baber/WOPTO huggingface dataset:
Patent JP-2009516253-A (JP)
Title: 医療情報システムの意思決定による表示
IPC: G16H40/63
Filed: 2006-11-06
Abstract: 意思決定支援装置は、ユーザフレンドリな多数の特徴を組み込む。この装置は、臨床医が治療における現在のステップを選択することができるよう臨床ガイドラインのフロー図を表示することによって状況を判定するよう動作可能である（Ｓ６３０）。意思決定支援データの初期の自動的表示は、臨床データのみに限定することができる（Ｓ４２０）。現在の意思決定に関係しこれによる表示のために自動的に選択されるデータは、臨床医により後において立ち上げられるスクリーンに出現するときにハイライト表示されることができる（Ｓ３４０）。
Patent JP-2009516797-A (JP)
Title: 液体を通す部材、特に内燃機関用の燃料噴射弁の液漏れ率を検出する方法及び装置
IPC: G01M3/20
Filed: 2006-10-12
Abstract: 本発明は、液体を通す部材、特に内燃機関用の燃料噴射弁の液漏れ率を検出する方法及び装置であって、検査体（２）に液体を通す部材（１）が挿入され、該液体を通す部材（１）に試験液（１０）が所定の圧力下で供給され、検査体（２）の流路（４）内にキャリアガス流（５）が準備され、液体を通す部材（１）の後ろで蒸気混合物（６）が取り出されて、アナライザ（７）にまで送られ、蒸気混合物（６）における試験液（１０）の濃度に関して、液体を通す部材（１）の液漏れ率が、アナライザ（７）を用いて測定及び分析されており、そしてノズル体（１１）を介して、液体を通す部材（１）の漏れ箇所の直ぐ近くに、キャリアガス流（５）がもたらされ、かつ／又は液体を通す部材（１）の後ろで蒸気混合物（６）が加熱されて、気相への完全な転換が達成されるようになっている。検査装置は特に、混合気圧縮型火花点火式の内燃機関の燃料噴射装置において使用される燃料噴射弁における漏れ測定のために適している。
Patent JP-2009518218-A (JP)
IPC: B63B15/00
Filed: 2006-11-16
Abstract: The invention relates to ship superstructure (1) comprising several modules, in particular, in the form of crew module (2), bridge module (3) and/or funnel module. Said modules have a compatible modular dimension and are designed to be self-supporting. Furthermore, in the vicinity of the main deck (10) of the ship at least one level (12) is provided with crew modules (2), wherein on this at least one leve (12), the starboard(21) and/or port-side (22) modules are stacked with a free space between the starboard- and port-side modules and the free space is laid out to accommodate load. The invention further relates to a methods for construction of such a ship superstructure (1).
Patent JP-2009519150-A (JP)
IPC: B29L11/00
Filed: 2006-12-06
Abstract: A mould set for making contact lenses comprising a first unitary half mould set comprising a plurality of male mould halves in a first array and a second unitary half mould set comprising a plurality of female mould halves in a second array, wherein the arrays are such as to permit the engagement of respective pairs of male and female mould halves to defme a corresponding set of mould cavities therebetween, and to permit engagement of each said female mould half with a different said male mould half by relative rotation of the first and second array about an axis of rotation, such that the male and female mould halves can be engaged in a plurality of different relative orientations. The shape and/or orientation of the male mould halves in the first array, and the female mould halves in the second array is not identical for each mould half in each said array, whereby relative rotation results in the definition of different sets of respective mould cavities. Methods of making the mould set and methods of making contact lenses using the mould set are also mentioned.
Patent JP-2009519754-A (JP)
Title: 異なる延伸特性を有する多区分ライナーを備えた吸収性衣類
IPC: A61F13/49
Filed: 2006-12-07
Abstract: 少なくとも３つの延伸領域を有する延伸方向特性を備えた吸収性物品が示されている。第一縁部領域と第二縁部領域は、中間領域により分離されている。各々の縁部領域と同じ長さとすることができる中間領域は、縁部領域とは異なる延伸方向特性を有する。中間領域は、単一方向に延伸することができるが、縁部領域は、異なる単一方向か、又は二軸方向或いは多軸方向に延伸することができる。フラップは、縁部領域から形成することができる。この構造を通して、吸収性物品は、改善された嵌合性及び外観を示す。 【選択図】図４
Patent JP-2009521588-A (JP)
Title: 二酸化炭素トラップを含む一体化燃焼装置を有する石油系炭化水素コンバーター
IPC: B01J23/94
Filed: 2006-12-22
Abstract: 本発明は、石油系炭化水素コンバーターであって、流動相の触媒粒子が存在する接触クラッキング容器1及び付着したコークスを燃焼することによって前記触媒粒子を再生するための再生器を含んでなり、前記触媒粒子は前記クラッキング容器と前記再生器との間を循環し、前記再生器は、二酸化炭素トラップを有する水蒸気発生用の燃焼装置と一体化された反応器2である石油系炭化水素コンバーターに関する。本発明によれば、前記再生器は、コークスが付着した前記触媒粒子を含んでなる固体燃料が供給される酸素サポート用の還元反応器2であり、固体を分離するためのサイクロンC2及び交換器E2を備えており、前記酸素サポート用の当該還元反応器は、前記酸素サポート用の酸化反応器3と結合され、固体を分離するためのサイクロンC3及び交換器E3を備えており、前記酸素サポートは、２つの反応器の間を循環しており、前記酸素サポートは、前記触媒粒子とは異なる平均直径を有する金属酸化物でなる。
Patent JP-2009523019-A (JP)
Title: デングキメラウイルス
IPC: A61K39/12
Filed: 2007-01-12
Abstract: 本発明は、点突然変異及び遺伝学的変化を蓄積する傾向が小さいデングキメラウイルスに関する。これらのデングキメラウイルスにおいて、ポリメラーゼをコードするＮＳ５遺伝子が、黄熱ウイルスの対応するＮＳ５配列によって置換されている。
Patent JP-2009523750-A (JP)
Title: 酒さ及び他の炎症性皮膚疾患の治療のためのアルカンジカルボン酸及びレチノイドの使用
IPC: A61P29/00
Filed: 2007-01-23
Abstract: 酒さの他の治療可能性を利用可能とするために、少なくとも１つの、炭素原子数７〜１３のα、ω−ｎ−アルカンジカルボン酸又はそのエステル、及び少なくとも１つのレチノイドの医薬製剤の製造のための使用が提案される。示唆された製剤は、乾癬、アトピー性皮膚炎、及び一般的なニキビなどの他の炎症性皮膚疾患の治療においても有効である。
Patent JP-2009528587-A (JP)
Title: 出力画像のレンダリング
IPC: G06T15/20
Filed: 2007-02-16
Abstract: 入力画像２００と深さに関連されるデータの対応するマトリクス２０４とに基づいて出力画像２０２をレンダリングする方法が開示され、入力画像は第一の視点に対応し、出力画像は第一の視点とは異なる第二の視点に対応する。本方法は、予め決定された方向Ｘで深さに関連されるデータの導関数を計算することで、深さに関連されるデータのマトリクスにおけるエッジ２１２，３１２を計算するステップ、エッジ２１２，３１２のバックグランド側に位置されるエッジの近傍に対応する入力画像の領域における画素値における変動の測定値を計算するステップ、スケーリングされた深さに関連されるデータに基づいて予め決定された方向で入力画像のそれぞれの画素値をシフトすることで出力画像を計算するステップを含み、スケーリングでは、大きな変動の測定値が大きな深さの低減となる。
Patent JP-2009530593-A (JP)
IPC: C12N15/113
Filed: 2007-03-14
Abstract: This invention relates to the inhibition of a newly discovered growth-stimulating protein in an individual. Further, the invention relates to a method for preventing or treating a cancer, or preventing or treating cancer growth, invasion or metastasis, or preventing or treating other hyperproliferative diseases in an individual, by down regulating the expression of said growth-stimulating protein or by inactivating said protein. Still further, the invention concerns a method for diagnosing cancer or other hyperproliferative diseases in an individual based on said growth-stimulating protein.
Patent JP-2010157302-A (JP)
Title: Optical recording medium
Inventor: MIKI TAKESHI
IPC: G11B7/24035
Filed: 2009-01-05
Abstract: <P>PROBLEM TO BE SOLVED: To provide an optical recording medium with which an excellent servo signal is obtained even when a recording layer of a punch recording-type of an In-Co-based alloy etc. is formed.  <P>SOLUTION: The optical recording medium 10 includes: a substrate 1; an irregular surface 11 which is composed of a groove 11G and a land 11L wherein the depth of the groove 11G is in the range of 26-40 nm, which has the track pitch TP of 320 nm, and which is formed on an upper surface of the substrate 1; the recording layer 2 which is formed on the irregular surface 11 of the substrate 1, which is composed of an In-Co-based alloy or an Sn-Co-based alloy, and on which recording is conducted with punch recording; and a light transmissive layer 3 which is formed on the recording layer 2.  <P>COPYRIGHT: (C)2010,JPO&INPIT
Patent JP-2009168244-A (JP)
Title: Bush
Inventor: EBERT MICHAEL
IPC: F16F1/38
Filed: 2009-01-14
Abstract: <P>PROBLEM TO BE SOLVED: To provide a bush depending on deformation of an nucleus with respect to an exterior, having rigidity behavior to be adjustable, and manufactured inexpensively.  <P>SOLUTION: The bush comprises: the nucleus 1; at least one exterior 2 surrounding the nucleus 1; and at least one elastic bond layer 3. The elastic bond layer 3 mutually bonding the exterior 2 with the nucleus 1 to be separated from each other, and the nucleus 1 and the exterior 2 are relatively movable. At least one stopper 4 structurally separated from the bond layer 3 and manufactured separately from the bond layer 3 is disposed to the nucleus 1 and/or the exterior 2, so that relative movement between the nucleus and the exterior is restricted.  <P>COPYRIGHT: (C)2009,JPO&INPIT
Patent JP-2009105945-A (JP)
Title: Image reproducer and image reproduction method
Inventor: KATSUKI SHINJI
IPC: H04N5/225
Filed: 2009-01-16
Abstract: <P>PROBLEM TO BE SOLVED: To display imaged data in association with an imaged location, and to display the imaged data in a more free sight based on a viewer's instruction.  <P>SOLUTION: Imaging information can be obtained in a camera 300 such as an absolute location at imaging, a camera orientation, an imaging angle, a time and or like. The imaged data are recorded in MD (MD-DATA2), and sets of imaging information are made to associate with the imaged data to be recorded in a first TOC. Map information is recorded in a recording medium, and positional information corresponding to the map information is recorded in a second TOC. The first and the second TOCs are read out at reproduction. The positional information can read out the corresponding map information according to the display of the imaged data. The imaged data can be read out with the positional information corresponding to the position directed on the map information. Further, the display based on the viewer's instruction can be performed at reproduction on the basis of the imaged information recorded together with the imaged data.  <P>COPYRIGHT: (C)2009,JPO&INPIT
Patent JP-2010162779-A (JP)
Title: Waterproof structure of information apparatus
Inventor: KUBOTA HIROSHI
IPC: B41J29/13
Filed: 2009-01-16
Abstract: <P>PROBLEM TO BE SOLVED: To provide a waterproof structure which can prevent the invasion of a liquid via a slit for passing a buzzer sound from a built-in buzzer unit to the outside in a printer.  <P>SOLUTION: The buzzer unit 10 is arranged on the rear face side inside the case 2 of the roll paper printer 1. The slits 14(1)-14(6) for outputting the buzzer sound are formed in its protective cover 13. Eaves 16(1)-16(5) equipped with a water-shedding gradient along the upper end edges of the slits 14(1)-14(5) and inclined to a level are formed on an outside surface 13a of the protective cover 13. Even when the liquid invading in the case 2 falls along the outside surface 13a of the protective cover 13, the liquid is received and stopped by the inclined eaves 16(1)-16(5) and flows in a printer width direction along the top surfaces of the eaves to drop from the ends. Hence, the liquid is prevented from invading from the slits into an internal buzzer body part 12.  <P>COPYRIGHT: (C)2010,JPO&INPIT
Patent JP-2009170924-A (JP)
Title: Method of manufacturing photovoltaic module
Inventor: LECHNER PETER
IPC: H01L31/04
Filed: 2009-01-17
Abstract: <P>PROBLEM TO BE SOLVED: To significantly reduce the cost of a photovoltaic module in industrial production.  <P>SOLUTION: In order to manufacture a photovoltaic module, a front electrode layer 3, a semiconductor layer 4 and a rear electrode layer 5 are machined in pattern using split lines 8 so that serially connected cells (C<SB>1</SB>, C<SB>2</SB>, ..., C<SB>n</SB>, C<SB>n+1</SB>) can be formed. The patterning of the front electrode layer and the semiconductor layer is executed using a laser emitting infrared ray. In patterning the semiconductor layer, the power of the laser is reduced to prevent the front electrode layer from being damaged.  <P>COPYRIGHT: (C)2009,JPO&INPIT
Patent JP-2010168602-A (JP)
Title: Aluminum alloy substrate for magnetic disk, and method for manufacturing the same
Inventor: UMEDA HIDETOSHI
IPC: C22F1/057
Filed: 2009-01-20
Abstract: <P>PROBLEM TO BE SOLVED: To provide an aluminum alloy substrate for magnetic disk which has strength equal to or above that of the present aluminum alloy substrate for magnetic disk, reduces material cost, is excellent in the surface smoothness of an NiP plating film, and is excellent in press adhesion, and to provide a method for manufacturing the aluminum alloy substrate for magnetic disk.  <P>SOLUTION: As for the aluminum alloy substrate for magnetic disk, in which both the sides of a core material are provided with skin materials, the core material contains, by mass, 0.1 to 1.5% Si, 1.0 to 3.0% Mg, 0.5 to 2.0% Mn and ≤2.0% Cu, and the balance Al with inevitable impurities, and each surface material comprises ≤0.03% Si, ≤0.03% Fe, 3.0 to 5.0% Mg and 0.01 to 0.35% Cr, and further comprises at least one kind selected from 0.01 to 0.20% Cu and 0.01 to 0.50% Zn, and the balance Al with inevitable impurities, and its proof stress is ≥100 MPa.  <P>COPYRIGHT: (C)2010,JPO&INPIT
Patent JP-2010168768-A (JP)
Title: Structure for blocking off passage between racks
Inventor: UEKUSA TSUNEO
IPC: E06B3/46
Filed: 2009-01-21
Abstract: <P>PROBLEM TO BE SOLVED: To provide a technology about a structure for blocking off a passage between racks, which is excellent in inspection and maintenance workability of equipment installed in a ceiling of facilities for arranging the racks, and which is excellent in the maintainability of a ceiling panel.  <P>SOLUTION: This structure for blocking off the passage between the racks is formed by arranging rack rows, composed of the plurality of racks 1, in the state of making the rack rows face each other, and providing a ceiling section 2, an entrance door section 4, and a back section arranged in a position corresponding to the entrance door section, in the passage between the racks, formed between the rack rows. The entrance door section 4 comprises an outer frame 5 which forms an exterior frame of a door, an intermediate frame 6 which is bridged across opposed positions between the outer frames, and a door panel unit; and each door panel unit member 7 constituting the door panel unit has at least one side thereof split with the intermediate frame 6.  <P>COPYRIGHT: (C)2010,JPO&INPIT
Patent JP-2010176047-A (JP)
Title: Infrared waveguide
Inventor: KOMATSU TAKAHIRO
IPC: G02B6/00
Filed: 2009-02-02
Abstract: <P>PROBLEM TO BE SOLVED: To provide an infrared waveguide transmitting light with a wavelength of 2 μm or more.  <P>SOLUTION: A rod obtained by melting and cooling germanium is arranged on a core of the waveguide.  <P>COPYRIGHT: (C)2010,JPO&INPIT
Patent JP-2010183699-A (JP)
Title: Switching-type power supply unit
Inventor: SATO TADAHIKO
IPC: H02M7/21
Filed: 2009-02-04
Abstract: <P>PROBLEM TO BE SOLVED: To provide a switching-type power supply unit which can easily obtain a low output voltage while an increase of a circuit scale, especially in an output capacitor with a large capacity, is suppressed.  <P>SOLUTION: A plurality of inductors are used for a step-down type DC-DC converter. On/off of a switching element group controlling a connection relation of a plurality of inductors is controlled. When a switching element of the DC-DC converter is on, the plurality of inductors are connected in series. When the switching element is off, the plurality of inductors are connected in parallel. Thus, the low output voltage can easily be obtained. On/off of the switching element group is controlled and some of the plurality of inductors are separated. Thus, the DC-DC converter different in characteristics is easily realized.  <P>COPYRIGHT: (C)2010,JPO&INPIT
Patent JP-2010182505-A (JP)
Title: Electrical connector
Inventor: SHIBUYA KAZUNARI
IPC: H01R12/71
Filed: 2009-02-04
Abstract: <P>PROBLEM TO BE SOLVED: To provide an electrical connector capable of receiving selectively two mating connectors in a state free from backlash, and connectible with any of the mating connectors by a common terminal.  <P>SOLUTION: A housing 10 is arrayed with the common terminal 20 arranged with a contact part 21 in a position contacting with any terminal of the mating connectors 2, an engagement port has the first reception area for receiving the first mating connector 2, and the second reception area for receiving the second mating connector, the housing is formed, in an outside of the first reception area, with a displacement-allowing area of allowing a displacement of an elastic displacement part 42, the second reception area is located within the first reception area, and the elastic displacement part 42 is elastically displaced to move toward the displacement allowing area, when receiving the first mating connector 2, and is not pressed by the second mating connector, not to be elastically displaced, or moves toward the displacement-allowing area, while at least one part remains in the first reception area, when receiving the second mating connector.  <P>COPYRIGHT: (C)2010,JPO&INPIT
Patent JP-2010179758-A (JP)
Title: Adjusting device for power seat
Inventor: NAKAHIRA HIROSHI
IPC: B60N2/90
Filed: 2009-02-05
Abstract: <P>PROBLEM TO BE SOLVED: To improve the operability of a reclining adjustment to be frequently used by distinctly classifying reclining adjustment that is comparatively frequently performed, from adjustments for sliding, tilting, and lifting or the line that are rarely performed.  <P>SOLUTION: The adjusting device for a power seat 1 performs the reclining, sliding, tilting, and lifting adjustments, etc. of the seat using an actuator. A dial operation switch 6 exclusively used for the reclining adjustment is rotatably and operably mounted to a switch installation member (box) 10. A slide knob operation switch 7 used also for the sliding, tilting and lifting adjustments, etc. is formed to have a diameter smaller than that of the dial operation switch 6, and is slidably and operably mounted at the almost center in an upper part of the dial operation switch 6.  <P>COPYRIGHT: (C)2010,JPO&INPIT
Patent JP-2010032036-A (JP)
Title: Insert member used in joint and joint
Inventor: NAKAMURA KOICHI
IPC: F16L57/00
Filed: 2009-02-06
Abstract: <P>PROBLEM TO BE SOLVED: To provide an insert member used in a joint and a joint, easily correcting deformation of a resin pipe having a metal layer, and exhibiting excellent water tightness without damaging a seal ring in inserting the resin pipe.  <P>SOLUTION: In the insert member 20 used in the joint 10, one end part thereof is provided with a tapered part 25 where the resin pipe 24 having the metal layer 23 at one end part is inserted to correct its deformation, the other end part is provided with a fit-in part 21 fitted and supported in a joint body 11, and the middle part 26 is provided with an annular groove 28 to which a pair of seal rings 27 are fitted. The outer peripheral part of the seal ring 27 is provided with a guide member 37 having a guide cylinder part 39 to which the resin pipe 24 is externally fitted and a guide head part 38 to which the end of the resin pipe 24 is abutted to guide insertion of the resin pipe 24 to the insert member 20.  <P>COPYRIGHT: (C)2010,JPO&INPIT
Patent JP-2010182587-A (JP)
Title: Head lamp device for vehicle
Inventor: MOCHIZUKI MITSUYUKI
IPC: F21S8/12
Filed: 2009-02-06
Abstract: <P>PROBLEM TO BE SOLVED: To provide a head lamp device for vehicle, for forming a distribution pattern other than a high-beam distribution pattern and a low-beam distribution pattern by a simple structure.  <P>SOLUTION: A shade mechanism 34 includes a movable shade 38 which forms a distribution pattern by changing a light shielding state between two positions including a protruded position and a retreated position; and a vibration actuator 42 which moves the movable shade 38 in the protruding and retreating direction. The vibration actuator 42 drives to generate a thrust force with a control resolution smaller than the control resolution in movement of the movable shade 38 in the protruding and retreating directions at a standard speed. Accordingly, The movable shade 38 is controlled to be stopped in a desired position between a perfectly protruded position and a perfectly retreated position, and two or more kinds of distribution patterns are easily formed.  <P>COPYRIGHT: (C)2010,JPO&INPIT
Patent JP-2010183502-A (JP)
Title: Transceiver, communication system, walk-through gate system, and mobile terminal
Inventor: OCHIAI KATSUYUKI
IPC: H04W84/10
Filed: 2009-02-09
Abstract: <P>PROBLEM TO BE SOLVED: To prevent the occurrence of packet collision in a walk-through gate using electric field communication that a plurality of users use at the same time.  <P>SOLUTION: A first transceiver 6 includes: a beacon transmission unit configured to generate a beacon as a signal for connection confirmation at constant time intervals; and a transmission unit configured to perform transmission by inducing an electric field based upon the beacon in an electric field transmission medium, and a mobile terminal 1 includes a second transceiver configured to extract the beacon and to report that the beacon is received, and a response delay means configured to delay transmission of a response packet responding to a request packet transmitted from a processing device 8 based upon the reported beacon, the processing device 8 transmitting the request packet to the mobile terminal 1 through the first transceiver 6 and receiving the response packet from the mobile terminal 1.  <P>COPYRIGHT: (C)2010,JPO&INPIT
Patent JP-2009102436-A (JP)
Title: Cyclopropa-heterocycle as non-nucleoside reverse transcriptase inhibitor
Inventor: LINDSTROEM STEFAN
IPC: C07D311/78
Filed: 2009-02-10
Abstract: <P>PROBLEM TO BE SOLVED: To provide a novel intermediate in the synthesis of non-nucleoside reverse transcriptase inhibitors active against HIV-1 and having an improved resistance and pharmacokinetic profile.  <P>SOLUTION: This intermediate is a compound represented by any one of formulas II, IV or VI: (wherein X, R<SB>4</SB>to R<SB>7</SB>, R<SB>11</SB>, PG, PG<SP>*</SP>and R<SB>13</SB>are each defined particularly in specifications).  <P>COPYRIGHT: (C)2009,JPO&INPIT
Patent JP-2010184760-A (JP)
Title: Transfer system
Inventor: SAWATO KAZUTOSHI
IPC: B65G1/04
Filed: 2009-02-10
Abstract: <P>PROBLEM TO BE SOLVED: To easily fix a transfer system to a processing device, while constituting a system body in a small type.  <P>SOLUTION: This transfer system (30) is arranged so as to intercept an original transfer course from a transfer position for transferring a carrying object (3) by a carrier (10) to a port, and includes a first shelf capable of transferring the carrying object between the carrier and itself, a second shelf capable of placing the carrying object, a moving means (32) capable of reciprocating the carrying object to the first shelf and the port in the first direction for approaching and separating to the processing device (20) and capable of reciprocating the carrying object in the second direction for crossing with the first direction in a first direction position separated in the first direction by a carrying object quantity from the first shelf and the port, and a communication means capable of receiving a first system signal of the effect of requiring transfer from the carrier, capable of transmitting a second system signal of the effect of permitting the transfer to the carrier, capable of transmitting the first system signal to the processing device and capable of receiving the second system signal from the processing device.  <P>COPYRIGHT: (C)2010,JPO&INPIT
Patent JP-2010184764-A (JP)
Title: Image forming device
Inventor: NISHISAKA KATSUHIKO
IPC: B65H7/02
Filed: 2009-02-12
Abstract: <P>PROBLEM TO BE SOLVED: To provide a technology for preventing the deterioration in an image quality when a guide means is not properly set.  <P>SOLUTION: When determined that a guide width of a paper guide is not proper, since display is performed on a display part 9 for urging a user to set the paper guide so that the guide width becomes proper by a notice control part 25e, paper P is normally carried by a carrying mechanism by preventing the occurrence of flapping and a skew in the carrying paper P when the user properly sets the paper guide by adjusting the guide width in response to the display of the display part 9. Thus, the deterioration in a printing quality to the paper P when the paper is not normally carried since the paper guide is not properly set, can be prevented.  <P>COPYRIGHT: (C)2010,JPO&INPIT
Patent JP-2010041029-A (JP)
Title: Aqueous dispersion for chemical mechanical polishing and method of manufacturing the same, and chemical mechanical polishing method
Inventor: SHIBATA YOSUKE
IPC: B24B37/00
Filed: 2009-02-12
Abstract: <P>PROBLEM TO BE SOLVED: To provide an aqueous dispersion for chemical mechanical polishing which decreases a polishing rate for a low-dielectric-constant insulating film, has both a high polishing rate and high flattening characteristics for an interlayer dielectric (cap layer) such as a barrier metal film and a TEOS film, and suppresses surface defects such as dishing, erosion, a scratch, and a fang; and to provide a chemical polishing method using the same.  <P>SOLUTION: The aqueous dispersion for chemical mechanical polishing contains (A) silica particles and (B) an organic acid having two or more carboxyl radicals. The silica particles (A) have such chemical properties that the number of silanol groups calculated based on the signal area of a<SP>29</SP>Si-NMR spectrum is 2.0 to 3.0×10<SP>21</SP>groups/g.  <P>COPYRIGHT: (C)2010,JPO&INPIT