baber/WOPTO huggingface dataset:
Patent KR-20170009277-A (KR)
Title: 터치패널 및 그 터치패널 생성방법
Inventor: LEE MIN SOO
IPC: G06F3/044
Filed: 2015-07-16
Abstract: 터치패널 및 그 터치패널 생성방법이 개시된다. 본 발명에 의하면, 터치 패널 제조공정 중에 글라스에 투명전극층을 형성하는 단계는, 해당 투명전극층의 패턴을 새겨진 메탈 마스크를 이용하여 투명전극 소재물질을 스퍼터링으로 공법으로 글라스에 투명전극층 패턴으로 직접 증착함으로써, 종래와 같이 투명전극 소재물질을 글라스 전체에 도포한 다음 포토리소그라피 공정을 통해 원하는 패턴으로 식각하는 복잡한 공정을 수행할 필요가 없다. 투명전극층 상에 절연층을 생성하거나, 절연층 상에 새로운 투명전극층을 생성하는 단계 역시, 본 발명의 미세 패턴 메탈 마스크를 이용한 스퍼터링 공법으로 제조할 수 있다.
Patent KR-20170011842-A (KR)
Inventor: KUK IN SEOL
IPC: C23F1/44
Filed: 2015-07-24
Abstract: The present invention relates to an etchant composition, and a method for manufacturing an array substrate for a liquid crystal display device. According to the present invention, an etching profile is excellent and the number of processed films is large when a copper-based metal film is etched by the etchant composition. The preset invention comprises: a step of forming gate wiring; a step of forming a gate insulation layer; a step of forming a semiconductor layer; a step of forming source and drain electrodes; and a step of forming a pixel electrode.
Patent KR-20170013699-A (KR)
Inventor: CHOI JAE HOON
IPC: H01P5/12
Filed: 2015-07-28
Abstract: 소형화된 구조의 크로스오버가 제공된다. 개시된 크로스오버는 다수의 브랜치 라인을 포함하는 적어도 하나의 셀; 상기 셀로부터 분기되며 신호가 입력되거나 출력되는 다수의 포트 라인을 포함하되, 상기 적어도 하나의 셀의 다수의 브랜치 라인들로부터는 다수의 오픈 스터브가 돌출된다. 개시된 크로스오버에 의하면, 작은 사이즈로 구현되면서 평면 구조를 가지고 낮은 복잡도로 제조 가능한 장점이 있다.
Patent KR-20170014471-A (KR)
Inventor: WON YOUNG SUN
IPC: F21V15/01
Filed: 2015-07-29
Abstract: The present invention relates to an aluminum die-cast LED lamp housing comprising screw holes with chip discharge grooves formed in the screw holes. In the aluminum die-cast LED lamp housing, a screw hole (12) for assembly of a cable gland is formed through a protrusion pipe (11) protruding from a center of a rear surface of the housing, heat-sink panels (13) are radially disposed around the protrusion pipe (11), protrusion end portions (16) spaced apart from one another by predetermined intervals are formed on an edge of the housing, a pair of brackets (17) through which screw holes (18) are formed and which fasten a support are included, and holes (22) for assembly of screws are formed through an LED module fastening surface (19) and a transparent window fastening surface (19) to have a predetermined depth in such a manner that locations of the holes (22) correspond to locations of first protrusion peaks (14), second protrusion peaks (15), and the protrusion end portions (16) disposed at the edge of the housing. Furthermore, the aluminum die-cast LED lamp housing comprises grooves (23) which are formed on opposite sides of each of the holes (22), in which cut chips generated when the screws penetrate the holes (22) can be collected, and which are formed to have a depth identical to that of the holes (22). According to the present invention, the screws can be directly threaded into the holes without tapping operations due to the above-described grooves (23), and thus the individual tapping operations conventionally required to thread screws into the holes (22) are not required, thereby providing a significant effect in which inconvenient, uneconomical, inefficient disadvantages attributable to the tapping operations are eliminated.
Patent KR-20170016172-A (KR)
Title: Waste water purifing apparatus for water closet
Inventor: KIM YOU YOUNG
IPC: E03D9/00
Filed: 2015-08-03
Abstract: The present invention relates to a waste water purification system of a non-discharge circulation restroom which complexly applies anaerobic digestion, aerobic oxidation, and physical filtration system to remove organic suspended substances, nitrogen, phosphorus, color, malodor, harmful components, and harmful bacteria contained in manure and sewage discharged from a toilet; and to ultimately purify the above mentioned contaminants with a waste water reusable system to reuse the purified sewage as a toilet flushing water. Moreover, the organic suspended substances are self-extinguished such that sludge is not left behind in a process of complex microbial digestion.
Patent KR-20170019099-A (KR)
Title: Apparatus, server and device for providing item mode in screen golf
Inventor: KIM KI TAE
IPC: A63B69/36
Filed: 2015-08-11
Abstract: Disclosed are an apparatus, a server and a terminal used in a screen golf. According to an embodiment of the present invention, the apparatus used in a screen golf comprises: a game implementing unit receiving participation signals of game participants participating in a screen golf game and implementing the screen golf game; an item applying unit applying item effects corresponding to item signals during the screen golf game to the screen golf game based on the item signals generated from an item selection interface provided based on progress information of the screen golf game with respect to each game participant; and an output unit displaying the item effects on a display.
Patent KR-20170020114-A (KR)
Inventor: LEE KI DEOK
IPC: G06K9/00
Filed: 2015-08-13
Abstract: The present invention relates to a fingerprint authentication method and an apparatus using the fingerprint authentication method. According to the present invention, comparison center pixels are selected from among a plurality of pixels of an input fingerprint image acquired via a fingerprint sensor having a small area, and comparison pixels are selected from among a plurality of pixels of a previously stored registration fingerprint image. The input fingerprint image and the registration fingerprint image are disposed so as to overlap each other based on the selected comparison center pixels and the comparison pixels, and whether a similarity is present in an overlap region is determined. When it is determined that the similarity is present in the overlap region, correlation scores for corresponding comparison pixels are calculated and a fingerprint is authenticated based on the calculated correlation scores. Accordingly, the correlation scores, regarding the overlap region at which the input fingerprint image and the registration fingerprint image overlap each other, are calculated only when the input fingerprint image is similar to the registration fingerprint image, thereby reducing a computational load attributable to processing of data required to authenticate a fingerprint.
Patent KR-20170021618-A (KR)
Title: IGZO/Ag/IGZO 다층박막 구조를 갖는 플렉시블 투명 전극 및 그 제조방법
Inventor: KIM JUN HO
IPC: H01L33/42
Filed: 2015-08-18
Abstract: 본 발명은 IGZO/Ag/IGZO 다층박막 구조를 갖는 플렉시블 투명 전극에 관한 것으로서, 더욱 구체적으로는, Ag 금속층; 및 상기 Ag 금속층의 상면 및 하면에 각각 적층된 IGZO층을 포함하는 플렉시블 투명 전극으로서, 상기 Ag 금속층의 두께는 11 nm 내지 25 nm이며, 상기 IGZO층의 두께는 13 nm 내지 70 nm인 것을 특징으로 하는 플렉시블 투명 전극에 관한 것이다. 
본 발명에 따르면, 종래 ITO 전극에 비견할 만한 높은 투과도를 지니면서도, 낮은 면저항값을 갖고, 상온 증착 공정에 의해서 제조되어 고온 열처리가 필요 없이 폴리머 기판에 그대로 제조가 가능한 플렉시블 투명전극을 제공할 수 있다.
Patent KR-20170025983-A (KR)
Title: 폴리에스테르 수지 발포체를 포함하는 샌드위치 판넬
Inventor: LEE KWANG HEE
IPC: C09J167/02
Filed: 2015-08-31
Abstract: 본 발명은 샌드위치 판넬에 관한 것으로, 본 발명에 따른 샌드위치 판넬은, 난연성 및 압축강도가 향상된 수지 발포체; 및 열안정성과 탄성특성이 향상된다.
Patent KR-20170025990-A (KR)
Inventor: NUMATA MASAKI
IPC: H01L51/00
Filed: 2015-08-31
Abstract: Disclosed is an organic light-emitting device including a host, an auxiliary dopant, and a fluorescent dopant. According to the present invention, the organic light-emitting device exhibits excellent color purity and luminous efficiency.
Patent KR-20170027543-A (KR)
Title: Battery Module having an improved coupling structure
Inventor: LEE YOUNG HO
IPC: H01M50/519
Filed: 2015-09-02
Abstract: A battery module according to one embodiment of the present invention includes: a cell cartridge assembly including at least one battery cell and a plurality of stacking cartridges individually accommodating the battery cell and arranged in a layered structure along the height direction; and a sensing assembly mounted on at least one side of the cell cartridge assembly to sense the electrical characteristic of the battery cell. Each stacking cartridge has a bolt assembly finger protruding from at least one corner area thereof more than other corner areas. The bolt assembly finger includes an assembly guide part provided in a slot shape. The sensing assembly includes: a sensing assembly main body having the shape of a plate-shaped structure and having a plurality of sensing members mounted thereon; and an assembly plate integrally formed with the sensing assembly main body and capable of being inserted into the assembly guide part of the bolt assembly finger.
Patent KR-20160147607-A (KR)
Inventor: RO JIN WOO
IPC: G06F3/0488
Filed: 2015-09-03
Abstract: The present invention relates to an audio outputting apparatus, a method of driving an audio outputting apparatus, and a computer readable recording medium. An audio outputting apparatus according to an embodiment of the present invention in an audio output apparatus having a jog dial, may include a user interface of a jog dial type which detects a touch gesture, and an audio function processing part which changes the function of a determined jog dial when a touch gesture for a predetermined region on the determined jog dial is detected. So, various functions can be performed through a control button.
Patent KR-20170032045-A (KR)
Inventor: KIM KYU BAEK
IPC: B63J99/00
Filed: 2015-09-14
Abstract: The present invention relates to a combat management system technology. More specifically, computer devices forming a combat system information treatment unit is integrated into one information treatment unit without separation of a tactics mode information treatment unit and a training mode information treatment unit. Moreover, a distributed system management method considers priorities of software units to process tactics information to distribute the tactics information to be dynamically allocated to the computer devices when power is applied to combat system equipment, monitors a state, and responds to an obstacle when a defect occurs.
Patent KR-20170032676-A (KR)
Title: Inorganic hollow sphere-containing organic-inorganic composite and preparing method of the same
Inventor: YOO JI BEOM
IPC: C08K7/24
Filed: 2015-09-15
Abstract: The present invention relates to inorganic hollow sphere-containing organic-inorganic composite and a manufacturing method thereof. The manufacturing method of inorganic hollow sphere-containing organic-inorganic composite comprises the following steps of: obtaining a first polymer template; obtaining a coating solution; and obtaining an organic-inorganic composite.
Patent KR-20170031003-A (KR)
Inventor: JEONG CHANG HUI
IPC: B63B35/74
Filed: 2015-09-18
Abstract: The present invention relates to a sitting/standing-type paddling boat, including: a body portion having an inner side made of double-wall fabric, and receiving external air introduced thereto through a first valve; a keel portion having an inner side made of double-wall fabric, formed longitudinally on a lower portion of the body portion, and receiving external air introduced thereto through a second valve; a cover portion surrounding the keel portion and connected to the lower portion of the body portion; and a seat portion having a foldable back in the upper portion of the body portion, and receiving external air introduced thereto through a third valve. Accordingly, the present invention may form a foldable chair, such that a user can row a boat while standing up or sitting down.
Patent KR-20170034600-A (KR)
Inventor: YOO JAE HYUN
IPC: G06F3/041
Filed: 2015-09-21
Abstract: 모바일 기기에 구비되어 있는 적외선 센서로의 적외선 투과율을 높여 오작동을 방지할 수 있는, 적외선 투과율이 우수한 잉크젯용 자외선 경화 잉크 조성물이 개시된다. 상기 적외선 투과율이 우수한 잉크젯용 자외선 경화 잉크 조성물은, 1 종 이상의 블랙 염료 및 상기 블랙 염료를 포함하는 혼합 염료로 이루어진 군으로부터 선택되는 염료; 3개 이상의 관능기를 가지는 아크릴 모노머; 2개의 관능기를 가지는 아크릴 모노머; 하나의 관능기를 가지는 아크릴 모노머; 및 광 개시제를 포함한다.
Patent KR-20170034651-A (KR)
Title: Display device
Inventor: CHOI YOUNG SOO
IPC: G02F1/1335
Filed: 2015-09-21
Abstract: According to an embodiment of the present invention, a display device comprises: a liquid crystal panel; a backlight unit arranged in a lower part of the liquid crystal panel; and a guide panel with an elastic material arranged between the liquid crystal panel and the backlight unit. The backlight unit includes: a light guide plate; and a light source unit arranged in one side of the light guide plate. The guide panel is arranged between the light guide plate and the liquid crystal panel. According to an embodiment of the present invention, by forming the guide panel with a foam tape having certain elastic force, the liquid crystal panel can be prevented from being damaged by releasing an impact which can be generated between the liquid crystal panel and the guide panel.
Patent KR-20170035648-A (KR)
Inventor: LEE MIN CHUL
IPC: B24B37/20
Filed: 2015-09-23
Abstract: The present invention relates to a glass plate polishing apparatus. The glass plate polishing apparatus includes: a frame; a circular and rotational table which is arranged on the frame to rotate thereon and includes multiple glass plates arranged on the upper surface; and multiple polishing units which are arranged along the circumferential direction of the rotational table, are fixed to the frame to be arranged on the upper part of the rotational table, and polish the glass plates. The polishing units include polishing pads which maintain the position of facing the glass plates while polishing the glass plates and include a sponge unit changing the shape in accordance with the curvature of the glass plates by a pressing force when the glass plates are pressed. The present invention can polish the flat surface parts such as the front and rear surfaces of the glass plates and the curved surface parts of the glass plates with a single polishing process. The glass plate polishing apparatus also executes the polishing process while coming in contact with the surfaces of the glass plates continuously in accordance with the curvature of the glass plates to make the surfaces of the glass plates smooth after processing.
Patent KR-20170036515-A (KR)
Inventor: HAN DOH YOON
IPC: E02D27/42
Filed: 2015-09-24
Abstract: 해상 설비의 자켓 시공용 천공 장치, 및 이를 이용한 천공 공법에 관한 것이다.  천공 장치는 해머 유닛과, 회전 구동 유닛과, 제1 고정 유닛과, 로드들, 및 제2 고정 유닛을 포함한다.  해머 유닛은 핀 파일의 하단을 통해 일부 인출되도록 핀 파일 내에 배치되며, 외부의 공기 압축기로부터 고압 공기를 공급받아서 해저 지반을 타격하도록 동작한다.  회전 구동 유닛은 해머 유닛의 상단에 연결되어 핀 파일 내에 배치되며, 외부의 유압 파워팩으로부터 유압을 공급받아서 해머 유닛을 상하 축을 중심으로 회전시킨다.  제1 고정 유닛은 회전 구동 유닛의 상단에 연결되어 핀 파일 내에 배치되며, 유압 파워팩으로부터 유압을 공급받아서 수축 상태로부터 핀 파일의 내벽에 압착되도록 확장 동작함에 따라 핀 파일을 고정한다.  로드들은 제1 고정 유닛의 상단에 설정 길이에 맞춰지도록 복수 단으로 연결되어 핀 파일 내에 배치된다.  제2 고정 유닛은 로드들 중 최상측의 로드의 상단에 연결되어 핀 파일 내에 배치되며, 유압 파워팩으로부터 유압을 공급받아서 수축 상태로부터 핀 파일의 내벽에 압착되도록 확장 동작함에 따라 핀 파일을 고정한다.
Patent KR-20170038558-A (KR)
Title: Microorganism for producing casein phosphopeptide and method for producing casein phosphopeptide
Inventor: LEE MI GYEONG
IPC: C12R1/01
Filed: 2015-09-30
Abstract: The present invention relates to a strain for producing casein phosphopeptide, a composition containing the same, and a method for producing casein phosphopeptide using the same. The strain of the present invention is acquired by isolating lactobacillus having high productivity of protease and casein phosphopeptide from kimchi. Moreover, provided are a method for culturing the strain, a culture condition, and a condition for producing casein phosphopeptide using the strain.
Patent KR-20170040867-A (KR)
Title: Vivration and cooling, Prefabricated teethers
Inventor: HEO JAE WON
IPC: A61J17/00
Filed: 2015-10-05
Abstract: The present invention relates to an upper and lower end separable teether to protect a baby from getting stressed when the baby gets a tooth, chewing objects or being infected by virus. The teether of the present invention comprises: an upper end having various functions; and a lower end to supply power to the upper end. The upper end is made of a silicon material to protect a baby from virus and comprises a normal upper end, an upper end with an electronic motor and an upper end with a cooling function.
Patent KR-20170041940-A (KR)
Title: 복합 파일
Inventor: LEE DAE YONG
IPC: E02D5/28
Filed: 2015-10-07
Abstract: 본 발명은 PHC 파일의 상부에 강관 파일을 간편하고 견고하게 상호 연결할 수 있도록 한 복합 파일을 제공하는 것으로, 본 발명의 바람직한 실시예에 따른 복합 파일은 일측단에 구조물이 지지되는 중공형의 강관 몸체와, 상기 강관 몸체의 타측단에 접합되는 소켓플레이트와, 상기 소켓플레이트에 접합되며 상기 강관 몸체의 외경보다 작은 외경으로 제공되어 외주면에 나사산이 형성되고 단부는 내측으로 플랜지가 형성된 연결소켓을 갖는 강관 파일; 중공부를 가지고 일단부에 단턱부가 형성된 콘크리트 몸체와, 상기 콘크리트 몸체에 삽입되며 상기 연결소켓과 대응하는 외경으로 제공되어 외주면에 나사산이 형성되는 보강밴드를 갖는 PHC 파일; 및 내주면에 나사산이 형성되어 상기 보강밴드의 나사산에 결합되고, 상기 보강밴드의 나사산과 상기 연결소켓의 나사산을 따라 이동하며 상기 강관 파일과 상기 PHC 파일을 결합하는 나사결합관;을 포함하며, 시공현장에서 지반에 PHC 파일을 설치한 다음 PHC 파일의 상부에 강관 파일을 길이방향으로 연결하는 작업에 있어, 공장제작으로 품질이 확보된 나사결합관으로 PHC 파일과 강관 파일을 상호 연결함으로써 작업공정이 간편하여 신속하게 시공을 할 수 있게 되며, 전체적인 시공 기간을 단축할 수 있고, 공사비도 절감할 수 있는 효과가 있다.
Patent KR-20170042202-A (KR)
Title: A flow rate adjuster of the shower head
Inventor: HONG KI
IPC: A47K3/28
Filed: 2015-10-08
Abstract: The present invention relates to a flow rate control device for a shower head, capable of enabling a user to select a flow rate of water in accordance with a purpose when using a shower head as the flow rate control device is installed in the shower head to control the flow rate. To achieve this purpose, the device, installed in a shower head to control the flow rate of water, controls the flow rate by moving a flow rate control switch installed in an emm, left and right. A flow rate control part controls the flow rate through a gap between a male control part and a cylindrical tube installed in parallel with each other. The cylindrical tube is fixated to the flow rate control switch to be moved left and right.
Patent KR-20170045418-A (KR)
Title: Draining member for embankment and method for installing the same
Inventor: CHO DONG MOK
IPC: E03F1/00
Filed: 2015-10-16
Abstract: The present invention relates to a bank rainwater removal structure for preventing generation of leachate in a waste landfill and a construction method thereof wherein, more specifically, a drainage path is formed on a small step formed on a slope of a landfill for waste materials such as garbage, and a rainwater collection tank for collecting rainwater gathering in the drainage path and processing the rainwater is arranged, and the drainage path is installed to be inclined in the direction of the rainwater collection tank to enable rainwater to be collected in the rainwater collection tank so a generation amount of contaminated water (leachate from now on), generated as rainwater comes in contact with waste materials such as garbage, can be minimized. The bank rainwater removal structure for preventing generation of leachate in a waste landfill comprises: a landfill which is in the shape with a wide upper portion and a narrow lower portion and is excavated to form the slope; the drainage path which is formed to have multi-steps on the slope of the landfill; the rainwater collection tank which is installed on a bottom surface of the landfill and has a pump and a drainage pipe; and a water blocking material which covers the slope of the landfill and the rainwater collection tank.
Patent KR-20170046456-A (KR)
Title: One way valve apparatus and safety valve in one and compressor for air conditioner of vehicle having the same
Inventor: PARK JANG SIK
IPC: B60H1/00
Filed: 2015-10-21
Abstract: The present invention relates to a one-way valve apparatus usable as a safety valve, and to a vehicle air conditioner compressor having the same. The one-way valve apparatus comprises: a main body which has a first coolant line installed in a part, a second coolant line installed in the other part, and an internal space formed therein; a first movable body which is installed in a part of an accommodation space of the main body to be moved forward and backward, wherein the first movable body is moved backward by a coolant to open the first coolant line when the pressure of the coolant, which applies the pressure to the first coolant line and the second coolant line, is greater than or equal to a first pressure level, and is moved forward by a first restoring force of a first elastic member to close the first coolant line when the pressure of the coolant is less than or equal to the first pressure level; and a second movable body which is installed in the other part of the accommodation space of the main body to be moved forward and backward, wherein the second movable body is moved backward by the coolant to open the second coolant line when the pressure of the coolant is greater than or equal to a second pressure level, which is greater than the first pressure level, and is moved forward by a second restoring force of a second elastic member, which is greater than the first restoring force, to close the second coolant line when the pressure of the coolant is less than or equal to the second pressure.
Patent KR-20170050237-A (KR)
Inventor: AHN KYUNG HOON
IPC: H04W4/02
Filed: 2015-10-30
Abstract: 본 발명은 비콘 네트워크 및 CRM 정보를 이용하여 매장의 프로모션 정보를 제공하는 방법 및 장치에 관한 것이다. 
본 발명의 일실시예에 의한 프로모션 정보 제공 방법은 비콘 네트워크 및 CRM 정보를 이용하여 프로모션 정보를 제공하는 방법에 있어서, 매장별 고객 정보를 포함하는 CRM 정보가 저장된 데이터베이스를 유지하는 단계; 제1고객 그룹의 단말기 식별 정보 및 제1매장에 설치된 제1비콘의 식별 정보를 포함하는 제1비콘의 반응 정보를 수신하는 단계-상기 제1고객 그룹의 단말기 식별 정보는 상기 제1비콘의 통신 반경 내에 현재 위치하는 고객의 단말기 식별 정보를 의미함-; 제2고객 그룹의 단말기 식별 정보 및 제2매장에 설치된 제2비콘의 식별 정보를 포함하는 제2비콘의 반응 정보를 수신하는 단계-상기 제2고객 그룹에 대한 정보는 상기 제2매장에 설치된 제2비콘의 통신 반경 내에 현재 위치하는 고객의 단말기 식별 정보를 의미함-; 상기 수신된 제1비콘의 반응 정보 및 제2비콘의 반응 정보와 상기 저장된 고객 정보를 비교하여 상기 제2고객 그룹에서 상기 제1매장의 고객을 추출하는 단계; 및 상기 추출된 고객의 단말기로 상기 제1매장의 프로모션 정보를 전송하는 단계를 포함할 수 있다.
Patent KR-20170051755-A (KR)
Title: Gas Compressor Systems
Inventor: KIM YOUNG HUN
IPC: F04B49/00
Filed: 2015-10-30
Abstract: The present invention relates to a gas compressor system, and more specifically, relates to a gas compressor system facilitating temperature control of gas, so as to improve operation stability to be restored to a normal state in a short time when surge effect occurs in a gas compressor. To this end, the system comprises: an intake unit installed in an intake pipe through which gas is supplied, and including a pressure control valve to control the pressure of the gas sucked and transferred through the intake pipe, and an intake valve to control the flow rate of the gas transferred from the pressure control valve; a compression unit including a first cooler to compress the gas supplied from the intake unit and to cool the compressed gas; a discharge unit to discharge the gas transferred from the compression unit when an abnormal high pressure occurs and to discharge the gas to a gas customer in the case of a normal pressure; an anti-surge unit installed to be connected to a compression pipe and recirculating the gas pressure to maintain the normal pressure when the surface effect occurs in the gas compressor, so as to restore the normal pressure from the surge effect; and a cooling unit including a second cooler immersed in seawater to exchange heat with the gas and cooling the gas circulated from the anti-surge unit by using the seawater.
Patent KR-20170053775-A (KR)
Title: Probe station
Inventor: JUNG SANG HOON
IPC: G01R1/067
Filed: 2015-11-06
Abstract: Disclosed is a probe station for performing electrical inspection of a wafer on which semiconductor elements are formed. The present invention includes: a wafer chuck for supporting a wafer; a probe card disposed on the upper side of the wafer chuck; a pad cassette for storing a plurality of polishing pads in a multilayer form, to remove foreign substances from the probes of the probe card; a pad support member on which one of the polishing pads is mounted; and a pad conveying member for conveying the polishing pads between the pad cassette and the pad supporting member. As such, the probe station has a pad cassette for storing the polishing pads and a pad conveying member for carrying the polishing pad, and thus, the replacement of the polishing pad can be performed automatically, and it is not necessary to stop the facility for replacement of the polishing pad.