baber/WOPTO huggingface dataset:
Patent PT-103960-B (PT)
Title: Sistema reconhecimento automático de matrículas integrado num sistema de cobranças electrónica de portagens
Inventor: ABRANTES ARNALDO JOAQUIM DE CASTRO
IPC: G07B15/06
Filed: 2008-02-07
Abstract: O PRESENTE INVENTO DIZ RESPEITO UM SISTEMA RECONHECIMENTO AUTOMÁTICO DE MATRÍCULAS ALPR (1) (DO INGLÊS ALPR - ADVANCED LICENSE PLATE RECOGNITION) INTEGRADO NUM SISTEMA DE COBRANÇAS ELECTRÓNICA DE PORTAGENS TIPO VIA-VERDE, VIA MANUAL, VIA SEMI-AUTOMÁTICA, MULTI-VIA (MULTILANE) OU EM QUALQUER OUTRA SOLUÇÃO QUE ENVOLVA O RECONHECIMENTO AUTOMÁTICO DE MATRÍCULAS. É ESSENCIALMENTE CARACTERIZADO PELA: OBTENÇÃO DE UMA FOTOGRAFIA PANORÂMICA DA TRASEIRA DE UM VEÍCULO, PARA INSPECÇÃO VISUAL; RECONHECIMENTO AUTOMÁTICO DA MATRÍCULA DO VEÍCULO, VERIFICANDO AS CHAPAS DE MATRÍCULA TRASEIRA E DIANTEIRA; GERAÇÃO DE UMA FOTOGRAFIA FINAL NO FORMATO JPEG (DO INGLÊS JPEG - JOINT PHOTOGRAPHERS EXPERT GROUP) COM APOSIÇÃO DAS MATRÍCULAS DE TRÁS E DA FRENTE SOBRE A IMAGEM PANORÂMICA, ASSIM COMO INFORMAÇÃO SOBRE ESPAÇO E TEMPO; INDEPENDÊNCIA ENTRE A QUALIDADE DAS FOTOGRAFIAS PRODUZIDAS E VARIÁVEIS COMO A ILUMINAÇÃO, AS CONDIÇÕES ATMOSFÉRICAS E A QUALIDADE DAS MATRÍCULAS, ENTRE OUTRAS; COMPREENDENDO PARA O EFEITO: UM SISTEMA DE CÂMARAS PARA AQUISIÇÃO DE IMAGENS; UM SISTEMA DE RECONHECIMENTO AUTOMÁTICO DE MATRÍCULAS (MOTOR) LPR (DO INGLÊS LPR - LICENCE PLATE RECOGNITION); UM MÓDULO DE COMPOSIÇÃO (12) E GERAÇÃO DA FOTOGRAFIA FINAL; E UM MÓDULO DE CERTIFICAÇÃO CERT (13) E ASSINATURA DIGITAL DA FOTOGRAFIA FINAL.
Patent PT-104215-B (PT)
Title: Sistema de pagamento em parques de estacionamento com dispositivos de comunicação de proximidade sem contacto
Inventor: FONSECA JOSE ALBERTO GOUVEIA
IPC: G08G1/14
Filed: 2008-10-15
Abstract: O PRESENTE INVENTO, DIZ RESPEITO A UM SISTEMA DE PRÉ-PAGAMENTO EM PARQUES DE ESTACIONAMENTO, EM QUE O UTILIZADOR POSSUI UM DISPOSITIVO DE COMUNICAÇÃO DE PROXIMIDADE SEM CONTACTO (CARTÃO OU OUTRO). ESTE DISPOSITIVO É PREVIAMENTE CARREGADO, E QUANDO O UTILIZADOR DESEJAR INICIAR UM ESTACIONAMENTO, APROXIMA O DISPOSITIVO DO POSTO DE PAGAMENTO DANDO INÍCIO À CONTAGEM DO TEMPO DE ESTACIONAMENTO. QUANDO PRETENDER TERMINAR O ESTACIONAMENTO, VOLTA A APROXIMAR O DISPOSITIVO DO POSTE DE PAGAMENTO, É RETIRADO AO SEU SALDO O VALOR CORRESPONDENTE AO TEMPO DECORRIDO. A ENTIDADE EXPLORADORA POSSUI UM DISPOSITIVO QUE COMUNICA COM OS POSTOS DE PAGAMENTO, TENDO ACESSO ÀS MATRÍCULAS DOS UTILIZADORES COM O PAGAMENTO VÁLIDO, PODENDO IDENTIFICAR ASSIM OS UTILIZADORES PREVARICADORES. O INVENTO PODE SER APLICADO A PARQUES DE ESTACIONAMENTO FECHADOS, DE CANCELA, OU A PARQUES DE ESTACIONAMENTO ABERTOS, DE RUA. AS FUNCIONALIDADES DISPONÍVEIS PODEM SER CONFIGURADAS, DE ACORDO COM AS NECESSIDADES DOS UTILIZADORES E DOS EXPLORADORES.
Patent PT-108830-B (PT)
Title: Material híbrido de poliuretano e policloreto de vinilo para estofos com elevadaresistência à fissuração.
Inventor: IRENE LOBO
IPC: B32B7/02
Filed: 2012-04-18
Abstract: A INVENÇÃO CONSISTE NUM SUBSTRATO POLIMÉRICO, CONSTITUÍDO POR UMA OU MAIS CAMADAS DE AVESSO CONTENDO POLICLORETO DE VINILO PLASTIFICADO (3, 4 E 5), E UMA OU MAIS CAMADAS DE DIREITO, CONTENDO TERMOPLÁSTICOS ELASTÓMEROS, POLIOLEFINAS OU POLIURETANOS (2), COM EFEITO BARREIRA À MIGRAÇÃO DE CONSTITUINTES DO PVC. DESTA FORMA, PERMITE ELIMINAR O PROBLEMA DE MATERIAIS DE PVC QUE CONSISTE NA FISSURAÇÃO POR FRACA RESISTÊNCIA AO FRIO, ESPECIALMENTE APÓS EXTRACÇÃO ATRAVÉS DE AGENTES EXTERNOS USADOS NA SUA VIDA ÚTIL, NOMEADAMENTE NO AUTOMÓVEL, COMO CREMES, SUOR, GORDURAS, PRODUTOS DE LIMPEZA. O SUBSTRATO POLIMÉRICO, PODE CONTER LACAS (1) E SUPORTES (6) COMO TECIDO, TECIDO NÃO-TECIDO, ENTRE OUTROS. O MATERIAL PODE SER PRODUZIDO POR ENDUÇÃO, FOULARDAGEM, IMERSÃO, RECOBRIMENTO NO SUPORTE OU EM OUTRO SUPORTE, POR FACA OU POR ROLO, SLUSH MOLDING, EXTRUSÃO, CALANDRA, LACAGEM, SPRAY, ENTRE OUTROS, PODENDO SER-LHE CONFERIDO UM ASPECTO ESTÉTICO COM RECURSO A GRAVAÇÃO POR CILINDRO OU EM PAPEL, ENTRE OUTROS.
Patent PT-110859-B (PT)
Title: Obtenção de uma solução a partir de extratos de rosmarinus officinalis l. para utilização como revestimento alimentar.
Inventor: ISABEL C F R FERREIRA
IPC: A23L29/00
Filed: 2018-07-18
Abstract: A PRESENTE INVENÇÃO DESCREVE O PROCESSO DE OBTENÇÃO DE UMA SOLUÇÃO SEMI-SÓLIDA PARA SER USADA COMO REVESTIMENTO DE ALIMENTOS POR IMERSÃO, A PARTIR DE EXTRATOS DE ALECRIM E OUTROS COMPONENTES ANTIOXIDANTES. ESTE PROCESSO DEMONSTRA VÁRIAS VANTAGENS, NOMEADAMENTE: EM RELAÇÃO À OBTENÇÃO DO EXTRATO DE ALECRIM, ESTE É OBTIDO FACILMENTE E SEM RECURSO A SOLVENTES POLUENTES, DEMONSTRANDO AINDA UM BOM RENDIMENTO E UMA FORTE CAPACIDADE ANTIOXIDANTE. EM RELAÇÃO À SOLUÇÃO DE REVESTIMENTO, APRESENTA POUCOS COMPONENTES E TODOS ELES SEM IMPLICAÇÕES NEFASTAS PARA A SAÚDE, ALÉM DO FACTO DE SER COMPOSTA POR COMPONENTES BARATOS E SER DE FÁCIL ELABORAÇÃO, PERMITINDO CONSERVAR OS ALIMENTOS DE UMA FORMA NATURAL E SEM RECORRER A PROCESSAMENTO ADICIONAL OU A UTILIZAÇÃO DE PLÁSTICOS, INDO DE ENCONTRO AO QUE MUITOS ESTUDOS INDICAM ACERCA DA PREFERÊNCIA DOS CONSUMIDORES.
Patent RO-84800-B (RO)
Inventor: LISIECKI ROBERT
IPC: B65D5/74
Filed: 1982-05-29
Abstract: Inventia se refera la un container avînd placi de capat obisnuite, îndoite si placi de bolta legate, cu ajutorul unui ansamblu fata si spate, de placi cu îndoitura-spate, cu placi cu nervuri de etansare interioare, care se extind vertical din placile cu îndoitura spate si limitare între placile cu nervuri etanse exterioare dispuse opus, care se extind vertical din placile-bolta, completate cu placi cu nervuri cu îndoitura-deasupra atasate de aceasta si îndoite deasupra peste placile cu nervuri de etansare interioara, servind pentru a realiza un jgheab rigid, astfel încît sa se usureze procesul de deschidere, în timp ce se elimina o margine bruta de pe buza de turnare si se diminueaza în mod simtitor uzura structurii si alungirea suprafetei de turnare.
Patent TW-228472-B (TW)
Title: Estrogen nucleus derivatives for use in the inhibition of sex steroid activity
Inventor: FAIRNEDE LAPIRA
IPC: A61K31/567
Filed: 1990-01-24
Granted: 1994-08-21
Abstract: Novel derivatives of estrogenic nuclei, contain a side-chainsubstitution of the formula -R^1[-B-R^2-]*L-G and may be used in pharmaceutical compositions as sex steroid activity inhibitors useful in the treatment of both androgen-related and estrogenrelated diseases.
Patent TW-198704-B (TW)
IPC: B65D88/72
Filed: 1991-04-19
Granted: 1993-01-21
Abstract: A reinforcing panel (20) for a liner (10) for a cargo container, said liner (10) having a bottom panel (24), a top panel (26), left and right side panels (30, 32) and back and front panels (36, 34), which are connected together to form a liner body, extends under and is connected to the bottom panel (24) of the liner. There is also provided a cargo container comprising a liner (10) with a reinforcing panel (20) extending under and being connected to the bottom panel (24) of the liner.
Patent TW-326441-B (TW)
Title: Process for isomerizing linear olefins to isoolefins
Inventor: DONALD H POWERS
IPC: C07C5/22
Filed: 1992-06-04
Granted: 1998-02-11
Abstract: A process to convert linear alkenes containing 4 to 6 carbon atoms to methyl branched chain alkenes, which comprises, under temperatures ranging from 340℃ to 440℃ and pressures ranging from 0.5 to 5 atm, contacting a hydrocarbon feed stream containing at least one of the linear alkenes with an isomerizing catalyst, in which the catalyst comprises a one dimensional pore zeolite with one or more maximum pore sizes ranging from 0.42 nm to 0.7 nm which is H-ferrierite or a zeolite with same type of structure.
Patent TW-202399-B (TW)
Title: Automatic setting process for continuous linear tension on lines
Inventor: LIN JENG-HWA
IPC: B21C37/06
Filed: 1992-07-04
Granted: 1993-03-21
Abstract: An automatic setting process for continuous linear tension on a production line comprises the following steps: a. If material is of a given thickness, the relationship between tension and the width of steel strips can be assumed by a linear equation in two variables. b. From the boundary conditions, another linear equation in two variables representing the linear relationship between tension and the width of steel strips can be established. c. Substituting the acquired equation in step (b) into the assumed equation in step (a), we can get an equation of continuous tension covering the thickness factor and the width factor of steel strips.
Patent TW-203601-B (TW)
IPC: A01N47/00
Filed: 1992-07-31
Granted: 1993-04-11
Abstract: Process for the preparation of very pure ureas of the formula phenyl-(NH-CO-NR1R2)n in which phenyl represents an unsubstituted or substituted phenyl or phenylene group and R1 and R2 are either identical and each represent an alkyl group, or are different, in which case R1 represents a hydrogen atom and R2 represents an alkyl or phenyl group, or R1 and R2, together with the nitrogen atom, represent an aliphatic heterocyclic ring and n is the number 1 or 2, by reacting a phenylurea of the formula phenyl-(NH-CO-NH2)n with an amine of the formula NR1R2H at temperatures from 100 to 200 degrees C. in a diluent which is inert under the reaction conditions, the reaction being interrupted before by-products are formed, and the urea which is formed being removed from the starting compounds, and the unreacted starting compounds being returned to the process if appropriate.
Patent TW-229249-B (TW)
Title: Soundproof structure for forced air-cooled engine
Inventor: GUO CHII-HWA
IPC: F02B77/13
Filed: 1993-01-18
Granted: 1994-09-01
Abstract: A soundproof structure for forced air-cooled engine by covering around thecylinder of engine with hood and sending the cooled air into the cylinderalong inside the hood through the intake on the side of hood, which is fromthe fan driven by the crank shaft. It features that on the exterior ofintake the beneath open covering is installed on the hood in order to coverthe intake by uniform space and inside the covering sound-absorbing materialis affixed opposite to the intake.
Patent TW-310519-B (TW)
IPC: H04H20/86
Filed: 1993-12-07
Granted: 1997-07-11
Abstract: A novel advanced set top terminal capable of digital decompression, menu generation, interactivity and other advanced functional capabilities for use in a television program delivery system (200) is described. The invention relates to methods and apparatus for upgrading existing set top terminals (220) to provide menu generation capability and advanced functional capabilities. The invention is particularly useful in television program delivery systems (200) with hundreds of channels of programming, providing (i) menu driven program selection through the addition of an upgrade module (300) or menu generation card and (ii) advanced functional capabilities using a set of hardware upgrades (e.g., 130) and/or an expansion card. Specifically, the invention is an upgradeable system that supports advanced set top functionality through the use of internal software, hardware upgrades, an upgrade module and/or expansion cards. The upgraded hardware generally includes a microprocessor, various input/output ports (e.g., 308), processing circuitry (e.g., 108) and memory (e.g., 116). The invention results in an upgraded set top terminal that supports: menu generation; picture-on-picture displays; program catalogue services; interactive services; telephone caller identification; digital audio reception; VCR control; HDTV reception; and backyard satellite system interoperability, among other features and capabilities.
Patent TW-230807-B (TW)
IPC: G06F9/38
Filed: 1993-12-29
Granted: 1994-09-21
Abstract: A method and system for enhanced instruction dispatch efficiency in a superscalar processor system having intermediate storage buffers (60), general purpose registers (62), and a storage buffer index (58). A particular storage buffer (60) is assigned to a destination operand within a selected multiple scalar instruction. A relationship between the particular intermediate storage buffer (60) and a designated general purpose register (62) is stored in the storage buffer index (58) when the instruction which has been dispatched is replaced in the dispatcher by another instruction. Results of execution from the selected multiple scalar instruction are stored in the particular intermediate storage buffer (60) when the selected instruction is executed. The storage buffer index (58) is used to determine which storage buffers (60) to use as source operands for those instructions which are dispatched between the time that a storage buffer (58) has been assigned for a specific general purpose register (62) and the results of execution are moved from the storage buffer (60) into the general purpose register (62). <IMAGE>
Patent TW-294651-B (TW)
IPC: C07C259/18
Filed: 1994-01-19
Granted: 1997-01-01
Abstract: The invention relates to the compounds of the formula I <CHEM> wherein the C(=NOH)-NH2 group may be in tautomeric form; and pharmaceutically acceptable salts thereof, in which:  R1 is amino or amino which is mono- or disubstituted X1 and X3, independently of one another, are oxygen (-O-) or sulphur (-S-); and X2 is a divalent aliphatic hydrocarbon radical which may be interrupted by an aromatic radical; The compounds are useful, for example, as selective LTB4 receptor antagonists in the treatment of conditions or syndromes in mammals which are responsive to LTB4 receptor antagonism. They are prepared in a manner known per se.
Patent TW-311140-B (TW)
IPC: C07F9/572
Filed: 1994-06-14
Granted: 1997-07-21
Abstract: PCT No. PCT/EP94/01980 Sec. 371 Date Dec. 18, 1995 Sec. 102(e) Date Dec. 18, 1995 PCT Filed Jun. 17, 1994 PCT Pub. No. WO95/00522 PCT Pub. Date Jan. 5, 1995Compounds of formula I are disclosed,   <IMAGE>   as well as processes for their production and pharmaceutical agents containing these compounds suitable for treating disorders of calcium metabolism.
Patent TW-267111-B (TW)
Title: Process of thermal insulation for exterior of color steel plate
Inventor: UENG CHIAN-YOW
IPC: B05D7/14
Filed: 1994-06-15
Granted: 1996-01-01
Abstract: A process of thermal insulation for exterior of color steel plate, which comprises using two different materials to undergo two processing: (a) coating a layer of mineral powder on the exterior of the color steel plate as the substrate in which the mineral powder comprises plaster, quartz, mica, vermiculite, etc.; (b) coating a layer of thermal insulation material on the surface of the mineral powder layer which covers the granular surface of the mineral powder in which the thermal insulation coating constitutes the smooth upper layer of non-tacky surface.
Patent TW-245684-B (TW)
Title: Compactor of wastes and compaction process of wastes (2)
Inventor: SUZUKI YOSHINORI
IPC: B65F1/10
Filed: 1994-09-06
Granted: 1995-04-21
Abstract: A compactor of wastes, which mainly comprises using compaction plates to compress wastes in the compaction room to reduce volume, which is characterized in that: 2 links are crisscrossed, the upper end of an expansion body is connected in multi-stage in the up-and-down direction by links which are rotably connected by their crisscross part while the compaction plates being installed on its lower end, the cylinder part and piston rod of the compaction cylinder are pivotally connected to the compaction cylinder in the crisscross section of link rods.
Patent TW-357451-B (TW)
Title: RISC processor core architecture optimized to reduce circuit area
Inventor: SOENEN ERIC G
IPC: H01L25/18
Filed: 1994-12-28
Granted: 1999-05-01
Abstract: An integrated circuit configurable as a transmitter/receiver includes a reduced instruction set processor core architecture. The architecture uses 1 byte (8 bits) data, 12 bits addressing, and 18 manipulation instructions and allows a processing unit to reside in a semiconductor die area of about 1000-1500 square mills by reducing address bus space, the number of registers, reduction of memory, and reduction of Instruction Programmable Logic Array (IPLA).
Patent TW-266277-B (TW)
Title: Videogame system and methods for enhanced processing and display of graphical character elements
Inventor: ADRIAN STEPHENS
IPC: G09B5/06
Filed: 1994-12-31
Granted: 1995-12-21
Abstract: Videogame systems and methods are provided to enhance the capability of the videogame system controller and data storage to provide graphic character element storage and processing. A display list technology utilizes an intentionally generated, location-specific vertical interrupt to implement a routine to modify or to alter existing graphical character elements. A second technique involves the definition of a small portion of the graphics map which is displayed differently than the balance of the graphics map because the stored priority bit is expressed in the defined area, but suppressed and replaced in all other areas. The third technique employs a virtual character element library to map the character elements appearing on the display, and recognizes available space within the video random access memory character element storage to provide a dynamic memory space.
Patent TW-367223-B (TW)
Title: Naphthoquinone derivative compounds for use as a fungicide, insecticide and/or acaricide
Inventor: KHAMBAY BHUPINDER PALL SINGH
IPC: A01P7/02
Filed: 1995-05-03
Granted: 1999-08-21
Abstract: The invention relates to a fungicidal, insecticidal and/or acaricidal composition which comprises a carrier and, as active ingredient, a compound of general formula I, in which R represents a hydrogen atom, and an ethanoyloxy group or a hydroxyl group or salt thereof. Compounds of formula I may be derived from plants of the genus Calceolaria and the invention therefore also relates to extracts of a Calceolaria species and their use as pesticides. The invention further relates to a compound of general formula I, in which R represents a hydrogen atom, and salt thereof.
Patent TW-374846-B (TW)
Title: Multilayer glass
Inventor: GOTO KIYOKAZU
IPC: C03C27/12
Filed: 1996-02-09
Granted: 1999-11-21
Abstract: The invention is to provide a thin multilayer glass, which can effectively avoid dew condensation, formed the multilayer glass G by laminating sheets of glass 1 with a spacer 21, which comprises a sheet of desiccant having a thin-plate-like shape, interposed between the sheets, and sealing the peripheries.
Patent TW-357200-B (TW)
Title: Unidirectional fabric and method and apparatuses for forming the same
Inventor: WOODSIDE ANDERW B
IPC: B65H54/02
Filed: 1996-09-05
Granted: 1999-05-01
Abstract: An unidirectional fabric apparatus, being formed by at least a a plurality of strands of filaments, including the apparatus: at least a guide sleeve for housing the melting glass for forming a plurality of glass fibers; a tension device for tensioning the glass filament from the guiding sleeve; a feeder for feeding polymer substrate to the glass filament; a gathering mechanism, for gathering said glass filament to form at least a plurality of strands of filaments; and fiber forming mechanism apt for forming at least an unidirectional filament of a plurality of strands.
Patent TW-526246-B (TW)
Title: Fiber-reactive dyes, their preparation and their use
Inventor: REICHERT HANS
IPC: C09B62/513
Filed: 1996-10-29
Granted: 2003-04-01
Abstract: Compounds of the formula (1) in which the variables are as defined in the claims, which are suitable as fibre-reactive dyes for dyeing or printing widely varying fibre materials are described. Lockable fixing mechanism for the pulling loop (3) on the zipper (4) of a suitcase, bag or the like with a hole-down pin (31) which is mounted on one side in a housing (6) and over the free end of which the opening (32) of the pulling loop (3) may be placed, applying tension to a spring-loaded ejector (33) and with a locking section (21) that may be dislocated inside the lock housing (6) which secures the removal of the pulling loop (3) from the hold-down pin (31), the dislocation of which may be released/blocked by the actuation of the lock, characterized by the fact that the locking section (21) latches in a release position which allows for the removal of the pulling loop (3) by means of the ejector (33).
Patent TW-312077-B (TW)
Title: The manufacturing method for speaker of sound box
Inventor: LIN WENN-SHAN
IPC: H04R1/28
Filed: 1997-01-24
Granted: 1997-08-01
Abstract: A manufacturing method for sound box. Its manufacturing method is:1. Material selection: select mature bamboo material, through cut and straighten bamboo fiber, then smooth the surface into stripe-shaped bamboo piece; 2. Carbonized process: put bamboo piece into closed vaporizer, which is having HO, NaCO, Sulphur steam in 300 deg.C, then add 3-3.5 kg w/cm pressure and keep it for 25-30 min. to carbonize bamboo piece; 3. Drying process: rapidly dry bamboo piece by hot air; 4. Forming bamboo board: arrange and glue several bamboo pieces together into required area, and add 1.5-3 ton pressure to press into bamboo board; 5. Forming bamboo block: stack and glue several bamboo boards together by serially according to long and lateral bamboo fiber, then add more than 3 ton pressure to press into bamboo block; 6. Product: cut bamboo block into required sound box.
Patent TW-344143-B (TW)
Title: Method for manufacturing a semiconductor device
Inventor: ONO MASAHIRO
IPC: H01L23/52
Filed: 1997-05-28
Granted: 1998-11-01
Abstract: A method for manufacturing a semiconductor apparatus in which an impurity diffusing region is formed on the surface layer of a semiconductor substrate; a first convex portion and a second convex portion are formed on both sides of the impurity diffusing region of the semiconductor substrate; an electrode wiring film consisted of a polysilicon film and a metal silicide film is formed in a recess clamped by the first convex portion and the second convex portion into capable of contacting with the impurity diffusing region; which is characterized in comprising: a process of forming a first polysilicon film on the first convex portion and the second convex portion and the impurity diffusing region; a process of implanting ions into the first polysilicon film to make the first polysilicon film conductive; a process of forming a second polysilicon film having a film thickness larger than that of the first polysilicon film ; a process of implanting ions into the second polysilicon film to make the second polysilicon film conductive; a process of forming a metal silicide film on the second polysilicon film; and a process of carrying out an etching process of circuit patterning on the metal silicide film, and the first and second polysilicon films, to form an electrode wiring film.
Patent TW-355909-B (TW)
Title: Red luminescent material and organic electric luminescent component using the same
Inventor: FURUKAWA KENJI
IPC: H05B33/20
Filed: 1997-06-28
Granted: 1999-04-11
Abstract: A kind of red luminescent material used by organic electric field luminescent component characterized in that it is composed of porphyrin.
Patent TW-424113-B (TW)
Title: Comopsite sputtering cathode assembly and sputtering apparatus with such composite sputtering cathode assembly
Inventor: HIGUCHI YASUSHI
IPC: C23C14/34
Filed: 1997-10-21
Granted: 2001-03-01
Abstract: A sputtering apparatus includes a vacuum housing, a substrate holder disposed in the vacuum housing for holding a substrate thereon, and a composite sputtering cathode assembly disposed in the vacuum housing. The composite sputtering cathode assembly has a plurality of targets and a plurality of shields each disposed between adjacent ones of the targets. The targets are disposed in confronting relation to the substrate held on the substrate holder. Those sputtering particles expelled from the targets which are directed obliquely to the substrate hit the shields and do not reach the substrate. Only those sputtering particles which are directed substantially perpendicularly to the substrate are applied to the substrate. Minute holes in the substrate which have a high aspect ratio are filled with a thin film with a good coverage. The distribution of film thicknesses on the substrate is made uniform when the substrate and the targets rotate relatively to each other.