baber/WOPTO huggingface dataset:
Patent KR-20080024085-A (KR)
Title: Harged particle beam device, method for regulating astigmatism and method of manufacturing device using the same
Inventor: WATANABE KENJI
IPC: H01L21/66
Filed: 2007-09-11
Abstract: A charged particle beam device, a method for adjusting astigmatism using the same, and a device manufacturing method using the same are provided to perform astigmatism adjustment with a simple algorithm using an auto focus value of an image obtained from a pattern on a sample, in a relatively short period of time with high accuracy. A charged particle beam device(300) which projects charged particle beams onto a sample(W) and detects secondary charged particles such as electrons, reflected electrons, and backscattered electrons that are emitted from the sample, for scanning and estimating the sample, the charged particle beam device comprises an astigmatism adjustment unit. The astigmatism adjustment unit is for the astigmatism adjustment of the charged particle beam, comprising a plurality pairs of electrodes or coils that are opposed to each other around an optical axis of the charged particle beam. A corrected voltage having a focus value as a maximum value obtained from an image of a pattern on the sample is applied to the astigmatism adjustment unit.
Patent KR-20080025324-A (KR)
Title: Ultrasonic transducer driving circuit and ultrasonic diagnostic apparatus
Inventor: AMEMIYA SHINICHI
IPC: G01N29/24
Filed: 2007-09-13
Abstract: An ultrasonic transducer driving circuit and an ultrasonic diagnostic apparatus are provided to reduce the size of the circuit without requiring a circuit to convert power voltage of FETs(Field Effect Transistor). An ultrasonic transducer driving circuit(10) includes a positive FET(11P), a negative FET(11N), a positive driver circuit(12P), a negative driver circuit(12N), and an active ground clamp circuit(15). The positive FET outputs positive voltage(+HV) to an output line(W) of an ultrasonic transducer(E) in an on state. The negative FET outputs negative voltage(-HV) to the output line in an on state. The positive driver circuit drives the positive FET based on a positive pulse signal(PP) and a positive threshold(THP) transmitted from a pulser unit, and return voltage(Vo) returned from the output line. The negative driver circuit drives the negative FET based on a negative pulse signal(PN) and a negative threshold(THN) transmitted from the pulser unit, and the return voltage. The active ground clamp circuit returns the output line to ground voltage when the positive and negative FETs are in off states.
Patent KR-20080055605-A (KR)
Title: Electronic-ink display apparatus and the manufacturing method thereof
Inventor: HSU YU CHEN
IPC: G02F1/1679
Filed: 2007-09-14
Abstract: An electronic-ink display device and a manufacturing method thereof are provided to receive the full electric wave radiation in order to perform curing reaction at each portion of an edge sealant. A TFT(Thin Film Transistor) array substrate(200) is prepared. An electric-ink layer(300) is located on the TFT array substrate. A common electrode(420) is located on the electric-ink layer. The second substrate(410) is located on the common electrode. An ultraviolet curable sealant(500) encompasses the electric-ink layer. The TFT array substrate includes the first substrate. Plural TFTs(260) are located on the first substrate. An insulation layer(220) is located on the first insulation layer and covers the TFTs. Plural pixel electrodes(270) are located on the insulation layer. The pixel electrodes are connected with the TFTs electrically and respectively. At least a portion of the ultraviolet curable sealant is not overlapped with the insulation layer. A protection sheet is located on the second substrate.
Patent KR-20090028903-A (KR)
Title: Evaluation method for gettering ability of wafer and apparatus for the same
Inventor: SIM WOO YOUNG
IPC: H01L21/02
Filed: 2007-09-17
Abstract: A method for evaluating a gettering ability of a wafer is provided to grasp a bulk defect remaining on a wafer without destruction of the wafer by forming an evaluation image with an infrared ray laser. A method for evaluating a gettering ability of a wafer comprises the following steps: a step for providing a target wafer on which a metal is gettered(S11); a step for scanning an infrared ray laser on the target wafer(S12); a step for obtaining an evaluation image by detecting a backscattered laser from the target wafer(S13); and a step for measuring a shape of a bulk micro defect on the evaluation image(S14). The infrared ray laser has wavelength of 900 ~ 1200nm.
Patent KR-20080028312-A (KR)
Title: Non-volatile semiconductor memory device and non-volatile semiconductor memory apparatus
Inventor: ONO MIZUKI
IPC: H01L21/8247
Filed: 2007-09-21
Abstract: A non-volatile semiconductor memory element and device is provided to achieve two or more threshold voltages while lowering a power supply voltage, by controlling the variations of a threshold voltage. A first conductive type semiconductor region(8) is formed on a semiconductor substrate(1) in a plate shape. A first insulating layer(9) is formed to cover a first face of the semiconductor region, and a charge accumulating layer is formed to cover the first insulating layer. A second insulating layer(11) is formed to cover the charge accumulating layer, and a first control gate electrode is formed to cover the second insulating layer. A third insulating film(13) is formed to cover a second face of the semiconductor region, and the second face is the opposite face to the first face. A second control gate electrode is formed to cover the third insulating layer. A second conductive source/drain region is formed to be partially overlapped the charge accumulating layer.
Patent KR-20080030933-A (KR)
Title: Flame retardant adhesive composition, and adhesive sheet, coverlay film and flexible copper-clad laminate using same
Inventor: KONDO KAZUNORI
IPC: C09J163/00
Filed: 2007-10-01
Abstract: A flame resistant adhesive composition is provided to realize excellent flame resistance, adhesion, heat resistance and migration resistance even in a multilayer laminate structure while avoiding a need for a halogen-containing material. A flame resistant adhesive composition comprises: (A) a halogen-free epoxy resin; (B) a carboxyl-containing acrylic resin and/or carboxyl-containing acrylonitrile-butadiene rubber; (C) a curing agent; (E) a phosphate compound represented by the following formula 1 and/or a phosphate compound represented by the following formula 3; and (F) an ion scavenger and/or a heavy metal inactivating agent. In formula 1, n is a number of 1-100; X1 is ammonia or a triazine derivative represented by the following formula 2; and p is a number satisfying 0<p<=n+2. In formula 2, Z1 and Z2 are the same or different, and each represents a group represented by the formula of -NR5R6(wherein R5 and R6 are the same or different and each represents H, C1-C6 linear or branched alkyl or methylol), OH, mercapto, C1-C10 linear or branched alkyl, C1-C10 linear or branched alkoxy, phenyl or vinyl. In formula 3, r is a number of 1-100; Y1 is a diamine represented by the formula of R1R2N(CH2)mNR3R4(wherein each of R1, R2, R3 and R4 independently represents a C1-C5 linear or branched alkyl; and m is an integer of 1-10), piperazine or piperazine-containing diamine; and 1 is a number satisfying 0<q<=r+2.
Patent KR-20090034606-A (KR)
Title: Jewelry manufacturing method
Inventor: KIM MYUNG JIN
IPC: A44C27/00
Filed: 2007-10-04
Abstract: A noble metal manufacturing method is provided, which prevents the separation of jewel by directly inserting the jewel into the noble metal and fixing the jewel. A noble metal manufacturing method comprises: an original processing step which completes the specific accessory form by using the wax; a step for inserting so that the upper side and lower-part of jewel can protrude to the outside of the wax by heating the jewel on the upper plate of the wax; a step for removing the wax after the gypsum being poured in the original and cooling in the room temperature after fusing the gold or the silver and injecting it into the mold frame; a step for giving the final touch to the surface of jewel and metal; a polishing step; and a metal polishing step.
Patent KR-20090039146-A (KR)
Title: Selective compression transmission system and method for wireless network
Inventor: CHUNG SUNG WOO
IPC: H04N21/238
Filed: 2007-10-17
Abstract: A data file transmission system and a method for selectively compressing a data file are provided to transmit a data file as compressed or uncompressed depending upon a transfer rate of a network and an extension of a data file. A data storage(10) is built in a server or a client, and stores various data. A reader(20) comprises a file reader(21) and an extension recognizer(22). The file reader reads a data file from the data storage. The extension recognizer recognizes an extension of a data file being read by the file reader, determines whether the data file is needed to be compressed or not, and classifies the data file. A file compressing unit(30) compresses a file transmitted from a reader, and stores the compressed file in data storage. A transfer rate recognizer(40) recognizes a transfer rate of a network wirelessly connected, and compares the transfer rate to a base rate. A file selector(50) determines whether to select a compressed file or uncompressed file depending upon the acknowledged transfer rate is selected. A file transmitter(60) transmits a delivered data file.
Patent KR-20090039297-A (KR)
Title: A lighting button for av system of car
Inventor: KIM DONG IL
IPC: H01H13/02
Filed: 2007-10-18
Abstract: A light button for an AV system of a car is provided to improve durability by stably supporting an upper cover by a base plate. A light button of an AV(Audio-Visual) system of a car includes a base plate(40) and an upper cover(30). A base plate is slidably installed in a front panel. The base plate pressurizes a switch terminal of a switchboard. The upper cover is coupled in the upper part of the base plate. The upper cover includes a character printing unit(32) and an extension unit(36). The extension unit is extended from one side of the character printing unit. A coupling unit(45) is formed in one side of the upper part of the base plate. The coupling unit is coupled in the lower surface of the extension unit. A guide rib(33) is formed in the lower surface of the character printing unit of the upper cover. The upper part of the base plate is inserted into the guide rib.
Patent KR-20080039244-A (KR)
Title: Method of manufacturing silicon carbide semiconductor device
Inventor: NAKAMURA HIROKI
IPC: H01L29/80
Filed: 2007-10-24
Abstract: A method for manufacturing a silicon carbide semiconductor device is provided to remove moisture included in BPSG of an interlayer dielectric by performing a dehydration process. A channel region made of silicon carbide is formed on a substrate made of silicon carbide. The channel region provides an electric current passage. A first impurity region is formed at an upstream side of the electric current passage on the substrate. A second impurity region is formed at a downstream side of the electric current passage on the substrate. A gate insulation layer is formed on a surface of the channel region. A gate electrode is formed on the gate insulation layer in order to form a semiconductor element. A layer is formed on the semiconductor element in order to provide a material of an interlayer dielectric. The interlayer dielectric is formed from the layer. A reflow process is performed at temperature of 700 degrees centigrade and more in wet atmosphere in order to round and oxidize an edge of the gate electrode. The temperature is decreased at the temperature of 700 degrees and less. A dehydration process is performed in the inert gas atmosphere in order to dehydrate the interlayer dielectric. The channel region provides a channel of the semiconductor element. The channel is controlled by controlling a voltage applied to the gate electrode.
Patent KR-20090041841-A (KR)
Title: Hot-water supply safety lever for cold and hot water purifier
Inventor: YOON HEE JONG
IPC: B67D3/00
Filed: 2007-10-25
Abstract: A hot-water supply safety lever of a cooling and heating water machine is provided to prevent water in the water machine from being discharged due to carelessness by opening a vent only in case a push member and an auxiliary push member are contacted. A hot-water supply safety lever of a cooling and heating water machine comprises: a lever body(2) having a vent(8) which is mounted on a water- purifier or a cooling and heating water machine and ejects water included in the inside to outside; an opening and closing member which are installed at the inner part of a main body with receiving the outward elasticity of an elastic member and opens and closes the vent; an operational shaft connected to the opening and closing member; a side plate hinge-coupled with the operational shaft; and a push member(22a,22b) extended from the side plate. In the lower part of push member, an auxiliary push member(26) is installed.
Patent KR-20090043894-A (KR)
Inventor: OH JEONG TAEK
IPC: G02B5/20
Filed: 2007-10-30
Abstract: 본 발명은 칼라필터와 이의 제조방법에 관한 것으로서, 본 발명은 기판상에 Red(R), Green(G), Blue(B) 착색패턴을 형성하여 픽셀을 형성하거나, 상기 착색패턴의 상부에 투명 셀캡을 고정해 픽셀패턴을 형성하는 것을 특징으로 하는 칼라필터를 제조할 수 있도록 하며, 특히 상기 착색패턴은 잉크젯 방식으로 구현하며, 투명 셀캡은 투명 액체를 적하시켜 소성하는 방식으로 픽셀을 실현함으로써, 블랙매트릭스 패턴 형성을 제거하고 공정의 단순화를 꾀할 수 있도록 한다. 
     본 발명에 따르면, 잉크젯 방식을 이용하여 착색패턴을 형성하여 픽셀패턴을 형성하거나, 상기 착색패턴의 상부에 투명캡을 이용해 픽셀을 형성함으로써, 블랙매트릭스의 패턴공정을 배제하여 공정의 단순화 및 재료 원가의 절감을 구현할 수 있는 효과가 있다. 
       
     칼라필터, 블랙매트릭스, 액정표시장치
Patent KR-20090047982-A (KR)
Inventor: KANG KHIL OHK
IPC: G11C7/10
Filed: 2007-11-09
Abstract: 본 발명의 반도체 메모리 장치는, 외부 공급전원의 레벨을 감지하여 노멀 파워 업 신호를 생성하는 노멀 파워 업 신호 생성 수단; 상기 노멀 파워 업 신호에 응답하여 동작을 개시하는 노멀 회로; 출력용 외부 전원의 레벨을 감지하여 출력 파워 업 신호를 생성하는 출력용 파워 업 신호 생성 수단; 및 상기 출력용 파워 업 신호에 응답하여 동작을 개시하는 데이터 출력 회로;를 포함하는 것을 특징으로 한다. 
       
     반도체 메모리 장치, 파워 업, 출력용 외부 전원
Patent KR-20090048000-A (KR)
Inventor: KIM KI DONG
IPC: H04L9/32
Filed: 2007-11-09
Abstract: 프로그램 설치 인증 시스템(100)으로부터 사용자의 휴대 기기(400)로 프로그램을 설치하기 위한 휴대 기기(400)에 대한 프로그램 설치 인증 방법이 제공된다.  본 발명에 따른 프로그램 설치 인증 방법은 (a) 고객 정보 DB(140)를 마련하는 단계와, (b) 상기 휴대 기기(400)에서 추출된 기기 정보와, 상기 휴대 기기(400)에 설치할 프로그램 정보를 상기 사용자 단말(300)로부터 인터넷망(200)을 통해 받는 단계와, (c) 상기 사용자 단말(300)로부터 받은 로그인 정보, 상기 휴대 기기(400)의 기기 정보 및 상기 설치할 프로그램 정보를 상기 고객 정보 DB(140)에 저장된 정보와 서로 비교하는 단계와, (d) 상기 정보가 모두 일치하는 경우에만 상기 설치할 프로그램을 상기 사용자 단말(300)에 다운로드하도록 하는 단계와, (e) 상기 사용자 단말(300)에 다운로드된 상기 프로그램을 상기 휴대 기기(400)로 전송하여 설치하는 단계를 포함하는 것을 특징으로 한다. 
       
     프로그램, 설치, 실행, 인증, 휴대 기기
Patent KR-20090048855-A (KR)
Inventor: UH HWA IL
IPC: H01M2/10
Filed: 2007-11-12
Abstract: 안전벤트의 두께를 두껍게 형성하면서도 작동압력에서 안전벤트의 파열이 신속하게 이루어져 안전성 및 신뢰성이 향상된 이차전지를 제공한다.  본발명에 따른 이차전지는 양극판, 음극판 및 세퍼레이터를 구비하는 전극조립체, 상기 전극조립체가 수용되도록 상부가 개구된 캔, 상기 캔의 상부를 밀봉하고, 안전벤트가 형성된 캡플레이트, 및 상기 전극조립체와 상기 캡플레이트 사이에 배치된 절연케이스를 포함하고, 상기 절연케이스는 상기 안전벤트와 대응하는 영역에 형성된 개구부 및 상기 개구부를 둘러싸면서 상기 안전벤트 쪽으로 돌출된 관 형상의 격벽으로 이루어지는 내압유도부를 포함한다. 
       
     이차전지, 절연케이스, 캡플레이트, 내압유도부
Patent KR-20090053247-A (KR)
Inventor: GIM GYEONG GON
IPC: B05B3/04
Filed: 2007-11-23
Abstract: 본 발명은 노후된 도관의 내주면에서 스케일 등을 제거한 후 도관의 내주면을 도장하는 도관도장장치에 관한 것이다. 
     본 발명에 따른 도관도장장치는 이송대차(100)에 도료를 저장하는 저장통(110)과 도료펌핑장치(120)가 장착되고, 상기 이송대차(100)의 후단에 로터리 조인트(1)의 고정축(10)이 장착되고, 고정축(10)에 제 1 외측 회전축(20)과 제 2 외측 회전축(30)이 장착되어, 도료가 고정축(10)의 유체통로(11)를 통해 제 1 외측 회전축(20)과 제 2 외측 회전축(30)의 배출구(21, 31)로 공급되고, 상기 도료가 배출구(21, 31)에서 호스(61, 62)를 통해 분사건(140, 145)으로 공급되고, 상기 제 1 외측 회전축(20)의 일단에 제 1 풀리(23)가 장착되고, 이송대차에 장착된 제 1 모터(130)의 동력이 제 1 풀리(23)로 전달되고, 고정축(10)의 내측에 내측 회전축(40)이 장착되고, 상기 내측 회전축(40)의 일단에 형성된 플랜지부(41)와 제 2 외측 회전축(30)의 일단이 볼트(42)에 의해 결합되고, 내측 회전축(40)의 타단에 제 2 풀리(43)가 장착되며, 이송대차(100)의 내부에 장착된 제 2 모터(145)의 동력이 제 2 풀리(43)로 전달되므로서, 제 1 풀리(23)에 의해 제 1 외측 회전축(20)에 장착된 제 1 회전체(150)가 어느 한 방향으로 회전되고, 제 2 풀리(43)에 의해 제 2 외측 회전축(30)에 장착된 제 2 회전체(155)가 제 1 회전체(150)의 반대 방향으로 회전되어, 상기 제 1 회전체(150)에 장착된 분사건(140)과 제 2 회전체(155)에 장착된 분사건(145)이 서로 반대 방향으로 회전하면서 도료를 분사하는 것을 특징 으로 한다.
Patent KR-20090053498-A (KR)
Inventor: YU JAE WOONG
IPC: H01L31/042
Filed: 2007-11-23
Abstract: 본 발명은 유기박막 태양전지의 제조 시 소자 면적분할을 통해 소자의 광전변환효율이 향상된 유기 광전변환소자를 제조하는 방법 및 이 방법에 의해 제조된 유기 광전변환소자에 관한 것이다.  구체적으로, 본 발명은 소자 내부에 절연성 분할선의 패턴구조 도입에 의한 소자 면적분할을 통해 소자간의 측면직렬저항을 감소시켜 소자의 광전변환효율이 향상된 유기 광전변환소자를 제조하는 방법 및 이 방법에 의해 제조된 유기 광전변환소자에 관한 것이다.  본 발명에 따른 제조방법은 소자 면적분할을 통해 소자를 보다 작은 크기로 분할하여 분할된 소형 소자 각각의 측면직렬저항이 서로에게 독립적으로 작용하게 함으로써 서로의 전류 출력에 방해가 되지 않게 하여 소자의 광전변환효율을 향상시키는 기술로, 차세대 대면적의 유기박막 태양전지 소자의 제작 및 개발에 매우 유용하게 사용될 수 있다. 
       
     유기태양전지, 유기박막 광전변환소자, 측면직렬저항, 소자 면적분할
Patent KR-20090055950-A (KR)
Title: Soybean curd containing powder of barley-leaves and thereof method of manufacture
Inventor: KIM JANG SIK
IPC: A23L11/00
Filed: 2007-11-29
Abstract: Bean curd containing barley leaf powder and a preparation method thereof are provided to enrich the bean curd with vitamins and minerals while maintaining the specific taste and flavor of the bean curd by adding barley leaf powder to pulverized beans and boiling the mixture. A method for preparing bean curd containing barley leaf powder comprises the following steps of: immersing beans in water for 24 hours; pulverizing the swollen beans with water; adding 1-30wt% of barley leaf powder to the pulverized beans and boiling the mixture with water; filtering the boiled soy milk in order to remove solid content from the soy milk; adding bittern to the filtered soy milk so as to coagulate the soybean protein; and molding the coagulated soybean protein.
Patent KR-20090056594-A (KR)
Title: Semiconductor power module package with temperature sensor mounted thereon and method of fabricating the same
Inventor: LEE KEUN HYUK
IPC: H01L23/42
Filed: 2007-11-30
Abstract: A semiconductor power module package with a temperature sensor mounted thereon and a method of fabricating the same are provided to sense the temperature of power semiconductor accurately by mounting a thermistor on the semiconductor chip directly before forming a sealing member. Semiconductor chips(121,125) are arranged on the top of a substrate(110), and a thermo-sensitive device(130) is mounted on the top of at least one semiconductor chip among semiconductor chips. Leads(171,175,176) are electrically connected to semiconductor chips and a thermo-sensitive device. A sealing unit(190) exposes parts of leads and rear side of the substrate and covers the top of the substrate, the semiconductor chips, and the thermo-sensitive device. The thermo-sensitive device more includes a first electrode terminal and a second electrode terminal connected to the leads.
Patent KR-20090059431-A (KR)
Title: Apparatus and method for adaptive beanforming
Inventor: KIM JU YEUN
IPC: H04B7/04
Filed: 2007-12-06
Abstract: An adaptive beam-forming apparatus and a method thereof are provided to improve the reception performance of a DMB(Digital Multimedia Broadcasting) system. Plural radio frequency tuners receive the same DMG signal every frame(S100), and an adaptive beam-forming unit estimates the starting location of a phase reference signal(S200). The adaptive beam-forming unit sets up a weight for forming a beam in the direction of a receiving signal by using a phase reference signal(S300), and forms a main beam in the direction of the receiving signal by using the phase reference signal and the weight(S400).
Patent KR-20090059631-A (KR)
Title: Method of clearing failed code of body units for car
Inventor: LEE DONG HO
IPC: B60R16/00
Filed: 2007-12-07
Abstract: An error code erasing method for vehicle body unit is provided to reduce the time for deleting error codes in the end line of vehicle assembly process. An error code erasing method for vehicle body unit comprises a step of transmitting communications start request signals and maintenance signals to a plurality of body units through IPM(Intelligent Power Module) or BCM(Body Control Module) in diagnostic equipment(S402), a step of transmits error code delete request signals from the IPM to the body units(S406), a step of deleting error codes from the body units and then transmitting error code delete result response signals to the IPM in the specific order(S412), a step of collecting each error code delete result response signal and storing them while in a standby mode for the designated time(S414), a step transmitting the collected information to diagnostic equipment(S416), and a step of displaying the error code delete result of each body unit in the diagnostic equipment(S418).
Patent KR-20090029615-A (KR)
Title: Belt driven flow current power generation unit
Inventor: KIM KI HO
IPC: F03B13/08
Filed: 2007-12-07
Abstract: An integrated belt-driven fluid flux generating device is provided to repair a plurality of components steadily by lifting a case including a rotary unit and a generator with an ascent and descent unit. An integrated belt-driven fluid flux generating device comprises: a case(200) in which a part is protruded on the surface of water and in which the rest is positioned under the water at the same time; a driving shaft(300) protruded to the outside of the case; a propeller(400) installed at the driving shaft; a generator mounting unit(500) which is equipped in the upper of the case and in which a generator(510) is mounted; and a power transmission unit(600) which is installed inside the case, and rotates a rotary shaft(511) of the generator.
Patent KR-20090061370-A (KR)
Title: Cassette apparatus for die casting
Inventor: KIM HAK IN
IPC: B22D17/20
Filed: 2007-12-11
Abstract: A cassette device for die casting is provided to improve workability by controlling the size and position depending on the size of a mold. A cassette device for die casting comprises a nipple block unit(10), a spray nozzle unit(20), and a length adjustment unit(30). The nipple block unit is composed of a nipple block(11), a fixed side nipple block(13), and a movable side nipple block(15) and installed beneath an upper structure(7) to move up/down and right/left, where the blocks are connected through each line so that the air and release agent provided from the upper structure are supplied to the fixed side and the movable side nipple block through the nipple block. The spray nozzle unit is mounted on the fixed side and the movable side nipple block of the nipple block unit to spray the air and the release agent. The length adjustment unit is mounted on the bottom of the nipple block to enable the movable side nipple block to slide.
Patent KR-20080056088-A (KR)
Title: Volume resistivity measurement apparatus for dielectric layer of electrostatic chuck and measurement method using the same
Inventor: YOKOTA MINORU
IPC: H01L21/66
Filed: 2007-12-12
Abstract: An apparatus for measuring volume resistivity of a dielectric layer of an electrostatic chuck is provided to rapidly measure volume resistivity by enabling measurement of the volume resistivity of the dielectric layer without perforating the electrostatic chuck. A pair of conductive rubber electrodes(11,12) have confronting measurement surfaces on the surface of a dielectric layer of an electrostatic chuck to be measured wherein the measurement surfaces are disposed in the same plane at intervals. A DC power source(13) and an ammeter(14) are installed in an electric circuit connected to the pair of conductive rubber electrodes. In each conductive rubber electrode, the measurement surfaces have the same area and the same resistance value. The interval between the conductive rubber electrodes is at least 6 times as thick as the dielectric layer of the electrostatic chuck. Each conductive rubber electrode has volume resistivity of 1x10^5 ohm centimeter or lower. The JIS-A hardness of each conductive rubber electrode is 60-80 Hs.