baber/WOPTO huggingface dataset:
Patent KR-20100108876-A (KR)
Title: Apparatus for load testing of pov actuator
Inventor: PARK CHANG DAE
IPC: G01L3/00
Filed: 2009-03-30
Abstract: PURPOSE: An apparatus for testing the load of power operated valve actuator is provided to test the performance of a valve driver. CONSTITUTION: An apparatus for testing the load of power operated valve actuator comprises a valve driver(10), a top extension axis, a double acting hydraulic cylinder(30), a piston unit(40), a lower part extension axis and a load cell(50). The valve driver comprises a driving shaft(20) moving in a straight line. The top extension axis is combined with one end of the driving shaft. The double acting hydraulic cylinder applies load to a target diver. The lower part extension axis is connected to one end of the piston unit. The load cell measures thrust between the top extension axis and the lower part extension axis.
Patent KR-20100108911-A (KR)
Inventor: LIM YOUNG SAM
IPC: E03F3/04
Filed: 2009-03-31
Abstract: 본 발명은 외주면에 다수개의 우수 배출공(111)을 구비하는 파형강관(110)을 이용하여 우수관을 형성하는 방법에 있어서, 상기 다수개의 우수 배출공(111)이 천공된 파형강관(110)의 일측 단부 아랫부분에 수밀성을 갖는 호형의 저수판(120)을 부착하는 단계와, 상기 저수판(120)이 부착된 다수개의 파형강관(110)을 서로 맞대서 연결함으로써 두 개의 저수판(120)에 의해 저류조(150)가 우수관 내부에 형성되도록 하는 단계로 이루어진 파형강관을 이용한 우수관 제조방법을 제공하기 위한 것으로, 본 발명은 다수개의 파형강관에 의해 형성되는 우수관의 내부 바닥에 저류조가 형성되도록 하여 우수관의 내부에 충분한 우수저장공간을 확보할 수 있을 뿐만 아니라, 상기 저류조를 통해 저장된 우수가 서서히 일정하게 지속적으로 지하로 배출되도록 함으로써 지하수 자원을 보호할 수 있는 매우 유용한 발명인 것이다. 
       
     파형강관, 우수관, 제조방법
Patent KR-20100111760-A (KR)
Inventor: AHN CHANG WOOK
IPC: D06F57/04
Filed: 2009-04-08
Abstract: PURPOSE: A slide drying rack is provided to secure more space for laundry by allow a user to put the laundry on a bar of a hanger which is supported by a support. CONSTITUTION: A slide drying rack includes a support stand(110), a hanger(120), a suspension unit(130), and a support(150). The support stand is formed by combing the bar in the connection pipe therein. The suspension unit is rotatable and is combined with the support stand through a hinge. The suspension unit is combined with the suspension unit through a hole and is selectively rotatable.
Patent KR-20100114223-A (KR)
Title: Nail clipper
Inventor: HAN SEA HWAN
IPC: A45D29/02
Filed: 2009-04-15
Abstract: PURPOSE: Nail clippers are provided, which can minimize the scattering of nails since nails or toenails are not completely cut. CONSTITUTION: Nail clippers are constituted as follows. The nail clippers comprise: a nail clipper body(110); a bracket which is connected to the nail clipper body. A cutting blade is formed so that one end gradually becomes thick towards the other end when being viewed from a cross section.
Patent KR-20100114949-A (KR)
Title: Medical needle
Inventor: KIM YANG SIN
IPC: A61M5/32
Filed: 2009-04-17
Abstract: PURPOSE: A medical needle for operating the injection and the irritation therapy by injecting a skin of the human body is provided to make a thin surface according to the surface of the banded structure according to the texture after positioning the recess portion of the cutting section to be contiguous to the peripheral operations to the procedure table phase organization. CONSTITUTION: A medical needle(100) includes a main body(110), a penetration unit(120), cutting unit(130), first and second cutting edge. The main body is formed in a side. The penetration part is formed to the side that it be expanded as the distal side. The cutting unit is formed to be expanded as the distal side and slope so that the up down side meet at the leading end. As to the first cutting edge, the cutting unit is formed in both side terminal.
Patent KR-20100115196-A (KR)
Title: System and method for inferring danger-driving of vehicles
Inventor: LEE SEUNG JUN
IPC: B60R21/00
Filed: 2009-04-17
Abstract: PURPOSE: A system for determining danger driving of a vehicle and a method thereof are provided to use analyzed results for the education of a driver by analyzing a driver's driving habit or attitude. CONSTITUTION: A system(100) for determining danger driving of a vehicle comprises a lateral acceleration sensor detects the lateral acceleration of a running vehicle. The controller detects signals detected from the lateral acceleration sensor in real time and determines the generation state of sine wave by converting time into sensor amplitude function. If sine wave appears in the graph of the function, the controller determines danger driving by comparing reference period, reference size, the cycle of sine wave, and amplitude of sensor signals.
Patent KR-20100117842-A (KR)
Title: Plate type heat exchanger
Inventor: HAN SANG CHUL
IPC: F28D9/00
Filed: 2009-04-27
Abstract: PURPOSE: A plate heat exchanger is provided to realize the efficient assembling structure of components and to enhance the fluidity of the fluid in a path. CONSTITUTION: A plate heat exchanger comprises a plurality of laminated heat exchange units(10). The heat exchange unit is formed by the connecting of an upper plate to a lower plate. Each heat exchange unit comprises a first path, through which the first fluid flows, and a second path, through which the second fluid flows, and an inlet path and an outlet path are respectively formed on both sides of each heat exchange unit. The cover plate comprises an upper plate, which is projected from the upper parts of the inlet path and the outlet path, the lower plate comprises a lower plate, which is projected from the lower parts of the inlet path and the outlet path and the upper and lower flanges are connected by the inserting. One or more upper protrusions are formed on the top of the upper plate and one or more lower protrusions are formed on the bottom of the lower plate.
Patent KR-20090049046-A (KR)
Inventor: PARK TAE JIN
IPC: H04N7/08
Filed: 2009-04-28
Abstract: 본 발명은 디지털 방송 수신기 및 디지털 방송 신호 처리 방법에 관한 것이다. 본 발명은 디지털 텔레비젼 클로즈드 캡션 서비스(digital television closed caption service)가 상기 비디오 스트림에 존재하는지 또는 라인 21 클로즈드 캡션 서비스(line 21 closed caption service)가 electronic industry association (EIA) 708에 따라 상기 비디오 스트림에 존재하는지를 나타내는 캡션 정보를 처리할 수 있는 디지털 방송 신호 처리 방법을 제공한다. 
     
     오픈 케이블, 케이블 레디, PMT, EIT, 클로즈드 캡션
Patent KR-20100118905-A (KR)
Title: Apparatus and method for processing constrained nn query in wireless broadcast environments, and constrained nn query processing system using thereof
Inventor: LEE SANG KEUN
IPC: H04N5/93
Filed: 2009-04-29
Abstract: PURPOSE: An NN query process apparatus, a method thereof and a system thereof for processing queries and a method thereof are provided to improve access time and tuning time performance by using bitmap basic space index. CONSTITUTION: An NN system for processing queries under broadcasting environment includes a client(310) performing a broadcasting server(300) and NN query processing broadcast. The broadcasting server transmits broadcasting related to each data object information distributed to a Hillbert Curve. A BSI generating unit(302) generates a BSI(Bitmap-based Spatial Index) arranging the bit value of the bit- map to the hilbert curve order and shows the map information of the bit- map.
Patent KR-20100120944-A (KR)
Title: Switchable supporter for ship-building and tandem ship-building method using it
Inventor: JANG WON TAEK
IPC: B63C5/02
Filed: 2009-05-07
Abstract: PURPOSE: A detachable keel block for the ship construction and a tandem drying method of a ship using the same are provided to reduce the drying time and the cost of a ship since a drying process delay due to the supply and the discharge of the additional seawater for the re-arrangement of a keel block can be removed. CONSTITUTION: A detachable keel block(10) for the ship construction comprises a body(100) and a permanent magnet(101). The body comprises a cavity(100a) to be able to float on the seawater. A magnet mounting groove(100b) is formed from the upper part to the lower part of the body. The permanent magnet is inserted into the magnet mounting groove to be able to detachably attach the body to the lower surface of the ship and is formed to be able to be switched. The keel block is installed in a dock and supports the ship, which is being constructed in the dock.
Patent KR-20100122605-A (KR)
Inventor: RYU CHANG HEE
IPC: E06B3/54
Filed: 2009-05-13
Abstract: 기존에 사용되는 창문과 유리를 고정 시키는 방법을 100-a와 100-b부분을 도 1의 100의 방법으로 결합시켜 창문의 유리가 깨질시 남아 있는 유리가 아래로 떨어져 유리 창을 깬 사람이 상해 입는 것을 방지 창문과 유리 
       
     유리창, 안전 유리, 안전 창틀, 창틀
Patent KR-20100129869-A (KR)
Title: 기능성 물질이 포함된 쿠션 매트
Inventor: LEE SEOK AN
IPC: A47C27/05
Filed: 2009-06-02
Abstract: 본 발명은 기능성 물질이 포함된 쿠션 매트에 관한 것으로, 쿠션 매트를 형성하는 본체에 자석 분말이나 원적외선 방사 물질이 포함되어, 생리 활성 작용이 뛰어난 기능성을 가짐으로써, 쿠션 매트만의 사용 또는 방석, 일반용 매트, 침대용 매트 등의 구성 부분으로 다양하게 사용하여 그 기능성을 높인 쿠션 매트에 관한 것이다. 
     본 발명에 따르면, 볼록부와 오목부가 등간격으로 번갈아 가면서 형성된 쿠션재의 본체로 구성된 쿠션 매트에 있어서, 상기 본체는 수지와 기능성 물질로 형성됨을 특징으로 하는 기능성 물질이 포함된 쿠션 매트가 제공된다. 
       
     쿠션 매트, 압축 스프링, 자석, 원적외선
Patent KR-20100131815-A (KR)
Title: Roll forming system and method thereof, and formed article prepared by using the same
Inventor: KOO DO HOI
IPC: B21D28/26
Filed: 2009-06-08
Abstract: PURPOSE: Roll forming device and method and a shaped beam using them are provided to optimize the thickness and the quality of a shaped beam since the beam is roll-formed by the welding through a welding unit. CONSTITUTION: A roll forming device consists of multi-stage uncoiling units(1a,1b), a straightener(2), a welding unit(3), a brake press(4), a roll forming unit(5), a round bender(6) and a cutting press(7). The multi-stage uncoiling units unwind a central coil and both side coils. The central coil and both side coils are respectively supplied from the center and both sides of the front width of a line. The central coil and both side coils have different thicknesses. The straightener unfolds the central coil and both side coils, which are unwound, to a central plate and both side plates. The brake press forms holes for various purposes. The roll forming unit bends the plate and roll-forms to a given shape of shaped beam. The round bender consists of a plurality of curvature forming rolls.
Patent KR-20100133586-A (KR)
Title: Monitoring system of substation using color data
Inventor: LEE KUK MYOUNG
IPC: G08B29/00
Filed: 2009-06-12
Abstract: PURPOSE: A monitoring system of substation using color data is provided to help a user to easily recognize each facility by designing facility and interior at electric power system with the same color or same group color. CONSTITUTION: A camera(10) is installed at sensing points and takes a photograph of the predetermined domain. A supervisory control unit(20) extracts the color information from a recorded signal. The supervisory control unit monitors the abnormality of an electric power system. A database(30) stores electric power system monitoring information and video information. An alarm(40) generates an emergency signal.
Patent KR-20100133691-A (KR)
Title: Device for high strength organic waste and wastewater treatment by using bacillus bacteria
Inventor: LEE BYUNG HUN
IPC: C02F3/02
Filed: 2009-06-12
Abstract: PURPOSE: High-concentration organic waste water and a wastewater treatment system using bacillus are provided to inject the bacillus into wastewater treatment process, thereby improving the efficiency of the wastewater treatment process by continuously securing the bacillus. CONSTITUTION: The high-concentration organic waste water and a wastewater treatment system includes a first processing bioreactor(20) and a second processing bioreactor(50). The high-concentration organic waste water(10) flows in the first processing bioreactor. The wastewater(40) flows in the second processing bioreactor. In the second processing bioreactor, the bacillus sludge(70) which is right fired in the first processing bioreactor flows in.
Patent KR-20100136137-A (KR)
Title: Retaining wall type prevention frame forming tree
Inventor: KIM CHUL MIN
IPC: E02B3/08
Filed: 2009-06-18
Abstract: PURPOSE: A retaining-wall-type crib is provided to reduce manufacturing cost by the minimum timber use, to simplify a construction method and to prevent the erosion of bagwork using environment-friendly timber. CONSTITUTION: A retaining-wall-type crib comprises a retaining-wall frame(10), a pipe(20) and a fixing rebar(30). The retaining-wall frame consists of a plurality of timbers(11,12), which are arranged in parallel to each other. The pipes are located at given intervals toward the shore, at which the retaining-wall frame is installed. The ends of the fixing rebar are fixed to the upper and lower ends of the retaining-wall frame and the fixing rebar fixes the retaining-wall frame and the pipe in a way of protecting the pipe.
Patent KR-20100138068-A (KR)
Title: A system for accumulating the changes and the method of providing the change accumulation service
Inventor: SEONG GUK SIN
IPC: G06Q20/10
Filed: 2009-06-24
Abstract: PURPOSE: A system for accumulating changes and a method of providing a change accumulation service are provided to automatically collect changes whenever products are purchased and deposit the changes in a bank account of a user, thereby removing needs of carrying coins. CONSTITUTION: A change accumulating card(100) stores personal information of bank account information of a user. A member store terminal(200) recognizes the change accumulating card by a change reservation request of the user. The member store terminal requests a change accumulating service to a change management server(300) and transmits payment information. The change management server authenticates a user by the change accumulating service request.
Patent KR-20100056957-A (KR)
Title: System for light emitting diode backlight
Inventor: SHIN KI WON
IPC: G02F1/133
Filed: 2009-06-25
Abstract: PURPOSE: A light emitting diode backlight system is provided to equally guarantee color purity of LED(Light Emitting Diode) devices. CONSTITUTION: An LED device light amount control unit(105) comprises an LED driver(105a) and an LED(Light Emitting Diode) device for a color sensor. The LED driver is connected to an LED backlight to drive the LED devices. The target adjusting device for the color sensor determines a light receiving amount of LED devices detected through a color sensor. The target adjusting device for the color sensor supplies a duty value corresponding to a light amount of LED devices which will be compensated in the LED driver.
Patent KR-20110000883-A (KR)
Title: Hair band
Inventor: KO SEOK JEONG
IPC: A45D8/36
Filed: 2009-06-29
Abstract: PURPOSE: A hair band is provided, which can express various decoration senses and vary monotonous design of a hair band. CONSTITUTION: A hair band comprises: an elastic band part(23) which has a contact cross section which is expanded from the wearing terminal and comes into contact with user's head by elastic force; an ornament main body(24) which is installed along the elastic band part; and a slide holder part(25) which is coupled in order to be movable along the elastic band part of the ornament main body and is installed at contact side where the ornament main body and elastic band part contact.
Patent KR-20110001707-A (KR)
Title: Joint assemgly for body of vehicles
Inventor: AN YONG DOK
IPC: B62D21/00
Filed: 2009-06-30
Abstract: PURPOSE: Joint assembly of a vehicle body is provided to enable a protrusion piece to be easily coped with assembling tolerances of longitudinal and transversal directions if the protrusion piece of a first panel is inserted into the expanded hole of a second panel. CONSTITUTION: Joint assembly of a vehicle body comprises a coupling end(120) and a slit hole(210). The coupling end comprises a protrusion piece(121) and is formed on a first panel(100). The slit hole is formed on a second panel(200) so that the coupling end is inserted. The slit hole comprises a expanded hole part(211), a slope hole part(212) and a slit hole part(213). The protrusion piece is first inserted into the expanded hole part. The slope hole part is extended to slope to the expanded hole part so that the width of the slit hole becomes narrow. The slit hole part has a corresponding width to that of the coupling end.
Patent KR-20110003100-A (KR)
Title: Navigation device for visually handicapped person with direction indicating by vibration
Inventor: HONG JU HYUNG
IPC: A61F9/08
Filed: 2009-07-03
Abstract: PURPOSE: A walk auxiliary device for the blind is provided, which can provide information about exact movement route to the blind. CONSTITUTION: A walk auxiliary device for the blind comprises: a movement route output unit(114) calculating a route for destination; an RF receiver(118) which is composed of a directional antenna, senses direction intensity of a radio frequency signal and calculates direction to a signal sending device from the walk auxiliary device; a terrestrial magnetism sensor(120) recognizing direction; and a vibrator(110) in which a plurality of vibrating motors are arranged at an equal interval.
Patent KR-20110003962-A (KR)
Title: Prestressed concrete beam bridge structure
Inventor: SHIN MYUNG SUP
IPC: E04C3/10
Filed: 2009-07-07
Abstract: PURPOSE: A PC-beam bridge structure is provided to reduce the concrete pouring amount by reducing the width of a cross beam which is installed between PC-beams. CONSTITUTION: A PC-beam bridge structure comprises a lower structure(20), a precast-concrete beam(40), a crossbeam(60), an upper plate(80) and a binding reinforcing bar. The lower structure is composed of a bridge post. The precast-concrete beam is made of ferroconcrete. A spatial groove is respectively formed on both ends to support the precast-concrete beam with the lower structure.
Patent KR-20100041666-A (KR)
Title: Method for manufacturing electrode for dye-sensitized solar cell, the electrode manufactured by the same, and dye-sensitized solar cell comprising the electrode
Inventor: YANG KYE YOUG
IPC: H01L31/04
Filed: 2009-07-22
Abstract: PURPOSE: A method for manufacturing an electrode for a dye-sensitized solar cell, the electrode which is manufactured by the same and the dye-sensitized solar cell including the electrode are provided to guide an excited electron which is generated from a light absorbent layer by adjusting the thickness of lines which form metal mesh layers. CONSTITUTION: Liquid phase cross-linkable resins(121, 141) are injected into a mold or coated on a substrate. The liquid phase cross-linkable resins are semi-cross-linked. The one side of metal mesh layers(122, 142) is immersed in the liquid phase cross-linkable resins. The liquid phase cross-linkable resins are cross-linked. The other side of the metal mesh layers is masked.
Patent KR-20110005621-A (KR)
Title: Refuse disposal
Inventor: KOO YONG GIN
IPC: F26B5/04
Filed: 2009-08-05
Abstract: PURPOSE: A food waste disposal apparatus is provided to install a mixer which mixes food waste with a catalyst and completely eliminates smells through a mixing process. CONSTITUTION: A food waste disposal apparatus includes: a mixing tub(2) having a cover(3) for supplying the food waste and catalyst; a mixer(5) for mixing the food waste and catalyst; a plurality of stoppers(8) which is prevented from being upward projected and formed in the bottom surface of a mixed tide and congeal while the food waste revolves; a band heater(9) which is installed in the exterior of the mixed tub and heats the inside thereof; a smell eliminating bowl; a coolant supply part, and a bubble generator(30).
Patent KR-20110015110-A (KR)
Title: Emitting plate for showing affiliated-store information of card company
Inventor: JUNG SUK KI
IPC: G09F13/04
Filed: 2009-08-07
Abstract: PURPOSE: An emitting plate for showing affiliated-store information of a card company is provided to maximize an advertising effect of a specific card by informing the information of a specific card unconsciously. CONSTITUTION: A first plate(210) has one side with printed card company information indicating a specific card affiliate and other side with an adhesive. A control panel(250) controls at least one light emitting diode(240). A second plate(220) is located in the back side of the first plate. A second plate has a pattern which uniformly emits light from the light emitting diode on a first plate. A third plate(230) is located between the second plate and the control panel. A third plate reflects the light emitted from the second plate.
Patent KR-20110016321-A (KR)
Title: Defrosting method
Inventor: KIM SHIN IL
IPC: F25D29/00
Filed: 2009-08-11
Abstract: PURPOSE: A defrosting method using an internal temperature sensor and a method of sensing abnormality of a defrosting heater are provided to control defrost and to reduce the fault of a sensor in a freezing, cooling, and a defrosting operation. CONSTITUTION: An on-signal is transferred to a defrosting heater after it determines whether defrost is necessary and or not(S1,S3). The malfunction of the defrost heater is determined by the high temperature of an indoor(S5). The defrost heater is turned on after the defrost heater is switched off in the defrost time of completion in order to operate defrosting.
Patent KR-20110017646-A (KR)
Title: 유골 봉안방법
Inventor: KIM GWI JONG
IPC: A61G17/08
Filed: 2009-08-14
Abstract: 본 발명은 유골봉안 방법에 관한 발명으로, 저렴한 비용과 절차로서 유골의 부패 및 벌레 생성을 방지하고자 하는 유골봉안 방법에  관한 발명이다. 
     본 발명은 기존의 유골 봉안 방법과는 달리, 유골에 참숯 및 죽염을 첨가하는 것을 특징으로 한다. 
     참숯은 유골의 습기를 제거하고 부패를 방지하기 위하여 첨가하는 것이고, 죽염은 벌레발생을 방지하기 위하여 첨가하는 것이다. 
     구체적인 본?발명의 유골봉안방법은 하기와 같다. 
     유골을 주머니에 넣어 묶은 후 유골함에 담는 단계; 
     습기 및 결로현상방지를 위해 유골함내 유골을 담은 주머니의 가장자리 빈 공간 전체에 참숯을 가득 채우는 단계; 및 
     벌레를 방지하기 위하여 죽염가루를 참숯 층 윗부분에 뿌리는 단계. 
     본 발명의 유골봉안 방법은 이전의 유골의 부패를 방지하기 위한 방법에 비하여 경제적이고, 절차가 매우 단순하면서도 그 부패 방지의 효과는 매우 뛰어나다. 
       
     봉합 방법, 죽염, 참숯
Patent KR-20110017697-A (KR)
Title: Transfer device for automatic transfer switch
Inventor: LYU JAE GOO
IPC: H01H31/04
Filed: 2009-08-14
Abstract: PURPOSE: A transfer device for an automatic transfer switch is provided to prevent a malfunction in switching by allowing a transfer bar between input links and trip links to be easily controlled. CONSTITUTION: An automatic control switch comprises: input links(213,223) and trip links(214,224); an interlink bar which is combined with both ends of the input links and the trip links mutually interlinks the input operation and trip operation of a breaker; a length adjusting part controlling the length of the interlink bar; a buffer member; an input link; an input lever, and a trip lever.
Patent KR-20110018039-A (KR)
Inventor: LIM CHE IL
IPC: G06Q10/06
Filed: 2009-08-17
Abstract: 본 발명은 생산 현장의 생산 기술, 생산 장비, 자재 시세 현황, 선주 취향 및 선급 협회에서 규정한 자재 사용 조건 등을 고려하여 설계 도면에 표기된 설계 자재 정보를 생산 경쟁력이 있는 생산 자재 정보로 자동 변경시키되, 그 변경된 자재 정보를 실시간으로 제공하는 정보 공유 체계를 구현할 수 있도록 하는 선박 건조 시의 자재 정보 변경 시스템에 관한 것으로, 설계 도면 정보, 설계 자재 정보, 자재 변경 기준 정보 및 생산 자재 정보를 저장하는 DB 블록과; 클라이언트로부터 정보의 등록, 조회 또는 변경 요청에 따라 상기 DB 블록과 연동하여 각종 정보를 선택적으로 등록 또는 조회하거나 변경시키는 자재 변경 관리 서버와; 상기 자재 변경 관리 서버의 제어에 의해 설계 도면 정보, 설계 자재 정보, 자재 변경 기준 정보 및 생산 자재 정보를 상기 DB 블록에 선택적으로 저장시키거나, 상기 DB 블록으로부터 선택적으로 정보를 추출하여 상기 자재 변경 관리 서버로 전달하는 DB 관리 모듈을 포함하며, 상기 자재 변경 관리 서버는 상기 DB 블록으로부터 설계 자재 정보를 추출하고, 추출된 설계 자재 정보를 상기 DB 블록에 저장되어 있는 자재 변경 기준 정보에 따라 변경시켜 생산 자재 정보를 생성하여, 생성된 생산 자재 정보를 상기 DB 블록에 저장시키는 것을 특징으로 함으로써, 선박 건조 작업의 효율성 및 생산성을 만족시키면서 설계 도면에 표기된 자재를 그대로 수급하지 않고 생산 경쟁력이 있는 자재로 대체하여 수급할 수 있고, 자재 수급 시 자재 구매 비용을 절감시킬 수 있으며, 그로 인해 가격 대비 품질이 향상된 선박을 건조할 수 있는  효과가 있다. 
     
     선박 건조, 자재, ERP
Patent KR-20110018715-A (KR)
Title: Substrate polishing apparatus and method of polishing substrate using the same
Inventor: KWON OH JIN
IPC: H01L21/304
Filed: 2009-08-18
Abstract: PURPOSE: A device and a method for polishing a semiconductor substrate are provided to improve process efficiency by installing a pad conditioning unit adjacent to a substrate support member. CONSTITUTION: A substrate is received in a substrate support member(100). A polishing unit(300) includes a polishing pad and a pad driving member. The polishing pad is arranged on the upper side of the substrate support member and polishes the substrate received in the substrate support member. The pad driving member moves the polishing pad to change the relative position of the polishing pad with regard to the substrate support member. A pad conditioning unit(601) is installed on one side of the substrate support member and regenerates the polishing surface of the polishing pad.