baber/WOPTO huggingface dataset:
Patent IT-1270892-B (IT)
Title: Non-electrical device for verifying that a predetermined temperature is maintained in refrigerating equipment
Inventor: BANZI MARIO
IPC: A23B/
Filed: 1993-10-07
Granted: 1997-05-13
Abstract: Non-electrical device for verifying that a predetermined temperature is maintained in refrigerating equipment. The device comprises a container with a substantially tubular form, with an opaque part and a transparent portion, filled with a transparent fluid which solidifies at said temperature, in which at least one body is mobile, floating in the fluid and having a different colour from the same. The device is prepared for use by freezing the fluid, while the device is in such a position as to maintain the floating body in correspondence with the opaque portion. Before use, the device with frozen fluid must be turned upside down. <IMAGE>
Patent IT-1253451-B (IT)
Title: Die for ceramic tiles provided with grooves on the back for mechanical anchoring in back draft and the associated tile
IPC: B28B/
Filed: 1991-06-25
Granted: 1995-08-08
Abstract: The die is suitable for the manufacture of tiles 26 for wall covering and pavements provided on the back with one or more grooves 28, 31 with a straight section provided with surfaces in back draft with respect to the direction perpendicular to the laying surface with values of the order of the thickness of the tile in order to avoid problems particularly in buildings with metal frames; the dimensions of this section must have controllable tolerances for the purposes of coupling for mechanical anchoring in back draft to the laying surface; from the base surface 10, moving vertically from the mould 3, one or two longitudinal inserts 21 fitted with surfaces 22 in back draft project upwards to form the said channels: the said inserts being made movable downwards during the course of pressing with respect to the said base plane for about half the stroke and upwards for a small excursion by means of the flexible elements 24 which suffices to swing aside the back of the tile from the upper surface of the mould for the longitudinal direction of travel of the tile thus formed; use of the die is in presses for ceramic.
Patent IT-1275371-B (IT)
Title: Riordinatore di barattoli atto a trattare contemporaneamente due diversi formati
Inventor: MANNARA LUCIANO
IPC: B65F/
Filed: 1994-12-16
Granted: 1997-08-05
Abstract: RIORDINATORE PER BARATTOLI DI DUE DIVERSI FORMATI COSTITUITO DA ELEMENTI FISSI O TRASPORTATORI, SOVRAPPOSTI, CIASCUNO FORMATO DA ELEMENTI VIBRANTI O TRASCINANTI DISTANZIATI IN MODO CHE QUELLI SUPERIORI TRATTENGONO I BARATTOLI DI FORMATO MAGGIORE E LASCIANO PASSARE QUELLI DI FORMATO MINORE CHE CADONO SULLO SCIVOLO O NASTRO INFERIORE. I BARATTOLI SELEZIONATI VENGONO POI TRASFERITI SUI RISPETTIVI NASTRI TRASPORTATORI CHE LI AVVIANO ALL'IMBALLAGGIO.
Patent IT-1256833-B (IT)
Title: Inserto per dispositivo per la fabbricazione di corpi a cuscinetto di materiale fibroso.
IPC: A61F13/49
Filed: 1992-05-19
Granted: 1995-12-21
Abstract: L'invenzione riguarda un inserto per il tamburo di un dispositivo destinato alla fabbricazione di corpi a cuscinetto di materiale fibroso. Siffatti inserti sono utilizzati per la formazione del tamburo mediante applicazione ad un disco del tamburo medesimo, e sono configurati in maniera corrispondente alla forma ed alla grandezza dei diversi cuscinetti da fabbricare. Viene previsto che l'inserto di tamburo sia costituito da un corpo di base, che e sua volta è formato da una lamiera di supporto avente molteplici perforazioni, e da una pluralità di lamelle di lamiera, disposte nel verso di rotazione del tamburo e ad angolo retto rispetto e questo verso, che sul lato esterno dell'inserto di tamburo è provvisto un inserto sagomato, il quale è costituito da una griglia e da un telaio per l'alloggiamento di quest'ultima, e che nell'inserto di tamburo sono provviste delle costole sagomate, le quali sono situate verticalmente sopra le lamelle di lamiera estendentisi in senso trasversale al verso di rotazione del tamburo, e la cui forma è adatta alla forma della griglia, e quindi alla forma del cuscinetto da fabbricare.
Patent PT-103882-B (PT)
Title: Dispositivo de segurança para mecanismos eléctricos embutidos
Inventor: SOLER CRISTINA EGEA
IPC: H01R24/00
Filed: 2007-11-13
Abstract: O PRESENTE INVENTO DIZ RESPEITO A UM DISPOSITIVO DE SEGURANÇA À PROVA DE VÂNDALOS PARA MECANISMOS ELÉCTRICOS EMBUTIDOS, TAIS COMO INTERRUPTORES, TOMADAS DE CORRENTE E SIMILARES, EXIBINDO UMA PLACA EXTERNA (4) QUE COBRE A TOTALIDADE DO CONJUNTO EMBUTIDO, E EM CUJA ABERTURA CENTRAL OU JANELA (5) ESTÁ LOCALIZADO O ELEMENTO PARA OPERAÇÃO OU PARA LIGAÇÃO DO MECANISMO ELÉCTRICO (8), CARACTERIZADO PELO FACTO DE QUE ELE EXIBE UMA ARMAÇÃO DE SEGURANÇA (1) FIXADA NUMA ESTRUTURA METÁLICA (2) A QUAL RETÉM O CONJUNTO DO MECANISMO NO INTERIOR DA LOCAÇÃO PARA A SUA INSTALAÇÃO EMBUTIDA, E CUJA ARMAÇÃO DE SEGURANÇA (1) APRESENTA A PLACA EXTERNA (4) CONVENIENTEMENTE FIXADA, A REFERIDA ARMAÇÃO (1) TAMBÉM EXIBINDO UM PERNO DE IMOBILIZAÇÃO (14) LOCALIZADO NUM ESPESSAMENTO PRISMÁTICO (13) DISPOSTO NUM DOS SEUS LADOS; A CABEÇA (16) DO REFERIDO PERNO DE IMOBILIZAÇÃO (14) ESTANDO LOCALIZADA OPOSTA A UM ORIFÍCIO CIRCULAR (17) EXIBIDO PELA PLACA EXTERNA (4) NUM DOS SEUS LADOS, DE TAL MANEIRA QUE O PERNO DE IMOBILIZAÇÃO (14) ANTERIORMENTE MENCIONADO PODE SER OPERADO A PARTIR DO EXTERIOR, PROVOCANDO O MOVIMENTO DO MESMO DE TAL MANEIRA QUE A SUA CABEÇA (16), NO SEU MOVIMENTO NO SENTIDO DE DENTRO PARA FORA, FIQUE LOCALIZADA NO INTERIOR DO REFERIDO ORIFÍCIO (17), IMOBILIZANDO-A E IMPEDINDO QUALQUER MOVIMENTO DA MESMA E, EM CONSEQUÊNCIA, A SUA REMOÇÃO OU DESTAQUE DA ARMAÇÃO DE SEGURANÇA (1).
Patent PT-104590-B (PT)
Title: Colector solar para aquecimento de flu?do t?rmico com duplo circuito integrado
Inventor: EUSEBIO ZEFERINO ENCARNA O DA CONCEI O
IPC: F24S23/71
Filed: 2009-05-25
Abstract: A PRESENTE INVEN??O TRATA DE UM COLECTOR SOLAR, CONSTRU?DO ATRAV?S DE DOIS CIRCUITOS INTEGRADOS, UTILIZADO NO AQUECIMENTO DE FLUIDO T?RMICO. O COLECTOR ? CONSTITU?DO POR CONJUNTOS DE DOIS PERFIS PARAB?LICOS ESPELHADOS E DE DOIS CIRCUITOS INTEGRADOS. O CIRCUITO PRINCIPAL (1) SUJEITO ? RADIA??O SOLAR DIRECTA E ? RADIA??O SOLAR REFLECTIDA NOS PERFIS PARAB?LICOS, ONDE ? EFECTUADO O AQUECIMENTO PRINCIPAL DO FLUIDO, ? LOCALIZADO NO FOCO DOS DOIS PERFIS PARAB?LICOS ESPELHADOS, (3) E (4). NO ESPA?O ENTRE ESTE CIRCUITO PRINCIPAL (1) E A JUN??O DOS DOIS PERFIS PARAB?LICOS, (3) E (4), PARA CAPTAR OS RAIOS SOLARES REFLECTIVOS NOS PERFIS PARAB?LICOS ESPELHADOS QUE N?O INCIDEM NO CIRCUITO PRINCIPAL, ? COLOCADO UM SEGUNDO CIRCUITO UTILIZADO NO PR?-AQUECIMENTO DO FLUIDO T?RMICO. O FLUIDO T?RMICO, QUE PASSA NOS DOIS CIRCUITOS INTEGRADOS, ENTRA EM PRIMEIRO LUGAR NO CIRCUITO DE PR?-AQUECIMENTO (2) E EM SEGUNDO LUGAR NO CIRCUITO DE AQUECIMENTO PRINCIPAL (1).
Patent RO-94034-B (RO)
Inventor: EMANOIL STEFANOV GAYDAROV
IPC: B60L5/36
Filed: 1986-01-15
Abstract: Sistemul colector de curent pentru troleibuz contine o prajina de troleu ce este legata la capatul exterior, în raport cu directia de conducere la un transportor cu ajutorul unui corp de compresiune si a unui bloc glisant colector de curent montat rigid la transportor în timp ce un bloc glisant colector de curent interior este montat mobil pe directie longitudinala în raport cu transportorul, fiecare bloc glisant colector de curent are montat, cu ajutorul unui deflector diagonal intern, un pod purtator de curent, corpul de compresiune fiind fixat la bara de troleu paralel cu linia de alimentare si la acesta este montat un dispozitiv de balansare cu un modul de fixare, care este conectat la capatul exterior al transportorului iar la partea frontala a fiecarui pod purtator de curent este montat un mecanism de alungire, intrarea de control a caruia este legata la iesirea unui bloc de control a carui prima intrare de informare este legata printr-un traductor de directie la linia de alimentare, intrarea de informare secunda fiind legata la iesirea unui detector de radiatie care e dispus frontal pe troleibuz si imediat lînga detectorul de radiatie este dispus un emitator de radiatie.
Patent TW-209900-B (TW)
Title: Chinese voice synthesis system
Inventor: HSIEH YU-WEI
IPC: G10L13/02
Filed: 1992-12-30
Granted: 1993-07-21
Abstract: One real time and tunable Chinese voice synthesis system consists of hardware circuit, control firmware and voice synthesis communication protocol. The control firmware consists of voice synthesizer, voice analyzer, hardware control subroutine and communication interface subroutine. Its main feature is that the system analyze and memorize the original input voice of user in voice data area. By inputting the voice synthesis communication protocol instruction the control firmware get the original voice data and synthesize it with voice synthesizer. In the process of synthesis the length, tone and volume of voice can be controlled to be as natural as possible.
Patent TW-213890-B (TW)
IPC: H02P5/50
Filed: 1993-03-12
Granted: 1993-10-01
Abstract: In a method for the precision crosswinding of ribbon-like or thread-like winding material (72) supplied to a winding appliance, the integrals of the angular speed (pulses) of the bobbin (66) are detected by a first sensor (68) and the integrals of the angular speed of the drive (73) of the traversing thread guide (71) are detected by a second sensor (74), the sums of the integrals of the angular speed are compared with one another and the drive (73) of the traversing thread guide (71) is regulated in dependence on this. The pulses of the first sensor (68) are added in a first associated counter (69) and the pulses of the second sensor (74) are added in a second associated counter (75), in each case during the entire winding trip. The ratio of the sums thus obtained is compared continuously with one or more successively preselectable winding ratios, and the drive (73) of the traversing thread guide (71) is regulated in such a way that the ratio of the sums of the two associated counters (69, 75) corresponds to the predetermined winding ratio or winding ratios during the entire winding trip. <IMAGE>
Patent TW-226004-B (TW)
Title: A cutting device for cutting prints in the printing machine
Inventor: DOBRING WILFRIED
IPC: B26D5/16
Filed: 1993-05-07
Granted: 1994-07-01
Abstract: A cutting device for cutting prints in the printing machine, particularly ticket printing machine, which comprises a cutter, which is movable along a guide toward a corresponding stationary cutter; in order to let the prints go through, the cutter has an opening on a open position and cuts at least part of the prints when the cutter is at close position; through an adjustment device, the cutter is movable between the open position and the close position; the device is characterized in: the cutter (22) has at least two guides (38); the two units face each other at a distance and are installed on the other side of the blade(42) of the back cutter (22); the cutter(22) is adjusted into the guide(38); the adjustment device (30) has a rotation frame (52); the rotation frame connects with a rotation shaft (54) on the rotation seat of a cutting device frame; a rotation device transfers the rotation frame (52) from the open position to the close position and from the close position to the open position so as to move the cutter (22).
Patent TW-356470-B (TW)
Title: A thiazole derivative
Inventor: CHIHIRO MASATOSHI
IPC: C07D277/26
Filed: 1993-05-27
Granted: 1999-04-21
Abstract: A thiazole derivative having formula (I) or salts thereof, wherein R1 represents phenyl having 1~3 C1-C6 alkoxy as substitution group on the benzene ring; R2 represents pyridylcarbonyl having C1-C6 alkoxycarbonyl or carboxyl as substitution group; or group: wherein R3 represents carboxyl, C1-C6 alkoxycarbonyl, hydroxy-substituted C1-C6 alkyl, C1-C6 alkoxy, tri-C1-C6 substituted siloxanyl, hydroxy or hydrogen; R4 represents hydrogen, C2-C6 alkenyl or C1-C6 alkyl; R5 represents C1-C6 alkyl-substituted amino, C1-C6 alkoxy-substituted C1-C6 alkyl, C1-C6 substituted amino C1-C6 alkoxy, C1-C6 alkoxy having trihydropiperanyloxy or hydroxy, benzene sulfonyloxy-substituted C1-C6 alkoxy substitutable by C1-C6 alkyl on the benzene ring, hydroxysulfonyl, aminoC2-C6 alkylacyloxy-substituted C1-C6 alkyl substitutable by C1-C6 alkyl, C2-C6 alkynyloxy (but when R3 is hydrogen, hydroxyl or C1-6 alkoxy and R4 is hydrogen or C1-6 alkyl, R3 and R4 are both hyrogen, R5 cannot be aminoC1-6 alkoxy having C1-6 alkyl substitution group), -(CL)l-NH6 (l is 0 or 1, R6 is hydroxy, benzeneC1-C6 alkyl, hydroxy-substituted C1-C6 alkyl, amino, aminosulfurcaronyl having phenylformyl, methylguanyl, a group as follows: (R7 represents C1-C6 alkylthio or morpholine-C1-C6 alkylamino) or benzene C1-C6 alkoxycarbonyl-substituted C1-C6 alkyl), aminothiocarbonyl, a group as follows: (R8 represents hydroxyimino, C1-C6 alkylthio, azine, C1-C6 alkoxy, hexahydropyrazine, morpholine or morpholineC1-C6 alkylamino), 1,2,3,4-tetrazo, or 1,3,4-oxo-hetero-diazo) (but when R3 and R4 are both hydrogen and R5 is -NHR6, R5 is not aminothiocarbonyl); in addition, the pyridyl ring may have 1 ~ 3 following groups as substitution group: oxo-hetero-propyl ring, C1-C6 alkylacryloxy C1-C6 alkyl, C1-C6 having C1-C6 alkoxycarbonyl or cyano as substitution group, halogen atom, C1-C6 alkoxy, and -(A)l-NR9R10 (A represents C1-C6 alkylene or -CO with hydroxy as substitution group; l is defined the same as above; when l is 1 and A is -CO, R9 is hydrogen or C1-C6 alkyl, R10 is hydroxy, pyridylalkylC1-C6 alkyl, or amino-substituted C1-C6 alkyl substitutable by C1-C6 alkyl or phenylC1-C6 alkoxycarbonyl, when l is 1, A is hydroxy-substituted C1-C6 alkylene, or when l is 0, R9 and R10 can be the same or different representing hydrogen atom, C1-C6 alkyl or amino-substituted C1-C6 alkyl substitutable by C1-C6 alkyl or phenylC1-C6 alkoxycarbonyl, R9 and R10 with the linking nitrogen can also combine together directly or indirectly through nitrogen atom or oxygen atom to form hetero ring of group selected from pyrodinyl, hexahydropyrrozine, morpholine or 1,2,4-triazo, substitutable by C1-C6 alkyl or carboxyl], methyazine, aminothiocarbonyl or group having the following formula (wherein R8a is hydroxyamino or C1-C6 alkylthio).
Patent TW-239065-B (TW)
IPC: A01P13/00
Filed: 1993-09-14
Granted: 1995-01-21
Abstract: 4-heteroaroylisoxazole derivatives of formula I: <CHEM>  wherein   Ar represents an optionally substituted group Het, wherein Het represents a first heterocyclic ring containing from one to four heteroatoms in the ring selected from oxygen, nitrogen and sulphur, which is optionally fused with a benzene, or carbocyclic or second heterocyclic ring (which is optionally saturated or partially saturated) to form a bicyclic system, wherein the first heterocyclic ring of the group Het is attached to the carbonyl group in the 4-position of the isoxazole ring provided that Het is not pyridinyl or thienyl;   R represents hydrogen or -CO2R<3>; R' represents alkyl or haloalkyl or a cycloalkyl group optionally substituted by one or more groups R<4>;   R<3> and R<4> independently represent alkyl or haloalkyl; agriculturally acceptable salts thereof and their use in weed control is described.
Patent TW-228577-B (TW)
Title: Reflective screen with wide view angle
Inventor: YOU SHY-LONG
IPC: G03B21/56
Filed: 1993-10-04
Granted: 1994-08-21
Abstract: A reflective screen with the feature of raising the gain and still keeping wide view angle is mainly made of metal plate. Through mechanic machiningthe surface of the screen has stripes of high density by which the surface of the screen is formed into irregularly wavy one so as to make the screen have selective function to the direction of projected light from the projector.the screen is made with curved cylindrical shape in the vertical direction to raise the gain, distribute the brightness more evenly and effectively reject the interference from the ambient light.
Patent TW-360872-B (TW)
Title: Non-volatile semiconductor memory device
Inventor: MIYAMOTO JUNICHI
IPC: G11C16/06
Filed: 1994-03-30
Granted: 1999-06-11
Abstract: This invention uses a forced inversion means in a flip-flop circuit without being influenced by the interference among bit lines, without increasing the power consumption, and being able to verify every bit line. The invented non-volatile semiconductor memory device is characterized by a flip-flop circuit 1 for holding write data in one of first and second states, comprised of a bit line BL therein, a transistor Q3 charging the bit line, and memory cell used to memory data with valve value extracted from the first and second range, and a forced inversion means Q7, Q8 that proceeds with verification following the write action and corresponds to the memory data of memory cell 2, connects a charge potential with one end of the flip-flop circuit and forcibly set the retained data.
Patent TW-404844-B (TW)
Title: Needleless syringe
Inventor: BELLHOUSE BRIAN JOHN
IPC: A61M5/307
Filed: 1994-04-07
Granted: 2000-09-11
Abstract: A needleless syringe having a membrane which is ruptured by gas pressure to generate a supersonic gas flow in which particles containing a therapeutic agent are injected. A needleless syringe comprising an elongate tubular nozzle, a rupturable membrane including at least two rupturable diaphragms and initially closing the passage through the nozzle adjacent to the upstream end of the nozzle, particles of a therapeutic agent located adjacent to the membrane, and energising means for applying to the upstream side of the membrane a gaseous pressure sufficient to burst the membrane and produce through the nozzle a supersonic gas flow in which the particles are entrained, wherein the particles are of a powdered therapeutic agent located between two rupturable diaphragms extending across the interior of the nozzle.
Patent TW-393605-B (TW)
Title: Random access memory (RAM) based configurable arrays
Inventor: FREEMAN RICHARD D
IPC: G11C7/10
Filed: 1994-05-24
Granted: 2000-06-11
Abstract: A field programmable device includes two separate and electrically isolated arrays of rows and columns of conductors sharing the same area of an integrated circuit substrate, one array interconnecting memory cells to form a random access memory (RAM). The other array forms a full or partial cross-point switching network that is controlled by information stored in memory cells, and/or connects to an operating electronic circuit that is configurable and operable in accordance with information stored in memory cells. In addition, the memory array is easily used to access desired nodes of the circuit array in order to be able to easily observe internal signals during operation. A preferred memory structure is a dynamic random access memory (DRAM) because of a high density and low cost of existing DRAM fabrication techniques, even though periodic reading and refreshing of the states of the memory cells is required. Several circuits and techniques are used which allow continuous assertion of the memory cell states without interruption during the their refreshing cycles.
Patent TW-259746-B (TW)
Title: Method and device for making fiber reinforced plastic curved tube and racket
Inventor: SEKITO TOSHIHIDE
IPC: B29B15/12
Filed: 1994-08-30
Granted: 1995-10-11
Abstract: Inner fiber reinforcd layers are provided with at its outer side with a non-woven fabric having less than 100g/cm2 METSUKE and containing monofilaments of less than 20(muon)m in diameter. Such combination provides good flow and degassing characteristics during processing and can be formed into curved tubes which have less surface defects and excellent strength and which is particularly applicable to rackets.
Patent TW-421599-B (TW)
Title: Multiple unit pharmaceutical preparation
Inventor: BERGSTRAND PONTUS JOHN ARVID
IPC: A61K31/41
Filed: 1995-06-15
Granted: 2001-02-11
Abstract: A new pharmaceutical multiple unit tableted dosage form containing as active substance an acid labile H<+>K<+>-ATPase inhibitor or an alkaline salt thereof or one of its single enantiomers or an alkaline salt thereof, a method for the manufacture of such a formulation, and the use of such a formulation in medicine.
Patent TW-356486-B (TW)
Title: Stitching device automatic pinching
Inventor: MORIIGUCHI SAICHIRO
IPC: D05B35/00
Filed: 1995-11-18
Granted: 1999-04-21
Abstract: A kind of stitching 1 with automatic pinching, its characteristics is, comprising: to guide the first stitch of two portions of weaving material 11 independently to the location of the first stitch and one of the second stitch for the weaving material guide to device 2, and to set the first fixed stitch 41 of plurality, stitching location of the first stitch the first weaving material 11, a moving device 4 to move the first weaving material 11 and the first fixed stitch 41 at the same time, and to set the second fixed stitch 42 with plurality, at the location of the second cutting stitch to stitch the first weaving material 11, a moving device 5 to move the first weaving material 11 and the first fixed stitch 41 at the same direction, to guide the second stitch of two portions of weaving material 12 independently to the location of the third stitch and one of the second stitch for the weaving material guide to device 3, and to set the third fixed stitch 43 with plurality, at the stitching location of the third stitch to stitch the second weaving material 12, a moving device 6 to move the second weaving material 12 and the third fixed stitch 43 at the same direction, and the maintaining of the third fixed stitch 43 for the second weaving material 12 shall be shifted to the moving eye device 7 of the first stitch of the first fixed stitch 41, and between the first fixed stitch 41 and the second fixed stitch 42, to move the fixed 41, 42 maintaining the first weaving material 11 to the next fixed 41, 42 the second stitch moving device 8, and make the first stitch weaving material 11 which is stitched one fixed stitch 41, 42 and the second stitch weaving material 12 by pinching to stitch sawing machine 9.
Patent TW-325463-B (TW)
Title: 4-Aminobenzoylguanidine-derivatives
Inventor: ROLF GERICKE
IPC: C07D277/42
Filed: 1996-01-26
Granted: 1998-01-21
Abstract: A 4-aminobenzoylguanidine of the formula I (I) in which R1 is A, R2 and R3 independently are H, A, Ph, 2-, 3- or 4-pyridyl, or R2 and R3 jointly is an alkylene having 4 or 5 carbon atoms, A is an alkyl having 1 to 6 carbon atoms, Ph is an unsubstituted phenyl or a phenyl which is mono-substituted by F, Cl, Br or CF3, and the physiologically unobjectionable salt thereof.
Patent TW-287988-B (TW)
Title: Automotive steel wheel with a spring device
Inventor: LIAW GWO-CHANG
IPC: B60B21/02
Filed: 1996-02-16
Granted: 1996-10-11
Abstract: An automotive steel wheel with a spring device, including an axle cover body and an outer frame; the wheel characterized by: the two ends of a spring having a spiral shape matching respectively with one end of a damper and fastened to the indented rim of the axle cover body and the indented inner rim of the outer rim, respectively; the spring, the damper, the axle cover body, and the outer frame integrated with the steel wheel; the other end of the damper pressing against the spring at an appropriate location for providing a damping effect.
Patent TW-350105-B (TW)
Title: Method of cleaning etching machine end detection hole
Inventor: GUO SHOU-WEN
IPC: H01L21/311
Filed: 1996-06-11
Granted: 1999-01-11
Abstract: A method of cleaning etching machine end detection hole, including: the step of carrying in sequence wafers inside the etching machine for etching; cleaning by injecting gases into the machine of a plasma etching when the machine processes wafers to a predetermined quantity or when the etching end detection hole of the machine is with excessive polymers; plasma etching for decomposition of the polymer attached onto the end detection hole, for restoration of the hole.