Patent SG-11201807865U-A (SG)
Title: Process for the generation of thin inorganic films
Inventor: LIMBURG CAROLIN
IPC: C07F15/06
Filed: 2017-04-10
Abstract: INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property -, Organization MD 1111101110101011111 Mt 0111010111111101110111011011111011 III International Bureau ..... ...... .Yld .?d ..... .......rj,„. (10) International Publication Number (43) International Publication Date WO 2017/178400 Al 19 October 2017(19.10.2017) WIPO I PCT (51) International Patent Classification: (81) Designated States (unless otherwise indicated, for every C23C 16/455 (2006.01) COIF 15/04 (2006.01) kind of national protection available): AE, AG, AL, AM, C01G 51/00 (2006.01) CO7F 15/06 (2006.01) AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, CO1G 53/00 (2006.01) BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, (21) International Application Number: HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, PCT/EP2017/058488 KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, (22) International Filing Date: MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, 10 April 2017 (10.04.2017) NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, (25) Filing Language: English TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, (26) Publication Language: English ZA, ZM, ZW. (30) Priority Data: (84) Designated States (unless otherwise indicated, for every 16165478.5 15 April 2016 (15.04.2016) EP kind of regional protection available): ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, (71) Applicant: BASF SE [DE/DE]; Carl-Bosch-Strasse 38, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, 67056 Ludwigshafen am Rhein (DE). TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, (72) Inventors: LIMBURG, Carotin; Werderplatz 4, 68161 DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, Mannheim (DE). LOEFFLER, Daniel; Heinrich Heine LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, Str. 2b, 67134 Birkenheide (DE). WILMER, Hagen; Ern- GW, KM, ML, MR, NE, SN, TD, TG). st-Kunz-Strasse 33, 67071 Ludwigshafen (DE). WAL- TER, Marc; Comeniusstr. 36, 38102 Braunschweig (DE). Published: REINERS, Matthias; Breite StraBe 18a, 38100 Braunsch- - with international search report (Art. 21(3)) weig (DE). (74) Agent: BASF IP ASSOCIATION; BASF SE, G-FLP - C006, 67056 Ludwigshafen (DE). = (54) Title: PROCESS FOR THE GENERATION OF THIN ,—, (I) L= . 4 © © ii- oc IN ,-1 IN (57) : The present invention is in the field of processes 1-1 C the present invention relates to a process comprising bringing ei L.----M X. (I) and depositing the compound of general 0 wherein R is independent of each other hydrogen, an alkyl group, an alkenyl group, an aryl group or a silyl group, p is 1, 2 or 3, M is Ni or Co, X is a 6-donating ligand which coordinates M, phosphor or nitrogen atom, m is 1 or 2 and n is 0 to 3. II RR formula wherein R for a INORGANIC FILMS or R R the generation of thin compound of general (I) from the gaseous if present at least one formula X R 1 . 1 RR inorganic films on substrates. In particular, is or aerosol R (I) into the gaseous or aerosol state state onto a solid substrate, a ligand which coordinates M via a