baber/WOPTO huggingface dataset:
Patent KR-20060105150-A (KR)
Inventor: BYUN KI NAM
IPC: C09K11/06
Filed: 2005-04-01
Abstract: 본 발명은 하기 화학식 1의 디페닐비닐계 화합물을 발광 호스트 물질로 포함하는 유기전기발광소자에 관한 것으로, 본 발명에 따른 유기전기발광소자는 전기적 안정성 및 발광효율이 뛰어나면서도 우수한 수명특성을 나타내므로, 장수명을 요구하는 유기전기발광소자 개발 등에 유용하게 활용될 수 있다.  
     
       
         
       
     
     상기 식에서,  
     R 1  내지 R 30 은 각각 독립적으로 수소, 할로겐, 카복실, 아미노, 시아노, 니트로, 직쇄형 또는 분지형의 C 1-6  알킬, 치환되거나 비치환된 C 6-18  아릴, 직쇄형 또는 분지형의 C 1-6  알콕시, 헤테로 원자를 함유한 C 4-6  헤테로고리, 또는 둘 이상의 치환체들이 융합된(fused) 방향족 고리이다.
Patent KR-20060105260-A (KR)
Title: 칼라코팅제 및 칼라아스팔트
Inventor: OH EUN YEONG
IPC: C09D5/02
Filed: 2005-04-04
Abstract: 본 발명은 도시 미관을 아름답게 구성하기 위하여 차도, 보도, 자전거 전용도로, 공원, 경기장 트랙, 어린이 보호구역, 미끄럼방지구역 등에 시공하여,  
     운전자의 경각심을 유발시켜 안전을 도모하고,  
     도시미관을 아름답게 구성하기 위하여 설치하는 칼라아스팔트에 관한 것으로서, 
     상세하게는 아크릴에멀죤에 제2의 합성에멀죤을 혼합하여 제조한 복합합성에멀죤에안료 또는 토너를 혼합하여 제조한 칼라코팅제 및 이를 표면에 도포한 칼라아스팔트에 관한 것이다. 
     칼라아스콘,칼라아스팔트,칼라콘크리트,칼라아스콘접착제,칼라아스콘,칼라코팅제
Patent KR-20060106942-A (KR)
Inventor: YANG MIN SOO
IPC: F21V7/00
Filed: 2005-04-07
Abstract: 본 발명은 비드를 포함하는 등기구 및 전등에 관한 것으로, 특히 전등에 대하여 반사면을 등기구 구조체, 상기 등기구 구조체 반사면의 전부 또는 일부에 도포되어지는 수지바인더로 이루어진 수지바인더층; 및 에 도포되어지는 수지바인더층, 상기 도포된 수지바인더층의 표면에 결합되어지고 외부로 돌설되어지는 다수의 비드로 이루어지는 비드층을 포함하는 것을 특징으로 하는 비드를 포함하는 등기구 및 이에 대응하는 전등에 관한 것이다. 
     본 발명에 따라 형성된 등기구 및 전등은 전등 및 등기구의 발광면 및 반사면에 먼지나 오염물 등의 부착을 막을 수 있고, 일단 부착되었다 하더라도 부착물을 쉽게 제거할 수 있을 뿐만 아니라, 시공이 용이하고 코팅된 피착면의 내후성, 내오염성, 내스크래치성, 내화학성, 내충격성 등의 물성을 향상시킬 수 있다. 
       
     전등, 등기구, 비드, 유리 분말
Patent KR-20060107088-A (KR)
Inventor: LEE JUNG MAN
IPC: B41M5/00
Filed: 2005-04-07
Abstract: 본 발명은 친환경성 난연 열전사필름에 관한 것으로, PET 필름(2)과, 이형재층(4)과, 탑프라이머층(10)과, 인쇄층(12) 및 접착제층(14)이 순차적으로 적층되어 구성된 열전사필름에 있어서, 상기 이형재층(4)과 탑프라이머층(10) 사이에 광촉매층(6)과 난연재층(8)을 형성시키되, 상기 광촉매층(6)은 이형재층(4)의 상면에 형성되고, 상기 난연재층(8)은 광촉매층(6)의 상면에 형성되어 이루어진다. 
       
     열, 전사, 필름, 광촉매, 난연, 친환경,
Patent KR-20060107217-A (KR)
Inventor: SONG GWANG CHOEN
IPC: A23L7/10
Filed: 2005-04-08
Abstract: 본 발명은 홍국균 추출물을 함유하는 기능성 빵과 떡에 관한 것으로, 밀가루 100중량부에 대하여 홍국균 쌀 추출액 5 내지 10 중량부를 함유하는 것을 특징으로 하는 빵 및 쌀가루 100중량부에 대하여 홍국균 쌀 추출액 5 내지 10 중량부를 함유하는 것을 특징으로 하는 떡에 관한 것이다. 이러한 홍국균 추출물을 함유하는 기능성 빵과 떡은 인체내의 혈중 콜레스테롤을 저하시키는 작용 등에 의해 건강증진과 질병예방의 효과를 나타낸다.  
     홍국균, 기능성, 빵
Patent KR-20060047565-A (KR)
Inventor: KAMINSKI CHRISTOPHER ANTHONY
IPC: H02K3/51
Filed: 2005-04-28
Abstract: 제너레이터 회전자 본체(47)의 계자 권선의 말단 권선(40)은 평탄화된다.  평탄한 하면(52)을 갖는 캡(50)은 평탄화된 말단 권선 위에 배치되고, 엔클로져 링(54)은 말단 권선과 캡 주위에서 연장된다.  구멍(58)이 캡을 통해 형성되어 말단 권선의 코일과 캡의 외부 표면을 따라 형성된 통로(60) 사이의 간극과 연통한다.  통로 및 구멍은, 말단 권선을 통하여, 회전자 본체와 고정자 사이의 공기 간극 내로 외부로 냉각 매체의 흐름을 위한 환기 경로를 형성한다.
Patent KR-20060114747-A (KR)
Title: Baseband transceive of ultra wide band radio communication system
Inventor: LEE HANG WOO
IPC: H04L25/02
Filed: 2005-05-02
Abstract: A baseband transceiver of an ultra wide band radio communication system is provided to simplify a structure of the transceiver by transmitting and receiving in a shape of a baseband signal. In a baseband transceiver of an ultra wide band radio communication system, an input buffer unit(10) is composed of X number of buffers to form X x N bit data. A pulse matching filter unit(20) samples the X x N bit data as a chip frequency by using a coefficient inputted from a calculating unit(100). A mutual correlating unit(30) receives the chip frequency sampled by the pulse matching filter unit(20) and detects a position at which the pulse exists. A peak detection unit(40) detects a peak of the received data inputted from the mutual correlating unit(30). A phase acquisition/tracking unit(50) acquires a phase of the received data and tracks the acquired phase. A multiplexer(60) outputs a signal outputted from the selected mutual correlator. A multi-path calculator(80) generates phase shift and amplitude change information for the multi-path. A combiner(70) transceives the phase shift for the multi-path, the information for the amplitude change, and a signal inputted through the multiplexer(60) by using single antenna. And, a data reproduction unit(90) compensates a channel for each path by using the phase shift for the multi-path and the information for the amplitude change and reproduces the bits transceived per each symbol clock by comparing the compensated result with a reference value.
Patent KR-20060116269-A (KR)
Title: Pbx having a class of service level assigned to a authorization code and the line service method thereof
Inventor: LIM CHANG SEOB
IPC: H04Q3/10
Filed: 2005-05-09
Abstract: A PBX having a COS for each authorization code and a method for providing an ice line service are provided to assign different COS according to each authorization code for determining whether to allow the office line service, thereby easily assigning authority to use the PBX to users. A PBX(Private Branch eXchange) having a COS(Class Of Service) for each authorization code comprises the followings: a main controller which controls switching operations of an office line interface and an extension interface in order to provide a service by the PBX; a DISA(Direct Inward System Access) database which stores extension service classes, authorization codes, and information about COS for each authorization code; and a DISA controller which controls the use of an office line by using the authorization code and the COS of the DISA database when the use of the office line is requested from extension and external telephones.
Patent KR-20060045970-A (KR)
Inventor: NAGASAKI YOSHIHISA
IPC: H01J11/42
Filed: 2005-05-09
Abstract: 본 발명의 형광체에 따르면, 베이스 물질로 아연 실리케이트와 활성제로 망간을 함유하는 형광체 주요부를 가지며, 티타늄(Ti), 지르코늄(Zr) 및 하프늄(Hf) 중의 적어도 하나의 원소를 가지거나, 몰리브덴(Mo)과 텅스텐(W) 중의 적어도 하나의 원소를 형광체 주요부에 첨가한 것에 특징이 있다. 이러한 조성을 구비한 형광체는 각 형광체 입자의 표면영역(즉, 그 주변을 포함하는 표면)의 조성을 정교하게 제어할 수 있고, 결정도를 개선할 수 있어 고휘도율과 시간경과에 따른 열화의 감소를 가져온다. 
       
     아연, 망간, 부활, 규산염, 티타늄, 지르코늄, 하프늄, 텅스텐, 몰리브덴, 표면영역
Patent KR-20060118784-A (KR)
Title: Method for forming metal lines of semiconductor devices
Inventor: KIM JAE BUM
IPC: H01L21/28
Filed: 2005-05-17
Abstract: A method for forming a metal line of a semiconductor device are provided to enhance semiconductor device manufacturing yield by preventing an operation property of a semiconductor device from being degraded. A device isolation film(43), which defines an active region, is formed on a semiconductor substrate(41). A gate electrode(45) is formed on the semiconductor substrate and a planarized lower insulation layer(47) is formed on the gate electrode. A landing plug(48) is formed on the active region between the gate electrodes. A first interlayer dielectric(50) is formed on an overall surface. A first and a second bit line(49,51) are formed on a cell and peripheral circuit portions via the first interlayer dielectric. The first and the second bit line are connected to the landing plug.
Patent KR-20060046183-A (KR)
Title: Orifice device having multiple channels with varying flow rates for drug delivery
Inventor: RUSSELL SCOTT M
IPC: A61K9/22
Filed: 2005-05-26
Abstract: An orifice device for delivering one or more drugs includes an inner member (210) having a proximal end and a distal end; and a winding helically wound around the inner member. The winding includes a plurality of distinct wires (222,222',222") helically wound in parallel around the inner member. The winding and the inner member define at least three separate channels (230a,230b,230c,240a,240b,240c) for carrying one or more drugs therethrough. An inlet is at the proximal end of the winding and an outlet is at the distal end of the winding for the plurality of distinct wires. In some embodiments, at least two of the plurality of distinct wires have a different dimension. An outer member (226) is used over the winding. Also, at least two of the at least three separate channels have a different fluid flow rate. And, in some embodiments, at least two of the at least three separate channels carry a different drug. <IMAGE>
Patent KR-20060124017-A (KR)
Title: Contacting structure for turn signal switch
Inventor: KWEON HYUK JIN
IPC: H01H21/54
Filed: 2005-05-30
Abstract: A contacting structure for a signal switch is provided to enhance a contact performance by contacting a movable terminal with a fixed terminal formed on a PCB(Printed Circuit Board) by a sliding contact type. In a contacting structure for a signal switch, a PCB is placed between a switch cover and a lower cover, wherein an indicator lamp fixed terminal for a signal switch alteration is printed on an upper side of the PCB. An indicator lamp movable body assembly(80) connected to an end of a switch lever(50) moves at an upper part of the indicator lamp fixed terminal(71) according to the movement of the switch lever(50) in the front and rear directions for the signal switch alteration inside the switch cover(60). An indicator lamp movable terminal(85) arranged to incline to a direction of the indicator lamp fixed terminal(71) of the PCB(70) while being fixed to the indicator lamp movable body assembly(80) alters an indicator lamp switch while contacting with the indicator lamp fixed terminal(71) by a sliding contact type.
Patent KR-20060124229-A (KR)
Title: Washing machine and method thereof
Inventor: CHO HUNG MYONG
IPC: D06F33/02
Filed: 2005-05-31
Abstract: A washing apparatus and a control method thereof are provided to improve the cloth-wetting performance of the laundry and speed up the washing stroke by injecting the steam and the washing water toward the drum. A control method of a washing apparatus comprises a step(S110) of checking whether the present stroke needs the steam or not; a step(S120) of checking the level of the water for generating the steam if the present stroke needs the steam; a step(S130) of additionally supplying the water for the steam until the water level for the steam reaches a predetermined water level by controlling the water supply valve if the checked water level is lower than the predetermined water level; a step(S150) of controlling the heating of the heat-emitting heater and generating the steam if the checked water level is over the water supply level; and a step of supplying the generated steam in the drum through the lower space of the out tub. The predetermined washing water is supplied in the out tub during the supply of the steam, and the washing water is circulated and injected in the drum.
Patent KR-20050079940-A (KR)
Inventor: PARK JONG WON
IPC: F16B35/00
Filed: 2005-06-10
Abstract: 이 발명은 건축물, 교량 및 기계장치의 부재 등을 서로 결합하기 위해 사용되는 중공형 이중 체결볼트로서, 일단에 볼트헤드가 일체로 형성되며 중심축을 따라 원통형 중공을 갖는 스템과, 원통형 중공에 의해 형성된 볼트헤드 및 스템의 내측면을 따라 형성된 제1 나사산, 및 스템의 외측면을 따라 형성된 제2 나사산을 포함하며, 제1, 제2 나사산은 서로 다른 피치간격으로 동일방향으로 형성된다.  이 발명은 고장력 볼트에 체결되는 내측 나사산과 고정너트에 체결되는 외측 나사산을 각각 갖되 서로 다른 피치간격을 갖도록 구성함으로써 큰 치수의 볼트를 적은 힘으로 체결할 수 있다.  따라서 작업자의 수작업을 통해서도 그 치수가 큰 볼트(M20~M30)를 이용하여 건축물, 교량 및 각종 기계장치의 부재들을 서로 결합할 수 있다.  또한, 이 발명은 고정너트의 미세 조임이 가능하기 때문에 너트회전법을 적용하여 고정너트의 체계적인 조임 관리가 가능하다.
Patent KR-20060130389-A (KR)
Title: Result sepectation game service method utilzing communication network
Inventor: KIM MYUNG WAN
IPC: G06Q50/34
Filed: 2005-06-14
Abstract: A method for a result guessing game service using the network is provided to enable customers to utilize amount of money by paying the fixed amount in advance if the amount to be paid to the customer is fixed without respect to a result before the result of the event is fixed. The connected customers are authenticated(S201). The customers request a bill for receiving the specific amount of money in case that the result guessed by the authenticated customer hits the result of the specific event(S202). If many customer requests purchase of the bill, trade of the bill is formed between the customers in case that a guess and a purchase condition of the customers are different(S203). If the amount to be paid without the respect to the result of the event is fixed by the trade of the bill, the fixed amount is paid to the customers in advance(S204). The result of the event is informed to the customers(S205). The amount subtracting the paid amount from the specific amount of the bill is paid to the customer hitting the result(S206).
Patent KR-20050074405-A (KR)
Inventor: YUN YOUNG WON
IPC: G06Q50/08
Filed: 2005-06-25
Abstract: 본 발명은 알에프아이디 테그를 이용한 도면파일 관리시스템 및 그 방법에 관한 것으로, 더욱 상세하게는 기계장치나 구조물을 구성하는 단위부품에 그 도면정보가 저장된 RFID(Radio Frequency IDentification) 테그를 부착하여 도면정보에 맞게 설비하고, 상기 RFID 테그에 저장된 도면정보를 데이터베이스로 통합관리하여 단위부품에 부착된 RFID 테그에 저장된 도면정보와 데이터베이스에 저장된 도면파일의 정보를 동기화할 수 있게 됨으로써, 상기 데이터베이스에 저장된 도면파일을 아주 편리하고 효율적으로 통합관리할 수 있는 알에프아이디 테그를 이용한 도면파일 관리시스템 및 그 방법에 관한 것이다.  
     본 발명에 따르면, 기계장치 및 구조물을 구성하는 단위부품의 도면정보가 저장되는 메모리공간과, 특정대역의 RF신호로 통신하기 위한 안테나가 구비된 RFID 테그와; 상기 RFID 테그의 안테나를 통해 특정대역의 RF신호로 통신하여 RFID 테그의 메모리공간에 도면정보를 저장하거나 상기 메모리공간에 저장된 도면정보를 읽어들이는 RFID 스케너와; 상기 RFID 스케너와 연결되어 상기 RFID 스케너를 통해 저장되고 읽어들여진 도면정보를 통해 단위부품과 상기 단위부품으로 조합된 기계장치나 구조물의 도면파일을 디스플레이하고 수정하는 도면프로그램이 설치된 컴퓨터 또는 휴대용단말기와; 상기 컴퓨터 또는 휴대용단말기와 통신하여 RFID 스케너에 의해 저장되고 읽어들여진 도면정보를 데이터베이스로 통합관리하는 메인서버로 구성된 알에프아이디 테그를 이용한 도면파일 관리시스템 및 그 방법이 제공된다.
Patent KR-20070002960-A (KR)
Title: System for providing unification digital multimedia broadcasting and method therefor
Inventor: PARK JI HO
IPC: H04N5/46
Filed: 2005-06-30
Abstract: A terrestrial and satellite integrated DMB(Digital Multimedia Broadcasting) system is provided to integrate a terrestrial broadcasting tuner and a satellite broadcasting tuner in one DMB STB(Set-Top Box), selectively switch the two tuners by an I2C(Inter-integrated Circuit), and integrate and view terrestrial and satellite broadcasting. A terrestrial broadcasting tuner(102/1) tunes a terrestrial DMB signal provided through a VHF antenna as a corresponding frequency, and outputs the tuned terrestrial DMB signal. A satellite broadcasting tuner(102/2) tunes a satellite DMB signal provided through a UHF antenna as a corresponding frequency, and outputs the tuned satellite DMB signal. An I2C controller(104) detects the broadcasting signals of the terrestrial broadcasting tuner(102/1) and the satellite broadcasting tuner(102/2), and controls the selective switching of the terrestrial broadcasting tuner(102/1) or the satellite broadcasting tuner(102/2). An encoding process unit(106) encodes the terrestrial DMB signal provided from the terrestrial broadcasting tuner(102/1) and the satellite DMB signal provided from the satellite broadcasting tuner(102/2). A decoding process unit(108) decodes the terrestrial DMB signal and the satellite DMB signal encoded in the encoding process unit(106), and outputs the last broadcasting signal.
Patent KR-20070006213-A (KR)
Title: Apparatus and method for manufacturing semiconductor devices
Inventor: HYUN JONG SUN
IPC: H01L21/02
Filed: 2005-07-07
Abstract: An apparatus and a method for manufacturing a semiconductor device are provided to prevent an inflow of air within a frame into a container when a wafer is conveyed between the container and process equipment by using a load port, the frame, and a gas supplying member. A container(20) accommodating substrates is placed on a load port(100). A frame(200) is arranged between the load port and process equipment(10). A conveying robot(280) is installed on the frame to convey the substrate between the container placed on the load port and the process equipment. A gas supplying member supplies nitrogen gas or inert gas into the inside of the container through an inlet hole formed on a wall of the container so that the gas flows from the inside of the container placed on the load port toward the frame.
Patent KR-20070006368-A (KR)
Title: Ars service method and system
Inventor: KANG BONG JU
IPC: H04M3/50
Filed: 2005-07-08
Abstract: An ARS(Automatic Response System) service method and a system thereof are provided to offer a high-quality ARS service to users by utilizing multimedia audio codec technology. If a call request from a wire terminal to a multimedia codec ARS server is received, a wire exchange searches a database for the codec information of the wire terminal(S201,S202). Obtaining the codec information of the wire terminal, the wire exchange transmits an IAM message containing the codec information to the multimedia codec ARS server(S203,S204). The multimedia codec ARS server selects at least one usable codec, based on the codec information, and generates a codec setup request message corresponding to the selected codec. Then, in response to the IAM message, the multimedia codec ARS server transmits an ACM message and an ANM message containing the codec setup request message to the wire exchange and establishes a call(S205,S206). The multimedia codec ARS server provides the codec information based on the codec setup request message to the wire terminal and requests the wire terminal to set up a codec to be used for communication(S207).
Patent KR-20070008739-A (KR)
Title: Voltage controlled oscillator having function of auto amplitude control
Inventor: LEE SOO WOONG
IPC: H03L7/099
Filed: 2005-07-12
Abstract: A voltage controlled oscillator having an automatic amplitude control function is provided to reduce a phase noise and a voltage consumption by not using a current source' '. In a voltage controlled oscillator having a function of an automatic amplitude control, a voltage controlled oscillator(10) and an auto amplitude controller(20) are installed. In the voltage controlled oscillator(10), a resonance circuit(11) generates a resonance signal. A differential amplifying circuit generates and outputs two oscillation signals. An active load controls a gain of the oscillation signal. In the auto amplitude controller(20), a peak detector(21) detects and rectifies each peak. A low pass filter(22) transforms a rectified signal into a direct voltage and outputs the direct voltage. And, a comparator(24) outputs a control voltage to control a resistance of the active load.
Patent KR-20070008226-A (KR)
Title: Ink-jet image forming apparatus and method for printing high resolution
Inventor: JUNG MYUNG SONG
IPC: B41J2/07
Filed: 2005-07-13
Abstract: An ink-jet image forming apparatus and a method for printing at high resolution is provided to efficiently compensate resolution deterioration caused by a defected nozzle. In an ink-jet image forming apparatus, a print medium transferring part transfers a print medium(P) to a first direction. A print head has a nozzle part(112) and is installed to a second direction to form an image by injecting ink to the print medium, wherein a length of the nozzle part corresponds to a width of the print medium. A carriage(106) is movable to the second direction and has the print head. A carriage moving part(160) reciprocates the carriage to the second direction. A sensor(132) senses a generation of bad nozzles at the nozzle part. And, a control part(130) generates a control signal to synchronize a transfer operation of the print medium transferring part, an ejection operation of the print head, and an operation of the carriage moving part.
Patent KR-20070009150-A (KR)
Title: Chip package having heat spreading property
Inventor: LEE JAE CHAN
IPC: H01L23/36
Filed: 2005-07-15
Abstract: A chip package with a heat radiating characteristic is provided to easily radiate the heat generated from a chip attached to the upper surface of an internal heat radiating plate by including an internal heat radiating plate with a broad area while using a substrate of a multilayered structure. A first substrate structure(110a) is made of at least one layer, including a plurality of through holes penetrating the upper surface of an uppermost layer and the lower surface of a lowermost layer. An external heat-radiating plate(140) is formed on the lower surface of the lowermost layer of the first substrate structure. The through hole is filled with a thermal conductive metal material(130). An internal heat-radiating plate is formed on the upper surface of the uppermost layer of the first substrate structure. A second substrate structure(110b) is formed on the internal heat-radiating plate, made of at least one layer and including an open region penetrating the upper surface of an uppermost layer and the lower surface of the lowermost layer. A chip is attached to the upper surface of the internal heat-radiating plate exposed by the open region. The multilayered substrate can be a PCB. The area of the open region is greater than that of the chip.
Patent KR-20070010347-A (KR)
Title: Packet based re-trnasporting system for dmb service and its apparatus
Inventor: YOON JUN
IPC: H04N7/24
Filed: 2005-07-18
Abstract: A packet-based system and method for re-transmitting DMB(Digital Multimedia Broadcasting) data are provided to convert DMB data into packet data and transmit the packet data to a device which does not receive DMB data. A packet-based re-transmitting system includes a DMB receiver(401), a DMB transmission mode cancellation unit(403), a packet data converter(405), and a packet-based transmitter(407). The DMB receiver receives DMB data transmitted through a broadcasting transfer medium. The DMB transmission mode cancellation unit cancels a DMB transmission mode of the received DMB data and outputs MPEG-2 transport stream. The packet data converter converts the MPEG-2 transport stream into packet data in a predetermined form. The packet-based transmitter transmits the packet data received from the packet data converter.
Patent KR-20070011799-A (KR)
Title: Fusing unit and fusing apparatus using the same
Inventor: CHOI MIN GOO
IPC: G03G15/20
Filed: 2005-07-21
Abstract: A fusing unit and a fusing apparatus using the same are provided to block current during overheating by using a blocking unit such as a bimetal having a rapid response to heat, thereby preventing a fire or the like caused by overheating. A fusing unit comprises the followings: a tubular fusing roller which has a heat generating unit and has electrode units in its both ends; a power supply unit(170) which is in contact with the electrode unit and supplies current; and a blocking unit(160) which is installed between the electrode unit and the power supply unit, and blocks current supply by separating the power supply unit from the electrode unit when a temperature of the heat generating unit rapidly increases. The power supply unit has a brush(171) contacting with the electrode unit, and has an elastic unit(173) for giving an elastic force to the brush so as to contact with the electrode unit.
Patent KR-20070013099-A (KR)
Title: Methods of cleaning process chamber of semiconductor deposition equipment optimizing performance time of nitrogen purge
Inventor: JO JUNG HO
IPC: H01L21/205
Filed: 2005-07-25
Abstract: A method for optimizing a time interval of a nitrogen purging process is provided to reduce a period of a process for forming a semiconductor device is provided to clean a process chamber of semiconductor deposition equipment by optimizing a time interval of a nitrogen purging process during cleaning steps so that deposition byproducts in the process chamber can be removed. A high-pressure cleaning process(S10) and a low-pressure cleaning process(S20) are sequentially performed in a process chamber. A gas exhaust process(S30), an oxygen process(S42,28) and a nitrogen purging process(S44,S46) are sequentially performed in the process chamber of semiconductor deposition equipment. The nitrogen purging process is performed for a longer time interval than that of the oxygen process and for at least the same time interval as that of the gas exhaust process.