baber/WOPTO huggingface dataset:
Patent TW-202015426-A (TW)
Title: Shared candidate list
Inventor: CHEN CHUN-CHIA
IPC: H04N19/96
Filed: 2019-08-16
Abstract: A video coder that uses a shared candidate list to encode or decode multiple blocks of pixels within a shared boundary is provided. The video coder identifies a shared boundary encompassing a plurality of blocks of pixels of a current picture in a video sequence. The video coder identifies one or more prediction candidates as a shared candidate list based on neighbors of a region defined by the shared boundary. The video coder codes one or more blocks of pixels encompassed by the shared boundary by using one or more prediction candidates selected from the shared candidate list.
Patent TW-202108672-A (TW)
Inventor: LIAO TE-CHAO
IPC: B29C48/18
Filed: 2019-08-20
Abstract: 本發明公開一種雙軸延伸聚酯薄膜及其製造方法。雙軸延伸聚酯薄膜包括聚酯樹脂基層及形成於聚酯樹脂基層上的霧面層。基於霧面層的總重為100 wt%，霧面層包含：(1) 50 wt%至95 wt%的聚酯樹脂基質，並且聚酯樹脂基質的固有黏度是介於0.5 dL/g至0.8 dL/g；(2) 0.01 wt%至5 wt%的高黏度聚酯樹脂，並且高黏度聚酯樹脂的固有黏度是介於0.9 dL/g至1.1 dL/g之間；(3) 0.3 wt%至40 wt%的多個填料粒子，並且多個所述填料粒子的平均粒徑是介於0.15微米至10微米之間。
Patent TW-202015715-A (TW)
Title: Turmeric-derived component-containing composition for oral ingestion to be masticated in oral cavity and/or dissolved in oral cavity
Inventor: AMEMIYA Yuko
IPC: A61K36/9066
Filed: 2019-08-28
Abstract: To reduce bitterness in the ingestion of a turmeric-derived component-containing composition for oral ingestion which is to be masticated in the oral cavity and/or dissolved in the oral cavity. In a turmeric-derived component-containing composition for oral ingestion which is to be masticated in the oral cavity and/or dissolved in the oral cavity, the bitterness of the turmeric-derived component is reduced by adding granular calcium lactate thereto. In a chewable tablet containing a turmeric-derived component, the bitterness of the turmeric-derived component is reduced and, at the same time, such a hardness as to facilitate biting and grinding in the oral cavity is imparted by adding granular calcium lactate thereto.
Patent TW-202108883-A (TW)
Title: Pump which has a reduced overall volume and is easy to carry
Inventor: HUANG KUO-HUNG
IPC: F04B35/00
Filed: 2019-08-28
Abstract: A pump includes a housing unit, a motor unit and a piston unit. The housing unit includes a base, a first housing part and a second housing part. The base has a base wall, a surrounding wall and a flow channel, and the base wall and the surrounding wall jointly define a chamber. The first housing part has a first outer shell, and the first outer shell has a first accommodation space for accommodating liquid from the outside. The second housing part has a second outer shell, and the second outer shell has a second accommodation space in communication with the flow channel and the chamber. The second accommodation space is used for accommodating liquid from the flow channel. The motor unit pressurizes the liquid. The piston unit is movably arranged in the chamber. When the pressure of the liquid in the second accommodation space is greater than a predetermined pressure, the piston unit will be driven to move toward the base wall in the chamber.
Patent TW-202041154-A (TW)
Title: Sheet-shaped cooked rice forming tool
Inventor: KIYOKAWA Katsuaki
IPC: A23L7/10
Filed: 2019-09-02
Abstract: To provide a sheet-shaped cooked rice forming tool that can be installed compactly without a large installation space at a low cost and can be readily used by anyone and can form sheet-shaped cooked rice stably and repeatedly without a "cooked rice thickness variation" by keeping a constant thickness and shape. A sheet-shaped cooked rice forming tool including: a forming frame for forming sheet-shaped cooked rice by containing cooked rice therein; and a smoothing spatula for smoothing cooked rice contained in the forming frame into a sheet shape, the forming frame having a flat plate shape with a predetermined thickness and upper and lower surfaces formed in a flat surface, the forming frame having therein a cooked rice containing part for containing cooked rice, the cooked rice containing part being formed in an open-ended manner and passing through the forming frame to make a window, and the smoothing spatula including a gripping portion and a flat main spatula portion extending from the end of the gripping part.
Patent TW-202030898-A (TW)
Inventor: JONGMAN JAN
IPC: H01L51/40
Filed: 2019-09-12
Abstract: A method of forming a stack of layers defining one or more electronic devices, the method comprising: depositing a first thickness of curable, dielectric or dielectric precursor material over an area of a workpiece; thereafter exposing the workpiece to curing conditions at least over said area of said workpiece; and without any intermediate patterning operation, thereafter depositing a second thickness of said curable material over said area of said workpiece; and thereafter again exposing the workpiece to curing conditions at least over said area of said workpiece.
Patent TW-202028291-A (TW)
Title: Polyester copolymer having excellent processability, and product comprising the same
Inventor: HWANG DONG-JUNE
IPC: C08G63/183
Filed: 2019-10-01
Abstract: The polyester copolymer according to the present disclosure is excellent in processability, particularly in shear thinning characteristics, and thus can be applied to the production of various transparent containers by an EBM process.
Patent TW-202021522-A (TW)
Title: Fan motor and vacuum cleaner comprising the same
Inventor: CHOI JOONG-KEUN
IPC: A47L9/22
Filed: 2019-10-09
Abstract: A fan motor comprises a motor mount, a motor part accommodated in an inner space of the motor mount, and an impeller disposed above the motor mount. The motor mount defines: an air discharge opening configured to discharge air discharged from the impeller to an outer space of the motor mount; a cooling flow path outlet disposed at the upper side of the motor mount at a position between the impeller and the air discharge opening; and a first cooling flow path inlet disposed at a position below the air discharge opening and the cooling flow path outlet. The fan motor further includes a guide that is configured to direct, to an upward direction, at least a portion of air that is discharged through the air discharge opening and introduced to the inner space through the first cooling flow path inlet.
Patent TW-202116541-A (TW)
Title: Resin container and connected body of resin containers
Inventor: KOSHIRO HIROYUKI
IPC: A61J1/14
Filed: 2019-10-22
Abstract: Provided in the present invention is a resin container including a multilayered structure that includes: a first layer that contacts a liquid content; and a second layer that contacts an outer side of the first layer, wherein the first layer includes cyclic olefin copolymer and a linear low density polyethylene resin, and the second layer includes a low density polyethylene resin.
Patent TW-202037968-A (TW)
Inventor: HO HSIU-FAN
IPC: G02B27/01
Filed: 2019-10-25
Abstract: A head-mounted display device includes a display, a main frame, two arms, and two adjusting pieces. The main frame carries the display. The arms are disposed on opposite sides of the main frame, and the ends of the arms are pivotally connected to the main frame such that the arms are adapted to rotate away from the main frame during unfolded process and to cause the arms to be adapted to rotate toward the main frame during the folding process. The adjusting pieces are respectively disposed on the pivot path of the arms, and the adjusting piece is adapted to from a structural interference with the corresponding arm and the main frame during the unfolding process to limit the degree of rotation of the arms.
Patent TW-202028248-A (TW)
Title: Methods of treatment using anti-cd123 immunoconjugates
Inventor: ZWEIDLER-MCKAY PATRICK
IPC: C07K16/28
Filed: 2019-10-30
Abstract: Methods of administering immunoconjugates that bind to CD123 are provided. The methods comprise administering an anti-CD123 immunoconjugate (e.g., IMGN632) to a subject in need thereof, for example, a patient with a hematologic malignancy, at a therapeutically effective dose regimen that results in treatment of the hematologic malignancy.
Patent TW-202021523-A (TW)
Title: Self-propelled cleaning robot
Inventor: IKE TOMOTARO
IPC: A47L11/20
Filed: 2019-11-05
Abstract: Provided is a self-propelled cleaning robot with which it is possible for a user to finely set a desired cleaning method. This self-propelled cleaning robot 1 is provided with a body 11, a drive part 12 configured to be capable of causing the body 11 to travel, a cleaning part 13 for cleaning in a cleaning region 40, a sensor part 14 for detecting an obstacle, and a control unit 20 that is mounted in the body 11 and that controls the drive part 12 and the sensor part 14. The control unit 20 is provided with a control part 21 having an integrated start environment for creating programming code, the control part 21 being such that connection from the outside is possible.
Patent TW-202038266-A (TW)
Title: Semiconductor assembly with discrete energy storage component
Inventor: KABIR M SHAFIQUL
IPC: H01L23/498
Filed: 2019-11-12
Abstract: A semiconductor assembly, comprising: a first semiconductor die including processing circuitry and pads, said first semiconductor die having a first surface and a second surface opposite the first surface; a second semiconductor die including memory circuitry and pads, said second semiconductor die being arranged on one of the first surface and the second surface of said first semiconductor die, and pads of said second semiconductor die being coupled to pads of said first semiconductor die; and at least a first capacitor having terminals, said first capacitor being arranged on one of the first surface and the second surface of said first semiconductor die and the terminals of said capacitor being coupled to pads of said first semiconductor die.
Patent TW-202121370-A (TW)
Title: LED driving device and LED display capable of reducing delay time of a LED display device
Inventor: ZHANG ZHE
IPC: G09G3/20
Filed: 2019-11-15
Abstract: An LED driving device includes: a transmitting module for receiving image data transmitted by an image source in units of frames; a receiving module electrically connected to the transmitting module to receive the image data; and a driver chip electrically connected to the receiving module for receiving the image data in units of a sub-frame and converting the image data into pixel voltages in the unit of the sub-frame for driving an LED array. One of the sub-frames occupies 1/M of the one of the frames, and M is a positive integer greater than 1. The driver chip converts the data of the nth sub-frame of the image data into the pixel voltage during the nth sub-frame, and at the same time receives the data of the (n+1)th sub-frame of the image data, where n is a positive integer.
Patent TW-202124225-A (TW)
Title: Cup lid preventing dropping off when carried by hand with slits disposed at the outer ring edge or the concave ring at intervals, and lower than the bottom half part in a height direction upward
Inventor: SHIH KUO
IPC: B65D43/10
Filed: 2019-12-17
Abstract: This invention relates to a cup lid preventing dropping off when carried by hand, and is suitable for covering a cup body. A loop having a bottom half part is formed on the top part of the cup body. The cup lid preventing dropping off when carried by hand comprises a top wall and a surrounding wall. The surrounding wall comprises a main body, a ring flange, an outer ring edge, and several slits. The ring flange is used for being buckled with the loop and has an abutment section for being abutted against the bottom half part. A concave ring is formed at the junction of the outer ring edge and the ring flange. The slits are disposed at the outer ring edge or the concave ring at intervals, and are lower than the bottom half part in a height direction upward. The surrounding wall is divided into several connecting areas and several carrying areas by the slits. When the user grips the carrying areas with fingers, the slits will disconnect the carrying areas and the connecting areas, so that the force cannot be transmitted to the connecting areas, so as to achieve the efficacy of avoiding the cup lid from being separated from the cup body.
Patent TW-202033022-A (TW)
Inventor: LEI JING
IPC: H04W74/08
Filed: 2020-01-08
Abstract: 描述了用於無線通訊的方法、系統和設備。使用者設備（UE）可以從基地站接收指示用於針對隨機存取的功率控制參數設置的至少一個配置規則的系統資訊。UE可以量測一或多個參考信號，並且可以基於所量測的參考信號來估計在基地站與UE之間的無線通訊的路徑損耗。UE可以從配置規則中指示的一或多個參數集合中選擇一或多個參數。UE可以基於所估計的路徑損耗以及用於功率控制參數和功率斜變程序的配置規則，來選擇用於隨機存取訊息的前序信號的第一傳輸功率和用於隨機存取訊息的有效負荷的第二傳輸功率。UE可以根據所選擇的第一傳輸功率和第二傳輸功率來傳輸隨機存取訊息。
Patent TW-202122865-A (TW)
Inventor: WU BIING-SENG
IPC: G02B21/18
Filed: 2020-02-15
Abstract: 提供了一種包括以下內容的可調式光投射器。光源用以發出一光束。固定式光學相位調制器配置於光束的路徑上，且用以調制光束的相位。且用以使光束在一結構光與一泛光之間切換。可調式液晶面板配置於光束的路徑上，並且可調式液晶面板的一部分區域被配置用以使光束在一結構光與一泛光之間電性切換。驅動器被用以控制光源及控制可調式液晶面板以使光束在結構光和泛光之間切換。可調式液晶面板包括：第一基板、第二基板、液晶層、第一電極層以及第二電極層。
Patent TW-202034642-A (TW)
Title: 正交流空間多工方法和裝置
Inventor: RIOS CARLOS A
IPC: H04B7/10
Filed: 2020-02-27
Abstract: 正交流空間多工方法和裝置。方法包括將資料流分裂和調變為n個MIMO RF空間流，並耦合為相應的可切換極化天線元件，受正交二進位元編碼控制以便進行傳送。各傳送串流體現為與其他n-1個空間流處於時變極化正交。方法包括利用受控於同一套正交碼的對應天線元件，在目標接收串流。因此，在接收後續解調，將MIMO空間重新合併為原始資料流後，n個傳送的空間流均為極化匹配過濾、明顯分離且單獨恢復的串流。因此源自相同來源、具有相同振幅和頻寬，但所攜帶資料不同，且展示共同正交時變極化的n個MIMO空間流會以同一頻道不受干擾地共同傳送至同一目標。
Patent TW-202039365-A (TW)
Title: Chlorosilane producing method
Inventor: OGIHARA KATSUYA
IPC: C01B33/107
Filed: 2020-03-03
Abstract: Provided is a method for stably conducting a method for producing a chlorosilane through chlorination of metal silicon. When producing a chlorosilane through chlorination of metal silicon, a metal silicon having a sodium content of 1-90 ppm in terms of element thereof and an aluminum content of 1000-4000 ppm in terms of element thereof is used. The average particle diameter of the metal silicon is preferably about 150-400 [mu]m.
Patent TW-202121411-A (TW)
Title: Semiconductor devices
Inventor: KIM KYUNG-MOOK
IPC: G11C7/12
Filed: 2020-03-27
Abstract: A semiconductor device includes a shift control circuit and a synthesis pre-charge signal generation circuit. The shift control circuit generates a shift signal and a shift read signal based on a read command and controls a reset status of the shift read signal based on the shift signal and an auto-pre-charge command. The synthesis pre-charge signal generation circuit generates a synthesis pre-charge signal for an auto-pre-charge operation of a bank selected by an address based on the shift read signal and the address.
Patent TW-202137030-A (TW)
Title: Identity verification method, computer device, and readable storage medium
Inventor: LIU YOUNG-WAY
IPC: G06F21/30
Filed: 2020-03-27
Abstract: The present invention provides an identity verification method, which includes: periodically collecting biometric data of a user; when a difference between currently collected biometric data and pre-stored biometric data is greater than a preset threshold, the pre-stored biometric data is updated to be the currently collected biometric data, and the currently collected biometrics data is uploaded to a blockchain together with identification data of the user; and when it is necessary to perform identity verification on the user, downloading the user's identification data from the blockchain based on the user's current biometric data, such that the user does not need to keep their own identification data in mind at all times. The present invention also provides a computer device and a readable storage medium for implementing the identity verification method.
Patent TW-202046808-A (TW)
Inventor: KUNT MEHMET
IPC: H04W74/08
Filed: 2020-04-13
Abstract: 在用戶設備（UE）中實現的裝置在兩步隨機接入（RA）過程中向無線網絡發送第一消息（MsgA）。作為響應，所述裝置在所述兩步RA過程中從所述無線網絡接收第二消息（MsgB）。在所述MsgB包括退避子頭的情況下，所述兩步RA過程中的退避子頭的內容與四步RA過程中的退避子頭的內容相同。所述MsgB包括一個FallbackRAR子協議資料單元，所述兩步RA過程中的所述FallbackRAR子協議資料單元的格式與四步RA過程中的Msg2中的RAPID / RAR子頭和RAR有效載荷的格式相同。所述MsgB包含一個SuccessRAR子協議資料單元，所述兩步RA過程中的SuccessRAR子協議資料單元的格式使用本文描述的SuccessRAR子協議資料單元的格式。
Patent TW-202104814-A (TW)
Inventor: TURNER PETER J
IPC: F25J3/06
Filed: 2020-04-14
Abstract: A system for removing nitrogen from a natural gas fluid feed stream includes a main heat exchanger that receives the natural gas fluid feed stream. A distillation column receives a cooled fluid stream from the main heat exchanger and features a return vapor outlet and a side vapor outlet port. The return vapor outlet provides nitrogen vapor to the main heat exchanger which is warmed therein. The side vapor outlet port provides vapor to the main heat exchanger and a reflux compressor receives and compresses the resulting fluid from the main heat exchanger. A reflux aftercooler receives and cools fluid from the reflux compressor, directs cooled fluid to the main heat exchanger and the resulting fluid is directed to a reflux separation device. The reflux separation device has a vapor outlet and a liquid outlet. The vapor outlet of the reflux separation device directs fluid to the main heat exchanger so that fluid is directed to the first reflux inlet port of the distillation column. The liquid outlet of the reflux separation device directs fluid to a second reflux inlet port of the distillation column.
Patent TW-202141135-A (TW)
Inventor: LIAO CHING-HUAN
IPC: G02B6/00
Filed: 2020-04-24
Abstract: A front light module includes a light source and a light guide plate. The light source has a light incident surface. The light guide plate includes a micro-structure region. The micro-structure region includes a first micro-structure and at least one second micro-structure. The first micro-structure is located between the light incident surface of the light source and the second micro-structure. A first angle is between a surface of the first micro-structure facing the light source and a direction of optical axis of the light source. A second angle is between a surface of the first micro-structure facing away from the light source and the direction of optical axis of the light source. A third angle is between the surface of the second micro-structure facing away from the light source and the direction of optical axis. The first angle is between a range from about 30 degrees to 50 degrees. The second angle and the third angel are between a range from about 60 degrees to 90 degrees.
Patent TW-202105690-A (TW)
Title: Semiconductor device and method of manufacturing the same
Inventor: NAKAKI HIROSHI
IPC: H01L27/11551
Filed: 2019-07-02
Abstract: In one embodiment, a semiconductor device includes a first substrate, and a plurality of electrode layers provided above the first substrate and stacked in a first direction. The device further includes a first semiconductor layer extending in the first direction in the plurality of electrode layers, and a metal layer provided above an uppermost one of the plurality of electrode layers and extending to cross the first direction. The device further includes a second semiconductor layer including an impurity diffusion layer that is provided between the first semiconductor layer and the metal layer, electrically connects the first semiconductor layer with the metal layer, and has an impurity concentration higher than an impurity concentration of the first semiconductor layer.
Patent TW-202206313-A (TW)
Title: 可遙控混合動力儲能車
Inventor: LIANG CHIN-TSAI
IPC: B60R16/033
Filed: 2020-08-07
Abstract: 本發明的某些態樣涉及一種儲能車，可包含太陽能電池、儲電設備、引擎、傳動模組、電動馬達、幫浦、油壓馬達、遙控模組以及發電機。傳動模組可包含輸入端、第一輸出端、第一離合器、第二輸出端以及第二離合器。傳動模組之輸入端受引擎帶動。第一離合器設於傳動模組之第一輸出端。第二離合器設於傳動模組之第二輸出端。電動馬達經由第一離合器與傳動模組之第一輸出端連結。油壓馬達與第一電動馬達連結。發電機經由第二離合器與傳動模組之第二輸出端連結。太陽能電池設於儲能車之頂面。儲電設備用以儲存太陽能電池及發電機所產生之電能。儲電設備電性連結至第一電動馬達。油壓馬達受遙控模組控制而帶動儲能車之車輪。遙控模組用以控制油壓馬達之動力輸出及儲能車車輪之方向。
Patent TW-202208778-A (TW)
Title: 懸臂
Inventor: CHEN CHIH-MING
IPC: F16M13/02
Filed: 2020-08-19
Abstract: 懸臂包括第一支臂、第二支臂、第三支臂、第一樞接件、第二樞接件及緊迫機構。第一樞接件樞接第一支臂與第二支臂。第二樞接件樞接第一支臂與第三支臂。緊迫機構配置在第一支臂且包括第一緊迫桿及第二緊迫桿。第一樞接件與第二樞接件位於緊迫機構之相對二側。當第一緊迫桿及第二緊迫桿分別抵壓第一樞接件及第二樞接件時，第一支臂、第二支臂與第三支臂的相對關係固定。當第一緊迫桿及第二緊迫桿分別釋放第一樞接件及第二樞接件時，第一支臂、第二支臂與第三支臂可相對活動。
Patent TW-202124506-A (TW)
Title: Small molecule films for sacrificial bracing, surface protection, and queue-time management
Inventor: Blachut Gregory
IPC: H01L21/56
Filed: 2020-09-02
Abstract: The present disclosure relates to methods of forming a film including small molecules. Such methods can optionally include removing such small molecules, such as by way of sublimation, evaporation, or conversion to a more volatile form.
Patent TW-202217199-A (TW)
Title: 即時監控功能的空氣淨化循環系統
Inventor: CHANG WEN-CHI
IPC: F24F3/16
Filed: 2020-10-30
Abstract: 本發明係一種即時監控功能的空氣淨化循環系統，係包含有一空調裝置、一即時生物感測模組、一氣閥、一出風管以及一回流風管；該空調裝置係使用一除濕殺菌溶液將外部空氣除濕殺菌後排出，由該即時生物感測模組量測並判斷該排出空氣是否符合標準，若不符合則透過該氣閥將該排出空氣切換至該回流風管，令該排出氣體透過該回流風管回到該空調裝置再進行二次殺菌，直到該即時生物感測模組判斷該排出空氣符合標準；如此，藉由該即時生物感測模組控制該氣閥的切換，選擇地將排出的空氣排入該第二出風管或該回流風管，達到即時根據空氣中的病菌含量來控制殺菌能力的功效。
Patent TW-202220323-A (TW)
Inventor: HSIEH CHUNG-MING
IPC: H02M1/32
Filed: 2020-11-10
Abstract: 本發明提出一種保護電路，適用於切換電容型穩壓電路，其具有一電容。保護電路包含一電流源、第一與第二開關電路以及控制單元。控制單元控制第二開關電路導通使電容之頂端與底端電性連接，以及控制第一開關電路使電流源不連接電容，並設定頂端與底端之電壓為預設高電壓。接著，控制單元控制第二開關電路使頂端與底端不電性連接，且控制第一開關電路導通使電容之底端流出電流。當頂端與底端之間的電壓差等於預設初始電壓，控制第一開關電路使電流源不電性連接電容；接著，控制單元根據電容之頂端之電壓控制電容之頂端流入或流出電流。
Patent TW-202122789-A (TW)
Title: Inspection device and inspection method
Inventor: NURIYA YASUYUKI
IPC: G01N21/956
Filed: 2020-12-02
Abstract: An inspection device includes an image acquisition unit configured to acquire images obtained by imaging, under at least two illumination conditions with different brightness, solder normally printed on a substrate, and an image processing unit configured to specify a shape of the solder based on a difference in brightness between the images acquired by the image acquisition unit, and generate, based on the shape of the solder, inspection data used for inspecting a state of the solder printed on the substrate.
Patent TW-202127267-A (TW)
Title: Reconfigurable mainframe with replaceable interface plate
Inventor: RICE MICHAEL R
IPC: B25J9/16
Filed: 2020-12-03
Abstract: A mainframe of a device fabrication system includes a base, a plurality of facets on the base, an a lid over the plurality of facets. A first facet of the plurality of facets includes a frame. The base, the lid and the plurality of facets together define an interior volume that includes a robot arm. A first replaceable interface plate is attached to the first frame of the first facet. The first replaceable interface plate includes a plurality of substrate access ports. A first substrate access port of the plurality of substrate access ports is configured to provide access for the robot arm to a first process chamber. A second substrate access port of the plurality of substrate access ports is configured to provide access for the robot arm to a second process chamber.
Patent TW-202209860-A (TW)
Inventor: CHOU CHEN-WEI
IPC: H04N5/225
Filed: 2020-12-23
Abstract: An image display method suitable for use in a video conference system with a wide-angle webcam is disclosed. The wide-angle webcam is used to capture a panoramic image having an aspect ratio of 2:1 or greater. The method comprises: selecting multiple regions of interest (ROI) according to the panoramic image; selecting an output scene layout according to whether to insert a portion of the panoramic image and the attributes, the positions and the numbers of the ROIs; and, inserting at least one of the ROIs and the portion of the panoramic image into corresponding windows to form a composite frame according to the attributes of the ROIs.
Patent TW-202134362-A (TW)
Title: Chemical mechanical polishing slurry and a method of use thereof
Inventor: ZHOU JAIME JING-YU
IPC: C09G1/02
Filed: 2020-12-24
Abstract: The present invention aims to provide a chemical mechanical polishing slurry for carbon-containing materials and a method of use thereof. The chemical mechanical polishing slurry contains abrasive particles, an oxidizer and at least an organic phosphonic acid. This slurry can provide high carbon-containing material removal rate, while reduce the polishing byproducts on polishing pad during polishing process, thereby extend the pad life time and reduce the defects on the wafer surface after polishing.