Patent SG-11201804177W-A (SG)
Title: Robot arm for transporting semiconductor substrates
Inventor: WANG HUI
IPC: H01L21/683
Filed: 2015-11-20
Abstract: INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property - Organization International Bureau (43) International Publication Date ..... .....r ...) 26 May 2017(26.05.2017) WIPO I PCT (10) WO International 111111111111311111111111111111111111111111111111111111111111111111111311111111111111111 2017/084079 Publication Al Number (51) International Patent Classification: (81) Designated States (unless otherwise indicated, for every HO1L 21/677 (2006.01) HO1L 21/683 (2006.01) kind of national protection available): AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, (21) International Application Number: BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, PCT/CN2015/095089 DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, (22) International Filing Date: HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, 20 November 2015 (20.11.2015) KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, (25) Filing Language: English PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, (26) Publication Language: English SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (71) Applicant: ACM RESEARCH (SHANGHAI) INC. [CN/CN]; Bld. 4, No. 1690 Cailun Road, Zhangjiang (84) Designated States (unless otherwise indicated, for every High-tech Park, Shanghai 201203 (CN). kind of regional protection available): ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, (72) Inventors: WANG, Hui; Bld. 4, No. 1690 Cailun Road, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, Zhangjiang High-tech Park, Shanghai 201203 (CN). WU, TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, Jun; Bld. 4, No. 1690 Cailun Road, Zhangjiang High-tech DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, Park, Shanghai 201203 (CN). FANG, Zhiyou; Bld. 4, No. LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, 1690 Cailun Road, Zhangjiang High-tech Park, Shanghai SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, 201203 (CN). GW, KM, ML, MR, NE, SN, TD, TG). (74) Agent: SHANGHAI PATENT & TRADEMARK LAW Published: OFFICE, LLC; 435 Guiping Road, Shanghai 200233 — with international search report (Art 21(3)) (CN). (54) Title: ROBOT ARM FOR TRANSPORTING SEMICONDUCTOR SUBSTRATES 300 301 303b 3021 -4, 1Zirl 1. o 0 r 1-1 302 303c .4t 303a 01 IC - - 0 71. FIG 4 GC (57) : A robot arm (300, 400, 500, 600) for transporting semiconductor substrates (304, 404) comprises a body portion C (301, 401, 501, 601), an end portion (302, 402, 502, 602) extending from the body portion (301, 401, 501, 601), a plurality of vacu - IN um cups disposed on the end portion (302, 402, 502, 602), and a plurality of vacuum lines connecting to the plurality of vacuum 1-1 O cups respectively. The distance between any two adjacent vacuum cups satisfies the following condition: a vertical displacement of el the semiconductor substrate (304, 404) produced by one of the two adjacent vacuum cups sucking down the semiconductor substrate 0 is greater than a warpage of the semiconductor substrate (304, 404) in the range of the two adjacent vacuum cups, so that once the ,-t one of the two adjacent vacuum cups sucks the semiconductor substrate (304, 404), the other vacuum cup of the two adjacent vacu - .,- um cups is followed to suck the semiconductor substrate (304, 404).