Patent SG-11201910199Y-A (SG)
Title: Image based substrate mapper
Inventor: PEH ENG SHENG
IPC: H01L21/66
Filed: 2018-04-23
Abstract: INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property Organization International Bureau (43) International Publication Date 08 November 2018 (08.11.2018) WIPO I PCT mu °million VIII ooIIIVIII 010VIIIo iflo oimIE (10) International Publication Number WO 2018/204109 Al (51) International Patent Classification: HOlL 21/67 (2006.01) HOlL 21/677 (2006.01) HO1L 21/66 (2006.01) (21) International Application Number: PCT/US2018/028825 (22) International Filing Date: 23 April 2018 (23.04.2018) (25) Filing Language: English (26) Publication Language: English (30) Priority Data: 62/500,873 03 May 2017 (03.05.2017) US 15/958,327 20 April 2018 (20.04.2018) US (71) Applicant: APPLIED MATERIALS, INC. [US/US]; 3050 Bowers Avenue, Santa Clara, California 95054 (US). (72) Inventors: PEH, Eng Sheng; Block 436, Jurong West Ave 1, #08-454, Singapore 640436 (SG). BALAKRISHNAN, Karthik; Hillside, Nookampalayam Village, Sithaala- pakkam, Post, Perumbakkam Road, OMR, Chennai 600126 (IN). THIRUNAVUKARASU, Sriskantharajah; 54 Can- berra Drive, Unit 07-25, Singapore 768440 (SG). (74) Agent: TABOADA, Alan et al.; MOSER TABOADA, 1030 Broad Street, Suite 203, Shrewsbury, New Jersey 07702 (US). (81) Designated States (unless otherwise indicated, for every kind of national protection available): AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (84) Designated States (unless otherwise indicated, for every kind of regional protection available): ARIPO (BW, GH, (54) Title: IMAGE BASED SUBSTRATE MAPPER 0 1 0 108 122 132 ^ 126 104 125 102 134 — ^112 124 \-- Th 1 116 10 118 ^114 130 128 120 106 W O 20 18/ 20 4109 Al FIG. 1 (57) : Methods and apparatus for detecting warpage in a substrate are provided herein. In some embodiments, a warpage detector for detecting warpage in substrates includes: one or more light sources to illuminate one or more substrates when present; a camera for capturing images of exposed portions of one or more substrates when present; a motion assembly having a mounting stage for supporting the camera; and a data acquisition interface (DAI) coupled to the camera to process substrate images and detect warpage of substrates based upon the processed substrate images. [Continued on next page] WO 2018/204109 Al MIDEDIMOMMIDIIMERIHNONHEMIECIONVOIMIE GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG). Published: — with international search report (Art. 21(3))