baber/WOPTO huggingface dataset:
Patent KR-20000001552-A (KR)
Title: Automatic stacking device of naked bead
Inventor: SON HYO SEUNG
IPC: B29D30/48
Filed: 1998-06-12
Abstract: PURPOSE: An automatic staking device of a naked bead is provided to prevent the attachment between the naked beads while stacking and transformation of beads, due to a certain space between the naked beads, also to minimize the production of glittering beads. CONSTITUTION: An automatic staking device of a naked bead comprises: a working table(3) established in a horizontal direction from the bottom near a winder body(2) equipped with a former(1); a guide rail(4) arranged at the both sides of the working table(3) along the direction of the length of the working table; a pair of holding devices(6) installed in the guide rail(4) mediating a cylinder(5); the holding device(6) established to slide along the guide rail(4) to a receiving stand(7) according to the extension and the shrinkage of the cylinder(5); orderly stacking the naked beads clamped and transferred by mediating the holding device(6), due to the receiving stand(7) prepared to go up and down by operating a handle(9) connected to a screw(8) at the upper part of the working table(3).
Patent KR-20000002860-A (KR)
Title: Solid charge coupled device and driving method thereof
Inventor: YU YUNG JOON
IPC: H01L29/768
Filed: 1998-06-24
Abstract: PURPOSE: A solid charge coupled device is provided to transmit the signal charge generated from the photo diode to the charge coupled device. CONSTITUTION: The solid charge coupled device comprises: a first conductive semiconductor substrate; plural second conductive photo diodes formed on the semiconductor substrate; plural second conductive charge coupled device channels formed on the semiconductor substrate; and a transmitting wire unit for delivering the charge of the photo diode to the charge coupled device channel and forming a second and a third transmitting gates not to be projected from a first transmitting gate.
Patent KR-20000003297-A (KR)
Title: Exercise machine
Inventor: PARK SUNG UK
IPC: A63B21/02
Filed: 1998-06-27
Abstract: PURPOSE: Disclosed has an easy operation to the pressure control, simple shell and portable which is developed both the arm and the upper body. CONSTITUTION: The casing(11) is mounted with the front and the rear protect plate; A screw(14) has recess(14a) at upper slit(11a); inner part of the casing comprising friction band(12), contact sphere(23) and front surface of revolution part across center of contact sphere is mounted with ratch gear(22); Operation part controlled by hook; outside and protect plate of casing has a couple of press bar(40)(40a); To press inside, it create load by friction and it takes exercise for the arm.
Patent KR-20000004079-A (KR)
Title: Injecting method of ground hardening material and injecting rod thereof
Inventor: JUNG SHA YONG
IPC: E02D3/12
Filed: 1998-06-30
Abstract: PURPOSE: An injection method of ground hardening material is provided to improve the function of ground hardening and reliability of the ground hardening. CONSTITUTION: An injection method of ground hardening material has the steps of: mortar appropriately blended the cement and sand to 1:1¯1:4 with water is sprayed with more than 200Kg/cm¬2 of spraying pressure; slim lines(15a,15b,15c,15d) is partially declined from the center of the body(10a,10b,10c,10d), for the rest slim to smoothly be discharged as the mortar is being injected to a drilled hole.
Patent KR-19990014155-A (KR)
Title: 고 유전율 실리케이트 게이트 유전체
IPC: H01L29/78
Filed: 1998-07-24
Abstract: 높은 유전율 실리케이트 게이트 유전체를 포함하는 전계 효과 반도체 장치 및 그것을 형성하기 위한 방법이 본 명세서에서 개시된다.  장치는 기판 내에 형성된 반도체 채널 영역(24)을 갖는 실리콘 기판(20)을 포함한다.  금속 실리케이트 게이트 유전층(36)은 이러한 기판 상에 형성되고 도전 게이트(38)를 수반한다.  실리케이트층(36)은 게이트 유전체의 유전 상수가 실리콘 이산화물의 유전 상수보다 상당히 높도록 하는 예를 들어, 하프늄 실리케이트일 수 있다.  그러나, 실리케이트 게이트 유전체는 실리콘 이산화물의 이점, 예를 들어 높은 항복 현상, 낮은 인터페이스 상태 밀도, 및 고 안정성을 가지도록 설계될 수 있다.
Patent KR-20000009606-A (KR)
Title: Method for registering and calling communication service number of communication terminal device
Inventor: YIM DO HYUN
IPC: H04M1/272
Filed: 1998-07-27
Abstract: PURPOSE: A method capable of easily using a communication service number by a user, by registering a short number with respect to a communication service number which is often used, is provided. CONSTITUTION: The method for registering and calling a communication service number of a communication terminal device, the method comprising the steps: detecting whether a predetermined communication service key is inputted; displaying a menu having a predetermined communication service list when the predetermined communication service key is inputted and judging whether a predetermined list is selected from the menu; and displaying a communication service number and explanation thereof with respect to a corresponding list when the predetermined list is selected, storing the communication service number in a buffer, and dialing the communication service number stored in the buffer.
Patent KR-19980081925-A (KR)
Title: 센서작동에 의하여 순차 작동되는 에어벡 및 가스발생시스템.
Filed: 1998-08-04
Abstract: 가. 청구범위에 기재된 발명이 속하는 기술분야. 
     본 발명은 2중 폭발(혹은 그 이상)이 가능한 인플레이터(INFLATOR)를 가진 자동차용 에어벡(AIRBAG)에 관한 것으로, 에어벡의 쿠션(CUSHION)표면에 힘을 감지할 수 있는 압력센서(SENSOR)를 부착하여 센서작동에 의한 신호를 이용하여 2중폭발을 유도할 수 있는 에어벡의 가스발생시스템에 관한 것이다. 
     나. 발명이 해결하려는 기술적 과제. 
     종래의 에어벡은 규정된 속도에서 정면충돌사고가 발생되었을 경우에 에어벡이 전개되고 있으며, 승객보호 기준도 평균의 성인남자가 규정된 착좌자세와 속도에서 최적의 보호를 받을 수 있도록 설계되어 있어 승객이 비정상 착좌 상태에거나 신체가 평균 이하일 경우 혹은 어린이의 경우 에어벡의 전개시 높은 압력으로 인해 심한 위해를 받을 수 있어, 최근에는 DUAL STAGE INFLATOR(또는 DUAL OUTPUT INFLATOR 라고도 함) 즉 2개의 스퀴브(SQUIB)를 가지고 인플레이터(INFLATOR)의 폭발을 2단계로 나누어 1차적으로는 낮은 압력으로 인플레이터를 폭발시키고 추가로 2차 인플레이터를 폭발시켜 목표로 하는 쿠션압력을 유지케 하는 것이 개발되고 있으나 이러한 방식이 모두 데이터에 의한 정해진 입력에 의하여 작동토록 되어 있기 때문에 1,2차 폭발압력설정 및 폭발간의 시간설정의 최적화가 근본적으로 불가능하기 때문에 여전히 부작용의 우려가 있는 것이다. 
     다. 발명의 해결방법의 요지. 
     이를 위하여 차량충돌후 에어벡의 작동요건이 갖춰지면 1차 인플레이터의 폭발이 이루어져 쿠션이 전개되도록 하고 신체의 일부(두부나 흉부)가 쿠션(CUSHION)표면에 접촉하면 쿠션표면에 부착된 센서가 이를 감지하고 감지된 전기적 신호(SIGNAL)가 마이크로프로세서(MICROPROCESSOR)에서 정해진 시간범위의 이내일 경우에 2차 인플레이터의 폭발이 이루어지도록 하여 쿠션에 추가적인 압력이 가해지도록 구성되어 소인이나 비정상적인 착좌(OUT OF POSITION)상태의 승원에 대해 에어벡의 전개시 발생되는 부작용을 최소화하면서 에어벡의 효과를 극대화한 것이다. 
     라. 발명의 중요한 용도 
     자동차용 에어벡
Patent KR-20000013554-A (KR)
Title: Active suspension device for vehicle
Inventor: UM BOON DO
IPC: B60G3/00
Filed: 1998-08-10
Abstract: PURPOSE: An automobile active suspension device is provided to prevent tilting of a car by the centrifugal force when a car is cornering. CONSTITUTION: The automobile active suspension device comprises; struts(13,14) to fix the wheels on both side; hanger springs(19,20) placed between the strut and the vehicle body to absorb the shock and vibration delivered to the vehicle body; variable shock absorbers installed horizontally between wheels and having a variable diminution effect to increase and decrease as the car speed changes; an adjusting device connected to the variable shock absorber to adjust the diminution power of the shock absorber by the intensity of the centrifugal power when the car is making a turning. By minimizing the tilting of the car when a car is turning around the driving can be made comfortable, as well as safe.
Patent KR-20000014569-A (KR)
Title: Apparatus for converting a voltage level
Inventor: HONG SUN YANG
IPC: G09G3/00
Filed: 1998-08-21
Abstract: PURPOSE: An apparatus for converting a voltage level is provided, which repeatedly performs a charging and a pumping of a capacitor corresponding to a boosting pulse and rises a voltage level. CONSTITUTION: The apparatus for converting a voltage level comprises: a frequency divider (21) for receiving a clock selecting signal and an n number of level converting clock signal, selecting one level converting clock signal among an n number of level converting clock signal, and m-dividing the selected level converting clock signal; a boosting pulse generator (23) for dividing the m-divided level converting clock signal into a certain dividing and generating a boosting pulse; and a charging/pumping device for receiving a reference voltage having a low-voltage level and the boosting pulse and outputting a signal having a voltage level with a k times of the reference voltage. Thereby, it is possible to optimize the consumption current and the liquid crystal capability of a LCD.
Patent KR-20000014966-A (KR)
Title: Quick water-binding material comprising urethane-modified epoxy resin
Inventor: JUNG JONG WON
IPC: C09K3/10
Filed: 1998-08-26
Abstract: PURPOSE: A quick water-binding material containing an urethane-modified resin is applicable to adhesion, repair, strengthening, lining and/or coating of a steel frame, concrete structure or pipe in water or at a humid place as a water-binding agent or a coating. CONSTITUTION: The non-solvent type quick water-binding material comprises (A) an urethane-modified epoxy resin as a principal component, and (B) a polyamide-based resin as a hardening agent. The water-binding material further comprises a silane-based coupling agent, a filler, a plasticizer, a stabilizer and a flow proofing agent. The silane-based coupling agent is 3-glaidoxy propyl trimethoxysilane. The filler is zinc dusts and the flow proofing agent is Clay Vallac Super. The urethane resin includes urethane type methylene diphenylene diisocyanate. The stabilizer includes butylated hydroxy toluene, triphenyl phosphite and UV-1.
Patent KR-20000019044-A (KR)
Title: Coolant passage structure of rotary compressor
Inventor: JUNG IN SOO
IPC: F04C18/00
Filed: 1998-09-08
Abstract: PURPOSE: A coolant passage structure is provided to improve the efficiency of a compressor by making coolant directly flow to a compressor body not passing through an unnecessary passage at the time point the gaseous coolant completely evaporated from an evaporator is flowed in the compressor body. CONSTITUTION: A rotary compressor is composed of: a compressor body(101) to suck, compress and vent the coolant; an accumulator(103) to directly supply the gaseous coolant to the compressor body, to form the gaseous coolant by evaporating after storing a certain amount of liquid coolant and to supply to the compressor body when the coolant having two phases are flowed in from the evaporator; a bypass passage(104) to directly supply the gaseous coolant to the suction part of the compressor body; and a solenoid valve(105) formed at the branched part of the bypass passage to determine the passage direction of the coolant.; Herein, the rotary compressor can improve the efficiency of the compressor about 3 % by making the coolant to be directly supplied to the compressor body without passing through an unnecessary passage.
Patent KR-20000019868-A (KR)
Title: Composition comprising extract of houttuniae herba j. sm. for promoting regeneration of hard tissues
Inventor: CHUNG SE YOUNG
IPC: A61K36/78
Filed: 1998-09-16
Abstract: PURPOSE: A pharmaceutical composition comprising the extract of Houttuniae herba is provided, for promoting the generation of hard tissues such as bones and teeth. CONSTITUTION: The pharmaceutical composition comprises the extract of Houttuniae herba. The extract of Houttuniae herba is prepared by repeating the procedure consisting of heating the 50-100% methanolic aqueous solution containing Houttuniae herba at a temperature of 50-120°C for 5-24 hours, cooling the solution to 40-60°C, and filtering the solution; and concentrating the solution. The extract of Houttuniae herba is also prepared by repeating the procedure consisting of leaving the 50-100% methanolic aqueous solution containing Houttuniae herba at room temperature or at 4°C for 5-7 days, filtering the solution; and concentrating the solution. The extraction liquid is dried to obtain a powder. The composition comprises the extract of Houttuniae herba in the forms of a liquid or a powder. The composition promotes the proliferation of osteoblast and periodontal ligament cell and increases the activity of alkali phosphatase, thereby promotes the regeneration and proliferation of hard tissues, therefore can be used for treating or preventing osteoporosis or periodontitis. The composition can be used in the form of a toothpaste or a gargle. Also the composition can be used as an additive of the feed for a hatcher to strengthen the shell of an egg.
Patent KR-20000021480-A (KR)
Title: Device for monitoring dynamic picture image of frame ccd(charge coupled device)
Inventor: HWANG WON YOUNG
IPC: H04N5/225
Filed: 1998-09-29
Abstract: PURPOSE: A device for monitoring a dynamic picture image of a frame CCD(Charge Coupled Device) is provided to display the dynamic picture image displayed in an interlaced form, by using a clock signal with low frequency. CONSTITUTION: A device for monitoring a dynamic picture image of a frame CCD(ChargeCoupled Device) comprises the steps of: two buffers storing output of a CCD signal processor by storing/outputting/sharing the output, in an SDRAM(Synchronous Dynamic Random Access Memory); outputting the SDRAM data by the two buffers storing/outputting/sharing in turn, to an encoder; operating the SDRAM to a clock which is over three times than a clock, which data from the CCD signal processor is outputted, by having a plurality of switches transitted to appoint an input/output path of each buffer, and reducing heat caused by a clock with a high speed and power consumption. An image outputting section is composed of a first, a second output buffer. Each output buffer stores the image data outputted from the CCD signal processor by comparing with a CLK(Clock) in turn, and repeating an outputting process so that the previously stored image data can be stored in an image memory device in turn, according to an SDCLK(Synchronous Dynamic Clock).
Patent KR-20000021723-A (KR)
Title: Wafer transferring apparatus
Inventor: KIM DO IL
IPC: H01L21/68
Filed: 1998-09-30
Abstract: PURPOSE: A wafer transferring apparatus is to fixedly support a wafer within a carrier, thereby preventing a damage of the wafer when transferring the wafer and thus increasing a productivity. CONSTITUTION: A wafer transferring apparatus comprises a carrier(3) in which a wafer is inserted and supported, a cassette guide(5) in which the carrier is inserted, a pusher(6) raising the carrier upward, a charger(2) and a hanger(1) picking up the wafer from the carrier. The cassette guide is divided into a first guide(5a) and a second guide(5b) opposite to each other. The apparatus further comprises a first cylinder(7a) and a second cylinder(7b). The first cylinder pushes the first guide to the inside and the second cylinder also pushes the second guide to the inside so that the wafer is closely contacted to both wings of the carrier. Therefore, while the wafer is transferred by the charger, the wafer is always stably held by the hanger.
Patent KR-19990007633-A (KR)
Title: 통합 가정 자동화 시스템
Filed: 1998-10-14
Abstract: 본 발명은 가정이나 유리온실의 창문, 커텐, 조명등의 조작요소를 유,무선으로 자동제어할 수 있도록 하는 통합 가정 자동화 시스템에 관한 것이다. 
     이러한 본 발명은 창문과 조명제어신호를 수신하고 창문과 개폐와 조명점등을 제어하는 수신기와, 가스, 온습도, 풍속, 양액, 강우량을 감지하는 각 센서의 감지신호를 송신하고 제어신호를 수신 제어하는 송,수신기를 구비하고, 제어타이머모뎀과 감지신호를 수신하고 제어신호를 송신하는 송수신모뎀과, 전화번호를 입력하고 확인하는 전화번호 입력 및 확인부와, 메뉴를 선택하는 메뉴 선택부와, 사용자 설정전화로 음성을 송출하는 전화 자동음성 발신모뎀과, 유선제어출력부로 이루어진 자동화 본체를 구비시킴으로써 이루어진다.
Patent KR-20000027012-A (KR)
Title: Device for moving cassette of semiconductor device
Inventor: KIM YOUNG KEUN
IPC: H01L21/68
Filed: 1998-10-26
Abstract: PURPOSE: A device is provided to make the cassette move easily between the manufacturing equipments by reducing the size and the shape and to reduce the manufacturing cost by structuring the loading and unloading unit as one body. CONSTITUTION: A device comprises a cassette moving device(10), a cassette(12), a main body(14), a wheel(16), an elevator(18), a fork assembly(20), a supporting plate(24), a frame(26), a guide rail(28), a slider(30), a timing belt(32), a rotation axis, a projection, a hole, and a fixing plate. The cassette(12) is installed in each story of the elevator(18) and the cassette is put inside the main body(14) when the elevator moves down. The slider(30) is fixed in the supporting plate(24)and the guide rail is in corresponding position to the supporting plate. the supporting plate maintains to be stopped by the timing belt if the rotation axis does not rotate.
Patent KR-20000027276-A (KR)
Title: Multi-bit flash memory device
Inventor: LEE MUN HWA
IPC: H01L27/115
Filed: 1998-10-27
Abstract: PURPOSE: A multi-bit flash memory device is provided to supply various current levels by forming an asymmetric channel area between a source area and a drain area. CONSTITUTION: A multi-bit flash memory device comprises a multitude of stack gates, a source area(S1,S2), and a drain area(D). The stack gates comprise a floating gate(104a,104b) and a control gate(106). The floating gate is formed as a state insulated to a silicon substrate by a tunnel oxidation layer(103). The control gate is formed as an electrically insulated state by the floating gate and a dielectric layer(105). The source area is formed as an arranged state by the floating gate and the control gate. The drain area is formed on an exposed silicon substrate. The drain area is overlapped with a second stack gate, however it is not overlapped with the first stack gate.
Patent KR-19990062683-A (KR)
Title: 회전 공기 와류 인가 장치
IPC: B05B7/08
Filed: 1998-12-01
Abstract: 밀봉제 또는 접착제와 같은 점성 재료를 분배하기 위한 와류 인가 장치에는 중심을 통과하는 중공축을 가지며 분배 인가 장치용 노즐 조립체가 일단부에 배치된 변속 모터가 제공된다.  모터축은 또한 나사가 형성된 축을 일단부에서 가지며 나사는 공기 캡을 설치하기 위해 사용된다.  일단 인가 장치가 적소에 배치되면, 최종 사용자는 조절 공기 및/또는 모터를 온 및 오프함으로써 유선형 유동과 와류 사이에서 변경할 수 있다.  조절 공기를 사용함으로써, 와류의 형태가 생성될 것이다.  와류의 형태는 모터의 회전 속도 및/또는 조절 공압의 변화에 의해 영향을 받을 수 있다.
Patent KR-19990062708-A (KR)
Title: 전자 부품
Filed: 1998-12-02
Abstract: 인터페이스핀에 여분의 땜납이 부착되지 않는 전자부품을 제공한다. 
     전자부품(1)은 구멍(12)을 갖는 기판(10), 소정의 기능을 실행하는 칩부품(21∼26), 및 적어도 1개의 인터페이스핀(30a)를 갖는 인터페이스부품(30)을 포함한다. 칩부품(21∼26)과 인터페이스부품(30)은 기판(10)의 한 면에 면실장되어 있다. 인터페이스부품(30)의 인터페이스핀(30a)은 기판(10)의 구멍(12)을 통해, 기판(12)의 실장면에 대하여 수직방향으로 연장된다.
Patent KR-19990062911-A (KR)
Title: 디지털 송신에서 데이터 구조를 변경하지 않고 화상/음성 신호의 복제를 방지할 수 있는 복제 방지 회로
IPC: G11B20/10
Filed: 1998-12-09
Abstract: 스트림 처리 수단(1)에 의해 처리되는 화상/음성 / 데이터 등의 다중화된 스트림 정보는 화상/음성 데이터와, 스트림 확인 수단(3)에 의해 다른 데이터로 분리되는데, 그 하나는 디-스크램블 수단(2)을 통해서 재생 처리 수단(8, 9)으로 출력되고, 다른 하나는 스크램블 키 구별 수단(5)과 I/F 수단(6)을 통해서 PC 등과 같은 데이터 버스에 접속된다. 스크램블 키 구별 수단은 스크램블 키 추출 수단(4)의 스크램블 키 정보의 수신에 있어서의 데이터 포트로 출력되는 신호의 데이터 포맷을 구별하고, 화상 또는 음성에 관한 스크램블 키인 것으로 판정되는 정보를 폐지함으로써 데이터 버스로 출력되지 않고, 화상/음성을 차단하는 스크램블 키만을 출력한다.
Patent KR-20000039462-A (KR)
Title: Method of manufacturing sintered ores having high ferro dose using steel manufacturing sludge
Inventor: LEE DAE YEOL
IPC: C22B1/16
Filed: 1998-12-14
Abstract: PURPOSE: A method of manufacturing sintered ores having high ferrite content is provided to improve the quality and productivity of sintered ores by mixing and sintering lime sludge in a process of sintering steel manufacturing sludge and limestone. CONSTITUTION: A sintered substance with hemi-calcium ferrite as a main ore is produced by mixing steel-making sludge and lime sludge at a ratio of 0.5-2.0:1 and sintering the sludge at a temperature of 1150-1250°C. After that, the sintered substance is crushed and replaced with the limestone lower than 30%. Therefore, the combination between particles of ores is easily performed and heat loss is reduced.
Patent KR-19990063354-A (KR)
IPC: B01J12/00
Filed: 1998-12-23
Abstract: A method for controlling a chemical reactor such as a gas-phase reactor using a non-linear predictive control includes steps for generating a plurality of signals representing a current state of the chemical reactor and reflecting a respective constituent of reactants in the chemical reactor, calculating a future state of the chemical reactor responsive to said plurality of signals and referenced to mass hold-up of the reactants in the chemical reactor, and controlling at least one parameter related to the chemical reactor so as to control the future state of the chemical reactor. Spurious control events due to noise in sensor or controller output signals are preferably minimized by filtering these signals using a N-sign filter subroutine.
Patent KR-20000042361-A (KR)
Title: Device for demodulating channel in multi-code transmission system
Inventor: CHOI AHN NA
IPC: H04B1/10
Filed: 1998-12-24
Abstract: PURPOSE: A device for demodulating a channel in a multi-code transmission system, is provided to compensate phase distortions of N channels by using one phase compensator, in a receiving terminal of a code division multiple access(CDMA) system using a multi-code transmission system. CONSTITUTION: A device for demodulating a channel in a multi-code transmission system, comprises a phase estimator(21), correlation units(22-1/22-N), a multiplexer(23), a phase compensator(24) and a demultiplexer(25). The phase estimator(21) estimates a phase of a distorted receiving signal. The correlation units(22-1/22-N) are as many as channels calculating correlation with receiving signals by using an allocated correlation codes. The multiplexer(23) multiplexes correlation signals output from correlation units as many as channels. The phase compensator(24) compensates phases of received signals, by complex-multiplying phase estimation values estimated by the phase estimator to multiplexed correlation signals by the multiplexer. And the demultiplexer(25) demultiplexes an output of the phase compensator, to output by the symbol. The phase compensator(24) has a multiplier performing complex-multiplying operation, and the multiplier is operated N(channel number)-times faster than a symbol.
Patent KR-20000043438-A (KR)
Title: Method and device for monitoring upward warp on-line of bar in rough milling process by using laser curtain
Inventor: LEE HO GUK
IPC: B21B37/68
Filed: 1998-12-29
Abstract: PURPOSE: A method and a device for monitoring the upward warp on-line of a bar are provided to improve the defect of product quality by preventing equipment damage and misoperation and to enhance the rolling efficiency by minimizing the time of non-operation. CONSTITUTION: A laser oscillation light oscillated from a laser oscillation group is blocked while a front end part of a bar in which an upward warp is generated passes through a laser curtain. Then, some light receiving sensors of a light receiving group(8) does not receive the laser light. Herein, the light receiving sensor which does not receive the laser light sends an off-signal. In addition, other light receiving sensors transfer an on-signal to a monitor controlling system. Accordingly, the degree of upward warp in the bar is monitored.
Patent KR-20000045391-A (KR)
Title: Method for forming fine pattern of semiconductor device
Inventor: YEO GYUNG SU
IPC: H01L21/027
Filed: 1998-12-30
Abstract: PURPOSE: A method for forming a fine pattern of a semiconductor device is provided to reduce butting errors and stitching errors by using multi phase printing in a lithography process. CONSTITUTION: A method for forming a fine pattern of a semiconductor device comprises the following steps. A job deck is formed to define a dose, a spot size, a shot size, and an exposure order when performing an exposure process. The number of the exposure and the size of dose are set up. An exposing area is divided into segments separated by a multitude of stripe. The exposure process is performed step by step by moving slowly a boundary face(13) of the separated stripes.
Patent KR-20000045934-A (KR)
Title: Method for rinsing semiconductor device
Inventor: YUN CHEOL SU
IPC: H01L21/304
Filed: 1998-12-30
Abstract: PURPOSE: A method for rinsing a semiconductor device is provided to remove Fe metal contaminants on the semiconductor substrate of which the SiO<SB POS="POST">2</SB> layer exposed to outside. CONSTITUTION: A method for rinsing a semiconductor device includes following steps. At the first step, an oxide layer SiO<SB POS="POST">2</SB> is formed on the semiconductor substrate(61) selectively. At the second step, the semiconductor substrate is placed in a gas atmosphere including Cl<SB POS="POST">2</SB> gas. At the third step, an ultra violet wave is illuminated on the semiconductor substrate. At the forth step, a SiCl<SB POS="POST">x</SB> radical is formed from the gas atmosphere. At the fifth step, the semiconductor substrate is rinsed using the SiCl<SB POS="POST">x</SB> radical.