baber/WOPTO huggingface dataset:
Patent PT-103683-A (PT)
Title: Instrumento portátil móvel para medição dos parâmetros de homeostasia em seres humanos
Inventor: GIRAO PEDRO SILVA
IPC: A61B5/02
Filed: 2007-03-09
Abstract: ESTE INVENTO, DESENVOLVIDO NA ÁREA DA ENGENHARIA BIOMÉDICA, É VOCACIONADO PARA MEDIÇÃO DOS PARÂMETROS VITAIS EM SERES HUMANOS. TRATA¿SE DE UM SISTEMA QUE INCLUI VÁRIOS CANAIS DE MEDIDA CUJOSSINAIS ANALÓGICOS SÃO ADQUIRIDOS UTILIZANDO UMA PLACA DE AQUISIÇÃO (3) INSTALADA NO CONECTOR PARA O COMPACT FLASH DE UM PDA (PERSONAL DIGITAL ASSISTANT) (4) DE TIPO POCKET PC. OS PARÂMETROS VITAIS AOS QUAIS ESTÃO ASSOCIADOS CANAIS DE MEDIDA SÃO O RITMO CARDÍACO (5), A QUANTIDADE DO OXIGÉNIO NO SANGUE (6) E O RITMO RESPIRATÓRIO (6), E A TEMPERATURA (7). O SOFTWARE ESTÁ IMPLEMENTADO NO SISTEMA PORTÁTIL MÓVEL O QUE PERMITE O CÁLCULO DOS VALORES CORRENTES DESSES PARÂMETROS E DOS VALORES QUECARACTERIZAM O SISTEMA NERVOSO AUTÓNOMO NOMEADAMENTE AS COMPONENTES DE BAIXA FREQUÊNCIA (LF) E DE ALTA-FREQUÊNCIA (HE) DO TACOGRAMA (O SINAL RR). O SISTEMA FOI PROJECTADO PARA SER NÃO INVASIVO E PARA PERMITIR A REALIZAÇÃO DE MEDIDAS QUANDO O PACIENTE REALIZA MOVIMENTOS LENTOS. FORAM IMPLEMENTADOS COMPONENTES DE FILTRAGEM (1) NÃO SÓ PARA DIMINUIREM O EFEITO DOS MOVIMENTOS DO PACIENTE NO SINAL ADQUIRIDO MAS TAMBÉM PARA ELIMINAR O SINAL DE INFLUÊNCIA DE 50HZ DEVIDO À TENSÃO DA REDE DE DISTRIBUIÇÃO DE ENERGIA ELÉCTRICA. A NÍVEL DO SOFTWARE DESENVOLVIDO, E PARA ALÉM DO PROCESSAMENTO DOS DADOS, SÃO INTRODUZIDOS ELEMENTOS DE SINALIZAÇÃO E REGISTO DAS SITUAÇÕES QUANDO OS PARÂMETROS EXPRIMEM UM ESTADO DE RISCO PARA O PACIENTE BEM COMO PARA TRANSMISSÃO SEM FIOS DOS DADOS ASSOCIADOS À MONITORIZAÇÃO DA HOMEOSTASIA DO PACIENTE.
Patent PT-115782-A (PT)
Title: Processo para a produção de materiais nanocompósitos em reator único utilizando tecnologia plasma
Inventor: ELENA STEFANOVA TATAROVA
IPC: B01J19/12
Filed: 2019-09-17
Abstract: A PRESENTE INVENÇÃO REFERE-SE A UM PROCESSO DE PRODUÇÃO DE MATERIAIS NANOCOMPÓSITOS COMPREENDENDO: PRODUZIR NUM REATOR (1) DE GEOMETRIA VARIÁVEL UM VOLUME (3) DE PLASMA DE MICRO-ONDAS DE DENSIDADE ENERGÉTICA DECRESCENTE, EM QUE O VOLUME DE PLASMA COMPREENDE DUAS PARTES (19, 20); INTRODUZIR NA REFERIDA PARTE (19) UM PRIMEIRO ESCOAMENTO FORMADO POR UMA MISTURA DE PELO MENOS UM GÁS INERTE E DE PELO MENOS UM PRECURSOR DE NANOESTRUTURA BIDIMENSIONAL E FAZER DESLOCAR O REFERIDO PRIMEIRO ESCOAMENTO AO LONGO DO VOLUME (3) DE PLASMA PARA DENTRO DA PARTE (20); O PROCESSO COMPREENDENDO AINDA INTRODUZIR NA PARTE (20) UM SEGUNDO ESCOAMENTO FORMADO POR UMA MISTURA DE PELO MENOS UM GÁS INERTE E PELO MENOS UM PRECURSOR DE COMPONENTE DOPANTE, E INTRODUZIR UM TERCEIRO ESCOAMENTO FORMADO POR UMA MISTURA DE PELO MENOS UM GÁS INERTE E PELO MENOS UM TIPO DE NANOPARTÍCULA; MISTURAR OS TRÊS ESCOAMENTOS NO INTERIOR DA PARTE (20) E FAZER DESLOCAR ESTA MISTURA PARA FORA DA PARTE (20) EM DIREÇÃO A UMA SAÍDA (2) DO REATOR (1) ONDE SÃO RECOLHIDOS OS NANOCOMPÓSITOS FORMADOS.
Patent PT-117142-A (PT)
Title: Dispositivo de inspeção para inspecionar a parte terminada de um fio elétrico blindado e método.
Inventor: NOBUTO TSUKIJI
IPC: G01R1/067
Filed: 2021-03-24
Abstract: UM DISPOSITIVO DE INSPEÇÃO É CONFIGURADO PARA INSPECIONAR SE UMA DIMENSÃO DE UMA EXTREMIDADE TRASEIRA DE UMA PARTE DOBRADA PARA TRÁS DE TRANÇA (WD1) DE UMA PARTE TERMINADA DE UM FIO ELÉTRICO BLINDADO (W) ESTÁ DENTRO DE UM INTERVALO APROPRIADO. O DISPOSITIVO INCLUI: UMA PRIMEIRA SONDA DE MANDRIL (11) NUM ESTADO FECHADO ELETRICAMENTE CONECTADA A UM TERMINAL DE BLINDAGEM (1); UMA SEGUNDA SONDA DE MANDRIL (12) EM CONTACTO COM A PARTE DOBRADA PARA TRÁS DE TRANÇA (WD1) QUANDO UMA DIMENSÃO DA PARTE DOBRADA PARA TRÁS DE TRANÇA (WD1) ESTÁ FORA DO INTERVALO APROPRIADO; UMA SONDA DE AUTODIAGNÓSTICO (13) SUPORTADA NUM ESTADO CONDUTOR COM A SEGUNDA SONDA DE MANDRIL (12) E COLOCADA NUM ESTADO CONDUTOR DE CONTACTO COM A PRIMEIRA SONDA DE MANDRIL (11) NUM ESTADO ABERTO; UM COMPUTADOR (50) CONFIGURADO PARA DETETAR SE A PRIMEIRA SONDA DE MANDRIL (11) E A SEGUNDA SONDA DE MANDRIL (12) ESTÃO NUM ESTADO CONDUTOR.
Patent RU-94009246-A (RU)
Inventor: SKURIDIN B K
IPC: G09F19/02
Filed: 1994-03-18
Abstract: FIELD: advertising means. SUBSTANCE: magnetic suspension has magnetic circuit blocks of E-shaped plates arranged at angle to each other into which two electric coils are laid. Blocks are put on base having shape of truncated cone. Body with advertised article is positioned above magnetic circuits. EFFECT: enhanced functional capabilities.
Patent RU-94021266-A (RU)
Inventor: ZUBAREV K V
IPC: F03D3/00
Filed: 1994-06-07
Abstract: FIELD: power engineering; wind-electric and hydroelectric plants, transport. SUBSTANCE: converter has truss with vertical shaft mounted there for turning and carrying horizontal crosspieces in tier-by-tier arrangement with hinged members; every bottom pair of crosspieces is turned in horizontal relative to top one and each hinged member is built up of pair of streamlined gauze frames secured for relative displacement along crosspiece. Frames are covered with gauzes having different mesh size. One of gauzes located on external side is supporting gauze and has smaller mesh size. Internal gauze with larger mesh size is provided with wing members fixed on one of sides of each mesh. Each wing member is made of flexible material whose size corresponds to mesh size. Wing members incorporated in wind-electric power plant have shown reliable operation in all weather conditions. EFFECT: improved efficiency of wind and water energy utilization, improved operating reliability of converter.
Patent RU-94023370-A (RU)
Inventor: MAKEEV A M
IPC: A61K35/64
Filed: 1994-06-20
Abstract: FIELD: medicine, pharmacy. SUBSTANCE: new analgetic agent for external use has, g/100 g: turpentine oil 1.8-2.2; cotton oil 4.8-5.2; soybean oil 4.8-5.2; camphor oil 9.8-10.2; flower oil 4.8-5.2; rose oil 4.8-5.2; honey 2.8-3.2, and the melted butter - the rest. EFFECT: enhanced effectiveness of agent.
Patent RU-94027472-A (RU)
Inventor: AFANAS EV A JU
IPC: G01P3/489
Filed: 1994-07-19
Abstract: FIELD: precision electromechanical systems with synchroes or resolvers. SUBSTANCE: sine and cosine outputs a and b, respectively, of electrical machine 1 are connected through phase-sensitive rectifiers 2, 3 to differentiating filters 4, 5 and to multipliers 8, 9 whose digital inputs are connected to output of reversing counter 21 and their outputs, to inertia filters 6, 7. Outputs of phase-sensitive rectifiers 2, 3 are connected to inputs of comparators 11, 12 and outputs of filters 4-7, to inputs of comparators 10, 13. Comparator outputs are connected to inputs of 3AND gates 14-17 whose outputs are connected through OR gate 19 to control input of reversing counter 21. Carry output of the latter and output of pulse generator 20 are connected to inputs of 2AND gate 18 whose output is connected to complementing input of reversing counter 21. Comparators 11, 12 determine modulo higher signal out of ü, uarriving from outputs of phase-sensitive rectifiers 2, 3 and true value of speed ω is compared across comparators 10, 13 with its estimated value. Logical circuits 14-17, 19 determine forward or reverse count mode of reversing counter 21 and circuit 18 prevents clearing of reversing counter 21 at zero or maximum value of %%%. True value of speedof electrical machine 1 is directly tracked. EFFECT: improved accuracy and extended speed range. 1 dwg
Patent RU-94030387-A (RU)
Inventor: BAGROV B O
IPC: C04B38/02
Filed: 1994-08-19
Abstract: FIELD: production of structurally thermal insulating cellular concrete. SUBSTANCE: mixture has Portland cement, lime and aluminum powder. Silica is replaced with wastes of thermal insulating materials accounted for 34.9 - 65.7 % of total weight of raw materials. Raw material has 6 - 60 % Portland cement, 5 - 34 % lime, 0.1 - 0.3 % aluminum powder, 34.9 - 65.7 % waste of thermal insulating materials (percent by weight). EFFECT: increased bend strength of cellular concrete, decreased shrinkage at the expense of disperse reinforcing of raw material mass.
Patent RU-94034136-A (RU)
Inventor: SELJAEV V P
IPC: B28C5/16
Filed: 1994-09-16
Abstract: FIELD: manufacture of building materials. SUBSTANCE: mixer consists of diamagnetic housing with conical bottom mounted inside coil for generating constant and variable electromagnetic fields, regulator for strength of magnetic field connected with electromagnet, charging and discharge openings, electric motor, pneumatic cylinder. Working body is made as vertical shaft on which lower and upper paddles are fixed. There are openings in lower paddle. The diameter ratio of input and output openings is 1:2-3. In this case the minimal diameter of output opening must exceed the maximal size of mixed particles of mineral components (binders, fillers etc) not less than twice. It results from the necessity of excluding the possible wedging action of mineral particles in output opening. EFFECT: enhanced quality of building mixes, for example, binders, solutions etc, prepared in high-speed mixers, at the expense of electromagnetic field influence at turbulent high-speed mixing. 1 cl, 2 dwg
Patent RU-94036144-A (RU)
Inventor: BAL ZAMOV I A
IPC: F42B10/14
Filed: 1994-09-01
Abstract: FIELD: artillery equipment, in particular, artillery projectiles, both guided and unguided ones. SUBSTANCE: artillery projectile folding fin uses hinge-joined blades for turning in the direction of the projectile, having a plane surface on its lower part and retainers made in the form of movable plungers with an internal cavity for the working spring and an unfolded fin retaining member; made on the retainer end facing the blade is an inclined longitudinal groove, whose bottom has a hole connecting the retainer inner cavity to the afterprojectile space, and the plane surface of the blade lower part is engageable with retainer groove bottom; the unfolded fin retaining member is made in the form of an inclined pad located above the hole in the groove bottom on the outer cylindrical surface of the retainer on the side of the blade turning axis. EFFECT: enhanced reliability of unfolding and retaining of folding fin of artillery projectile.
Patent RU-94042490-A (RU)
Inventor: ZHENEVA M V
IPC: C08G77/24
Filed: 1994-11-28
Abstract: FIELD: production of silicon-organic polymers used in electronic industry as photoresistors in photolithography. SUBSTANCE: aim is to produce oligo(chlorovinyl)silsequioxanes, that continue to keep their solubility during storing with softening temperature over 60 deg and useful to be used as photoresistors components in photolithography. Aim is realized by hydrolysis of trichlorovinyltrichlorosilane with mixture of ethyl alcohol with water with molar ratio of trichlorovinyltrichlorosilane : water : alcohol = 1 : (4 - 10) : (20 - 30). Reaction mixture is hold at least 100 hours with following reaction of the reaction mass with trimethylchlorosilane taken in amount of 10 - 20 molar % of initial trichlorovinyltrichlorosilane and separation of product. EFFECT: production of product with long storing capabilities.
Patent RU-94042570-A (RU)
Inventor: FEDOSEEV G B
IPC: A61K35/78
Filed: 1994-11-28
Abstract: FIELD: medicine, antihypoxic agents. SUBSTANCE: sap of wheat seedlings is proposed as antihypoxic agent. Proposed agent can be used at diseases accompanied with oxygen insufficiency development in organism. EFFECT: enhanced effectiveness of agent.
Patent RU-94045589-A (RU)
Inventor: GOMON V I
IPC: F28D7/10
Filed: 1994-12-29
Abstract: FIELD: power engineering, chemical industry, civil engineering, cryogenic facilities. SUBSTANCE: heat exchange member has pipe enclosed in sheathing which has surface contact zones with pipe. Number of surface contact zones per pipe length unit can be variable. Heat exchange member pipe is provided with ring, screw or other type turbulators projecting inwards. EFFECT: enlarged operating capabilities.
Patent RU-95100532-A (RU)
Inventor: POGOREL SKIJ S V
IPC: A01B79/00
Filed: 1995-01-12
Abstract: FIELD: agricultural technology. SUBSTANCE: this method provides for ploughing without compaction of soil. According to method, ploughing working members are moved around axis located laterally to direction of travel and also around axis moving together with working member. EFFECT: high efficiency. 1 dwg
Patent RU-95104170-A (RU)
Inventor: PIVOVAROV V F
IPC: C10M175/04
Filed: 1995-03-21
Abstract: FIELD: metal working. SUBSTANCE: invention has relation to water- emulsion cutting fluids designed for metal forming and can be applied in mechanical engineering, metallurgy, chemical and other industries. Method consists in that worked out fluid is supplemented with a coagulant and lime (calcium oxide or hydroxide) in quantity at least 0.15% based on calcium ion weight or separation of aqueous phase is performed in two steps: lime is first added to the fluid followed by addition of coagulant. Reprocessing is carried out at 40 C. EFFECT: enhanced efficiency of water/oil separation and decreased cost because of reduced coagulant usage.
Patent RU-95107413-A (RU)
Inventor: KOCHERGINA L F
IPC: C30B15/32
Filed: 1995-05-10
Abstract: FIELD: semiconductor materials. SUBSTANCE: invention refers to equipment for manufacture of semiconductor materials and can be used in installations for growing of monocrystals for seed, for instance of silicon by method of Czochralski. Gear has growing chamber 1 with crucible 2 divided by horizontal partition 3 with central hole 4 into lower 5 and upper 6 parts, seed holder 7, cassette 8 with axle and sockets 10. Each socket has lock in upper part and support with lock in lower part. Support is anchored on slider set in slit of hollow axle 9 inside which pusher is mounted. Gear also has drive of turn of cassette and drive 17 of vertical movement. Such design of gear makes it possible to adjust each socket 10 of cassette 8 to length of grown monocrystal and to unload sockets at same time when all sockets of cassette are filled by monocrystals of various lengths from chamber. EFFECT: increased productivity of gear. 4 cl, 8 dwg
Patent RU-95108328-A (RU)
Inventor: MISHEL RIMBO
IPC: B62D21/00
Filed: 1995-05-29
Abstract: FIELD: mechanical engineering. SUBSTANCE: carriage frame is composed of first and second frame girder 1, first, second, and third and fourth semi- beams 2, first and second auxiliary frame girder 4, first and second cantilever for securing blocks of brake 3, first and second joints of drive 5 and first and second holders of shock-absorber 6. Members 1-6 are made as units. EFFECT: enhanced reliability.
Patent RU-95110647-A (RU)
Inventor: ROMANNIKOV V N
IPC: B01J37/00
Filed: 1995-06-28
Abstract: FIELD: organic chemistry; high-selectivity catalysts for production of alkyl aromatic hydrocarbons. SUBSTANCE: proposed catalyst has following composition, wt. %: beta-zeolite in decationized form, 66-72; silica (as binder), 22-24; phosphorus pentoxide, 4.1-11.5. Phosphorus pentoxide is introduced into catalyst by treating zeolite granulated with silica with aqueous ammonium phosphate solution, followed by drying and calcinating resulting catalyst. EFFECT: uninterrupted campaign of catalyst extended to 1000 h, while preserving its high selectivity in conversion of benzene, propylene and target product (cumene). 3 cl, 1 tbl
Patent RU-95112139-A (RU)
Inventor: ARTJUKHIN V I
IPC: B21J5/08
Filed: 1995-07-12
Abstract: FIELD: stamping of articles, such as nails with flat, countersunk heads or flat heads with conical neck. SUBSTANCE: die has punch and at least two die halves, each having detachment surface, surface for clamping rod portion of article to be stamped and head forming surface. End part of head forming surface of each die half is arranged on surface positioned at an angle not exceeding 5 deg to plane perpendicular to longitudinal axis of clamping surface. Such construction allows out-of-roundness of head to be reduced or eliminated due to additional resistance to flowing of material in direction perpendicular to die halves detachment surface. EFFECT: improved quality and wider range of produced articles.
Patent TW-200300709-A (TW)
Title: Dispenser for discharging liquid
Inventor: ENDO MASATOMO
IPC: B05C5/00
Filed: 2002-11-28
Abstract: In conventional dispensers, the needle and the amateur of the drive section are unified such that it cannot be easily disassembled at the time of maintenance, repairing and cleaning. In this invention, one side of a tank for storing discharged liquid is provided with a nozzle section. On the other side of the tank is provided with a cover which is locked an edge by screws. A compressed gas supply port for supplying compressed gas to the tank is provided in the cover. The 2nd needle serving as a valve extends into the nozzle section in the tank. A connection section of the 1st needle and 2nd needle is provided in the tank. An elliptical seal component is provided between the 1st needle and the cover.
Patent TW-200400518-A (TW)
Title: Paste for circuit connection, anisotropic conductive paste and uses thereof
Inventor: MIZUTA YASUSHI
IPC: C08L63/00
Filed: 2002-11-29
Abstract: The present invention provides pastes for circuit connection and anisotropic conductive pastes that are excellent in storage stability and dispenser application properties, can be free of voids, bubbles and bleeding on thermocompression bonding and can give cured products having high bonding and connection reliabilities at high temperatures and high humidity, and reparability. The invention also provides methods of using these pastes. The paste for circuit connection comprises: (I) 30 to 80% by mass of an epoxy resin, (II) 10 to 50% by mass of an acid anhydride curing agent or a phenolic curing agent, and (III) 5 to 25% by mass of high-softening point fine particles. The anisotropic conductive paste comprises: (I) 30 to 80% by mass of an epoxy resin, (II)10 to 50% by mass of an acid anhydride curing agent or a phenolic curing agent, (III)5 to 25% by mass of high-softening point fine particles, and (IV) 0.1 to 25% by mass of conductive particles. The method of using the paste for circuit connection or the anisotropic conductive paste comprises connecting an electric circuit wiring formed on a substrate with an electric circuit wiring formed on another substrate with the paste for circuit connection or the anisotropic conductive paste of the present invention.
Patent TW-200412000-A (TW)
Title: Wavelength stabilizing control device and method thereof
Inventor: CHANG SEAN
IPC: H04B10/07
Filed: 2002-12-20
Abstract: A wavelength stabilizing control device for controlling a light-wave outputted by a tunable component in an optical communication system. The wavelength stabilizing control device includes a beam-splitting element, a first photo-detecting element and a second photo-detecting element. The beam-splitting element divides the light-wave into a first light-wave and a second light-wave. The first photo-detecting element receives the first light-wave directly and transforms it into a first electric signal while the second photo-detecting element receives the second light wave indirectly and transforms it into a second electric signal. In addition, a Fabry-Perot Etalon and an optical-filtering element are also included. The Fabry-Perot Etalon is disposed between the beam-splitting element and the second photo-detecting element to draw out a light-wave including a specific wavelength from the second light-wave. The optical-filtering element is disposed between the beam-splitting element and the second photo-detecting element to filter out parts of the channel among the light-wave including the specific wavelength.
Patent TW-200302606-A (TW)
Title: Locking device of connectors
Inventor: ARAMOTO KIYOSHI
IPC: H01R13/627
Filed: 2002-12-25
Abstract: The object of the present invention is to provide a locking device of connector which can be manufactured less expensively and can engage with a base connector more reliably, particularly adapted to employment in high-voltage connectors of a reduced height. To achieve the object, the device comprises a socket connector (1) having a socket housing (2) in which socket contacts (12) secured on wire ends (11) are placed side by side; and a base connector (21) mounted on a printed circuit board (20). A pair of lock arms (6), (6) is extended forwards from a rear end of the socket housing (2) and along lateral sides (4), (4) of the socket housing (2), which is integrally formed on the two lateral sides (4), (4) of the socket housing (2) by tie pieces (5), (5) capable of elastic deformation. The lock arms (6) have fore ends formed integral with hooks (7) projecting inwards, and the lock arms (6) further have push lugs (8) extending backwards from their rear ends so as to be located in rear of the tie pieces (5). When engaging the connectors one with the other, the lock arms (6), (6) will be guided forwards along respective sides (25), (25) of the base housing (22) of the base connector (21) until latched in place, the hooks (7), (7) is engaged in the rear edge (27), (27) of the base housing (22).
Patent TW-200412102-A (TW)
Title: Method for implementing to send/receive fax after calling in computer
Inventor: LIU WEN-HARN
IPC: H04L29/06
Filed: 2002-12-26
Abstract: A method for implementing to send/receive fax after calling in computer firstly answers incoming call and establishes connection with calling party. Under connection state, monitor and judge the calling signal for fax. If the fax signal is detected, then issue fax reply signal and convert to fax receive mode to receive the fax. After receiving it successfully, store the fax. Meanwhile, under connection state, it can also send fax to other party. After completion of voice contents and the connection is still there, the invention can directly send/receive fax without requiring to dial again.
Patent TW-200307018-A (TW)
Title: Mono-or bisazo copper complex dyestuffs
Inventor: PFLIEGER DOMINIQUE
IPC: C09B45/28
Filed: 2003-01-30
Abstract: This invention relates to coppered azo dyestuffs containing an alkyl-, aryl or alkoxyalkyl sulfamyl group on one moiety of the molecule and an alkyl-, aryl or alkoxyalkyl ammonium sulfonate or carboxylate group on the other moiety. The invention also relates to various intermediates, to compositions and to processes for preparing the metalized dyestuffs. The compounds are particularly suited for the application in laquers, ink-jet inks and electrographic toners.
Patent TW-200307910-A (TW)
Title: Read-out control for use with a domain expansion recording medium
Inventor: VERSCHUREN COEN ADRIANUS
IPC: G11B11/00
Filed: 2003-02-11
Abstract: The present invention relates to a method and apparatus for controlling a read-out operation from a magneto-optical recording medium, comprising a storage layer and a read-out layer, wherein an expanded domain leading to a reading pulse is generated in the read-out layer by copying a mark region from the storage layer to the read-out layer upon heating by a radiation power and with the aid of the external magnetic field. A switching time of the external magnetic field is derived from the reading pulse and a space run-length is determined on the basis of a time delay between the switching time and the reading pulse. The delay time need not have a fixed period such that space increments smaller than the channel bit length can be used for space run length coding. This results in a significantly improved resolution.
Patent TW-200303236-A (TW)
Title: Method for treating exhaust gas
Inventor: TAGUCHI HIROYASU
IPC: B01D53/68
Filed: 2003-02-14
Abstract: Disclosed is a method for treating an exhaust gas containing a fluorine gas or halogen fluoride gas discharged from an etching or cleaning process, which comprises burning the exhaust gas in a burning chamber having an fluorinated passive film formed on an inner surface thereof. The method can be used for treating an exhaust gas from a semiconductor manufacturing process which contains a fluorine gas or halogen fluoride gas in a high content or in a large amount, is safe and energy-saving, and allows the performance of pretreatment of the exhaust gas with enhanced efficiency.