baber/WOPTO huggingface dataset:
Patent KR-20010054520-A (KR)
Inventor: SEO SEOK MAN
IPC: H04B1/40
Filed: 1999-12-07
Abstract: PURPOSE: A schedule inputting and searching method in a mobile information terminal is provided to easily input a content of a repeated schedule and reduce the amount of a memory to be used by classifying schedule data into one-time general data and repetitive data and separately managing a start point and end point, repetition cycle and repetition time and content of the repetitive data. CONSTITUTION: A controller checks whether there is a key input to select a mode for schedule inputting(200). If there is a key input, the controller receives schedule data(210). The controller inquires of a user as to whether the inputted schedule data are repetitive(220). If there is a response that the schedule data are repetitive from the user, the controller receives the repetitive pattern(230). The repetitive pattern includes a repetition cycle, a repetition start point, a repetition end point, a repetition type and a repetition content. The controller inquires of the user as to whether the inputting has been completed(240). If the user depresses a key informing that he or she completes inputting, the controller stores the received schedule data in a memory(250).
Patent KR-20000012471-A (KR)
Inventor: KIM DONG HO
IPC: G06K9/00
Filed: 1999-12-07
Abstract: PURPOSE: An one to one electronic fingerprint recognition pocket book is provided to improve supply ratio by using widely in a bank, credit card company, etc. and simplifying usage and operation by fabricating in minimum size and light weight. CONSTITUTION: The one to one electronic fingerprint recognition pocket book is comprises a card inlet, a card fingerprint recognition unit for sensing a sealed fingerprint on a inserted card or a card-typed identity card inserted through the card inlet, a user fingerprint input unit, a user fingerprint recognition unit for sensing the fingerprint input through the user fingerprint input unit, a controller unit comparing the input fingerprint data with the sealed fingerprint data stored in a temporary storage unit and judging whether the both data is same or not, and a result display device for displaying the comparison and judge result.
Patent KR-20000048093-A (KR)
Inventor: KIGILYALRI ESIKSI
IPC: H01L29/78
Filed: 1999-12-11
Abstract: PURPOSE: A method for manufacturing a silicon field effect transistor apparatus is provided to reduce an oxygen depletion effect. CONSTITUTION: A tantalum pentoxide insulating layer is formed on a silicon substrate(11) of a selected apparatus area. A multilayer gate electrode layer is deposited on the insulating layer. The multilayer gate electrode layer includes a complex layer in which a nitrided tungsten silicide(17) and an electrical conductive material are provided.
Patent KR-20010055915-A (KR)
Inventor: YANG HUI SEOK
IPC: H01L21/312
Filed: 1999-12-13
Abstract: PURPOSE: A method for forming an interlayer dielectric layer of a semiconductor device is provided to prevent the formation of voids as well as the etch of an underlying layer. CONSTITUTION: The method includes forming an etch stopper(300) on a wafer(100) where a pattern(200) is preformed, then forming the first insulating layer(500) on the etch stopper(300) by flowing at least two source gases having different time for stabilization, then forming the second insulating layer(400) on the first insulating layer(500) by the source gases, and then flowing oxygen and hydrogen over a resultant structure in a temperature of 800-900°C and for 10-60 seconds. The source gases may preferably use boron and phosphorus. In addition, the first insulating layer(500) is a boro silicate glass(BSG) layer with a thickness of 10-150Å, while the second insulating layer(400) is a boro phospho silicate glass(BPSG) layer. The etch stopper(300) is a silicon nitride layer.
Patent KR-20000030107-A (KR)
Inventor: LEE KI JIK
Filed: 1999-12-14
Abstract: PURPOSE: An internet commercial transaction system of an orderer selecting type is provided to perform a high level by directly designing and identifying a model of which an orderer wants a product on an internet and performing an order transaction. CONSTITUTION: An orderer unit(10) identifies a content of a product through a web browserand demands the identified product. A web server(21) connects and sets an internet network(20) and the orderer unit(10), and inputs and outputs various information. A goods database(22) stores information to a goods. A client database(23) stores information to a client. An order database(24) stores an order list. A component assembly display server(25) assembles a component through a web browser(12) and identifies the assembled result.
Patent KR-20000062201-A (KR)
Title: 실 가공 노즐
IPC: D02J1/00
Filed: 1999-12-15
Abstract: 가압유체를 분출하는 도입로를, 노즐의 벽면에 매우 직경이 작은 알구멍이나 긴 원구멍을 뚫어서 설치하는 구성으로 하는 것에서, 가공 상의 문제나, 고비용으로 된다라는 문제가 있고, 또한, 관리도 곤란하였다. 
     실 가공 노즐(1)을 실도입측부재(2)와 실가공부측부재(3)로 구성되는 분할식으로 하고, 그 실도입측부재(2)의 경사단면(21)에 대략 U자형상의 에어도입홈(22)을 구성함과 아울러, 그 실가공부측부재(3)의 경사단면(31)을 상기 실도입측부재( 2)의 경사단면(21)과 밀폐형상으로 걸어 맞춰서 U자형상의 에어분출구를 형성하는 구성으로 하였다. 또한, 실도입측부재에는 대략 원추형상의 연결로(20b) 및 입구로 (20c)를 설치하고, 실가공부측부재에는 대략 원추형상의 실가공로(30b)를 설치하였다.
Patent KR-20000012645-A (KR)
Title: Xlpe cable sheath connection method without soldering
Inventor: LEE SOO GIL
IPC: B60K26/00
Filed: 1999-12-16
Abstract: PURPOSE: A sheath contacting method is provided to be able to contact without a heat-damage on XLPE pipe inside a sheath layer. CONSTITUTION: The sheath contacting method is comprised of the steps of:cutting the end of the sheath layer(12) into several branches, formed with a wrinkle pipe and embedded with an excel pipe cable inside; forming the cut part into a terminal shape(11) by clamping; feeding the braid wire of a conductor in an outer case(15) of a contacting case and connecting it with the end of the sheath layer formed in the terminal shape; when the contacted voltage is conducted, the end of the sheath layer is processed to easily clamp by cutting into several branches so that the voltage is periodically and regularly conducted.
Patent KR-20010063563-A (KR)
Inventor: BAE YEONG HEON
IPC: H01L21/302
Filed: 1999-12-22
Abstract: PURPOSE: A method for forming a metal electrode of a memory device is provided to form an electrode of a tungsten/barrier metal/polysilicon structure without generating a residue of polysilicon. CONSTITUTION: A polysilicon layer(202), a barrier metal layer, and a tungsten layer(204) are laminated sequentially on a substrate. A mask pattern is formed thereon. The tungsten layer and the barrier metal are etched to expose the polysilicon layer by using a fluorine gas and a chlorine gas. The first over-etching process is performed to expose a part of the polysilicon layer by the fluorine gas and the chlorine gas. The second over-etching process is performed to remove the polysilicon layer by using only the chlorine gas.
Patent KR-20010057723-A (KR)
Inventor: JANG JONG HYEON
IPC: H04L12/861
Filed: 1999-12-23
Abstract: PURPOSE: A method for simulating data security in an ATM(Asynchronous Transfer Mode) network is provided to carry out the simulation of a security function of a switching center, and thereby select a security solution suitable for an ATM switching center. CONSTITUTION: A message queue for a packet generator and a server switching center emulator is created(101). A socket communication channel of a TCP/IP level is set(102). A server emulator sends encryption algorithm information to a client emulator, and generates an encryption key(104). The client emulator updates selected algorithm information, and creates an encryption key(105). A packet generator generates a packet, and transmits it, using the message queue set in advance(106). The client emulator makes a digital sign on added data(107), and then generates a completed encrypted cell(108). The client emulator stores the information of time period used for the digital sign, cell division and data encryption(109). The server emulator generates complete use data to which the digital sign has been added(110), and discards the data if erroneous cell information is recognized(111,113).
Patent KR-20010057768-A (KR)
Inventor: MIN BYEONG U
IPC: H04N5/232
Filed: 1999-12-23
Abstract: PURPOSE: A method and an apparatus for tracking a moving object using a template and a Kalman filter in a video image are provided to rapidly and stably trace a moving object using a pattern matching and a Kalman filter even though the object is hidden by another object in a video. CONSTITUTION: A video is successively inputted from videos. A position of a moving object in a present frame is predicted by applying tracking information of a previous stage and a Kalman filter(11). The position of the moving object is founded by a template matching method on the basis of the position predicted(12). In case that a pattern of the moving object cannot be searched, it is regarded as a generation of an occlusion(13). The position calculated by the Kalman filter is regarded as the position of the moving object in the present frame. Therefore, the position is registered. A tracking of next frame is performed(14). A parameter of the Kalman filter and template information are corrected. After that, a tracking of next frame is performed(15).
Patent KR-20010066047-A (KR)
Inventor: PARK JAE HWA
IPC: F02M37/22
Filed: 1999-12-31
Abstract: PURPOSE: A fuel filter for improving the cold startability of a diesel engine is provided to improve cold starting performance by enhancing the preheating efficiency of fuel and to prevent the performance degradation of an element by making the wax in the element molten by the heat of a heating plate. CONSTITUTION: A roll type heating plate(1) has many fuel transmission holes(2). The heating plate is embedded in a housing(4) by being fitted into the circumference of an element(3) in a surrounding manner. Thus, the heating plate is installed adjacent to the element. Upon the inflow of fuel into the housing through a fuel inlet port(5), the fuel is discharged through a fuel outlet port connected to the center of the element after being filtrated through the fuel transmitting holes and the element. If an engine is started, the heating plate is heated and the fuel in the housing is heated before being transferred to a fuel injection nozzle. As the fuel is preheated, the clogging due to solidified wax in the element is avoided and the cold startability of the engine is improved. Additionally, the solidified wax is heated by the heat of the heating plate.
Patent KR-20000017972-A (KR)
Inventor: BAEK JU HEUM
IPC: H01B17/14
Filed: 1999-12-31
Abstract: PURPOSE: A high molecule polymer insulator is provided to improve a thermal characteristic by realizing a fine space at an inside surface of an end gold sphere so as to minimize a difference between thermal expansion coefficients of heterogeneous materials. CONSTITUTION: A high molecule polymer insulator comprises an end gold sphere(10) which has a mountain(11) and a valley(12) so as to form a fine aperture(13). The gold sphere(10) is coupled with an FRP rod(20) and a robber external coating(30) so as to form the insulator(40). The mountain(11) is contacted with the FRP rod(20) by pressing at a connection part of the gold sphere(10), and serves as a ring.
Patent KR-20000049072-A (KR)
Title: Hybrid matrix amplifier
Inventor: LUZ YUDA YEHUDA
IPC: H03F3/68
Filed: 1997-09-05
Abstract: PURPOSE: A hybrid matrix amplifier is provided to reduce transform matrix costs, decrease the number of radio frequency connections, and to decrease space and weight required by transform matrices. CONSTITUTION: In a hybrid matrix amplifier array(100), a configurable digital transform matrix(116) is initialized with a matrix of transform coefficients. A plurality of digital input signals(M1-M4) are received at inputs of the configurable digital transform matrix(116). The plurality of digital input signals are transformed to produce a plurality of transform digital signals(A1-A4) using the matrix of transform coefficients. The plurality of transform digital signals are converted to a plurality of transform analog signals to produce a plurality of transformed analog signals. The transformed analog signals are amplified to produce amplified transformed signals. Finally, the amplified transformed signals are inverse transformed(102) to produce output signals that correspond to a digital input signal(M1-M4) respectively. Upon sensing a failure in an amplifier array(104,126) a controller(128) recalls matrix transform coefficients from a memory(130) and write and reconfigures the digital transform matrix(116) to minimize the effects of the amplifier failure at the hybrid matrix amplifier outputs(132).
Patent KR-20000062369-A (KR)
Title: Ｐｔｃ서미스터 및 그 제조방법
IPC: H01C7/02
Filed: 1997-12-25
Abstract: 본 발명은, 포지티브의 온도계수특성을 가진 도전성폴리머를 사용한 PTC서미스터 및 그 제조방법에 관한 것으로서, PTC서미스터의 동작시에 있어서, 도전성폴리머시트의 열팽창의 반복의 열충격에 의해 측면전극층에 기계적응력이 발생해도, 균열에 의한 측면전극층의 단선이 발생하는 일이없고, 또한 내전압에 뛰어난 신뢰성이 높은 PTC서미스터 및 그 제조방법을 제공하는 것을 목적으로 하는 것이로서, 이 목적을 달성하기 위하여, 도전성폴리머시트와 내층전극을 번갈아 적층해서 이루어진 적층체와, 상기 적층체의 상·하면에 형성된 외층전극과, 상기 적층체의 측면의 중앙에 상기 내층전극과 외층전극을 전기적으로 접속하도록 형성된 다층의 측면전극층을 구비하고, 상기 적층체의 측면은 상기 측면전극층이 형성되는 부분과 형성되지 않는 부분으로 이루어지도록 하고, 또 그 제조방법은, 도전성폴리머시트의 상·하면을 금속박으로 사이에 끼워서 가열가압성형에 의해서 일체화하여 적층체를 형성하고, 상기 적층체의 상·하면에 도전성폴리머시트를 배치하는 동시에 이 도전성폴리머시트의 상·하면에 금속박을 사이에 끼워서 가열가압성형에 의해서 일체화하는 공정을 반복하여 적층하도록 한 것이다.
Patent KR-20000070421-A (KR)
Title: 촉매 전환기 및 고발열반응 방법
IPC: C07D301/19
Filed: 1998-01-26
Abstract: 고체 접촉 촉매를 이용하는 프로필렌과 같은 올레핀 및 유기 히드로 과산화물의 반응에 의한 옥시란 화합물의 제조방법 및 반응기 (5,15,301)에 있어서, (1) 상기 반응기는 일련의 분리된 구역 (8, 10, 16, 19, 304, 311)으로 분할되어 있고, 상기 각 구역 (8, 10, 16, 19, 304, 311)은 고체 에폭시화 촉매의 베드를 포함하며; (2) 반응열의 약 25-75%는 반응기로부터의 가열된 재순환 흐름과의 직접적 접촉에 의한 냉각 반응 피드의 전열처리에 의해 제거되고; 그리고 (3) 반응열의 약 25-75%는 반응 혼합물 온도의 20-100℉ 상승 및 최종 반응생성물의 15-40%의 기화를 초래하는 것을 특징으로 하는 제조방법 및 반응기.
Patent KR-20000071180-A (KR)
Title: 리튬 전이 금속염의 제조 방법
IPC: H01M4/485
Filed: 1998-02-09
Abstract: 본 발명은 하기 화학식의 리튬 전이 금속염의 제조 방법에 관한 것이다. 
     Li x (M 1   y M 2   1-y ) n O nz   
     상기 식에서, 
     M 1 은 니켈, 코발트 또는 망간을 나타내고, 
     M 2 는 M 1 과는 상이한 전이 금속을 나타내고, 이는 크롬, 코발트, 철, 망간, 몰리브덴 및(또는) 알루미늄이고, 
     n은, M 1 이 망간인 경우 2이고, M 1 이 니켈 또는 코발트인 경우 1이고, 
     x는 0.9 내지 1.2의 값이고, 
     y는 0.5 내지 1의 값이고, 
     z는 1.9 내지 2.1의 값이다. 
     상기 방법에 따르면, 전이 금속의 산소-함유 화합물 및 산소-함유 리튬 화합물로부터 균질한 고체 혼합물을 제조하고, 이 혼합물을 반응기내에서 하소시키며, 이때 하소는 0.5 bar 미만의 절대 압력하에서 일정 시간 이상 수행된다.
Patent KR-20010012289-A (KR)
Title: 열전사기록매체 및 그의 제조 방법
IPC: B41M5/392
Filed: 1999-03-05
Abstract: 본 발명은 인자후에 바로 사용한 경우에도 충분한 내오일성을 가지고, 또한 인자대상물의 종류에 상관없이 전사가 가능한 열전사기록매체를 제공하는 것이다. 
     본 발명의 열전사기록매체는 기재 위에 박리층 및 잉크층을 순차적으로 형성한 열전사기록매체에 있어서, 상기 잉크층이 적어도 착색제 (A), 경화제 (B) 및 결착수지 (C) 를 함유한다.     이 잉크층은 예컨대 가열처리에 의해 기재 위에서 경화됨으로써 형성된다.     이 잉크층은 이소시아네이트 화합물 (b) 및 이 이소시아네이트 화합물과 반응할 수 있는 염화비닐계 수지 (c) 를 함유한다.
Patent KR-20010012650-A (KR)
Title: 유기아연 시약을 사용한 효과적인 에난티오머선택성 첨가반응
IPC: C07C213/08
Filed: 1998-05-12
Abstract: 역전사효소 억제제인 (-)-6-클로로-4-사이클로프로필에티닐-4-트리플루오로메틸-1,4-디하이드로-2H-3,1-벤즈옥사진-2-온의 합성시 주요 중간체를 제조하는 효율적인 방법은 유기아연 착물을 사용한 4-클로로-2-트리플루오로메틸케토아닐린에 대한 키랄성 첨가 반응을 이용하여 목적하는 알콜을 수득함으로써 달성된다.  본 발명의 방법은 모든 프로키랄성 케톤에 대한 키랄성 첨가반응에 광범위하게 적용될 수 있다.
Patent KR-20010068708-A (KR)
Title: Regulation device of desk and chair for student
Inventor: PARK CHIM KON
IPC: A47B9/08
Filed: 2000-01-07
Abstract: PURPOSE: An adjusting device for the height of a desk and a chair for students is provided to reduce a producing cost by being easily installed in the right and the left leg of the desk and the chair. CONSTITUTION: A height adjusting device adjusts the height of a desk and a chair by vertically moving an upper leg in a lower leg. The lower leg is inserted into a body(1) of the height adjusting device through a leg inserting hole(2). A sill is formed in the upper end of the leg inserting hole to stick the upper end to the lower leg, and a settlement groove(4) is formed in one side of the body. A through hole(5) is formed between the settlement groove and the leg inserting hole. The settlement groove is covered by a cover(6) and fixed by bolts(11) after installing a hanging bar(7) and a spring(9). Then, a handle(10) is pulled to retreat the hanging bar and the body is combined with the lower leg. Finally, the upper leg is inserted into the lower leg to adjust the height of the desk and the chair for students.
Patent KR-20010077075-A (KR)
Title: Commercial Trading Method Of Multimedia Telecommunication System
Inventor: YOO GYEONG UN
Filed: 2000-01-31
Abstract: PURPOSE: A commercial transaction method by a multimedia communication system is provided to supply an improved service through directly connecting a supplier and a customer of a site through opening a representative site for each category of business. CONSTITUTION: A user hooks off a handset for a multi terminal to transfer a register ID of the user to a main system. In case of the normally registered ID, a use approval message is transferred to the multi terminal. The user inputs a number corresponding to a selected service, and the multi terminal downloads a homepage of the selected number. Thus, a representative site of each category of business is displayed. After reporting charge to the user, a remaining usable limit is stored.
Patent KR-20010077248-A (KR)
Title: METHOD FOR FABRICATING a LIQUID CRYSTAL DISPLAY CELL
Inventor: KIM JONG SEONG
IPC: G02F1/1341
Filed: 2000-02-01
Abstract: PURPOSE: A method for manufacturing a liquid crystal cell is to prevent a degradation of a picture quality due to a residual image and inject the liquid crystals into a large-scale substrate at a short time. CONSTITUTION: An alignment film is coated on the first substrate and the second substrate. A thermoplastic material is printed on an edge of the first substrate. The first substrate and the second substrate are adhered to each other(st10). The first pressured hardening process is performed to form the first cell gap on the adhered substrate(st20). Liquid crystals are injected on an entire structure(st30). The second pressured hardening process is performed to form the second cell gap(st40). The adhered substrate is sealed(st50). A size of the second cell gap formed at the second pressured hardening process is smaller than that of the first cell gap formed at the first pressured hardening process.
Patent KR-20010077628-A (KR)
Title: fabrication of sub-wavelength aperture for near field optical sensor
Inventor: AHN SEUNG JUN
IPC: G11B7/09
Filed: 2000-02-03
Abstract: PURPOSE: A forming method for a sub-wavelength aperture is provided to conveniently form the sub-wavelength aperture while improving reproducing property. CONSTITUTION: On an upper side of a silicon wafer(12), a silicon oxide film(14) and a silicon nitride film(16) are formed. The silicon nitride and the silicon oxide are dry etched to form an etching mask. A V-shaped groove(18) is wet etched on the silicon wafer by using the etching mask. A dry oxidizing process is performed, a sub-wavelength aperture(20) is formed at a vertex of the V-shaped groove in an ICP RIE(Inductively Coupled Plasma Reactive Ion Etching). Then, the silicon wafer at a lower surface is etched by using a KOH solution.
Patent KR-20010083637-A (KR)
Title: Pyrrolopyrimidinone derivatives, process of preparation and use
Inventor: CHA HUN
IPC: A61P9/08
Filed: 2000-02-17
Abstract: PURPOSE: A pyrrolopyrimidinone derivative is provided to possess good absorbency in gastrointestines and to impart PDE V reaction inhibiting capability in vivo to enable it to be utilized in various medical treatment applications. CONSTITUTION: The pyrrolopyrimidinone derivative having the following formula(1) (wherein R1 is hydrogen atom, methyl or ethyl group; R2 is hydrogen atom, methyl group or halogen atom; R3 is C1-C4 alkyl group; R4 is ethyl, n-propyl or allyl group; R5 is SO2NR6R7 or NHSO2R8; R6 and R7 in combination together form piperidino, piperazinyl or homo-piperazinyl group where its heterocyclic ring can be substituted or not substituted by R9; R8 is methyl group; R9 is at least one halogen atom, hydroxy group, CO2R10 or C1-C4 alkyl group substituted or not substituted by tetrazole group (also substituted or not substituted by C1-C3 alkyl group); and R10 is hydrogen atom) can be produced by combining both compounds of the following formulas (2) and (3) (wherein R1, R2, R3, R4, R5, R6 and R7 have the same meaning with the formula (1); X is SO2Y where Y is a halogen atom, or amino group).
Patent KR-20000024639-A (KR)
Inventor: RUE YOUNG JAE
IPC: G09B15/00
Filed: 2000-02-25
Abstract: PURPOSE: A music training system for performing autonomous study is provided to perform an autonomous musical performance by using a computer system. CONSTITUTION: A music training system for performing autonomous study comprises a first storage medium, a replay device, an input device, a second storage medium, and a micro computer. The first storage medium stores a musical performance training data. The replay device replays the stored musical performance training data. The input device inputs a musical performance data of a performer. The second storage medium stores the input musical performance data. The micro computer compares the musical performance data of the first storage medium with the musical performance data of the second storage medium and outputs points of difference.
Patent KR-20000071408-A (KR)
IPC: H01L21/205
Filed: 2000-03-03
Abstract: 유기 금속 화합물을 원재료로 사용하지 않는 방법에 의해 기판상에 형성된 제 1의 Ⅲ족 질화물계 화합물층을 수소 또는 질소 가스 및 암모니아 가스를 포함하는 혼합가스 분위기내에서 열처리하며, 이 때문에 제 1의 Ⅲ족 질화물계 화합물층상에 형성된 제 2의 Ⅲ족 질화물계 화합물 반도체의 결정성이 개선된다. 제 1의 Ⅲ족 질화물계 화합물층이 스퍼터법에 의해 기판상에 형성될 때, 제 1의 Ⅲ족 질화물계 화합물층의 두께는 50Å 내지 3000Å의 범위가 된다.
Patent KR-20010006914-A (KR)
Inventor: SHIMIZU HISASHI
IPC: H01L25/075
Filed: 2000-03-30
Abstract: PURPOSE: A device is provided to improve light emission efficiency and to make a device lightweight, thin, and small-sized, at the same time improving the emissivity of a light irradiation device having a light emitting element fitted to a printed board. CONSTITUTION: On a metal substrate, a Cu pattern where Ni is adhered is formed and a light emitting element(110) is mounted thereupon into a series circuit, and the series-connected metal substrate is connected in parallel. Here, Ni is superior in corrosive resistance and superior in light reflection efficiency, so that the substrate surface itself is utilized as a reflecting surface. Furthermore, emission efficiency can be improved more by forming a lens(137) for each light emitting element. Additionally, a flow-stopping means(136) is formed of a solder material around a light emitting diode(110), and the surface of this solder material is exploited as a reflecting surface.
Patent KR-20010095554-A (KR)
Title: slider head of optical pick up device and method for fabricating the same
Inventor: LEE YEONG JU
IPC: G11B21/21
Filed: 2000-04-10
Abstract: PURPOSE: A slider head of an optical pickup device and a method for manufacturing the same are provided to improve a response speed, a tracking speed, and a tracking accuracy by forming a hollow region and an air-bearing surface on a substrate. CONSTITUTION: Etching masks(43) are formed on an upper face of a lower face of a silicon substrate(41), respectively. A part of the etching mask formed on the upper face of the substrate(41) is patterned by a photo-lithography process and an etching process. A recess(44) is formed on the silicon substrate(41) by using an anisotropic etching method. The second pattern process for the etching mask is performed. An air-bearing surface is formed on the silicon substrate(41) by performing the etching process using the patterned mask. A hollow region(47) is formed by patterning the etching mask(43) formed on the lower face of the silicon substrate(41). A slider backside structure of the hollow region(47) and a silicon support is formed by etching selectively the silicon substrate(41).