Patent SG-11201408492Q-A (SG)
Title: Reduction of radiation thermometry bias errors in a cvd reactor
Inventor: TAS GURAY
IPC: C23C16/50
Filed: 2013-06-21
Abstract: (12) INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property Organization International Bureau (43) International Publication Date 27 December 2013 (27.12.2013) WIPOIPCT (10) International Publication Number WO 2013/192510 A1 (51) International Patent Classification: C23C16/44 (2006.01) C23C16/50 (2006.01) (21) International Application Number: PCT/US2013/047024 (22) International Filing Date: 21 June 2013 (21.06.2013) (25) Filing Language: English (26) Publication Language: English (30) Priority Data: 13/531,162 22 June 2012 (22.06.2012) US 13/531,220 22 June 2012 (22.06.2012) US (71) Applicant: VEECO INSTRUMENTS, INC. [US/US]; Terminal Drive, Plainview, NY 11803 (US). (72) Inventors: TAS, Guray; c/o Veeco Instruments, Inc., Ter­ minal Drive, Plainview, NY 11803 (US). ZHOU, Jing; c/o Veeco Instruments, Inc., Terminal Drive, Plainview, NY 11803 (US). KWON, Daewon; c/o Veeco Instruments, Inc., Terminal Drive, Plainview, NY 11803 (US). (74) Agents: PEDERSEN, Brad, D. et al.; Patterson Thuente Pedersen, P.A., 4800 IDS Center, 80 South Eighth Street, Minneapolis, MN 55402-2100 (US). (81) Designated States (unless otherwise indicated, for every kind of national protection available)'. AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (84) Designated States (unless otherwise indicated, for every kind of regional protection available)'. ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, [Continued on next page] (54) Title: REDUCTION OF RADIATION THERMOMETRY BIAS ERRORS IN A CVD REACTOR (57) Abstract: Apparatuses for reducing radiation thermometry bias errors in enclosures such as CVD reactors. In one embodiment, a radiation thermometer utilizes an off-focus telecentric lens arrangement. The off-focus telecentric ar­ rangement is focused at infinity, but utilized is to capture radiation from a relat­ ively proximate target (e.g., within a couple meters) that is out of focus. The capture of collimated radiation from the target diminishes the contribution of stray radiation. In another embodiment, scattered radiation originating from a designated segment of peripheral heating a element can be reduced locally by one of several mechanisms, including reducing the emission (e.g., operating temperature) of the designated segment, or capturing or deflecting a portion of the radiation originating from the designated segment. Radiation thermometers fixed proximate an axis that extends from the center of the wafer carrier and across the designated segment are subject to less stray radiation, thus providing a more reliable temperature reading. WO 2013/192510 Al I lllll llllllll II llllll III lllll lllll III III III lllll lllll lllll lllll lllll llll llll lllllll llll llll TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, Published: KM, ML, MR, NE, SN, TD, TG). — internationa i searc h report (Art. 21(3))