Patent TW-201842606-A (TW)
Title: Test dummy for precision transfer position measurement using the semiconductor system or display system and precision transfer position measurement method using the test dummy detecting whether an object body to be tested is normally transferred to a position to be transferred in a manufacturing apparatus
Inventor: SONG MIN-SUB
IPC: H01L21/67
Filed: 2018-01-17
Abstract: The present invention discloses a test dummy for precision transfer position measurement using the semiconductor system or display system and a precision transfer position measurement method using the test dummy. The test dummy for precision transfer position measurement of the present invention is applicable to an apparatus that is used in the field of semiconductor or display systems and includes the following devices: a storage box for loading an object body to be tested; an object body fixing device including a fixing unit for fixing the object body to be tested; and a transfer robot for transferring the object body to be tested in the storage box to the fixing unit. The test dummy for precision transfer position measurement includes: a model body having a size equal to a size of the object body to be tested; a pinhole image measuring component capable of recognizing or photographing a plurality of guiding pinholes formed in the fixing unit; a slit image measuring member, disposed in a slit of the storage box at the upper end of the model body, and configured to measure, by recognizing or photographing, a spacing between the slit of the storage box at the upper end of the model body and the model body in such a state that the model body is stored in the storage box; and a central processing unit capable of transmitting the information measured by the pinhole image measuring component to an image processing computer prepared in advance. The precision transfer position measurement method using the test dummy of the present invention is provided, wherein the test dummy for precision transfer position measurement is applicable to an apparatus that is used in the field of semiconductor or display systems and includes the following devices: a storage box for loading an object body to be tested; The test dummy for precision transfer position measurement includes: a model body having a size equal to a size of the object body to be tested; a pinhole image measuring component capable of recognizing or photographing a plurality of guiding pinholes formed in the fixing unit; a slit image measuring member, disposed in a slit of the storage box at the upper end of the model body and configured to measure, by recognizing or photographing, a spacing between the slit of the storage box at the upper end of the model body and the model body in such a way that the model body is stored in the storage box; and a central processing unit capable of transmitting the information measured by the pinhole image measuring component or the slit image measuring member to an image processing computer prepared in advance. The precision transfer position measurement method using the test dummy for precision transfer position measurement is characterized by including: step (1) of placing a test dummy for precision transfer position measurement stored in the storage box on the transfer robot; step (2), the transfer robot in step (1) transferring the test dummy for precision transfer position measurement to the upper end portion of the fixing unit; step (3), for the test dummy for precision transfer position measurement transferred to the upper end portion of the fixing unit in step (2), the pinhole image measuring component recognizing or photographing the guide pinhole of the fixing unit; step (4), transmitting an image recognized or photographed in step (3) to the central processing unit; step (5), transmitting, to an image processing computer, the image transmitted to the central processing unit in step (4); and step (6), determining whether the test dummy for precision transfer position measurement can be placed at a predetermined position of the fixing unit according to the image transmitted to the image processing computer in step (5) so as to know that whether the center of the test dummy for precision transfer position measurement is exactly aligned with the center of the guide pinhole. According to the test dummy for precision transfer position measurement using the semiconductor system or display system and a precision transfer position measurement method using the test dummy of the present invention, the height of a slit is measured in a way of preventing the object body to be tested from colliding the slit in the storage box by a test device for confirming whether or not the object body to be tested is normally moved using an image measuring device, so that even if a reference point is not formed, the pinhole is lifted to determine whether or not the object body to be tested is normally transferred to the position to be transferred in the manufacturing apparatus.