baber/WOPTO huggingface dataset:
Patent KR-20000031368-A (KR)
Title: Method and apparatus for taking image of thunderbolt
Inventor: JEONG JEA KEE
IPC: H04N5/225
Filed: 1998-11-05
Abstract: PURPOSE: A method for taking images of the thunderbolt is provided to manage the thunderbolt images for a set time by passing the thunderbolt images, continuously taken by use of a CCD camera, through dozens of memory pages, composed by semiconductor memories. CONSTITUTION: A method comprises steps of continuously taking the images of the instantly disappearing thunder bolt by the CCD camera, digitizing the taken images, passing the digital images through the memory pages, checking if the passed images are as desired, stopping one-by-one movement of the memory pages in case that the passed image is desired, storing the desired images in a hardware, and printing necessary images. The apparatus comprises the CCD camera(21), photo sensors(3,11,22) sensing new photo sources, a digitizer(34) digitizing the images taken by the CCD camera(21), a processor(37) checking it the taken image is thunder bolt image by comparing the digitized image with a general image, and a storage & output device(40) storing and outputting the thunder bolt image.
Patent KR-20000031807-A (KR)
Title: Retaining ring of chemical and mechanical polishing device
Inventor: YOON MYEONG SUP
IPC: B24B37/00
Filed: 1998-11-10
Abstract: PURPOSE: A retaining ring is provided to regularly distribute slurries on the surface of a wafer polished by the polishing head of a chemical and mechanical polishing(CMP) equipment, and to extend the life span of a pad. CONSTITUTION: A retaining ring(140) has so many grooves(160) as slurry passages. The section of the groove is in a round shape. Therefore, the retaining ring smoothly supplies slurries and extends the life span of a polishing pad by reducing abrasion amount of the pad. The retaining ring is placed in the bottom edge of a polishing head, covers a wafer(120) and prevents the wafer from moving. The slurry is regularly dispersed on the surface of the wafer as supplied through the groove.
Patent KR-20000032786-A (KR)
Title: Device for counting radioactivity on inner wall surface of reactor
Inventor: LEE BONG JAE
IPC: G01T1/167
Filed: 1998-11-18
Abstract: PURPOSE: A device for checking radioactivity on the inner wall surface of a reactor is provided to measure the degree and range of radioactivity. CONSTITUTION: A device for checking radioactivity on the inner wall surface of a reactor comprises a cylindrical casing(20) opened toward a portion where a transmission window(11) is positioned, and having a rubber cover(40) at the opened region, a plastic scintillation detector being built in as a unit(10) for checking beta and gamma radioactive rays on the inner wall surface of a reactor water vessel; a shutter unit(30) disposed among the transmission window(11) of the checking unit(10), the opened unit of the cylindrical casing(20) and the rubber cover(40); and a transfer unit(50) for pressing a rear end of the cylindrical casing(20) to be welded, and transferring it in every direction in the water vessel of the reactor according to the position of the radioactive ray detector.
Patent KR-19990014606-A (KR)
Title: 무균농축액 주입장치
IPC: B65B3/04
Filed: 1998-11-26
Abstract: 본 발명은 무균농축액 주입장치에 관한 것으로, 더욱 상세하게는 포도, 사과, 배 등의 과즙 및 알갱이를 갖는 과일농축물 또는 가공유산물울 무균처리하여 포장하기 위한 무균농축액 주입장치(1)는, 특수뚜껑처리된 팩을 잡기 위한 팩홀더장치(100)와; 상기 팩홀더장치(100)에 의해 잡힌 팩의 뚜껑을 개폐하기 위한 뚜껑개폐장치(200)와; 상기 뚜껑개폐장치(200)에 의해 개구된 팩의 주입구를 차폐하기 위한 셔터장치(300)와; 상기 셔터장치(300)에 의해 차폐된 팩의 개구부를 통하여 무균처리된 내용물을 충전하기 위한 충전장치(400)와; 상기 장치들을 콘트롤하기 위한 제어장치(500)와; 상기 충전장치(400)에 의해 충전된 팩을 이송 및 재치하기 위한 재치수단(600)과; 상기 재치수단(600)을 승강시키기 위한 승강장치(700)로 구성된다.
Patent KR-20000038617-A (KR)
Title: System for exhausting hcl gas bombe
Inventor: LEE SU CHEOL
IPC: H01L21/02
Filed: 1998-12-08
Abstract: PURPOSE: A system for exhausting an HCl gas bombe is provided to prevent a liquefied HCl from remaining in an exhausting pipe by effectively exhausting the liquefied HCl gas. CONSTITUTION: A HCl gas bombe exhausting system has a body(62) having an inner space(61) therein. An upper portion of the body(62) is connected to an acid exhausting line(30) and a side portion of the body(62) is connected an exhausting pipe(42). A fan(64) is provided to exhaust a gaseous exhaust which is supplied into the body(62). A neutral water supplying section(90) is provided to supply a neutral water for diluting a liquefied or solid state exhaust. A mixture of the neutral water and the exhaust is injected through a nozzle(86). A pump(80) is provided to supply the mixture to the nozzle(86). An exhausting portion is provided at a lower portion of the body(62). An acid gas is exhausted through the acid exhausting line(30) and the mixture remaining in the body(62) is exhausted through the exhausting portion.
Patent KR-20000042653-A (KR)
Title: Apparatus and method for processing snap shot of usb camera
Inventor: KIM DO HYUNG
IPC: H04N5/232
Filed: 1998-12-26
Abstract: PURPOSE: An apparatus and a method for processing a snap shot of a USB(Universal Serial Bus) camera are provided to improve a capacity of USB by using an exclusive end point for snap shot. CONSTITUTION: An apparatus and a method for processing a snap shot of a USB camera comprise a camera(31), a frame synchronous pattern output portion(33a), a snap shot synchronous pattern output portion(33c), a snap shot determination portion(33b), a synchronous pattern selection portion(33d), an interface portion, a synchronous pattern insertion portion(33e) and a USB host(35). The camera outputs photographs an image, converts it into a digital signal, and outputs the digital signal. The frame synchronous pattern output portion outputs a synchronous pattern for distinguishing frames of the photographed image. The snap shot synchronous pattern output portion outputs a snap shot synchronous pattern. The snap shot determination portion determines on/off status of a snap shot button. The synchronous pattern selection portion selects one of the snap shot synchronous pattern output portion and the frame synchronous pattern output portion. The interface portion inserts a selected synchronous pattern between the end point frame and the frame. The USB host outputs the image data from the interface portion to a monitor.
Patent KR-20000044028-A (KR)
Title: Error perceiving apparatus of moving machine
Inventor: KIM SEONG DAE
IPC: B65G43/08
Filed: 1998-12-29
Abstract: PURPOSE: An error perceiving apparatus of moving machine is provided to perceive the mal-operation of a machine from the parity signal of a perceiving sensor by incorporating therein a special sensor. CONSTITUTION: An error perceiving apparatus of moving machine comprises plates(13) for location indicating, fixed location perceiving sensors(15, 16), plates(14) for error perceiving, error perceiving sensors(17) and an ECU(19). The plates(13) for location indicating are disposed to corresponding every working cells one by one, respectively. The fixed location perceiving sensors(15, 16) perceives the plates(13) for location indicating. The plates(14) for error perceiving are disposed in every odd cells corresponding to odd plates(13) for location indicating or every even cells corresponding to even plates(13) for location indicating. The error perceiving sensors(17) perceives the plates(14) for error perceiving. The ECU(19) counts the location perceiving signals inputted from the fixed location perceiving sensors(15, 16), compares the location perceiving signals with parity signals inputted from the error perceiving sensors(17), thereby perceives a mal-operation of the moving machine.
Patent KR-20000044889-A (KR)
Title: Method for forming bit line plug of semiconductor device
Inventor: KIM JAE YOUNG
IPC: H01L27/04
Filed: 1998-12-30
Abstract: PURPOSE: A method for forming bit line plug of semiconductor device is provided to reduce the loss of word lines, assure contact margin and simplify fabrication processes. CONSTITUTION: A method for forming bit line plug of semiconductor device comprises steps of: providing a semiconductor substrate on which plural word lines surrounded by a cap insulation film and spacers are formed; forming an anti-reflective coating layer on the substrate; forming a hard mask layer on the anti-reflective coating layer and forming photoresist patterns on the hard mask layer; patterning the photoresist patterns by an etching process to etch the exposed portions of the hard mask layer and then removing the photoresist patterns; etching the anti-reflective coating layer by a self-align contact process to form a contact hole; and depositing a polysilicon layer on the hard mask layer and then polishing it to form bit line plugs.
Patent KR-19990028769-A (KR)
IPC: C08F4/80
Filed: 1996-07-03
Abstract: Methods of forming polycycloolefins having high crosslink density are disclosed. Olefins are polymerized via a metathesis mechanism in the presence of a crosslinking agent and a catalyst. The crosslinking agent generally comprises a peroxide that decomposes into reactive species forming crosslinks during post-cure. The catalyst is a ruthenium or osmium carbene complex of the formula:   <IMAGE>   wherein M is Os or Ru; R and R1 are independently selected from hydrogen or a hydrocarbon selected from the group consisting of C1-C20 alkyl, C2-C20 alkenyl, C2-C20 alkynyl, C2-C20 alkoxycarbonyl, aryl, C1-C20 carboxylate, C1-C20 alkoxy, C2-C20 alkenyloxy, C2-C20 alkynyloxy and aryloxy; X and X1 are independently selected from any anionic ligand; and L and L1 are independently selected from any neutral electron donor. Preferably, L and L1 are trialkylphosphine ligands and at least one of the alkyl groups on the phosphine ligand may be a secondary alkyl or cycloalkyl group, especially P(isopropyl)3, P(cyclopentyl)3 and P(cyclohexyl)3. Preferred crosslinking agents are peroxides, such as t-butyl peroxide, 2,5-dimethyl-2,5-di-(tert-butylperoxy) hexyne-3, di-tert-butyl peroxide, and 2,5-dimethyl-2,5-di-(tert-butylperoxy) hexane or mixtures thereof. Olefins may be cyclic (e.g., monocyclic, bicyclic or tricyclic) or acyclic. Norbornene or norbornene derivatives are especially preferred.
Patent KR-19990028796-A (KR)
Title: 핸드-헬드 적외선 분광계를 사용한 폐기 카펫 확인방법 및 장치
IPC: G01N21/35
Filed: 1996-07-05
Abstract: 본 발명은 소비자 사용 후 또는 산업상 이용 후의 폐기물 카펫, 또는 폐기물 카펫을 포함하고 있지 않은 폴리아미드-6 및/또는 폴리아미드-66 의 여러 타입을 분별하는 방법 및 장치에 관한 것으로서, 상기 폐기물(카펫)의 물질을 정확하고 신속하게 식별할 수 있는 분광계에 의한 원리를 사용하는 핸드-헬드 포터블 장치를 사용한다.  이 작업을 위해 상기 분광계에는 상기 폐기물(카펫)을 조사하는 적외선 방사 소스, 미리 결정된 다수의 불연속 파장을 선택하는 선택기 및 상기 불연속 파장 내에서 반사된 방사선을 검출하는 검출 시스템을 포함되어 있는데,  상기 선택기는 상기 미리 결정된 불연속 파장에 따라 흩어진 빛 빔내의 위치에 대응하는 위치 조절되는 여러 슬롯이 있는 판이거나 또는 상기 불연속 파장을 통과하도록 선택된 여러 필터 중 하나 일 수 있으며, 상기 불연속 파장의 선택은 상기 카펫 표본이 조사되기 전에 발생하거나 또는 반사된 방사선으로부터 상기 불연속 파장을 선택함으로서 발생할 수 있는 것을 특징으로 한다.
Patent KR-19990071484-A (KR)
Title: 역청 조성물 및 그의 제조 방법
IPC: C08L95/00
Filed: 1996-11-27
Abstract: 본 발명은 산소를 함유하는 기체로 혼합물을 블로잉하는 것으로 이루어진  역청 조성물의 제조 방법을 제공하는 것으로서, 상기 혼합물은 침투가 적어도 300dmm (25℃에서 ASTM D 5에 따라 측정)인 역청 및 전체 혼합물에 대하여 1 중량% 미만의 양으로 존재하는 열가소성 고무로 이루어져 있다; 또한 본 발명은 상기와 같은 방법에 의해 수득 가능한 역청 조성물들에 관련되어 있으며, 또한 산업적 응용에서의 상기 역청 조성물들의 용도와 관련되어 있다.
Patent KR-19990076729-A (KR)
IPC: C22C9/02
Filed: 1996-12-19
Abstract: A friction element has a base element on which a coating is applied by thermal spraying of a copper alloy. The copper alloy contains 27 to 35 wt % zinc, 4 to 6 wt % aluminum, 2 to 4 wt % nickel, 0.5 to 2 wt % titanium, and copper as the remainder, with random contaminants. The copper alloy is applied onto a base element by thermal spraying, and requires only a finish treatment by stamping to achieve good tribological properties and wear resistance that are comparable to molybdenum coatings. Alternative copper-zinc alloys can have, in particular, manganese, iron, and lead constituents.
Patent KR-19990082448-A (KR)
Title: 단말기와 휴대 장치간의 접촉 또는 비접촉 통신에 의한 데이터교환 시스템
IPC: G07C9/00
Filed: 1997-12-10
Abstract: 금속 경로를 통해 제1형의 단말기과 통신하는 다수의 전기 접촉부, 이에 대응하는 다수의 전기 접촉부 및, 데이터를 운반하도록 변조된 전자기장을 전송하는 제2형의 단말기(100)과 비접촉 통신을 위한 코일(202)을 포함하는 휴대 장치가 제공된다. 상기 단말기에 의해 전송되고, 클럭 신호에 의해 클럭되는 데이타를 위해 휴대 장치는 수신된 신호, 특히 코일에 의해 픽업된 신호에서의 클럭 신호(CLK)의 유무의 함수로서 휴대 장치의 동작을 수정하는 클럭 검출 수단(220)을 포함한다. 이런 수단은 특히 통신, 신호 처리 및/또는 수신된 데이터 처릴를 위한 프로토콜을 제어할 수 있고, 전기 접촉부와 휴대 장치의 다른 회로 사이의 링크를 인터럽트하는 스위치 수단을 제어할 수 있다.
Patent KR-20000016732-A (KR)
Title: Cytokine production inhibitors, triazepine compounds, and intermediates thereof
Inventor: YAMAMOTO YOSHIHISA
IPC: C07D487/12
Filed: 1998-12-12
Abstract: PURPOSE: A triazepine compound and a cytokine production inhibitor including intermediate of producing the triazepine compound are provided to be useful for an anti-inflammatory drug. CONSTITUTION: Cytokine production inhibitors containing compounds represented by general formula (I), novel triazepine compounds, and intermediates for producing these triazepine compounds. The compounds (I) inhibit the production of cytokines such as IL-6, TNF-alpha, IL-8, IFNgamma, IL-2, and GM-CSF and are useful as cytokine production inhibitors and anti-inflammatory drugs. In formula(I), R1 represents aryl or heteroaryl; B represents formula (a) or (b), (wherein R2 represents hydrogen, hydroxy, halogeno, etc.; R4 represents hydrogen or halogeno, or R2 and R4 may together form carbonyl; R3 represents lower alkoxy, cycloalkyl, aryl, heteroaryl, -X-Y (wherein X represents -(CH2)m-, -CO-, -COCH2-, -NHCH2-, -CH2NH-, -OCH2- etc.; and Y represents halogeno, cycloalkyl, aryl or heteroaryl}, etc.; R51 represents -NHCONHR57 etc.; and R52 represents hydrogen or -COOR53); and A represents a benzene or thiophene ring.
Patent KR-20000052117-A (KR)
Inventor: KIM DONG CHUL
IPC: H01L21/00
Filed: 1999-01-29
Abstract: PURPOSE: An apparatus and a method for managing semiconductor manufacturing process are provided which improve the reliability of operation state data and perform the real time monitoring and process management. CONSTITUTION: An apparatus for managing semiconductor manufacturing process comprises: a monitoring/process management part(20) which has a built-in monitoring and statistical process management program, and gathers data satisfying the established sampling time and the stabilization time by inputting operation state data by parameters of each semiconductor fabrication facility and calculating the mean value and the normal distribution, and then makes out a management diagram for each facility and displays it, and outputs an alarm and process stopping signal when the facility is out of order; and an amplifier(10) which prevents the lowering of signal level of the operation state data, being connected to each of data input/output line between the monitoring/processing management part. According to the apparatus, the system performance, the working efficiency, and the reliability of data are improved.
Patent KR-19990072423-A (KR)
IPC: A61K35/12
Filed: 1999-02-04
Abstract: A pharmaceutical composition of a hedgehog protein which is characterized in that the hedgehog protein is bound to a hydrophilic carrier that is biocompatible and biodegradable wherein the carrier is a polymer which - binds the hedgehog protein as a negatively-charged carrier as a result of ionic interactions, - does not denature the hedgehog protein when it binds to the carrier, - contains at least 0.1 to 2 negatively-charged residues per monomer under neutral conditions, - contains the charge in the form of acidic groups, - has an average molecular weight of at least 50,000 Da - and contains no agarose reversibly and actively releases hedgehog proteins in vivo from a carrier in a delayed manner.
Patent KR-20000059391-A (KR)
Inventor: LEE JEONG EUM
IPC: F04B37/00
Filed: 1999-03-03
Abstract: PURPOSE: A sonic compressor is provided to maximize the endurance since there is no area where abrasion generated and improve compression efficiency. CONSTITUTION: A sonic compressor includes a linear motor(20) generating a sound wave by moving a flat board in a straight line, a resonator(10) installed at both ends of the linear motor for compressing a refrigerant by using sound pressure due to resonance by the driving of the linear motor, in which suction valve and discharging valve(12a,13a) are installed in the resonator for controlling entering and going of the refrigerant, and suction pipe and discharging pipe(12,13) connected with the suction valve and the discharging valve with being fixed by a jig(11).
Patent KR-20000066100-A (KR)
Inventor: KWON GAE GYEONG
IPC: C02F1/28
Filed: 1999-04-13
Abstract: PURPOSE: Provided are polyurethane adsorbent for oil removal and polyurethane adsorbent manufacturing method. According to this method, oil decomposable strains are first fixed at chitin, and the chitin is mixed with polyether polyol mixture solution(H-20), inorganic nutrient salts, Carbodiimide modify Diphenylmethane Diisocynate D-10. Chitin is used to vitalize oil decomposable stains long, inorganic nutrient salts are added to feed P, N essential elements for the growth of strain. The obtained adsorbent does not sink and deform, thereby it is durable. CONSTITUTION: The polyurethane adsorbent manufacturing method comprises the sequential steps of: (1) fixation of oil compound decomposition bacteria, such as Yarrowia lipolytica CL180 (KCTC 055BP), Acinetobacter US1 (KCTC 8618P), Sphingomonas KH3-2 (KCTC 8815P), Corynebacterium varibilis IC-10 (KCTC 0533BP) at the chitin powder by drying for 18-30 hrs. at 15-20°C; (2) mixing of polyether polyol mixture solution(H-20) and above chitin in a weight ratio of 30-20 : 1; (3) mixing of H-20 and inorganic nutrient salts in a weight ratio of 4 : 0.8-1.0; (4) mixing of Carbodiimide modify Diphenylmethane Diisocynate D-10 thereto in a ratio of -OH of H-20 and -NCO of D-10 being 1.20-2.6 : 1, and then foaming the mixture at 25-30°C in a mold.
Patent KR-20000066447-A (KR)
Inventor: LEE CHEOL HUI
IPC: F16D3/26
Filed: 1999-04-16
Abstract: PURPOSE: A universal joint of structure for a vehicle is provided to add a length-adjusting function which can adjust a length between two shafts through a link device of a universal joint. CONSTITUTION: A universal joint of structure for a vehicle contains the following characteristics: for a universal joint with a first and a second york parts(35,37) and a cross shaft(38), where the first and the second york parts are formed as one body respectively in the ends of a driving shift(33) and an opposed shaft(36) in order to transmit a turning force, and the cross shaft is combined to the first and the second york parts, a link device(39) is mounted for a length to be adjustable between the first and the second york parts of the driving shaft and the cross shaft.
Patent KR-20000066499-A (KR)
Inventor: KIM JONG BU
IPC: A23N1/00
Filed: 1999-04-17
Abstract: PURPOSE: An electric juicer is provided, which washes fruits or vegetables with ozone water to sterilize and to disinfect the fruits or vegetables, and which obtains wholesome juice. CONSTITUTION: The electric juicer comprises a space part which is formed in the lower part of the body and is separated from the operation part equipped with an operation motor(2); an ozone generation case(4) where an ozone generation room(41) and an air pumping room(42) are formed integrally, wherein the ozone generation room(41) is provided with common ozone generation apparatus(5) composed of a control circuit board(51) and a discharge part(52), and the air pumping room(42) is provided an air pumping apparatus(6) composed of a transducer(7) and a pair of electromagnet(64) and plate spring(63) which pump the air pump(62) by the magnetic filed generated by the transducer(7); a plurality of holes(14) which are formed in the lower plate of the body(1) to allow air to be supplied into the air pumping room(42) of the ozone generation case(4); and a bubble generation apparatus(8) which is connected with the ozone generation room(41) and the terminal of an air hose(81) extended to the exterior of the body.
Patent KR-20000067435-A (KR)
Inventor: LEE CHAE MUN
IPC: H04B7/26
Filed: 1999-04-28
Abstract: PURPOSE: A method for transmitting data messages in the digital trunked radio system is provided so that all the terminals of a group can receive a data message at one data message transmission. CONSTITUTION: A terminal receives a message transmitted from a base station. The terminal confirms an STID(Stationary Identification) field to check whether it is a group STID. In case that the STID field is a group STID, the terminal confirms whether the received message is a data message. If the received message is not a data message, the terminal confirms whether it is a voice call message. If it is a voice call message, the terminal carries out a generic message processing procedure. In case that the received message is a data message, the terminal inserts its IP address into a required location of a message format. The terminal processes the received message in the same manner of an individual data message.
Patent KR-19990083627-A (KR)
IPC: C08G18/66
Filed: 1999-04-30
Abstract: 본 발명은 부분적으로 균질하게 가교화된 폴리우레탄/폴리우레아의 안정한 콜로이드상 수성 분산액에 관한 것으로, 상기 분산액은 내재성(integral) 유화제와 내부 분산 안정화제를 폴리에스테르디올 또는 폴리카프롤락톤 디올 주쇄를 포함하는 폴리우레탄에 첨가하고, 이것을 작용가가 2.05 내지 2.18인 디아민 및 트리아민의 혼합물로 사슬 연장 및 가교시킴으로써 제조된다. N-메틸 피롤리돈과 같은 용매에 용해시킨 고농도의 디히드록시카르복실산의 용액은 히드록실기가 이소시아네이트 말단화 폴리우레탄과 신속하고 고르게 반응하도록 하며, 결과적으로 수성 분산액으로부터 물이 제거된 후에 최소량의 용매가 접착제내에 존재한다. 따라서, 상기 접착제는 비교적 가교도가 낮음에도 불구하고 70℃에서 내열성을 갖는다.
Patent KR-20010003353-A (KR)
Inventor: AN SUN SHIN
IPC: H04L12/28
Filed: 1999-06-23
Abstract: PURPOSE: A method for detecting a path supporting quality of service(QoS) is provided to decide whether path information passing between a source node and a destination node is retransmitted by each node not to transmit the path information to a transmitted node, to transmit the path information to an adjacent node, and to transmit an only path request mostly suitable for a requested QoS to the adjacent node to delete or store the path information, so as to prevent a CPU and a bandwidth from being wasted. CONSTITUTION: A GSPA(Generic Shortest Path Algorithm) supplies the shortest path detection applied to a single layer, and detects a path having at least a quality of service(QoS) in every path which can be generated as one destination. A DGSPA(Distributed Generic Shortest Path Algorithm) distributes the path to rapidly detect the path having at least a quality of service(QoS). A QRDGSPA(QoS Restricted Generic Shortest Path Algorithm) sets up a QoS value to the shortest path when the QoS value generated from the every path satisfies a reference QoS value, and prevents set-up one path from being in an error state. Each algorithm(HDGSPA,QRHDGSPA) for applying the DGSPA and the QRDGSPA to a multi-level supplies the shortest path detection applied to a multi-level layer.
Patent KR-20010004929-A (KR)
Inventor: BAE GYEONG JIN
IPC: H01L27/108
Filed: 1999-06-30
Abstract: PURPOSE: A method for forming a polysilicon plug of a semiconductor device is provided to enhance an element reliability by easily controlling CMP process in forming a polysilicon plug. CONSTITUTION: A word line is formed on a semiconductor substrate(10). A hard mask(13) and ARC(anti-reflective coating) layer are sequentially stacked in the word line. An insulation spacer is formed on sidewalls of the word line, hard mask, and ARC layer. An interfacial insulating layer is formed on the substrate. The interfacial insulating layer is fully etched to expose a surface of the hard mask, thereby smoothing a surface of the substrate. An insulating layer pattern is formed on the hard mask. The second insulating layer is removed, thereby forming a self-aligned contact hole which exposes a substrate between the insulating layer spacers. A polysilicon layer(11) is formed on the substrate, and is buried in the contact hole. The polysilicon layer is fully etched to expose a surface of the insulating layer pattern, thereby forming a polysilicon plug(19A).