Patent SG-11201408057U-A (SG)
Title: Double-disc grinding apparatus and workpiece double-disc grinding method
Inventor: KOBAYASHI KENJI
IPC: B24B41/06
Filed: 2013-06-03
Abstract: (i2) mwu ft iz s-5 iv x m £ titz s issaj n d9) mm IHMMi (43) m&'&m a 2014^1 R 9 0(09.01.2014) WIPO IPCT (10) WO 2014/006818 A1 H01L 21/304 (2006.01) PCT/JP2013/003476 2013 ^6^ 3 0(03.06.2013) (51) B24B 7/77(2006.01) B24B 41/06 (2012.01) (21) (22) (25) g|@ttii0>Wi§: (26) @(8&M©Wl§: (30) fiBfcftf '— 1 £: 4#Jg| 2012-149203 2012 ^7^ 3 0 (03.07.2012) JP (71) ttiHA: tt(SHIN-ETSU HAN- DOT AI CO., LTD.) [JP/JP]; T 1000004 T g 6 # 2 Tokyo (JP). (72) % BJ # : /h # ® f] (KOBAYASHI, Kenji); T 9618061 liSRSS ¥150 e JHT Fukushima (JP). (74) ftSA: $7 E ^ ^ (YOSHIMIYA, \Iikio); T 1100005 Tl 6# 1 1 -^-fg — F Tokyo (JP). (8i) (^ro&i^PBy, IS ft nj f b): AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (84) (asrofci^isy > ±T(Dmm(Dfcm% 11^ nlfb): ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW), 3. — =j V T (AM, AZ, BY, KG, KZ, RU, TJ, TM), 3 — • V / ^ (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG). - mmmi 21 ^(3)) = (54) Title: DOUBLE-HEADED GRINDING DEVICE AND METHOD FOR DOUBLE-HEADED GRINDING OF WORKPIECES ^ (54) f§EKDigffc : ffiSgSFS'JSH&tf 9 — <7 < 00 i-H 00 o o 1 3 (57) Abstract: The present invention is a double-headed grinding device having a ring-shaped holder which is rotat- able for supporting thin-plate workpiece a from the outer peri­ phery along the radial direction, and a pair of grindstones for grinding both surfaces of said workpiece simultaneously as said workpiece is supported by said ring-shaped holder. Said double-headed grinding device is characterized in that it is provided with a hydrostatic bearing for supporting said ring- shaped holder in non-contact a fashion by means of the static pressure of liquid delivered from both the rotation axis direc­ tion of said ring-shaped holder and the direction perpendicu­ lar to said rotation axis, and in that the pressure force for de­ livering the liquid from the rotation axis direction and the pressure force for delivering the liquid from the direction per­ pendicular to said rotation axis can be controlled independ­ ently. Accordingly, a double-headed grinding device and a method for double-headed grinding of workpieces are provided in which improvement is achieved in the dispersion of nanotopography that is generated depending on the grind­ ing wheel, workpiece lots, and so forth, such that stable and highly accurate nanotopography can be obtained every time grinding is performed. (57)^: mm-' fn o CJ o & wo 2014/006818 AI III llll IIII III III Hill III III III Hill Hill llll lllll lllll 111 lllllll llll 111 llll m sgiKPrtefcu m gfefcot, Mi~> HUSB u bflW&S *i33S{*0>»Elc«i; U HUIBU flufB § Iclfi Ji [R1 ft b {£$• $ ti & t HU IB § Iclfi lc H H ft Jj ft b {£^ $ ti & 0) f£ij&J± ti £ % ti -6 Mi tLLxmn^it^^cDxh^zt^mtt^mmnmw.xh^o 9—*©• >7 h-£5S 5lc<fe#LT#6±-f *>-*-/ hTK^^^-r-roiibo^sgfeSL, SF8iJ£lc££LTfcffiJtfc-*-/ ^ d «t^-e#SSSSSWSUSBifttf 9—*©ffiSSSF 8iJ££jb<S&£*i3o