baber/WOPTO huggingface dataset:
Patent FR-2504266-B1 (FR)
IPC: G01M3/28
Filed: 1981-04-15
Granted: 1984-05-04
Abstract: An apparatus and method for checking the operation of a fluid flow and/or pressure control member with a given and constant flow, wherein the control member is disposed at the outlet of a main fluid circuit connected to a source of pressurized fluid and a bypass circuit at its inlet and having a fluid bleed circuit with an isolation device at its outlet upstream from the control member. The main circuit includes a flow meter, a pressure meter, a progressive volume variation member to enable the pressure in the main circuit to be varied gradually and without fluctuations, and isolation devices for isolating the volume variation member from the control member and for isolating the inlet of the main circuit from the fluid source and the bypass circuit. Electrical comparators, triggered at different times in response to the actuation of different ones of the components of the apparatus are employed for comparing the pressure in the main circuit with reference pressures for checking the operation of the control device.
Patent FR-2527760-B1 (FR)
IPC: F28D13/00
Filed: 1982-05-26
Granted: 1985-08-30
Abstract: Method and apparatus for regulating the heat transfer coefficient between a granular material and an exchange surface inside a heat exchanger in which a descending flow of a charge of material is arranged in the form of a mobile bed in contact with an elongated exchange member extending between lower and upper levels of the tank of the exchanger. The latter is provided with injection means for a gas into the charge of material. The flow conditions of the gas passing through the charge from below upwards are regulated so that the ascending flow speed is initially less than, at the base of the tank, the critical fluidization speed and then increases gradually to reach such critical speed at an adjustable level comprised between the lower and upper levels of the exchange member. The invention is especially applicable to heat exchangers used for cooling a granular material and/or for the heating of a heat transfer fluid.
Patent FR-2538410-B1 (FR)
Inventor: LIENAUX ERIC
IPC: C22B9/05
Filed: 1982-12-24
Granted: 1988-04-29
Abstract: 1. A refractory tuyere holding element for a vessel for treating a liquid metal, of the type which comprises a refractory mass surrounding an injection tuyere, said refractory mass being provided with passages connected to a source of pressurized auxiliary protection fluid which opens into the liquid metal bath, characterized in that it consists of a plurality of subelements made of compact refractory material (2, 3, 4, 5) separated by narrow slits performing the role of said passages and connected to a source (16) of liquid or gaseous carbonaceous agent.
Patent FR-2562459-B1 (FR)
IPC: B25J18/00
Filed: 1984-02-07
Granted: 1986-05-23
Abstract: 1. Handling arm made up of several components connected in series, a component with an axle (2) and a first connecting means (5, 6) which links it to a first adjacent component (3) with a possible rotation round a first revolving axle joined to the above-mentioned axle of the component and a second connecting means (4) which links it to a second adjacent component (1) with possible rotation round a second revolving axle which cuts obliquely the above-mentioned axle of the component, means have been set up to rotate the above-mentioned component independently to the first and second adjacent component and to stop it when requested. The main features are that the above-mentioned means to rotate the above-mentioned component round the first and second adjacent means have a shaft (12, 22) which is run by an engine means and can be linked when requested by a clutch (24) to the first and/or second above-mentioned adjacent means, furthermore a brake is set up to prevent the relative rotation of the above-mentioned means round each adjacent means.
Patent FR-2595701-B1 (FR)
Inventor: BISAGNI EMILE
IPC: A61K31/435
Filed: 1986-03-17
Granted: 1988-07-01
Abstract: The present invention concerns derivatives of 5H-pyrido[4,3-b]-indole with the following general formula: in which n represents a whole number from 2 to 4, R1 represents hydrogen or a lower alkyl group; R2 represents hydrogen, a hydroxy group or a lower alkyloxy group; R3 and R4 represents hydrogen, a lower alkyl group or hydroxyalkyl group, R5 can be identical or different and represents hydrogen, a hydroxy group or a lower alkyl group, as well as the tautomeric forms and the addition salts with pharmaceutically acceptable mineral or organic acids. The invention also concerns their preparation process, and their use as medicaments.
Patent FR-2601246-B1 (FR)
Inventor: STREICHENBERGER G
IPC: A61K31/485
Filed: 1986-07-11
Granted: 1990-01-05
Abstract: The invention relates to new antitussive pharmaceutical compositions based on dextromethorphan or one of its salts. It relates more specifically to compositions containing as active principle dextromethorphan or one of its salts dissolved or suspended in an aqueous solvent suited to permucosal, and in particular pernasal, administration. The invention also relates to the preparation of the above mentioned pharmaceutical compositions.
Patent FR-2603891-B1 (FR)
Inventor: LOTTIAU MICHEL
IPC: C08J5/04
Filed: 1986-09-17
Granted: 1990-12-14
Abstract: Process in which the fibres are impregnated with a polyamide before a pultrusion, characterised in that the fibres impregnated with a polyamide oligomer or prepolymer are treated while heated to cause the elongation of the polymer chain before the calibration by pultrusion.
Patent FR-2611339-B1 (FR)
Inventor: GUTERMAN CHARLES
IPC: H05C1/04
Filed: 1987-02-19
Granted: 1990-05-04
Abstract: Device for supplying an electrically conducting cable, or equivalent, with electrical power. The device comprises, in addition to a transformer (2) provided with a primary (12) and a secondary (22) to which is connected the joining end of the cable (10), a diode (14) mounted in series with the abovementioned secondary (22), as well as preferably, a discharger (24) mounted in parallel across the terminals of the diode. Other components of this diode/discharger type can be mounted in the circuit of the device so as to regulate and protect its operation. The invention applies in particular to the electrical powering of a fence.
Patent FR-2637370-B1 (FR)
Inventor: WEYNANT RENEE-PAULE GIRONES EP
IPC: G01K5/48
Filed: 1988-10-04
Granted: 1991-04-12
Abstract: This device comprises a casing (2) of synthetic material containing a motor element (7) made of at least one alloy which memorizes its shape and having associated with it a movement transmission element consisting of a piston (9) and a rod (10) and acting on at least one indicator element (4) irreversibly recording each overstepping of a predetermined temperature, the casing being provided with transparent windows permitting the state of the indicator element or elements to be viewed. Application to the monitoring of the overstepping of a temperature.
Patent FR-2653145-B1 (FR)
Inventor: JEAN-LOUIS HAMEAU
IPC: E03C1/04
Filed: 1989-10-13
Granted: 1992-01-10
Abstract: The wall-module consists of a case formed by a sheathing cover (1) and by a plate (2). This case contains a mixer tap (3) and a shower spray head (4) which is connected to the mixer tap by a rigid pipe (11). The case also contains at least one hose (12) permitting connection to a water inlet. Application: shower device for an individual unit or for a multiple-unit installation.
Patent FR-2667828-B1 (FR)
Inventor: SMADJA JEAN-CLAUDE
IPC: B60J10/79
Filed: 1990-10-15
Granted: 1995-01-20
Abstract: Sealing joint for a sliding window (5) in a vehicle, comprising an element (1) for attachment on the groove (2) of the bodywork and a sealing element (3) consisting of an internal part (3a) containing an insert (12) and an external part (3b), characterised in that said external part (3b) comprises a deformable tubular member (6) extended by a T-sectioned member (7) which is provided with a lip (8, 9, 10) at the end of each of its arms and with an internal insert (11) and which tilts under the action of the window about an axis coinciding with a generatrix of the outer wall of said tubular member (6) situated between the two inserts (11, 12) in order to trap the top edge of the window between said internal (3a) and external (3b) parts.
Patent FR-2680708-B1 (FR)
Title: Systeme de montage de toiles de criblage flexible a suspension et tension automatique.
Inventor: SZILVASI PETER
IPC: B07B1/48
Filed: 1991-08-26
Granted: 1993-12-31
Abstract: Mon invention concerne la conception et la réalisation, pour cribles ou machines à secousses, d'un système de montage de toiles de criblage ou d'autres, type flexible à suspension et tension automatique. Le but de mon invention est de réduire le temps nécessaire et la fatigue occasionnée pour le changement des toiles dans les cribles ou machines à secousses, d'effectuer le changement sans, ou avec un minimum d'intervention à l'intérieur du crible ou machine à secousses. De même que d'obtenir un système selon lequel le profilé tendeur, servant pour la prise et la tension de la toile, soit maintenu dans une position suspendue, pivotante et définitive afin de permettre le glissement libre et simple de la toile à l'intérieur du crible et de la tendre de l'extérieur. Mon invention évite également le plaquage du crochet de tension sur le cadre du crible ou machine à secousses, résultant le pivotement libre du profilé tendeur et le rattrapage automatique de l'allongement de la toile.
Patent FR-2705193-B1 (FR)
Inventor: VAN BLOKLAND PETRUS JOHANNES M
IPC: A01K5/00
Filed: 1994-05-11
Granted: 1996-10-31
Abstract: The present invention provides a device for placing food (K) within the reach of one or more animals, comprising: a baffle-like element (2,33) against which food is deposited; and moving means (6,7,11,37,38) for moving the baffle-like element (2,33) to the feeding place (1,42). one or more guiding elements (12,41) which extend on or just above the floor, for guiding the baffle-like element (2,33) along the floor (B) upon movement by the moving means (6,7,11,37,38). With a device according to the present invention, only small adjustments need to be made to existing animal sheds. The arrangement of the shed can remain unaltered.
Patent FR-2720190-B1 (FR)
Inventor: DE GIVRY JACQUES
IPC: H01L23/538
Filed: 1994-05-20
Granted: 1996-08-02
Abstract: The chip is fixed to a substrate by its lower face. At least one wire-bonding adaptor in the form of a board is used, the upper face of which has first bonding pads along at least one first edge and second bonding pads along at least one second edge, and including electrical connections between the first and second bonding pads. The wire-bonding adaptor is adhesively bonded by its lower face to the upper face of the chip so that the said first edge is adjacent to a row of output pads located elsewhere than on the periphery of the upper face of the chip and so that the said second edge is adjacent to the periphery of the chip. Bonding wires are bonded, on the one hand, between the output pads of the said row and the first bonding pads and, on the other hand, between the second bonding pads and conducting pads on the substrate.
Patent FR-2723369-B1 (FR)
Inventor: HECKMANN BERTRAND
IPC: A61K31/415
Filed: 1994-08-02
Granted: 1996-09-13
Abstract: PCT No. PCT/FR95/01033 Sec. 371 Date Jan. 31, 1997 Sec. 102(e) Date Jan. 31, 1997 PCT Filed Aug. 1, 1995 PCT Pub. No. WO96/04275 PCT Pub. Date Feb. 15, 1996The invention relates to the products of formula (I): (I) in which: R1=represents hydrogen, aryl, arylcarbonyl, arylthio, alkylcarbonyl, R2, R3 represent in particular halogen, mercapto, acyl, carboxy, nitro, cyano, amino, carbamoyl, R4, -OR4 with R4 representing in particular hydrogen, alkyl, alkenyl, alkynyl, acyl, amino, -(CH2)m1-S(O)m2-X-R10 with m1=0 to 4, m2=0 to 2, X represents a single bond or -NH-, -NH-CO-, -NH-CO-NH-, and R10 represents alkyl, alkenyl or aryl, and Y represents optionally substituted aryl, these products being in all isomer forms and salts, their use as medicaments.
Patent FR-2736062-B1 (FR)
Inventor: HUGUENIN DENIS
IPC: C09K11/81
Filed: 1995-06-28
Granted: 1997-09-19
Abstract: The use of a rare earth (Tb, Pr, Eu or Ce) doped yttrium, lanthanum, gadolinium or lutetium phosphate-based cpd., as a phosphor in plasma systems, is new. Pref. the phosphate is selected from LnPO4, LnP3O9 and LnP5O14, where Ln = Y, Gd, Lu or esp. La.
Patent FR-2751960-B1 (FR)
Inventor: SAVINA JEAN PIERRE
IPC: C12F3/10
Filed: 1996-08-01
Granted: 1998-10-30
Abstract: A new process for the extraction of 2-phenyl ethanol from distillation residues obtained during alcohol production by fermentation.
Patent FR-2755640-B1 (FR)
IPC: B21D5/06
Filed: 1996-11-12
Granted: 1999-01-29
Abstract: The corrugating machine comprises a series of corrugating bars (6) fixed to a driven endless chain (5), and a series of supporting bars (13) for the material (10) being corrugated. The corrugating bars are able to move relative to the endless chain, their movements being perpendicular to the plane of the supporting bars. The supporting bars have additional bars beneath them on a second endless chain to hold them up while a pressure is applied by the corrugating bars and acting at the same time as drying elements.
Patent FR-2758501-B1 (FR)
Inventor: METAIS DERRY
IPC: B60K35/00
Filed: 1997-01-17
Granted: 1999-02-26
Abstract: An instrument panel, especially for cars, contains at least indicating devices for a parameter to be observed, which "are assigned", components for displaying these parameters, containing reference marks applied to a carrier (7) by serigraphy, lighting elements (8) for the reference marks, a housing (5) to accommodate these lighting elements plus carrier elements (10) for conductor strips and electronic components (12).  The conductor strips are put on to the components for display purposes. At least one conductor strip is mounted on the light housing on the back side. The serigraphy carrier carries at least one conductor strip. The reference marks are applied to the side of the carrier and the conductor strip(s) on the other side.
Patent FR-2778188-B1 (FR)
Inventor: HAUSER JEAN MICHEL
IPC: C22C38/42
Filed: 1998-04-29
Granted: 2000-06-02
Abstract: A drawn steel wire is produced by drawing an austenitic stainless steel of specified composition to produce a high tensile fracture stress without excessive martensite formation. A drawn steel wire is produced from a greater than 5 mm diameter wire-rod or a pre-drawn wire of a steel of composition (in wt.%) 0.005-0.050 C, 0.005-0.050 N, 0.1-2 Si, 0.1-5 Mn, 5-12 Ni, 10-20 Cr, 0.01-4 Cu, 0.01-3 Mo, 0.0001-0.030 S, 0.005-0.10 P, less than 0.5 each (less than 1 total) impurities and balance Fe, the sum of C% + N% being ≤ 60 x 10<-3> and the JM value being -55 to -30 exclusive, where JM = 551 - 462 x (C% + N%) - 9.2 x Si% - 20 x Mn% - 13.7 x Cr% - 29 x (Ni% + Cu%) - 18.5 x Mo%. The process comprises (a) initial drawing with a cumulative reduction epsilon  of 2-4 exclusive at below 600 degrees C without intermediate anneals to obtain a 0.7-2 mm diameter wire; (b) intermediate annealing at above 700 degrees C; (c) optional conditioning; and (d) final drawing with a cumulative reduction  epsilon  of 3-4.5 exclusive at below 600 degrees C without intermediate anneals to obtain a 0.1-0.4 mm diameter wire. An Independent claim is also included for a steel wire obtained by the above process, the wire optionally being coated with copper, brass or zinc and diffusion treated prior to the final drawing stage.
Patent FR-2779517-B1 (FR)
Inventor: GUERN YVES
IPC: G01B11/24
Filed: 1998-06-05
Granted: 2000-08-18
Abstract: A method and a device for opto-electrically acquiring the shape of a surface by illuminating the surface (S) with light beams (10) having different wavelengths and which converge at different points on the axial illumination direction (Y) in the vicinity of the surface (S), by spectral analysis of the light reflected or backscattered by the surface (S) in the direction (Y) and by determining distances of points on the surface (S) relative to a reference plane (X, Y) from the wavelength and/or the spectral widths of the light analyzed.
Patent FR-2793168-B1 (FR)
Inventor: FONTANILLE DANIEL
IPC: B02C17/18
Filed: 1999-05-07
Granted: 2001-06-22
Abstract: The ball mill is of the type including:a rotary drum (11, 12, 13) having a horizontal axis (XX') and each end of which is supported by a journal (14, 15) which terminates it and through which passes an axial tube (41) around which it delimits an annular duct (35), a vertical pipe (6) discharging in the vicinity of the journal at the level of a guide member (31) for directing material to be pulverized from the pipe towards the drum, and an outlet duct (36) communicating with the annular duct for ejecting from the drum the mixture consisting of the gas and the pulverized material. Each journal contains a rigid helicoidal Archimedes screw structure (32) fixed to it and turning with it about the tube, when the drum rotates, which tube is a rigid immobile gas injector tube.
Patent FR-2798379-B1 (FR)
Inventor: STEPHAN OLIVIER
IPC: C08G61/10
Filed: 1999-09-15
Granted: 2003-09-05
Abstract: The invention concerns a monomer of general formula A-(Q-S)p wherein: A=an aromatic or heteroaromatic ring; Q=a carbonaceous or siliceous divalent radical, respectively corresponding to general formulae: (CR<1>R<2>)n wherein: R<1>, R<2>=H, alkyl, alkenyl comprising between 1 to 4 carbon atoms and n ranges between 4 and 24; and [O-Si(R<1>R<2>)]n wherein R<1>, R<2>=H, alkyl, alkenyl comprising between 1 and 4 carbon atoms and n ranges between 3 and 24; S=a solvating segment consisting of at least an aliphatic chain comprising at least a polar heteroatom. 1<=p<=6. The invention also concerns the polymer (homopolymer or copolymer) incorporating said monomer, and their use in organic electroluminescent devices.
Patent FR-2800349-B1 (FR)
Inventor: MARCHAND DENIS
IPC: B63B5/16
Filed: 1999-10-27
Granted: 2002-01-18
Abstract: The present invention relates to a liquefied gas storage barge in the form of a concrete floating structure. The barge of the invention is essentially constituted by a floating structure (1) of reinforced and prestressed concrete containing tanks (2) for liquefied gas. Said tanks (2) are cylindrical tanks each having a cross-section perpendicular to its longitudinal axes that comprises a preferably circular curved portion (3) corresponding to the bottom of said tank, said portion being preferably a bottom half-circumference resting directly on the concrete bottom of the barge, which barge bottom is in the form of adjacent part-cylindrical troughs (3), each part-cylindrical trough having the same preferably circular, partially curved section in register with the bottom of each tank.
Patent HU-223934-B1 (HU)
Title: Hammer-block element attachment in mounting track
Inventor: SCHULTE HELMUT
IPC: F16B37/04
Filed: 2001-09-11
Abstract: The hammer head (22) is inserted in the assembly rail and then a clip spring element (30) exerts clamping force on the rail and the hammer head element is fixed immovable by a tension element (36) which has a hollowed area (40) on the side facing the hammer head so that the clip spring element fits in the hollow when the tension element is clamped against the rail. The hammer head element has a hammer head nut (46). The tension element can have a perforated disc.
Patent HU-224163-B1 (HU)
Inventor: GORONSZY MERVYN CHARLES
IPC: C02F3/00
Filed: 1996-06-21
Abstract: A találmány tárgya eljárás hulladék anyag kezelésére egyetleneleveniszapban levő mikroorganizmusok anyagcsere- aktivitásánakszabályozása útján változtatható térfogattal üzemeltetett reaktorban ahulladék anyagból a szerves szén, nitrogén és foszfort tartalmazóösszetevők eltávolításához, amely szabályozást szakaszos levegőztetésiciklusokkal és kezelt effluens szakaszos dekantálásával kombináltszabályozott levegőztetéssel hajtják végre a légkör felé nyitottreaktorban, amely reaktornak levegőztetés nélküli első reakcióstérfogatú első tartománya és az első reakciós tartománytól részlegesenelválasztott és hozzá sorosan csatlakozó második vagy utolsótartománya van, amelynek ciklikusan levegőztetett reakciós térfogataés szabályoztatott levegőztetés útján oldott oxigént bejuttatószerkezete van, és mindkét tartománynak közös legnagyobb felsővízszintje van, amely eljárás során: – a hulladék anyagot areaktorba bocsátják, – a második vagy utolsó reaktorzónatartalmának legalább egy részét az első reaktorzónába (3) juttatják abeérkező kezeletlen hulladék anyaggal való összekeveréshez ésreagáltatáshoz, és az első zóna tartalmát a második vagy utolsótartományba áramoltatják, és a továbbítást akkor hajtják végre, amikora második vagy utolsó tartományt levegőztetik, és – a hulladékanyagnak az első tartományba történő beáramlását megszakítják,miközben felülúszó réteg képződik, és a kezelt effluenst a másodikvagy utolsó tartományból eltávolítják. Az eljárás során figyelik abiomassza oldottoxigén-koncentrációját, – figyelik a biomasszakoncentrációját a második vagy utolsó tartományban, és –figyelik a második vagy utolsó tartományban az iszaptakaró szintjét,mikor is a biomasszában az oldott oxigén koncentrációját a másodikvagy utolsó tartományban, vagy egy olyan csőben levő helyen figyelik,amelyen át a biomasszát innen eltávolítják, és meghatározzák az oldottoxigén felhasználásának sebességét, az effluens eltávolítási lépésénekbefejezése után levegőztetési lépést végeznek, miközben a második vagyutolsó tartományba hulladék anyagot juttatnak be, és az oldott oxigénkoncentrációjának értékét 3 mg/l értéknél kisebbre szabályozzák,miközben fenntartják az egyidejű nitrifikációt és denitrifikációt, ésegy levegőztetési lépés végénél meghatározzák a második vagy utolsótartományban levő biomassza oldottoxigén- felhasználási sebességét, ésezt összehasonlítják azzal a lehetséges oxigénfelhasználásisebességgel, amelyet az aktív iszapnak fölös oldható hordozóval mértoxigénfelvétele útján határoztak meg, és ezek alapján azoxigénfelhasználási sebességet a lehetséges oxigénfelhasználásisebességnél kisebb kritikus lé
Patent JP-3059430-B1 (JP)
Title: 歯科矯正装置
IPC: A61C7/20
Filed: 1999-01-28
Granted: 2000-07-04
Abstract: 【要約】
【課題】  歯科矯正装置において、矯正用のアーチワイ ヤの装着作業を簡素化して、作業中の患者の肉体的負担 を軽くする。
【解決手段】  ワイヤ部材１と固定部材２からなり、ワ イヤ部材がアーチワイヤ１ａにおける歯との連結固定箇 所と対応する各位置に係止部１ｂを固着してなり、歯に 固定される固定部材２に係止部の装着手段（装着溝２ ２）を設けた。
Patent JP-3046591-B1 (JP)
Title: 介護用炬燵及び介護用座椅子
IPC: A47C3/16
Filed: 1999-02-04
Granted: 2000-05-29
Abstract: 【要約】
【課題】  高齢者等の立ち上がり動作の補助を簡易に実 現することのできる介護用座椅子及び介護用炬燵を提供 することである。
【解決手段】  介護用座椅子に着座した利用者が、リモ コンスイッチのボタンを押下すると、所定の制御信号が コンプレッサ１７に送信される。制御信号を受信する と、コンプレッサ１７は、着座クッション１６に所定の 流量で空気を送り込む。空気が送り込まれると、着座ク ッション１６は、ふいご状に膨張する。着座クッション １６が、ふいご状に膨張すると、利用者は、前傾姿勢の まま、徐々に腰が持ち上げられる。この際、利用者の膝 上には十分な空間があるため、膝等がぶつかることがな い。利用者の腰が所定の高さまで持ち上げられると、利 用者は、ハンドグリップ２４を掴みながら、前方に自己 の体重を移動しつつ、膝を伸ばすことにより、容易に立 ち上がることができる。
Patent JP-2871666-B1 (JP)
Title: ラインフィルタの製造方法
IPC: H01F41/00
Filed: 1998-01-27
Granted: 1999-03-17
Abstract: 【要約】
【課題】  コアをボビンの巻芯穴に効率よくはめ込むこ とが可能で、生産性の高いラインフィルタの製造方法を 提供する。
【解決手段】  ボビン２の両端側の穴（巻芯穴）３ａ， ３ｂに、一対のコア４ａ，４ｂがはめ込まれた構造を有 するラインフィルタを製造する場合に、ボビン２の一端 側の巻芯穴３ａから巻芯穴３の内部を真空吸引すること により、一方のコア４ａを他端側の巻芯穴３ｂにはめ込 むとともに、ボビン２の他端側の巻芯穴３ｂとそこには め込まれた一方のコア４ａの隙間からボビン２の巻芯穴 ３内を真空吸引することにより、他方のコア４ｂをボビ ン２の一端側の巻芯穴３ａにはめ込む。
Patent JP-3028959-B1 (JP)
Title: 半導体集積回路装置のキャパシタ構造およびその製造方法
IPC: H01L21/8242
Filed: 1999-02-17
Granted: 2000-04-04
Abstract: 【要約】
【課題】  スタックキャパシタの下部電極がショートし ないキャパシタ構造を提供する。
【解決手段】  半導体基板上の所定領域を露出させるコ ンタクトホール３を有する絶縁膜パターンを形成するス テップと、絶縁膜パターンの所定領域上にコンタクトホ ール３を通して露出された半導体基板と接続されるスタ ックキャパシタ下部電極４を形成するステップと、スタ ックキャパシタ下部電極４上に絶縁膜を形成しエッチバ ックするステップと、スタックキャパシタ下部電極４の 周りに絶縁膜よりなるサイドウォール５を形成するステ ップと、スタックキャパシタ下部電極４の上面にのみＨ ＳＧ−Ｓｉ６にするステップとを含み、この方法により 形成された半導体集積回路装置のキャパシタ構造は、上 面のみＨＳＧ−Ｓｉ化されたスタックキャパシタの下部 電極４を有する。
Patent JP-3066006-B1 (JP)
Title: 電子デバイス装置及びその製造方法
IPC: H01L35/32
Filed: 1999-02-23
Granted: 2000-07-17
Abstract: 【要約】
【課題】  基板１の上面にエッチングストッパ層２を備 え、そのエッチングストッパ層２上に少なくともｐ型半 導体或いはｎ型半導体を備えてなる熱電変換層４，７を 所定の平面形状に形成してなる熱電変換装置であって、 高感度と高信頼性を同時に実現可能なものを提供する。
【解決手段】  基板１の内の少なくとも熱電変換層４， ７の下側の一部に空隙部２１を形成し、基板１の内の熱 電変換層４，７の下側の他の一部に熱電変換層４，７を 下方から支持する支持部２０を形成してなる。尚、支持 部２０及び空隙部２１は少なくとも一回の等方性エッチ ング工程が少なくとも一回の異方性エッチング工程に先 行してなるエッチング工程による基板１のエッチングに よって作製される。