baber/WOPTO huggingface dataset:
Patent KR-20090027912-A (KR)
Title: Jointing apparatus of corrugated steel pipe
Inventor: LEE JANG SUB
IPC: F16L21/06
Filed: 2007-09-13
Abstract: A corrugated steel pipe connection device is provided to increase and maintain a cohesive power of a corrugated steel pipe. A smoothing resin pipe(15) has an extended part which is protruded to both end parts of a corrugated steel pipe(10). A fixing plate has a wing piece which is extended to be crossed perpendicularly and combined in the outer circumference of a part in which the inner circumference of a fixing plate(25). The fixing plate is interfered in a threaded section of the corrugated steel pipe. An anchoring bolt(30) is inserted in a through hole(28) of the fixing plate to adhere the fixing plate closely. A packing material(35) maintains airtight for the fixing plates adhering closely when connecting the corrugated steel pipe.
Patent KR-20090030080-A (KR)
Title: Rotating shock absorber
Inventor: KIM SEUNG TAEK
IPC: F16F9/12
Filed: 2007-09-19
Abstract: A rotary shock absorber is provided that the damping force can be controlled according to the rotation and the rotation available range of the shock absorber is improved. A rotary shock absorber comprises an outer tube top part(10) in which the rib(12) is formed in inside in order to generate the fluid pressure, an outer tube bottom part(20) which is arranged to be counterpoised to the bottom of the outer tube top part, a rotation shaft part(30) in which the orifice(33) is formed in the wing portion(31), a variable moving unit which the size of orifice changes with the rotation of the rotation axis, diversifies magnet.
Patent KR-20090033937-A (KR)
Title: Functional levan chungkukjang powder and the manufacturing methods
Inventor: LEE JAE OK
IPC: A23L23/00
Filed: 2007-10-02
Abstract: A method for manufacturing functional fermented soybean paste powder is provided to simplify the manufacturing process and cut off manufacturing expense. A manufacturing method of functional fermented soybean paste powder comprises: a step of making soybean powder to liquid by inoculating 1~5% of Bacillus subtilis strains; a step of culturing at 35~40°C for 12-24 hours and collecting the cultured strain using a spray dry device; a step of manufacturing powder of fermented soybean paste; and a step of manufacturing levan fermented soybean paste powder by mixing fermented soybeans fermentation liquid and levan fermentation liquid at a ratio of 5 ~ 70% or mixing the fermented soybeans fermentation liquid and levan or levan oligosaccharide powder at a ratio of 0.1 ~ 20%, and spray drying. The levan fermentation liquid is levan fermentation liquid itself or levan oligosaccharide fermentation liquid manufactured through process of concentrating and filtering after acidic and thermal process. The levan powder is levan powder of the macromolecule form or levan oligosaccharide powder manufactured through process of concentrating and filtering after acid and thermal process.
Patent KR-20090038314-A (KR)
Title: Expandable polystyrene bead and method for preparing the same
Inventor: KIM YOUN CHUL
IPC: C08F257/02
Filed: 2007-10-15
Abstract: An expandable polystyrene bead is provided to obtain a polystyrene foam molding which exhibits the improved fire retardant characteristic and excellent adiabaticity. An expandable polystyrene bead comprises a styrenic polymer core containing polystyrene or a polymer of styrene and at least one comonomer; a foam dipped into the styrene polymer core; and an outer layer containing flame retardant, inorganic filler and thermoplastic resin as an outer layer that surrounds styrene polymer core.
Patent KR-20090043866-A (KR)
Inventor: LEE SANG GIL
IPC: G02F1/133
Filed: 2007-10-30
Abstract: 백라이트 드라이버 및 이를 포함하는 액정 표시 장치가 제공된다. 상기 백라이트 드라이버는 펄스 폭 변조 신호에 응답하여 발광부에 구동 전압을 제공하거나 차단하는 구동 전압 발생부, 상기 구동 전압 발생부에 상기 펄스 폭 변조 신호를 제공하되, 상기 발광부에 오동작이 발생되는 경우 동작이 중지되는 펄스 폭 변조 신호 발생부, 및 상기 펄스 폭 변조 신호 발생부가 중지된 경우 상기 펄스 폭 변조 신호 발생부에 리셋 신호를 제공하여 상기 펄스 폭 변조 신호 발생부를 재동작시키는 자동 리셋부를 포함한다. 
       
     액정 표시 장치, 백라이트 드라이버, 자동 리셋부
Patent KR-20090044149-A (KR)
Inventor: LEE WON SUK
IPC: G06F17/18
Filed: 2007-10-31
Abstract: 지속적으로 발생되는 데이터 객체들로 구성되는 비한정적 데이터 집합인 데이터 스트림으로부터 클러스터를 찾는 방법 및 장치가 개시된다. 본 발명에 따른 데이터 스트림으로부터 클러스터를 찾는 방법은, 이미 발생한 데이터 객체들의 통계적 분포 정보가, 데이터 공간의 범위에 따라 분할되고 해당 범위 내에 존재하는 데이터 객체의 통계적 분포 정보를 가지는 격자셀들을 이용하여 관리되며, (a) 격자셀들 중 현재 발생한 데이터 객체에 해당하는 격자셀의 통계적 분포 정보를 갱신하는 단계; (b) (a) 단계에서 통계적 분포를 갱신한 결과 격자셀에 속하는 데이터 객체의 발생 빈도를 소정 값인 분할 지지도와 비교하여 그 결과에 따라 격자셀을 복수 개의 격자셀로 분할하고, 분할된 격자셀의 통계적 분포 정보를 추정하는 단계; (c) 격자셀이 소정 크기의 단위 격자셀이 될 때까지 (a) 또는 (b) 단계를 반복하는 단계; 및 (d) 단위 격자셀에 속하는 데이터 객체의 발생 빈도를 소정 값인 최소 지지도와 비교하여 그 결과에 따라 단위 격자셀이 복수 개 모인 집합을 클러스터로 정의하는 단계를 포함하는 것을 특징으로 한다.  
       
     데이터 스트림, 데이터 마이닝, 클러스터링
Patent KR-20090046178-A (KR)
Inventor: HAN CHANG HUN
IPC: H01L27/146
Filed: 2007-11-05
Abstract: 실시예에 따른 이미지센서는 기판에 형성된 회로(circuitry); 높이가 서로 다르게 상기 기판상에 형성된 제1 플러그와 제2 플러그; 상기 제1 플러그와 제2 플러그 상에 각각 형성된 제1 하부전극과 제2 하부전극; 및 상기 제1 하부전극과 제2 하부전극 상에 형성된 포토다이오드;를  포함하는 것을 특징으로 한다. 
       
     이미지센서, 포토다이오드, 크로스토크
Patent KR-20090046977-A (KR)
Inventor: LIM SIL KUY
IPC: H01L23/02
Filed: 2007-11-07
Abstract: 본 발명은 인쇄회로기판에 부착된 회로소자를 몰딩 하는 방법에 관한 것으로서, 다대사출 공법에 의해 인쇄회로기판의 상면부에 부착된 회로소자 및 상기 인쇄회로기판의 하면부에 부착된 회로소자를 완전몰딩 하는 방법을 제공함으로써, 본 발명에 의한 사출품은 외부환경에 대해서 내구성, 방수성, 및 전기적 동작에 대한 신뢰성에 있어서 탁월한 기술적 장점을 갖는다.  
       
     사출성형, 인서트사출, 다대사출, 완전몰딩
Patent KR-20090052007-A (KR)
Inventor: KIM BYEONG YEOL
IPC: B60N2/90
Filed: 2007-11-20
Abstract: 본 발명은 차량 승객가 착좌할 수 있는 차량의 시트 어셈블리에 관한 것이다. 특히 본 발명은 시트 트랙과; 상기 시트 트랙 위에 설치되어 시트를 지지하는 시트 프레임과; 상기 시트 프레임과 상기 시트 트랙 사이에 설치되어 무게를 감지하는 웨이트 센서와; 상기 시트 트랙에 결합된 브래킷과; 상기 시트에 착석한 착석자를 보호를 위한 시트 벨트와 착탈되는 시트 벨트 버클과; 상기 시트 벨트 버클과 상기 브래킷과 상기 시트 프레임을 결합시키는 체결부재와; 상기 체결부재와 상기 브래킷 사이에 개재되는 충격흡수부재를 포함하는 차량의 시트 어셈블리를 제공한다. 
       
     시트, 시트 프레임, 시트 벨트 버클, 웨이트 센서
Patent KR-20090053458-A (KR)
Inventor: JEONG TAI KYEONG
IPC: H04L12/24
Filed: 2007-11-23
Abstract: 본 발명은, 적어도 2 개 이상의 센서로 이루어진 센싱 환경에서 전력 소모를 줄이고 효율을 높이는 저전력 소모 센싱 시스템 및 저전력 소모 센싱 방법에 관한 것으로, 본 발명에 따른 센싱 방법은, 상기 적어도 두 개 이상의 센서 전부를 웨이크 상태로 천이시키고 시작 포인트(x, y, z) 및 타겟 객체의 패턴을 설정하는 단계; 상기 적어도 두 개 이상의 센서 중 상기 타겟 객체를 탐지한 센서는 웨이크 상태를 유지하고 나머지 센서들은 슬립 상태로 천이시키는 단계; 상기 웨이크 상태를 유지하는 센서와 상기 타겟 객체 간의 거리가 최소가 되도록 x-y 평면을 이동하는 단계; 상기 센서 전부를 웨이크 상태로 천이시키고, 전체 센서 각각과 상기 타겟 객체 간의 거리가 최소가 되도록 x-y 평면을 이동하는 단계; 및 상기 전체 센서 중 하나를 웨이크 상태로 유지하고 나머지 센서들은 슬립 상태로 천이시키고, 상기 웨이크 상태인 하나의 센서를 이용하여 z축 방향으로 이동하여 상기 타겟 객체에 힘을 가하는 단계;를 포함하는 것을 특징으로 한다. 
       
     센서, 로봇, 센싱, 에너지 효율, 주파수
Patent KR-20090055704-A (KR)
Title: Safety door footing for industrial elevator
Inventor: RYU KYUNG NAM
IPC: B66B9/187
Filed: 2007-11-29
Abstract: A safety door footing for an industrial elevator is provided to improve working efficiency without accident by fitting for the slab heights of various buildings with using an existing safety door. A safety door footing for an industrial elevator comprises a supporting part(110), a guide rail(120), a variable plate part(140) and a fixing member(150). The supporting part comprises a pair of supports. A pair of supports are arranged at the inner side and outer side around a projection end of a slab(10). The guide rail is installed at the location which is not higher than the supporting part so that a safe door is slid. The variable plate part is arranged at the same plane with the supporting part and reduces the breadth of the gap between the elevator and the end part of the slab. The fixing member couples or releases the supporting part and the variable plate part.
Patent KR-20090058599-A (KR)
Title: Portable automatic brush
Inventor: KIM JUNG GU
IPC: A46B5/00
Filed: 2007-12-05
Abstract: A hand-held auto-folding type toothbrush is provided, which has the structure that carrying and usage are improved by using a presses button. A hand-held auto-folding type toothbrush comprises: a toothbrush cartridge(1); a toothbrush body(2) inserted into the toothbrush cartridge; a button(3) equipped in the toothbrush cartridge; a hinge spring providing the elasticity; a protrusion(5) of the plastic material which is installed at the backside surface of the cartridge part and spreads if a user presses the button; and a junction(6) which performs fixation when a protrusion is spread. The junction is equipped with the groove which is small for the fixing of toothbrush.
Patent KR-20090058882-A (KR)
Title: Method for compressing packet and apparatus thereof
Inventor: HWANG YOU SUN
IPC: H04W28/06
Filed: 2007-12-05
Abstract: A method for compressing packet and an apparatus thereof are provided to supply a guaranteed service by increasing the transmitting efficiency of packet data in a wireless communication network. A terminal or a base station classifies packet headers to be transmitted into a dynamic header and a static header according to the degree of change(S100). The terminal or the base station convert the classified dynamic and static headers into at least one octet including a first octet(S110). The terminal and the base station checks whether or not the field data of each header are changed(S120). If so, the terminal and the base station add the data for each field to the end of the first octet(S130).
Patent KR-20090059695-A (KR)
Title: Method for modifying the morphology of plants by controlling the level of brsrs in cell
Inventor: LEE YEON HEE
IPC: C12N15/63
Filed: 2007-12-07
Abstract: A method for changing the plant morphology is provided to modify the size of plant body, leaf shape and color, and seed size using a BrSRS gene. A method for changing plant morphology is changing plant shape by regulating the polypeptide level in cell. The regulating polypeptide level in cell is increasing the polynucleotide expression coding the polypeptide. The polynucleotide has base of the sequence number 3. The plant is chinese cabbage, sauerkraut, brassica juncea Cosson, brassica campestris, Brassica napobrassica, Brassica rapa, Brassica napus, Brassica oleracea, Brassica caulorapa, Brassica fimbriata, Brassica ruvo, Brassica septi-ceps, Brassica nigra, Cochlearia officinalis, Armoracia lapathifolia, Descurainia pinnata, and Aubrieta deltoidea.
Patent KR-20090060751-A (KR)
Title: Touch sensible display device and driving method thereof
Inventor: PARK JONG WOUNG
IPC: G02F1/1335
Filed: 2007-12-10
Abstract: A display device having a touch function and a driving method thereof are provided to reduce the processing time required for determining the contacted position of a sensor. A display device comprises a plurality of sensing scanning lines(SY1-SYN), a plurality of sensing data lines(SX1-SXM), a plurality of sensors(CS), a sensed signal processing unit(800) and a contact determining unit(900). The sensing scanning lines are spread toward a row direction, and sequentially receive the first voltage. The sensing data lines are spread toward a column direction. The sensors are respectively formed in regions defined by the sensing scanning lines and sensing data lines to transmit the first voltage from a sensing data line corresponding to the external contact to a corresponding sensing data line.
Patent KR-20090062304-A (KR)
Title: Assembling structure of muffler hanger for vehicle
Inventor: PARK KI CHUL
IPC: F01N13/18
Filed: 2007-12-12
Abstract: An assembling structure of a muffler hanger for a vehicle is provided to minimize the transmission of vibration into a vehicle due to exhaust gas expelled through an exhaust pipe by assembling a hanger to the lower part of a vehicle, arranged on one side of the center part of a third linear part. In an assembling structure of a muffler hanger for a vehicle, two hangers(70) are arranged on the back of a bellows equipped in the front of an exhaust pipe(100). The shaking is prevented in the rear part of the bellows. The third hanger is arranged on the center of a third linear part(30) where vibration is minimized. The fourth hanger is mounted on one side of a muffler(80) arranged on the utmost rear side of the exhaust pipe.
Patent KR-20090062723-A (KR)
Title: Grass protection mat and method for constructing the same
Inventor: SON CHANG SUB
IPC: A01G13/00
Filed: 2007-12-13
Abstract: A grass protection mat and a construction method thereof are provided to facilitate the construction of mats on the ground and to prevent the lifting or breakage of mats after construction. A grass protection mat comprises a body part(10) with a grass through space(12), a column(20) formed on the top of the body part, and a connection unit(110) which is interconnected between adjacent mats to compensate contraction-expansion of the mats. The connection unit includes a connection plate(110a) which is interconnected between the outer frames of the mats to form a gap(D) for contraction-expansion compensation and/or a cross-shaped connection plate(110b) which is interconnected between the edges of the outer frames. The connection plate and the cross-shaped connection plate are curved or bent in cross section so as to make the displacement of the mats smooth in case of contraction-expansion.
Patent KR-20080055732-A (KR)
Title: Discharge nozzle cleaning apparatus
Inventor: WEI ZHIDAN
IPC: B05B15/02
Filed: 2007-12-14
Abstract: A cleaning device of an ejection nozzle is provided to clean a lip block effectively due to the cleaning function of cleaning members by properly aligning the cleaning members and an auxiliary blade unit. In a cleaning device of an ejection nozzle(1), the ejection nozzle is installed to move up and down freely. Cleaning members(5,6) are positioned at the front and rear sides of a sliding base(4) to slide freely in a longitudinal direction of the ejection nozzle. In the cleaning member, a main blade unit has the shape corresponding to the exterior outline of a lip block(3) of the ejection nozzle and slidably comes into contact with the lip block to slide freely as the ejection nozzle moves down. A pair of jet nozzles(8) are disposed at both sides of the lip block in front of the main blade unit in order to jet cleaning liquid to the lip block. A pair of auxiliary blade units(10) are disposed adjacent to the main blade unit and provided with a suction unit for sucking the cleaning liquid. A pair of auxiliary blade units are arranged at both sides of the lip block on the sliding base by opening of the cleaning member, and flexibly deformed to be curved forward for the lip block in the moving direction. The auxiliary blade units slidably come into contact with the lip block to slide freely as the ejection nozzle moves down.
Patent KR-20090065739-A (KR)
Title: 고압을 이용한 발열 장치
Inventor: KIM YOUNG SANG
IPC: F28D15/02
Filed: 2007-12-18
Abstract: 본 발명은 밀폐용기에 액체(물)를 채우고 100기압 이상 고압을 가하여 액체의 분자운동을 활발하게 하여 액체(물)의 온도를 90℃∼150℃로 높여 주고 상승한 물의 온도를 밀폐용기 안에 배관이나 히트파이프를 이용하여 밀폐용기 안에서 발생한 열을 밀폐용기 외부로 끌어내 이용하는 것을 내용으로 한다 
       
     고압,슬레노이드 밸브,분자운동,히트파이프
Patent KR-20080004425-A (KR)
Title: Home trading system showing average bought price at chart
Inventor: LEE CHANG GI
IPC: G06Q99/00
Filed: 2007-12-20
Abstract: A home trading system showing an average buying price at a chart is provided to enable a user to check the average stock buying prices at a glance on a stock price chart screen. A home trading system showing an average buying prices at a chart displays the average stock buying price with lines and dots so a user can recognize how much of profit or loss there occurs in trading a corresponding stock.
Patent KR-20080069114-A (KR)
Title: Plural row seedling transplanter
Inventor: KATSUNO SHIRO
IPC: A01C11/00
Filed: 2007-12-21
Abstract: A plural row transplanting seedling device is provided to supply seedling on the left and right seedling transplanting portions. In a plural row transplanting seedling device(1), two seedling transplanting portions(5) are installed in the left and right directions of a vehicle. Also, first and second seedling receiving bodies(25b,25c), a moving device and a seedling supply device are installed. The seedling supply device comprises a seedling dropping supply device, which drops the seedling received into the first seedling receiving body into the seedling transplanting portion on one side when the first seedling receiving body is moved to the left dropping supply position on the upper side of the seeding transplanting portion on one side.
Patent KR-20090069855-A (KR)
Title: Turbine pump and pressure measurement device
Inventor: LIM JAE GYOO
IPC: F02M37/10
Filed: 2007-12-26
Abstract: A turbine pump and a pressure measuring apparatus are provided to confirm inner movement existence and cavitation. A turbine pump comprises a housing(100); a motor(200) which is coupled with the housing; an impeller(300) which is coupled with the motor; a stator(400) in which a flow path is formed while being coupled with the impeller; and pressure sensor holes(501~506) which are formed in the stator. The housing comprises a main housing(110) in which the motor, impeller and stator are coupled, a first housing(120) which is coupled with the main housing, wherein a suction part is formed, and a second housing(130) which is coupled with the main housing, wherein a discharge unit is formed. In the suction unit, a pressure sensor is installed. In the pressure sensor hole, a pressure sensor is installed.
Patent KR-20090044951-A (KR)
Inventor: KIM DONG HWAN
IPC: G02F1/13
Filed: 2007-12-27
Abstract: 본 발명의 일 실시예에 따른 인캡슐레이션 기판의 제조방법은 기판을 마련하는 단계, 기판의 전면 및 후면에 배리어(barrier)를 형성시키는 단계, 기판의 전면에 적층된 배리어를 패터닝하여 기판의 일정 부분을 노출시키는 단계, 패터닝 단계를 거친 기판을 습식 식각하는 단계를 포함한다. 
       
     인캡슐레이션 기판, 배리어, 습식 식각
Patent KR-20090071746-A (KR)
Title: Electric heating device for heating of intermediating water and elecric heating pipe apparatus/combined humidifier using same
Inventor: GI NO WAN
IPC: F24F6/10
Filed: 2007-12-28
Abstract: An electric heating device using water as heating media, and an electric heater for hot water pipe and a combined humidifier using the device are provided to maintain constant interval between electrodes using water as heating media and to obtain a large amount of sterilized steam by re-heating the steam produced by heating water. An electric heating device using water as heating media comprises a cylindrical electrode heater(100) which is formed by winding two wires(10R,10N) separated at a certain interval(d) in a spiral shape at specific intervals(D), and a power supply unit(200) which connects N-phase power to the wires of the electrode heater. The intervals between the wires and the outer side of the wires are covered with an insulation material(101), while the inner sides of the wires are exposed.
Patent KR-20090072805-A (KR)
Title: Strobe signal controlling circuit
Inventor: LEE KYONG HA
IPC: G11C8/18
Filed: 2007-12-28
Abstract: A strobe signal control circuit is provided to normally control a DQS signal although output timing of a write pulse signal is faster than output timing of a clock signal. An initial write control part(10) synchronizes a write pulse signal(WTP) to a clock signal(CLK). The write pulse signal is enabled in a write command. A DQS signal output part(20) synchronizes an output signal(WT0) of the initial write control part to the clock signal, and outputs a DQS signal(WT1~WT8). A control signal generating part(30) generates a control signal(WTP-CLK) in response to an output signal of the initial write control part. A reset signal generating part(40) outputs a reset signal to the DQS signal output part in response to a reset signal(RST) and a DQS enable signal(EN-DQS).
Patent KR-20090073895-A (KR)
Title: Multi view display device and method of fabricating thereof
Inventor: LEE BYUNG JOO
IPC: G02B27/22
Filed: 2007-12-31
Abstract: A multi view display device and a method of manufacturing thereof are provided to arrange a parallax changing unit between a display panel and a backlight to reflect light reflected from a parallax barrier layer to the display panel again, thereby improving brightness. A display panel(101) displays an image. A backlight(130) supplies light to the display panel. A parallax changing unit(102) is installed between the display panel and the backlight. The parallax changing unit adjusts a path of light supplied to the display panel. The parallax changing unit realizes a different image according to a watching direction of a user. The parallax changing unit includes a plurality of parallax barrier layers.
Patent KR-20070022390-A (KR)
IPC: G06F17/00
Filed: 2005-06-07
Abstract: 본원에는 콘텐츠 관리 및 전달 시스템 및 방법이 개시되어 있다. 본 발명의 실시예들은 복수의 제공자들로부터 복수 개의 콘텐츠 아이템들을 수신하는 단계, 상기 복수 개의 콘텐츠 아이템들을 계층으로 편성하는 단계, 상기 복수 개의 콘텐츠 아이템들 중 적어도 하나의 아이템에 대한 요구를 수신하는 단계, 및 상기 요구의 수신 다음에 상기 적어도 하나의 아이템을 제공하는 단계를 포함할 수 있다. 상기 콘텐츠 아이템들은 서버상에서 편성될 수 있다. 예를 들면, 이동 장치와 같은 서버와 직접적으로 또는 간접적으로 통신하는 클라이언트 장치 측의 최종 사용자는 콘텐츠 아이템마다 일관된 방식으로 콘텐츠를 브라우징할 수 있으며, 콘텐츠를 미리 볼 수 있고, 콘텐츠를 구매할 수 있다.
Patent KR-20070063507-A (KR)
Title: Substituted purinyl derivatives with immunomodulator and chemoprotective activity and use alone or with medium-chain length fatty acids or glycerides
Inventor: PENNEY CHRISTOPHER
IPC: A61K31/52
Filed: 2005-09-02
Abstract: The present invention describes new biological activities of immunomodulating 6-substituted purinyl compounds which make them particularly useful during the treatment of cancer. Collectively, these new biological activities make these purinyl compounds useful chemoprotective agents for the treatment of myelosuppression which is associated with cancer chemotherapy and/or radiotherapy. This chemoprotective activity is in addition to the immunomodulating and subsequent anticancer activity displayed by these compounds, The chemoprotective usefulness of these compounds is further enhanced by the use of medium-chain fatty acids or salts or triglycerides or mono- or diglycerides in combination with the 6-substituted purinyl compounds of this invention.
Patent KR-20070056104-A (KR)
Inventor: BESIDSKI YEVGENI
IPC: A61K31/4184
Filed: 2005-09-19
Abstract: 본 발명은 하기 화학식 I의 신규한 화합물, 또는 그의 염, 용매화물 또는 용매화염, 그 제조 방법 및 그 제조에 사용되는 신규한 중간체, 상기 화합물을 함유하는 제약 조성물 및 상기 화합물의 치료에 있어서의 용도에 관한 것이다. 
     <화학식 I> 
     
       
     
     헤테로시클릭 아미드, VR1 매개 장애, 급성 및 만성 통증 장애, 급성 및 만성 신경병성 통증, 급성 및 만성 염증성 통증, 호흡기 질환
Patent KR-20070091603-A (KR)
Title: Euv collector debris management
Inventor: PARTLO WILLIAM N
IPC: H01L21/306
Filed: 2005-10-20
Abstract: A method and apparatus that may comprise an EUV light producing mechanism utilizing an EUV plasma source material comprising a material that will form an etching compound, which plasma source material produces EUV light in a band around a selected center wavelength comprising: an EUV plasma generation chamber; an EUV light collector contained within the chamber having a reflective surface containing at least one layer comprising a material that does not form an etching compound and/or forms a compound layer that does not significantly reduce the reflectivity of the reflective surface in the band; an etchant source gas contained within the chamber comprising an etchant source material with which the plasma source material forms an etching compound, which etching compound has a vapor pressure that will allow etching of the etching compound from the reflective surface. The etchant source material may comprises a halogen or halogen compound. The etchant source material may be selected based upon the etching being stimulated in the presence of photons of EUV light and/or DUV light and/or any excited energetic photons with sufficient energy to stimulate the etching of the plasma source material. The apparatus may further comprise an etching stimulation plasma generator providing an etching stimulation plasma in the working vicinity of the reflective surface; and the etchant source material may be selected based upon the etching being stimulated by an etching stimulation plasma. There may also be an ion accelerator accelerating ions toward the reflective surface. The ions may comprise etchant source material. The apparatus and method may comprise a part of an EUV production subsystem with an optical element to be etched of plasma source material.