Patent SG-11201809018U-A (SG)
Title: Plasma abatement solids avoidance by use of oxygen plasma cleaning cycle
Inventor: DICKINSON COLIN JOHN
IPC: H01L21/205
Filed: 2017-03-28
Abstract: INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property -, Organization 11111111011110111010101111101011111011101111110111110010111011111101111011111 International Bureau ... .1 j ..... .....!;,,, (10) International Publication Number (43) International Publication Date WO 2017/180322 Al 19 October 2017(19.10.2017) WIPO I PCT (51) International Patent Classification: (81) Designated States (unless otherwise indicated, for every H01L 21/02 (2006.01) C23C 16/455 (2006.01) kind of national protection available): AE, AG, AL, AM, H01L 21/205 (2006.01) AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, (21) International Application Number: DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, PCT/US2017/024485 HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, (22) International Filing Date: KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, 28 March 2017 (28.03.2017) MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, (25) Filing Language: English RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, (26) Publication Language: English TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (30) Priority Data: 62/323,582 15 April 2016 (15.04.2016) US (84) Designated States (unless otherwise indicated, for every 62/352,240 20 June 2016 (20.06.2016) US kind of regional protection available): ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, (71) Applicant: APPLIED MATERIALS, INC. [US/US]; TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, 3050 Bowers Avenue, Santa Clara, California 95054 (US). TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, (72) Inventor: DICKINSON, Colin John; 6544 Fall River DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, Drive, San Jose, California 95120 (US). LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, (74) Agents: PATTERSON, B. Todd et al.; Patterson & GW, KM, ML, MR, NE, SN, TD, TG). Sheridan, L.L.P., 24 Greenway Plaza, Suite 1600, Houston, Published: Texas 77046 (US). — with international search report (Art. 21(3)) = (54) Title: PLASMA ABATEMENT SOLIDS AVOIDANCE BY USE OF OXYGEN PLASMA CLEANING CYCLE 200--, 1 / 4 FLOWING AN EFFLUENT FROM A PROCESSING CHAMBER r2O2 INTO A FORELINE OR A PLASMA SOURCE INJECTING AN ABATING REAGENT INTO THE L_204 FORELINE OR THE PLASMA SOURCE 1 FORMING A PLASMA USING THE PLASMA SOURCE F-206 i STOPPING INJECTING THE ABATING REAGENT 1-208 11 INTO THE FORELINE OR THE PLASMA SOURCE i N INJECTING AN OXYGEN CONTAINING GAS INTO Ho el THE FORELINE OR THE PLASMA SOURCE M Fig. 2 FORMING A PLASMA USING THE PLASMA SOURCE F - 212 GC 11 ---- (57) : Embodiments disclosed herein include a plasma abatement process that takes effluent from a processing chamber and IN reacts the effluent with water vapor reagent within a plasma source placed in a foreline by injecting the water vapor reagent into the C foreline or the plasma source. The materials present in the effluent as well as the water vapor reagent are energized by the plasma ei source, converting the materials into gas species such as HF that is readily scrubbed by typical water scrubbing abatement techno - O logy. An oxygen containing gas is periodically injected into the foreline or the plasma source relative to the water vapor injection to ,..1: reduce or avoid the generation of solid particles. The abatement process has good destruction removal efficiency (DRE) with minim- ized solid particle generation.