baber/WOPTO huggingface dataset:
Patent JP-2006165818-A (JP)
Title: Alteration detecting device, watermark image outputting device, watermark image inputting device, watermark image outputting method and watermark image inputting method
Inventor: SUZAKI MASAHIKO
IPC: G09C1/00
Filed: 2004-12-03
Abstract: <P>PROBLEM TO BE SOLVED: To provide an alteration detecting device for automatically embedding watermark information, and for automatically detecting the alteration of an output image.  <P>SOLUTION: This alteration detecting device is provided with an image processing part (12) for executing processing to segment a specific region for deciding alteration from the image region of an original image (11), a watermark information embedding part (13) for embedding at least one of area information related with the position/size of the specific region and the image of an original image corresponding to the specific region in the original image as watermark information, and for generating an output image, a watermark information extracting part for extracting the watermark information, an image deforming part for deforming an output image into an input image in the same size as that of the original image, a pseudo image generating part for generating a pseudo image similar to the image of the specific region and an alteration deciding part (25) for generating a differential image constituted of a difference between the input image and the pseudo image, and for deciding that the output image has been altered when any differential area exists in the differential image.  <P>COPYRIGHT: (C)2006,JPO&NCIPI
Patent JP-2006166539-A (JP)
Title: Motor, optical element drive unit, and optical apparatus
Inventor: ONISHI KIYOBUMI
IPC: G02B7/04
Filed: 2004-12-06
Abstract: <P>PROBLEM TO BE SOLVED: To provide a motor further adapted to mass production in which driving noise and vibration can be reduced without accompanying a large-scale change such as the change of a control program, the adjustment of angular phases of drive magnets that constitute the motor is thereby made possible, the whole configuration of the motor is not necessary to be changed, and so on, and to provide an optical element drive unit and an optical apparatus.  <P>SOLUTION: The motor comprises the drive magnets 9 that drive the motor, and a weight member 10 that is mounted on an output shaft of the motor, and reduces the vibration or the noise of a motor body that are generated at driving the motor. The weight member is fixed to the output shaft of the motor so as to be arranged in the middle of the drive magnets, and at this time, the weight member is arranged between the first-phase magnet 9a and the second-phase magnet 9b.  <P>COPYRIGHT: (C)2006,JPO&NCIPI
Patent JP-2006163023-A (JP)
Title: Laser microscope and color laser microscope
Inventor: AWAMURA DAIKICHI
IPC: G02B21/18
Filed: 2004-12-08
Abstract: <P>PROBLEM TO BE SOLVED: To realize a laser microscope and a color laser microscope with which a high resolution sample image is picked up without using an expensive acoustic optical element.  <P>SOLUTION: In the laser microscope, a line shaped optical beam generator (12) is used to convert laser beams into non-coherent optical beams that have divergence along one direction. Laser beams generated from laser light sources (1, 2 and 3) are converted into light beams having divergence along one direction by the line shaped optical beam generator (12) and are projected onto a sample (25) through a beam deflector (18) to scan the surface of the sample. Then, reflected beams from the sample are received by a linear image sensor (26), for example, to generate a video output. A micro-mirror device, in which a plurality of micro-mirror elements are arranged in a two dimensional array shape, is used as the line shaped optical beam generator. Incident laser beams are converted into optical beams which are vibrated along one direction at a high speed by the reciprocating rotation of each micro-mirror and diverging optical beams are generated.  <P>COPYRIGHT: (C)2006,JPO&NCIPI
Patent JP-2006174529-A (JP)
Title: Holder of motor output shaft, driver of optical member, and optical apparatus
Inventor: TAKASHIMA TETSUO
IPC: H02K5/24
Filed: 2004-12-13
Abstract: <P>PROBLEM TO BE SOLVED: To provide a holder of motor output shaft where chattering of a motor bearing can be suppressed, without requiring large-scale modifications of the control program, and noise at the driving of a motor, overshooting, reversion hiss, and the like, occurring during the movement of an optical member can be reduced, and to provide a driver of the optical member and an optical apparatus.  <P>SOLUTION: The holder for rotatably holding the motor output shaft 105 comprises a first support member 102 for supporting one end of the motor output shaft, second support members 106a and 106b provided on the motor drive section side and supporting the other end of the motor output shaft, and a means 107 of urging the motor output shaft toward the second supporting member.  <P>COPYRIGHT: (C)2006,JPO&NCIPI
Patent JP-2006171968-A (JP)
Title: Production system for stained glass-like image, production system for film with stained glass-like image and production method for stained glass-like image
Inventor: ISODA KAZUYOSHI
IPC: G06T11/80
Filed: 2004-12-14
Abstract: <P>PROBLEM TO BE SOLVED: To provide a system faithfully reproducing a production process of stained glass on an information system to produce image data of a work having beauty and a material feel peculiar to the stained glass, and printing the work data on a transparent sheet or the like to use it as a stained glass-like decoration.  <P>SOLUTION: A user selects a favorite image from a lot of glass plate-like images on a computer screen reproduced with the production process of the stained glass in a virtual reality state (an item M2), and the glass plate-like images are cut (items M8, M10), are ground (an item M12), each are wound with a copper foil tape (an item M14), are combined (items M4, M6), and are solder-mounted (an item M16) in the virtual reality state to produce the stained glass-like image. The user oneself can perform the printing so as to actually use the work image (an item M28). A stained glass film can be printed and provided according to designation of the user by stained glass film production service (an item M30).  <P>COPYRIGHT: (C)2006,JPO&NCIPI
Patent JP-2006172590-A (JP)
Title: Manufacturing method for magnetic disk device
Inventor: TANIGUCHI MASATO
IPC: G11B5/09
Filed: 2004-12-15
Abstract: <P>PROBLEM TO BE SOLVED: To provide a manufacturing method for a magnetic disk device including a process for detecting and processing a defective sector, in which reproduction failure occurs at low operational temperature, by a simple method.  <P>SOLUTION: Detecting the defective sector is performed by read/write test at a high operational temperature of 40-65°C. When the data recorded in the defective sector is reproduced, gain for high frequency band turns out to be reduced. After recording the test data in each of the sectors, a value for a filter factor of an FIR filter arranged in a data reproduction system is changed from the optimal value, frequency gain is reduced, the testing data is reproduced, and the sector in which the reproduction failure occurs is registered as the defect. By correcting the value of the filter factor of the FIR filter, detecting the defective sector, in which the gain of the high frequency band for the data reproduction system is reduced and the reproduction failure becomes outstanding at a low operational temperature, is made possible.  <P>COPYRIGHT: (C)2006,JPO&NCIPI
Patent JP-2006148843-A (JP)
Title: Detachable finger clip for portable telephone set
Inventor: HIGAKI ATSUHIRO
IPC: H04M1/11
Filed: 2004-11-18
Abstract: <P>PROBLEM TO BE SOLVED: To provide an easily detachable compact implement for quickly performing all the key operations of mail and the Internet, etc., with one hand in a portable telephone set.  <P>SOLUTION: Two helical rings (2) to which a finger can be inserted are attached to the back surface of the portable telephone set through a 4-point support detachable implement by an L-shaped leaf spring and elastic rubber. The rings are more strongly fixed to the portable telephone set by the effect of a spring by turning it to a helical shape and a contact point on a wide surface to the finger. Then, they are shifted to the left and right of a center line and attached so as to be positioned on a diagonal line on the back surface of the portable telephone set. Thus, the keyboard surface of the portable telephone set is quickly moved vertically and horizontally to the thumb by two fingers.  <P>COPYRIGHT: (C)2006,JPO&NCIPI
Patent JP-2006172968-A (JP)
Title: Luminaire
Inventor: ONO HIROSHIGE
IPC: F21V17/00
Filed: 2004-12-17
Abstract: <P>PROBLEM TO BE SOLVED: To use a fixing method for simple assembly that the pawl piece of a reflector mounting bracket is inserted into the fitting hole of a luminaire body, the pawl piece protrudes through the fitting hole to be bent, and the reflector mounting bracket is fixed to the luminaire body; and to establish a stable electrical connection between the reflector mounting bracket and the luminaire body.  <P>SOLUTION: The end 1ba of the fitting hole 1b of a luminaire body 1 has inclined sides, and the space between the sides diminished gradually from the width of the thickness of the pawl piece 3a of a reflector mounting bracket 3. The pawl piece 3a is inserted through the fitting hole 1b. The luminaire body 1 in the shape of a box is made of a metal, and is coated in all over the surface with an insulation. The pawl piece 3a is pressed fitted into the fitting hole 1b to peel off an insulation coating film from a hole side wall of the inclined sides, and the pawl piece 3a is bent to maintain crimping between the edge of the pawl piece 3a and the hole side wall of the inclined sides of the end 1ba with the insulation coating film peeled off.  <P>COPYRIGHT: (C)2006,JPO&NCIPI
Patent JP-2006174752-A (JP)
Title: Morinda citritolia-containing beverage
Inventor: KATAOKA NORIMICHI
IPC: A23L2/52
Filed: 2004-12-22
Abstract: <P>PROBLEM TO BE SOLVED: To provide a Morinda citrifolia-containing beverage moderately maintaining flavor of Chinese medicine-mixed meal peculiar to Morinda citrifolia fruit and also having medicinally effective feeling as the Morinda citrifolia-containing beverage.  <P>SOLUTION: The Morinda citrifolia-containing beverage is obtained through adding sugar and bittern to Morinda citrifolia juice diluted with dilution water. The dilution water contains desalted water so as to be remarkable for tumor suppression and decrease in hyperlipemia-related blood pressure in cooperation with Morinda citrifolia juice. The Morinda Citritolia-containing beverage provides high safety and sense of security even in long ingestion, and efficacy due to raw material such as the Morinda citrifolia is efficiently taken when the material to be added comprises only natural one. The sugar comprising only honey is easy to drink without altering the flavor of the Morinda citrifolia while being combined with mild sweetness due to natural ingredients.  <P>COPYRIGHT: (C)2006,JPO&NCIPI
Patent JP-2005196953-A (JP)
Title: Method and device for manufacturing stamper for making pattern on cd and dvd
Inventor: BAJOREK CHRISTOPHER H
IPC: G11B7/26
Filed: 2004-12-24
Abstract: <P>PROBLEM TO BE SOLVED: To provide a stamper used for manufacturing optical data storage media such as CD and DVD, and to provide a manufacturing method of such a stamper.  <P>SOLUTION: The method for forming the stamper used for manufacturing a CD, a DVD and other types of optical disks includes a step for forming a substrate by rolling. A material layer is deposited on the substrate (for example, by a plating treatment). Thereafter, a pattern is created by forming a resist layer on the material layer. To form a substrate by rolling, it is comparatively inexpensive to form the substrate to a target thickness. To form the material layers by deposition (for example, by plating), it is comparatively inexpensive to ensure that the layer has a very smooth surface (namely, a great polishing treatment is unnecessary).  <P>COPYRIGHT: (C)2005,JPO&NCIPI
Patent JP-2005185842-A (JP)
Title: Padding for seat body of vehicle seat and seat body having the same
Inventor: KANG HO-SUNG
IPC: B60N2/90
Filed: 2004-12-24
Abstract: <P>PROBLEM TO BE SOLVED: To provide padding and a seat body having the padding which optimize comfort and prevent a body from sinking when a crew routinely uses the seat.  <P>SOLUTION: Padding 6 for a seat body of a seat has viscoelastic foam 10 and comfort foam. The viscoelastic foam 10 elongates between a bottom of the seat body and mid-level of the padding. The comfort foam is extended between the mid-level and an upper surface of the seat body. The comfort foam and the viscoelastic foam is extended over both a back part 6a and a front part 6c of the seat body.  <P>COPYRIGHT: (C)2005,JPO&NCIPI
Patent JP-2006182485-A (JP)
Title: Entrance device of elevator
Inventor: GOTO YOSHITO
IPC: B66B13/30
Filed: 2004-12-27
Abstract: <P>PROBLEM TO BE SOLVED: To provide an entrance device for an elevator capable of facilitating mounting, replacement, and adjustment, improving the appearance, reducing occurrence of shock/collision sound by a door stop part when closing a door, and avoiding interference with a safety device.  <P>SOLUTION: This entrance device of the elevator is provided with a sliding door main body 4 for opening and closing an entrance of the elevator, a leg 7 of the door provided in such a way that a tip part protrudes from a lower part of the sliding door main body, and a sill 6 provided in a lower part of the entrance and having a guide part 6a formed to receive the tip part of the leg of the door. The leg of the door is constituted to have the door stop part 7a composed of a shock absorbing member 72 formed to protrude in the direction of door closing from a tip part in the direction of door closing of the sliding door main body.  <P>COPYRIGHT: (C)2006,JPO&NCIPI
Patent JP-2006181059-A (JP)
Title: Ring for foot toe
Inventor: OTOMO HIROSHI
IPC: A44C9/00
Filed: 2004-12-27
Abstract: <P>PROBLEM TO BE SOLVED: To provide a ring for a foot toe, which can decorate the tip of a foot foppishly when wearing sandals or the like, is easily attached to and detached from the foot and is easily fitted and hardly falls off and hardly causes position shift.  <P>SOLUTION: A mounting part 2 to be fitted to the toe 1 is formed roughly in a horseshoe shape, ornaments 3 to be exposed on the toe 1 are respectively provided on both end parts 2a and 2b of the mounting part 2, and one ornament 3 is formed so as to be freely inclined through a shaft part 4 along the axial center position of the mounting part 2. In this case, it is preferable to arrange one ornament 3 right above one end part 2a by positioning one end part 2a of the mounting part 2 on a vertical line L passing through the axis. Also, it is preferable to connect the other end part 2b of the mounting part 2 to the inner side position of the other ornament 3 and shift the other ornament 3 from the right above of the other end part 2b to the outer side.  <P>COPYRIGHT: (C)2006,JPO&NCIPI
Patent JP-2006158913-A (JP)
Title: Golf glove with wrist fixture
Inventor: KOMAKI TERUHIRO
IPC: A63B71/14
Filed: 2004-12-06
Abstract: <P>PROBLEM TO BE SOLVED: To provide a golf glove with a wrist fixture which can easily fix the wrist and is compactly foldable during the stroking of a golf ball.  <P>SOLUTION: The wrist fixture can be worn on a glove's back by attaching and fixing a spring material 3 to a foldable plate 2 like a hinge in the close contact state by a detachment fixture 4.  <P>COPYRIGHT: (C)2006,JPO&NCIPI
Patent JP-2006168694-A (JP)
Title: Derailing prevention device
Inventor: HACHIKAWA MASATO
IPC: B61F9/00
Filed: 2004-12-14
Abstract: <P>PROBLEM TO BE SOLVED: To provide a derailing prevention device capable of returning a truck lifted up to an original position, caused by addition of strong rocking to a vehicle caused by abnormal vibration of an earthquake or the like during traveling of the vehicle.  <P>SOLUTION: The derailing prevention device 100 is provided with a wheel guide means having a percussion failure part (abnormal vibration sensing means) 25 for detecting the abnormal vibration to be operated, a blade 22 and a support member 21 having one end for supporting the blade 22 and the other end substantially fixed to the truck 13. The wheel guide means is driven by activation of the percussion failure part 25 and the blade 22 is descended to a position where it is brought into contact with a rail 15 side surface to guide the derailed wheel 10 to the original position. Further, the wheel guide means has a rotation body 20 rotatably fixed to the truck 13 and the support member 21 is fixed to one end thereof. A connection rod 23 provided with the percussion failure part 25 through free connection parts 24, 26a is provided between the rotation body 20 and a fixing fitting 26 fixed to a vehicle body 11. Springs 27, 27 for forcing descending of the blade 22 may be provided between the rotation body 20 and the truck 13.  <P>COPYRIGHT: (C)2006,JPO&NCIPI
Patent JP-2005524835-A (JP)
IPC: G01N37/00
Filed: 2003-05-01
Abstract: We describe a process for the monitoring of contaminant removal during the purification process of a pharmaceutical product produced by a host cell, wherein at least two different samples taken during the purification process of the pharmaceutical product are incubated with at least one protein biochip array and contaminants in the samples bound to the protein biochip array are subsequently detected. Preferably samples are taken before the first purification step and after each subsequent purification step.
Patent JP-2005530252-A (JP)
Title: Ｄｎｓサーバ及び／又はｌｄａｐディレクトリの閲覧及び／又は更新システム
IPC: H04L29/12
Filed: 2003-06-05
Abstract: 【課題】  利用者がDNSサーバやLDAPディレクトリに蓄積された自身のENUMプロファイルを簡単且つ迅速に閲覧し、及び／又は変更できるようにする。     【解決手段】  本発明では、レコードの閲覧及び／又は更新要求、或いはそうした要求のプログラミングを通信端末から受け取るのを可能にする通信手段（1150，53〜59，61，63）と、システムに送信されるか、或いはシステムに予めプログラムされる前記閲覧及び／又は更新要求から、ドメインネーム及び前記レコード上で実行される動作を決定する制御手段（1175，74，75）と、ドメインネームから第１のデータベースに蓄積するサーバのIPアドレスを検索すると共に、前記動作に基づいて、前記レコードを読出し又は更新する要求を前記サーバに送信するプロトコル管理手段（1162，62，64）と、を備えている。
Patent JP-2005537697-A (JP)
Title: オーディオビジュアル番組の同期システムおよび同期方法
IPC: H04H1/00
Filed: 2003-06-27
Abstract: 本発明はたとえば同期システム（５）および同期プロセスに関する。本発明による同期システムは、オーディオビジュアルコンテンツと制御情報から成るオーディオビジュアル番組（１５）と対応づけられた同期信号を指定する指定ユニット（１）と、ブロードキャストネットワークを介して伝送される番組を搬送するストリーム中で、オーディオビジュアルコンテンツにおける少なくとも１つの抽出部分を識別することにより、上述の同期信号を識別する識別ユニット（２）と、この同期信号が検出されたときにアクションをトリガする起動ユニット（３）を有している。指定ユニットは、識別要素（１１）を準備処理されて識別ユニット（２）へ伝送する。この識別要素（１１）によって、上述の抽出部分を取得できるようになる。識別要素（１１）は、ブロードキャストネットワークを介して識別ユニット（２）が事前に受け取ったオーディオビジュアル番組の少なくとも１つのストリームからコンテンツ部分を抽出するための命令を有している。実施形態によれば、識別要素は指定ユニットとは無関係に得られる。本発明は、対話型テレビジョンや自動記録に適用される。
Patent JP-2006516368-A (JP)
Title: マイクロ機械加工された超音波トランスデューサ及び製造方法
IPC: H01L41/22
Filed: 2003-08-08
Abstract: マイクロ機械加工された超音波トランスデューサ（ＭＵＴ）とその製造方法。トランスデューサの膜は、空洞に溶融接合され、セルを形成する。犠牲材料のウェハ上に膜が形成される。このため、溶融接合のための取り扱いができる。次に、犠牲材料は除去されて、膜が残る。シリコン、窒化珪素等の膜を犠牲材料の上に形成することができる。ｃＭＵＴ、ｐＭＵＴ、ｍＭＵＴについても述べる。
Patent JP-2006500396-A (JP)
Title: 分枝状アルコール系パーソナルケア組成物
IPC: A61K8/33
Filed: 2003-09-08
Abstract: パーソナルケア組成物及びそれらを用いるための方法を提供する。より詳細には、本発明は、分枝状アルコール系（アルコール及び／又はその誘導体）パーソナルケア組成物及びそれを用いる方法に関する。
Patent JP-2006501507-A (JP)
Title: リトグラフ印刷版前駆物質の製法
IPC: B41N3/00
Filed: 2003-09-12
Abstract: （ｉ）親水性表面を有するリトグラフ支持体のウェブを提供すること、（ｉｉ）ウェブの親水性表面上にフェノール樹脂を含んで成る被膜を適用すること、（ｉｉｉ）被膜を乾燥すること、（ｉｖ）ウェブ温度を０．１〜６０秒の期間中フェノール樹脂のガラス転移温度Ｔｇより上に維持する加熱段階、（ｖ）ウェブが外界条件下に維持されるであろう速度より速い、しかし３０℃／秒を超えない平均冷却速度でウェブ温度が低下される冷却段階、（ｖｉ）前駆物質をコア上に巻く、もしくは前駆物質をシートに切断すること、の段階を含んで成る感熱性リトグラフ印刷版の前駆物質の製法が開示されている。加熱および冷却段階が前駆物質の熟成動態の有意な改善をもたらす。被覆後短時間で安定な感度が得られる。
Patent JP-2006505056-A (JP)
Title: 制御フローグラフ表現を制御データフローグラフ表現に変換するためのシステムおよび方法
IPC: G06F9/44
Filed: 2003-10-01
Abstract: 本発明の実施例は、制御データフローグラフを形成する方法を含み、この方法は、制御フローグラフを２つ以上の基本ブロックに分離するステップと、上記２つ以上の基本ブロックをコードブロックに変換するステップとを含み、コードブロックは制御データフローグラフを形成する。本発明の別の実施例は、制御データフローグラフを形成する方法を含み、この方法は、制御フローグラフを２つ以上の基本ブロックに分離するステップと、ロードノードを上記基本ブロックの少なくとも１つにおいて形成するステップと、記憶ノードを上記コードブロックの少なくとも１つにおいて形成するステップと、遅延ノードを上記コードブロックの少なくとも１つに挿入するステップと、外部ハードウェアロジックモジュールを上記制御フローグラフから分離するステップと、上記２つ以上の基本ブロックをコードブロックに変換するステップとを含み、コードブロックは制御データフローグラフを形成する。
Patent JP-2006505138-A (JP)
Title: エンドポイントを検出するための方法及び装置
IPC: H01L21/00
Filed: 2003-10-31
Abstract: 【課題】エンドポイントを検出するための方法及び装置 【解決手段】本発明は、基板をエッチングすることと、少なくとも１つのエンドポイント信号を測定することと、該少なくとも１つのエンドポイント信号をフィルタリングすることにより少なくとも１つのフィルタリングされたエンドポイント信号を発生させ、該フィルタリングがＳａｖｉｔｓｋｙ  Ｇｏｌａｙフィルタ（１２）を該少なくとも１つのエンドポイント信号に適用することを備えることと、該エッチ処理のエンドポイントを該少なくとも１つのフィルタリングされたエンドポイント信号から決定する（１４）こととを備える、プラズマ処理システム（１）内の基板をエッチングするための、エッチ処理のエンドポイントを検出するための方法を提示する。
Patent JP-2006512808-A (JP)
Title: タイムスロット分割移動通信システムにおける時変チャネルの修正方法
IPC: H04B1/707
Filed: 2003-12-26
Abstract: タイムスロット分割移動通信システムにおける時変チャネルの較正方法が本発明において開示される。この方法は、スロットや突然受信した信号に対してチャネルの推定と信号の検出とを行い、チャネル推定コード付近の部分的な検出結果を用いてチャネルの誤差を推定し、推定したチャネルの誤差を用いてチャネル推定を変更し、変更したチャネル推定を用いて前述の検出結果を復調する。この手順を１回又は複数回行うことができる。本発明は、ブロック処理方法の基本的な特徴を保ったままブロック処理方法をスロット内のチャネル応答のある程度の変化に適応させて、スロットを設けたＣＤＭＡやブロック処理システムの使用範囲の制限を広げることができ、また、周波数誤差及び偏差が大きい場合や高速で移動する端末の場合でもシステム性能を改善することができる。
Patent JP-2006513713-A (JP)
IPC: C12P7/64
Filed: 2003-03-28
Abstract: The present invention relates to a method of enhancing the levels of Poly-unsaturated fatty acids (PUFA) by 0.5 to 5 times in protests thraustochytrid protests by storing the cells under cold conditions, said method comprising steps of inoculating the protests into a culture medium, growing the culture for 2 to 5 days at room temperature, harvesting the cells by centrifugation to obtain biomass, storing the biomass at about 10° C. for time duration ranging between 12 to 48 hours, and obtaining increased PUFA from the stored biomass.
Patent JP-2006189279-A (JP)
Title: Chromatograph mass spectrometer
Inventor: HARADA SHIGETOSHI
IPC: H01J49/26
Filed: 2005-01-05
Abstract: <P>PROBLEM TO BE SOLVED: To solve the problem wherein, in the case where a plurality of target ions for the base of quantitative calculation are set when performing SIM measurement, a monitoring time per ion of one kind is shortened, and detection sensitivity is reduced.  <P>SOLUTION: Only target ions T1, T2, T3 are detected in the SIM measurement at the point of GC analysis starting time (a), and resultantly a mass chromatogram is produced in real time. When a peak of the target ion T1 is started to appear, detection of identification ions D11, D12, D13 for identifying the target ion T1 is started (b), and it is confirmed whether the target ion T1 is derived from an object compound or not by utilizing a detection result of the identification ions. Since only the identification ions to the target ion whose peak is appearing are detected, the number of ion kinds to be detected during one MS period can be reduced, and the monitoring time td of the target ion can be secured long.  <P>COPYRIGHT: (C)2006,JPO&NCIPI
Patent JP-2006190874-A (JP)
Title: Manufacturing method of semiconductor device
Inventor: ABE HITOSHI
IPC: H01L27/108
Filed: 2005-01-07
Abstract: <P>PROBLEM TO BE SOLVED: To expand the front surface area of a capacitor to enable increase capacitance of the capacitor by removing a semi-spherical silicon after forming uneven surface to the front surface of a semiconductor substrate within a trench to increase surface area of the capacitor using the semi-spherical silicon (HSG-Si) as a mask.  <P>SOLUTION: The manufacturing method of semiconductor device to form a trench capacitor to the semiconductor substrate 11 comprises the steps of forming an amorphous silicon film at the internal surface of a trench 14 before the formation of a capacitor insulating film 19 after the formation of the trench 14, forming a plurality of semi-spherical silicon 16 with the amorphous silicon film at the internal surface of the trench 14 using the semi-spherical silicon growth technology, forming a recess 18 on the front surface of semiconductor substrate 11 at the internal surface of trench 14 by etching the semiconductor substrate 11 within the trench 14 using a plurality of semi-spherical silicon 16 as the mask, and removing the semi-spherical silicon 16.  <P>COPYRIGHT: (C)2006,JPO&NCIPI