baber/WOPTO huggingface dataset:
Patent KR-20190041016-A (KR)
Title: 다중열 스캐닝 전자 현미경 시스템에서 배열된 비점수차를 보정하기 위한 장치 및 방법
Inventor: BRODIE ALAN
IPC: H01J37/22
Filed: 2017-09-06
Abstract: 멀티빔 스캐닝 전자 현미경(SEM) 시스템이 개시된다.  시스템은, 소스 전자 빔을 발생시키도록 구성된 전자 빔 소스를 포함한다.  시스템은, 소스 전자 빔으로부터 플러드 전자 빔을 발생시키도록 구성된 전자-광학 요소 세트를 포함한다.  시스템은, 멀티빔 렌즈 어레이로서, 플러드 전자 빔을 복수의 일차 전자 빔들로 분할하도록 구성된 복수의 전자-광학 경로, 및 복수의 일차 전자 빔들의 적어도 일부를 조정하도록 구성된 복수의 전기적으로 대전된 어레이 층을 갖는, 상기 멀티빔 렌즈 어레이를 포함한다.  시스템은, 복수의 일차 전자 빔들의 적어도 일부를 스테이지에 의해 고정된 샘플의 표면으로 지향시키도록 구성된 전자-광학 요소 세트를 포함한다.  시스템은, 복수의 일차 전자 빔들에 응답하여 샘플의 표면으로부터 방산된 복수의 전자를 검출하도록 구성된 검출기 어레이를 포함한다.
Patent KR-20190055838-A (KR)
Title: 공중합체 및 수지 조성물
Inventor: NAKANISHI HIDETAKA
IPC: C08L51/00
Filed: 2018-01-12
Abstract: 디엔 및/또는 올레핀 유래의 단위를 가지는 폴리머 쇄(A)와, (메트)아크릴계 단량체 유래의 단위와 주쇄에 환 구조를 가지는 단위를 가지는 폴리머 쇄(B)를 가지는 공중합체로써, 상기 폴리머 쇄(B) 중, 상기 (메트)아크릴산 에스테르 유래의 단위 함유 비율이 45질량% 이상 98질량% 이하인 것을 특징으로 하는 공중합체.
Patent KR-20190087493-A (KR)
Title: 복합 플라스틱 재료로 제조된 코어 부재, 및 그의 제조 방법
Inventor: ALTER ROLF MATHIAS
IPC: B29K67/00
Filed: 2017-11-21
Abstract: 개선된 기계적 특성을 갖는 코어 부재 뿐만 아니라 그의 제조 방법, 및 상기 방법에 따라 제조된 코어 부재가 기재되어 있다.
Patent KR-20190086516-A (KR)
Title: 폴리에스테르-비함유 라미네이팅 접착제 조성물
Inventor: SEEHAGEN INES
IPC: B32B27/08
Filed: 2017-11-22
Abstract: 본 발명은 특히 필름을 라미네이팅하기 위한 2-성분 폴리우레탄 접착제로서, PU 접착제가, 라미네이팅 접착제 조성물의 총 중량을 기준으로, (a) 수지 성분으로서, 수지 성분의 총 중량을 기준으로, 적어도 40 wt% 의 디페닐메탄디이소시아네이트 (MDI) (여기서, MDI 는 4,4'-디페닐메탄 디이소시아네이트 또는 이들의 2,4'-디페닐메탄 디이소시아네이트와의 혼합물임), 및 2 내지 20 wt% 의 200 내지 <1000 g/mol 의 분자량 Mw 을 갖는 폴리글리콜 함량을 갖는 적어도 하나의 NCO-말단 폴리우레탄 예비 중합체를 함유하고, (b) 경화 성분으로서, 2 종, 3 종 또는 그 이상의 상이한 폴리올을 포함하는 폴리올 혼합물을 함유하고, 폴리에스테르를 함유하지 않는 2-성분 폴리우레탄 접착제에 관한 것이다.     본 발명은 또한 필름을 결합시키기 위한 접착제의 용도, 복합 필름의 제조 방법, 및 상기 접착제를 사용하여 결합된 복합 필름에 관한 것이다.
Patent KR-20190135464-A (KR)
Title: Brd4 및 jak2 이중 억제제로서의 융합된 피리미딘 및 이의 사용 방법
Inventor: UPADHAYAYA RAM SHANKAR
IPC: C07D487/04
Filed: 2017-12-01
Abstract: 본 발명은 융합된 피리미딘 화합물, 특히 피롤로피리미딘 화합물 및 이의 유도체, 이의 약학적 조성물, 그리고 BRD4 및 JAK2를 억제하는 방법 뿐만 아니라 이러한 화합물을 사용하여 암 및 백혈병과 같은 다양한 질환 및 상태를 치료하는 방법에 관한 것이다. 브로모도메인 결합 및 JAK 활성이 포함된다.
Patent KR-20190086770-A (KR)
Title: 인터랙티브 시네마그램
Inventor: RAVINDRAN SOURABH
IPC: G06T3/40
Filed: 2017-12-29
Abstract: 인터랙티브(interactive) 시네마그램들을 위한 방법, 장치, 및 컴퓨터 판독가능 매체. 이 방법은 전자 장치의 디스플레이 상에 애니메이션 영역을 포함하는 시네마그램의 정지 프레임을 디스플레이 하는 단계를 포함한다. 이 방법은 또한, 디스플레이 후, 전자 장치의 하나 이상의 센서들로부터의 입력에 기반하여 트리거링 이벤트 발생을 식별하는 단계를 포함한다. 또한, 이 방법은 트리거링 이벤트의 발생을 식별함에 따라 시네마그램의 애니메이션 부분의 애니메이션을 개시하는 단계를 포함한다. 이 방법은 또한 복수의 프레임들로부터 기준 프레임과, 기준 프레임 내 객체를 식별하고, 기준 프레임으로부터 객체를 분할하고, 다수의 프레임들에 걸쳐 객체를 추적하고, 기준 프레임의 일부가 객체의 모션 중에 픽셀 정보를 결여하는지 여부를 판단하고, 그 일부에 추가할 픽셀 정보를 식별함으로써 이미지를 시네마그램으로서 생성하는 것을 포함할 수 있다.
Patent KR-20190119031-A (KR)
Title: 칩들을 본딩하기 위한 방법 및 디바이스
Inventor: WIMPLINGER MARKUS
IPC: H01L21/683
Filed: 2017-03-02
Abstract: 제안된 것은, 기판(11') 또는 추가적인 칩 상으로 칩(7)을 본딩하기 위한 방법인데, 상기 칩(7)은 직접 본딩에 의해, 기판(11') 또는 추가적인 칩 상으로 본딩된다.
Patent KR-20190113953-A (KR)
Title: 엔드 밀링에 의해 제조되는 비-직교 큐브 코너 요소 및 그의 어레이
Inventor: SEWALL NELSON D
IPC: B29L11/00
Filed: 2018-02-05
Abstract: 엔드 밀링을 수반하는, 큐브 코너 요소를 제조하기 위한 새로운 기술이 비-직교 2면각 및 2면각 오차를 갖는 큐브 코너 요소, 및 그러한 큐브 코너 요소의 어레이의 제조에 사용된다.  큐브 코너 요소의 주어진 광학 면이 2개의 구성 면을 가진 합성 면일 수 있다.  몇몇 경우에, 구성 면은 주어진 2면각 오차가 전체 광학 면에 관련되도록 평행하고 동일 평면 상에 있을 수 있는 한편, 다른 경우에, 2개의 구성 면은 평행하지 않을 수 있고, 상이한 2면각 오차와 관련될 수 있다.
Patent KR-20190138782-A (KR)
Title: 당뇨병의 예방, 치료 및 관리를 위한 허보-미네랄 제제 및 그의 제조방법
Inventor: SHETTY VIJAYABHANU M
IPC: A61K35/02
Filed: 2018-02-22
Abstract: 당뇨병의 예방, 치료 및 관리를 위한 허보-미네랄 제제 및 그의 제조방법이 본원에 개시되어 있다. 개시된 허보-미네랄 제제는 당뇨병 및 당뇨병 관련 합병증의 치료를 용이하게 하는 허브 및 미네랄 성분을 포함한다. 또한, 개시된 제제는 저혈당증, 저지혈증, 및 췌장 세포 재생의 특성을 나타내는 것으로 관찰되었다.
Patent KR-20190117711-A (KR)
Title: 무선 통신 칩셋을 사용하여 레이더 감지를 행하기 위한 디지털 빔포밍
Inventor: LIEN JAIME
IPC: H01Q3/40
Filed: 2018-03-30
Abstract: 무선 통신 칩셋을 사용하여 레이더 감지를 행하기 위해 디지털 빔포밍을 가능하게 하는 기법들 및 장치들이 설명된다. 제어기는 무선 통신 칩셋으로 하여금 타겟에 의해 반사되는 레이더 신호를 수신하기 위해 복수의 수신기 체인들을 사용하도록 하거나 무선 통신 칩셋을 초기화한다. 디지털 빔포머는 무선 통신 칩셋으로부터 기저대역 데이터를 획득하고, 그리고 공간 응답을 발생시키는데, 여기서 공간 응답은 타겟의 각위치를 결정하는데 사용될 수 있다. 제어기는 또한, 레이더 신호를 수신하기 위해 어떤 안테나들이 사용될 것인지를 선택할 수 있다. 이러한 방식으로, 제어기는 또한 디지털 빔포밍을 위해 무선 통신 칩셋을 최적화시킬 수 있다. 이러한 기법들을 이용함으로써, 무선 통신 칩셋은 무선 통신 혹은 레이더 감지를 위해 사용될 수 있다.
Patent KR-20190130678-A (KR)
Inventor: PARK SEUNGWOOK
IPC: H04N19/50
Filed: 2012-11-05
Abstract: 본 발명은 디블록킹 필터링의 방법과 이를 위해 bS(boundary Strength)를 유도하는 방법 및 이를 이용하는 인코딩/디코딩 방법 및 장치에 관한 것으로서, 본 발명에 따른 bS 유도 방법은, 디블록킹 필터링을 적용하는 단위 블록인 디블록킹 필터링 단위 블록의 경계를 유도하는 단계 및 상기 디블록킹 필터링 단위 블록 내의 bS (boundary Strength) 설정 단위 블록별로 bS를 설정(set)하는 단계를 포함하며, 상기 bS 설정 단계에서는, 상기 bS 설정 단위 블록의 경계로서 상기 디블록킹 필터링 단위 블록의 경계에 해당하는 대상 경계에 대하여 bS 값을 설정할 수 있다.
Patent KR-20200004325-A (KR)
Title: 변형된 마이크로시스틴 및 노둘라린
Inventor: ENKE HEIKE
IPC: C07K7/64
Filed: 2018-05-09
Abstract: 본 발명은 세포독성제인 마이크로시스틴 및 노둘라린을 포함하는 화합물에 관한 것이다.  보다 구체적으로, 본 발명은 표적화 모이어티의 부착을 위한 컨주게이션 화학 (클릭 화학을 포함)에 사용하기 위한 직접적으로 접근가능하거나 변환가능한 앵커 기를 포함하는 하나 이상의 변형된 서브스트레이트를 포함하는 변형된 마이크로시스틴 및/또는 노둘라린 화합물에 관한 것이다.  본 발명은 암 치료 분야에 속한다.  이는 암 치료에 사용하기 위한 독소 분야에 속한다.  변형된 세포독성제는 다양한 질환의 요법에 사용될 수 있다.
Patent KR-20200085678-A (KR)
Title: Motion information prediction method and apparatus for distortion due to projection formation conversion
Inventor: BANG GUN
IPC: H04N19/147
Filed: 2020-01-07
Abstract: Provided are a method for encoding/decoding a video and a device thereof. According to the present invention, the method for decoding the video comprises the steps of: decoding information for motion information prediction of a current block from a bitstream; predicting motion information of the current block based on the information; correcting the motion information of the current block by using the decoded information and the predicted motion information of the current block; and recovering the current block based on the corrected motion information of the current block.
Patent KR-20210089047-A (KR)
Title: Polarizing plate and optical display apparatus comprising the same
Inventor: KIM BONG CHOON
IPC: G02F1/1335
Filed: 2020-01-07
Abstract: A polarizing plate and an optical display device including the same are provided. The polarizing plate includes a polarizer and a protective film formed on at least one surface of the polarizer. A high light transmittance region is formed in at least one part of the polarizer. The high light transmittance region has a depolarization index of 2% or less at a wavelength of 550 nm. An object of the present invention is to provide a polarizing plate having a high light transmittance region capable of improving color and sharpness of an image when a photographing process is performed through the high light transmittance region.
Patent KR-20210089862-A (KR)
Inventor: KIM MIN GYU
IPC: C02F1/461
Filed: 2020-01-09
Abstract: The present invention relates to a portable electrolyzed water generator. The portable electrolyzed water generator, according to an embodiment of the present invention, comprises: a body part including a main body in which water is accommodated and a coupling part formed to be smaller than a diameter of the main body, formed in an upper part of the main body and having a thread on an outer circumferential surface thereof; a salt storage part coupled to the coupling part, accommodating the salt therein, and rotating the salt into the body unit; a discharge part coupled to the salt storage unit and discharging the electrolyzed water sucked through a suction pipe extending into an inner space of the body part to a nozzle when a push button is pushed; and electrolyzed water generating part for electrolyzing the water inside the body part. The electrolyzed water generating part comprises: a first electrode provided in a mesh type and disposed inside the body part; a second electrode provided in a mesh type, disposed inside the body part, and spaced apart from the first electrode by a predetermined distance; and a power supply part coupled to a lower part of the body part which an electric cable electrically connected to the first electrode and the second electrode passes therethrough, and which a battery is installed in. According to the present invention, the portable electrolyzed water generator can be manufactured in a compact type and generate electrolyzed water having sterilizing power from tap water, fresh water, etc. However the portable electrolyzed water generator selectively supplys salt to generate electrolyzed water having superior sterilization power.
Patent KR-20210090023-A (KR)
Title: The detecting system of hidden camera
Inventor: AN HEE CHAN
IPC: G01V8/12
Filed: 2020-01-09
Abstract: The present invention relates to a hidden camera detection system, comprising: a camera detection module configured to be detachably attached to a mobile terminal and irradiated with a first light to a detection area; a mobile terminal which, when the camera detection module irradiates a first light, captures the detection area to obtain a detection area image including a second light which is a reflected light of the first light; and a detection application executed in the mobile terminal when the camera detection module is attached, recognizing the second light by performing image processing on a detection area image, and determining whether a light source exists in the detection area based on the second light. An object of the present invention is to provide the hidden camera detection system capable of simply determining whether a hidden camera is installed.
Patent KR-20210090390-A (KR)
Title: Device for inducing deep sleep
Inventor: LEE CHUN YEONG
IPC: A61M21/02
Filed: 2020-01-10
Abstract: Provided is a device for inducing deep sleep that induces deep sleep by placing head in a space blocked from outside in a more stable and comfortable position during sleep. The device for inducing deep sleep includes a chamber part having an empty cylindrical body, an opening communicating with the internal space formed at one end, and an outer wall surrounding the opening disposed in contact with floor; and a support part fixed to the outer wall inside the chamber part and supporting the head drawn into the opening, wherein the outer wall has at least a portion including the outside of the support part and made of a curved surface convex outwardly to be in contact with the floor in a curved surface.
Patent KR-20210091532-A (KR)
Title: Balanced Seesaw Power Generator
Inventor: KIM TAE JUN
IPC: F03G3/00
Filed: 2020-01-14
Abstract: The present invention relates to a seesaw-type power generation apparatus using a balance weight. The seesaw-type power generation apparatus using a balance weight comprises a power generation apparatus protection housing, a horizontal moving body, a generator motor, a power transfer device, a rotation generation chain, a tension spring, an operating motor, a horizontal moving body reciprocation device, and a balance weight to generate power while vertically operating an asymmetric horizontal moving body. When the apparatus is used, the horizontal moving body having a plurality of generator motors is vertically operated by using the operating motor. The opposite rotating body can be rotated by an increase in lateral moment caused by the generator motors installed on one side to increase the horizontally symmetric weight ratio of the horizontal moving body to one side. When the generator motors are operated by the torque, more energy than the energy required for operation can be produced by the plurality of generator motors. Also, the structure is simple, and production and installation are easy to allow installation even on a small surface area. Specifically, installation and facility increases are possible in accordance with electricity usage even in a city or a residential area.
Patent KR-20200010543-A (KR)
Title: Optical Imaging System
Inventor: BAIK JAE HYUN
IPC: G03B17/12
Filed: 2020-01-20
Abstract: An imaging optical system of the present invention comprises: a first lens having refractive power; a second lens having refractive power; a third lens having refractive power; a fourth lens having refractive power; and a fifth lens having refractive power. Here, the refractive indexes of the first lens, the third lens, and the fifth lens are equal to or more than 1.6, and the total angle of view of the imaging optical system is equal to or more than 120 degrees.
Patent KR-20200012005-A (KR)
Inventor: CHEN NAI CHIA
IPC: H01L21/02
Filed: 2020-01-22
Abstract: An embodiment method comprises the steps of: forming a patterned etch mask on a target layer; and patterning the target layer by using the patterned etch mask as a mask to form a patterned target layer. The method further comprises a step of performing a first cleaning process on the patterned etch mask and the patterned target layer, wherein the first cleaning process includes a first solution. The method additionally comprises a step of performing a second cleaning process to remove the patterned etch mask and form an exposed patterned target layer, wherein the second cleaning process includes a second solution. The method also comprises the steps of: performing a third cleaning process on the exposed patterned target layer; and performing a fourth cleaning process on the exposed patterned target layer, wherein the fourth cleaning process includes the first solution.
Patent KR-20210045279-A (KR)
Title: Switching device based on spin-orbit torque and manufacturing method thereof
Inventor: KIM YOUNG KEUN
IPC: H01L43/02
Filed: 2020-01-31
Abstract: The present invention relates to a switching element based on spin-orbit torque and a manufacturing method thereof. According to an embodiment of the present invention, the switching element based on spin-orbit torque comprises: a spin torque generation layer having a tungsten-vanadium alloy thin film in which a perpendicular magnetic anisotropy (PMA) characteristic is expressed; and a magnetization free layer formed on the spin torque generation layer. Therefore, efficiency of the spin-orbit torque can be increased without loss of PMA energy.
Patent KR-20210098147-A (KR)
Title: Fusion protein comprising anti-tumor-associated antigen antibody, anti-pd-l1 antibody and 4-1bbl and uses thereof
Inventor: SUNG YOUNG CHUL
IPC: C07K16/28
Filed: 2020-01-31
Abstract: The present invention relates to a fusion protein comprising an anti-tumor-associated antigen (TAA) antibody, an anti-PD-L1 antibody and 4-1BBL, and uses thereof. More specifically, the present invention relates to a fusion protein comprising an anti-CEA antibody, an anti-PD-L1 antibody and 4-1BBL, and uses thereof. The fusion protein of the present invention has excellent binding ability between CEA, which is a tumor-associated antigen, and PD-L1, which is an immune checkpoint protein, and can specifically bind to tumor cells expressing CEA and/or PD-L1. In addition, the fusion protein of the present invention can activate T cells without showing toxicity seen in a conventional 4-1BBL therapeutic agent. Thus, the fusion protein of the present invention can be advantageously used to treat cancer diseases.
Patent KR-20210101037-A (KR)
Title: Apparatus for Testing Air Foil Bearings
Inventor: SOLJI RYU
IPC: G01M13/04
Filed: 2020-02-07
Abstract: The present invention relates to a bearing test apparatus capable of evaluating performance of an airfoil bearing by using a commercial turbocharger, comprising: a rotation drive unit which generates a rotary force by a hydraulic pressure of a gas; a bearing test unit on which a test bearing is disposed, and which measures torque of the test bearing while rotating by the rotary force; and a load-applying unit for applying a load to the bearing test unit. The load-applying unit includes: an axial bearing spaced apart from the bearing test unit to apply an axial load to the bearing test unit; a support unit for supporting the axial bearing; and a movement unit for moving the support unit.
Patent KR-20200099098-A (KR)
Inventor: ZINK DANIEL
IPC: H01L51/05
Filed: 2020-02-12
Abstract: The present invention relates to an organic molecule for an optoelectronic device. The organic molecule for an optoelectronic device comprises the structure of chemical formula I. When the molecule according to the present invention is used for an optoelectronic device such as an organic light emitting diode (OLED), efficiency expressed by a discharge full width at half maximum (FWHM) of the device is enhanced, or color purity is increased.
Patent KR-20210103328-A (KR)
Title: press line for semi-automatic press forming
Inventor: KIM BOK MOON
IPC: B30B15/12
Filed: 2020-02-13
Abstract: The present invention relates to a press line, and more specifically, to a press line having a plurality of driving devices, which is applied to press molding of large panels constituting an outer plate of a vehicle body of a vehicle, and binarizes a power device required to drive a plurality of slide devices, thereby reducing installation problems, simplifying the power device, and realizing sequential molding. In order to solve the problems, in the present invention which provides the press line consisting of a plurality of presses, the press line is divided into a pre-process press and a post-process press equipped with a separate power supply device, an intermediate stage is installed between the pre-process press and the post-process press, an installation space for driving/braking related components can be prepared, and each power device can be separated and installed, thereby providing a structure advantageous for increasing the capacity of a process. In addition, by utilizing the secured space such as the intermediate stage, a space is secured to make the size of the pre-process press with large working energy larger than the size of the post-process press so as to increase the accessibility of an operator, such that a process intermediate inspection can be easily performed.
Patent KR-20200102947-A (KR)
Inventor: MAHMOUDIAN POOYA
IPC: F04B35/04
Filed: 2020-02-21
Abstract: A liquid leak detector for a pump is described. The liquid leak detector is mountable on a pump to detect leaked fluid coming from the pump. The leak detector includes a buffer tube positioned on the pump to collect a leaked fluid from the pump and a sensor positioned on the buffer tube to detect the level of leaked fluid in the buffer tube and to generate a signal when the leaked fluid reaches a maximum fluid level. A purge line on the buffer tube removes leaked drive fluid from the buffer tube once the leaked drive fluid reaches a maximum level. Logic connected to the sensor receives the signal from the detector and generates an alarm.
Patent KR-20210107325-A (KR)
Title: Reinforcing member and vehicle comprising the same
Inventor: CHOI JEONG PIL
IPC: C25D13/00
Filed: 2020-02-24
Abstract: A reinforcing member according to an embodiment of the present invention, for a reinforcing member placed in an interior space of a frame unit, which is a frame of a vehicle, to allow a flow of an arbitrary fluid, comprises: a coupling unit coupled with the frame unit; and a shield body unit connected with the coupling unit and placed in the interior space. The shield body unit comprises a shield circumference unit which is a circumference part, and a shield center unit which is connected inside the shield circumference unit. The shield circumference unit may have a guide unit formed by a subsidence of a side of the shield circumference unit, for residual liquid remained in the shield body unit to flow by passing through a circumference of the shield body unit. The present invention reduces a waste of an electrodeposition solution in a vehicle manufacturing process and improves a durability of a vehicle.
Patent KR-20210107366-A (KR)
Title: Thermosetting adhesive composition for encapsulating organic electronic element, encapsulation film for organic electronic element and organic electronic device using the same
Inventor: CHAE SONG A
IPC: C09J7/30
Filed: 2020-02-24
Abstract: Disclosed is a thermosetting adhesive composition for encapsulating organic electronic elements, which comprises, with respect to 100 parts by weight of solid content; 20 to 60 parts by weight of a modified IIR-based rubber including a polymerization unit of isobutylene and isoprene and having a weight average molecular weight is 300,000 to 1,000,000 g/mol, wherein a double bond of the polymerization unit made of an isoprene monomer is modified with a first thermosetting functional group; and 40 to 80 parts by weight of a modified EPDM-based rubber including a polymerization unit of ethylene, propylene, and a diene monomer, and having a weight average molecular weight of 5,000 to 100,000 g/mol, wherein a double bond of the polymerization unit made of the diene monomer is modified with a second thermosetting functional group. According to the present invention, the thermosetting adhesive composition for encapsulating organic electronic elements is easy to control viscosity to facilitate forming a layer having a desired thickness and provides good adhesion and optical properties, thereby being useful as an encapsulation film encapsulating organic electronic elements such as organic light emitting diodes (OLED).
Patent KR-20210111913-A (KR)
Inventor: HWANG JUNG HO
IPC: A01G9/02
Filed: 2020-03-03
Abstract: The present invention comprises: a planting container in which plants are planted; a storage unit that stores size information according to plant types and plant growth; a distance sensor that detects the size of a plant planted in the planting container; a touch sensor that detects whether or not the touch area of the planted plant is touched; and a control unit that determines whether or not the harvest time of the planted plant is reached based on the size of the planted plant detected through the distance sensor, the information depending on whether the touch area of the planted plant detected through the touch sensor is in contact, and the size information according to the growth of the plant stored in the storage unit.
Patent KR-20200106845-A (KR)
Title: Wafer processing method
Inventor: HARADA SHIGENORI
IPC: H01L21/683
Filed: 2020-03-03
Abstract: An object of the present invention is to form a device chip without deteriorating quality. The present invention relates to a wafer processing method for dividing wafers formed in each area of a surface partitioned by a line to be divided into individual device chips. The method, by a plurality of devices, includes: a polyester-based sheet disposition process of positioning the wafer within an opening of a frame having the opening for receiving the wafer, and disposing a polyester-based sheet on a rear side or surface of the wafer and an outer periphery of the frame; an integration process of integrating the wafer and the frame through the polyester-based sheet via thermal compression by heating the polyester-based sheet; a dividing process of irradiating a laser beam, which has a wavelength having transmittance with respect to the wafer, to the wafer along the line to be divided to form a modified layer on the wafer, and dividing the wafer into individual device chips; and a pick-up process of picking up the individual device chips from the polyester-based sheet.