baber/WOPTO huggingface dataset:
Patent KR-20180109911-A (KR)
Title: 기판 처리 장치 및 기판 처리 방법
Inventor: TAKAKI YASUHIRO
IPC: H01L21/67
Filed: 2017-01-20
Abstract: 실시형태에 따른 기판 처리 장치는 저류 탱크와, 기판 처리부와, 회수 경로와, 폐기 경로와, 공급 경로와, 전환부와, 전환 제어부를 구비한다. 회수 경로는 기판 처리부에 공급된 혼합액을 저류 탱크에 복귀시킨다. 폐기 경로는 공급된 혼합액을 저류 탱크 이외의 장소에 폐기한다. 전환부는 공급된 혼합액의 유입처를 회수 경로와 폐기 경로 사이에서 전환한다. 전환 제어부는 전환부를 제어하여, 기판 처리부에 의한 혼합액의 공급이 개시되고 나서 제1 시간이 경과하기까지의 동안, 공급된 혼합액을 폐기 경로에 유입시키고, 제1 시간의 경과 후로서 미리 결정된 회수율에 기초하여 결정되는 제2 시간이 경과하기까지의 동안, 공급된 혼합액을 회수 경로에 유입시키고, 제2 시간이 경과하고 나서 혼합액의 공급이 종료되기까지의 동안, 공급된 혼합액을 폐기 경로에 유입시킨다.
Patent KR-20180100441-A (KR)
Title: Nik 억제제로서 신규 치환된 시아노인돌린 유도체
Inventor: STANSFIELD IAN
IPC: A61P37/00
Filed: 2017-01-20
Abstract: 본 발명은 포유류에서의 치료 및/또는 예방에 유용한 하기 화학식 (I)의 약제, 및 특히 암, 염증성 장애, 대사 장애, 및 자가 면역 장애와 같은 질환을 치료하는데 유용한 NF-κB-유도 키나아제(NF-κB-inducing kinase)(NIK, MAP3K14로도 알려짐)의 억제제에 관한 것이다. 본 발명은 또한 암, 염증성 장애, 비만 및 당뇨병을 포함한 대사 장애, 및 자가 면역 장애와 같은 질환의 예방 또는 치료를 위한, 상기 화합물을 포함하는 약학 조성물, 및 상기 화합물 또는 약학 조성물의 용도에 관한 것이다. 
  화학식 (I)
Patent KR-20180122348-A (KR)
Title: 고체 전해질 및 고체 전해질의 제조 방법
Inventor: MAKINO TAKESHI
IPC: C03C10/16
Filed: 2017-03-14
Abstract: 이온 전도성이 높아, 전지 성능이 우수한 고체 전해질을, 예를 들면 건조 공정 등의 수분을 제거하는 공정을 거치지 않고서, 제조 프로세스를 간략화하여, 저비용화를 도모하면서 제공한다.  구체적으로는, 용매 중에서 황화 알칼리 금속과 소정의 물질을 반응시키는 황화물계 고체 전해질의 제조 방법을 제공한다.
Patent KR-20190003472-A (KR)
Title: 제초 농약 조성물 및 그것을 사용한 제초 방법
Inventor: YOKOYAMA Mori
IPC: A01N43/08
Filed: 2017-04-18
Abstract: HPPD 저해 작용을 가지는 제초 농약 조성물 및 그것을 사용한 제초 방법을 제공한다.  4-히드록시페닐피르빈산디옥시게나제(HPPD) 저해 작용을 가지는 제초 활성 성분과, 인의 옥소산 혹은 그 농업상 허용되는 염으로 이루어지는 무기 인 화합물을 함유하는 제초 농약 조성물.
Patent KR-20190005839-A (KR)
Title: 산화질소의 전기 플라즈마 합성을 위한 전달 시스템 및 방법
Inventor: ZAPOL WARREN
IPC: A61M16/10
Filed: 2017-03-27
Abstract: 본 발명은 산화질소의 전기 플라즈마 합성을 위한 시스템 및 방법을 제공한다. 특히, 본 발명은 케어 포인트에서 치료용 NO 가스의 제어 가능한 출력을 발생하도록 구성된 산화질소(NO) 발생 시스템을 제공한다.
Patent KR-20180121789-A (KR)
Title: 마이크로캡슐화된 핵 연료의 인성 증진
Inventor: VENNERI FRANCESCO
IPC: G21C3/04
Filed: 2017-03-29
Abstract: 마이크로캡슐화된 연료 입자는, 핵분열 생성물 방출에 대한 다중 장벽을 채용함으로써, 고온 가스 냉각 원자로에서 안전성을 증진시킨다.  마이크로캡슐화된 연료 입자는 또한, 다른 원자로 플랫폼에서 동일하게 할 잠재력을 갖는다.  본 개시내용은, 방사성핵종을 보유함으로써 원자로에서 안전성을 더 증진시키는 마이크로캡슐화된 연료 입자의 능력을 증진시키기 위한 방법을 제공한다.  구체적으로, 연료 커널, 완충 흑연 탄소 층, 내부 열분해 탄소 층, 다층 압력 용기, 및 외부 열분해 탄소 층을 포함하는 핵 연료 입자가 개시된다.  다층 압력 용기는 탄화규소와 열분해 탄소의 교번하는 층을 포함한다.
Patent KR-20180130534-A (KR)
Title: 암을 표적하는 키메라 항원 수용체
Inventor: CHAUDHARY PREET M
IPC: C12N15/86
Filed: 2017-03-29
Abstract: K13-vFLIP, MC159-vFLIP, cFLIP-L, cFLIP-p22, HTLV1-Tax 및 HTLV2-Tax로부터 선택된 하나 이상의 신호전달 단백질 및 키메라 항원 수용체 (CAR)을 인코딩하는 핵산을 포함하는, 세포를 포함하는, 조성물이 본 명세서에서 제공되고, 여기서 상기 CAR은 a) 세포외 항원 특이적 도메인, b) 막관통 도메인 및 c) 면역수용체 티로신-기반 활성화 모티프 (ITAM)을 포함하는 세포내 신호전달 도메인을 포함하고; 여기서 c)는 키메라 수용체의 C-말단에 위치한다. 일부 구현예에서, CAR은 하나 이상의 공-자극 도메인을 추가로 포함한다. 본 명세서에서 기재된 조성물을 사용하는 질환의 치료 방법이 또한 본 명세서에서 제공된다.
Patent KR-20190002571-A (KR)
Title: 반도체 스위치 보호 방법, 반도체 스위치용 보호 장치, 및 반도체 스위치용 제어 회로
Inventor: RICHTER TOBIAS
IPC: H03K17/082
Filed: 2017-03-09
Abstract: 본 발명은 비활성화 과정 동안 과전압으로부터 반도체 스위치의 보호에 관한 것이다.  반도체 스위치의 출력단에서의 전압이 기설정 한계값을 초과하고, 이와 동시에 반도체 스위치용 드라이버 단의 입력단에서 반도체 스위치의 개방을 위한 요청이 검출되면, 비활성화될 반도체 스위치용 드라이버 단의 입력단에 보상 신호가 공급된다.  이 경우, 상기 보상 신호는 기설정 기간으로 제한된다.  이렇게 공급된 보상 신호를 기반으로 반도체 스위치용 드라이버 단은, 반도체 스위치의 과도하게 빠른 개방을 방지하기 위해 반도체 스위치를 부분적으로 제어한다.
Patent KR-20190015265-A (KR)
Title: 제어되는 약물 기화를 위한 방법 및 장치
Inventor: RABINOWITZ JOSHUA
IPC: A61M11/04
Filed: 2017-04-27
Abstract: 본 발명은, 기화를 통해 약제를 전달하기 위한 전자 흡입기에 관한 것이다.
Patent KR-20190013826-A (KR)
Title: 조절가능한 의류 장치
Inventor: POLIDAN JOHN
IPC: A41B9/00
Filed: 2017-05-18
Abstract: 본 발명은 의류 장치 및 방법을 제공한다. 의류 장치는 두개의 다리 패널, 후방 패널(rear panel), 중앙 패널, 및 플라이 패널(fly panel)를 포함하고, 각각의 패널들은 직물 재료(fabric material)로 구성되고, 후방 패널, 중앙 패널, 및 플라이 패널은 두개의 다리 패널 사이에 연결되고, 플라이 패널의 하부 단부는 중앙 패널의 중심선까지 실질적으로 연장된다. 플라이 패널의 솔기(seam)를 따라 적어도 하나의 도관(conduit)이 위치되고, 솔기는 적어도 플라이 패널과 두개의 다리 패널 사이, 그리고 플라이 패널과 중앙 패널 사이에 형성된다. 끈은 적어도 긴장 상태(tensioned state)와 완화 상태(untensioned state) 사이에서 이동가능하고 적어도 하나의 도관 내에 위치된다.
Patent KR-20190006558-A (KR)
Title: 가압 용기로부터 헬륨을 제거하기 위한 방법 및 제거 장치
Inventor: ALEKSEEV ALEXANDER
IPC: F17C5/04
Filed: 2017-05-18
Abstract: 본 발명은 가압 용기(100)로부터 헬륨을 제거하기 위한 방법에 관한 것으로, 초임계 헬륨(111)이 가압 용기로부터 제거되고, 제거된 초임계 헬륨(112)이 냉각 장치(210)에 의해 능동적으로 냉각되고 그리고/또는 주울-톰슨 팽창부(220)에 의해 수동적으로 냉각되며, 이에 의해 적어도 부분적으로 액체 헬륨(113)을 형성한다.
Patent KR-20190003794-A (KR)
Title: 박테리아 균주를 포함하는 조성물
Inventor: BERNALIER DONADILLE ANNICK
IPC: A61K9/19
Filed: 2017-07-13
Abstract: 본 발명은 설사 및/또는 변비를 치료 또는 예방하기 위한 1종 이상의 박테리아 균주를 포함하는 조성물을 제공한다.
Patent KR-20200086481-A (KR)
Inventor: LIM SOO CHANG
IPC: E04H3/26
Filed: 2019-01-09
Abstract: The present invention relates to a multifunctional height-adjustable stage apparatus which is able to solve the problem of safety due to the a temporary structure, which is to keep the horizontality of the floor of a stage to install the stage, and the ground surface, which are not balanced, to consider the issue that the stage collapses when the balance of power is destroyed when a lot of force is generated at one point because of difference in height on the conventional temporary stage materials attached in the shape of ′H,′ to disperse the force generated in the stage by adjusting the height by separate structures despite differences in height, to increase stability, to solve the problem of the conventional temporary stage materials wherein an X-shaped brace is used for supporting the stage and preventing the temporary stage materials from shaking, the temporary stage materials are fixed on a clip and the distance and shaking are suppressed, but the distance and the thin brace′s low strength allow much shaking and distance. According to the present invention, the multifunctional height-adjustable stage apparatus is able to remove the shaking without any distance generated by separately manufacturing an upper horizontal connection supporter for fixing pillars with each other for the temporary stage materials. In addition, the present invention is able to easily control the height of the stage at an upper side, lower side, and middle part, and to install even a low stage just by using the upper horizontal connection support and the stage support pin without needing any additional temporary stage materials. In addition, when a user wants to raise the height of the stage, the stage can be elevated by connecting the connection height apparatus.
Patent KR-20200088572-A (KR)
Inventor: KIM JANG TAE
IPC: A47C7/38
Filed: 2019-01-15
Abstract: The present invention relates to a headrest for a chair including a front displacement adjustment means (10) provided on the upper end of a support unit (1) mounted on the upper end of a backrest unit of a chair to adjust the distance of a headrest unit (2), on which a user can lean the head, to the front of the head side. The front displacement adjustment means (10) includes: a connection part (11) of which one end is connected to a hinge unit (21) provided on the back side of the headrest unit (2); a movable stopping unit (12) fixed on the other end of the connection part to move in accordance with a movement of the connection part for front displacement adjustment; and a fixing coupling member (15) mounted on the upper end of the support unit (1) and meshed with the movable stopping unit (12) fixed on the other end of the connection part (11) to fix the position of the movable stopping unit (12). The headrest unit is mounted on the support unit mounted on the upper end of the backrest of the chair to adjust the distance to the front to conveniently adjust the distance of the headrest unit with respect to the head in accordance with a body condition of the user to improve user convenience and comfort. The headrest can be coupled with conventional headrest height adjustment means and angle adjustment means to be easily built to improve marketability and reduce manufacturing costs.
Patent KR-20190088918-A (KR)
Title: Composite of aerogels and hydrogels carrying active material
Inventor: KIM TAE WON
IPC: C01B33/159
Filed: 2019-01-21
Abstract: Provided are aerogel containing an active material and a composite of hydrogel and the same. A method for manufacturing the composite of the present invention comprises the steps of: manufacturing a plurality of aerogel particles containing an active material inside a pore; preparing a polymer solution by dissolving a polymer in an aqueous solvent; mixing the aerogel particles with the polymer solution, and performing homogenization to prepare an aerogel/polymer dispersion solution; and mixing the dispersion solution with a cross-linking solution to prepare an aerogel/hydrogel composite carrier. According to the present invention, a hydrogel composite, where a plurality of aerogel particles are dispersed within a hydrogel, is prepared to provide a composite carrier which can contain both oil and water at the same time without a surfactant. Furthermore, a composite carrier with improved properties such as low density, high strength, high ingredient content, stable detachment and the like can be prepared.
Patent KR-20190009825-A (KR)
Inventor: YUN SEOK GU
IPC: G06F21/62
Filed: 2019-01-22
Abstract: Disclosed is a method for operating an application. The method comprises the following steps. A security module of a first application executed in a first terminal determines whether the security module is forged or falsified and determines whether the first application is forged or falsified by determining whether a main module of the first application is forged or falsified when the security module is not forged or falsified. Then, the security module of the first application determining whether the security module is forged or falsified determines whether a first OS executed in the first terminal is forged or falsified when the first application is not forged or falsified as a result of the determination.
Patent KR-20200092076-A (KR)
Title: Film cutting apparatus for furniture panel
Inventor: YUN JEUNG HAN
IPC: B26D7/06
Filed: 2019-01-24
Abstract: The present invention relates to a film cutting apparatus for a furniture panel, which is capable of automatically cutting a connected film during the process of joining a film to a furniture panel, quickly and neatly cutting a surface through the automation of a film cutting procedure, and considerably reducing manufacturing costs without a loss of manpower. The apparatus comprises: a conveyor system including a roller (14) mounted between both frames (10, 12) placed in parallel with each other; transverse slides (20) including a pressing plate (60) fixing an inserted panel while vertically moving by a cylinder; a longitudinal slide (30) moving the transverse slides (20) linearly as a cylinder (27) and a transverse guide rod (25) are installed in a longitudinal direction of the both frames, and including a cutting means mounted thereon, which comprises a cutting blade (50) installed between the transverse slides (20) and rotated by a motor; a vertical direction moving means moving the longitudinal slide (30) linearly as a sprocket (42) is installed on the both transverse slides and the longitudinal slide (30) is fixed to a chain (40) mounted therein; and a film supply device supplying a film to an upper side of a panel as the panel is inserted from one side of an upper part of the roller.
Patent KR-20200029971-A (KR)
Title: Facial mask
Inventor: CHOE GYEONG SU
IPC: A62B18/08
Filed: 2019-02-15
Abstract: The present invention provides a face mask which comprises a mask body having at least one air inlet; an air purification unit for supplying purified air; a connection pipe connecting the air purification unit and the air inlet; and a connection pipe detachable unit for connecting the connection pipe and the air inlet to be magnetically attachable and detachable.
Patent KR-20200101707-A (KR)
Inventor: MOON YONG HO
IPC: B64C13/04
Filed: 2019-02-20
Abstract: The present invention relates to an apparatus for reproducing simulation training control force for both an aircraft and a ship, which can perform control training in different environments of an aircraft and a ship with one simulator through parallel control, and also enables a trainee to feel control force similar to actual control force by reproducing, with a motor and a control module, control force felt by a dynamic relationship according to the operation of an actual control apparatus. The present invention provides an effect of simultaneously performing simulation control training of an aircraft and a ship in one simulator by storing, in a load cell (330), a detailed adjustment resistance value corresponding to a training situation for controlling an aircraft in the air or a training situation for controlling a ship on the water, and changing a resistance value of the load cell (330) according to a training situation.
Patent KR-20200104531-A (KR)
Title: Water resist increasing built-up PC concrete culvert box and waterway and underground duct using it
Inventor: LEE SEUNG JAE
IPC: E02D31/02
Filed: 2019-02-27
Abstract: The present invention provides a prefabricated PC culvert box with increased waterproofing and a construction method of a waterway and an underground common duct using the same which prevent a sealant from coming in contact with leakage water to increase waterproofing, and couple neighboring culvert boxes even if the front and rear installation positions of culvert boxes are changed regardless of the change to facilitate construction, and improve shear resistance by coupling power between a coupling protrusion and a coupling groove. According to a proper embodiment of the present invention, the construction method of a waterway and an underground common duct using a prefabricated PC culvert box with increased waterproofing comprises: a step of preparing a plurality of culvert boxes made of reinforced concrete to have one or more hollow spaces formed through the center thereof in a longitudinal direction and form a rectangular cross section, and provided with a valley for filling a sealant having a prescribed width and depth and being formed on the rectangular surface of both ends thereof along the edge thereof to be manufactured in advance; a step of sequentially positioning the plurality of culvert boxes close to each other in one row, and attaching water-swelling water stop members to the upper and lower ends of the valley for filling a sealant in two rows; a step of tensioning a steel wire inserted into the plurality of culvert boxes to tightly attach neighboring culvert boxes while the water-swelling water stop members are arranged therebetween; and a step of filling a sealant at high pressure in a closed space of the valleys for filling a sealant facing each other after installing the water-swelling water stop members.
Patent KR-20200104682-A (KR)
Inventor: JANG JAE CHEOL
IPC: H01M10/6566
Filed: 2019-02-27
Abstract: The present invention relates to a support bar integrated inlet duct and a battery cell module assembly using the same. More specifically, the present invention provides a support bar integrated inlet. In a cooling air inlet duct for cooling a battery cell module, the support bar integrated inlet duct comprises: a cooling air inlet formed at an upper side; a bent side portion extending from the cooling air inlet; and an integrated support bar formed integrally with the side portion and extending along the length direction of the side portion to be closely fixed along the edge portion of the battery cell module. Since there is no need to insert an additional fixing bracket or an auxiliary support bar between the support bar integrated inlet duct and the battery cell module, an assembly process is simplified and the manufacturing cost is reduced.
Patent KR-20200107603-A (KR)
Title: Bulletproof panel
Inventor: LEE JAE SIK
IPC: B32B7/12
Filed: 2019-03-08
Abstract: The present invention relates to a bulletproof panel, capable of replacing glass of vehicles, elevators, visiting place, ticket office and the like, and more specifically, a bulletproof panel consisting of a base layer, reinforcement layers formed on both surfaces of the base layer, and adhesive layers laminated between the base layer and the reinforcement layers and made of ultraviolet-curable urethane resin. The bulletproof panel reduces rotating force of a bullet while the base layer is damaged, and prevents the base layer from being damaged and scattered by forming the reinforcement layers on both surfaces of the base layer. Therefore, a bullet cannot penetrate the base layer and is fixed to the inside of the base layer, thereby not only exhibiting excellent bulletproof effect, but also preventing fragments generated by a bullet from being scattered to the outside.
Patent KR-20190111765-A (KR)
Inventor: KWON SUN HYOUNG
IPC: H04L1/00
Filed: 2019-03-08
Abstract: Disclosed are a transmitter identification (TxID) signal analyzing apparatus and a method using the same. According to an embodiment of the present invention, the transmission identifier signal analyzing apparatus comprises: a demodulator for decoding a bootstrap corresponding to a reception signal; a cancelation unit configured to generate a canceled reception signal by performing a host signal cancellation process on the reception signal; a correlator for calculating a correlation value between a signal corresponding to the canceled reception signal and a sequence corresponding to a TxID signal; and a TxID profile analyzer for generating channel information between a transmitter and a receiver corresponding to the TxID signal using the correlation value.
Patent KR-20200118647-A (KR)
Inventor: CHO KYOUNGMIN
IPC: G02B5/30
Filed: 2019-04-08
Abstract: Provided are a polarizing plate having a polarizer and a pattern layer formed on one surface of the polarizer and an optical displaying device including the same. The pattern layer includes a first resin layer and a second resin layer opposite to the first resin layer. The first resin layer has a pattern portion having two or more embossed optical patterns in at least one part facing the second resin layer and a flat portion between an embossed optical pattern and an immediately adjacent embossed optical pattern. Each of the embossed optical patterns has an upper surface of a wave pattern, and the wave pattern has a value of Equation 1 of 20% to 60%. The provided polarizing plate has the wave pattern having a period of more than 100 μm and less than 400 μm. The polarizing plate prevents moiré from being visually recognized when applied to a large area optical display device.
Patent KR-20200120055-A (KR)
Inventor: GIM JIN CHEOL
IPC: A61B6/03
Filed: 2019-04-11
Abstract: The present invention provides a device for separating a gum area from an oral scan image. The device comprises: a preprocessing unit lowering the mesh resolution of an oral scan image to the reference resolution; a start line detection unit detecting a start line corresponding to the bottom of the gum area in the preprocessed oral scan image; a boundary line detection unit detecting a boundary line between a tooth area and a gum area in the preprocessed oral scan image; and an area separation unit separating the gum area from the oral scan image using the start line and the boundary line.
Patent KR-20200121168-A (KR)
Inventor: KIM KYOUNG NAM
IPC: G01D11/16
Filed: 2019-04-15
Abstract: Disclosed is a displacement measuring apparatus. The displacement measuring apparatus according to an exemplary embodiment of the present invention comprises: a first base installed at a first position of a member for measuring displacement; a second base installed at a second position of the member for measuring the displacement; a first arm member rotationally coupled to the first base; a second arm member wherein one side is rotationally coupled to the second base and the other side is rotationally coupled to the first arm member; and a displacement measurement sensor unit which measures the displacement of a predetermined position when the predetermined position between the first position and the second position is changed because stress is applied to the member which is installed on one of the first arm member and the second arm member to measure the displacement.
Patent KR-20200122191-A (KR)
Title: Nano-based carbon monoxide delivery system and use thereof
Inventor: HAN IN BO
IPC: A61P25/00
Filed: 2019-04-17
Abstract: The present invention relates to a nanocarrier for carbon monoxide delivery and uses thereof. The nanocarrier according to an aspect comprises a carbon monoxide-releasing molecule and a lipid molecule, and has a long half-life, so that carbon monoxide can be released at a safe concentration at a target site for a long time. In addition, the nanocarrier has excellent biosensitivity and biocompatibility, thereby being able to be usefully used for treating neurological diseases.
Patent KR-20200124520-A (KR)
Title: Buffer structure of guardrail
Inventor: SHIM HYEON SEONG
IPC: E01F15/14
Filed: 2019-04-24
Abstract: The present invention relates to a buffer structure for a guardrail, which absorbs direct kinetic energy transferred from the guardrail to protect the guardrail by shock absorption. According to the present invention, the buffer structure for a guardrail comprises: a plurality of poles (100) fixed on the ground, spaced apart at predetermined intervals, and having a cap (101) formed on an upper part; a plurality of guardrails (200) installed on the front surface of the plurality of poles (100) to cross the plurality of poles (100) and installed to be spaced apart from the upper and lower parts of the plurality of poles (100); and a plurality of separation prevention brackets (300) installed between the plurality of guardrails (200) and spaced apart from each other at predetermined intervals.
Patent KR-20200126826-A (KR)
Inventor: KANAMORI KOHJI
IPC: H01L27/11582
Filed: 2019-04-30
Abstract: According to some embodiments of the present invention, a semiconductor memory device with the improved reliability comprises: first to third semiconductor layers sequentially stacked; a plurality of gate electrodes spaced apart from each other in a first direction perpendicular to an upper surface of the third semiconductor layer on the third semiconductor layer; and channels structures surrounded by the first to third semiconductor layers and the plurality of gate electrodes and including a gate insulating film, a channel layer, and a buried insulating layer. The gate insulating layer includes a tunnel insulating layer disposed adjacent to the channel layer, a charge blocking layer disposed adjacent to the gate electrodes, and a charge storage layer interposed between the tunnel insulating layer and the charge blocking layer. The charge blocking layer includes an upper cover protruding in an outward direction of the channel structure.
Patent KR-20200130608-A (KR)
Inventor: WOO HYUCK CHOI
IPC: A41D1/06
Filed: 2019-05-10
Abstract: An objective of the present invention is to provide leggings using low-frequency waves, in which a pad is closely attached to the skin of a user′s lower body to prevent a gap, such that massage is performed to mitigate pains in the lower body without a burning phenomenon between the pad and the lower body while low-frequency waves are generated by a low-frequency stimulation apparatus. To achieve this, according to the present invention, the leggings using low-frequency waves comprise leggings and a plurality of conductive pads installed on each of a plurality of areas of the leggings.
Patent KR-20200130993-A (KR)
Inventor: Jong bae kim
IPC: H01L21/67
Filed: 2019-05-13
Abstract: The present invention relates to a system and a method for treating a surface of a semiconductor. According to an embodiment of the present invention, the system, which treats a surface of each semiconductor device through laser scanning by one line for a wafer having a plurality of semiconductor devices, comprises: a light source unit for outputting a laser; an optical system for guiding the laser to a wafer; and a variable mask having a beam penetrating surface and a beam blocking surface for the laser and adjusting a size and a shape of a beam cross-sectional shape of the laser irradiated on the wafer by adjusting a size of the beam penetrating surface. According to the present invention, a size and a shape of a laser beam can be adjusted.