Patent FR-2975107-A1 (FR)
Title: Routing a reactive gas on precursor by heating reactive element to obtain part of reactive element in vapor phase, and circulating carrier gas in reactive element in vapor phase for driving reactive element in vapor phase of carrier gas
Inventor: SAVIDAND GREGORY
IPC: C23C16/44
Filed: 2011-05-10
Abstract: The process comprises heating a reactive element to obtain a part of the reactive element in vapor phase, circulating a carrier gas in the reactive element in vapor phase for driving the reactive element in vapor phase of the carrier gas, and injecting the carrier gas comprising the reactive element in vapor phase on a precursor. A heating temperature of the reactive element is controlled for controlling a quantity of the reactive element in the carrier gas. The heating step comprises controlling, via the control of the heating temperature, a saturated vapor pressure of the reactive element. The process comprises heating a reactive element to obtain a part of the reactive element in vapor phase, circulating a carrier gas in the reactive element in vapor phase for driving the reactive element in vapor phase of the carrier gas, and injecting the carrier gas comprising the reactive element in vapor phase on a precursor. A heating temperature of the reactive element is controlled for controlling a quantity of the reactive element in the carrier gas. The heating step comprises controlling, via the control of the heating temperature, a saturated vapor pressure of the reactive element with a thermodynamic equilibrium comprising the vapor phase of the reactive element, and controlling the temperature of a support of the reactive element for controlling the quantity of the reactive element in the carrier gas. The step of controlling the pressure is conducted for controlling the partial pressure of the reactive element in the carrier gas. The support is an electrically conductive crucible. The circulating step comprises mixing the reactive element in vapor phase with the carrier gas. The method further comprises injecting hot gas for promoting a reaction of the reactive element with the precursor, and cooling a quenching effect of the precursor, after the reaction of the reactive element with the precursor, by injecting a cold gas on the precursor. The reactive element is reactive with the precursor in vapor phase. The temperature of the reactive element injected on the precursor is controlled in function including: the temperature of the carrier gas; the flow of the mixture of the reactive element in vapor phase with the carrier gas; and a distance between the precursor and an injection pipe of the mixture on the precursor. The reactive element comprises: an element of column VI for the manufacture of group I-III-VI 2alloy with photovoltaic properties; an element of column V for the manufacture of group II-IV-V alloy with photovoltaic properties; an element of column VI for the manufacture of group I 2-II-IV-VI 4alloy with photovoltaic properties; and an element of column I and III. The carrier gas is heated to a controlled temperature of 100[deg] C. The reactive element comprises a mixture of reactive elements driven by the carrier gas to react together. An independent claim is included for an installation for routing a reactive gas on a precursor.