 215.  <P>COPYRIGHT: (C)2005,JPO&NCIPI
Patent JP-2004146057-A (JP)
Title: Semiconductor device, semiconductor device system, and digital delay circuit
Inventor: KAWASAKI KENICHI
IPC: H03K5/135
Filed: 2003-12-18
Abstract: <P>PROBLEM TO BE SOLVED: To realize a semiconductor device in which timing is adjusted so that data are outputted with the prescribed phase for an external clock independently of dispersion of characteristics, temperature variation, and power source voltage variation.  <P>SOLUTION: This device has a clock input circuit 13 receiving an external clock, a delay circuit 31 delaying an input by the prescribed delay time and outputting a data output timing signal having the prescribed phase for the external clock, a data output circuit 14 outputting data in accordance with the data output timing signal, a phase comparing circuit 33 having a first node coupled to the clock input circuit and a second input node coupled to the data output circuit, comparing two signals, and controlling a delay time of the delay circuit in accordance with the compared result, and a dummy data generating circuit generating dummy data varied periodically between a high level and a low level and supplying it to the data output circuit.  <P>COPYRIGHT: (C)2004,JPO
Patent JP-2005178160-A (JP)
Title: Image forming condition correction method and image forming device
Inventor: YOSHIDA FUMIAKI
IPC: H04N1/00
Filed: 2003-12-19
Abstract: <P>PROBLEM TO BE SOLVED: To recognize an abnormality in an optical system of an image forming device.  <P>SOLUTION: A first density correction procedure 16-1 corrects detected density value characteristics to a gradient by using a prescribed arithmetic formula on the basis of a detected density value to the gradient of a prescribed test patter printed, a second density correction procedure 16-2 reprints a test pattern on the basis of the result of the correction, and normalizes the result of the reprinting by a reference density in percentage of a 100% gradient in reference gamma characteristics, a measured gamma characteristics computation procedure 16-3 obtains an integrated density value from a first gradient to a second gradient by computing the measured gamma characteristics, a both gamma characteristics comparison procedure 16-4 compares both the gamma characteristics with each other and an alarm generation procedure 16-5 generates a warning when a difference of a prescribed amount or larger is recognized between the gamma characteristics.  <P>COPYRIGHT: (C)2005,JPO&NCIPI
Patent JP-2005179838-A (JP)
Title: Nonwoven fabric for electrical insulation and method for producing the same, prepreg, laminated sheet and printed circuit board
Inventor: NODA MASAYUKI
IPC: D21H13/24
Filed: 2003-12-22
Abstract: <P>PROBLEM TO BE SOLVED: To improve moisture resistance and heat resistance of an insulation layer retaining a thermosetting resin in a nonwoven fabric for electrical insulation by making a hygroscopic property of the nonwoven fabric for electrical insulation containing a wholly aromatic polyester fiber small.  <P>SOLUTION: The nonwoven fabric for electrical insulation is a nonwoven fabric of wholly aromatic polyester fiber, in which a phenol resin cured film is formed by treating the fiber surface with a resol phenolic resin. A water-soluble low-molecular weight resol phenolic resin having many residual methylol groups is preferably used as the resol phenolic resin. A nonwoven fabric having the sufficiently cured film is impregnated with an epoxy resin and the nonwoven fabric is heat/pressure molded to provide a laminated sheet or an insulation layer of a printed circuit board.  <P>COPYRIGHT: (C)2005,JPO&NCIPI
Patent JP-2005178703-A (JP)
Title: Glassrun channel assembly
Inventor: KANEHARA OSAMU
IPC: B60J5/04
Filed: 2003-12-24
Abstract: <P>PROBLEM TO BE SOLVED: To provide a glassrun channel assembly to be mounted along the window frame of a vehicle and guide the sliding motion of a window pane, capable of reducing the dislocation or vibration of the window pane or preventing it from dislocation or vibration originating from the vehicle vibrations etc. when the window pane is in the half-open condition.  <P>SOLUTION: Sub-glassrun channels 23 protruding toward the center of the opening in the window frame 12 are installed integrally on the inside and outside of the vehicle in that part of each front glassrun channel 19 to be mounted at the bottom or in its neighboring part of an inclined window frame part 17, and each sub-glassrun channel 23 is furnished with a dislocation restricting part 39 to restrict dislocation of the window pane 14 nearer the center of the opening in the window frame 12 than the front glassrun channel 19. Even if the window pane 14 is in the half-open condition and the inclined part 14c of the window pane 14 has slipped off from a seal lip of the front glassrun channel 19, dislocation or vibration of the window pane 14 can be reduced or precluded from both the inside and outside of the vehicle by the dislocation restricting part 39 of the sub-glassrun channel 23 on the inside and outside of the vehicle.  <P>COPYRIGHT: (C)2005,JPO&NCIPI
Patent JP-2004216886-A (JP)
Title: Easily releasable laminated film
Inventor: KOIKE HIROSHI
IPC: B32B27/00
Filed: 2003-12-24
Abstract: <P>PROBLEM TO BE SOLVED: To provide an easily releasable laminated film; which is excellent in water resistance and release initiation, and mild in curl of a collected base layer after release; and further has an information hiding function to conceal the information on the back of substrate, together with an information recognition function to recognize the information on the back of substrate after release; when used as the substrate for a delivery slip, application seal, coupon, or the like.  <P>SOLUTION: The easily releasable laminated film comprises at least two stacked layers, that is, a base layer (A) comprising a thermoplastic resin composition and a releasable layer (B). A test film (200mm length × 50mm width) comprising the laminated film stands at 60mm or lower in modulus of curl height after one minute or more from release.  <P>COPYRIGHT: (C)2004,JPO&NCIPI
Patent JP-2005191097-A (JP)
Title: Semiconductor package
Inventor: TSUTSUI KAZUOMI
IPC: H01L23/36
Filed: 2003-12-24
Abstract: <P>PROBLEM TO BE SOLVED: To obtain a semiconductor package having an excellent heat-dissipating efficiency regarding the surface mounting type semiconductor package.  <P>SOLUTION: In the semiconductor package wherein a semiconductor element is loaded on the lands of a pair of top-face electrodes mounted on the main surface of a ceramic board, at least one via 11c or 11d is formed near both lands of the electrodes 12a ad 13a, respectively, and conductive metallic films 14 are formed on the internal surfaces of the vias 11c and 11d while the conductive metallic films 14 are connected to the electrodes 12a and 13a and a pair of underside electrodes 12c and 13c formed on the reverse surface on the reverse side of the main surface of the ceramic board 11, respectively.  <P>COPYRIGHT: (C)2005,JPO&NCIPI
Patent JP-2005189357-A (JP)
Title: Image control method, image forming apparatus, program, and recording medium
Inventor: GOMI FUMIMITSU
IPC: G03G15/00
Filed: 2003-12-24
Abstract: <P>PROBLEM TO BE SOLVED: To provide an accurate image control method which is frequently executable and saves man-hours.  <P>SOLUTION: A paper passing operation is started (S31), currently set maximum exposure is performed in a prescribed non-image forming area, and a potential is detected by a potential sensor (S32). It is judged whether or not a difference of ≥10 V exists between the detected potential and V<SB>H</SB>(the surface potential of a photoreceptor) at a 1st control (S33). When the difference of ≥10 V exists, a signal is correlated to a laser output capable of attaining V<SB>H</SB>set at the 1st control (S34). In the case of forming the final image in the job, the potential setting is returned to that at the 1st control (S36), and the control is finished. Since V<SB>H</SB>returns to the original potential before the following job at the stage when the final image formation is finished in the continuous job with short fluctuation of the V<SB>H</SB>, the potential setting is returned to that obtained at the 1st control.  <P>COPYRIGHT: (C)2005,JPO&NCIPI
Patent JP-2005191980-A (JP)
Title: Data processor and image forming apparatus
Inventor: UEDA TADASHI
IPC: G06F12/14
Filed: 2003-12-25
Abstract: <P>PROBLEM TO BE SOLVED: To provide a data processor and an image forming apparatus capable of protecting information relevant to data to be treated.  <P>SOLUTION: When a print job is received through a communication IF (S31: YES), the received print job is developed to print data (S32). When storage of the print data is instructed by the print job (S33: YES), it is judged whether or not a processing mode of the image forming apparatus is a security mode (S35), image data included in the print data and management information generated from instruction information regarding print processing are encrypted by an encryption circuit and stored in a filing area and a filing data management table, respectively (S36, S37). Then, when execution of the print processing is instructed (S40: YES), the print processing is executed (S41).  <P>COPYRIGHT: (C)2005,JPO&NCIPI
Patent JP-2005194298-A (JP)
Title: (meth)acrylic resin composition
Inventor: SAKAMOTO HIDEYUKI
IPC: C08F285/00
Filed: 2003-12-26
Abstract: <P>PROBLEM TO BE SOLVED: To provide an acrylic or a methacrylic resin composition scarcely discoloring with suppressed thermal deterioration during processing which cannot be obtained by an acrylic or a methacrylic resin composition containing an acrylic or a methacrylic resin produced by conventional suspension polymerization.  <P>SOLUTION: The acrylic or methacrylic resin composition comprises 100 pts. wt. of methyl methacrylate polymer prepared by carrying out the suspension polymerization of 50-100 wt.% of methyl methacrylate and 50-0 wt.% of a monomer copolymerizable therewith, 1-200 pts. wt. of a copolymer having a multilayered structure and 0.02-10 pts. wt. of a fatty acid metal salt.  <P>COPYRIGHT: (C)2005,JPO&NCIPI
Patent JP-2005093412-A (JP)
Title: Cooling system for fuel cell vehicle and its cooling pipe
Inventor: JEONG LIM HO
IPC: H01M8/04
Filed: 2003-12-26
Abstract: <P>PROBLEM TO BE SOLVED: To provide a cooling system of a fuel cell vehicle having a compact size by integrating a cooling system for a accumulator and a cooling system for a fuel cell stacks without the deterioration of performance.  <P>SOLUTION: The cooling system for a fuel cell vehicle includes a fuel gas system passage for supplying fuel gas to fuel cell stacks and exhausting the fuel gas from the fuel cell stacks through a fuel gas accumulator; an air system passage for supplying air to the fuel cell stacks and exhausting the air from the fuel cell stacks through the air accumulator; and a cooling water circulation line for supplying cooling water to the fuel cell stacks, the fuel gas accumulator and the air accumulator using pressure produced with a pump and cooling the cooling water collected through a radiator.  <P>COPYRIGHT: (C)2005,JPO&NCIPI
Patent JP-2004535918-A (JP)
Title: センターピースを有するフィルタエレメント及び方法
IPC: B01D46/10
Filed: 2002-05-30
Abstract: フィルタエレメント（１０）に用いられるコア構造（２０）は、第１の端部及び反対側の第２の端部を含み、壁を有する管状部材を含む。第１の端部は、フィルタエレメントと共に利用されるフレーム（２８）などの構造と係合するのに適合している。第２の端部もハンドル（２２）などの外部構造と係合自在である。フィルタエレメント（１０）は、コア構造の周囲に媒体構造（１４）を巻き付けることにより構造されるのが好ましい。媒体構造（１４）は、コア構造の周囲に巻き付けられてコイル状構造（２４）を形成する、平坦なシートが取付けられた波形シートを含む。コイル状構造（２４）は入口溝及び出口溝を含む。フィルタエレメントを使用し、組み立てるための方法は、ここで説明するようにコア構造を使用するのが好ましい。 【選択図】図２
Patent JP-2005514907-A (JP)
Title: 腫瘍形成性の診断及び抗癌療法に対する耐性の決定
IPC: C12Q1/02
Filed: 2002-06-14
Abstract: 腫瘍形成性を診断するため及び癌患者が抗エストロゲン薬療法の薬理学的作用に対して耐性があるか否かを決定するための方法ならびにキット。PCDGF（GP88）成長因子のレベルの上昇は、腫瘍形成性及び抗エストロゲン薬療法の薬理学的作用に対する耐性を示す。本発明の方法及びキットは、患者から得た生物学的サンプルの腫瘍形成性を評価するため、及びその患者が抗エストロゲン薬（タモキシフェンを含む）療法の候補であるか否かを決定するために、有用である。
Patent JP-2004534233-A (JP)
Title: 改良された集積回路用バーンイン方法及び装置
IPC: G01R31/26
Filed: 2002-06-27
Abstract: オンボードの温度検知回路を有する集積回路（ＩＣ）のような電子コンポーネントのバーンインを実行する改善された方法は、より高い箱入れの分割（ビンスプリット）を得るために使用される。本実施の形態によれば、温度の設定値がそれぞれのＩＣにロードされる。ＩＣが一定の高温に維持される間、バーンインシステムは、設定値を超えたかを判定するためにそれぞれのＩＣをチェックする。設定値を超えた場合、その設定値によりＩＣを特徴付けし、設定値を超えていない場合、その設定値をデクリメントして再びチェックする。本方法は、全てのＩＣが特定の設定値に特徴付けされるまで続く。本方法の結果として、それぞれのＩＣについて接合部温度が取得される。さらに、それぞれのＩＣについてバーンイン時間のリアルタイムでの予測値が取得される。これにより、バーンイン時間を調節して、バーンインのスループットを最適にすることができる。改善されたＩＣ用バーンインを実現するための装置も記載される。
Patent JP-2005510262-A (JP)
Title: パイロット用のマルチフェースヘッドセット
IPC: B64D13/00
Filed: 2002-05-31
Abstract: 航空機乗組員用のマルチフェースヘッドセット（５０）が与えられる。該ヘッドセット（５０）は、マウンティングアセンブリ（５２）により使用者（６０）の頭部上に保持される膨張可能なガスマスクユニット（５４）およびバイザユニット（５６）を含む。また、包括的なヘッドセット（５０）は選択的に、および／または自動的に動作可能な動力およびコントロールアセンブリ（６０）を含む。好ましくは、マウンティングアセンブリ（５２）は、マスクユニット（５４）およびバイザユニット（５６）が使用者の頭頂部の近くにあるように、ヘッドセット（５０）を使用者の頭部上に配置させる１組のイアピース（６２、６４）およびストラップアセンブリ（６６）を含む。緊急事態の際、マスクユニット（５４）は下げられ、マスク本体（１２４）は、使用者（６０）に呼吸用のガスを供給するため、膨張される。また、バイザユニット（５６）は、マスクユニット（５４）直上の使用位置に下げられてもよい。空気駆動の、または電動の動力およびコントロールアセンブリ（６０）は、マスクユニット（５４）およびバイザユニット（５６）をその収縮された位置および装備された位置間で移動するよう作用する。煙の侵入を防止するため、マスクユニット（５４）およびバイザユニット（５６）の上縁部および下縁部に沿って、物理的なシールまたはエアカーテン通路（１４４、２８６）が与えられてもよい。
Patent JP-2005520782-A (JP)
Title: 向上した水溶解度を有するアミド含有化合物およびアミド含有化合物の水溶解度を向上させる方法
IPC: A61K31/496
Filed: 2002-07-12
Abstract: 本発明は、向上した溶解度を有する新規アミド含有化合物およびアミド含有化合物の溶解度を向上させる方法に向けられる。本発明のアミド含有化合物はオキサゾリジノン化合物を含み、これらのオキサゾリジノン化合物のバイオアベイラビリティーを溶解度の向上によって向上させる。   本発明は、概略的には、向上した水溶解度を有するアミド含有化合物およびアミド含有化合物の水溶解度を向上させる方法に関し、より詳しくは、向上した水溶解度を有するオキサゾリジノン化合物およびオキサゾリジノン化合物の水溶解度を向上させる方法に関する。
Patent JP-2005518087-A (JP)
Title: Ｂｐｓｇ膜のｃｖｄの為の方法
IPC: H01L21/3105
Filed: 2002-07-23
Abstract: イン・シトゥーで安定した高濃度シリコンボロンリンガラス膜を半導体ウェーハ又は基板上に形成する為の方法および装置。実施形態において、当該方法は、基板をチャンバ内に提供することにより開始する。該方法は、シリコン源、酸素源、ボロン源、リン源をチャンバ内に提供し、高濃度シリコンボロンリンガラス層を基板上に形成することにより、継続する。当該方法は、更に、当該基板上に形成された高濃度シリコンボロンリンガラス層をリフローすることを含む。