baber/WOPTO huggingface dataset:
Patent WO-2021223374-A1 (WO)
Inventor: LI XIAOHONG
IPC: A47C17/86
Filed: 2020-10-20
Abstract: A sofa armrest, comprising a main body (1) manufactured by using a blow molding process. The upper end of the inner side surface of the main body (1) is recessed inwards to form a fabric mounting groove (18) used for mounting an armrest fabric; the lower end of the inner side surface of the main body (1) is provided with snap-fit grooves (161) used for connection to connecting members of a sofa base frame. The sofa armrest is manufactured by using the blow molding process, and thus has advantages of a low weight, a fast production speed, and fewer raw materials required for manufacturing compared with conventional solid sofa armrests. The fabric mounting groove (18) is used to mount the armrest fabric so as to control the armrest fabric not to protrude out of the inner side surface of the sofa armrest; the snap-fit grooves (161) are used to mount the connecting members of the sofa base frame to achieve seamless connection between the sofa armrest and the sofa base frame; when the armrest fabric is squeezed and out of shape, impurities are accumulated on the lower wall of the fabric mounting groove (18) or on a seat cover fabric, thereby facilitating cleaning dust and impurities to maintain the overall cleanness of a sofa.
Patent WO-2021196568-A1 (WO)
Title: 流量代理方法、服务器及存储介质
Inventor: WU JIANGUO
IPC: H04L29/08
Filed: 2020-10-20
Abstract: 本申请实施例涉及通信技术领域，特别涉及一种流量代理方法、服务器及存储介质。流量代理方法，包括：接收HTTP请求报文（101）；解析请求报文，得到请求信息（102）；判断请求信息是否符合预设的白名单规则（103）；若是，将请求报文重定向至代理软件，并将请求信息发送至代理软件（104）；若否，将请求报文转发至下一跳（105）；其中，请求报文所属的TCP连接的上行报文经过服务器，服务器记录有TCP连接的SYN报文头部选项。
Patent WO-2021129111-A1 (WO)
Title: 会话创建方法、网元及计算机可读存储介质
Inventor: YAN XIAOJIAN
IPC: H04W76/10
Filed: 2020-10-26
Abstract: 本文公开了一种会话创建方法、网元及计算机可读存储介质。该方法包括：第一接入和移动性管理功能AMF网元和会话管理功能SMF网元间存在第一会话，第二AMF网元获取第一信息，第一信息包括SMF网元的标识信息、第一会话的数据网络名DNN和第一会话的单个网络切片选择辅助信息SNSSAI；第二AMF网元为终端设备创建第二会话。
Patent WO-2021083299-A1 (WO)
Inventor: WANG YELU
IPC: E01D22/00
Filed: 2020-10-29
Abstract: Disclosed is a method for shear-resistant reinforcement of an oblique section of a wide hollowcore slab, comprising: removing original concrete paving, bituminous concrete paving and hinge joints from a hollowcore slab bridge; providing a plurality of boreholes in edges on middle beams and edge beams of the hollowcore slab bridge; sleeving a plurality of stirrups on the middle beams and the edge beams respectively from the positions in which the boreholes are located, and connecting oblique bending reinforcement bars between the stirrups; connecting oblique bending reinforcing bars at web portions of the edge beams between the stirrups which are sleeved on the edge beams; embedding reinforced bars into bottom plates of the middle beams and the edge beams according to a preset spacing; pouring concrete into the seams between the center beams to form new hinge joints; providing a ribbed reinforcing bar mesh on upper surfaces of the middle beams and the edge beams, and then pouring and forming a new concrete paving; and pouring concrete at the bottom of the middles beams and the edge beams and webs of the edge beams, reinforcing and completing. The present invention can use a secondary overlapping stirrup and an oblique bending reinforcing bar to reinforce a hollowcore slab while reducing costs, and a good reinforcing effect may also be achieved.
Patent WO-2021139366-A1 (WO)
Title: Method for manufacturing vertical device
Inventor: CHENG KAI
IPC: H01L21/329
Filed: 2020-11-02
Abstract: Provided in the present application is a method for manufacturing a vertical device to improve a reverse breakdown voltage of the vertical device. The manufacturing method comprises: forming a plurality of first grooves in the front surface of an N-type heavily doped layer; forming an N-type lightly doped layer in the first grooves and on the front surface of the N-type heavily doped layer, and forming second grooves in the N-type lightly doped layer, the second grooves being formed corresponding to the first grooves in position; forming a P-type semiconductor layer in the second grooves and on the front surface of the N-type lightly doped layer; planarizing the P-type semiconductor layer, removing the P-type semiconductor layer on the front surface of the N-type lightly doped layer, and only reserving the P-type semiconductor layer in the second grooves; forming a passivation layer on the structure, and forming third grooves in the passivation layer, wherein the third grooves are located in parts of the P-type semiconductor layer in the second grooves and located in the N-type lightly doped layer between every two adjacent second grooves, and the depth of the third groove is equal to the thickness of the passivation layer; and forming a first electrode and a second electrode.
Patent WO-2021098875-A1 (WO)
Inventor: HE HANG
IPC: A61G7/057
Filed: 2020-11-23
Abstract: An isopressure support assembly (100), an isopressure mattress (200) and an isopressure bed (300). The isopressure support assembly (100) comprises: a support bag (110) internally filled with gas and/or liquid; and a floating lying grid (120); the support bag (110) supports portions at two ends of the floating lying grid (120) or portions near the two ends, so that when a human body is located on the floating lying grid (120), concave-convex parts of the human body transfer different pressures to different parts of the support bag (110) by means of the floating lying grid (120), causing the gas and/or liquid in the support bag (110) to flow, thereby enabling pressures on different parts of the floating lying grid (120) in contact with the support bag (110) to tend to be the same, and thus the floating lying grid (120) and the human body curved surface on which the floating lying grid (120) acts are fitted.
Patent WO-2022041522-A1 (WO)
Title: Replaceable pants type absorbent article
Inventor: YANG HONGBO
IPC: A61F13/496
Filed: 2020-11-25
Abstract: A replaceable pants type absorbent article, comprising a pants body, which has from top to bottom in sequence: a front waist and abdomen elastic area (100), a crotch elastic area (200) and a back waist and abdomen elastic area (300). The pants body comprises a bottom spun-bonded non-woven fabric (1) and an inner pure cotton non-woven fabric (2). A front waist and abdomen elastic non-woven fabric (3) is arranged on the bottom spun-bonded non-woven fabric (1) in the front waist and abdomen elastic area (100); a crotch elastic non-woven fabric (5) is arranged on the bottom spun-bonded non-woven fabric (1) in the crotch elastic area (200); a back waist and abdomen elastic non-woven fabric (4) is arranged on the bottom spun-bonded non-woven fabric (1) in the back waist and abdomen elastic area (300); the inner pure cotton non-woven fabric (2) is laminated on the bottom spun-bonded non-woven fabric (1); and the front waist and abdomen elastic non-woven fabric (3), the crotch elastic non-woven fabric (5) and the back waist and abdomen elastic non-woven fabric (4) are located between the bottom spun-bonded non-woven fabric (1) and the inner pure cotton non-woven fabric (2). By means of the structural arrangement, the pants type absorbent article is elastic in the transverse direction of the front waist and abdomen elastic area (100) and the back waist and abdomen elastic area (300) and the longitudinal direction of the crotch, and can closely fit the human body curve.
Patent WO-2021232753-A1 (WO)
Title: Aircraft and aircraft control system
Inventor: AI CHUYUE
IPC: B64C3/00
Filed: 2020-12-09
Abstract: An aircraft and an aircraft control system. The aircraft (100) comprises a fuselage (10) and a wing (20) that is connected to the fuselage (10), and further comprises a detection apparatus (30) that is assembled on the fuselage (10) and a driving apparatus (50) that is connected to the detection apparatus (30). The detection apparatus (30) is used for detecting environment information around the aircraft (100); and the aircraft (100) rotates around a first axial direction (Y) under the control of the wing (20), and the detection apparatus (30) rotates around a second axial direction (Z) under the drive of the driving apparatus (50). A detection apparatus (30) is assembled to the aircraft (100) on the fuselage (10), the detection apparatus (30) may rotate around the first axial direction (Y) under the control of the wing (20), and may rotate around the second axial direction (Z) under the drive of the driving apparatus (50), thus solving the problem in which detection blind spot areas are present in existing laser radars, expanding the detection range of the detection apparatus (30), and can satisfy the detection comprehensiveness of the detection apparatus (30).
Patent WO-2021174940-A1 (WO)
Inventor: ZHAO YALIN
IPC: G06K9/00
Filed: 2020-12-10
Abstract: A facial detection method and a facial detection system, the method comprising: acquiring an image to be processed of a target user (S100); extracting a head region diagram, a face region diagram and a body region diagram of the image to be processed so as to obtain first classification feature maps that correspond to the head region pattern, the face region diagram and the body region diagram, as well as a first feature map (S102); performing classification regression on the first classification feature maps of the head region diagram, the face region diagram and the body region diagram so as to obtain an image to be matched of the image to be processed (S104); and performing position regression on the first classification feature maps of the head region diagram, the face region diagram and the body region diagram and the image to be matched so as to acquire a target face in the image to be matched (S106). The beneficial effect of the solution above lies in: being capable of improving a network, thereby increasing the precision of small face detection.
Patent WO-2022126380-A1 (WO)
Inventor: LI XINGHE
IPC: G06T7/20
Filed: 2020-12-15
Abstract: 本公开实施例提供一种三维点云分割方法和装置、可移动平台，用于对可移动平台采集到的三维点云进行点云分割，所述方法包括：基于预先建立的运动假设模型中的运动假设，将所述可移动平台采集到的多帧三维点云投影到预设坐标系下，获取所述运动假设对应的投影密度；基于多个所述运动假设对应的投影密度，从多个所述运动假设中确定匹配运动假设；基于所述匹配运动假设对所述多帧三维点云中的第一三维点云进行点云分割。
Patent WO-2022057130-A1 (WO)
Title: Motor and washing machine
Inventor: GUO BINGCHUN
IPC: H02K5/18
Filed: 2020-12-18
Abstract: A motor (1) and a washing machine. The motor (1) comprises a controller (2) and a controller cover (3). The controller (2) is disposed on the controller cover (3). A first end cover (111) and a second end cover (112) of the motor (1) are respectively fixed to two opposite sides of a stator (12). The controller cover (3) has a first mounting portion (31) and a second mounting portion (320) used for being fixedly connected to a water tub (4). The first end cover (111) or the stator (12) is provided with a third mounting portion (1111) fixedly connected to the first mounting portion (31). According to the above-mentioned technical solution, the first end cover (111) only needs to be provided with the third mounting portion (1111) fixedly connected to the controller cover (3), or the third mounting portion (1111) is directly disposed on the stator (12), then the first end cover (111) or the stator (12) can be fixed and mounted to the controller cover (3), thereby simplifying the structure of a housing (11).
Patent WO-2022041602-A1 (WO)
Inventor: TAO DONG
IPC: H04W56/00
Filed: 2020-12-26
Abstract: The present application provides a method and apparatus for managing devices in the Internet of Things. The method comprises: a first device sends clock synchronization information to a second device that accesses a first network, so that the operating clock of the second device is synchronous with that of the first device; and the first device classifies the second device to a target device group, and sends a wake-up time period to the target device group, so that each second device in the target device group has the same wake-up time period. Therefore, the first device only needs to be awakened once when the wake-up time period arrives, reducing the number of times that the first device is awakened and reducing the overall power consumption of a local area network. In addition, wake-up devices in the same device group can be managed according to an order in which the wake-up devices upload work data by means of the first device, avoiding frequent switching between a sleep state and a wake-up state of the wake-up devices, and reducing the overall power consumption of the local area network.
Patent WO-2022021785-A1 (WO)
Title: 一种含有tsl-1502m的药物组合物及其应用
Inventor: YANG HAILONG
IPC: A61K9/08
Filed: 2020-12-29
Abstract: 一种含有TSL-1502M的药物组合物及其应用，所述药物组合物是由化合物TSL-1502M和替莫唑胺或伊立替康组成的复方药物组合物，所述药物组合物的制备方法，包括将含有效量的TSL-1502M和有效量的另外一种抗肿瘤药物一起或分别作为药物活性成分，根据制剂学常规技术制备成可供服用的药物组合物，其剂型包括注射剂，对TSL-1502M和其他药物的联合应用进行了研究，TSL-1502M和替莫唑胺、7-乙基-10-羟基喜树碱、伊立替康、拓扑替康联合使用具有协同增效作用。
Patent WO-2022141199-A1 (WO)
Title: Display module and attaching method therefor
Inventor: Zhu cuilin
IPC: G09F9/30
Filed: 2020-12-30
Abstract: Disclosed is a display module, comprising a flat display region and a curved-surface display region extending from the edge of the flat display region in a bending mode. The display module comprises a curved-surface cover plate, a flexible display panel attached to the curved-surface cover plate, and a back plate; the back plate comprises a thinned portion; and the thickness of the thinned portion gradually decreases from the edge region of the flat display region to the curved-surface display region. According to the present application, the stress of the flexible display panel in the curved-surface display region can be reduced, and the risk of cracking on the curved edge side of the flexible display panel is reduced.
Patent WO-2022141617-A1 (WO)
Title: 一种双角度使用的清洁刷
Inventor: YE JUN
IPC: A46B5/00
Filed: 2021-01-04
Abstract: 一种双角度使用的清洁刷，属于清洁用品，包括刷柄、电池(9)、电机(3)、齿轮组(2)、刷头(1)和控制开关(7)，将刷柄设为由头部(4)和柄部(8)构成的两段式结构，在头部(4)后端面与柄部(8)前端面之间分别设有相互配插的连接孔(42)和连接柱(84)，从而构成两者之间的互相转动密封连接；同时，柄部(8)前端面上还设有两个锁孔(87)，相应在头部(4)后端外表面上设有推块(6)，推块(6)后部设有伸出头部(4)后端面的锁块(61)；当头部(4)相对柄部(8)转动，并形成直线使用状态或弯折使用状态时，就能通过推块(6)推动锁块(61)选择配装在两个锁孔(87)内，从而实现两种使用状态的锁定；因此，改进后的清洁刷，不但使用功能更加丰富，而且使用场所受限制小，也能满足用户更高的使用需要。
Patent WO-2022062277-A1 (WO)
Inventor: WANG LIFENG
IPC: F15B13/044
Filed: 2021-01-07
Abstract: La présente invention concerne un système de commande intelligent d'un dispositif d'attelage hydraulique, le système de commande intelligent comprenant un distributeur hydraulique (30). Le distributeur hydraulique (30) comprend un corps de soupape (301) et une tige de soupape (302) agencée dans le corps de soupape (301), deux sections de tige de soupape adjacentes de la tige de soupape (302) comportant respectivement une surface conique de commande de vitesse d'élévation (302A) et une surface conique de commande de vitesse d'abaissement (302B); lorsque le distributeur hydraulique (30) se trouve dans une position de travail d'élévation ou d'abaissement, un espace d'étranglement de vitesse d'élévation ou un espace d'étranglement de vitesse d'abaissement est formé entre la tige de soupape (302) et le corps de soupape (301) au niveau de la surface conique de commande de vitesse d'élévation ou de la surface conique de commande de vitesse d'abaissement; et le déplacement axial de la tige de soupape (302) est commandé au moyen d'une unité de commande électrique, de telle sorte que l'espace d'étranglement de vitesse d'élévation ou la zone d'étranglement de la surface conique de commande de vitesse d'abaissement peut être modifié(e), permettant ainsi de pouvoir commander la vitesse d'élévation ou la vitesse d'abaissement d'un outil agricole. Étant donné qu'un premier chemin d'huile de travail comporte une soupape d'arrêt, dans un état neutre, la soupape d'arrêt est fermée sous la force d'action d'un ressort de rappel, la liaison entre une cavité sans tige d'un cylindre à huile de levage et le distributeur hydraulique est coupée, de telle sorte que le levage d'une charge d'un outil agricole causé par une fuite du distributeur hydraulique est évité, répondant à l'exigence de maintien du levage de la charge de l'outil agricole.
Patent WO-2021190095-A1 (WO)
Title: 空调选型方法、系统及装置
Inventor: WANG CHAO
IPC: G06F30/20
Filed: 2021-01-13
Abstract: 一种空调选型方法、系统及装置，基于制冷量、制冷功率、冷水温度与换热装置类型之间的对应关系并根据冷水温度输入值与制冷量输入值进行插值计算，获取在冷水温度输入值与制冷量输入值的条件下每类换热装置各自对应的制冷功率，根据制冷量输入值与制冷功率计算相应的压降并根据压降需求选取换热装置。当空调选型输入参数不符合标准工况要求时，通过上述步骤可以得出换热装置的准确压降。同时，由于不同换热装置的插值计算过程相互独立，因此能够同时对多个换热装置进行选型计算，提高空调选型效率。
Patent WO-2021159945-A1 (WO)
Inventor: JIANG TAO
IPC: F21Y101/00
Filed: 2021-01-22
Abstract: 本发明提供一种灯座及灯系统，其中灯座包括：主体，其包括一壳体，所述壳体上设置一槽，所述壳体上设置有插入口，所述插入口在槽的径向方向往外贯穿所述壳体，并连通壳体的侧向的外部与所述槽，所述壳体具有支撑部；转子，其套设于所述支撑部上，所述转子上设置容纳槽；以及导电端子，所述导电端子固定于所述壳体内，且所述导电端子的至少部分配置于所述槽内；所述支撑部设置有两组，且两组所述支撑部对称设置，两组所述支撑部之间形成插入槽，所述插入槽位于所述插入口的延伸方向上；所述支撑部包括支撑肋及弯曲部，所述支撑肋的一端固定于所述壳体，而弯曲部则固定于支撑肋上相对所述壳体的另一端；弯曲部的宽度与插入槽的宽度的比值为0.92:1～1.4:1。
Patent WO-2021179818-A1 (WO)
Title: 行驶状态识别方法、装置、终端及存储介质
Inventor: SONG TIANLONG
IPC: G06F17/14
Filed: 2021-01-26
Abstract: 本申请实施例公开了一种行驶状态识别方法、装置、终端及存储介质，属于信息处理领域。所述方法包括：对采集的行驶状态数据进行特征提取，得到行驶状态特征；通过RNN模型对行驶状态特征数据进行处理，得到第一输出特征；通过注意力模型对第一输出特征进行注意力计算，得到注意力权重向量，对注意力权重向量进行尺度化处理，根据处理后的注意力权重向量对第一输出特征进行加权处理，得到第二输出特征；对第二输出特征进行概率转换，得到第一概率矩阵；基于第一概率矩阵，确定移动终端的行驶状态，该行驶状态用于指示所乘地铁或用户步行的行驶状态。本申请可以通过移动终端检测所乘地铁或用户步行的行驶状态，灵活性较高，而且识别准确度较高。
Patent WO-2022170536-A1 (WO)
Inventor: CHEN DANSHENG
IPC: A61B5/021
Filed: 2021-02-09
Abstract: L'invention concerne un appareil de détection d'empreinte digitale, un dispositif électronique et un procédé de mesure de pression artérielle, qui peuvent faciliter la surveillance de la pression artérielle sur toute la journée d'un utilisateur. L'appareil de détection d'empreinte digitale est applicable à un dispositif électronique ayant un écran d'affichage et est disposé sous l'écran d'affichage, et est conçu pour effectuer une mesure de pression artérielle; le dispositif électronique comprend une première source de lumière et une deuxième source de lumière; l'appareil de détection d'empreinte digitale est conçu pour recevoir, à un premier moment, un premier signal optique réfléchi par un doigt d'un utilisateur et traversant l'écran d'affichage, le premier signal optique étant un signal optique d'une première longueur d'onde envoyé par la première source de lumière; l'appareil de détection d'empreinte digitale est conçu pour recevoir, à un deuxième moment, un deuxième signal optique réfléchi par le doigt de l'utilisateur et traversant l'écran d'affichage, le deuxième signal optique étant un signal optique d'une deuxième longueur d'onde envoyé par la deuxième source optique; la première longueur d'onde est différente de la deuxième longueur d'onde; le premier signal optique est utilisé pour acquérir un premier signal de PPG; le deuxième signal optique est utilisé pour acquérir un deuxième signal de PPG; le premier signal de PPG et le deuxième signal de PPG sont utilisés pour acquérir un troisième signal de PPG; et le troisième signal de PPG est utilisé pour acquérir la pression artérielle de l'utilisateur.
Patent WO-2022183448-A1 (WO)
Inventor: ZHOU XUE
IPC: H01L43/08
Filed: 2021-03-04
Abstract: La présente invention concerne une jonction tunnel magnétique (MTJ), une mémoire vive magnétique et son procédé de fabrication, et un dispositif de stockage, qui peut éviter un problème de court-circuit provoqué par une pulvérisation inverse de paroi latérale lorsque la MTJ est fabriquée. La MTJ comprend un premier film magnétique, une couche de tunnellisation et un second film magnétique. Le premier film magnétique comprend une partie de passivation et une partie de non passivation, la partie de passivation étant formée sur la périphérie de la partie de non-passivation, et la partie de non passivation est entourée par la partie de passivation (c'est-à-dire que la partie de non passivation est située dans une région entourée par la partie de passivation). La couche de tunnellisation est disposée sur la surface de la partie de non passivation.
Patent WO-2021248963-A1 (WO)
Title: 家电设备及其配网方法、控制终端、计算机存储介质
Inventor: SiTu Jinquan
IPC: H04L12/28
Filed: 2021-03-17
Abstract: 本申请公开了一种家电设备的配网方法、控制终端，该家电设备的配网方法包括以下步骤：控制终端搜索附近的家电设备的连接信息，并在搜索到家电设备的连接信息时，与家电设备建立连接；将所述家电设备对应的配网信息发送至已经建立连接的家电设备，以使所述家电设备根据所述配网信息进行网络配置；在成功进行网络配置后，进行控制终端的确权，以实现控制终端对家电设备的控制。
Patent WO-2021197131-A1 (WO)
Title: Plateaux empilables pour appareil de cuisson
Inventor: HEIMERDINGER MARK
IPC: F24C7/04
Filed: 2021-03-23
Abstract: L'invention concerne un appareil de cuisson qui comprend une cavité de cuisson, un module micro-ondes et un plateau rotatif monté rotatif dans la cavité de cuisson. Un plateau supérieur est monté au-dessus du plateau rotatif. L'appareil de cuisson comprend également un moteur accouplé fonctionnellement au plateau rotatif pour faire tourner le plateau rotatif et le plateau supérieur à l'intérieur de la cavité de cuisson.
Patent WO-2022068158-A1 (WO)
Title: Molecular dynamics evaluation method for adhesion between asphalt-aggregate based on emulsifier
Inventor: SU GUOCHENG
IPC: G16C10/00
Filed: 2021-03-30
Abstract: A molecular dynamics evaluation method for adhesion between asphalt-aggregate based on an emulsifier. The method comprises: constructing an asphalt system amorphous unit cell model, an aggregate super-cell model, and an emulsifier system amorphous unit cell model on the basis of materials studio software; constructing an asphalt layer-aggregate layer model and an asphalt layer-emulsifier layer-aggregate layer model by a build layer tool; and using Energy task calculation of a Forcite module to obtain the work of adhesion between the asphalt-aggregate when there is not an emulsifier layer or there is an emulsifier layer. The method quantitatively obtains the influence of the emulsifier on interfacial adhesion between the asphalt-aggregate, has high accuracy, avoids the subjectivity of traditional experimental methods, has simple operation steps, and can accurately estimate the influence difference of different emulsifiers on the interfacial adhesion between the asphalt-aggregate so as to guide the application of emulsified asphalt.
Patent WO-2021204102-A1 (WO)
Title: Network information exposure method and device
Inventor: WANG DAN
IPC: H04W76/10
Filed: 2021-04-06
Abstract: Embodiments of the present disclosure provide a network information exposure method and device. The method applied to a local NEF comprises: a local NEF obtains identifier information of a first local UPF; the local NEF establishes a first control plane interface with the first local UPF according to the identifier information of the first local UPF; by means of the first control plane interface, the local NEF requests the first local UPF for network exposure information of a PDU session of a first terminal, and sends the network exposure information to a local application function (AF).
Patent WO-2021238436-A1 (WO)
Title: Multi-drug sharing query method, mobile terminal and storage medium
Inventor: REN JIAWEI
IPC: G16H20/13
Filed: 2021-04-09
Abstract: A multi-drug sharing query method. The multi-drug sharing query method comprises the steps of: (S10) constructing a query graph according to query conditions; (S20) splitting the query graph so as to obtain a plurality of query subgraphs; and (S30) querying in a knowledge graph according to the plurality of query subgraphs, and returning medication query results. In addition, further disclosed are a mobile terminal and a storage medium.
Patent WO-2022205496-A1 (WO)
Inventor: ZHAO MENG
IPC: H01L21/68
Filed: 2021-04-12
Abstract: 本申请涉及一种晶圆清洗设备及定位治具，该晶圆清洗设备包括：定位基座，包括可转动的夹具，夹具用于固定晶圆；定位治具，可拆卸地固定于夹具上，定位治具包括平行于水平面设置的定位面，定位面上设置有多个同心圆和以多个同心圆的圆心为基准的刻度线，且圆心位于夹具的旋转中心线上；清洗装置，与定位基座相对设置，清洗装置包括可移动的清洗喷嘴，清洗喷嘴能够朝向定位面滴落液滴，并通过液滴示出的坐标位置与圆心之间的偏差调整清洗喷嘴的位置，以使液滴落在圆心上。本申请通过在定位治具的定位面上设置多个同心圆和以多个同心圆的圆心为基准的刻度线，能够定量获取清洗喷嘴与可转动夹具的位置偏差，提高清洗喷嘴的定位准确性。