baber/WOPTO huggingface dataset:
Patent KR-20020042984-A (KR)
Inventor: LEE JU HYEOK
IPC: C22B1/11
Filed: 2000-12-01
Abstract: PURPOSE: A fabrication method of fired pellets from sinter plant dust is provided, which can be helpful to prevent air pollution by recycling waste sources. CONSTITUTION: In a fabrication method of fired pellets from sinter plant dust, the present invention includes the steps of (i) adding calcium chloride in such a manner that the content of calcium chloride M(CaCl2) is within 1.2 to 1.5 times of the difference of alkali content M(Alkali) and chloride content M(Cl) for the purpose of fabricating an unfired pellet with a diameter of 8 to 16 mm; and (ii) calcining the unfired pellet in the temperature range of 1300 to 1400°C for more than 20 minutes.
Patent KR-20020043095-A (KR)
Title: Compressor of oil-separation for automobile
Inventor: JANG GI RYONG
IPC: F25B43/00
Filed: 2000-12-01
Abstract: PURPOSE: An oil separating type compressor for automobile is provided to reduce noise of the compressor and improve performance of heat exchange and an air conditioning system. CONSTITUTION: A compressor(10) comprises an oil separation chamber(14); a low pressure chamber(17); a cylinder(21); and a high pressure chamber(18). The oil separation chamber is installed on one side of the compressor and has an outlet(11) and an inlet(12) formed on a side surface and a discharge hole(13) formed on an upper end thereof. The low pressure chamber is connected to the outlet and is where refrigerant flowing in through an inlet hole(16) and oil discharged through the outlet are mixed. The cylinder is where the refrigerant is circulated by stroke of a piston(22) and has an intake valve(19) and a discharge valve(20) formed on a side surface thereof. The high pressure chamber is connected to the discharge valve and the inlet of the oil separation chamber.
Patent KR-20020044000-A (KR)
Title: Method for manufacturing capacitor for semiconductor device
Inventor: PARK HONG BAE
IPC: H01L27/105
Filed: 2000-12-05
Abstract: PURPOSE: A method for fabricating a capacitor of a semiconductor device is provided to effectively improve a leakage current of the capacitor, by effectively improving a surface morphology of a ferroelectric layer and by using the ferroelectric layer of which the surface is plasma-processed. CONSTITUTION: A lower electrode(600) is formed on a semiconductor substrate(100). The surface of the ferroelectric layer(700) is plasma-processed. An upper electrode is formed on the plasma-processed ferroelectric layer. The plasma used in the plasma process is excited from a source in which argon gas is added to oxygen gas or fluorine gas.
Patent KR-20020045355-A (KR)
Title: User certification method for mobile electronic commerce
Inventor: BAN YEONG HUN
Filed: 2000-12-08
Abstract: PURPOSE: A user certification method for the wireless EC(Electric Commerce) is provided to offer a certification number to a web site and a mobile client whenever a wireless EC service is requested and to realize the user certification for the wireless EC by using the certification number. CONSTITUTION: The user certification method comprises the steps of registering an EC ID together with a mobile telephone number to a customer information DB when the mobile client requests a registration for the membership, selecting the purchase of the contents by inputting the EC ID and the mobile telephone number after connecting to a web site providing an EC service(308), requesting the certification by transferring the EC ID and the mobile telephone number to a certification server(314), and generating the certification number and providing the certification number to the web site and the mobile client requesting the purchase(324). The mobile client transfers the received certification number to the web site(326). When the certification number received from the certification server is same as the number received from the mobile client, the purchase of the contents is approved(332).
Patent KR-20020046675-A (KR)
Title: Process for Producing Chitooligosaccharide by Chitosanase that Secreted from Bacillus sp HSB-21
Inventor: CHOI YONG BOK
IPC: C12P19/26
Filed: 2000-12-15
Abstract: PURPOSE: A process for producing chitosan oligosaccharide using chitosanase produced by a microorganism Bacillus sp. HSB-21 is provided, thereby producing high quality product of chitosan oligosaccharide without monosugars. CONSTITUTION: The process for producing chitosan oligosaccharide using chitosanase produced by a microorganism Bacillus sp. HSB-21 comprises the steps of: dissolving chitosan having density of 2 to 30 cps in weak acid solution to produce 1 to 10% chitosan solution, then followed by adding chitosanase into the chitosan solution, and deactivating the chitosanase; filtering the reaction solution with a ceramic filter; filtering the filtrate using ultrafiltration system to fractionate digested chitosan by molecular weight or concentrating it under reduced pressure; and heat drying or freeze drying the concentrate.
Patent KR-20020050562-A (KR)
Title: Method for forming gate electrode and method for fabricating semiconductor device using the same
Inventor: RYU JEONG HO
IPC: H01L21/336
Filed: 2000-12-21
Abstract: PURPOSE: A formation method of a gate electrode is provided to improve a reliability by reducing a penetration of boron ions to channel regions through a gate insulating layer. CONSTITUTION: An insulating layer and an amorphous silicon layer are sequentially formed on a semiconductor substrate(100). A polysilicon layer is formed by performing an RTA(Rapid Thermal Annealing) on the amorphous silicon layer. At this time, the silicon grains of the polysilicon layer are small, because the RTA is performed at the temperature of 650-1100 deg.C for 5 to 10 seconds, thereby restraining a penetration of boron ions formed in the following process through the polysilicon layer. A gate pattern made of a polysilicon pattern and a patterned gate insulating layer(110a) is formed by sequentially patterning the polysilicon layer and the insulating layer. A gate electrode(130b) is formed by implanting boron ions into the polysilicon pattern.
Patent KR-20020054083-A (KR)
Title: Field emitter of field emission display device and manufacturing method
Inventor: JUNG JAE HUN
IPC: H01J1/30
Filed: 2000-12-27
Abstract: PURPOSE: A field emitter in a field emission display device and a method for fabricating the same are provided to focus automatically an electron beam by changing the arrangement of a gate electrode. CONSTITUTION: A cathode electrode(102) is formed on a substrate(101). A resistance layer(103) is formed on the substrate(101) including the cathode electrode(102). A gate insulating layer(104) is deposited on the substrate(101) by using a plasma chemical vapor deposition method and a chemical vapor deposition method. A gate electrode(105) is formed on the gate insulating layer(104). A gate electrode(105) having a gate hole and a gate insulating layer(104) are formed by performing a dry etch process. The gate hole has a diameter of 0.1 to 2 micro meter. A sidewall of the gate hole is formed vertically. A field emitter(107) is formed in the gate hole. A self focusing gate electrode(108) and the field emitter(107) are formed simultaneously.
Patent KR-20020053533-A (KR)
Title: Method for forming a insulating film in a semiconductor
Inventor: JANG HYEOK GYU
IPC: H01L21/205
Filed: 2000-12-27
Abstract: PURPOSE: A method for forming a dielectric film of a semiconductor device is provided to prevent the formation of a by-product and the deterioration of an electric characteristic due to the water vapor when depositing an STO(Strontium Titanate Oxide) film. CONSTITUTION: The method for forming the dielectric film comprises the steps of holding a semiconductor substrate at a fixed temperature after loading the substrate in a reactor, removing a non-reacted Sr source and the by-product after Sr adsorbs to a surface of the substrate by inflowing the Sr source into the reactor, removing the non-reacted oxygen and the by-product after the oxygen adsorbs to the surface of the substrate by inflowing the oxygen plasma into the reactor. By inflowing the Ti source into the reactor, the Ti is absorbed to the surface of the substrate and the non-reacted Ti and the by-product are removed. After the oxygen reacts to the Ti by inflowing the oxygen plasma into the reactor, the non-reacted Ti and the by-product are removed.
Patent KR-20020054497-A (KR)
Title: Crank shaft balancing device for V8 engine
Inventor: BYUN EON SEOP
IPC: F16C3/20
Filed: 2000-12-28
Abstract: PURPOSE: A crank shaft balancing apparatus for V8 engine is provided to reduce vibration of engine by compensating for the vibration of crank shaft bearing, while reducing size and weight of the web installed to the crank shaft. CONSTITUTION: A con rod(3) is connected to eight pistons(sharp 1 to 8), and pins(2a to 2d) to be coupled with the con rod are coupled to an arm(6) extended from a crank shaft(1). A plurality of webs(5a to 5h) for compensating for an unbalance force are arranged at the arm where the pins are coupled. A first pulley(10) is arranged at the crank shaft, and a balance shaft(20) having a second pulley(11) to be connected with the first pulley through a belt(12), is arranged underneath the crank shaft. The balance shaft has, at an intermediate portion thereof, first to fourth auxiliary webs(30a to 30d) for compensation of the primary pitch moment generated from the crank shaft.
Patent KR-20020058319-A (KR)
Title: Apparatus for indicating amount of printed medium in image former
Inventor: JUNG SEUNG SIK
IPC: G03G15/00
Filed: 2000-12-29
Abstract: PURPOSE: Provided is a paper residual display in an image formation system which exactly detects residual paper for printing to display at real time so that it helps users to supply the printing paper properly. CONSTITUTION: The paper residual display in the image formation system comprises the parts of: a rotating lever(20) which is intervened by a main body and rotated; a paper contact lever(30) which is placed to be rotated for touching to the upper edge of paper; a first gearing tool(40) which synchronizes the paper contact lever by the rotation movement of the rotating lever; a display lever for paper residual(50) which gears the paper contact lever and rotates toward the matched direction; and a second gearing tool(60) which gears the paper contact lever and the display lever for paper residual each other.
Patent KR-20020059049-A (KR)
Title: Producing method of coated fabric changing its color according to temperature variation and having excellent washing resistance, and the coated fabric produced by the method
Inventor: PARK MYUNG SOO
IPC: D06M23/12
Filed: 2000-12-30
Abstract: PURPOSE: Provided are coated textile and a manufacturing method thereof which are characterized by having excellent thermochromic ability, washable property and durability, making it possible to finish wide base fabric continuously with a normal coating device and a normal method, having high productivity, reducing production cost and being useful for sportswear, casual wear and so on. CONSTITUTION: The manufacturing method of the coated textile by a chemical foaming method is as follows: mixing 40-100pts.wt. of polyurethane resin emulsion, 0-70pts.wt. of acryl type copolymer emulsion, 0-10pts.wt. of nitrile rubber latex, 1-10pts.wt. of chemical foam material formed with microcapsule composed with acryl, ethylene-vinyl acetate copolymer or epoxy type film having nitrogen or hydrocarbon type gas, 1-5pts.wt. of silica powder, 1-5pts.wt. of talc, 0-10pts.wt. of colorant and 1-20pts.wt. of the microcapsule emulsion having epoxy type film and 3-20μ of diameter into an impeller type agitator at 500-1000rpm of velocity; adding 1-3pts.wt. of ethylene imine type cross-linking agent or isocyanate type cross-linking agent, followed by mixing for 10minutes; adding 1-3pts.wt. of acryl type fluidity modifier; stirring for 15minutes to control fluidity of a mixture and to produce a coating solution resin composition; coating the base fabric with the coating solution resin composition with a coating method such as a knife on air, a knife on roll, a synchro roll, a reverse roll and so on; pre-drying the coated textile at 100-120deg.C; and then heating at 150-170deg.C, and cooling.
Patent KR-20010022883-A (KR)
Title: 강화 시스템을 구비한 소프트 정형 주조 물품
IPC: A61L15/07
Filed: 1997-12-18
Abstract: 본 발명은 백킹 및, 부가 중합성 강화 화합물 경화의 개시를 촉진할 수 있는 활성제를 포함하는 경화성 수지를 포함하는 강화성 정형 주조 물품을 제공한다. 백킹 및, 부가 중합성 강화 화합물의 경화 개시를 촉진할 수 있는 활성체를 함유하는 경화성 수지를 포함하는 경화성 주조 테이프를 제공하는 단계, 주조 테이프의 경화를 개시하는 단계, 주조 테이프를 깁스 형태로 감는 단계, 주조 테이프의 적어도 일부분에 경화성 강화 화합물을 도포하는 단계, 주조 테이프를 경화시키고, 강화 화합물을 경화시켜 강화된 정형 깁스를 형성하는 단계에 의해 강화된 깁스를 제조한다. 또다른 제조 방법으로는 백킹 및 경화성 수지를 포함하는 소프트 주조 테이프를 깁스 형태로 감는 단계, 주조 테이프의 경화를 개시하는 단계, 주조 테이프의 적어도 일부분에 활성화된 부가 중합성 강화 화합물을 도포하는 단계, 주조 테이프를 경화시키고, 강화 화합물을 경화시켜 강화된 정형 깁스를 형성하는 단계에 의해 강화된 소프트 깁스를 제조한다.
Patent KR-20010032131-A (KR)
Title: 중유 제거제
IPC: C11D1/83
Filed: 1998-11-10
Abstract: 환형 탄화수소 용매, 디프로필렌 글리콜 모노 n-부틸 에테르, 알킬 아로마틱 술폰산염, 분지형 알콜 에톡실레이트, 에톡실화 알킬 머캅탄 및 물을 포함하는 중유 제거제.
Patent KR-20010015850-A (KR)
Title: 영구자석으로 여자되는 소형모터
IPC: H02K1/17
Filed: 1999-07-03
Abstract: 영구자석으로 여자되는 소형모터(1)는 회전축(18)을 중심으로 회전가능하게 지지되어 있는 전기자(12)와, 서로 마주보고 있는 단면에서 전기자(12)를 둘러싸고 있는 적어도 두개 이상의 영구자석 폴(30, 31)과, 그 영구자석 폴(30, 31)을 연결하고 있는 폴하우징(2)을 포함하고 있다. 폴하우징(2)은 영구자석 폴(30, 31) 사이의 영역에서 평활면(19, 20)을 구비하고 있으며, 폴하우징(2)의 평활면(19, 20)은 적어도 외부를 향해 볼록하게 아치형을 이루는 단면을 갖는다.
Patent KR-20010032995-A (KR)
IPC: H04L7/02
Filed: 1998-12-09
Abstract: 본 발명은, 다수의 무선 핸드셋과 베이스 트랜시버를 갖는 베이스 유닛을 구비한 무선 전화 시스템에서, 핸드셋 트랜시버의 수신기에 관한 것이다. 각 핸드셋은 베이스 트랜시버를 통해 베이스 유닛과 공유된 채널에 걸쳐 TDMA 링크를 수립하기 위한 핸드셋 트랜시버를 갖고, 이때 각 핸드셋은, 연속적인 심벌을 나타내는 연속적인 칩을 포함하는 대역 확산 신호를 수신하기 위해 활성 핸드셋에 시간 슬롯을 할당하는 TDMA 구조의 독자적인 시간 슬롯동안에 통신을 한다. 각 수신기는 수신된 대역 확산 신호를 복조하기 위한 하나 이상의 복조 루프를 가지며, 각 복조 루프는 하나 이상의 복조 루프 파라미터에 의해 특징 지워진다. 수신기의 병렬 상관기는 피크 빈(bin)을 검출하고, 피크 빈과 두 인접한 빈을 제공한다. 수신기의 에러 추정기(estimator)는, 대역 확산 신호의 복조를 최적화하기 위해 피크 빈과 두 인접한 빈에 따라 복조 파라미터를 조정한다.
Patent KR-20010033302-A (KR)
IPC: C08F10/00
Filed: 1998-12-08
Abstract: 첨가 리간드로서 예를 들면 ACAC 리간드와 이들의 불소화 유사체를 추가로 포함하는 테트라치환 디페닐 디이민 니켈 착물을 메틸알루민옥산 및 지지체와 함께 사용하여 슬러리 상에서 알파 올레핀을 중합하거나 복수개의 알파 올레핀을 공중합한다.
Patent KR-20010042274-A (KR)
Title: 코발트-주석 합금 코팅을 갖는 경사판
IPC: F04B27/10
Filed: 1999-03-23
Abstract: 경사판형 압축기는(10)는 실린더 블록의 축과 평행하게 배치된 실린더 보어를 갖는 실린더 블록(12, 14)을 구비한다.  실린더 블록 내에 회전 가능하게 장착된 회전식 샤프트(22)는 알루미늄 경사판(20)을 지지한다.  경사판(20)은 회전식 샤프트(22)에 고정되고 2개의 표면(26)과 단부면(28)을 구비한다.  경사판(20)은 적어도 0.2 중량 퍼센트의 코발트와 잔부가 주석인 코팅층을 갖는다.  실린더 보어(18) 내에 왕복식으로 끼워진 피스톤(16)은 피스톤(16)과 경사판 표면(26) 사이에 미끄럼 가능하게 개재된 슈(24)를 포함한다.  슈(24)는 경사판(20)의 회전 운동을 피스톤(16)의 선형 운동으로 변경한다.  경사판(20)의 코팅면(26)은 슈(24)와 미끄럼 가능하게 접촉한다.  경사판(20) 상의 코팅은 금속 도금 또는 높은 수준의 다듬질 연마를 필요로 함 없이도 낮은 실리콘 합금 알루미늄의 사용을 허용한다.
Patent KR-20010043905-A (KR)
Title: 시아노페닐 유도체 제조방법
Filed: 1999-05-28
Abstract: (1) 시아노벤질아민화합물의 아미노메틸기를 시아노기를 손상하는 일 없이 산화제를 사용해서 알데히드기로 변화하는 시아노벤즈알데히드화합물의 제조 방법, (2) 시아노벤즈알데히드화합물의 시아노기를 손상하는 일 없이 알데히드기를 산할라이드기로 변화하는 시아노안식향산할라이드 화합물의 제조방법, 및 (3) 시아노벤즈알데히드화합물을 하이포아할로겐산화합물과 반응시키는 시아노안식향산화합물의 제조방법에 관한다. 
     본 발명에 의하면, 입수가 쉬운 원료로부터, 의약, 농약, 액정, 기능성고분자 모노머 등의 중간체로서 유용한 시아노페닐유도체를 효율적으로 제조할 수 있다.
Patent KR-20010052548-A (KR)
Title: 시클릭 보로프롤린 화합물
IPC: A61P43/00
Filed: 1999-05-14
Abstract: 시클릭 또는 선형 형태로 CD26에 결합하는 시클릭 보로프롤린 화합물의 실질적으로 순수한 제제가 제공된다.  면역 세포의 생체내의 예정된 정상 수준의 면역세포를 달성하기 위하여 면역 세포의 활성화 및(또는) 증식을 자극하는 시클릭 화합물의 사용 방법이 제공된다.  바람직한 시클릭 화합물인 발린-프롤린 보론산 (ValboroPro)의 경구 생체이용성 및 활성의 증거가 또한 제공된다.
Patent KR-20020059910-A (KR)
Title: Construction air panel
Inventor: WON KYOUNG MIN
IPC: E04C2/36
Filed: 2001-01-09
Abstract: PURPOSE: An air-panel for constructional application is provided to obtain the panel applicable to various constructional materials such as heat-insulation or sound-resistant material with environmental friendship property. CONSTITUTION: The air-panel comprises a first and a second panel cases(110,120) and blocking components(130,140) interposed between the cases. The panel cases form a determined volume of inner space by attaching together by means of bolt. The inner space is mounded by the blocking components(130,140). The panel case has several extended grooves(116) onto outer surface thereof in order to improve attachment intensity of plain finishing materials such as wall paper, cement mortar, marble stone, gypsum board or tile, etc. The panel case and the blocking component are preferably prepared by elastic and non-osmotic materials such as polyethylene, polypropylene, polyester, polyamide, fluoro-plastic materials.
Patent KR-20010044246-A (KR)
Inventor: LEE HI MAN
IPC: B65D19/22
Filed: 2001-01-18
Abstract: PURPOSE: An integral light steel pallet is provided to increase secondary moment of inertia and section modulus, to maximize weight, and to produce a pallet with one steel sheet. CONSTITUTION: A conventional pallet has weak strength and a short life. A light steel pallet body consists of an upper plate(1), a groove part(2), and a leg part. The leg part has a groove for the strong structure of supporting. The end part of the pallet is rolled for protecting the end part of the pallet. A rivet or flat head screw is used to fasten the leg part inn the forming groove. The upper plate and a lower plate are pressed in zigzag. The strength of the pallet is increased. The pallet has the effect of preventing a slide, makes the pallet structure simple and strong, and saves logistics costs.
Patent KR-20020063057-A (KR)
Title: parallel rendering machines supporting hardware accelerated order independent transparency
Inventor: HAN TACK DON
IPC: G06T19/00
Filed: 2001-01-26
Abstract: PURPOSE: A parallel rendering accelerator supplying order independent transparency in hardware is provided to introduce a three-dimensional parallel rendering accelerator supporting primitives containing transparency in hardware, so as to generate three-dimensional graphic images. CONSTITUTION: A rendering accelerator subsystem(100) comprises a plurality of object PE(Processing Element) processors(110-140) rendering inputted primitives using an object order method and at least one image PE processor(180) rendering inputted primitives using an image order method. A frame buffer subsystem(200) composites each result rendered in the rendering accelerator subsystem for storage in frame buffers. A display unit(300) delivers data of the frame buffer subsystem to a display to perform display refresh. The each object PE processor is composed of a GE(Geometry Engine,150) performing geometry processing, an ORE(Object Order Rendering Engine) processing object order rendering and a memory(170) necessary for three-dimensional acceleration. And the image PE processor is composed of a GE(150) performing geometry processing and bucket sorting, an IRE(Image Order Rendering Engine,190) processing image order rendering and a memory(170) necessary for three-dimensional acceleration.
Patent KR-20010082026-A (KR)
Inventor: GOUMA TOSHIKI
IPC: A61H15/00
Filed: 2001-01-30
Abstract: PURPOSE: To effectively massage the sole of a foot, particularly the planter arch. CONSTITUTION: A pair of rubbing rollers 22a and 22b are fitted to a drive shaft 9, and a portion to be massaged is pinched and rubbed by a pair of rubbing rollers 22a and 22b by the rotation of the drive shaft 9. Stimulating lugs 33a and 33b are provided on an auxiliary rotary roller 32 fitted between the rubbing rollers 22a and 22b of the drive shaft 9 on the side of one rubber roller 22b. The plantar arch of the foot is pressed by the stimulating lugs 33a and 33b while a pinching/rubbing massage is given to the foot by the rubbing rollers 22a and 22b, thereby the massage can be effectively given.
Patent KR-20010112046-A (KR)
Inventor: CHOI JUNG SHIK
IPC: G09F13/22
Filed: 2001-02-03
Abstract: 각종 응용물의 사인 또는 광고용 조명 램프 등으로 사용되고 있는 전계발광시트(EL시트)의 개선된 제조방법이 개시되어 있다. 응용물의 제작과정에서 발생되는 재료 로스 및 제작 작업의 번거로움을 해결하기 위한 전계분할 발광포스터의 구조는, 투명전극인 ITO필름의 상부에 형광체 보호용 투명 절연층을 형성하는 공정과; 상기투명 절연층의 상부에 분할발광 구조를 갖도록 설정된 패턴형태로 형성된 형광층과, 상기 형광층의 상부에 형성된 절연층과, 상기 절연층의 상부에서 상기 형광층과 같은 패턴의 배면 전극과, 상기 배면 전극의 상부에 홀들을 형성시키는 분리발광면 절연막과, 상기 분리발광면 절연막의 홀들을 연결하여 상기 배면 전극에 전원을 공급하기 위한 홀 연결 버스 바를 형성하는 특징에 의해 형광체 파괴 현상에 기인한 수명감소를 방지하고 응용물의 형상대로 전계발광시트를 제조함으로서 응용물 제작의 소재로만 이용되어 오던 것을 직접 응용물로 제작함으로 그 활용 범위가 넓어진다.
Patent KR-20010078322-A (KR)
Title: METHOD AND APPARATUS FOR DEPOSITION OF LOW RESIDUAL HALOGEN CONTENT TiN FILM WITH A THICKNESS ABOVE 1000Å
Inventor: CHEN FUHA
IPC: C23C16/56
Filed: 2001-02-03
Abstract: PURPOSE: A method and an apparatus are provided to produce TiN depositions having a thickness of about 400 Å or more (and typically 1000 Å or more), where the deposited material maintains low resistivity, low stress, and low chlorine content. CONSTITUTION: In a method of producing a low residual halogen content TiN layer using chemical vapor deposition, wherein the TiN layer thickness is greater than 40 nm (400 Å), the method comprises the steps: (a) forming a layer of TiN having a thickness of less than about 40 nm (400 Å) by chemical vapor deposition using a halogen-comprising precursor and a nitrogen-comprising precursor; (b) treating layer of TiN in the presence of at least one gas which reacts with halogen to produce a reaction product which is volatile under process conditions used for treatment; and (c) repeating steps (a) and (b) to form a combined TiN layer having an overall thickness greater than about 40 nm (400 Å). The apparatus comprises (a) a memory (504) that stores instructions for deposition of a low resistivity TiN layer having a thickness greater than about 40 nm (400 Å) using multiple deposition-residual halogen removal steps comprising (i) chemical vapor depositing a TiN layer having a thickness of less than about 40 nm (400 Å) from a halogen-comprising precursor and a nitrogen-comprising precursor; (ii) treating TiN layer to essentially remove residual halogen from TiN layer; (iii) repeating steps (i) and (ii) to form combined TiN layer having a thickness of greater than about 40 nm (400 Å); (b) a processor (502) adapted to communicate with the memory and to execute the instructions (506) stored by the memory; (c) a CVD chamber (512) adapted to produce TiN layer in accordance with the instructions (506) from memory; and (d) one or more ports (508) adapted to pass communications between processor and the CVD chamber.
Patent KR-20020066490-A (KR)
Title: Test tray for handler
Inventor: HWANG UI SEONG
IPC: H01L21/67
Filed: 2001-02-12
Abstract: PURPOSE: A test tray of a handler is provided to smoothly move the test tray with a small force when the test tray is moved at a test site of the handler by a tray transfer. CONSTITUTION: A test tray(100) of a handler includes a frame in the form of hollow rectangular and a plurality of sockets installed on the frame for mounting semiconductor devices with removable to house the plurality of semiconductor devices and transfer the semiconductor devices to each part of the handler, thereby performing a test of the semiconductor. The test tray(100) further includes a plurality of rolling devices(131,132) contacted to a surface on which the test tray(100) at a lower surface of the frame of the test tray(100) during a lateral movement by the transfer menas so as to roll along the movement direction of the test tray(100).