baber/WOPTO huggingface dataset:
Patent KR-20210044627-A (KR)
Title: Microcapsule with Core-shell Structure and Manufacturing method thereof
Inventor: KIM JONG HWA
IPC: B01J13/18
Filed: 2019-10-15
Abstract: The present invention relates to a microcapsule having a core-shell structure that is excellent in high temperature durability and solvent resistance as well as being environmentally friendly, and a method for manufacturing the same, wherein the microcapsule comprises: a core part comprising a hydrophobic active ingredient; and a shell part surrounding the core part and including a silane-crosslinkable polyurethane-based resin derived from a crosslinkable alkoxysilane group-terminated prepolymer.
Patent KR-20210045777-A (KR)
Title: Generating Facility Management Device For High Temperature Component
Inventor: LIM JUNG SUB
IPC: F02C9/00
Filed: 2019-10-17
Abstract: According to the present invention, disclosed is a power generation facility management device which automatically calculates and determines a power generation inspection cycle by a system. According to an example, the power generation facility management device managing operations of power generation facilities calculates an inspection cycle through a time code index, a stressor index, and a degradation mechanism index about unit devices configuring the power generation facilities.
Patent KR-20200047384-A (KR)
Inventor: SAIJO MASAYUKI
IPC: C12Q1/70
Filed: 2019-10-23
Abstract: The present invention is to provide a method capable of rapidly detecting a severe fever thrombocytopenia syndrome (SFTS) virus with high sensitivity. The present invention relates to a method for detecting the SFTS virus which uses an oligonucleotide primer which selectively hybridizes with a base sequence specific for the SFTS virus to amplify the base sequence specific for the SFTS virus by a LAMP method.
Patent KR-20190129020-A (KR)
Title: Method and apparatus for controlling vehicle to prevent accident
Inventor: KIM CHEOL SEUNG
IPC: B60W40/02
Filed: 2019-10-29
Abstract: Disclosed is a vehicle control method. The vehicle control method with a calculation device includes the following steps of: obtaining at least one among driving information and sensing information from a vehicle driving in a specific section; confirming a correlation between the obtained information and history information related with a past accident cause of at least one vehicle having driven in the specific section; and generating a control signal for controlling the vehicle based on the correlation. According to the present invention, at least one among an autonomous vehicle, a user terminal and a server can be connected with an artificial intelligence module, a drone (unmanned aerial vehicle: UAV), a robot, an augmented reality (AR) device, a virtual reality (VR) device and other devices related with 5G services.
Patent KR-20210051031-A (KR)
Title: Rail joint fastener
Inventor: KI JUN LEE
IPC: B66C7/14
Filed: 2019-10-29
Abstract: The present invention provides a rail connection device for traveling cranes. According to the present invention, the rail connection device for connecting adjacent unit rails comprises: a pair of connecting bars disposed on each of the unit rails adjacent to each other; and a connecting member elastically connecting the pair of connecting bars.
Patent KR-20210053753-A (KR)
Title: Shellfish flowerpot using fastening device with water drain groove
Inventor: LEE EUN MIN
IPC: A01G9/02
Filed: 2019-11-04
Abstract: The present invention relates to a seashell flowerpot using a fastening device with a water drain groove in a seashell flowerpot made by fastening two or more seashells. One of the seashells forms a bottom support part, and the other consists of a flowerpot body part that can be filled with soil. A through-hole is formed at a predetermined position of the support part and the body part. The flowerpot body part and the bottom support part are fastened by a fastening means including a screw bolt of a certain length penetrating from the flowerpot body part through the through-hole, a nut for fastening the screw bolt passed through the through-hole at the lower end of the bottom support part, and a cylindrical pipe of a certain length surrounding the screw bolt between the flowerpot body part and the bottom support part. A water drain groove forming a cross shape on the head side of the screw bolt and a water drain groove forming a cross shape at a predetermined position of the nut are separately provided so that the flow of water passes through the screw bolt water drain groove of the flowerpot body part and is discharged into the water drain groove formed in the nut of the bottom support part while flowing along a screw root of the screw bolt inside the pipe. Accordingly, the present invention improves water drainage.
Patent KR-20200081220-A (KR)
Inventor: JEON YOUNG HO
IPC: H01L27/12
Filed: 2019-11-06
Abstract: The present invention relates to a stretchable display device. The stretchable display device according to one embodiment of the present invention comprises: a lower substrate including a plurality of spaced apart first areas in which a plurality of sub-pixels are defined, a plurality of second areas in which a plurality of connection wires connecting first areas adjacent to each other among the plurality of first areas, and a plurality of third areas, which are areas excluding the plurality of first areas and the plurality of second areas; a plurality of additional sub-pixels disposed in each of the plurality of third areas; and a plurality of piezoelectric patterns electrically connected to each of the plurality of additional sub-pixels. Accordingly, the deterioration of image quality of the display device may be minimized when the stretchable display device is stretched.
Patent KR-20210055197-A (KR)
Title: Apparatus and method for curing quantum dot, and apparatus and method for printing quantum dot
Inventor: KANG HAN LIM
IPC: H01L27/15
Filed: 2019-11-07
Abstract: The present invention relates to an apparatus and a method for curing quantum dots, and to an apparatus and a method for printed quantum dots, wherein the apparatus for curing quantum dots may include: a curing part provided to emit light to quantum dots to cure the quantum dots printed on a substrate; a detector provided to detect the light emitting state of the quantum dots made by emitting the light to the quantum dots; and a confirmation part provided to receive the light emitting state of the quantum dots from the detector in real time and to confirm in real time the printed state of the quantum dots when the quantum dots are cured. Accordingly, the defect of the quantum dots can be checked in real time.
Patent KR-20210061629-A (KR)
Inventor: KIM YONG JOO
IPC: G06N3/04
Filed: 2019-11-20
Abstract: Disclosed are a multi-capacitor-based artificial neural network operation method and an apparatus therefor. According to one embodiment of the present invention, the artificial neural network operation method includes: a step wherein an artificial neural network device produces power based on an energy harvesting module, and stores the power based on a multi-capacitor; a step wherein the artificial neural network device transmits and receives a spike signal between an internal neuromorphic computing module and an external neuromorphic system based on a wireless network; and a step wherein the artificial neural network device provides the power to some neurons having received the spike signal, among all neurons constituting the neuromorphic computing module by using some of a plurality of capacitors constituting the multi-capacitor. Therefore, the present invention is capable of reducing the overhead of the entire system.
Patent KR-20210065395-A (KR)
Title: Training simulator and method for Inspection Device using argmented reality technology
Inventor: JEONG MIN KWON
IPC: G06T15/08
Filed: 2019-11-27
Abstract: The present invention relates to a technology for developing advanced radiation safety education and practice contents centered on radiation exposure situations and realizing preventive safety education for radiation accidents therethrough. By making it possible to implement a program that uses 3D volume rendering simulation technology for radiation utilization facilities and radiation handling equipment, the advanced radiation safety education and practice contents centered on the radiation exposure situations can be developed and the preventive safety education on the radiation accidents can be realized.
Patent KR-20210068878-A (KR)
Title: pulverized coal-fired boiler Combustion system of low-combustibility fuel and combustion method using same.
Inventor: PARK SEOKUN
IPC: F23C5/02
Filed: 2019-12-02
Abstract: The present invention relates to a pulverized coal-fired boiler combustion system of low-combustion fuel and a combustion method using the same, and more particularly, a low-combustion pulverized coal-fired boiler comprising a combustion unit in which combustion occurs and a windbox unit through which a first fuel and a second fuel different from each other and air are injected into the combustion unit, wherein the windbox unit includes an upper layer part, a middle layer part and a lower layer part, and the upper layer part, the middle layer part and the lower layer part include a fuel supply unit for supplying the first fuel and the second fuel. The pulverized coal-fired boiler combustion system according to the present invention can effectively co-fire low-combustion fuel through simple remodeling of existing facilities without building a new boiler.
Patent KR-20210069958-A (KR)
Title: Selective catalytic reduction system
Inventor: HWANG JINWOO
IPC: B01D53/94
Filed: 2019-12-04
Abstract: The present invention relates to a selective catalytic reduction system for reducing nitrogen oxides contained in exhaust gas. According to one embodiment of the present invention, the selective catalytic reduction system comprises: a main body part which is connected to a discharging pipe at one end and has an opening at the other side; a mixing part which is integrated with the other side of the main body part having the opening, connected to the inside of the main body part through the opening, connected to an introduction pipe at one end, and connected to a bypass discharging pipe at the other end; and a catalyst which is arranged between the opening and the discharging pipe in the main body part.
Patent KR-20210073276-A (KR)
Title: Door Handle System With Actuator For Control Of Car-mounted Door Handle
Inventor: KOH YUNG HO
IPC: E05B85/10
Filed: 2019-12-10
Abstract: The present invention relates to a door handle system, and more particularly, to a door handle system including an actuator for control of a car-mounted retractable door handle, which controls a door handle installed on a door panel of a vehicle to stick out of the door panel or to be accommodated inside the door panel. The present invention exhibits the following effects. There are advantages that high-load objects can be pushed and pulled even with minimal motor force and forward and backward movements of a transfer screw are made stably, so that failure and noise can be reduced. The door handle system according to the present invention comprises the actuator, a drive power transmission link, the door handle, and a hinge shaft, and the actuator comprises a drive worm, a deceleration gear, the transfer screw, a limit switch, a power application unit, and a housing.
Patent KR-20210075610-A (KR)
Title: Polyimide film having excellent weather resistance
Inventor: AHN KYUNGIL
IPC: C08J5/18
Filed: 2019-12-13
Abstract: The present invention relates to a polyimide film copolymerized by including at least one diamine, and at least one acid dianhydride. More specifically, the present invention relates to a polyimide film which has excellent transparency and minimizes color change due to external UV exposure, so that it can be applied as a cover window through excellent weather resistance and excellent visibility.
Patent KR-20210079430-A (KR)
Title: Input sensing panel and display apparatus including the same
Inventor: YANG SUNG JIN
IPC: G06F3/041
Filed: 2019-12-19
Abstract: An input sensing panel includes: a base layer, a plurality of sensing electrodes arranged in a first direction and a second direction which cross each other; and a plurality of sensing lines connected to a plurality of respective sensing electrodes, at least one of the plurality of sensing lines including a diagonal portion extending in a direction diagonal to each of the first direction and the second direction, wherein each of the plurality of sensing lines includes a lower layer disposed on the base layer and containing a first conductive material, and an upper layer containing a second conductive material different from the first conductive material and contacting the lower layer, and the upper layer overlapping the diagonal portion is disconnected in the diagonal direction to expose a portion of the lower layer. The present invention provides the display device having improved reliability by including an input sensing panel which blocks moisture flowing in from the outside.
Patent KR-20210079148-A (KR)
Title: A takeout soda drink cup
Inventor: PARK JUNG HYUN
IPC: B65F1/16
Filed: 2019-12-19
Abstract: The present invention relates to a disposable takeout beverage container having a trash can function. According to the present invention, in regard to a disposable takeout beverage container including a cup (120) for storing beverages and a cup lid (120) covering the cup (120), inlets (130,130') for inserting waste paper and garbage are formed on the cup lid (110), and inlet lids (140,140') extended from one side of the inlets (130,130') as an integrated body are provided in order to open and close the inlets (130,130') by being flexibly bent downward or upward from the one side of the inlets (130,130') which is regarded as a support axis. Accordingly, the disposable takeout beverage container can be reused as a trash can instead of being discarded after the consumption of beverages, and, as a result, an environmental issue caused by the use of disposable plastic can be solved, and also, a user can gain economic profits and solve purchase-related inconvenience because the user does not need to purchase a trash can separately.
Patent KR-20210082703-A (KR)
Title: Non-volatile memory device and method for fabricating the same
Inventor: PARK BYUNG GON
IPC: H01L29/792
Filed: 2019-12-26
Abstract: The present invention provides a nonvolatile memory device that prevents a channel layer filling a channel hole from being connected to each other between the channel layer and an adjacent channel layer, and a method for fabricating the same. The nonvolatile memory device includes a first composite layered structure in which a first insulating layer and a first electrode layer are alternately stacked on a first substrate, wherein the first electrode layer includes a first top electrode layer disposed furthest from the first substrate; a second composite layered structure in which a second insulating layer and a second electrode layer are alternately stacked on the first composite layered structure, wherein the second electrode layer includes a second bottom electrode layer closest to the first top electrode layer; a junction insulating layer disposed between the first uppermost electrode layer and the second lowermost electrode layer; a channel trench penetrating through the second composite layer structure, the junction insulating layer, and the first composite layer structure, the channel trench including first and second sidewalls facing each other; and a barrier film disposed on a first sidewall of the channel trench defined by the junction insulating layer, wherein the barrier film is not disposed on the second sidewall of the channel trench defined by the junction insulating layer.
Patent KR-20210014557-A (KR)
Inventor: KIM HYANGJUNG
IPC: A61H99/00
Filed: 2019-12-27
Abstract: Provided is a method for providing remote rehabilitation training. The method for providing remote rehabilitation training comprises the steps of: receiving, by a server, a connection request from a user terminal and a therapist terminal; receiving, by the server, first image data of a state in which a user performs rehabilitation training using a rehabilitation training device from the user terminal in real time; receiving, by the server, second image data provided to the user who is performing the rehabilitation training from a rehabilitation training display device in real time; and transmitting the first image data and the second image data received by the server to the therapist terminal in real time.
Patent KR-20210084780-A (KR)
Title: Wearable device with drone
Inventor: ROH YOUNG HWA
IPC: B64D47/00
Filed: 2019-12-27
Abstract: The present invention relates to a wearable device equipped with a drone. The wearable device equipped with the drone includes: a body unit which is worn on a body and guides a path to a target point and obstacles on the path to a wearer through an output unit; and a drone which automatically flies in front of the path, detects obstacles, and communicates with the body unit and transmits obstacle information to the body unit when the obstacle is detected. For this reason, the wearable device equipped with the drone provides safer route guidance to the visually/hearing impaired and the elderly by outputting information about various obstacles on the route together with route guidance to the target point.
Patent KR-20210085640-A (KR)
Title: Controll Method of High Flux RO Water Purifier
Inventor: CHO MIN JE
IPC: B01D61/12
Filed: 2019-12-31
Abstract: A water purifier according to an exemplary embodiment of the present invention comprises: a filtering part which has a raw water inlet for receiving raw water, a purified water outlet for discharging purified water generated by filtering the raw water, and a domestic water outlet for discharging domestic water generated in a generation process of the water purifier; a pump part for providing positive pressure and reverse pressure to the filtering part; a flow path part for changing a flow path for providing the reverse pressure to the filtering part; and a control part for extracting purified water discharged through the purified water outlet by purified water extraction input and making reverse pressure in the filtering part right after or after a predetermined time is elapsed from completion of the purified water extraction.
Patent KR-20200090608-A (KR)
Inventor: LEE CHENG CHE
IPC: H01L21/768
Filed: 2019-12-31
Abstract: The present disclosure provides a method for multi-level etching. The method comprises the steps of: providing a substrate; forming a first reference feature over a control region of the substrate; forming an etchable layer over the first reference feature and a target region over the substrate; patterning a masking layer having a first opening protruding over the control region and a second opening protruding over the target region over the etchable layer; and removing a portion of the etchable layer through the first and second openings until the first reference feature is reached. A semiconductor sensing device manufactured by multi-step etching is also disclosed.
Patent KR-20190022719-A (KR)
Title: 요산염 음이온 트랜스포터 1 억제제의 제조 방법
Inventor: ZHAO GUILONG
IPC: C07C331/04
Filed: 2017-06-26
Abstract: 본 발명은 반응식이 하기와 같은 식 ZXS-BR으로 표시되는 URAT1 억제제인, 2-((5-브로모-4-((4-브로모나프탈렌-1-일)메틸)-4H-1,2,4-트리아졸-3-일)티오) 아세트산의 제조 방법을 제공한다. 선행 기술과 비교해, 본 발명에 의해 제공되는 제조 방법은 저비용이며, 취급이 용이하고, 품질 관리가 용이하며, 공업화에 적합하다.
Patent KR-20190018536-A (KR)
Title: 중간엽 줄기 세포 엑소솜에 관련된 방법 및 조성물
Inventor: MITSIALIS S ALEXANDER
IPC: A61K35/28
Filed: 2012-03-09
Abstract: 본 발명은 중간엽 줄기 세포 (MSC)에서 유래된 엑소솜(exosome)을 포함하는 조성물, 및 염증성 폐 질환을 비롯한 특정 폐 질환에 걸린 대상체에서 상기 조성물을 사용하는 방법을 제공한다.
Patent KR-20190025715-A (KR)
Title: 자동차용 광원 및 대응하는 광-방출 모듈
Inventor: ALBOU PIERRE
IPC: F21V17/00
Filed: 2017-07-04
Abstract: 광-방출 모듈은 광원(4) 및 광원에 의해 방출되는 광선을 형성하기 위한 광학 부품(6)을 포함한다.  광원(4)은 서브밀리미터 치수의 복수의 광-방출 유닛(8), 및 광원을 광학 부품(6) 상에 위치설정하는 데 참여하도록 구성된 적어도 하나의 위치설정 돌기(9)를 포함하는 반도체 광원이다.  광원은 적어도 하나의 위치설정 돌출부(9)와 광학 부품 내에 형성된 대응하는 수용 오리피스(40)의 상호작용을 통해 광학 부품에 대해 위치설정된다.
Patent KR-20190034317-A (KR)
Title: 로컬 운영자에 의한 서비스 프로비저닝
Inventor: PRASAD ATHUL
IPC: H04W4/50
Filed: 2016-08-03
Abstract: 애플리케이션의 서버 부분으로부터의 네트워크 정보가 애플리케이션의 클라이언트 부분에 의해 수신되는지를 모니터링하는 단계 - 클라이언트 부분은 제1 네트워크를 통해 서버 부분에 접속되고, 제1 네트워크는 라디오 액세스 기술의 것이고, 네트워크 파라미터는 제2 네트워크에 관련되고, 제2 네트워크는 라디오 액세스 기술의 것이고, 제2 네트워크는 제1 네트워크와 다름 - ; 및 네트워크 정보가 수신되는 경우, 네트워크 정보에 기초하여 제2 네트워크와 연동하도록 셀룰러 라디오 계층을 제어하는 단계를 포함하는 방법이 제공된다.
Patent KR-20190038902-A (KR)
Title: 광학 시스템, 리소그래피 장치 및 방법
Inventor: HARTJES JOACHIM
IPC: G02B7/02
Filed: 2017-08-16
Abstract: 리소그래피 장치(100A, 100B)용 광학 시스템(200)은 제1 구성요소(402), 제2 구성요소(404), 및 제1 구성요소(402)와 제2 구성요소(404) 사이에 압력 끼워맞춤 결합으로 보유되고 이 목적으로 클램핑력(FK)을 받게 되는 광학 요소(300)를 갖고, 구성요소(402, 404) 중 적어도 하나는 광학 요소(300)에 접촉하고 형상 기억 합금을 갖는 지지부(412, 412', 426)를 포함한다.
Patent KR-20190056439-A (KR)
Title: 패턴 묘화 장치
Inventor: KITO YOSHIAKI
IPC: G03F7/20
Filed: 2017-09-14
Abstract: 패턴 묘화 장치(EX)는, 광원 장치(LS)로부터의 빔을 복수의 묘화 유닛(Un)의 어느 1개에 선택적으로 공급하기 위해서, 광원 장치(LS)로부터의 빔을 차례로 통과시키도록 배치되며, 전기적인 제어에 의해서 빔을 묘화 유닛(Un)을 향하게 하는 복수의 선택용 광학 부재(OSn)를 가지는 빔 전환부와, 복수의 묘화 유닛(Un) 중 특정의 묘화 유닛(Un)으로부터 기판(P)에 투사되는 빔의 강도를 조정할 때, 특정의 묘화 유닛(Un)에 대응한 빔 강도 조정부의 조정 가능한 범위 내에서 기판(P)에 투사되는 빔의 강도를 조정하고, 특정의 묘화 유닛(Un) 이외의 다른 묘화 유닛(Un) 각각으로부터 기판(P)에 투사되는 빔의 강도를, 특정의 묘화 유닛(Un)으로부터 기판(P)에 투사되는 빔의 강도와 맞추도록, 다른 묘화 유닛(Un)의 각각 대응한 빔 강도 조정부를 제어하는 제어부(250)를 구비한다.
Patent KR-20190095273-A (KR)
Title: 직물의 기하형태적 정보를 통한 처리 매개변수의 결정
Inventor: KESSLER ARND
IPC: D06F33/37
Filed: 2017-12-07
Abstract: 하나 이상의 디바이스에 의해서 수행되는 방법이 특히 개시되고, 그러한 방법은: 직물(52)의 표면 상의 복수의 지점의 공간적 위치를 나타내는 기하형태적 정보를 획득하는 단계; 기하형태적 정보에 적어도 부분적으로 기초하여, 직물(52)의 처리에 대한 적어도 하나의 처리 매개변수를 결정하는 단계; 및 적어도 하나의 처리 매개변수를 출력하거나 또는 그 출력을 트리거링하는 단계를 포함한다.
Patent KR-20190098168-A (KR)
Title: 조류 병원체의 다중 항원을 발현하는 재조합 hvt 벡터 및 그를 포함하는 백신
Inventor: BUBLOT MICHEL
IPC: A61K39/17
Filed: 2017-12-13
Abstract: 본 발명은 조류 병원체의 항원을 함유하고 발현하는 재조합 칠면조 헤르페스바이러스 (HVT) 벡터, 재조합 HVT 벡터를 포함하는 조성물 및 재조합 HVT 벡터를 포함하는 다가 백신을 제공한다.     본 발명은 나아가 다양한 조류 병원체에 대항하는 백신접종 방법 및 재조합 HVT 벡터의 제조 방법을 제공한다.
Patent KR-20190104337-A (KR)
Title: 구리 합금의 피스톤 압축 링
Inventor: KRUS DAVID J
IPC: C22C9/06
Filed: 2017-12-15
Abstract: 피스톤 링은 구리-니켈-실리콘-크롬 합금으로 제조된다. 이 물질은 피스톤의 상부 압축 링이 피스톤 크라운에 더 가깝게 이동시키는 것을 가능하게 하여, 틈새 체적을 줄이고, 조기-점화 경향을 감소시킨다. 점화 타이밍 진각은, 상기 링을 설치하고, 센서가 허용하는 대로 ECU가 타이밍을 앞당겨 효율성을 높여, 실현될 수 있다.  또한, 더 짧은 피스톤 및 더 긴 커넥팅 로드는 가능하다. 더 짧은 피스톤은 엔진에서 왕복운동 질량을 줄이고, 더 긴 커넥팅 로드는, 피스톤을 라이너에 밀착시키는 방사상 방향 힘에 의해 유발된 마찰 손실을 감소시킨다. 조기-점화 경향 및 부피 감소 모두는 엔진 효율을 높인다.
Patent KR-20190097159-A (KR)
Title: 자연 시효 경화에 저항하는 고강도 고성형 가능 알루미늄 합금 및 그 제조 방법
Inventor: FLOREY GUILLAUME
IPC: C22C21/04
Filed: 2017-12-12
Abstract: 고강도, 고변형 가능한 알루미늄 합금 및 이러한 합금을 제조 및 가공처리하는 방법이 개시된다.  보다 상세하게는, 개선된 기계적 강도 및 성형성을 나타내는 열처리 가능한 알루미늄 합금이 개시된다.  본 처리 방법은 주조, 균질화, 열간 압연, 용체화, 예비 시효, 및 일부 경우에 예비 변형 단계를 포함한다.  일부 경우에, 처리 단계는 냉간 압연 및/또는 열처리를 더 포함할 수 있다.
Patent KR-20190094476-A (KR)
Inventor: KHAN ADAM
IPC: H01L29/66
Filed: 2012-07-20
Abstract: 본원에 개시되어 있는 것은 다이아몬드 반도체들을 제작하기 위한 신규하고 개선된 시스템 및 방법이다. 이러한 시스템은 n-형 도너 원자(306)들과 다이아몬드 격자(304)를 가지는 다이아몬드 재료(200)를 포함할 수 있고, 도너 원자(306)들의 0.16%가 770 cm 2 /Vs보다 더 큰 이동도를 가지는 전도성 전자들을 100 kPa 및 300K에서 다이아몬드 격자(304)에 제공한다. 다이아몬드 반도체들을 제작하는 방법(100)은 다이아몬드 격자(304)를 가지는 다이아몬드 재료(200)를 선택하는 단계; 이온 트랙들을 생성하기 위해 최소량의 억셉터 도펀트 원자들을 다이아몬드 격자(304)로 도입하는 단계; 이온 트랙들을 통해 다이아몬드 격자(304)로 치환형의 도펀트 원자들을 도입하는 단계; 및 다이아몬드 격자(304)를 어닐링하는 단계를 포함할 수 있다.
Patent KR-20190107172-A (KR)
Title: 유전체 스퍼터링에서 결함들을 감소시키기 위한 페이스트 방법
Inventor: WANG XIAODONG
IPC: C23C14/34
Filed: 2018-02-01
Abstract: RF 동력 프로세스들을 사용한 증착 챔버들을 위한 탄탈럼(Ta) 타겟 페이스팅 프로세스의 실시예들은, 웨이퍼 상에 유전체 재료를 증착하기 위해 RF 스퍼터링을 사용한 후에, 프로세스 챔버의 내측 표면들의 적어도 일부분에 Ta를 페이스팅하는 단계를 포함한다.  프로세스 챔버 내의 압력 레벨들은 Ta 페이스팅 층의 커버리지를 최대화하도록 조정된다.  Ta 페이스팅은 프로세스 챔버 내부 표면들, 이를테면 실드 상에 부주의로 스퍼터링된 유전체 재료를 캡슐화한다.  그런 다음, Ta 페이스팅 층 상에 탄탈럼 옥사이드 층을 형성하여 오염 및 입자 생성을 추가로 감소시키기 위해, 산소가 프로세스 챔버에 유동된다.