baber/WOPTO huggingface dataset:
Patent KR-20050074537-A (KR)
Title: Selecting advertisement on a set top box in a television network
Inventor: BOUILLOUX LAFONT HELENE
IPC: H04N21/25
Filed: 2003-11-04
Abstract: A method for selecting advertisement in a Set Top Box (STB) of a television network comprises receiving advertisement selection information for one or a plurality of advertisement associations. Each advertisement association associates an advertisement space with an advertisement. The advertisement selection information corresponds for each advertisement association to a value of probability for selecting the advertisement for the advertisement space. A selection of an advertisement for a determined advertisement space is triggered and a random value or a pseudo-random value generated. An advertisement is selected using the random value or the pseudo-random value, by selecting a determined advertisement association that associates an advertisement with the determined advertisement space and for which the corresponding advertisement selection information has a value of probability that relates to the random value or the pseudo- random value. The advertisement associated in the determined advertisement association is used.
Patent KR-20050084042-A (KR)
Title: Carbonylation of vinyl acetate
Inventor: EASTHAM GRAHAM RONALD
IPC: C07C67/38
Filed: 2003-10-31
Abstract: The present invention relates to the carbonylation of an ester, specifically vinyl acetate. The process comprises the carbonylation of vinyl acetate comprising reacting vinyl acetate with carbon monoxide in the presence of a source of hydroxyl groups and of a catalyst system, the catalyst system obtainable by combining: (c) a metal of Group VIII B or a compound thereof: and (d) a bidentate phosphine of general formula (I). A process for the production of a lactate ester or acid of formula (II), comprising the steps of carbonylating vinyl acetate with carbon monoxide in the presence of a source of hydroxyl groups and of a catalyst system is also described. A process for the production of 3-hydroxy propanoate ester or acid of formula (III) comprising the steps of: carbonylating vinyl acetate with carbon monoxide in the presence of a source of hydroxyl groups and of a catalyst system also forms an aspect of the invention.
Patent KR-20050109947-A (KR)
Title: Pointer lighting device
Inventor: OBATA MASATO
IPC: G01D13/28
Filed: 2003-12-19
Abstract: A pointer lighting device which can improve a light introduction efficiency to an indicating unit, and is bright and small in lighting non-uniformity, and which comprises a pointer (7) having a translucent indicating member (indicating unit) (72) and a light introducing member (light introduction unit) (73), and being operated around and by the drive shaft (1) of a drive device (2), and a light source (L) disposed around the drive shaft (1), for allowing the indicating member (72) to emit light via the light introducing member (73), wherein the light introducing member (73) has a light receiving surface (73a) for receiving a light from the light source (L), a first reflection surface (73b) for condensing a light introduced from the light receiving surface (73a) toward the rotation axis (Va) position of the drive shaft (1), a second reflection surface (73c) formed between this first reflection surface (73b) and the rotation axis, for reflecting a light from the first reflection surface (73b) in a direction along the rotation axis (Va), and a third reflection surface (73d) formed on the rotation axis (Va) so as to face the second reflection surface (73c), for reflecting a light from the second reflection surface (73c) in the longitudinal direction of the indicating member (72).
Patent KR-20050107496-A (KR)
Title: Residue recycle-high ethane recovery process
Inventor: PATEL SANJIV N
IPC: C10L3/10
Filed: 2004-03-03
Abstract: A process and apparatus to increase the recovery of ethane, propane, and heavier compounds from a hydrocarbon gas stream is provided. The process can be configured to recover ethane and heavier compounds or propane and heavier compounds, depending upon the market conditions. The process utilizes an additional reflux stream to the absorber column that is lean in ethane and propane compared to the deethanizer overhead. The additional reflux stream is taken as a side stream of the residue gas stream that is cooled, condensed, and then fed at the top of the absorber to enhanced C3+ recovery. The additional lean reflux stream can also be taken as a side stream of the first vapor stream from the cold separator.
Patent KR-20050111385-A (KR)
Title: Process for preparing dithioesters
Inventor: BOLLINGER MARTIN JOSEPH
IPC: C07C327/36
Filed: 2004-03-02
Abstract: The present invention relates to a process for preparing dithioesters in which a dithiocarboxylic acid and/or a dithiocarboxylic salt is reacted with a vinyl compound and/or an alkyl compound which includes a leaving group, the reaction being carried out in a biphasic system in which one of the phases comprises water and the weight ratio of the aqueous phase to the organic phase lies in the range from 95:5 to 5:95.
Patent KR-20060002847-A (KR)
Title: Electrical connector having connector position assurance member
Inventor: SEMINARA PHILLIP G
IPC: H01R13/627
Filed: 2004-03-08
Abstract: An electrical connector including a housing, electrical contacts and a connector position assurance (CPA) member. The housing has deflectable cantilevered mating connector latch arms. The latch arms are movable between a latched position and an unlatched position. The CPA member is movably mounted to the housing between an open position and a closed position. The CPA member includes a first section and a deflectable second section. The second section includes a cam surface for contacting a housing of the mating electrical connector and being deflected as the CPA member is moved from the open position to the closed position and an interference portion adapted to contact the latch arms when the latch arms are not in their latched position such that the CPA member is blocked from reaching the closed position unless the latch arms are in their latched positions.
Patent KR-20060009918-A (KR)
Title: Disk-body sorter
Inventor: YAMAGISHI RYOJI
IPC: G07F1/04
Filed: 2004-05-11
Abstract: Disk body thickness- restricting means (30) is provided in a disk body-guiding path (5) for transferring a disk body, dropped in from a disk-body drop opening (2), in an inclined direction. The disk body thickness-restricting means (30) comes into contact with the dropped disk body and changes its position depending on the thickness of the disk body in the contact, restricting the thickness of the disk body dropped in.
Patent KR-20060059911-A (KR)
Title: Composite refractory metal carbide coating on a substrate and method for making thereof
Inventor: SANE AJIT
IPC: C23C16/458
Filed: 2004-06-25
Abstract: A composite coating for use on semi- conductor processing components, comprising a refractory metal carbide coating with its surface modified by at least one of: a) a carbon donor source for a stabilized stoichiometry, and b) a layer of nitride, carbonitride or oxynitride of elements selected from a group B, Al, Si, refractory metals, transition metals, rare earth metals which may or may not contain electrically conducting pattern, and wherein the metal carbide is selected from the group consisting of silicon carbide, tantalum carbide, titanium carbide, tungsten carbide, silicon oxycarbide, zirconium carbide, hafnium carbide, lanthanum carbide, vanadium carbide, niobium carbide, magnesium carbide, chromium carbide, molybdenum carbide, beryllium carbide and mixtures thereof. The composite coating is characterized as having an improved corrosion resistance property and little emissivity sensitivity to wavelengths used in optical pyrometry under the normal semi-conductor processing environments.
Patent KR-20060008340-A (KR)
Inventor: OZEKI SHINICHI
IPC: F16F9/096
Filed: 2006-01-06
Abstract: 본 발명은 서스펜션장치로서 사용된 보조 실린더를 구비한 유압식 완충기를 갖는 이륜차에서의 리어 쿠션 설치 구조를 제공한다.  리어 스윙 아암은 한 쌍의 좌우 아암부를 포함하고, 각 전부는 제1 크로스멤버와 제2 크로스멤버에 연결된다.  한 쌍의 쿠션 브라켓은 그 사이에 개재되는 리어 쿠션의 상부와 전후방향으로 연장한다.  쿠션 브라켓의 전후 단부는 제1 및 제2 크로스멤버에 연결되므로, 양단에서 쿠션 브라켓을 지지한다.  리어 쿠션의 상부가 제1 및 제2 크로스멤버와, 좌우 쿠션 브라켓에 의해 에워싸인 공간 내에 고정되며, 좌우 쿠션 브라켓의 중간부에 연결된다.
Patent KR-20070076986-A (KR)
Title: Cooling fan driving device having means for sensing trouble of cooling fan and method for sensing trouble of cooling fan
Inventor: HEO IN WOOK
IPC: H02H7/085
Filed: 2006-01-21
Abstract: A cooling fan driving apparatus having a device for sensing a trouble of a cooling fan and a method for sensing a trouble of a cooling fan are provided to rapidly repair the cooling fan by checking a trouble signal of the cooling fan on a screen. A current detection unit(5) detects a motor current value applied to a cooling fan driving motor(1). A microcomputer(7) compares the motor current value with a reference current value in order to output a cooling fan trouble signal to a screen(9) when the motor current value exceeds the reference current value. A method for sensing the trouble of the cooling fan includes a process for outputting the cooling fan trouble signal to the screen when the motor current value exceeds the reference current value.
Patent KR-20070028204-A (KR)
Title: Plasma processing apparatus and method
Inventor: IWAKOSHI TAKEHISA
IPC: H01L21/3065
Filed: 2006-01-27
Abstract: A plasma processing apparatus and method are provided to detect previously the generation of a processing failure and to predict exactly the result of processing without the use of a dummy wafer by using a control unit. A plasma processing apparatus includes a process chamber(250) for performing a plasma treatment, a plasma state detecting unit for detecting a plasma state in the process chamber, an input unit for inputting predetermined data on sample processing results, and a control unit. The control unit(265) includes a formula generating part capable of generating a predetermined formula by comparing the information supplied from the plasma state detecting unit and the input unit.
Patent KR-20060017909-A (KR)
Inventor: KIM JEONG WOOK
IPC: A45D44/10
Filed: 2006-02-06
Abstract: 본 발명은 이미용실용 모발 세척대에 관한 것으로, 상부에 매트리스(mattress)가 배치된 침대프레임; 상기 침대프레임의 하부에 마련되고, 그 후단이 하수구로 연결되는 신축식 배수관; 상기 침대프레임의 하부에 마련되고, 그 후단이 상수도에 연결되어 냉수를 공급할 수 있는 냉수관; 상기 침대프레임의 하부에 마련되고, 그 후단이 온수 공급 배관에 연결되어 온수를 공급할 수 있는 온수관; 및 상기 냉수관 및 온수관에 연결되는 수도꼭지 및 샤워기와, 세발시 낙수를 받아낼 수 있는 수조와, 출구가 상기 배수관의 선단에 연결되어 상기 수조의 물을 배출하는 배수구가 마련되고, 상기 매트리스 하부에 인출가능하게 수납되는 세발용구함(washbowl);을 포함하여 구성됨을 특징으로 하고, 본 발명에 의하면, 고객이 편안한 자세로 누워서 세발을 할 수 있고, 미용사도 의자에 앉아서 고객의 머리를 감길 수 있을 뿐만 아니라, 세발을 하지 않을 경우 맛사지용 침대로 전용하여 사용 할 수 있는 장점이 있다. 
       
     이미용실, 모발, 세척
Patent KR-20060090767-A (KR)
Inventor: MAGAI ISTVAN
IPC: G01R31/02
Filed: 2006-02-09
Abstract: 적어도 하나의 전기적 접합부 또는 접촉부를 갖는 전기 회로를 한정하는 방법이 개시된다.  무결함 전기 회로의 열 전기 전압 대 시간의 참조 함수가 제공된다.  그 다음에, 한정될 전기 회로는 적어도 하나의 측정 전기 임펄스에 의해 가열된다.  다음 단계는 전기 회로의 열 전기 전압 대 시간 데이터를 획득하는 것이다.  후속의 단계는 획득된 열 전기 전압 대 시간 데이터를 참조 함수와 비교하고, 획득된 데이터 및 참조 함수 사이의 차이에 근거하여 전기 회로를 한정하는 것이다. 
     본 발명의 다른 특징으로서, 전기 회로의 약하게 혹은 불량하게 접촉하는 접합부 또는 접촉부를 국소화하는 방법이 또한 개시된다.  전기 회로의 약하게 혹은 불량하게 접촉하는 접합부 또는 접촉부의 각종 가능한 위치의 열 전기 전압 대 시간의 참조 함수가 제공된다.  그 다음에, 전기 회로는 적어도 하나의 측정 전기 임펄스에 의해 가열되고, 후속하여 전기 회로의 열 전기 전압 대 시간 데이터가 획득된다.  전기 회로의 약하게 혹은 불량하게 접촉하는 접합부 또는 접촉부는 획득된 데이터 및 참조 함수 사이의 유사성에 따라 국소화된다.
Patent KR-20070081319-A (KR)
Title: Polarizer and liquid crystal display using the same
Inventor: SON JOON GON
IPC: G02F1/1335
Filed: 2006-02-10
Abstract: A polarization plate and an LCD(Liquid Crystal Display) using the same are provided to improve transmission efficiency by linearly polarizing incident light of every direction and emitting the light. A polarization unit(20) is formed on a base film(10), linearly polarizes light incident to the base film in a first direction and a second direction that are perpendicular to each other, and concentrates the light linearly polarized in the second direction to a predetermined area of the base film. A phase conversion unit(30) linearly polarizes the concentrated light in the first direction and emits the polarized light. A refraction unit(40) is formed between the polarization unit and the phase conversion unit, and reduce an incident angle at which the concentrated light is incident onto the phase conversion unit.
Patent KR-20070087355-A (KR)
Title: Deposition method of low temperature poly silicon using inert gas
Inventor: HAN SUN SEOK
IPC: H01L21/205
Filed: 2006-02-23
Abstract: A method for depositing a low temperature polysilicon using inert gas is provided to improve productivity of a polysilicon thin film deposition by depositing a polysilicon thin film without moving a substrate to another chamber for a laser annealing or a dehydrogenation process. A substrate is received on a substrate receiving unit in a chamber. Plasma is generated by using inert gas in the chamber(ST10). Plasma is generated by using a material containing Si in the chamber(ST30). A Si radical is deposited on the substrate to form a polysilicon thin film(ST40). Plasma is generated by using inert gas in the chamber. The inert gas is selected from H2 or group VIII elements. The plasma is sustained during 1 to 3 minutes. The plasma is generated below 15 mTorr of inner pressure of the chamber.
Patent KR-20070091952-A (KR)
Title: Digital multimedia broadcasting set top box for automobile and multimedia system including the same
Inventor: KANG KI YOUNG
IPC: H04N21/414
Filed: 2006-03-08
Abstract: A DMB(Digital Multimedia Broadcasting) STB(Set Top Box) for a vehicle and a multimedia system with the same are provided to include the DMB STB with an AUX(Auxiliary) generator function so that a user can watch DMB without additional cost while using an existing multimedia device. A multimedia system for a vehicle comprises the following parts: an AV(Audio/Video) system(100) which has at least one of a first external input terminal and a first CD(Compact Disk) input terminal; a multimedia device(300) which transmits multimedia signals to the AV system; and a DMB(Digital Multimedia Broadcasting) STB(Set Top Box)(200) which selectively supplies DMB signals received from the outside and the multimedia signals to the AV system by using the at least one of the external input terminal and the CD input terminal.
Patent KR-20070092490-A (KR)
Title: Polymer plasticizer composition having good viscosity property, preparation method of the same and polymer resin containing the same
Inventor: LEE KYE SEOK
IPC: C08L67/00
Filed: 2006-03-10
Abstract: A polymer plasticizer composition is provided to be superior in loss on heating, migration resistance, and extraction resistance and exhibit excellent processability due to a good viscosity characteristic thereof without deteriorating mechanical properties of polymer resin. A polymer plasticizer composition comprises at least one compound selected from the group consisting of linear polyester compounds represented by the following formula (A) and linear polyester compounds represented by the following formula (B). In the formulae, each of R1 and R2 is independently a C3-18 alkyl group and is identical to or different from each other, R3 is a C2-12 alkylene group or arylene group, R4 is a C3-18 branched alkylene group, and R5 is a C2-18 linear alkylene group.
Patent KR-20070021026-A (KR)
IPC: H04N21/41
Filed: 2006-03-10
Abstract: 본 발명은 다이나믹 콘텐츠 전달 서비스를 지원하는 단말 및 그 시스템에 관한 것으로, 종래에는 개개인에게 특화된 정보를 제공할 수 없는 단점과, 적절한 콘텐츠를 필요한 시기에 제공할 수 없는 단점이 있었다. 따라서, 본 발명은 상기와 같은 문제점을 해결하기 위하여, 기 설정된 조건이 충족되면, 상기 조건에 대응하는 사용자 맞춤형 콘텐츠를 수신받는 제 1 모듈과; 상기 수신받은 상기 맞춤형 콘텐츠를 구동시킬 수 있는 제 2 모듈을 포함하는 것을 특징으로 하는 단말을 제공한다. 또한, 본 발명은 기 선택된 특정 카테고리 범위의 콘텐츠 및 브로드캐스트 콘텐츠 중 적어도 어느 하나 이상을 수신하는 제 1 모듈과, 그리고 상기 수신된 기 선택된 특정 카테고리 범위의 콘텐츠 및 브로드캐스트 콘텐츠 중 적어도 하나 이상을 구동하는 제 2 모듈을 포함하는 단말과; 상기 특정 카테고리 범위의 콘텐츠 및 상기 브로드 캐스트 콘텐츠 중 적어도 하나 이상을 상기 단말에 제공하는 서버를 포함하는 시스템을 제공한다. 이러한, 본원 발명에 따르면, 사용자가 미리 설정한 조건이 충족될 때, 그에 부합하는 맞춤형 콘텐츠를 제공함으로써, 적시 적소에 콘텐츠를 제공할 수 있는 이점이 있다.
Patent KR-20070094148-A (KR)
Title: Protrusion and groove of covers
Inventor: GIM GUK JIN
IPC: B65D41/04
Filed: 2006-03-16
Abstract: A protruded part and a groove of a container lid are provided to facilitate opening and closing of the lid by using circumferential torque instead of rotating power generated due to grasping power of a normal direction transmitted from fingers or an opening and closing tool to a container. A protruded part and the groove directly apply torque to a container lid. The shape, size, and the number of the protruded part and the groove are varied according to an age group, size, and purpose of the container lid, a human engineering design, and a production process. In opening and closing the lid by rotating the lid in a bolt type, surface pressure for directly generating torque is generated at the circumferential surface of the lid by forming the protruded part and the groove in a circumferential direction of the lid. Accordingly, a user effectively utilizes power rather than opening and closing the lid by pressure of a normal direction for the circumference.
Patent KR-20060031830-A (KR)
Inventor: YOU YEN SIL
IPC: A23K1/14
Filed: 2006-03-18
Abstract: 종래의 배합사료는 가축의 성장에 필요한 양질의 영양소가 다량 함유되어 있으나 항균성 성분과 비타민 성분이 거의 함유되어있지 않다. 따라서 일반 사료에 비타민과 향생제를 별도로 투입하는 경우가 많으나, 본 발명품으로 인하여 별도의 비타민C와 항생제를 투입하지 않아도 된다. 가축도 적당량의 비타민과 항균성분을 섭취케 함으로서 바이러스에 저항력이 생겨 질병에 강해지는 결과를 얻을수 있으며, 별도와 화학성분의 항생제의 투여가 필요 없게 되어, 사육하는 가축이나 어패류 등이 질병에 감염되지 않고 건강하게 성장할 수 있으며, 또한 가축의 알(鷄卵)과 육질 등의 품질이 좋아기제 됨으로서 경쟁력이 강화 되어 농어촌 소득에도 직결된다. 
     종래의 사료에 들어가지 않은 비타민과 항균성 물질의 사료를 생성 시키기 위해서는 비타민이 많이 함유되어 있는 식물과 항균물질이 많은 식물을 채취하여 이 물질을 가공하여 독립적인 첨가용 사료로 가공히 제조의 단계이다. 따라서 비타민 C 와 화학 항생제를 일반 사료에 첨가하지 않아도 된다. 
     본 발명의 목적을 실현하기 위해 
     녹차 잎, 줄기를 채취하여 이를 건조시켜 분말(粉末)상태로 하고, 감잎과 감껍질을 채취하여 이를 건조시킨 다음 분말상태로 형성하며, 어성초의 줄기와 잎을 채취하여 건조시킨 후 분말 상태로 하고 해초류인 다시마를 채취하여 분말로 해서, 상기의 원료들을 각각 25％씩 잘 섞은 뒤 혼합으로 조성하는 단계의 발명이다. 
     본 발명으로 인하여 
     녹차,감잎,감껍질이 가지는 비타민 C와 항균성이 강한식물을 사료화하여 가축이나 어패류에게 먹임으로서 성장의 속도를 높여주고 항균성으로 질좋은 육질의 부산물을 생산할수 있고,축산물이나 어패류가 가지는 본연의 지방질,단백질,아미노산의 성분과 함께 비타민C 까지 함유하게 되고, 별도의 화학 물질의 항생제를 투입하지 않아도 되는 효과를 얻을수 있다.
Patent KR-20070099985-A (KR)
Title: Flexible electro luminescence fulfilled double-faced layers for electro-static discharge prevention
Inventor: HWANG MYUNG SEO
IPC: H05B33/22
Filed: 2006-04-06
Abstract: A flexible electro luminescence device having a double -faced electrostatic prevention layer is provided to design a pattern freely without limitations by installing the electrostatic prevention layer having the same structure on both sides. A flexible electro luminescence device having a double-faced electrostatic prevention layer includes an electro luminescence lamp. An electrostatic prevention layer(90), a transparent protection layer(30), a transparent electrode layer(40), a light emitting layer(50), a dielectric layer(60), a rear plane electrode layer(70), and a first rear plane protection layer(80) are formed on a transparent release film(20) of the electro luminescence lamp. The electrostatic prevention layer(90), the transparent protection layer(30), the transparent electrode layer(40), the light emitting layer(50), the dielectric layer(60), the rear plane electrode layer(70), and the first rear plane protection layer(80), an EMI reduction layer(100), and a second rear plane protection layer(110) are formed on the transparent release film(20) of the electro luminescence lamp. The electrostatic prevention layer(90) is formed on a lower part of the transparent protection layer(30), and an upper plane of the first rear plane protection layer(80) or the second rear plane protection layer(110).
Patent KR-20070102908-A (KR)
Title: Dryer and the control method of the same
Inventor: DOH YOUNG JIN
IPC: D06F58/04
Filed: 2006-04-17
Abstract: A dryer and a method for controlling thereof is provided to prevent laundry from being damaged and to prevent deterioration of energy efficiency by changing RPM of a blowing fan for regulating temperature of hot air passing a heater. A method for controlling a dryer comprises the steps: sensing internal temperature of a dry drum while progressing a dry course, and comparing measured temperature to set internal temperature of the set drum(S30); and selectively controlling rotation speed of a blowing fan according to the result, and regulating temperature of hot air passing through a heater(S80,40,60). The rotation speed of the blowing fan is maintained for set rotation speed if internal temperature of the dry drum is within set temperature range so as to keep temperature of hot air. The dryer is composed of the dry drum, the blowing fan, the heater, the temperature sensor, a driving motor, and a control unit.
Patent KR-20070103150-A (KR)
Title: Method for implementing multimedia apparatus for vihicle using potable multimedia terminal and bluetooth hub box therefor
Inventor: LIM JONG KUK
IPC: H04B1/38
Filed: 2006-04-18
Abstract: A Bluetooth hub box for vehicle and a method of implementing multimedia apparatus for vehicle using the same are provided to substitute a portable multimedia device for the multimedia apparatus for a vehicle. A Bluetooth hub box(20) includes a Bluetooth module of vehicle(11), capable of communicating with at least one portable multimedia device having a Bluetooth module, a digital signal processor(25) converting data received from the portable multimedia device through the Bluetooth module of vehicle into voice/image data, and outputting image signals to a monitor(33) of vehicle and outputting voice data to a speaker(31) of vehicle, and a controller(23) receiving data by controlling the Bluetooth module and outputting the received data in voice and image by controlling the digital signal processor.
Patent KR-20070103967-A (KR)
Title: Marine cool heat system
Inventor: KIM SANG IN
IPC: B63J2/12
Filed: 2006-04-20
Abstract: A cooling and heating system for a ship using sea water is provided to maximize heat dissipation efficiency by using the temperature of sea water. A cooling and heating system for a ship using sea water comprises a power supply, a controller, a thermoelectric element, a heat sink, a heat dissipation cooler, a pump for supplying sea water, a pipe for supplying sea water, adiabatic member, temperature keeping material, and a fixing bracket. The heat dissipation cooler comprises a plurality of guides capable of maintaining the flow of water in a constant state.
Patent KR-20070105201-A (KR)
Title: Method for detecting bottom defects of semiconductor substrate
Inventor: LEE JONG PIL
IPC: H01L21/66
Filed: 2006-04-25
Abstract: A method for detecting a bottom defect of a semiconductor substrate is provided to inspect the bottom defect of a semiconductor substrate during a fabricating process while using E-beam equipment by filling conductive polysilicon to the depth of a void in the lower part of the semiconductor substrate. An oxide layer(120) is formed in the lower part of a semiconductor substrate(110). The oxide layer is selectively etched to form a contact hole(121). Conductive polysilicon(130) is formed in the lower part of the semiconductor substrate. The lower part of the semiconductor substrate is planarized by using the oxide layer as an etch barrier layer. A heat process is performed on the semiconductor substrate. The semiconductor substrate is inspected by using E-beam equipment. In forming the oxide layer, the oxide layer can be made of BPSG(boron phosphorous silicate glass), and a thermal process and a planarization process are performed.