Patent SG-11201407540T-A (SG)
Title: Methods of growing uniform, large-scale, multilayer graphene films
Inventor: LOH KIAN PING
IPC: C30B25/00
Filed: 2013-05-17
Abstract: (12) INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property Organization International Bureau (43) International Publication Date 21 November 2013 (21.11.2013) WIPOIPCT (10) International Publication Number WO 2013/172792 A1 (51) International Patent Classification: CO IK 31/04 (2006.01) C30B 25/00 (2006.01) B82Y40/00 (2011.01) (21) International Application Number: PCT/SG2013/000202 (22) International Filing Date: 17 May 2013 (17.05.2013) (25) Filing Language: English (26) Publication Language: English (30) Priority Data: 61/648,328 17 May 2012 (17.05.2012) US (71) Applicant: NATIONAL UNIVERSITY OF SINGA­ PORE [SG/SG]; 21 Lower Kent Ridge Road, Singapore 119077 (SG). (72) Inventors: LOH, Kian Ping; c/o National University of Singapore, Faculty of Science, Department of Chemistry, 21 Lower Kent Ridge Road, Singapore 119077 (SG). ZHANG, Kai; c/o National University of Singapore, Fac­ ulty of Science, Department of Chemistry, 21 Lower Kent Ridge Road, Singapore 119077 (SG). CASTRO NETO, Antonio Helio; c/o National University of Singapore, Fac­ ulty of Science, Department of Physics, 21 Lower Kent Ridge Road, Singapore 119077 (SG). (74) Agent: AMICA LAW LLC; 30 Raffles Place, #18-03/04 Chevron House, Singapore 048622 (SG). (81) Designated States (unless otherwise indicated, for every kind of national protection available)'. AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (84) Designated States (unless otherwise indicated, for every kind of regional protection available)'. ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, [Continued on next page] (54) Title: METHODS OF GROWING UNIFORM, LARGE-SCALE, MULTILAYER GRAPHENE FILMS CJ o\ CJ i> (57) Abstract: Methods of growing a multilay­ er graphene film (10) include flowing a weak oxidizing vapor (OV) and a gaseous carbon source (CS) over a surface (SGC) of a carbon­ izing catalyst (GC) in a CVD reaction chamber (2). Carbon atoms (C) deposit on the carboniz­ ing catalyst surface to form sheets of single-lay­ er graphene (12) upon cooling. The method generates a substantially uniform stacking of graphene layers to form the multilayer graphene film. The multilayer graphene film is substan­ tially uniform and has a relatively large scale as compared graphene to films formed by prior-art methods. WO 2013/172792 Al I lllll llllllll II llllll III lllll lllll III III III lllll lllll llll llll lllll lllll lllll lllllll llll llll EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, Published: LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, ~ Wlth mternat ™ nal search re P° rt ( Art - 2l ( » 3 GW, ML, MR, NE, SN, TD, TG). Declarations under Rule 4.17: — ofinventorship (Rule 4.17(iv))