baber/WOPTO huggingface dataset:
Patent KR-20020048440-A (KR)
Title: Package tray construction of vehicle
Inventor: YOON JU UNG
IPC: B62D25/08
Filed: 2000-12-14
Abstract: PURPOSE: A package tray structure of a vehicle is provided to reduce trembling of a panel and noise by altering dispersion of vacuum pressure into stream velocity of fluid and slowly reducing pressure. CONSTITUTION: A package tray structure of a vehicle includes a package tray panel(21) forming a vent hole(21c) to settle vacuum pressure occurred when the trunk is closed, a rear frame panel(22), joined to the right and left end(21b,21a) of the package tray panel, supporting the rear glass, and a first reinforcing panel(23) reinforcing the left end of the package tray panel. The package tray structure includes a second reinforcing panel(25) forming a vent hole(25a) penetrating the upper and lower space(24a,24b) positioned between the rear frame panel and package tray panel. The vent hole of the package tray panel and the vent hole of the second reinforcing panel are formed to each different position. The vacuum pressure of fluid is altered into velocity by forming the nozzle-type space and the trembling and noise of panel is reduced.
Patent KR-20020048597-A (KR)
Title: Multi Protocol Supporting Apparatus
Inventor: LEE HYEON NAM
IPC: H04L12/28
Filed: 2000-12-18
Abstract: PURPOSE: A multi protocol application apparatus is provided to implement a WAN(Wide Area Network) port by using a separate chip applying only the protocol actually being used, thereby reducing cost and saving the resource. CONSTITUTION: A connector(11) is connected to line interface units(12,13) applying various protocols, produces protocol selection signals(V.35,RS232) through a pull-up resistor when the connector itself is used at present and then transmits to a switching unit(14). An RS232C line interface unit(12) converts the electrical data signal(O_RD) into a reception data signal(R_RD) and transmits to the switching unit(14). A V.35 line interface unit(13) converts the electrical data signal(RX_A,RX_B) into a reception data signal(V_RD) and transmits to the switching unit(14). The switching unit(14) switches only reception data signal(CPU_RX) converted into the present used protocol and then transmits to a central processing unit(20).
Patent KR-20020051503-A (KR)
Title: Method of Managing Database Using Table Class and Automatic Source Creation Device
Inventor: KIM JUN SU
IPC: G06F17/40
Filed: 2000-12-22
Abstract: PURPOSE: A method for processing a database through a table class and a source automation generator is provided to increase a reusable rate of a code by classifying a basic function of a database and a function for processing data on a table through an objected-oriented program. CONSTITUTION: A data processing job with respect to a table through a database class and a table class is abstracted(S21). At this time, functions as a selection, an insertion, a deletion, an update, a sum, an increment, and a decrement are included. A source automation creating device reads a table structure directly and creates the lower class for processing a table directly(S22). A substance of a job abstracted in the table class is made by analyzing structures of all columns and data sizes in the table. The lower class made by the source automation creating device embodies a column process in the table and supplies an interface of a library format(S23). The same interface is supplied to different tables, respectively.
Patent KR-20020051274-A (KR)
Inventor: KIM JI JUN
IPC: B22D11/00
Filed: 2000-12-22
Abstract: PURPOSE: A descaling method of copper mold during continuous casting is provided to improve surface quality of continuous cast strip. CONSTITUTION: In a method for stripping scale deposition due to inorganic ingredient s in cooling water from copper mold during continuous casting, the present method is characterized in that it comprises an acid washing step where a copper mold is dipped in 0.5-1.0wt% formic acid solution for 40-60 minutes to remove scale deposition; a neutralization step where the acid-treated copper mold is dipped in 0.5-1.0wt% sodium phosphate solution for 40-60 minutes.
Patent KR-20020055648-A (KR)
Title: Structure for preventing unlocking of seat for automobile
Inventor: HUH YUN GAP
IPC: B60N2/08
Filed: 2000-12-29
Abstract: PURPOSE: A structure for preventing lock release of a seat for a car is provided to maintain a lock condition by inserting a protrusion of a locker into a lock hole of a lower track by removing distortion deformation. CONSTITUTION: A structure for preventing lock release of a seat for a car includes a lower track mounted on a floor panel, an upper track covered on the lower track and slidably mounted, a locker mounted on an inner surface of the upper track, a back and forth controllable grip(16) connected integrally with the locker, a return spring elastically supporting a vertical movement of the locker and mounted on the inner surface of the upper track, and a rotating grip(20) mounted on a cut part of the back and forth controllable grip to prevent distortion deformation of the back and forth controllable grip.
Patent KR-20020056579-A (KR)
Title: Handsfree apparatus for vehicle
Inventor: NOH GYU SANG
IPC: H04B1/38
Filed: 2000-12-29
Abstract: PURPOSE: A hands-free apparatus for a vehicle is provided to possess a short-distance communication device to a mobile communication terminal and a car audio device of the vehicle, thereby realizing a hands-free function by the respective short-distance devices. CONSTITUTION: In the mobile communication terminal(10), a keypad(13) sets a short-distance communication mode. A microprocessor(26) converts an output path of transmission/reception voice signal according to the setting of the short-distance communication mode. A short-distance communication device(12) transmits and receives the transmission/reception voice signals according to the output path control of the microprocessor(26). In a car audio apparatus(50), a function setting unit(54) sets a short-distance communication mode. An audio control unit(68) controls an output path of transmission/reception voice signal according to the setting of the short-distance communication mode. A short-distance communication device(12) transmits and receives the transmission/reception voice signals according to the output path control of the audio control unit(68) for a short-distance communication with the short-distance communication device(12) of the mobile communication terminal(10).
Patent KR-20020056718-A (KR)
Title: Lcd attached protecting glass
Inventor: JUNG SEUNG U
IPC: G02F1/13
Filed: 2000-12-29
Abstract: PURPOSE: An LCD display integrated with a protection surface window is provided to form a hook at a case of an LCD module and assemble the LCD module and a set PCB through the hook. CONSTITUTION: A lower LCD panel includes a support panel(4), an LED back light(6) placed on the support panel, and a hook formed at one side of the LED back light. A hook(6a) is formed at one side of the LED back light. An LCD(8) is placed on the LED back light, and a side support panel(10) for supporting the LCD is attached to both sides of the LCD through a fastening member or a two-sided tape. An LCD glass(12) for protecting the front side of the LCD is attached onto the LCD and the side support panel using a two-sided tape. A case(14) is combined with the LCD panel through the hook.
Patent KR-20020057109-A (KR)
Title: A Box
Inventor: NA SANG UK
IPC: B65D5/48
Filed: 2000-12-30
Abstract: PURPOSE: A packing box is provided to save a cost of packing material and to simplify a work of packing by allowing a partition to be integrally formed at the same time with a cutting work of the box. CONSTITUTION: The packing box is comprised of a bottom surface supporting products; a body(42) forming a products receiving space(S) together with the bottom surface; and a partition extended from the one side of the body for sectionalizing the products receiving space of the body into four parts. The partition consists of a lower partition(62) extended from the body for dividing the lower part of the products receiving space; and an upper partition(64) having two cut portions cut from the lower partition to be molded at a right angle to the lower partition. The upper partition is supported by a support located between the two cut portions.
Patent KR-20010021808-A (KR)
Title: 잉크젯 인쇄 가능한 미공성 필름
IPC: B41M5/50
Filed: 1998-07-08
Abstract: 본 발명은 생생한 내구성 이미지를 생성시키는 착색된 잉크젯 잉크를 사용하기 위해 유체 제어 시스템 및 안료 제어 시스템을 모두 갖고 있는 잉크젯 잉크 수용체 매체에 관한 것이다. 상기 유체 제어 시스템은 필요한 경우 계면 활성제가 존재해 있는 미공성 매체에 의해 제공된다. 상기 안료 제어 시스템은 미공성 매체의 소공 내로 함침되는 불소 처리된 실리카 입자 또는 무기 다가 금속 염에 의해 제공된다. 또한, 본 발명은 이들 잉크젯 수용체 매체를 제조하는 방법 및 사용하는 방법을 개시하고 있다.
Patent KR-20010023175-A (KR)
IPC: A61K31/395
Filed: 1998-08-20
Abstract: Compounds of structural formula (I) where A is a lipophilic group including an aliphatic bridging group, B is a lipophilic group, D is a group having at least one amino or substituted amino group and R is hydrogen, alkyl or cycloalkyl, and pharmaceutically acceptable salts and individual isomers thereof, which have growth hormone releasing activity in humans or animals.
Patent KR-20010031836-A (KR)
Title: Topical compositions for prostaglandin E₁ delivery
IPC: A61K47/32
Filed: 1998-11-05
Abstract: A topical composition of a semi-solid consistency suitable is provided for transdermal application of prostaglandin E1. The composition comprises prostaglandin E1, a penetration enhancer, a polysaccharide gum, a lipophilic compound, and an acidic buffer system. The penetration enhancer is an alkyl-2-(N,N-disubstituted amino)-alkanoate ester, an (N,N-disubstituted amino)-alkanol alkanoate, or a mixture of these. The lipophilic compound may be an aliphatic C1 to C8 alcohol, an aliphatic C8 to C30 ester, or a mixture of these. The composition includes a buffer system capable of providing a buffered pH value for said composition in the range of about 3 to about 7.4.
Patent KR-20010024636-A (KR)
Title: 통합 지연 기능을 가진 공전 유압 오버헤드
IPC: F02M25/07
Filed: 1998-11-13
Abstract: 본 발명은 내연 기관용 밸브 작동 시스템에 관한 것이다.  밸브 작동 시스템은 흡입 캠에 따라 적어도 하나의 흡입 밸브를 작동시키는 흡입 밸브 작동 조립체를 포함한다.  밸브 작동 시스템은 주 배출 기능, 엔진 지연 기능 및 배기 재순환 기능 중 적어도 하나의 기능을 발생하기 위하여 적어도 하나의 배출 캠에 따라 적어도 하나의 배출 밸브를 작동시키는 배출 밸브 작동 조립체를 더 포함한다.  배출 작동 조립체는 두개의 모드를 작동시킬 수 있다.  제 1 작동 모드에서, 적어도 하나의 배출 밸브는 주 배출 이벤트를 발생하기 위하여 작동된다.  제 2 작동 모드에서, 적어도 하나의 배출 밸브는 주 배출 기능, 엔진 지연 기능 및 배기 재순환 기능 중 적어도 하나의 기능을 발생하기 위하여 작동된다.
Patent KR-20010032827-A (KR)
IPC: G11C13/02
Filed: 1998-12-04
Abstract: A programmable sub-surface aggregating metallization structure (100) includes an ion conductor (110) such as a chalcogenide glass which includes metal ions and at least two electrodes (120, 130) disposed at opposing surfaces of the ion conductor (110). Preferably, the ion conductor (110) includes a chalcogenide material with Group IB or Group IIB metals. One of the two electrodes (120,130) is preferably configured as a cathode and the other as an anode. When a voltage is applied between the anode and cathode, a metal dendrite (140) grows from the cathode through the ion conductor (110) toward the anode. The growth rate of the dendrite (140) may be stopped by removing the voltage or the dendrite (140) may be retracted back toward the cathode by reversing the voltage polarity at the anode and cathode. When a voltage is applied for a sufficient length of time, a continuous metal dendrite (140) grows through the ion conductor (110) and connects the electrodes (120,130), thereby shorting the device. The continuous metal dendrite (140) then can be broken by applying another voltage. The break in the metal dendrite (140) can be reclosed by applying yet another voltage. Changes in the length of the dendrite (140) or the presence of a break in the dendrite (140) affects the resistance, capacitance, and impedance of the programmable sub-surface aggregating metallization structure. <IMAGE>   <IMAGE>
Patent KR-20010033804-A (KR)
Title: 제초제로서 사용된 치환된 헤테로아릴메틸 화합물
IPC: A01N43/56
Filed: 1999-01-16
Abstract: 본 발명은 화학식(I)의 신규 치환된 헤테로아릴메틸 화합물, 그의 제조방법 및 제초제로서 그의 용도에 관한 것이다: 
     화학식 I 
     
       
     
     상기식에서, Q, X 1 , X 2 , Z 1 및 Z 2 는 상세한 설명에서 정의한 바와 같다.
Patent KR-20010040801-A (KR)
IPC: G11B7/09
Filed: 1999-11-29
Abstract: A device is described for optically scanning two types of record carrier (1; 25) with a radiation beam (15) having a high numerical aperture. The radiation beam is focused through a transparent layer (2; 26) of the record carrier on an information layer (3; 27) by means of an objective lens (10) and a plano-convex lens (11). The magnifying power of the plano-convex lens is equal to 1/n1, i.e. the inverse of the refractive index of the transparent layer (2). The gap between the plano-convex lens and the record carrier can be maintained at a fixed value when the scanning is changed between the first and the second record carrier.
Patent KR-20010041732-A (KR)
IPC: C09D11/00
Filed: 1999-03-25
Abstract: The invention relates to polyurethanes, inks comprising polyurethanes and their use in ink jet printing where the polyurethane comprises a colored water-dissipatable polyurethane obtainable from the reaction of a polyisocyanate, a compound providing water-dispersing groups and a colorant having at least two functional groups.</PTEXT>
Patent KR-20010052218-A (KR)
Title: 폐기물용열분해장치
IPC: C10B19/00
Filed: 2000-02-18
Abstract: 본 발명의 폐기물용열분해장치는, 폐기물을 가열하는 가열실과, 상기 폐기물을 상기 가열실내에 도입하는 도입구와, 상기 가열실내에 설치된 적어도 한 쌍의 전극과, 전압이 인가되면 방전을 생기도록 상기 전극사이에 개재된, 탄소를 주성분으로 하는 복수의 발광발열체용구체로 이루어지는 발광발열체와, 상기 폐기물이 열분해된 분해가스를 상기 가열실 밖으로 배출하는 배기구를 구비함과 동시에, 상기 가열실내를 무산소상태 또는 진공상태로 하는 무산소상태화수단 또는 감압수단을 구비하고 있고, 상기 발광발열체용구체가 무산소상태 하 또는 진공상태 하에 놓여져 있는 것을 특징으로 한다. 
     본 발명에 의하면, 거의 모든 폐기물을, 약 3000℃ 이상의 고온에 의해, 매진, 염화수소 등의 염소화합물, NOx 등의 질소화합물, 다이옥신 등과 같은 유해물질을 발생시키는 일없이 무해한 저분자량물질로 열분해한다, 염가인 폐기물용열분해장치를 제공할 수 있는 것이다.
Patent KR-20010042150-A (KR)
Title: 축류 팬
IPC: F04D29/66
Filed: 1999-03-18
Abstract: 본 발명에 따른 축류 팬(1)은 중심 허브(3)와, 기부(5) 및 단부(6)가 마련된 다수의 블레이드(4; 34)를 구비하고, 팬의 회전 평면 상에서의 그 투영이 포물선 절편에 의해 정의되는 볼록 에지(7; 37) 및 팬의 회전 평면 상에서의 그 투영이 원호에 의해 정의되는 오목 에지(8; 38)에 의해 경계를 이루게 된다.  블레이드(4)는 그 공기 역학적 프로파일(18)이 변동의 입방 법칙에 따라 블레이드(4)의 기부(5)로부터 단부(6) 쪽으로 가면서 반경의 함수로서 점차 일정하게 감소되는 블레이드 각(β)을 구비하는 섹션으로 이루어진다.
Patent KR-20010034726-A (KR)
Title: 전기 장치
IPC: H02K5/173
Filed: 1999-04-06
Abstract: 회전가능한 부품이 내장된 케이싱을 포함하는 전기 모터나 발전기에는 공기 지향 수단이 제공되며, 이러한 수단은 공기 흐름을 장치 외부의 위로 지향시키도록 구성된다.  상기 공기 지향 수단은 팬 하우징에 고정되거나 팬 하우징의 연장부인 카울의 형태를 취한다.
Patent KR-20010034868-A (KR)
Title: 신경원성 질환의 치료를 위한 약물의 제조에 사용되는아릴(또는 헤테로아릴) 아졸일카르비놀 유도체
IPC: A61P43/00
Filed: 1999-05-18
Abstract: 화학식 I 
     
       
     
     화학식 (I)의 아릴(또는 헤테로아릴) 유도체 또는 이의 생리학적으로 수용가능한 염은 사람을 비롯한 포유동물에서 상이한 작용, 예를 들면, 당뇨, 천식, 방광염, 치은염, 피부염, 관절염, 건선, 좌골과 요부 신경의 염증, 위장작용, 눈 염증에 존재하는 신경원성 염증의 치료에 유용한데, 여기서, R1은 수소원자 또는 저급 알킬기이고; R2는 디알킬아미노알킬 또는 아자헤테로고리형알킬 라디컬이고; Ar은 페닐 또는 티에닐 라디컬인데, 이것은 선택적으로 치환되고; Het는 1 내지 3개의 질소 원자를 보유한 5각형의 질소 헤테로고리형 방향족 고리인데, 이것은 선택적으로 치환된다.
Patent KR-20010043820-A (KR)
Title: 치밀하게 컴팩트된 고체약물스톡을 포함하는 약물전달시스템
IPC: A61K9/50
Filed: 1999-05-27
Abstract: 활성약제를 포함하는 등방성 고체상 구조를 본질적으로 갖는 치밀하게 컴팩트된 고체약물스톡을 포함하는 약물전달 시스템으로, 상기 스톡은 상기 활성 약제를 포함하는 흡입형 입자의 형성에 알맞으며, 상기 치밀하게 컴팩트된 고체 약물은 미립자 담체물질 - 특히 리포좀을 포함하는 - 과 결합된 활성 약제를 적어도 하나 포함한다.
Patent KR-20010052534-A (KR)
Title: 광중합성 치과용 조성물
IPC: C08G59/68
Filed: 1998-10-02
Abstract: 본 발명은 자유 라디칼 활성 작용기 및 양이온 활성 작용기를 포함하는 광중합성 조성물, 이러한 조성물의 중합 방법에 관한 것으로서, 여기서, 양이온 중합 반응의 개시는 성형성 겔의 형성과 경화된 고형물의 형성 사이의 시간을 연장시키도록 지연 조절 가능하다.
Patent KR-20010052757-A (KR)
Title: 부형 시트 및 그 제조 방법
IPC: B29C59/02
Filed: 2000-04-24
Abstract: 본 발명은 주조 수지 피막용의 부형 시트에 있어서, 그 요철 형상을 충실히 재현함과 동시에 생산성이 우수한 제조 방법의 제공을 과제로 한다. 상기 과제를 해결하기 위하여 본 발명은 시트(1)의 한 쪽 면에 요철 형상의 부형 모양의 이형성 수지층을 형성하는 부형 시트에 있어서, 상기 부형 모양의 평탄부가 30.0 ~ 1.5㎛Ra의 산술 평균 거칠기를 가진 미소 요철면을 가진 부형 시트를 제공한다.
Patent KR-20020057523-A (KR)
Title: A combustion device of fumes occurred from wastes incinerator
Inventor: KANG SEOK WEON
IPC: F23G7/06
Filed: 2001-01-05
Abstract: PURPOSE: A smoke burning apparatus is provided to completely burn harmful substances contained in smoke by forming the secondary combustion chamber at a center of the first combustion chamber and installing a smoke passage and a smoke feeding hole at a lower portion of the first combustion chamber. CONSTITUTION: The first and second combustion chambers(A,B) are formed by using refractory bricks. A column is mounted on a center of the first combustion chamber(A). The second combustion chamber is formed on the column. The diameter of the column is smaller than the diameter of the second combustion chamber(B). A hole is formed at a center of the first and second combustion chambers(A,B) and a smoke passage(4) is communicated with a cyclone(3). A burner(5) is provided at a lower portion of the first combustion chamber(A). A smoke feeding hole(7) is formed with a predetermined inclination so as to rotate smoke and heat within the first combustion chamber(A).
Patent KR-20020061051-A (KR)
Title: a sensor of antilock brake system for cars
Inventor: KIM SEONG GI
IPC: G01P3/487
Filed: 2001-01-12
Abstract: PURPOSE: An ABS(anti-lock brake system) sensor for use in an automobile is provided to protect components from an external and mechanical impact by installing each component of ABS sensor in a case mounted on an external wheel of bearing, as well as to install easily and to reduce a manufacturing cost without requiring a hole fabrication or a bracket used in a conventional external type ABS sensor. CONSTITUTION: An ABS sensor includes a magnet ring(14) inserted and mounted on a shaft(22) of a wheel shaft bearing of automobile, a magnet(12) alternately formed N and S poles and mounted on a circumference of the magnet ring(14), a case inserted and mounted on the external wheel of bearing with winding the shaft(22) of the bearing, a sensor(26) mounted in the case(30) so as to place adjacent the magnet(12) and a terminal(28) for serving as a signal output terminal of the sensor(26). The sensor extends from inside to outside with surrounding a molding material(34). In the ABS sensor, the magnet ring(14) and the magnet(12) start to rotate together if the shaft(22) of the bearing rotates with the rotation of the wheel shaft. In this case, the changes of the magnetic field induced by the magnet(12) is output to the sensor(26) installed adjacent thereto as a rotational speed signal.
Patent KR-20020063077-A (KR)
Title: A sink for water saving which is available for reusing in washing
Inventor: LIM HYEONG YEOP
IPC: E03C1/00
Filed: 2001-01-26
Abstract: PURPOSE: A water saving sink by recycling washing water is provided to reduce the amount of water used and to prevent environmental pollution. CONSTITUTION: The water saving sink by recycling washing water comprises the steps of: installing a storage tank(16) into a sink body(2) to discharge primary washing water to a waste-water pipe(8) and to filter/store secondary washing water for recycling; installing an upper plate having sinks(4,4a) partitioned into a primary washing room and a secondary washing room on the sink body(2); and connecting the sinks(4,4a) to the waste-water pipe(8) and the storage tank(16) respectively.
Patent KR-20010082146-A (KR)
Inventor: SCHANTZ CHRISTOPHER A
IPC: G01F23/26
Filed: 2001-02-13
Abstract: PURPOSE: A printer is provided, in which the level of fluid(ink) remaining in a fluid tank(ink tank) is detected. CONSTITUTION: A printer(54) includes an ink cartridge(10), and a processor(56) connected to various printer subsystems such as a paper motor drive(58) and a printer control panel(60). The printer is connected to a host computer through a communication port(62). The host computer sends, via the communications port, jobs for printing. The printer sends, via the communications port, various status messages including ink levels of cartridges within the printer. A printer includes a clock(64) for providing the sense signal to the cartridge. The sense signal from the clock is controlled by a switch(66). A logical AND gate is used as the switch. The other input to the switch(AND gate) is a control signal from the processor. Using the switch, the processor controls when the sense signal is applied to the cartridge. The sense signal is applied to a first electrode(16) when ink level measurements are being performed. The printer includes a filter circuit(40), which is connected to a second electrode(18) of the cartridge. An ADC(68) receives the filtered signal and converts it to a digital signal. The processor reads the digital value and converts it to ink level measurement.
Patent KR-20020066703-A (KR)
Title: Receiver circuit of code division multiple access mobile communication terminal
Inventor: KIM SE YEOL
IPC: H04B1/16
Filed: 2001-02-13
Abstract: PURPOSE: A receiving circuit for a CDMA(Code Division Multiple Access) mobile communication terminal is provided to improve the degradation of a single tone insensibility characteristic by increasing a consumption current of a low noise amplifier, if necessary to reduce the consumption of the current and optimizing the linearity of the low noise amplifier through the tuning of the impedance matching of an output terminal. CONSTITUTION: A switch unit(30) is switched by a control voltage provided from a control unit according to a receiving mode and a call mode for controlling a bias voltage of an input terminal of a low noise amplifier(20), adjusting a consumption current of the low noise amplifier(20), and determining an impedance value of an impedance matching unit(40). The impedance matching unit(40) matches an output impedance of the low noise amplifier(20) using the impedance value determined according to the switching of the switch unit(30).
Patent KR-20020068591-A (KR)
Title: Device for learning geometric characteristics of automotive suspension
Inventor: LEE EON GU
IPC: B60G3/00
Filed: 2001-02-21
Abstract: PURPOSE: A geometry character studying apparatus of a suspension device for vehicles is provided to enable a user to directly observe the variation of movement character of wheels while freely adjusting a mounting position and a length of each link of the suspension device. CONSTITUTION: The geometry character studying apparatus of a suspension device for a car is comprised of a car body device(100) to which a suspension of front wheels or rear wheels of the car is mounted; a wheel device(200) performing the function of the front wheels or the rear wheels of the car; a steering device(300) connected to the one side of the wheel device on the car body device; a strut device(400) composed of a shock absorber(401) and a suspension spring(403); and an arm device(500) composed of plural arms and links.
Patent KR-20020040529-A (KR)
Title: Polishing head of a chemical mechanical polishing machine and polishing method using the polishing head
Inventor: BOO JAE PIL
IPC: H01L21/304
Filed: 2001-03-03
Abstract: PURPOSE: A polishing head of a CMP(Chemical Mechanical Polishing) apparatus and a polishing method thereof are provided to minimize defects due to a stable fix of a wafer by directly adsorbing the wafer using vacuum state. CONSTITUTION: A CMP(Chemical Mechanical Polishing) apparatus comprises a polishing pad(112) mounted on a supporting part(114), a polishing head(130) for polishing a wafer located on the polishing pad(112) of the supporting part(114). The polishing head(130) further includes a bowl-shaped carrier(134), a retainer ring(140) located on the lower edge portion of the carrier(134), a supporter respectively providing a first chamber(160) and a second chamber(136), and a membrane. A plurality of first holes(156) connected to the first chamber(160) and second holes(158) connected to the second chamber(136) are formed on the surface of the supporter. The membrane includes a plurality of third holes(172) comparing to the first holes(156). At this point, the wafer is stably fixed.