baber/WOPTO huggingface dataset:
Patent KR-20000050685-A (KR)
Title: Redundancy circuit having buffers to make uniform load distribution
Inventor: KIM NAM JONG
IPC: G11C29/00
Filed: 1999-01-13
Abstract: PURPOSE: A redundancy circuit including a buffer to constantly maintain a load is provided to prevent a skew phenomenon between decoding addresses and prevent degradation in transfer rate of decoding addresses by constantly maintaining a load of the decoding addresses. CONSTITUTION: A preliminary decoder(5) decodes external addresses(Ai) inputted to a semiconductor memory device(100) and generates decoding addresses(Ai,AiB). A normal memory block(10) includes a normal memory cell block(12) having a plurality of memory cells arranged in columns and lines and a normal decoder(14) for decoding addresses(Ai,AiB). A redundancy memory block(20) includes a plurality of redundancy cells arranged in columns and lines. A buffer unit(30) includes a plurality of buffers(31,32...). Buffers(31, 32,...) hold decoding addresses(Ai,AiB) in common and generate corresponding output signals(B_Ai,B_AiB). A redundancy box unit(40) includes a plurality of redundancy enable boxes(41,42,...). Redundancy enable boxes(41,42,...) are activated according to output signals (B_Ai,B_AiB) of buffers(31,32,...) and generate redundancy select signals(Rsel0, Rsel1,...) for selecting a redundancy line and/or column within the redundancy memory block(20).
Patent KR-20000056047-A (KR)
Inventor: KIM SUN HYUN
IPC: B05D7/02
Filed: 1999-02-12
Abstract: PURPOSE: An equipment and method for resin coating of a curtain rail is provided to improve productivity and to maintain a regular coating thickness, therefore the coated surface is smooth and has excellent coating intensity. CONSTITUTION: A dice(120) having a through hole formed in cross section shape of curtain rail(10) and having a resin reception space is prepared. A curtain rail(10) is inserted through a through hole. A liquid resin is supplied by predetermined pressure into the resin reception space. The curtain rail(10) is transferred. The resin on the surface of the coated curtain rail(10) during passing by the dice(120) is chilled.
Patent KR-19990072868-A (KR)
Title: 디스플레이소자
IPC: H01L27/32
Filed: 1999-02-23
Abstract: 디스플레이 소자를 형성하는 방법은 기판상에 박막 트랜지스터 스위치 회로를 증착하는 단계, 박막 트랜지스터 회로의 출력과 전기 접촉하여 광 전송 도전 유기체의 전극층을 잉크-젯 프린트함으로써 증착하는 단계와, 전극층 위에 소자의 능동 영역을 증착하는 단계를 포함한다.
Patent KR-20000059973-A (KR)
Inventor: LEE GANG UK
IPC: H01J9/48
Filed: 1999-03-10
Abstract: PURPOSE: A method for manufacturing a display electrode of a plasma display panel is provided to improve a light penetration index and to prevent a light scattering by removing the shoulder and the remaining occurred at forming a display electrode using a laser. CONSTITUTION: In a method for manufacturing a display electrode of a plasma display panel, a display electrode material(4a) is coated on a front substrate(1), and a shape of a display electrode is directly patterned by selectively sublimating the display electrode material(4a) using a laser. The front substrate(1) is provided to a system in order to remove the shoulder and the remaining of a ripple appearance. The system comprises a loading vessel(11) for supplying a substrate, a standby vessel(12) for providing a surplus space, an etching vessel(13) for removing the shoulder and the remaining of the substrate, a first shower vessel(14) for lowering a concentration of an etchant, a second shower vessel(15) for lowering the concentration of the etchant, a rinse vessel(16) for removing the component of the etchant perfectly, a dry vessel(17) for removing used pure wafer, an unloading vessel(18) for taking out the substrate, a substrate(21), a roller(22) for transferring the substrate(21), an air curtain(23), a nozzle(24), and an air knife(25).
Patent KR-19990046530-A (KR)
Title: 음식폐기물,생활하수슬러지와동물분뇨를활용하여사료및퇴비를제조하는방법및장치
IPC: A23K1/10
Filed: 1999-03-25
Abstract: 음식물쓰레기, 생활하수슬러지 및 동물분뇨를 활용하여 사료 및 퇴비를 제조하는 방법에 있어서, 각종 이물질과 혼합된 음식물쓰레기, 생활하수슬러지 및 동물분뇨를 선별장치(2)의 주입구 호퍼(1)에 주입하여 스크류(3)를 회전시켜 이물질을 선별하고, 선별장치(2)의 배출구인 일측을 망(2')을 설치하여 이물질을 통과하지 못하게 하여 음식물쓰레기, 생활하수슬러지 및 동물분뇨만 이송하여 컨베어(4)에 의해 볼밀뚜껑(5)이 열린 상태에서 볼밀(6)로 주입시킨 후, 상기 볼밀(6) 내부에 직경10 ∼ 15Cm크기의 볼(18)이 내장되어 회전되면서 볼(18)을 음식물쓰레기, 생활하수슬러지 및 동물분뇨와 마찰시켜 액상으로 분쇄한 음식물쓰레기, 생활하수슬러지 및 동물분뇨를 죽과 같이 고르게 혼합시킨 다음, 볼밀(6)의 뚜껑(5)을 아래로 향하게 하여 반대쪽에 있는 에어밸브(7)를 열고, 뚜껑(5)에 설치된 밸브를 열어 신속하게 볼밀내부에 있는 완전히 분쇄되어 죽상태로된 액상의 음식물쓰레기, 생활하수슬러지 및 동물분뇨를 배출하고 진동체여과장치(19)로 여과시켜 교반기(9)로 이송하여 생활쓰레기가 가라앉지 않도록 계속 교반날개로 교반시키고 교반기에 부착된 고압펌프로 파이프(11)를 통해 건조로에 이송하며, 
     이송된 액상의 음식물쓰레기, 생활하수슬러지 및 동물분뇨를  노즐(13)에 의해 분사시키며, 건조로의 가열송풍기(12)에 의해 주입되는 약 300℃의 뜨거운 공기와 만나면서 순간적으로 건조되어 미립자의 고체인 사료 및 퇴비가 되며 건조로 하부로 낙하되어 포장장치(17)에 의해 포장되어 사료 및 퇴비로 사용되며, 상기 건조로의 배기가스와 수증기는 배출구(15)로 배출되는데 배기가스에 미량 포함된 상기 생활폐기물미립자를 포집하기 위해 배출구(15)중에 사이클론(14)을 설치하여 배기가스에서 미량입자를 포집하여 입자가 없는 배기가스만 배출하게 하고 포집된 미량의 입자는 상기 사이클론(14)의 하부에 설치된 수집구(16)에서 수집되어 포장하여 제조함을 특징으로 하는 음식물쓰레기, 생활하수슬러지 및 동물분뇨를 활용하여 사료 및 퇴비를 제조하는 방법
Patent KR-19990064667-A (KR)
Title: 음식물 쓰레기 처리장치
IPC: B09B3/00
Filed: 1999-04-16
Abstract: 본 발명은 음식물쓰레기 처리장치에 관한 것으로, 본체(100)와; 쓰레기를 교반하며 전방으로 이송하는 이송스크류(121)가 내부에 구비된 쓰레기이송로(120)와; 이송로와 연결되어 이송된 음식물쓰레기를 분쇄하고 압송하는 음식물쓰레기 분쇄수단(130)과; 압송된 분쇄물을 박막상으로 형성시키는  상하가 개구된 다수개의 격자구조로 구성되어 회전하는 회전벨트(151)와; 상기 이송스크류(121)와 음식물쓰레기 분쇄수단(130) 그리고 회전벨트(151)에 동력을 전달하는 동력전달수단(140)과; 상기 회전벨트(151)의 격자상에 분배된 분쇄물의 수분 및 오염물질을 증발시키고 고형화 되도록 벨트면의 상,하에서 고온 열전달을 하는 고형건조수단(150); 그리고 상기 고형건조수단(150)에 의해 증발되는 수분 및 오염물질을 강제 흡입하여 냉각 및 탈취 시키는 정화수단(180);을 포함하여 구성되는 것을 특징으로 하는 음식물쓰레기 처리장치를 기술적 요지로 하고 있다.  따라서, 박막형의 고형물이 단시간내에 형성되어 음식물쓰레기도 처리하고, 상기 고형물은 유기비료 및 가축사료로 즉시 이용가능하며, 정화수단(180)을 이용하여 오염물질을 정화시켜 외부로 배출시킴으로써 환경오염문제도 해결하는 장점이 있다.
Patent KR-20000067724-A (KR)
Inventor: BYEON MOO HYEON
IPC: F23N5/24
Filed: 1999-04-28
Abstract: PURPOSE: A safety device is provided to achieve an improved user convenience by arranging the safety device to be automatically operated simultaneously with a turning-on of a gas range. CONSTITUTION: A safety device comprises a power supply(1), a power supply terminal(3) and a circuit terminal(4) for connecting the power supply to an IC circuit(2), a driving motor(5) controlled by the IC circuit, a speaker(6), an operation check lamp(7), re-start button(8), a handle(9), a handle gear(11) and a motor gear(13) engaged with each other, and a protrusion(12) for pushing the power supply terminal to contact the circuit terminal when the gas range is turned on. A power is supplied to the IC circuit when the gas range is turned on, and the IC circuit alarms a sound if the gas range is not turned off after elapse of a predetermined time period. The IC circuit automatically turns off the range if the range is not turned off after another elapse of a time after the alarm.
Patent KR-20000072918-A (KR)
Inventor: SEO JAE BEOM
IPC: H01L21/336
Filed: 1999-05-03
Abstract: PURPOSE: A method for manufacturing a semiconductor device is provided to prevent a short channel effect, by filling a groove formed in a substrate on both sides of a gate with a doped polysilicon layer to form a source/drain region. CONSTITUTION: A first polysilicon layer and a silicon nitride layer(67) are formed on a semiconductor substrate(61) of a first conductivity type by intervening a gate oxidation layer(63). An impurity region of a second conductivity type is formed on both sides of the gate. A first spacer(81) as an insulating layer is formed on a sidewall of the gate. A groove(111) having a predetermined depth on both sides of the gate is formed by using the gate and spacer as a mask while a part of the impurity region of the second conductivity type is exposed to the sidewall of the groove.
Patent KR-20000073132-A (KR)
Title: Switching power supply
Inventor: SEO WON SIK
IPC: H02H7/12
Filed: 1999-05-06
Abstract: PURPOSE: A switching power supply is provided to prevent a circuit from being damaged by sensing over current owing to saturation of a transformer core and a short circuit of an output terminal. CONSTITUTION: A switching power supply comprises a switch transistor(Q) which is connected to a primary winding of a transformer(T). A resistor(Rs) is serially connected to the source of the transistor(Q), and a triangle pulse generator(22) generates a triangle pulse having a slope proportional to an input voltage. A surge eliminating part(23) removes surge component of a voltage induced across the resistor. A comparison part(24) compares output voltages of the triangle pulse generator(22) and the surge eliminating part(23), and outputs a differential value when the output voltage of the surge eliminating part(23) is more than that of the triangle pulse generator(22). A judgement part(25) outputs a current limitation signal when the differential value of the comparison part(24) is output over predetermined frequency. A pulse width control part(21) controls the width of a driving pulse applied to the gate of the transistor(Q) to adjust the current amount flowing through the winding.
Patent KR-20000074595-A (KR)
Inventor: OH SU HWAN
IPC: H01L21/56
Filed: 1999-05-24
Abstract: PURPOSE: A molding die for a semiconductor is provided to mold semiconductor packages which have a relatively short interval there between, by having a gate and a runner not contact a lead frame, so that a compound can be induced through the runner connected to the gate vertically penetrated in a cavity block. CONSTITUTION: A molding die for a semiconductor comprises an upper die(100), a lower die(200), a compound injection unit(120), a runner(130) and a gate(140). An upper supporting plate(110) is formed in the upper die. The runner connected to the compound injection unit is established in the upper die and upper supporting plate. The gate penetrating the runner from a central portion of a cavity block of the upper die is vertically formed, having a shape of which an upper portion is wide and a lower portion is narrow.
Patent KR-20000005900-A (KR)
Inventor: MILSWEGENE L JR
IPC: F24F11/76
Filed: 1999-06-03
Abstract: PURPOSE: A heat pump operating device is provided to control the moving force of indoor air to provide the performance accomplished from a heat pump while maintaining the operation of a reliable compressor. CONSTITUTION: The thermostatic control device of feeding air contains:an air flowing piece for transmitting the feeding air through a indoor air exchanger; a sensing piece for deciding the outdoor air temperature; and a thermostat having a control piece for controlling the flow rate of the feeding air passing the indoor air exchanger according to the temperature of indoor air.
Patent KR-19990068670-A (KR)
Title: 황토흙을이용한직물원사의제조방법
Filed: 1999-06-09
Abstract: 본 발명은 황토흙을 이용하여 직물원사를 제조하도록 하는 것으로, 더욱 상세하게는 황토흙이 인체의 피부질환을 비롯한 각종 질병에 뛰어난 치유효과를 갖는 것을 착안하여 직물원사를 제조하는 과정에서 황토흙을 이용하여 직물원사에 황토성분이 함유되어 있도록 하는 황토흙을 이용한 직물원사의 제고방법에 관한 것이다 
     종래의 원사는 화학섬유와 천연섬유로 분리되어 원하는 칼라를 인쇄시키거나 직조시킨후 유통되는 것이나 신체와 접촉이 가장많은 반면 접촉에 의한 기능성이 부족한 것이었다. 
     따라서 본 발명은 채취한 황토흙과 원수가 1: 10 - 20의 비율이 되도록 혼합하는 혼합과정과, 혼합과정후 황토흙과 물을 가열하면서 살균함과 동시에 원사가 침지되도록 하는 침지과정과, 
     침지과정후 건조시킨후 함침된 황토성분이 원사에서 분리되지 않도록 코팅함을 특징으로 하여 인간과 가장가까이 있는 의류 등의 제품에 적용하여 바이오 세라믹 등과 같이 원적외선을 방사하는 것으로 알려져 있으므로 이러한 원적외선의 방사로 의류와 커텐 등의 다양한 곳에 적용하여 피부가 부드럽게 하며, 황토의 특수한 냄새를호흡할 수 있어서 몸에 누적된 피로에도 효과가 있어서 건강에 많은 도움을 주게되는 것과, 화공약품 등의 약재를 사용하지 않아도 원사가 부패되는 것을 방지하여 원사에 비하여 오랜동안 원형을 지속하여 마모되는 것을 방지하는 것이다.
Patent KR-20000006318-A (KR)
Inventor: CHANGJING WAI
IPC: G01L1/00
Filed: 1999-06-21
Abstract: PURPOSE: A method of measuring the stress of transparent membrane is provided to accurately measure the stress with measurer of novel and simple structure adapting new theory. CONSTITUTION: The membrane measuring device comprises light emitting apparatus located at one side of transparent material(40), monochromatic light source(42), fixed polarizer(44), photo elastic transformer providing two standard frequency(46), scattering strip(60) located at the other side of transparent material, means for translating emitted light beam(62) in the range corresponding the length of the scattering strip, apparatus for receiving the scattered light located at the one side of transparent material, light spectrometer(48), avalanche light diode(50), two synchronous-detection amplifier having two frequency given as the standard frequency by the transformer(54,56), aquisition bench(58) for deciding the phase shift of electric signal received at the output of the photo diode when stress is delivered.
Patent KR-20010003634-A (KR)
Inventor: LEE JE GYEONG
IPC: H04M1/72505
Filed: 1999-06-24
Abstract: PURPOSE: A method for controlling synchronization in digital European cordless telephones is provided to maintain mutual synchronization, so as not to be lost, in synchronization between handsets and bases embodied by each different manufacturer and having different synchronization. CONSTITUTION: A handset receives dummy C/L information from the dummy of a base(210). In case that other handset of the same base sets up traffic, the handset receives other bearer information from the dummy(220). The handset stores received information in its buffer(230). The handset checks whether a CRC error is generated more than M times continuously(240). If the CRC error is detected more than M times, the handset moves a dummy receiving location with a final updated buffer value(250). The handset receives dummy information at the moved location(260).
Patent KR-20000011485-A (KR)
Title: Fuse circuit and redundant decoder
Inventor: MASUI YOSINORI
IPC: H01L23/525
Filed: 1999-07-05
Abstract: PURPOSE: A fuse circuit is provided to certainly be initialized without unnecessary current flow. CONSTITUTION: The fuse circuit is connected between a first power supply circuit(101) and a second power supply circuit(102), and constitutes a program fuse(103) being cut off as occasion demands and maintenance/driver circuit(106) being connected with a connection node(100). In the programming fuse circuit, the first power supply circuit(101) supplies a first voltage to the connection node(100) in response to a first initializing signal. The second power supply circuit(102) supplies a second voltage to the connection node(100) in response to a second initializing signal. The maintenance/driver circuit(106) maintains/outputs supplied the first and second voltage.
Patent KR-20010011131-A (KR)
Inventor: LEE HYEOK GI
IPC: H05K7/16
Filed: 1999-07-26
Abstract: PURPOSE: A hinge device for a portable information device is provided to reduce the size of the hinge device by generating a relatively large torque even with a relatively small hinge device. CONSTITUTION: A fixing bracket(30) is fixed to a system unit. A shaft end(40) is fixed to a display unit. The fixing bracket(30) and the shaft end(30) are connected by using a shaft(20). The display unit is rotated by a predetermined angle about the shaft(20). In order to fix the display unit by a predetermined angle with respect to the system unit, a friction plate is formed in the shaft(20). A torque plate(50) inserted between the friction plate is located in a plate box(35) of the fixing bracket(30) to make a needed torque.
Patent KR-20010011828-A (KR)
Inventor: LEE YONG MU
IPC: B60R11/02
Filed: 1999-07-30
Abstract: PURPOSE: A headrest mounting a hands-free is provided to prevent an accident by enabling a driver to readily make a call through a cellular phone during travel. CONSTITUTION: A headrest mounting a hands-free is made up of headrest frame(100), cushion(200) for protecting a head, PCB(printed circuit board) case(300), PCB(400), speaker(500), plug(600) for contacting a microphone, microphone(700) and connecting line(800). A hole(110) for replacing a battery is formed in the center of a lower part of the headrest frame. A bolt insertion hole(140) for fixing the PCB case is punched around an insertion groove. While a speaker insertion groove(130) is formed on one side, a plug insertion groove(140) is made up on the other side. Herein, two legs(150) are installed at the bottom to function a housing for the headrest.
Patent KR-20010017247-A (KR)
Inventor: JUNG IN CHEOL
IPC: H01L21/3205
Filed: 1999-08-09
Abstract: PURPOSE: A method for forming a multiple layer metal wire is provided to create metal wire lines in two layers by vaporizing an insulating layer and proceeding a photolithography method at once. CONSTITUTION: The first interlayer dielectric(22) is vaporized and flattened on a conduction layer(21) in a semiconductor substrate. A photoresist is doped and patterned on the first interlayer dielectric(22). By etching the first interlayer dielectric(22) selectively using the photoresist pattern as a mask to expose some part of the conduction layer(21), the first contact hole is formed. The first metal plug(23) is made in the first contact hole after evaporating a plug metal such as Al and W. The second interlayer dielectric(24) is vaporized and planed on the substrate. The second interlayer dielectric(24) is patterned selectively to expose the first metal plug(23) and the subsurface of the first interlayer dielectric(22). The first and the second metal wire lines(25a,25b) are built using an IMP(Ion Metal Plasma) method at the same time. An insulating layer for forming a plug covers the metal wire lines(25a,25b), and a photoresist is doped and patterned. After creating the second contact hole, the second metal plug(28) is produced to join the first metal wire line(25a) and the second metal wire line(25b). Removing the isolation layer, the third interlayer dielectric(29) is evaporated. As the same ways, the third and the fourth metal wire lines(30a,30b), the third contact hole, and the third metal plugs(31a,31b) are made. A shield layer covers the whole structure including the fourth metal wire line(30b) and the third metal plugs(31a,31b), and a four story metal wire lines(33,34,35) are formed.
Patent KR-20010017576-A (KR)
Inventor: LEE BYUNG RYUL
IPC: B28C5/08
Filed: 1999-08-12
Abstract: PURPOSE: A circular caster for concrete is provided to simplify a casting process, to decrease working time, and to decrease the labor for casting concrete. CONSTITUTION: The circular caster for concrete is composed of a lift jack(12), a main body(10), a transporting tool(20), a first casting pipe(31), a casting pipe rod, a tool(40) for horizontality, and a control box. Four lift jacks are installed on a rail operated by fluid pressure. The body includes a rotating gear(14) driven by a motor(14) installed on the center of the lift jack. The transporting tool is connected to a roller(25) having a deceleration motor(22). The deceleration motor is driven by the lift jack. The transporting tool is selectively connected to the rail to move right and left. The first casting pipe is connected to the rotating gear and an ejection pipe of a pump car. The casting pipe rod includes a second casting pipe(32) not to rotate 360 degree. The tool for horizontality compensates a weight of the casting pipe. The control box is installed for controlling motors and several electrical devices.
Patent KR-20010026009-A (KR)
Inventor: CHOI DONG SEOP
IPC: H01L21/304
Filed: 1999-09-02
Abstract: PURPOSE: An apparatus for eliminating particles of a semiconductor wafer chuck is provided to prevent a product defect form being generated by the particles in a subsequent process, by brushing neutralized particles with a brush. CONSTITUTION: A chuck plate(11) sucks and fixes a wafer(W). A revolving axis(12) is fixed in a lower portion of the chuck plate. A motor(13) revolves the revolving axis. An ionizer for neutralizing particles adhered to a back side of the wafer is installed in one side of the lower portion of the chuck plate. A brush(14) for eliminating the neutralized particles is installed in the other side of the lower portion.
Patent KR-20000022973-A (KR)
Inventor: NAKAMURA SHINJI
IPC: H01S5/223
Filed: 1999-09-08
Abstract: PURPOSE: A device is provided to reduce a propagation loss of a semiconductor laser device with improved crystal characteristics by preventing an occurrence of a disturbance surface to provide an even crystal. CONSTITUTION: A buffer layer(2) and an n-side contact layer(3) are provided on a substrate (1) in order. An n-side cladding layer(4) is provided on a portion of the n-side contact layer(3). An illuminating layer(5) has a multi-layer structure. A first p-side cladding layer(6) and an n-type current cutoff layer(7) are provided on the n-side cladding layer(4) in order. A semiconductor layer is formed with a III-group nitrogen crystal of the haxagonal system. The cladding layer(8) is formed with a second III-group nitrogen crystal. A stripe groove(7a) is provided on the semiconductor layer along with <1, 1, -2, 0> direction.
Patent KR-20010028457-A (KR)
Inventor: DO JIN YEONG
IPC: F04B51/00
Filed: 1999-09-21
Abstract: PURPOSE: An apparatus and method for testing concentricity of compressor assembling device is provided, in which a single gap sensor is employed, to thereby simplify the configuration of the apparatus and allow the maintenance work to be easily performed. CONSTITUTION: An apparatus comprises a support block(51) for supporting a work master(70) to be rotatable; a base(52) installed beneath the support block and which supports the support block; a leg unit(53) for supporting the base; an air blow shaft(60) disposed within the main body of the work master and which injects air through a plurality of nozzles perforated at an equal angle; and a gap sensor(55) mounted at a support device(54) installed at an end of the support block and which measures the gap between the work master and the inner surface of a support of the work master.
Patent KR-20010028984-A (KR)
Inventor: KIM JE SIK
IPC: H04Q3/02
Filed: 1999-09-28
Abstract: PURPOSE: A switching apparatus and a routing method in a switching system are provided to implement a replaced path in response to the failure of a switch that forms an input stage and an output stage. CONSTITUTION: The first stage(210) offers the functions as a basic stage for a supplied cell. The stage(210) includes two pairs of demultiplexers(DEMUX#5,DEMUX#6), (DEMUX#7,DEMUX#8) connected to the input ports of switches(#5,#6), respectively, and two pairs of multiplexers(MUX#5,MUX#6),(MUX#7,MUX#8) connected to the output ports of switches(#5,#6), respectively. The second stage(220) performs the functions as a bypass stage, and includes switches(#3,#4). The switches(#3) switches the cells supplied from the multiplexers(MUX#5,MUX#7). The switches(#4) switches the cells supplied from the multiplexers(MUX#6,MUX#8). The third stage(230) offers the functions as a target stage. The stage(230) includes two pairs of demultiplexers(DEMUX#1,DEMUX#2), (DEMUX#3,DEMUX#4) connected to the input ports of switches(#1,#2), respectively, and two pairs of multiplexers(MUX#1,MUX#2),(MUX#3,MUX#4) connected to the output ports of switches(#1,#2), respectively.
Patent KR-20010036500-A (KR)
Inventor: CHOI BYEONG YEOL
IPC: H01L27/108
Filed: 1999-10-08
Abstract: PURPOSE: A capacitor forming method is provided to stably etch a polysilicon film for a lower electrode by using an oxide layer pattern and a photoresist pattern sequentially formed on the polysilicon film as etching masks. CONSTITUTION: The first insulating film(102), the first anti-etching film(104) and the second insulating film(106) are formed in sequence. A photoresist pattern is formed on the second insulating film(106). The second insulating film(106), the first anti-etching film(104) and the first insulating film(102) are etched in sequence to form a contact hole. The second anti-etching film(108) is formed on the inner wall of the contact hole. A polysilicon film(110) is formed on the second insulating film(106). An oxide layer(112) is formed on the polysilicon film(110). A photoresist film is formed on the oxide film(112) and a photoresist pattern(114) is formed. The oxide layer(112) is patterned by using the photresist pattern(114) as a mask. The polysilicon film(110) is etched by using the photresist pattern(114) and the oxide film(112) as etching masks. The photoresist pattern(114), the oxide layer pattern(112) and the second insulating film(106) are removed to form a lower electrode of a capacitor.