baber/WOPTO huggingface dataset:
Patent KR-20160144030-A (KR)
Title: The mirror which helps using artificial tears.
Inventor: SONG HO YOON
IPC: A45D42/18
Filed: 2015-06-08
Abstract: The present invention relates to a compact mirror for artificial tear injection. The compact mirror has a small groove at the center, and an inlet portion of the artificial tear is attached to the groove, thereby helping a user to easily spot an eye when injecting the artificial tear. In addition, a rubber ring on the edge of the central groove makes it easy to attach the groove and the inlet of the artificial tear together by friction. Accordingly, it is possible to inject the artificial tear in an easy and precise way while minimizing inconvenience in injection of the artificial tear.
Patent KR-20160144832-A (KR)
Title: Composite for anode active material, anode including the composite, lithium secondary battery including the anode, and method of preparing the composite
Inventor: MUN JIN SOO
IPC: H01M4/36
Filed: 2015-06-09
Abstract: Disclosed are an anode active material composite, an anode containing the anode active material composite, a lithium secondary battery containing the anode, and a method for manufacturing the anode active material composite. The disclosed anode active material composite contains silicon-base anode active material, metal nitride, and metal fluoride. The content of the metal fluoride is greater than 1 part by weight and less than 5 parts by weight based on total 100 parts by weight of silicon-based anode active material, metal nitride, and metal fluoride. The anode active material composite includes a stable composite coating layer to suppress sharp lifetime degradation due to continuous formation of SEI layers by repetitive charging and discharging, thereby providing a lithium secondary battery with excellent lifetime property.
Patent KR-20160145415-A (KR)
Title: 열 보존 받침대를 구비한 냄비
Inventor: LEE KYU YONG
IPC: A47J36/34
Filed: 2015-06-10
Abstract: 이 발명은 냄비와 받침대가 결합이 가능하도록 냄비의 밑바닥 부분엔 홈이 있고, 받침대의 중앙엔 냄비의 홈에 결합 가능하도록 돌출된 부분이 있어 결합되면 떨어질 위험이 없고 한 번에 옮길 수 있고, 받침대의 밑바닥 부분은 고흡수성 폴리머를 포함하고 있는 내열성 소재로 구성된 밀폐막으로 덮여 있어 음식물의 열을 건전지나 전기선의 도움 없이 열 보존이 가능한 열보존 받침대냄비에 관한 것이다.
Patent KR-20160147191-A (KR)
Inventor: YOON JE YONG
IPC: F16H7/08
Filed: 2015-06-12
Abstract: 원통형의 하우징; 하우징 내부에 삽입된 토션스프링; 하우징 내측면을 따라 마련된 랙기어; 랙기어와 맞물려 움직이는 피니언기어; 및 몸체가 피니언기어의 회전축과 연결되고, 일측이 토션스프링과 연결되며, 타측이 하우징 외부의 벨트와 연결됨으로써, 벨트의 장력에 의해 이동되며 토션스프링을 가압하는 가압부;를 포함하는 차량용 텐셔너가 소개된다.
Patent KR-20160147400-A (KR)
Inventor: PARK SEUNG OK
IPC: A62C33/04
Filed: 2015-06-15
Abstract: The present invention relates to a hose winding drum for a fire hydrant hose reel which is fastened while one surface of a disk where a bottom surface of one end of a plurality of winding bars is welded along the circumference of the disk comes in contact to an inner surface of one side plate. The present invention has significantly improved productivity.
Patent KR-20150145725-A (KR)
Inventor: BOITARD RONAN
IPC: H04N5/235
Filed: 2015-06-19
Abstract: The present invention provides a method and apparatus for a dynamic range expansion of an LDR video sequence. The method comprises the following steps: acquiring an LDR video sequence and at least one HDR panorama concurrently, wherein an image of the HDR includes wider view than that of an image of the LDR; determining a dynamic range expansion operator based on the LDR video sequence and HDR panoramas; and applying the determined dynamic range expansion operator to the LDR video sequence.
Patent KR-20170000430-A (KR)
Inventor: SHIM JAE YONG
IPC: A23L7/109
Filed: 2015-06-23
Abstract: The present invention relates to a noodle to reduce cooking time. The noodle forms porosity when cooked in boiling water by using flour dough additives including dextrin and liquid phase oil. Accordingly, heat conductivity is increased and a cooking time of the noodle is significantly reduced.
Patent KR-20170000210-A (KR)
Inventor: KIM DAE JOON
IPC: E05B85/24
Filed: 2015-06-23
Abstract: Disclosed are a method for improving a coating bonding force of a vehicle door latch and a vehicle door latch using the same. According to an embodiment of the present invention, the method for improving a coating bonding force of a vehicle door latch for locking or unlocking a vehicle door comprises: a) a step of machining the surface of a metal part making up a vehicle door latch to form a fine uneven unit; and b) a step of inserting the metal part into an injection-molding mold and injecting a resin composition onto the surface of the metal part to coat the metal part. At least a portion of the resin composition is solidified while being inserted into the fine uneven unit in step b).
Patent KR-20170000277-A (KR)
Inventor: KIM YOON TAE
IPC: E04F17/00
Filed: 2015-06-23
Abstract: The present invention provides a device to install a riser pipe. According to the present invention, the device to install the riser pipe (A) in a building comprises: a lift-up device (410) piling a pipe (100) to be erect, and lifting the pipe (100) to an upper layer through a pipe hole (2) formed on an upper layer floor slab (1); and a fixing frame (420) fixating the pipe (100) moving to the upper layer by the lift-up device (410). According to the present invention, the device to install the riser pipe enables a worker to easily construct the riser pipe in a site using the device to install the riser pipe. Also, the device to install the riser pipe is able to reduce a construction time by minimizing a site work. Moreover, the device to install the riser pipe prevents accidents in the site, and minimizes input of human resources for construction as the worker conducts an installation work of the pipe using the device to install the riser pipe.
Patent KR-20170001768-A (KR)
Inventor: KIM SEUNG HO
IPC: G01N11/04
Filed: 2015-06-25
Abstract: The present invention relates to a dual syringe type disposable blood viscosity measurement kit assembly comprising: a diagnostic kit including a plurality of micro channels to pass a reference fluid and diagnosed blood, and a reference fluid injection hole and a blood injection hole communicating with the micro channels; a syringe unit including tip parts inserted into the reference fluid and blood injection hole of the diagnostic kit, respectively; and a case including a kit receiving unit to detachably receive the diagnostic kit and a syringe receiving unit to detachably receive the syringe unit having an opened upper part. As such, the diagnostic kit and syringe unit are easily assembled with the case such that a blood viscosity measurement kit is manufactured in a disposable type; thereby providing a convenience of use and high safety due to prompt disposal after usage. Moreover, the reference fluid and a sample fluid is able to safely and easily be injected into the syringes; stability of flow is ensured and pressing easily performed after injection by a sealing member and a sealed pressing bar without the fluids from leaking such that the kit is safely and conveniently used; and a precise measurement is realized without anxiety to expose the blood to air during measurement.
Patent KR-20160051546-A (KR)
Inventor: ROUAISSIA CHAOUKI
IPC: G06F3/041
Filed: 2015-06-25
Abstract: A proximity sensor has a sensing node. A radio frequency signal is received at the sensing node. The radio frequency signal is coupled to an intermediate node through a first capacitor. The radio frequency signal is coupled from the intermediate node to a ground node through a second capacitor. An RF amplifier is coupled to the sensing node. The radio frequency signal is generated using the RF amplifier. A third capacitor is coupled between the RF amplifier and the sensing node. An antenna is coupled to the sensing node. The radio frequency signal is transmitted using the antenna. A capacitance of the antenna is measured using the proximity sensor. The capacitance of the antenna is compared to a threshold to determine proximity of a conductive object. An inductor is coupled between the sensing node and the antenna. A shielding area is coupled to the intermediate node.
Patent KR-20170006082-A (KR)
Title: Pusher assembly and match plate for test handler
Inventor: JANG JAE U
IPC: G01R1/04
Filed: 2015-07-07
Abstract: The present invention relates to a pusher assembly and a match plate used for a test handler which supports a test of a semiconductor device. The pusher assembly according to the present invention includes: a pressing portion installed on an installation plate for pressing a semiconductor device; a preceding portion provided in an advanceable and retractable manner relatively to the pressing portion for making contact with an insert in advance before the pressing portion makes contact with the semiconductor device, when the pressing portion is advanced toward the semiconductor device to press the semiconductor device loaded on the insert; and an elastic body for elastically supporting the preceding portion in a direction of pressing the insert. In addition, the match plate according to the present invention includes the pusher assembly. According to the present invention as described above, the semiconductor device, a test socket, and the insert are prevented from being damaged due to an impact caused by a pressing operation, and semiconductor devices having various thicknesses are able to be pressed, thereby expanding versatility. Accordingly, production costs are reduced, reliability of a product is improved, and labor, time, and costs are reduced and an operation rate of equipment is improved because components are not replaced.
Patent KR-20170006418-A (KR)
Inventor: YANG EUN CHAE
IPC: A45C13/02
Filed: 2015-07-08
Abstract: 본 발명인 다기능 필통은 수납함(300)과 필기구 꽂이(230)와 필기구 꽂이함(220)을 포함하는 몸체부;와 몸체부 하측에 위치하여 필기도구를 넣어 보관할 수 있도록 형성된 수납함(300);과 몸체부 상단에 아래에 위치하여 내부 공간이 형선된 필기구 꽂이(230)가 형성된 필기구 꽂이(231);와 몸체부 상단 왼쪽에 위치하여 내부 공간이 형성된 필기구 꽂이함(220);과 몸체부 상단 오른쪽에 위치히여 내부 공간이 형성된 필기구 꽂이함(210)으로 구성된 것을 특징으로 한다. 또한 다양한 필기구 꽂이함과 필기구 꽂이가 있어 여러 가지 물건을 간편하게 보관할 수 있고, 외부로부터 충격을 받으면 안 되는 것들을 안전하게 보관하는 것을 제공한다.
Patent KR-20170007015-A (KR)
Inventor: NO EUN TAEK
IPC: A61H39/06
Filed: 2015-07-10
Abstract: The present invention relates to a cooling device for a cold massage mechanism that cools a cold massage mechanism it receives and includes: a housing provided with an accommodating space; a thermoelectric element placed on an upper surface of the housing with its upper surface directed to the outside of an upper side of the housing and its lower surface directed toward the inside of the housing; and a heat radiating section built into the accommodating space, placed on a lower side of the thermoelectric element, and radiating heat to the outside after the heat is radiated from the lower surface of the thermoelectric element. In the cooling device for a cold massage mechanism according to the present invention, a metallic surface formed on a lower surface of the received cold massage mechanism is cooled in direct contact with the thermoelectric element, and thus effective refrigerant cooling can be performed. During the cooling, the efficiency of heat exchange between the cold massage mechanism and the thermoelectric element can be enhanced via a cool air protection cover and a heat pipe surrounding the cold massage mechanism.
Patent KR-20170009353-A (KR)
Title: 커넥터 어셈블리
Inventor: JUNG YONG SOO
IPC: H01R13/629
Filed: 2015-07-16
Abstract: 본 발명의 커넥터 어셈블리는, 다수개의 제1터미널, 및 상기 제1터미널이 고정되고 적어도 1개의 가이드 리브가 구비되는 제1하우징을 포함하는 제1커넥터, 및  상기 제1터미널과 접속되는 다수개의 제2터미널, 및 상기 제2터미널이 고정되고 상기 가이드 리브가 각각 삽입되어 가이드되는 적어도 1개의 가이드 슬롯이 형성되는 제2하우징을 포함하는 제2커넥터를 포함하고,  상기 제1하우징이 상기 제2하우징에 삽입되어 결합되면, 상기 제1가이드 리브는 상기 가이드 슬롯에 삽입되어 이를 따라서 가이드되고, 상기 제1하우징이 상기 제2하우징에 삽입되는 방향에 직교되는 방향으로 상기 가이드 리브의 폭은 상기 가이드 슬롯의 폭에 비하여 상대적으로 작게 형성되며, 상기 제1하우징이 상기 제2하우징에 삽입되는 방향으로 상기 제1가이드 리브의 선단에는, 상기 가이드 슬롯의 폭과 같은 폭을 가지는 오삽입 방지 돌기가 구비된다. 따라서, 커넥터 및 상대 커넥터 사이의 오삽입 또는 이에 따른 터미널 손상을 방지할 수 있는 효과가 있다.
Patent KR-20160010354-A (KR)
Inventor: JOUNG JIN SOUP
IPC: H04W40/02
Filed: 2015-07-16
Abstract: 본 발명은 무선 백홀 시스템에서 백홀 단말에 다중 무선전송기술이 적용되는 경우 지연을 최소화할 수 있도록 효율적으로 데이터를 라우팅하는, 다중 무선전송기술이 적용된 무선 백홀 시스템에서의 데이터 라우팅 방법에 관한 것이다. 
본 발명의 제 1 특징에 따른 다중 무선전송기술이 적용된 무선 백홀 시스템에서의 데이터 라우팅 방법에 따르면, 백홀 기지국에는 일반 단말 또는 백홀 단말이 무선으로 연결되고, 백홀 단말에는 백홀경유 단말이 WiFi AP, 3G 기지국 또는 LTE 기지국을 통해 연결된 무선 백홀 시스템에서 LTE 망 또는 백홀 기지국에 구비된 백홀 에이전트에 의해 수행되되, 백홀 기지국에 연결된 단말이 백홀 단말인 경우 백홀 기지국에 추가의 자원이 예약되는 무선링크(E-RAB)의 할당을 시작하고, 활성화된 자원에 대한 게이트웨이 주소를 자신의 주소로 설정하며, 상기 설정된 주소를 통해 백홀 단말에서 발생하는 모든 데이터를 1차적으로 수신한다. 
전술한 제 1 특징에서, 백홀 에이전트는, 백홀경유 단말에서 송신한 데이터에 대하여 백홀 단말과 백홀 기지국 사이에서 추가된 헤더를 제거한 후 3G 망 또는 LTE 망에 전달하고, 3G 망 또는 LTE 망에서 수신한, 백홀경유 단말에 전달되어야 하는 데이터에 대하여 백홀 단말과 백홀 기지국 사이의 라우팅을 위한 헤더를 추가하는 것을 특징으로 한다. 
백홀 에이전트는 백홀 기지국에서 수신한, 백홀경유 단말에서 송신된 데이터에 대하여 백홀 단말과 백홀 기지국 사이에 추가된 헤더를 제거한 후 인터넷 망으로 전달하고, 인터넷 망에서 수신한, 백홀경유 단말에 전달되어야 하는 데이터에 대하여 백홀 단말과 백홀 기지국 사이 라우팅을 위한 헤더를 추가하는 것을 특징으로 한다. 
백홀 기지국에서 예약되는 자원의 양 및 특성은 QCI(QoS Class Identifier) 또는 AMBR(Aggregated Maximum Bit Rate)을 사용하여 결정하는 것을 특징으로 한다.
Patent KR-20170014719-A (KR)
Title: Composite Hollow Fiber Membrane and Method for Manufacturing The Same
Inventor: YANG HYOUNG MO
IPC: B01D71/06
Filed: 2015-07-31
Abstract: Disclosed are a composite hollow fiber membrane capable of satisfying tensile strength requirement of 10 kgf/cm^2 or more, having excellent water permeability and peel strength, and producing high productivity. The composite hollow fiber membrane of the present invention comprises: a tubular nonwoven fabric having irregularly arranged pores; and a polymeric membrane on the outer surface of the tubular nonwoven fabric.
Patent KR-20160017618-A (KR)
Title: Apparatus and method for detecting Slanted angle of Lenticular and Parallax barrier of stereoscopic display, computer program for detecting Slanted angle of Lenticular and Parallax barrier of stereoscopic display, and storage medium storing the computer program
Inventor: KIM WOOK
IPC: G01B21/22
Filed: 2015-07-31
Abstract: The present invention relates to an apparatus and a method for detecting a slanted angle of a lenticular or parallax barrier of a glassless stereoscopic display, a computer program for detecting a slanted angle of a lenticular or parallax barrier of a glassless stereoscopic display, and a storage medium for storing the computer program. According to an embodiment of the present invention, the apparatus for detecting a slanted angle is a display apparatus which comprises: an input unit for controlling the slanted angle; a control unit for displaying a diagonal line having the slanted angle on a display device which comprises a barrier or lenticular lens plate; and, a display unit for displaying the slanted angle.
Patent KR-20170020603-A (KR)
Inventor: HUH SEUNG HUN
IPC: H05B3/26
Filed: 2015-08-12
Abstract: 본 발명은 「(a) 기판의 일면에 투명전도막이 코팅된 전기전도성 기판을 준비하는 단계; (b) 상기 전기전도성 기판의 표면을 식각하는 단계; (c) 식각된 전기전도성 기판의 표면에 경화형 전구체를 코팅하여 경화형 코팅막을 형성시키는 단계; (d) 상기 경화형 코팅막을 건조시키는 단계; (e) 상기 경화형 코팅막을 경화시키는 단계; 및 (f) 상기 경화형 코팅막 중 경화가 덜 된 부분을 제거하는 단계;를 포함하여 이루어지는 원적외선 히터 소자 제조방법」을 제공한다.
Patent KR-20170022320-A (KR)
Inventor: JANG SUNG JIN
IPC: B24B41/06
Filed: 2015-08-20
Abstract: The present invention relates to a grinding angle adjusting device for blades supporting an edged tool at an accurate grinding angle on the surface of a grinding machine such as a grinding wheel when grinding the blade of an edged tool, comprising: a rotary shaft; a guide plate including an engaging portion provided to be bent at one end thereof so as to surround the outer circumferential surface of one side of the rotary shaft and a guide portion extending from the engaging portion to the outside of the rotary shaft; and a pair of first rollers rotationally coupled to both ends of the rotary shaft.
Patent KR-20170022331-A (KR)
Title: A mobile terminal
Inventor: KIM SU JIN
IPC: G06F3/0484
Filed: 2015-08-20
Abstract: A mobile terminal comprises a touch screen, a wireless communication unit performing wireless communication with a wearable device, and a control unit. The control unit transmits a specific area obtained on the execution screen of a first application to the wearable device, displays the execution screen of a second application, receives the specific area from the wearable device, and attaches the information of the received specific area to the execution screen of the second application.
Patent KR-20170023363-A (KR)
Title: System and method for measuring high height by digital holography microscope
Inventor: KIM JAE CHEON
IPC: G01B11/06
Filed: 2015-08-21
Abstract: According to the present invention, a system of measuring high step difference using a digital holography microscope comprises: a composite wave radiator radiating a composite wave having a longer wavelength than an original wavelength by interference of each different wavelength; a beam splitter dividing and outputting the radiated composite wave into a reference beam route (R) and a measurement beam route (O); a mirror reflecting the composite wave output to the measurement beam route (O), allowing the composite wave to face a sample; an objective lens allowing the composite wave, reflected by the sample, to be incident; and a camera capturing an image of the composite wave passing through the objective lens. As such, the present invention may measure a sample having a high step difference greater than or equal to 100 um using a composite wave.
Patent KR-20170024725-A (KR)
Title: Battery Module
Inventor: BAE SANG HOON
IPC: H01M50/533
Filed: 2015-08-26
Abstract: The present invention provides a battery module including a common holder and an electrode plate, thereby easily expanding capacitance, reducing material costs, and improving productivity. According to one embodiment, the battery module includes: a unit cell including a first electrode tab and a second electrode tab; a plurality of battery units including a plurality of unit cells; a holder disposed at one side of the battery unit, and including a plurality of through holes into which the first electrode tab and the second electrode tab penetrate; a plurality of electrode plates mounted in the holder to electrically connect the unit cells in the battery unit with each other; and a connection member coupled to an end of one of the electrode plates to electrically connect the battery units to each other. A pair of mounting protrusions protrudes from one side of the holder while being spaced apart from each other, and one of the electrode plates passes between the pair of mounting protrusions.
Patent KR-20170024828-A (KR)
Title: 선박
Inventor: SEO UN DO
IPC: B63B3/70
Filed: 2015-08-26
Abstract: 본 발명은 선박에 관한 것이다. 본 발명의 일 실시 예에 따른 선박은 선체; 상기 선체의 상부에 위치되는 데크 하우스; 상기 데크 하우스의 양측에 위치되는 브리지 윙을 포함하되, 상기 브리지 윙은, 경사진 내측 하면을 갖는 하우징; 및 상기 내측 하면의 경사진 방향을 따라 서로 이격되어 위치되고, 그 하단이 상기 내측 하면에서 이격 되도록 제공되는 발판 부재를 포함한다.
Patent KR-20170024881-A (KR)
Title: Method and system for stepwise sharing profit according to redevelopment and re-registration of software
Inventor: KIM YONG GOON
IPC: G06Q20/10
Filed: 2015-08-26
Abstract: The present invention relates to a method and system for the stepwise distribution of a profit according to redevelopment and re-registration of software for a computer or the like. According to an embodiment of the present invention, a method for stepwise distribution of profit according to redevelopment and re-registration of software, which distributes profit in stages according to redevelopment and re-registration of software for an electronic device such as a computer, a smartphone or the like, comprises: an original software registration step of accessing a server by a first user terminal to register an original software; an upgrade software re-registration step of purchasing the original software from the server and receiving the transmitted original software by a second user terminal and correcting the original software or re-registering an upgraded software through additional development to the server; an upgrade software purchasing step of purchasing the upgraded software from the server by a third user terminal; and a profit distribution step of distributing a predetermined profit to the first user terminal and the second user terminal by the server when the third user terminal purchases the upgraded software. According to the present invention, a program is redeveloped in a manner of adding a new function to a source program of software purchased through an open source license policy or the like to be registered to the server and allow resale, thereby creating a new profit while promoting activation of software development.
Patent KR-20160026750-A (KR)
Title: Evaporator
Inventor: LEE DUCK HO
IPC: F28F9/02
Filed: 2015-08-27
Abstract: The present invention relates to an evaporator (1000) and, more specifically, relates to an evaporator (1000) which has eight pass flow of a first area (A1) to a eighth area (A8) for refrigerant to be evenly distributed to each area to reduce temperature difference and to increase heat exchange efficiency with outdoor air, and air discharged left and right in the interior of a vehicle has even temperature distribution to maintain comfort of a passenger.
Patent KR-20170001532-A (KR)
Title: System for Controlling Multiple Cooling Fans for Battery Cooling
Inventor: SONG DUCK HYUN
IPC: H01M10/6563
Filed: 2015-08-27
Abstract: The present invention relates to a system for controlling a plurality of cooling fans for a battery pack, which can drive a plurality of cooling fans for cooling a battery pack by using a single control board, thereby enabling a wire harness, composed of a minimum number of wires, to be used. The system for controlling a plurality of cooling fans for a battery pack comprises: a plurality of cooling fans which are disposed at intervals inside a housing installed on a side surface of a battery pack, and which generate air blowing force; and a control board on which the cooling fans are directly mounted, and which controls and supplies power to the cooling fans; wherein the control board comprises at least one signal processing device configured to drive the cooling fans in accordance with motor driving information received from a battery management system (BMS).
Patent KR-20170026887-A (KR)
Inventor: SON YEONG MAN
IPC: F16K3/30
Filed: 2015-08-31
Abstract: 본 발명은 일측에 세정모듈(미도시)과 연결되는 유입관부(110)와, 상기 유입관부(110)로부터 수평방향으로 연장형성되는 유체이동부(120)와, 상기 유체이동부(120)로부터 수직방향으로 연장형성되어 챔버(미도시)와 연결되는 유출관부(130) 및 상기 유체이동부(120)로부터 수평방향으로 연장형성되는 중공관부(140)를 포함하는 밸브하우징(100);과, 상기 중공관부(140)에 구비되되, 중앙에 통과공(210)이 형성되는 실링플레이트(200);와, 상기 밸브하우징(100)의 타측에 결합되는 실린더(300);와, 상기 실린더(300)의 내부로부터 기밀을 유지하면서 결합되어 상기 통과공(210)을 통과하되, 상기 실린더(300)의 구동에 따라 수평이동하는 피스톤(400);과, 상기 중공관부(140)에 구비되되, 상기 피스톤(400)과 연결되어 상기 실린더(300)의 구동에 따라 상기 유체이동부(120)로 이동하여 상기 유입관부(110)를 개폐하는 밸브블레이드(500);로 구성되되, 상기 유체이동부(120)와 중공관부(140)의 경계둘레에는 내측방향으로 단턱부(150)가 돌출형성되고, 상기 밸브블레이드(500)의 타측둘레에는 외측방향으로 폐쇄돌기부(510)가 돌출형성되어, 상기 밸브블레이드(500)가 상기 유입관부(110)를 폐쇄한 상태에서 상기 폐쇄돌기부(510)와 단턱부(150)가 맞닿게 되어 상기 유출관부(130)와 중공관부(140) 사이를 밀폐시키는 것을 특징으로 한다.
Patent KR-20160033034-A (KR)
Title: Plasma processing apparatus
Inventor: HIRANO TAICHI
IPC: H01L21/02
Filed: 2015-09-07
Abstract: Improved is a pulse modulation method for switching a high frequency power used in plasma processing between a high level and a lower level according to a duty ratio of a modulation pulse. According to a plasma processing apparatus, for example, in a case pulse modulation of high/low is applied to a high frequency for generating plasma, if a weight variable (K) of a weighted average in a matching unit is set to satisfy 0.5<K<1, a reflected wave of constant power (PR_H) is generated even during a pulse on period (T_(on)) on a high frequency feed line of a plasma generation system, and on the other hand, the power (PR_L) of the reflected wave is reduced during a pulse off period (T_(off)). By adjusting the value of K, balance between the reflected wave power during the pulse on period (T_(on)) and the reflected wave power during the pulse off period (T_(off)) can be controlled at random.