baber/WOPTO huggingface dataset:
Patent KR-20020050057-A (KR)
Title: Dual locking device
Inventor: KIM TEA DONG
IPC: E05B15/12
Filed: 2000-12-20
Abstract: PURPOSE: A double locking device is provided to use a single common master key for a plurality of locks, while allowing the spring assembling process to be easily carried out. CONSTITUTION: A locking device comprises an upper pin, a lower pin, a cylinder(12), an outer case(28) and a master cylinder(30). The locking device is operated by a predetermined key inserted into a hole formed at the cylinder. The master cylinder has a hole formed in the direction same as the direction of the cylinder, such that the locking device operates when a master key(20) arranged independently from the key is inserted through the hole formed at the cylinder. The outer case has at least one groove(28a) formed at the inner periphery of the outer case so as to allow a pin to be inserted into the groove. The master cylinder has at least one groove(28b) formed at the outer periphery of the master cylinder, and a pin(24) to be inserted from the groove of the master cylinder to the groove of the outer case. The pin is supported by a spring(24a) at the groove formed at the master cylinder.
Patent KR-20010022646-A (KR)
IPC: F16C33/64
Filed: 1998-07-01
Abstract: A method for producing steel rolling bearing rings, starting from a hot-rolled tube, the structure of which is similar to a spheroidized structure and from which rings of the same continuous length are hot-cut while supplying a lubricant and, after cooling, are further processed. The hot-cutting takes place at a temperature below the transformation temperature of the rolling bearing steel used but above 720° C., with subsequent cooling in static air. From the blank ring a green or soft ring of a rolling bearing ring is produced with narrow tolerances of its shaped elements by an optimally timed multistage machining type of cold further processing operation, the main element of the cold further processing being a turning operation.
Patent KR-20010023316-A (KR)
IPC: H02G11/02
Filed: 1998-08-07
Abstract: Toolbox having closable cover with first cable reel and second cable reel being rotatably mounted in an interior of the toolbox, and first electrical cable, including a first connection end with an electrical plug, wound on said first reel and second electrical cable, including a second connection end with an electrical coupling, wound on said second reel. The first electrical cable and the second electrical cable are electrically coupled to each other. First cable wind-up arrangement is associated with the first cable reel, and second cable wind-up arrangement is associated with said second cable reel. Further, first cable pass-through opening is in a wall of said toolbox, such that the first connection end is adapted to pass through the first cable pass-through opening from the interior of the toolbox to an exterior of the toolbox, second cable pass-through opening in one of a same and a different wall of the toolbox, such that the second connection end is adapted to pass through the second cable pass-through opening from the interior of the toolbox to the exterior of the toolbox.
Patent KR-20010032520-A (KR)
Title: 부호 분할 다원 접속 이동 전기 통신용 다이버시티 조정무브오버 방법 및 장치
IPC: H04B7/02
Filed: 1998-11-24
Abstract: 소프트 핸드오버를 갖는 셀룰러 시스템의 다이버시티 조정 무브오버 절차에 관련하여, 목표 노드내의 대체 다이버시티 조정 유닛의 할당은 무브오버 결정이 소스 노드에 이루어진 후에만 발생한다. 초기에, 소스 노드에서 발신 또는 소스 다이버시티 조정 유닛이 이동국에 서비스하는 복수의 기지국을 통해 경로 설정되는 이동 접속의 레그에 대해 접속 결합 및 접속 분할 기능을 실행한다. 이동국의 이동에 따라서, 소스 노드는 이동 결정을 행한다. 무브오버 결정은 기지국 이용 및/또는 이동국의 실제 및/또는 예측 지향성 이동과 같은 인자를 기초로 할 수 있다. 일부 실시예에서, 다이버시티 조정 무브오버 절차는 대체 또는 목표 다이버시티 조정 유닛의 위치에 대한 복수의 노드 중의 선택을 포함한다.
Patent KR-20010032819-A (KR)
Title: 이중 질량부 감쇠 플라이휠
IPC: F16F15/139
Filed: 1999-10-07
Abstract: 본 발명은 외주부의 제 2 허브(18)와 내주부의 반동판(16) 사이에 개재된 토오크 리미터(19)를 갖는 제 2 플라이휠(13)을 포함하는 이중 질량부 플라이휠에 관한 것으로, 상기 반동판에는 다른 재료로 이루어진 내측 링(160)이 직접 장착되어 있다.  본 발명은 자동차에 적용가능하다.
Patent KR-20010032981-A (KR)
Title: 부유식 생산설비
IPC: E21B19/00
Filed: 1998-12-10
Abstract: 본 발명은 부유식 생산설비에 관한 것으로, 주요 문풀(1)을 구비하되, 주로 회전중심(3)의 주위로 회전하여 파도나 바람의 방향에 적합할 수 있도록 되어 있으며, 주요 문풀의 적어도 한 쪽에는 설비의 회전중심(3)에 대해 이격되어 뻗어 있는 대체로 슬롯형상의 문풀(2,6)이 배치되고, 상기 슬롯형상의 문풀은 해저에서 설비까지 뻗어 있는 적어도 하나의 라이저(5,8)를 수용하도록 되어 있는 한편, 바람직하기로 주요 문풀의 적어도 한 쪽에는 설비의 회전중심(3)에 대해 이격되어 위치되어 있는 다수의 문풀(11,13)이 배치되고, 이 작은 문풀(11,13)은 해저에서 설비까지 뻗어 있는 적어도 하나의 라이저(12,14)를 수용하도록 되어 있다.
Patent KR-20010033065-A (KR)
Title: 접혀 뒤집힐 수 있는 컨버터블 지붕을 가지는 모터 차량용유압 시스템
IPC: B60J7/12
Filed: 1998-12-16
Abstract: 뒤로 접혀질 수 있는 컨버터블 지붕(2)을 가지는 모터 차량용 유압 시스템은 컨버터블 지붕 제어 시스템(1)과, 공통의 유압 펌프(6)에 의하여 작동될 수 있는 추가의 유압 제어 기구(3, 4)를 가진다. 컨버터블 지붕 제어 시스템(1)의 또는 추가의 제어 기구(3, 4)의 선택적인 작동을 가능하게 하는 유압 밸브(13, 14)들이 컨버터블 지붕 제어 시스템(1)으로 통하는 유압 라인(8, 9)에 배열된다. 이러한 것 때문에, 유압 시스템은 구조적으로 특히 간단하게 된다.
Patent KR-20010033496-A (KR)
Title: 형광분석계용 조성물
IPC: G01N33/58
Filed: 1998-12-15
Abstract: 본 발명은 형광학에 사용되는 조성물, 형광학의 방법 및 형광학에서 신규한 부류의 시약의 용도에 관한 것이다. 조성물은 형광단의 비형광 유도체인 기질, 최대치가 450nm이상인 형광단의 흡광도 파장 최대치를 이동시키는 이동제로 이루어진다. 이동제는 최대치를 미리 정한 값으로 이동시키기 위하여 예정한 양으로 존재한다.
Patent KR-20010043546-A (KR)
IPC: C07C311/46
Filed: 1999-05-07
Abstract: Compounds of Formula I and their pharmaceutically acceptable salts having selective dopamine D3 receptor activity suitable for treating central nervous system disorders. Formula I: R1 is independently H or a C1-C8 alkyl including isomeric forms thereof; R2 is H, C1-C3 alkyl, a halogen, OCH3 , OCF3, CF3, CN, SCH3 or NHCOCH3; and R3 is H, C1-C3 alkyl, a halogen, OCH3 , OCF3, CF3, CN, SCH3 or NHCOCH3.
Patent KR-20010043648-A (KR)
Title: 스마트 카드와 함께 작동하는 “웹” 브라우저를 이용하여오브젝트에 접근하기 위한 시스템
IPC: G06K19/07
Filed: 2000-03-15
Abstract: 본 발명은, 인터넷(RI)에 접속된 시스템에 분포된 가상 오브젝트(Obv i )에 확실히 접근하고, 이로부터 하나의 인스턴스(instance)를 얻기 위한 아키텍처에 관한 것이다. 상기 접근은, 스마트 카드(2a)와 "웹(WEB)" 브라우저(10)를 통해 행해진다. 단말기(1)와 스마트 카드(2a)는 각각의 특정 프로토콜 레이어(13,23a)를 구성한다. 상기 스마트 카드(2a)는 2-웨이 데이터 교환 세션을 형성하기 위한 인텔리전트 에이전트(132,232a 1 )를 포함하고, 이로써 "웹" 서버 기능을 갖는다. 또한, 상기 스마트 카드(2a)는 스크립트 번역기라 호칭되는 인텔리전트 에이전트, 및 특화된 스크립트 번역기 인텔리전트 에이전트(7)와 함께 동작하는 가상 파일 관리 시스템(8)을 포함한다. 각각의 가상 오브젝트(Obv i )는 가상 파일 관리 시스템의 가상 파일과 관련된다. 상기 특화된 인텔리전트 에이전트(7)는 접근가능한 가상 오브젝트(Obv i ) 리스트를 브라우저(10)에 제공하고, 상기 오브젝트에 접근하는 방법을 생성한다.
Patent KR-20010043721-A (KR)
Title: 울의 효소성 처리 방법
IPC: D06M16/00
Filed: 1999-05-12
Abstract: 울, 모섬유 또는 동물 털을 할로페록시다제(과산화수소 공급원 및 할라이드 공급원과 함께) 및 단백질 분해 효소로 처리하는 방법이 기술되어 있다.  기술된 방법에 의해 내수축성, 취급성, 외관, 습윤성이 개선되고, 펠팅 경향이 감소하고, 백색도가 증가하고, 필링이 감소하며, 유연성이 개선되고, 인장 강도가 보유되고, 신장도가 개선되고, 파열 강도가 개선되고, 염색 특성(예: 염료 흡수성 및 염색 세탁견뢰도)이 개선된다.  또한, 단백질 분해 효소만으로(할로페록시다제는 부재) 처리하는 것에 비해서, 기술된 방법에 의해 중량 손실이 감소하고 섬유 손상이 감소하고 파열 강도가 개선된다.
Patent KR-20020059539-A (KR)
Title: Apparatus for correcting Revolutions Per Minute of FAN
Inventor: LEE DONG JUN
IPC: H02P6/04
Filed: 2001-01-08
Abstract: PURPOSE: An apparatus for compensating RPM(Revolution Per Minute) of a fan is provided to improve the credibility of a cooling process by compensating continually RPM for plural fans. CONSTITUTION: A cooling unit(100) generates plural square wave signals. A switching unit(200) switches the plural square wave signals generated from the cooling unit(100). An integration circuit unit(300) converts the plural signals switched from the switching unit(200) into sinusoidal wave signals, each of which has a predetermined frequency, and outputs the sinusoidal wave signals. An adder(400) synthesizes the respective sinusoidal wave signals to output a synthesized single signal. A composite demodulation(500) receives and demodulates the synthesized single signal. And, the composite demodulation(500) filters the demodulated signal to detect an amplitude component of the signal generated from the cooling unit(100). An AD(Analog/Digital) converting unit(600) the amplitude component of the signal into a digital signal. A microcomputer(700) outputs a control signal in order to supply a voltage of a predetermined level to the cooling unit(100).
Patent KR-20020063072-A (KR)
Inventor: KWON O JUNG
IPC: C12Q1/68
Filed: 2001-01-26
Abstract: PURPOSE: A kit for detecting HPV by PCR and a detection method thereof are provided, thereby HPV can be rapidly and cheaply detected. CONSTITUTION: The kit for detecting HPV by PCR comprises a) a DNA extracting reagent containing a weak acidic ion exchange resin; and b) a PCR master mixture containing distilled water, buffer solution, dNTP, HPV 16 primers, HPV 18 primers, beta-globin primers, a mixed enzyme solution of Taq DNA polymerase and Uracil DNA glycosylase, in which a set of HPV 16 primers has the nucleotide sequence of SEQ ID NOs: 1 and 2; a set of HPV 18 primers has the nucleotide sequence of SEQ ID NOs: 3 and 4; and a set of beta-globin primers has the nucleotide sequence of SEQ ID NOs: 5 and 6. The method for detecting HPV comprises the steps of: a) treating a sample with the DNA extracting reagent and the PCR master mixture, and the PCR master mixture and carrying out PCR; and b) verifying the presence of HPV through the PCR gel after completion of PCR.
Patent KR-20010035367-A (KR)
Title: par an individual marks simulation system by realtime appearance estimation system
Inventor: PARK GI GO
Filed: 2001-02-07
Abstract: PURPOSE: The simulation system according to personal points using a real time appearance evaluation system is provided to evaluate an appearance in a photo up-loaded each other by connecting to the appearance evaluation system equipped with a web server and a web browser. CONSTITUTION: A netizen(100) connects to a web server of an agent(200), joins as a member, and up-loads a photo. Other netizen(100') connect to a web server of an agent(200), search information of a photo, and vote. A database server of a customer relation managing server(300) manages data based on an evaluation of the netizen and transmits files to an e-mail account of netizen(100').
Patent KR-20020071291-A (KR)
Title: A Signal Detecting Bluetooth System and a Method
Inventor: KANG SONG GU
IPC: H04B1/38
Filed: 2001-03-06
Abstract: PURPOSE: A signal sensing type bluetooth system and an operation method therefor are provided to secure a battery use time with a long time in a wireless connection using a local area wireless communication control device of a communication device and a headset by installing a signal sensing unit in a bluetooth module. CONSTITUTION: A bluetooth signal transmission module(40) connects to a communication device(2), converts a transmitting and receiving signal of the communication device(2) to be suitable for a bluetooth communication standard so that the transmitting and receiving signal is transmitted to a telephone talker by wireless in case that a signal which is over a certain level is received from the communication device(2), and transmits the converted transmitting and receiving signal. A bluetooth headset outputs the signal received through the bluetooth signal transmission module(40) to the telephone talker and transmits a signal inputted from the telephone talker to the bluetooth signal transmission module(40) in case that the signal which is over the certain level is received from the bluetooth signal transmission module(40).
Patent KR-20020071338-A (KR)
Title: A bake plate for semiconductor manufacture apparatus
Inventor: KIM SEONG JU
IPC: H01L21/00
Filed: 2001-03-06
Abstract: PURPOSE: A bake plate for a semiconductor manufacturing apparatus is provided to reduce a manufacturing cost of the bake plate by forming a sliding prevention part on the bake plate as one body. CONSTITUTION: A bake plate(100) for a semiconductor manufacturing apparatus comprises a seating portion(110), a sliding prevention part(120) having a protrusion portion formed on the edge portion of the seating portion(110) so as to prevent a wafer sliding, thermal sources formed in the seating portion(110) for heating the wafer(140) through the bake plate(100) and supporting pins(130) capable of moving up and down.
Patent KR-20020071662-A (KR)
Title: Egg packing box
Inventor: AN YOUNG GAK
IPC: B65D85/32
Filed: 2001-03-07
Abstract: PURPOSE: Provided is a packing box for eggs which forms a release prevention wing at a floor plate to prevent the eggs from being released exactly so that it improves appearance with placing the eggs inside. CONSTITUTION: In the packing box for the eggs(200) which includes the floor plate(210), a left and a right side plate(220, 230), a left and a right cover plate(240, 250), a left and a right support plate(260, 270) and a binding tool(277) to wrap the eggs, the packing box for eggs is characterized by placing space to keep the eggs at a front and a rear edge part, an opening part of space toward the center of the floor plate and including the curved release prevention wing to prevent the eggs from being released.
Patent KR-20020072606-A (KR)
Title: Slide door unit for use in automotive air conditioner
Inventor: KUROKAWA KATSUHIRO
IPC: B60H1/00
Filed: 2001-03-12
Abstract: PURPOSE: A sliding door device for a vehicle air conditioner is provided to limit improper clearance of a sliding door element by deflecting the door element toward a door housing by using an elastic structure formed by a pinion gear unit. CONSTITUTION: A sliding door device for a vehicle air conditioner includes a door housing(60) having side walls(61,62) facing laterally and respectively formed with a concave inner surface and arc-shaped guide grooves(62b,62c), a sliding door element(70) having a convex outer surface and a concave inner surface slidable on the concave surface of the door housing, racks(73) provided to laterally facing side surfaces of the concave inner surface of the sliding door element, a guide pin fixed to the laterally facing ends of the sliding door element and slidably coupled with the arc-shaped guide grooves of the door housing, a pinion gear unit(80) having two pinion gears(81,82) engaged with the racks and a shaft(83) connecting the pinion gears and rotatably supported by the facing side walls of the door housing, and an elastic structure formed by the pinion gears of the pinion gear unit and pressing the guide pin against bottom wall of the arc-shaped guide grooves by deflecting the pinion gears against the racks.
Patent KR-20020072692-A (KR)
Title: Flyback transformer
Inventor: KIM MYEONG HWAN
IPC: H01F38/42
Filed: 2001-03-12
Abstract: PURPOSE: A flyback transformer is provided to reduce a fabrication cost and a size of the flyback transformer by lowering a rated voltage of a high voltage capacitor. CONSTITUTION: A transformer(T) generates a high voltage by boosting a horizontal pulse applied to an input terminal(IN) during a feedback period. A rectifying diode(D) removes alternating current from output voltage of the transformer. A bleed resistance(B/R) is used for dividing the output voltage of the rectifying diode(D) according to a resistance ratio. A focus unit(F/U) outputs a screen or a focus control voltage by controlling the voltages lowered by the resistance(B/R). A high voltage capacitor(C2) is connected with both ends of resistance(B/R), in parallel in order to perform a smoothing function and reduce a ripple component of alternating current. An anode terminal of a picture tube(CCRT,RCRT) is connected to an output terminal(OUT).
Patent KR-20020073901-A (KR)
Title: Home automation system availabled home terminal
Inventor: KIM JANG HOE
IPC: H04L12/12
Filed: 2001-03-16
Abstract: PURPOSE: A home automation system is provided to enable a user to connect to a server of a corresponding businessman automatically and receive an on-line and off-line service through the Internet or a telephone when the user touches a main menu displayed on a screen by mounting a terminal device for performing an input/output of an application program being operated in a server and a system for performing a connection by a touch screen method through the terminal device in a large-sized building. CONSTITUTION: The Internet and a home automation function are mixed and applied through a terminal device of a touch screen method capable of transmitting/receiving information. A user is connected to a service of a businessmen linked with a local society directly and receives a service through the Internet and a telephone. The businessmen are classified into a local businessman, a local server, and a central server, constructs a DB with respect to various kinds of information of a corresponding businessman through a server linked with the local society, and supplies information for the user, and thus contents linked with the local society are constructed.
Patent KR-20010090523-A (KR)
Title: Plasma display with reduced power consumption
Inventor: NAKAMURA TADASHI
IPC: G09G3/288
Filed: 2001-03-23
Abstract: PURPOSE: To provide a plasma display device capable of reducing noise and also capable of reducing power consumption by lowering peak values of respective electrode currents. CONSTITUTION: Data electrodes of this plasma display panel 15 are divided into plural data electrode groups. A data-pulse phase control circuit 30 outputs pulse trains which consist of plural pulse trains and in which the starting timing of first pulses are delayed and the completing timing of final pulses are made to be early with different phases for every data electrode group based on an internal clock signal and a scanning reference signal from a control circuit 40. Data drivers 201, 202 provided for every data electrode group output display data in synchronization with pulse trains outputted by the data-pulse phase control circuit 30.
Patent KR-20020075634-A (KR)
Title: Automatic vending machine for outputting grain and control method of it
Inventor: KIM SOOK HYUN
IPC: G07F13/00
Filed: 2001-03-26
Abstract: PURPOSE: A grain vending machine and a control method thereof are provided to enable everyone to conveniently polish rice at once as well as purchase various grain including the rice. CONSTITUTION: The grain vending machine comprises a money recognizer(7), grain selecting buttons(8), a plurality of tanks(1,2) for separately storing rice and other grains, electric shutters(3a,3b,3c) for opening and closing exits of the tanks according to electric signals, a rice polisher(4), a packing device(6), sensors(9,10) for detecting an amount of the rice or other grains, a collecting box sensor(11) for detecting an amount of impurities, and a controller(12) for controlling the shutter, the packing device and the rice polisher by receiving signals from the sensors, the money recognizer and the selecting buttons.
Patent KR-20020076443-A (KR)
Title: Opening and closing device for valve
Inventor: HWANG GYU WAN
IPC: F16K17/34
Filed: 2001-03-28
Abstract: PURPOSE: A valve opening and closing device is provided to lengthen the life span by making a disk evenly pressurize a valve seat. CONSTITUTION: A valve opening and closing device comprises a stem(112) combined to one side of a valve to make a disk(112a) approach and part from a valve seat(114), a lower rotating member(206) rotating with the stem and having a unidirectional tooth profile(206a) on the upper face, an upper rotating member(208) having a unidirectional tooth profile(208a) in the shape the same as that of the upper rotating member, an elastic member elastically supporting the lower rotating member, and a combining unit rotatably combined to the upper portion of the stem. Herein, the tooth profile has an obtuse angle on one face and an acute angle on the other face. The upper rotating member makes the lower rotating member keep rotating in one direction and run idle in the other direction.
Patent KR-20020076979-A (KR)
Title: Preparation of water-soluble propolis, employ propylen glycol as solvent
Inventor: JIN SEUNG KWAN
IPC: A61Q11/00
Filed: 2001-03-28
Abstract: PURPOSE: A process of preparing water soluble propolis by extracting 3-£4-hydroxy-3,5-bis(3-methyl-2-butenyl)rhenyl|-2-propenic acid as an effective component of propolis with sodium citrate as a pH controller and then adding additives is provided which reduces manufacturing time while imparting a pleasant, refreshing taste. CONSTITUTION: The pH of propolis liquid is controlled to 5.5 to 7.0 with sodium citrate as a pH controller, mixed with propylene glycol as a solvent, agitated at 30 to 40deg.C under ordinary pressure to produce water soluble propolis until the propolis extract is absolutely dissolved in propylene glycol and then added with vitamin C, citric acid, lemon, chitosan, herb and a Zizyphus jujuba extract to reduce the sweet taste of propylene glycol.
Patent KR-20020079186-A (KR)
Title: Ring type magnet apparatus for magnetic sensor
Inventor: JANG HUI SU
IPC: G01B7/30
Filed: 2001-04-13
Abstract: PURPOSE: A magnet ring structure for magnetic sensor is provided to obtain a sufficient durability corresponding to the temperature change caused due to thermal impact, while preventing cracking when the magnet ring is force fit to the shaft. CONSTITUTION: A magnet ring structure comprises a steel bush(50) arranged to a rotor, and which rotates together with the rotor; a magnet section(60) arranged along the outer periphery of the steel bush, and which has a plurality of polarities formed along the outer periphery of the magnet section so as to allow a rotation speed sensor to sense speed; and a buffer member(70) interposed between the steel bush and the magnet section. The buffer member protect the magnet section from damage by absorbing expansion or contraction of the steel bush caused due to the change of ambient temperature.
Patent KR-20010069707-A (KR)
Title: . stopper of '' shape
Inventor: KIM DEA HAN
IPC: B65D41/00
Filed: 2001-04-28
Abstract: PURPOSE: An inversed L-shaped bottle cap is provided to easily drink beverages without pushing out the neck when drinking beverages directly by a mouth, thereby enabling a baby or a patient to easily drink beverages. CONSTITUTION: An inversed L-shaped bottle cap includes a bottle cap(30) formed in an inversed L-shape and having a space connected to an inlet(10), and a separate cap(20) for stopping the contents of the bottle, so that the whole bottle cap is turned to be opened when a person pours beverages into a glass or the cap is turned to be opened when the person simply drinks beverages.
Patent KR-20020083765-A (KR)
Inventor: JUNG YEON U
IPC: H01L21/02
Filed: 2001-04-30
Abstract: PURPOSE: A method for fabricating a capacitor of a semiconductor device is provided to facilitate the control of capacitance and improve the bridge problem between capacitors of the device by adopting double Hemispherical grain(HSG) layers. CONSTITUTION: An insulation layer(23) is deposited on a semiconductor substrate(21) and the first contact holes are formed through the layer. The first poly-silicon layer is deposited on the surface including the insulation layer and the holes and contact plug(25) for the bottom electrode is built up by etching the poly-silicon layer. A nitride layer(27) is stacked on the top surface of the whole structure and the oxide layer is deposited on it as an insulating layer on which, photoresist pattern is formed by photolithography. The second contact holes are made to expose a portion of insulating layer by removing oxide and nitride layer, using photoresist pattern as a mask. After removing the photoresist pattern, second ploy-silicon layer is deposited on the oxide layer and second contact holes. A first HSG layer is formed on the second poly-silicon layer and a SOG layer is coated. The SOG layer is selectively removed until the top surface of the first HSG is exposed. Using a left SOG layer as mask, second poly-silicon layer and the first HSG are selectively removed until the oxide layer is exposed. A second HSG structure is formed on the first one and the second poly-silicon layer.
Patent KR-20010107562-A (KR)
Title: 반도체 장치 및 그 제조 방법
IPC: H01L21/76
Filed: 2001-05-04
Abstract: 화학적 기계적 연마 시에서의 과연마를 방지하고, 주위의 밀집 패턴(本番部)에 영향이 미치지 못하도록 개량된 반도체 장치의 제조 방법을 제공하는 것을 주된 목적으로 한다. 
     오목부(4) 및 트렌치(6)를 매립하도록 반도체 기판(1) 상에 플라즈마 산화막(10)을 형성한다.  레지스트막(11)을 마스크로 하여 플라즈마 산화막(10)을 선택적으로 에칭하고, 사진 관련 마크부인 오목부(4) 근방에 화학적 기계적 연마 시의 과연마에 대한 지지가 되는 과연마 방지용 지지 부재(17)를 남긴다.  반도체 기판(1) 표면을 화학적 기계적 연마에 의해 연마한다.  그 후, 질화막(3) 및 산화막(2)을 제거한다.