baber/WOPTO huggingface dataset:
Patent KR-20020054132-A (KR)
Title: Gas channel typed stopper and continuous casting method using it
Inventor: KIM DO SEONG
IPC: B22D11/00
Filed: 2000-12-27
Abstract: PURPOSE: A gas channel type stopper for continuous casting is provided which simultaneously gas bubbles molten steel and floats nonmetal inclusions in molten steel using argon gas in the state that tundish nozzle is closed by installing a plurality of channels on the lower part of the stopper, and a continuous casting method using the stopper is provided. CONSTITUTION: In a stopper installed at the upper part of a tundish nozzle to control flow rate of molten steel supplied from a tundish to a mold, the gas channel type stopper for continuous casting comprises a gas inlet pipe(15) installed inside the stopper(7a); a divider(13) which is installed on the outer circumference of the gas inlet pipe(15) to distribute gas introduced; a plurality of gas channels which are connected to the divider(13) at the lower part of the stopper(7a) and lowered to the outer circumferential surface of the stopper(7a); and a porous plug installed at the lower part of the stopper(7a). The continuous casting method by gas bubbling comprises the processes of bubbling argon gas in an argon gas flow rate of 60 to 120 L/min through a gas channel having a diameter of 40 mm or less formed on the stopper(7a) before a hole is opened; stopping argon gas bubbling through the gas channel the moment the hole is opened; and performing gas bubbling through the porous plug after the hole is opened.
Patent KR-20020056024-A (KR)
Inventor: JUNG YU SEOK
IPC: C08L33/18
Filed: 2000-12-29
Abstract: PURPOSE: Provided is an acryl polyol resin composition capable of satisfying a physical property(for example, weatherability) of film painted with 2-packing acryl-isocyanate type of urethane. CONSTITUTION: The acryl polyol resin composition comprises 100 parts by weight of acryl resin, which consists of copolymerizable aliphatic unsaturated monomers and is obtained by adding 3-10 wt% of polymerization chain transferring agent and 2-5 wt% of polymerization initiator to 60-80 wt% of acrylate ester monomer, 15-35 wt% of unsaturated monomer having hydroxyl group, and 1-5 wt% of unsaturated monomer having acid radical and reacting the reactants with each other at 100-140 deg.C; and 5-15 parts by weight of liquefied polycarbonate diol.
Patent KR-20020057184-A (KR)
Title: Apparatus for generating transmitting/receiving frame tick in synchronus IMT-2000 system
Inventor: PARK NO HUI
IPC: H04B7/26
Filed: 2000-12-30
Abstract: PURPOSE: An apparatus for generating vocoder transmitting and receiving frame ticks in synchronous IMT-2000 system is provided to receive 160 vocoder channels by using one time slice and assign several channels to one time tick. CONSTITUTION: An offset register(111) receives 50Hz reference clock and provides an offset value having 125 micro second resolution for generating frame ticks. An offset location register(112) stores the location of ticks referring 50Hz or 100Hz and the current location of ticks. A down counter(131) reads the offset value from the offset register(111) for down counting. A counter(130) includes an up counter(132) up-counting a strobe signal generated from the down counter(131), and provides the strobe signal for an interrupt to a processor whenever up-count value changes, by providing location values to the offset location register(112). A compare part(140) monitors 50Hz and 100Hz referring the strobe signal generated from the up counter(132). An interrupt part(120) generates a strobe signal for an interrupt, by using strobe signals of the down counter(131) and the compare part(140).
Patent KR-20010024405-A (KR)
IPC: F04D15/02
Filed: 1999-08-02
Abstract: A method for the starting and steady-state supply of a permanent-magnet synchronous motor, particularly for driving a centrifugal hydraulic pump. The method comprises three successive steps: a first learning step, a second starting step, and a third steady-state step. During the first step, the rotor is turned through two angles of 180 mechanical degrees in the same direction, storing the parameters of the rotor and particularly determining the initial current and the mechanical zero point of the rotor. During the second step, by generating with a power supply (inverter) a practically sinusoidal current waveform, the rotor is started with a higher current than the starting current and with a low frequency which gradually increases, waiting for the rotor at its transit through 80, 100, 260 and 280 mechanical degrees. Once the intended steady-state speed has been reached, a practically sinusoidal current is applied and the rotor is waited for at transit through the zero points. The position of the rotor is checked with a linear magnetic position sensor.
Patent KR-20010031051-A (KR)
Title: 확장 위치 에러 신호 선형화 및 표준화
IPC: G11B21/10
Filed: 1998-07-14
Abstract: 위치 에러 신호(334, 336)를 형성하는 방법은 수직 서보 필드(402)로부터 생성된 수직 위치 에러 값(282) 및 쿼드러쳐 서보 필드(404)로부터 생성된 쿼드러쳐 위치 에러 값(286)을 저장하고, 여기서 수직 서보 필드는 쿼드러쳐 서보 필드로부터 위상이 90도 다르다.  위치 에러 분자(294, 298)는 수직 우치 에러 값(282) 및 쿼드러쳐 위치 에러 값(286)을 산술적으로 결합함으로써 형성된다.  위치 에러 분모(306, 308)는 수직 위치 에러 값(282) 및 쿼드러쳐 위치 에러 값(286)을 바탕으로 형성된다.  위치 에러 신호(334, 336)는 위치 에러 분모(306, 308)에 의해 위치 에러 분자(294, 298)를 나눔으로써 형성된다.
Patent KR-20010031098-A (KR)
IPC: H04B7/005
Filed: 1998-10-05
Abstract: Apparatus and method for optimizing power control provides dynamic adjustment of a power-control threshold thereby allowing transmitter power to be reduced when signal quality is high. In a communication system (100) having at least one mode for controlling the power of a transmitter (112) in the communication system (100), the threshold level of the system is optimized by determining performance of the communication system (308) based on a predetermined metric such as the system error rate, for example. Additionally, the power of the transmitter (108) output in relation to the threshold of the communication system is determined. The threshold of the communication system (100) is adjusted based on the performance of the communication system and the power of the transmitter in relation to the threshold.
Patent KR-20010031443-A (KR)
Inventor: RONDEAU CHRISTINE
IPC: D06P1/52
Filed: 1999-07-29
Abstract: 본 발명은 염색에 적합한 매질내에 특정한 식의 양이온성 직접 염료 하나 이상을 함유하는, 케라틴 섬유, 특히 모발과 같은 인간의 케라틴 섬유 염색용 조성물에 관한 것이다.     본 발명은 아실이세티오네이트, 아실타우레이트, 술포숙시네이트, 아실사르코시네이트, 아실글루타메이트, 폴리옥시알킬렌 카르복실 에테르 산 및 그의 염, 지방 글루타미드 술페이트, 알킬갈락토시드 우로네이트, 알킬폴리글루코시드 음이온성 유도체 및 그의 혼합물로 구성된 군 중에서 산택되는 하나 이상의 실리콘을 추가로 함유하는 것을 특징으로 한다.     본 발명은 또한 상기 조성물을 사용한 방법 및 장치에 관한 것이다.
Patent KR-20010031470-A (KR)
Title: 포유동물의 갈망을 감소시키는 방법
IPC: A61K45/00
Filed: 1998-10-26
Abstract: 본 발명은 음식물 또는 중독성 물질에 대한 포유동물의 갈망을 감소시키는 방법에 관한 것이다.  상기 방법은 단독으로 또는 또 다른 특정 CNS 화합물과 배합된 유효량의 D 1 /D 5 길항제 또는 D 1 /D 5 부분적인 효능제를 포유동물에게 투여함을 포함한다.
Patent KR-20010031764-A (KR)
IPC: C08K13/00
Filed: 1998-11-03
Abstract: A plastic material to produce a conductive plastic object, especially to form a shielding profile (3) in situ on part (1) of a shielding housing, comprising a liquid or paste-like, cross-linkable or highly viscous plastic resin matrix (5) and gas-filled, compression-elastic, especially compressible micro hollow bodies (7) dispersed in said plastic resin matrix.
Patent KR-20010015865-A (KR)
Title: 위조방지용 시트
IPC: B42D15/00
Filed: 1999-10-07
Abstract: 본 발명은 위조방지 효과를 갖는 다층구조시트이고, 상면 또는 하면에 자외선을 조사한 경우, 각각 상이하는 외관이 생기는 것으로 인하여 위조방지 효과를 이루는 것이다. 
     본 발명의 제1 실시형태는, 각각 다른 색상으로 발색하는 형광발색층이 상면측과 하면측에 설치되어 있고, 상면측에서 자외선을 조사한 경우는 상면측 형광발색층만이 형광발색하여 상면에서 관측되고, 하면측에서 자외선을 조사한 경우는 적어도 하면측 형광발색층이 발색하여 상면에서 관측되는 것이다. 
     본 발명의 제2 실시형태는, 상면에서 형광발색층에 이르는 영역의 불투명도가 97% 이상이고 동시에 하면에서 형광발색층에 이르는 영역의 불투명도가 96% 이하로서, 상면에서 자외선을 조사한 경우는 인쇄패턴이 관측되지 않지만, 하면에서 자외선을 조사하였을 때에는 그 인쇄패턴이 관찰되는 것이다.
Patent KR-20010033419-A (KR)
IPC: H04B1/38
Filed: 1998-12-04
Abstract: 휴대용 2-방향 보안 금융 메시지 유닛(906)은 수신기(804), 선택적 호출 디코더(1004), 금융 트랜잭션 (financial transaction) 프로세서(1014), 메인 프로세서(1006), 및 전송기(1034)를 포함한다.  수신된 보안 금융 트랜잭션 메시지는 보안 금융 트랜잭션 메시지에 포함된 정보에의 인증되지 않은 억세스를 방지하도록 선택적 호출 디코더(1004)에 의해 복호화되고 보안 금융 메시지 유닛내의 금융 트랜잭션 프로세서(1014) 또는 스마트 카드 (smart card)로 직접 전달된다.  휴대용 2-방향 보안 금융 메시지 유닛(906)은 금융 트랜잭션을 발신할 뿐만 아니라 수신할 수 있다.
Patent KR-20010042273-A (KR)
Title: 내취화(耐脆化) 성능이 우수한 이규화몰리브덴을주성분으로 하는 고온 내산화 재료 및 발열재료
IPC: C04B35/58
Filed: 2000-04-11
Abstract: MoSi 2 기재(基材) 또는 70 wt% 이상의 MoSi 2 를 주성분으로 하는 기재로 이루어지며, 이 기재의 X선 회절(관구: Cu, 특성선: Kα)에 의한 Si의 주 피크(主 peak)(2θ= 28.440°, JCPDS 에 의함) 회절강도가 MoSi 2 의 주 피크(2θ= 44.684°) 회절강도의 적어도 1/100 이하이며, 또한 동(同) Mo 5 Si 3 의 주 피크(2θ= 38.405°, JCPDS 에 의함)회절강도가 MoSi 2 의 주 피크(2θ= 44.684°) 회절강도의 1/300 이상 1/10 이하인 내취화(耐脆化) 성능이 우수한 MoSi 2 를 주성분으로 하는 고온 내산화 재료 및 발열재료에 관한 것이다.
Patent KR-20010071168-A (KR)
IPC: A46B9/04
Filed: 1999-05-12
Abstract: 본  발명은  평평한  면의  청소성을  유지하면서  세부의  청소성을  향상시킨  치솔을  제공하고자  하는  것으로서,  특히  세부  청소성의  향상과  그  청소성을  유지하는  것이  가능한  내구성을  구비하는  치솔을  제공하고자  하는  것을  제1과제로  하며,  외관이  좋고  아울러  내구성도  우수한  치솔을  제공하고자  하는  것을  제2과제로  한다.  상기의  제1과제를  달성하기  위하여  식모부에  형성하는  식모 구멍을  대략  긴  원형상  또는  대략  장방형상으로  구성하며,  그  식모 구멍을  식모면에  대하여  경사시키며,  청소력을  높이기  위하여  직사각형  단면의  모노필라멘트를  사용하는  것을  제안하였다.  또한  상기의  제2과제를  달성하기  위해서는  평선을  삽입하는  것에  대하여  개시하며,  삽입된  평선이  일직선상으로  나란하지  않도록  인접하는  식모 구멍과  서로  엇갈리게  하는  것을  제안하고  있다.
Patent KR-20010052524-A (KR)
Title: 부티로락톤의 제조 방법
IPC: C07D315/00
Filed: 1999-05-21
Abstract: a) 150 내지 250 ℃ 및 100 내지 300 바아에서 수소와 카르보닐화 반응 혼합물을 반응시키고, 
     b) 침전된 촉매를 제거하고 이를 카르보닐화 반응으로 복귀시키고, 
     c) 무촉매 반응 혼합물을 증류하여 부티로락톤을 회수하는 것을 포함하는, 
     로듐 촉매의 존재하 20 내지 300 바아의 압력에서 하기 화학식 II (여기서, R 1 및 R 2 는 각각 수소, 알킬, 히드록시알킬, 치환 또는 비치환 아릴 또는 치환 또는 비치환 트리알킬실릴임)의 알킨을 일산화탄소 및 물과 반응시키고 수소화 반응되지 않은 2(5H)-푸라논 중간체를 수소화 반응시켜 하기 화학식 I (여기서, R 1 및 R 2 는 각각 수소, 알킬, 히드록시알킬, 치환 또는 비치환 아릴 또는 치환 또는 비치환 트리알킬실릴임)의 부티로락톤을 제조하는 방법. 
     ＜화학식 I＞ 
     
       
     
     ＜화학식 II＞
Patent KR-20010052789-A (KR)
Title: 디스크 플레이어
IPC: G11B17/028
Filed: 2000-04-10
Abstract: 본 발명의 디스크 플레이어는 디스크(2A)의 이송 방향과 직교하는 방향을 따른 양단에, 지지축(7)으로 요동 가능하게 피봇 지지된 디스크 선택 레버(8)를 설치한다. 또한, 디스크 선택 레버(8)의 각각의 양단에 디스크측을 향하여 돌출하는 돌기부(8a, 8b)를 설치한다. 돌기부(8a, 8b)는 대직경 디스크가 이송되었을 때에는 함께 디스크에 접촉하여 디스크를 밀어 내리고, 소직경 디스크가 이송되었을 때에는 모두 디스크에 접촉하지 않거나 또는 적어도 한쪽이 디스크에 접촉하지 않는 것으로 한다. 또한, 돌기부(8a, 8b)에 의해 밀어 내려진 후 이송 종단에 달한 대직경 디스크를 받아 걸리게 하는 대직경 디스크용 걸림 부재(5)와, 이동 종단에 도달된 소직경 디스크를 받아 걸리게 하는 소직경 디스크용 걸림 부재(6)를 설치한다.
Patent KR-20020060364-A (KR)
Title: A process for preparing composites membranes using poly(acrylonitrile)
Inventor: JE GAL JONG GEON
IPC: B01D69/12
Filed: 2001-01-10
Abstract: PURPOSE: A process for producing nano composites membranes using poly(acrylonitrile) is provided, which is characterized in that after a porous support that is fabricated by using poly(acrylonitrile) is modified with NaOH to endow -COOH radical, the surface-modified porous support is interfacial-polymerized with piperazine or acyl chloride, thus when introducing polyamide onto the porous support, ionic bond is formed between polyamide layer and the porous support. CONSTITUTION: The preparation process of nano composites membranes includes the steps of fabrication of porous support by using poly(acrylonitrile); modification of the porous support with 0.1-2M NaOH for 0.5-3 hours to endow -COOH to the surface of porous support; interfacial polymerization of the surface-modified porous support with piperazine or acyl chloride in the presence of catalyst(trimethyl amine); and introduction of polyamide layer onto the porous support. Above acyl chloride is selected from trimesoyl chloride, terephthaloyl chloride and isophthaloyl chloride.
Patent KR-20020000476-A (KR)
Title: Projection system using polarizing beam splitter
Inventor: JUN GWANG JO
IPC: G03B35/26
Filed: 2001-01-11
Abstract: PURPOSE: A projection system using a polarizing beam splitter is provided to improve the performance of the system, and to lengthen a life span by preventing degradation with substituting a polarizing beam splitter for a polarizing plate. CONSTITUTION: A projection system is composed of a lamp(11) irradiating unpolarized white light; a first polarizing beam splitter(12a) transmitting P waves from rays of the lamp, and reflecting S waves; a second polarizing beam splitter(13) reflecting the S ray from the first polarizing beam splitter, and transmitting P waves; a dichroic prism(14) projecting the S ray by separating red, green and blue light, and projecting the P ray to the second polarizing beam splitter by synthesizing; LCDs(Liquid Crystal Displays)(15R,15G,15B) showing image corresponding to RGB components of rays from the dichroic prism; and a projection lens(16) imaging by projecting the P ray on a screen. The performance of the projection system is improved, and the life span is lengthened with preventing degradation of a polarizing plate with using the polarizing beam splitter.
Patent KR-20010078014-A (KR)
Title: Method of forming a bottom electrode of a storage capacitor
Inventor: YAMAMOTO ICHIRO
IPC: H01L21/768
Filed: 2001-01-19
Abstract: PURPOSE: To solve a problem, wherein available metals are limited to kinds of metal materials capable of inducing a substitutional reaction on silicon, moreover fine irregularities are formed on the surface of an electrode because a volume change occurs in a substitutional reaction, and therefore a capacitor film formed on the electrode is increased in leakage current in a method in which a silicon electrode is formed by depositing HSG on the surface of a silicon board, then the silicon electrode is subjected to a substitution process in an atmosphere of WF6 to substitute HSG of the electrode with W to form a W stacked electrode. CONSTITUTION: By the use of a method in which a recess 6 from which an HSG plug is pulled out is used, and the recess 6 is filled up with a metal 7 to be transferred to the metal 7, metals such as Ru, Pt, and the like other than W or the like capable of inducting a substitutional reaction on silicon can be used, and fine irregularities are hardly generated on the surface of the formed electrode, so that a capacitor film formed on the surface of the electrode can be restrained from increasing in leakage current.
Patent KR-20020062402-A (KR)
Title: Sport outputs to be mixed the function of hula-hooping and rope-jumping
Inventor: HONG HEY RYEON
IPC: A63B19/00
Filed: 2001-01-20
Abstract: PURPOSE: An exercise equipment is provided to enable a user to enjoy a jump rope and a hula hoop at the same time and to maximize the effect of exercise. CONSTITUTION: A length adjustable string(3), to which a plastic luminous cup(2) is suspended, is connected to a small plastic hula hoop(1). When a user rotates the small plastic hula hoop with putting one foot in a space(1a) of the small hula hoop, the small plastic hula hoop, the plastic luminous cup, and the length adjustable string are rotated at the same time by a centrifugal force. At this time, the user is able to jump the length adjustable hula hoop on the other foot.
Patent KR-20020063335-A (KR)
Title: A polymer composition for OELD and a ELD using therefor
Inventor: JUNG AE YEONG
IPC: C09K11/06
Filed: 2001-01-27
Abstract: PURPOSE: Provided are a polymer compound for an organic red luminescent element, which contains polythiophene as a main chain and has a hole transferring ability, and the luminescent element using the polymer compound. CONSTITUTION: The polymer compound for the organic red luminescent element is represented by the formula 1, wherein R1 is one selected from hydrogen atom, halogen atom, alkyl, alkenyl, cycloalkyl, alkoxy, aromatic hydrocarbon, aromatic ester cyclic compound and R2 is one selected from hydrogen atom, halogen atom, alkyl halogenide, alkyl, alkenyl, alkoxy, aromatic hydrocarbon, aromatic heterocyclic compound, x and y are 0-1, and n is 1-1000. And the organic electroluminescent element contains a luminescent layer formed by spreading the polymer compound to be 200-1200 angstrom thick.
Patent KR-20010025750-A (KR)
Title: A Wet-Type Masonry Joint Mortar, and Method of Manufacturing the Same
Inventor: CHOI KOUNG YEOL
IPC: C04B26/02
Filed: 2001-01-29
Abstract: PURPOSE: Provided is wet joint sealing mortar which can solve the problems of conventional joint sealing mortar such as whitening, water permeation into the joint sealing area, respiratory disease and bad working condition due to its dust, inconvenient operation condition and the like. CONSTITUTION: A wet joint sealing mortar combined with acryl base polymer, which has water repellent properties without causing whitening effect, is characterized by consisting of: 40.00-60.00 wt% of silica sand(mineral minute aggregate), 20.00-50.00 wt% of color pigment, 1.00-8.00 wt% of sepiolite or calcium silicate, 10.00-20.00 wt% of acryl silicone synthetic resin, 0.05-1.00 wt% of hydroxy propylethyl cellulose, and 0.02-1.00 wt% of dispersion agent.
Patent KR-20010035340-A (KR)
Title: The method for manufacturing of Glasses polish for clothes
Inventor: YOU JIN WOO
IPC: A41D1/00
Filed: 2001-02-05
Abstract: PURPOSE: Clothes capable of polishing glasses and manufacturing method thereof are provided, to clean glasses anytime anywhere by sewing a part of clothes using the cloth for polishing glasses. CONSTITUTION: The manufacturing method of clothes capable of polishing glasses is characterized by: i) sewing a part(3) of the lining of a jacket(1) using the cloth for polishing glasses; ii) sewing a pocket(4) of a jacket(1) or trousers using the cloth; and iii) sewing a part of the lining placed in the lower part of a tie using the cloth. These clothes remove the inconvenience of carrying the cloth for polishing glasses.
Patent KR-20020018541-A (KR)
Title: Apparatus and method for perceiving physical and emotional state
Inventor: BANG SEOK WON
IPC: A61B5/16
Filed: 2001-02-07
Abstract: PURPOSE: An apparatus and a method for recognizing the human body and an emotional status are provided to improve the technique for recognizing the human body and the emotional statues by detecting a biological signal in a convenient manner. CONSTITUTION: A biological signal detecting unit(100) is mounted on a predetermined part of the human body and converts at least one biological signal detected from the human body into an analog signal to output it. A biological signal recognizing unit(120) processes the biological signal from the biological signal detecting unit(100) and recognizes the human body and emotional status based on the processed result. The biological signal detecting unit(100) comprises a sensor(10) for detecting the biological signal, an analog signal processor(20) for amplifying and filtering the biological signal detected by the sensor(10), and an analog/digital converter(30) for converting the amplified and filtered biological signal from an analog signal into a digital signal. The biological signal recognizing unit(120) comprises a digital signal processor(40) for processing the biological signal in the form of digital, a controller(50) for recognizing the human body and emotional status and outputting the recognized result as a control signal, and a data output module(60) for outputting data in a predetermined form in response to the control signal.
Patent KR-20020065798-A (KR)
Inventor: JANG HO GEUN
IPC: F24F5/00
Filed: 2001-02-07
Abstract: PURPOSE: An air conditioner is provided to efficiently supply a room with oxygen. CONSTITUTION: An air conditioner comprises an air-conditioning system including an indoor unit, an outdoor unit and a refrigerant pipe(30) to keep temperature and humidify of indoor air constant; and an oxygen generating system including an oxygen generator, an oxygen discharger(200) including a switching valve(210) selectively discharge oxygen through a first oxygen outlet(240) or an inhale supporting member into a room or a fixed user and an oxygen supply pipe to supply oxygen into the room through the air-conditioning system and includes an accommodating structure(260) detachably accommodating the inhale supporting member and fixed on the air conditioner.
Patent KR-20020066113-A (KR)
Title: Oil seal of power steering device
Inventor: HA HEON GWAN
IPC: B62D5/07
Filed: 2001-02-09
Abstract: PURPOSE: An oil seal of a power steering system is provided to prevent oil leakage by assembling the oil seal between a hydraulic control valve and a valve housing firmly, and to improve reliability by preventing damage in assembling with pressing the packing part between the inlet and the contact surface. CONSTITUTION: A power steering system is composed of a hydraulic control valve(20) having an input shaft interlocking with a steering shaft, and controlling hydraulic pressure by the input shaft, and a valve housing(30) having an inlet(40) opened to combine with the hydraulic control valve, and a worm shaft interlocking with the input shaft. A plate part is installed between the hydraulic control valve and the valve housing, and a through hole(53) is formed in the plate part to connect the hydraulic control valve and the valve housing. A packing plate(50) has a packing part(51) installed in the through hole for pressing. Oil leakage is prevented with forming the oil seal between the hydraulic control valve and the valve housing.
Patent KR-20020069543-A (KR)
Title: An auxiliary battery recharge system for hybrid electrical vehicle and a control method for the system
Inventor: KIM YEONG ROK
IPC: B60L50/15
Filed: 2001-02-26
Abstract: PURPOSE: A charging apparatus of an emergency battery in a hybrid electric vehicle and a method for controlling the same are provided to charge a battery through a generator is out of order. CONSTITUTION: An engine(111) is driven by discharging power a battery(113). A generator(112) is operated by power of the engine(111). The generator(112) generates electric power according to a control operation of the GCU(Generator Control Unit)(121). The battery(112) is charged by the electric power generated from the generator(113). A traction motor(115) is driven by the discharging power of the battery(113). The traction motor(115) is used for rotating a drive shaft according to a control operation of a TCU(Traction Control Unit)(123). The GCU(121) detects an operating state of the generator(112). The TCU(123) detects an operating state of the traction motor(115). An ECU(122) outputs selectively an emergency charge signal. An alternator(110) generates electric power. A voltage control part is formed with a rectifier(124), a transformer(125), and a converter(130).
Patent KR-20010087219-A (KR)
Inventor: KANAI SABURO
IPC: H01J37/32
Filed: 2001-02-27
Abstract: PURPOSE: A plasma processing apparatus and method are provided to process a high speed semiconductor device sensitive to damage by charge-up and having a delicate structure by using a wafer of a large diameter at a high yield. CONSTITUTION: A plasma processing apparatus includes a vacuum processing chamber(1), a quartz window(2) hermetically formed in the vacuum processing chamber(1) for introducing a microwave into the chamber(1), an electrode(3) or stage provided in the vacuum processing chamber opposing to the quartz window(2) for mounting thereon a wafer(8) having a semiconductor integrated circuit, a high frequency power source(4) for applying a bias voltage to the electrode(3), and a solenoid coil(6) for forming a magnetic field in the vacuum processing chamber(1). a gas introducing opening(7) through which a gas mixed according to an etching recipe is introduced into the vacuum processing chamber(1). a ring(9) made of silicon provided for consuming excess etchant, and a ring(10) made of aluminum provided at outer periphery of the ring 9. In the case of forming a pattern in a silicon oxide film by etching using the device, when the outer diameter of the silicon ring(9) is 1.4 times of the wafer diameter, the selection ratio between the silicon oxide film and an undercoat silicon within the wafer surface is distributed so as to be higher at the periphery of the wafer.