Patent SG-11201804722Q-A (SG)
Title: Mems actuator structures resistant to shock
Inventor: MORABITO GERARDO
IPC: B81B7/00
Filed: 2016-11-04
Abstract: Designated States (unless otherwise indicated, for every kind of national protection available): AE, AG, AL, AM, (54) Title: MEMS ACTUATOR STRUCTURES RESISTANT TO SHOCK 24 2 Fig. 10 (57) : Shock-resistant MEMS structures are disclosed. In one implementation, a motion control flexure for a MEMS device includes: a rod including a first and second end, wherein the rod is tapered along its length such that it is widest at its center and thinnest at its ends; a first hinge directly coupled to the first end of the rod; and a second hinge directly coupled to the second of the rod. In another implementation, a conductive cantilever for a MEMS device includes: a curved center portion includes a first and second end, wherein the center portion has a point of inflection; a first root coupled to the first end of the center portion; and a second root coupled to the second end of the center portion. In yet another implementation, a shock stop for a MEMS device is de- scribed. (12) INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property Organization International Bureau 111111111M 111111111111111111 DEEM II 11111111111111111111111111111111 RID IIIIIIII (10) International Publication Number WO 2017/116562 Al WIPO I PCT (43) International Publication Date 6 July 2017 (06.07.2017) AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (84) Designated States (unless otherwise indicated, for every kind of regional protection available): ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG). Declarations under Rule 4.17: as to applicant's entitlement to apply for and be granted a patent (Rule 4.17 (ii)) as to the applicant's entitlement to claim the priority of the earlier application (Rule 4.17(iii)) Published: with international search report (Art 21(3)) (51) International Patent Classification: B81B 1/00 (2006.01) B81B 7/00 (2006.01) B81B 3/00 (2006.01) (21) International Application Number: PCT/US2016/060547 (22) International Filing Date: 4 November 2016 (04.11.2016) English English (25) Filing Language: (26) Publication Language: (30) Priority Data: 14/985,175 30 December 2015 (30.12.2015) US (71) Applicant: MEMS DRIVE INC. [US/US]; 2832 E. Foot- hill Blvd., Pasadena, California 91107 (US). (72) Inventors: MORABITO, Gerardo; 1654 N. Santa Anita Avenue, Arcadia, California 91006 (US). LIU, Xiaolei; 1738 N. Hanscom Drive, South Pasadena, California 91030 (US). WANG, Guiqin; 6529 Kauffman Avenue, Arcadia, California 91007 (US). GUTIERREZ, Roman; 250 Laurel Avenue, Arcadia, California 91006 (US). NG, Matthew; 9501 Steele Street, Apt. D., Rosemead, Califor- nia 91770 (US). (74) Agents: COLANDREO, Brian J. et al.; Holland & Knight LLP, 10 St. James Avenue, Boston, Massachusetts 02116 (US). W O 20 171165 / 6 2 Al