baber/WOPTO huggingface dataset:
Patent JP-2007503885-A (JP)
Title: 骨プレート
IPC: A61B/
Filed: 2004-08-30
Abstract: 肋骨などの骨を骨プレートで固定する方法、装置およびキットを含むシステム。
Patent JP-2007533843-A (JP)
Title: 分離システム、方法および装置
IPC: C22B34/12
Filed: 2004-09-02
Abstract: 液体金属および固体粒子のスラリーを処理するためのシステム、方法および装置が、真空蒸留と熱い不活性ガスによる移送との様々な組合せを用いて開示される。酸素の侵入を防止するように不活性化または真空チャンバをシールするための様々な機構が開示される。
Patent JP-2007501962-A (JP)
Title: 平型画面パネルを備えた装置
IPC: G09G3/34
Filed: 2004-05-19
Abstract: 平型画面のパネル（６）上に表示可能な画像の輝度への障害的影響を回避するために、センサ（３）とパネルの背後照明を行なう光を持つバックライト（５）との間に、パネル（６）の光透過部分のエージング特性および／または温度特性にほぼ一致するエージング特性および／または温度特性を有する光透過部分（４）を配置することが提案されている。
Patent JP-2007507779-A (JP)
Title: オペレーティングシステム
IPC: G06F9/46
Filed: 2004-10-01
Abstract: 複数の異なるオペレーティングシステムを同一ＲＩＳＣコンピュータ上で同時に動作させる方法であって、相対的に高い優先順位を有する第１オペレーティングシステム（Ｃ５などのリアルタイムオペレーティングシステム）を選択することと、相対的に低い優先順位を有する少なくとも１つの副オペレーティングシステム（Ｌｉｎｕｘなどの汎用オペレーティングシステム）を選択することと、所定の条件の下で各オペレーティングシステムの間で切り替えるように構成された共通プログラム（ナノカーネルに似たハードウェアリソースディスパッチャ）を提供することと、第１および第２のオペレーティングシステムを共通プログラムによって制御できるようにするために第１および第２のオペレーティングシステムに対して修正を加えることとを含む方法。 【選択図】  図１
Patent JP-2007508971-A (JP)
Title: 蛍光発光する隠れ証印
IPC: G06K7/12
Filed: 2004-10-14
Abstract: 第１部分と第２部分とを含む印刷した証印が記述される。第１部分は、通常の昼光下で第１カラーを有する第１インクを有する。第２部分は、異なる第２インクを有する。第２インクは、通常の昼光下で第１カラーと実質的に同じ第２カラーを有する蛍光インクを含む。蛍光インクは、蛍光励起放射に晒されると、蛍光発光する。第２部分は、第１部分に埋め込まれ、第１、第２部分は、通常の昼光下で実質的に相互に視覚的に識別することができない。
Patent JP-2007512740-A (JP)
Title: 低周波チャネルを生成する装置および方法
IPC: H04R3/12
Filed: 2004-11-18
Abstract: 所定の低周波スピーカ位置に配置された低周波スピーカのための低周波チャネルを生成するために、まず複数のオーディオオブジェクトが準備され（９００）、各オーディオオブジェクトは関連するオブジェクト信号とオブジェクト記述とを有する。次に、参照再生位置における実振幅状態が少なくとも目標振幅状態に近づくように、オブジェクト記述に基づいて、オーディオオブジェクトスケーリング値が計算（９０６）される。その後、各オブジェクト信号を関連するオーディオオブジェクトスケーリング値によりスケーリング（９１０）した後、スケーリングされたオブジェクト信号を合計する。そこで得られた合成信号から低周波チャネルが導出され、各低周波スピーカへと送られる（９１８）。オーディオオブジェクトの個々のオブジェクト信号をスケーリングすることで、本方法は、スピーカの個数および密度と現実に存在する上演領域のサイズとにおいて、現状のマルチチャネル再生システムから独立できる。 【選択図】図９
Patent JP-2007517706-A (JP)
Title: 自動車用のスタビライザ
IPC: F16D25/061
Filed: 2004-12-08
Abstract: 公知の一体的なスタビライザは、道路交通のためだけ又は荒れ地走行のためだけに設計されている。切換え可能な連結装置を備えた２部分から成るスタビライザは、品質及び安全性の点に欠点を有している。   ゆえに本発明による連結装置では、その半径方向の連行体（１４,１６）が同じ平面に位置していて、該連行体（１４,１６）が、切換え可能でかつ軸方向移動可能なロックエレメント（２３）を備えたロックピストン（１７）を介して、遊びなしに固定されるか又は所定の旋回角にわたって解放されるようにした。
Patent JP-2007514940-A (JP)
Title: 液体を満たしたユニット内のガス量監視装置及び方法
IPC: H02H5/04
Filed: 2004-11-30
Abstract: 本発明は、少なくとも１つの膨張室を備えた流入導管を有し液体を満たしたユニットと、液体の中に浮かぶ浮子とを備えている、液体を満たしたユニット内のガス量監視装置に関する。浮子は膨張室内に固定された軸に結合され、軸に関して回転可能に支持される。浮子によって発生された回転モーメント又は水平に対する角度の測定によって、液体の上方に存在するガス量を迅速かつ高精度に検出することができる。さらに本発明は液体を満たしたユニット内のガス量を浮子によって監視する方法に関する。
Patent JP-2007515118-A (JP)
IPC: H04Q7/32
Filed: 2004-12-15
Abstract: The method involves preparing data sub-set to be backed-up from a set, and transmitting to a server (2). Back-up is delayed to make a mobile (3) available for a user, after transmission of the data sub-set to the server. A clock (22) is set by the mobile, and a recovery signal (24) is transmitted to a chip card (1) at the delay deadline, to recover the back-up at the end of delay. Independent claims are also included for the following: (A) a server for back-up of personal data of a subscriber in wireless communication network (B) a wireless communication portable device of a subscriber in a communication network.
Patent JP-2007515606-A (JP)
Title: 駆動システムにおける、または同システムに関する改良点
IPC: B66B9/04
Filed: 2004-12-17
Abstract: 油圧駆動式のエレベータまたはリフトは、ロードキャリアまたはリフトカーによってかけられる荷重を少なくとも部分的に均衡させるカウンタバランス手段を装備する。実質的に一定である容積の加圧流体を含む上記カウンタバランス手段の動作は、油圧駆動システムの作動流体に対する干渉を何ら含まない。
Patent JP-2007519186-A (JP)
Title: リチウム２次電池用電極
IPC: H01M4/60
Filed: 2005-02-16
Abstract: 本発明は、脂肪族ニトリル化合物を含む電極であって、脂肪族ニトリル化合物で電極表面が被覆されるか、又は脂肪族ニトリル化合物が電極活性物質内に含まれた電極及び前記電極を備えるリチウム２次電池を提供する。本発明のリチウム２次電池は、過充電時の正極の型崩れと電解液との反応による発熱で電池内部の温度が上昇することで発生する発火及び破裂現象を防ぐだけでなく、物理的な衝撃による局部的な内部短絡又は加熱による温度上昇で高温露出が発生するとしても、発火及び破裂を防ぐことができる優れた安全性を有し、特に脂肪族ニトリル化合物が電解液に添加剤として使用される場合、発生する粘度上昇及び低温性能の低下という問題を解決できる。
Patent JP-2007519808-A (JP)
IPC: C08G64/30
Filed: 2005-01-20
Abstract: A method is provided for reducing the color generated during production of copolycarbonate that includes quinone-type residues. The method includes the steps of mixing the precursors of monomer residues, a carbonate source and a polymerization catalyst into a reaction mixture. The method further includes the steps of introducing an antioxidant such as a hydroxycarboxylic acid to the reaction mixture in an amount sufficient to reduce color formation and introducing the reaction mixture to a series of process units wherein the reaction mixture polymerizes. The resulting copolycarbonate has improved color as compared to a copolycarbonate formed in a process without the step of introducing an antioxidant to the melt polymerization process.
Patent JP-2008167679-A (JP)
Title: Transmission device for mower
Inventor: IDE NORIHIRO
IPC: A01D34/68
Filed: 2007-01-10
Abstract: <P>PROBLEM TO BE SOLVED: To miniaturize and lighten a transmission mechanism which is mainly a flat gear and simplify the transmission structure, by solving the problems wherein the tendency for enlargement and weight increase of a machine body is present due to the enlargement of the diameter, thickness or the like of a pulley, in a shape that constitutes a belt transmission of a right and a left pair of blade shafts, as a transmission device of a small-scaled lightweight mower.  <P>SOLUTION: The transmission device of the mower is constituted of an engine 4, mounted on the rear upper side of a transmission case 3 having the axially installed to right and left blade shafts 1 and 2, and an axle 7 that has axially installed right and left driving wheels 5 and 6 is arranged at the lower side. By means of the engine 4, the axle 7 is interlocked via an input shaft 12 in the upper and lower direction, a speed-change gear 8, an axle-driving shaft 11 having a worm gear 9, and the like, and the blade shafts 1 and 2 are interlocked via a front-side blade-interlocking gear 10 from the input shaft 12.  <P>COPYRIGHT: (C)2008,JPO&INPIT
Patent JP-2008172417-A (JP)
Title: Television stand
Inventor: IIMURA KYOSUKE
IPC: G09F9/00
Filed: 2007-01-10
Abstract: <P>PROBLEM TO BE SOLVED: To allow a top plate, a bottom plate, and pillar members of a television stand to be temporarily assembled with a more rational structure and to allow them to be actually assembled easily and surely thereafter.  <P>SOLUTION: The television stand includes a top plate 1, pillar members 2, and a bottom plate 3 and is constituted by screwing shafts 4 provided with screw parts 40 in lower ends thereof to hole parts 30 formed in the bottom plate 3 from hole parts 10 formed in the top plate 1 through the pillar members 2 to actually assemble the top plate 2, the pillar members 2, and the bottom plate 3. Each pillar member 2 includes an upper pipe part 20c projecting upward from the upper end of the pillar member 2 and allowing shafts 4 to pass therethrough and a lower pipe part 20d projecting downward from the lower end of the pillar member 2 and allowing shafts 4 to pass therethrough. Upper pipe parts 20c are put into the hole parts 10 from the lower face side of the top plate 1 and lower pipe parts 20d are put into the hole parts 30 from the upper face side of the bottom plate 3, whereby the top plate 1, the pillar member 2, and the bottom plate 3 are temporarily assembled.  <P>COPYRIGHT: (C)2008,JPO&INPIT
Patent JP-2008174468-A (JP)
Title: Material for organic electroluminescent device and organic electroluminescent device
Inventor: TAMANO MICHIKO
IPC: C09K11/06
Filed: 2007-01-17
Abstract: <P>PROBLEM TO BE SOLVED: To provide a material for an organic electroluminescent device emitting red light and having high luminance and long life.  <P>SOLUTION: The material uses a specific diketopyrrolopyrrole compound having N and N' atoms independently substituted with a hydrogen atom, a substituted or unsubstituted alkyl group or the like and a ring carbon atom substituted with a phenyl group which is substituted with an amino group or the like. The compound is used as a material for an organic electroluminescent device.  <P>COPYRIGHT: (C)2008,JPO&INPIT
Patent JP-2008175105-A (JP)
Title: Water pump
Inventor: SOGO NORISUKE
IPC: F04D29/12
Filed: 2007-01-17
Abstract: <P>PROBLEM TO BE SOLVED: To provide a water pump that ensures, even when water flows into a clearance between an inner surface of an opening of a storage space for storing cooling water having leaked from a mechanical seal of the water pump and the outer surface of a plug due to capillary phenomenon, a breather hole while preventing the water from flowing out to the exterior, and prevents the water from flowing out of the breather hole until a relatively large amount of water flows into the cooling water storage space.  <P>SOLUTION: The whole periphery of the opening edge of the storage space 24 is closed by the plug 8 and the breather hole is ensured by a pipe part 82 formed integrally with the plug 8. The pipe part 82 is inclined upwardly so that a top end opening is positioned at the upper portion of the storage space 24. Thus, the water is prevented from flowing into the pipe part 82 until the water level in the storage space 24 rises to the vicinity of the upper end of the space, and the cooling water is prevented from flowing out except an amount of water to exceed the capacity of the storage space 24 leaks from the mechanical seal 7.  <P>COPYRIGHT: (C)2008,JPO&INPIT
Patent JP-2008177269-A (JP)
Title: Method of manufacturing semiconductor device
Inventor: MATSUBAYASHI HIROTO
IPC: H01L21/66
Filed: 2007-01-17
Abstract: <P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a semiconductor device wherein wafer test is conducted to automatically judge whether or not a measured chip has a statistically unexpected value and also judge whether or not measurement is conducted again or that the chip is defective.  <P>SOLUTION: The method of manufacturing a semiconductor device includes a step to form a plurality of chips on a wafer; a step to conduct testing for the chips in terms of the specified test items; a step to prepare a histogram that shows the number of chips for each of test items; a step to find out a range of the values of the test items as a non-defective area wherein the histogram becomes most approximate to a normal distribution; and a step to judge whether or not chips not corresponding to the non-defective area are measured again or that they are defective.  <P>COPYRIGHT: (C)2008,JPO&INPIT
Patent JP-2008177757-A (JP)
Title: Information processor and method for controlling decoding
Inventor: KANETANI TAKEYOSHI
IPC: H04N19/85
Filed: 2007-01-17
Abstract: <P>PROBLEM TO BE SOLVED: To provide an information processor capable of smoothly executing the decoding of a moving-image stream.  <P>SOLUTION: A mode detecting module 211 for a video reproducing application 201 inquires an OS100 for a display under what conditions of an image decoded by a decoding execution module 213 and detects the display. When the mode detecting module 211 detects the status of full-screen display, a decoding control module 212 drive-controls the decoding execution module 213 so as to select a normal decoding processing for decoding, while maintaining an original frame rate. Meanwhile, when the mode detecting module 211 detects the status of contracted display, the decoding control module 212 drive-controls the decoding execution module 213 so as to select a simplified decoding processing for decoding, while making the frame rate lower.  <P>COPYRIGHT: (C)2008,JPO&INPIT
Patent JP-2007217408-A (JP)
Title: Pharmaceutical composition
Inventor: TAKAMURO IWAO
IPC: A61K31/519
Filed: 2007-01-18
Abstract: <P>PROBLEM TO BE SOLVED: To provide a medicine containing a compound having SK channel-blocking activities as an active ingredient.  <P>SOLUTION: The compound is represented by general formula [I] [wherein, R<SP>0</SP>is hydrogen, a halogen or the like; R<SP>1</SP>is a group represented by formula (a) or (b); D<SP>1</SP>, D<SP>2</SP>and D<SP>3</SP>are each N or CH; R<SP>2</SP>is an alkoxy-substituted aryl or the like; R<SP>3</SP>is hydrogen or an alkyl; and Q is a lower alkylene].  <P>COPYRIGHT: (C)2007,JPO&INPIT
Patent JP-2008174076-A (JP)
Title: Vehicle periphery monitoring device, and its displaying method
Inventor: ASO YUKIO
IPC: G08G1/16
Filed: 2007-01-18
Abstract: <P>PROBLEM TO BE SOLVED: To provide a technique more certainly making a user recognize the existence of an object approaching a vehicle periphery.  <P>SOLUTION: This vehicle periphery monitoring device is provided with: a picked-up image acquiring means acquiring a picked-up image around a vehicle from an in-vehicle camera; an intruding object determining means determining presence or absence of an intruding object into a picking-up area of the picked-up image based on a secular change in the picked-up image; and a display means displaying on a display device. The display means has a first display area and a second display area on a screen of the display device, displays the picked-up image on the first display area, and displays the presence of the intruding object on the second display area when the intruding object determining means determines the presence of the intruding object.  <P>COPYRIGHT: (C)2008,JPO&INPIT
Patent JP-2008176585-A (JP)
Title: Coal evaluation trading system and coal evaluation trading program
Inventor: YAMANE SHUICHI
IPC: G06Q50/02
Filed: 2007-01-18
Abstract: <P>PROBLEM TO BE SOLVED: To provide a coal evaluation trading system capable of performing appropriate economical efficiency evaluation of coal so as to effectively select the coal to be traded.  <P>SOLUTION: The coal evaluation trading system is provided with: an analysis data acquisition means 11 for acquiring analysis data of pure coal, ashes, and water to be primary elements of coal by coal kind; a coal price calculation means 12 for extracting only an item of pure coal in the analysis data to calculate, as a coal price per pure coal, overseas transport costs showing transport costs spent until a vessel reaches a base station facility, base station costs required in using the base station facility, inland transport costs showing transport costs until the vessel reaches a use facility, and ashes processing costs showing processing costs by coal kind to be burnt, all of which are regarded as an evaluation range of the coal price, by adding them to the pure coal; a coal price comparison means 13 for comparing coal prices per pure coal calculated as indices to economy evaluation of the coal by coal kind and unit price; and a coal buying and selling means 14 for buying and selling the coals by selecting the compared coal prices in accordance with purposes or places to use them.  <P>COPYRIGHT: (C)2008,JPO&INPIT
Patent JP-2008176600-A (JP)
Title: Worker's location warning system
Inventor: SEKI KIYOTAKA
IPC: G08B25/10
Filed: 2007-01-19
Abstract: <P>PROBLEM TO BE SOLVED: To provide an alarm system which can be used for issuing a warning about a worker's location without using a GPS function of detecting a current position.  <P>SOLUTION: Respective worker of a track maintenance work team carry worker terminals 100a to 100e and a leader carries a leader terminal 300. The worker terminals 100 execute ad hoc communication by multihop communication and regularly transmit their own identification information to the leader terminal 300. In the leader terminal 300, the worker terminal 100a which does not regularly send the identification information is automatically detected to issue a warning that location of the worker carrying the worker terminal 100a is not obtained.  <P>COPYRIGHT: (C)2008,JPO&INPIT
Patent JP-2008174665-A (JP)
Title: Powdery phosphor and method for producing the same and luminescent device having powdery phosphor and display device and fluorescent lamp
Inventor: KAMIYA SUMIO
IPC: H01J31/12
Filed: 2007-01-19
Abstract: <P>PROBLEM TO BE SOLVED: To produce zinc oxide single crystalline powder which can be oriented in a high density and is most suitable for luminescent device, display device and fluorescent lamp, etc., at a low cost without requiring a pulverizing step, etc.  <P>SOLUTION: The powdery phosphor comprises needle-like or fibrous zinc oxide (ZnO) single crystal having ≥5 aspect ratio as a main component. The method for producing the powdery phosphor comprises a step for preparing a raw material solution selected from an alkaline solution containing a zinc ion as a raw material solution (A), a solution containing the zinc ion and an ion of element for dopant as a raw material solution (B) and a mixed solution of the raw material solution (A) with the raw material solution (B), and a hydrothermal reaction step for carrying out hydrothermal reaction of the mixed solution at subcritical or supercritical temperature and pressure in an airtight container.  <P>COPYRIGHT: (C)2008,JPO&INPIT
Patent JP-2008177127-A (JP)
Title: Seesaw switch
Inventor: ARAKAWA KOICHI
IPC: H01H23/30
Filed: 2007-01-22
Abstract: <P>PROBLEM TO BE SOLVED: To provide a seesaw switch capable of obtaining a superior operating feeling with a clear click feeling from pushing down to returning.  <P>SOLUTION: This seesaw switch has a plurality of rubber switches 14 arranged respectively on a plurality of pairs of contacts installed on a circuit board 12, and a support part 16 positioned between the rubber switches 14. This seesaw switch is provided with a rocking member 20 rockably mounted on a support part 16, a rocking shaft 22 installed at one of the support part 16 and the rocking member 20, and a bearing 18 in which the rocking shaft 22 installed at the other of the support part 16 and the rocking member 20 and in which rocking shaft 22 is pivoted. This seesaw switch has a pressing part 24 which is positioned at both sides of the rocking shaft 22 and in which the top part 14a of the rubber switch 14 is positioned to be capable of being pushed down. This seesaw switch is provided with a resin sheet which is installed at the top part 14a of the rubber switches 14, in which friction with a contact position of the pressing part 24 is reduced and deformation is prevented by increasing hardness of the top part. The pressing part 24 contacts with the resin sheet 26 and closes the contact points of the rubber switches 14 while sliding on the top part 14a of the rubber switch 14.  <P>COPYRIGHT: (C)2008,JPO&INPIT
Patent JP-2008180262-A (JP)
Title: Bearing and base isolation device
Inventor: KANAI FUMIAKI
IPC: F16F15/02
Filed: 2007-01-24
Abstract: <P>PROBLEM TO BE SOLVED: To provide a bearing having durability to a high load without worsening its profitability while avoiding an increase in the size, and to provide a base isolation device.  <P>SOLUTION: The bearing 1 comprises a hollow housing 2, a large-diameter outer ball 3 rotatably held by the housing 2, a ball seat 4 having a spherical recessed face 41a whose center of curvature corresponds to the center of the outer ball 3 and which is opposed to the outer ball 3, and a plurality of inner balls 5 mounted between the outer ball 3 and the ball seat 4 and stored in the housing 2, and each having a smaller diameter than the outer ball 3. A value obtained by dividing the diameter of the inner ball 5 by the diameter of the outer ball 3 is set to be greater than 0.125.  <P>COPYRIGHT: (C)2008,JPO&INPIT
Patent JP-2008181591-A (JP)
Title: Device, method and program for driving optical pickup, optical disk device, and recording medium having optical pickup driving program stored therein
Inventor: YAMAZAKI HITOSHI
IPC: G11B7/09
Filed: 2007-01-24
Abstract: <P>PROBLEM TO BE SOLVED: To limit a cost increase to a minimum without any increase in the number of components to detect an excessive current of an actuator in the optical pickup of an optical disk device.  <P>SOLUTION: When an optical disk 15 is played in an optical disk playback device 1, by determining flowing of an excessive current through the actuator of an optical pickup 3 if interrupt signals are generated continuously by a predetermined times or more at predetermined time intervals, the signals to notify the occurrence of lens shifting to move an objective lens disposed in the actuator of the optical pickup 3 in a diameter direction, the tracking servo of the optical pickup 3 is turned off to protect the objective lens.  <P>COPYRIGHT: (C)2008,JPO&INPIT
Patent JP-2008178804-A (JP)
Title: Washer
Inventor: ONO TORU
IPC: B08B3/12
Filed: 2007-01-24
Abstract: <P>PROBLEM TO BE SOLVED: To wash relatively large objects such as glasses, wrist watches and finger rings and relatively small objects such as contact lenses with a washer.  <P>SOLUTION: A washing container 13 housed in a washing tank 2 and configured in a manner that the container can store contact lenses 12, objects to be washed, and floats on water surface 24A is installed. In the case where glasses 23 are washed, washing can be carried out by storing a washing solution 10 together with the glasses 23 in the washing tank 2 and operating an oscillator 3 and in the case where contact lenses 12 are washed, washing can be carried out by floating the washing container 13 in water 24 contained in the washing tank 2 and washing the contact lenses 12 in the washing container 13. Accordingly objects to be washed, just like contact lenses 12, which are relatively small and require slight vibration intensity can be washed besides objects just like eyeglasses 23.  <P>COPYRIGHT: (C)2008,JPO&INPIT
Patent JP-2007252887-A (JP)
Title: Surgical implant and manufacturing method
Inventor: POHJONEN TIMO
IPC: A61F2/44
Filed: 2007-01-25
Abstract: <P>PROBLEM TO BE SOLVED: To provide a surgical implant which can be shaped in situ into the required shape and a method for manufacturing the same.  <P>SOLUTION: The surgical implant has a body comprising polyaryletherketone (PAEK). The polyaryletherketone is a homopolymer and a first section of the body comprises a polyaryletherketone that has a crystallization peak in its DSC-curve.  <P>COPYRIGHT: (C)2008,JPO&INPIT
Patent JP-2008187810-A (JP)
Title: Ground fault protection system in parallel two-line transmission system
Inventor: NUNOGAMI KENICHIRO
IPC: H02H7/22
Filed: 2007-01-29
Abstract: <P>PROBLEM TO BE SOLVED: To provide a ground fault protection system in a parallel two-line transmission system, which can properly cope with a ground accident caused in a position near a power end.  <P>SOLUTION: Time limit setting values for ground directional relays 67G-11 and 12 at a power end A are made larger than the time limit setting values for ground overvoltage relays 67G-21 and 22 at a receiving end B. The time limits at the power end A and the receiving end B are made to cooperate in both ground overvoltage relays 67G-11 or 22. When the ground accident occurs in the position near the power end A, a circuit breaker CB11 at the power end A of an accident line (transmission line L1, for example) is tripped, and the time until a circuit breaker CB12 at the power end A of a normal line is tripped is delayed, and a circuit breaker CB21, at the receiving end B of the accident line, is controlled so as to be tripped during that time interval.  <P>COPYRIGHT: (C)2008,JPO&INPIT
Patent JP-2008186991-A (JP)
Title: Etching method and etching equipment
Inventor: IKEMOTO NAOYA
IPC: H01L21/3065
Filed: 2007-01-30
Abstract: <P>PROBLEM TO BE SOLVED: To provide etching equipment or the like capable of forming a highly precise etching shape even when the hole shape has a high aspect ratio.  <P>SOLUTION: The etching equipment 1 comprises: a processing chamber 11; a base 15 for placing a silicon substrate K; a gas supplying device 23 for supplying an etching gas, an anti-etching layer forming gas, and a carrier gas to the processing chamber 11; coils 33; a high-frequency power source 34 for the coils; a high-frequency power source 35 for the base; and a control device 40 for performing an etching step of supplying the etching gas, a first anti-etching layer forming step of supplying the anti-etching layer formation gas, and a second anti-etching layer forming step of supplying the anti-etching layer forming gas and carrier gas. The control device 40 performs the second anti-etching layer forming step after performing the etching step and first anti-etching layer forming step repeatedly for given times. Thereafter, the control device 40 performs the etching step and first anti-etching layer forming step again repeatedly.  <P>COPYRIGHT: (C)2008,JPO&INPIT