baber/WOPTO huggingface dataset:
Patent WO-2021176878-A1 (WO)
Inventor: TAKEI DAISUKE
IPC: G01C15/00
Filed: 2021-01-22
Abstract: In order to enable the state of the inner walls of a tunnel or conduit, etc., to be understood and monitored without being permanently installed inside the same, this monitoring device comprises: a progress execution part causing a combination of an irradiation part and a light reception part to progress along the interior of a space in a tube-shaped object, which is an object that has a tube-shaped space in the interior thereof, said irradiation part irradiating laser light onto an exposure object that is an object exposed inside the aforementioned space, and said light reception part converting return light of the laser light from the exposure object into an electric signal; and a section specification part which, from the electric signal, specifies and outputs a prescribed state section position, which is the position of a prescribed state section, said prescribed state section being a section, out of the sections of the exposure object irradiated by the laser light, that exhibits a prescribed state.
Patent WO-2021157558-A1 (WO)
Title: Light-sensitive resin composition and image display device
Inventor: YANAGI MASAYOSHI
IPC: G03F7/004
Filed: 2021-02-02
Abstract: Provided is a light-sensitive resin composition from which can be obtained a cured resin film that has good developing and colorant dispersion properties and a high elastic recovery rate. A light-sensitive resin composition characterized in that the composition contains a resin (A), a photopolymerization initiator (B), a solvent (C), a colorant (D), and a reactive diluent (E), the resin (A) being a reaction product of: a reaction product of an epoxy resin (a1) and a monocarboxylic acid (a2) containing an ethylenically unsaturated group with epichlorohydrin and a condensation product of a bivalent phenol compound and an aldehyde compound; and a polybasic acid (a3). The constituent unit ratios derived from the constituents (a1)–(a3) in the resin (A), relative to 1.00 moles for parts derived from epoxy groups of the epoxy resin (a1), are 0.85–1.00 moles for constituent units derived from the monocarboxylic acid (a2) containing an ethylenically unsaturated group and 0.10–0.70 moles for constituent units derived from the polybasic acid (a3).
Patent WO-2021166890-A1 (WO)
Title: Monochrome inkjet printer
Inventor: ISHIBE AKINARI
IPC: B41J2/175
Filed: 2021-02-16
Abstract: The present invention pertains to a monochrome inkjet printer. The monochrome inkjet printer is used only for achromatic recording, and is provided with a first ink accommodation unit, a first recording unit, a second ink accommodation unit, and a second recording unit. The first ink accommodation unit accommodates a dye ink, and the first recording unit communicates with the first ink accommodation unit and uses the dye ink to record an image or a writing passage. The second ink accommodation unit accommodates a pigment ink, and the second recording unit communicates with the second ink accommodation unit and uses the pigment ink to record an image or a writing passage. An ink inlet adapted to an ink bottle is provided to the first ink accommodation unit and/or the second ink accommodation unit. Accordingly, this monochrome inkjet printer is provided with the first ink accommodation unit for storing the dye ink and the second ink accommodation unit for accommodating the pigment ink, and is used only for achromatic recording, thereby eliminating a phenomenon where an image cannot be recorded due to an insufficient amount of ink remaining in an ink tank accommodating chromatic ink.
Patent WO-2022176037-A1 (WO)
Title: 調整装置、調整システム、表示装置、乗員監視装置、および、調整方法
Inventor: SUSUMAGO YUKI
IPC: G08G1/16
Filed: 2021-02-17
Abstract: 角度が可変な表示装置（２）の角度にあわせて撮像方向が変わる撮像装置（２１）を搭載した表示装置（２）の角度が変更されたことを検知する角度変更検知部（１１）と、角度変更検知部（１１）が、表示装置（２）の角度が変更されたことを検知すると、表示装置（２）の角度の変更量に基づき、探索領域を移動させる探索領域調整部（１２）とを備えた。
Patent WO-2022176133-A1 (WO)
Title: 光学式異物検査装置
Inventor: KANAI HISAAKI
IPC: G01N21/956
Filed: 2021-02-18
Abstract: 光学式異物検査装置に関して、試料面の各位置の検出信号のバラツキを低減または解消できる技術を提供する。光学式異物検査装置１は、回転ステージ１０２と、パルス状のレーザ１２０を照射するレーザ光源１０４と、蓄積電荷型センサであるセンサ１０５と、検出回路１０６と、レーザ発光に同期させた発光タイミング同期信号１２７を生成する発光タイミング信号生成回路１１０と、試料１０１の回転の状態を表す第１信号（ステージエンコーダ信号１２９）を入力して、発光タイミング同期信号１２７に同期させたトリガ信号１２４を生成するトリガ信号生成回路１０８と、発光タイミング同期信号１２７と第１信号とを入力して、試料１０１の径方向の位置に対応した周期毎のパルス数を算出するパルス発数算出回路１０９と、検出信号１２３とパルス数とを用いて、試料１０１の面における各位置の状態を測定する処理系１８０と、を備える。
Patent WO-2021220605-A1 (WO)
Inventor: TANAKA KOICHI
IPC: G03B5/00
Filed: 2021-03-03
Abstract: The present invention provides a processor for an imaging device, an imaging device, a control method for an imaging device, and a control program for an imaging device, with which it is possible to improve image blur correction performance. A system control unit (18) performs recording control that performs either a first process for recording a first captured image output from a crop area (121) of an image sensor (12), and a second process for recording a second captured image output from a light receiving area (120) wider than the crop area (121), image blur correction control that corrects image blur of the captured image output from the image sensor (12) by moving the image sensor (12), image processing that generates a live view image for displaying a subject image formed in the light receiving area (120) on a display unit (15), and control that when the first process is performed, widens the movable range of the image sensor (12) in the image blur correction control as compared with the case where the second process is performed.
Patent WO-2022215142-A1 (WO)
Title: Terminal, radio communication method, and base station
Inventor: MATSUMURA YUKI
IPC: H04W72/04
Filed: 2021-04-05
Abstract: A terminal according to an embodiment of this disclosure includes: a receiver that receives multiple downlink control channels supporting application of different control resource set pool indices; and a controller that, when an offset between at least one of the multiple downlink control channels and a physical shared channel scheduled by the multiple downlink control channels is less than a predetermined value, controls the reception of the physical shared channel on the basis of a default TCI state that is set for each of the control resource set pool indices or a default TCI state that is set independently of the control resource set pool indices.
Patent WO-2022070501-A1 (WO)
Inventor: TAKAHASHI HIDENORI
IPC: G02B6/02
Filed: 2021-05-19
Abstract: 第１プラグが設けられた第１ＭＣＦと、第２プラグが設けられた第２ＭＣＦと、を接続する接続器は、前記第１プラグが差し込まれる第１ジャックと、前記第２プラグが差し込まれる第２ジャックと、を備え、前記第１ジャックは、第１状態の前記第１プラグと第２状態の前記第１プラグを少なくとも差し込むことができる様に構成され、前記第２状態の前記第１プラグは、前記第１プラグを前記第１ジャックに差し込む差込方向を回転軸として、前記第１状態の前記第１プラグを１８０度だけ回転させた状態である。
Patent WO-2022137599-A1 (WO)
Title: ワイパーを具備しない車両
Inventor: AGATA Yuzo
IPC: B60R1/00
Filed: 2021-06-04
Abstract: 【課題】ワイパーを具備せず、透明なフロントガラスと同様な機能で、画面に映し出された映像を見ながら運転でき、夜間でも昼間と同様な視覚で運転可能であると共に、安全性を高める機能を有したワイパーを具備しない車両を提供する。 【解決手段】車両の運転席前面部に画像表示部が設置されると共に、車両前方の道路状況を撮像する撮像手段が設けられており、画像表示部の画像表示面が車内側に配置され、撮像手段で撮像された画像が画像表示面に表示され、表示された画像を見ながら運転若しくは走行するようになっているワイパーを具備しない車両である。
Patent WO-2022259378-A1 (WO)
Title: Information processing system, resource management device, resource management method, and program
Inventor: SUZUKI RYOHEI
IPC: G06F21/62
Filed: 2021-06-08
Abstract: According to the present invention, an information processing system includes: a resource management device that manages a certain resource; an access device that accesses the resource; and an authorization device that, when delegation of access authority for the resource has been permitted by the owner of the resource, issues an access token that corresponds to the access authority to the access device. The resource management device has: an acquisition unit that, in response to an access request for the resource from the access device that is accompanied by the access token, acquires, as information that indicates the scope of the access authority that corresponds to the access token, information in which a qualifier has been added to access authority pre-released by the authorization device; and an execution unit that executes processing that corresponds to the access request within the scope of the access authority as limited by the qualifier. The present invention thereby improves the flexibility of the scope of authority delegated to others.
Patent WO-2022038866-A1 (WO)
Inventor: HIRANO TOMOHIKO
IPC: H01J1/34
Filed: 2021-06-09
Abstract: The photoelectric surface electron source 1 is provided with: a glass substrate 40 which, upon receiving laser beams 101 incident from a substrate back surface 44, emits the laser beams 101 from a substrate main surface 43; a photoelectric surface 50 which is disposed on the substrate main surface 43 and emits photoelectrons 102 upon receiving the laser beams 101; a lens array 41S which is disposed on the substrate back surface 44 and includes multiple microlenses 41 for focusing the laser beams 101 toward the photoelectric surface 50; and a light-shielding part 70 which is disposed on the glass substrate 40. The light-shielding part 70 has: a back surface-side light-shielding layer 73 which is disposed on a back surface-side light-shielding surface 72 sandwiched by the multiple microlenses 41 in the substrate back surface 44; and a main surface-side light-shielding layer 76 which is disposed on a main surface-side light-shielding surface 75.
Patent WO-2021261313-A1 (WO)
Inventor: HORINOUCHI KAZUHITO
IPC: B29C55/14
Filed: 2021-06-14
Abstract: [Problem] To provide a biaxially-oriented polypropylene film that: has high rigidity; easily maintains a bag shape when used as a packaging bag, even if the film is made thin, while at the same time, being able to maintain gas barrier properties at equivalent thickness to conventional films, even if the film is made thin; and, to make the film into packaging, has few wrinkles in a seal part and the periphery thereof when heat sealed. [Solution] A production method for a biaxially-oriented polypropylene film comprises, in order: a step in which an unstretched sheet is obtained by extruding a polypropylene resin composition containing a polypropylene resin having a mesopentad fraction of at least 97.0%; a step in which the unstretched sheet is stretched in the longitudinal direction; a preheating step in which the longitudinally-stretched film is heated at a preheating temperature of Tm to Tm+25°C; a step in which the preheated, longitudinally-stretched film is stretched by a factor of at least 10 in the width direction at a temperature of Tm–10°C to the preheating temperature; a step in which the film is cooled at the width direction stretching temperature or less when the width direction stretching has finished, and at a temperature of Tm–80°C to Tm–15°C; and a step in which heat fixing is carried out while stretching the film by a factor of 1.03 or more in the width direction at a temperature of Tm–5°C to Tm+20°C.
Patent WO-2022269780-A1 (WO)
Inventor: KAGE HIROSHI
IPC: G06F16/55
Filed: 2021-06-23
Abstract: 連想記憶装置は、固定長の数値ベクトルを記憶パターンとして格納する記憶パターン指定部（１）と、記憶パターンに関連付けられる数値ベクトルを想起パターンとして格納する想起パターン指定部（２）と、入力層、中間層、および出力層からなるエコーステートネットワークを利用して学習することによって、入力層を構成する全てのユニットの値が中間層に対して同時に入力され、中間層内のニューラルネットワーク処理を経て、中間層から同時に出力された値が出力層を構成する全てのユニットの値として設定される連想記憶回路を獲得し、記憶パターンを連想記憶回路に並列入力することによって連想記憶回路から想起パターンを並列出力する連想記憶学習部（３）と、連想記憶学習部が学習によって獲得した連想記憶回路を内部に保持する連想記憶処理部（４）とを備える。
Patent WO-2022180880-A1 (WO)
Inventor: YONEDA YUKA
IPC: D06F103/68
Filed: 2021-06-29
Abstract: This operation analysis method includes a first acquisition step (ST1), a second acquisition step (ST2), a proposal step (ST3), and an analysis step (ST4). In the first acquisition step (ST1), the operation history of a washing machine is acquired. In the second acquisition step (ST2), at least the expected action of a user of the washing machine is acquired. In the proposal step (ST3), a future operation plan is proposed, on the basis of the operation history acquired in the first acquisition step (ST1), for normal operation of the washing machine to be performed regularly by the user. In the analysis step (ST4), it is analyzed, on the basis of the expected action acquired in the second acquisition step (ST2), whether the operation of the washing machine is normal operation. In the proposal step (ST3), the operation plan is updated on the basis of the analysis result of the analysis step (ST4).
Patent WO-2022009901-A1 (WO)
Inventor: IMAI SHINJI
IPC: A61B17/90
Filed: 2021-07-06
Abstract: 烏口突起を肩甲骨頸部に近接させることを容易に実現可能な手術器械を提供する。　本発明の手術器械１は、第一方向に延びる柄２と、柄２の先端から第二方向に延びる傾斜部３とを備える。傾斜部３が延びる第二方向は、柄２が延びる第一方向に対して９５°以上１１５°以下の角度αで傾斜しており、傾斜部３の外縁には、螺旋が通される切り欠け１０が形成されている。
Patent WO-2022030361-A1 (WO)
Title: Laminated film and packaging material
Inventor: YAMAZAKI ATSUSHI
IPC: B65D65/40
Filed: 2021-07-29
Abstract: The present invention addresses the problem of providing a laminated film that can form a laminated structure composed mainly of a polypropylene film and composed of almost a single resin type having a low environmental load, the laminated film having required performance such as gas barrier properties or adhesiveness required for packaging materials, as well as processing suitability. In order to solve the problem, the present invention provides a laminated film in which a coating layer having a polyvinyl alcohol-based copolymer and an inorganic layered compound is provided on at least one surface of the base film, the laminated film satisfying requirements (a) to (d) below. (a) The base film is a stretched film using a propylene-based resin. (b) The coating weight of the coating layer is 0.10 g/m2 to 0.50 g/m2. (c) In a total reflection infrared absorption spectrum of the laminated film, the ratio (P1/P2) of a peak intensity (P1) having an absorption maximum in a region of 1040±10cm-1 to a peak intensity (P2) having an absorption maximum in a region of 3300±10cm-1 is within the range of 3.0-25.0. (d) The arithmetic mean roughness in 2 square μm of the coating layer on the laminated film is within the range of 2.0-8.0 nm.
Patent WO-2022030512-A1 (WO)
Title: Method for generating foot shape specification data, method for manufacturing shoe, method for searching ready-made shoes, assistance system for custom shoe manufacturing, and ready-made shoe search system
Inventor: OSHIMA NOBORU
IPC: A43D3/02
Filed: 2021-08-03
Abstract: This method for generating foot shape specification data comprises: acquiring foot shape 3D data (FS3D) by measuring the three-dimensional shape of the bare foot (BF) of a person being measured (P); generating a virtual insole (VIS) for measurement on the basis of the acquired foot shape 3D data (FS3D); generating corrected foot shape 3D data (CFSD) by adding data for the virtual insole (VIS) to the sole portion of the acquired foot shape 3D data; and, in order to specify the shape of the foot, measuring pre-stipulated dimensions of the corrected foot shape 3D data (CFSD) to thereby acquire foot shape specification data (FSSD).
Patent WO-2022044740-A1 (WO)
Inventor: OTANI KAZUO
IPC: B29C65/52
Filed: 2021-08-04
Abstract: The present invention provides a method for joining a metal and a resin, in which a metal and a resin are joined by high-frequency induction welding, with an intermediate resin layer for generating chemical reaction disposed therebetween.
Patent WO-2022054475-A1 (WO)
Inventor: OTO Kohei
IPC: H04R17/00
Filed: 2021-08-05
Abstract: This active noise control system (500) comprises a structure (80) and a plurality of piezoelectric speakers (10). The plurality of piezoelectric speakers (10) are disposed on a surface (80s) of the structure (80). A radiation surface of each of the piezoelectric speakers (10) extends in a first direction (D1) and a second direction (D2). The first direction (D1) is a direction connecting the centers of the radiation surfaces of mutually adjacent piezoelectric speakers (10). The second direction (D2) is perpendicular to the first direction (D1). The dimension (L1) of the radiation surface of each of the piezoelectric speakers (10) in the first direction (D1) is smaller than the dimension (L2) in the second direction (D2).
Patent WO-2023013011-A1 (WO)
Inventor: ASAOKA YASUSHI
IPC: H05B33/12
Filed: 2021-08-06
Abstract: This display device (2) comprises a light-emitting layer (10). The light-emitting layer includes light-emitting areas (LAR, LAG, LAB) that emit light of predetermined colors, and non-light-emitting areas (NLA) that are formed in areas which are different from the light-emitting areas and include an outer edge of the light-emitting layer. The non-light-emitting areas include, in an outer edge of the light-emitting layer, a first outer edge area (16R) that has a first outer edge material that is different from the main light-emitting material that constitutes the light-emitting areas.
Patent WO-2022176234-A1 (WO)
Inventor: ZHAO QINGHUA
IPC: G02B13/18
Filed: 2021-08-06
Abstract: The present disclosure is an optical system having therein a middle imaging position MI conjugate with each of an enlargement conjugate point on an enlargement side and a reduction conjugate point on a reduction side, the optical system comprising: an enlargement optical system Op having a plurality of lens elements L1-L15 and positioned more on the enlargement side than the middle imaging position MI; and a relay optical system Ol having a plurality of lens elements L16-L28 and positioned more on the reduction side than the middle imaging position MI. The enlargement optical system Op is stationary with respect to the reduction conjugate point when zooming. The relay optical system Ol includes a plurality of mobile lens groups G2-G5 which can move independently in the optical axis direction when zooming. The most-reduction-side mobile lens group G5, which is positioned most on the reduction side among the plurality of mobile lens groups, has a negative refractive power.
Patent WO-2022054578-A1 (WO)
Title: Sensor unit, and attaching structure of sensor unit and attachment object
Inventor: SHIGA NAOKI
IPC: G06F3/041
Filed: 2021-08-25
Abstract: [Problem] The present invention obtains a sensor unit that can be easily attached to an attachment object to which the sensor unit is to be attached. [Configuration] A sensor unit U1 can be attached to an attachment object T such that the sensor unit U1 is partially accommodated from a Z'-direction side within a hole H in the attachment object T that opens in at least the Z' direction. The unit U1 comprises a detection sensor 100 capable of detecting the approach of a detection object from the Z-direction side, and at least one cushion part 200 that covers at least a portion of the detection sensor 100 from the Z-direction side and that can be accommodated at least partially in the hole H. The at least one cushion part 200 is accommodated at least partially within the hole H in the attachment object T while the sensor unit U1 is attached to the attachment object T from the Z'-direction side.
Patent WO-2022054777-A1 (WO)
Inventor: FUKUNAGA YUYA
IPC: F02C7/18
Filed: 2021-09-07
Abstract: ガスタービンのクリアランス制御システムにおいて、制御装置は、負荷の変動幅が予め設定された範囲内で推移する負荷安定状態となった場合に、第１流量が第２流量よりも大きくなるように調節装置を作動させ、負荷が範囲外となる負荷変動状態となった場合に、第２流量が第１流量よりも大きくなるように調節装置を作動させる。
Patent WO-2022137669-A1 (WO)
Inventor: EBISUMOTO DAIGORO
IPC: H02M3/28
Filed: 2021-09-14
Abstract: Selon la présente invention, dans un dispositif de conversion de puissance électrique tel qu'un convertisseur CC/CC isolé, l'apparition d'un flux inverse est arrêtée même en cas de diminution de la tension d'entrée, et la tension de sortie est maintenue à une tension prescrite. Ledit dispositif de conversion de puissance électrique (3, 3A, 3B, 3C) comprend un premier circuit de commutation (21) disposé sur le côté primaire d'un circuit transformateur de résonance (31, 32, 33), et un second circuit de commutation (22) disposé sur le côté secondaire du circuit transformateur de résonance (31, 32, 33). Après la conversion de la tension d'entrée CC en tension CA par le premier circuit de commutation (21), la tension résultante est envoyée au second circuit de commutation (22) par l'intermédiaire du circuit transformateur de résonance (31, 32, 33), et la tension alternative convertie est convertie en tension de sortie CC et émise en sortie. Le dispositif de conversion de puissance électrique (3, 3A, 3B, 3C) comprend un circuit de commande (10) qui détecte la tension de sortie et maintient la tension de sortie à une valeur cible prescrite. Lorsqu'il est détecté que la tension d'entrée est égale ou inférieure à une valeur de référence prescrite à laquelle un flux inverse se produit dans le second circuit de commutation (22), le circuit de commande (10) interrompt l'attaque du second circuit de commutation (22), ce qui permet d'interrompre l'apparition d'un flux inverse dans le second circuit de commutation (22) et de maintenir la tension de sortie à la tension prescrite.
Patent WO-2022080503-A1 (WO)
Inventor: OKADA TOMOYOSHI
IPC: F16C1/10
Filed: 2021-10-18
Abstract: La présente invention concerne un mécanisme de raccordement de câbles pouvant supprimer l'endommagement d'une charnière. Ledit mécanisme de raccordement de câbles comprend : une cible de raccordement (3) à laquelle des câbles (21a et 21b) doivent être raccordés ; une enveloppe (4) destinée à loger la cible de raccordement (3). L'enveloppe (4) comprend : un corps principal (5) d'enveloppe ayant une surface de coulissement (51) sur laquelle la cible de raccordement (3) coulisse ; un élément couvercle (6) pouvant fermer le corps principal (5) d'enveloppe ; une charnière (7) permettant de raccorder le corps principal (5) d'enveloppe et l'élément couvercle (6) l'un à l'autre. Le corps principal (5) d'enveloppe possède des parties paroi externe (56) s'étendant de façon à faire saillie vers l'extérieur, et l'élément couvercle (6) possède des parties paroi interne (65) pouvant être mises en butée avec les parties paroi externe (56). Les parties paroi externe (56) sont situées sur des côtés plus externes que les parties paroi interne (65) dans la direction radiale d'une rotation relative. Les parties paroi externe (56) et les parties paroi interne (65) sont agencées de façon à restreindre un mouvement relatif de l'élément couvercle (6) au moyen de leur mise en butée lorsqu'une charge est appliquée au corps principal (5) d'enveloppe et/ou à l'élément couvercle (6), de sorte que l'élément couvercle (6) se déplace relativement le long de la surface de coulissement (51) dans une direction s'éloignant de l'axe de rotation de la rotation relative par rapport au corps principal (5) d'enveloppe.
Patent WO-2022180924-A1 (WO)
Title: スイッチング制御回路およびゲート駆動回路
Inventor: MINAMI YOSHIHISA
IPC: H02M1/08
Filed: 2021-10-18
Abstract: スイッチング制御回路（１）は、パワートランジスタ（Ｑ）のスイッチングを制御するスイッチング制御回路であって、パワートランジスタ（Ｑ）のオン期間およびオフ期間を指示する駆動パルス信号（Ｓ１）を入力するパルストランス（２）と、パルストランス（２）から出力されるパルス信号（Ｓ４）を用いて、パワートランジスタ（Ｑ）のオフ期間にパワートランジスタ（Ｑ）のゲートを負電圧にする負電圧回路（１０）と、を備える。
Patent WO-2022158079-A1 (WO)
Inventor: ODAI MASAKI
IPC: G05B23/02
Filed: 2021-10-29
Abstract: 本発明の一態様の制御装置は、作業装置、及び、作業装置の作業環境のうち、少なくとも一つから得られるセンサデータと、作業装置の正常進捗時センサデータと、に基づいて作業の進捗を判定し、作業の進捗を示す進捗情報を出力する進捗情報出力部と、進捗情報に基づいて作業装置の動作指令を生成して出力する管理部と、動作指令とセンサデータとに基づいて作業装置を駆動するための駆動信号を生成し、該駆動信号を作業装置に出力する制御部と、を備える。
Patent WO-2022137839-A1 (WO)
Inventor: KAWAMURA KENTA
IPC: A61N1/06
Filed: 2021-11-08
Abstract: カテーテルは、中空シャフトと、中空シャフトの先端部に設けられた先端電極と、中空シャフトの基端部に設けられ、中空シャフトを介して先端電極と電気的に接続された基端電極と、基端電極に着脱可能に構成され、基端電極に装着されることによって外部の電圧出力装置と基端電極とをリード線を介して電気的に接続する接続部と、を備える。
Patent WO-2022124075-A1 (WO)
Title: 設計支援装置、設計支援方法及び設計支援プログラム
Inventor: HANAOKA KYOHEI
IPC: G06F30/27
Filed: 2021-11-24
Abstract: 一実施形態に係る設計支援装置は、設計パラメータ群と特性項目の観測値とからなる実績データを取得するデータ取得部と、設計パラメータ群に基づいて特性項目の観測値を確率分布等として予測する予測モデルを構築するモデル構築部と、特性項目ごとの獲得関数を構築する獲得関数構築部と、複数の獲得関数の多目的最適化により設計パラメータ群候補を複数生成する設計パラメータ群候補生成部と、設計パラメータ群候補を予測モデルに入力することにより得られる観測値の確率分布等に基づいて全ての特性項目の目標値に対する全体達成確率を算出し、全体達成確率が最も高い少なくとも一つの設計パラメータ群候補を選択する選択部と、設計パラメータ群候補を出力する出力部とを備える。
Patent WO-2022118762-A1 (WO)
Inventor: AKAGI Daijiro
IPC: G03F1/24
Filed: 2021-11-26
Abstract: 本発明は、ＥＵＶ光を反射する多層反射膜と、上記多層反射膜の保護膜と、ＥＵＶ光を吸収する吸収層とが、この順に形成されたＥＵＶリソグラフィ用反射型マスクブランクであって、上記保護膜が、ロジウム（Ｒｈ）、または、Ｒｈと、窒素（Ｎ）、酸素（Ｏ）、炭素（Ｃ）、ホウ素（Ｂ）、ルテニウム（Ｒｕ）、ニオブ（Ｎｂ）、モリブデン（Ｍｏ）、タンタル（Ｔａ）、イリジウム（Ｉｒ）、パラジウム（Ｐｄ）、ジルコニウム（Ｚｒ）およびチタン（Ｔｉ）からなる群から選択される少なくとも１つの元素とを含むロジウム系材料からなることを特徴とするＥＵＶリソグラフィ用反射型マスクブランクに関する。