Patent SG-11201803887S-A (SG)
Title: Sputter target backing plate assemblies with cooling structures
Inventor: STROTHERS SUSAN D
IPC: H01L21/203
Filed: 2016-10-27
Abstract: INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property - Organization International Bureau (43) International Publication Date <:,.. ..... .) 18 May 2017 (18.05.2017) WIPO I PCT (10) WO International Publication Number 111111111111311111111111111111111111111111111111111111111111111111111311111111111111111 2017/083113 Al (51) International Patent Classification: (74) Agent: SZUCH, HO1L 21/02 (2006.01) C23C 14/34 (2006.01) Intellectual HO1L 21/203 (2006.01) M/S 4D3, (US). (21) International Application Number: PCT/US2016/059121 (81) Designated kind of national (22) International Filing Date: AO, AT, 27 October 2016 (27.10.2016) BZ, CA, CH, (25) Filing Language: English DO, DZ, EC, HN, HR, HU, (26) Publication Language: English KW, KZ, (30) Priority Data: MG, MK, 62/254,222 12 November 2015 (12.11.2015) US OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, (71) Applicant: HONEYWELL INTERNATIONAL INC. TN, TR, TT, [US/US]; Intellectual Property-Patent Services, 115 Tabor ZW. Road, M/S 4D3, P. 0. Box 377, Morris Plains, New Jersey 07950 (US). (84) Designated kind of regional (72) Inventor: STROTHERS, Susan D.; Honeywell Interna- GM, KE, tional Inc., Intellectual Property-Patent Services , 115 TZ, UG, ZM, Tabor Road, M/S 4D3, P. 0. Box 377, Morris Plains, New TJ, TM), Property P. 0. Box States AU, AZ, CL, CN, EE, EG, ID, IL, LA, LC, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, SG, SK, TZ, UA, States LR, LS, ZW), European Colleen protection protection D.; Honeywell International Inc., -Patent Services , 115 Tabor Road, 377, Morris Plains, New Jersey 07950 (unless otherwise indicated, for every available): AE, AG, AL, AM, BA, BB, BG, BH, BN, BR, BW, BY, CO, CR, CU, CZ, DE, DJ, DK, DM, ES, FI, GB, GD, GE, GH, GM, GT, IN, IR, IS, JP, KE, KG, KN, KP, KR, LK, LR, LS, LU, LY, MA, MD, ME, SL, SM, ST, SV, SY, TH, TJ, TM, UG, US, UZ, VC, VN, ZA, ZM, (unless otherwise indicated, for every available): ARIPO (BW, GH, MW, MZ, NA, RW, SD, SL, ST, SZ, Eurasian (AM, AZ, BY, KG, KZ, RU, (AL, AT, BE, BG, CH, CY, CZ, DE, Jersey 07950 (US). DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, Inventor: ALBAUGH, Kevin B. LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, (72) (deceased). OAPI SM, TR), (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, (72) Inventor: FERRASSE, Stephane; Honeywell Internation- GW, KM, ML, MR, NE, SN, TD, TG). al Inc., Intellectual Property-Patent Services 115 Tabor , Published: Road, M/S 4D3, P. 0. Box 377, Morris Plains, New Jersey 07950 (US). — with international search report (Art 21(3)) Title: SPUTTER TARGET BACKING PLATE ASSEMBLIES WITH COOLING STRUCTURES (54) 48 50 34 A A „ w , ,„ , , ...„ .„ 56 \ 24 1 1 ( to 46— - - - - - - - - - - - - -- ,.. ,. N\NVM 52 1 Il 40 , .4t '4\ 16 14 .i M 1-1 1-1 FIG. 4 en Go O IN (57) : A method of forming a monolithic backing plate comprising using additive manufacturing to form a three dimension - I-1 c:::, al structure of continuous material including forming a substantially planar first side in a first plane, forming a plurality of flow bar- ei riers joined to the first side, the plurality of flow barriers having a thickness in a direction perpendicular to the first plane; forming a ega ) plurality of flow channels defined between the plurality of flow barriers; and forming a substantially planar second side in the first :' F plane, and uniformly solidifying the material such that the backing plate comprises a unifoiin, continuous material structure through - out the first side, the plurality of flow barriers, and the second side.