baber/WOPTO huggingface dataset:
Patent KR-20030027638-A (KR)
Title: Control apparatus for OSD
Inventor: KIM SEONG GI
IPC: H04N5/445
Filed: 2001-09-29
Abstract: PURPOSE: An OSD controller is provided to control convergence to prevent flickering of OSD when OSD is displayed on a TV screen without a composite video signal or external input signal. CONSTITUTION: An OSD controller includes a composite video signal reproduction unit(20), a synchronous signal processor(70), a microcomputer(50), and a convergence controller(80). The video signal reproduction unit selectively receives a composite video signal and an external input signal to reproduce a video signal. The synchronous signal processor accepts the video signal from the composite video signal reproduction unit to output horizontal and vertical synchronous signals. The microcomputer outputs an OSD signal in synchronization with the horizontal and vertical synchronous signals. The microcomputer judges whether or not the composite video signal and external input signal are applied to the composite video signal reproduction unit, and outputs a convergence control signal when any signal is not applied to the composite video signal reproduction unit. The convergence controller controls deflection current flowing to a CRT(40) according to the convergence control signal.
Patent KR-20010099488-A (KR)
Title: 메탈 돔 스위치의 생산 방법
Inventor: LEE CHANGE SEOK
IPC: H01H11/00
Filed: 2001-10-08
Abstract: 본 발명은 이동전화단말기용 키 스위치로 일반적으로 사용되고 있는 메탈 돔 스위치(metal dome switch)의 생산 방법에 관한 것으로, (a)동일한 패턴의 스위치 단자를 연속적으로 인쇄한 단자 패턴 인쇄회로기판(PCB)을 형성하는 단계;(b)상기 (a)단계에서 형성된 인쇄회로기판(PCB)의 코팅면에 접착제를 도포하는 단계;(c)상기 (a)단계에서 형성된 인쇄회로기판(PCB)의 메탈 돔 적치 단자 패턴 상에 메탈 돔을 배치하는 단계;(d)상기 (c)단계에서 배치된 메탈 돔을 보호 및 고정하기 위한 메탈 돔 고정용 필름을 인쇄회로 기판상에 부착하는 단계;및 (e)인쇄회로기판상에 형성된 다수의 메탈 돔 스위치를 단위스위치별로 절단하는 단계;를 포함하는 것을 특징으로 한다. 
     본 발명에 의하면, 다수의 메탈 돔 스위치를 일회의 공정으로 대량 생산할 수 있고, 방수 기능 및 방진 기능을 갖을 뿐만 아니라, 두께가 얇은 메탈 돔 스위치를 생산할 수 있다. 특히, 본 발명에 의하면, 메탈 돔 스위치의 두께 및 형상을 키패드 조립시 자동화가 가능한 두께 및 형상으로 제작할 수 있는 장점이 있다.
Patent KR-20030033191-A (KR)
Title: Preform for glass ferrule and fabrication method of glass ferrule thereof
Inventor: HWANG SUN CHEOL
IPC: C03B37/012
Filed: 2001-10-18
Abstract: PURPOSE: A method for manufacturing glass ferrules by using glass preforms is provided, which enables it to produce many kinds of dual hole ferrules having different intervals between holes from one preform. Accordingly, the method saves the time required to change preforms and manufacturing costs. CONSTITUTION: The cylindrical glass preform(10) for manufacturing dual hole ferrules has two holes(20) on the ends of the preform, wherein the two holes are in a symmetrical figure in diameter direction of the preform, and the intervals of two holes vary in length direction of the preform. The two pierced holes are made in one form among the following forms: (i) the two holes slant to the central-axis along the length direction of the preform, and exist in the same plane as that of the central axis; (ii) the two holes slant to the central-axis along the length direction of the preform, and rotate around a point, being the inside or outside of the preform, on the central-axis under 180degree. The dual glass ferrules are manufactured by drawing two holes-formed preforms from the draw-tower and cutting preforms.
Patent KR-20030038941-A (KR)
Title: Method and device for ameliorating a foundation using the powdered body of the ameliorating material, and apparatus for providing powdered body
Inventor: CHIDA SHOHEI
IPC: E02D3/12
Filed: 2001-11-09
Abstract: PURPOSE: A ground improvement method by using a powder improver and a device thereof, and a powder supply apparatus are provided to maintenance convenient, to transfer large amount of improver, and to reduce the size of the apparatus by injecting the solidifying material securely and restricting counter flow of powder with simple structure. CONSTITUTION: An opening part of a switching pipe(2p) of a switching unit is connected to a first discharge port(2a) when a lower injection port(1b) is placed as far from the lowest end as the distance between the lower injection port and an upper injection port(1u) during inserting an improvement rod(1). A solidifying material supply unit(3) injects solidifying powder and compressed air to the lower injection port to insert the improvement rod with rotating. The opening part of the switching pipe is connected to a second discharge port(2b), and the solidifying powder and compressed air are injected to the upper injection port to move up the improvement rod with rotating.
Patent KR-20020042421-A (KR)
Title: Apparatus for dense chip packaging using heat pipes and thermoelectric coolers
Inventor: GHOSHAL UTTAMSHYA MALINDU
IPC: H05K7/20
Filed: 2001-11-16
Abstract: PURPOSE: An apparatus for dense chip package using heat pipes and thermoelectric coolers is provided to minimize a fluid resistance by using a capillary structure based on fractal and structural geometry supplying a maximum capillary force. CONSTITUTION: An apparatus includes an evaporator region(210), a condenser region(225) and a capillary region(220). The evaporator region(210) further includes one or more hot point elements used to transfer heat from a heat source to a transport fluid(260). The transport fluid(260) changes state to a vapor when heat is applied to the transport fluid(260). The vapor travels to the condenser region(225) via vapor channels(235) and is condensed to a fluid once again by transferring heat from the vapor to a heat sink. Then, the condensed fluid is returned to the evaporator region(210) by way of capillary forces and capillaries formed in a capillary structure(245). The apparatus further includes a flexible region that allows the apparatus to be bent around corners and edges.
Patent KR-20030042075-A (KR)
Title: Soccer chess
Inventor: SON SUNG GI
IPC: A63F3/02
Filed: 2001-11-20
Abstract: PURPOSE: A football chess is provided to help understanding of football and allow all the people in the world to enjoy with a single rule by using the terms of football. CONSTITUTION: The football chess is composed of a football chessboard on which 77 hexagons are aligned in nine ranks and in nine files within a square envelope and total 32 football chess pieces consisting of 16 blue pieces and 16 red pieces. The 16 chess pieces includes a goalkeeper piece, five defender pieces, five midfielder pieces and five offender pieces.
Patent KR-20030042661-A (KR)
Title: Apparatus for measuring leakage current
Inventor: ATOJI TOYOTSUGU
IPC: G01R31/02
Filed: 2001-11-23
Abstract: PURPOSE: A leakage current measurement device is provided to perform the measurement without stopping the operation of an electric device, and judges the insulation state of the electric device by measuring a leakage current component by an equivalent earth insulation resistor. CONSTITUTION: A current trans sensor(2) is clamped to an electric line(1) or a ground line of a device to be measured, and detects a leakage current flowing through the electric line or the ground line. A current voltage conversion circuit(3) converts an output signal of the current trans sensor into a voltage signal. A voltage amplification circuit(4) amplifies an output signal of the current voltage conversion circuit. A voltage division amplification circuit(6) is connected to a voltage line of the device, and divides a circuit voltage of the voltage line and also amplifies it. A multiplier circuit(5) multiplies the output of the voltage amplification circuit and an output of the voltage division amplification circuit. A low pass filter(7) removes a high frequency component from an output signal of the multiplier circuit. A leakage current display circuit(8) displays a leakage current signal of the low pass filter. A leakage current comparison judgement circuit(9) judges whether the leakage current signal exceeds or is below a reference value. And a judgement result display circuit(10) displays the judgement result of the leakage current comparison judgement circuit.
Patent KR-20030042849-A (KR)
Title: Scum indraft system of circle settling pond in water disposal plant
Inventor: LEE DONG JU
IPC: C02F1/40
Filed: 2001-11-24
Abstract: PURPOSE: An apparatus for sucking scum of circular settling pond in water treatment plant is provided to greatly reduce operating cost by properly controlling suction of scum collected to one spot by scum skimmer according to collection quantity of scum, thereby more efficiently sucking in scum of the circular settling pond. CONSTITUTION: In scum sucking apparatus of circular settling pond of water treatment plant in which center gauge connected to motor is installed at the central part of the circular settling pond, and scum skimmer and scraper(4) are mounted on upper and lower sides of the center gauge to suck and discharge scum generated on the surface of the water(7) of the circular settling pond through scum inlet installed on an inner circumferential wall of the upper side of the circular settling pond, the apparatus for sucking scum of the circular settling pond in the water treatment plant is characterized in that an adjusting rail(11) is installed on the scraper(4), supporting frames to which supporting shafts are adjustably adhered by an adjusting nut(13) are installed on the inner circumferential wall of the upper side of the adjusting rail(11), a floating body(16) at four corners on front and rear parts of which guide holes are formed is inserted into the supporting shafts in the state that a scum suction hopper(17) is mounted on the central part of the floating body(16), and a wire connected to the lower side of the scum suction hopper(17) is connected to a guide bar(20) adhered to a hinge(19), and a guide roller(21) is fixed to an end part of the guide bar(20) so that the guide roller(21) is contacted with the adjusting rail(11) on the scraper(4).
Patent KR-20030042907-A (KR)
Inventor: LIM SANG SUN
IPC: H01L21/68
Filed: 2001-11-26
Abstract: PURPOSE: A vacuum apparatus for fixing a wafer is provided to absorb stably the wafer regardless of a warpage phenomenon of the wafer by minimizing the physical force applied to the wafer. CONSTITUTION: A fixing table(130) includes an absorbing plate(132) in order to absorb a wafer(110) by using the vacuum. A vacuum forming cover(140) is used for defining a vacuum space(150) from an upper portion of the absorbing plate. The vacuum forming cover has a plurality of holes(120) for injecting the air(152) into the vacuum space. A wafer transferring arm(160) is used for transferring the wafer in order to adhere the wafer on the absorbing plate. The plural holes are formed on predetermined positions of the upper wall corresponding to an edge portion of a wafer adhered on the absorbing plate.
Patent KR-20030048965-A (KR)
Title: connection duct
Inventor: JUNG GU JOUNG
IPC: F16L51/02
Filed: 2001-12-13
Abstract: PURPOSE: An expansion joint pipe is provided to absorb vibration and shock, and to prevent the corrosion of the pipe caused by fluid. CONSTITUTION: Both ends of a corrugated pipe(5) are fit into a connection hole(10) in each flange(1a,1b). A first welding unit(6) is formed at both ends of the corrugated pipe, and fixes the corrugated pipe on the connection hole. A gasket(7) is fixed on the flange by a second welding unit(8). The second welding unit covers a portion of the first welding unit, and prevents the exposure of the connection hole.
Patent KR-20030049946-A (KR)
Title: A method for gathering slag in slag pot
Inventor: KIM HAE WON
IPC: C21C5/28
Filed: 2001-12-17
Abstract: PURPOSE: A method for recovering skull slag in slag pot is provided to carry the skull slag contained in the slag pot after pouring skull slag in the molten state stored in ladle into slag pot and recover the skull slag in the molten state in the slag pot as semi-solidified state or completely solidified state. CONSTITUTION: In a method for recovering skull slag contained in slag pot to improve product quality and minimize mixing of slag with slab during continuous casting operation in steelmaking process ranging from converter refining process of refining molten iron into molten steel to continuous casting process of making molten steel in the liquid state into slab in the solid state, the method comprises the steps of injecting a structure(100) having a disk(52) fabricated to such a size that boundary blocks(53a,53b,53c) arranged so that they are partitioned in a row are inserted to a certain position inside the slag port into the skull slag in the state that skull slag is contained in the slag pot(60) the bottom part of which is formed in a flat shape; completely solidifying the skull slag(19); and lifting the structure(100) so that the skull slag(19) is drawn out from the slag pot(60) to recover skull slag adhered to the boundary blocks(53a,53b,53c).
Patent KR-20030009032-A (KR)
Title: Input/output interface and semiconductor integrated circuit having input/output interface
Inventor: MATSUZAKI YASUROU
IPC: G06F13/42
Filed: 2001-12-19
Abstract: PURPOSE: To reduce power consumption by transmitting a huge amount data with a few number of signal lines in an input output interface that transmits/ receives a signal. CONSTITUTION: The input output interface expresses logical values according to the sequence of timings of transition edges of a plurality of signals respectively transmitted through a plurality of signal lines or expresses logical values according to a time difference between the transition edges of signals transmitted through the signal lines and a transition edges of a reference timing signal. Thus, one signal line can transmits a huge amount of data. Since huge amount of data can be transmitted by one signal transmission, the transfer rate of data can considerably be enhanced. Since a small number of signal lines is enough for the transmission, number of signal input circuits and signal output circuits can be reduced to decrease the power consumption. Further, since a small number of the signal lines is enough for the transmission, the wiring region of the signal lines can be decreased.
Patent KR-20030055390-A (KR)
Title: Magnetic random access memory
Inventor: JUNG HYEOK JE
IPC: G11C11/15
Filed: 2001-12-26
Abstract: PURPOSE: An MRAM(Magnetic Random Access Memory) is provided to be capable of improving integration degree by using a plurality of MTJ(Magnetic Tunnel Junction) cells. CONSTITUTION: A source and drain junction regions(57a,57b) are formed in an active region of a semiconductor substrate(51). A gate oxide layer(53) and a word line(55) are sequentially formed on a channel region. A reference voltage line(59a) is connected to the source junction region(57a). A seed layer(75) is connected to the drain junction region(57b). The first MTJ cell(89a) is formed on the seed layer. The second MTJ cell(89b) is formed on the seed layer located between the first MTJ cell and the seed layer. The first and second write lines(69a,69b) are formed at the lower part of the seed layer. A bit line(87) is connected to the first and second MTJ cells(89a,89b).
Patent KR-20030055595-A (KR)
Title: Manufacturing Method of Large crystalline Diamond Electrode by Microwave Plasma CVD
Inventor: AKIRA FUJISHIMA
IPC: C23C16/27
Filed: 2001-12-27
Abstract: PURPOSE: A manufacturing method of large crystalline pure diamond thin film having large area by using microwave plasma CVD is provided. CONSTITUTION: In a method for forming a diamond thin film(22) on substrate using microwave plasma CVD, the manufacturing method of large crystalline diamond thin film by microwave plasma CVD comprises the process of impressing power ranging from 1,000 to 5,000 W to microwave in the state that substrates(20) are stacked so that the surface of the substrates(20) is maintained to the temperature range of 750 to 1,100 deg.C, wherein the surface of the substrate(20) is preferably maintained to the temperature range of 750 to 1,100 deg.C when forming the diamond thin film(22) by performing microwave plasma CVD treatment in the state that the substrates(20) are stacked, diamond crystal is not grown well in case that temperature of the surface of the substrates(20) is lower than 750 deg.C while growing of the diamond crystal is impossible due to melting of substrate Si in case that temperature of the surface of the substrates(20) is higher than 1,100 deg.C, output of microwave applied when forming the diamond thin film(22) is preferably in the range of 1,000 to 5,000 W, and growing of the diamond crystal is very unstable as formation of hydrogen plasma is not complete in case that output of microwave is less than 1,000 W while apparatus is overloaded due to output of microwave more than required in case that output of microwave exceeds 5,000 W.
Patent KR-20030055796-A (KR)
Title: Method of manufacturing semiconductor device
Inventor: JUN BEOM JIN
IPC: H01L21/306
Filed: 2001-12-27
Abstract: PURPOSE: A method for manufacturing a semiconductor device is provided to be capable of preventing the generation of defects due to remaining of a buffer oxide layer in SAC(Self Aligned Contact) processing. CONSTITUTION: A stacked gate(15) including a gate oxide layer(12), a gate conductive layer(13) and a hard mask(14), is formed on a semiconductor substrate(11). A buffer oxide layer and a nitride layer are sequentially formed on the stacked gate(15) and the substrate(11). An interlayer dielectric is formed on the resultant structure. By selectively etching the interlayer dielectric, the nitride layer and the buffer oxide layer, a buffer oxide pattern(16) and a nitride spacer(17) are formed. At this time, the etching selectivity of the nitride layer and the oxide layer is 1: 1.
Patent KR-20010071007-A (KR)
Title: 유압 튜브 성형 다이 및 그 제조 방법
IPC: B21D51/16
Filed: 1999-07-21
Abstract: 내부를 갖는 블랭크 튜브로부터 튜브형 피팅을 성형하기 위한 장치가 제공된다.  장치는 상기 블랭크 튜브를 수용할 수 있는 제1 공동을 가진다.  좌측 다이 판은 제1 공동과 정렬된 제2 공동을 가진다.  우측 다이 판은 제1 안내 포스트를 갖고 좌측 다이 판은 제2 안내 포스트를 가진다.  제1 고동은 성형 공동를 형성하도록 제2 공동과 정렬된다.  하부 다이 판은 우측 다이 판과 좌측 다이 판을 지지할 수 있다.  하부 다이 판은 유체 라인을 수용할 수 있는 포트를 포함한다.  상부 다이 판은 제1 위치와 제2 위치 사이에 이동 가능하다.  상부 다이 판은 제1 및 제2 안내 포스트를 수용하고 상부 다이 판을 우측 다이 판 및 좌측 다이 판과 정렬시키기 위한 안내 구멍을 가진다.  장치는 유체 라인을 통해 블랭크 튜브의 내부로 유체를 연통시키기 위한 공급 수단을 추가로 포함한다.  블랭크 튜브 내 유체에 압력을 가함으로써 튜브가 성형 공동과 일치되도록 튜브를 확장시키기 위해 플런저가 사용된다.
Patent KR-20010079570-A (KR)
Title: Molecular sieves and processes for their manufacture
Inventor: VERDUIJN JOHANNES P
IPC: C01B37/00
Filed: 1999-07-28
Abstract: Crystalline molecular sieve particles of a size suitable for use as seeds in molecular sieve manufacture are obtained by washing larger particle sized product to dislodge smaller particles from the larger.
Patent KR-20010089520-A (KR)
IPC: G11B27/28
Filed: 2000-09-26
Abstract: 비디오 인덱싱 시스템은 비디오 테이프와 같은 순차 액세스 저장 매체상에 비디오 데이터의 계층적으로 순서화된 구조체(64)를 제공한다.  인덱스 구조체(64)는 비디오 데이터의 상이한 식별자들(예를 들어, 66, 68, 70, 72)을 함께 그룹화하고 대응하는 부분들의 식별자들간에 계층적 레벨들(74, 86, 104)을 설정한다.  인덱스 구조체(64)의 배치는 개인 사용자의 요구에 따라 변할 수 있다.  본 발명의 배치는 아날로그 비디오 테이프들의 내용을 검토하는데 큰 유연성을 제공하며, 예를 들어, 검토를 위해 비디오 데이터의 부분들을 용이하게 선택할 수 있도록 사용자가 기술 정보를 부가할 수 있도록 한다.
Patent KR-20020018181-A (KR)
Title: 촉각력 발생장치
IPC: A63F13/24
Filed: 1999-12-27
Abstract: 부품의 수를 줄이고 손가락 끝에 전달되는 충분하고 직접적인 촉각감각을 제공하기 위해, 게임기계 메인유닛에 정보를 입력하기 위한 입력유닛의 결정된 위치로부터 이동될 수 있는 입력섹션내에서 입력유닛을 상기 소정의 위치로 되돌리기 위한 촉각력을 발생시키는 촉각력 발생장치(50)가 제공된다.  상기 촉각력 발생장치(50)는 제어패드(48)내에서 게임정보와 무관한 촉각력을 발생시키는 코일 스프링(60)과, 상기 제어패드(48)내에서 게임정보에 상응하는 촉각력을 발생시키는 영구자석(63) 및 전자석(64)으로 구비된다.
Patent KR-20010093334-A (KR)
Title: Endpointing of speech in a noisy signal
IPC: G10L11/02
Filed: 2000-02-08
Abstract: An apparatus for accurate endpointing of speech in the presence of noise includes a processor and a software module. The processor executes the instructions of the software module to compare an utterance with a first signal-to-noise-ratio (SNR) threshold value to determine a first starting point and a first ending point of the utterance. The processor then compares with a second SNR threshold value a part of the utterance that predates the first starting point to determine a second starting point of the utterance. The processor also then compares with the second SNR threshold value a part of the utterance that postdates the first ending point to determine a second ending point of the utterance. The first and second SNR threshold values are recalculated periodically to reflect changing SNR conditions. The first SNR threshold value advantageously exceeds the second SNR threshold value.
Patent KR-20010102370-A (KR)
Title: 리포좀 제제
IPC: A61K31/407
Filed: 2000-03-10
Abstract: 즉각적인 작용에서 우수하여 뇌경색과 같은 긴급 상황에서 사용될 수 있는 피페콜산 유도체-함유 리포좀 제제.  제제는 피페콜산 유도체 또는 그의 약제학적으로 허용되는 염을 함유함을 특징으로 하며, 이는 안정화제로서 콜레스테롤에 의존하지 않고, 활성 성분으로서 명세서에 기술된 성분 및 리포좀 형성 지질의 주요 성분으로서 레시틴을 포함한다.
Patent KR-20010110728-A (KR)
IPC: H03F1/52
Filed: 2000-01-13
Abstract: 낮은 복합 트리플 비트와 교차 변조 왜곡을 가지는 유용한 진폭의 출력 신호 생성을 위해 단일 PC 보드 상에서 RF 증폭기에 인-라인 왜곡 발생기가 연결된다. 왜곡 회로가 위치하는 PC 보드의 섹션 하의 후면이 제거되고, 후면의 제거된 일부 아래 히트씽크 부분이 또한 제거된다. 이는 RF 증폭기의 성능을 저하시킬 수 있는 와류 커패시턴스를 제거하여, 왜곡 회로를 RF 증폭기에 대해 투명하게 한다. 더욱이, 선-왜곡 회로의 배치는 관련 RF 증폭기에 대한 어떤 부정적 동작 특성을 포함하지 않으면서 회로의 성능을 향상시키도록 특별히 고안되었다.
Patent KR-20010112445-A (KR)
Title: 조향 휠 장착식 에어백 모듈용 커버
IPC: B62D1/04
Filed: 2000-02-11
Abstract: 조향 휠 장착식 에어백 모듈(14)용 커버(20)는 접지면을 형성하는 제 1 전도층(30)과, 제 1 전도층의 일 측면에 접촉시키기 위한 제 2 전도층에 의해 형성되는 경적 스위치(26)를 구비한다.  상기 커버는 제 3 전도층(32) 및 제 4 전도층(34)에 의해 형성되는 근접 센서(24)를 더 포함한다.  제 3 및 제 4 전도층(32, 34)은 제 1 전도층과 전기적으로 결합되며, 근접 센서(24)는 구동 회로(48)로부터 수신된 신호에 반응하여 전계(50)를 발생시킨다.
Patent KR-20020003239-A (KR)
IPC: B05B5/025
Filed: 2000-04-20
Abstract: The invention provides an aerosol delivery method and system for producing a charged electrohydrodynamic (EHD) aerosol, discharging the aerosol and moving the discharged aerosol in a desired direction without substantial wetting of the device. The delivery system may include a spray nozzle for dispensing the fluid to be aerosolized and negatively charging the aerosol droplets, a discharge electrode generally downstream of the spray nozzle for generating a positive ion stream which intercepts and electrically neutralizes the negative aerosol droplets while also imparting a desired movement on the aerosol in a direction generally away from the discharge electrode and a reference electrode between the spray nozzle and the discharge electrode for modifying the electric field between the spray nozzle and the discharge electrode.
Patent KR-20030060266-A (KR)
Inventor: JUNG RAE YUN
IPC: C01G3/02
Filed: 2002-01-08
Abstract: PURPOSE: Provided is a preparation method of cuprous oxide(Cu2O) having high purity, long time storage and low production cost by reacting copper oxide with sulfur powder at high temperature unlike conventional electrolysis of copper. CONSTITUTION: The Cu2O powder with high purity(more than 99.5%) is prepared by mixing CuO(less than 100mesh) with S or CuS powder as a reductant in a weight ratio of 9:1- 10:1 and reacting at 500-800deg.C, which is expressed by the formula, 4CuO + S -> 2Cu2O + SO2, or 4CuO +CuS -> 2Cu2O +Cu +SO2, Cu +O -> Cu2O.
Patent KR-20030063586-A (KR)
Title: Refining of gas for manufacturing semiconductor
Inventor: CHOI GYEONG HUN
IPC: H01L21/02
Filed: 2002-01-23
Abstract: PURPOSE: An apparatus for refining process gas of fabricating a semiconductor is provided to purify the process gas and make the process have ultra high purity by eliminating various impurities like moisture, carbon dioxide, carbon monoxide, hydrogen and methane that are contained in the air. CONSTITUTION: The first pipe(12) is filled with molecular sieve. The second pipes(18) in which alumina balls(24) are installed are formed at both sides of a porous plate(16,17) at both side ends of the first pipe. The third pipes(20) are formed at both sides of filters(26,27) at both side ends of the second pipes. An inflow port(30) of the process gas and an exhaust port(32) of the purified process gas are installed in the intermediate part of the ends of the third pipes.