Patent SG-11201808029Q-A (SG)
Title: Method and apparatus for verification of tdlas system operation
Inventor: GILTNER DAVE
IPC: B01D53/34
Filed: 2017-03-21
Abstract: INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property -, Organization 111111110111101110101011111 HO 11111 01E3 1110110101111110111111111011110111111 International Bureau ... .... ..Yjd ...... ... (10) International Publication Number (43) International Publication Date WO 2017/180297 Al 19 October 2017(19.10.2017) WIPO I PCT (51) (21) (22) (25) (26) (30) (71) (72) International Patent Classification: (81) Designated States (unless otherwise indicated, for every GO1N 21/39 (2006.01) BOlD 53/74 (2006.01) kind of national protection available): AE, AG, AL, AM, BOlD 53/34 (2006.01) BOlD 53/94 (2006.01) AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BOlD 53/56 (2006.01) F23N 5/00 (2006.01) BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, International Application Number: HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, PCT/US2017/023392 KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, International Filing Date: MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, 21 March 2017 (21.03.2017) NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, Filing Language: English TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, Publication Language: English ZA, ZM, ZW. Priority Data: (84) Designated States (unless otherwise indicated, for every 62/321,634 12 April 2016 (12.04.2016) US kind of regional protection available): ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, Applicant: ZOLO TECHNOLOGIES, INC. [US/US]; TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, 331 S. 104th Street, Suite 100, Louisville, Colorado 80027 TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, (US). DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, Inventors: GILTNER, Dave; 3177 Westwood Ct., LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, Boulder, Colorado 80304 (US). SAPPEY, Andrew D.; SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, 1845 Tabor Street, Lakewood, Colorado 80215 (US). GW, KM, ML, MR, NE, SN, TD, TG). Agents: BRATSCHUN, Thomas D. et al.; Swanson & Published: Bratschun, L.L.C., 8210 Southpark Terrace, Littleton, Col- — with international search report (Art. 21(3)) orado 80120 (US). (74) Title: METHOD AND APPARATUS FOR VERIFICATION OF TDLAS SYSTEM OPERATION (54) -`) 1-1 IN ei © 0 1-1 1:' (57) ----- lasing 1-1 C Bragg , tion Light Input Light Output FBG IN sorption N quency while passing a remainder of the beam. The remainder of the beam has an FBG transmission spectrum mimicking the absorp - ,7 1 1 . 9 Outputs the Fig. 1 : Sensing of gas species characteristics within a process chamber includes selectively projecting a beam of a first select frequency therethough. The beam is optically coupled to a detector to detect a process transmission spectrum having an ab - dip at a select lasing frequency caused by a gas species characteristic. The beam is selectively projected through a fiber grating which is formed in an optical fiber core to partially reflect at least a portion of the beam of the first select lasing fre - dip at or near the select lasing frequency caused by a gas species characteristic of interest. It is optically coupled the detector. of the detector are monitored to compare the FBG transmission spectrum to any process transmission spectrum produced in process chamber.