baber/WOPTO huggingface dataset:
Patent KR-20030030706-A (KR)
Inventor: YOON CHI SEON
IPC: B27H1/00
Filed: 2001-10-12
Abstract: PURPOSE: Provided are method and equipment for bending wood to form unitary curved wood and apparatus for bending wood for use in the equipment which directly use a material wood to process in a curve type without dividing the material wood to several pieces so that it keeps authentic quality and patterns of the material wood. CONSTITUTION: The wood bending formation system comprises the parts of: a working table(51) on which a wood(W) is put; a fixed frame(52) which is fixed at one side of the working table to match the curve of the wood; a working frame(55) which matches the form of the fixed frame; a first compression cylinder(54) which compresses and moves the working frame to a rear center part of the fixed frame; a second compression cylinder(56) which compresses and moves a compression block(56A) to left side of the fixed frame; a third compression cylinder(57) which compresses and moves a compression block(57A) to right side of the fixed frame; and a steel strip(53) which is placed between the fixed frame and the working frame to surround the wood.
Patent KR-20020040547-A (KR)
Inventor: CHOI SEOK RAK
IPC: E03F7/12
Filed: 2001-10-17
Abstract: PURPOSE: An auto-driving car for driving into underground hidden and/or ground structural pipe passage is provided to measure slope and diameter of the pipe passage at the same time and to conveniently inspect constructional condition and/or maintenance and repairing of the same. CONSTITUTION: The auto-driving car comprises a distributional level measurement portion(2) at one side of a body frame to determine a slope of a pipe passage; a pipe diameter measurement portion(3) at one side of top surface of the frame to correctly determine inner diameter of the pipe passage to identify whether scales are accumulated in the pipe; a driving distance measurement portion(4) to calculate the distance by detecting rotation amount of wheels; a communication portion to transmit measured values to an external computer; a control unit to analyze the measured values, that is, date to be detected and to transfer the analyzed result to the external computer through the communication portion and a first cable.
Patent KR-20030032537-A (KR)
Title: Wiper for vehicles
Inventor: JU JAE U
IPC: B60S1/32
Filed: 2001-10-18
Abstract: PURPOSE: A wiper for a vehicle is provided to prevent damage of a wiper despite applying overpressure to a blade rubber by mounting a pad member in the blade rubber, and to protect the windshield by wiping foreign matters with the pad member. CONSTITUTION: A wiper for a vehicle is composed of a wiper arm turning, and a blade having a rubber(100) hinge-combined with the wiper arm. A pad member(140) is mounted to sides of an inclined surface(120) of the rubber to reduce friction against window glass. The rectangular pad member is mounted along a washing blade(110) of the rubber, and manufactured by flocking cotton of low frictional coefficient. Damage of the wiper is prevented by mounting the pad member in the inclined surface of the blade rubber, and the windshield glass is protected by wiping foreign matters with the soft pad member.
Patent KR-20020094997-A (KR)
Inventor: JUNG HYEON GWON
IPC: G11B20/10
Filed: 2001-10-20
Abstract: PURPOSE: An optical information storage medium in which multi-language web document support information is recorded, a system and a method for reproducing information recorded in the storage medium are provided to offer character information displayed through a web document in multiple languages in an interactive mode. CONSTITUTION: An optical information storage medium includes AV data having audio data or video data, a plurality of web documents displaying the AV data that has been decoded to be reproduced as AV data streams and selectively displaying character information in multiple languages, and multi-language web document support information for displaying a web document corresponding to a selected language. The optical information storage medium further includes navigation data with respect to the AV data. The AV data and navigation data are recorded in a video directory, and the web documents and multi-language web document support information are recorded in an interactive directory.
Patent KR-20010107845-A (KR)
Title: 이동식 오니(汚泥)처리장치
Inventor: PARK CHAN U
Filed: 2001-10-31
Abstract: 본 발명은 상하수도나 하천 등에서 발생되는 오니를 이동가능한 차량을 통해 세정 및 흡인한 다음 탈수하여 최종처리장으로 운반하는 이동식 오니처리장치에 관한 것으로, 하수관에 고압의 물을 분사하여 관벽에 붙은 오니를 박리하거나 세정하기 위한 세정차와, 하수관에 쌓인 오니를 진공흡인함과 더불어 오니에 포함된 협잡물을 걸러내기 위한 트로멜을 구비한 흡인분별차, 흡인분별차에 압송라인을 통해 연결되어 협잡물이 걸러진 오니를 압송받아 이를 탈수하여 반고상의 오니와 물로 분리하기 위한 탈수차 및, 반고상의 오니와 협잡물을 적재하여 최종 처리장으로 운반하기 위한 운반차를 포함하여 이루어져, 최종처리장으로 반입되는 오니량을 줄임으로써 소각처리비용과 운반비용을 줄일 수 있고, 운반 및 소각처리가 간단하며, 흡인오니에 포함된 부피가 큰 협잡물을 걸러내어 오니의 압송 및 탈수를 원활하게 함과 더불어 탈수된 물을 세정작업에 재이용할 수 있도록 한 것이다.
Patent KR-20030038031-A (KR)
Inventor: SHIN MUN SEON
IPC: F24F13/15
Filed: 2001-11-08
Abstract: PURPOSE: An air conditioner is provided to reduce manufacturing cost and to improve productivity of the product. CONSTITUTION: An air conditioner includes a front panel(12) having an outlet(16) formed thereon; a horizontal wind direction control unit(20) and a vertical wind direction control unit(30) installed on the outlet; and a blade supporting part(40) formed integrally with the front panel around the outlet to support the horizontal wind direction control unit and the vertical wind direction control unit to rotate. The horizontal wind direction control unit and the vertical wind direction control unit include a plurality of horizontal blades(21) and vertical blades(31), respectively. The blade supporting part includes an upper side(43), a lower side(44) and both of sides(41,42) formed integrally with each other, and extended from the outlet to the inside to support the horizontal blades and the vertical blades. A plurality of blade joining holes(45,46) are formed on the upper side, the lower side and both of the sides for hinge axes(23,32) of the horizontal blades and the vertical blades to be joined thereto, respectively.
Patent KR-20030041747-A (KR)
Title: Store handphone
Inventor: CHA BYOUNG GUE
IPC: H04B1/38
Filed: 2001-11-21
Abstract: PURPOSE: A small stuff keeping mobile phone is provided to keep a small stuff by utilizing a certain space of a battery portion. CONSTITUTION: A stuff which is requisite but not frequently used is simply kept in a mobile phone, so that the stuff can be taken out for use as necessary by separating a battery of the mobile phone for users' convenience. That is, as the battery is separated, a sponge(3) is attached at a keeping space(4) for the stuff in order to prevent friction or noise possibly caused by collision between the mobile phone and the stuff. After putting the stuff in the keeping space, the battery is attached. Then the mobile phone is used as a stuff keeping mobile phone.
Patent KR-20020009539-A (KR)
Inventor: AHN JAE MIN
IPC: B01D19/00
Filed: 2001-11-28
Abstract: PURPOSE: A liquid/gas separator for landfill leachate is provided, which can separate gas by vacuum and prevent any back flow of leachate by U-type leachate discharge line. Condensate of vacuum device is recycled to the separator, thus prevent effectively overflow of mixed effluent of landfill. CONSTITUTION: The cylindrical liquid/gas separator comprises an inlet of landfill effluent, a partition wall(60) that is set near the inlet to the influent to downward, a gas discharge line(14) set at the top of the separator, a leachate discharge line(13) of U-type set at the side middle and a sludge discharge hole(15) set at the side bottom. Mixed effluent of landfill is fed into the liquid/gas separator through the inlet set at the side top, filtered through basket type filter(51) that is removably set inside the separator and separated into gas and liquid.
Patent KR-20030045881-A (KR)
Title: Method for issuing electronic receipt by dealing of credit card and method for providing search service of dealing list
Inventor: PARK JONG JIN
Filed: 2001-12-03
Abstract: PURPOSE: A method for issuing an electronic receipt and the method for offering a transaction history inquiry service by using the credit card transaction are provided to remove a risk exposing the credit information due to missing a receipt by issuing a financial organization payment request receipt to an affiliated store without issuing a keeping receipt for the affiliated store and the customer. CONSTITUTION: Settlement is carried out by inputting the card information through an affiliated terminal or a POS(Point Of Sale System) terminal(S12). The credit card information and the transaction particulars are transmitted to a manager server and a credit card inquiry company server(S13). It is judged that the card information is agreed with the contents stored in a financial organization server and the card is a normal state(S14). If the card information is right and the card is the normal state, an approval number is obtained by requesting the transaction approval to the financial organization server, and transmits it to the terminal(S15). The information to output one slip is transmitted to the terminal(S16). The approved transaction information is stored in a credit card transaction information database(S17).
Patent KR-20030045959-A (KR)
Title: Fireplace and apparatus for heating using of it
Inventor: PARK KYU YANG
IPC: F24H1/00
Filed: 2001-12-03
Abstract: PURPOSE: A fireplace and heater using the same is provided to use hot-water or heating water by using the heat of the fireplace. CONSTITUTION: A furnace body(210) has a combustion space, and a first passage through which combustion gas is discharged. A heating water tank abuts on the outer wall of the furnace body, and forms a heating water storing space with the outer wall. A water supply pipe(221) supplies heating water to the heating water tank. A discharging pipe(222) discharges the heating water from the heating water tank.
Patent KR-20030046150-A (KR)
Inventor: LEE YONG HWA
IPC: F24F3/06
Filed: 2001-12-05
Abstract: PURPOSE: An outdoor unit of an air conditioner is provided to reduce manufacturing time and cost by integrally forming the partition, bell mouth and the discharge grille into a single unit. CONSTITUTION: An outdoor unit comprises a housing(1) having an inlet port(10) and an outlet port(18); a heat exchanger(13), a blower fan(14) and a compressor(17) mounted within the housing; and a partition(30) for separating the compressor from the heat exchanger and the blower fan in the housing. The partition is formed integrally with a bell mouth(35) and a discharge grille(34) installed in the outlet port of the housing. The front surface of the partition is extended in a horizontal direction so as to correspond to a front plate(2) of the housing, and the rear surface of the partition is extended in a vertical direction from the front surface of the partition so as to separate the compressor from the heat exchanger and the blower fan.
Patent KR-20030046764-A (KR)
Title: Method of manufacturing mirror
Inventor: HONG YUN SIK
IPC: G02B5/00
Filed: 2001-12-06
Abstract: PURPOSE: A method for fabricating a mirror is provided to improve the surface roughness of a mirror side and enhance the reflexibility of the mirror side by performing an additional reflow process such as PSG(Phosphor-Silicate Glass) or BPSG(Boron Phosphorous Silicate Glass). CONSTITUTION: A structure(12) of Si is patterned on a wafer(11). The structure of Si is etched. A thin film(15) having an excellent reflow characteristic is deposited on the etched vertical side of the structure. A reflow process is performed on the deposited side. A mirror film(14) is deposited thereon. The wafer is formed with an SOI(Silicon On Insulator). In addition, the wafer is formed with an SOG(Silicon On Glass). The thin film having the excellent reflow characteristic is formed with a PSG. In addition, the thin film having the excellent reflow characteristic is formed with a BPSG.
Patent KR-20030050060-A (KR)
Title: a method for manufacturing of capacitor of semiconductor device
Inventor: CHOI SEON HO
IPC: H01L27/108
Filed: 2001-12-18
Abstract: PURPOSE: A method for fabricating a capacitor of a semiconductor device is provided to improve capacitance by having a storage electrode pattern formed of a line and a space so that the area of a storage electrode is increased. CONSTITUTION: After the first insulation layer is formed on the first conductive layer, the first insulation layer is selectively etched. A predetermined depth of the first conductive layer is etched by using the first insulation layer as a mask to define an isolation region and a trench region. The second insulation layer(106) is deposited and planarized on the resultant structure. The second insulation layer in the trench region is eliminated. The third insulation layer(108) is formed on the resultant structure. The second conductive layer is formed on the third insulation layer through a planarization process. The second conductive layer is selectively etched.
Patent KR-20030050655-A (KR)
Title: Method for forming contact in semiconductor device
Inventor: AHN MYEONG GYU
IPC: H01L21/28
Filed: 2001-12-19
Abstract: PURPOSE: A method for forming a contact of a semiconductor device is provided to be capable of conserving the aiming degree of planarization of the contact filled in a contact hole when recessing the contact. CONSTITUTION: After depositing an interlayer dielectric(22) on a semiconductor substrate(21), a contact hole is formed by selectively etching the interlayer dielectric for exposing the surface of the semiconductor substrate. A barrier layer(23) made of a TiN layer is deposited along the entire profile of the resultant structure. Then, a metal layer(25) made of a tungsten layer is formed on the resultant structure for completely filling the contact hole. The metal layer is etched until the barrier layer is exposed. After removing the exposed barrier layer, the metal layer is recessed.
Patent KR-20010079571-A (KR)
IPC: A61K31/57
Filed: 1999-07-16
Abstract: 본 발명은 에스트라디올 또는 그의 제약적으로 허용가능한 유도체를 단독으로 또는 게스타겐과 함께 인간 또는 동물피부에 적용시 방출을 조절하기 위한 유효물질 함유 패치에 관한 것으로서, 보강층, 결합된 유효물질 방출에 적당하며 감압성 접착제를 사용함으로서 제조되고 상기 보강층에 연결되는 유효물질 함유용기 및 탈착가능한 보호층으로 구성되며, 상기 감압성 접착제가 물왁스 또는 그이 구성성분 및 산화아연을 함유하는 것을 특징으로 한다.
Patent KR-20010085555-A (KR)
IPC: C07D401/04
Filed: 2000-06-22
Abstract: 본 발명은 일반식(I) 
     
       
     
     [식중，Ar은 인돌 등, R 1 은 수소 등, B는 결합, 또는 B-N-R 1 이 환구조를 형성한 피페리딘 등, n은 0. 1 등, A는 트리메틸렌, 부틸렌 등, Q는 피페리딘, 이소인돌린 등을 나타낸다.]으로 나타내어지는 화합물, 또는 그 약리학적으로 허용되는 산부가염, 및 이들로 이루어지는 아드레날린 α1B수용체 길항약을 제공한다. 본 발명의 화합물은 아드레날린 α1B수용체에 높은 친화성을 갖는 길항약이고, 아드레날린 α1B수용체가 관여하는 질환(예를 들면 고혈압 등)의 예방/치료에 이용하는 의료품으로서, 또는 아드레날린 α1B수용체를 통한 생리작용의 해명을 위한 약리학적 도구로서 유용하다.
Patent KR-20010075009-A (KR)
Title: 배가스 정화용 촉매 구조체 및 장치
IPC: B01J23/22
Filed: 1999-09-09
Abstract: 배가스 유로(流路)내에 설치되고, 고효율의 컴팩트한 배가스 정화장치 제조에 바람직한 배가스 정화용 촉매 구조체를 제공한다. 
     이 촉매 구조체는, 가스유로에서의 배가스의 흐름을 교란시켜 피처리 가스와 촉매간의 접촉을 촉진하도록, 판상 촉매(1)와, 앞면으로부터 뒷면까지 관통하는 다수의 구멍을 가진 선상, 벨트상 혹은 막대상의 금속, 세라믹 혹은 유리로 된 망상물(7)로 구성된 가스분산 부재를 교대로 적층함으로써 제조된다.
Patent KR-20010107952-A (KR)
Filed: 1999-11-09
Abstract: 세탁기(2,300) 또는 세탁물 건조기(200)와 같은 세탁 기기에서 사용자가 세탁물 수용 용기(1,201,301)에 접근하는 것은 기기 캐비닛의 전방에서 밖으로 기울어지거나 또는 슬라이드 되는 구조물(105,205,305)에 용기를 지지함으로써 용이하게 된다.  구조물이 캐비닛으로부터 후퇴될 때 용기 해치(35)는 실질적으로 상부로부터 접근할 수 있게 한다.  바람직하게 용기는 그 축선이 수평방향인 옆으로 향한 또는 "동-서" 방향으로 장착된다.  기기 모터(44/45,210) 제어 시스템은 세탁물 용기(1,201,301)의 회전 위치를 조절함으로써 구조물(105,205,305)이 캐비닛에서 후퇴될 때 진입로는 최상부가 된다.  회전 위치 과정의 일부분으로서 해치(35)는 용기 내부에 접근을 허용하도록 뒤로 미끄러진다.
Patent KR-20010080637-A (KR)
IPC: H01L21/683
Filed: 1999-12-03
Abstract: 본 발명은 정전척의 표면 전위를 효과적으로 제어하는 장치 및 방법에 관한 것이다.  이러한 장치 및 방법은 센서와 제어 회로를 사용한다.  센서는 전계 효과 트랜지스터(FET)에 연결된 척 표면 상의 안테나를 포함한다.  센서는 정전척의 표면 전위와 같은 전기적 특성을 나타내는 신호를 생성한다.  센서 신호는 제어회로에 피드백을 제공한다.  제어 회로는 원하는 값의 표면 전위에 해당하는 예정된 세트포인트와 센서 신호를 비교한다.  제어 회로는 1개 이상의 척 전극에 연결된 전원장치에 제어 신호를 제공한다.  제어 신호는 전원 장치가 센서 신호와 세트포인트 사이의 차가 0이 되도록 표면 전위를 변화시켜 일정한 척 힘을 제공하도록 전극 전압을 변화시킨다.
Patent KR-20010112248-A (KR)
IPC: G02F1/39
Filed: 2000-01-21
Abstract: 본 발명은 물질의 분자의 방위를 변경하기 위해서 이 물질을 빔 조사하는 것으로 구성되는, 중합체 물질에서의 선형 및/또는 비선형 광학특성의 공간적인 분포를 포토그래픽 기록하는 방법에 관한 것이다.  빔 조사는 스캐닝 빔의 전파방향(들)에 대해 수직하거나 경사진 방향이다.
Patent KR-20010105346-A (KR)
IPC: F28F1/12
Filed: 2000-12-13
Abstract: 튜브(111, 121)의 폭방향 단부에서 돌출한 핀의 돌출부(112e, 122e)에 그 일부를 절단하는 일이 없이 핀(112, 122)의 표면적을 증대시킨 파도형상의 요철부(112f, 122f)를 형성한다, 이것에 의하여, 돌출부(112e, 122e)의 선단쪽에 이르는 핀의 열전도 면적을 축소하는 일이 없이, 양 돌출부(112e, 122e)의 표면적을 증대시킬수가 있으므로, 통풍 저항을 저감하면서, 특히, 돌출부(112e, 122e)에 충분한 열량을 전도시킬수가 있다, 따라서, 방열면적의 증대에 걸맞는 방열능력의 향상을 달성할수가 있다.
Patent KR-20020001755-A (KR)
IPC: C02F1/78
Filed: 2000-03-16
Abstract: 부패탱크(20)형태의 오수시스템에 구성된 여과장(40)의 기능은 공기 또는 다른 활성가스를 상기 시스템의 도관(34,56), 예를 들어, 석재충진 통로들내부의 여과시스템 또는 미세구멍의 챔버들내부로 유동시켜 유지되거나 회복된다. 모든 포화토양으로부터 물을 가압하고 토양내에서 소요 호기성 생화학조건을 발생시키기에 충분한 크기로, 도관(34)과 근접한 위치에서 토양(38)을 유동하는 공기 또는 다른 활성가스가 공기유동기(71)에 의해 형성되는 차동압력에 의해 가압된다. 선택적 실시예에 있어서, 도관들이 가압되거나 진공상태로 유지된다. 공기유동처리작업동안 오수시스템을 계속적으로 작동할 수 있고 공기유동을 제어하기 위해 밸브(70) 및 다른 배관장치(68)가 제공된다. 보조파이프장치가 여과장의 통로들과 근접한 위치에 매장되고, 여과장의 도관들 또는 토양을 통해 공기가 유동하도록 가압된다.
Patent KR-20020005644-A (KR)
IPC: G06Q10/06
Filed: 2000-03-30
Abstract: 본 발명은 생산 스케줄을 3차원으로 디스플레이하는 방법에 관한 것이다. 시간 주기는 x축을 따라 표시된다. 각각의 시간 주기 내에서, 가용 능력 직사각형은 상기 시간 주기의 전체 또는 일부 폭을 가지며, 상기 폭은 가용 능력을 상기 시간 주기의 비율로 표현한다. 능력 소비 직사각형은 상기 가용 능력 직사각형 위에 적층되며, 준비 직사각형 및 생산 직사각형을 포함한다. 이들 직사각형의 폭은 소비된 능력의 비율을 표현한다. 생산 직사각형의 높이는 생산량을 표현한다. 비용 직사각형은 상기 능력 소비 직사각형의 전방에 배치될 수 있으며, 상대적인 통화 비용을 표현하는 깊이를 가질 수 있다.
Patent KR-20020030277-A (KR)
IPC: H01J9/24
Filed: 2001-04-02
Abstract: CRT의 또는 CRT 용 콘 부분을 위치 지정시키는 위치 지정 시스템(20)은 직사각형의 한 변의 두 꼭지점에 해당하는 지점에 제 1 및 제 2 위치 지정 수단(22,23)과, 반대편 변의 중간 위치에 제 3 위치 지정 수단(21)을 포함한다. 상기 제 1 및 제 2 수단(22,23)은 안장 모양의 접촉면을 가지는데, 상기 접촉면은 테이퍼드 단부로부터 넓은 단부로의 방향(51)으로는 볼록하고, 상기 직사각형의 중심부를 향해서는 오목하며{곡률 반경(R)}, 상기 제 3 위치 지정 수단(21)의 접촉면은 테이퍼드 단부로부터 넓은 단부로의 방향(51)으로는 볼록하고 상기 위치 지정 수단의 접촉면을 지나는 평면에서는 볼록하거나 평평하다.
Patent KR-20020064149-A (KR)
Title: Efficient presentation of database query results through audio user interfaces
Inventor: KEMBLE KIMBERLEE A
IPC: G10L15/22
Filed: 2002-01-10
Abstract: PURPOSE: A method and a system for presenting database query result via an audio user interface are provided to efficiently present database query results via an audio user interface(AUI). CONSTITUTION: The system for presenting the database query results via the AUI includes a database manager for managing database query operations for at least one database and by the database query operations, database query result items can be made. The system further include a dialog manager for managing presentation of the database query result items, in parallel with the database query operations, via the AUI. The AUI includes a text audio translation processor for translating the database query result items into audible voices and an audio recognition engine for translating audio input into recognizable texts by the dialog manager and further includes a barge-in function.
Patent KR-20030062532-A (KR)
Inventor: CHO WOO SHIN
IPC: A61B17/92
Filed: 2002-01-17
Abstract: PURPOSE: Intramedullary nail, device for inserting a screw into the same and method thereof are provided to prevent vertical movements and torsion of the nail and to enable the accurate insertion of the screw, thus reducing operation time and preventing any possible damage or infection to the bone of a patient. CONSTITUTION: In an intramedullary nail(10) adapted to be inserted into the bone marrow cavity of a patient and having proximal holes(11) and distal holes(12), at least one guidance hole(13) is formed between the proximal holes and distal holes of the nail. A screw insertion apparatus(1) for the nail comprises a screw guidance member(20) formed with proximal holes(21) and distal holes(22) corresponding to the proximal and distal holes of the nail, and a handle(30) for connecting the nail and the screw guidance member while maintaining a constant distance therebetween. Between the proximal and distal holes of the screw guidance member is provided with at least one guidance hole(23) corresponding to the guidance of the nail. The apparatus further comprises a guidance drill tube(50) configured to be inserted into the guidance hole or distal hole of the screw guidance member, a guidance steel wire tube(60) configured so as to be fitted in the guidance drill tube, and a guidance steel wire for guiding a drill.
Patent KR-20030063631-A (KR)
Inventor: HWANG GYU HAN
IPC: H04B1/44
Filed: 2002-01-23
Abstract: PURPOSE: An antenna switch is provided to mount a capacitor and an inductor operating as low pass filters of switches on the highest layer of many layers, and to change characteristics of individual elements such as the capacitor and the inductor, thereby efficiently controlling characteristics of the antenna switch. CONSTITUTION: Many layers(L1-L10) form strip lines. Electrodes are formed on the highest layer(L0) of the layers(L1-L10). The highest layer(L0) mounts as follows. Many ground electrodes(GND) and an antenna electrode(ANT) are mounted thereon. Control signal input electrodes(VC1,VC2) input control signals. Transceiving electrodes(GSM(Global System for Mobile Communications)-Tx,GSM-Rx,DCS(Digital Communication Service)-Tx,DCS-Rx) connected to signal transceiving systems are formed through the antenna electrode(ANT). Individual elements such as a capacitor(C) and an inductor(L) are mounted.
Patent KR-20030065953-A (KR)
Title: Equipment for cleaning process of the semiconductor wafer using vaporizing chemicals and cleaning process using the same equipment
Inventor: HAN DONG GYUN
IPC: B08B7/00
Filed: 2002-02-02
Abstract: PURPOSE: A semiconductor fabrication apparatus for a semiconductor substrate cleaning process and a cleaning process using the same are provided to remove easily a hardened photoresist part by mixing a gasified cleaning solution with ozone. CONSTITUTION: A semiconductor fabrication apparatus for semiconductor substrate cleaning process includes a cleaning process chamber(110), a cleaning gas supply portion(120), an ozone supply portion(130), a steam supply portion(125), and a reaction gas exhaust portion(140). The cleaning process chamber has a substrate loading portion(111) for loading a semiconductor substrate(100) to perform a cleaning process in an airtight state. The cleaning gas supply portion supplies a cleaning solution of a gas state. The ozone supply portion supplies ozone to the cleaning process chamber. The steam supply portion supplies the steam to the cleaning process chamber. The process gas exhaust portion is connected to the process chamber in order to exhaust the cleaning gas.
Patent KR-20020030752-A (KR)
Inventor: CHOI HAG BONG
IPC: F15B15/22
Filed: 2002-02-14
Abstract: PURPOSE: A hydraulic cylinder is provided to cut down expenses, and to minimize impact in decelerating and stopping by buffering impact from a hydraulic piston without step in reciprocating. CONSTITUTION: A hydraulic cylinder(1) for buffering without step is composed of a tube(2) forming a body; a rod cover(10) inserted to the opening of the tube; a head cover(12); a hydraulic piston(3) reciprocating between covers; and a piston rod(5) combined with the piston. The piston is reciprocated with difference between an inlet and an outlet of the hydraulic cylinder, and inserted to combination holes(14,16) of the rod cover and the head cover. Operating oil is moved to forward and backward ports(20,22) with the piston, and forward and backward cushion parts(7,9) are formed to reduce an oil passage(11). Expenses are reduced with forming cushion parts, and impact is minimized in decelerating and stopping.