baber/WOPTO huggingface dataset:
Patent JP-2023084076-A (JP)
Title: Device for simulating transition and alteration of organic pollutants in soil
Inventor: Jiang Dengdeng
IPC: E02D1/04
Filed: 2022-06-15
Abstract: SOLUTION: To provide a device which includes a mounting plate, wherein sequentially from left to right, the mounting plate is equipped with a soil sampling device, a transport belt, a controller, and a support frame, a number of soil columns and drenchers corresponding to the support frame are provided, the soil column and the drencher communicate with each other through a pipeline, a horizontal rail is installed on the support frame, a soil distribution device is slidably arranged on the horizontal rail, a large number of position sensors are provided on the horizontal rail, a material level sensor is provided at an upper end opening of the soil column, the controller is electrically connected to the soil sampling device, the transport belt, the soil distribution device, the drencher, the position sensor, and the material level sensor, respectively, and controls the soil sampling of the soil sampling device, the rotation of the transport belt, the movement of the soil distribution device on the horizontal rails, the filling of the corresponding soil column with soil by the soil distribution device, and the injection of organic pollutants into the soil column.EFFECT: Reliability of experimental data can be improved by reducing artificial intervention factors.SELECTED DRAWING: Figure 1
Patent JP-2023183667-A (JP)
Title: リザーバタンク及びブレーキ液圧発生装置
IPC: B60T11/26
Filed: 2022-06-16
Abstract: 【課題】一例として、設計の自由度を向上可能なリザーバタンクを得る。【解決手段】実施形態に係るリザーバタンクは、一例として、アッパケースと、前記アッパケースに結合されたロアケースと、前記アッパケースから前記ロアケースに向かって延び、互いに結合された前記アッパケース及び前記ロアケースの内部の空間に含まれる第１の部屋と第２の部屋とを水平方向に区切る、隔壁と、前記第１の部屋を下方から覆う第１の壁と、前記第１の壁から上方に向かって突出するとともに前記隔壁に当接した第２の壁と、を有する区画部材と、を備え、前記隔壁に、当該隔壁の下方の縁に開口するとともに前記第１の部屋と前記第２の部屋とを連通する第１のスリットが設けられ、少なくとも前記第１のスリットの縁と前記第２の壁とが、前記第１の部屋と前記第２の部屋とを連通するとともに前記第１の壁よりも上方に位置する第１の孔を形成する。【選択図】図２
Patent JP-2024000797-A (JP)
Title: 情報処理装置、情報処理方法、および情報処理プログラム
IPC: G06V10/26
Filed: 2022-06-21
Abstract: 【課題】特定対象の撮影を支援する。【解決手段】本実施形態の情報処理装置１０は、特定対象領域検出部２０Ｂと、写込領域検出部２０Ｃと、判定部２０Ｄと、を備える。特定対象領域検出部２０Ｂは、撮影画像から特定対象の特定対象領域を検出する。写込領域検出部２０Ｃは、撮影画像から特定対象の写込領域を検出する。判定部２０Ｄは、特定対象領域および写込領域に基づいて特定対象の非写込領域を判定する。【選択図】図１
Patent JP-2024001699-A (JP)
Title: プログラム、情報処理装置及び画像形成システム
IPC: G06F3/12
Filed: 2022-06-22
Abstract: 【課題】複数の印刷ジョブについて印刷を行うに当たり、印刷の開始を早くすることができるようにする。【解決手段】情報処理装置に、第１、第２の印刷ジョブを画像形成装置に送信させるようになっている。操作部において第１の印刷ジョブに第２の印刷ジョブを連結する選択がされた場合に、第１の印刷ジョブの終端コマンドを削除するステップと、終端コマンドが削除された第１の印刷ジョブを画像形成装置に送信するステップと、第１の印刷ジョブを画像形成装置に送信した後に、第２の印刷ジョブを画像形成装置に送信するステップとを情報処理装置に実行させる。画像形成装置は、印刷ジョブを受信すると、直ちに印刷ジョブの解析を開始することができる。複数の印刷ジョブについて印刷を行うに当たり、印刷の開始を早くすることができる。【選択図】図１
Patent JP-2023018648-A (JP)
Title: LATEXES WITH pH-RESPONSIVE RESIN PARTICLES
Inventor: SEPEHR M TEHRANI
IPC: B41J2/01
Filed: 2022-06-23
Abstract: To provide latexes for aqueous inkjet ink exhibiting excellent water fastness, low gloss differential values and high adhesion.SOLUTION: Latexes are provided which may comprise water and resin particles, the resin particles comprising a polymerization product of reactants comprising a dioxane/dioxolane monomer and an additional monomer, where the dioxane/dioxolane monomer is an ester of (meth)acrylic acid with an alcohol comprising a dioxane moiety, an ester of (meth)acrylic acid with an alcohol comprising a dioxolane moiety, or both.SELECTED DRAWING: None
Patent JP-2024005393-A (JP)
Title: 車両の前部車体構造
IPC: B60R19/24
Filed: 2022-06-30
Abstract: 【課題】フード前縁と、これに対向する前部車体構造との隙間の調整を容易にする。【解決手段】フード１４の前縁１４ａと前部車体構造の一部であるグリルモール２４との間に隙間ｄが形成されている。グリルモール２４は、調整クリップ２６によりバンパ取付部品２２に取り付けられている。調整クリップ２６は、バンパ取付部品２２に装着される軸部品３２と、グリルモール２４に装着される環状部品３４を含む。軸部品３２と環状部品３４は、同軸配置され、ねじ結合している。軸部品３２を回転させることで、軸線方向における環状部品３４に対する位置が変更され、グリルモール２４の上下方向の位置が調整されて隙間ｄが調整される。【選択図】図３
Patent JP-2024007737-A (JP)
Title: 基板処理装置
IPC: H01L21/3065
Filed: 2022-07-06
Abstract: 【課題】プラズマ処理を行う基板処理装置において、窓部材とカバー部材との間に隙間が生じるのを抑制する。【解決手段】基板が載置される載置台と、前記載置台の上方に設けられた窓部材を有し、前記載置台と前記窓部材との間に処理空間を画成する処理容器と、前記窓部材の上方に設けられ、前記処理空間内の処理ガスをプラズマ化するプラズマ生成部と、前記窓部材の前記処理空間側を覆うカバー部材と、前記カバー部材を前記窓部材に対して固定する固定機構と、を備え、前記窓部材と前記カバー部材との間に中空部が形成されており、前記固定機構は、前記中空部に設けられ、前記カバー部材を前記窓部材に向けて付勢する弾性部材を有し、前記弾性部材の弾性力により、前記カバー部材を前記窓部材に対して固定する、基板処理装置である。【選択図】図４
Patent JP-2024010384-A (JP)
Title: シングルサインオン認証システムおよびシングルサインオン認証装置
IPC: G06F21/41
Filed: 2022-07-12
Abstract: 【課題】ユーザの作業負荷を軽減することが可能なＳＳＯ認証システムおよびＳＳＯ認証装置を提供する。【解決手段】ＤＨＣＰサーバ１１は、ユーザ端末ＴＭ１０，ＴＭ２０にＩＰアドレスを割り当てた際に、割り当てたＩＰアドレスと、ユーザ端末のＭＡＣアドレスとの対応関係をＩＰ管理テーブル２２に登録する。ＳＳＯ認証サーバ１２は、ＳＳＯの認証を許可するＭＡＣアドレスが予め登録される認証テーブル２４を保持する。そして、ＳＳＯ認証サーバ１２は、ユーザ端末から認証要求を含むパケットを受信した際に、受信したパケットの送信元ＩＰアドレスに対応するＭＡＣアドレスをＤＨＣＰサーバ１１から取得し、取得したＭＡＣアドレスの認証テーブル２４への登録有無に基づいて、ＳＳＯの認証許否を判定する。【選択図】図１
Patent JP-2023014026-A (JP)
Title: Manually operated sound apparatus
Inventor: WAKAMIYA SATOKO
IPC: A63H5/00
Filed: 2022-07-12
Abstract: To provide a manually operated sound apparatus which no user needs to be conscious about the posture of a body part in emitting sound and which is free from breaking under rough handling.SOLUTION: A manually operated sound apparatus 1 includes: a body part 3; a grip part 7 held by user's hands 5; and a sound generation part 9. The body part 3 is equipped with a containment part 11 containing filling materials 4 which is compressible and is restored, with a compressive force released and which has sound communicability, and is equipped with a hollow part 13 in which user's hands 5 enter. The grip part 7 is arranged in the hollow part 13 in a fastened state. The sound generation part 9 is installed in the grip part 7 and, with the grip strength of the hands 5 added to the grip part 7, is operated by the grip strength to generate sound. The body part 3 is structured to emit sound generated from the sound generation part 9 at least through the containment part 11 to the outside.SELECTED DRAWING: Figure 2
Patent JP-2023043833-A (JP)
Title: Silicon carbide substrate and manufacturing method thereof
Inventor: KONISHI KUMIKO
IPC: H01L29/78
Filed: 2022-07-13
Abstract: To improve the efficiency of converting basal plane dislocations (BPDs), defects that degrade electrical conduction reliability, into harmless defects, threading edge dislocations (TEDs) in a silicon carbide substrate, and improve the reliability of the silicon carbide substrate by preventing minority carrier injection into the substrate.SOLUTION: In a silicon carbide substrate having a SiC substrate 1 and a first semiconductor layer 11, a second semiconductor layer 2, and a drift layer 3 which are epitaxial layers formed on a SiC substrate 1 in order, and the impurity concentration of the first semiconductor layer 11 is made lower than that of the SiC substrate 1 and the second semiconductor layer 2, and the second semiconductor layer 2 is formed with a high impurity concentration or a thick film.SELECTED DRAWING: Figure 2
Patent JP-2024011299-A (JP)
Title: 直流回路
IPC: H01H85/02
Filed: 2022-07-14
Abstract: 【課題】部品点数を減らすことができるともに、安全にヒューズの交換を行うことが可能な直流回路を提供する。【解決手段】第１電源回路３０と第２電源回路５０を接続する直流回路１であって、直流回路１は、配線遮断器１１とヒューズ１７を備え、配線遮断器１１は、一次側第１端子１３ｂと、一次側第２端子１３ｃを少なくとも備えると共に、その二次側に二次側第１端子１５ｂと二次側第２端子１５ｃを少なくとも備え、一次側第１端子１３ｂは、第１電源回路３０の所定箇所に接続され、一次側第２端子１３ｃは、ヒューズ１７の一方の側に接続され、二次側第１端子１５ｂは、ヒューズ１７の他方の側に接続され、二次側第２端子１５ｃは、第２電源回路５０の所定箇所に接続されている直流回路１。【選択図】 図１
Patent JP-2022132656-A (JP)
Title: Wearable terminal, system, and display method
IPC: H04N5/64
Filed: 2022-07-25
Abstract: PROBLEM TO BE SOLVED: To provide a wearable terminal, a system, and a display method that can easily adjust a display position of an image. 
     SOLUTION: According to an embodiment, to a wearable terminal attached are a display that displays a display image and a projection device that projects the display image in front of a user to form a virtual image corresponding to the display image in front of the user. The projection device includes a lens that projects diverging light emitted from the display in front of the user, and a first user operation unit. The first user operation unit includes a rotating unit for adjusting a projection angle of the projection device. The user can adjust the display position of the virtual image in accordance with the shape or the size of the user's head by operating the first user operation unit while visually observing the virtual image to adjust the projection angle. 
     SELECTED DRAWING: Figure 6 
     COPYRIGHT: (C)2022,JPO&INPIT
Patent JP-2022141945-A (JP)
Title: Convertible surgical access port
IPC: A61B90/40
Filed: 2022-07-28
Abstract: PROBLEM TO BE SOLVED: To provide an interconnectable port adapted to be at least partially placed in an incision in a patient's body. 
     SOLUTION: An interconnectable port comprises first and second ports configured to be interconnected to form the interconnectable port. The second port is disconnectable from the first port. The first port is connected to a first portion of a flexible wall when the second port is connected to a second portion of the flexible wall. The flexible wall is adapted to form a chamber. 
     SELECTED DRAWING: Figure 51 
     COPYRIGHT: (C)2022,JPO&INPIT
Patent JP-2022169590-A (JP)
Title: Topical formulation for promoting wound healing
IPC: A61K9/06
Filed: 2022-08-04
Abstract: PROBLEM TO BE SOLVED: To provide a topical formulation for promoting wound healing in a diabetic patient having diabetic foot ulcer. 
     SOLUTION: A topical formulation comprises: (i) an active agent comprising salvigenin in an amount of about 0.0001% to 0.5% (w/w) and asiaticoside in an amount of about 0.05% to 5% (w/w); (ii) a viscosity increasing agent in an amount of about 1.0-10% (w/w); (iii) an ointment base in an amount of about 5-30% (w/w); (iv) an antimicrobial preservative in an amount of about 0.005-0.2% (w/w); and (v) an emulsifying agent in an amount of about 0.5-10% (w/w). 
     SELECTED DRAWING: None 
     COPYRIGHT: (C)2023,JPO&INPIT
Patent JP-2022166118-A (JP)
Title: Base station, terminal device, and method
IPC: H04W72/04
Filed: 2022-08-08
Abstract: PROBLEM TO BE SOLVED: To provide a method executed in a network device for reference signal (RS) transmission. 
     SOLUTION: A network device determines 510 a set of at least one CSI-RS resource for transmitting a tracking reference signal (TRS) to a terminal device. The network device further determines 520 a first offset between a first slot for transmitting a first signal for enabling transmission of the TRS and a second slot for transmitting the TRS with the set of at least one CSI-RS resource. The first offset is different from a second offset between a third slot for transmitting a second signal for enabling transmission of the CSI-RS and a fourth slot for transmitting the CSI-RS. The network device transmits 530, a configuration indicating a set of at least one CSI-RS resource and the first offset to the terminal device. 
     SELECTED DRAWING: Figure 5 
     COPYRIGHT: (C)2023,JPO&INPIT
Patent JP-2022176956-A (JP)
Title: Transparent double-sided conductive cover tape and resin composition for anti-static layer
IPC: C08K5/521
Filed: 2022-08-16
Abstract: PROBLEM TO BE SOLVED: To provide a transparent conductive cover tape which has sufficient seal strength and stable easy peelability, and exerts excellent antistatic property applicable to a package of an electronic component while maintaining high transparency. 
     SOLUTION: A transparent double-sided conductive cover tape for a carrier tape includes an anti-static layer 1, a base material layer 2 and an anti-static heat seal layer 3. The anti-static layer and the anti-static heat seal layer are outermost surface layers of the double-sided conductive cover tape. The anti-static layer contains binder resin, anti-static agent and a lubricant. The binder resin contains a polyester-based resin. The anti-static agent contains a conductive polymer. The content of the lubricant is 1-10 mass% in the anti-static layer. The surface resistivity of the anti-static layer is 1×10 4  Ω/square or higher and less than 1×10 10  Ω/square. The surface resistivity of the anti-static heat seal layer is 1×10 4  Ω/square or higher and less than 1×10 10  Ω/square. 
     SELECTED DRAWING: Figure 1 
     COPYRIGHT: (C)2023,JPO&INPIT
Patent JP-2023061357-A (JP)
Title: Cylinder
IPC: F16J10/04
Filed: 2022-08-16
Abstract: PROBLEM TO BE SOLVED: To provide a cylinder capable of obtaining a higher friction reduction effect. 
     SOLUTION: A cylinder is subjected to grooving on a cylinder inner peripheral surface. The grooving includes a honed groove, and a recessed groove having a groove width and a groove depth larger than those of the honed groove. The honed groove and the recessed groove extend in a cylinder circumferential direction, and have an inclination angle with respect to a direction perpendicular to a cylinder axial direction. The cylinder inner peripheral surface can be selected to have a length of 4 mm in which the recess grooves present at four or more locations in the cylinder axial direction, in a sliding region of an oil ring at a crank angle of 50° or more and 140° or less. 
     SELECTED DRAWING: Figure 1 
     COPYRIGHT: (C)2023,JPO&INPIT
Patent JP-2023035990-A (JP)
Title: Casing pushing-in and pulling-out device
Inventor: GOTO SHINICHI
IPC: E02D13/06
Filed: 2022-08-29
Abstract: To provide a novel epoch-making casing pushing-in and pulling-out device.SOLUTION: A casing pushing-in and pulling-out device comprises: a main body part 1 grasping a casing 50 for a cast-in place pile to push-in and pull-out with respect to the ground; a driving source part 2 supplying hydraulic oil for driving the main body part 1; and an operation part 3 operating the driving source part 2. The operation part 3 comprises a voice recognizing operation part performing a voice recognizing operation.SELECTED DRAWING: Figure 1
Patent JP-2022188064-A (JP)
Title: Plasma processing method
IPC: H01L21/3065
Filed: 2022-09-14
Abstract: PROBLEM TO BE SOLVED: To provide a plasma processing method by which generation of a foreign substance caused by a deposit can be reduced by removing a composite deposit of a metal and a non-metal deposited in a processing chamber by etching processing of a wafer in the plasma processing method for performing plasma etching on the wafer such as a semiconductor substrate. 
     SOLUTION: The present invention relates to a plasma processing method for performing plasma cleaning inside of a processing chamber where a member whose material is stainless is disposed in a part of a surface by performing plasma etching on a sample inside of the processing chamber. The plasma processing method includes: an etching step of performing the plasma etching on a predetermined number of samples; a metal removing step of removing a deposit film containing a metal element and a non-metal element and deposited in the processing chamber by using plasma after the etching step; a non-metal removing step of removing a deposit film containing a metal element and a non-metal element and deposited in the processing chamber by using plasma which is different from the plasma of the metal removing step, after the etching step; and a treatment step of performing plasma processing using an H 2  gas or an SF 6  gas before the metal removing step. 
     SELECTED DRAWING: Figure 1 
     COPYRIGHT: (C)2023,JPO&INPIT
Patent JP-2023018680-A (JP)
Title: Quantum dot, wavelength conversion member using quantum dot, illumination member, backlight device, display device, and method for manufacturing quantum dot
IPC: B82Y30/00
Filed: 2022-09-15
Abstract: PROBLEM TO BE SOLVED: To provide cadmium-free quantum dots with a narrow fluorescence FWHM. 
     SOLUTION: A quantum dot (5) does not contain cadmium and its fluorescence FWHM is 40 nm or less. The core is formed of ZnTe, ZnTeS, ZnTeSe, or ZnTeSeS. In the invention, copper chalcogenide is preferably synthesized as a precursor by the metal exchange reaction. 
     SELECTED DRAWING: Figure 1 
     COPYRIGHT: (C)2023,JPO&INPIT
Patent JP-2023081290-A (JP)
Title: Chatbot service method, chatbot service system, and computer program stored in storage medium to execute the method
Inventor: CHOI KYOUNG HO
IPC: G06Q50/10
Filed: 2022-10-06
Abstract: To provide a chatbot service method, a chatbot service system, and a computer program stored in a storage medium to execute the method.SOLUTION: There are provided a chatbot service method which uses a chatbot and can improve user's convenience, a chat bot service system, and a computer program stored in a storage medium to execute the method. The method for providing service using a chatbot includes the steps of: receiving a service generation input which generates a chatbot service from a customer terminal; generating the chatbot service on the basis of the service generation input; receiving a question input corresponding to the chatbot service from the customer terminal; and transmitting a response output corresponding to the question input to the customer terminal on the basis of the question input.SELECTED DRAWING: Figure 1
Patent JP-2023017778-A (JP)
Title: Method and device for selective enhancement of radio signal
IPC: H04W16/28
Filed: 2022-10-18
Abstract: PROBLEM TO BE SOLVED: To provide a method, UE, wireless network entity, and computer program for facilitating the establishment of a UE processing configuration for selective enhancement of a wireless signal received or transmitted by the UE. 
     SOLUTION: The method includes receiving an identification of a plurality of reference signals and receiving (110) from a wireless network transmission point a flag that the plurality of identified reference signals has the same beam configuration. The reference signal includes a channel state information reference signal (CSI-RS). The method further includes receiving (120a) the plurality of identified reference signals from the wireless network transmission point. 
     SELECTED DRAWING: Figure 1 
     COPYRIGHT: (C)2023,JPO&INPIT
Patent JP-2023104872-A (JP)
Title: Fixing device
Inventor: CHIKUGO YOICHI
IPC: G03G15/20
Filed: 2022-10-27
Abstract: To prevent a reduction in image quality due to lubricant.SOLUTION: A fixing device comprises: a rotatable endless fixing belt; a heating roller that provides heat to the fixing belt; a steering roller that is in contact with an inner peripheral surface of the fixing belt with the heating roller, has a rotation shaft in the same direction as a conveyance direction of a recording material, and rotates centered on an axis of rotation to change the position of the fixing belt; and a pressure rotating body that applies pressure to the fixing belt, wherein the pressure rotating body, with the fixing belt, forms a nip part and sandwiches and conveys the recording material carrying an unfixed toner at the nip part to fix an unfixed toner image to the recording material, and lubricant is applied to the inner peripheral surface of the fixing belt. The fixing device further has a scraping member that is in contact with an edge of the fixing belt. The scraping member has an inclined part that is inclined downward toward the outside of the fixing belt in a width direction. The inclined part is in contact with the edge of the fixing belt in an area where an outer surface of the fixing belt is directed upward.SELECTED DRAWING: Figure 2
Patent JP-2023108591-A (JP)
Title: Optical anisotropic film manufacturing method
Inventor: ISHIYAMA JUN
IPC: G02B5/30
Filed: 2022-11-10
Abstract: To provide an optical anisotropic film manufacturing method with which it is possible to efficiently manufacture an optical anisotropic film in which the occurrence of uneven tilt of a liquid crystal compound is suppressed.SOLUTION: Provided is an optical anisotropic film manufacturing method for manufacturing an optical anisotropic film by a roll-to-roll system. The optical anisotropic film manufacturing method includes: a step 1 for orienting a liquid crystal compound in a liquid crystal composition layer while conveying a liquid crystal compound having maximum absorption in a 300-400 nm wavelength range and having a polymerizable group and a liquid crystal composition layer that includes a chain transfer agent; and a step 2 for conveying the liquid crystal composition layer with the liquid crystal compound having been oriented, to an environment where an oxygen concentration is 2000 ppm by volume or less and irradiating the liquid crystal composition layer under the environment with an ultraviolet ray to cure it. In the step 2, the application of the ultraviolet ray is carried out within 0.10 second after the liquid crystal composition layer being conveyed enters the environment.SELECTED DRAWING: None
Patent JP-2023086679-A (JP)
Title: Method for producing stem cells and method for producing somatic cells
Inventor: TANABE KOJI
IPC: C12N5/078
Filed: 2022-11-11
Abstract: To provide a method for producing stem cells that can efficiently introduce factor RNAs into cells.SOLUTION: According to the present disclosure, there is provided a method for producing stem cells including: preparing somatic cells; preparing a chimeric virus including a virus-derived genomic RNA harboring an inducer RNA that induces somatic cells into stem cells and a virus-derived envelope surrounding the genomic RNA, wherein the genomic RNA and the envelope are derived from different viruses; and introducing the inducer RNA into the somatic cells using the chimeric virus.SELECTED DRAWING: Figure 4
Patent JP-2023018028-A (JP)
Title: Piping buffer member
IPC: F16L57/00
Filed: 2022-11-18
Abstract: PROBLEM TO BE SOLVED: To surely prevent mutual interference with other equipment and piping and the like of unwinding piping, due to strong quake in earthquake, thereby being broken. 
     SOLUTION: A piping buffer member 10 is attached to unwinding piping which is connected between a water feeding branch pipe and a sprinkler head, and is detachably attached to the unwinding piping without release of the connection state of the unwinding piping with respect to the water feeding branch pipe and the sprinkler head and is formed into an annular shape, and the piping buffer member comprises: an annular main body 12 on which a piping run through hole 14 is formed according to an outer diameter of the unwinding piping; a cut part 18 which is formed from the piping run through hole 14 toward an outer periphery, and allows fitting of the unwinding piping to the piping run through hole from the outer periphery in an open state; and a fitting part which is formed on a cut surface of the cut part 18, and is formed of a fitting recess 20 and a fitting salient 22 which close the cut part 18 when being fitted. 
     SELECTED DRAWING: Figure 1 
     COPYRIGHT: (C)2023,JPO&INPIT
Patent JP-2023082682-A (JP)
Title: Substrate processing apparatus and method thereof
Inventor: KIM ICK KYUN
IPC: H01L21/304
Filed: 2022-11-29
Abstract: To provide a substrate processing apparatus and a substrate processing method capable of effectively removing contaminants from the edge region of a substrate.SOLUTION: A substrate processing apparatus includes a support base that rotates a substrate W, a first bath 100 provided around the support base, storing a cleaning liquid, and having a first opening 100a formed on the upper surface, and a first ultrasonic oscillator 120 provided in the first bath and providing ultrasonic waves toward the surface 130 of the cleaning liquid exposed by the first opening to form a first water film 131 protruding from the surface of the cleaning liquid. The substrate is not immersed in the first bath and is cleaned by the first water film protruding edge region ER of the substrate while the substrate is rotated by the support base.SELECTED DRAWING: Figure 3