baber/WOPTO huggingface dataset:
Patent KR-20130034724-A (KR)
Title: 핀 고정형 탄성매트
Inventor: JEONG CHAN KWON
IPC: E01C13/04
Filed: 2011-09-29
Abstract: 본 발명은 핀 고정형 탄성매트에 관한 것으로, 바닥재로 사용되는 탄성매트에 있어서; 두께를 갖는 사각판상으로 형성되고, 설치면에 접촉 배치되는 하부판; 상기 하부판의 상면에 합지되는 중간판; 상기 하부판과 중간판 사이에 개재되는 와이어메쉬; 상기 중간판의 상면 합지되는 상부판;으로 구성되며, 상기 하부판과 중간판 및 상부판의 각 대향면 중 적어도 일면에는 유압톱슨기로 니들펀칭되어 형성된 다수의 쐐기형 미세구멍과, 상기 쐐기형 미세구멍에 흘러들어간 상태에서 굳어서 이들을 견고히 합지시켜 일체화시키는 우레탄접착제; 상기 상부판에 관통형성된 다수의 고정구멍; 상기 고정구멍에 삽입되고, 상기 중간판의 고정구멍 대응 위치에 안착되는 와셔; 상기 와셔로 지지된 상태에서 중간판, 하부판을 관통하여 콘크리트 바닥면에 앵커식으로 매설되는 고정부재; 상기 고정부재가 설치된 고정구멍의 상부를 억지끼움 형태로 끼워 고정되면서 밀폐하는 고정캡;을 포함하여 구성된 것을 특징으로 하는 핀 고정형 탄성매트를 제공한다. 
본 발명에 따르면, 탄성매트를 콘크리트 바닥면에 시공할 때 핀 혹은 그와 유사한 고정부재를 사용하여 견고히 고정하되 핀 고정부의 상부를 밀폐함으로써 장시간 사용시에도 매트 표면으로 노출되지 않게 하여 안전사고를 방지하고, 매트의 변형을 줄여 날씨나 계절에 따른 심한 기온차에도 변형없이 장수명화를 가능하게 한 효과를 얻는다.
Patent KR-20130035408-A (KR)
Title: Composition for reducing skin irritation comprising prunus mume extracts
Inventor: KIM HYUK
IPC: A61P17/00
Filed: 2011-09-30
Abstract: PURPOSE: A composition containing a Prunus mume extract for relieving skin irritation is provided to relieve skin irritation such as skin dryness, erythema, keratoderma, itching, or burning sensation. CONSTITUTION: A composition for relieving skin irritation contains a Prunus mume extract. The composition relieves skin dryness, erythema, keratoderma, itching, or burning sensation due to skin irritation. The skin irritation is caused by retinoid or surfactant. [Reference numerals] (AA) IL-6 concentration(pg/ml); (BB) No treatment; (CC,EE) Prunus mume treatment(%); (DD) Retinoic acid(10uM);
Patent KR-20130038482-A (KR)
Title: Led light projector
Inventor: JO BYUNG SOO
IPC: F21Y101/02
Filed: 2011-10-10
Abstract: PURPOSE: An LED light projector is provided to drain rainwater flowing from a second ventilation hole to a first ventilation hole, and to prevent the malfunction of a product due to the rainwater. CONSTITUTION: A first case(10) includes a first ventilation hole(12) for air. A second case(20) is combined with the first case to close an LED circuit. The second case includes a second ventilation hole(22) for exhausting the air. A substrate(40) includes a control module(42) for the LED circuit and heat radiation pins(44). The heat radiation pins are formed at both sides of the control module. A ventilation fan(50) is adjacent to the second ventilation hole.
Patent KR-20130038719-A (KR)
Title: Apparatus and method for testing gas insulation switchgear using air
Inventor: HAN KI SON
IPC: G01R31/12
Filed: 2011-10-10
Abstract: PURPOSE: An inspection test method and an apparatus of gas insulated switchgear using the dry air are provided to reduce purchasing costs of the SF6 gas by reducing the SF6 gas used amount, and enables an environment-friendly task. By greatly simplifying the inspection test process repeating the process of injecting and collecting the SF6 gas, the test cost and time are reduced. CONSTITUTION: Set a vacuum status identical to the development condition in which a GIB of the implementation under test will be installed, and maintain the same environment condition of gas pressure in each GIB tester injecting the SF6 gas and dry air, in one atmospheric pressure. By raising the voltage in the dielectric strength and measuring each of the puncture voltage, changing the GIB gas pressure and increasing the voltage by using the same method, the puncture voltage at GIB for each test injecting the SF6 gas and dry air is measured(310). Repeating the measuring step in the same condition, the puncture voltage of the SF6 gas and dry air are measured, and a 50% F.O.V(Flash Over Voltage) is calculated by using the method noted based on the measured value(320). An applied voltage applied in the inspection test using the dry air is calculated(330) by using database converting into the equivalence by 50% F O. V. calculated for each pressure of the SF6 gas and dry air, and an electric field analysis program predetermined for each condition. [Reference numerals] (310) Measuring SF6 gas and dry air breakdown voltage; (320) Calculating 50% F.O.V; (330) Calculating applied voltage in the inspection test using the dry air; (340) Verifying the applied voltage in the inspection test using the dry air I; (350) Verifying the applied voltage in the inspection test using the dry air II; (AA) 0-4 atmospheric pressure, 1kV increase/minute; (BB) Using database converted into the equivalence by 50% F.O.V and an electric field analysis program; (CC) Attaching foreign substances after examining an electric field analysis by GIB part; (DD) Brain impulse test(up&down method, 5kV increase);
Patent KR-20130046270-A (KR)
Title: A transmitter sunshade
Inventor: KWON KWANG YEOL
IPC: G01F15/14
Filed: 2011-10-27
Abstract: PURPOSE: A transmitter box is provided to prevent accidents caused by bumping against a sharp cut face of the box and to make the surface of the box beautiful. CONSTITUTION: A transmitter box comprises a strut(30), a body(32), and an inspection cover(34). The strut is fixed vertically to a concrete floor, thereby supporting a transmitter(20) by a medium of a bracket(22). The box is joined to the upper part of the strut and surrounds the transmitter not to be in contact with rainwater and sunlight. The inspection cover is hinge-installed in the rear upper part of the box and so that inspecting the transmitter can be facilitated. The trust is fixed to the one side of a ceiling of the box with a fixing member(36) without tool. The box includes an upper plate(32a), left and right walls(32b,32c) for preventing the sunlight and rainwater and a front opening for easily confirming the transmitter in the front side.
Patent KR-20130046288-A (KR)
Inventor: KIM JEONG HYUN
IPC: G03F7/42
Filed: 2011-10-27
Abstract: PURPOSE: A resist-stripping composition is provided to have excellent collision preventing performance which includes aluminum and/or copper and to have excellent resist residue-removing performance. CONSTITUTION: A resist-stripping composition comprises 0.01-5 wt% of a collision preventer represented by chemical formula 1; 1-40 wt% of an alkali-based compound; and 55-95 wt% of an aqueous polar solvent. In chemical formula 1, each of R2, R3, and R4 is independently C1-5 alkylene; each of R1, R5, and R6 is independently hydrogen or saturated or unsaturated C1-5 alkyl, R7 is R8COOR9 or OR10; R8 is C1-5 saturated or unsaturated alkylene; R9 and R10 is independently hydrogen or C1-5 saturated or unsaturated alkyl.
Patent KR-20130049380-A (KR)
Title: Braket for cultivator
Inventor: PARK KI HYUK
IPC: A01B59/06
Filed: 2011-11-04
Abstract: PURPOSE: A connecting bracket of a rear portion working machine is provided to stably connect the rear portion working machine by being supported at the upper end of a rotavator and being coupled to the horizontal shaft. CONSTITUTION: A connecting bracket of a rear portion working machine for a tractor comprises: first and second bodies(110,120) placed at the front portion and the rear portion of a horizontal shaft; a round-shaped placing part(111) which is formed at a site where the first and second bodies face each other; a bolt for coupling the upper side and the lower side of the first and second bodies at the horizontal shaft; a first hinge piece with a lower end supported at the upper side of a rotavator and a support frame which is hinge-coupled at the outside of the first body; a side extension plate(160) which is extended to the side of the first body; and a second hinge piece(163) which is hinge-coupled with the support frame at the front side of the side extension plate.
Patent KR-20130052795-A (KR)
Title: 천정등용 멀티 외곽테
Inventor: LIM JUNG HO
IPC: F21V17/00
Filed: 2011-11-14
Abstract: 본 발명은 천정등을 설치하는데 있어서 천정마감을 하는데 사용되는 다양한 천정바의 구성과 형상에 쉽게 대응하여 설치할 수 있도록 천정등의 외곽테를 적어도 5개 이상의 부품을 한 조로 구성한 천정등용 멀티외곽테에 관한 것으로,  
등기구몸체의 외곽 측면에 일체로 결합되는 메인샤시와, 공간을 채워주며 전체적인 결합의 기준이 되는 스페이스바와, 외측면에 결합되어 측면을 마감하는 마감재와, 하단에 결합되어 스페이스바의 피스공을 막아주면서 외부로 노출되는 커버가 천정에 설치된 천정바의 종류에 따른 필요에 의하여 각각 분리 가능하도록 일체로 결합되어 등기구외곽테를 구성하는바, 여기서 상기 등기구몸체 외곽 측면에 일체로 결합되는 메인샤시는, 등기구몸체에 피스로 결합하도록 다수의 피스공을 수평으로 뚫어서 형성하고, 하단외측에는 커버를 결합하는 티(T)홈을 길이방향으로 연속되게 형성하며, 외측 중앙에는 스페이스바에 결합되는 티(T)돌기를 형성한 것과; 상기 공간을 채워주며 전체적인 결합의 기준이 되는 스페이스바는, 천정바로 설치된 엠바에 피스로 결합하도록 다수의 피스공을 수직으로 뚫어서 형성하고, 그 일측면에는 메인샤시의 티(T)돌기가 결합하는 티(T)홈을 길이방향으로 연속되게 형성하며, 타측면에는 마감재의 티(T)돌기가 결합하는 티(T)홈을 길이방향으로 연속되게 형성하며, 하단에는 커버의 돌기가 결합하는 커버결합홈을 길이방향으로 연속되게 형성한 것과; 상기 스페이스바 외측면에 결합되어 측면을 마감하는 마감재는, 상기 스페이스바의 외측면에 형성된 티(T)홈에 결합하는 티(T)돌기를 길이방향으로 연속되게 형성한 것과; 상기 스페이스바의 하단에 결합되어 피스공을 막아주면서 외부로 노출되는 커버는, 다양한 색상으로 연출되며, 하단에는 상기 메인샤시의 티(T)홈에 결합하는 티(T)돌기를 길이방향으로 연속되게 형성형성하며, 스페이스바의 저면에 형성된 커버결합홈에 억지 끼움으로 결합하는 돌기를 길이방향으로 연속되게 형성한 것으로 이루어져서 이들 메인샤시와, 스페이스바와, 마감재와, 커버가 각각 다른 칼라의 색상으로 이루어져서 분리와 결합이 용이하도록 구성한다.
Patent KR-20130062418-A (KR)
Title: Social network service and cloud computing fusion in customer relationship management and student relationship management of operate method
Inventor: AN SANG DON
IPC: G06Q50/00
Filed: 2011-11-14
Abstract: PURPOSE: A customer relationship management system combining a social network service with cloud computing and an operation method of a student relationship management system are provided to predict and supply a product and a service which are desired by the customers by utilizing the social network data of the existed customers, thereby supplying a customer relationship management method using the same. CONSTITUTION: A system comprises student relationship management(90), an analysis CRM(Customer Relationship Management) area(50), an operation CRM area(60), a cloud computing area(80), and a social CRM area(70). The system analyzes the information on the analysis CRM area by extracting the related information from an SNS(Social Network Service). The analyzed information is applied with a cloud computing method and is used in the operation CRM area and the social CRM area. The operation CRM area provides customized information based on the analyzed information. The social CRM area is continuously updated through the participation of the users. [Reference numerals] (10) SNS media; (20) SNS incubator; (5) Customer(student) SNS user; (50) Analysis CRM area; (60) Operation CRM area; (70) Social CRM area; (80) Cloud computing; (AA) Transfer operation DB; (BB) Marketing automation system; (CC) Sales automation system; (DD) Customer service automation system; (EE) Social commerce DB
Patent KR-20130053331-A (KR)
Title: Eliminating device of fe powder for electrolytic descaling line
Inventor: LEE JUN JI
IPC: C25F7/00
Filed: 2011-11-15
Abstract: PURPOSE: A device for removing Fe in an electrolytic descaling line is provided to reduce corrosion of an electrolytic descaling line facility and to improve a poor working environment due to acid vapor. CONSTITUTION: A device(1) for removing Fe in an electrolytic descaling line comprises an electrolytic descaling tank(10), a first circulating chamber(20), and a second circulating chamber(30). The electrolytic descaling tank pickles the surface of stainless steel. The first circulating chamber is connected to the electrolytic descaling tank and includes a first electrode(21) which deoxidizes Fe among an acid solution. The second circulating chamber includes a second electrode(31).
Patent KR-20130062423-A (KR)
Inventor: SHIN CHUL YONG
IPC: G06Q30/00
Filed: 2011-11-16
Abstract: 본 발명은 모바일 상품권 처리 시스템 및 그 방법에 관한 것이다.  본 발명에서는 사용자컴퓨터를 이용하여 접속되고 상기 사용자 컴퓨터와 상품권 거래를 수행하기 위한 상품권판매 컴퓨터와, 상기 상품권 판매 컴퓨터로부터 상품권의 발권 정보를 수신하여 상품권의 거래 관리를 수행하기 위한 상품권 관리 컴푸터와, 상기 상품권 관리 컴퓨터로부터 상품권 발권 결과를 수신하여 사용자휴대단말기로 상품권 발권 통지 및 모바일 상품권 생성하기 위한 모바일 상품권 컴퓨터를 포함하고, 상기 모바일 상품권 컴퓨터는 상기 상품권 관리 컴퓨터로부터 상품권 발권 결과 정보를 수신하여 상기 사용자 휴대단말기에 상품권 발권 메시지를 WAP사이트 주소 또는 콜백URL을 포함하여 전송하고, 상기 사용자 휴대단말기에서 상기 WAP사이트 또는 콜백URL로 사이트에 접속하여 상품권을 수령하고, 상기 상품권을 사용하기 위해서 상기 사용자 휴대단말기로 상기 사이트에 접속하여 사용할 상품권을 선택하여 상품권이미지를 표시시키고, 상품권사용처 컴퓨터에서는 상기 상품권 정보를 상기 상품권 관리 컴퓨터로 전송하여 인증을 받는 것을 특징으로 하는 모바일 상품권 처리 시스템 및 그 방법이 제시된다.
Patent KR-20130054603-A (KR)
Title: Apparatus and method for treating fuel
Inventor: KIM YONG MIN
IPC: H01M8/06
Filed: 2011-11-17
Abstract: PURPOSE: An apparatus and method for treating fuel is provided to maintain high hydrogen yield and low carbon monoxide yield and to maintain sufficient temperature difference between an auto-thermal reforming reaction and hydrogenation reaction. CONSTITUTION: An apparatus(100) for treating fuel comprises an auto-thermal reformation reactor(10) which conducts an auto-thermal reforming reaction; a hydrogenation reactor(30) which is located opposite the auto-thermal reformation reactor; and an internal heat exchanger(20) between the auto-thermal reformation reactor and the hydrogenation reactor. The result of the auto-thermal reformer is supplied to the hydrogenation reactor through the internal heat exchanger, as a reactant after heat exchanging. [Reference numerals] (AA) Reactant(Ethanol + Water + Air)
Patent KR-20120055468-A (KR)
Title: Image processing apparatus, image processing method, and non-transitory storage medium
Inventor: NODA TAKESHI
IPC: A61B6/03
Filed: 2011-11-22
Abstract: PURPOSE: An image processing device, an image processing method, and a non-transitory storage medium are provided to obtain a tomography image with high quality by reversely projecting a projection image obtained by a tomosynthesis. CONSTITUTION: An obtaining unit(108) obtains a plurality of projection data outputted from a 2D detector in a tomosynthesis photographing process. A reconfiguration unit(117) performs an analytical reconstruction processing of a tomography image of an object from the plurality of projection data without converting the projection data into virtual projection data on a virtual CT detection surface which is vertical to an irradiation center direction of a radiation source.
Patent KR-20130057895-A (KR)
Title: Electric compressor
Inventor: PARK GUN WOONG
IPC: F04C29/00
Filed: 2011-11-24
Abstract: PURPOSE: An electric compressor is provided to secure insulation between a stator coil and a driving unit housing by forming an insulating layer in a part of the inner surface of the driving unit housing which may contact the stator coil. CONSTITUTION: An electric compressor comprises: a driving unit(100) which generates drive torque by the interaction between a stator(140) and a rotor; a compression unit(200) which comprises a rolling scroll and a fixed scroll installed to rotate relatively within a compression unit housing(210); and a control unit(300) which is electrically connected to the stator of the driving unit and controls the operation of the driving unit. An insulating layer is formed in a part of the inner surface of a driving unit housing(110) to secure insulation against a coil(141) of the stator.
Patent KR-20130058922-A (KR)
Title: Solubility pulp made from dioscorea batatas
Inventor: SONG IN YOUNG
IPC: D21C3/24
Filed: 2011-11-28
Abstract: PURPOSE: A pulp for dissolution, derived from Dioscorea batatas is provided to enhance production yield and to minimize discharge of environmental pollutants by preparing pulp from Dioscorea batatas using microorganisms. CONSTITUTION: A method for fabricating a pulp for dissolution, derived from Dioscorea batatas comprises: a step of removing seeds and leaves from Dioscorea batatas and cutting Dioscorea batatas in a cross-section direction; a step of screening and washing Dioscorea batatas(101); a step of peeling to obtain a stalk(102) and producing a hair chip(103); a step of adding white-rot fungi to the hair chip(104); a step of adding water or steam, and sulfur dioxide or sulfuric acid to the hair chip and dissolving hemicelluloses(105); a step of administering the hair chip to a digester and digesting with a liquid containing water, alkali, and anthraquinone in a ratio of 1:2.5-3.0(Dioscorea batatas:liquid) at high temperature(106); a step of removing foreign materials(107); a step of adding the digester and selecting(108) pulp; a step of washing the pulp to remove the liquid, and concentrating(109); a step of bleaching the pulp(110); a step of treating with acid and washing the pulp to remove metal ions(111); and a step of rolling the pulp(112). [Reference numerals] (101) Pre-treat; (102) Peel; (103) Finely cut; (104) Treat microorganisms; (105) Pre-hydrolyze; (106) Cook; (107) Dedust; (108) Refine; (109) Wash and concentrate; (110) Bleach; (111) Treat with acid/Wash; (112) Manufacture a roll; (AA) No; (BB) Yes
Patent KR-20130059038-A (KR)
Title: Double seal module of shock absorber
Inventor: LEE HAE WON
IPC: F16F9/36
Filed: 2011-11-28
Abstract: PURPOSE: A double seal module of a shock absorber is provided to doubly prevent oil leakage by equipping an oil seal and a sub seal. CONSTITUTION: A double seal module of a shock absorber comprises a piston rod(100), a rod guide(200), an oil seal(300), and a sub seal(500). The piston rod reciprocates a cylinder(400). The rod guide is mounted on the top end of the cylinder and supports the reciprocation of the piston rod. The oil seal is mounted on the top of the rod guide and prevents oil leakage inside the cylinder due to reciprocation of the piston rod. The sub seal is shaped into a ring along the top edge of the oil seal and prevents the inflow of foreign substances into the oil seal from the top of the cylinder by being in touch with the outer circumference of the piston rod.
Patent KR-20120064039-A (KR)
Title: Developing method and developing apparatus and coating and developing apparatus with it
Inventor: SADA TETSUYA
IPC: H01L21/027
Filed: 2011-12-07
Abstract: PURPOSE: A developing method, a developing apparatus, and a coating and developing processing system including the same are provided to obtain a uniform photo-resist pattern by controlling substrate returning speed when supplying a developing solution and eliminating the developing solution. CONSTITUTION: A first transferring device returns a substrate. An exposed photo-resist film is formed on the surface of the substrate. A blow unit(30D) has a blow nozzle(51) and a third transferring device. The blow nozzle eliminates a developing solution covering the surface of the substrate by discharging gas. The third transferring device returns the substrate toward the blow nozzle. A controller controls the first transferring device and the third transferring device. A rinse unit has a rinse solution supplying nozzle. The rinse solution supplying nozzle supplies a rinse solution to the surface of the substrate in which the developing solution is eliminate.
Patent KR-20130065167-A (KR)
Title: P.c improved bow toy and it's method
Inventor: PARK YUNG HO
IPC: F41B5/14
Filed: 2011-12-09
Abstract: PURPOSE: A polycarbonator improved bow toy and a manufacturing method thereof are provided to permanently transform by easily curving a bow stick made of a polycarbonator board, to maintain a restoring force and elasticity, and to manufacture with a low cost. CONSTITUTION: A manufacturing method of a polycarbonator improved bow toy comprises: a step of forming the bow in a curved shape without heating to a polycarbonator board; a step of inserting an auxiliary board between a handgrip and a bow stick to make the auxiliary board which is greater than the handgrip of 25mm; and a step of covering a steel in a tube shape between the end of a bow and a side of the handgrip to save a workforce and obtain safety.
Patent KR-20120067319-A (KR)
Title: Process for core-shell impact modifiers and impact modified thermoplastic composition with enhanced hydrolytic resistance
Inventor: NAVARRO CHRISTOPHE
IPC: C08L101/00
Filed: 2011-12-15
Abstract: PURPOSE: A manufacturing method of a core-shell impact modifier is provided to effectively and economically separate an impact modifier without unnecessary cleansing step or modifying step. CONSTITUTION: A manufacturing method of a core-shell impact modifier comprises: a step of synthesizing core-shell copolymer latex by an emulsion polymerization; a step of controlling the pH of the core shell polymer particle after synthesizing step; and a step of cohering the core shell polymer under the pH of 4-8 by the addition of aqueous electrolyte solution. The thermoplastic polymer composition comprises one thermoplastic polymer, and a core-shell impact modifier obtained through a manufacturing method.
Patent KR-20130018469-A (KR)
Title: Method for preparing volatile fatty acids from the pre-treated extracts of marine biomass residue
Inventor: WOO HEE CHUL
IPC: C12N1/20
Filed: 2011-12-16
Abstract: PURPOSE: A method for preparing volatile fatty acid is provided to simplify the preparation process and to enhance a volatile fatty acid yield. CONSTITUTION: A method for preparing volatile fatty acid comprises: a step of extracting or fractioning marine algae using an organic solvent, and obtaining a marine algae residue; a step of chemically or biologically pre-treating the marine residue and preparing an extract of the marine residue; a step of filtering the extract and obtaining a filtered liquid; and a step of performing anaerobic fermentation of the filtered liquid using an anaerobic microorganism. The chemical pre-treatment includes treatment using an acidic catalyst, an alkali catalyst, a supercritical fluid, or an ionic liquid. The anaerobic microorganism is Clostridium sp., Acetogenium sp., Peptococcus sp., Acetobacterium sp., or Propionobaterium sp. [Reference numerals] (AA) Marine algae; (BB) Extracting organic solvents; (CC) Filtering residues; (DD) Physically chemical/biological pre-treatment; (EE) Pre-treatment extract; (FF) Anaerobic fermentation; (GG) Volatile fatty acid; (HH) Marine algae crude extracts; (II) Collecting bioactive substance(enhancing values); (JJ) Pretreatment residues; (KK) Rapid pyrolysis; (LL) Bio-oil; (MM) Bio-complex material
Patent KR-20130068871-A (KR)
Title: Heat-resistant abs resin composition with excellent processability and resistance for discoloration at high temperature and method for preparing the same
Inventor: JIN SUNG HUN
IPC: C08L25/12
Filed: 2011-12-16
Abstract: PURPOSE: A heat resistant ABS resin is provided to have excellent impact resistance, flowability, heat resistance, processability, and discoloration resistance. CONSTITUTION: A heat resistant ABS resin composition includes a rubber-modified graft copolymer graft polymerized of a cyanate vinyl-based monomer and aromatic vinyl-based monomer; 5-60 wt% of a vinyl-based copolymer polymerized of a vinyl-based monomer, and cyanide monomer; and 15-65 wt% of a terpolymer. The terpolymer is polymerized of 40-70 wt% of α-alkylstyrene, 20-40 wt% of cyanate vinyl-based monomer, and 10-30 wt% of styrene.
Patent KR-20120071345-A (KR)
Title: Film forming apparatus
Inventor: HASEGAWA HARUNARI
IPC: H01L21/312
Filed: 2011-12-21
Abstract: PURPOSE: A film depositing apparatus is provided to efficiently control a deposition rate of a polyimide film by heating a substrate on a substrate holding unit within a temperature range in which heat polymerization reaction generates. CONSTITUTION: A deposition container(60) includes a reaction tube(61) and a heater(62). A supply mechanism(70) includes a source gas supply unit(71) and an injector(72) installed within the deposition container. The source gas supply unit includes a first source gas supply unit(71a) and a second source gas supply unit(71b). The source gas supply unit is connected to a supply tube(73a) of the injector. The injector supplies a first source gas and a second source gas through a supply hole(75) within the deposition container.