Patent SG-11201804654W-A (SG)
Title: Apparatus for holding substrate
Inventor: WANG HUI
IPC: C25D17/06
Filed: 2015-12-04
Abstract: INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property -' Organization International Bureau res., 00) (43) International Publication Date .... ..sr.) 8 June 2017 (08.06.2017) W I P0 1 PCT ID Hit (10) 11111111 WO Ill International 11111 III IIIII II 2017/092029 10 111111111 Publication III III III IIII Al Number RIO IIII IIIIIIII (51) International Patent Classification: Road, Zhangjiang High-tech Park, Shanghai 201203 (CN). C25D 17/06 (2006.01) WANG, Jian; Bld. 4, No. 1690 Cailun Road, Zhangjiang High-tech Park, Shanghai 201203 (CN). (21) International Application Number: PCT/CN2015/096402 (74) Agent: SHANGHAI PATENT & TRADEMARK LAW OFFICE, LLC; 435 Guiping Road, Shanghai 200233 (22) International Filing Date: (CN). 4 December 2015 (04.12.2015) (25) Filing Language: English (81) Designated States (unless otherwise indicated, for every kind of national protection available): AE, AG, AL, AM, (26) Publication Language: English AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, (71) Applicant: ACM RESEARCH (SHANGHAI) INC. DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, [CN/CN]; Bld. 4, No. 1690 Cailun Road, Zhangjiang HN, HR, flU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, High-tech Park, Shanghai 201203 (CN). KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, (72) Inventors: WANG, Hui; Bld. 4, No. 1690 Cailun Road, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, Zhangjiang High-tech Park, Shanghai 201203 (CN). JIA, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, Zhaowei; Bld. 4, No. 1690 Cailun Road, Zhangjiang High- SD, tech Park, Shanghai 201203 (CN). YANG, Hongchao; TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. Bld. 4, No. 1690 Cailun Road, Zhangjiang High-tech Park, (84) Designated States (unless otherwise indicated, for every Shanghai 201203 (CN). WU, Jun; Bld. 4, No. 1690 Cailun kind of regional protection available): ARIPO (BW, GH, [Continued on next page] (54) Title: APPARATUS FOR HOLDING SUBSTRATE : An for holding (57) apparatus a substrate (113) 103 has a chuck cup (101), a seal shell (111), a chuck plate (102) and a vertical driving device (103). The seal shell 100 (111) has a bottom wall (1111), an outer wall (1112) and an inner wall (1114). The inner wall (1114) foiins a lip seal portion (1115). The bottom wall (1111) and the outer wall (1112) of the seal shell (111) respectively wrap the bottom ' • 4 the the base surface and outer surface of portion (1011) of 4., 104 the chuck cup (101). The lip seal portion (1115) wraps the (1014) the (101) for supporting portion of chuck cup seal- ing the edge of the front side of the substrate (113). The ap- paratus protects the edge of the front side of the substrate, the back side of the substrate and the chuck cup from con- , tatting with the electrolyte solution. 0 , 'At - ars Ni ti p. 101 Il .4t 102 C\ N 0 N CT\ o it -- ,-, 0 N FIG 1 1012 O WO 2017/092029 Al IMEDIMOMMIONMEHMEMONIMMUMNIE GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, TJ, TM), European (AL, AT, BE, BG, CH, CY, KZ, CZ, RU, DE, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG). DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, Published: LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, — with international search report (Art. 21(3))