baber/WOPTO huggingface dataset:
Patent KR-20090042544-A (KR)
Inventor: GO DAE HYUN
IPC: G06Q30/02
Filed: 2007-10-26
Abstract: 본 발명은 인터넷 판매대행업체가 지역을 기반으로 판매망을 구축한 오프라인 점포를 대상으로 샵 인 샵 가맹점을 체결하여 소비자가 인터넷 판매대행업체의 사이트에 개설된 샵 인 샵 코너를 통해 온라인으로 물품을 구매였을 때 소비자의 동선에서 가까운 가맹점에서 수취토록 함에 따라 유통비용 및 중간마진을 절감하여 소비자에게 가격할인의 혜택을 주게되고 가맹점으로 하여금 고정고객의 확보와 함께 매출증진을 도모할 수 있도록 한 인터넷을 이용한 샵 인 샵 판매대행방법에 관한 것으로, 
     인터넷 판매대행을 운영하는 운영자의 사이트에 샵 인 샵 코너를 구축하고 지역을 기반으로 하는 오프라인 점포와 샵 인 샵 가맹점 계약을 체결하여 운영자의 사이트를 통해 구매한 물품을 소비자에게 전달하는 체계를 마련하는 샵 인 샵 마케팅 준비단계와; 상기 운영자의 사이트에 개설된 샵 인 샵 코너를 통하여 소비자가 원하는 물품을 인터넷에서 구매하고 결재를 하는 온라인 판매단계와; 상기 인터넷에서 구매한 물품을 소비자의 동선에 가까운 오프라인의 가맹점을 창구로 소비자가 물품을 직접적으로 수령하게 되는 수취단계와; 상기 운영자의 샵 인 샵 코너를 통해 구매가 이루어진 후 소비자가 결재한 구매금액 중 물품의 공급원가와 제반 수수료를 제외한 나머지의 유통비용 및 중간마진을 당해 가맹점에서 사용할 수 있는 포인트로 적립 부여하는 단계와; 소비자가 해당 가맹점에서 적립된 포인트를 사용하여 필요물품을 구입하였을 때 운영자는 그 포인트 금액을 가맹점에 현금으로 돌려 주는 시스템을 특징으로 한다. 
       
     샵 인 샵, 인터넷, 판매대행, 오프라인
Patent KR-20090045557-A (KR)
Inventor: JANG JYONG SIK
IPC: G01N31/00
Filed: 2007-11-02
Abstract: 본 발명은 잉크젯 프린터용 수분산 전도성 폴리아닐린 나노 입자 잉크의 제조와 화학센서(chemical sensor)로의 응용에 관한 것으로, 잉크젯 프린터용 잉크로서 전도성 고분자 나노 입자 용액을 이용하고, 컴퓨터 프로그램으로 잉크젯 프린터를 제어하여 상기 전도성 고분자 나노 입자 잉크의 양을 조절함으로써, 다양한 지지체 위에 도포하여  전도성 고분자 박막 센서 변화기(sensor transducer)를 제조한 뒤, 전기적 탐지기(electrical detector)와 연결하여 화학분석물(analyte)의 종류와 농도 변화에 따른 실시간 저항변화를 기록함으로써 화학센서의 센서 변환기로서의 가능성을 제시하였다.  
     본 발명에 따르면, 전도성 고분자 잉크 용액을 간단하고 저렴한 잉크젯 프린팅 공정을 이용하여 원하는 모양과 두께의 전도성 고분자 박막을 형성하고 감음성이 우수한 화학 센서를 용이하게 제조할 수 있는 장점을 가진다. 또한 전도성 고분자 나노입자의 분산 용매로 물을 사용함으로써 제조된 전도성 폴리아닐린 나노입자 잉크는 친환경적 잉크 소재라는 장점이 있다. 더욱이, 제조 공정 과정 측면에서 본 발명에서 제조될 수 있는 화학 센서는 사용되는 고분자 잉크 용액의 손실을 최소화하여 공정 중에 폐기물이 발생하지 않는 고효율 공정이라는 장점을 갖는다.  
       
      폴리아닐린,  나노 입자, 전도성 잉크, 잉크젯 프린터, 화학센서
Patent KR-20090045717-A (KR)
Title: 반도체 소자의 제조 방법
Inventor: LEE SUNG KWON
IPC: H01L21/3205
Filed: 2007-11-02
Abstract: 본 발명은 반도체 소자의 제조 방법에 관한 것으로, 본 발명에 의한 반도체 소자의 제조 방법은 기판 상에 저유전율막을 형성하는 단계; 상기 저유전율막 상에 포토레지스트 패턴을 형성하는 단계; 상기 포토레지스트 패턴을 식각 베리어로 상기 저유전율막을 식각하여 상기 기판을 노출시키는 개구부를 형성하는 단계; 상기 개구부의 측벽에 탄소를 포함하지 않는 스페이서를 형성하는 단계; 및 상기 포토레지스트 패턴을 제거하는 단계를 포함하고, 상술한 본 발명에 의한 반도체 소자의 제조 방법은, 저유전율막 식각 후 그 측벽에 스페이서를 형성함으로써 후속 포토레지스트 스트립 공정시 저유전율막의 손상을 방지할 수 있다. 
       
     저유전율막, 포토레지스트 스트립, 스페이서
Patent KR-20090045978-A (KR)
Inventor: CHOI JAE HOON
IPC: H04W4/12
Filed: 2007-11-05
Abstract: 본 발명은 스팸 필터링 서비스 서버와 이를 이용한 메시지 서비스 시스템과 그 방법에 관한 것으로, 단문 메시지에 대해 메시지 내용 등을 검사하여 서비스 서버 차원에서 스팸 필터링을 수행함으로써 필터링의 정확성이 향상되며, 스팸으로 분류된 단문 메시지에 대해 사용자가 복구를 요청할 때에는 기 약정된 복구 식별 정보를 이용함으로써 다시 스팸으로 분류되지 않는 이점이 있다. 
     
     단문 메시지, 스팸 필터링, 스팸 메시지 복구
Patent KR-20080048923-A (KR)
Title: Oral solid composition reducing to the gastrointestinal tract
Inventor: MIYADAI NOBUO
IPC: A61K9/16
Filed: 2007-11-08
Abstract: An oral solid composition is provided to prevent a digestive tract irritating drug from irritating the digestive tract by wet-granulating the drug and a water-swelling polymer with water or water-containing alcohol. An oral solid composition comprises a digestive tract irritating drug and a water-swelling polymer such as lowly substituted hydroxypropylcellulose, croscarmellose sodium, crospovidone, carboxymethylcellulose calcium, carboxymethylcellulose sodium, carboxymethylcellulose and crystalline cellulose and is obtained by wet-granulation with water or water-containing alcohol.
Patent KR-20080058171-A (KR)
Title: Camera tampering detection
Inventor: MARKUS SKANS
IPC: H04N7/18
Filed: 2007-11-20
Abstract: A camera tempering detecting method is provided to achieve a small amount of memory and simplification and nearly remove the necessity for processing capacity. Images forming an image sequence are continuously captured by an image sensor of a monitoring camera and provided to an image processor of the monitoring camera(102,104). An edge of an object is detected from an image which will be analyzed(106). A generalized edge image(I1) is correlated with a reference edge image(I2) bringing correlation values(C(I1,I2))(108). The correlation values(C(I1,I2)) are compared with a correlation threshold value(CT)(110). If the correlation values are bigger than or equal to the correlation threshold value(CT) and the correlation values show a tempered image viewing angle, a counter(npt) for counting the number of continuously analyzed and tempered images is reset(114,124). After the counter counts a current analysis result, a result value of the counter is compared with a threshold value(126,128). If the number of continuously analyzed images reaches the predetermined threshold value, the counter is reset and a reference edge image is updated(129,130).
Patent KR-20080094543-A (KR)
Title: Structure for reinforcing head of pile
Inventor: KIM HYOUNG KOO
IPC: E02D27/12
Filed: 2007-11-22
Abstract: A structure for reinforcing a head of a pile is provided to shorten working hours and to improve constructability by connecting a reinforcing bar to a pile such as a steel pipe or an H-beam directly and reducing the number of components. A structure for reinforcing a head of a pile comprises a support plate(20) inserted to the inside of a pile(10), and many reinforcing bars(30) installed to the support plate and the pile by bolts(40), wherein many bolt holes(11) are formed at regular intervals on the circumference to connect reinforcing bars. The support plate comprises a bottom(21) formed in a circle to be inserted to the inside of the pile, and many reinforcing bar connections(23) extended on the circumference of the bottom toward the upper part and provided with one or more bolt holes along the circumferential direction.
Patent KR-20090053249-A (KR)
Title: 범퍼커버 고정브라켓
Inventor: KIM YOUNG IN
IPC: B60R19/02
Filed: 2007-11-23
Abstract: 본 발명은 휀더판넬(10) 내부에 장착되어 범퍼커버(30)를 부착시키는 사이드브라켓(20)에 관한 발명으로, 휀더플랜지부(31)와 결합하여 상기 사이드브라켓(20)을 상기 휀더판넬(10)에 고정시키는 사이드플랜지(21)와, 상기 범퍼커버(30)를 고정시키는 걸림부(22)를 포함하여 형성되는 것을 특징으로 하는 공지의 범퍼커버 고정 브라켓에 있어서, 상기 걸림부(122)는 연직방향으로 돌출 삽입 되는 걸림턱기둥(122)으로 형성되는 것을 특징으로 하여, 범퍼커버의 분리가 용이하도록 범퍼커버를 고정시키는 걸림턱 구조를 조정하여 A/S 및 수리를 위해 범퍼커버를 손쉽게 탈거할 수 있도록 구성하여 제품의 조립성과 정비성을 향상시키는 범퍼커버 고정브라켓에 관한 발명이다. 
       
     범퍼커버, 브라켓
Patent KR-20090054188-A (KR)
Inventor: LEE EUN KU
IPC: C08G65/20
Filed: 2007-11-26
Abstract: 본 발명은 헤테로폴리산 촉매를 이용하여 테트라하이드로푸란 단독중합체 또는 테트라하이드로푸란 공중합체를 제조하는 방법에 관한 것으로, 보다 상세하게는 반응 개시단계에서 pH가 5.5 이하인 하이드로늄 이온수 (Hydronium ion water, H 3 O + )를 반응개시제로 이용하여 THF 중합체를 제조하는 방법에 관한 것이다. 
       
     헤테로폴리산, 하이드로늄 이온수, 테트라하이드로푸란, THF 중합체
Patent KR-20090054250-A (KR)
Inventor: KIM HYE WON
IPC: A61K8/19
Filed: 2007-11-26
Abstract: 본 발명은 소성 타입의 메이크업 화장료에 관한 것으로 구상 및 판상 파우더의 처방상 배합 자유도가 높으면서 지속성이 높은 메이크업 조성물에 관한 것이다. 보다 상세하게는 실리콘 점증제가 분산된 휘발성 솔벤트와 파우더를 혼합하여 반죽상으로 만든 후 압축 사출 공정을 통해 제형화한 다음 건조 공정을 거쳐 제조되며, 구상 및 판상 파우더를 배합 한도의 제약없이 사용할 수 있고 피부 부착성 및 지속성이 높으면서도 파우더리한 사용감을 가지는 소성 타입 메이크업 조성물에 관한 것이다.  
     소성, 부착성, 지속성, 실리콘 점증제, 휘발성 솔벤트, 사출
Patent KR-20090054589-A (KR)
Title: Liquid crystal display device
Inventor: KIM KYUNG HYUN
IPC: G02F1/13357
Filed: 2007-11-27
Abstract: An LCD is provided to reduce assembling time and material cost in a modulation process. An LCD(Liquid Crystal Display) comprises an LC panel, an optical sheet, a lamp(124), a reflector, a panel seating jaw(157), a cover bottom(150), and a top cover. The optical sheet is interposed in a lower part of the LC panel. The lamp is disposed in a lower part of the plurality of optical sheets. The reflector is disposed in a lower part of the lamp. The reflector is settled in the panel seating jaw. The panel seating jaw supports the LC panel. In the cover bottom, sheet insertion holes in which both end edges of the plurality of optical sheets are inserted are formed. The top cover surrounds a front edge of the LC panel, and is combined with the cover bottom.
Patent KR-20090054627-A (KR)
Title: Method and apparatus for allowing media transfer protocol device to manage media file
Inventor: PARK YOUNG MIN
IPC: G06F9/06
Filed: 2007-11-27
Abstract: A method through which an MTP device manages media files and an apparatus therefor are provided to limit the number of files which can be included in one folder on the file system of the MTP device, thereby improving the file transfer rate through the MTP. In case the number of files of the first folder which is designated as a parent object of a media file is a predetermined threshold value or greater, an MPT host generates the second folder on the file system of an MTP(Media Transfer Protocol) device(340,350). The media file is stored in the generated second folder(360). The parent object of the media file is registered as the first folder in a database of the MTP device(380).
Patent KR-20090055735-A (KR)
Title: Frame structure of assembly table
Inventor: KIM IN SUP
IPC: A47B3/08
Filed: 2007-11-29
Abstract: A frame structure of the folding table is provided, which completely receives the shelf combined with the bottom side of the upper support part in the leg and the upper support part. A frame structure of the folding table comprises: an upper frame(2) assembled with the bottom surface of the upper plate(1); a leg(3) which is foldably fixed to both end edges of the upper frame; a foldable joint(5) which is foldable by the fixation pin(7); a shelf(6) which is rotatably connected to the fixture(9) fixed to joint fixing frame(8) and is combined with one side of the joint; a protrusion(10) which is formed to be protruded outside in the center of the lower joint; a fixing hole(11) which penetrates the protrusion; and an assembly screw(12).
Patent KR-20090058253-A (KR)
Title: Apparatus for loading cargo
Inventor: PARK YONG IL
IPC: B65G1/04
Filed: 2007-12-04
Abstract: A cargo loading apparatus is provided to classify cargo regardless of kind or amount and thereby load and unload cargo without using a palette. A cargo loading apparatus comprises horizontal and vertical transfer parts(110,120) and a pair of cargo transport units(140a,140b). The horizontal transfer part moves along a transfer rail(101) to a cargo loading area and conveyors(102a,102b). A transfer rail(112) of rectangular frame structure is formed lengthwise on the inside surface of the horizontal transfer part. The vertical transfer part moves along the transfer rail of the horizontal transfer part in the longitudinal direction. A transfer rail(121) of rectangular frame structure is formed lengthwise on the inside surface of the vertical transfer part. The cargo transport units move along the transfer rails of the horizontal and vertical transfer parts in the longitudinal direction so as to transfer cargo to the left or right and load or eject the cargo to the cargo loading area.
Patent KR-20090059475-A (KR)
Title: System for providing broadcasting services using internet
Inventor: JUNG YONG JU
IPC: H04N21/2343
Filed: 2007-12-06
Abstract: A broadcasting service providing system using the Internet is provided to offer a customized broadcast service so that a user can view a broadcast program at a desired time and place and through a desired method. A broadcasting service providing system using the Internet comprises a contents storing unit(10), a writing unit(20), and an application unit(30). The contents storing unit stores contents data for a broadcast service using the Internet. A writing unit generates highlight data by analyzing the stored contents data. According to a request of a user's mobile terminal, the application unit provides a streaming service for the highlight data or stored contents data.
Patent KR-20090060582-A (KR)
Title: Camera module
Inventor: KIM MIN SOO
IPC: H04N5/225
Filed: 2007-12-10
Abstract: A camera module for reducing the overall height of a camera module is provided to exclude a separate sensor recognition mark for attaching the image sensor by forming a groove on a ceramic printed circuit board. A camera module comprises a lens unit, holder, a ceramic printed circuit board(71) and an ISP(Image Signal Processor). A lens barrel is formed in the lens unit. A holder comprises an IR cut-off filter. The holder is combined with the lens unit. The ceramic printed circuit board comprises an image sensor(41). The ceramic printed circuit board is combined with the holder. The ISP is inserted into the first groove formed in the ceramic printed circuit board.
Patent KR-20090060734-A (KR)
Title: Method for cooling twin roll strip caster
Inventor: KIM WAN SOO
IPC: B22D11/16
Filed: 2007-12-10
Abstract: A cooling method of a twin roll strip caster is provided to secure the shape of slab suitable for after treatment using inexpensive casting roll by correcting the strip into a symmetrical shape. A cooling method of a twin roll strip caster comprises a step of supplying a first cooling water for cooling a first casting roll(120) along a rotation shaft(110) in a first cooling water direction(122), a step of supplying a second cooling water for cooling a second casting roll(130) along the rotation shaft in a second cooling water direction(132) opposed to the first direction, and a step of differentiating the flow rates of the first and the second cooling water by varying the flow rate of the first or the second cooling water. The heat absorption rate of the first casting roll is greater than that of the second casting roll.
Patent KR-20090061984-A (KR)
Title: Apparatus and method for auto-preheating and starting in vehicle
Inventor: KIM JU HO
IPC: F02N19/02
Filed: 2007-12-12
Abstract: An apparatus and a method for auto-preheating and starting in a vehicle are provided to start an engine without turning an ignition key into start position after the pre-heating of an engine is completed. An apparatus for auto-preheating and starting in a vehicle comprises a start key(11) outputting ignition II signal, a temperature sensor(12) detecting cooling water temperature, a battery(13) supplying voltage required to an initial start, a control part(10) subject to the voltage of a battery, a pre-heater(15) preheating an engine through a control of the control part in case the ignition II signal from the start key is input to controller, and a starter motor(16) working in case an ignition II signal from the start key is input to the controller and the operation of a pre-heater is completed.
Patent KR-20090062900-A (KR)
Title: Photosensitive resin composition for dielectrics
Inventor: SHIN DONG JU
IPC: G03F7/022
Filed: 2007-12-13
Abstract: A photosensitive resin composition including dioxolane-based compounds for dielectric films is provided to show excellent transmittance, insulation, smoothness, chemical resistance and heat resistance and to ensure high residual film rate, development and storage stability. A photosensitive resin composition for dielectric films comprises: 100 parts of dioxolane-based compounds containing unsaturated carboxylic acid, unsaturated carbonic anhydride or their mixture and epoxy group-containing unsaturated compounds; 5-50 parts of quinonediazide-based compound; and a solvent. The dioxolane-based compound has a structure of the formula 1. In the formula 1, R1 and R2 are selected from the group consisting of independently substituted or non-substituted alkyl group, substituted or non-substituted aryl group and substituted or non-substituted alicyclic compound group or bonded with each other to make a ring; R3 is hydrogen or methyl group; R and R' are hydrogen or substituted or non-substituted alkyl groups; and n is in a range of 1 to 5.
Patent KR-20090064038-A (KR)
Title: Twin seam welding apparatus
Inventor: CHO YONG JOON
IPC: B23K11/06
Filed: 2007-12-14
Abstract: A twin seam welding device is provided to simplify the operation process by installing a first and second welding unit which can rotate and move left and right to a load frame. A twin seam welding device comprises: a load frame(10) having a first and second guide rail at the left and right based on the built-in position of a fixed bracket; a first and second slider(17) connected each other to move up and down respectively; a first drive unit(20) for reciprocating the first and the second slider along the first and the second guide rail; a first and second welding unit(30,40) consisting of a driving electrode part going upward and downward from a mount frame; a second driver unit(70) connected between the first and the second welding unit to rotate the first and second welding unit; and a third drive unit(80) for raising the driving electrode part up and down, mounted on the mount frame.
Patent KR-20090064701-A (KR)
Title: Apparatus fur supplying oil pressure supply for use with machine tool
Inventor: SOHN JAE WON
IPC: B23Q5/00
Filed: 2007-12-17
Abstract: A hydraulic supply system of a machine tool is provided to grasp the state of a supply line at the outside by having a simple structure. A hydraulic supply system of a machine tool supplies oil pressure to a rotating palette. The hydraulic supply system of the machine tool comprises a supply block(11), a center shaft(13), and a line supporting member(20). The supply block is fixed to the machine tool. The supply block supports a discharged hydraulic supply line(12) in an oil pressure supply source. In the center shaft, the one end of the hydraulic supply line passing through the supply block is fixed and connected to one end The oil pressure supplied from the hydraulic supply line is supplied to the palette through a separate line with rotating the inside of the center shaft. The line supporting member is arranged between the supply block and the center shaft. The line supporting member supports the supply line. The line supporting member comprises a splash guide, a roller bracket, and a guide roller. In the splash guide, the supply block is fixed. The roller bracket is fixed to the splash guide. The guide roller is mounted on the roller bracket to be rotated. The guide roller supports the supply line.
Patent KR-20090065220-A (KR)
Title: Photosensitive resin composition and black matrix using the same
Inventor: LEE IN JAE
IPC: G03F7/004
Filed: 2007-12-17
Abstract: A photosensitive resin composition containing a leveling agent and a display unit employing an optical shield layer manufactured by the same are provided to ensure excellent film uniformity, development and printing margin. A photosensitive resin composition comprises: 1-40wt% of acrylic binder resin; 1-20wt% of photo-polymerizable monomers; 0.1-10wt% of photo-polymerizable initiator; 5-40wt% of pigments; 0.03-0.5wt% of leveling agent selected from the group consisting of a silicone-based compound represented by the formula 1, a fluorine-based compound represented by the formula 2 and their mixture; and solvents. In the formula 1, N is an integer of 1 to 5; and R1, R2, R3 and R4 are identically or independently substituted or non-substituted alkyl groups or substituted or non-substituted aryl groups. In the formula 2, P is an integer of 1 to 10; q is an integer of 0 to 30; m is an integer of 0 to 2; R5 is hydrogen, substituted or non-substituted alkyl group or halogen element; and R6 is hydrogen, substituted or non-substituted alkyl group, halogen element, epoxy group or (meth)acrylate group.
Patent KR-20090066163-A (KR)
Title: Preamble design method for reducing overhead related with handover of hierarchical cellular system
Inventor: LEE JOO HYUN
IPC: H04B7/26
Filed: 2007-12-18
Abstract: A handover overhead and a preamble design method for reducing a message overhead in a cellular system of a hierarchy structure are provided to simplify a scanning procedure when handover of MS(Mobile Station) and reduce a message overhead for handover procedure between base stations. A preamble including a first ID is comprised. The first ID classifies the cell of nodes. A second preamble including a second ID is comprised. The second ID classifies the sub cell of the nodes having the same first ID. The first preamble and the second preamble are allocated in the different symbol.
Patent KR-20090069534-A (KR)
Title: A valve assembly and a method thereof
Inventor: KIM SANG YUN
IPC: F16K37/00
Filed: 2007-12-26
Abstract: A valve assembly and an operation method for the same are provided to steadily perform the operation of the valve assembly by mounting a sensor on a moving path of an opening and closing part. A valve assembly comprises: a body part(10) having an inlet at one end part and an outlet at the other end part, in which a flow path is formed at inside; an opening and closing part(20) selectively opening and closing the flow path; an air part(30) moving the opening and closing part up while discharging the air, installed at the moving path between the opening and closing part and the body part; a sensing part(40) sensing the movement of the opening and closing part, located at one side of the opening and closing part; and a controller(50) controlling the opening and closing part by receiving a signal from the sensing part.
Patent KR-20090070752-A (KR)
Title: Device for automatically controlling temperature of heating bedding
Inventor: KIM IN CHUL
IPC: A47G9/02
Filed: 2007-12-27
Abstract: An automatic temperature control device of electric bed is provided, which reduces the manufacturing process and improves the production efficiency. An automatic temperature control device of electric bed comprises: a heater(10) in which a first hotwire and a second hotwire is serially connected; a switching unit(20) which controls the electric power supply to hotwire; a temperature detection and amplifying unit(30) detecting the inner temperature of the electric bed; a temperature setting and comparison unit(40) outputting the hotwire driving signal; a waveform shaping part(50); and an output unit(60) outputting the hotwire driving signal to the switching unit for the set time.
Patent KR-20090071193-A (KR)
Title: Apparatus for molding
Inventor: HAN SANG BIN
IPC: B23K11/11
Filed: 2007-12-27
Abstract: A welding machine is provided to uniformly deliver the current to the materials by welding after removing the foreign material from the welded surface. A welding machine comprises: a body(120); a rotational force generator(160) for generating the torque in the elevation; and a welding member(140) welding after rotating, installed at the body. The rotational force generator is connected an operation pole(122) installed at the body to be ascended and descended and includes a top part elevating part(170) generating the torque in the elevation; and a lower part elevating unit(180) installed at the body in order to be arranged in the lower part of the top part elevating part. The top elevating part comprises an upper side driving member and an upper guide member. The lower part elevating part comprises a lower driving member(182), a lower guide member(184) and an elastic member.
Patent KR-20090072309-A (KR)
Title: Method of detecting partial load failure and computer readable recoding medium for the same
Inventor: BACK IN WOO
IPC: H01L21/66
Filed: 2007-12-28
Abstract: A method for detecting an error of a partial load and a computer readable recording medium for the same are provided to effectively confirm an error of a lamp heater although a chamber is not disassembled. While an output of a power source(100) is changed, a plurality of first state values about a load group is detected in case load groups are normal. While an output of a power source is changed, a plurality of second state values about the load group is detected in case one load among the load groups is error. A reference value is set between a plurality of first state values and a plurality of second state values. A partial error of the load groups is determined by comparing the reference value with a third state value of the load group detected after the output of the power source is applied to the load group. A plurality of first state values and a plurality of second state values are stored as graph or table.