Patent SG-11201901208R-A (SG)
Title: Systems and methods for workpiece processing
Inventor: YANG MICHAEL
IPC: H01L21/67
Filed: 2017-10-06
Abstract: INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property 111111111111111111111010111 01111101011H011H11111110111111111111111110111111111111 Organization International Bureau (10) International Publication Number (43) International Publication Date .....0\"\"\" WO 2018/075262 Al 26 April 2018 (26.04.2018) WIP0 I PCT (51) International Patent Classification: DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HO1L 21/67 (2006.01) HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, (21) International Application Number: KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, PCT/US2017/055460 MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, (22) International Filing Date: SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, 06 October 2017 (06.10.2017) TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (25) Filing Language: English (84) Designated States (unless otherwise indicated, for every (26) Publication Language: English kind of regional protection available): ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, (30) Priority Data: UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, 62/409,538 18 October 2016 (18.10.2016) US TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FF FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, (71) Applicant: MATTSON TECHNOLOGY, INC. MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, [US/US]; 47131 BAYSIDE PARKWAY, FREMONT, Cal- TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ifornia 94538 (US). KM, ML, MR, NE, SN, TD, TG). (72) Inventors: YANG, Michael; 47131 Bayside Parkway, Fre- mont, California 94538 (US). PAKULSKI, Ryan; 47131 Published: Bayside Parkway, Fremont, California 94538 (US). — with international search report (Art. 21(3)) (74) Agent: WORKMAN, J., Parks; DORITY & MANNING, — P.A., P 0 BOX 1449, GREENVILLE, South Carolina = 29602-1449 (US). = _ (81) Designated States (unless otherwise indicated, for every _ kind of national protection available): AE, AG, AL, AM, = AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, = (54) Title: SYSTEMS AND METHODS FOR WORKPIECE PROCESSING — (57) : Systems and methods for processing workpieces, such as = 100 semiconductor workpieces are provided. One example embodiment is di- 115 rected to a processing system for processing a plurality of workpieces. The = = , plasma processing system can include a loadlock chamber. The loadlock _ 12 = E.. I- = = 122 — = 150 4111111\ Nv I 1 10 34 chamber can include a workpiece column configured to support a plurality of workpieces in a stacked arrangement. The system can further include at -----130 least two process chambers. The at least two process chambers can have at least two processing stations. Each processing station can have a work- 132 piece support for supporting a workpiece during processing in the process chamber. The system further includes a transfer chamber in process flow r : 1_1 loadlock The = 110 ----114 communication with the chamber and the process chamber. transfer chamber includes a rotary robot. The rotary robot can be config- ured to transfer a plurality of workpieces from the stacked arrangement in 5 26 2 Al 111111 -----112 the loadlock chamber to the at least two processing stations. c3b iie-rN 4 _ 118 118 Il 0 ei FIG. 1 C