baber/WOPTO huggingface dataset:
Patent KR-20150016720-A (KR)
IPC: H01L51/50
Filed: 2013-08-05
Abstract: The present invention relates to an adhesive and a display device including the same, the adhesive comprising 50-80 parts by weight of a binder; 10 parts by weight of a cross-linking monomer; 5-9 parts by weight of a plasticizer; and 1-3 parts by weight of an initiator. In the present invention, the adhesive is used in display devices thereby preventing the creation of sliding and stain and easily performing border-less type display devices.
Patent KR-20150019070-A (KR)
IPC: G01N35/08
Filed: 2013-08-12
Abstract: The present invention relates to a biosensor capable of recognizing the position of a fluid and a method for recognizing the position of a fluid using the same. In particular, a pressure barrier part for imparting a pressure barrier to a fluid on a channel where the fluid flows is included. Accordingly, a change in air pressure in the channel is measured so that the position of the fluid can be recognized. By means of the present invention, without existing electrode modules or optical modules, the position of a fluid can be recognized in multiple sites only with one pressure sensor.
Patent KR-20140055959-A (KR)
Title: Antibiotic composition containing antibiotic microbial fermented extracts
Inventor: HWANG SEUNG JIN
IPC: A61K35/74
Filed: 2013-08-12
Abstract: The present invention relates to an antibacterial composition comprising a fermented culture of Paenibacillus kribbensis and a cosmetic composition comprising the same as an antibacterial component. The present invention relates to an antibacterial composition comprising the fermented culture of Paenibacillus kribbensis having antibacterial ability and, more specifically, to an antibacterial composition, especially for cosmetic contaminants, comprising the fermented culture of Paenibacillus kribbensis separated from the soil, and a cosmetic composition comprising the same. The fermented culture of Paenibacillus kribbensis according to the present invention executes a broad antibacterial spectrum for various bacteria, and thus, the antibacterial composition and the cosmetic composition comprising the same can be valuably used in the cosmetic field with sterilization, antibiotic, and antiseptic purposes.
Patent KR-20140041330-A (KR)
Title: Ｉｔｏ 분말 및 그 제조 방법
Inventor: YONEZAWA TAKEHIRO
IPC: B22F9/06
Filed: 2013-08-12
Abstract: 낮은 압력으로 압분체로 했을 때에 높은 도전성을 나타내는 표면 개질한 ITO 분말을 제공한다. 
본 발명의 표면 개질한 ITO 분말은, 이 ITO 분말로 이루어지는 압분체에 0.196 ∼ 29.42 MPa 의 압력을 가했을 때의 상기 압분체의 체적 저항률을 Y 로 하고 상기 압분체의 상대 밀도를 X 로 하는 경우, 상기 체적 저항률과 상기 상대 밀도의 관계가 Y=aX n  로 근사되고, a 가 5.0 × 10 -3  이하이며, 또한 n 이 -10 이상이다.
Patent KR-20140041331-A (KR)
Title: Ito powder and method of producing same
Inventor: YONEZAWA TAKEHIRO
IPC: B22F9/06
Filed: 2013-08-12
Abstract: ITO powder compacts has lower volume resistivity than existing ITO powder compact without post-processing in a powder state. ITO powder according to the present invention has a lattice strain in a range of 0.2 to 0.8 which is obtained by making a lattice constant, a crystallite size and a lattice strain precise based on diffraction lines obtained by filling a sample holder, which is attached to an X-ray diffraction device, with a sample of ITO powder and irradiating the sample with X-rays in a range that 2 theta = 15 to 90 degrees. [Reference numerals] (AA) Volume resistivity[廓cm]; (BB) Reciprocal of lattice deformation
Patent KR-20150021162-A (KR)
Inventor: PARK SUNG HO
IPC: G06Q30/02
Filed: 2013-08-19
Abstract: The purpose of the present invention is to have advertisement and marketing effects increasing the direct utilization rates of affiliated company of each community via the following steps of: installing multi-fields communities interested in various fields online; casting affiliated companies related to each of the fields; recruiting users through advertisement activities of affiliated companies and various communities; developing each community using affiliated companies of each community of recruited users and sharing information; and enabling users to have interests and information across the multi-fields communities. By using the content of the multi-fields communities and visiting notes of affiliated companies, social web type social commerce can be manufactured. Additionally, partial of the profits gained through this can be given to the users as compensation for the production of content of each community, thereby facilitating the content production and utilization rates across the fields of communities, resulting in an increase in the advertisement effects of affiliated companies in each community.
Patent KR-20150022277-A (KR)
Inventor: KIM YANG HO
IPC: E01H1/00
Filed: 2013-08-22
Abstract: Disclosed is a road cleaning vehicle. The road cleaning vehicle is a road cleaning vehicle for collecting non-point pollutant materials. The disclosed road cleaning vehicle comprises a stacking box where the non-point pollutant materials are collected and stored; an inlet pipe which sucks the non-pollutant materials by being connected to the stacker box; and a non-pollutant material purifying device which sucks and filters the non-pollutant materials by being connected to the inlet pipe. The non-pollutant material purifying device comprises a case; a lifting unit installed in the case; filter members which filter the non-pollutant materials through multiple steps by being installed to be lifted up and down by the lifting unit; a door installed on side of the case in order to put the filter members in or out of the case; and a purified water discharging unit for discharging the purified water purified by the filter members to the outside of the case.
Patent KR-20150022325-A (KR)
Inventor: GWON HYE BIN
IPC: A46B5/06
Filed: 2013-08-23
Abstract: 본 발명은 손가락이 불편한 장애인이 용이하게 파지하는 장애인용 칫솔을 제공함에 그 목적이 있다. 
 상기 목적을 이루고자 본 발명은 칫솔에 있어서, 칫솔모(1)와 일측으로 연장되는 나사산 돌출부(2)와; 상기 나사산 돌출부(2)와 결합되는 나사산 수용부(3)와; 상기 나사산 수용부(3)와 일측으로 탄성소재 또는 고무재질을 사용하는 손잡이(4)가 형성되며, 손잡이(4) 내부 철심을 내장한 것을 특징으로 하는 장애인용 칫솔이다. 
본 발명의 효과로는 칫솔모와 손잡이 부분이 탈,부착이 가능하며, 손잡이 내부에 구비된 철심으로 사용자의 손가락 구조에 맞는 양치질을 하는 효과를 얻을 수 있다.
Patent KR-20150022384-A (KR)
Inventor: KANG SUNG KU
IPC: G06F3/041
Filed: 2013-08-23
Abstract: The present invention relates to a touch screen system. According to an embodiment of the present invention, the touch screen system includes: multiple driving electrodes which are connected to multiple driving lines to be disposed in a first direction and the multiple driving lines, respectively; multiple sensing electrodes which are connected to multiple sensing lines to be disposed in a second direction which is crossed with the first direction, and the multiple sensing lines, respectively, and which are disposed alternatively not to be overlapped with the multiple driving electrodes; first connection patterns which are patterned to have an individual pattern of an upper layer of the driving electrodes and are connected electrically to the driving electrodes; second connection patterns which are formed to be integrated with the sensing electrodes on the same layer and are connected electrically to the sensing electrodes; pressurizing devices which are formed on the second connection patterns; and an insulating film which is formed between the pressurizing devices and the first connection patterns.
Patent KR-20140060453-A (KR)
Title: Electronic signature apparatus and method
Inventor: MOON YOUNG CHUL
IPC: G06Q40/02
Filed: 2013-09-25
Abstract: The present invention relates to an electronic signature device. The electronic signature device according to the embodiment of the present invention improves the reliability of an electronic signature by including a signature unit which generates an electronic signature of a signer for an electronic document and an authenticating unit which authenticates the signer for the electronic document.
Patent KR-20150034529-A (KR)
IPC: G06F17/00
Filed: 2013-09-26
Abstract: Disclosed are an apparatus and a method for providing recommendation information using a content use history under an N-screen environment. The apparatus for providing recommendation information according to the present invention comprises: a history receiving part receiving use history information of target content, which is transmitted by at least one terminal device; a preference determining part determining a preference type of the target content based on the use history information; and a recommendation information providing part providing recommendation information including the preference type to the terminal device of a recommendation target person.
Patent KR-20150035049-A (KR)
IPC: F23N1/00
Filed: 2013-09-27
Abstract: The present invention relates to a fuel oil supply apparatus for a vessel boiler, comprising: a plurality of fuel oil tanks; a fuel oil pump; a first fuel oil supply line disposed between the fuel oil tank and the fuel oil pump; a second fuel oil supply line disposed between a fuel oil mixing pipe and the fuel oil pump; a fuel oil collection line disposed between each boiler and the fuel oil mixing pipe; and a pipe resistance control unit disposed on the fuel oil mixing pipe and the second fuel oil supply line to maintain the pipe resistance of the first and second fuel oil supply lines at the same level. Therefore, fuel oil can be stably supplied to a boiler through each fuel oil supply line, and damage to the fuel oil pump can be prevented as air flows into the fuel oil pump.
Patent KR-20150035065-A (KR)
IPC: G09F9/35
Filed: 2013-09-27
Abstract: The present invention is to provide a display which has the superior color reproduction property of green and red colors by using fluoride phosphor. A display device according to an embodiment of the present invention includes an LED package including a light emitting device, a wavelength conversion member which converts the wavelength of light emitted from the light emitting device, and a light guide plate which reflects, refracts and scatters light of converted wavelength. The wavelength conversion member includes fluoride phosphor and hardening resin.
Patent KR-20150040417-A (KR)
IPC: A61K9/70
Filed: 2013-10-07
Abstract: The present invention relates to a portable ion introducing system using a mask pack, comprising a current conduction part which is formed on one side of the portable ion introducing device to be connected to metal where a disposable mask pack is connected to the ion introducing device with use of a pair of pincers, thereby introducing ions to skin by holding the current conduct part when users wear the mask pack, so skin effect in an efficient manner is provided for users in a simple structure.
Patent KR-20150041237-A (KR)
IPC: H01L21/3065
Filed: 2013-10-07
Abstract: The present invention relates to the inductively coupled plasma processing apparatus. It includes the chamber body in whose upper side the upper opening part is formed; more than one main dielectric to open the above upper opening part in the way to form the processing space with the above chamber body; the substrate supporting device to support the substrate as installed at the above chamber body; the gas spraying part to spray the gas into the above processing space; the main antenna part to form the main induction field in the above processing space as installed in the upper side of the above main dielectric; more than one side dielectric to open more than one side opening individually to be formed in the side of the above chamber body; the side antenna part to form the side induction field in the above processing space as installed facing the above processing space based on the above side dielectric.
Patent KR-20150053494-A (KR)
Title: Group type hybrid suction foundation having variable blade and skirt and method for constructing thereof
Inventor: JEE SUNG HYUN
IPC: E02D7/20
Filed: 2013-11-08
Abstract: The present invention is a group type-hybrid suction foundation having variable blades and a skirt and a constructing method of the same, wherein blades and a skirt part are properly arranged according to a state of a submerged ground to be firmly penetrated into the submerged ground to be supported. A group type-hybrid suction foundation according to an embodiment of the present invention, which is penetrated into a submerged ground to be fixed, includes: a gravity mat receiving concrete inside thereof: a plurality of suction buckets, which have each upper surface coupled to a lower surface of the gravity mat, have each hollow interior, and have each opened lower surface; a skirt part extending downward from a boundary of the gravity mat to increase a section to be penetrated into the submerged ground; outer blades, which protrude from each side surface of the plurality of suction buckets and have each one surface coupled with a lower surface of the gravity mat to reinforce coupling between each of the plurality of suction buckets and the gravity mat; and at least one supporting blade, which has one side surface coupled to a side surface of a first suction bucket arbitrarily selected of the plurality of suction buckets and the other side surface coupled to a second suction bucket adjacent to the first suction bucket.
Patent KR-20150055967-A (KR)
Inventor: KIM SUNG HEE
IPC: H02G3/36
Filed: 2013-11-14
Abstract: The present invention relates to a cable installation structure and a cable installation method for a passenger public area of a passenger ship and, more particularly, to a cable installation structure and a cable installation method for a passenger public area of a passenger ship, capable of improving workability by directly installing a cable on a ceiling panel support. In the cable installation method for the passenger public area of the passenger ship according to the present invention, a plurality of through holes formed on the same positions of a first surface and a second surface and an angle for a ceiling panel which includes an attachment surface formed on the first surface or the second surface are attached on a horizontal square pipe included on the ceiling panel. The cable is fixed to the angle.
Patent KR-20150062472-A (KR)
Inventor: KIM MIN CHANG
IPC: G11C7/22
Filed: 2013-11-29
Abstract: The present invention comprises: a data strobe domain block composed to generate array data by arranging data and using an external data strobe signal; a clock domain block composed to record write data on a memory block in response to an input clock signal; a data latch unit composed to latch the array data according to a domain crossing control signal, and to output the same as the write data; and a domain crossing control unit composed to generate the domain crossing control signal based on a timing of the external data strobe signal and an internal data strobe signal.
Patent KR-20150065986-A (KR)
Inventor: KEUM KI SUB
IPC: B60W50/02
Filed: 2013-12-05
Abstract: The present invention relates to an electronic control unit to detect a breakdown of a motor position sensor. The present invention provides an electronic control unit to detect the breakdown of a motor position sensor comprising: a steering angle information receiving part for receiving, from a steering angle sensor placed on an input axis, steering angle information which is information on an absolute rotation angle of the input axis with respect to a steering axis including the input axis, an output axis, and a torsion bar connected to one end of the input axis and one end of the output axis; a steering torque information receiving part to receive, from a torque sensor, steering torque information including a relative rotation angle of the input axis and the relative rotation angle of the output axis; a motor axis rotation angle information receiving part to receive, from a motor position sensor, motor axis rotation angle information which is information on the rotation angle of the motor axis of an electric motor mechanically connected to the steering axis; and a sensor breakdown detecting part to detect whether or not the motor axis rotation angle information is normal, using the steering angle information, the steering torque information, and the motor axis rotation angle information.
Patent KR-20150065458-A (KR)
Inventor: CHOI JUNG MIN
IPC: F24H9/00
Filed: 2013-12-05
Abstract: The present invention relates to a structure of connecting an exhaust pipe to a chimney pipe. More specifically, the purpose of the present invention is to solidify a connection state of an exhaust pipe and a chimney pipe while facilitating a connecting and separating operation of the exhaust pipe and the chimney pipe. The present invention comprises: mounting a packing ring (300) on a packing groove (110) formed on one end part of an exhaust pipe (100); inserting the other end part of a chimney pipe (200) into the exhaust pipe (100) having the packing ring (300) mounted on the packing groove (110); installing a ring-shaped sealing band (500) on the connection part of the inserted exhaust pipe (100) and the chimney pipe (200) such that the exterior part of the chimney pipe (200) can be in contact with the packing ring (300); and installing a clamp (400) in the shape of a ring band on the exterior part of the sealing band (500), and tightening the clamp (400) by coupling a coupling bolt (600) to a coupling nut (700).
Patent KR-20150068156-A (KR)
Inventor: KIM YEUN TAE
IPC: G02F1/1368
Filed: 2013-12-11
Abstract: A liquid crystal display according to an embodiment of the present invention comprises: a display part shaped in a rectangular having a pair of longer sides and a pair of shorter sides, and displaying pictures; a substrate including peripheral regions located around the display part; multiple pixels arranged in the form of a matrix in the displaying part; a thin film transistor connected to each pixel; a pixel electrode connected to the thin film transistor; a loop layer facing against the pixel electrode; a fine space arranged between the pixel electrode and the loop layer; and a liquid crystal material injected into the fine space. Each pixel has a rectangular shape having a pair of longer sides and a pair of shorter sides. The longer sides of the pixel and the longer sides of the substrate are parallel, and the shorter sides of the pixel and the shorter sides of the substrate are parallel. The substrate is bent in the direction of the stretched longer sides of the substrate, and an injection hole partitioning the fine space is stretched in the direction of the stretched shorter sides of the substrate.
Patent KR-20150080261-A (KR)
Inventor: KIM JIN AH
IPC: G11C11/406
Filed: 2013-12-31
Abstract: The present invention relates to an active control device and a semiconductor device including the same and in particular, to a technology to control a bank active operation through a common delay unit. The present invention comprises: a refresh control unit for outputting a refresh signal by controlling, upon a refresh operation, a delay time relative to a refresh start time; and a precharge signal generation unit for generating a bank precharge signal for precharging a bank in response to a refresh signal wherein the refresh control unit includes a refresh delay unit for outputting a bank active signal by being delayed for a predetermined time period wherein the refresh delay unit is commonly used by a plurality of banks.
Patent KR-20150079207-A (KR)
Inventor: PARK SANG HUN
IPC: H04N13/04
Filed: 2013-12-31
Abstract: Provided is a stereoscopic image display device capable of improving a moire phenomenon. The stereoscopic image display device includes: a display panel which displays a left-eye image and a right-eye image on one screen, and has a black matrix defining a pixel area; and a barrier panel which transmits the left-eye image and the right-eye image selectively by being arranged on the whole surface of the display panel, and has a number of column spacers overlapped with the pixel area in an irregular pattern. The column spacers are formed to be arranged in diagonal direction.
Patent KR-20140000186-A (KR)
Inventor: DIGRAZIA JENNIFER
IPC: A61K9/70
Filed: 2011-06-28
Abstract: 본 발명은 상처/밴드 보호물과 관련이 있다.   특히 본 발명은 랩, 양말/벙어리 장갑 형태 또는 밴드로 구성되는 상처/밴드 보호물 구성에 관한 것으로, 이는 신축성 재료로 만들어 질 수 있다.   상기 랩은 하나 이상의 체결 스트랩과 제 1 포착 체결면을 갖는다.   상기 양말/벙어리 장갑 형태는 체결 스트랩과 피복부를 갖는다.   상기 랩, 양말/벙어리 장갑, 및 밴드는 개구부와 개구부 커버를 포함한다.   또한, 상처/밴드 보호물과 밴드는 다이아몬드형 또는 상각형 거즈 구성을 갖고, 상기 거즈 패드는 세 개 또는 네 개 의 주요 모서리를 가지며, 상기 거즈 패드의 주요 모서리는 상기 몸체부, 또는 상기 몸체부의 길이 방향 또는 폭 방향의 가장자리를 향해 배치되고, 바람직하게 길이 또는 폭 방향 접선의 중앙점 또는 중앙부 또는 몸체부 가장자리를 향해 배치된다.
Patent KR-20130024971-A (KR)
Inventor: KAIDO KENJI
IPC: H04W4/02
Filed: 2011-06-29
Abstract: 근거리 무선 통신을 이용하지 않고, 동일한 생활권 내에 있는 다른 유저의 존재를 실감할 수 있도록 한다.  복수의 유저 단말기로부터 위치를 취득하는 위치 좌표 수신부(80)와, 주목 유저 단말기로부터 위치를 취득하는 경우에, 복수의 유저 단말기 중, 상기 위치와 복수의 유저 단말기로부터 취득되는 위치에 따른 일부를 선택함과 함께, 선택되는 유저 단말기에 관한 정보를 주목 유저 단말기에 제공하는 근방 유저 배신부(94)를 포함한다.
Patent KR-20130098305-A (KR)
Inventor: PRIEPKE HENNING
IPC: C07D471/04
Filed: 2011-08-19
Abstract: 본 발명은 화학식 I의 화합물, 마이크로솜 프로스타글란딘 E 2  신타제-1(mPGES-1)의 억제제로서의 이들의 용도, 이들을 함유하는 약제학적 조성물 및 염증성 질환 및 관련 상태의 치료 및/또는 예방용 약제로서의 이들의 용도에 관한 것이다. 
화학식 I 
   
상기 화학식 I에서, 
A, M, W, R 1 , R 2 , R 6 ,   R 7 은 본 명세서에 제시된 의미를 갖는다.
Patent KR-20130051491-A (KR)
Inventor: YU XIANG
IPC: H04N7/50
Filed: 2011-09-14
Abstract: 어댑티브 변환 도메인 필터링을 이용하는 데이터 인코딩 및 디코딩 방법들 및 장치들이 개시된다.  인코더는 변환 도메인 예측에 대해서 적용하고자 하는 변환 도메인 필터 계수들의 세트를 결정한다.  필터링은, 일부 경우들에서, 또한 양자화된 변환 데이터 계수들에 대해서 적용될 수 있을 것이다.  프레임-기반, 코딩-유닛-기반, 또는 다른 기반하에서 최적의 필터 계수들을 결정하기 위해서 레이트-왜곡 최적화가 이용될 수 있을 것이다.
Patent KR-20130082158-A (KR)
Inventor: ROHDEN ROLF
IPC: B63H9/02
Filed: 2011-08-31
Abstract: 본 발명은 매그너스 로터에 관한 것으로, 이 매그너스 로터는 매그너스 로터 내부에 배치된 지지부와, 매그너스 로터의 작동시 지지부를 중심으로 회전하는 로터와, 지지부 상에서 로터를 지지하는 베어링과, 가열 공기 형성을 위해 지지부 내에 배치된 가열 장치를 포함한다.  지지부는 외부면에 적어도 하나의 개구를 포함하고, 이 개구는 지지부와 로터 사이의 중간 챔버에 지지부의 내부 챔버를 연결함으로써, 중간 챔버과 내부 챔버 사이로 공기가 통과할 수 있다.
Patent KR-20130081305-A (KR)
Inventor: BUISSETTE VALERIE
IPC: C01B25/45
Filed: 2009-11-18
Abstract: 본 발명은 랍도판 유형 또는 혼합된 랍도판/모나자이트 유형의 결정질 구조를 가지며, 칼륨 함량이 최대 7000 ppm인, 희토류 금속(Ln)이 세륨 및 테르븀으로부터 선택된 적어도 하나의 희토류 금속, 또는 상기 두 가지 희토류 금속 중 적어도 하나와 란탄의 조합을 나타내는 희토류 금속(Ln) 포스페이트에 관한 것이다.  상기 포스페이트는 희토류 클로라이드를 2 미만의 일정한 pH에서 침전시키고 500℃ 미만의 온도에서 하소시킨 후에 고온수에 재분산시킴으로써 수득된다.  또한, 본 발명은 상기 포스페이트를 1000℃ 이상의 온도에서 하소시킴으로써 수득되는 인광체에 관한 것이다.
Patent KR-20130108411-A (KR)
Inventor: COTTERILL PETER C
IPC: H04B7/06
Filed: 2011-11-30
Abstract: 전자 디바이스들은 다수의 안테나를 가질 수 있다.  제1 안테나는 디바이스의 일단에 위치할 수 있고, 제2 안테나는 디바이스의 타단에 위치할 수 있다.  디바이스의 입출력 포트는 외부 장비와 관련된 대응 커넥터를 수용하는 커넥터를 가질 수 있다.  입출력 포트 및 제2 안테나는 전자 디바이스의 양단 중 하나에 위치할 수 있다.  외부 비디오 액세서리와 같은 장비가 사용되는 경우, 전자 디바이스의 입출력 회로는 입출력 포트를 통해 고속 데이터 신호들을 송신할 수 있다.  비디오 데이터 또는 다른 데이터 전송과 같은 입출력 포트에서의 활동의 존재는 전자 디바이스의 제어 회로에 의해 모니터링될 수 있다.  입출력 포트 활동이 검출될 때, 무선 주파수 신호들의 수신 시에 제2 안테나의 사용이 금지될 수 있다.
Patent KR-20130113484-A (KR)
Inventor: OKANO SATOSHI
IPC: B32B27/08
Filed: 2011-11-07
Abstract: 본 발명의 목적은 내구 시험 후의 블로킹과 가요성의 개량을 도모한 하드 코트 필름 및 화상 표시 장치를 제공하는 데 있다.  아크릴 수지계 필름, 폴리프로필렌 수지계 필름, 시클로올레핀 수지계 필름 및 폴리에스테르 수지계 필름으로부터 선택되는 적어도 1종의 기재 필름의 양면에 접착 용이층을 갖고, 상기 접착 용이층의 적어도 한쪽 면에 하드 코트층이 적층된 하드 코트 필름에 있어서, 상기 접착 용이층이 폴리에스테르계 수지, 아크릴계 수지 및 우레탄계 수지로부터 선택되는 적어도 1종을 함유하고, 또한 상기 하드 코트층이 활성 에너지선 경화형 이소시아누레이트 유도체를 함유하는 것을 특징으로 하는 하드 코트 필름.
Patent KR-20130088896-A (KR)
Inventor: KUMON SOICHI
IPC: H01L21/302
Filed: 2011-12-20
Abstract: 본 발명은 표면에 요철 패턴을 갖는 웨이퍼의 제조 방법에 있어서, 패턴 붕괴를 유발하기 쉬운 세정 공정을 개선하기 위한 세정 방법을 제공한다. 
본 발명은 표면에 요철 패턴을 갖는 웨이퍼의 세정 방법으로서, 적어도, 상기 웨이퍼를 세정액으로 세정하는 공정, 세정 후에 웨이퍼의 오목부에 유지된 세정액을 발수성 약액으로 치환하는 공정, 웨이퍼를 건조하는 공정을 갖고, 상기 세정액이, 비점이 55∼200℃인 용매를 80질량％ 이상 포함하는 것이고, 상기 치환하는 공정에 있어서 제공되는 발수성 약액의 온도를, 40℃ 이상, 당해 발수성 약액의 비점 미만으로 함으로써, 적어도 상기 오목부 표면을 발수화시키는 것이다.