baber/WOPTO huggingface dataset:
Patent KR-20030014372-A (KR)
IPC: H01L27/105
Filed: 2001-03-21
Abstract: 자기 메모리 디바이스들에서 사용하기 위한 자속 집중기(flux concentrator)를 제조하는 방법은 적어도 하나의 자기 메모리 비트(10)를 제공하는 단계와, 그 자기 메모리 비트 가까이에 자속 집중 층(52)을 포함하는 구리(Cu) 다마신 비트 선(56)을 규정하는 재료 스택을 형성하는 단계를 포함한다.  그 방법은 그 자기 메모리 비트(10) 가까이에 하부 유전층(32), 임의 에칭 정지 층(34) 및 상부 유전층(36)을 침착하는 단계들을 포함한다.  트렌치(38)는 그 상부 유전층(36) 및 그 하부 유전층(32)내에 에칭된다.  제 1 장벽 층(42)은 트렌치(38)에 침착된다.  다음으로, 금속 시스템(29)은 제 1 장벽 층(42)의 표면상에 침착된다.  금속 시스템(29)은 구리(Cu) 시드 재료(44), 도금된 구리(Cu) 재료(46), 제 1 외부 장벽 층(50), 자속 집중 층(52), 및 제 2 외부 장벽 층(54)을 포함한다.  금속 시스템(29)은 구리(Cu) 다마신 비트 선(56)을 규정하기 위해 패터닝되고 에칭된다.
Patent KR-20030012892-A (KR)
IPC: G11C7/00
Filed: 2000-06-22
Abstract: 균형화된 이중-에지 트리거식 비트 이동 회로(200)는 저 스큐 또는 에지-정렬식 상보적 클럭 신호를 생성하기 위한 클럭 회로(206)와, 상보적 클럭 신호에 응답하여 데이터 비트를 이동시키는 시프트 레지스터(208)를 포함한다.
Patent KR-20030058961-A (KR)
IPC: C09K5/04
Filed: 2001-11-09
Abstract: 본 발명은, 고온 열펌프에 있어서 작동 액체로서  1,1,1,3,3-펜타플루오로부탄(R365mfc)과, 1,1,1,2-테트라플루오로에탄(R134a), 펜타플루오로에탄(R125), 1,1,1,3,3-펜타플루오로프로판(R245fa) 및 1,1,1,2,3,3,3-헵타플루오로프로판(R227ea)으로 이루어지는 군으로부터의 적어도 하나의 다른 부분 플루오르화 탄화수소를 포함하는 액체의 이용에 관한 것이다. 본 발명에 따른 냉각 액체는 높은 온도 유동성(drift)에 특징이 있다.
Patent KR-20040062292-A (KR)
Inventor: HONG JOONG HEE
IPC: A23L19/00
Filed: 2003-01-02
Abstract: PURPOSE: A filling for making kimchi containing ginseng in shredded or pulverized powder form is provided. It enables a consumer, in particular children who dislikes ginseng to easily take ginseng beneficial to good health. CONSTITUTION: The filling for making kimchi comprises 20 to 40% by weight of ginseng and 80 to 60% by weight of a radish in shredded or pulverized powder form. For an example, a radish and ginseng are mixed with 4 roots of green onion, 50g green onion, 50g parsley, a clove of garlic, 30g ginger, 1/2 cup fish sauce(shrimp), 1/2 cup red pepper powder, 3 cups coarse salt, a suitable amount of purified salt, sugar, table salt, sliced red pepper and roasted sesame to give a filling for making kimchi.
Patent KR-20030014304-A (KR)
Title: Liquid vessel to receive straw for sucking and releasing contents
Inventor: LEE JEONG MIN
IPC: B65D33/38
Filed: 2003-01-13
Abstract: PURPOSE: Provided is a liquid vessel to receive a straw for sucking and releasing contents which forms an airtight part narrower than the internal wall part of an entrance in a spout so that it makes ease of inserting the straw into the internal side of the spout. CONSTITUTION: The liquid vessel to receive the straw for sucking and releasing the contents is characterized by comprising the parts of: the spout(10) which is adhered to one edge of the liquid vessel to include a separate straw(20) for sucking or releasing the contents within the liquid vessel; and the airtight part(11) which is formed at a certain location of the internal wall part of the spout with forming a certain type.
Patent KR-20040066608-A (KR)
Inventor: HONG SUN GUK
IPC: H01J9/42
Filed: 2003-01-20
Abstract: PURPOSE: A repair apparatus and a repair method are provided to check the state of substrate processing and perform a substrate repair in an accurate manner by controlling tools in accordance with the state of substrate processing. CONSTITUTION: A repair apparatus comprises a sensor(54) mounted on a substrate(52), and which generates cross section data of the substrate; a sensor moving unit(60) for moving the sensor in the thick-wise direction of cross section of the substrate; a controller(56) for creating three-dimensional shape data of the substrate by combining cross section data of the sensor, and judging defects of the substrate by comparing the created shape data and shape data of the substrate; a tool(58) for repairing defects of the substrate by being controlled by the controller; and a tool conveying unit(70) for conveying the tool in accordance with the judgment of the controller.
Patent KR-20040067169-A (KR)
Inventor: BAEK SEUNG GIL
IPC: G06F13/14
Filed: 2003-01-22
Abstract: PURPOSE: A device for setting an operation mode between the master/slave CPU is provided to make one CPU operated as a master and another operated as a slave, and enable the master/slave mode change during operation. CONSTITUTION: A circuit provides a signal of the first logic state that is previously set in order to make an operation mode setting terminal of the slave CPU(14) understand the slave operation when the system power is turned on, and inverts the logic state of the signal provided to the operation mode setting terminal of the slave CPU depending on the first control signal of the master CPU(12). A logic circuit provides the second control signal of the master CPU to a reset terminal of the slave CPU. If the operation state of the slave CPU is abnormal, the master CPU resets the slave CPU by providing the first control signal to the circuit and providing the second control signal to the logic circuit.
Patent KR-20030065344-A (KR)
Title: 게이지의 사용에 의하여 접촉 단자의 평평함을 쉽게점검하도록 하는 구조를 갖는 표면-장착 가능한 커넥터 및게이지
IPC: H01R12/57
Filed: 2003-01-24
Abstract: 커넥터(1)는 절연체(2) 및 4 열의 접촉부(3)를 포함한다.  절연체(2)는 거의 직사각형 평행육면체의 형태를 가지며 두 개의 컷-오프 형태의 에지(2B) 및 그루브(2C)를 갖는다.  상기 컷-오프 형태의 에지(2B)는 X-방향에서의 하부측 및 X-방향에 수직인 Y-방향에서의 대향측 상에 제공된다.  그루브(2C)는 상기 절연체 (2)의 하부면(2F)에 제공된다.  상기 컷-오프 형태의 에지(2) 및 그루브 (2C)는 X- 및 Y-방향에 수직인 Z-방향으로 일직선으로 연장된다.  각각의 접촉부 (3)는 곡선 모양의 부분(3B) 및 평평한 말단 부분(3C)을 갖는다.  상기 측면(2E)에 가장 가까운 두 개의 열에 속하는 상기 접촉부(3)의 곡선 모양의 부분(3C) 및 평평한 말단 부분(3C)은 컷-오프 형태의 에지(2B) 내에 위치된다.  다른 곡선 모양의 부분(3B) 및 다른 평평한 말단 부분(3C)은 그루브(2C) 내에 위치된다.  모든 평평한 말단 부분(3C)은 통상적으로 동일한 레벨 상에 존재한다.  이것을 점검하기 위하여, 게이지(6)가 사용된다.  점검 동안, 커넥터(1)는 평평한 말단 부분 (3C)이 게이지(6)의 각 갭(6B2, 6C2, 6D2, 6D4) 내로 삽입되는 동안 상기 게이지의 상부면(6A) 상으로 슬라이딩된다.  평평한 말단 부분들(3C)중 하나가 상기 게이지(6)의 측 돌출부(6B1, 6C1, 6D1, 6D3)와 충돌하는 경우, 커넥터(1)는 결함있는 것으로 판단된다.
Patent KR-20040068418-A (KR)
Inventor: KWAK JONG UN
IPC: G09G3/296
Filed: 2003-01-25
Abstract: PURPOSE: An apparatus for driving a plasma display panel is provided to reduce size of a data board by separating a data driver from the data board. CONSTITUTION: A display panel is provided with pixel cells formed on a crossing portion of first and second sustain electrodes for a discharge and a data electrode in a matrix form. A data driver module(168) drives the data electrode. A data board(170) is connected to the data electrode and the data driver module. The data driver module includes a data driver for driving the data electrode and an energy recovery circuit(160). The energy recovery circuit is connected to the data driver to reduce power consumption upon driving the data electrode. The data board includes ports(172), buffers(152), first connectors(154), and second connectors(150).
Patent KR-20040072346-A (KR)
Inventor: JUNG TAE U
IPC: H01L21/027
Filed: 2003-02-12
Abstract: PURPOSE: A photoresist coating apparatus for semiconductor is provided to identify a degree of pollution within an exhaust collection box by installing a pollution sensor on an inner wall of the exhaust collection box. CONSTITUTION: A semiconductor wafer is loaded into a bowl(101). An exhaust collection box(105) includes an internal region connected to the bowl. A plurality of pollution sensor(110) is installed on an inner wall of the exhaust collection box in order to measure a state of pollution within the exhaust collection box. A vacuum generation unit(107) provides the predetermined vacuum pressure to the bowl and the exhaust collection box. A state is installed within the bowl. The stage is rotated and the semiconductor wafer is loaded on the surface of the stage.
Patent KR-20030025251-A (KR)
Inventor: KIM DAE SEONG
IPC: C12N9/24
Filed: 2003-02-17
Abstract: PURPOSE: A process for preparing xylanase using a strain of Trichoderma reesei X18 is provided, thereby the xylanase which has improved xylane-decomposing activity can be mass-produced. CONSTITUTION: The process for preparing xylanase using a strain Trichoderma reesei X18 comprises culturing Trichoderma reesei X18 (KCTC 10050BP) in a CZAPEK-DOX broth, wherein the CZAPEK-DOX broth contains 0.01 to 50g/l of malt, 5 to 40g/l of rice straw, 1 to 5g/l of NaNO3, 1 to 5g/l of K2HPO4, 0.1 to 1g/l of MgSO4, 0.1 to 1g/l of KCl and 0.1 to 1g/l of FeSO4, or alternatively contains 2 to 10g/l of corn xylane, 1 to 5g/l of NaNO3, 1 to 5g/l of K2HPO4, 0.1 to 1g/l of MgSO4, 0.1 to 1g/l of KCl and 0.1 to 1g/l of FeSO4. The xylanase derived from Trichoderma reesei X18 has (a) optimum pH of 5.0, (b) optimum temperature of 55deg. C and (c) substrate specificity for oat xylane of 100% and for arabinoxylane of 173% at pH 6.5 and 37deg. C.
Patent KR-20040075602-A (KR)
Inventor: KIM KANG HO
IPC: A01G31/00
Filed: 2003-02-22
Abstract: PURPOSE: A method of growing bean sprouts using fermented sawdust liquid is provided. It prevents the incidence of spoilage during culturing and recycles fermented sawdust liquid, thereby remarkably reducing the quantity of water being used and improving productivity. CONSTITUTION: During growth of bean sprouts, fermented sawdust liquid is used as cultivation water, discharged fermented sawdust liquid also is reused as cultivation water. The bean spouts are selected from the group consisting of soybean sprouts, green bean sprouts, radish sprouts and germinated unpolished rice. For an example, 2 ton sawdust having a moisture content of 70% is mixed with 50g raw sugar, 40g rice bran and strains and fermented with 20L ground water and 200kg sesame dregs for 1 month to give fermented sawdust, which is mixed with ground water in a ratio of 10:90, allowed to settle for 24hr and filtered to give fermented sawdust liquid.
Patent KR-20040078852-A (KR)
Inventor: KIM YEONG MI
IPC: C10L5/48
Filed: 2003-03-05
Abstract: PURPOSE: Provided are a method for preparing a solid fuel by using combustible waste and a device for preparing thereof which are able to reduce costs for treating waste, consumption of accompanying equipments and various problems of waste such as environmental contamination. CONSTITUTION: The device comprises a sorter supplying combustible waste collected from industrial field to remove foreign materials therefrom, a crusher(200) crushing the combustible waste discharge from the sorter, a magnetic sorter(300) removing ferrous ingredients from the crushed combustible waste, a high-speed melting mixer(400) melting the sorted waste and rapidly cooling the molten waste to mold it into a pellet, a storing place(500) storing the pellet discharged from the high-speed melting mixer, a baling machine(600) baling the pellet and a taking-out machine(700) for taking out the baled pellet.
Patent KR-20040078977-A (KR)
Inventor: JUNG SEUNG WON
IPC: H01H21/22
Filed: 2003-03-05
Abstract: PURPOSE: A combination switch for a vehicle is provided to reduce the complexity of a lower portion in a vehicle steering wheel by controlling a cruise function and an audio function. CONSTITUTION: An operation knob(200) is coupled to a switch body(100) so that a predetermined length is exposed to a direction. The operation knob is operated up and down and right and left. A sliding unit is provided on the switch body and linked together to a direction or another direction by the operation knob. The operation knob is constituted by a lower side knob(220) coupled to the switch body, an upper side knob(260) coupled to an end of the lower side knob, and a central knob(280) disposed between the upper side knob and the lower side knob. A push button is mounted on an end of the upper side knob.
Patent KR-20030041883-A (KR)
Inventor: SONG BYEONG MUN
IPC: E03D9/08
Filed: 2003-03-06
Abstract: PURPOSE: A bidet apparatus is provided to achieve improved user convenience by permitting the bidet apparatus to output voice data in accordance with the mode selection of a user. CONSTITUTION: A bidet apparatus(10) comprises a water reservoir(12) for storage of water; a chamber pot body(14) having a bottom connected to a water drain pipe, and which is washed off by the water supplied from the water reservoir after use; a seat(16) installed along the upper outer circumference of the chamber pot body; an injection nozzle(20) arranged at the rear portion of the chamber pot body in such a manner that the injection nozzle moves forward/backward and sprays water to the anus of a user; and a control panel(30) for performing a normal key operation, and which includes a voice data output function button(38) for selecting a tape record reproducing function or a voice data reproducing function and an automatic or manual mode. The control panel further includes a speaker(40) for outputting the sound generated by the operation of the voice data output function data, a memory for storing data, and a microphone(50) for recording voice of a user.
Patent KR-20040082785-A (KR)
Inventor: LEE SEONG HAN
IPC: H01L21/205
Filed: 2003-03-20
Abstract: PURPOSE: An apparatus for fabricating a semiconductor device is provided to precisely measure the pressure in an exhaust pipe by preventing a solid from being generated from byproducts exhausted after a fabricating process is performed in a connection pipe of a pressure measuring apparatus. CONSTITUTION: A process chamber is prepared. Gases in the process chamber is exhausted through an exhaust pipe connected to a pump. A heating unit heats the exhaust pipe to a predetermined temperature. A sensor unit measures the pressure in the exhaust pipe. The exhaust pipe is connected to the sensor unit by a connection pipe(340). A pressure measuring apparatus includes the sensor unit and the connection pipe. A through hole(342) through which the inside of the sensor unit is connected to the inside of the exhaust pipe is formed in the connection pipe. A blocking unit(344) which prevents the temperature of the inner wall of the through hole from being maintained at a low temperature by an external temperature is formed in the connection pipe.
Patent KR-20040085470-A (KR)
Inventor: KIM MUN CHEOL
IPC: H04N9/64
Filed: 2003-03-31
Abstract: PURPOSE: A color conversion device and a color conversion method are provided to reproduce the most similar color corresponding to a standard input color signal in a target device by converting the inputted standard color signal to match a color gamut of the inputted standard color signal with a color gamut of the target device. CONSTITUTION: An input unit having a linear correction unit(100) and a CIE color signal converting unit(200) converts an inputted first color signal into the second color signal, and outputs the second color signal. A color gamut matching unit(300) outputs the third color signal in which the second color signal is corrected to match a standard color gamut of the first color signal with a color gamut of a target device. An output unit having an RGB color signal converting unit(400) and a tone curve compensating unit(500) converts the third color signal into a color signal usable in the target device, and outputs the converted color signal.
Patent KR-20040088659-A (KR)
Inventor: LEE HYEOK
IPC: F04B39/10
Filed: 2003-04-10
Abstract: PURPOSE: A valve assembly for a compressor is provided to increase response of a valve by increasing stiffness of valve springs without increasing weight of the valve springs. CONSTITUTION: A discharge cover(110) is mounted at the discharge side of a cylinder(1), having a discharge space to be communicated with a compression space of the cylinder. A discharge valve(120) is installed to move inside the discharge cover in a direction of piston motion for dividing the compression space and the discharge space. A plurality of valve springs(130) support the back of the discharge valve so that the discharge valve elastically opens and shuts the compression space of the cylinder.
Patent KR-20040091211-A (KR)
Inventor: CHOI GYEONG CHANG
IPC: G06F9/06
Filed: 2003-04-19
Abstract: PURPOSE: A method for optimizing system performance using stack change on the RTOS(Real Time Operating System) is provided to largely improve the system performance by optimizing a system as a stack pointer is reallocated/moved to an embedded SRAM by measuring/analyzing task execution time/frequency of a stack of an external RAM. CONSTITUTION: A task management program stored in a microcomputer continuously detects a stack point changing time of the task. In case of the stack changing time, a sub routine is executed by searching the task of the largest occupation time during program execution. If the task of the largest occupation time is searched, the stack of the task is moved to a reserved area of the embedded SRAM. A task scheduler processes the task by searching the currently executed task under a memory map of the changed stack.
Patent KR-20030087573-A (KR)
Title: 직조된 필름의 고체 청정제 홀더의 제조장치
IPC: C11D13/00
Filed: 2003-05-07
Abstract: 본 발명은 직조된 필름 고체 청정제 홀더(160)를 제조하는 장치(1)에 대한 것이다. 고체 청정제 공급 컨베이어(2)는 제 1 프레임워크(3) 상에 수평방향으로 회전가능하게 장착되어 있고, 다수의 이격된 고체 청정제 보유포켓(holding pocket)들을 구비한다. 필름 풀기 상단롤러(5)와 필름 풀기 하단롤러(6)를 포함하는 필름 공급 유닛은 공급 컨베이어의 공급단(8)에서 스탠드(7) 상에 회전가능하게 장착되어 있다. 고체 청정제 홀더 형성유닛(31)은 공급 컨베이어의 방출단(36)에 가깝게 위치하는 제 2 프레임워크(35) 상에 장착되어 있다. 고체 청정제 홀더 밀봉 유닛(41), 고체 청정제 홀더 절단유닛(59), 필름 세단유닛(84; film scoring unit)과, 수평방향으로 회전가능한 폐기 필름 운반 컨베이어(98)가 고체 청정제 홀더 형성유닛과 직렬로 제 2 프레임워크에 장착되어 있다. 다수의 필름 인장 롤러(100)와 다수의 필름 견인유닛(100a, 100b, 100c, 100d)이 직조된 필름의 경로에 제공된다. 간헐 차동 드라이브 유닛이 공급 컨베이어, 대향 회전 컨베이어, 필름 세단유닛, 폐기 필름 운반 컨베이어 및 필름 견인유닛에 연결되어 있다(도 1).
Patent KR-20040099559-A (KR)
Inventor: KANG SEONG U
IPC: F16D65/18
Filed: 2003-05-19
Abstract: PURPOSE: A working mechanism of a pneumatic brake device is provided to prevent excessive rotation of a brake cam caused by excessive wear of a lining and an error of return of the brake cam, by restricting a rotating angle of the brake cam. CONSTITUTION: A working mechanism of a pneumatic brake device comprises a chamber having a push rod moving by compressed air supplied in braking; a brake cam(14) pressing and rotating a brake shoe having one end pivoted on an anchor bracket(18) to make the brake shoe expanded to the inner peripheral surface of a brake drum; a cam shaft connecting the push rod and the brake cam and making the push rod and the brake cam interlock; and a rotation restriction unit restricting the rotating degree of the brake cam to a level of enabling return of the brake cam when braking is released.
Patent KR-20040086048-A (KR)
Inventor: CHO GEON HO
IPC: H04N9/31
Filed: 2003-05-24
Abstract: PURPOSE: A high efficiency projection system is provided to minimize a system by scrolling a color bar through one scrolling unit and increase light efficiency by effectively utilizing a polarization component. CONSTITUTION: A high efficiency projection system includes a light source(10) and a beam splitter(15) for splitting an incident light according to a color thereof. A scrolling unit(20) includes at least one lens cell and converts a rotating motion of the lens cell to a linear motion of the lens cell in order to scroll the incident light. A light valve(40) processes the light passing through the beam splitter(15) and the scrolling unit(20) according to an image signal in order to form a color image. A transmitting lens unit(45) expansively transmits the color image formed by the light valve(40) to a screen.
Patent KR-20040102521-A (KR)
Inventor: KANG HO MIN
IPC: G03F7/16
Filed: 2003-05-28
Abstract: PURPOSE: A coating device is provided to carry out selective coating with a photosensitive liquid to only desired area by forming pluralities of discharging parts in a nozzle, and thus to minimize the amount of the photosensitive liquid and to eliminate an additional process for removing certain parts of the coated layer. CONSTITUTION: The coating device comprises: a supporting plate; a nozzle for spraying the photosensitive liquid to a substrate mounted on the supporting plate; a device for supplying the photosensitive liquid to the nozzle; and a transferring device to relatively move the nozzle and the substrate, wherein the nozzle has pluralities of discharging parts(220a, 220b, 220c) for the photosensitive liquid.
Patent KR-20040105026-A (KR)
Inventor: HAN JIN CHEOL
IPC: D06F37/40
Filed: 2003-06-04
Abstract: PURPOSE: A washing machine is provided to adjust the position of the brake lever accurately and easily, and to prevent power conversion failure or wrong operation of the drain valve by adjusting the clearance between the connecting member and the brake lever with the clearance adjusting member. CONSTITUTION: A washing machine comprises a dehydrating tub rotated and installed in a water tub(11), a braking apparatus installed in the lower part of the dehydrating tub to brake the dehydrating tub, a drain valve(42) mounted in the lower part of the water tub, a pulling unit(43) connected to the drain valve by a connecting member(45) to open and close by pulling or releasing the drain valve, a brake lever(30) extended from the braking apparatus and coupled to the connecting member to operate the braking apparatus, and a clearance adjusting member(50) formed between the brake lever and the connecting part to adjust the position of the brake lever by adjusting the clearance between the brake lever and the connecting member.
Patent KR-20040106916-A (KR)
Inventor: LEE HYUN YEOP
IPC: G06F15/02
Filed: 2003-06-05
Abstract: PURPOSE: A small sized keyboard for one hand is provided to reduce the size of a conventional keyboard for both the hands into the size for one hand while practically maintaining the arrangement of the keys in a conventional keyboard by symmetrically overlapping left hand side keys with right hand side keys of the conventional keyboard. CONSTITUTION: The device comprises general keys and a toggle key(22). The general keys are arranged by symmetrically overlapping left hand side keys with right hand side keys in the conventional keyboard. The toggle key(22), if pushed, enables a user to input vowels and consonants arranged in conventional left hand keys, but if not pushed, to input vowels and consonants arranged in conventional right hand keys.
Patent KR-20030097708-A (KR)
IPC: F01D25/12
Filed: 2003-06-19
Abstract: An embedded microcircuit (5) for producing an improved cooling film over a surface of a part, comprises an inlet through which a coolant gas may enter, a circuit channel (29) extending from the inlet through which the coolant gas may flow, and a slot film hole (31) formed at a terminus of the circuit channel (29) through which the coolant gas may exit a part. <IMAGE>
Patent KR-20050003011-A (KR)
Inventor: CHUNG CHAI O
IPC: H01L21/76
Filed: 2003-06-30
Abstract: PURPOSE: A method for forming a trench isolation layer of a semiconductor device is provided to prevent voids in a trench having high aspect ratio by periodically and repeatedly depositing and etching. CONSTITUTION: A pad nitride layer(12) is formed on a semiconductor substrate(10). A trench is formed in the substrate. A first HDP(High Density Plasma) oxide layer is formed at the bottom and the side of the trench. The first HDP oxide layer is partially etched by using NF3 gas, thereby forming an etched first HDP oxide layer(14). A second HDP oxide layer(15) is formed on the etched first HDP oxide layer and partially etched by using NF3 gas. The third HDP oxide layer is formed on the etched second HDP oxide layer, thereby filling entirely the trench.
Patent KR-20050002089-A (KR)
Inventor: LEE BYOUNG KI
IPC: H01L21/8247
Filed: 2003-06-30
Abstract: PURPOSE: A method of manufacturing a flash memory device is provided to improve the difference of EFH(Effective Field oxide Height) between a high voltage transistor region and a low voltage transistor/cell region by removing partially a protrusion of an isolation layer from each region using two-step etching. CONSTITUTION: A semiconductor substrate(21) with a high voltage transistor region(HV) and a low voltage transistor/cell region(LV/CELL) is provided. At this time, A first gate oxide layer(22A) and a first polysilicon layer(23) are formed between first isolation layers within the high voltage transistor region and a second gate oxide layer(22B) and the first polysilicon layer are formed between second isolation layers within the low voltage transistor/cell region. A planarizing layer is formed thereon. The planarizing layer and the first isolation layers are partially removed from the low voltage transistor/cell region by using first etching. The planarizing layer and the first and second isolation layers are partially removed from each region by using second etching.