Patent GB-1094457-A (GB)
Title: Improvements relating to the manufacture of thermo-electric generators
Inventor: THORP WILLIAM
IPC: H01L35/32
Filed: 1965-11-27
Abstract: <PICT:1094457/C6-C7/1> <PICT:1094457/C6-C7/2> A thermoelectric generator is produced by vapour depositing successive and alternating layers 11, 13 of two different (P and N) thermoelectric materials, the two layers of each pair being separated by insulating layers 12, 16 except for a narrow strip at one edge and adjacent pairs being similarly separated by insulating layers 14 except for a narrow strip at the opposite edge. In the embodiment an electrically heated tantalum substrate 10 is placed in a deposition cell 21 (Fig. 2) and hydrogen and phosphine are passed through evaporator 23 containing a mixture of silicon tetrachloride and germanium tetrachloride to deposit an N-type silicon-germanium alloy layer on the substrate. Then a masking effect is produced by cooling one side of substrate 10 with water spray 27 and an insulating silicon-dioxide borate glass layer deposited on the remainder of the N-type layer by passing hydrogen, diborane and carbon dioxide through the evaporator 23. The cooling jet 27 is turned off and a P-type layer produced by passing a hydrogen-diborane mixture through the evaporator 23. The process is repeated to form a stack and the substrate then removed and conductive strips 18 and 19 (Fig. 1) provided. Instead of cooling alternate sides by water jets, unilateral heating or mechanical masking may be employed; the substrate may consist of carbon instead of tantalum and the semi-conductor alloy may consist of 65-85% by weight of Si (preferably 70%), the balance being Ge.  Water vapour may be used instead of CO2 as the oxidizing agent to provide the insulating layer, and the final assembly may be divided to provide a plurality of subassemblies.  Silicon and germanium hydrides may be used in place of tetrachlorides.ALSO:<PICT:1094457/C1/1> <PICT:1094457/C1/2> A thermoelectric generator is produced by vapour depositing successive and alternating layers 11, 13 of two different (P and N) thermoelectric materials, the two layers of each pair being separated by insulating layers 12, 16 of quartz glass or silica-borate glass, except for a narrow strip at one edge and adjacent pairs being similarly separated by insulating layers 14 of quartz glass except for a narrow strip at the opposite edge. In the embodiment an electrically-heated tantalum substrate 10 is placed in a deposition cell 21 (Fig. 2), and hydrogen and phosphine are passed through evaporator 23 containing a mixture of silicon tetrachloride and germanium tetrachloride to deposit an N-type silicon-germanium alloy layer on the substrate.  Then a masking effect is produced by cooling one side of substrate 10 with water spray 27 and an insulating silicondioxide borate glass layer deposited on the remainder of the N-type layer by passing hydrogen, diborane and carbon dioxide through the evaporator 23 where it is saturated with silicon and germanium tetrachloride vapour giving a layer of silicon-germanium alloy which is oxidized and with the diborane forms a glass, mainly SiO2, but with some boron and germanium oxides. Instead of cooling alternate sides by water jets, unilateral heating or mechanical masking may be employed; the substrate may consist of carbon instead of tantalum.  Water vapour may be used instead of CO2 as the oxidizing agent to provide the insulating layer.