baber/WOPTO huggingface dataset:
Patent TW-202216436-A (TW)
Title: Laminated structure, and method for manufacturing laminated structure
Inventor: UJIHARA YUUSUKE
IPC: C23C14/14
Filed: 2021-06-25
Abstract: Provided are: a laminated structure having strong bending-resistance; and a method for manufacturing the laminated structure. A laminated structure LS according to the present invention has a first titanium layer L1, an aluminum layer L2, and a second titanium layer L3 which are sequentially laminated, wherein each of the first and second titanium layers has a crystal structure having diffraction peaks on a (002) plane and a (100) plane, in the Miller index as measured by the X-ray diffraction, the half-value width of the diffraction peak on the (002) plane is at most 1.0 deg, and the half-value width of the diffraction peak on the (100) plane is at most 0.6 deg.
Patent TW-202205778-A (TW)
Title: Non-contact power supply device, conveying system, and parameter setting method
Inventor: TOMITA HIROYASU
IPC: B65G1/04
Filed: 2021-06-28
Abstract: A non-contact power supply device 1 is provided with: an inverter 8 for converting power supplied from a power supply 2 into a predetermined AC power; feeders 12A, 12B provided on a track rail T and transmitting AC power to a ceiling conveyor 20; a filter circuit 9 including a reactor RT2 and a capacitor C2; and a control unit 15 for performing power control of AC power which is to be supplied to the feeders 12A, 12B. The control unit 15 obtains a current value output from the inverter 8 by changing the switching frequency of a plurality of switching elements 14 of the inverter 8 in a state in which a current having a predetermined value flows through the feeders 12A, 12B, and sets and outputs the reactor value of the reactor RT2 and the capacitance value of the capacitor C2 on the basis of the switching frequency at which the current value becomes the minimum value.
Patent TW-202205580-A (TW)
Inventor: CHENG CHIA-SHEN
IPC: H01L23/488
Filed: 2021-07-08
Abstract: 一種用於結合半導體基板的方法包括：將晶粒放置在基板上，以及在晶粒及基板上執行加熱製程，以將相應的第一連接件與相應的第二連接件結合。晶粒上的多個第一連接件中的相應的第一連接件接觸基板上的多個第二連接件中的相應的第二連接件。加熱製程包括：在雷射產生器與基板之間放置掩蔽裝置，以及執行雷射發射。一種掩蔽裝置包括掩蔽層及透明層。掩蔽層的部分是不透明的。雷射穿過掩蔽層中的第一間隙且穿過透明層，以加熱與基板相對的晶粒的頂側的第一部分。
Patent TW-202305573-A (TW)
Inventor: CHI YU-MIN
IPC: G06F3/041
Filed: 2021-07-23
Abstract: 本申請提供一種超聲波指紋識別模組，包括：壓電層，具有相對的第一表面及第二表面；共振電極層，疊層設置於第一表面上，共振電極層具有絕緣間隔設置的複數子電極，每一個子電極能被單獨驅動啟動，並用於根據觸摸位置以接收驅動訊號；TFT陣列基板，設於第二表面一側，TFT陣列基板包括畫素電路陣列及接收電極陣列，接收電極陣列耦接於壓電層，TFT陣列基板用於耦合出電訊號；及指紋識別晶片，與每一子電極電性連接，指紋識別晶片用於對電訊號進行指紋識別演算。本申請還提供一種電子裝置及超聲波指紋識別方法。
Patent TW-202143294-A (TW)
Inventor: KUNG SHENG-CHIN
IPC: H01L29/78
Filed: 2017-12-12
Abstract: The present disclosure generally relates to FINFET devices having conformal semiconductor cladding materials, and methods of forming the same. The cladding material is a silicon germanium epitaxial material. The cladding material is capable of being deposited to a thickness which is less than cladding materials formed by conventional deposition/etch techniques.
Patent TW-202205832-A (TW)
Title: 利用音調分散的資源單元的通訊方法以及通訊裝置
Inventor: HU SHENGQUAN
IPC: H04L5/02
Filed: 2021-07-28
Abstract: 描述了與 6GHz 低功耗室內 (LPI) 系統中音調分散的資源單元 (RU) 的設計簡化有關的各種方案。 通訊實體在頻寬上執行具有邏輯RU尺寸的音調分佈以生成音調分散的RU。 然後，通訊實體在 6GHz LPI 系統中使用音調分散的RU 進行無線通訊。
Patent TW-202220655-A (TW)
Inventor: BAEK JAE-UK
IPC: A61K31/4725
Filed: 2021-08-04
Abstract: 本發明係關於半胱天冬酶抑制劑於減輕或治療骨關節炎的用途。
Patent TW-202219319-A (TW)
Title: Copper-clad layered body and method for producing same
Inventor: MUKAI NOBUAKI
IPC: C23C18/40
Filed: 2021-08-09
Abstract: To provide: a copper-clad layered body which, when applied to a flexible circuit board, is capable of suppressing transmission loss and achieving good volume resistivity and high adhesion between a low-dielectric resin film and a copper plate layer; and a method for producing the same. This copper-clad layered body is characterized by: comprising a low-dielectric resin film having a relative permittivity of 3.5 or less and a dielectric loss tangent of 0.008 or less at a frequency of 10 GHz, and an electroless copper plating layer laminated on at least one surface of the low-dielectric resin film; the weighted average size of crystallites in the electroless copper plating layer being 25 to 300 nm; and the adhesion strength between the resin film and the electroless copper plating layer being 4.2 N/cm or more.
Patent TW-202211472-A (TW)
Inventor: Yu li-zhen
IPC: H01L29/41
Filed: 2021-08-10
Abstract: 提供一種半導體結構及其形成方法。一種半導體結構，包括：磊晶源極部件以及磊晶汲極部件；通道構件的垂直堆疊，設置在背側介電層上方，通道構件的垂直堆疊沿著方向在磊晶源極部件以及磊晶汲極部件之間延伸；閘極結構，包繞垂直堆疊的每個通道構件；以及背側源極接觸件，設置在背側介電層之中。背側源極接觸件包括頂部以及底部，頂部相鄰磊晶源極部件並且底部遠離磊晶源極部件。頂部以及底部沿著上述方向包括階梯式寬度變化。
Patent TW-202223553-A (TW)
Title: Method for manufacturing laminate, antireflection member, front member of led display and transfer film
Inventor: NAKAMURA HIDEYUKI
IPC: H01L27/32
Filed: 2021-08-26
Abstract: The present invention addresses the problem of providing a method for manufacturing a layered body having low surface reflectance and low brightness. The present invention also addresses the problem of providing an antireflective member, an LED display front member, and a transfer film. This layered body manufacturing method has a layered body preparation step for preparing a layered body comprising a colored layer and a photosensitive layer which has a thickness of 5.0 [mu]m or greater, an exposure step for irradiating the photosensitive layer with light using a mask, and a development step for developing the photosensitive layer, the mask having a periodic pattern that includes openings positioned so as to form a periodic structure having a pitch of 12.0 [mu]m or less.
Patent TW-202226502-A (TW)
Title: Flip chip microdevice structure
Inventor: CHAJI GHOLAMREZA
IPC: H01L23/52
Filed: 2021-09-02
Abstract: What is disclosed is various aspects of the structure of flip chip or lateral micro devices having protection of connections. The various aspects comprise a structural combination of functional layers such as doped or blocking layers or quantum well structure, as well as dielectric layers, VIA's, optical enhancements layers, connection pads, protective layers, masks and additional layers. In addition, methods of fabrication of microdevices have also been disclosed where in patterning has been used. The present disclosure further relates to integrating vertical microdevices into a system substrate. The system substrate can have a backplane circuit as well. The integration covers the microdevices with dielectrics and couples the backplane through a VIA.
Patent TW-202312023-A (TW)
Title: 檢測晶圓表面用的取像裝置及其取像設備
Inventor: PAN SHIH-YAO
IPC: H01L21/66
Filed: 2021-09-14
Abstract: 本案揭露一種檢測晶圓表面用的取像裝置及取像設備。取像裝置設於載台上，包含承載座、光照射部及取像部。承載座基於第一軸向使晶圓具有傾角。取像部包括第一支架、第二支架、軌道及可活動於該軌道上的攝像機。第一支架豎立在載台上，第二支架的前端樞接第一支架的底座且第二支架的延伸臂平行於水平面。第二支架以前端為圓心從而使延伸臂具有掠過載台表面的可移動範圍，延伸臂平行於第一軸向的位置處界定為可移動範圍的邊界，並自邊界朝光照射部的方向配置有0度~50度間的移動範圍。因此，晶圓上的植球的表面均勻程度能被有效檢知。
Patent TW-202232900-A (TW)
Title: Receiver circuit and data receiver
Inventor: YANG SHANG-CHI
IPC: H04B3/04
Filed: 2021-09-29
Abstract: A receiver circuit has a first stage circuit having a first stage input and a first stage output, the first stage output setting a first stage common mode voltage; a second stage circuit having a second stage input connected to the first stage output, and a second stage output setting a second stage common mode voltage; and a buffer circuit having a trip point voltage, connected to the second stage output. The first stage circuit can include circuit elements configured to establish the first stage common mode voltage so that the second stage common mode voltage matches the trip point voltage. The second stage circuit can include a self-biased amplifier.
Patent TW-202227160-A (TW)
Title: Pull angle self-adjusting endless rope trainer
Inventor: ROSENOW CHARLES J
IPC: A63B21/018
Filed: 2021-10-05
Abstract: An endless rope trainer that includes an upright frame, a drive roller supported a distance above ground on the frame, an endless rope entrained around the drive roller, and a means of applying resistance to rotation of the drive roller. A pair of guide rollers are provided proximate the drive roller. The guide rollers pivot together as a unit about the axis of the drive roller independently of the drive roller for maintaining a constant wrap angle of contact of the endless rope on the drive roller regardless of pull angle on the endless rope.
Patent TW-202316581-A (TW)
Title: Memory device and method of forming the same
Inventor: YANG CHUNG-MING
IPC: H01L27/108
Filed: 2021-10-12
Abstract: Provided is a memory device including a substrate, a plurality of landing pads, a protective layer, a filling layer, a plurality of cup-shaped lower electrodes, a capacitor dielectric layer, and an upper electrode. The landing pads are disposed on the substrate. The protective layer conformally covers sidewalls of the landing pads. The filling layer is laterally disposed between the landing pads, wherein the filling layer has a top surface higher than a top surface of the landing pads. The cup-shaped lower electrodes are respectively disposed on the landing pads. The capacitor dielectric layer covers a surface of the cup-shaped lower electrodes. The upper electrode covers a surface of the capacitor dielectric layer. A method of forming a memory device is also provided.
Patent TW-202216947-A (TW)
Title: Polishing material, composition for polishing, and polishing method
Inventor: YAMADA EIICHI
IPC: C09K3/14
Filed: 2015-09-15
Abstract: Provided are: a polishing material which is capable of removing rolling of the outer surface of a resin coating film by polishing and is not susceptible to the formation of polishing scratches; a composition for polishing; and a polishing method. This composition for polishing contains a polishing material which is composed of aluminum oxide particles having a specific surface area of from 5 m2/g to 50 m2/g (inclusive) and an average secondary particle diameter of from 0.05 [mu]m to 4.8 [mu]m (inclusive). This composition for polishing is used for polishing of the outer surface of a resin coating film.
Patent TW-202227606-A (TW)
Title: Method for producing a refined fermented beverage and method of producing a bright beer
Inventor: THOMPSON TRACY L
IPC: C12G3/02
Filed: 2021-11-12
Abstract: Methods and systems in a process for disinfecting or sterilizing a fermented beverage and/or a composition utilized in a fermentation process to produce a fermented beverage, using ultraviolet light. Such methods and systems can be coupled with processes for neutralizing unwanted acidic congeners and separating the resulting salts of the acidic congeners to produce a refined fermented beverage, including but not limited to a neutral malt base, gluten-free base, gluten-reduced base, grain-neutral spirit, wine base, and a sugar-brew base. Drinkable fermented beverages, including but not limited to flavored malt beverages and hard seltzer beverages, can also be disinfected or sterilized with ultraviolet light using any of the systems or methods described herein.
Patent TW-202323377-A (TW)
Title: Preparation method of dinitro compound, diamine and preparation method thereof, and polyimide
Inventor: KUNG YU-RUEI
IPC: C08G73/10
Filed: 2021-12-13
Abstract: A polyimide precursor formula (2) and a preparation method thereof are provided,
         . The polyimide precursor formula (2) is reduced to form a polyimide precursor formula (3),
         . A polyimide comprising a repeating unit formed by the polyimide precursor formula (3) and dianhydride monomer is also provided herein.
Patent TW-202230513-A (TW)
Title: Conformal amorphous carbon layer etch with side-wall passivation
Inventor: ZHANG DU
IPC: H01L21/31
Filed: 2021-12-20
Abstract: A method for etching high-aspect ratio recessed features in an amorphous carbon layer is presented. The method includes providing a substrate containing an amorphous carbon layer and a patterned mask layer, plasma-etching a recessed feature through less than an entire thickness of the amorphous carbon layer using the patterned mask, forming a passivation layer on a sidewall of the etched amorphous carbon layer in the recessed feature by exposing the substrate to a passivation gas in the absence of a plasma, and repeating the plasma-etching and forming the passivation layer at least once to extend the recessed feature in the amorphous carbon layer.
Patent TW-202227302-A (TW)
Title: Rail vehicle and method for manufacturing rail vehicle
Inventor: TAKAHASHI YUKI
IPC: B61B13/08
Filed: 2022-01-07
Abstract: This invention provides a rail vehicle having a reinforced underframe with heat insulation property while reducing the manufacturing man-hours, and a method for manufacturing the rail vehicle. An underframe of a rail vehicle formed by hollow extruded section bars has vehicle outer side panels and a plurality of curtain track structures. A heat insulating part formed to the vehicle outer side of the underframe is composed of the following: a heat insulating material disposed (provided) to the vehicle outer side surface of the vehicle outer side panel between the curtain track structures; a heat insulating plate holding the heat insulating material between the vehicle outer side panels; insulating parts sandwiched between horizontal sheets of the curtain tack structures and the heat insulation plate; and mechanical connection parts fixing the heat insulation plate to the said curtain track structures.
Patent TW-202241451-A (TW)
Title: Novel steroid payloads, steroid linkers, adcs containing and use thereof
Inventor: ROTHSTEIN JAY
IPC: A61K31/58
Filed: 2022-01-07
Abstract: The invention provides novel glucocorticosteroids, glucocorticosteroid-linkers and antibody drug conjugates (ADC's) comprising an antibody or antibody fragment which binds to an antigen expressed on immune cells, optionally an antigen expressed on human immune cells. In some instances the ADCs comprise an anti-human VISTA (V-region Immunoglobulin-containing Suppressor of T cell Activation(1)) antibody or anti-VISTA antigen-binding antibody fragment which binds to VISTA expressing cells at physiologic pH having a short serum half-life (≈ 24-72 or 24-48 or 12-24 hours or less in a human VISTA knock-in rodent or (≈ 1-3.5 days or less in a human or non-human primate). In some instances these ADCs have a rapid onset of action and are potent for prolonged duration as they are very effectively internalized by immune cells in large amounts where they are cleaved releasing large amounts of active steroid payload. The invention also relates to the use of such ADCs and novel steroids for the treatment of autoimmune, allergic and inflammatory conditions. The invention further relates to methods for reducing the adverse side effects and/or enhancing the efficacy of glucocorticoid receptor agonists by using such ADCs to selectively deliver these anti-inflammatory agents to target immune cells, such as monocytes, neutrophils, B cells, T cells, Tregs, eosinophils, NK cells, macrophages, myeloid cells, et al., and particularly myeloid cells, thereby reducing potential toxicity to non-target cells.
Patent TW-202328620-A (TW)
Title: Liquid-vapor composite heat dissipation system capable of effectively applying the heat dissipation effect of absorbing large amount of heat energy by evaporating liquid into a vapor state to the architecture of multiple heat sources
Inventor: Feng jian-zhong
IPC: F28D15/04
Filed: 2022-01-10
Abstract: A liquid-vapor composite heat dissipation system includes: a heat exchange device in which a working fluid is filled; a plurality of liquid-vapor composite heat dissipation units that are positioned higher than the heat exchange device, wherein each of the liquid-vapor composite heat dissipation units has a housing, a capillary material is provided in the housing and configured to occupy the interior of the housing and divide the interior of the housing into a liquid inlet chamber and a gas outlet chamber that are spatially disconnected, and the bottom of the housing is attached to a heat source; a liquid supply pipe connected to the heat exchange device, and connected to a liquid inlet of each of the liquid-vapor composite heat dissipation units through a plurality of liquid supply sub-pipes; a pump; and a backflow pipe connected to the heat exchange device, and connected to each of the liquid-vapor composite heat dissipation units through a plurality of backflow sub-pipes.
Patent TW-202328443-A (TW)
Inventor: LUO CHING-WEI
IPC: C12N15/113
Filed: 2022-01-12
Abstract: The current invention provides the nucleic acid carrier for producing the single-chain VEGF fusion protein comprising the same, and methods of making and using the same.
Patent TW-202231596-A (TW)
Title: Microcrystalline glass, and microcrystalline glass product and manufacturing method therefor
Inventor: YUAN BAO-PING
IPC: C03C10/10
Filed: 2022-01-13
Abstract: The present invention provides a microcrystalline glass and a microcrystalline glass product which have excellent mechanical properties. The microcrystalline glass product comprises the following components in percentage by weight: SiO2: 65-80%; Al2O3: less than 5%; Li2O: 10-25%; ZrO2: 5-15%; and P2O5: 1-8%. By means of the reasonable component design, the microcrystalline glass product obtained in the present invention has excellent mechanical properties.
Patent TW-202329682-A (TW)
Inventor: FAN SHENG-HSIN
IPC: H04N5/93
Filed: 2022-01-14
Abstract: 提供一種用於線上會議的通訊裝置和通訊方法。通訊方法包含：擷取通訊裝置的第一螢幕影像，其中第一螢幕影像對應於第一顯示狀態；自外部電子裝置接收第二顯示狀態；以及判斷第一顯示狀態與第二顯示狀態是否匹配以輸出匹配結果。
Patent TW-202331960-A (TW)
Inventor: LIU CHEN-CHIANG
IPC: H01L23/34
Filed: 2022-01-21
Abstract: 一種半導體結構，包括基底與深溝渠隔離結構。深溝渠隔離結構設置在基底中，且不電性連接至任何元件。深溝渠隔離結構包括散熱層與介電襯層。散熱層設置在基底中。介電襯層設置在散熱層與基底之間。
Patent TW-202329888-A (TW)
Inventor: TSAI YI-SHAN
IPC: A61B8/13
Filed: 2022-01-26
Abstract: 本發明有關一種測量肌肉量的方法，係包括：一第一選取步驟，係提供一電腦斷層掃描圖，並於窗寬為300 HU至500 HU且窗位為40 HU至50 HU之條件下，於該電腦斷層掃描圖框選出一筋膜區域，以取得一框選資訊，其中該筋膜區域之選取範圍內包含一肌肉；以及 一第二選取步驟，於該電腦斷層掃描圖的HU值為-29 HU至150 HU之條件下，計算該框選之筋膜區域內的像數值以取得該肌肉之一肌肉資訊。
Patent TW-202331573-A (TW)
Inventor: WANG SHIH-HUNG
IPC: G06F30/3308
Filed: 2022-01-28
Abstract: 本發明揭露了一種電子裝置，其包含有一儲存元件以及一處理器。該儲存元件包含有一程式碼以及一資料庫，其中該資料庫包含了多種印刷電路板及封裝的組合以及多個通道模型。該處理器耦接於該儲存元件，用以執行該程式碼以進行以下操作：自該資料庫中取得該多種印刷電路板及封裝的組合中的一第一組合；自該資料庫中取得該多個通道模型中的一第一通道模型，其中該第一通道模型係根據該第一組合所產生；決定出一第一晶粒資訊；以及根據該第一通道模型以及該第一晶粒資訊來進行模擬，以產生一系統的一電源供應網路的特性以及一壓降。
Patent TW-202246261-A (TW)
Inventor: HAN YING
IPC: C07D487/04
Filed: 2022-02-11
Abstract: 本發明涉及化合物、包含本發明的化合物的醫藥上可接受的組合物以及使用所述組合物治療各種障礙的方法。
Patent TW-202221596-A (TW)
Inventor: YIN PING
IPC: G06F17/00
Filed: 2020-10-22
Abstract: 藉由針對與缺貨物件相關聯的歷史資訊運行決策樹來確定缺貨狀況的原因並基於所確定的原因聯繫缺貨物件的供應商以請求更多物件的方法及系統。所述系統自儲存與履行中心中的物件相關聯的資訊的系統接收與缺貨物件相關聯的資訊，與缺貨物件相關聯的資訊是在延長時間段內收集，所述系統藉由針對所接收的資訊運行決策樹來確定缺貨狀況的原因，所述決策樹包括多個狀況，且所述系統基於所確定的原因預測物件的缺貨狀況。所述系統基於所述預測聯繫缺貨物件的供應商以請求更多物件。
Patent TW-202334999-A (TW)
Inventor: HSIANG HSING-I
IPC: H01F1/14
Filed: 2022-02-23
Abstract: 本發明提供一種複合式積層電感器，其係使用NiCuZn鐵氧磁體包覆銀內電極，來改善崩潰電壓偏低的問題，同時在印有內電極的NiCuZn鐵氧磁體生胚上下各以FeSiCr合金以三明治之結構進行疊合，於NiCuZn鐵氧磁體生胚中間沖導通孔，並以FeSiCr合金漿料進行填充，形成中柱，並以中柱連接上下FeSiCr合金材料，使磁力線更加集中。
Patent TW-202303098-A (TW)
Title: Magnetic detection device and absolute encoder
Inventor: OSADA YASUO
IPC: G01D5/245
Filed: 2022-02-25
Abstract: The present invention reduces the effect that usage position has on detection accuracy. A magnetic detection device (60) comprises: a magnet (Mr) that has been magnetized; an angle sensor (Sr) that is a magnetic sensor detecting the magnetic flux from the magnet (Mr); a magnet holder (61) that retains the magnet (Mr); and a second layshaft gear shaft (62). The magnet holder (61) is rotatably supported by the second layshaft gear shaft (62). The second layshaft gear shaft (62) is formed from a magnetic body, and is configured such that an attraction force is produced by magnetism between the magnet (Mr) and the second layshaft gear shaft (62) in the rotational axis direction of the magnet holder (61).
Patent TW-202334575-A (TW)
Inventor: LIN HSIEN-CHANG
IPC: F21K9/272
Filed: 2022-02-26
Abstract: The present invention provides a module connector comprising a first connecting component and a second connecting component. The first connection component further includes a first base, a plurality of first conductors and a plurality of first hooks. The first base includes a first body, a plurality of first cable grooves, a plurality of first through holes and a plurality of third cable grooves. The first body forms the first cable grooves and the third cable grooves to be able to accommodate the cables. The central axes of the first through holes and the first cable grooves differ by a first angle and pass through the first body, and one end of the first through holes communicates with the first cable grooves. The first conductors are disposed in the first cable grooves. The second connecting element can connect the first connecting element and the circuit board through the cables, so that the second connecting element can transmit at least one of a signal and a power with the circuit board.
Patent TW-202247404-A (TW)
Title: Semiconductor protection device
Inventor: YOO JAE-HYUN
IPC: H01L23/60
Filed: 2022-03-11
Abstract: A semiconductor protection device includes: an N-type epitaxial layer, a device isolation layer disposed in the N-type epitaxial layer, an N-type drift region disposed below the device isolation layer, an N-type well disposed in the N-type drift region, first and second P-type drift regions, respectively disposed to be in contact with the device isolation layer, and spaced apart from the N-type drift region, first and second P-type doped regions, respectively disposed in the first and second P-type drift regions, first and second N-type floating wells, respectively disposed in the first and second P-type drift regions to be spaced apart from the first and second P-type doped regions, and disposed to be in contact with the device isolation layer, and first and second contact layer, respectively disposed to cover the first and second N-type floating well, to be in contact with the device isolation layer.
Patent TW-202244188-A (TW)
Title: Curable resin composition, dry film, cured product and electronic component
Inventor: SHIBATA DAISUKE
IPC: C09D163/00
Filed: 2022-03-15
Abstract: The present invention provides: a curable resin composition which exhibits excellent resolution and higher insulation reliability, while having excellent embeddability into a circuit; a dry film; a cured product; and an electronic component which comprises the curable resin composition, the dry film or the cured product. A curable resin composition which contains (A) a carboxyl group-containing resin, (B) a photopolymerization initiator, (C) a thermosetting resin and (D) silica, and which is characterized in that: the blending amount of the silica (D) is 0 to 60% by mass relative to the total solid content of the curable resin composition; the silica (D) contains (D-1) nanosilica; the nanosilica (D-1) has an average secondary particle diameter of 200 nm or less; and the degree of association of the nanosilica (D-1) is 2.3 or less.
Patent TW-202305915-A (TW)
Title: Method for producing silicon wafer
Inventor: ABE TATSUO
IPC: H01L21/02
Filed: 2022-03-18
Abstract: The present invention is a method for producing a silicon wafer, the method comprising a grinding step of grinding front and back surfaces of a raw wafer to obtain a wafer having an arithmetic surface roughness Sa per 2 [mu]m2 of 10 nm or less, a dry etching step of subjecting the wafer obtained in the grinding step to isotropic whole-surface dry etching with an etching margin of 1 [mu]m or less per single surface to remove a processing distortion layer introduced into the front and back surfaces of the wafer in the grinding step, and a both-surface polishing step of, after the dry etching step, polishing both sides of the wafer with a polishing margin of 3 [mu]m or less per single surface. Thus, a method for producing a wafer that enables production of a wafer having a high degree of flatness can be provided.