baber/WOPTO huggingface dataset:
Patent KR-20050101197-A (KR)
Title: Inspection system for rolled products of a milling station
Inventor: TIEPELMANN BERND
IPC: B65G47/252
Filed: 2004-01-30
Abstract: The aim of the invention is to create an inspection system (1) for rolled products (2) of a milling station, which allows an examiner to examine both sides of the rolled products (2) at an ergonomically convenient height. Said aim is achieved by providing the inspection system (1) with a turning device (10) in which two receiving elements (12, 14) for rolled products (2) can be pivoted about a rotating pin (16) that is aligned essentially parallel to the plane of extension of the rolled products (2).
Patent KR-20050092054-A (KR)
Title: Solid oral dosage forms of valsartan
Inventor: WAGNER ROBERT FRANK
IPC: A61P9/00
Filed: 1997-06-18
Abstract: The present invention is concerned with solid oral dosage forms comprising of a) an active agent selected from valsartan and optionally HCTZ, and b) pharmaceutically acceptable additives suitable for the preparation of solid oral dosage forms by compression methods.
Patent KR-20050109560-A (KR)
Title: Extruded transparent/translucent sheet for roof structures
Inventor: ADRIAANSEN FRANS
IPC: E04D3/28
Filed: 2004-03-15
Abstract: An extruded, light-transmitting sheet structure (100) includes a pair of outer walls (128, 130) separated apart from one another. At least one dome (112) is formed as part of one of the pair of outer walls (128, 130), and is disposed at a first outer edge of the structure. A rib structure (122) is disposed between the pair of outer walls (128, 130), wherein the rib structure (122) includes at least one rib that extends into the dome (112).
Patent KR-20050119137-A (KR)
Title: Shift control system, shift control method and shift switching device
Inventor: AMAMIYA SUMIKO
IPC: F16H59/08
Filed: 2004-03-30
Abstract: A shift control system rotates an actuator to cause a wall of a detent plate (100) to contact a roller (112) of a detent spring (110), and detects the position of contact so as to detect the position of the wall of the detent plate (100). This wall position is set as a reference position of the actuator. Accordingly, the rotation of the actuator can appropriately be controlled even if an encoder which can only detect relative positional information is employed, and thus the shift range can appropriately be switched.
Patent KR-20060006781-A (KR)
Title: Fuel composition
Inventor: SCHWAHN HARALD
IPC: C10L1/14
Filed: 2004-04-08
Abstract: Disclosed is a fuel composition containing a major quantity of gasoline having a maximum sulfur content of 150 ppm by weight, and a minor quantity of at least one gasoline additive having a detergent effect or a valve seat wear-inhibiting effect. Said gasoline additive comprises at least one hydrophobic hydrocarbon radical having an average molecular weight of 85 to 20,000, and at least one polar group. The fuel composition further contains at least one low alkanol at a moiety of about 5 to 75 percent by volume.
Patent KR-20050119151-A (KR)
Title: Pantolactone hydrolase
Inventor: GILL IQBAL
IPC: C12N9/18
Filed: 2004-03-19
Abstract: The present invention relates to nucleotides sequences of a gene coding for a pantolactone hydrolase, as well as vectors and host cells containing such nucleotides sequences and pantolactone hydrolases encoded by such nucleotides sequences. Processes for making and using pantolactone hydrolases are also provided.
Patent KR-20060006827-A (KR)
Title: Method for identifying effect pigments in a paint film for field color matching
Inventor: ALMAN DAVID H
IPC: C09D7/80
Filed: 2004-04-28
Abstract: The present method invention provides a portable method useful for identifying the effect pigments used in developing a color matched formula for a vehicle repair paint. The method comprises observation of effect pigment properties of the coating of a vehicle to be matched, in a field location with a portable magnification apparatus, and comparison of the effect pigment properties with reference sample(s) properties of available effect pigments, thus enabling precise selection of effect pigment(s). The method may also utilize features derived from images of physical reference samples of available effect pigments, for comparison purposes. Further, the method may, in a field or centralized laboratory location, utilize a comparison of the effect pigment properties of images of the vehicle coating to be matched, or features derived from images thereof, with images of reference samples of available effect pigments, or features derived from images thereof, thus enabling precise selection the effect pigment or pigments to use in the development of said color matched formula.
Patent KR-20060017766-A (KR)
Title: Method and apparatus for enabling sub-channel recording and playback
Inventor: LEFEVRE CHAD ANDREW
IPC: H04N5/44
Filed: 2004-05-04
Abstract: An apparatus (20) such as a television signal receiver controls a digital recording device (40) via a digital data bus (30) to enable sub-channel recording and playback. According to an exemplary embodiment, the apparatus (20) includes a processor (14) that is operative to process signals representing a plurality of sub- channels to generate digital data for a first one of the sub-channels. The digital data includes program data and identification data for the first sub-channel. An input/output terminal (13) is operative to provide the digital data to a digital recording device (40) via a digital data bus (30).
Patent KR-20060057533-A (KR)
Title: Methods for rapid purification of nucleic acids for subsequent analysis by mass spectrometry by solution capture
Inventor: HOFSTADLER STEVEN A
IPC: C12Q1/68
Filed: 2004-05-13
Abstract: The present invention provides methods for rapid solution capture purification of nucleic acids for subsequent analysis by electrospray mass spectrometry which is efficient and cost- effective relative to existing methods. The present invention also provides for kits useful for practicing rapid solution capture of nucleic acids so that purified samples are in condition for analysis by electrospray mass spectrometry.
Patent KR-20060014435-A (KR)
Title: Optical filters comprising opacified portion
Inventor: MORRIS GEOFFREY P
IPC: G01N17/00
Filed: 2004-05-20
Abstract: The invention relates to optical filters comprising an opacified portion. The optical filters are preferably suitable for use in illuminators for weathering devices.
Patent KR-20060026066-A (KR)
Title: Method and system for packet labeling, queuing, scheduling, and encapsulation
Inventor: OLIVER NEAL
IPC: G06F15/16
Filed: 2004-06-09
Abstract: A method and system for a network node for attachment to switch fabrics is described. The system includes an access unit to provide access to communications from an external network, a classification element to label received packets with information identifying an associated flow and queue, a mapping element to place the packets into one of a plurality of queues based on the label identifiers, a scheduler to schedule packets in the queues for transmission, and an encapsulation element to encapsulate the scheduled packets into uniform size frames. The uniform size frames may then be transmitted to a next destination through a switch fabric.
Patent KR-20060026448-A (KR)
Title: Dielectric-layer-coated substrate and installation for production thereof
Inventor: BAUBET CAROLE
IPC: H01L21/02
Filed: 2004-06-28
Abstract: The invention relates to a substrate (1), such as a glass substrate, which is coated with at least one thin dielectric layer. According to the invention, the dielectric layer is deposited by means of cathode sputtering which is, for example, assisted by a magnetic field and which is preferably reactive in the presence of oxygen and/or nitrogen, with exposure to at least one ion beam (3) from an ion source (4). The invention is characterised in that the dielectric layer which is exposed to the ion beam has a refractive index which can be adjusted on the basis of the parameters of the ion source, said ion source being a linear source.
Patent KR-20070076652-A (KR)
Title: Reversible liquid crystal display and handy terminal having the same
Inventor: LEE HO JUNG
IPC: H04B1/38
Filed: 2006-01-19
Abstract: A dual LCD and a portable terminal having the same are provided to reduce an entire thickness of the LCD and the portable terminal, reduce a manufacturing cost, and improve brightness by displaying an image in both directions with a single panel. An LCD panel(100) includes a first display area and a second display area displaying an image from different surfaces thereof. A first backlight unit is provided on a first surface of the LCD panel, and emits light to the first display area. A second backlight unit is provided on a second surface of the LCD panel, and emits light to the second display area. A first light transmitting part is provided on the first display area of the second surface. A second light transmitting part is provided on the second display area of the first surface. The light transmitting parts have the same thickness as the backlight unit. The light transmitting parts include a protective layer(420) and an impact absorbing layer(410) provided between the protective layer and the LCD panel.
Patent KR-20070077543-A (KR)
Title: A advertising panel distributing wires structure by used the led module
Inventor: PARK YOON JEA
IPC: G09F13/22
Filed: 2006-01-24
Abstract: A wiring structure using an LED(Light Emitting Diode) module in an advertising panel is provided to easily arrange LED module units in the narrow space of the advertising panel of various shapes by making the LED module unit in a regular hexagon form. In a wiring structure using an LED module in an advertising panel, plural LED module units(100) comprise a unit LED module formed by modularizing RGB(Red, Green, Blue) lamps in a group, and installed on the surface of a PCB(Printed Circuit Board) contained in a regular hexagon-shaped case having combining units formed with fixing holes and disposed at both sides; resin molded in the case; and a fixing member joined with the combining units to fix an electric wire(150) drawn from the PCB. An auxiliary control unit(200) is connected with plural LED module units in a line to connect the electric wire drawn from one side of the LED module unit disposed at the outermost side and draw out (+) and (-) electric wires(210,220) and a communication line(230) in the opposite direction. A main control unit(300) connects the (+) and (-) electric wires and the communication line drawn from each auxiliary control unit, between the auxiliary control units in parallel and controls turn-on of the entire LED module units by drawing another (+) and (-) electric wires and the communication line from one auxiliary control unit and connecting the electric wires and the communication line.
Patent KR-20070079638-A (KR)
Title: Extracts from zizyphus jujuba var. inermis rehder for antioxidation and functional food containing the same
Inventor: LEE IN SEON
IPC: A23L33/00
Filed: 2006-02-03
Abstract: A functional food containing Chinese date extract(Zizyphi Fructus) having antioxidant activity is provided. The functional food is a natural antioxidant having excellent antioxidant effect and has an effect of preventing aging and various diseases. A functional food contains at least 0.01% by weight of Chinese date extract and food acceptable additives and is selected from a formulation comprising a tablet, granule, soft gelatin capsule and liquid. The Chinese date extract is obtained by extracting Chinese date in alcohol, water or a mixture thereof.
Patent KR-20060090583-A (KR)
Inventor: IZUCHI TOSHIRO
IPC: H04R1/02
Filed: 2006-02-03
Abstract: 본 발명은, 방진처리를 조립 공정의 일부로서 자동화하기 위해서, 자동화에 적합한 구조의 방진 마이크로폰을 제공하는 것을 목적으로 한다. 
     본 발명에서는, 소리 구멍을 갖는 전도성의 하우징(캡슐)의 내측에, 소리 구멍을 덮는 판 형상 또는 필름 형상의 방진부를 구비한다.  방진부에는, 적어도 소리 구멍과 대응하는 부분에 복수의 세공을 갖고, 또한, 세공을 갖지 않는 부분도 갖는다.  또, 일렉트릿 콘덴서 마이크로폰의 경우에는, 마이크로폰의 성능의 관점에서, 방진부를 전도성으로 한다.  또, 리플로우조에서의 납땜 처리의 관점에서, 내열성을 갖는다.  또한, 각 세공은, 사용 환경에 맞춰 설계되는 것이 바람직하지만, 입술 근처에서 사용하는 것을 전제로 할 경우는, 각 세공의 면적은 0.01㎟이하로 한다.  또, 방진효과의 향상을 위해, 세공의 부분에 발수가공을 실시해도 좋다. 
       
     하우징, 방진부, 세공, 전도성, 일렉트릿, 리플로우조, 소리구멍
Patent KR-20070079980-A (KR)
Title: Cathode material containing ag nano particle as conductive material and lithium secondary battery comprising the same
Inventor: KOO CHANG WAN
IPC: H01M4/13
Filed: 2006-02-06
Abstract: Provided are a positive electrode active mass which can improve the capacity of a battery even by adding a small amount of a conductive material by using a silver nanoparticle, and a lithium secondary battery containing the positive electrode using the positive electrode active mass. The positive electrode active mass comprises a positive electrode active material; 0.2-2.0 wt% of a silver nanoparticle having an average particle size of 5-100 nm as a conductive material; and a binder. Preferably the silver nanoparticle is prepared by reacting AgNO3 and NaBH4 by sol-gel method; and sintering the obtained one at a temperature of 500-700 deg.C under nitrogen atmosphere of high purity to remove the impurities.
Patent KR-20070089340-A (KR)
Title: Video displaying apparatus and control method thereof
Inventor: JUNG JAE WOOK
IPC: H04N3/16
Filed: 2006-02-28
Abstract: A video display apparatus and a control method thereof are provided to improve deflection force through digital deflection correction, thereby reducing power loss. A signal input unit(110) receives a video signal including video information and synchronization information of a video configured with plural pixels. A video display unit displays the video by generating an electronic beam based on the video information. A deflection unit(150) performs scanning by deflecting the electronic beam based on the synchronization information. A video correction unit(130) corrects the video information so that an pixel of the inputted video can be consistent with a location of a pixel corresponding to the pixel of the inputted video.
Patent KR-20070023495-A (KR)
IPC: A41B13/06
Filed: 2006-03-07
Abstract: 본 발명은 통기성 아기 포대기에 관한 것으로서, 아기의 등부분과 엉덩이부분을 감싸는 덮개와, 덮개에 고정되며, 사용자의 어깨에 지지되는 어깨띠와, 덮개에 마련되며, 덮개로부터 아기의 이탈을 방지하도록 아기를 지지하는 지지수단과, 덮개에 마련되며, 메쉬 재질로 이루어지는 통기부를 포함한다. 따라서, 본 발명은 아기를 사용자에게 밀착시킴으로써 아기의 체중에 대한 사용자의 부담을 감소시키면서도 아기에게 통기성을 제공함으로써 더운 날씨에도 아기가 시원함을 느끼도록 하여 쾌적하고도 위생적인 환경을 제공하는 효과를 가지고 있다.
Patent KR-20060100287-A (KR)
Inventor: ENGSTROEM TORD
IPC: B23C5/20
Filed: 2006-03-16
Abstract: 본 발명은 중심 (C) 으로부터 떨어져 위치하고 코너에서 만나는 한 쌍의 주절삭날 (4) 을 포함하며, 상기 코너에서 주절삭날은 표면 다듬질용인 보조날에 이어지며, 이 보조날은 주절삭날 사이의 상기 코너를 규정하는 이등분선과 교차되며, 각각의 주절삭날의 내측에는 경사면 (11) 이 형성되어 있으며, 이 경사면은 칩 면 (1) 의 카운터싱크 바닥면 (12) 쪽으로 경사져 있는 정면 밀링 인서트와 관련이 있다.      상기 바닥면 (12) 보다 높게 위치하는 윗면 (16) 을 가지는 견부 (15) 가, 보조날 (5) 로부터 상기 이등분선을 따라서 안쪽으로 형성되어 있고, 보조날과 작용시 상호협력하는 주절삭날 (4) 의 상기 경사면 (11) 이 상기 견부 (15) 에서 끝난다.
Patent KR-20060104914-A (KR)
Inventor: YUN MAN SUN
IPC: A46B13/02
Filed: 2006-03-27
Abstract: 본 발명은 초음파 진동과 수동 브러쉬가 가능한 압전 초음파 진동자 칫솔에 관한 것으로서, 더욱 상세하게는 초음파 진동과 수동식 브러쉬를 복합적으로 사용하여 구강 내 청결과 초기에 형성된 연질의 플러그 제거 및 잇몸과 치아사이에 낀 박테리아 파괴 및 번식을 억제하고 구내염의 재발 방지와 구강 염증의 치료를 증진시킬 수 있으며, 칫솔모지지대의 교환이 간단하게 이루어지도록 한 초음파 진동과 수동 브러쉬가 가능한 압전 초음파 진동자 칫솔에 관한 것이다. 
     이를 실현하기 위하여 본 발명은 몸체(100)와 연장부(120)에 칫솔모(132)가 장착되는 칫솔모지지대(130)를 구비하고 있으며, 몸체 내부에 초음파 진동자가 장착된 초음파 칫솔에 있어서, 
      초음파 칫솔을 온, 오프하는 스위치부(110)와; 
     구동 전원을 공급하는 충전용배터리팩(111)과; 
     다중주파수를 발생시키는 구동회로(112)와; 
     구동회로와 연결하기 위한 전선(113)과; 
     원호(125')와 직선(125'')으로 형성된 다각형 형상으로써 이방성을 가지는 경계면(125a)을 구비하고 있으며 길이 진동, 굴곡 진동, 비틀림 진동을 동시에 발생시켜 다중 주파수 진동을 발생시키는 금속탄성체(125)와; 
     상기 금속탄성체(125)에 의해 발생되는 초음파를 입안의 용액을 통하여 용이하게 전달하기 위해 적어도 한개 이상의 개구(131)가 형성되고, 개구의 일면에 다 수의 칫솔모(132)가 형성되고, 칫솔 손잡이 일측 홈(123)에 판스프링(124)을 형성하여 걸림턱(125)이 착탈 가능하게 장착되어 일정한 체결력이 유지되는 칫솔모지지대(130)와;  
       상기 몸체(100)의 연장부(120) 내측에 방수를 위해 밀폐되도록 착설되는  실리콘고무패킹(121)를 포함하여 구성되는 것을 특징으로 한다. 
     본 발명에 따르면, 칫솔모지지대에 적어도 한개 이상의 개구를 형성하고, 개구의 일면에 다수의 칫솔모가 형성되도록 하여 전방위로 초음파가 구강내의 용액에 효율적으로 전달되는 효과가 있으며, 금속탄성체의 끝단에 직선부위와 곡면부위로 이루어지는 다각형 형상의 연마면을 형성하여 길이 진동, 굴곡 진동, 비틀림 진동등의 다양한 주파수를 발생시켜 강력한 세척, 세정효과를 제공한다.  
     또한, 칫솔 손잡이 일측에 홈과 판스프링을 형성하여 칫솔모지지대가 착탈 가능하게 장착될 수 있도록 하여 일정한 체결력이 유지되고 칫솔모지지대의 교체를 손쉽게 할 수 있는 효과가 있다.  
       
     초음파진동, 브러싱, 칫솔.
Patent KR-20060106901-A (KR)
Inventor: FUNABASHI KAZUHIKO
IPC: H01M50/296
Filed: 2006-04-04
Abstract: 무선 전력 공구는 모터의 전원으로서 리튬 배터리를 사용하고, 과전류 보호 회로가 제공된다.  과전류 보호 회로는 모터의 구동 개시시에 과전류가 순간적으로 흐르도록 하며, 모터가 전력 공구의 사용 동안에 정지 상태(locked state)로 될 때에 흐를 수도 있는 과전류를 차단한다. 
       
     전기 드릴, 리튬 배터리, 마이크로컴퓨터, FET, 전기자 권선
Patent KR-20070101503-A (KR)
Title: Liquid crystal display
Inventor: KIM DONG GYU
IPC: G02F1/1343
Filed: 2006-04-11
Abstract: A liquid crystal display apparatus is provided to provide a plurality of gate lines, many pairs of first and second data lines, and a first and second pixel, thereby preventing quality of an image from being deteriorated while operating column inversion and implementing uniform optical characteristics of all pixels. A liquid crystal display apparatus comprises the following parts: a plurality of gate lines(121,129) for transmitting a gate signal; a plurality of first and second data lines(171b,179a,179b), which are crossed with the gate line, which are oppositely formed centering on the pixel electrode; and a first and second pixel having a plurality of pixel electrodes including a first and second sub-pixel, a first drain electrode which is located in a right side around the first data line, and a second drain electrode which is located in a left side around the second data line.
Patent KR-20070102254-A (KR)
Title: Process for the preparation of carbapenem intermediates
Inventor: CHUNG YUN SUNG
IPC: C07D205/08
Filed: 2006-04-14
Abstract: A process for the preparation of carbapenem intermediates, 4-[3-carboxy-3-diazo-2-oxopropyl] azetidin-2-one derivatives, is provided to improve preparation yield by using a titanium tetrachloride necessary to prepare the intermediates as different Lewis acid. A process for the preparation of carbapenem intermediates represented by the formula(3) comprises the steps of: reacting compounds represented by the formula(2) in the presence of silylation reagent, base and iodization reagent to form its silyl enolate; and reacting the silyl enolate of compounds represented by the formula(2) with compounds represented by the formula(1) in the presence of a catalyst amount of titanium tetrachloride at 5-10 deg.C for 5-7 hours, wherein R^1 is triethylsilyl, trimethylsilyl or t-butyldimethylsilyl; R^2 is H or CH3; R^3 is benzyl, allyl, C1-4 alkyl or p-nitrobenzyl. The silylation reagent is trimethylsilyl chloride, trimethylsilyl bromide or trimethylsilyl iodide, the base is triethylamine or pyridine and the iodization reagent is KI, NaI or I2.
Patent KR-20070096719-A (KR)
Title: Position detecting apparatus and lens driving apparatus
Inventor: SUZUKI MASAO
IPC: G02B7/04
Filed: 2006-04-15
Abstract: A position detecting device and a lens driving device are provided to make the length of a box body short by restricting a magnetic scale from slipping out and to secure the high degree of freedom of attachment position by installing plural MR(Magneto-Resistive) sensors separately from each other. A position detecting device is composed of a box body(4); a moving body(9) linearly moving for the box body; magnetic scales(27a,27b) fixed to the moving body; and plural MR sensors(29a,29b) fixed to the box body. The magnetic scale has magnetic planes having different magnetic poles arranged in turn according to the movement direction of the moving body. Plural MR sensors are aligned in one direction according to the movement direction of the moving body. If the moving body moves, linear movement displacement of the moving body for the box body is detected by detecting the magnetic poles of the magnetic scale facing each other, in turn through plural MR sensors and then generating an output signal.
Patent KR-20070061049-A (KR)
Title: Phase lock detector
Inventor: CHEUNG TAE SIK
IPC: H03L7/085
Filed: 2006-04-25
Abstract: A phase lock detecting apparatus is provided not to affect operation of a phase synchronizing circuit by using a reference signal and a feedback signal instead of using an internal signal of the phase synchronizing circuit. A phase lock detecting apparatus includes a variable delaying unit(10), a control signal generating unit(12), and a phase lock detecting unit(14). The variable delaying unit generates a delay reference signal by delaying a reference signal in response to a control signal. The control signal generating unit compares phases of the delay reference signal and the feedback signal, and generates the control signal including information that the phase of the delay reference signal exceeds the feedback signal by a predetermined critical value, and information that the phase of the feedback signal exceeds the delay reference signal by the predetermined critical value. The phase lock detecting unit(14) detects a phase lock based on the control signal.
Patent KR-20060117279-A (KR)
Title: Angle grinder
Inventor: GALLAGHER WILLIAM F
IPC: B24B23/02
Filed: 2006-05-15
Abstract: An angle grinder is provided to improve the convenient performance of the human engineering angle grinder by mounting the trigger moving between the first and second positions. A trigger assembly for a power device is composed of a switch(24) placed in the housing to operate a motor(28); a trigger(46) extended from the housing and contacted by a user to have first and second arms and move in a pivot method between first and second positions; a locking member geared with the second arm of the trigger; and the motor placed in the housing, wherein the second arm is contacted with the switch to operate the motor when the trigger is at the second position, the second arm is geared by the locking member, and the second arm is moved from the switch and is not geared with the locking member when the trigger is at the first position.
Patent KR-20070111214-A (KR)
Title: A driving safety maintenance apparatus for a vehicle
Inventor: KIM SEOK MIN
IPC: B60W10/22
Filed: 2006-05-17
Abstract: An apparatus for maintaining driving safety for a car is provided to prevent handle from being inclined or rolled by external conditions such as wind pressure during the driving, thereby ensuring excellent driving safety. An apparatus for maintaining driving safety for a car comprises: a detection sensor(100) for detecting whether a car is in a driving speed condition higher than a critical speed affected by handle inclination or rolling; a pair of pitot tubes(200) for measuring the wind pressure generated in the front and at both sides of the car when the car is in a driving speed higher than the critical speed as detected by the detection sensor; a control section(300) for receiving the left-side wind pressure, right-side wind pressure and front-side wind pressure, and for determining the difference in pressure between the left side of the car and the right side of the car; an electronic steering column lock(400) for locking a steering column for a predetermined time so as to prevent handle inclination when the pressure difference obtained from the control section is higher than the reference value; and a pair of electronic control suspensions(500; ECS) for preventing rolling by increasing a damping force for a predetermined time.
Patent KR-20070116297-A (KR)
Title: Plasma processing apparatus having active bias control circuit and control method of the same
Inventor: WI SOON IM
IPC: H01L21/3065
Filed: 2006-06-05
Abstract: A plasma processing apparatus having an active bias control circuit and a control method thereof are provided to process a plasma uniformly by controlling an ion energy within the plasma to be represented through an active bias control and a gas supply control of a main power. A plasma chamber(224) includes an electrostatic chuck for clamping a processed substrate. An electrostatic power source(270) supplies a direct current power to generate electrostatic power. A bias power circuit supplies a high frequency bias power to the electrostatic chuck. A voltage detector(280) detects a voltage which is induced to the electrostatic chuck. A controller(290) controls an output of an RF generator of the bias power circuit based on the induced voltage of the detected electrostatic chuck.