baber/WOPTO huggingface dataset:
Patent KR-20180102151-A (KR)
Title: 하이드록시 작용성 알킬 폴리우레아 가교제
Inventor: SWARUP SHANTI
IPC: B27N7/00
Filed: 2017-01-13
Abstract: 제1항에 제시된 화학식을 갖는 하이드록시 작용성 알킬 폴리우레아가 개시되되, R은 이소시아누레이트 잔기, 뷰렛 잔기, 알로포네이트 잔기, 글리콜우릴 잔기, 벤조구아나민 잔기, 폴리에터아민 잔기, 및/또는 폴리에터아민과 상이하고 500 이상의 Mn을 갖는 중합체성 잔기를 포함하고; 각각의 R 1 은 독립적으로 수소, 1개 이상의 탄소를 갖는 알킬 또는 2개 이상의 탄소를 갖는 하이드록시 작용성 알킬이되, 하나 이상의 R 1 이 2개 이상의 탄소를 갖는 하이드록시 작용성 알킬이고; n은 2 내지 6이다.  또한, 필름-형성 수지, 및 제4항에 제시된 화학식을 갖는 하이드록시 작용성 알킬 폴리우레아 가교제를 포함하는 코팅이 개시되되, R 2 는 치환되거나 치환되지 않은 C 1  내지 C 36  알킬 기, 방향족 기, 이소시아누레이트 잔기, 뷰렛 잔기, 알로포네이트 잔기, 글리콜우릴 잔기, 벤조구아나민 잔기, 폴리에터아민 잔기, 및/또는 폴리에터아민과 상이하고 500 이상의 Mn을 갖는 중합체성 잔기이고; 각각의 R 1 은 독립적으로 수소, 1개 이상의 탄소를 갖는 알킬 또는 2개 이상의 탄소를 갖는 하이드록시 작용성 알킬이되, 하나 이상의 R 1 이 2개 이상의 탄소를 갖는 하이드록시 작용성 알킬이고; n은 2 내지 6이되, R 2 가 치환되거나 치환되지 않은 C 1  내지 C 36  알킬 기인 경우, 필름-형성 수지는, 폴리우레아와 반응하여 에스터 연결을 형성하는 COOH 작용기를 포함한다.  또한, 다른 하이드록시 작용성 알킬 폴리우레아 화합물, 이를 사용하여 제조된 중합체, 및 이를 포함하는 조성물이 개시되고, 마찬가지로 본원에 기재된 임의의 조성물을 사용하여 적어도 부분적으로 코팅되거나 형성된 기판이 개시된다.
Patent KR-20180104015-A (KR)
Title: 플라즈마 처리 장치
Inventor: YAMAZAWA YOHEI
IPC: H03H7/40
Filed: 2017-01-10
Abstract: 처리 용기와, 상기 처리 용기에 고주파 전력을 공급하고, 상기 처리 용기의 내부에서 플라즈마를 형성시키는 고주파 전원과, 상기 고주파 전원과 상기 처리 용기와의 사이에 마련된 소정의 접속부와 상기 접속부에서 상기 처리 용기와 병렬로 접속되고 상기 접속부에서 하류측을 보았을 때의 부하 임피던스의 변동을 억제하는 부하 변동 안정화 회로를 가지는 플라즈마 처리 장치가 제공된다.
Patent KR-20180119614-A (KR)
Title: 적층 블록 코어, 적층 블록, 및 적층 블록의 제조 방법
Inventor: OHTA MOTOKI
IPC: H01F27/24
Filed: 2017-02-27
Abstract: Fe 100-a-b-c-d B a Si b Cu c M d 〔여기서,a, b, c 및 d는 모두 원자%이며, 각각 13.0≤a≤17.0, 3.5≤b≤5.0, 0.6≤c≤1.1, 및 0≤d≤0.5를 만족시킨다.  M은, Ti, Zr, Hf, V, Nb, Ta, Cr, Mo 및 W로 이루어지는 군에서 선택되는 적어도 1종의 원소를 나타낸다〕로 표시되는 조성을 갖는 나노 결정 합금 리본편이 적층되어 있는 적층 블록을 구비하는, 적층 블록 코어.
Patent KR-20190013731-A (KR)
Title: 도체의 직장 외측 단부를 분리 및 밀폐하기 위한 방법 및 디바이스
Inventor: GIEZENAAR JAAP BERNARDUS
IPC: A22B5/00
Filed: 2017-05-26
Abstract: 본 발명은 도체의 직장 외측 단부(3)를 분리 및 밀폐하기 위한 방법에 관한 것이며, 그 방법은: 직장 외측 단부를 방출하는 프로세싱 단계; 방출된 직장 외측 단부를 도체 밖으로 견인하는 프로세싱 단계; 견인된 직장 외측 단부를 커버링 재료 시트(4) 상에 배치하는 프로세싱 단계; 및 커버링 재료 시트가 직장 외측 단부를 밀폐하도록, 견인된 직장 외측 단부 주위에 커버링 재료 시트를 위치시키는 프로세싱 단계를 포함한다.  본 발명은 또한, 도체의 직장 외측 단부를 분리 및 밀폐하기 위한 디바이스에 관한 것이다.
Patent KR-20190009747-A (KR)
Title: 슬립 스틱에 중점을 둔 신용 카드 배출기
Inventor: VAN GEER RENE JOHAN
IPC: A45C11/18
Filed: 2017-05-26
Abstract: 카드들을 위한 홀더는, 카드들의 스택 주위에 꼭 맞고 카드들을 위치시키고 제거하기 위한 적어도 하나의 카드 개구부를 가지는 하우징을 포함한다. 상기 하우징 내에, 손가락 버튼 조작 배출기 암이 마련되어 상기 카드 개구부를 통해 상기 카드들이 상기 하우징으로부터 부분적으로 슬라이딩될 수 있다. 상기 배출기 암은 그 회전 지점으로부터 먼 그 밀단 부분이 상기 카드 스택까지의 초기 거리에 있는 한편 그 회전 지점으로부터 더 가까운 그 기부 부분은 카드 스택에 맞물리고 또한 그 연장된 위치까지 상기 배출기 암의 추가의 회전에 의해 상기 말단 부분은 이 거리의 취소로 인해 상기 카드 스택에 맞물리기 시작한다.
Patent KR-20190004304-A (KR)
Title: 인공 모발 섬유
Inventor: MIYATA KOJI
IPC: D01F8/14
Filed: 2017-03-21
Abstract: 심부와 초부가 박리되는 것을 방지하고 인모와 비슷한 양호한 촉감을 가지며 또한 컬 유지성이 뛰어난 인공 모발 섬유를 제공하는 것이다. 본 발명에 의하면, 심부와 상기 심부을 덮는 초부로 구성되는 심초 구조를 갖는 인공 모발 섬유로서, 상기 심부가 폴리에스테르를 포함한 심부 수지 조성물로 구성되고, 상기 초부가 폴리아미드를 포함한 초부 수지 조성물로 구성되고, 상기 심부 및 상기 초부의 심/초 질량비가 40/60~90/10이고, 상기 심부 수지 조성물의 폴리에스테르의 용융점도 a와 상기 초부 수지 조성물의 폴리아미드의 용융점도 b의 점도비 a/b가 0.5~2.5인 것을 특징으로 하는 인공 모발 섬유가 제공된다.
Patent KR-20190020657-A (KR)
Title: 입모풍 인공 피혁 및 그 제조 방법
Inventor: MEGURO MASASHI
IPC: D06N3/00
Filed: 2017-06-21
Abstract: 제 1 고분자 탄성체가 함침 부여된, 평균 섬도 0.01 ∼ 0.5 dtex 의 극세 섬유의 입모를 포함하는 입모면을 갖는 포백을 포함하고, 입모면은, ISO 25178 에 준한 면 조도 측정에 있어서, 산술 평균 높이 (Sa) 가, 순방향 및 역방향의 양 방향에 있어서 30 ㎛ 이하이고, 평균 높이로부터 100 ㎛ 이상의 높이를 갖는 산 정점 밀도 (Spd) 가, 순방향 및 역방향의 양 방향에 있어서 30/432 ㎟ 이하이고, 또한 그것들의 차 (절대값) 가 20/432 ㎟ 이하인 입모풍 인공 피혁이다.
Patent KR-20190018421-A (KR)
Title: 소형 부하체의 지정 가능한 목표 위치를 유지하기 위한 보상 장치
Inventor: RONDEEL ARTHUR
IPC: B66D1/52
Filed: 2017-03-20
Abstract: 본 발명은 케이블 호이스트(202)를 사용하여 취급될 수 있고 케이블 호이스트의 케이블(216)에 부착되는 부하체(206)의 지정 가능한 목표 위치를 유지하기 위한 보상 장치(200)에 관한 것으로서, 상기 부하체의 각각의 지정 가능한 목표 위치는 비의도적으로 목표 위치로부터 벗어난 실제 위치로 변경된다. 상기 보상 장치는 부하체(206)의 각각의 실제 위치를 검출하기 위한 적어도 하나의 센서 장치(240, 242); 케이블 호이스트(202)의 케이블 길이를 지정하기 위한 회전 구동부(226, 228, 230); 및 상기 부하체(206)가 그 목표 위치를 다시 취할 때까지 상기 각각의 실제 위치가 검출된 후에 상기 케이블 길이를 변경하는 적어도 하나의 제어기(244)로 이루어진다. 각각의 구동부(226, 228, 230)는 반대 회전 방향을 갖는 적어도 하나의 유압 모터(226, 228, 230)에 의해 적어도 부분적으로 제어될 수 있으며, 상기 모터는 작동 중에 상이한 압력 수준을 갖는 적어도 2개의 압력 챔버들(250, 252)을 구비함으로써, 각각의 유압 모터(226, 228, 230)에 대한 구동 섹션(248)을 형성하며 제어기(244)에 의해 작동될 수 있는 작동 장치(246)에 연결된다.
Patent KR-20200086887-A (KR)
Inventor: CHOI YONG SUG
IPC: G01R27/02
Filed: 2019-01-10
Abstract: According to one embodiment of the present invention, disclosed are an isolation resistance measuring device and an isolation resistance measuring method, which are able to measure an isolation resistance. According to one embodiment of the present invention, the isolation resistance measuring device comprises: a first switch connected to a first terminal whose one end is connected to a positive electrode of a battery; a first detection unit which is connected to a part between the other end of the first switch and a second terminal connected to a case forming the exterior of the device; a second switch connected to a third terminal whose one end is connected to a negative electrode of the battery; a second detection unit connected to a part between the other end of the second switch and the second terminal; and a measuring unit which acquires a plurality of first detection voltages from the first detection unit when the first switch is on and the second switch is off, acquires a plurality of second detection voltages from the second detection unit when the first switch is off and the second switch is on, and calculates a first isolation resistance substance existing between the first terminal and the second terminal and a second isolation resistance substance existing between the third terminal and the second terminal, based on the plurality of first detection voltages and the plurality of second detection voltages.
Patent KR-20200091223-A (KR)
Inventor: LEE EUNGSUK
IPC: G05D1/08
Filed: 2019-01-22
Abstract: The present invention relates to a method which can control flatness of a slip form manufacturing a caisson in real time by applying an electronic biaxial angle sensor. The method stably implements interactions between the biaxial angle sensor and a solenoid valve and increases the stability of a worker and the shape control capacity of a caisson structure to increase the entire construction control convenience and quickness.
Patent KR-20200093102-A (KR)
Inventor: PARK KUN HA
IPC: B21B28/02
Filed: 2019-01-25
Abstract: The present invention relates to an apparatus for cleaning a rolling roll of an electrode, which removes contaminants of the rolling roll of the electrode. The apparatus for cleaning a rolling roll of an electrode includes: a cleaning part bringing a cleaning member in contact with the rolling roll to clean the rolling roll; an air spray part spraying air to the rolling roll; a heating part applying heat to the rolling roll to dry the rolling roll; and a scraper part mechanically removing cleaning liquid and foreign substances attached to the rolling roll.
Patent KR-20200095255-A (KR)
Title: Pharmaceutical composition comprising omega fatty acids, and infusion preparation comprising the same
Inventor: KIM DONGKYU
IPC: A61P29/00
Filed: 2019-01-31
Abstract: The present invention relates to a pharmaceutical composition containing omega-3 and 6 fatty acids, and an infusion formulation, wherein the composition of the present invention contains a weight ratio of omega-3 and omega-6 in a specific ratio, thereby improving anti-inflammatory and immune enhancing effects and thus exhibiting excellent effects on inflammatory diseases and immune-lowering diseases caused by nutritional deficiencies. In addition, the infusion formulation shows excellent clinical efficacy while ensuring greatly improved stability of the formulation.
Patent KR-20200104747-A (KR)
Title: FUNSTIONAL Straw
Inventor: YANG HYE YOUNG
IPC: A47G21/18
Filed: 2019-02-27
Abstract: The present invention relates to a functional straw, which can be cleaned after being used as the straw used for drinking a beverage by allowing a surface to be sealed or opened, thereby being reused. The functional straw comprises a first stepped protrusion at one side and a second stepped protrusion corresponding to the first stepped protrusion at the other side so that the first stepped protrusion and the second stepped protrusion are lengthily formed in a longitudinal direction at a side surface of the pipe-shaped or tube-shaped straw made of a silicon or plastic material, wherein the first stepped protrusion and the second stepped protrusion are coupled to each other to overlap each other and be detached from each other so that a side opening part is formed when the first stepped protrusion and the second stepped protrusion are separated from each other. Therefore, the functional straw can be reused by being cleaned after being used.
Patent KR-20200104758-A (KR)
Inventor: KU YO HAN
IPC: G08B21/02
Filed: 2019-02-27
Abstract: According to one disclosure, provided is a method for determining a dangerous situation of a user through first danger determination which has analyzed a bio-signal of a user and second danger determination which has analyzed surrounding environment information, and managing the safety. The method comprises the steps of: sensing a bio-signal of a user by using at least one sensor every predetermined period; matching a surrounding environment of the user with any one of a plurality of state groups classified in accordance with the activity attribute of the user, when the change in the bio-signal of the user exceeds a threshold value; determining a danger level for the surrounding environment based on setting information of the matched state group and the bio-signal of the user; and transmitting a notification message to a terminal of a guardian in accordance with the determined danger level.
Patent KR-20200105188-A (KR)
Title: A interception wall for pouring the concrete
Inventor: KIM GI CHAN
IPC: E04G11/36
Filed: 2019-02-28
Abstract: The present invention relates to a concrete deposition blocker and, more specifically, to a concrete deposition blocker to prevent deposited concrete from spilling when determining a deposition range by temporarily dividing into surface areas at a site where concrete is deposited in a wide area, and depositing the concrete from the divided range. Through holes (13) penetrated by fastening bars (20) are drilled on an upper plate (11) and a lower plate (12) of a deposition blocker frame (10), and the fastening bars (20) with finishing caps (21) inserted into the upper ends thereof penetrate. The concrete deposition blocker (100) fastens a thick foam pipe (40) from below. A problem where the assembled foam pipe (40) is easily detached in transport, storage, etc. is alleviated. The foam pipe (40) is easily assembled on the deposition blocker frame (10), and is prevented from being detached.
Patent KR-20200106684-A (KR)
Title: Wire connecting apparatus and lifing method thereof
Inventor: CHO KEON WOONG
IPC: B66C13/06
Filed: 2019-03-05
Abstract: The present invention proposes a length-adjustable wire connection apparatus capable of minimizing contact with each other by distributing a plurality of wires to a crane and a method for lifting a weight using the same. The length-adjustable wire connection apparatus of the present invention includes: a pair of inner coupling units (110) connected to each other; a pair of outer coupling units (120) respectively coupled to the outside of the inner coupling unit (110); an upper wire connection unit (121) coupled to the upper surface of the outer coupling unit (120); a lower wire connection unit (122) coupled to the lower surface of the outer coupling unit (120); and a support unit (123) coupled to the lower surface of the outer coupling unit (120). The inner coupling unit (110) is formed by coupling a pair of a plurality of coupling units having different lengths. The upper wire connection unit (121) and the lower wire connection unit (122) are coupled to the outer coupling unit (120) by bolts. It is preferable that a plurality of bolt holes (h) are formed in the outer coupling unit (120) so that a coupling position of the upper wire connection unit (121) and the lower wire connection unit (122) is varied along the length direction. In this case, as shown in FIG. 2 and FIG. 3, the upper wire connection unit (121) and the lower wire connection unit (122) may have different coupling positions along the longitudinal direction of the outer coupling unit (120).
Patent KR-20190110035-A (KR)
Title: Coating apparatus and method for producing coating film
Inventor: MICHIHIRA HAJIME
IPC: B05D3/00
Filed: 2019-03-14
Abstract: A coating apparatus of the present invention comprises a coating unit for coating a second coating liquid layer on at least one first coating liquid layer which is first coated on a coating object and is relatively moved with the coating object. The apparatus is configured so that the first coating liquid layer and the second coating liquid layer can be solidified to form a coating film. The dimensionless speed which is a moving speed of an interface of the first coating layer with respect to a moving speed of the coating object, and the length of a downstream lip portion of the coating unit satisfy a specific equation.
Patent KR-20200114861-A (KR)
Inventor: YANG GYU HYUNG
IPC: G02F1/1368
Filed: 2019-03-29
Abstract: According to the present invention, a manufacturing method of an array substrate for a liquid crystal display device includes the steps of: (a) forming a gate electrode on a substrate; (b) forming a gate insulating layer on the substrate including the gate electrode; (c) forming an oxide semiconductor layer (IGZO) on the gate insulating layer; (d) forming source/drain electrode on the oxide semiconductor layer; and (e) forming a pixel electrode connected to the source/drain electrode, wherein step (d) is to form a copper-based metal film on the oxide semiconductor layer, and the source/drain electrode is formed by etching the copper-based metal layer with an etchant composition including: hydrogen peroxide; organic acids; citrate; azole compounds; polyhydric alcohol type surfactant; inorganic acids; and water. The present invention uses the etchant composition capable of collectively etching the copper-based metal film without damaging the oxide semiconductor layer.
Patent KR-20200116563-A (KR)
Title: Method for planting vegetables on a vertical wall by recycling PET bottles
Inventor: PARK IN HEE
IPC: A01G27/04
Filed: 2019-04-01
Abstract: The present invention relates to a method for vegetation of plants on a vertical wall using a flowerpot obtained by recycling PET bottles. A vertical wall vegetation method using recycled PET bottles according to the present invention comprises the following steps: forming a front-high-rear-low-type a vegetation hole according to the size of a PET bottle on a vertical wall; manufacturing a PET bottle recycling flowerpot by cutting a body part of the PET bottle at an angle according to the slope of the vegetation hole; putting soil in a cloth bag and planting one or more cloth rods and plants together in the soil of the cloth bag; putting the cloth bag in which the plant is planted into the PET bottle recycling flowerpot; and installing the recycled PET bottle flowerpot with the plants planted in the vegetation hole so that the cut surface of the PET bottle recycling flowerpot is horizontal.
Patent KR-20200118564-A (KR)
Inventor: CHA CHEOL YONG
IPC: C04B24/32
Filed: 2019-04-08
Abstract: The present invention relates to an admixture for gypsum board, a composition for forming a gypsum board, and a gypsum board using the same. More particularly, the present invention relates to a technology which provides an admixture including polystyrene sulfonate compounds, and adjusts the molecular weight (Mw) of the admixture, so that physical properties such as bubble size of the gypsum board, fluidity of the admixture, and setting time are controllable.
Patent KR-20200120273-A (KR)
Inventor: KIM MIN JEONG
IPC: E04F13/08
Filed: 2019-04-12
Abstract: According to the present invention, an integral lightweight steel frame wall for building is constructed after carried into a site by being formed to have a wall height as much as a floor height so that at least one floor can be installed at once by a large-sized dry wall. The integral lightweight steel frame wall in a dry method has a structure forming the wall unlike an existing panel to be installed in the site as the structure of a building itself. That is, in the wall, rigid foamed urethane is sprayed as a finishing material at the front and a core at the middle and an outer finishing material and a lightweight steel frame are integrated so that the wall is finished by inner finishing.
Patent KR-20200121050-A (KR)
Inventor: WOO HAN JAE
IPC: G06Q30/02
Filed: 2019-04-15
Abstract: The present invention may be a payment-based event providing system. More particularly, the present invention may be a payment-based event providing system which may provide an event as a benefit to a user terminal where a card is registered when a user pays with an offline card, or provide an event to the user terminal as a benefit during the estimated time required when the user makes a prepayment or postpayment for a service using simple payment.
Patent KR-20190123221-A (KR)
Title: Transfer unit and method for transferring blister packs
Inventor: HAEHNEL BERND
IPC: B65G47/91
Filed: 2019-04-18
Abstract: In a method for transferring blister packs (4, 6) to a common arrangement position (26) from a first and a second pickup position (22, 23), blister packs (4, 6) at the first and the second pickup position (22, 23) are arranged next to each other in a single row, and are offset outwards from a longitudinal center plane (L) of a transfer unit (14). Then the two blister packs (4, 6) are continuously picked up by two suction arms (24, 25) and are arranged at an arrangement position (26) on an area of the longitudinal center plane (L) from above. After the arrangement step, the blister packs (4, 6) at the arrangement position (26) rotate 180° around the center thereof in comparison to the orientation thereof at the pickup positions. Also, the blister packs (4, 6) acquire a lateral offset during the transfer.
Patent KR-20190122591-A (KR)
Title: Resist composition and patterning process
Inventor: HATAKEYAMA JUN
IPC: G03F7/004
Filed: 2019-04-19
Abstract: The present invention relates to a resist material, which comprises: a base polymer; and a compound containing an aromatic ring-containing group having an iodide benzene ring and a phenolic hydroxy group, and then exhibits improved sensitivity, LWR and CDU.
Patent KR-20200126792-A (KR)
Inventor: KIM JONG HYUN
IPC: G06K19/06
Filed: 2019-04-30
Abstract: According to an embodiment of the present invention, provided is a card including a QR code provided with a magnetic strip or an IC chip containing information of a cardholder. In a plastic card, a QR code is included by generating an original QR code composed of two colors using information contained in the magnetic strip or the IC chip, and then forming a random QR code generated by partitioning each cell constituting the original QR code.
Patent KR-20190134980-A (KR)
Title: Electrohydraulic power brake system of a vehicle for an autonomous driving land vehicle
Inventor: BAREISS ALEXANDER
IPC: B60T13/14
Filed: 2019-05-03
Abstract: The present invention relates to an electrohydraulic vehicle power brake system (1) for a passenger vehicle that runs autonomously on a public road. According to the present invention, an auxiliary brake device (3) is connected to a main brake device (2) so that a vehicle brake system (1) can be operated by the auxiliary brake device (3) in case the main brake device (2) has failed. In order to enable braking pressure to be rapidly formed by the auxiliary brake device (3) even when a brake fluid is cold and viscous, the present invention provides a brake fluid reservoir (27) which is incorporated in the auxiliary brake device (3) and is connected to the hydraulic pump (22) of the auxiliary brake device (3) in a short line length.
Patent KR-20200130786-A (KR)
Title: Potable gas air frier
Inventor: PARK JONG DEUK
IPC: A47J37/06
Filed: 2019-05-12
Abstract: The present invention relates to a portable gas air fryer, which allows cooking using gas. According to an embodiment of the present invention, the portable gas air fryer comprises: an outer container member having a first installation space formed therein, a first inlet for allowing air to be introduced at one side and a first outlet for allowing the air to be discharged at the other side; an inner container member provided inside the first installation space, and having a second installation space formed therein, a second inlet for allowing the air to be introduced at one side, and a second outlet for allowing the air to be discharged at the other side; a basket member for accommodating an object to be cooked in a second installation space part; a motor installed to be driven by using a battery as a power source at one side of the inner container member; a rotary fan positioned within the second installation space, and axially coupled to the motor to be rotated; a coil member positioned in one side of the second installation space, and provided to generate heat; and a lower combustion nozzle having a portable gas container installed at the other side of the first installation space, and burning gas supplied from the portable gas container.
Patent KR-20200133896-A (KR)
Inventor: HWANG JUG HEE
IPC: A61C8/00
Filed: 2019-05-21
Abstract: The invention relates to a dental drill for sinus elevation with crestal approach. The dental drill for sinus elevation with crestal approach includes: a cylindrical extension body (11) that is coupled to a coupling unit (14) of a shank (15); a cutting unit (12) coupled to the extension body (11) to be hemispherical as a whole; and a plurality of cutters (12_1 to 12_4) formed to extend in a longitudinal direction with respect to an apex unit (122) of the cutting unit (12). The cutting unit (12) is made of a zirconia material.
Patent KR-20190132943-A (KR)
Title: Seal mechanism and apparatus equipped with the seal mechanism
Inventor: KIHIRA MASATO
IPC: F16J15/3212
Filed: 2019-05-21
Abstract: A seal mechanism according to one embodiment of the present invention comprises: a shaft member; and a seal member provided between a case accommodating at least a part of the shaft member. The seal member has a base part and a main lip arranged in a position which does not overlap with the base part in a rotational axis direction of the shaft member. Therefore, the present invention is provided to miniaturize a dimension in a diameter direction.
Patent KR-20190134499-A (KR)
Title: Antenna, plasma processing apparatus and plasma processing method
Inventor: ABE JUNICHI
IPC: H01Q1/26
Filed: 2019-05-22
Abstract: An objective of the present invention is to provide a technique for densifying the number of windings of a spiral antenna used for generation of inductively coupled plasma. As a means for solving problems, the antenna according to the present disclosure is an antenna used for generation of inductively coupled plasma, and the antenna has a plurality of antenna components. The antenna components are each formed in a plate shape, and are connected in series to constitute spiral formation of a polygon. In addition, two of the antenna components, which are connected to each other, wherein one side has a convex unit protruding in a plate surface direction while the other side has a concave unit concave in the plate surface direction, and the concave unit and the convex unit are fitted together and connected by brazing or welding.