Patent SG-11201903183Q-A (SG)
Title: Advanced hydrogen passivation that mitigates hydrogen-induced recombination (hir) and surface passivation deterioration in pv devices
Inventor: WENHAM STUART ROSS
IPC: H01L21/324
Filed: 2017-11-22
Abstract: INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property ::---` , 1#111011110111010101111101 110 1 0011101111011101fl 1101 OINIO HON Organization International Bureau (10) International Publication Number 03 (43) International Publication Date .....•\"\" WO 2018/094462 Al 31 May 2018 (31.05.2018) WIPO I PCT (51) (21) International Application Number: (22) International Filing Date: (25) Filing Language: (26) Publication Language: (30) International Patent Classification: (71) Applicant: NEWSOUTH INNOVATIONS PTY H01L 21/30 (2006.01) HO1L 21/324 (2006.01) LIMITED [AU/AU]; Rupert Myers Building, Gate 14, Barker Street, UNSW, Sydney, New South Wales 2052 PCT/AU2017/051290 (AU). (72) Inventors: WENHAM, Stuart Ross; 19 Sturt Road, 22 November 2017 (22.11.2017) Cronulla, New South Wales 2230 (AU). CIESLA, Alison; 19 Sturt Road, Cronulla, New South Wales 2230 (AU). English BAGNALL, Darren; 1 Garnet St, Coogee, New South English Wales 2034 (AU). CHEN, Ran; 2214/43 Wilson Street, Botany, New South Wales 2019 (AU). ABBOTT, Mal- Priority Data: colm David; 36 Dalleys Road, Naremburn, New South 2016904784 22 November 2016 (22.11.2016) AU Wales 2065 (AU). HALLAM, Brett Jason; 36A Washing- 2016904785 22 November 2016 (22.11.2016) AU ton Street, Bexley, New South Wales 2207 (AU). CHAN, 2016904786 22 November 2016 (22.11.2016) AU Catherine Emily; 1 Darling St, Kensington, New South 2016904787 22 November 2016 (22.11.2016) AU Wales 2033 (AU). CHONG, Chee Mun; 1/1-3 Cooper 2016904788 22 November 2016 (22.11.2016) AU Park, Bellevue Hill, New South Wales 2023 (AU). CHEN, 2016904789 22 November 2016 (22.11.2016) AU Daniel; 13/6 Myrtle Rd, Bankstown, New South Wales 2016905364 23 December 2016 (23.12.2016) AU 2200 (AU). PAYNE, David Neil; 1/81 Doncaster Avenue, 2017902441 23 June 2017 (23.06.2017) AU Kensington, New South Wales 2033 (AU). MAI, Ly; 27 Burbank Avenue, East Hills, New South Wales 2213 (AU). Title: ADVANCED HYDROGEN PASSIVATION THAT MITIGATES HYDROGEN-INDUCED RECOMBINATION (HIR) SURFACE PASSIVATION DETERIORATION IN PV DEVICES 500 : The present disclosure provides to the use of hydrogen during manufacturing of photovoltaic devices for passivating degradation. The methodologies in or charged state to optimise defect passivation. photons, electric fields or defects in the device or retain hydrogen at specific locations. (54) AND induced ,_ 1 sub-bandgap © locations FIGURE 5 devices. In particular, the disclosure defects in the silicon and addressing light- and manipulation of hydrogen in the use thermal treatments, illumination with or hydrogen, move hydrogen to different ==== 502 - Thermally treating at least a portion of the device in a manner such that, hydrogen atoms migrate towards at least one of the doped regions so that the concentration of hydrogen atoms within the at least one of the doped regions becomes at least 10% higher than a doping concentration of that region 504 - Thermally treating at least a portion of the device in a manner such that the concentration of hydrogen atoms within the at least one of the doped regions drops below the doping concentration of that region Il N ,tD 7r (57) 'I relates ---- neutral GC ei C methodologies for manufacturing photovoltaic the present disclosures take advantage of generation Some of the methodologies disclose in the silicon to control the state of charge [Continued on next page] WO 2018/094462 Al 1111111111111101110111111111110111110100111011110111011111111111111111110111111111111 KIM, Moonyong; 1/32-34 Grosvenor St, Kensington, New South Wales 2033 (AU). FUNG, Tsun Hang; 349/17 High Street, Kensington, New South Wales 2033 (AU). SHI, Zhengrong; 701/1 Kirribilli Avenue, Kirribilli, New South Wales 2061 (AU). (74) Agent: GRIFFITH HACK; Level 22, Allendale Square, 77 St Georges Terrace, Perth, Western Australia 6000 (AU). (81) Designated States (unless otherwise indicated, for every kind of national protection available): AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (84) Designated States (unless otherwise indicated, for every kind of regional protection available): ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG). Published: — with international search report (Art. 21(3))