baber/WOPTO huggingface dataset:
Patent KR-20030029400-A (KR)
Title: Method for forming plug in semiconductor device
Inventor: JUNG U SEOK
IPC: H01L21/3065
Filed: 2001-10-08
Abstract: PURPOSE: A method for fabricating a plug of a semiconductor device is provided to not only make the manufacturing process of a semiconductor simple but also decrease contact resistance. CONSTITUTION: A trench device isolation layer(23) is formed to separate a device forming region from a device isolation region. A gate isolation layer and gate structure(25) are formed on the device forming region. An insulating spacer(27) is formed along the sidewall of the gate structure. An insulation layer(29) is deposited on the whole structure and then selectively etched to form contact holes exposing a silicon substrate(21). A PE-USG oxide layer(31) is deposited and then wet-etched to expose the silicon substrate between the spacer. An amorphous silicon thin film is deposited with the width ranging 50 to 150 angstrom. After raising the temperature to selective silicon growth forming temperature and removing amorphous silicon on the PE-USG oxide layer, a silicon plug is grown by an LPCVD method.
Patent KR-20030031629-A (KR)
Title: Electronic-Mail Management Method using Advertisement/Information Mail Filtering
Inventor: LEE CHAN JIN
Filed: 2001-10-15
Abstract: PURPOSE: A method for managing E-mail is provided to automatically delete an advertisement and information mail of a transmitter selected by a user after a predetermined time by managing the advertisement and information mail in an additional mailbox. CONSTITUTION: A user inputs an address of a corresponding advertisement and information mail transmitter(S310). The user selects a web site or a mail account of a transmitter to be set as an advertisement and information mail when an environment is set(S312). The user reads a received mail and transmits the mail to an advertisement and information mailbox(S313). The selected advertisement and information mail transmitter information is separated according to corresponding users and stored in a database(S320). The user checks the transmitter of the received mail(S330). It is judged whether a corresponding mail is an advertisement and information mail by comparing a header of a mail packet or a TCP/IP(Transmission Control Protocol/Internet Protocol) transmitter address with an advertisement and information mail transmitter list(S340). An advertisement and information mail of a selected transmitter is stored in the advertisement and information mailbox(S341), and other mails are stored in a received mailbox(S342). The mails in the advertisement and information mailbox are deleted automatically after a predetermined time(S350,S360).
Patent KR-20030033200-A (KR)
Title: The hand-cleaner method of urethane
Inventor: CHAE CHUN KON
IPC: C11D3/50
Filed: 2001-10-19
Abstract: PURPOSE: Provided is a process for producing a hand cleaner by using waste urethane foam, which can reduce the cost and the environmental pollution caused by the general method for disposing urethane, therefore the hand cleaner can be naturally decomposed. CONSTITUTION: The process for producing the hand cleaner comprises the steps of: removing extraneous matters from the waste urethane foam; grinding the waste urethane foam to have less than 100 mesh; heating and mixing a surfactant, a skin protecting agent, an emulsifier, a perfume, a pigment, and etc. to prepare a base composition for the general cleaner; mixing the base composition with 20-35% of the powdered urethane.
Patent KR-20030033285-A (KR)
Inventor: JUNG JI TEA
IPC: G08B6/00
Filed: 2001-10-19
Abstract: PURPOSE: A car parking/stopping guide apparatus is provided to prevent individual information of a car owner from being revealed to other people and to reduce economic burden. CONSTITUTION: If an attached sensor(1) is touched with a hand, the sensor transmits a sensing signal to a contact number inputted by a car owner. When the car owner receives it, a car parking/stopping information sentence is displayed with a car owner after-receiving information sentence to prevent the sensor from being touched again. A contact number is inputted through a number input command key(3), and the contact number input is changed with an input change key(4), and the input is completed by pushing an input change completion key(5). A transmission operation key(7) and a transmission stop key(8) prevents unnecessary transmission and receiving.
Patent KR-20030035140-A (KR)
Title: Method for manufacturing Ferrous Gluconate
Inventor: KIM JEONG SU
IPC: C12P7/58
Filed: 2001-10-30
Abstract: PURPOSE: A process for preparing ferrous gluconate is provided, thereby the high purity of ferrous gluconate can be directly and cheaply prepared using glucose oxidase and catalase. CONSTITUTION: The process for preparing ferrous gluconate comprises the steps of: oxidation of glucose using glucose oxidase and catalase enzyme reaction in a reactor under the aeration rate of 0.2 to 0.8 vvm; and adding ferrous carbonate(FeCO3) as a pH regulator and a ferrous source into the oxidized glucose, wherein the temperature of the reactor is 25 to 35 deg. C and pH of the reactor is 6.0 to 7.0; the concentration of glucose is 10 to 40%; the concentration of glucose oxidase to glucose is 0.5 to 3.0%; the concentration of catalase to glucose is 0.5 to 3.0%; and oxygen produced by the reaction of oxidized glucose and ferrous carbonate is reused in the oxidation of glucose.
Patent KR-20030035334-A (KR)
Title: A method and tool of forming coating grooves on the surface of roll for coating an electric steel sheet with magnesia
Inventor: CHO SEONG GI
IPC: B21D17/00
Filed: 2001-10-31
Abstract: PURPOSE: A method for forming coating grooves on the outer circumferential surface of coating roll for coating electric steel sheet with magnesium oxide solution in continuous annealing facility of an ironworks, and a tool therefor are provided. CONSTITUTION: In a method for forming coating grooves on the rubber surface layer(5) of a coating roll(1) for coating a magnesium oxide solution on electric steel sheet in continuous electric steel sheet annealing process of an ironworks, the method for forming the coating grooves on the surface of roll for coating the electric steel sheet with magnesium oxide comprises the steps of cooling the rubber surface layer(5) of the coating roll(1) to glass transition temperature or more; and forming the coating grooves on the rubber surface layer(5) of the coating roll(1) that is cooled to the glass transition temperature or more, wherein the coating roll(1) is cooled by refrigerating the coating roll(1) at a cooling temperature of -6 to -8 deg.C for one hour. The cutting tool for forming coating grooves on the surface of a roll for coating electric steel sheet with magnesium oxide is characterized in that the front end part of a cutting blade(21) is inwardly inclined from the upper tip as much as clearance angle (θ) for a vertical plane, and a chip discharging hole(27) is vertically penetratingly formed at a position adjacent to the front end part of the cutting blade(21).
Patent KR-20010112896-A (KR)
Title: 다단계 버퍼링을 이용한 화상 및 음성 데이터를 전송하는화상회의 방법
Inventor: JANG JEONG HO
IPC: H04N7/15
Filed: 2001-10-31
Abstract: 본 발명은 인터넷상에서 화상 및 음성 전송을 통한 회의 및 채팅시스템으로서 기존에 일반적으로 적용해온 서버스트리밍 기법을 탈피해 서버(Server)를 경유하지 않고, 클라이언트(CLIENT)사이에 Peer to Peer방식을 채택함으로써 서버의 부하를 획기적으로 줄이며, 버퍼를 이중으로 설계하여 안정적인 화상 및 음성 데이터의 송수신을 가능하게 하는 방법이다. 
     화상 및 음성 전송방식은 우선 화상의 경우 클라이언트에서 캡쳐된 화상을 압축하여 프레임 컨트롤을 통해 상대방 클라이언트로 전송하며, 음성의 경우에는 압축코덱을 사용하여 전송하고, 이후에 화상과 음성을 수신하는 과정에서 1단계 임시버퍼를 사용하여 데이터를 저장하고 2단계 버퍼링을 통해 시간이나 데이터 흐름속도의 차이를 보상하여 안정적인 화상과 음성을 수신하게 된다.
Patent KR-20030037839-A (KR)
Title: Dispersion and dispersion slope compensating optic fiber
Inventor: KANG BYEONG YUN
IPC: G02B6/00
Filed: 2001-11-06
Abstract: PURPOSE: An optical fiber for compensating dispersion and dispersion slope is provided to form the optical fiber for compensating the dispersion and the dispersion slope of a transmission line by using a single mode fiber and a negative dispersion fiber. CONSTITUTION: Cumulative dispersion and a dispersion slope of a wavelength division multiplexed optical transmission system are compensated by performing a compensating process for the cumulative dispersion and the dispersion slope of a transmission line having the cumulative dispersion of 132 ps/nm and the dispersion slope of 0.08480 ps/nm¬2/km. The compensation fiber is characterized in that the dispersion is -132 ps/nm-km and the dispersion slope is -6.78 ps/nm¬2-km. In addition, the compensation fiber is characterized in that the dispersion is -132 ps/nm-km and the dispersion slope is -6.78 ps/nm¬2-km. In addition, the compensation fiber is characterized in that the dispersion is -132 ps/nm-km and the dispersion slope is -6.78 ps/nm¬2-km.
Patent KR-20030039477-A (KR)
Title: Seal ring typed valve structure
Inventor: JUNG JAE HO
IPC: F01L3/00
Filed: 2001-11-13
Abstract: PURPOSE: A valve with a structure preventing partial side wear of a valve seat is provided to prevent partial side wear by compensating eccentricity. CONSTITUTION: A valve(1) includes an annular groove(6) formed on a valve face(5) facing a valve seat(4) in circumferential direction; a seal ring inserted to the annular groove to contact with the valve seat, and freely moving up and down and left and right; and a spring washer(8) accumulating dynamic stability when the seal ring moves, and supporting the seal ring to return the seal ring to an original position. When the valve is eccentric to a central axis(x-x) by distance l and inclined to the valve seat on one side, one part(7a) of the seal ring on the eccentric side contacts with the valve seat to be pushed to the other side. The other part(7b) of the seal ring is moved to an outside of the annular groove to contact with the valve seat. Horizontal and vertical movement of the seal ring is absorbed by the spring washer deformed. When the valve moves down, the seal ring returns to the original position by elastic restoring force of the valve seat.
Patent KR-20030039606-A (KR)
Title: Apparatus and method for conditioning a polishing pad used in a chemical-mechanical polishing system
Inventor: PARK JU YEONG
IPC: B24B53/017
Filed: 2001-11-13
Abstract: PURPOSE: An apparatus for conditioning a polishing pad of a chemical mechanical polishing(CMP) apparatus is provided to precisely control the cutting quantity by accurately controlling the vertical position of a bite while using the first level screw, and to uniformly condition the entire surface of a polishing pad at a high speed by rotating the polishing pad while horizontally transferring the bite. CONSTITUTION: The bite(26) is installed in a direction almost vertical to the surface of the polishing pad(24). A grinding tip is installed in the end of the bite. A horizontal transfer unit transfers the bite to a direction almost horizontal to the surface of the polishing pad. A base unit supports the horizontal transfer unit, disposed in a side of a rotating plate(22) of a polishing apparatus. A vertical transfer unit controls the position of the bite vertically.
Patent KR-20030040988-A (KR)
Title: Mms-inducibility of argb promoter in aspergillus nidulans and the use of the argb promoter
Inventor: CHAE SUHN KEE
IPC: C12P21/00
Filed: 2001-11-19
Abstract: PURPOSE: Provided are MMS-ineducability of argB promoter in Aspergillus nidulans and the use of the argB promoter for the production of proteins, thereby expressing argB promoter of Aspergillus nidulans using MMS(methyl methane sulfonate) and using it as a promoter for the expression of foreign proteins. CONSTITUTION: The expression of argB promoter in Aspergillus nidulans is characteristically induced by using MMS(methyl methane sulfonate) which is an alkylating reagent.
Patent KR-20030041405-A (KR)
Title: a quartz vibrator
Inventor: HAN GYU JIN
IPC: H03H9/19
Filed: 2001-11-20
Abstract: PURPOSE: A crystal vibrator and method of making the same is provided to be capable of reducing the device size by reducing a part number of the crystal vibrator and of joining a lid at a vibrator case easily. CONSTITUTION: A crystal vibration piece(30) is contained in a case(10) where electrode circuits(12) are arranged between ceramic insulators(11) with a multiple layer structure so as to be connected to the electrodes. A metal alloy lid(20) is joined with the case so as for the case to be closed. A joining layer(21) having a predetermined thickness is formed on one surface of the lid(20) where a nickel coating film is formed. The joining layer(21) is attached directly at a top of the case by a heat fusion manner of low heating.
Patent KR-20030042558-A (KR)
Title: Rubber composition for under tread of truck and bus tire
Inventor: PARK DONG MYEONG
IPC: C08L5/08
Filed: 2001-11-23
Abstract: PURPOSE: A rubber composition for an under tread of the truck and bus tire which has excellent chip-cut resistance, wear resistance and low heat generating property is provided. CONSTITUTION: The rubber composition for an under tread of the truck and bus tire is characterized by comprising 100 parts by weight of a natural rubber, 20 to 40 parts by weight of carbon black and 2 to 20 parts by weight of chitin(formula 1). The rubber composition may further comprise 2 to 10 parts by weight of an active zinc oxide, 1 to 5 parts by weight of stearic acid, 1 to 5 parts by weight of sulfur, 1 to 5 parts by weight of a sulfenamide-based vulcanization accelerator and 1 to 2 parts by weight of an anti-aging agent.
Patent KR-20020045559-A (KR)
Inventor: TANIWA KENICHIRO
IPC: H01J29/76
Filed: 2001-12-06
Abstract: PURPOSE: A deflection yoke is provided to support a center position of a ferrite core to be held in an optimum position in a vertical axis direction by using a plurality of flexible projections. CONSTITUTION: The deflection yoke(10) includes a horizontal deflection coil(1), an insulation frame(20), a vertical deflection coil(3), and a ferrite core(4) having the general shape of a surface of a conical frustum, respectively that are arranged in this order outwardly. A major diameter portion(20b) of the insulation frame(2) and a major diameter portion(4d) of the ferrite core(4) are fixed to each other by a hot-melt adhesive(6). The ferrite core(4) is formed by combining a pair of half bodies divided into two by a plane including the vertical axis Y and the tube axis Z. On an outer wall(4a) of a minor diameter portion of the ferrite core(4), a tapered portion(4e) having a diameter decreasing in a direction towards an end side of the minor diameter portion is provided around the entire peripheral face.
Patent KR-20020048874-A (KR)
Inventor: KADOWAKI WATARU
IPC: F04B9/12
Filed: 2001-12-14
Abstract: PURPOSE: To provide a water jetting apparatus with which the speed of a water jet loom can further be increased without causing reduction in quality of woven fabrics. CONSTITUTION: A cylinder 30 is screwed to a pump housing 12 constituting a weft inserting pump 29. A piston 32 is slidably held in the cylinder 30. The piston 32 is connected and fixed to a plunger 14. A compression chamber 35 is formed between the inner peripheral surface of the cylinder 30 and the outer peripheral surface of the piston 32 and between seal rings 33 and 34 attached to the cylinder 30 and the piston 32. An air pressure source 36 is connected through an air pipe conduit 37 to the compression chamber 35.
Patent KR-20030049479-A (KR)
Title: Method for fabricating semiconductor device wherein bit-lines are formed by damascene technique
Inventor: LEE JAE GU
IPC: H01L21/3205
Filed: 2001-12-15
Abstract: PURPOSE: A method for manufacturing a semiconductor device having a bitline formed by a damascene process is provided to be capable of easily forming the bitline though design rule is reduced and minimizing the misalignment between the bitline and a lower contact pad. CONSTITUTION: An insulating layer pattern(150a) is formed at the upper portion of a substrate(100) for defining holes. The first spacer(160a) is formed at both sidewalls of the hole. A bitline conductive layer(165a) is formed in the lower portion of the hole. A bitline mask(170) is formed on the bitline conductive layer for completely filling into the hole. A storage node contact hole is formed by etching the insulating layer pattern using the bitline mask and the first spacer as an etching mask for exposing the first spacer. The second spacer having a lower dielectric constant than the first spacer, is formed on the first spacer. A storage node contact pad is formed on the resultant structure for completely filling the storage node contact hole.
Patent KR-20030049855-A (KR)
Title: inner fixing device for a tension member removetype ground anchor
Inventor: KIM KUK IL
IPC: E21D21/00
Filed: 2001-12-17
Abstract: PURPOSE: An inner anchorage for a removal ground anchor of a tension member is provided to heighten the reliability on assembly. CONSTITUTION: The inner anchorage for a removal ground anchor of a tension member comprises a main body(1) composed of a screw(14) for fastening a screw cap, a ring projection for a locking ring(15) and a wedge seat for a wedge assembly(2), a wedge assembly(2) formed by fitting a tension stopper(7), a wedge opening ring(6) and a wedge closing ring(5) into a stopping groove(21f), an opening ring groove(21g) and an outer closing ring groove(21d) of the wedge(21) respectively and provided with many wedges(21) having a locking groove(21e), a screw cap(3) provided with a screw(32) fastened with a screw(14) of the main body(1), and a wedge separator(9) placed between the wedge seat(11) and the wedge(21).
Patent KR-20020051863-A (KR)
Inventor: BORDER JOHN
IPC: C08L33/12
Filed: 2001-12-21
Abstract: PURPOSE: A polymethmethacrylate nanocomposite optical plastic article is provided to reduce temperature sensitivity and to maintain stability over a broad range of temperatures. CONSTITUTION: The nanocomposite optical article or lens includes a plastic host material(16) and a select nanoparticulate material dispersed in the plastic host material(16). The material(16) may be either a thermoplastic or thermoset material selected based on predetermined temperature sensitive optical vector(x1), for instance refractive index(n). Similarly, the selection of the nanoparticulate material dispersed in the polymeric host material(16) is based on a corresponding predetermined temperature sensitive optical vector(x2), specifically refractive index. The temperature sensitive optical vectors(x1,x2) are defined by a change in refractive index(dn) of the polymeric host material(16) and the nanoparticulate material, respectively, with respect to a change in temperature(dT).
Patent KR-20030052886-A (KR)
Title: The Method for Preventing Rinsing Rust of Hot Coil by Nitrogen Purge
Inventor: SUNG JIN GYEONG
IPC: C23G1/16
Filed: 2001-12-21
Abstract: PURPOSE: A method for preventing rinsing rust of hot coil by nitrogen purge is provided, which reduce the amount of sodium hydroxide to be added. CONSTITUTION: The method includes the steps of adding sodium hydroxide into rinsing solution to adjust hydrogen-ion concentration to pH4 to pH6; injecting nitrogen gas into the rinsing solution to strip dissolved oxygen to the atmosphere; spraying the rinsing solution onto the surface of hot rolled steel sheet.
Patent KR-20030057165-A (KR)
Title: A Sprayer for Preventing Tire's White Stripe from Stain
Inventor: JUN GI SU
IPC: B60S3/04
Filed: 2001-12-28
Abstract: PURPOSE: An injector of pollution preventing liquid is provided to reduce the installing cost, to improve the injecting quality and to increase the operating rate of an equipment by using a cheap camera equipment. CONSTITUTION: An inlet portion is formed to enter a tire(11). A centering unit(2) is formed in the inlet portion to adjust the position of the tire. A lifting portion(3) lifts or lowers the centering unit. A rotating portion rotates the lifting portion. A carrying portion moves an injector. By using a cheap camera, the injecting quality and the operating rate are improved while reducing an installing rate of the injector.
Patent KR-20030058013-A (KR)
Title: organic electroluminescence display devices
Inventor: BANG HUI SEOK
IPC: H05B33/26
Filed: 2001-12-29
Abstract: PURPOSE: An organic electroluminescence device is provided to be capable of preventing a brightness from being deteriorated and being both-sided luminescence. CONSTITUTION: The first anode electrode(120) is formed over a substrate(110) and is transparent. The first organic layer(130) is formed over the first anode electrode, and a cathode electrode(140) is formed over the first organic layer. The second organic layer is formed over the cathode electrode, and the second anode electrode(160) is formed over the second organic layer and is transparent. The first and second anode electrodes are either one of an indium-tin-oxide and indium-zinc-oxide. The first organic layer consists of a hole transporting layer, an emission layer and an electron transporting layer, and further comprises a hole injection layer.
Patent KR-20010074651-A (KR)
Title: 집적화된 마이크로컬럼과 주사프로브현미경 어레이
IPC: G01Q30/02
Filed: 2000-05-04
Abstract: 웨이퍼의 처리 및 표면 검사용 장치는 마이크로컬럼 및 관련 주사프로브현미경을 포함하고, 상기 주사프로브현미경은 웨이퍼의 고도로 국부화된 영역의 원자 분해능을 제공하며, 상기 마이크로컬럼은 비교적 높은 분해능에서 웨이퍼의 고속 주사를 가능하게 하며, 마이크로컬럼 및 주사프로브현미경은 동일한 기판 외부에서 부분적으로 제조될 수 있고, 또한 마이크로컬럼 및 주사프로브현미경은 마이크로컬럼 및/또는 주사프로브현미경 어레이의 일부가 될 수 있으며, 상기 장치는 영상화, 리소그래피, 및 분광학에서 사용될 수도 있는 것을 특징으로 한다.
Patent KR-20010071900-A (KR)
Title: 자성합금과 자기기록매체 및 그 제조방법과 자성막 형성용타겟 및 자기기록장치
IPC: C23C14/34
Filed: 2000-05-12
Abstract: 높은 규격화보자력을 가짐과 동시에 열요란을 제어하고 열적으로 안정된 자기특성을 갖는 자성막을 구비한 자기기록매체와 합금 및 자기기록매체의 제조방법과 자성막 형성용 타겟을 제공하는 것을 목적으로 한다. 
     본 발명은 코발트(Co), 크롬(Cr) 및 게르마늄(Ge)을 주성분으로 하여 이루어진 자성합금으로서, 조성이 일반식 Co x Cr y Ge z 로 표시되며 조성비를 나타내는 x,y,z가 78≤x≤87, 2.5≤y≤14.5, 3.5≤z≤15, x+y+z=100(단 x,y,z는 원자%에 의한 조성비를 나타낸다)인 관계를 만족하는 것이다. 나아가 본 발명은 상기 조성계에 대해 CoCrGeT(T는 Ta,Si,Nb,B,Ni,Pt 중 1종 이상), 또는 CoCrGeT'(T'는 Ta,B,Pt 중 1종 이상)인 조성식으로 표시되는 조성계의 것이어도 좋다.
Patent KR-20010080141-A (KR)
IPC: H02B5/06
Filed: 1999-03-31
Abstract: 본 발명은 장치 전체의 높이를 저감한 가스절연개폐장치를 제공하는 것이다. 
     이를 위하여 본 발명에서는 아래쪽측에 수평방향으로 설치되어 1상의 도체가 수납된 차단기유닛(13)과, 차단기유닛(13)의 축선방향으로 설치된 조작기(41)와, 차단기유닛(13)에 접속되어 수직방향으로 설치된 모선접속도체(46)를 거쳐 모선접속도체(46)의 양측에 수평방향으로 설치된 주모선 단로기유닛(4)을 구비함으로써 가스절연개폐장치의 높이를 낮게 할 수 있다.
Patent KR-20010085943-A (KR)
IPC: G02B1/11
Filed: 1999-10-20
Abstract: 광학 필터는 투명 지지체와 필터층을 가진다. 필터층은 파장 560 내지 620nm의 범위에 흡수 극대를 가진다. 그리고, 흡수 극대의 반치폭은 5 내지 50nm의 범위이다. 이 광학 필터를 이용함으로써, 화상 표시 장치(특히 플라즈마 디스플레이 패널)에 발생하는 여분의 발광을 정확하게 흡수할 수 있다.
Patent KR-20010086058-A (KR)
Title: IMIDAZO[4,5-b]PYRIDINIUMMETHYL-CONTAINING CEPHEM COMPOUNDS HAVING BROAD ANTIBACTERIAL SPECTRUM
IPC: C07D417/00
Filed: 1999-11-25
Abstract: A cefem compound of the formula (I) shows wide antibacterial spectrum against various pathogenic bacteria including MRSA. <CHEM> wherein, X is N or CY and Y is H or halogen; R<1> is amino or protected amino; R<2> is hydrogen or optionally substituted lower alkyl etc.; R<3> is hydrogen etc.; R<4> is hydrogen, optionally substituted lower alkyl, or optionally substituted N-containing heterocyclic group etc.; R<5> is hydrogen etc.; and a wavy line means syn- or anti-isomerism or a mixture thereof.
Patent KR-20010107999-A (KR)
IPC: D21C5/02
Filed: 1998-12-03
Abstract: 본 발명은 종이 재생에서 얻어지는 탈잉크 공정 용수를 친수성 분산 중합체로 처리하는 탈잉크 공정 용수의 정화 방법을 포함한다. 본 발명에 따른 친수성 분산 중합체는 디알릴 N,N-이중치환 염화암모늄 양이온 단량체 및 (메트)아크릴아미드(AcAm)의 공중합체이다. 상기 중합체를 투입하면, 침전물이 형성된다. 침전물은 고체 액체 분리법으로 용수 과정으로부터 제거되는 잉크 및 불순물을 포함한다; 상기 고체 액체 분리법은 용해성 공기 부양법을 포함한다. 바람직한 공중합체는 DADMAC 및 AcAm으로부터 형성된다.
Patent KR-20010099887-A (KR)
IPC: H01L21/302
Filed: 1999-12-28
Abstract: 본 발명은 포토레지스트 마스크를 이용하여 산화물층의 특징부를 에칭하는 방법에 관한 것이다. 이때 상기 산화물층은 유도-연결된 플라즈마 공정 챔버 내부에서 기판의 하부층 위에 배치된다. 이 방법은 CH 2 F 2 /C 4 F 8 /O 2 와 C 3 H 3 F 5 /C 4 F 8 /O 2 중 어느 한 그룹을 포함하는 에칭 소스 기체를 플라즈마 공정 챔버로 흐르게 하는 단계를 포함한다. 이 방법은 상기 에칭 소스 기체로부터 플라즈마를 형성하는 단계를 또한 포함한다. 이 방법은 플라즈마로 기판의 상부층을 따라 에칭을 하는 단계를 포함하며, 이때 상기 에칭은 상기 하부층 상에서 정지되고, 상기 하부층은 실리콘층, 텅스텐-기반층, TiN층 중 하나이다.