Patent SG-11201903722Y-A (SG)
Title: System and method for generation of wafer inspection critical areas
Inventor: UPPALURI PRASANTI
IPC: H01L21/67
Filed: 2017-10-27
Abstract: 12) INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property :::` , MD 11011110111010101111101 1101001111111101110101 OH 11111101111011# Organization International Bureau (10) International Publication Number 03 International Publication Date .....•\"\"- WO 2018/089216 Al 17 May 2018 (17.05.2018) WIPO I PCT (51) (21) (22) (25) Filing Language: (26) (30) (71) (72) International Patent Classification: Sri Anjaneya Kirana Merchants, Chandrugonda, Khammam HO1L 21/66 (2006.01) HO1L 21/67 (2006.01) District, Telangana 507166 (IN). KULKARNI, Ashok V.; International Application Number: 1149 Valley Quail Circle, San Jose, California 95120 (US). BANERJEE, Saibal; 43196 Palm Place, Fremont, Califor- PCT/US2017/058887 nia 94539 (US). KIRKLAND, John; 279 Privada Drive, International Filing Date: Del Valle, Texas 78617 (US). 27 October 2017 (27.10.2017) (74) Agent: MCANDREWS, Kevin et al.; Kla-tencor Corpora- English tion, Legal Department, One Technology Drive, Milpitas, Publication Language: English California 95035 (US). (81) Designated States (unless otherwise indicated, for every Priority Data: kind of national protection available): AE, AG, AL, AM, 201641038208 08 November 2016 (08.11.2016) IN AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, 15/394,545 29 December 2016 (29.12.2016) US CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, Applicant: KLA-TENCOR CORPORATION [US/US]; DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, Legal Department, One Technology Drive, Milpitas, Cali- HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, fornia 95035 (US). KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, Inventors: UPPALURI, Prasanti; 13425 Kodiac Place, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, Saratoga, California 95070 (US). MANEPALLI, Rajesh; Title: SYSTEM AND METHOD FOR 400- 402---„ , 404 406 - 4O8 410 412-, - N . : A method includes receiving one or more layers in the one or more identifying one or more primitive characteristics for each of the one or more primitives, generating more primitives, generating one or more one or more rules to the one or more sets of design data to identify one or more critical areas, and recipes including the one or more critical areas for an inspection sub-system. (57) © inspection GENERATION OF WAFER INSPECTION CRITICAL FIG ®4 AREAS from one or more shapes as a particular primitive a primitive database of the one sets of design data, applying generating one or more wafer = (54) = RECEIVE ONE OR MORE SETS OF WAFER DATA = = GENERATE A PRIMITIVE DATABASE OF ONE OR MORE PRIMITIVES IN THE ONE OR MORE SETS OF WAFER DATA _ = = GENERATE ONE OR MORE RULES BASED ON THE PRIMITIVE DATABASE = = = RECEIVE ONE OR MORE SETS OF DESIGN DATA = I = APPLY THE ONE OR MORE RULES TO THE ONE OR MORE SETS OF DESIGN DATA TO IDENTIFY ONE OR MORE CRITICAL AREAS = 1-1 , tD 1-1 \" CN in Ot type, ---. or *I D the 1-1 ei GENERATE ONE OR MORE WAFER INSPECTION RECIPES INCLUDING THE ONE OR MORE CRITICAL. AREAS one or more sets of wafer data, identifying one or more primitives sets of wafer data, classifying each of the one or more primitives rules based on the primitive database, receiving one or more O [Continued on next page] WO 2018/089216 Al MIDEDIMOMOIDEIREIDIONIMEIIIHOHIMOVOIS SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (84) Designated States (unless otherwise indicated, for every kind of regional protection available): ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG). Published: — with international search report (Art. 21(3))