Patent SG-11201808067T-A (SG)
Title: Actively cooled vacuum isolation valve
Inventor: HILL GORDON
IPC: H01L21/67
Filed: 2017-04-10
Abstract: INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property -, Organization 1111111101111011101010111110101111101110111111011111101101011111111101111011111 International Bureau 0.. .1 j ..... .... (10) International Publication Number (43) International Publication Date WO 2017/180514 Al 19 October 2017(19.10.2017) WIPO I PCT (51) International Patent Classification: (74) Agents: MILLS, Steven M. et al.; Burns & Levinson LLP, H01L 21/205 (2006.01) HO1L 21/67 (2006.01) 125 Summer Street, Boston, Massachusetts 02110 (US). F16K 5/10 (2006.01) (81) Designated States (unless otherwise indicated, for every (21) International Application Number: kind of national protection available): AE, AG, AL, AM, PCT/US2017/026807 AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, (22) International Filing Date: DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, 10 April 2017 (10.04.2017) HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, (25) Filing Language: English KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, (26) Publication Language: English NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, (30) Priority Data: RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, 62/320,718 11 April 2016 (11.04.2016) US TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, 15/478,623 4 April 2017 (04.04.2017) US ZA, ZM, ZW. (71) Applicant: MKS INSTRUMENTS, INC. [US/US]; 2 (84) Designated States (unless otherwise indicated, for every Tech Drive, Suite 201, Andover, Massachusetts 01810 kind of regional protection available): ARIPO (BW, GH, (US). GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, (72) Inventors: HILL, Gordon; 175 Lowell Street, Arlington, TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, Massachusetts 02474 (US). BROYER, David F.; 20 DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, Morning Dove Road, Kingston, New Hampshire 03848 LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, (US). NEUMEISTER, David C.; 1668 Holland Way, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, Longmont, Colorado 80503 (US). LEFEVRE, Bradly GW, KM, ML, MR, NE, SN, TD, TG). Raymond; 12471 West Maryland Drive, Lakewood, Col- orado 80228 (US). Published: — with international search report (Art. 21(3)) [Continued on next page] (54) Title: ACTIVELY 1---11 COOLED VACUUM ISOLATION VALVE (57) : A cooled isolation valve includes a z vo valve body, a stationary element coupled to the valve j body, and a movable closure element movable with re- spect to the stationary element between a closed posi- tion in which the movable closure element and the sta- 23 y tionary element are brought together and an open posi- ....2.z7 tion. One of the movable closure element and the sta- :'. 2 • 7 tionary element includes a sealing element. In the zg... closed position of the movable closure element, the = ?4 ,2 sealing element provides a seal between the movable — - zrth , closure element and the stationary element. A fluid Z1/ channel is formed in contact with the movable closure element and movable with the movable closure element 113F 2. - • '3: 252 2% .._ with respect to the stationary element, such that a fluid in the fluid channel effects heat transfer in the movable closure element. A bellows of the isolation valve can include a metallic substrate with a ceramic coating. / 52- 11' 11 kin © ( 2.4 2.3C 2,4 cc ,—, • LI. IN ,-1 0 ei C WO 2017/180514 Al MIDEDIMOM0101011101010MOUMOIREMOIDIMMEMOIS — before the expiration of the time limit for amending the claims and amendments (Rule to be republished 48.2(h)) in the event of receipt of