baber/WOPTO huggingface dataset:
Patent KR-20040045749-A (KR)
Title: Method of checking fail of thermostat for vehicle
Inventor: KIM HYEON SU
IPC: F01P7/16
Filed: 2002-11-25
Abstract: PURPOSE: A failure detecting method of a thermostat for a vehicle is provided to reduce repair cost from wrong diagnosis by restricting wrong detection of fault of the thermostat with counting again in releasing fuel cutoff. CONSTITUTION: The fault diagnosis condition of a thermostat for keeping constant coolant temperature by automatically opening and closing the coolant passage according to coolant temperature in the engine is detected(110), and the initial count time is reset according to coolant temperature in starting the engine in satisfying the fault diagnosis condition(120). One step * coefficient from the initial count time is decreased per 500 ms(130), and decision time counting is stopped or performed in cutting off fuel or not(140). The decision subtraction time is adjusted again(150), and remaining time is selected by detecting the corresponding range of the mean air amount in detecting fault diagnosis of the thermostat(160). Coolant temperature is compared with the predetermined value(170), and the decision time is compared with zero(180). The fault of the thermostat is decided in case of decision time to be zero(190).
Patent KR-20040054948-A (KR)
Inventor: NAM HYEONG GI
IPC: H03F3/20
Filed: 2002-12-18
Abstract: PURPOSE: A power amplifier module is provided to prevent noise due to mutual interference within plural amplifiers and improve an insulating characteristic between the amplifiers by applying the bias to a collector of a transistor of the front amplifier. CONSTITUTION: A power amplifier module includes an amplifier and a first to a third bias part. The amplifier(50) is formed with a plurality of amplifiers to amplify signals having plural frequency bands and output the amplified signals. The first to the third bias parts(61,62,63) apply the bias to the amplifiers, simultaneously. In addition, the first to the third bias parts apply alternately the bias to the first front amplifier. The bias of the first to the third bias parts is applied to bases and collectors of transistors of the amplifiers. The bias is alternately applied to a collector of a transistor of the first front amplifier.
Patent KR-20040054339-A (KR)
Title: Apparatus and method for measuring shape of billet and bloom
Inventor: HONG HYEON GUK
IPC: G01B11/28
Filed: 2002-12-18
Abstract: PURPOSE: A shape measurement apparatus and method for calculating an area of the shape are provided to measure inferiority of a material along a longitudinal direction by measuring a sectional area according to each location and by using the measured sectional area. CONSTITUTION: A shape measurement apparatus includes a lighting part(101), an optical receiver(102), and a computer. The lighting part(101) projects light on an object along a longitudinal direction. The optical receiver(102) measures intensity of received light and converts the received light into an electrical signal. The computer includes a frame for processing the converted electrical signal. The lighting part(101) and the optical receiver(102) are synchronized with each other by a synchronization signal generation unit and obtain four images. The optical receiver(102) is located between a right angle and an incident angle of light in order to increase intensity of the received light.
Patent KR-20040055024-A (KR)
Title: Method of forming a damascene pattern in a semiconductor device
Inventor: CHOI JAE SEONG
IPC: H01L21/027
Filed: 2002-12-20
Abstract: PURPOSE: A method for forming a damascene pattern of a semiconductor device is provided to form a finer pattern in the present exposure and development equipment than in a conventional exposure and development equipment without an additional equipment investment by making a damascene pattern finer than the resolution of exposure and development equipment. CONSTITUTION: A photoresist pattern(102) made of a finer pattern than the resolution of the exposure and development equipment is formed on a semiconductor substrate(101) by using resist that has a better exposure and development characteristic than etch tolerance. A protection layer(103) is formed on the photoresist pattern. An interlayer dielectric(104) is formed on the resultant structure including the photoresist pattern. A CMP(chemical mechanical polishing) process is performed until the upper surface of the photoresist pattern is exposed. The photoresist pattern and the protection layer are removed to form the damascene pattern finer than the resolution of the exposure and development equipment.
Patent KR-20040057309-A (KR)
Title: Method for temporal payment of the credit charge
Inventor: HASHIMOTO KATSUMI
Filed: 2002-12-26
Abstract: PURPOSE: A method for paying a credit charge of a member shop in advance is provided to pay price for credit commerce to the member shop in two or three days. CONSTITUTION: A member shop terminal reads a recording medium storing a customer ID, and transmits information including credit charge information of the customer and a member shop ID together with the customer ID(S1100). A settlement information center terminal requests purchase approval information to a credit company terminal by receiving the information from the member shop terminal(S1104). A central server updates deposit information of a member shop account in a short time by considering credit charge information, if the purchase approval information is allowed from the credit company terminal(S1110).
Patent KR-20040057576-A (KR)
Title: Circuit for controlling precharge of a word line in NAND flash memory
Inventor: LEE SEOK GYU
IPC: G11C16/08
Filed: 2002-12-26
Abstract: PURPOSE: A word line precharge control circuit of a NAND flash memory is provided to discharge a block word line at a desired time and to prevent the formation of a current path to an unwanted ground. CONSTITUTION: A charge unit charges a block word line to a high voltage according to a precharge signal and a control signal. A discharge unit discharges the block word line according to the control signal. And a pass unit passes the control signal to the ground while discharging the block word line. The pass unit is constituted with a switching device turned on according to the precharge control signal.
Patent KR-20040061812-A (KR)
Inventor: JUNG YEONG SANG
IPC: G02F1/13
Filed: 2002-12-31
Abstract: PURPOSE: A knife for a strip process is provided to be easily controlled with a simple operation without being separated from a strip device when controlling an angle of the knife that sprays a stripper solution at high voltage, thereby preventing time and manpower loss. CONSTITUTION: A strip knife(210) comprises as follows. A body(211) receives a stripper and a distilled water, and sprays the received stripper and the distilled water to a substrate. A gap controlling bracket(212) controls a gap between the body(211) and the substrate in connection with the body(211). A fixing bracket(213) fixes the strip knife(210) to a strip device in connection with the gap controlling bracket(212) and the body(211). The body(211) of the strip knife(210) has a slit for spraying the stripper and the distilled water at high voltage.
Patent KR-20020035648-A (KR)
Title: 이온 주입기를 위한 고 전달, 저 에너지 빔라인 장치
IPC: H01J37/147
Filed: 2000-09-18
Abstract: 이온 빔 장치는 이온 소스, 제1 마그넷 조립체, 분해구를 형성하는 구조물 및 제2 마그넷 조립체를 포함한다.  이온 소스는 리본 이온 빔을 발생시키기 위한 장형 추출구를 가지고 있다.  제1 마그넷 조립체는, 리본 이온 빔 내의 다른 이온 종이 분리되도록, 리본 이온 빔을 리본 이온 빔 단면의 장경에 대해 수직하게 굴절시키기 위한 제1 자기장을 제공한다.  제2 마그넷 조립체는 소정의 이온 궤적을 생성하기 위하여 리본 이온 빔 내의 선택된 이온 종의 이온을 리본 이온 빔 단면의 장경에 대해 평행하게 굴절시키기 위한 제2 자기장을 제공한다.  리본 이온 빔의 폭은 빔라인의 대부분에 결쳐 증가한다.  결국, 저 에너지 성능은 강화된다.
Patent KR-20020070296-A (KR)
Title: 세륨계 연마재 및 세륨계 연마재의 제조방법
IPC: C01F17/235
Filed: 2001-04-06
Abstract: 본 발명은, 산화세륨을 주성분으로 하고, 연마재 입자의 평균 입자경이 0.2∼3.0㎛인 산화세륨계 연마재에 있어서, 입자경 10㎛ 이상인 거친입자(粗粒子)의 농도가 1000ppm 이하(중량비)인 것, 또는, 자성입자의 농도가 1000ppm 이하(중량비)인 것을 특징으로 하는 세륨계 연마재이다. 이들 거친입자, 자성입자는 300ppm 이하(중량비)인 것이 특히 바람직하다. 또한, 연마재 입자의 비 표면적의 평균값을 0.5∼30㎡/g 으로 하는 것에 의해, 보다 높은 절삭성을 가짐과 동시에 고 정밀도의 연마면을 형성할 수 있는 연마재로 된다. 
     이들 세륨계 연마재의 제조방법으로서는, 거친입자 농도는 분급점의 제어, 반복 분급의 실시에 의한다. 그리고, 자성입자 농도의 제어는 자성재료로 이루어진 필터의 적용, 분쇄매체의 변경 등을 단독 또는 적절히 조합하는 것에 의해 가능하게 된다.
Patent KR-20030007414-A (KR)
IPC: B01D53/26
Filed: 2001-02-05
Abstract: 리시버(10)는 원통형 측벽(13), 하단 벽(14) 및 개방 상부 단부(15)를 갖는 여과통(12)을 구비한다. 입구 튜브(18, 67)는 하단 벽(14)에 있는 입구 포트(17)로부터 여과통 내부에서 위쪽으로 연장된다. 한쌍의 튜브(35, 36)를 구비한 건조제 튜브 조립체(34)가 입구 튜브(18, 67) 위에 수납되며, 입구 튜브(18, 67)가 건조제 튜브 조립체(34)의 튜브들(35, 36) 중에서 한 개의 튜브 내부에 빈틈없이 수납된다. 하부 배플(28)은 건조제 튜브 조립체(34)의 하부 단부와 일체로 형성되며, 하부 필터 패드(40)는 건조제 튜브 조립체(34) 위에 하부 배플(29)을 향해 수납된다. 그후, 포장이 안된 건조제(29)가 여과통 내부에 쏟아부어진다. 상부 필터 패드(54)와 상부 배플(45)은 건조제 튜브 조립체(34) 위에 수납된다. 그후, 상부 단부 뚜껑(15)에 고정된 픽업 튜브(26, 66)가 건조제 튜브 조립체(34)의 튜브들 중에서 나머지 튜브에 빈틈없이 수납된다. 다음에, 상부 단부 뚜껑이 여과통(12)의 상단에 고정된다.
Patent KR-20030005255-A (KR)
Title: A multi-layered, uv-cured polymer electrolyte and lithium secondary battery comprising the same
Inventor: CHO BYEONG WON
IPC: H01M50/457
Filed: 2001-01-31
Abstract: PURPOSE: A UV curing multi-layered polymer electrolyte and a lithium secondary battery containing the electrolyte are provided, to improve the adhesive strength, the mechanical properties, the low and high temperature characteristics, the high rate discharge capacity, the lifetime, the capacity and the stability of a battery. CONSTITUTION: The electrolyte comprises a separation membrane layer, a UV curing polymer layer and an organic electrolyte solution which is prepared by dissolving a lithium salt into an organic solvent. The separation membrane layer is made of a polymer electrolyte, polypropylene, polyethylene polyvinylidene fluoride or non-woven; the UV curing polymer layer comprises the polymer obtained by UV curing the ethylene glycol di(meth)acrylate oligomer represented by the formula CH2=CR1COO(CH2CH2O)nCOCR2=CH2(wherein R1 and R2 are independent each other and are H or methyl group and n is an integer of 3-20), and the polymer selected from the group consisting of a polyvinylidene fluoride-based polymer, a polyacrylonitrile-based polymer, a poly(methyl methacrylate)-based polymer, a poly(vinyl chloride)-based polymer and their mixtures. Preferably the lithium salt is selected from the group consisting of LiPF6, LiClO4, LiAsF6, LiBF4, LiCF3SO3, Li(CF3SO2)2N and their mixtures; and the organic solvent is selected from the group consisting of ethylene carbonate, propylene carbonate, diethyl carbonate, dimethyl carbonate, ethylmethyl carbonate and their mixtures.
Patent KR-20020087130-A (KR)
Title: 디니트릴 및 디아민으로부터 폴리아미드를 제조하는 방법
IPC: C08G69/00
Filed: 2001-03-29
Abstract: 본원에는 연속한 가열 단계를 이용한 연속 반응으로 디니트릴 및 디아민으로부터 폴리아미드를 제조하는 방법이 기술되어 있다.  특히, 이 방법은 디니트릴, 디아민, 물 및 임의의 촉매를 접촉시켜 반응 혼합물을 형성하는 단계; 반응 혼합물을 약 180 내지 약 240℃의 제1 승온으로 가열하고, 이 온도를 약 0.10 내지 약 20시간 동안 유지시키며, 임의로 이 가열 단계에서 압력을 배출시켜 조절하는 단계; 반응 혼합물을 약 250 내지 약 350℃의 제2 승온으로 가열하고, 제2 승온에 도달하기 전 또는 후에 물을 반응 혼합물에 가하며, 제2 가열 단계에서의 압력을 물의 일부분 이상을 배출시켜 대기압 초과의 압력으로 유지시키고, 제2 승온을 약 0.10 내지 약 10시간 동안 유지시키는 단계; 및 폴리아미드를 회수하는 단계를 포함한다.
Patent KR-20030007836-A (KR)
IPC: H01L21/265
Filed: 2001-04-23
Abstract: 빔 라인을 따라서 진공 변동이 있는 동안에 주입을 제어하기 위한 방법 및 장치.  진공 변동은 검지된 빔 전류에 기초하여 검지될 수도 있고, 또는 주입 챔버내의 압력 측정 없이도 보상될 수도 있다.  이온 빔 전류에 대한 기준 레벨은 결정될 수 있고, 기준값과 측정된 이온 빔 전류간의 차이를 이용하여, 웨이퍼 주사율과 같은 이온 주입 공정의 인자들을 제어할 수 있다.  또한, 결과적으로 검지된 빔 전류의 감소를 가져오는 두 종류의 전하 교환 충돌에 대해 담보하기 위해 차이값을 변경할 수 있다.  비조준선 충돌인 제 1 충돌은 검지된 빔 전류의 감소를 유발하고 또한, 반도체 웨이퍼에 전달될 총 도즈량의 감소를 유발할 수 있다.  조준선 충돌인 제 2 충돌은 검지된 빔 전류의 감소를 유발하지만, 웨이퍼에 전달된 총 도즈량에 영향을 주지는 않는다.  따라서, 차이값의 변경을 이용하여 비조준선 충돌을 담보하는 웨이퍼 주사율을 조정할 수 있다.
Patent KR-20040064515-A (KR)
Inventor: JANG JEONG U
IPC: A23L13/60
Filed: 2003-01-13
Abstract: PURPOSE: Ginkgo nut added functional sausage and a preparation method thereof are provided, thereby expressing the healthful effect of ginkgo nuts in the functional sausage that activates blood circulation, so that various diseases such as bronchial asthma can be prevented. CONSTITUTION: The method for preparing the ginkgo nut added functional sausage comprises the steps of: removing external skin and internal skin from the ginkgo nuts; pulverizing the skin removed ginkgo nuts; filtering the pulverized ginkgo nuts to prepare liquid ginkgo nut juice; adding 1 to 30% of liquid ginkgo nut juice into the meat materials for sausage; inserting the liquid ginkgo nut juice added meat materials into the inner portion of the pig intestine or synthetic intestine; and boiling the liquid ginkgo nut juice inserted pig intestine or synthetic intestine.
Patent KR-20040067271-A (KR)
Title: An engine trouble warning system
Inventor: LEE JONG SU
IPC: B60Q9/00
Filed: 2003-01-22
Abstract: PURPOSE: An engine failure warning device is provided to inform a driver of defects by turning on an engine check lamp and flickering an emergency lamp at the same time and outputting a sound signal for the defect part when a power generator as an engine block or a brake is broken down or coolant and fuel are short. CONSTITUTION: An engine failure warning device is composed of an engine check unit(10) for checking the failure of an engine block and outputting the correspondent data; a controller(20) for outputting an error code data and an enable signal of a timer to the data output from the engine check unit; first and second timers(50,80) operated for a constant time by the enable signal output from the controller; an emergency lamp flickering and driving unit(60) for flickering and driving an emergency lamp(70) for the operation time of the first timer; and a sound signal generating unit(90) for warning the engine failure by converting the error code data output from the controller for the driving time of the second timer into a sound signal and supplying the sound signal to a speaker(100).
Patent KR-20030066398-A (KR)
Title: 전류 구동형 발광 소자를 갖는 표시 장치 및 그 구동 방법
IPC: G09G3/32
Filed: 2003-01-30
Abstract: 표시 장치는, 각각이 전류 구동형 적색, 녹색, 청색 발광 소자를 구비하는 복수의 적색, 녹색, 청색 화소를 포함한다.  표시 장치를 구동하는 방법은 1 프레임 기간의 처음의 제1 기간에, 상기 발광 소자들 모두가 발광을 정지한 상태에서, 화소들 각각에 영상 신호 전압을 기입하는 단계와, 상기 제1 기간에 후속하는 상기 1 프레임 기간 중 적어도 하나의 기간에, 상기 발광 소자들 각각을 발광시키는 단계를 포함한다.  상기 적어도 하나의 기간의 각각은, 상기 발광 소자들 각각의 발광 특성 및 상기 화소들 각각의 영상 신호 전압에 의해 결정된다.
Patent KR-20040070625-A (KR)
Inventor: CHO CHAN IL
IPC: F16K13/00
Filed: 2003-02-04
Abstract: PURPOSE: A valve device is provided to clean the inner walls of pipes without separating connected pipes. CONSTITUTION: A valve device(100) comprises a housing(101) and a rotating member(130). An empty space is formed inside the housing and the housing has first, second, and third openings(110,115,120) to make a fluid come in and out of the empty space. The first, second, and third openings are each connected to outer pipes(1,2,3). The rotating member is rotatably installed in the empty space of the housing. The rotating member opens or shuts the openings according to the rotation angle. The second and third openings are arranged on a coaxial line. The center of rotation(140) of the rotating member does not penetrate an imaginary pipe formed by imaginarily connecting the edges of the second and third openings.
Patent KR-20040071878-A (KR)
Title: Drum brake for vehicle
Inventor: KANG JEONG SIK
IPC: F16D65/56
Filed: 2003-02-07
Abstract: PURPOSE: A drum brake for a vehicle is provided to prevent production of noise as vibration produced in the traveling vehicle is transmitted to the drum brake, and a strut, webs, and a parking lever collide while having relative motion. CONSTITUTION: A drum brake for a vehicle comprises a drum(20) rotating together with vehicle wheels; a pair of brake shoes(31,32) arranged to the inner sides of the drum, to have a braking function through friction with the inside of the drum; webs(31b,32b) arranged inside the brake shoes; a parking lever(70) rotatably mounted on one of the brake shoes; and a strut(60) transmitting the force transmitted to one of the brake shoes through the parking lever to the other of the brake shoes. A spring is arranged to web contact parts of the strut.
Patent KR-20040072788-A (KR)
Title: Monitoring camera device
Inventor: LEE MAN BOK
IPC: H04N5/225
Filed: 2003-02-11
Abstract: PURPOSE: A monitoring camera device is provided to mount/detach plural cameras on/from desired positions, and to use another supporting bracket when mounting/detaching the plural cameras, thereby improving a working efficiency and user convenience. CONSTITUTION: A supporting bracket(210) is attached to a specific area of a desired monitoring region. A case(220) has a receiving space inside, in which a lower side thereof is coupled with the supporting bracket(210). A PCB(230) is coupled/fixed inside the cases(220). A leaf spring(240) supplies an elastic force by being disposed on the PCB(230). A camera mounting bracket(250) is coupled with the case(220) while pressurizing the leaf spring(240), and mounts cameras(265) thereon. Plural camera supports(260) are mounted on the camera mounting bracket(250), and support the cameras(265) such that the cameras(265) rotate in vertical and horizontal directions.
Patent KR-20040073813-A (KR)
Title: Method for processing audio signal in home theater system
Inventor: EUN YU SUK
IPC: H04S3/00
Filed: 2003-02-14
Abstract: PURPOSE: A method for processing an audio signal in a home theater system is provided to enhance the effect of the stereo sound and the sound field by dividing an audio signal into a voice sound signal and an effective sound signal. CONSTITUTION: An audio signal is divided into predetermined modes according to an inputted key signal for controlling a volume and a sound angle of a speaker(S110). The volume level values of the divided audio signals are compared with the predetermined standard volume level values according to each mode(S112). The sound angle of the corresponding speaker is controlled by using the compared result when the audio signal is divided according the first particular mode(S114,S117). The audio signal divided according to the first particular mode is outputted to the controller speaker(S115).
Patent KR-20040076682-A (KR)
Inventor: HWANG GYU HAN
IPC: H04B1/50
Filed: 2003-02-26
Abstract: PURPOSE: A triple band front end module is provided to enable communication of IMT2000 and W-CDMA to be generalized besides a GSM and a DCS of TDMA. CONSTITUTION: The first LPF(Low Pass Filter)(23a) cancels RF noise of a signal transmitted from a DCS sending end(Tx). The second LPF(23b) cancels RF noise of a signal transmitted from a GSM sending end(Tx). A diplexer(24) separates an RF band DCS/W-CDMA signal and a low frequency band GSM signal. An antenna(26) transmits signal received from the DCS/W-CDMA/GSM sending end to a DCS/W-CDMA GSM receiving end. An SP2T GaAs switch 1(25) divides the RF signal into a DCS frequency band and a W-CDMA frequency band and connects transmission and reception paths. An SP2TGaAs switch 3(27) separates and connects the transmission and reception paths of the DCS band. An SP2T GaAs switch 2(28) separates and connects the transmission and reception paths of the GSM band. The first BPF(21a) passes only a signal of a certain range of frequency band desired by the DCS receiving end and removes a signal that is not included in the range. The second BPF(21b) passes only a signal of a certain range of frequency band desired by the GSM receiving end and removes a signal that is not included in the range. A duplexer(22) separates a transmission signal received from the W-CDMA wending end and a signal received from the antenna(26).
Patent KR-20040078350-A (KR)
Inventor: CHO SU GEUN
IPC: H01J37/36
Filed: 2003-03-04
Abstract: PURPOSE: A groundplate of an ion injection apparatus is provided to shorten the work time when assembling or disassembling the ground electrode plate and avoid the damage on the equipment due to a screw tap abrasion. CONSTITUTION: A ground electrode plate of an ion injection apparatus comprises a circular plate(60) formed with a circular shape; a center hole(66) formed at the center of the circular plate; a plurality of holes(64) formed on the circular plate with a predetermined interval to insert a screw; and a protrusion part(62) formed integrally with the circular plate at the end part of the center hole.
Patent KR-20040078389-A (KR)
Inventor: KIM JU IL
IPC: H03H9/25
Filed: 2003-03-04
Abstract: PURPOSE: A surface acoustic wave device is provided, which allows a user to arrange IDTs more than finger numbers on the same size die by arranging differently plural IDTs on the parallelogram-shaped. CONSTITUTION: A surface acoustic wave device includes a die, a top IDT(Inter Digital Transducer), and a bottom IDT. The die(11) is formed with a shape of parallelogram. The top IDT(12) is formed on one side of the die. The top IDT is arranged on a center part of an upper side of the die. The bottom IDT(14) is arranged on a center part of a bottom side of the top IDT. The bottom IDT is arranged cornerwise to the top IDT.
Patent KR-20040079158-A (KR)
Inventor: CHOI YONG SEON
IPC: H04B1/40
Filed: 2003-03-06
Abstract: PURPOSE: A circuit for controlling a local oscillator of a wireless communication device is provided to build a controller in a local oscillator, and to transmit each control signal to the local oscillator, thereby preventing outer noise from coming in while reducing a generation of a wrong operation. CONSTITUTION: A reference frequency oscillator(10) outputs a predetermined assigned reference frequency. An inner controller(41) generates a system clock signal, a data signal, and a latch enable signal by using the reference frequency to output the signals, and cuts off the outputting of the signals if a lock sensing signal is inputted at a high level. A local oscillator(42) inputs the signals outputted from the inner controller(41), outputs a local oscillating frequency, and outputs the lock sensing signal to the inner controller(41) if the local oscillating frequency is outputted.
Patent KR-20040079595-A (KR)
Inventor: CHOII SOON GI
IPC: C03C17/32
Filed: 2003-03-08
Abstract: PURPOSE: An autoclave apparatus and a method for controlling an autoclave apparatus are provided, to obtain an autoclave apparatus which removes the bubbles formed on a substrate where a film is coated by applying an internal pressure. CONSTITUTION: The autoclave apparatus comprises a body(10); first and second opening/closing means which are set at both sides of the body and opens and closes a body accommodating space; an air path which(30) is set in the inner wall of the body and forms an air path; a tray which is accommodated in the body accommodating space, is broken by first and second stoppers and can move to a certain direction; a tray transfer device which moves the tray to a certain position; a heater which increases the temperature of the body accommodating space; first and second air circulation means which circulates the air of the body accommodating space; and at least two pressing means which are set at both ends of the body. Preferably the tray is a plurality of rollers.
Patent KR-20040082490-A (KR)
Inventor: KIM DAE HYEON
IPC: H01L21/31
Filed: 2003-03-19
Abstract: PURPOSE: A method for depositing an insulation layer by an HDP(high density plasma) process is provided to prevent an upper corner of an interconnection from being clipped in insulation deposition by an HDP process by decreasing the flowrate of O2 gas at an early state of depositing the insulation layer to improve an etch characteristic and by etching the insulation layer to form an excellent gap-fill structure and function as a barrier layer. CONSTITUTION: The first insulation layer is deposited on a semiconductor substrate(21) having interconnections(22) in a condition of a reduced composition ratio of O2 gas and SiH4 gas. The overhang portion formed at the upper corner of the interconnection in depositing the first insulation layer is etched. The second insulation layer(24) is deposited on the etched first insulation layer(23a). The third insulation layer(25) is deposited on the second insulation layer to carry out a gap-fill process.