Patent SG-11201906667S-A (SG)
Title: A method and a system for fabricating photovoltaic devices on variably-sized substrates
Inventor: FAYKOSH GARY
IPC: H01L21/67
Filed: 2017-09-19
Abstract: NN N O kr) O 1-1 N C (12) INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property Organization International Bureau (43) International Publication Date 22 March 2018 (22.03.2018) WIP0 I PCT ill~~~~~~~~ 0111111010VIIIOH olo omm offilmommoilloo# (10) International Publication Number WO 2018/052377 A3 (51) International Patent Classification: HOlL 31/18 (2006.01) HOlL 21/67 (2006.01) (21) International Application Number: PCT/SG2017/050470 (22) International Filing Date: 19 September 2017 (19.09.2017) (25) Filing Language: English (26) Publication Language: English (30) Priority Data: 10201607821W 19 September 2016 (19.09.2016) SG (71) Applicant: BEST SAFETY-GLASS MFG. (S) PTE. LTD. [SG/SG]; 10E Enterprise Road, Enterprise 10, Singa- pore 629831 (SG). (72) Inventor: FAYKOSH, Gary; 1775 Progress Drive, Perrys- burg, Ohio 43551 (US). (74) Agent: SPRUSON & FERGUSON (ASIA) PTE LTD; P.O. Box 1531, Robinson Road Post Office, Singapore 903031 (SG). (81) Designated States (unless otherwise indicated, for every kind of national protection available): AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (54) Title: A METHOD AND A SYSTEM FOR FABRICATING PHOTOVOLTAIC DEVICES ON VARIABLY-SIZED SUBS- TRATES Thin film coating system 100 110 Pump 102 104 106 108 112 Substrate Vacuum Vacuum Exit load Finishing carrier load lock Chamber lock assembly line L 114 Computer FIG. 1 (57) : An automated system for fabricating a solar energy device is described. The automated system comprises a computer for providing automated control of the system; and a substrate carrier and a vacuum chamber operationally coupled to the computer. The vacuum chamber comprises at least one heating element for uniformly heating the substrate; a coating head assembly comprising a vaporising chamber for sublimating a photovoltaic material to form a photovoltaic material vapour and an expansion chamber fluidly coupled to the vaporising chamber for receiving the photovoltaic material vapour; and a deposition chamber for uniformly depositing the photovoltaic material vapour on the substrate. The computer is configured to control the heating element, the vaporising chamber, and a speed of the substrate carrier so as to determine a position of the substrate in relation to the expansion chamber such that the photovoltaic material vapour is uniformly deposited on a predetermined portion of the substrate. [Continued on next page] WO 2018/052377 A3 0 111 (84) Designated States (unless otherwise indicated, for every kind of regional protection available): ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG). Declarations under Rule 4.17: — of inventorship (Rule 4.17(iv)) Published: with international search report (Art. 21(3)) before the expiration of the time limit for amending the claims and to be republished in the event of receipt of amendments (Rule 48.2(h)) (88) Date of publication of the international search report: 07 June 2018 (07.06.2018)