Patent SG-11201807434Q-A (SG)
Title: A piezoelectric thin film element
Inventor: MARDILOVICH PETER
IPC: H01L41/318
Filed: 2017-03-14
Abstract: WO 17 / 15 83 45 Al (12) INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property Organization International Bureau (10) International Publication Number (43) International Publication Date WO 2017/158345 Al 21 September 2017 (21.09.2017) WIPO I PCT (51) International Patent Classification: HO1L 41/187 (2006.01) H01L 41/08 (2006.01) HO1L 41/318 (2013.01) (21) International Application Number: PCT/GB2017/050696 (22) International Filing Date: 14 March 2017 (14.03.2017) (25) Filing Language: English (26) Publication Language: English (30) Priority Data: 16160658.7 16 March 2016 (16.03.2016) EP 1604457.0 16 March 2016 (16.03.2016) GB (71) Applicant: XAAR TECHNOLOGY LIMITED [GB/GB]; 316 Science Park, Cambridge CB4 OXR (GB). (72) Inventors: MARDILOVICH, Peter; c/o Xaar Technology Limited, 316 Science Park, Cambridge CB4 OXR (GB). KO, Song-Won; c/o Xaar Technology Limited, 316 Sci- ence Park, Cambridge CB4 OXR (GB). TRO- LIER-MCKINSTRY, Susan; The Pennsylvania State University, N-227 Millennium Science Complex, Univer- sity Park, Philadelphia, Pennsylvania 16802 (US). BOR- MAN, Trent; c/o Xaar Technology Limited, 316 Science Park, Cambridge CB4 OXR (GB). (74) Agent: TLIP LTD; Leeds Innovation Centre, 103 Claren- don Road, Leeds Yorkshire LS2 9DF (GB). (81) Designated States (unless otherwise indicated, for every kind of national protection available): AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (84) Designated States (unless otherwise indicated, for every kind of regional protection available): ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG). Published: — with international search report (Art. 21(3)) (54) Title: A PIEZOELECTRIC THIN FILM ELEMENT 111111111111110111011111111111010111110111011111111111110111111111111111111111110111111 20 \ 24 22 25 -S--- 23 FIG. 6 (57) : A piezoelectric thin film element comprising a first electrode, a second electrode and one or more piezoelectric thin films there between wherein the first electrode is a platinum metal electrode having an average grain size greater than 50 nm and wherein a piezoelectric thin film adjacent the platinum metal electrode comprises a laminate having a plurality of piezoelectric thin film layers wherein a piezoelectric thin film layer contacting the platinum metal electrode comprises lead zirconate titanate (PZT) of composition at or about PbZr,,Tii-.03 where 0 < x < 0.60 and has a degree of pseudo cubic {100} orientation greater than or equal to 90%.