Patent DE-102009033546-A1 (DE)
Title: Supply endblock to supply sputter cathode with coolant, comprises housing with connection opening, fastening area for introducing housing on first supporting surface and bearing opening, supporting component, shaft, and supporting unit
Inventor: HEINRICH HANS-JUERGEN
IPC: H01J37/34
Filed: 2009-07-16
Abstract: The supply endblock to supply a sputter cathode with a coolant, comprises a housing (2) with a connection opening (21), a first fastening area (22) for introducing the housing on a first supporting surface (11) and a bearing opening (23), where the first fastening area encloses the connection opening, a supporting component disposed into the bearing opening and having a shaft bearing, a shaft rotatably mounted in the shaft bearing of the supporting component for introducing a target tube, a supporting unit for introducing a magnet system, and coolant lines fixedly arranged in the housing. The supply endblock to supply a sputter cathode with a coolant, comprises a housing (2) with a connection opening (21), a first fastening area (22) for introducing the housing on a first supporting surface (11) and a bearing opening (23), where the first fastening area encloses the connection opening, a supporting component disposed into the bearing opening and having a shaft bearing, a shaft rotatably mounted in the shaft bearing of the supporting component for introducing a target tube, a supporting unit for introducing a magnet system, and coolant lines fixedly arranged in the housing relative to the supporting component with coolant connections, where the coolant lines comprise two line sections, which are detachably connectable with one another by a plug connection. A first line section guides through the supporting component and a second line section guides through a connection component, to which the coolant connections are arranged, where the supporting component and the connection component have plug connector complementarily formed at its sides turned to each other. A third line section guides through an additional component arranged between the supporting component and the connection component, where the plug connector are arranged at the sides of the supporting component and the additional component and/or the additional component and the connection component. The connection component has second fastening area for introducing on a second supporting surface. The supply endblock has a fastening device with a third fastening area for introducing the fastening device on the second supporting surface and with a bearing seat for the connection component, where the connection component is movably mounted in the bearing seat. The coolant lines guide from the housing through the connection openings and the coolant connections are arranged outside of the housing. Two of the line sections adjacent to each other in the plug connection run non-parallel to a fastening direction of the plug connection. A leakage line is arranged in the supporting component, connection component and/or additional component. An electroconnection is provided for supplying the sputter cathode with the electrical voltage, and is electrically conductively connected with a coolant connection. The electroconnection and the coolant connection are arranged at the connection component and the connection component is made of electrically conducting material. A drive device is provided for driving the shaft. The shaft is a hollow shaft and the supporting unit is a hollow pin arranged in the hollow shaft.