baber/WOPTO huggingface dataset:
Patent JP-2008517187-A (JP)
Title: 建築パネルおよび建物構造体
IPC: E04B1/32
Filed: 2005-10-14
Abstract: 【課題】高い剛性および耐座屈性を有する改良建築パネルを開示する。 【解決手段】パネルの横断面は、パネルの接合を許容するように構成された側部分へ変化している半径方向に配置された長さ方向の剛化リブで構成されている中央部分により特徴付けられている。パネルの中心部分の構成により、慣性モーメントが増大し、ならびに既存の設計と比較して、正および負の曲げモーメントおよび局部的座屈に対する耐性が高くなる。更に、パネルの構成により、波形部なしで長さ方向に湾曲し得る。パネルの強度の向上および波形部の除去により、かかるパネルで構成された建物に対する設計制約を減少させ、且つより大きい建物を構築することができる。 【選択図】図５
Patent JP-2008518347-A (JP)
Title: レンダリングされた多次元データセットの視覚化
IPC: G06T15/08
Filed: 2005-10-27
Abstract: データ要素の多次元データセットの視覚化の方法は、表示値及び不透明値が個々のデータ要素に割り当てられるレンダリング処理を含む。表示値は、多次元データセットのデータ値のヒストグラムに基づいて判定される。ヒストグラムは、表示値の独立した分布との組み合わせで表示される。
Patent JP-2008520610-A (JP)
Title: トランスフェクション剤としてのテトラアルキレンペンタミンのアミドおよびペプチド誘導体
IPC: C07K5/068
Filed: 2005-11-17
Abstract: 本発明は、新しく同定されたペンタミン系界面活性剤化合物、かかる化合物の使用およびそれらの製造に関する。本発明はまた、ポリヌクレオチドの細胞への移入を容易にするためのペンタミン系化合物の使用に関する。
Patent JP-2008523181-A (JP)
IPC: B32B27/36
Filed: 2005-12-09
Abstract: The present invention relates to a process for preparation of polycarbonates with weight-average molar mass MW≧230,000 g/mol and with ≰2% by weight content of cyclic compounds, including the following steps: (a) reaction of at least one oxirane with carbon dioxide in the presence of a metal-polycarboxylic acid compound in an aprotic, non-water-miscible solvent at a temperature of from 40 to 120° C. and at a pressure of from 1 to 100 bar, where the molar ratio of monomer to metal-polycarboxylic acid compound is ≧75, (b) addition of an aqueous solution of an inorganic acid to the reaction mixture once the reaction has ended, (c) removal of the aqueous phase, (d) if appropriate, washing of the remaining organic phase with water, and (e) devolatilization and drying of the resultant slurry of the polycarbonate in the aprotic, non-water-miscible solvent, and to the polycarbonate prepared via the process, and also to the use of the polycarbonate.
Patent JP-2008523248-A (JP)
Title: 金属鉄ナゲットを生成するための方法およびシステム
IPC: C21B13/10
Filed: 2005-12-07
Abstract: 金属ナゲットを生成するための方法およびシステムは、炉床材層の少なくとも一部の上に、還元性混合物（たとえば、還元性微小凝集体；還元材および還元性鉄含有物質；溶剤といった添加剤を含む還元性混合物；成形体など）を供給することを含む。一実施形態では、複数のチャネル開口部が、複数のナゲット形成還元材領域を画成するべく、還元性混合物の層を少なくとも部分的に通って延びる。このようなチャネル開口部は、ナゲット分離充填物質（たとえば炭素質物質）を、少なくとも部分的に充填してもよい。還元性混合物の層を熱処理することによって、一つ以上の金属鉄ナゲットの形成を結果として生じる。他の実施形態では、還元性混合物の様々な組成および還元性混合物の形成は、一つ以上の有益な特性を供給する。
Patent JP-2008545614-A (JP)
Title: 癌の検出および治療のためのリン脂質エーテル類似体
IPC: A61K51/00
Filed: 2005-12-20
Abstract: 本発明は、リン脂質エステル類似体を用いて、被験体にある肺癌、副腎癌、黒色腫、結腸癌、結腸直腸癌、卵巣癌、前立腺癌、肝癌、皮下癌、扁平上皮細胞癌、腸癌、肝細胞癌、網膜芽細胞腫、子宮頸癌、グリオーマ、乳癌および膵臓癌からなる群から選択された、再発した癌、放射線および化学物質に非感受性の癌または転移した癌の治療方法、検出方法および場所の特定方法を提供する。 【選択図】図１０
Patent JP-2008527808-A (JP)
Title: バンドパスフィルタ構造を用いたマルチプレクサ
IPC: H03H7/12
Filed: 2006-01-04
Abstract: 【解決手段】例えばダイプレクサ等の、マルチプレクサが示される。このマルチプレクサは、所定の周波数範囲（例えば２４００ＭＨｚ〜４９００ＭＨｚ）内の複数の周波数帯域において通信可能な通信システムにおいて用いることができる。この通信システムは、携帯電話システムによって使用される信号からの大きな干渉を受けることなく、例えば無線ＬＡＮのようなネットワーク上で動作可能である。前記マルチプレクサは、集中インダクタと集中キャパシタを用いて構成されたバンドパスフィルタを有する複数のチャネルを含んでいてもよい。これらのチャネルの少なくとも１つにおいて、バンドパスフィルタは、少なくとも１つのローパスフィルタを少なくとも１つのハイパスフィルタと組み合わせることによって構成してもよい。
Patent JP-2008528712-A (JP)
Title: 高い熱安定性を有する耐衝撃性ポリ（メタ）アクリレート−成形材料
IPC: C08F265/06
Filed: 2005-12-15
Abstract: 本発明は、請求項１に記載の（メタ）アクリレート（コ）ポリマー成分ａ）、ｂ）、ｃ）及び／又はｄ）をベースとするポリマー混合物に関し、この際、このポリマー混合物から製造される試験体は、同時に次の特性：少なくとも２５００ＭＰａの引張弾性率（ＩＳＯ  ５２７）、低くても１１０℃のビカー軟化点ＶＥＴ（ＩＳＯ  ３０６−Ｂ５０）、少なくとも３０ＫＪ／ｍ ２ の耐衝撃性（ＩＳＯ  １７９−２Ｄ、フラットワイズ）及び少なくとも１．０ｃｍ ３ ／１０ｍｉｎのメルトインデックスＭＶＲ（ＩＳＯ  １１３３、２３０℃／３．８ｋｇ）を有する。更に本発明は、射出成形された成形体又は射出成形部材を製造するためのこのポリマー混合物の使用に関する。
Patent JP-2008527988-A (JP)
IPC: A61K39/00
Filed: 2006-01-24
Abstract: The invention provides gut commensal bacteria that have been modified to express one or more biologically active polypeptides or protiens, the bacteria includes a promoter, such as a xylanase promoter, which is induced in response to the presence of xylan in the diet and which regulates the expression of the biologically active polypeptide or protien.
Patent JP-2008528106-A (JP)
Title: 振動カテーテルデバイスおよびその製造方法
IPC: A61B17/00
Filed: 2006-01-13
Abstract: 血管などの内腔における閉塞を崩壊させる振動カテーテルは、細長い柔軟なカテーテル本体であって、近位端と、遠位端と、該カテーテル本体を通して長手方向に伸びる少なくとも一つの内腔とを有する、カテーテル本体と；カテーテル本体の内腔を通して長手方向に伸び、近位端と遠位端とを有する、振動伝達部材と；伝達部材を振動エネルギー源に結合するための、振動伝達部材の近位端に取り付けられた境界コネクタとを含む。境界コネクタはボアを含み、振動伝達部材の近位端がボアの中に伸びる。境界コネクタが、ボアの内部に収容された振動伝達部材の、取り付けられた最も遠位の部分に、最も小さな大きさの取り付け力を及ぼすように、振動伝達部材の近位端が、境界コネクタのボアの内部に可変取り付け力によって取り付けられる。
Patent JP-2008538155-A (JP)
Title: 光出力が改善されたｏｌｅｄデバイス
IPC: H05B33/26
Filed: 2006-02-23
Abstract: 基板（10）と；第1の電極（12）と、第2の電極（16）と、これら電極の間に形成された1つ以上の有機発光材料層（14）とを有するOLEDと；封止用カバー（20）とを備えていて、2つの電極のうちの少なくとも一方は透明な電極を持ち、その透明な電極と有機発光材料層は第1の範囲の屈折率を持ち、基板とカバーのうちの少なくとも一方は、第2の屈折率を持つ透明な基板または透明なカバーを持ち、OLEDからの光はその透明な基板または透明なカバーを通過して出ていく有機発光ダイオード（OLED）デバイスであって、基板とカバーの間に位置する光散乱層（22）と；第1の範囲の屈折率および第2の屈折率のそれぞれよりも小さな第3の屈折率を持っていて、散乱層と透明な基板の間、または散乱層と透明なカバーの間に位置する透明な低屈折率素子（18）とをさらに備えるOLEDデバイス。
Patent JP-2009160714-A (JP)
Title: Manufacturing method for die
Inventor: SAKAI YOSHIO
IPC: B24B13/01
Filed: 2008-01-10
Abstract: <P>PROBLEM TO BE SOLVED: To provide a manufacturing method for a die with high accuracy and high curvature while preventing interference between the die and a grinding wheel.  <P>SOLUTION: This method includes processes of: coarsely processing into a recess surface; and finishing the coarsely processed surface that is coarsely processed by means of grinding, using the columnar grinding wheel 10. During the finishing process, when the curvature radius of the high curvature die 1 is taken as R, and the diameter of the grinding wheel 10 is taken as D, D/2<R is satisfied. When the inclination angle between the rotational center shaft of the high curvature die and the grinding wheel is taken as θ, the interference length between the high curvature die 1 in the depth direction and the grinding wheel 10 is taken as ΔZ, the deflection amount of the grinding wheel 10 in the diametrical direction is taken as α, the deflection amount of the grinding wheel 10 in the lengthwise direction is taken as β, the clearance portion dimension of the grinding wheel 10 in the diametrical direction is taken as ΔY, and the clearance portion dimension of the grinding wheel 10 in the lengthwise direction is taken as ΔX, the grinding wheel 10 where the clearance portion 14 satisfying ΔY=ΔZcosθ+α, and ΔX=2ΔZsinθ+2β is formed at least in a portion that interferes with an edge of the high curvature die 1, is used during grinding.  <P>COPYRIGHT: (C)2009,JPO&INPIT
Patent JP-2009171142-A (JP)
Title: Portable radio apparatus
Inventor: IWAI NOBUHIRO
IPC: H04M1/02
Filed: 2008-01-15
Abstract: <P>PROBLEM TO BE SOLVED: To prevent antenna characteristics from being deteriorated by feeding power at a position where influence by a human body such as a hand is hardly received.  <P>SOLUTION: The first circuit board 101 is arranged in the first case body 110 and includes a ground layer. The second circuit board 105 is arranged in the second case body 120 and includes a ground layer. The ground terminal of a radio part 104 is connected to the ground layer of the first circuit board 101 in an equipotential state, and also electrically connected to a matching circuit 103 via the radio part 104. The ground layer of the second circuit board 105 and the hinge conductive part 106 are electrically connected by capacitance coupling. The hinge conductive part 106 is connected to a board connection part 102 via a third conductive part 107, and feeds power to the radio part via the matching circuit 103. Consequently, the antenna is functioned as the one where the ground layer of the first circuit board 101, the third conductive part 107, the hinge conductive part 106 and the ground layer of the second circuit board 105, resonate at a prescribed resonance frequency.  <P>COPYRIGHT: (C)2009,JPO&INPIT
Patent JP-2009171248-A (JP)
Title: Video playback apparatus and method
Inventor: NAKAMAE NOBUTAKA
IPC: H04N5/93
Filed: 2008-01-16
Abstract: <P>PROBLEM TO BE SOLVED: To easily retrieve a desired scene in recorded content data through manual user operation.  <P>SOLUTION: A system decoder (11) produces video data related to a main moving image and at least one sub moving image, respectively, from one recorded content data item. A video decoder (15) decodes the produced video data to produce a frame related to the main moving image and a frame related to the at least one sub moving image and combines these frames to produce a combination frame for one frame.  <P>COPYRIGHT: (C)2009,JPO&INPIT
Patent JP-2009166449-A (JP)
Title: Manufacturing method of nozzle substrate, nozzle substrate, liquid-droplet ejecting head, manufacturing method of liquid-droplet ejecting head and liquid-droplet ejecting device
Inventor: KUROKOCHI YOICHI
IPC: B41J2/135
Filed: 2008-01-21
Abstract: <P>PROBLEM TO BE SOLVED: To provide a nozzle substrate manufacturing method of not forming a nozzle substrate with multi-step structure nozzle holes by thin-plate machining such as grinding, but forming the nozzle substrate by deposition, thereby achieving enhancement in accuracy in substrate-thickness and nozzle-length.  <P>SOLUTION: A nozzle substrate base material 110 is formed by depositing a sacrificial layer 101 on a deposition substrate 100, successively and alternatively laminating a phosphorus-doped polysilicon layer and a stop layer on the sacrificial layer 101. Then, a mask layer 105 having n-stepped apertures 105a is formed on the nozzle substrate base material 110, and the nozzle substrate base material 110 is repeatedly etched while successively enlarging each aperture of the mask layer 105 until the etching process is stopped by each stop layer, and finally, the nozzle substrate base material 110 is dry-etched until the etching process is stopped by the sacrificial layer 101 and thus, the nozzle holes are formed. Further, the sacrificial layer 101 is removed by etching, and the nozzle substrate base material 110 is peeled off the deposition substrate 100.  <P>COPYRIGHT: (C)2009,JPO&INPIT
Patent JP-2009174863-A (JP)
Title: Transducer
Inventor: TAKEUCHI KESATOSHI
IPC: G01D5/244
Filed: 2008-01-21
Abstract: <P>PROBLEM TO BE SOLVED: To provide a transducer capable of acquiring a desired input/output relation, regardless of the state of installation.  <P>SOLUTION: The transducer includes a conversion element 410 for converting a measured quantity into an output signal SSAO having a prescribed form, and an output correction part 430 for correcting the output signal SSAO from the conversion element 410 so that the input/output relation of the transducer has a desired shape.  <P>COPYRIGHT: (C)2009,JPO&INPIT
Patent JP-2009177962-A (JP)
Title: Equipment-mounting support member
Inventor: MAKIMOTO YASUHIRO
IPC: H02B1/42
Filed: 2008-01-25
Abstract: <P>PROBLEM TO BE SOLVED: To provide a support member that allows EIA equipment and other equipment to be fixable thereto by a simple structure.  <P>SOLUTION: An equipment-mounting support member is used while being mounted to a cabinet body and allows electrical equipment constituting a power distribution board, an equipment mounting plate mounted with equipment, and an equipment mounting rail for supporting the equipment mounting plate to be fixable thereto. The support member is provided with mounting holes formed at dimensions that also allow equipment based on the EIA standard to be mountable thereto such that not only the EIA equipment but also other equipment can be fixed to the same equipment-mounting support member.  <P>COPYRIGHT: (C)2009,JPO&INPIT
Patent JP-2009177567-A (JP)
Title: Video recorder and content transfer system
Inventor: KOJIMA YASUO
IPC: H04N21/433
Filed: 2008-01-25
Abstract: <P>PROBLEM TO BE SOLVED: To provide a transfer method for transferring contents with high image quality/high sound quality in a short time, in a system for transferring recorded digital broadcast contents to a portable player.  <P>SOLUTION: When recording terrestrial digital broadcast in an stationary type video recorder, 12-segment contents and simultaneous-broadcasting 1-segment contents are accumulated. When a portable player is connected to the stationary type video recorder, all the 1-segment contents are transferred first and then, the 12-segment contents are transferred. Thus, when the 1-segment contents are completely transferred, all the same contents as the stationary type video recorder can also be played back in the portable player. If the contents are continuously transferred for more time, contents with higher image quality and higher sound quality can be played back.  <P>COPYRIGHT: (C)2009,JPO&INPIT
Patent JP-2009175603-A (JP)
Title: Wide angle zoom lens
Inventor: MURAMATSU YUICHI
IPC: G02B15/20
Filed: 2008-01-28
Abstract: <P>PROBLEM TO BE SOLVED: To provide a wide angle zoom lens which has a large angle of view at a wide angle end such as 80 degrees or more and 115 degrees or less, whose zoom magnification is 2 or more, and whose spherical aberration, distortion aberration and astigmatism are properly corrected.  <P>SOLUTION: The wide angle zoom lens comprises, in order from an object side, a first lens group having negative refractive power, a second lens group having negative refractive power and a third lens group having positive refractive power. Space between the first lens group and the second lens group is narrowed, and space between the second lens group and the third lens group is changed because of variable power from the wide angle end to a telephoto end. The angle of view at the wide angle end exceeds 80 degrees. When focal length at the wide angle end of an entire optical system is defined as fw and focal length at the telephoto end of the entire optical system is defined as ft, expression (1): 2.0<ft/fw is satisfied.  <P>COPYRIGHT: (C)2009,JPO&INPIT
Patent JP-2009181407-A (JP)
Title: Operation apparatus and electronic device equipped with the same
Inventor: SAWAUMI MITSUO
IPC: G06F3/0362
Filed: 2008-01-31
Abstract: <P>PROBLEM TO BE SOLVED: To provide an operation apparatus for enabling a user to select his or her target menu from a plurality of menus without depressing any operation key each time and an electronic device equipped with this operation apparatus.  <P>SOLUTION: When a user moves the fingertip while touching a protruding section 54 of an operation apparatus 36 with the fingertip, this is detected by a capacitance type sensor, and a selection frame 19 for selecting a menu is moved in all directions. Then, the user makes the selection frame 19 reach his or her target menu to select the menu. Thus, it is possible for the user to select his or her target menu from a plurality of menus only by moving the finger while touching a protruding section 54 without depressing any operation key each time.  <P>COPYRIGHT: (C)2009,JPO&INPIT
Patent JP-2009182802-A (JP)
Title: Broadcasting receiver, broadcasting reception method, and broadcast reception system
Inventor: CHAGI HIROYUKI
IPC: H04N21/431
Filed: 2008-01-31
Abstract: <P>PROBLEM TO BE SOLVED: To provide a broadcast reception device, a broadcast reception method and a broadcast reception system, which are conveniently handled by a user by simplifying the operation of the user by enabling a client terminal for acquiring content from a server through a network, to control the broadcasting reception device.  <P>SOLUTION: A server function is loaded on a broadcast reception device (11) so that a client terminal (12) recognizes a broadcast reception device (11) as a server on an LAN (14). The client terminal (12) uses a function for selecting each server (131 to 13n) or the content according to the operation of a remote controller (15), and the client terminal (12) selects a channel for the broadcast reception device (11) according to the operation of the remote controller (15).  <P>COPYRIGHT: (C)2009,JPO&INPIT
Patent JP-2009181895-A (JP)
Title: Mounting structure of service plug
Inventor: KAWAI NOBUYUKI
IPC: H01H27/00
Filed: 2008-01-31
Abstract: <P>PROBLEM TO BE SOLVED: To allow a plug body to be easily and suitably mounted and dismounted on a base member, even though a work space is narrow and difficult to see directly.  <P>SOLUTION: The plug body 15 is moved on a surface parallel to a surface of the base member 14 between a seat cushion and a floor panel, an arc outer wall of the plug body 15 is brought into contact with an inner wall (a curved surface) of a regulation member 26, and two circuit terminals 22 and two short circuit terminals 23 are aligned with each other by turning the plug body 15 centering the inner wall (the curved surface) of the regulation member 26 in the surface parallel to the surface of the base member 14. The plug body 15 is aligned with the base member without moving the plug body 15 in the height direction as an insertion direction of the short circuit terminal 23 in spite of the narrow work space limited in height.  <P>COPYRIGHT: (C)2009,JPO&INPIT
Patent JP-2009186497-A (JP)
Title: Apparatus for manufacturing liquid crystal display panel and method of manufacturing liquid crystal display panel
Inventor: OKAMOTO TETSUYA
IPC: G02F1/13
Filed: 2008-02-01
Abstract: <P>PROBLEM TO BE SOLVED: To save the installation space for a manufacturing apparatus for a liquid crystal display panel.  <P>SOLUTION: The manufacturing apparatus 101 for a liquid crystal display panel includes: first and second stages 41, 42 for placing substrates to be stuck, respectively; a sticking device for sticking a first sheet polarizer to an upper exposed surface out of the above substrates respectively placed on these stages; and a detector for checking whether or not foreign matter gets mixed between the substrates and an optical film using light in a region where the sticking work of the sticking device is already done. The first and second stages 41, 42 respectively include a transparent plate 4 for placing the substrate to be stuck and a light source 8 for supplying light through the transparent plate 4. A second sheet polarizer 5 is disposed on the lower side of the transparent plate 4 of the first stage 41, and the second sheet polarizer is not disposed on the lower side of the transparent plate 4 of the second stage 42.  <P>COPYRIGHT: (C)2009,JPO&INPIT
Patent JP-2009187076-A (JP)
Title: Digital pen system and digital pen
Inventor: HIRATA ERIKO
IPC: G06F3/042
Filed: 2008-02-04
Abstract: <P>PROBLEM TO BE SOLVED: To provide a digital pen system which allows a terminal side to change the setting of digital pens at a time.  <P>SOLUTION: This digital pen system is provided with: a sheet 200; digital pens 100; and a terminal 300. The terminal 300 is provided with: a mode request means 304 for making a request to set a mode for each of the digital pens 100; and a communication control means 303 for transmitting the mode setting request to the digital pens 100. Each of the digital pens 100 is provided with: a mode setting means 103 for setting a mode for data transmission based on the mode setting request from the terminal 300; and a communication control means 104 for receiving a mode request transmitted from the communication control means 303 of the terminal 300, and for performing data transmission based on the mode set by the mode setting means 103.  <P>COPYRIGHT: (C)2009,JPO&INPIT
Patent JP-2009187724-A (JP)
Title: Rolled lithium ion secondary battery
Inventor: MORIKAWA HIROSHI
IPC: H01M2/16
Filed: 2008-02-05
Abstract: <P>PROBLEM TO BE SOLVED: To provide a rolled lithium ion secondary battery capable of preventing short circuit between positive and negative electrodes even when a twist is generated in a direct tab.  <P>SOLUTION: The lithium ion secondary battery has a bottomed cylindrical battery container. An electrode group is housed in the battery container. The electrode group is formed by rolling a positive electrode plate 17 and a negative electrode plate 18 through a separator 16 so that both electrodes do not contact directly around a shaft. The extended end of a positive electrode direct tab 2 extended from the positive electrode plate 17 is joined to the frame periphery of a positive electrode current collecting ring 4. A porous polyolefin film having a coefficient of static friction of 0.6 or less is used in the separator 16. Even if the positive electrode direct tab 2 twists and contacts with the separator 16, the positive electrode direct tab 2 slides the surface of the separator 16.  <P>COPYRIGHT: (C)2009,JPO&INPIT
Patent JP-2009185661-A (JP)
Title: Rocker arm
Inventor: SAKURAI MASAHIDE
IPC: F01L1/18
Filed: 2008-02-05
Abstract: <P>PROBLEM TO BE SOLVED: To provide a rocker arm hardly interfering with surrounding members during rocking and then improved in a design flexibility.  <P>SOLUTION: The rocker arm 1 is provided with: a pair of side wall portions 21 formed so as to face each other; an engaging portion 22 connecting the pair of side wall portions 21 and adapted to engage with a rocking support member 4 arranged in an engine; and a sliding portion 26 connecting the pair of side wall portions 21 and being adapted to be in slidable contact with a stem front end portion 631 of an engine valve 63. The engaging portion 22 includes: a board surface portion 23 connecting the pair of side wall portions 21; and a protruding portion 24 protruding from the board surface portion 23 toward the rocking support member 4. In the protruding portion 24, a spherical concave portion 25 adapted to engage with a spherical protruding portion 41 of the rocking support member 4 is formed to be depressed.  <P>COPYRIGHT: (C)2009,JPO&INPIT
Patent JP-2009185870-A (JP)
Title: Continuously variable transmission control device
Inventor: FUJIWARA HIRONARI
IPC: F16H59/44
Filed: 2008-02-05
Abstract: <P>PROBLEM TO BE SOLVED: To reduce a sense of incongruity given to a driver by controlling a gear ratio to avoid unnecessary down-shifting.  <P>SOLUTION: A target input shaft rotating speed NINOPT for a continuously variable transmission during normal travel and a target input shaft rotating speed NINLINE during linear shift control are set. In off-up control, the target input shaft rotating speed NINOPT during normal travel or the target input shaft rotating speed NINLINE during linear shift control, whichever smaller, is set as a final target input shaft rotating speed NINC. The gear ratio of the continuously variable transmission is controlled so that an actual input shaft rotating speed NIN is the finally set target input shaft rotating speed NINC.  <P>COPYRIGHT: (C)2009,JPO&INPIT
Patent JP-2009188170-A (JP)
Title: Method of calculating physical value of insulating film
Inventor: KITAJIMA TOSHIKAZU
IPC: H01L21/66
Filed: 2008-02-06
Abstract: <P>PROBLEM TO BE SOLVED: To provide a method of calculating a value of a surface charge density unknown easily when values of an in-film charge density, a film thickness and a relative dielectric constant, of an insulating film formed on a principal plane of a semiconductor substrate are known.  <P>SOLUTION: A value of a surface charge density of an unknown physical value related to an insulating film on a substrate is determined preliminarily, a film potential operation value of the insulating film is obtained based on the preliminarily determined value of the surface charge density and three known physical values of the in-film charge density, the film thickness and the relative dielectric constant, and a surface potential operation value of the insulating film is obtained by using the film potential operation value. Thereafter, the preliminarily determined value of the surface charge density is changed until a difference between the surface potential operation value and a surface potential observation value of the insulating film measured by a surface electrometer becomes to a threshold or less, and the preliminarily determined value at the time when the difference becomes to the threshold or less is decided as a value of the surface charge density. Thereby, the surface charge density can be obtained without changing a status of the surface of the insulating film, and without providing electrodes or the like on the surface of the insulating film.  <P>COPYRIGHT: (C)2009,JPO&INPIT