baber/WOPTO huggingface dataset:
Patent KR-20170091838-A (KR)
Inventor: LEE SUNG DAE
IPC: E04F13/08
Filed: 2016-02-01
Abstract: The present invention relates to a construction external panel fixing device and a manufacturing method thereof and, more specifically, relates to the construction of an external panel fixing device and the manufacturing method thereof to prevent a main frame and an auxiliary frame from shaking or deviating on an outer wall of a building; to reduce manufacturing costs; and to improve work efficiency. According to the present invention, the construction external panel fixing device comprises: a fixed frame closely adhered and fixated to an outer wall of a building by penetrating an insulation material provided on an outer wall of the building; a bracket closely adhered and fixated to the outer surface of the fixed frame; an anchor bolt inserted to the fixed frame by penetrating the bracket, and inserted and fixated to the outer wall of the building; and a support frame fastened and fixated to the bracket, fixating and supporting an external panel.
Patent KR-20170007089-A (KR)
Inventor: KIM TAE JUNG
IPC: H04W40/02
Filed: 2016-02-17
Abstract: 통신 장치의 동작 방법이 개시된다.  일 실시예는 클라이언트와 상대 클라이언트간의 P2P(Peer to Peer) 통신에 대응하는 매개키를 생성하고, 상기 매개키를 상기 상대 클라이언트로 전송하며, 상기 매개키에 대응하는 매개 경로를 확보하고, 상기 상대 클라이언트의 네트워크 주소가 변경되어, 상기 상대 클라이언트로 전송한 데이터에 대한 확인 응답을 수신하지 못한 상기 클라이언트로부터, 상기 매개 경로를 통해 상기 데이터를 수신하고, 상기 상대 클라이언트가 상기 매개키를 이용하여 상기 변경된 네트워크 주소로 접속하는 경우, 상기 데이터를 상기 상대 클라이언트로 전송하는 단계를 포함한다.
Patent KR-20170096763-A (KR)
Title: Connecter
Inventor: CHEON MYUNG JUNE
IPC: H01R13/15
Filed: 2016-02-17
Abstract: The present invention relates to a connector capable of preventing a wire from being excessively inserted. According to an embodiment of the present invention, the connector comprises: a terminal; a housing in which the terminal is installed and an insertion slot is formed; and a bracket which includes a mounting part mounted on the substrate and an insertion part to extend from the mounting part to be inserted into the insertion slot. At least one surface of the insertion slot includes: a first guide surface for guiding the insertion part to move in a direction parallel to a first direction (A) in which the insertion part is inserted; a second guide surface for guiding the insertion part to move in a direction parallel to a second direction (B) inclined to the first direction (A); and a third guide surface for guiding the insertion part to move in a direction parallel to the first direction (A).
Patent KR-20170097268-A (KR)
Inventor: KIM JI AH
IPC: G09G3/36
Filed: 2016-02-17
Abstract: The present invention is to realize a display device of a narrow bezel by discharging a node of a dummy stage circuit unit with an autonomously provided signal. To this end, the present invention provides a display device having a display panel and an embedded gate driving unit. The embedded gate driving unit includes a next signal generating unit for providing a next signal to at least one stage circuit unit. The next signal generating unit generates a next signal on the basis of at least one clock signal, high potential power, and low potential power.
Patent KR-20170097393-A (KR)
Title: 헤어 드라이기용 노즐
Inventor: MOON JAE HO
IPC: A45D2/00
Filed: 2016-02-18
Abstract: 본 발명은 헤어 드라이기용 노즐에 관한 것으로, 더욱 자세하게는 헤어 드라이기의 선단에 형성된 바람 토출구로 착탈되는 노즐에 모발에 웨이브를 주기 위한 파마 로드를 결합시켜 손쉽게 머리 모양을 형성하고 손질할 수 있도록 한 것이다.
Patent KR-20170085407-A (KR)
Inventor: LEE SANG HEON
IPC: F16K15/02
Filed: 2016-02-24
Abstract: 본 발명의 일 실시예에 따른 역방향 유체 공급 기능을 갖는 체크밸브는 유로를 제공하는 유입관과 연결된 유입구와, 상기 유입관을 통해 내부로 공급된 유체가 체류하는 공간부와, 상기 공간부의 유체를 외부로 배출하는 배출구로 이루어진 밸브본체와, 일단이 상기 밸브본체의 내부에 위치하고, 타단이 상기 밸브본체의 외부에 위치하여 핸들과 연결되며, 상기 밸브본체의 내부에 위치된 일측에 중공이 형성된 샤프트와, 내측에 통수로를 형성하되, 일단면에 상기 통수로와 연통된 토출구를 형성하고, 타측면에 상기 통수로와 연통된 주입구를 형성하며, 상기 주입구가 형성된 타측이 상기 샤프트의 중공에 출몰 가능하게 끼워지는 중심축과, 상기 중심축의 일측에 일체로 고정되어 상기 중심축과 함께 양방향으로 이동하면서, 상기 유입구 또는 유입관의 개구를 개폐하는 디스크와, 상기 디스크와 상기 밸브본체의 내측면 사이에 배치되어 상기 디스크에 탄성 반력을 제공하는 스프링을 포함한다.
Patent KR-20170103102-A (KR)
Inventor: KIM YONG CHUL
IPC: A61C7/14
Filed: 2016-03-03
Abstract: Provided is an orthodontic auxiliary device (2) attached to a fixing device (32) (for example, a temporary implant, a bonding pad, an arch wire, etc.) for arrangement of patients teeth. The auxiliary device (2) comprises a swivel device (12) connecting a seal device (3) to an attachment part (8). The attachment part (8) connects the auxiliary device (2) to the fixing device (32). The swivel device (12) makes the attachment part (8) at least partially rotate around a center axis of the seal device (3).
Patent KR-20160111328-A (KR)
Inventor: LIM ICK SOO
IPC: H02M1/00
Filed: 2016-03-03
Abstract: 스위칭모드 전원장치(SMPS)는 스위칭 작용에 의하여 전압을 다른 전압으로 변환하는 장치이다. 고속 스위칭 동작으로 장점도 많지만 동시에 여러 문제점들도 알려져 있다. 
본 발명은 스위칭 모드 전원 제어장치에 관한 것으로 더욱 상세하게는 부하의 변동과 전압 가변시에도 파생주파수의 발생을 최소화 함으로써 고유의 주파수로 안정적으로 동작하는 스위칭모드 전원장치(SMPS)에 관한 것으로, 
이를 구현하기 위한 수단으로 시간에 따라 전압기울기 파형을 발생하는 발진기, 그리고 비교기, 그리고 비교기의 출력을 변조기, 또는 발진기의 구동전원으로 사용하거나 또는 혼합파를 유도하여 안정적으로 동작하는 스위칭 모드 전원장치에 관한 것이다.
Patent KR-20170105992-A (KR)
Inventor: KIM KI JU
IPC: G06F3/0488
Filed: 2016-03-11
Abstract: In the case that a plurality of modes exist in a certain (keyboard) system, a certain same operation can be performed for each of the plurality of modes. When the certain some operation can be performed in a specific method which is different for each mode, the plurality of modes are distinguished depending on whether a touch is required to have a state in which several touch points are formed during the process being performed (at a certain time).
Patent KR-20160114522-A (KR)
Inventor: MIZUNO KOTARO
IPC: H01G4/018
Filed: 2016-03-22
Abstract: Provided is a multilayer ceramic condenser with a high effective volume, high adhesion between an element and an external electrode, and a large capacity. The multilayer ceramic condenser is formed by alternately stacking inner electrode layers with polarities different from a dielectric layer and includes a rectangular parallelepiped object having a pair of main surfaces, a pair of end surfaces, and a pair of side surfaces. External electrodes are formed on the pair of end surfaces and one surface of the object. In a cross-section parallel to an end surface adjacent to an end surface of one side of the multilayer ceramic condenser, the ratio of an area (A) formed by the dielectric layer between the inner electrode layer connected to an external electrode of the corresponding end surface and the corresponding inner electrode layer to an area (B) except for the external electrode of the cross-section (A/B) is greater than or equal to 0.75.
Patent KR-20170113894-A (KR)
Inventor: PARK SEUNG JAE
IPC: A23L5/10
Filed: 2016-03-28
Abstract: 본 발명은 홍화씨발효물을 이용한 발아곡류의 제조방법 및 이에 의한 생산품의 제조방법에 관한 것으로서, 본 발명의 제조방법은 (a) 홍화씨를 1 ~ 2㎜로 분쇄하여 기름을 제거하여 준비하는 단계; (b) 상기 (a)단계의 홍화씨를 90~100℃의 온도에서 1시간 ~ 3시간 동안 증숙하는 단계; (c) 상기(b)단계의 홍화씨를 100 ~ 200㎛의 크기로 분쇄하고 식용수를 1 : 1 ~ 1 : 2의 중량비로 첨가하여 혼합하는 단계; (d) 볏집을 식용수에 세척하여 1 ~ 2㎝의 크기로 절단하여 준비하는 단계; (e) 쌀을 식용수로 세척하여 쌀뜨물을 수득하여 준비하는 단계; (f) 상기 (d)단계의 재료 : 상기 (e)단계의 재료를 1 : 1 ~ 1 : 5의 부피비로 혼합하는 단계; (g) 상기 (f)단계의 혼합된 재료를 20~40℃의 온도에서 2일 ~ 3일동안 발효하는 단계; (h) 상기(g)단계의 재료를 여과하여 발효액을 준비하는 단계; (i) 상기 (c)단계의 재료에 상기 (h)단계의 발효액을 100 : 1 ~ 100 : 10의 중량비로 혼합한 다음 20 ~ 40℃의 온도에서 1일 ~ 7일 동안 발효하는 단계; (j) 상기(i)단계의 재료를 40~60℃에서 수분함유율 20% 이내로 건조하는 단계; (k) 식용수 1kg당 상기(j)단계의 건조된 홍화씨발효물을 2g ~ 100g을 혼합하여 90~100℃에서 1시간 ~ 3시간동안 추출하여 여과하는 단계; (l) 발아용 곡류를 식용수로 세척하여 물기를 제거하여 발아실에 투입하는 단계; (m) 상기(l)단계의 발아용 곡류에 상기(k)단계의 홍화씨발효추출물을 1일 4회 ~ 8회씩, 1일 ~ 5일동안 공급하여 발아하는 단계; (n) 상기(m)단계의 발아된 곡류를 수분함유율 15% 이내로 건조하여 제품화하는 단계를 포함하여 이루어진다. 
본 발명에 따라 생산된 발아곡류는 발아곡류 특유의 잡냄새가 없고 풍미가 향상된다.
Patent KR-20170111575-A (KR)
Inventor: HEO JAE YOUNG
IPC: G01N21/17
Filed: 2016-03-29
Abstract: 필름형 터치 센서 검사 장치 및 방법이 개시된다. 본 발명의 일 실시예에 따른 필름형 터치 센서 검사 장치는 필름형 터치 센서 시트가 이송되는 이송 라인을 촬상하여 영상을 획득하는 영상 획득부, 기 설정된 이미지 패턴에 기초하여 상기 획득된 영상에서 상기 필름형 터치 센서 시트에 대응되는 영상을 식별하는 시트 식별부, 상기 식별된 영상 내에 포함된 복수의 셀 영역을 식별하는 셀 영역 식별부; 및 상기 식별된 복수의 셀 영역 각각 대해 적어도 하나의 영상 검사를 수행하여 상기 필름형 터치 센서 시트 상의 결함을 검출하는 결함 검출부를 포함한다.
Patent KR-20170115125-A (KR)
Title: 복합 폐가스 처리 장치
Inventor: YOON JONG PIL
IPC: B01D53/32
Filed: 2016-04-04
Abstract: 복합 폐가스 처리 장치가 개시된다. 이는 처리대상 가스에 대하여 플라즈마를 이용한 산화 처리를 수행하는 플라즈마부와, 산화 처리된 가스를 환원 처리하는 환원부와, 플라즈마부 내로 오존을 투입하는 오존공급부를 포함한다. 오존공급부의 오존 공급은 플라즈마부의 후위에서 처리된 가스를 측정하여 그에 상응하는 오존을 공급하며, 그럼으로써 실질적으로 NO x  프리의 처리 결과를 얻을 수 있다.
Patent KR-20170114113-A (KR)
Inventor: YUN JIN HO
IPC: B29K81/00
Filed: 2016-04-04
Abstract: 본 발명은 알루미늄 합금 구조물에 이종 재질인 플라스틱 수지를 일체화시켜 성형하는 방법에 관한 것으로서, 알루미늄 금속체를 아민계 화합물 수용액에 침지시켜 상기 알루미늄 금속체표면을 나노 단위의 초미세 요철로 에칭하는 공정을 포함하여 알루미늄 금속체의 표면을 처리하는 표면처리 단계와, 상기 표면처리 단계에서 처리된 알루미늄 금속체를 사출 성형 금형에 삽입한 후에 PBT 또는 PPS계 수지를 이용하여 사출 성형하는 사출 단계를 포함하고, 상기 표면처리 단계는 탈지 공정, 디스머트 공정, SMT 공정, 활성화 공정, 디스머트 공정, 초음파 세척 공정이 포함되고, 각각의 공정 사이에는 수세 공정이 포함되어 진행됨으로써, 금속체와 수지재 사이에 견고한 결합력을 생성할 수 있는 효과를 제공한다.
Patent KR-20170115737-A (KR)
Title: 안구 표면질환 예방 또는 치료용 약학조성물
Inventor: YANG JAE WOOK
IPC: A61K38/08
Filed: 2016-04-08
Abstract: 본 발명은 서열번호 1로 표시되는 아미노산 서열을 가지는 펩타이드를 유효성분으로 함유하는 안구 표면질환 예방 또는 치료용 약학조성물에 관한 것으로, 보다 상세하게는 상기 서열번호 1로 표시되는 아미노산 서열을 가지는 펩타이드는 알칼리 화상으로 안구 표면의 병리학적 변화가 유도된 동물모델에서 각막 혼탁, 혈관신생 및 섬유화를 감소시키고 염증 유발인자의 발현을 억제하는 효과를 나타내는 것이으로 확인됨에 따라, 이를 유효성분으로 함유하는 조성물을 안구 표면질환 예방 또는 치료용 약학조성물로 사용할 수 있다.
Patent KR-20170121591-A (KR)
Inventor: KIM JAE HUN
IPC: F16L17/06
Filed: 2016-04-25
Abstract: The present invention relates to a compact flange. According to the present invention, the compact flange comprises: a pair of flanges having a fastening surface which is tilted outward; a fastening means fastening the flanges to enable the fastening surfaces to come in contact with each other; a sealing groove recessed from the fastening surface; and a sealing coupled to the sealing groove. The present invention comprises a spacing means securing an interval space between a lower surface of the sealing and a floor surface of the sealing groove.
Patent KR-20170058238-A (KR)
Inventor: KIM KYUNG SOOK
IPC: H04W76/02
Filed: 2016-04-26
Abstract: A base station of a wireless communication system allocates a temporary C-RNTI to a terminal performing random access and receives a CCCH message including an RRC connection request or an RRC connection recovery request from the terminal. The base station performs RRC connection or RRC connection recovery based on the CCCH message and transmits a terminal contention resolution identifier to the terminal. The base station sets a contention resolution state of the terminal based on HARQ ACK received from the terminal, thereby efficiently performing terminal connection management.
Patent KR-20170124725-A (KR)
Inventor: PARK KI CHEL
IPC: C09B67/42
Filed: 2016-05-03
Abstract: The present invention relates to a dye composition with a natural and soft color, a manufacturing method thereof and a dyeing method using the dye composition. The dye composition is manufactured by comprising: preparing a water-soluble resin dye composition by mixing a dye and a polymer resin composition which is soft and has excellent flexibility and adhesion; inputting the selected dye composition in a net hanging tank, uniformly depositing the dye composition on both surfaces of a fabric, and primarily drying at 130C and dyeing the fabric in a tenter process; transferring the fabric to a washing process, and primarily, secondarily and thirdly rubbing and washing the dyed fabric using a rubbing brush device to make the resin dye fabric in which the dye adhering to the surface of the fabric is naturally and softly washed like indigo-dyed jean by friction; and transferring the resin dye fabric to a tenter process and secondarily fixing a dye complex adhering to the fabric at 150-160C.
Patent KR-20170127697-A (KR)
Inventor: KIM CHI DON
IPC: B66C23/52
Filed: 2016-05-12
Abstract: The present invention relates to a construction method of drying an offshore structure on a floating body which is capable of being safely operated in a short time by directly mounting a large block making a large bundle on a launching barge. The present invention includes: installing a launching barge on the sea; mounting a stern pontoon at a center portion of an upper stern of the launching barge; mounting a bow pontoon at the center of an upper bow of the launching barge; mounting a port pontoon on an upper left port portion of the launching barge; mounting a starboard pontoon on an upper right starboard portion of the launching barge; and mounting a column on an upper portion of the pontoon in a state where the pontoon of each portion is mounted on the upper portion of the launching barge.
Patent KR-20160147651-A (KR)
Title: Passive radiative dry cooling module/system using metamaterials
Inventor: LIU VICTOR
IPC: B32B7/02
Filed: 2016-06-01
Abstract: According to a passive radiant cooling system, a ultra-black emitter includes a metamaterial nano-structure disposed on the surface of the uppermost part of a metal sheet, and a conduit structure enables a cooling material to flow in opposite to the surface of the bottom of the metal sheet. The metamaterial nano-structure (for example, taper-type nano-pore) emits heat in an emitting radiant energy type having a wavelength/vibration number in an atmosphere transparent section (for examples, 8 to 13 m or 16 to 28 m) from a cooling material, and emitting radiant energy is transferred to a cooling proximal-space through a reflective layer. The ultra-black emitter is produced by a metal-plating taper-type nano-pore formed through a modified anodic aluminum oxide (AAO) self-assembly scheme and electroless plating, and the reflective layer includes a distributed Bragg reflector. The cooling system can be extended to a modulation cooling unit (module) connected in series and in parallel to produce a dry cooling system suitable for a large generation plant.
Patent KR-20170141524-A (KR)
Inventor: JEONG HYEON GUN
IPC: A61K31/4545
Filed: 2016-06-15
Abstract: The present invention relates to controlled-release tablets including bepotastine widely used in the treatment of allergic rhinitis. More specifically, the controlled-release tablets have a multilayer structure including adjacent layers for immediate-release and extended-release. A carboxyvinyl polymer which is a hydrophilic polymer substance, is included in the extended-release layer as an extended-release agent in a stand-alone manner or with polyethylene oxides to enable a user to consume the tablets once a day. Unlike tablets with a single extended-release layer, the tablets can discharge the drug directly from the immediate-release later, thereby enabling direct and continuous effects.
Patent KR-20170142245-A (KR)
Inventor: OH DONG WOOK
IPC: C23C18/32
Filed: 2016-06-16
Abstract: The present invention relates to a relief valve for an oil pump with an extended service life, and to a surface treatment method for the same. To be more specifically, the present invention relates to a relief valve for an oil pump with an extended service life, and a surface treatment method for the same, which form an electroless nickel plating layer and Teflon coating on an external surface of a relief valve installed in the oil pump in order to reduce surface scratches and wear phenomena of the relief valve, thereby ensuring pleasant driving through smooth steering and reduced abnormal noises of a steering device. In addition, the relief valve installed in the oil pump of the steering device includes the electroless nickel plating layer and Teflon coating consecutively formed on the external surface thereof in order to deal with friction generated by instantly applied pressure during left and right steering of the steering device.
Patent KR-20170012018-A (KR)
Title: Ignition-quenching systems, apparatuses, and methods
Inventor: DAMAZO JASON SCOTT
IPC: B64D37/32
Filed: 2016-06-20
Abstract: Ignition-quenching systems (100) include an ignition-risk structure (140) which extends a support structure (150) to a combustible environment (160), and includes a porous ignition-quenching cover (110) which substantially covers the ignition-risk structure. The porous ignition-quenching cover is configured to quench an ignition event triggered by an ignition source related to the ignition-risk structure. The ignition-quenching covers generally include a porous body (120). The porous body may include one or more porous elements (130). Methods (400) according to the present invention include a step (410) of installing a porous ignition-risk cover on an ignition-risk structure, due to an ignition event related to the ignition-risk structure, for example, to prevent bulk combustion of fuel vapor in a fuel tank.
Patent KR-20170143177-A (KR)
Inventor: LEE SANG MIN
IPC: G01C21/36
Filed: 2016-06-21
Abstract: According to an embodiment of the present invention, provided is a mechanism which receives a call phone number by using a host address in a telematics service, and can understand at least one among a normal call event, a reconnection of call, and an originating call of an external intruder by utilizing whether the call event is ended and a call flag is changed. Therefore, a call connecting method and a telematics terminal for providing a telematics service can solve an unavailable situation of a telematics and can enhance security.
Patent KR-20160079744-A (KR)
Title: Touch sensible organic light emitting diode display
Inventor: LEE DONG KI
IPC: H01L51/52
Filed: 2016-06-23
Abstract: The present invention relates to an organic light emitting display device having a contact detecting function. According to an embodiment of the present invention, the organic light emitting display device comprises: a substrate; a thin film transistor formed on the substrate; an organic light emitting element connected to the thin film transistor to receive a data voltage; a plurality of sealing thin films formed on the organic light emitting element and configured to seal the thin film transistor and the organic light emitting element; a planarization film formed on the sealing thin films; and a contact detecting unit formed on the planarization film. Therefore, the thickness of the organic light emitting display device can be reduced.
Patent KR-20180001738-A (KR)
Inventor: UM JU YOUNG
IPC: F16M11/04
Filed: 2016-06-28
Abstract: The present invention relates to a fastener contact unit of a plate capable of attaching or detecting the plate with a circular shape to and from a clamp. When the plate is fastened by using a fastener configured in the clamp by inserting the plate with the fastener contact unit which can be fastened to the clamp into the clamp, to prevent a scratch in the fastener contact unit capable of pressing by contact with the end part of the fastener when the end part of the fastener presses the plate, a plate contact unit with a circular shape with a stronger property than a fastener in which an assembling unit 2 which can be assembled with an assembling unit 1 is configured in the assembling unit 1 by using the assembling unit 2 after configuring the assembling unit 1 inside by configuring a circular groove on a receiving surface of a plate body.
Patent KR-20170058249-A (KR)
Inventor: PARK HEUNG ROK
IPC: G01W1/10
Filed: 2016-07-11
Abstract: The present invention relates to a system and a method for predicting athletic performance by using weather data. The system for predicting athletic performance by using weather data can generate accurate athletic performance data by athlete, stadium, and position according to a real-time weather in a current stadium based on past athletic performance data by weather analyzing past game history of an athlete by weather and past athletic performance data analyzing the past game history for weather really measured in a stadium.
Patent KR-20170022872-A (KR)
Title: Unmanned aerial vehicle having Automatic Tracking
Inventor: HWANG JIN BYUK
IPC: B64D47/08
Filed: 2016-07-13
Abstract: The present invention relates to an unmanned aerial vehicle having an automatic tracking function. According to the present invention, the unmanned aerial vehicle having an automatic tracking function comprises: an image input unit; an object recognition unit; an object tracking unit; a motion recognition unit; an operation control unit; and a distance measurement unit. The present invention provides the unmanned aerial vehicle having an automatic tracking function, reducing manufacturing costs of the unmanned aerial vehicle.
Patent KR-20180008162-A (KR)
Inventor: KIM SANG GON
IPC: C08J5/18
Filed: 2016-07-15
Abstract: Provided are a sulfide-based polymer including a first unit represented by chemical formula 1 and a second unit represented by chemical formula 2, a film containing the same and a method for manufacturing the same. A polymer according to an embodiment of the present invention is polymerized by using a first unit and a second unit which are different to obtain the high molecular weight, and can easily manufacture a film when compared to using a polymer having the low molecular weight.
Patent KR-20160098117-A (KR)
Title: Automotive brake system vacuum switch structure
Inventor: KIM HWAN SIK
IPC: B29L31/30
Filed: 2016-07-29
Abstract: The present invention relates to a vacuum switch structure for an automotive brake device, allowing various electrodes (terminals) such as a grounding electrode or the like included in a vacuum switch to conveniently and rapidly be fixed to provide more rapid assembly as well as greater rigidity, thereby improving production efficiency. In an automotive vacuum switch (S) including: a diaphragm (300), which includes a housing (100) having a flow path for air and a cover (200) coupled to the housing (100) to allow pneumatic pressure to be applied in the interior thereof; an operation electrode (310); a ground electrode (400); an input terminal (500); and an output terminal (600), the vacuum switch structure is integrally formed through injection on a grounding piece (700) made of synthetic resin to allow the grounding electrode (400), the input terminal (500), and the output terminal (600) to easily and simultaneously be separated or assembled to a coupling groove (210) of the cover (200).
Patent KR-20170016791-A (KR)
Inventor: HIRANO YOSHINORI
IPC: G03F7/40
Filed: 2016-07-29
Abstract: A chemically-amplified positive-type resist composition comprises: (A) a polymer compound which becomes dissolvable in an alkali solution by the action of an acid; (B) a photoacid generator; (C) a carbonic acid compound; and (D) (D-1) a benzotriazole compound and/or (D-2) an imidazole compound, wherein the benzotriazole compound (D-1) is represented by formula (1) or formula (3), and the imidazole compound (D-2) is, for example, represented by formula (I-1). The chemically-amplified positive-type resist composition, when used to form a pattern on a film on a substrate having a relatively great thickness of 5-250 m, particularly of 10-150 m, has a resolution having an aspect ratio of 2 or greater. Particularly, when used on a copper substrate, the present invention has an excellent profile in the vicinity of the substrate and produces a rectangular pattern.