baber/WOPTO huggingface dataset:
Patent KR-20150034423-A (KR)
IPC: H04N5/44
Filed: 2013-09-26
Abstract: Disclosed is a remote monitoring security system having a digital TV function including a digital TV receiving/playing function and an earthquake sensing function together. The disclosed remote monitoring security system includes: a security device which includes a sensor to sense earthquake, a digital TV receiving unit to receive a digital TV signal, a security camera receiving unit to receive a video signal, a display panel to display digital TV content by processing the digital TV signal and display a video by processing the video signal, a recording medium to store the video as a playable file, and a communication unit to transmit the video by using a wireless communication; at least one security camera which generates a video signal and transmits the generated video signal to the security camera receiving unit; and a portable communication device which receives and displays the transmitted video by using a wireless communication.
Patent KR-20140043282-A (KR)
Title: Band-finishing apparatus, band-finishing system and method for manufacturing band-finishing apparatus
Inventor: HILDEBRANDT OLIVER
IPC: B24B21/02
Filed: 2013-09-26
Abstract: The present invention relates to a band finishing apparatus (10) including a pressing device (30) to press a finishing band (16) to a surface (12) of a workpiece. The pressing device (30) includes a pressing band (42), and the pressing band is supported by two bearing surfaces spaced apart from each other when viewed in a travelling direction of the finishing band (16). The band finishing apparatus has a profile different from a profile in which at least one bearing surface (40) and/or the pressing band (42) straightly extend in a width direction of the finishing band (16).
Patent KR-20150036926-A (KR)
IPC: H01M10/058
Filed: 2013-09-30
Abstract: The present invention relates to a method for fixing an electrode assembly to allow each layer forming the electrode assembly not to move each other by using a tape. According to an embodiment of the present invention, the method for fixing the electrode assembly comprises the steps of: manufacturing the electrode assembly having a structure in which a plurality of electrodes and a plurality of separation membranes having larger area than the electrodes are alternately arranged in layers (S10); arranging a fixing tape covering at least a side surface of the electrode assembly to one surface of either an upper surface or a lower surface of the electrode assembly (S20); and pressurizing the fixing tape in an order of one surface, a side surface, and the other surface, and attaching the same (S30).
Patent KR-20150037029-A (KR)
IPC: H02K5/10
Filed: 2013-09-30
Abstract: Disclosed is an alternator for a vehicle. In an alternator for a vehicle according to the present invention, a stator assembly of inducing a current is located between a front housing and a rear housing. A rotor assembly supported by a bearing which is respectively inserted into the front housing and the rear housing rotates in the stator assembly. A pulley is formed at one end of the rotor shaft of the rotor assembly. A slip ring of the other end surrounds a brush holder on the outside of the rear housing. The rear housing includes a bearing insertion part into which the bearing is inserted. A foreign substance blocking part is formed on the outside plane part of the bearing insertion part which faces the brush holder.
Patent KR-20150038997-A (KR)
IPC: G02F1/13
Filed: 2013-10-01
Abstract: The present invention provides a device for supplying a treatment liquid and a method for supplying the treatment liquid. The device for supplying the treatment liquid comprises: a supplying tank which has a first space in which the treatment liquid is filled inside; a buffer tank which is connected to the supplying tank and a head, respectively, and has a second space inside; and a pressurizing member which presses the first space with a first pressure and the second space with a second pressure, wherein the first and second pressures are supplied differently. Head is continually provided with treatment liquid from one buffer tank, thereby minimizing bubbles generated when the treatment liquid is supplied alternately from two tanks.
Patent KR-20140051069-A (KR)
Title: Discovery signal transmitted in direct communication system, and method for transmitting/receiving the discovery signal
Inventor: JUNG SOO JUNG
IPC: H04W48/16
Filed: 2013-10-02
Abstract: An embodiment of the present invention provides a discovery signal which is broadcasted from a first terminal engaging in direct communication to a wireless channel. The discovery signal include: a first field displaying whether the discovery signal is a terminal detection signal or a service detection signal; and a second field including either of the terminal identifier information of the first terminal or the service information of a service provided by the first terminal according to the first field value.
Patent KR-20150044745-A (KR)
IPC: H01H61/02
Filed: 2013-10-17
Abstract: A thermal overload relay according to the invention comprises the first fixed contact installed inside a case; the second fixed contact installed inside the case at a certain distance from the first fixed contact; and an inversion tool that is a mover selectively in contact with either the first fixed contact or the second fixed contact. The inversion tool is equipped with the first operating contact to contact the first fixed contact on one side and the second operating contact to contact the second fixed contact on the back, so that the inversion tool can contact with the first fixed contact and the second fixed contact in both directions instead of deleting the conventional first mover to satisfy overcurrent property, vibration resistant and shock withstand requirement and at the same time, resolve irregular dispersion of overcurrent property, vibrant resistant and shock withstand requirement resulted from the elastic force of the conventional first mover and variation of load. Also the thermal overload relay according to the invention includes a tester equipped with the first lever unit that transfers pressure applied by a user to the first fixed contact to move the first contact point and the second lever unit that transfers pullout pressure applied by the user to an auxiliary holder to move the inversion tool through the auxiliary holder; and the auxiliary holder having an insertion part into which the inversion tool is inserted on one side and a trip projection on the other side to contact the second lever unit to eliminate a projection and a test link on the conventional first mover and the auxiliary holder and thus, enable the production of small-sized product, reduce material cost, shorten the manufacturing time and contribute to stabilizing quality deviation with streamlined structure.
Patent KR-20140064621-A (KR)
Title: Organic el material comprising amine derivative and organic el device using the same
Inventor: ITOI HIROAKI
IPC: H01L51/50
Filed: 2013-10-22
Abstract: The present invention provides an organic EL material improving luminance efficiency and an organic EL device using the same. The organic EL material is represented by formula (1) below. In formula (1), X and Y are an aryl group or a heteroaryl group of C6 to C18, respectively. L is an arylene group or a heteroarylene group of C6 to C18. R1, R2, R3 and R4 are a hydrogen atom, a halogen atom, an aryl group or a heteroaryl group of C6 to C18, or an alkyl group of C1 to C12, respectively. a is an integer satisfying 0<=a<=3.
Patent KR-20130135802-A (KR)
Title: Process for preparing polypropylene using transition metal compound comprising thiophene-fused cyclopentadienyl ligand
Inventor: LEE BUN YEOUL
IPC: C07F7/00
Filed: 2013-10-25
Abstract: Provided is a method for producing polypropylene comprising, a step of polymerizing polypropylene under the existence of a catalyst containing a transition metal compound with new structure, leading to increase in high polymerizing activity and excellent process efficiency and easily controlling the fine structure of a polymer, so that desired polypropylene can be easily produced.
Patent KR-20150056196-A (KR)
Inventor: YOO KWANG IL
IPC: G06F19/00
Filed: 2013-11-15
Abstract: The present invention relates to a virtual cluster capable of synchronizing all data which may be generated in various operations by generating an external space and connecting the external space with each other. More particularly, the present invention provides the virtual cluster including: the external space, a data export, a data import, a protocol parser which transmits an attached file and the data change content in an eml format to a data transmitter and a data receiver, the data transmitter which transmits the attached file and the data change content in the eml format to a connected server with compression and encoding streaming, the data receiver, and a data process which stores storage location information by receiving the storage location information from the protocol parser.
Patent KR-20150057472-A (KR)
Inventor: MYAENG SUNG HYON
IPC: G06F17/21
Filed: 2013-11-19
Abstract: According to an embodiment of the present invention, when a plurality of candidate to be selected as a point of interest (POI) during extraction of the POT from a document, one POI is accurately selected based on relation among the POIs in a subject area of the document or in the document. A technology for extracting a POI from a document is expected to significantly contribute to a technology for collecting and managing travel information, and is also expected to substantially increase accuracy and a reproduction rate for extracting a POI from a document. According to an embodiment of the present invention, a method for eliminating ambiguity of POI extraction includes a step of extracting a POI of a document corresponding to a POI mention among multiple POI candidates based on at least one from an area, frequently mentioned in the documents, POI mention, and weighted values of the POI candidates based on relation among the POI candidates when the multiple POI candidates, corresponding to POI mentions detected from a certain document, are searched in a database.
Patent KR-20150060396-A (KR)
Inventor: KIM HONG IL
IPC: G06K9/00
Filed: 2013-11-26
Abstract: The present invention determines whether or not at least one from a certain motion of a user or a certain operation for an electronic device is received from the user; acquires face image information on a face of the user when an input representing at least one from the certain motion of the user or certain operation for the electronic device is determined to be received; recognizes the face of the user by using the acquired face image information; and provides a service to the user whose face has been recognized.
Patent KR-20150060458-A (KR)
Title: Apparatus for substrates bonding
Inventor: CHA YONG WON
IPC: H01L21/20
Filed: 2013-11-26
Abstract: The present invention provides a substrate bonding apparatus capable of uniformly dispersing a tensile force in a decompression process. The substrate bonding apparatus includes a chamber, a first plate which is arranged in the chamber and receives a first substrate, a base part which is arranged in the chamber, a supporting plate which is arranged between the base part and the first plate, and a plurality of supporting rods which are arranged between the supporting plate and the first plate and are fixed to at least one of the first plate, the base part and the supporting plate.
Patent KR-20150064384-A (KR)
Inventor: KIM KI WOON
IPC: A61P35/02
Filed: 2013-12-03
Abstract: The present invention relates to a pharmaceutical formulation containing yellow-poplar bark extract as an active ingredient for treating chronic myelogenous leukemia. More particularly, the pharmaceutical formulation contains yellow-poplar bark extract to induce apoptosis by cutting of poly ADP ribose polymerases (PARPs) and caspases-3 which are associated with change in the mitochondria membrane potential (MMP) and with apoptosis pathways in a leukemia-developed cell, in order to selectively inhibit mutant enzyme T315I due to BCR-ABL fused gene mutation, which is a causative gene for chronic myelogenous leukemia.
Patent KR-20150065066-A (KR)
Inventor: PARK JAE HOO
IPC: G09F9/00
Filed: 2013-12-04
Abstract: Disclosed is a display apparatus which adheres to and is installed on the wall. The display apparatus comprises: a case fixed on the wall; and a display module bent at the front of the case. The display module is installed to be removable with the case, and can be replaceable.
Patent KR-20150065522-A (KR)
Inventor: LEE JUNG HWAN
IPC: E04G21/16
Filed: 2013-12-05
Abstract: The present invention relates to a material lifting box comprising: a body becoming wider from a lower part to an upper part; an opening where materials come in and out; and a transferring roller installed inside an inner surface of the body to be able to rotate. Accordingly, the present invention is capable of preventing damage to the materials by reducing friction and impact to the material during a process where a worker on a lower layer pushes up the materials by adhering the materials to the transferring roller, enabling a worker to easily lift by reducing the movement of the materials. In addition, the present invention is capable of preventing internal defects of the interlayer slab opening formed to lift the materials.
Patent KR-20150068620-A (KR)
Inventor: Seo kang
IPC: B21D26/045
Filed: 2013-12-12
Abstract: According to an embodiment of the present invention, a hydroforming apparatus comprises: an upper and lower molding unit where a tubular material providing a closed portion which is a closed one end part and an opened portion which is an opened other end part; and a side unit provided to seal the opened portion and provided to be closely attached to a pressurization sealing unit supplying an expansion fluid. Moreover, according to an embodiment of the present invention, a hydroforming method comprises: a preparation step of mounting the tubular material providing the closed portion which is the closed one end part and the opened portion which is the opened other end part in a lower die and providing the upper die while the upper die is closely attached to the tubular material; a closed portion support step of providing the closed portion where a side unit is closely attached; a press molding step of enabling the pressurization sealing unit where one end part is inserted into the opened portion to be pressurized toward the side unit; and an expansion molding step of enabling the punch die where one end part is inserted into the opened portion to provide the expansion fluid.
Patent KR-20140113301-A (KR)
Inventor: HAHTO SAMI K
IPC: H01L21/265
Filed: 2013-12-16
Abstract: In one aspect, a disclosed ion implantation system includes an ion source for generating a ribbon ion beam, and at least one correction device which certainly represents the desired uniformity of a current density profile by controlling current density according to the vertical dimension of the ribbon ion beam. The ion implantation system further includes another element such as an analysis magnet for forming an ion beam, inducing an end station, and emitting the same to a substrate, an electrostatic deflector, and a focusing lens, etc. In some embodiments, the present disclosure generates the ribbon beam of a nominal one dimension having a larger vertical dimension compared to the diameter of the substrate and performs implantation to allow ions to have the high profile uniformity of a vertical direction in the substrate.
Patent KR-20150072025-A (KR)
Inventor: LEE SANG MI
IPC: H01R13/22
Filed: 2013-12-19
Abstract: Disclosed is a connector comprising: a male connector including an installation terminal; and a female connector forming an insertion hole in which the installation terminal is inserted, and comprising a contact terminal including a plurality of contact dots to be in contact with an outer surface of the installation terminal.
Patent KR-20150072764-A (KR)
Inventor: KIM SOO HYUNG
IPC: G06F3/03
Filed: 2013-12-20
Abstract: In the specification, disclosed are a method and a device for controlling a resolution level according to various pieces of information by using various inputting methods in an electronic device. The method according to an embodiment of the present invention is a method for controlling an electronic device and comprises the operations of: providing information through a display functionally connected with the electronic device; sensing a first user input related to the provided information; determining a resolution level based on the first user input; and performing a predetermined function based on a detected second user input and the resolution level when the second user input is detected.
Patent KR-20150073460-A (KR)
Inventor: KWON YOUNG HO
IPC: G01R31/3183
Filed: 2013-12-23
Abstract: The present invention provides a test apparatus for a display device including a display panel and a circuit substrate which is coupled with the display panel and supplies all kinds of signals and power to the display panel. The power is supplied to the display panel only when the display panel and the circuit substrate are physically and electrically connected through a connector.
Patent KR-20150074856-A (KR)
Inventor: MOON EUI SUN
IPC: G06F17/30
Filed: 2013-12-24
Abstract: Disclosed are a device and a method for generating a contents connection network. The method comprises the steps of: searching original contents that are then same as contents when the contents are added in a web-based service; collecting a first description about the original contents; collecting a second description which is in upper class than the first description; generating connection information between the description of the contents and the first and second descriptions; and storing the connection information.
Patent KR-20150080201-A (KR)
Inventor: LEE SUN HWA
IPC: G02F1/1362
Filed: 2013-12-31
Abstract: The present invention relates to a thin film transistor array substrate, which comprises: a substrate defined by a channel part and a transmission part; a thin film transistor formed on the channel part of the substrate to include a gate electrode, a gate insulating film, an active layer, a source electrode and a drain electrode; a first insulating film and a second insulating film formed sequentially on the front surface of the substrate to include the thin film transistor and have a contact hole which exposes the drain electrode; a pixel electrode connected to the drain electrode through the contact hole; and a common electrode forming a horizontal electric field with the pixel electrode, wherein the transmission part consists of a first region where the second insulating film was etched at a constant interval and a second region where the second insulating film remains intact. If the pixel electrode is formed in the first region, then the common electrode is formed in the second region, or if the common electrode is formed in the first region, then the pixel electrode is formed in the second region, thereby enhancing transmittance and reducing a driving voltage.
Patent KR-20130029814-A (KR)
Inventor: YOSHIDA KENJI
IPC: G06F3/0481
Filed: 2011-07-13
Abstract: 캡처한 시점에 있어서의 퍼스널 컴퓨터의 실행 환경을 기록해 두고, 그 실행 환경과 도트 패턴과 캡처 화상을 연관시켜 둠으로써, 사용자의 조작 횟수를 줄이고, 직감적인 복원 조작이 가능한 편리성이 풍부한 정보 처리 기술을 실현한다.     정보 처리 장치에 있어서 실행되는 프로그램으로서, 정보 처리 장치와 접속된 표시 수단에 표시된 화상을 정보 처리 장치의 기억 수단에 기억하는 것과 함께, 화상이 기억된 시점에 있어서의 정보 처리 장치의 실행 환경을 기억 수단에 기억하는 단계와, 도트 패턴과 화상을 중첩하여 형성하는 단계와, 도트 패턴을 판독한 광학 판독 수단으로부터 코드값 및 좌표값을 취득하는 단계와, 취득한 코드값의 적어도 일부에 정의된 특정 정보로 실행 환경을 특정하여, 코드값 및 좌표값에 대응하는 실행 환경을 복원하는 단계를, 정보 처리 장치의 제어 수단에 실행시킨다.
Patent KR-20130096241-A (KR)
Inventor: AQUILA BRIAN
IPC: A61P35/00
Filed: 2011-08-02
Abstract: 본 발명은 하기 화학식 I 및/또는 화학식 Ia의 화합물, 그의 염, 약학적 조성물, 그의 사용 방법 및 제조 방법에 관한 것이다. 이들 화합물은 ALK 키나제 활성을 억제하므로, 암의 치료에 사용될 수 있다. 
<화학식 I> 
   
<화학식 Ia>
Patent KR-20130117758-A (KR)
Inventor: FUKUNAGA ATSUSHI
IPC: H01M4/66
Filed: 2011-10-03
Abstract: 용융염 전지의 전극으로서 이용하는 것에 적합한 금속 다공체로서 3차원 그물코 구조를 갖고 알루미늄으로 이루어지는 금속 다공체 및 그의 제조 방법, 또한 그것을 이용한 용융염 전지를 제공하는 것을 목적으로 한다.  중공 골격에 의해 3차원 그물코 구조를 이루는 금속 다공체로서, 당해 중공 골격은 1㎛∼100㎛의 두께의 알루미늄층으로 형성되고, 상기 알루미늄층의 내측 표면 및 외측 표면에 주석층을 구비한 금속 다공체로 했다.  이러한 금속 다공체는 3차원 그물코 구조를 갖는 수지 성형체의 표면에 주석층을 형성하는 내측 주석층 형성 공정과, 상기 내측 주석층의 표면에 알루미늄층을 형성하는 알루미늄 골격 형성 공정과, 상기 알루미늄 골격의 표면에 주석층을 형성하는 외측 주석층 형성 공정과, 상기 알루미늄 골격 형성 공정 후 또는 상기 외측 주석층 형성 공정 후에, 상기 수지 성형체를 제거하는 수지 제거 공정에 의해 얻어진다.
Patent KR-20130098308-A (KR)
Inventor: FRASER CHRISTOPHER
IPC: A61K39/245
Filed: 2011-08-23
Abstract: 본 발명은 MHC II 결합 펩티드와 관련된 조성물 및 방법을 제공한다. 몇몇 구체예에서, 본 발명의 펩티드는 공통된 공급원으로부터 얻어지거나 유래되는 것이다. 다른 구체예에서, 본 발명의 펩티드는 개체가 반복적으로 노출되었던 감염성 제제로부터 얻어지거나 유래되는 것이다.
Patent KR-20130102048-A (KR)
Inventor: BLAXLAND DREW
IPC: E02D27/42
Filed: 2011-08-09
Abstract: 본 발명에서는, 수중발전기를 지지하기 위한 지지 장치가 기술된다. 수중발전기는 발전부를 가지며, 상기 지지 장치는 발전부를 지지하도록 구성된 스탠드와, 하나 이상의 모노리식 밸러스트 매스를 장착하도록 구성된 하나 이상의 고정 기초 요소를 포함하는 스태빌라이저를 포함하고, 하나 이상의 고정 기초 요소는 사용 시에 상기 지지 장치가 해저 위의 선정된 위치에서 중량을 견뎌내도록 모노리식 밸러스트 매스 위에 있는 배치 영역과 협동하도록 구성된 배치 영역을 포함한다. 또한, 밸러스트 매스도 기술되며 지지 장치를 설치하기 위한 방법과 지지 장치 위에 발전기를 설치하기 위한 방법들도 기술된다.
Patent KR-20140001836-A (KR)
Inventor: KUSAKARI MISATO
IPC: C22F1/08
Filed: 2011-07-13
Abstract: 동축 케이블(1)은, 그 길이가 1000mm 이하인 단척(短尺)재이며, 중심 도체(10)가 주로 1개의 Cu-Ag 합금선(11)으로 구성되는 단선 도체이며, Cu-Ag 합금선(11)은, Ag을 5질량% 이상 15질량% 이하 함유하는 Cu-Ag 합금으로 구성되고, 직경이 15㎛ 이상 50㎛ 이하이고, 그 외주(外周)에 도금층(12)을 구비하고, 중심 도체(10)는, 도전율 50% IACS 이상, 인장 강도 1330MPa 이상을 만족하며, Ag을 특정한 범위로 함유하고, 또한 특정한 크기를 갖는 Cu-Ag 합금선(11)을 구비하고, 도전율·인장 강도가 특정한 범위를 만족하는 중심 도체(10)를 구비함으로써, 굴곡이나 꼬임에 의해 단선되기 어렵고, 피로 특성이 우수한 동축 케이블(1), 및 동축 케이블 번들을 제공한다.
Patent KR-20130036077-A (KR)
Inventor: WANG LEI
IPC: H04L1/18
Filed: 2010-08-31
Abstract: MAC 순서적 전달을 위한 방법 및 장치가 개시된다. MAC 순서적 전달이 접속별로 활성화될 수 있으며 접속 셋업에서 협상될 수 있다. 비ARQ 접속 또는 ARQ접속을 위한 MAC 순서적 전달이 HARQ 패킷 순서 정보를 이용함으로써 수행될 수 있다. 이와 달리, MAC 순서적 전달은 MAC SDU 레벨의 시퀀스 번호(SN) 필드를 이용하거나 또는 MAC PDU 레벨의 SN 필드를 이용하여 수행될 수 있다. MAC 순서적 전달이 디스에이블된 접속의 경우, MAC PDU는 SN 필드를 포함하지 않을 수 있고, SN 필드는 MAC 확장형 헤더 또는 필요한 경우 MAC 서브 헤더에 포함될 수 있다.
Patent KR-20130116072-A (KR)
Inventor: MARLIN SAMUEL
IPC: H01M8/12
Filed: 2011-09-14
Abstract: 이트륨, 스칸듐, 및 스칸듐 및 알루미늄 및/또는 세륨의 혼합물로부터 선택되는 도펀트로 도핑된 지르코늄 옥사이드(ZrO 2 ), 및 니켈(Ni) 및/또는 코발트(Co)로 이루어지는 융합된 서멧을 포함하는 분말화 된 그릿(grit)(단, 상기 서멧은 공정 구조를 가지며, mol%로 다음과 같이 나타나는 지르코늄 옥사이드, 니켈 및 코발트 함량을 갖고: 0.250Ni + 0.176Co ≤ (ZrO 2     + dopant) ≤ 0.428Ni + 0.333Co, 상기 분말화 된 그릿은 0.3㎛ 에서 100㎛ 사이의 중앙 직경 D 50 을 나타냄)
Patent KR-20130054434-A (KR)
Inventor: WENTINK MAARTEN MENZO
IPC: H04W74/08
Filed: 2011-09-14
Abstract: 본 개시물의 특정 양상들은 액세스 포인트(AP) 또는 기본 서비스 세트(BSS)에 대한 식별자를 포함하는 물리적 계층(PHY) 헤더를 이용하기 위한 방법들 및 장치를 제공한다.  순차적 응답 시퀀스에서의 순서를 할당받는 스테이션(STA)은 올바른 식별자를 포함하는 PHY 헤더들을 갖는 프레임들만 카운트할 수 있다.  STA는 시퀀스를 할당한 AP 또는 BSS에 대한 다른 식별자를 특정하는 PHY 헤더를 갖는 프레임을 자신이 수신할 때 자신의 순차적 액세스 절차를 종료할 수 있다.  이러한 방식으로, STA는 중복하는 네트워크에 부분적으로 동기화하는 것을 방지할 수 있으며 잘못된 시간에 무선 매체를 액세스하는 것을 회피할 수 있다.
Patent KR-20140001872-A (KR)
Inventor: TOYOTA KOICHIRO
IPC: A61B1/24
Filed: 2011-09-20
Abstract: 탄성 재료에 의해 형성된 벌룬(4)을 벌룬 기재(5)에 유지시켜 구성된 압력 측정 프로브(1)와, 벌룬 기재를 통해 벌룬의 내부와 연통해 그 공기압을 전달하는 내강을 갖는 연통 부재와, 연통 부재의 후단과 접속되어, 전달되는 공기압을 검출하는 압력 검지부(8)를 구비한 구강 관련 압력 측정 장치.  벌룬은, 폐쇄형 공간을 형성하는 수압부(2a) 및 수압부의 내부에 연통하는 벌룬 관형상부(2b)를 구비하고, 벌룬 관형상부에서 벌룬 기재의 선단부에 결합되어 있다.  벌룬 기재는, 벌룬측의 선단부의 외주 방향을 따라서 외방으로 융기한 리브(5c)를 갖는다.  편평형상의 벌룬을 이용한 압력 측정 프로브를 이용하여, 구강 내에 벌룬을 적절한 상태로 삽입하여 양호한 측정 정밀도를 안정적으로 확보하는 것이 가능하다.
Patent KR-20140015263-A (KR)
Inventor: TAKAHASHI HIROYUKI
IPC: H01L21/316
Filed: 2011-10-06
Abstract: 본 발명은 실리콘 단결정 웨이퍼에 열산화막을 형성하는 방법으로, 상기 실리콘 단결정 웨이퍼를 열처리로에 투입하고, 열산화막이 형성되는 온도 T1까지 승온하여 두께 d1의 열산화막을 형성하고, 그 후, 상기 온도 T1보다도 낮은 온도까지 강온한 후, 상기 온도 T1보다도 높은 온도 T2까지 승온하여 상기 두께 d1보다도 두꺼운 두께 d2의 열산화막을 추가 형성하는 실리콘 단결정 웨이퍼의 열산화막 형성방법이다.  이에 의해, 특히 두꺼운 열산화막을 형성할 때에 발생하는 웨이퍼보트로의 부착을 방지하고, 열산화막 형성중의 실리콘 단결정 웨이퍼의 슬립전위나 깨짐의 발생을 억제할 수 있는 열산화막의 형성방법이 제공된다.