Patent SG-11201803666W-A (SG)
Title: Single image detection
Inventor: BHASKAR KRIS
IPC: G01N21/88
Filed: 2016-11-17
Abstract: INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property Organization International Bureau (43) International Publication Date 26 May 2017(26.05.2017) WIPOIPCT (10) International Publication Number WO 2017/087646 A1 (51) International Patent Classification: G01N21/88 (2006.01) (21) International Application Number: (22) International Filing Date: (25) Filing Language: (26) Publication Language (30) Priority Data: 62/256,601 17 November 2015 (17.11.2015) 15/353,210 16 November 2016 (16.11.2016) (71) (72) Applicant: KLA-TENCOR CORPORATION [US/US]; Legal Department, One Technology Drive, Milpitas, Cali­ fornia 95035 (US). Inventors: BHASKAR, Kris; 1061 Queensbridge Court, San Jose, California 95120 (US). JORDAN III, John R.; 3397 Ivan Way, Mountain View, California 94040 (US). KARSENTI, Laurent; Haraz Street 16/1, 76086 Rehovot (IL). VENKATARAMAN, Sankar; 1896 Leeway, Mil- pitas, California 95035 (US). CARMON, Yair; 10 Ha'Kharuv St., 25147 Kefar Vradim (IL). (74) Agents: MCANDREWS, Kevin et al.; Kla-Tencor Cor­ poration, Legal Department, One Technology Drive, Mil- pitas, California 95035 (US). PCT/US2016/062490 (81) Designated States (unless otherwise indicated, for every kind of national protection available): AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. 17 November 2016 (17.11.2016) English English US US (84) Designated States (unless otherwise indicated, for every kind of regional protection available): ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG). [Continued on next page] (54) Title: SINGLE IMAGE DETECTION Tf 00 Fig. 1 n O (57) : Methods and systems for detecting defects on a specimen are provided. One system includes a generative model. The generative model includes a non-linear network configured for mapping blocks of pixels of an input feature map volume into labels. The labels are indicative of one or more defect-related characteristics of the blocks. The system inputs a single test image into the generative model, which determines features of blocks of pixels in the single test image and determines labels for the blocks based on the mapping. The system detects defects on the specimen based on the determined labels. WO 2017/087646 A11II llll IIII III Hill III III III III Hill 111 II 111 lllll III mill llll III III before the expiration of the time limit for amending the claims and to be republished in the event of receipt of amendments (Rule 48.2(h)) Published: — with international search report (Art. 21(3))