baber/WOPTO huggingface dataset:
Patent KR-20110063189-A (KR)
Title: High heat-resistance cold-rolled steel sheet having excellent formability, heat resistance, surface properties for working and manufacturing method thereof
Inventor: KIM JAI IK
IPC: C22C38/12
Filed: 2009-12-04
Abstract: PURPOSE: A high heat-resistance cold-rolled steel sheet with excellent processability, heat-resistance, and discoloration resistance and a manufacturing method thereof are provided to optimize processing conditions by reducing the addition of alloying elements. CONSTITUTION: A high heat-resistance cold-rolled steel sheet with excellent processability, heat-resistance, and discoloration resistance comprises C 0.002~0.005 weight%, Nb 0.02~0.06 weight%, Sn 0.05~0.25 weight%, Mn 0.10~0.35 weight%, Al 0.02~0.08 weight%, P 0.003~0.020 weight%, N 0.002~0.006 weight%, S 0.015 weight%, Fe and inevitable impurities. The value of atomic ratio Nb/C is 0.8~2.0.
Patent KR-20100102032-A (KR)
Title: Apparatus and method for mutual authentication in downloadable conditional access system
Inventor: KWON EUN JUNG
IPC: H04L12/18
Filed: 2009-12-09
Abstract: PURPOSE: An apparatus and a method for mutual authentication in downloadable conditional access system are provided to reduce maintenance costs by moving entity authentication based on hardware. CONSTITUTION: An announce protocol processing unit certifies security announce information by using a authentication proxy(200). The announce protocol processing unit transmits the security announce information to a security module(100). A key protocol processing unit relays a key request and a key response. A decoder decodes the key reply information by using the security module. The authentication protocol processing unit decides the identity of the second encryption key and the first encryption key.
Patent KR-20110065229-A (KR)
Title: 바이폴라 트랜지스터 및 바이폴라 트랜지스터의 제조 방법
Inventor: KIM NAM JOO
IPC: H01L29/73
Filed: 2009-12-09
Abstract: 실시예에 따른 바이폴라 트랜지스터의 제조 방법은 반도체 기판에 제1 트렌치 및 제2 트렌치를 형성하는 단계; 상기 제1 트렌치 및 상기 제2 트렌치 아래의 상기 반도체 기판 일부에 제1 매립층을 형성하는 단계; 상기 제1 트렌치 및 상기 제2 트렌치에 각각 제1 에피층 및 제2 에피층을 형성하고, 상기 제1 매립층이 확장된 제2 매립층을 형성하는 단계; 상기 제2 에피층에 제2 싱크를 형성하고, 상기 제2 매립층이 확장된 제3 매립층을 형성하는 단계; 상기 제1 에피층의 적어도 상부에 웰영역을 형성하는 단계; 및 상기 웰영역의 상부에 상호 이격된 베이스 영역 및 에미터 영역을 형성하는 단계를 포함한다. 
     실시예에 의하면, 이중 트렌치 구조 및 선택적 에피층 구조에 의하여 싱크와 베이스 영역 사이의 거리를 최소화하면서도 내압 문제 및 정션 영역의 확산 문제를 해결할 수 있다. 
       
     바이폴라 트랜지스터, 정션, 내압, 베이스, 컬렉터, 싱크, 웰
Patent KR-20110065739-A (KR)
Title: Ultrasonic diagnosis apparatus
Inventor: OH TAE HYOUNG
IPC: G01N29/24
Filed: 2009-12-10
Abstract: PURPOSE: An ultrasonic diagnosis apparatus is provided to reduce a manufacturing cost by activating an ultrasonic probe without using a relay. CONSTITUTION: An ultrasonic probe(110) performs ultrasonography for a target to be inspected. The ultrasonic probe has a connector which is electrically connected to a socket part of a device body(120). A connection reinforcing part(150) reinforces the connection between the connector and the socket part. The connection reinforcing part includes a magnetic body and an electromagnetic member. The magnetic body is arranged in the connector of the ultrasonic probe. The electromagnetic member is arranged in the socket part of the device body. The electromagnetic member generates electromagnetic force when receiving the current.
Patent KR-20110066746-A (KR)
Title: Array substrate of liquid crystal display device and method for fabricating the same
Inventor: KIM MIN JOO
IPC: H01L29/786
Filed: 2009-12-11
Abstract: PURPOSE: An array substrate of a liquid crystal display device and a method for fabricating the same are provided to improve TFT performance by simplifying manufacturing process by reducing the number of mask processes. CONSTITUTION: An array substrate(101) of a liquid crystal display device comprises a source electrode(103a) and a drain electrode(103b) formed on the array substrate, an organic semiconductor layer pattern(105a), a first organic isolation film pattern(107a), a second organic isolation film pattern(109a), and a gate electrode(111a) which are formed on the source electrode and the drain electrode, a protection layer(113) which comprises a contact hole which exposes some part of the drain electrode, and a pixel electrode(117a) which are connected with the drain electrode through the contact hole.
Patent KR-20110070061-A (KR)
Title: A device and a method of preventing flowing of coating liquid for slit die, and a slit die and a coating apparatus having the same
Inventor: SEO JI HOON
IPC: B05C11/10
Filed: 2009-12-18
Abstract: PURPOSE: A coating liquid flowing prevention apparatus for a slit die, and the slit die and a coater including thereof are provided to maintain the uniform coating height throughout the entire area on a substrate. CONSTITUTION: A coating liquid flowing prevention apparatus for a slit die comprises the following: a first coating liquid guiding member(230a) located on one side of an outlet on the slit die(220); and a second coating liquid guiding member(230b) located on the other side of the outlet. The first coating liquid guiding member includes a first bar(232a), a first connection member(234a), and a first mounting member(236a) detachably mounting the first connection member to a pair of ribs for forming the slit die.
Patent KR-20110070440-A (KR)
Title: Ip based multicast video service changing method with docsis service information table
Inventor: OH HYE JU
IPC: H04N7/12
Filed: 2009-12-18
Abstract: PURPOSE: A channel changing method of an IP-based multicast video service using a DOCSIS service information table is provided to efficiently offer a service flow for a converted program. CONSTITUTION: A cable modem receives DOCSIS(Data Over Cable Service Interface Specification) service information from a head end(S501). According to whether to change a DOCSIS service information table, the cable modem modifies the DOCSIS service information table(S502,S503). According to a changed channel bonding group, the cable modem modifies the DOCSIS service information table(S506). The cable modem modifies downstream service ID filtering information(S507).
Patent KR-20110073882-A (KR)
Title: Apparatus and method for processing voice signal in dual stanby mobile communication terminal
Inventor: CHOI SUNG YUN
IPC: H04W88/06
Filed: 2009-12-24
Abstract: PURPOSE: A voice signal processing apparatus and method thereof in a dual standby mobile communication terminal are provided to reduce a manufacturing cost and to remove an analog switch by processing a transceiving voice signal in one modem. CONSTITUTION: A first modem(200) supports a first system. The first modem outputs an interrupt signal requesting the voice signal process. A second modem(233) supports a second system. The second modem inputs the interrupt signal requesting the voice signal processing from the first modem. The second modem performs the digital signal processing of the voice signal about the first system. An antenna(201) receives a signal about the first system. A speaker(243) outputs a voice signal from the second modem.
Patent KR-20110073965-A (KR)
Title: Solid state storage system controlling method with dual memory area
Inventor: SHIN YOUNG KYUN
IPC: G06F12/06
Filed: 2009-12-24
Abstract: PURPOSE: A control method of a semiconductor storage system managing a dual memory area is provided to perform read, write, and update processes of data in a random area if the system enters a protect mode. CONSTITUTION: A peripheral device(200) controls a host interface(110). The host interface is connected to a buffer unit(120). The host interface transceives control command, address signal, and data signal between an external host and the buffer unit. The buffer unit stores output signals of a host interface. A MCU(Micro Control Unit)(130) transmits and receives the host interface and the control command, and the address signal, and data signal.
Patent KR-20110077520-A (KR)
Title: Pressure regulating module
Inventor: KIM KEUN BAE
IPC: B60T8/34
Filed: 2009-12-30
Abstract: PURPOSE: A pressure regulating module is provided to keep discharge pressure regularly by controlling working fluid inside a pressure regulating valve using a servo control type motor. CONSTITUTION: A pressure regulating module comprises: a valve housing(10) having a space inside and inflow, outflow passages to let fluids flow in or out; a servo motor(20) transferring driving force; a spool(30) reciprocating to open and close the inflow, outflow passages selectively; a power transmission unit located between the spool and the servo motor to transfer the driving force of the servo motor to the spool; and a control unit(50) measuring the pressure of fluids discharged from the valve housing and transferring a difference in pressure value, and keeping the discharge pressure to the required value regularly.
Patent KR-20110046215-A (KR)
Title: Media for removing pollutant and manufacturing method thereof
IPC: B01D53/60
Filed: 2009-12-30
Abstract: PURPOSE: A pollutant removal medium containing a porous molded body and a zeolite coating layer, and a producing method thereof are provided to effectively remove nitric oxides and sulfur oxides generating nonpoint source pollutants at the same time. CONSTITUTION: A pollutant removal medium contains a porous molded body obtained by heat-processing and carbonizing organic waste, and a zeolite coating layer formed on the porous molded body. The porous molded body has a spherical shape with the diameter of 5~10mm. The thickness of the zeolite coating layer is 0.5~1.5mm.
Patent KR-20110078560-A (KR)
Title: Ontology basedcontext awareness system and service providing method thereof
Inventor: OH WON SEOK
IPC: G06F17/00
Filed: 2009-12-31
Abstract: PURPOSE: An ontology based context recognition system and a service providing method using the same are provided to offer a seamless and dynamic user-centered service. CONSTITUTION: An upper ontology has a plurality of classes. A lower class is prepared to express a state in each class. A domain ontology has a plurality of classes. The plurality of classes is defined as the lower class of the class of the upper ontology. A context recognition cooperation system(1021~102N) collects context data from a plurality of devices existing in a corresponding zone and creates instances. The context recognition cooperation system requests a service mapped to be corresponded to a high level context.
Patent KR-20110079126-A (KR)
Title: Manufacturing method for polyamide-based reverse osmosis membrane with high flux
Inventor: CHOI JEONG EUN
IPC: B01D71/56
Filed: 2009-12-31
Abstract: PURPOSE: A producing method of a high flow polyamide reverse osmosis membrane by the interfacial polymerization is provided to prevent the reduction of the salt rejection factor. CONSTITUTION: A producing method of a high flow polyamide reverse osmosis membrane by the interfacial polymerization comprises the following steps: preparing a micro-porous supporter; coating a multifunctional amine solution containing trissilanol on the micro-porous supporter for obtaining a first thin film; contacting the micro-porous supporter with an aliphatic hydrocarbon system organic solution for obtaining a polyamide active layer; and drying and washing the obtained polyamide active layer.
Patent KR-20110079279-A (KR)
Title: Semiconductor device and method for manufacturing the same
Inventor: JEONG SEONG HUN
IPC: H01L27/108
Filed: 2009-12-31
Abstract: PURPOSE: A semiconductor device and a manufacturing method thereof are provided to minimize leakage current through corner rounding of a capacitor. CONSTITUTION: A lower electrode is formed under the first trench(T1) of a substrate(110). A capacitor insulating layer(130) is formed in the substrate of a side wall of the first trench sidewall. An upper electrode fills up the first trench. An edge of the first trench substrate located at an upper side of a filling isolation layer(120) gets rounded.
Patent KR-20090007506-A (KR)
Title: Disk cartridge, forming member for disk cartridge, and method of manufacturing inner shell
Inventor: IWAKI YUJI
IPC: G11B23/03
Filed: 2002-06-24
Abstract: A disk cartridge, wherein an optical disk (3), an inner shell (4), and shutter members (5a) and (5b) are stored in a cartridge body (2) formed by butt-connecting upper and lower shells (6) and (7) to each other and an opening part (24) provided in the cartridge body is opened and closed by the shutter members by rotating the inner shell, a crank-like dust entry preventing part (21A) for stopping the entry of dust from the mutually butted surface side of the peripheral walls of the upper and lower shells to the optical disk side in the cartridge body is provided inside the mutually butted peripheral walls of the upper and lower shells to protect the optical disk stored in the cartridge body, and the inner shell disposed in the cartridge body comprises a connection part (43a) having an opening part (44) corresponding to the opening part of the cartridge body and connecting the open end side of the opening part, and is formed in such a height that the connection part is not projected to the lower shell side.
Patent KR-20090038454-A (KR)
Title: Imaging device
Inventor: KAWAMOTO HISASHI
IPC: H04N5/225
Filed: 2007-12-12
Abstract: An imaging device (1) having an imaging board (11) having an imaging element (12) mounted on its object side, an optical unit (20) including lenses (22, 23, 24) for focusing object light on the imaging element (12), blades (33, 34, 35) for adjusting the object light entering into the lenses (22, 23, 24), and a blade drive unit (30) including a step motor (36) as the drive source for the blades (33, 34, 35) and also including a motor board (39a) for supplying drive electric power, coming from the imaging board (11), to the step motor (36). The optical unit (20) is provided on the imaging board (11). The drive unit (30) is provided on the optical unit (20), separated from the imaging board (11). The motor board (39a) is provided on the blade drive unit (30) so as to face the imaging board (11). Solder (41) for electrically connecting the imaging board (11) and the motor board (39a) is provided between the boards (11, 39a).
Patent KR-20090046903-A (KR)
Inventor: VARGA PETER
IPC: A61B17/76
Filed: 2007-07-31
Abstract: 본 발명은 척추변형 교정장치에 사용되는, 나사(1)와 같은 뼈-앵커링 요소로서, 척추뼈(3)에 이식되고 헤드(4)는 상기 장치의 하나 이상의 로드들(5-10)을 수용하는 리셉터클(11)을 포함하며, 헤드(4)의 상부 에지에서 개방되고, 내면들에 나사식 플러그(30)를 삽입 및 고정하기 위한 나사산(16)이 제공되는 두 개의 측면 분기들(14, 15)에 의해 형성되는 채널(13)을 포함하는 뼈-앵커링 요소에 관한 것이다.  상기 뼈-앵커링 요소는 상기 채널(30)의 폭을 국부적으로 제한하고 로드들(5-10)이 헤드(4)에 삽입되고 상기 플러그(30)에 의해 아직 고정되지 않은 경우 리셉터클(11)로부터 로드들(5-10)의 빠짐을 방지하거나 방해하는 하나 이상의 탄성 요소를 포함한다. 
       
     뼈-앵커링 요소, 플러그, 전방접근법, 척추변형 교정장치, 로드, 척추측만증
Patent KR-20090107012-A (KR)
Title: Computer-executable program, method, and processing device
IPC: G10L15/00
Filed: 2007-08-28
Abstract: An audio recognition function is added to a sheet on a computer screen including elements which can be set without modifying programs constituting the sheet on the computer screen. A computer is made to function as: means for receiving information associated with an operation of a user interface via computer input means from a computer program; means used when the user interface has received a selection of any of positions on the sheet, for receiving an input of information associated with a character to be specified by a speech which is to be inputted in correspondence with a sheet upper-node position.
Patent KR-20090060425-A (KR)
Title: Fold flat seat assembly with drive link
Inventor: HOMIER ROBERT I
IPC: B60N2/36
Filed: 2007-10-05
Abstract: A seat assembly is provided for supporting an occupant above a floor in an automotive vehicle. The seat assembly includes a seat cushion that is adapted to be pivotally coupled to the floor for movement between a raised position spaced above the floor and a lowered position adjacent the floor. The seat assembly also includes a seat back that is adapted to be pivotally coupled to the floor for movement between an upright position and a folded position overlying the seat cushion. At least one drive link extends between a first end pivotally coupled to the seat back and a second end pivotally and slidably coupled to the seat cushion for automatically moving the seat cushion between the raised and lowered positions in response to pivoting the seat back between the upright and folded positions thereby defining a seating position and a stowed position of the seat assembly.
Patent KR-20090051128-A (KR)
Inventor: RZYSKI EUGENE
IPC: H04B1/04
Filed: 2002-06-21
Abstract: 전기 회로의 불필요한 변조간 산물 소거를 위한 소거 회로가 제공된다. 변조간 산물 소거 회로는 요망 주파수 대역 사이에서 RF 신호의 여러 다른 주파수 신호 성분들의 주파수 및 진폭을 인식 및 측정하는 스테핑 스펙트럼 분석기를 포함한다. 이 정보는 탐색표 등을 포함하는 프로세서에 전달되어, RF 신호에 위치하도록 의도된 신호 성분들의 주파수 및 진폭에 관한 정보를 제공한다. 스테핑 스펙트럼 분석기에 의해 측정 및 인식된 주파수 및 진폭을 탐색표와 비교함으로서, 소거 회로의 프로세서는 RF 신호의 신호 성분들이 의도한 "정보" 내장 신호인 지 의도하지 않은 변조간 산물인 지를 결정할 수 있다. 신호 성분이 의도하지 않은 변조간 산물이라고 프로세서가 결정하면, 프로세서는 변조간 산물의 주파수 및 진폭과 동일한 주파수 및 진폭을 가진 소거 신호를 생성하도록 가변 전압 제어 발진기와 가변 증폭기를 제어한다. 위상 시프터가 제공되어 변조간 산물에 대해 소거 신호의 위상이 180도 차이가 나도록 하고, 소거 신호는 RF 신호와 조합되어 변조간 산물이 소거된 RF 신호를 생성하게 된다.
Patent KR-20090080066-A (KR)
Title: Semiconductive polyolefin composition
Inventor: FAGRELL OLA
IPC: C08K3/04
Filed: 2007-10-26
Abstract: The present invention relates to a semiconductive polyolefin composition comprising: (i) up to 80 wt.% of a polyolefin (I), (ii) carbon black, and (iii) optionally up to 60 wt.% of a polymer (II) having a melting point of not less than 100 °C, wherein the polyolefin (I) has a co-monomer content of equal to or less than 4.3 mol%, to the use of that composition for the production of a power cable and to a power cable comprising that composition.
Patent KR-20090089344-A (KR)
Title: Engine brake apparatus
Inventor: JANAK ROBB
IPC: F01L13/06
Filed: 2007-10-29
Abstract: Apparatus and methods for hydraulic valve actuation of engine valves are disclosed. An exemplary embodiment of the present invention may include a lost motion piston assembly that transfers motion between first and second rocker arms to selectively provide auxiliary engine valve actuation motions to the engine valves for engine operations such as engine braking and exhaust gas recirculation. The lost motion piston assembly may reduce or eliminate transient loads that may otherwise be transmitted to engine valve train elements during the times that lost motions systems are turned on and off for auxiliary valve actuations. ® KIPO & WIPO 2009
Patent KR-20090089899-A (KR)
Title: Antiglare film, display employing the same, light-diffusing film, and surface light source system employing the same
Inventor: YAMASHITA TOMOYOSHI
IPC: G02B1/11
Filed: 2007-12-07
Abstract: An actinic-energy-ray-curable resin composition (10) is supplied to the nip between a roll-shaped die (7) obtained by subjecting the peripheral surface of a roll-shaped metal member to blasting to thereby form a finely roughened structure and a filmy light-transmitting substrate (9) disposed along the peripheral surface of the roll-shaped die (7), thereby forming the actinic-energy-ray-curable resin composition (10) into a thin film. The finely roughened structure in the peripheral surface of the roll-shaped die (7) is transferred to a surface of the thin film. This actinic-energy-ray-curable resin composition (10) is cured to form a light-transmitting thin film. This film is bonded to the surface of the light-transmitting substrate (9) to obtain an antiglare film.That surface of the light-transmitting thin film which has the finely roughened structure has an arithmetic average inclination angle of 0.5-3.5 degrees. ® KIPO & WIPO 2009
Patent KR-20090123863-A (KR)
Title: Exenatide and dalargin-based medicinal preparation for treating pancreatic diabetes
Inventor: NESTERUK VLADIMIR VIKTOROVICH
IPC: A61K38/16
Filed: 2007-07-16
Abstract: The invention relates to medicine, in particular to endocrinology. The inventive method for potentiating the therapeutic effect of exenatide consists in injecting the efficient quantity thereof in combination with the efficient quantity of dalargin. The preferred therapeutic effects of the invention consist in reducing pathologically high levels of glucose and cholesterol in the blood of diabetics. The inventive method for treating pancreatic diabetes consists in injecting the efficient quantity of exenatide in combination with the efficient quantity of dalargin. The invention discloses the use of the exenatide and dalargin combination for producing a medicinal preparation for treating pancreatic diabetes. A medicinal preparation which is used for treating pancreatic diabetes and which contains the efficient quantity of exenatide, the efficient quantity of dalargin and a pharmaceutically acceptable carrier or solvent and a method for the preparation thereof are also disclosed. A medicinal preparation which is used for treating pancreatic diabetes and which is embodied in the form of a set containing the exenatide and dalargin medicinal preparations and a method for the use of said medicinal preparation are also disclosed.
Patent KR-20090106634-A (KR)
Title: Apparatus for analyzing mixtures of gases
Inventor: MORRIS PATRICIA A
IPC: G01N27/22
Filed: 2002-04-05
Abstract: Disclosed herein is a method and apparatus for analyzing, sensing and measuring information related to the concentrations of various gases, including NOx, hydrocarbons, carbon monoxide and oxygen, in a multi-component gas system using chemical sensor arrays. The sensors arrays use chemo/electro-active materials to analyze and detect the presence of gases.
Patent KR-20090121358-A (KR)
Title: Pyrimido [4,5-d] azepine derivatives as 5-ht2c agonists
Inventor: ANDREWS MARK DAVID
IPC: A61P25/00
Filed: 2008-03-14
Abstract: The present invention relates to compounds of formula (I): wherein R1, R2, R3a,R3b, R3c, R3d and R100 are as defined in the specification. These compounds act as 5-HT2C agonists.
Patent KR-20110005201-A (KR)
Inventor: KLEINER GILBERT
IPC: B23B51/06
Filed: 2008-04-30
Abstract: 본 발명은 회전 구동가능한 절삭 공구(cutting tool)에 관한 것으로서, 바람직하게는, 구멍 가공 특히 관통 구멍의 가공을 위한, 통합된 냉각 및 윤활제 공급 시스템을 가진 정밀 가공 공구에 관한 것이다. 이 공구는, 바람직하게 리머(reamer) 형태로 실시되어, 여러 개의 칼날 또는 칼날 모서리와 절삭 슬롯들이 형성되어 있는 커팅 부분과, 커팅 부분과는 반대방향으로 클램핑 부분이 형성된 섕크(shank)로 이루어져 있다. 본 발명의 목적은, 칼날 모서리에 냉각 및 윤활제가 효율적으로 공급되게끔 하고, 제조 방법에 있어 비용의 경제성을 개선시키고자 하는 것이다. 상기 목적을 달성하기 위해, 클램핑 부분에는 절삭 슬롯 개수에 상응하는 개수의 냉각 및 윤활제 통로가 형성되어 있으며, 상기 냉각 및 윤활제 통로에는 축 방향으로 난 각각의 배출 구멍이 있으며, 섕크를 따라 연관된 커팅 부분의 절삭 슬롯으로 이어진다.  
       
     절삭 공구, 리머, 냉각 및 윤활제 공급, 칼날, 절삭 슬롯, 클램핑 부분, 커팅 부분, 샤프트 부분, 건식가공, 최소 윤활
Patent KR-20090130195-A (KR)
Title: Method for preparation of cyclosporin a aldehyde
Inventor: NAICKER SELVARAJ
IPC: A61K9/48
Filed: 2002-10-17
Abstract: The invention is directed to isomeric mixtures of cyclosporine analogues that are structurally similar to cyclosporine A. The mixtures possess enhanced efficacy and reduced toxicity over the individual isomers and over naturally occurring and other presently known cyclosporines and cyclosporine derivatives. Embodiments of the present invention are directed towardand-isomers of cyclosporin A analogs referred to as ISA247, and derivatives thereof. Mixtures of ISA247 isomers exhibit a combination of enhanced potency and reduced toxicity over the naturally occurring and presently known cyclosporins. ISA247 isomers and alkylated, arylated, and deuterated derivatives are synthesized by stereoselective pathways where the particular conditions of a reaction determine the degree of stereoselectivity. Stereoselective pathways may utilize a Wittig reaction, or an organometallic reagent comprising inorganic elements such as boron, silicon, titanium, and lithium. The ratio of isomers in a mixture may range from about 10 to 90 percent by weight of the (E)-isomer to about 90 to 10 percent by weight of the (Z)-isomer, based on the total weight of the mixture.
Patent KR-20100103342-A (KR)
Inventor: SHIBAZAKI YUICHI
IPC: H01L21/68
Filed: 2008-12-25
Abstract: 소정 평면 내를 이동하는 스테이지 (WST) 의 위치를 계측하기 위해서, 인코더 헤드 (64, 65, 66 등) 및 Z 헤드 (74, 76 등) 가 설치되어 있다.     이들 헤드로부터 발하여지는 계측빔이, 스테이지 (WST) 의 상면에 형성되어 있는 스케일 (39X 1 , 39X 2 , 39Y 1 , 39Y 2 ) 에 조사된다.     아이들 중에는, 스테이지 (WST) 를, 예를 들어 정지 위치를 중심으로 선회 구동하여 계속 움직이거나, 혹은 계측빔이 닿지 않는 영역으로 퇴피시킨다. 
       
     노광, 패턴 형성, 이동체 구동, 정지 위치, 계측빔