baber/WOPTO huggingface dataset:
Patent KR-20000040548-A (KR)
Title: Method for searching data of trunk line and route in switching system
Inventor: KWAK MYONG CHEON
IPC: H04Q3/06
Filed: 1998-12-18
Abstract: PURPOSE: A method for searching the data of a trunk line and route in a switching system is provided to reduce a risk of a data loss during a signal processing between processors, by adding a parameter a routine for searching the data of the trunk line, and simultaneously outputting the searched data of the trunk line and route to an operator. CONSTITUTION: An access switching processor(ASP) checks whether an instruction is received from an operation and maintenance processor(301). The ASP analyzes the received instruction in detail at a telephone device maintenance handler(313). The ASP determines whether the analyzed instruction is for requesting the data of the trunk line and route(315). The ASP performs a job corresponding to the inputted instruction(317). The ASP checks a number, interface method, type and state of the trunk line, based on processor load data of a database management system(319). The ASP checks a route related to the checked trunk line(321). The ASP transmits the data of the checked trunk line and route to the operation and maintenance processor(323).
Patent KR-20000042183-A (KR)
Title: Method for producing shipbuilding carbon steel suitable to ultra high heat input welding
Inventor: KIM CHUNG MYEONG
IPC: C21D8/02
Filed: 1998-12-24
Abstract: PURPOSE: A method is provided to produce a shipbuilding carbon steel having excellent toughness and preventing a welding portion from being cracked caused by high temperature when ultra high heat input welding is conducted. CONSTITUTION: A shipbuilding carbon steel is made of a slab. The slab is composed of 0.04 to 0.08wt% of C, 0.20 to 0.35wt% of Si, 1.40 to 1.60wt% of Mn, less than 0.012wt% of P, less than 0.005wt% of S, 0.02 to 0.04wt% of Al, less than 45ppm of N as a basic element group. Also the slab contains 0.15 to 0.25wt% of Cu, 0.10 to 0.30wt% of Ni, 0.005 to 0.025wt% of Nb, 0.008 to 0.015wt% of Ti, 0.01 to 0.04wt% of Cr, 0.01 to 0.03wt% of Mo and 0.002 to 0.005wt% of one or more than two sorts of rare-earth metal. Herein, Ti/N is 2.0 to 3.0 and Cr+Mo is less than 0.05wt%. Therefore, the slab has less than 0.35 of Ceq(carbon equivalent), less than 10% of UCS(unit of crack susceptibility) and less than 0.17% of Pcm(cold cracking susceptibility). The slab is rolled in 50mm thickness to be the carbon steel and has 80 to 90% of ferrite, 5 to 10micron of ferrite crystallization size and 10 to 20% of bainite.
Patent KR-20000045481-A (KR)
Title: Method for forming capacitor of semiconductor device
Inventor: AHN JUN GWON
IPC: H01L27/108
Filed: 1998-12-30
Abstract: PURPOSE: A method for forming capacitor of semiconductor device is provided to form a cylinder type capacitor by a simple and stable process using two contact masks, thereby enhancing performance and reliability. CONSTITUTION: A method for forming capacitor of semiconductor device comprises steps of: forming a first etching barrier layer and patterning it using a first storage electrode contact mask; forming an interlayer insulation film; forming a second etching barrier layer and patterning it using a second storage electrode contact mask; etching the insulation film and a lower insulation layer using the first/second etching barrier layers to form a storage electrode contact hole exposing the substrate; forming a first conductor; forming a sacrifice insulation film filling the contact hole; forming a cylinder type storage electrode by flattening etching process; and forming a second conductor consisted in a dielectric film and a plate electrode.
Patent KR-20000046695-A (KR)
Title: Rubber composition for use in tire sidewall
Inventor: SHIN JONG CHEOL
IPC: C08L9/00
Filed: 1998-12-31
Abstract: PURPOSE: A rubber composition for use in tire sidewall having good tensile strength, tear resistance, anti-cracking and anti-exhaustion while retaining weather resistance, anti-ozone property and anti-oxidation property without decoloration and degradation of appearance is provided. CONSTITUTION: A rubber composition for use in tire sidewalls according to the present invention comprises: a) 100 parts by weight of rubber containing 20 to 80 parts by weight of diene rubber, 10 to 40 parts by weight of high molecular weight ethylene-propylene-diene terpolymer rubber and 10 to 40 parts by weight of halogenated butyl rubber; and b) 2 to 20 parts by weight of low molecular weight liquid isobutylene rubber.
Patent KR-20000046710-A (KR)
Title: Registration and search method for knowledge management system's knowledge organization
Inventor: JEONG CHEOL
IPC: G06F17/30
Filed: 1998-12-31
Abstract: PURPOSE: A registration and search method for knowledge management system's knowledge organization is disclosed to define the organization of each layer and the network, to make information search useful by enabling the justification of each knowledge node's internal properties, and to provide a knowledge management system's knowledge organization registration and search methods which makes searching more effective and useful. CONSTITUTION: A registration and search method for knowledge management system's knowledge organization is composed of defining of property, registration of knowledge organization, selection of search boundary, search for key words or organization, and display of search results. Each layer and network's structure and properties are defined in the knowledge organization definement process. A domain property category is defined and the knowledge organization is registered. Network information is used to select search boundaries and after the selection of boundaries, key words or knowledge organization, which have been registered according to its properties, are searched. Appropriate search results are returned to the user and if the user is satisfied with the search results, the search is completed. However, if the user is dissatisfied, the entire process is repeated.
Patent KR-20000046925-A (KR)
Title: Ultra high voltage cable connection device
Inventor: BAEK SEUNG YEOP
IPC: H01R13/6581
Filed: 1998-12-31
Abstract: PURPOSE: An ultra high voltage cable connection device is provided to simplify assembly and to reduce the area between the dielectric materials in order to improve insulation. CONSTITUTION: An ultra high voltage cable connection device includes a conductive sleeve(3), a high voltage electrode(13), a rubber balloon(14), a central bronze pipe(5), and a semiconductive rubber(15). The conductive sleeve(3) connects the conductor exposed at both ends of the ultra high voltage cable(12A,12B). The high voltage electrode(13) includes fixing plate(4) on the conductive sleeve and the surface of the electrode(13) is solidified. The rubber balloon(14) surrounds the electrode(13) and dielectric oil or dielectric gas is condensed inside the balloon(14). The central bronze pipe(5) surrounds the rubber balloon. The semiconductive rubber(15) fixes the rubber balloon on the ultra high voltage cable(12A,12B).
Patent KR-19990044085-A (KR)
Title: 무선 차폐부를 구비한 무선 장치와 그 제조 방법
IPC: H05K9/00
Filed: 1997-07-08
Abstract: 무선 모뎀과 같은 무선 장치는 기부(16)와 제1 및 제2 측면(40, 42)을 구비한 무선 차폐 용기(10)와 측벽(14)을 구비하고 있다.  제1 회로 기판(예컨대, 무선 주파수 회로 기판(20))은 용기의 측벽 사이에 장착되어 기부의 제1 측면을 횡단 연장하고 있다.  제2 회로 기판(예컨대, 로직 회로 기판(22))은 기부의 제2 측면에 횡단 장착되어 있어서 용기의 기부는 제1 회로 기판과 제2 회로 기판을 분리시킨다.  무선 차폐 하우징(상부 조립체 덮개(26)와 저부 덮개(38))은 용기와 제1 회로 기판 및 제2 회로 기판을 둘러싼다.  본 발명의 실시예에서, 장치는 퍼스널 컴퓨터 메모리 카드 국제 연합 표준에 맞는 치수로 되어 있고 안테나 연결부(76)를 갖는다.  긴 리세스(74)는 하우징의 두 측면 사이에서 연장되어 있고 안테나 연결부는 리세스 내에 장착되어 있다.
Patent KR-19990087723-A (KR)
IPC: H04Q1/14
Filed: 1997-03-11
Abstract: A device for electrically connecting power cable conductors to distribution cable conductors includes a panel that supports contact modules that have contacts and that are distributed along a circle about a hub and that pass through the thickness of the panel. On a rear side of the panel the contacts are joined to conductors of the cables. On a front side of the panel the contacts are joined to jumper wires, which may be wrapped about the hub and passed between the teeth of a circular comb. In another embodiments, a panel supports structures forming guide chutes for jumpers and pivotally mounted caps for added protection of the jumpers. The panel may be pivotally mounted at an axis for easy access to the rear side and may support a rotatable arm for aid in preparing jumper wire ends. In another embodiment a pair of opposed panels are coupled at internal surfaces to conductors of cables and on their outer surfaces to jumpers, the jumpers passing through aligned openings in the panels.
Patent KR-20000004983-A (KR)
Title: Perfluoroether release coatings for organic photoreceptors
Inventor: WOO EDWARD J
IPC: G03G5/147
Filed: 1997-02-17
Abstract: PURPOSE: A perfluoroeether release coating for organic photoreceptors is to provide a photo conductive element comprising an electroconductive substrate, a photo conductive layer on a surface of the electroconductive substrate, and a release layer over the photo conductive layer. CONSTITUTION: The perfluoroeether release coating for organic photoreceptors are the photoreceptor including release layer as well as the durability of electroconductive substrate and photo conductive layer. The release layer includes a fluoroether polymer which is the reaction product of components comprising: A) a difunctional perfluoroether, B) a diisocyanate, C) an amino functional silane, and D) optionally, a diol chain extender.
Patent KR-19990072274-A (KR)
Title: 단추공재봉틀의재봉사절단장치
IPC: D05B3/08
Filed: 1999-01-13
Abstract: 수직축(22)을 중심으로 회전할 수 있는 루퍼베어링(70)을 가진 단추공재봉틀의 재봉사 절단 장치에 있어서 루퍼재봉사(60)와 침사(針絲)가 서로 독립하여 이동할 수 있는 재봉사 절단 공구(42, 53)가 설치되어 있다.   루퍼베어링(70)에는 구동장치가 재봉사절단공구(42, 53)를 위한 공압시린더(29, 30)의 형상으로 되어 있어서 장치(69)에 의하여 신축 호스(33, 37)형태 또는 회전전달의 형태로 압축공기가 정치식 압축 공기원으로부터 공급될 수 있다.    발명에 따르는 재봉사 절단장치는 루퍼베어링(70)의 회전 위치와는 관계없이 재봉사 절단공구(42, 53)의 작동을허용한다.
Patent KR-20000051488-A (KR)
Inventor: JO JUN GEOL
IPC: G03F9/00
Filed: 1999-01-22
Abstract: PURPOSE: A focusing method of an exposure apparatus and an associated system are provided to obtain stable focusing and leveling of a wafer having a complicated layer stack. CONSTITUTION: When a wafer(26) including a substrate(70), a first and a second layers(72,74) having uneven surface topology, and a photoresist layer(76) is provided, a focusing system(10) including a first and a second light-emitting members(12,14) and a first and a second light-receiving members(16,18) is provided to measure and adjust a focus. Respective lights(80,84) emitted from the first and the second light-emitting members(12,14) are projected to the surface of the wafer(26) at a specific incidence angle(90,92), and then lights(82,86) reflected by the surface of the wafer(26) are received to the first and the second light-receiving members(16,18). In particular, the incidence angle(90,92) is adjusted so that the reflected lights(82,86) have intensity greater than transmitted lights. The focusing system(10) further includes a controller for adjusting the position of the wafer(26) according to detection signals of the reflected lights(82,86).
Patent KR-19990072374-A (KR)
Title: 정전기방전에대한향상된보호기능이있는집적회로장치
IPC: H01L21/822
Filed: 1999-02-02
Abstract: 본 발명의 실시예는 개선된 정전기 방전(ESD) 방지기를 갖는 집적 회로 장치를 포함한다. 집적 회로 장치는 다수의 유전체 층들이 형성되어 있는 기판과, 장치의 회로 소자를 형성시키기 위한, 유전체 층들과 기판 사이의 다수의 금속 상호접속 영역들과, 다수의 금속 상호 접속 영역들과 기판에 형성된 능동 구성 요소들을 전기 접속시키기 위한 다수의 금속 바이어 영역들을 갖는다. 금속 상호 접속 영역들과 거기에 접속된 각각의 바이어 영역들은 입력/출력 영역들 또는 감지 소자들을 형성한다. 본 발명의 실시예에 따르면, 감지 소자들은 상기 장치로의 전류 흐름을 제한하고 정전기 방전으로부터 장치를 보호하는 적어도 하나의 높은 고유 저항 금속 영역을 포함한다. 높은 고유 저항 금속 영역들은 질화티타늄(TiN), 텅스텐(W), 탄탈(Ta), 티타늄(Ti), 및/또는 그들의 합금들과 같은 재료들을 포함한다. 본 발명의 실시예들에 따르면, 높은 고유 저항 금속들은 영역이 상당히 증가하는 일이 없고, 기존의 기판 처리를 상당히 변경시키는 일이 없는 다른 영역들 또는 감지 소자들 내에 ESD에 대한 보호를 하도록 후미 해결법으로서 집적 회로들 내에 사용된다. 높은 고유 저항의 금속 영역들은 ESD 전압 및 전류 스파이크들로부터 감지 소자들을 보호하도록 역바이어스된 다이오드들과 같은 전압 제한 장치들과 함께 사용되는 전류 제한 저항기들을 형성시킨다. 집적 회로의 용량성 센서들에 있어서 높은 저항의 금속 재료들은 센서 플레이트들을 형성시키는데 유용하며, 센서 플레이트들은 통상적으로 접촉이 반복되어 종종 ESD에 대한 보호가 필요하다.
Patent KR-20000056345-A (KR)
Inventor: PARK BYUNG HO
IPC: C09D121/00
Filed: 1999-02-19
Abstract: PURPOSE: A black paint composition for repairing tire that can solve the problem such as peeling of paint from the surface of tires is provided. CONSTITUTION: A black paint composition for repairing tire is characterized by comprising : based on the total volume of paint, (i) 20-50% of rubber mixture, wherein natural rubber, isoprene rubber, styrene-butadiene rubber, butyl rubber, ethylene-propylene-diene rubber as raw rubber materials is contained ; (ii) 50-80 % of toluene or gasoline as solvents. Also, 0.5-3 parts by weight of vulcanizing accelerator, based on the weight of raw rubber, is used.
Patent KR-20000052263-A (KR)
Inventor: MOTOMURAMASATSGU
IPC: H04N5/781
Filed: 1999-02-26
Abstract: PURPOSE: A method for taking pictures and a charge coupled device system are provided to project the picture taken to a still image and to find out the picture matching the still image. CONSTITUTION: A method for taking pictures includes following steps. The camera system includes a main camera(1) and an auxiliary camera(2). The main camera(1) records the image of an object to a photoresist material. The auxiliary camera(2) converts the still image taken to an electrical signal synchronous to an opening of a shutter of the main camera. At the first step, a signifying code is recorded on the photoresist where the picture is not recorded. At the second step, the still image from the auxiliary camera is recorded in an image recorder. At the third step, a plurality of still images are displayed on a screen At the forth step, a development operation is performed.
Patent KR-19990077714-A (KR)
Title: 유연하고 가벼운 내충격성의 외상방지용 보호구조물
Filed: 1999-03-09
Abstract: 본 발명은 무릎 보호대, 발목 지지대, 대퇴부 지지대 등으로 사용될 수 있는, 유연하고 가벼운 보호구조물에 관한 것이다. 본 발명은 또한  헬멧, 가슴 보호대, 또는 일반적으로 스포츠 활동시 통상적으로 요구되는 보호장갑을 제조하는데 이용되는 기본 구조물에 관한 것이기도 하다. 본 발명의 보호구조물은 매우 가볍고 유연하며 충격을 전달하지 않고 흡수하는 성질이 강하다. 본 발명은 교차직조된 나선형 스트랩에 의해 만들어지는 메쉬에 관한 것이다. 이 메쉬는 그 자체상에 폴딩되어 견고성 향상을 위한 리브를 수용하는 내부 캐비티를 하나 이상 가지게 된다. 이 메쉬는 플라스틱, 금속, 합성섬유 등의 임의의 재료로 만들어질 수 있다. 본 발명의 보호구조물은 나선형 스트랩 사이에 삽입되는 견고한 보강로드를 가질 수도 있다.
Patent KR-20000061003-A (KR)
Inventor: KIM WAN
IPC: H01J9/20
Filed: 1999-03-22
Abstract: PURPOSE: A method for fabricating a shadow mask used in a cathode ray tube is provided to prevent a shadow mask hole from being closed by preventing a paste from being accumulated on a screen mesh. CONSTITUTION: A method for fabricating a shadow mask used in a cathode ray tube comprises a first printing process and a second printing process. In the first printing process, a shadow mask(10) and a screen mesh(20) are fixed at a predetermined position, and a paste is deposited and printed. The shadow mask(10) has a plane shape in which a hole for a beam penetration is formed. In the second process, the screen mesh(20) is separated from the shadow mask. The shadow mask or the screen mesh is horizontally shifted into other position from the predetermined position, and a paste is deposited and printed.
Patent KR-20000061197-A (KR)
Title: Apparatus and method for controlling clock frequency using plural phase-locked loops
Inventor: KIM SEOK JIN
IPC: H03L7/00
Filed: 1999-03-24
Abstract: PURPOSE: A clock frequency controlling device is provided to be capable of changing a clock frequency without synchronous loss using a plurality of phase locked loops. CONSTITUTION: A clock frequency controlling device comprises a phase locked loop controller(20), a multiplexer(30), and first and second phase locked loops(40,50). Each of the first and second phase locked loops(40,50) generates a clock synchronized with an internal clock. The phase locked loop controller(20) receives output signals of the first and second phase locked loops(40,50), and controls the first and second phase locked loops(40,50). The phase locked loop controller(20) outputs a select signal(mx_select) according to an inputted frequency change signal(freq_cnt). The multiplexer(30) receives output signals of the first and second phase locked loops(40,50) to select either one of the received output signals according to the select signal(mx_select).
Patent KR-19990078313-A (KR)
IPC: B01J4/00
Filed: 1999-03-26
Abstract: 본 발명에 따른 분쇄 및 분배장치는 분쇄 및 펌프가능한 물질 특히 기계적으로 탈수된 슬러리를 거의 같은 사이즈의 조각으로 분쇄하고, 그것을 제어가능한 량으로 다운스트림장치 즉 건조기로 공급하는데 이용될 수 있다. 이때문에 슬러리는 두 개의 대향으로 이동가능한 부분에 의해 형성된 갭을 통해 운반된다. 본 발명에 따른 장치의 바람직한 실시예에 있어서, 두 부분은 갭과 면하는 측상의 리세스를 나타내며, 이들은 상기 두 부분이 사전설정된 회전방향으로 서로 대향으로 회전하는 경우 크고 작은 단면적을 가지는 주기적으로 변하는 영역을 가진 슬러리 스트랜드가 형성되고 외측으로 운반되어 작은 단면적을 나타내는 위치에서 부어지는 식으로 설계된다.
Patent KR-20000066463-A (KR)
Inventor: NOH HYEON PIL
IPC: G21K3/00
Filed: 1999-04-16
Abstract: PURPOSE: A structure of an X-ray mask and a method for manufacturing the same are provided to control a membrane area by applying the force to a piezoelectric driving portion and expanding portion. CONSTITUTION: A structure of an X-ray mask and a method for manufacturing the same comprise a membrane(31), a support plate, an absorbing body pattern(33), a support bar(34), an expanding portion(35) and a piezoelectric driving portion(37). The membrane penetrates an X-ray. The support plate supports the membrane. The absorbing body pattern is formed on the membrane in order to absorb the X-ray. The support bar is installed at a rear face of the membrane in order to prevent the distortion of the membrane. The expanding portion is supported by the support bar. The piezoelectric driving portion drives the expanding portion.
Patent KR-20000075328-A (KR)
Inventor: LEE CHEOL HUN
IPC: B60T7/12
Filed: 1999-05-31
Abstract: PURPOSE: An apparatus for automatic parking braking of a car is provided to park and stop the car in stable state, thereby preventing all kinds of accident. CONSTITUTION: An apparatus for automatic parking braking of a car includes a car body balance sensing part(A) for detecting a gradient of the car; a driver riding sensing part(B) for determining whether a driver rides in a driver's seat or not; a cable tension sensing part(C) for detecting a tension working on a cable when parking; a control part(D) detecting the gradient of the car body, the riding of the driver, and the tension of the cable; a motor driving part(E) controlling the driving of a motor by being controlled by the control part; and an operation lever rotating operating part(F) rotating an operation lever of a parking brake by being controlled by the motor driving part for generating parking braking force.
Patent KR-20010001265-A (KR)
Inventor: KIM JAE GWAN
IPC: G01M15/00
Filed: 1999-06-03
Abstract: PURPOSE: A jig for a rigid mode test of a power plant is provided to easily perform an inspection of an interpretive simulation result and to easily study an experimental parameter by easily changing a mounted position, a mounted strength and an elasticity of an engine mount insulator. CONSTITUTION: A jig for a rigid mode test of a power plant includes a base frame(20) on which a plurality of guide holes(21) are formed side by side and transversely, a circular insulator(10) connected at a support point of a power plant(3), vertical frames(30,36) movably bolted along the guide holes of the base frame at the position where the insulator is located, a horizontal frame(40) mounted on the vertical frame and bolted movably in a transverse direction at right angles with the guide holes, and an insulator bracket(50) rotatably mounted on the vertical frame and the horizontal frame and supporting the insulator.
Patent KR-20000005910-A (KR)
Inventor: GOIZMISAZIO
IPC: H01J29/04
Filed: 1999-06-04
Abstract: PURPOSE: A cathode ray tube is provided to improve easiness of welding and reliability of the cathode ray tube. CONSTITUTION: A cathode ray tube comprises a phosphor plate and an electron beam. The electron beam includes a plurality of grid electrodes. The cathode structure includes a substrate metal and a heater for heating the metal. The heater includes a leg unit located between a main heater and a section of the main heater. The respective leg units includes heat wires, a first multi layer coil unit, the main heater, and a second multi layer coil unit. At least one section of the main heater and the second multi layer coil unit is covered with an isolation layer, and the heater is welded to electric lines for loading voltage to the first multi layer coil unit. The second multi layer coil unit has at least 3 layers, and the number of layer of the first multi layer coil unit is greater than that of the second multi layer coil unit.
Patent KR-19990068803-A (KR)
Title: 노래방시스템
Filed: 1999-06-22
Abstract: 본 발명은 노래와 함께 새로운 방식의 게임을 즐길 수 있도록 된 노래방 시스템에 관한 것이다. 
     본 발명에 따르면, 노래반주 및 노래가사가 저장되며 노래의 번호와 박자 및 키를 입력할 수 있도록 된 반주기본체(2)와, 이 반주기에 연결되어 노래가사를 디스플레이하는 모니터(4)와, 상기 반주기본체(2)에 연결된 마이크(6) 및 스피커(8)를 포함하는 노래방 시스템에 있어서, 상기 모니터(4)의 소정영역에 배치되며 노래의 리듬에 맞춰 사용자의 입력을 요구하는 지시사인(10)을 디스플레이하는 사인표시부(14)와, 이 반주기본체(2)에 연결되며 상기 지시사인에 대응되는 입력수단(20, 32)이 구비된 별도의 입력장치(12)를 더 포함하여 구성되며, 사용자는 상기 사인표시부(14)에 디스플레이되는 지시사인의 형태와 타이밍에 따라 상기 입력장치(12)의 입력수단(20,32)을 선택적으로 조작할 수 있도록 된 것을 특징으로 하는 노래방 시스템이 제공된다.
Patent KR-20010003991-A (KR)
Inventor: KIM JAE HYEONG
IPC: G11C11/406
Filed: 1999-06-28
Abstract: PURPOSE: A memory device for driving a packet command is provided which has an improved input/output structure which improves the driving capability of an output stage and at the same time assures the stability to ESD(Electrostatic Discharge). CONSTITUTION: The device improves the driving capability of an output stage as driving a current by the conventional method. The memory device has an input/output structure which is connected to the GND and an output pad(60), and where a plurality of driving transistors(41-4n) driven according to a data signal are connected in parallel. The memory device comprises a control circuit to control the rest of the driving transistors except the driving transistor in the first front stage among the plurality of the driving transistors by inputting a plurality of current control signals. The control circuit comprises a plurality of control units(51-5n-1). Each control unit is connected to two adjacent driving transistors, and comprises: a transfer unit(5a) to transfer the data signal to a gate of the driving transistor according to the corresponding current control signal; an inversion unit(5b) to invert the corresponding current control signal; and a blocking unit(5c) being connected between the GND and the gate of the driving transistor to prevent the data signal from being transferred to the gate of the driving transistor according to an output signal of the inversion unit.
Patent KR-20010004548-A (KR)
Inventor: KIM JONG SAM
IPC: H01L21/334
Filed: 1999-06-29
Abstract: PURPOSE: A gate electrode manufacturing method is provided to be capable of preventing generation of short between word lines and bit lines due to etch of a hard mask, by etching only a protection film without etching the hard mask. CONSTITUTION: A gate oxide film(7), a polysilicon film(2) and a tungsten silicide film(4) are sequentially formed on a semiconductor substrate(1). After depositing a hard mask film(5) being a silicon nitride film on the tungsten silicide film, a protection film(8) as a silicon oxide film or a silicon oxynitride film is formed on the hard mask film. Then, photoresist(6) is laminated on the protection film and is then patterned. After etching the protection film and the hard mask using the patterned phoresist as an etch mask, the photoresist is removed. Then, the tungsten silicide film and the polysilicon film are etched using the patterned protection film and the hard mask.