baber/WOPTO huggingface dataset:
Patent KR-20050101328-A (KR)
Title: Process and system for thermally uniform materials processing
Inventor: SECCOMBE DONALD A JR
IPC: F27D99/00
Filed: 2004-02-10
Abstract: The present invention provides a system and method for binder removal and sintering of materials such as ceramic materials and products, LTCC intervals, solid oxide fuel cells and powder metals. A combination of microwave and convection/radiation heating is employed for binder removal and sintering. Preferably, the microwave heating is accomplished using a variable or multi-frequency microwave source. A gas atmosphere is provided in the furnace chamber by one or more eductors which produces a high volume gas circulation in the furnace chamber to achieve a highly uniform gas environment and temperature. The process in accordance with the invention controls the heating cycle, the heat sources and thermal profile depending upon the composition of the particular material being processed. The thermal processing can be accomplished in a batch furnace in which a product is loaded for processing and unloaded after processing. The invention can also be practiced in a continuous process wherein the product is conveyed between furnace sections or chambers of a furnace.
Patent KR-20050105469-A (KR)
Title: Method and programmable apparatus for quantum computing
Inventor: KOHN WOLF
IPC: G06F7/38
Filed: 2004-02-17
Abstract: A method and apparatus for quantum computing. A computer-program source code, data, and unsubstantiated output variables are converted into a class of computable functions by a program compiler. The computable functions are encoded, and a continualization method is applied to the encoded functions to determine a first-order, time-dependent, differential equation. Variational calculus is employed to construct a Lagrangian whose minimum geodesic is the solution for the first-order, time-dependent, differential equation. The Lagrangian is converted into a quantum, canonical, Hamiltonian operator which is realized as an excitation field via an excitation generator. The excitation field is repeatedly applied to a quantum processor consisting of a lattice of polymer nodes to generate an intensity-versus-vibrational-frequency spectrum of the lattice nodes. The average vibrational spectrum intensity values are used as coefficients in an approximating polynomial of the encoding function to determine the substantiated output variables, or program output.
Patent KR-20060002794-A (KR)
Title: Hair-styling accessory for tightening facial feature
Inventor: AZZEDDINE FAIZA
IPC: A45D44/22
Filed: 2003-03-14
Abstract: A hairdressing tool for re- stretching facial features by pulling two locks of hair (31,31') in an opposite direction. According to the invention, said tool comprises two tongs (31A, 31B) which are joined to a ring (1) and are disposed opposite each other according to a same direction (L3) in order to block two locks of hair (31, 31'), which are pulled in an opposite direction, according to said direction. Preferably, the tool comprises several pairs of opposing tongs (51A, 51B - 91A, 91B) according to a direction (L5, L7, L9) in order to block several pairs of locks of hair (51, 51', 71, 71', 91, 91'). The two locks of each pair are pulled in an opposite direction according to the direction corresponding to the arrangement of two opposing tongs (L5, L7, L9).
Patent KR-20050120758-A (KR)
Title: Multi-carbide material manufacture and use
Inventor: DOBBS RORBERT
IPC: C01B32/949
Filed: 2004-03-10
Abstract: Grinding media, including shaped media such as spheres or rods ranging in size from about 0.5 micron to 100 mm in diameter, are formed from a multi-carbide material consisting essentially of two or more carbide-forming elements and carbon, with or without carbide-forming elements in their free elemental state. The media have extremely high mass density, extreme hardness, and extreme mechanical toughness.
Patent KR-20060020604-A (KR)
Title: Coloring composition and coating composition
Inventor: WATANABE KAZUE
IPC: C09D131/04
Filed: 2004-03-26
Abstract: A water-based coloring composition and a water-based coating composition with each of which the number of operation steps such as dyeing, printing, painting, and coating can be significantly reduced. The compositions enable functional compounds to be satisfactorily fixed to the substrate to be processed, and attain satisfactory fastness. The compositions do not impair the feeling of the substrate. The water-based coating composition is obtained by mixing an aqueous-emulsion-type acrylic pressure-sensitive adhesive with a cationic water-soluble polymer. The coloring composition, which is for use in dyeing, printing, painting, or coating, is obtained by mixing an aqueous-emulsion-type acrylic pressure-sensitive adhesive with a cationic water-soluble polymer and then mixing the mixture with functional compounds such as a dye, pigment, drug, deodorant, perfume, etc.
Patent KR-20060115324-A (KR)
Title: Nd filter and light quantity diaphragming device including the same
Inventor: KUNII KOKI
IPC: G02B5/20
Filed: 2004-11-11
Abstract: A thin film type ND filter being inexpensive and excelling in durability. There is provided ND filter (0) comprising transparent substrate (1) and, superimposed thereon, light absorption films (3,5) and dielectric films (2,4,6), wherein the light absorption films 3.5 consist of a composition comprising 1 to 30 wt.% of a metal in pure form and 50 wt.% or more of a saturated oxide of the metal with the balance of compounds of the metal containing lower oxides of the metal. Metal raw material of the light absorption films (3,5) is selected from among Ti, Cr, Ni, NiCr, NiFe and NiTi. As the dielectric films (2,4,6), use is made of SiO2 or Al2O3. Function of reflection prevention is imparted by superimposing of the light absorption films (3,5) and dielectric films (2,4,6) in given film thicknesses and in given sequence. Alternatively, a reflection prevention layer may be formed on the back of the substrate (1).
Patent KR-20070073535-A (KR)
Title: Apparatus and method for time tracking in a mobile terminal
Inventor: SONG HOON GEUN
IPC: H04B17/00
Filed: 2006-01-05
Abstract: An apparatus and a method for tracking a time in a mobile terminal are provided to improve a receiving performance by preventing a multi path which tracks a timing from converging into one through each finger. An apparatus for tracking a time in a mobile terminal includes a first timing tracker(180), a second timing tracker(580), and a loop filter(590). The first timing tracker(180) inputs a timing error to the loop filter(590) by calculating a difference between first signal energy which is faster than an on-time signal, and second signal energy which is slower than the on-time signal. The second timing tracker(580) inputs an adjustment value of a bandwidth to the loop filter(590) by comparing third signal energy which is faster than the first signal with fourth signal energy which is slower than the second signal. The loop filter(590) receives the timing error and the adjustment value of the bandwidth and outputs a timing control signal.
Patent KR-20070087884-A (KR)
Title: A oil pump used in a linear compressor
Inventor: KANG KYOUNG SEOK
IPC: F04B17/04
Filed: 2006-01-16
Abstract: An oil supply device of a linear compressor is provided to reduce a unit cost of a mass member, and to improve productivity by producing the mass member by using a simplified sintering process. An oil supply device of a linear compressor comprises an oil supply flow path(62), an oil cylinder(72), an elasticity member and a mass member(74). The oil supply flow path is installed in a main body frame(53), and supplies oil between a cylinder(52) and a piston(54). The oil cylinder is installed in the main body frame so as to be connected to the oil supply flow path. The elasticity member is installed inside the oil cylinder. The mass member is installed inside the oil cylinder, receives elastic force by the elasticity member so as to be linearly reciprocated by vibration of the main body frame, and produced by a sintering process.
Patent KR-20070076319-A (KR)
Title: Electro-magnetic interference film with wave curl free and pdp filter employing thereof
Inventor: LEE YEON KEUN
IPC: H05K9/00
Filed: 2006-01-18
Abstract: An electro-magnetic interference film and a PDP(Plasma Display Panel) filter are provided to obtain the stable ground efficiency by including a ground unit with a plurality of pattern holes. An electro-magnetic interference film includes a conductive effective screen(200), a ground unit(111), and a plurality of pattern holes(112). The conductive effective screen(200) is connected to an effective display unit of a panel, and is formed in a mesh pattern. The ground unit(111) is connected to an area except the effective display unit of the panel, and surrounds the conductive effective screen(200). The plurality of pattern holes(112) is formed on the ground unit(111), and is patterned in a small tilted rectangular shape.
Patent KR-20070049533-A (KR)
Title: 집중경
Inventor: LEE KYU JOO
IPC: G02C7/16
Filed: 2006-01-25
Abstract: 본 발명은 "집중경"에 관한 것으로 원하는 곳에 시선을 집중시키고자 할때 눈의 측면에서 시야를 방해하는 빛이 침해함으로서 시선이 집중되지 않고 눈이 쉽게 피로해지는 문제점이 있음으로 안경과 같이 눈에 접근시켰을때 눈의 측면으로 침해하는 빛을 막아주는 빛가림턱을 집중경 주변으로 돌출되게 만들어 시력의 집중력을 높여주고 음이온과 원적외선이 방출되는 물질. 토르마린. 숫. 옥. 게르마늄. 을 한가지 이상 합성수지에 합성시키고 코팅시켜 집중경링과 코받침팩.을 성형시켜 집중경 안쪽과 아래쪽에 각각 결합시켜 음이온과 원적외선을 방출시키도록 하여 눈과 코에 있는 세균을 살균시켜 주고 혈액의 흐름을 원활하게 하여 피로를 회복시켜 주고 시력과 집중력을 높여준다. 
     집중경을 사용할때 사용 자국이 얼굴에 생기지 않도록 하고자 귀걸이끈을 집중경 양쪽 끝 부분에 설치시켜 귀뒤로 넘기면 집중경은 가볍게 눈위치에 멈추게 되어 사용자의 얼굴 크기에 관게없이 얼굴에는 집중경 및 귀걸이끈 자국이 생기지 않는 편리함이 있게 된다 
     
     집중경, 빛가림턱, 코받침팩, 집중경링, 귀걸이끈, 토르마린, 씰리카, 게르마늄, 쎄라믹, 숫, 옥.
Patent KR-20070078563-A (KR)
Title: Color setting apparatus and method
Inventor: OH SANG WOOK
IPC: H04N9/64
Filed: 2006-01-27
Abstract: A color setup device and a method therefor are provided to simultaneously perform color selection for setting a color used in the reproduction of multimedia data and the change of a setup value for the selected color. A control unit(100) displays a closed curve in which at least one color is displayed on at least one uniformly divided region and a setup band having at least one region for displaying a change state of a setup value of at least one color included in the closed curve band on a screen. The control unit(110) changes a selected color to corresponding to a setup value changed for the color selected in the closed curve band, and displays the changed color on the screen.
Patent KR-20070078937-A (KR)
Title: Card display method for a card game
Inventor: KIM YONG HWAN
IPC: G06Q50/10
Filed: 2006-01-31
Abstract: A method for displaying a card of a card game is provided to attract interest in the card game by allowing the gamer to turn up/view a part of hidden cards displayed in a screen of the card game. The rear side of the cards is displayed to an initial card display area set in a display screen. If a mouse cursor is placed on the initial card display area, it is checked whether a mouse button is turned on or not. The card pointed by the mouse cursor is moved according to motion of the mouse cursor and the front side of the card is gradually displayed from a front end of a moving direction.
Patent KR-20070083286-A (KR)
Title: Divisional connector for power distribution
Inventor: LEE KWANG YONG
IPC: H02G3/18
Filed: 2006-02-13
Abstract: A divisional connector for power distribution is provided to be easily used by connecting a wire only through the insertion of the end of the wire without a socket, a clip, or a screw and maximize the convenience due to connecting/dividing the plurality of ground sockets at once. A divisional connector for power distribution includes a body(10), long direction insertion grooves(11,11'), socket grooves(12), a ground socket, ground pins(15), a cover(20), and a plurality of insertion holes(21,21'). The long direction insertion grooves(11,11') are formed at an upper surface of the body(10). The socket grooves(12) are formed at both sides of the body(10). The ground socket is mounted in each of the insertion grooves(11,11'). The ground pins(15) are formed at both ends of the ground socket. The ground pins(15) protrude in the socket grooves(12). The cover(20) is engaged with an upper side of the body(10). The plurality of insertion holes(21,21') are formed in the cover(20).
Patent KR-20070083048-A (KR)
Title: Apparatus and method for transmitting signal in wireless communication system
Inventor: SUNG SANG HOON
IPC: H04B7/06
Filed: 2006-02-20
Abstract: An apparatus and a method for transmitting signals in a communication system are provided to increase total system performance by minimizing shadow areas through cell planning and improving the C/I(Carrier to Interference ratio) of a mobile station located at a cell boundary. A base station estimates an uplink channel, based on a signal received from a mobile station(502). The base station determines a beam coefficient for each of the subcarriers forming a clustered unit(504). The base station multiplies the information data of each subcarrier by each determined beam coefficient(506). Then the base station transmits the multiplied signal to the mobile station(508).
Patent KR-20070089498-A (KR)
Title: Method for forming semiconductor device
Inventor: SHIN SU BUM
IPC: H01L21/027
Filed: 2006-02-28
Abstract: A method for fabricating a semiconductor device is provided to etch a photoresist pattern to have a vertical cross section while reducing a height of the photoresist pattern. A Pt film is formed on a semiconductor substrate(41), and a hard mask pattern consisting of a first and a second hard mask patterns is formed on the Pt film. The Pt film is etched by using the first hard mask pattern. The step of forming the hard mask pattern includes forming a first hard mask material layer on the Pt film, forming a second hard mask material layer on the first hard mask material layer, forming a photoresist pattern on the second hard mask material layer, etching the second hard mask material layer to form the second hard mask pattern, stripping the photoresist pattern, etching the first hard mask material layer to form the first hard mask pattern, and removing the second hard mask pattern.
Patent KR-20060096919-A (KR)
Inventor: SHIBUSAWA MAKOTO
IPC: G09G3/30
Filed: 2006-03-07
Abstract: 디스플레이가 기판(SUB)과 상기 기판(SUB) 상에 매트릭스 형태로 배열된 화소들(PX)을 포함한다.  화소들(PX)의 각각은, 디스플레이 소자(OLED)와, 서로 도전형이 동일한 제1 전계 효과 트랜지스터(DR, SW1)를 포함한다.  상기 디스플레이 소자(OLED)와 상기 제1 전계 효과 트랜지스터(DR)는 제1 및 제2 전원 단자(ND1, ND2) 간에 직렬로 전기적 접속된다.  상기 제2 전계 효과 트랜지스터(SW1)의 소스가 상기 제1 전계 효과 트랜지스터(DR)의 게이트에 전기적 접속된다.  상기 제1 전계 효과 트랜지스터(DR)는 상기 제2 전계 효과 트랜지스터(SW1)보다 문턱 전압이 더 깊다. 
       
     OLED, 전계 효과 트랜지스터, 문턱 전압, 디스플레이, 화소
Patent KR-20060032170-A (KR)
Inventor: LEE KI HONG
IPC: B60P9/00
Filed: 2006-03-15
Abstract: 본 발명은 핸드 팔레트 트럭에 관한 것으로, 보다 상세하게는 화물을 들어 옮기는 한쌍의 포크에 구동되는 다수개의 이송롤러 또는 이송벨트가 설치되어, 화물을 원하는 장소에서 용이하게 하역할 수 있도록 된 핸드 팔레트 트럭에 관한 것이다. 
     본 발명에 따르면, 하부에 이동바퀴가 설치되고, 상부에 이동과 조작을 위한 손잡이가 설치되며, 신장수축하는 유압실린더가 설치된 본체; 단부 하측에 포크바퀴를 가진 한쌍의 포크가 설치되고, 상기 유압실린더에 체결되어 승강되는 승강대;로 구성된 핸드 팔레트 트럭에 있어서, 상기 승강대에는 이송모터가 설치되고, 상기 포크에는 일정 간격으로 다수개의 이송롤러가 포크의 상부면에 일정부분 돌출되게 축설되며, 상기 이송모터와 이송롤러는 체인 및 체인스프로켓으로 연결되어 연동되는 핸드 팔레트 트럭이 제공된다. 
       
     핸드 팔레트 트럭, 포크, 하역, 이송롤러, 이송벨트
Patent KR-20070095622-A (KR)
Title: White light emitting device
Inventor: KIM BUM JOON
IPC: H01L33/50
Filed: 2006-03-22
Abstract: A white light emitting device is provided to downsize the device which can emit white light without using a package containing phosphor, by using europium silicate for a wavelength converting film. A white light emitting device includes a light emitting structure(150) formed on a substrate(101). The light emitting structure has an n-type semiconductor layer(102), an active layer(103) formed on the n-type semiconductor layer, and a p-type semiconductor layer(104) formed on the active layer. An n-side electrode(105) is formed on an exposed portion of the n-type semiconductor layer, and a p-side electrode(106) is formed on the p-type semiconductor layer. A wavelength converting film(107) of europium silicate is formed under the substrate.
Patent KR-20060037294-A (KR)
Inventor: KIM IL SANG
IPC: F04F1/02
Filed: 2006-03-25
Abstract: 본 발명은 수증기압을 이용한 유체의 펌핑방법 및 수증기압을 이용한 펌프에 관한 것으로, 보다 상세하게는 수증기의 팽창과 냉각수축의 원리를 이용하여 유체를 토출시키고 수증기의 냉각응축으로 진공을 유발시켜 유체의 흡입에 적용하도록 하는 고효율의 펌핑 방법 및 이를 이용한 펌프에 관한 것이다. 
     본 발명에 따르면, 유체가 충진된 실린더에 고온고압의 수증기를 송급하여 유체를 송출하는 단계; 실린더에 잔존한 준고압을 해제하여 대기압으로 낮추는 단계; 실린더 내의 수증기를 냉각수축시켜 실린더내에 부압을 발생시킴으로써 유체를 흡입하는 단계;를 포함하여 구성된 수증기압을 이용하여 유체의 펌핑방법과, 냉각핀이 형성된 다수개의 실린더; 고온고압의 수증기를 각각의 실린더로 순차적으로 공급하는 밸브장치; 상기 각각의 실린더의 일단에 급수밸브로 단속되게 연결된 급수관; 상기 각각의 실린더의 타단에 배수밸브로 단속되게 연결된 배수관;을 포함하여 구성된 수증기압을 이용한 펌프가 제공된다. 
       
     펌프, 수증기, 실린더, 회전밸브
Patent KR-20070100004-A (KR)
Title: Method for fabricating thin film transistor plate
Inventor: NING HONG LONG
IPC: H01L29/786
Filed: 2006-04-06
Abstract: A method for fabricating a thin film transistor plate is provided to form a low resistance metal interconnection to reduce a manufacturing cost and time, thereby achieving a good signal transmission. A method for fabricating a thin film transistor plate includes the steps of forming a low resistance conductive pattern(21b) on a base pattern(21a) for gage interconnection. The low resistance conductive pattern(21b) is formed to cover the base pattern(21a) using a non-electrolyte plating method. When the base pattern(21a) for gate interconnection is made of molybdenum, a surface of the base pattern(21a) for gate interconnection is dipped into a plating solution including metal salts such as palladium, platinum, or gold. Then, the base pattern(21a) surface-treated with metal salts is dipped into the plating solution including a metal material having a low resistance to form a metal pattern of low resistance on the base pattern(21a).
Patent KR-20070100024-A (KR)
Title: Norm key board simpler form input and transaction of fast hangeul input for device and method
Inventor: BAE JOO WOON
IPC: G06F3/00
Filed: 2006-04-06
Abstract: A device and a method for inputting Korean alphabets at a fast speed based on simpler form input and transaction of a norm keyboard are provided to input the Korean alphabets by the input of the simpler form by combining syllables with inputted codes through a processing part. A device for inputting Korean alphabets at a fast speed based on simpler form input and transaction of a norm keyboard comprises a keyboard(10) having a simpler form mode converting part(10a), and a processing part(11) outputting the content of a simpler form dictionary or combining syllables with inputted codes. The processing part includes a special character and function key output(14), a Korean alphabet combining part(15), a syllable output part(16), a simpler form starting/finishing searching and processing part(19), a simpler form dictionary, a syllable stack(17) and an input stack(18). The special character and function key output outputs special characters and function keys from a symbol, special character, and function key processing part(13) linked with a control part(12). The Korean alphabet combining part receives a consonant and a vowel of the Korean alphabet and combines syllables. The simpler form starting/finishing searching and processing part searches the inputted simpler form from a simpler form dictionary(20), outputs the content of the dictionary, and transmits the content to a simpler form output part(21).
Patent KR-20060054246-A (KR)
Inventor: KIM DO SUNG
IPC: H01Q1/24
Filed: 2006-04-21
Abstract: 본 발명은 이동통신단말기의 배터리에 안테나엘리먼트가 장착됨으로써 이동통신단말기의 소형화 설계에 매우 유용하면서도 지상파 DMB 방송을 시청할 수 있는 충분한 안테나 성능을 충분히 유지할 수 있는 이동통신단말기용 지상파 DMB 안테나 설치구조에 관한 것이다. 본 발명에 따른 이동통신단말기용 지상파 DMB 안테나 설치구조는, 이동통신단말기(1)의 본체(2)에 전원을 공급하는 배터리(3)에 장착된 기판(10)과 상기 기판(10)에 형성된 안테나엘리먼트(20)를 포함한다. 상기 배터리(3)를 상기 본체(2)에 장착하면, DMB 안테나 단자(2D, 3C)의 접속에 의해 상기 안테나엘리먼트(20)의 일단은 상기 이동통신단말기 본체(2)에 형성된 단말기그라운드(2A)에 인접하여 상기 단말기그라운드(2A)와는 별도로 형성된 안테나그라운드(30)에 전기적으로 연결되어 접지된다. 상기 안테나그라운드(30)는 상기 단말기그라운드(2A)와 비드 또는 인덕터(31)를 매개하여 전기적으로 연결되어 있다.
Patent KR-20070106205-A (KR)
Title: A method of preventing vehilce roll-back for a vehicle having an automatic transmission
Inventor: CHOI SEONG HO
IPC: B60T1/06
Filed: 2006-04-28
Abstract: A rollback preventing method of a vehicle equipped with an automatic transmission is provided to reduce the total size of a device without decreasing rollback preventing performance, by restraining the rotation of an output shaft by controlling a clutch and a brake installed in the automatic transmission in advance without additionally installing a parking brake. A rollback preventing method of a vehicle equipped with an automatic transmission comprises the steps of: judging whether a control operation for preventing rollback of the vehicle is necessary or not(S100); braking the vehicle by generating first brake torque formed by operating a hydraulic modulator, if the rollback preventing operation is necessary(S101); and maintaining the braking state of the vehicle by generating second brake torque formed by restraining the rotation of an output shaft through the operation of a clutch and a brake installed in the automatic transmission, in order to prevent rollback if the first brake torque is automatically released(S103,S104).
Patent KR-20060113564-A (KR)
Title: Refresh circuit with optimized power consumption
Inventor: HOKENMAIER WOLFGANG
IPC: G11C11/4063
Filed: 2006-05-01
Abstract: A refresh circuit with optimized power consumption is provided to increase the speed of a refresh signal when a memory array shifts from a standby mode to an active mode after detecting the transition from the standby mode to the active mode of the memory array, by using the refresh signal used to periodically refresh memory cells. In a random access memory device, a memory array(22) comprises plural memory cells constituted to maintain charges and has an active mode and a standby mode. A refresh rate generator circuit(26) generates a refresh signal having a refresh rate and is coupled to the memory array, and the refresh signal is used in periodically refreshing the memory cells. The memory array detects the transition from the standby mode to the active mode, and the refresh rate of the refresh signal is increased when the memory array shifts from the standby mode to the active mode.
Patent KR-20070109613-A (KR)
Title: Shadow mask frame assembly and method for manufacturing organic light emitting device using the same
Inventor: KIM DONG HWAN
IPC: H05B33/10
Filed: 2006-05-12
Abstract: A shadow mask frame assembly and a method for manufacturing an organic light emitting device using the same are provided to increase an aperture ratio of the OLED(Organic Light Emitting Device) by increasing a thickness of a center of a mask frame to be thicker than end portions. A shadow mask frame assembly includes a shadow mask(100) and a mask frame(200). The shadow mask includes plural transmissive regions and a blocking region. The transmissive regions correspond to pixel regions, respectively. The blocking region surrounds the transmissive regions. A rim of a center of the mask frame is thicker than a rim of an edge of the mask frame. The shadow mask is fixed on the mask frame. A center of the mask frame is formed to be thicker than the edge portion of the mask frame.
Patent KR-20070109635-A (KR)
Title: Appratuss for cleaning a surface of wafers, nozzle arm and method for cleaning a surface of wafers
Inventor: PARK JUN MO
IPC: H01L21/304
Filed: 2006-05-12
Abstract: A wafer surface cleaning apparatus and a method for cleaning a nozzle arm and a surface of a wafer are provided to enhance productivity by simplifying a manufacturing process and lowering an error rate. A wafer surface cleaning apparatus includes a chamber wall(110), a rotary shaft(120), a chuck(130) positioned on an upper part of the rotary shaft to load a wafer on an upper surface thereof, an injection hole(160) formed in the inside of the chuck to inject gas or liquid onto a bottom surface of the wafer, and a nozzle arm(180) for injecting the gas, water, and chemicals onto the surface of the wafer loaded on the upper surface of the chuck. The nozzle arm includes a plurality of unit nozzles. The chuck includes a wafer supporting ring and a plurality of wafer fixing pins.