Patent DE-102008052750-A1 (DE)
Title: Device for metal organic chemical vapor deposition, comprises reactor with upper- and lower cover, wafer-applying unit with susceptors, heating unit, rotary drive unit, gas supply unit with gas supply connections, and gas output unit
Inventor: LEE WON SHIN
IPC: C23C16/455
Filed: 2008-10-22
Abstract: The device for metal organic chemical vapor deposition (MOCVD), comprises a reactor (110) with an upper- and a lower cover, which form an inner chamber with a pre-determined size, if they are connected, a wafer-applying unit (120) with an upper- and a lower susceptor, which are rotatably mounted at an upper and a lower hollow shaft, a heating unit (130), a rotary drive unit (140), which provides force for rotating the susceptors around the upper and the lower hollow shaft, a gas supply unit (150) with an upper- and a lower gas supply connection, and a gas output unit (160). The device for metal organic chemical vapor deposition (MOCVD), comprises a reactor (110) with an upper- and a lower cover, which form an inner chamber with a pre-determined size, if they are connected, a wafer-applying unit (120) with an upper- and a lower susceptor, which are rotatably mounted at an upper and a lower hollow shaft, a heating unit (130), a rotary drive unit (140), which provides force for rotating the susceptors around the upper and the lower hollow shaft, a gas supply unit (150) with an upper- and a lower gas supply connection, and a gas output unit (160), which is adjacently arranged on an outer circumference of the upper and the lower cover and is connected with the interior of the reactor, in order to outwardly discharge the reaction gas. The wafer is present on opposite-lying surfaces of the upper and the lower susceptors. The gas supply unit supplies reaction gas between the opposite-lying surfaces of the upper and the lower susceptors via a centric gas supply nozzle, which is connected with the upper and the lower hollow shaft. The gas supply connections are connected with the upper and the lower hollow shaft. The heating unit comprises an upper heating device present between the upper cover and the upper susceptor and a lower heating device present between the lower cover and the lower susceptor. The hollow shafts are present at the upper and/or the lower cover. The reactor is provided at a side with a cover-rotation section, which comprises a moment arm whose end is connected with the upper or the lower cover, and a stationary arm, whose upper end is connected with the moment arm by a drive shaft. The upper susceptor is provided with flexible wires, whose fixed end is fastened to the upper susceptor and free end is deformed in such a way that it is bent and is in contact with the surface of the wafer. The upper and the lower heating devices are operated independently in such a way that they heat the upper and the lower susceptor on a same temperature or different temperatures. The rotary drive unit contains an upper and a lower torque motor, which comprise drive shafts, which have gear wheels propelling at their front sides and are present at outer circumference surfaces of the upper and/or lower susceptors. The torque motor turn and the susceptors rotate in same direction and with same speed. The upper and the lower covers are provided with an upper- and/or a lower temperature sensor, which are adjacently arranged on the exterior surfaces of the susceptors or the heating devices. A supply position of the reaction gas is identical to the central position of a vertical distance between the upper and the lower susceptor. The gas output unit is provided with a ring-like insertion element, which is adjacently arranged on the upper and the lower cover, with an output connection, which is present at the insertion element so that it is open to the interior of the reactor, and with an exit gas line, which is connected with the output connection. The gas output unit comprises an output line, which extends from outlet of the upper and the lower hollow shaft beyond the upper and the lower cover to a predetermined length or an output line, which is mounted at the outlet of the upper and the lower hollow shaft.