baber/WOPTO huggingface dataset:
Patent KR-20000044840-A (KR)
Title: Method for molding edge of slab in continuous casting process
Inventor: SEO YEONG GIL
IPC: B22D11/22
Filed: 1998-12-30
Abstract: PURPOSE: A method for molding an edge of a slab is provided to illuminate a grain boundary event of forming as a sector on an inner part around an edge of a slab and to prevent the excessive cooling of the edge. CONSTITUTION: An edge part of a slab(10) cast in a continuous casting process is molded in a semi-circular shape. Herein, the thickness of the slab is taken as a diameter. A central part of a side face plate and a supporting roll among a width variable mold of a continuous caster is formed in a semi-circular shape as a precondition for the edge part of slab to be semi-circular.
Patent KR-20000045969-A (KR)
Title: Method for geographic information system's space data renewal
Inventor: LEE SEUNG MIN
IPC: G06F17/30
Filed: 1998-12-31
Abstract: PURPOSE: A method for geographic information system's space data renewal is disclosed to improve the efficiency of the system by distinguishing each level's data into small scale spaces, organizing the small scale spaces into a tree form, and providing the users with renewal rights to selected spaces. CONSTITUTION: A method for geographic information system's space data renewal is composed of input, selection, re-selection, renewal, and storation. System is initialized with the inflow of power(101) and map coordinate values related to the client's desired renewal space data's territory are inputted(103) in the input standby state(102). Renewal territory management table(104) is searched by selecting inputted coordinate values as index keys to confirm whether selected territory has been occupied by other client(104). If any one of selected territory has been occupied by other client(105,106), territory re-selection message is sent to client who has requested for territory selection(107), and allow user to re-select territory. If one of the territory is occupied, small scale spaces are registered to blueprint renewal territory to enable renewal of territory data by client(108) and blueprint renewal territory management table's occupancy state field is renewed as busy(109). After renewal is completed, storation of data is executed(110), renewed territory data is saved in blueprint file(111), and all of the renewed small spaces are deleted from blueprint renewal territory and blueprint renewal territory management table's usage field is changed as unused(112).
Patent KR-19990024279-A (KR)
Title: 맨홀커버 리프팅장치
IPC: E02D29/12
Filed: 1998-12-31
Abstract: 본 발명은 맨홀 커버를 개폐하기 위한 리프팅장치에 관한 것으로, 바퀴가 제공된 프레임(11,21)과, 상기 프레임 위에 맨홀 커버를 승하강시키도록 장착된 잭(13), 상기 잭에 일단이 고정되고 타단은 맨홀 커버(19)에 형성된 구멍에 걸도록 후크(18)가 제공된 적어도 2개의 체인(17)을 포함하고, 상기 잭은 핸들(16)로 회전시키는 피니언과 그에 맞물려 수직으로 승하강하는 랙크(15)를 포함하며 랙크의 상단에 체인(17)들의 상단을 고정시키도록 되거나, 상기 잭은 유압잭으로서 모터를 포함한 구동부(23)의 붐실린더에서 승하강하는 붐(24)을 포함하고 붐(24)의 상단에 체인들의 상단을 고정시키도록 구성되어 무거운 맨홀 커버의 개폐를 적은 인력으로 부상의 위험없이 간편하고 신속하게 수행할 수 있는 장점이 있다.
Patent KR-20000047293-A (KR)
Title: Method for treating organic matter in aerobic/anaerobic condition
Inventor: CHANG DUK
IPC: C02F3/30
Filed: 1998-12-31
Abstract: PURPOSE: A method for removing organic matters is provided, which is characterized in that an aerobic reactor and an anaerobic reactor are operated at the same time. CONSTITUTION: When the organic matters and nitrogen compounds are removed at the same time, denitrification process is necessary, which needs a source of carbon. So, carbon compounds in raw wastewater is reused to reduce extra supplying of carbon source. Raw wastewater is passed through an anaerobic reactor(1) and an aerobic reactor(2) in order. Organic matter including nitrogen is changed into ammonium nitrate in the anaerobic tank, and ammonium nitrate is changed into nitric nitrate by nitrifying bacteria. Nitric nitrogen is recycled to the anaerobic reactor(1). An inlet for recycled wastewater is located at middle part of the reactor, and some of the wastewater, which is mixed with raw wastewater flows into the reactor through bottom part.
Patent KR-19990035840-A (KR)
IPC: B64C27/82
Filed: 1996-07-23
Abstract: PCT No. PCT/EP96/03234 Sec. 371 Date Jan. 5, 1998 Sec. 102(e) Date Jan. 5, 1998 PCT Filed Jul. 23, 1996 PCT Pub. No. WO97/05016 PCT Pub. Date Feb. 13, 1997A thruster for a helicopter is mounted in a rear portion of a tail boom. Two sets of vanes deflect an airflow stream flowing along the tail boom respectively to opposed sides of the tail boom. Two shutters are pivotally arranged partly around the sets of vanes to leave two openings in respective sides of the tailboom. The shutters are pivoted in sympathy toward each other or away from each other to open/close the respective openings symmetrically and simultaneously such that a geometrical center line of each opening remains static irrespective of the status of the opening.
Patent KR-19990067258-A (KR)
Title: 소프트웨어의 생산방법, 처리장치 및 기록매체
IPC: G06F9/44
Filed: 1996-10-30
Abstract: 먼저 생산할 소프트웨어에 필요한 화면인 정의체 식별자를 결정한다. 다음에, 정의체 식별자에 존재하는 단어를 발췌함과 동시에, 정의체 식별자에 기초하여 소프트웨어에 필요한 모든 팰릿을 처리의 흐름에 따라 배치한 처리경로도를 작성한다. 이어서, 발췌한 단어 및 작성한 처리경로도에 기초하여 필요한 파일을 결정한다. 이어서, 발췌한 모든 단어에 대하여, 화면편집 또는 파일편집을 행하는 제 1 기저논리, 처리경로를 결정하는 제 2 기저논리 및 파일갱신을 행하는 제 3 기저논리를 작성한다. 다음으로, 화면단위로 상기 제 1 에서 제 3 의 기저논리를 각각 포괄하게 되는 3종류의 팰릿을 작성함과 동시에, 각 팰릿 내에서 각 기저논리를 자율적으로 유의성으로써 실행시키는 팰릿함수를 작성한다. 그리고, 제 1 기저논리에 관한 팰릿함수에 기초한 화면을 송신하고, 화면을 수신하여 제 2 기저논리에 관한 팰릿함수를 실행하여, 이 실행결과에 기초하여 제 3 기저논리에 관한 팰릿함수의 실행을 적어도 하나의 처리경로로 하는 복수의 처리경로로부터 하나의 처리경로를 결정하는 구조의 팰릿연쇄함수에, 상기의 3종류의 팰릿함수를 조합한다.
Patent KR-19990067408-A (KR)
Title: 살균 화합물(b)
IPC: A01N65/08
Filed: 1996-10-28
Abstract: 본 발명은 살균제로서 하기 화학식(I)의 두니온의 용도에 관한 것이다.  또한, 본 발명은 두니온을 함유하는 살균 조성물에 관한 것이다: 
     
       화학식(I)
Patent KR-20000064414-A (KR)
Title: 신규의5-아미노-3-시아노-4-에틸설피닐-1-페닐-피라졸화합물및이것의살충제로서의용도
IPC: A01N43/48
Filed: 1996-12-19
Abstract: 본 발명은 하기 화학식 (Ⅰ)의 1-아릴피라졸 및 이것의 살충제로서의 용도에 관한 것이다: 
     [화학식 Ⅰ] 
     
       
     
     상기 식중에서, X는 염소 혹은 브롬이고; Y는 트리플루오로메틸 또는 트리플루오로메톡시이며; R 1 은 수소, 메틸 또는 에틸이다.
Patent KR-19990081950-A (KR)
Title: 폐수 배출을 최소화하기 위한 방법 및 장치
IPC: B01J39/04
Filed: 1997-01-24
Abstract: 양이온 교환 베드(7) 및 음이온 교환 베드(8)를 구비한 이온 교환 재생 시스템에서 발생되는 폐수 배출을 최소화하기 위한 방법으로서 이 방법은 재생제 및 교체 세척액의 모든 구획 부분들(segment)이 공통의 루프(loop)내에서 재순환되며 한 위치씩 전방으로 이동되는 것을 특징으로 한다. 이 특징에 의해 최초 구획 부분은 그 후속하는 싸이클에서 버려지고, 후속하는 싸이클의 최종 구획 부분에 신선한 세척액이 공급된다. 한편, 화학물(chemicals)이 필수물로서 더해지고, 최종 세척 싸이클에 있어서, 세척액은 양이온 교환 베드(7) 및 음이온 교환 베드(8)를 차례로 통과하여 흐르며, 단일 루프 내에서 재순환하므로써 폐기물(waste)의 90% 이상을 줄일 수 있다.
Patent KR-19990082125-A (KR)
IPC: B23Q1/60
Filed: 1997-11-19
Abstract: The invention concerns a machine tool comprising a plurality of spindles which are disposed parallel to one another and preferably vertically for the transport of the workpieces or tools to and from the machining point and for the simultaneous or different, separate machining of a plurality of workpieces. The spindles, which can be driven about their axes of rotation and displaced in their axial direction, can be displaced on horizontal guide tracks together or relative to one another. According to the invention, all the spindles (10, 11) can be displaced such that they are supported independently of one another, in each case with a separate carriage (3, 4) on guide tracks (2) disposed at different levels and on one side on a securing plane. The carriages (3, 4) are imbricated in one another such that the outer carriage(s) (3) surrounds (surround) the inner carriage(s) (4) in frame-like manner.
Patent KR-19990082309-A (KR)
Title: 섬유 집합체의 성형 방법
IPC: D04H1/50
Filed: 1997-12-02
Abstract: 바인더 섬유를 포함하는 섬유집합체를 최종적으로 열성형하여 쿠션 구조체로 전환시키기 위하여, 열수축대를 예상하여 다단으로 압축시켜 성형함과 동시에, 성형품의 측면부에 열풍이 통과하는 바이패스 통로를 설치하여 성형품의 측면부에서의 가열 부족을 해소하며, 또한 금형 캐비티로의 섬유집합체의 충전 완료를 금형 캐비티 내에서의 압력 변화에 의하여 검출함으로써, 품질이 우수한 쿠션 구조체를 단시간에 제조하는 방법을 제공한다.
Patent KR-20000064586-A (KR)
Title: 내연 기관의 오일 팬
IPC: F02F7/00
Filed: 1998-01-07
Abstract: 오일 팬(1)은 자동차 상에 장착되는 내연 기관의 실린더 블록에 설치된다.  오일 팬은 윤활유를 저장하는 깊은 팬부(4) 및 깊은 팬부(4)와 일체인 얕은 팬부(5)를 포함하는 오일 팬 본체부(2)로 구성된다.  배플판(3)은 오일 팬 본체(2) 내측에 고정식으로 배치되고 깊은 팬부의 내측의 하부를 덮도록 연장한다.  배플판은 기관이 장착되는 차량이 일반적인 수평 도로 상에 위치되는 조건에서 일반적으로 수평으로 위치된다.  배플판은 깊은 팬부 내측에 저장된 윤활유의 표면으로부터 이격되어 위치된다.  배플판은 일반적으로 연장하는 본체부(3A)와 본체부 상에 윤활유를 보유하기 위하여 본체부의 상부면으로부터 상방 돌출하는 오일 유지벽(12, 13, 14, 15)을 포함한다.
Patent KR-20000016333-A (KR)
Title: Extended nip press with oscillating blanket for extended wear
Inventor: LANGE DAVID V
IPC: D21F3/02
Filed: 1997-05-05
Abstract: PURPOSE: An instrument is provided to increase the life span of a blanket in a closed press accepting a concave shoe and a backing roll. CONSTITUTION: An Extended Nip-type press (20) has a blanket (30) which passes over a shoe (22) which is urged against a backing roll (24) to form a press nip (56).A hydraulic system (70) and controller (94) provides for automatic continuous oscillation of the blanket (30) in the cross machine direction. The oscillation results in a region of high fatigue (58, 59) continuously moving over the blanket (30) surface so that the amount of time any particular region sees wear is minimized. Positioning of the heads (38, 42) to which the blanket (30) ends are mounted is controlled by hydraulic pistons (60, 62) mounted between a support beam (26) and the heads (38, 42). A controller (94)operates a valve (74) to reverse the direction of motion of the blanket (30) when sensors (92, 98) indicate one end of the blanket (30) has reached a stop (64, 80). A throttle valve (86) controls the rate at which hydraulic fluid is supplied to the cylinders (60, 62) which urge the head (38, 42) away from the shoe (22).
Patent KR-20000065245-A (KR)
Title: 면허관리시스템
IPC: G06Q30/04
Filed: 1997-07-15
Abstract: 단일 컴퓨터나 다수의 컴퓨터를 구동하는 소프트웨어에 대한 면허 관리 시스템(license management system)은 그 자신을 구동하는데 필요한 면허의 수의 결정을 요구하고 면허의 지급을 수신하는 응용 프로그램과, 응용 프로그램으로부터의 요구에 따라 필요한 면허의 수를 결정하는 면허수 결정 유닛과, 면허수 결정 유닛에 의해 결정된 면허의 수를 지급하는 면허 관리 유닛을 포함한다.  또한, 면허수 결정 유닛은 다음의 다항 함수, LK = f(x1,x2, ..., xn)를 근거로 면허의 수를 결정하는 수단을 갖는다.  여기서, LK는 면허의 수이고, x1 내지 xn은 면허의 수를 결정하는데 필요한 매개변수이다.  본 발명에 따라, 소프트웨어 제작자의 판매 전략이 고려된 면허 지급을 가능하게 하는 면허 관리 시스템을 제공하는 것이 가능하다.
Patent KR-20000050659-A (KR)
Title: Electron gun for color cathode ray tube
Inventor: BAE JUN HO
IPC: H01J3/02
Filed: 1999-01-13
Abstract: PURPOSE: An electron gun is provided to improve a workability of fixing and make a state of post-fixing stable by placing a plate type dielectric instead of prior resistance element between half-divided focusing electrodes. CONSTITUTION: An electron gun for color cathode ray tube comprises: many cathodes for emitting electron beam; a control electrode for adjusting a radiation amount of the electron beam and an acceleration beam; a first focusing electrode(15a) and a second focusing electrode(15b) for forming a main lens which focuses the electron beam onto a screen; and an anode for finally accelerating the electron beam. The above constituents are arranged in line. A dynamic quadruple lens is formed between two focusing electrodes formed by two-division of the focusing lens. A plate type dielectric(20) is arranged between the two-divided focusing electrodes. The dielectric has a sectional area larger than those of the focusing electrodes.
Patent KR-20000055872-A (KR)
Inventor: YOO YONG TAE
IPC: H04N21/434
Filed: 1999-02-10
Abstract: PURPOSE: A method for down loading program of a digital television is provided to automatically updates the program of previous version when the program is updated. CONSTITUTION: A method for down loading program of a digital television includes following steps. At the first step, the transmitter transmits a packetized stream by multiplexing various signals including a video signal. At the second step, a receiver receives the packetized stream and performs demultiplexing. At the third step, the transmitter transmits the transmission stream with information of program version update. At the forth step, the receiver extracts the information of program version update by parsing the transmitted stream, and automatically upgrades the program of previous version stored in a memory.
Patent KR-20000059559-A (KR)
Inventor: PARK CHAN HO
IPC: B01D53/94
Filed: 1999-03-05
Abstract: PURPOSE: A catalyst for purifying diesel engine exhausts is provided which can improve a purifying efficiency of nitrogen oxide and particulate from the diesel engine exhausts at the same time. CONSTITUTION: The purifying catalyst includes a high temperature activated catalyst mounted to an exhausts inlet and a low temperature activated catalyst mounted to an exhausts outlet. The high temperature activated catalyst contains a first catalytic layer comprising an iron-doped zirconia dioxide support and copper or copper oxide, wherein an amount of the copper is 0.5-5 wt% based on the iron-doped zirconia dioxide, and a second catalytic layer comprising a copper-doped zirconia dioxide support, a mixture of platinum and tin, and copper oxide. The low temperature activated catalyst contains a first catalytic layer comprising an iron-doped zirconia dioxide support and palladium, wherein an amount of the palladium is 0.2-0.8 wt% based on the iron-doped zirconia dioxide, and a second catalytic layer comprising a copper-doped zirconia dioxide support, a mixture of platinum and tin, and copper oxide. The zirconia dioxide contains 1-5 wt% of sulfate ion.
Patent KR-19990078049-A (KR)
IPC: G11B7/258
Filed: 1999-03-19
Abstract: 본 발명의 상변화 광디스크는 결정 상태 및 비결정 상태 사이에서 상변화 가능한 상변화 재료로부터 형성된 기록막을 갖고, 광선을 상기 기록막에 조사하여 결정상으로부터 비결정상으로 상변화시켜 기록막 상에 정보 신호를 기록하는 것인데, 상변화 재료는 GeSbTe 합금을 함유하고, 기록막은 적어도 N 2 또는 O 2 기체 함유 Ar 기체 분위기하의 스퍼터링에 의해 형성된다.  또한, 광기록 매체는 반복되는 기록에 대한 내구성을 개선하고 신호가 반복 기록된 후에도 항상 안정하며 양호한 기록/재생 특성을 유지하도록 조절된다.
Patent KR-20000067377-A (KR)
Title: Personal robot and control method thereof
Inventor: KIM JONG HWAN
IPC: B25J9/00
Filed: 1999-04-28
Abstract: PURPOSE: A personal robot and a control method thereof are provided to give activeness to a personal computer by integrally making up a device capable of recognizing a surrounding environment and a drive device capable of smoothly performing movement and simple works. CONSTITUTION: A personal computer unit(100) and a TFT-LCD monitor perform general actions by manipulating a wireless keyboard or a mouse. A personal robot receives a user's wireless control input through a wireless signal receipt unit or an antenna(560). Further, the personal robot receives a user's voice signal through a voice recognition unit. The personal robot feeds the received control input to a main controller. When the control input visually senses surrounding objects, a vision camera unit(500) is driven. Then, an image signal is generated by taking a target object.
Patent KR-20000074040-A (KR)
Inventor: OH DEOK HO
IPC: C08G/
Filed: 1999-05-18
Abstract: PURPOSE: Industrial polyester fiber and a manufacturing method thereof are provided to produce dipped cord having a high spinning workability and superior properties such as superior strength and low shrinkage by reducing an intrinsic viscosity difference between inner and outer parts of a polyester chip in solid phase polymerization. CONSTITUTION: In a method for manufacturing industrial polyester fiber, a polyester low chip is added with an antimonic compound as a polymerization catalyst by a residual amount of antimonic metal 200-400ppm in a polymer and polymerized in a solid phase to have an intrinsic viscosity of 1.00-1.20 and moisture ratio below 30ppm. The solid phase polymerized polyester chip is melted at a low temperature of 290-300°C and dispersed via a nozzle(2) in a pack(1). Discharged filaments(4) are oiled by 03-0.8% O.P.U. with resin emulsion oil of 10-30% concentration by an emulsion oil supplying element(5), wherein alkyl-tio-ester and polyoxylethylene-tio-ester as a smoothing agent contain the resin emulsion oil containes 50% or more straight emulsion solution component. The filaments are winded on godet rollers(6-10) at a velocity of 2000-3300m/min to obtain non-twisted yarns having an intrinsic viscosity 0.95-1.02 and alignment ratio 40-90X10¬-3 to be continuously twisted.
Patent KR-20000005815-A (KR)
Inventor: TATSUNO HIYOSHI
IPC: B67D99/00
Filed: 1999-06-02
Abstract: PURPOSE: A gas station is provided to be safe, to have a high work efficiency, and to be able to reduce a manpower. CONSTITUTION: The gas station comprises:a refueling zone(1) having a register to refuel the fuel of a car; a service zone(2) having a repairing device and a cleaning device of a car; a goods display zone(4) arranged goods; an accurate account zone(5) having a data input and output device contacted each devices.
Patent KR-20010001533-A (KR)
Inventor: CHA JI HYUK
IPC: D21H17/02
Filed: 1999-06-05
Abstract: PURPOSE: The titled toilet paper prepared by adding Lithospermum Erythrorhizon as a Chinese medicine manifesting prevention and treatment effect over hemorrhoids and polyacryl amide as an adhesive agent to raw material of toilet paper in the sheet forming process of paper making processes is provided, which is convenient to carry and store. CONSTITUTION: The toilet paper is manufactured by adding 10 to 50% by weight of very fine powder of a Lithospermum Erythrorhizon root per 1g pulp and about 0.05% by weight of polyacryl amide as an adhesive to raw material of toilet paper in the sheet forming process of paper making processes. The Lithospermum Erythrorhizon powder can be mixed with rhubarb powder in a ratio of about 3 : 1. Also bout 10 to 50% by weight of a mixture of barbery root, yellow and white, licorice, picramnia, Korea angelica root or the like in place of the Lithospermum Erythrorhizon is mixed with the pulp based on1g pulp.
Patent KR-20000028593-A (KR)
Inventor: WATANABE SHINJI
IPC: F02D9/00
Filed: 1999-06-29
Abstract: PURPOSE: A driving output control device of a vehicle is provided to perform the detection of a disorder of a throttle opening degree detection piece composed of two duplicated sensors, to promptly and accurately detect the disorder without increasing cost and to secure the safe traveling. CONSTITUTION: A first throttle opening degree voltage signal(Vtps1) and a second throttle opening degree electric signal(Vtps2) which are the output signals of a first throttle opening degree detection piece(61) and a second throttle opening degree detection piece(62) detecting the degrees of throttle opening are input to a first throttle opening degree detection disorder decision piece(35) and a second throttle opening degree detection disorder decision piece(34). The throttle opening degree voltage signal of the second throttle opening degree detection piece is selected as a real throttle opening degree voltage(Vtps) by a throttle control piece(36) if the first and the second throttle opening degree detection disorder decision pieces are decided as without disorder. And the throttle control piece control S a throttle valve(42) via a throttle driving piece(41) to make the real throttle opening degree voltage signal accorded with the target throttle opening degree voltage signal(Vtag) output according to the output signals of the first acceleration opening degree detection piece(51) at first control unit(2).
Patent KR-20010009946-A (KR)
Inventor: PARK SE YEONG
IPC: H04B1/40
Filed: 1999-07-14
Abstract: PURPOSE: A method for controlling a transceiving terminal amplifier in a wireless terminal is provided to use a field effect transistor according to a received signal intensity to control amplifiers, so as to reduce a consume current to simultaneously control many amplifiers, and to improve linearity of the amplifiers to raise a reception efficiency. CONSTITUTION: A controller measures an intensity of a received wireless signal through a received level measurer(400). If a measured value is below a determined value, the controller turns on a field effect transistor so that a high current flows in amplifiers(410). Linearity of the amplifiers flowing the high current is improved. If the measured value is not below a determined value, the controller turns off the field effect transistor so that a low current flows in the amplifiers(430). Though linearity of the amplifiers flowing the low current becomes bad, a consume current is reduced by flowing the low current. Many amplifiers are controlled by using the field effect transistor.
Patent KR-20010009953-A (KR)
Inventor: YOO JUN YEONG
IPC: H01J11/24
Filed: 1999-07-14
Abstract: PURPOSE: A method for manufacturing an RF PDP(Radio Frequency Plasma Display Panel) is provided to improve the quality of address discharging by forming a dielectric layer having a regular thickness on a data electrode. CONSTITUTION: In an RF PDP having a lower plate, address discharging occurs at a contact between a scan electrode(108) and a data electrode(104) to be extended lengthwise to the data electrode by power supply thereto. An address discharging pattern is not extended any longer and limited within a discharge cell when the discharging reaches a dielectric barrier(114) in the cell. This is because the discharge voltage supplied to the discharge area becomes very low by voltage fall in the thick dielectric layer. However, most of voltage supplied to the two electrodes is supplied to the discharge area as each dielectric layer on the scan electrode and a groove(112) is thin. In the RF PDP having the groove(112), the voltage is lowered as most of voltage supplied to the data electrode is fed to the discharge area. Thereby, discharge particles are diffused to neighboring cells rarely in address discharging to reduce interference between the neighboring cells. The first dielectric layer(106) minimizes parasitic capacitance between the two electrodes to prevent unnecessary energy loss.
Patent KR-20000017081-A (KR)
Inventor: GORODAKIHIRO
IPC: G01D5/38
Filed: 1999-08-04
Abstract: PURPOSE: Optic measuring apparatus for calibrating displacement is provided to overcome the weakness of the conventional measuring apparatus for measuring the displacement that diffracted light is not interfered and interfered signal get smaller. CONSTITUTION: The optic measuring apparatus for calibrating displacement comprises:diffracting lattice that is installed at something like construct machine, interfered light source that emits semi interfered light like laser light, unit receiving diffracted light and generating interfered signal, position detector that detects the moving position of the diffracting lattice by the interfered signal of the unit receiving diffracted light, optic emitting section that splits the interfered light source into two interfered light and that emit the two interfered light on the diffracting lattice, optic reflecting section that reflects the first order diffracted light of the diffracting lattice and that emits the light over the second diffracting lattice, lattice surface, and interfered belt that is made on the exposure to light.
Patent KR-20010018339-A (KR)
Inventor: CHOI JIN YEONG
IPC: H01L21/00
Filed: 1999-08-19
Abstract: PURPOSE: A heating assembly of a bake unit for a wafer fabrication is provided to uniformly maintain radiant heat applied onto a wafer. CONSTITUTION: The heating assembly includes a heating plate(10) equipped in the bake unit to heat the wafer(w), and a plurality of heaters(20) disposed under the heating plate(10) to apply heat to the heating plate(10). The heating plate(10) has guide balls(11) formed along a peripheral portion of a top surface of the plate(10) to guide the wafer(w) onto a central portion of the plate(10), and support balls(12) formed on the central portion of the plate(10) to detachedly support the wafer(w). The respective heaters(20) are divided into concentric circles or lattice-formed parts to selectively heat the plate(10). Additionally, the heating plate(10) has temperature sensors(30) therein corresponding to the respective heaters(20).