Patent SG-11201803667R-A (SG)
Title: Systems and methods for region-adaptive defect detection
Inventor: MAHER CHRISTOPHER
IPC: G06T7/00
Filed: 2016-11-16
Abstract: INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property Organization International Bureau (43) International Publication Date 26 May 2017(26.05.2017) WIPOIPCT (10) International Publication Number WO 2017/087571 A1 (51) International Patent Classification: G06T 7/00 (2006.01) G01N 21/17 (2006.01) G01N21/88 (2006.01) (21) International Application Number: PCT/US2016/062355 (22) International Filing Date: 16 November 2016 (16.11.2016) (25) Filing Language: English (26) Publication Language: English (30) Priority Data: 62/257,025 18 November 2015 (18.11.2015) US 15/350,632 14 November 2016 (14.11.2016) US (71) Applicant: KLA-TENCOR CORPORATION [US/US]; Legal Department, One Technology Drive, Milpitas, Cali­ fornia 95035 (US). (72) Inventors: MAHER, Christopher; 407 Lawndale Aven­ ue, Campbell, California 95008 (US). BRAUER, Bjorn; 16698 NW Tucson Street, Beaverton, Oregon 97006 (US). RAMACHANDRAN, Vijay; 832 Duncardine Way, Sunnyvale, California 94087 (US). KARSENTI, Laurent; Haraz Street 16/1, 76086 Rehovot (IL). ROSENGAUS, Eliezer; 3704 Ortega Court, Palo Alto, California 94303 (US). JORDAN, John; 3397 Ivan Way, Mountain View, California 94040 (US). MILLER, Roni; Zamenhof 16, Tel Aviv, Rotem Littman, 17 Eshkol St., Hod Hasharon (IL). (74) Agents: MCANDREWS, Kevin et al.; KLA-Tencor Corp., Legal Department, One Technology Drive, Milpitas, California 95035 (US). (81) Designated States (unless otherwise indicated, for every kind of national protection available): AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (84) Designated States (unless otherwise indicated, for every kind of regional protection available): ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, [Continued on next page] (54) Title: SYSTEMS AND METHODS FOR REGION-ADAPTIVE DEFECT DETECTION 100 1102 INSPECTION MEASUREMENT SUB-SYSTEM J 1 i i i t 104 SAMPLE 106 CONTROLLER 108 : i 1110 m PROCESSOR ' i i i : MEMORY e i 1 (57) : A defect detection meth­ od includes acquiring a reference im­ age; selecting a target region of the ref­ erence image; identifying, based on a matching metric, one or more compar­ ative regions of the reference image corresponding to the target region; ac­ quiring a test image; masking the test image with the target region of the ref­ erence image and the one or more com­ parative regions of the reference image; defining a defect threshold for the tar­ get region in the test image based on the one or more comparative regions in the test image; and determining whether the target region of the test image con­ tains a defect based on the defect threshold. WO 2017/087571 A1 TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG). Published: with international search report (Art. 21(3))