baber/WOPTO huggingface dataset:
Patent KR-20000021415-A (KR)
Title: Air conditioner used for both cooling and heating
Inventor: BAEK HYEON SAM
IPC: F24D5/00
Filed: 1998-09-29
Abstract: PURPOSE: An air conditioner used for both cooling and heating is provided to improve the efficiency of an equipment as well as to simplify the structure by installing a cooling device on the upper area and a heating device of a radiation heat transfer manner on the lower area of an air conditioner. CONSTITUTION: An air conditioner is acted by the steps of: operating a ventilator in an air conditioner if a cooling device(60) starts to cool a room; exchanging heat of indoor air introduced through an inlet(51a) with an evaporator(61); exhausting the air through an outlet(51b); feeding power to a halogen heater(71) if a heating device(70) starts to act to heat the room; emitting heat and light from the inside of the halogen heater; dispersing the radiation heat from the halogen heater and a reflecting plate(73) through a front honeycomb(75); and transferring the heat to the room through a heating grill(77).
Patent KR-20000021476-A (KR)
Title: Deposition apparatus for manufacturing semiconductor device
Inventor: YANG JANG GIL
IPC: H01L21/30
Filed: 1998-09-29
Abstract: PURPOSE: A deposition apparatus for manufacturing a semiconductor device is to prevent a particular film from being generated on a platen area, a rotating table adjacent to the platen are, and a desired area of a heater. CONSTITUTION: A center of a lower surface of a top plate is provided with a mixing box (62) is provided, and is connected with a first gas supplier(80) and a second gas supplier(82) through a gas supplying line(84). The periphery of the mixing box is provided with a first shower head(66), a second shower head(68), a third shower head(70), a fourth shower head(72), a fifth shower head(74), a sixth shower head(76), and a seventh shower head(78), to apply a process gas on the rotating table. A first shower head is provided to correspond to a first platen area, a second shower head is provided to correspond to a second platen area, and a third shower head is provided to correspond to a third platen area.
Patent KR-20000021622-A (KR)
Title: Output control device of audio signal in radio television
Inventor: PARK HYUN SU
IPC: H04N5/60
Filed: 1998-09-30
Abstract: PURPOSE: An output control device of audio signal in radio television is provided to use high quality sound in TV watching with prior function and compatibility. CONSTITUTION: An output control device of audio signal in radio television comprises a storage part(24), a comparing part(23), a selection output part(15), and a control part(21). The storage part stores respective channel data corresponding to respective broadcasting station. The comparing part comparing audio signals tuned and received from a radio tuner and a TV tuner. The selection output part selectively outputs only one audio signal among the radio and TV audio signals in accordance with a switching control signal. The control part provides the radio tuner with a tuning control signal, displays a message data on a monitor, and provide the selection output part with a selection switching signal.
Patent KR-20000025366-A (KR)
Title: Structure for installing rope of elevator
Inventor: CHOI JUN DO
IPC: B66B7/06
Filed: 1998-10-10
Abstract: PURPOSE: A structure for installing a rope is provided to improve the design effect from the outside by minimizing the exposure of the elevator rope shown outwardly such as an elevator for an outlook, and to solve the anxiety about the safety of the outer passenger. CONSTITUTION: A supporting boom of pulley(50) is installed upside an elevating road, pulleys for ramifying ropes(60A,60B) are installed to be able to rotate in both ends of the supporting boom of pulley(50), and a rope(14) rolled in a sheave(18) of a winch is combined in the side of a cross head(12) of a car(10) by ramifying in ramifying pulleys of rope(60A,60B). When a passenger inside the car(10) pushes a layer of destination, the car(10) is elevated upward and downward by rotating the sheave(18) of the winch with a driving signal, and supporting the rope(14) fixed in both ends of the cross head(12). The exposure of the rope is prevented by separately fixing the rope in both ends of the cross head(12), and adhesively installing in both sides of the elevating road.
Patent KR-20000028153-A (KR)
Title: Method for controlling optimum record in tvcr
Inventor: PARK JOO DEOK
IPC: G11B20/10
Filed: 1998-10-30
Abstract: PURPOSE: A method for controlling optimum record in TVCR is provided to record a received broadcasting signal with an optimum sensitivity and obtain a clear picture quality by measuring a level of a broadcasting signal and recording a broadcasting signal in which a signal level is great. CONSTITUTION: A microprocessor judges as to whether a certain key signal for turning on a power of a television is inputted(200). The microprocessor controls a first tuner unit(30) and processes a received broadcasting signal(202). The microprocessor judges as to whether a record key signal is inputted. A level detecting unit detects a level of an inputted broadcasting signal when the record key signal is inputted(206). The microprocessor judges as to whether the detected signal level is more than a predetermined reference level(212). The microprocessor controls a second tuner unit and receives a level of a broadcasting signal from the level detecting unit when the detected signal level is less than a predetermined reference level(216). The microprocessor judges as to whether a detected signal level of the second tuner unit is more than the predetermined reference level(218). The microprocessor controls a display and informs a record of a feeble signal to a user when the detected signal level of the second tuner unit is more than the predetermined reference level(222).
Patent KR-20000028246-A (KR)
Title: Method for performing reservation record of tvcr having pip function
Inventor: JO JAE KAP
IPC: G11B20/10
Filed: 1998-10-30
Abstract: PURPOSE: A method for performing reservation record of TVCR having PIP function is provided to prevent that a record is performed in a sub picture while a record is performed in a main picture by recording a prior inputted broadcasting signal to the main picture and then recording a posterior inputted broadcasting signal to the sub picture. CONSTITUTION: A microprocessor identifies as to whether a reservation record mode is selected and displays a set menu picture of a reservation record when the reservation record mode is selected(S100,S101). The microprocessor identifies as to whether a reservation channel, a record start/end time, a record velocity, and a record date are set and a channel of a main picture and a channel of a sub channel are set(S103). The microprocessor judges as to whether a broadcasting signal of a current inputted channel is a set main picture when the broadcasting signal of the reservation setting channel(S104). The microprocessor controls a deck unit to perform a record according to a reservation set when a broadcasting signal of a channel set as the main picture is inputted ahead(S105). The microprocessor performs a picture setting anew to perform a record when a broadcasting signal of a channel set as the sub picture is inputted ahead(S106).
Patent KR-20000031028-A (KR)
Title: Loop filtering method of image data
Inventor: LEE YEONG RYEOL
IPC: H04N5/76
Filed: 1998-11-02
Abstract: PURPOSE: A loop filtering method of image data is provided to simplify to calculate, and to code in a low bit rate to reduce an effect of quantization such as a blocking artifact, a corner outliner, and a ringing noise when the image data is decoded based on a block. CONSTITUTION: A loop filtering device of image data (10) contains an extracting unit of flag(100), a deblocking filter(110), a compensating unit of corner outliner(120) and a deringing filter(130). The extracting unit of flag(100) extracts a flag using a movement vector showing a distribution of reverse quantization coefficient of the image data and a difference between a former frame and a present frame. The deblocking filter(110) deblocking-filters the image data by examining the blocking flag extracted from the extracting unit of flag(100) using one-dimensional vertical and a horizontal low band passing filters. The compensating unit of outliner(120) compensates by detecting a corner outliner among the deblocking-filtered data in the deblocking filter(110). The deringing ringer(130) deringing-filters the data compensated the corner outliner by examining the ringing flag extracted in the extracting unit of flag(100) using a two-dimensional signal fitting filter. The loop filtering method reduces an effect of quantization using a spatial frequency and a temporary information for the image data.
Patent KR-20000028508-A (KR)
Title: Optical pick-up device
Inventor: LEE HYONG JAE
IPC: G11B7/08
Filed: 1998-10-31
Abstract: PURPOSE: An optical pick-up device is provided to minimize a number of optical means by receiving an optical beam with a different wavelength using one light receiving element. CONSTITUTION: A luminous diode(1) emits an optical beam having a 650nm wavelength. A complex type hologram(100) emits an optical beam having a 780nm wavelength and receiving an optical beam having 650nm and 780nm optical beams. A polarization beam splitter(20) changes a penetrating path of an optical beam according to a direction of an incident optical beam. A collimator lens(40) converts the incident optical beam into a horizontal light. A focus lens(30) collect the horizontal light as an optical spot to a recording surface of an optical disk.
Patent KR-19990044981-A (KR)
IPC: H04Q3/00
Filed: 1998-11-03
Abstract: A system for providing synchronization and information exchange in a network such as a digital television broadcast network using a network management operations and control paradigm. A management entity component, such as a computer workstation operated at a control center, coordinates the actions of different agent components, such as hardware used at the headend or uplink site of a television network. The agent components are used to provide conditional access to a television signal by inserting conditional access data into the transmitted programming. Management information bases (MIBs) are provided for the agent components and the management component. The agent components update their MIBs with information of the communication network, such as changes in a television event schedule. The management component periodically reads the agents' MIBs to obtain the updated information and store it in its own MIB. The management component provides information to the agents' MIBs according to the updated information obtained from the agents to synchronize the insertion of data into the digital broadcast data stream by the agents. <IMAGE>
Patent KR-19990045005-A (KR)
Title: 분배기 시스템
IPC: B67D3/00
Filed: 1998-11-04
Abstract: 본 발명은 가요성 파우치로부터 액체 식품 또는 음료 제품을 분배하기 위한 분배기 시스템에 관한 것으로, 상기 분배기 시스템은, 
     가요성 파우치를 수용할 수 있는 하우징과, 
     입구 및 개방가능한 출구를 갖는 내장형 분배 튜브가 설치된 액체 식품 또는 음료 제품용 가요성 파우치와, 
     튜브 출구를 개방할 때 파우치로부터 액체 식품 또는 음료 제품의 분배를 제어기 위해 입구와 출구 사이에서 외부적으로 분배 튜브와 맞물릴 수 있는 밸브 시스템을 구비한다.   더욱이, 본 발명은  가요성 파우치를 수용할 수 있는 하우징 및 튜브 출구의 개방 시, 파우치로부터 액체 식품 또는 음료 제품의 분배를 제어하기 위해 입구와 출구 사이에서 외부적으로 분배 튜브와 맞물릴 수 있는 밸브 시스템을 구비한 분배기 시스템으로서, 액체 식품 및 음료 제품을 구비하며, 음료 분배기 시스템에서 입구 및 개방가능한 출구를 갖는 내장형 분배 튜브를 갖는 가요성 파우치가 사용되는 분배기 시스템에 관한 것이다.   더욱이, 본 발명은  밀봉처리된, 주입된, 또는 밀봉처리된 및 주입된 액체 식품 또는 음료 제품을 포함하며, 입구 및 개방가능한 출구를 갖는 내장형 분배 튜브를 갖는 가요성 파우치에 관한 것이다.
Patent KR-19990045421-A (KR)
Title: 회전 제어 장치, 회전 제어 장치가 적용된 재생 장치, 및회전 제어 방법
IPC: G11B19/247
Filed: 1998-11-19
Abstract: 신호의 드롭에 의존하지 않는 회전 제어 장치가 제공된다.  통계적으로 발생할 수 있는 런 길이 제한 코드의 발생 패턴을 기초로 계산된 하한 주파수와 상한 주파수가 주파수 변동 범위로서 설정된다.  PLL 회로가 로킹되지 않은 상태에서 디스크로부터 재생된 런 길이 제한 코드의 주파수와 기준 주파수 간의 에러를 기초로 회전 제어가 수행되는 경우, 기준 주파수는 상한 주파수와 하한 주파수 사이에서 변동한다.  그러면, PLL회로가 로킹된 상태가 될 때 비교를 위해 현재 사용되는 기준 주파수는 고정값으로 저장되어 추후의 회저 제어를 위한 기준 주파수로서 사용된다.
Patent KR-19990062749-A (KR)
Title: 건설기계의 운전실
IPC: B62D33/06
Filed: 1998-12-03
Abstract: 본 발명에 있어서는, 서로 접합된 바깥쪽 패널과 안쪽 패널에 의하여 중공 형상 필러부를 형성하고, 이 중공 형상 필러부를 운전실 구조체로 한 건설기계의 운전실은, 중공 형상 필러부의 내부공간을 분할하도록 바깥쪽 패널 및/또는 안쪽 패널에 접합된, 얇은 판자 형상의 적어도 하나의 보강재를 구비한다.
Patent KR-20000038002-A (KR)
Title: Digital broadcasting receiver having alarm function
Inventor: LIM WI CHEOL
IPC: H04L12/00
Filed: 1998-12-03
Abstract: PURPOSE: A digital broadcasting receiver having an alarm function is provided to make a telephone bell ring at a reserved time, by setting an alarm time and driving a modem in the receiver so that the modem can be connected to a telephone set at the set alarm time. CONSTITUTION: A modem(15) is connected to a telephone set(20). A key input part(11) is adapted to input the alarm time and a telephone number which performs an alarm function. The inputted alarm time and telephone number are stored in a memory of a controller(13). The controller(13) checks the alarm time set in the memory based on a current time provided by a timer(12). If the current time matches the set alarm time, the controller(13) drives the modem(15) to generate a bell sound at the telephone set(20) which corresponds to the stored telephone number. An audio memory(14) sends out a voice message for an alarm call to the telephone set(20) via the modem(15) when the modem(15) is connected to the telephone set(20).
Patent KR-19990062796-A (KR)
Title: 불휘발성 반도체 기억장치 및 그 기입전압의 인가방법
IPC: H01L29/788
Filed: 1998-12-04
Abstract: 불휘발성 반도체 메모리 장치는 역 바이어스가 드레인 영역과 채널 형성영역 및 소스 영역과 채널 형성영역 사이에 인가될 때 채널 형성 영역의 표면에 평행하는 방향으로 연재하기 위해 드레인 영역에서 소스 영역으로 연재하는 공핍층을 형성하고 채널 형성 영역에 중첩되어 덮히는 채널 길이를 단축하는 것에 의해, 채널과 채널 형성영역, 드레인영역과 채널 형성영역, 및 소스 영역과 채널 형성 영역 사이의 단독의 내압의 최소 출력값보다 좀더 큰 기입 금지 전압을 공급할 수 있도록 하는 것이다.
Patent KR-20000038558-A (KR)
Title: Internal fuel tank connected outside
Inventor: LEE YOUNG HO
IPC: F24F1/00
Filed: 1998-12-08
Abstract: PURPOSE: An internal fuel tank connected outside is provided to continuously supply fuel to an internal fuel tank in a machine automatically from a large-sized fuel tank connected outside, thereby resolving inconvenience due to frequent fuel supply. CONSTITUTION: An internal fuel tank connected outside includes an injection tube(51) for injecting fuel to the fuel tank via a branch pipe, a shutting off element for shutting off the injection tube according to an amount of fuel in the fuel tank, a fuel hose(56) for supplying fuel via the injection tube from an external tank, a connecting element(55) for connecting the fuel hose to the injection tube, and a supporting element(57) mounted in a case for supporting the fuel hose, wherein the shutting off element includes a shutting off lid(52) for opening and closing the pass communicating with the branch pipe by moving up and down in the injection tube, a float(53) for moving the shutting off lid by moving up and down along a fuel surface, and a connecting rod(54) for connecting the float with the shutting off lid and formed with protrusions at upper and lower parts to be interfaced at a lower end part of the injection tube.
Patent KR-20000038965-A (KR)
Title: Method for manufacturing fluid injection device
Inventor: KWON SUN CHEOL
IPC: B05B9/00
Filed: 1998-12-10
Abstract: PURPOSE: A method for manufacturing a fluid injection device is provided to integrally form a nozzle and an injection fluid chamber in a single thin layer, thereby reducing manufacturing procedure and minimizing a difference deviation through a whole board. CONSTITUTION: A method for manufacturing a fluid injection device includes the steps of respectively forming a driving part(110), a membrane(120), and a nozzle part(130), and assembling the formed driving part, membrane and the nozzle part in sequence, wherein assembling the nozzle part is performed by a single nozzle layer(131) made of a silicon material, and includes the sub-steps of laminating the nozzle layer on a board(139) by joining and abrasing the nozzle layer in a predetermined thickness, pre-forming a nozzle(132), forming the nozzle and an injection chamber(133) by anisotropic etching, and separating the board.
Patent KR-19990062993-A (KR)
Title: 고 부피밀도의 입상세제를 제조하는 방법
IPC: A61K9/16
Filed: 1998-12-11
Abstract: 음이온성 계면활성제의 액체산 전구체를 입상알칼리 빌더로 중화하고 중화품을 조립(造粒)하는 것으로 구성되는 고 부피밀도의 입상세제를 제조하는 방법에 있어서, 적어도 액체산 전구체의 일부로 분체층을 함침하기 위해 액체산 전구체를 중화하는데 필요한 양보다 더 많은양의 입상알칼리 빌더를 함유하는 분체층으로 액체산 전구체층을 접촉시키고, 그 다음 동시에 중화 및 조립화를 수행하기 위해 그 결과물을 교반 및 혼합하는 단계로 구성되는 방법이다.  입상세제의 부피밀도는 본 방법으로 용이하게 증대될수 있다.
Patent KR-20000041304-A (KR)
Title: Energy cycle
Inventor: KIM JUN WON
IPC: A61N5/00
Filed: 1998-12-22
Abstract: PURPOSE: An energy cycle is provided which can enhance health, and develop an ability of human by amplifying energy of the body. CONSTITUTION: A shape of the energy cycle is provided which is drawn to a round shape, an ellipsoidal shape, 8-figure pattern and their combination form using a writing tool or an instrument by a man being able to generate the energy. The energy cycle is also drawn to blue color, red color or their combination. The energy cycle is also drawn continuously and repeatedly.
Patent KR-20000042156-A (KR)
Title: Circuit for measuring allowable error amount of clock bit rate and predicting declination of allowable error
Inventor: JANG JAE SANG
IPC: H04L7/00
Filed: 1998-12-24
Abstract: PURPOSE: A circuit for measuring an allowable error amount of a clock bit rate and predicting a declination of an allowable error is provided to predict a bias of an allowable range previously by measuring an allowable error amount of a received clock and presuming a declination of a clock frequency. CONSTITUTION: A circuit for measuring an allowable error amount of a clock bit rate and predicting a declination of an allowable error comprises a phase comparator(100) which compares a phase of a reference clock(REF_CLK) with a phase of an externally applied clock signal(RCV_CLK). A low pass filter(110) receives an output signal(S1) of the phase comparator(100), and converts the receives signal(S1) into a sinusoidal waveform(S2). A differential part(120) receives the sinusoidal waveform(S2), and converts the receives signal(S2) into a rectangular waveform(S3). A clipper(130) receives the rectangular waveform(S3) of the differential part(120), and judges a point of time when an event occurs. A time marker part(140) receives an output signal(S4) of the clipper(130), and outputs a time when a frequency phase of the clock signals becomes equal. A declination judging part(150) receives an output signal(S5) of the time marker part(140), and judges whether the output signal(S5) is biased from a regulated declination of a regulated frequency.
Patent KR-20000043707-A (KR)
Title: Circuit for stabilizing power of video-cd player for vehicle
Inventor: CHOI SEONG HO
IPC: G11B20/10
Filed: 1998-12-29
Abstract: PURPOSE: A circuit for stabilizing a power of a video-CD player for vehicle is provided to fit a synchronization of CD part and MPEG part and to prevent a power noise by differently controlling a supplying timing of power fed to the CD part and the MPEG part when the power of video-CD player is repeatedly turned on and off. CONSTITUTION: In feeding a power on signal of high state to an A port unit(10), a first regulator(11) supplies a driving power to a CD part. In feeding the power on signal of high state delayed as a t time(1-seconds) to a B port unit(20), a second regulator(21) supplies the driving power to a MPEG part after delaying a time until clocks such as a BLCK and a LRCK of CD part are output and fed to the MPEG part. The MPEG part synchronizes to an oscillating frequency of 16.934MHz oscillator by decoding the clock such as the BLCK and the LRCK. And the MPEG part processes a video signal without distorting a displayed screen.
Patent KR-19990036209-A (KR)
IPC: B23K26/00
Filed: 1996-08-06
Abstract: PCT No. PCT/FR96/01251 Sec. 371 Date Jan. 21, 1998 Sec. 102(e) Date Jan. 21, 1998 PCT Filed Aug. 6, 1996 PCT Pub. No. WO97/07423 PCT Pub. Date Feb. 27, 1997An optical device for homogenizing a laser beam is described. Such a device is commonly used in the surface treatment of an object. The device consists of front lenses that are bonded together to form an assembly of lenses that breaks the laser light into multiple beams. This results in the homogenization of the gaussian profile of the beam intensity as viewed perpendicular to the beam's propagation. Advantageously the matrix of lenses is formed using groves or bevels in a manner that minimizes losses resulting from light impinging on glue disposed upon the entire lateral surface of the front lenses. In the invention gaps between front lenses that cause interference with the light path are eliminated. This gap free bonding is accomplished by filling the groves or bevels with glue, inserting a rod or wire into the grove to assemble the front lenses in a support frame, bonding a grill to assembled front lenses, or by using a combination of gluing with a support frame.
Patent KR-19990063940-A (KR)
Title: 가상 환경 조종 장치의 모델링 및 제어
IPC: G06F3/00
Filed: 1997-07-01
Abstract: 본 발명은 컴퓨터가 생성한 가상 환경내의 시뮬레이팅된 손 또는 갈고리(30)등의 가상 조종기에 대해 사용자의 명령한 동작을 제공하는 방법 및 장치를 제공하는 것이다. 환경은 사용자 제어하에 조종기에 의해 홀딩, 해제, 추진되는 한 개이상의 물체(32)를 구비한다. 가상 조종기의 동작은 갈고리(30)의 엶 및 닫음의 간단한 제어 명령으로, 사용자에 의해 동작된 적합한 손바닥 크기의 장치에 의해 명령된다. 동작시에, 물체(32)에 대한 던짐, 잡음, 또는 펀칭등의 동작은, 물체와 조종기간의 분리(D)에 의해 결정된 동작 개시의 판정으로 부분적으로 자율화된다. 현재 및 이전의 상태들은 각각의 상태 변수의 형태로 기록된다. 물체에 대해 인가된 속도의 편차에 대한 방법이 설명된다.
Patent KR-19990066982-A (KR)
Title: 근 적외선 형광단을 함유하는 수성 잉크
IPC: C08G63/685
Filed: 1996-10-18
Abstract: 본 발명은 수분산성 폴리에스테르 주쇄로 혼합되는 근 적외선 형광 화합물을 함유하는 잉크를 제공한다.  본 발명의 잉크는 바람직하게 무색 또는 "비가시(invisible)"하지만 바람직하다면 약간 유색으로 될 수 있다.  상세하게, 본 발명의 잉크는 
     A. 열적으로 안정한 공중합된 근 적외선 형광 화합물 0.1중량ppm 내지 10중량%를 갖는 하나이상의 수분산성 폴리에스테르 1 내지 10중량%; 
     B. 하나이상의 지방족 습윤제 5 내지 75중량%; 
     C. 3개이하의 탄소원자를 갖는 하나이상의 저급 지방족 알콜 0 내지 15중량%; 
     D. 물 및 선택적으로 2중량%이하의 하나이상의 첨가제(성분 A 내지 D의 중량%는 100%이다)를 포함한다.
Patent KR-19990076746-A (KR)
IPC: A47J31/00
Filed: 1996-12-23
Abstract: The coffee machine for different coffee types requires no preheating time and consumes no energy in the standby mode. It essentially comprises a water supply chamber (1), a pump (5), a continuous flow heater (8) for heating the water and a brewing chamber (10) for receiving the coffee (10'). The continuous flow heater (8) has a low heat capacity and can therefore perform large temperature changes within a short time. In order to obtain the desired water starting temperature, use is made of a control loop. The unheated parts (9-12) along the water path between the continuous flow heater (8) and the coffee (10') are so designed that a minimum amount of heat energy is abstracted from the hot water, but at the same time the parts have an adequate strength.
Patent KR-19990076887-A (KR)
Title: 디스플레이 시스템용 음극선관
IPC: H01J9/20
Filed: 1997-10-28
Abstract: 스캔 주사 변조 (SVM) 코일은 전자총에 인접한 음극선관(CRT)의 목의 외부면상에 직접 형성되어 목부분에 부착된 분리기판 또는 고정체상에 설치된 종래 코일 보다 효율이 향상되며 비용이 절감된다. 그리고 시스템 제조자를 위한 튜브 형태의 선택에 있어 유연성을 제공한다.
Patent KR-19990081918-A (KR)
Title: 박판형 기판의 운송방법 및 운송장치
IPC: B65G49/07
Filed: 1997-11-21
Abstract: 본 발명은 불활성 가스 분위기하에서 박판형 기판(S)을 수납할 수 있는 수납실(3)을 구비한 운송 로봇(30)을 이용하여, 처리장치(1)를 부설하고 동시에 불활성 가스 분위기로 유지되는 운송실(2) 상호간에서 박판형 기판(S)을 운송하는 경우에, 운송 로봇(30)의 수납실(3)과 처리장치(1)측의 운송실(2) 사이에서의 박판형 기판(S)의 반출입시에 수납실(3)과 운송실(2) 사이에 접속실(4)을 배치하고, 접속실(4)을 감압상태로 하여 내부에 불활성 가스를 도입한 후에, 수납실(3)과 운송실(2)의 게이트 밸브(GV1, GV2)를 열어 박판형 기판(S)의 반입과 반출을 행한다.