Patent SG-11201811295T-A (SG)
Title: Polycrystalline ceramic substrate and method of manufacture
Inventor: ODNOBLYUDOV VLADIMIR
IPC: H01L27/12
Filed: 2017-06-13
Abstract: INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property 111111101111 11 11111111111111 11111111111111111111111111111111111111111111111111111110111111 Organization International Bureau (10) International Publication Number (43) International Publication Date ......0\"\" WO 2017/222873 Al 28 December 2017 (28.12.2017) WIP0 I PCT — (51) (21) (22) (25) Filing Language: (26) (30) (71) (72) International Patent Classification: H01L 21/84 (2006.01) HO1L 27/12 (2006.01) H01L 21/20 (2006.01) H01L 33/02 (2010.01) (74) H01L 21/30 (2006.01) International Application Number: PCT/US2017/037213 (81) International Filing Date: 13 June 2017 (13.06.2017) English Publication Language: English Priority Data: 62/354,623 24 June 2016 (24.06.2016) US Applicant: QUORA TECHNOLOGY, INC. [US/US]; 2306 Walsh Avenue, Santa Clara, California 95051 (US). Inventors: ODNOBLYUDOV, Vladimir; c/o Quora (84) Technology, Inc., 2306 Walsh Avenue, Santa Clara, Cali- fornia 95032 (US). BASCERI, Cem; c/o Quora Technolo- gy, Inc., 2306 Walsh Avenue, Santa Clara, California 95051 (US). FARRENS, Shari; c/o Quora Technology, Inc., 2306 Walsh Avenue, Santa Clara, California 95051 (US). Agent: LARGENT, Craig C. et al.; Kilpatrick Townsend & Stockton LLP, Mailstop: IP Docketing-22, 1100 Peachtree Street, Suite 2800, Atlanta, Georgia 30309 (US). Designated States (unless otherwise indicated, for every kind of national protection available): AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. Designated States (unless otherwise indicated, for every kind of regional protection available): ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, = Title: : the bonding layer to expose at least a portion of the barrier layer and define fill regions, and depositing a second bonding at least a portion of the exposed barrier layer and the fill regions. (54) ---- substrate POLYCRYSTALLINE CERAMIC SUBSTRATE AND METHOD OF MANUFACTURE ......., 5 _ ceramic a portion layer on _ = • . . • 118 = = = = = f r ,ff \ - 116 iti 7 _ ,\" 114 ''\"--112 = = = = = 1 -1 M IN GC ei ei el (57) IN ,1 of 0 the ei • „ „ .4 112 114 A method of fabricating a ceramic substrate structure includes providing a ceramic substrate, encapsulating the in a barrier layer, and forming a bonding layer coupled to the barrier layer. The method further includes removing . 116 FIG. 1A 118 C [Continued on next page] WO 2017/222873 Al IMEDIMOM0101011MMEMODIMMOHMOHIIMOVOIMIE TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, SK, SM, GQ, GW, KM, ML, MR, NE, SN, TD, TG). Published: — with international search report (Art. 21(3))