baber/WOPTO huggingface dataset:
Patent TW-I253849-B (TW)
Title: Brightness and chrominance separation circuit for three-dimensional image signal
Inventor: HUANG YUAN-HAU
IPC: H04N5/00
Filed: 2004-12-14
Granted: 2006-04-21
Abstract: The present invention relates to a brightness and chrominance separation circuit for three-dimensional image signal, wherein television image signal is first supplied to a two-dimensional image signal separation circuit to obtain two-dimensional chrominance signal for the two-dimensional image of the current frame. A three-dimensional image separation unit is then used to carry out UV demodulation and coordinate analysis for the signal (stored in a register) of the current frame that is at the same location as the two-dimensional image signal of the previous frame in order to obtain a three-dimensional chrominance signal. By comparison of color between two successive image signals, variation of chrominance can be obtained. Thus, the present invention can control the mixing ratio of two-dimensional and three-dimensional chrominance signals based on the chrominance variation to make the separated chrominance signal closer to the actual situation, and in particular, the present invention can solve color losing of two-dimensional image separation technique when processing separated signal of high frequency image signal.
Patent TW-I268456-B (TW)
Title: Signal processing method for a heterodyne laser system
Inventor: KUO SHIH-KANG
IPC: G08C19/36
Filed: 2004-12-23
Granted: 2006-12-11
Abstract: This patent presents a method for measuring high frequency vibration based on a heterodyne laser interferometry system. In a heterodyne system, an electro-optic modulator is used to split the laser light into a two frequency light source with orthogonal polarization state. Usually the frequency is at least ten times higher than the vibration to be measured. However, as the high frequency measurement is desired, the conventional locking amplifier and phase lock loop cannot be applied. Therefore, a method for computing vibration amplitude based on frequency domain analysis is presented in this patent. The acquired signal is stored and is processed by fast Fourier transform to obtain the spectrum of the signal. It was found that the peak values on the spectrum provides the information of vibration amplitude and is utilized for obtaining vibration amplitude.
Patent TW-I267713-B (TW)
Title: Time-signaling method for portable electronic device
Inventor: LAI CHENG-SHING
IPC: G04G11/00
Filed: 2004-12-27
Granted: 2006-12-01
Abstract: The present invention relates to a time-signaling method for portable electronic device, which can be applied to an earphone of a portable electronic device by the installation of a time-signaling key thereon. When the time-signaling key is pressed by a user, the time data of the portable electronic device can be captured and converted into a time-signaling signal transmitted to the earphone for notifying the user.
Patent TW-I252332-B (TW)
Title: High efficiency microlens array
Inventor: YAUNG DUN-NIAN
IPC: H01L27/00
Filed: 2005-03-10
Granted: 2006-04-01
Abstract: A microlens array including a substrate having a plurality of photo sensors located therein, a microlens layer located over the substrate, and a dielectric film located over the microlens layer. The plurality of microlens are separated by a plurality of gaps and the dielectric film conforms to the microlens layer, thereby filling the plurality of gaps.
Patent TW-I256823-B (TW)
Title: Mobile phones
Inventor: CHEN CHUN-PO
IPC: H04M1/02
Filed: 2005-03-30
Granted: 2006-06-11
Abstract: Mobile phones are provided. A mobile phone includes a main body and a hands-free headset detachably connected to the main body. The hands-free headset has a receiver and a microphone. When the hands-free headset and the main body are connected, the receiver and the microphone are received in the main body, and the hands-free headset communicates voice signal to the main body via the receiver and the microphone.
Patent TW-I261323-B (TW)
Title: MOSFET device with localized stressor
Inventor: CHEN CHIEN-HAO
IPC: H01L21/335
Filed: 2005-05-19
Granted: 2006-09-01
Abstract: A metal-oxide-semiconductor field-effect transistors (MOSFET) having localized stressors is provided. In accordance with embodiments of the present invention, a transistor comprises a high-stress film over the source/drain regions, but not over the gate electrode. The high-stress film may be a tensile-stress film for use with n-channel devices or a compressive-stress film for use with p-channel devices. A method of fabricating a MOSFET with localized stressors over the source/drain regions comprises forming a transistor having a gate electrode and source/drain regions, forming a high-stress film over the gate electrode and the source/drain regions, and thereafter removing the high-stress film located over the gate electrode, thereby leaving the high-stress film located over the source/drain regions. A contact-etch stop layer may be formed over the transistor.
Patent TW-I277760-B (TW)
Title: Circuit for detecting heater open and a furnace apparatus
Inventor: PAI JIUN-RONG
IPC: G01R31/327
Filed: 2005-06-06
Granted: 2007-04-01
Abstract: A circuit for detecting a heater open is disclosed. The present invention comprises: a current transducer electrically connected to a power line of a heater; a bridge rectifier, wherein one pair of input terminals of the bridge rectifier are electrically connected to one pair of output terminals of the current transducer; an integrated circuit (IC) voltage regulator, wherein one input terminal of the IC voltage regulator is electrically connected to one positive input terminal of the bridge rectifier, and one common terminal of the IC voltage regulator is electrically connected to one negative output terminal of the bridge rectifier; and a relay, wherein one positive input terminal of the relay is electrically connected to one output terminal of the IC voltage regulator, and one negative input terminal of the relay is electrically connected to the common terminal of the IC voltage regulator.
Patent TW-I258032-B (TW)
Title: Display and tape carrier package structure
Inventor: CHEN PO-LUNG
IPC: G02F1/133
Filed: 2005-07-12
Granted: 2006-07-11
Abstract: A display, which comprises a display panel, a printed circuits board (PCB) and a tape carrier package (TCP), is provided. The printed circuits board is disposed beside the display panel. And the tape carrier package comprises a substrate, a plurality of inspecting leads, a chip and a protruding. Wherein, the substrate has an opening, and the substrate is disposed between the display panel and the printed circuits board. The inspecting leads are disposed on the substrate and are around the opening. Each inspecting lead has an inter inspecting lead and an outer inspecting lead. Wherein, parts of outer inspecting leads are electrically connected with the display panel. And other parts of outer inspecting leads are electrically connected with the printed circuits board. The chip has a plurality of contacting points. And the chip is disposed on the opening. The contacting points is electrically connected with the inter inspecting leads. The protruding is disposed on the substrate and between the chip and the display panel. By the package structure which has the protruding, the yield of display panel can be improved.
Patent TW-I283544-B (TW)
Title: Duplex-transmission lock-in device between a wireless microphone and a receiver
Inventor: KUNG TE-WEI
IPC: H04R1/10
Filed: 2005-08-23
Granted: 2007-07-01
Abstract: A duplex-transmission lock-in device between a wireless microphone and a receiver comprises respective infrared duplex transmission modules, each further comprising a receiving/transmitting unit, a plurality of resistors and a plurality of capacitors. Thereby, the infrared duplex transmission module within the microphone will transmit signals to the infrared duplex transmission module within the receiver for firstly checking the identity and the version of the microphone and then continuing to send signals to the receiver; this completes a lock-in process for a duplex communication of compatible data.
Patent TW-I282845-B (TW)
Title: Intelligent signal processor for vortex flow meter
Inventor: MIAU JIUN-YI
IPC: G01F1/32
Filed: 2005-09-28
Granted: 2007-06-21
Abstract: This invention relates to an intelligent signal processor for a vortex flow meter, the signal processor using a digital signal processing frame mode as its primary processing means. This invention discloses two type of digital signal processing algorithms, one of which uses a Fast Fourier Transformation unit and an auto-correlation unit as the primary means, and the other of which uses a Fast Fourier Transformation unit and a digital software phase locked loop unit as the primary means. When the flow rate changes along with time, the two algorithms are both equipped the capability to track vortex shedding frequency and to reduce the errors in computing the vortex shedding frequency. Furthermore, under the states of maximum and minimum flow rates, precision is not affected due to the large range and a precision level between 0.59% and 0.35% in the flow rate ranges of 50 to 509 m<3>/hr can be achieved, which is about 2 to 3 times better than the conventional processing method.
Patent TW-I439928-B (TW)
Title: Configurable executing unit, method of operating the same, and computer program product and instruction set thereof
Inventor: KNOWLES SIMON
IPC: G06F9/04
Filed: 2006-05-05
Granted: 2014-06-01
Abstract: A configurable execution unit comprises operators capable of being dynamically configured by an instruction at the level of processing multi-bit operand values. The unit comprises one or more dynamically configurable operator modules, each module being connectable to receive input operands indicated in an instruction, and a programmable lookup table connectable to receive dynamic configuration information determined from an opcode portion of the instruction and capable of generating operator configuration settings defining an aspect of the function or behavior of a configurable operator module, responsive to said dynamic configuration information in the instruction.
Patent TW-I408240-B (TW)
Title: Reticulated foam-like structure formed of nano-scale particulate
Inventor: OVSHINSKY STANFORD R
IPC: C22C1/00
Filed: 2007-01-04
Granted: 2013-09-11
Abstract: A nano-particulate reticulated foam-like structure, which includes particles having a size of 10-200 nanometers. The particles are joined together to form a reticulated foam-like structure. The reticulated foam-like structure is similar to the structure of carbon nano-foam. The nano-particulate reticulated foam-like structure may comprise a metal, such as a hydrogen storage ahoy, either a gas-phase thermal or an electrochemical hydrogen storage alloy. The nano-particulate reticulated foam-like structure may alternatively comprise a hydroxide such as nickel hydroxide or manganese hydroxide or an oxide, such as a silver oxide or a copper oxide. When the nano-particulate reticulated foam-like structure is a hydrogen storage alloy, the material exhibits substantial immunity to hydrogen cycling decrepitation and an increase in the reversible hydrogen storage capacity by reduction of trapped hydrogen by at least 10% as compared to the same alloy in bulk form.
Patent TW-I371468-B (TW)
Title: Poly(arylene ether) compositions
Inventor: BRAIDWOOD CHRISTINA LOUISE
IPC: C08L71/00
Filed: 2007-08-01
Granted: 2012-09-01
Abstract: A composition includes at least 15 weight percent of a low intrinsic viscosity, bifunctional poly(arylene ether) and at least 20 weight percent of a nonhalogenated solvent. The bifunctional poly(arylene ether)s are substantially and unexpectedly more soluble than their monofunctional analogs. The compositions are useful as concentrates to add bifunctional poly(arylene ether)s to thermosets.
Patent TW-I409656-B (TW)
Title: System and method for outspreading an irregular curve of a part of a punching die
Inventor: Zhang li-ping
IPC: G06T3/00
Filed: 2007-12-31
Granted: 2013-09-21
Abstract: A system for outspreading an irregular curve of a part of a punching die includes: a drawing file, a data obtaining module, a data analyzing module, a data deleting module, a data changing module, and an irregular curve outspreading module. The data obtaining module, the data analyzing module, and the data deleting module are for searching and deleting linear dimension data that are marked on graphic segments, the graphic segments relate to a curved surface that includes the irregular curve. The data changing module and the irregular curve outspreading module are for outspreading the irregular curve of the curved surface. A related method is also provided.
Patent TW-I385774-B (TW)
Title: Leadframe package and leadframe
Inventor: CHEN NAN JANG
IPC: H01L23/495
Filed: 2008-12-24
Granted: 2013-02-11
Abstract: The invention relates to leadframe semiconductor packages mounted on a heat-sink and fabrication thereof. A system in package (SiP) comprises a leadframe having extension leads, configured with divisional heat sinks serving as power and ground nets. A set of semiconductor dies is attached by adhesive on the central region of the lead frame. Pluralities of wire bonds electrically connect the set of semiconductor dies to the leadframe and to the divisional heat sinks respectively. An encapsulation encloses the leadframe, but leaves the extension leads and the divisional heat sink uncovered, exposing a heat dissipating surface.
Patent GB-2476763-B (GB)
Title: Subsea gravity separator
Inventor: ILSTAD HA VAR
IPC: B65D88/78
Filed: 2008-10-28
Granted: 2012-10-17
Abstract: A large diameter subsea gravity separator for ultra deep water conditions of 2000 to more than 4000 m includes a vessel having a shell which defines a cylindrical tubular portion and closure portions at axially both ends of the tubular portion. The shell is a sandwich shell which is dimensioned to provide for a predetermined collapse resistance of at least MPa and includes an inner steel layer, an outer steel layer and a concrete layer completely filling the space between the inner steel layer and the outer steel layer.
Patent GB-2497620-B (GB)
Title: An item tag-along
Inventor: WALKER LORRAINE
IPC: B62B9/26
Filed: 2012-09-10
Granted: 2013-12-25
Abstract: The invention comprises a tow connection or tow-bar for attachment to the rear of a manually propelled carriage such as a stroller, pram or wheelchair, said connection being releasably connected to a cross-member of the carriage and being adapted to support an item at an extendable distance from the carriage. The supported item may be a buggy or standing board (50, figure 6), a suitcase or a shopping trolley (60, figure 2). The connection may comprise a clamp 10 for attachment to an axle 70 or back bar 71, and the item support may be a ball like tow hitch 30. The hitch may be extended in distance from the carriage by means of inter-engaging members 20, 21, with a detent mechanism (figure 4) allowing discrete distances to be selected. The invention allows a person pushing the carriage to also simultaneously push further items being transported.
Patent GR-1420-B (GR)
Title: Μεθοδος και διασκευη προς ερμητικη τοποθετησιν κυλινδρων ιδιως εις ηλεκτροκινητηρας.
Filed: 1927-01-25
Abstract: έθοδος προς ερμητικήν ως προς το ύδωρ τοποθέτησινκυλίνδρων ιδίως, εις ηλεκτροκινητήρας οίτινες πρόκειται να εργάζωνται υπό το ύδρω ή οιονδήποτε υγρόν χαρακτηριζομένη δια του ότι τίθεται, το πρ...τό έδρανον ή εις το κάλυμμα του κινητήρος, προσαγόμενον λιπαντικόν μέσον δια της υπό πίεσιν προσαγωγής αερίου ή αέρος, υπό πίεσιν, τοιουτοτρόπως ώστε το λιπαντικόν μέσον εναντίον της πιέσεως του έξωθεν ύδατος πιέζεται προς τα έξω και εμποδίζει ούτω τόσοτην εισροήν του ύδατος εις το εσωτερικόν του κινητήρος.
Patent GR-2871-B (GR)
Title: Συστημα προς παρασκευην τεχνητων υλων.
Inventor: LILIENFELD LEON DR
Filed: 1930-03-13
Abstract: έθοδος προς παρασκευήν τεχνητών υλών χαρακτηρίζεται εκ του ότι επαφίεται να επιδράσει επί βισκόζης μίαν αλογωνική ένωσις μιάς δι-ή πολυσθενούς αλκοόλης και το ούτω ληφθέν προϊόν φέρεται εις την μορφήν μιάς τεχνητής ουσίας, εν διαλυτική κατάσταση καιμετά ταύτα επαφίεται να επιδράσει εν μέσον, όπερ επί της σχηματισθείσης διαλύσεως επιδρά πηκτωδώς και επί των νωπών πηκτωδών τεχνητών ουσιών πλαστικώς.
Patent GR-10708-B (GR)
Title: Ηλοι και παρομοια ενθεματα.
Inventor: BOSAN JOSEPH
Filed: 1946-01-25
Abstract: κθεμα κατάλληλον προς σύνδεσιν μετά σχετικώς μαλακού σώματος, χαρακτηριζόμενον δια της προβλέψεως ενός εξωτερικώς ......... τμήματος στελέχους κατάλληλον να κοχλισάται ή να ανταποκτάται εντός του υλικού του σχετικώς μαλακού σώματος εν ........... μετά ............. ασφαλιστικού τμήματος εκτεινομένου κατά την ακτίνα από του στελέχους, και ενδεχομένων με κατά μήκος εκτειν....... ......... ............... ................ ασφαλιστικές προεξοχάς ειςσχετικώς μεγάλα αριθμών καταλ........ προς εντα........... ή .......... εις το σώμα εκ του α.......... δια να ανθίονται εις την περιστροφήν ενός ........... σχετικά ............ με το στέλεχος, οπότετο στέλεχος είναι ............... από πάσης κινήσεως σχετικής προς το υλικόν του σώματος, του στελέχους ώντος ηνωμένου μετά του ήλου ή άλλου μέλους προς αγκύρωσιν τη βοηθεία του ρηθέντος στελέχους και ασφαλιστικού τμήματος εντός του σώματος.
Patent GR-32434-B (GR)
Title: Μεθοδος παρασκευης παραγωγων του 5 αλογονοσαλικυλικου οξεος.
IPC: C07C233/12
Filed: 1967-01-30
Abstract: έθοδος παρασκευής 2-αλκανυλο-4-αλογονο-5-ακυλαμινο-φαινολών, χαρακτηριζομένη έκ του ότι παράγωγον της 3-ακυλαμινο-4-αλογονοφαινόλης του γενικού τύπου(Ι) είς τον οποίον το  R1 είναι αλκανυλομάς, το R2 ακυλομάς και το Χ ατομον, αλογόνον, θερμαίνεταιπαρουσία καταλύτου ώστε να λάβη χώραν ανακατάταξις FRIES και λαμβάνεται 2-αλκανυλο-4-αλογονο-5-ακυλαμινοφαινόλη, του γενικού τύπου (ΙΙ) είς τον οποίον τα R1,R2 και Χ παριστούν ότι προηγούμενως περιεγράφη.
Patent GR-76240-B (GR)
Inventor: LEMOINE JEAN
IPC: C07D307/00
Filed: 1982-10-26
Abstract: The present invention relates, as new industrial products, to (+/-)-, (+)- and (-)-2,4-diacetyl-5-(3-alkyl-amino-2-hydroxy-propyloxy)-benzofurans of general formula:    <IMAGE>  (I)  where R is CH(CH3)2 or C(CH3)3, and to their acid addition salts. These products are useful in therapeutics, particularly as cardioselective beta-blocking agents.
Patent GR-862179-B (GR)
Title: Carboxy carboalkoxy and carbamile substituted isonitrile radionuclide complexes
Inventor: ALUN JONES G
IPC: C07F13/00
Filed: 1986-08-22
Abstract: A coordination complex is disclosed comprising a radionuclide selected from radioactive isotopes of Tc, Ru, Co. Pt and Re and an isonitrile ligand of the formula:where X is a lower alkyl group having 1 to 4 carbon atoms, wherein R is selected from COOR' and CONR<sup>2</sup>R<sup>3</sup> where R<sup>1</sup> can be H, a pharmaceutically acceptable cation, or a substituted or unsubstituted alkyl group having 1 to 4 carbon atoms, R<sup>2</sup>, and R<sup>3 </sup>can be H, or a substituted or unsubstituted alkyl group having 1 to 4 carbon atoms, and R<sup>2</sup> and R<sup>3</sup> can be the same or different. Kits that can be used to form these complexes are also disclosed.
Patent GR-1000252-B (GR)
Inventor: DEVDATT ATUL AYER
IPC: A61K9/22
Filed: 1988-09-02
Abstract: Αποκαλύπτεται μορφή δοσολογίας που περιβάλει ένα τοίχωμα 12 που περιλαμβάνει ένα διαμέρισμα 15 με ένα μέσο εξόδου 13 σε ένα τοίχωμα 12. Το διαμέρισμα 15 περιλαμβάνει ένα πρώτο ή ταχείας απελευθέρωσης λεπτό φύλλο 16 και ένα δεύτερο ή βραδείας απελευθέρωσης λεπτό φύλλο 17, που απελευθερώνονται μέσω του μέσου εξόδου σε δύο διαφορετικές περιόδους χρόνου. Τουλάχιστον ένα από τα λεπτα φύλλα 16 ή 17 περιέχει ένα φάρμακο που απελευθερώνεται μέσω του μέσου εξόδου 13. ω
Patent GR-1000270-B (GR)
Inventor: AYER ATUL DAVDATT
IPC: A61K9/22
Filed: 1988-09-30
Abstract: Αποκαλύπτεται μία οσμωτική συσκευή 10 που περιλαμβάνει ένα τοίχωμα 12, ένα διαμέρισμα 15, μία πρώτη σύνθεση 16 περιέχουσα ένα φάρμακο και πολυαιθυλενοξείδιο με 100.000 έως 300.000 μοριακό βάρος, μία δεύτερη σύνθεση 17 περιέχουσα πολυαιθυλενοξείδιο με 5.000.000 έως 8.000.000 μοριακό βάρος και μία δίοδο εξόδου 13 για απελευθέρωση του φαρμάκου. ω
Patent IN-160822-B (IN)
Inventor: DAAR YAIR
IPC: A45D26/00
Filed: 1983-08-01
Abstract: An electrically powered depilatory device including a hand held portable housing (2), motor apparatus (4, 4 min ) disposed in the housing, and a helical spring (24) comprising a plurality of adjacent windings arranged to be driven by the motor apparatus (4, 4 min ) in rotational sliding motion relative to skin (5) bearing hair to be removed, the helical spring (24) including an arcuate hair engaging portion arranged to define a convex side whereat the windings are spread apart, and a concave side corresponding thereto whereat the windings are pressed together, the rotational motion of the helical spring (24) producing continuous motion of the windings from a spread apart orientation at the convex side to a pressed together orientation at the concave side and for engagement and plucking of hair from the skin (5), whereby the surface velocities of the windings relative to the skin (5) greatly exceed the surface velocity of the housing relative thereto.
Patent RS-52550-B (RS)
Inventor: ARSENIJEVIC SLOBODAN N PROF DR
IPC: A61B5/00
Filed: 2009-04-24
Abstract: Instrument za merenje i monitoring sila kontrakcije muskulature poda karlice, naznačen time što se sastoji od spekuluma (1) na čiju ručicu (5) je preko zavrtnja (15) fiksirano telo dinamometra (6) u kome su lepljenjem postavljene na nosaču (7) merne trake (8), i koji je kablom (3) vezan na merni instrument (4), dok je spekulum (1) preko ručice (5) i tela dinamometra (6) povezan sa zavrtanjem (12) preko poluge (9) dinamometra, kliznog umetka (10) i točkića (11), pri čemu je krajnji položaj točkića (11) u odnosu na zavrtanj (12) određen graničnikom (13).Prijava sadrži još 2 zavisna patentna zahteva.
Patent RS-52128-B (RS)
Inventor: ROCK MICHAEL HAROLD
IPC: C07D211/52
Filed: 2009-03-02
Abstract: Postupak u kome jedinjenje formule IIu kojoj su R' i R" nezavisno jedan, dva ili tri vodonika, halogen, C1-6-alkil ili C2-6-alkilen, a L je odlazeća grupa, reaguje sa opciono supstituisanim N-benzil-4-piperidonomu kome je R'" vodonik ili -O-C1-6-alkil, radi dobijanja jedinjenja formule IIIPrijava sadrži još 17 patentnih zahteva.
Patent TW-I652298-B (TW)
Title: 光學膜、防眩性膜及偏光板
Inventor: ICHIHARA MASAHIRO
IPC: G02B5/02
Filed: 2011-06-03
Granted: 2019-03-01
Abstract: 本發明提供一種光學膜，該光學膜係由包含丙烯酸系樹脂組合物100重量份及潤滑劑0.01~0.09重量份之樹脂潤滑劑組合物所構成，且該丙烯酸系樹脂組合物包含透明之丙烯酸系樹脂及平均粒徑10~300 nm之橡膠彈性體粒子，該橡膠彈性體粒子之含量於丙烯酸系樹脂組合物中為25~45重量%。於該光學膜上形成防眩層，可製作防眩性膜。將該光學膜或防眩性膜貼合於聚乙烯醇系偏光膜上，可製作偏光板或防眩性偏光板。
Patent TW-I410393-B (TW)
Inventor: TAKAMI HIDEO
IPC: H01L21/336
Filed: 2011-08-11
Granted: 2013-10-01
Abstract: The present invention addresses the problem of providing a sintered oxide for use in producing an oxide semiconductor thin film which is free from expensive gallium (Ga) and the problem of providing an oxide semiconductor thin film having the same composition as that of the sintered oxide. A sintered oxide which consists of trivalent indium ions (In3+), trivalent iron ions (Fe3+), divalent X ions (X2+) [wherein X is at least one element selected from among Cu, Zn and Fe], and oxide ions (O2-), wherein the atomic ratios of trivalent indium ions (In3+), trivalent iron ions (Fe3+) and divalent X ions (X2+) satisfy 0.2 = (In3+)/{(In3+)+(Fe3+)+(X2+)} = 0.8, 0.1 = (Fe3+)/{(In3+)+(Fe3+) +(X2+)} = 0.5, and 0.1 = (X2+)/{(In3+)+(Fe3+)+(X2+)} = 0.5 respectively; and an oxide semiconductor thin film which has the same composition as that of the sintered oxide.
Patent TW-I636522-B (TW)
Inventor: TSCHINDERLE ULRICH
IPC: H01L21/683
Filed: 2012-09-07
Granted: 2018-09-21
Abstract: 一種晶圓狀物件之處理用裝置包含封閉處理腔室。該封閉處理腔室包含：提供氣密包圍區域的外殼；位於封閉處理腔室內且用以固持其上之晶圓狀物件的旋轉夾盤；及設置於該封閉處理腔室內的內部蓋件。該內部蓋件可於其中旋轉夾盤與封閉處理腔室之外壁相連的第一位置、與其中內部蓋件對鄰近旋轉夾盤的封閉處理腔室之內表面加以密封來定義氣密之內處理腔室的第二位置之間移動。