Patent SG-11201407978W-A (SG)
Title: Source reagent-based delivery of fluid with high material flux for batch deposition
Inventor: HENDRIX BRYAN C
IPC: C23C16/458
Filed: 2013-05-31
Abstract: (12) INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property Organization International Bureau (43) International Publication Date 5 December 2013 (05.12.2013) WIPOIPCT (10) International Publication Number WO 2013/181521 A3 (51) International Patent Classification: C23C16/44 (2006.01) C23C16/458 (2006.01) (21) International Application Number: PCT/US2013/043592 (22) International Filing Date: 31 May 2013 (31.05.2013) (25) Filing Language: English (26) Publication Language: English (30) Priority Data: 61/654,077 31 May 2012 (31.05.2012) US (71) Applicant: ADVANCED TECHNOLOGY MATERI­ ALS, INC. [US/US]; 7 Commerce Drive, Danbury, CT 06810-4131 (US). (72) Inventors: HENDRIX, Bryan, C.; 42 Kingswood Road, Danbury, CT 06811 (US). GREGG, John, N.; 100 5th Street, Marble Falls, TX 78654 (US). BATTLE, Scott, L.; 1702 Chinati Court, Cedar Park, TX 72613 (US). NAITO, Donn, K.; 1810 Lacy Drive, Marble Falls, TX 78654 (US). BARTOSH, Kyle; 1944 Linden Lane, Whitehall, PA 18052 (US). CLEARY, John, M.; 27 Bogus Hill Road, New Fairfield, CT 06812 (US). CHEON, Sebum; 8 Allis­ on Ln, New Milford, CT 06776 (US). (74) Agent: HULTQUIST, Steven, J.; Hultquist IP, PO Box 14329, Research Triangle Park, NC 27709 (US). (81) Designated States (unless otherwise indicated, for every kind of national protection available)'. AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (84) Designated States (unless otherwise indicated, for every kind of regional protection available)'. ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, [Continued on next page] (54) Title: SOURCE REAGENT-BASED DELIVERY OF FLUID WITH HIGH MATERIAL FLUX FOR BATCH DEPOSITION i-H CJ •H 00 (57) Abstract: Systems, reagent support trays, particle suppression devices, and methods are disclosed. In one aspect, a system includes a vaporizer vessel having one or more interior walls enclosing an interi­ or volume and a plurality of reagent support trays configured to be vertically stackable within the interior volume. Each of the plurality of reagent support trays is configured to be vertically stackable within the interior volume to form a stack of reagent support trays. One or more of the plurality of reagent support trays is configured to redirect a flow of a gas passing between adjacent reagent support trays in the stack of reagent support trays to cause the flow of gas to interact with the source reagent material in a particular reagent support tray before passing into a next of the plurality of reagent support trays in the stack of reagent support trays. 150 152 WO 2013/181521 A3 III lillll IIII III Hill lllll III III III 11 lllll 11 11 111 III lllllll llll III llll EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG). Published: — with international search report (Art. 21(3)) (88) Date of publication of the international search report: 27 February 2014