baber/WOPTO huggingface dataset:
Patent KR-20060002760-A (KR)
Title: Methods and apparatus for processing semiconductor wafers with plasma processing chambers in a wafer track environment
Inventor: MANDAL ROBERT P
IPC: G03F7/09
Filed: 2004-02-06
Abstract: A plasma chamber for performing semiconductor wafer processing within a wafer track system. The processing chamber may be configured as a thermal stack module within a wafer track cell for exposing a semiconductor wafer surface to a processing plasma. A showerhead electrode and wafer chuck assembly may be positioned within the processing chamber for effecting plasma-enhanced processing of the semiconductor wafer. Various types of supply gas sources may be in fluid communication with the showerhead electrode to provide a gaseous mixture that forms the desired plasma. The flow of gases may be regulated by a controller and a series of gas control valves to form and introduce the preselected gaseous mixture into the processing chamber as plasma that is exposed to the semiconductor wafer surface. The preselected gaseous mixture may be formulated for different semiconductor wafer processing operations such as surface prime treatment and bottom anti-reflective coating (BARC) deposition.
Patent KR-20050106481-A (KR)
Title: Method to improve profile control and n/p loading in dual doped gate applications
Inventor: DEL PUPPO HELENE
IPC: H01L21/3213
Filed: 2004-02-26
Abstract: A method for etching a polysilicon gate structure in a plasma etch chamber is provided. The method initiates with defining a pattern protecting a polysilicon film to be etched. Then, a plasma is generated. Next, substantially all of the polysilicon film that is unprotected is etched. Then, a silicon containing gas is introduced and a remainder of the polysilicon film is etched while introducing a silicon containing gas. An etch chamber configured to introduce a silicon containing gas during an etch process is also provided.
Patent KR-20050098023-A (KR)
Title: Method and system for reducing the effect of signal-interference in null-areas caused by one or more antennas
Inventor: GOLDBERG STEVEN JEFFREY
IPC: H04Q7/36
Filed: 2003-08-27
Abstract: In wireless communications, a method and system for enhancing signal decoding capability in null areas uses dithering to break up or modify the null areas. The null areas form in overlapping regions of the beams of two antennas or in overlapping regions of a single signal that is subject to multipath. Dithering is used to spread the null areas over a wider region so that a WTRU in an overlap region will not statically remain within a null area.
Patent KR-20060004679-A (KR)
Title: A method of forming stepped structures employing imprint lithography
Inventor: SREENIVASAN SIDLGATA V
IPC: C03C17/00
Filed: 2004-04-21
Abstract: The present invention provides a method for forming a stepped structure on a substrate that features transferring into the substrate an inverse shape of the stepped structure disposed on the substrate.
Patent KR-20060009928-A (KR)
Title: 2-imidazo-benzothiazoles as adenosine receptor ligands
Inventor: FLOHR ALEXANDER
IPC: C07D491/04
Filed: 2004-05-06
Abstract: The invention relates to 2-imidazo- benzothiazoles of general formula (I), wherein R1 is phenyl or a N and/or O containing heterocycle; R2 is an imidazol or an annulated imidazol, selected from the group consisting of formulae a), b), c), d) or e); R3 is hydrogen, phenyl, 2,3-dihydro-benzo [1,4] dioxin-6-yl, benzo [b] thiophen-3-yI, 3-methyl-benzo[b]thiophen-2-yl, thiophen-2-yl,thiophen-3-yl or thiophen-2-yl-methyl, R4 is hydrogen,-(CH2)nO-lower alkyl or lower alkyl; R 5 is hydrogen, lower alkyl, halogen, morpholinyl, -NR'R", piperidinyl, optionally substituted by hydroxy, or is pyrrolidin- l-yl; R6 is hydrogen, benzyl or -(CH2)nO-lower alkyl, R7 is hydrogen, -C(O)O-lower alkyl, -C(O)-C6H4 -halogen, -C(O)-C6H4-lower alkyl, -C(O)-lower alkyl, - C(O)-cycloalkyl, -C(O)-NR'R", -C(O)-(CH2)nO- lower alkyl, -S(O)2-lower alkyl, -(CH2)nO- lower alkyl, -C(O) -pyridin-4-yl, which ring may be substituted by lower alkyl, halogen-lower alkyl or by pyrrol-l-yl-methyl, or is -(CH2) n-C(O)-NR'R"; R'/R'' are independently from each other hydrogen, lower alkyl or -(CH2) n-tetrahydropyran-4-yl, X is -CH2-,-NR'' '-or-O-; R''' is hydrogen, -C(O)-lower alkyl, -C(O)O-lower alkyl, -C(O)-C6H4CH3, or benzyl; n is 1or 2; and to pharmaceutically acceptable acid addition salts thereof. These compounds are adenosine receptor ligands and therefore suitable for tha treatment of diseases related to this receptor.
Patent KR-20060023134-A (KR)
Title: Scanning backlight for flat-panel display
Inventor: TRAVIS ADRIAN ROBERT LEIGH
IPC: G09G3/34
Filed: 2004-06-04
Abstract: An illuminator for a flat-panel display comprises a tapered slab waveguide (1) co-extensive with the display, a light source (2-4) arranged to inject light into an edge of the waveguide so that it emerges over the face of the waveguide, and means for scanning the light injected into the wedge so that different areas of the panel are illuminated in turn. Preferably the light source is a set of rows of LEDs, each row injecting light at a different range of angles so that it emerges over different areas of the waveguide 1.
Patent KR-20060010843-A (KR)
Title: Ultrasonic welding method for the manufacture of a polishing pad comprising an optically transmissive region
Inventor: NEWELL KELLY J
IPC: B24D18/00
Filed: 2004-06-03
Abstract: A method of forming a chemical-mechanical polishing pad having at least one optically transmissive region comprising (i) providing a polishing pad comprising an aperture, (ii) inserting an optically transmissive window into the aperture of the polishing pad, and (iii) bonding the optically transmissive window to the polishing pad by ultrasonic welding.
Patent KR-20060016121-A (KR)
Title: Light guide and line illuminator
Inventor: IKEDA MAKOTO
IPC: G02B6/00
Filed: 2004-06-18
Abstract: [PROBLEMS] A light guide and a line illuminator incorporating it in which the deterioration of a read out image can be suppressed even when the document surface is floating by spreading the intensity distribution of light in the longitudinal direction at a position (document position) of an article being illuminated. [MEANS FOR SOLVING PROBLEMS] In a light guide (10) arranged such that a light entering from the end face exits from an exit face provided along the longitudinal direction while reflecting off the inner surface, a side face shape orthogonal to the longitudinal direction has a curved surface (1) of first elliptic arc, a curved surface (2) of second elliptic arc, a first exit face (3), a second exit face (4), and a light scattering part (5) formed at an elliptic focal position (or in the vicinity thereof) on the major axis plane of each ellipse. Condensing position of a light reflected off the first curved surface is different from the condensing position of a light reflected off the second curved surface.
Patent KR-20060026889-A (KR)
Title: Blocked polyisocyanates
Inventor: MAZANEK JAN
IPC: C08G18/79
Filed: 2004-06-16
Abstract: The invention relates to novel blocked polyisocyanates, single- component stoving systems containing the same, the production thereof, and the use thereof for producing lacquers, dyes, adhesives, and elastomers.
Patent KR-20060055475-A (KR)
Title: Portal axle
Inventor: NEUMUELLER RUDOLF
IPC: B60K17/04
Filed: 2004-06-07
Abstract: The invention relates to a portal axle for low-platform vehicles. Said portal axle consists of a drive spur wheel (2) which interacts with a first counter spur wheel (3) which is rotationally fixed to a second counter spur wheel (4) which interacts with a driven spur wheel (5). The vertical distance of the rotational axis (10) of the drive spur wheel to the ground (11) is less than the vertical distance of the counter spur wheels (9, 4) to the ground (11).
Patent KR-20070073301-A (KR)
Title: Flame spread protecting fireproof plate
Inventor: RU JAE WON
IPC: A62C2/06
Filed: 2006-01-04
Abstract: Provided is a flame spread prevention fireproof plate structure which is composed of a single plate or a vertical and a slide fireproof plate, and installed outside an outer wall of a balcony so as to adjust a shield and to block the flame effectively and automatically so as to extend an indoor space maximally. The flame spread prevention fireproof plate structure comprises: a fixed plate(10); a fixing unit(20,20'), fastening the fixed plate(10) on an outer wall(W) of a balcony; a vertical fireproof plate(30), which is connected to a lower end of the fixed plate(10) by means of a hinge(H), and is overlapped with the outer wall(W) so that an upper end of the vertical fireproof plate(30) is fixed by a hanging cover(50) fixed to the outer wall(W); and an elastic member, installed between the fixed plate(10) and the hanging cover(50) on the outer wall(W).
Patent KR-20060009398-A (KR)
Inventor: HOSOMI HIROAKI
IPC: B41J15/04
Filed: 2006-01-06
Abstract: 두루마리 용지용 수용부(4)에 형성된 개구(6)를 갖는 프린터로서, 개구(6)는, 제 1, 2 스윙커버(11,12)들이 비교적 근접해 있는 닫힘 위치로부터 멀어질 때, 서로 반대 방향으로 피봇하는 제 1, 2 스윙커버에 의해 가려진다. 제 1 스윙커버 (11)는 제 1 안내부재(31)를 구비하고, 제 2 스윙커버(12)는 제 2 안내부재(32)를 구비한다. 두루마리 용지(3)를 수용부(4)내에 장착한 후, 제 1 스윙커버(11)가 먼저 닫혀진다. 그 다음으로, 제 2 스윙커버(12)가 닫혀짐에 따라, 라벨시트(2)는 제 1 안내부재(31)와 제 2 안내부재(32) 주위를 지나감으로써 자동으로 굽어진다.
Patent KR-20070074094-A (KR)
Title: Remote aquarium viewing system and method using a mobile communication terminal
Inventor: KIM JIN SIK
IPC: H04W4/18
Filed: 2006-01-06
Abstract: A remote aquarium viewing system using a mobile station and a method thereof are provided to enable a user to remotely view underwater creatures in a large-sized aquarium, without directly visiting the place, by accessing the aquarium through a mobile station, remotely controlling a mini-sub, installed in the aquarium, by using the mobile station, and watching a moving picture photographed for underwater creatures in the aquarium. A remote aquarium viewing system comprises a mobile station(100), a mobile remote aquarium viewing server(112), and a mini-sub(122). The mobile station(100) accesses the mobile remote aquarium viewing server(112) through a nate server(110), downloads images photographed at the inside of an aquarium, transmits remote control commands, inputted by the user, to the mini-sub(122) in the aquarium by wireless, and executes remote aquarium viewing. The mobile remote aquarium viewing server(112), connected with the nate server(110), transmits a remote movement control command to the mini-sub(122) in response to a remote aquarium viewing request from the mobile station(100), receives the photographed images of underwater creatures in the aquarium through a camera of the minisub(122), and transmits them to the mobile station(100). The mini-sub(122) executes wireless data communication with the mobile remote aquarium viewing server(112), moves in the aquarium according to the user's remote control commands, and transmits the photographed images of underwater creatures in the aquarium.
Patent KR-20060010857-A (KR)
Inventor: PARK JUNG IL
IPC: H04M1/64
Filed: 2006-01-10
Abstract: 본 발명은 부재신호 자동발생 기능을 갖는 이동통신 단말기와 그 방법에 관한 것으로, 회의중이거나, 영화관, 음악회 등의 장소에서 착신자가 부재모드를 선택하게 되면, 발신자로부터 호접속신호의 인가에 따라 이동통신 단말기에 미리 녹음된 음성데이터가 전송되고, 자동으로 호접속을 해제시키도록 제어함으로써 착신자는 발신자 정보를 확인할 수 있으며, 발신자도 착신자의 상황을 인지할 수 있도록 한 것을 특징으로 하는 부재신호 자동발생 기능을 갖는 이동통신 단말기를 제공함에 그 목적이 있다. 
     본 발명을 적용하면, 착신자는 공지의 발신자 정보 출력서비스를 통해 발신자의 모바일 단말기 번호로 어떠한 발신자가 호접속을 시도하였는 지를 판단할 수 있으므로 회의중이나 음악회, 영화관에서 자동 진동모드로 정숙한 상태를 유지하면서도 발신자를 확인할 수 있으며, 발신자의 경우에는 착신자가 전화를 받을 수 없는 상태라는 것을 안내 메시지를 통해 확인할 수 있으므로 편의성이 매우 높으며, 이동통신 교환기 등에는 별도의 장치 변경이 필요하지 않으므로 경제적으로 매우 유리하다는 장점이 있다.
Patent KR-20070076189-A (KR)
Title: Simulation test apparatus and method for suspension system
Inventor: KIM JONG HUN
IPC: G01M17/00
Filed: 2006-01-18
Abstract: A simulation test apparatus and method for a suspension system are provided to easily and conveniently test control performances by continuously sensing an internal pressure variation of an air spring. A stimulation test apparatus for a suspension system includes an air spring(12), a load cell(22), a stimulation tester(30). An internal pressure of the air spring is changed according to a pneumatic operation of a pneumatic circuit by an electronic controller. The load cell measures a load value changed according to a pressure change in the air spring and outputs a load value signal. The simulation tester includes a simulator and a display unit. The simulator converts the load value signal from the load cell into a height signal of the air spring. The display unit is connected to the simulator and provides a state change of the air spring to an examiner.
Patent KR-20070077850-A (KR)
Title: Blind type a curtain
Inventor: PARK JAE U
IPC: A47H23/06
Filed: 2006-01-25
Abstract: A blind type curtain sheet is provided to maximize sound proof, cold prevention, anti-insect, sight shielding, and light cut-off effects by forming plural unit pieces on the surface of a fabric cloth. In the blind type curtain sheet(1), plural blind unit pieces(2,2') are horizontally protruded on one surface of the fabric curtain sheet at regular intervals. Connecting yarns(3) are disposed at the rear side of the blind unit pieces and the upper and lower sides of the connecting yarn are sewed with the upper and lower ends of a rear space part(21) of the blind unit piece to keep the blind unit pieces protruded. The blind unit pieces are inclined from the upper side to the lower side. An inclination angle of the unit pieces is kept at the level capable of shielding a gap between the unit pieces, viewed from the front side of the curtain sheet and showing a gap between the unit pieces if the user sight is under the unit piece. The unit piece is extended in the predetermined length not to overlap the end portion on the upper end of the lower unit piece. A net(4) is formed between the unit pieces.
Patent KR-20070078269-A (KR)
Title: Method for calculating the medical expenses by electronic payment assurance and transmitting electronic demand document
Inventor: PARK YONG NAM
IPC: G06Q50/22
Filed: 2006-01-26
Abstract: A method for calculating medical expenses based on electronic payment assurance and transmitting an electronic bill is provided to calculate patient payment excluding insurance money of a patient by transmitting patient information and medical treatment data to an insurance company server, and receiving electronic payment assurance data from the insurance company server. A relay server requests an identification request from a hospital server, identifies the patient by receiving the patient information, insurance goods information, and e-document data for the medical treatment data, and transmits the e-document data to the insurance company server(S100). The insurance company server generates the payment assurance data by checking insurance items and an insurance payment limit based on contents of the received e-document data, and transmits the assurance data to the hospital server through the relay server(S200). The insurance company server transfers the insurance money to a virtual account opened for the patient and the relay server transfers the insurance money to the hospital server(S300).
Patent KR-20070080475-A (KR)
Title: Thin film transistor panel and liquid crystal display
Inventor: KIM JEONG IL
IPC: G02F1/136
Filed: 2006-02-07
Abstract: A thin film transistor substrate and an LCD(Liquid Crystal Display) comprising the same are provided to reduce the capacitance difference between a liquid crystal capacitor and a pixel capacitor, by improving the pattern of a storage line overlapping a pixel electrode. A plurality of gate lines(110) cross a plurality of data lines(130) to define a plurality of pixel regions. A plurality of pixel electrodes(150) are formed within the pixel regions. A plurality of thin film transistors(120) are electrically connected to the pixel electrodes, the gate lines, and the data lines. A plurality of storage lines(140) include pixel electrode parts for the pixel regions and connection lines(144,145) connecting pixel electrode part of neighboring pixel regions. A pixel electrode part for a predetermined pixel region includes a first electrode(141), a second electrode(142) connected to the first electrode, and a third electrode(143) connected to the second electrode. The first electrode is extended adjacently to a gate line of the predetermined pixel region, wherein the first electrode partially overlaps the pixel electrode of the predetermined pixel region. The second electrode is extended adjacently to a data line neighboring the predetermined pixel region. The third electrode is protruded adjacently to a gate line neighboring the predetermined pixel region.
Patent KR-20060092126-A (KR)
Inventor: KAWASHIMA TOMOYA
IPC: G02F1/1335
Filed: 2006-02-15
Abstract: 본 발명에 따르면, 위상차층을 셀 내측에 구비한 액정셀에서, 밀봉부분 접착성을 현저히 향상시킨 기판 및 그 기판을 이용한 액정셀을 제공한다. 기판(11)상에 적어도 블랙매트릭스층(12), 컬러필터층(13) 및 위상차층(14)이 적층된 컬러기판으로서, 블랙매트릭스층(12) 및 컬러필터층(13)은 기판(11) 주위에 여백부를 남기도록 기판(11)상에 적층되고, 위상차층(14)은 블랙매트릭스층(12) 및 컬러필터층(13)이 적층되는 구역보다 넓어지도록 블랙매트릭스층(12) 및 컬러필터층(13)상에 적층되며, 블랙매트릭스층(12) 및 컬러필터층(13)이 적층되지 않은 기판(11)의 여백부는 밀봉예정구역으로 이루어진다.   
       
     컬러필터기판, 블랙매트릭스층, 컬러필터층, 위상차층, 액정표시패널
Patent KR-20070082401-A (KR)
Title: Ferritic type stainless steel containing yttrium
Inventor: KIM KYU YOUNG
IPC: C22C38/00
Filed: 2006-02-16
Abstract: A ferritic stainless steel which is excellent in electrical conductivity and has improved oxidation resistance and thermal expansion coefficient by lowering the coating film resistance on a material surface in a high temperature oxidation atmosphere is provided. A ferritic stainless steel comprises 0.01 to 0.1 wt.% of yttrium(Y). The ferritic stainless steel comprises 0.04 to 0.08 wt.% of yttrium(Y). The ferritic stainless steel is a Fe-Cr based ferritic stainless steel comprising 14 to 25 wt.% of chromium(Cr). The ferritic stainless steel further comprises at least one component selected from the group consisting of carbon(C), silicon(Si), manganese(Mn), nickel(Ni), aluminum(Al), and zirconium(Zr). The ferritic stainless steel comprises 0.02 wt.% or less of carbon(C), 0.3 to 1.5 wt.% of silicon(Si), 0.4 to 1.2 wt.% of manganese(Mn), 0.22 to 0.26 wt.% of nickel(Ni), 14 to 25 wt.% of chromium(Cr), 0.2 to 1.5 wt.% of aluminum(Al), 0.1 to 0.5 wt.% of zirconium(Zr), 0.04 to 0.08 wt.% of yttrium(Y), and the balance of iron(Fe).
Patent KR-20060093281-A (KR)
Inventor: NAKA KEN ICHIROU
IPC: G02F1/1335
Filed: 2006-02-17
Abstract: 과제 
     
     구성 부품 및 제조 공정이 적고, 투과 표시시라도 표시 화면이 밝고, 또한 데이터 신호의 구성이 간단한 액정 표시 장치를 제공한다. 
     
       해결 수단 
     
     선택 신호선(L1, L2, L3)에 입력되는 선택 신호(s11, s12, s13)에 의거하여 트랜지스터(Tr1 j , Tr2 j , Tr3 j )가 온/오프 제어되고, 데이터선(D j )으로부터 입력되는 1종 류의 데이터 신호가 계시가법혼색 또는 병치가법혼색에 대응하는 동 선택 신호(s11, s12, s13)에 의거하여 선택된 데이터 전극(31)에 서브 화소 데이터 신호로서 분배하여 공급된다. 투과 표시시에는, 계시가법혼색에 대응하는 선택 신호(s11, s12, s13)에 의거하여, 1화소를 구성하는 3개의 서브 화소에 대응하는 데이터 전극(31)이 동시에 선택되고, 반사 표시시에는, 병치가법혼색에 대응하는 선택 신호(s11, s12, s13)에 의거하여 데이터 전극(31)이 선택된다.  
       
     액정 표시 장치, 병치가법혼색
Patent KR-20070092816-A (KR)
Title: Stator of a motor
Inventor: CHO GYU HONG
IPC: H02K1/14
Filed: 2006-03-09
Abstract: A stator of a motor is provided to simplify an assembling process and improve durability by forming a coil winding unit and a front end unit integrally. A stator of a motor includes a yoke unit(110), and a plurality of teeth(120). The plurality of teeth(120) are detachably fixed at the yoke unit(110). The tooth(120) includes a coil winding unit(121), and a front end unit(122). The coil winding unit(121) is coupled at the yoke unit(110), is wound by a coil, and is composed of a laminate of a plurality of silicon steel sheets to protrude a connecting unit(130) at the end. The front end unit(122) is formed as one body with the coil winding unit(121) by the compression of soft magnetic powders to surround the connecting unit(130), and faces a rotor with a gap.
Patent KR-20070094058-A (KR)
Title: The filter change assembly using stepping motor and its operating method for camera module
Inventor: LEE YOUNG SOO
IPC: H04N5/225
Filed: 2006-03-16
Abstract: A filter change assembly for a camera module using a stepping motor and a method of operating the filter change assembly are provided to adjust an operating speed of the filter change assembly using a stepping motor and control the filter change assembly using a motor-dedicated drive. A camera module includes a plurality of filters(740,750), a support(500), a stepping motor(300), a wormgear(400), a filter holder slide(700), and a holder(730). The support has a hole(510). The stepping motor is fixed to a PCB(Printed Circuit Board)(200) at the side of the support. The wormgear is combined with the stepping motor and rotated according to the stepping motor. The filter holder slide has protrusions(710) engaged with the wormgear to convert the rotary motion of the wormgear into a rectilinear motion and rectilinearly moves the filters. The holder is connected to the filter holder slide and rectilinearly moved. The holder locates a predetermined filter in the hole of the support.
Patent KR-20060102285-A (KR)
Title: Sheet conveying device
Inventor: KAWASHIMA HIDEKI
IPC: G03B29/00
Filed: 2006-03-21
Abstract: A sheet-conveying device includes a sheet conveying path (2) along which a sheet is conveyed, a conveying roller (3), an inclined roller (4), an inclined-roller-supporting member (5,7) that supports the inclined roller such that the inclined roller can rotate around a rotational axis that is inclined with respect to a rotational axis of the conveying roller, and a sheet contact member (1) having a contact surface (1a) with which an edge portion of the sheet comes into contact. The inclined-roller-supporting member moves between a position where the inclined roller comes into pressure contact with the conveying roller and a position where the inclined roller is separated from the conveying roller (3). The sheet contact member moves between a position where the edge portion of the sheet can come into contact with the contact surface and a position where the contact surface cannot restrict the position of the edge portion of the sheet (6).
Patent KR-20070097982-A (KR)
Title: Horn for a vehicle
Inventor: JANG TAE SIK
IPC: G10K9/12
Filed: 2006-03-30
Abstract: A horn for a vehicle is provided to facilitate implementation of the horn in the vehicle by enabling a user to easily discriminate positive and negative lines from each other. A horn for a vehicle includes a connector(100) which includes first to third lines. The lines are electrically connected to outside the vehicle. The first line is connected to a positive terminal of a vehicle battery. The second and third lines are exclusively connected to a positive terminal or a negative terminal of the vehicle battery. The second and third lines are electrically connected to each other. The horn includes a power supply(200), a switching unit(300), an alarm generator(400), and a controller(500). When the switching unit is turned on, the alarm generator generates an alarm sound by using the power from the positive terminal of the vehicle battery. The controller is activated by the power from the power supply and outputs a control signal to the alarm generator.
Patent KR-20060105667-A (KR)
Inventor: SATO RYO
IPC: H01L21/3065
Filed: 2006-03-31
Abstract: 본 발명은, 플라즈마 처리 장치에 있어서, 상부 전극에 제 1 주파수 전력보다 낮은 제 2의 고주파 전력 300W 이상 1000W 이하를 가한 후, 1∼3초의 시간차를 갖고 제 1 주파수 전력을 더하여, 최초에 제 2 고주파 전력에 의해 시스(sheath)를 생성함으로써, 제 1 고주파 전력을 인가하더라도, 샤워헤드의 가스 구멍 중에 플라즈마가 들어가는 것을 저지하여 아크 방전을 억제하기 위한 것으로, 플라즈마 처리 장치(10)에 있어서, 상부 전극(13)과 하부 전극(14)을 처리실(12) 내에 대향하여 배치하고, 상부 전극(13)에 제 1 주파수보다 낮은 제 2 고주파 전원으로부터 제 2 고주파 전력을 최초에 인가하며, 그 후 1∼3초의 시간차를 갖고 제 1 고주파 전력을 중첩하여 인가하는 것을 특징으로 한다.
Patent KR-20060107418-A (KR)
Inventor: VAN DEN BRINK MARINUS AART
IPC: H01L21/027
Filed: 2006-04-07
Abstract: 본 발명은 듀얼 스테이지 리소그래피 장치에 관한 것으로, 기판 스테이지들은 상기 스테이지들 중 제 1 스테이지에 의해 유지된 제 1 기판과 상기 장치의 투영 시스템의 최종 요소 사이에 침지 액체가 한정된 제 1 장소로부터, 상기 스테이지들 중 제 2 스테이지에 의해 유지된 제 2 기판과 상기 최종 요소 사이에 상기 액체가 한정된 제 2 장소로, 상기 리소그래피 장치를 가져오는 조인트 스캔 이동을 수행하기 위해서 상호 작동되도록 구성되고 배치되며, 상기 조인트 스캔 이동 시, 상기 액체는 상기 최종 요소에 대한 상기 공간내에 본질적으로 한정된다.