Patent SG-11201808727P-A (SG)
Title: Predictive diagnostics systems and methods using vacuum pressure control valves
Inventor: CHAMBERLAIN DAVID BRIAN
IPC: F16K51/02
Filed: 2017-05-08
Abstract: INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property MD HIM 0 11101 010 11111 010 1111 1 0 I 011E1 100 HO 1101 011 11110 ill OEN Organization International Bureau (10) International Publication Number (43) International Publication Date .....0\"\" WO 2017/196702 Al 16 November 2017 (16.11.2017) WIPO I PCT (51) (21) (22) (25) Filing Language: (26) (30) (71) International Patent Classification: (72) Inventors: CHAMBERLAIN, David Brian; 7 Gosselin F16K 37/00 (2006.01) F16K 51/02 (2006.01) Avenue, Hooksett, New Hampshire 03106 (US). DAVID- KOVICH, Vladislav; 906 Gazebo Circle, Reading, Massa- International Application Number: PCT/US2017/031498 chusetts 01867 (US). BENEDICT, Scott; Two Clocktower Place, Apartment 2, Nashua, New Hampshire 03060 (US). International Filing Date: HILL, Gordon; 175 Lowell Street, Arlington, Massachu- 08 May 2017 (08.05.2017) setts 02474 (US). English (74) Agent: MILLS, Steven M. et al.; Burns & Levinson LLP, 125 Summer Street, Boston, Massachusetts 02110 (US). Publication Language: English (81) Designated States (unless otherwise indicated, for every Priority Data: kind of national protection available): AE, AG, AL, AM, 62/333,989 10 May 2016 (10.05.2016) US AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, 15/581,875 28 April 2017 (28.04.2017) US CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, Applicant: MKS INSTRUMENTS, INC. [US/US]; 2 DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, Tech Drive, Suite 201, Andover, Massachusetts 01810 HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, KP, KR, (US). KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, (54) the (57) valve position and a difference between the measured valve conductance and a predefined metric of conductance versus angular valve C;N position. Title: PREDICTIVE DIAGNOSTICS SYSTEMS AND METHODS USING VACUUM PRESSURE CONTROL VALVES 2.0 = = _ 1.8 ...--- --104 = = t6 ,-- 116 t... = .... —z\"--- 112 112 = 1,4 '''''' . --\.\"------ 108 Typical - 108 = 1.2 • — Min - 104 — = 5 r Max ---- 116 = 0 0.8 0.6 0.4 1 • »•••••••••••• AVG (\"Golden\") to _ = = = 0.0 0.2 4. • . = = the : Calibration includes measuring or function for use during operation of the valve. An actual angular valve position is set based on the received set point angular An actual system conductance and a difference between the actual system conductance and a reference system conductance system are determined. The diagnostic indication of a fault in the system is generated based on the actual angular valve position valve and the difference between the actual system conductance and the reference system conductance for the system. — 0 I 1 I 50 100 150 % Open Fig. 1 of a valve in a vacuum system and providing a diagnostic indication in the vacuum system using the call- conductance of the valve as a function of angular valve position and generating a conductance calibration = = el bration 0 IN map 1-1 ---, for I N of 1-1 0 ei O [Continued on next page] WO 2017/196702 Al MIDEDIMOMOIDEIRMEMOMOHEIRE1101011MEMOIMIE PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (84) Designated States (unless otherwise indicated, for every kind of regional protection available): ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG). Published: — with international search report (Art. 21(3))