Patent SG-11201803216W-A (SG)
Title: Color imaging for cmp monitoring
Inventor: BENVEGNU DOMINIC J
IPC: H01L21/66
Filed: 2016-10-28
Abstract: INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property Organization International Bureau (43) International Publication Date 26 May 2017(26.05.2017) WIPOIPCT (10) International Publication Number WO 2017/087140 A1 (51) International Patent Classification: H01L 21/66 (2006.01) H01L 21/306 (2006.01) H01L 21/304 (2006.01) (21) International Application Number: PCT/US2016/059501 (22) International Filing Date: (25) Filing Language: (26) Publication Language 28 October 2016 (28.10.2016) English English (30) Priority Data: 14/942,777 16 November 2015 (16.11.2015) US (71) Applicant: APPLIED MATERIALS, INC. [US/US]; 3050 Bowers Avenue, Santa Clara, California 95054 (US). (72) Inventors: BENVEGNU, Dominic J.; 241 Beverly Drive, La Honda, California 94020 (US). TOLLES, Robert D.; 536 Losse Court, San Jose, California 95110 (US). SWEDEK, Boguslaw A.; 10315 A El Prado Way, Cuper­ tino, California 95014 (US). RAVID, Abraham; 19756 Wheaton Drive, Cupertino, California 95014 (US). (74) Agent: GOREN, David J.; Fish & Richardson P.C., P.O. Box 1022, Minneapolis, Minnesota 55440-1022 (US). (81) Designated States (unless otherwise indicated, for every kind of national protection available): AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (84) Designated States (unless otherwise indicated, for every kind of regional protection available): ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG). Declarations under Rule 4.17: — as to applicant's entitlement to apply for and be granted a patent (Rule 4.17(H)) — as to the applicant's entitlement to claim the priority of the earlier application (Rule 4.17(iii)) Published: — with international search report (Art. 21(3)) < Tf oo n O (54) Title: COLOR IMAGING FOR CMP MONITORING 126 128 1 / > V \'J 0 >) 10 V 146a146b 146c •142 134\_/-" 1 36""M) 120 130 120 100 FIG. 1 (57) : A polishing system includes a polishing station including a platen to support a polishing pad, a support to hold a sub­ strate, an in-line metrology station to measure the substrate before or after polishing of a surface of the substrate in the polishing sta­ tion, and a controller. The in-line metrology station includes a color line-scan camera, a white light source, a feme supporting the light source and the camera, and a motor to cause relative motion between the camera and the support along a second axis perpendic - ular to the first axis to cause the light source and the camera to scan across the substrate. The controller is configured to receive a color data from the camera, to generate a 2-dimensional color image from the color data, and to control polishing at the polishing station based on the color image.