Patent SG-11201811297Y-A (SG)
Title: Methods for polymer coefficient of thermal expansion (cte) tuning by microwave curing
Inventor: OW YUEH SHENG
IPC: H01L21/02
Filed: 2017-06-06
Abstract: INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property 11111 IOU 011101 HOE 010 1111 1 001011101110111101 HOME MAMIE Organization International Bureau (10) International Publication Number (43) International Publication Date .....0\"\"\" WO 2017/222800 Al 28 December 2017 (28.12.2017) WIP0 I PCT — (51) (21) (22) (25) Filing Language: (26) (30) (71) (72) International Patent Classification: (74) Agent: TABOADA, Alan et al.; MOSER TABOADA, HO1L 21/324 (2006.01) H01L 21/02 (2006.01) 1030 Broad Street, Suite 203, Shrewsbury, New Jersey International Application Number: 07702 (US). PCT/US2017/036045 (81) Designated States (unless otherwise indicated, for every International Filing Date: kind of national protection available): AE, AG, AL, AM, 06 June 2017 (06.06.2017) AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, English DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, Publication Language: English HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, Priority Data: MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, 62/352,005 19 June 2016 (19.06.2016) US PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, 15/451,603 07 March 2017 (07.03.2017) US SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. Applicant: APPLIED MATERIALS, INC. [US/US]; 3050 Bowers Avenue, Santa Clara, California 95054 (US). (84) Designated States (unless otherwise indicated, for every kind of regional protection available): ARIPO (BW, GH, Inventors: OW, Yueh Sheng; Blk 452, Yishun Ring Road, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, #12-150, Yishun 760452 (SG). WANG, Rui; 10 Science UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, Park Road, #01-018B The Alpha, Singapore Science Park2, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, Singapore 117684 (SG). KOH, Tuck Foong; Block 523, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, Jurong West Street 52 #06-237, Singapore 940523 (SG). MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, WANG, Xin; 250 Lorong Chuan, #04-06, Singapore TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, 556748 (SG). KM, ML, MR, NE, SN, TD, TG). = = Title: METHODS FOR POLYMER COEFFICIENT OF THERMAL EXPANSION (CTE) TUNING BY MICROWAVE _ 100 F (54) CURING = = = = = APPLY VARIABLE FREQUENCY MICROWAVE ENERGY --- 102 TO A SUBSTRATE TO HEAT THE POLYMER LAYER AND THE SUBSTRATE TO A FIRST TEMPERATURE = = = = 7 = = ADJUST THE VARIABLE FREQUENCY MICROWAVE - 104 ENERGY TO INCREASE THE TEMPERATURE OF THE POLYMER LAYER AND THE SUBSTRATE TO A SECOND TEMPERATURE TO CURE THE POLYMER LAYER FIG. 1 : Methods of curing polyimide to tune the coefficient of thermal expansion are provided herein. In some embodiments, method of curing a polymer layer on a substrate, includes: (a) applying a variable frequency microwave energy to the substrate to the polymer layer and the substrate to a first temperature; and (b) adjusting the variable frequency microwave energy to increase temperature of the polymer layer and the substrate to a second temperature to cure the polymer layer. = _ 1-1 © © GC ei ei ei ---- (57) IN ,1 a 0 heat \" a [Continued on next page] WO 2017/222800 Al MIDEDIMOMMIDIRMEMEEHOHOUNIMOVOIMIE Published: — with international search report (Art. 21(3))