baber/WOPTO huggingface dataset:
Patent KR-20020075547-A (KR)
Title: Device and method for connecting remote subscriber in dslam system
Inventor: KIM CHEOL JIN
IPC: H04L12/12
Filed: 2001-03-26
Abstract: PURPOSE: A subscriber remote access apparatus and method in a DSLAM(Digital Subscriber Line Access Multiplexer) system is provided to offer a high speed Internet access service to users and a cost saving effect to operators by installing an RAS(Remote Access Server) in a DSLAM system. CONSTITUTION: A subscriber remote access apparatus in a DSLAM system is composed of a plurality of concentration parts(110), an RAS(120), a transmission part(130), and a control part(140). The concentration parts(110) concentrates subscriber data from a plurality of subscribers and outputs the subscriber data to the RAS(120) or the transmission part(130). The RAS(120) receives subscriber data from the concentration parts(110) through a bus and outputs the subscriber data to an external RAS(2). The transmission part(130) receives subscriber data from the concentration parts(110) through the bus and outputs the subscriber data to the external RAS(2). The control part(140) sets up a virtual channel for subscriber data between the concentration parts(110) and the RAS(120) or between the concentration parts(110) and the transmission part(130).
Patent KR-20020075679-A (KR)
Title: Apparatus for storing and comparing PID to speed up detection of PID and its method
Inventor: MIN GYEONG PA
IPC: H04N21/434
Filed: 2001-03-27
Abstract: PURPOSE: A device and a method for storing and comparing PID(Packet Identifier) for high speed PID detection are provided to detect many PID values in spite of the use of small PID memory areas, and reduce the PID value comparison time of a single packet, thereby improving the entire decoding speed while reducing the buffer size. CONSTITUTION: A device for storing and comparing PID for high speed PID detection includes a plurality of comparison object PID storing units(560,570) for separating all comparing object PID values into two or more bit rows to store, a plurality of receiving PID storing units(510,520) for storing PID values of currently received packets by the bit rows of the same positions with the bit rows stored in the comparison object PID storing units, a plurality of comparators(530,540) for reading and comparing the PID values stored in the receiving PID storing units with the PID values stored in the comparison object PID storing units, and a controller(550) for determining whether to continue the comparison and generating PID value consistent signals or PID value inconsistent signals.
Patent KR-20020079262-A (KR)
Title: Silicon-Carbon briquet for increasing temperature of iron melt
Inventor: KANG BONG SU
IPC: C21C7/00
Filed: 2001-04-14
Abstract: PURPOSE: A silicon-carbon briquette is provided to increase temperature of iron melt while reducing dust scatter. CONSTITUTION: The silicon-carbon briquette for temperature elevation of iron melt is prepared by blending one component selected from ferrosilicon (Fe-Si) and silicone carbide (SiC) with carbon, and additionally a binder is added in an amount of less than 10 wt.%. The silicon-carbon briquette comprises 40 to 70 wt.% of silicon and 5 to 50 wt.% of carbon.
Patent KR-20020080668-A (KR)
Title: Audio mastication tool system using wireless electronic pen
Inventor: LEE JONG HUN
IPC: G06F3/0354
Filed: 2001-04-17
Abstract: PURPOSE: A voice authoring tool system is provided to progress various kinds of conferences being progressed remotely and effectively at low cost. CONSTITUTION: A projector(100) projects editing data transmitted from a recording medium. A display device(200) displays editing data projected from the projector(100) and displays written information of a user. A mike inputs voice information of a user. An electronic pen(300) is provided for writing down written information on the display device(200) electronically. A position measuring module(400) is provided for measuring a distance position being written from the electronic pen(300). A computer device(500) stores distance position information being transmitted from the position measuring module(400) and stores voice information being output from the mike.
Patent KR-20020083610-A (KR)
Title: Powder for make-up cosmetics having a cool feel, preparing method thereof and the cosmetics containing the same
Inventor: BAE HAN GYU
IPC: A61Q1/00
Filed: 2001-04-27
Abstract: PURPOSE: A cooling powder obtained by absorbing a cooling material in a titanium dioxide/zinc oxide/silica composite or mixed powder and coating a silicon copolymer is provided which can be used in making a makeup cosmetic having a cooling effect, ultraviolet-screening effect, water resistance, spreadability, makeup durability and usability. CONSTITUTION: About 5 to 25% by weight of a cooling material is subjected to absorption in 70 to 94.5% by weight of a composite or mixed powder of titanium dioxide, zinc oxide and silica having a particle size of 0.2 to 20μm, followed by coating 0.5 to 5% by weight of a silicon copolymer, dried and aged at 70 to 150deg.C for 5 to 48hr and then ground to produce a cooling powder. The makeup cosmetic for cooling contains 1 to 30% by weight of the cooling powder.
Patent KR-20010069736-A (KR)
Title: The reverse-emulsion air detraining admixture
Inventor: CHOI JIN HO
IPC: B01D19/04
Filed: 2001-05-02
Abstract: PURPOSE: A reversal emulsion defoamer is provided, which has a viscosity of 200-400 cps at 25 deg.C and is excellent in water dispersibility and particle size distribution needed for a good defoaming force, so that the defoamer is easy and safety to use and can be used for wastewater treatment plants, dyeing process, paper-making process where a large amount of water is consumed. CONSTITUTION: The defoamer comprises 15-25 wt.% of C16-C30 long-chained fatty alcohol, 2-9 wt.% of C12-C40 alpha olefin, 1-5 wt.% of glycerol trioleate, 0.5-5 wt.% of polyoxy ethylene octyl phenyl ether, 65-75 wt.% of water and 0.02-0.1 wt.% of xanthan gum.
Patent KR-20020084781-A (KR)
Title: Manufacturing Method of Absorptive Mineral-Oligopeptide by Enzyme in The Human Body and Health Food Using the Same
Inventor: JI SEONG GYU
IPC: A23L1/304
Filed: 2001-05-03
Abstract: PURPOSE: Provided are a manufacturing method of mineral-oligopeptide capable of absorbed into a human body by an enzyme and a health food using the same. CONSTITUTION: The manufacturing method of mineral-oligopeptide capable of being absorbed by an enzyme in a human body comprises the steps of: suspending and dissolving proteins in water of which pH is regulated to pH 4.5-5.0; adding protease to the solution to manufacture oligopeptides; adding bivalent cation supply source to the oligopeptide for the chelating reaction and neutralizing it; and concentrating and drying the chelate compound then pulverizing it.
Patent KR-20020085361-A (KR)
Title: A method for making a donor Wafer used in a SOI wafer manufacturing process
Inventor: HONG JIN GYUN
IPC: H01L21/84
Filed: 2001-05-08
Abstract: PURPOSE: A method of making a donor wafer for fabricating an SOI(Silicon On Insulator) wafer is provided to reduce a processing time by improving a processing method for reusing the donor wafer. CONSTITUTION: An oxide layer(11) is formed on a donor wafer. A hydrogen ion implantation layer is formed in the inside of the donor wafer by implanting hydrogen ions into the donor wafer. The donor wafer having the oxide layer(11) and the hydrogen ion implantation layer is combined with a handle wafer(20). The oxide layer(11) of the donor wafer is adhered on an upper portion of the handle wafer(20). A crack is formed on the hydrogen ion implantation layer of the donor wafer. An SOI wafer is formed by separating a single crystalline silicon layer from the oxide layer(11) of the donor wafer(10a) on the upper portion of the handle wafer(20). A thermal process for the SOI wafer is performed. The donor wafer(10a) is processed.
Patent KR-20020087815-A (KR)
Title: Alcohol resistant medium for Yeast Saccharomyces cerevisiae and high concentration cultivation of biomass
Inventor: EOM CHAN HO
IPC: C12N1/16
Filed: 2001-05-16
Abstract: PURPOSE: An alcohol resistant medium composition for yeasts and a method for culturing yeast cells therein medium in higher yield are provided. The alcohol fermentation is mainly occurred under anaerobic condition and cultivation of yeast cells is mainly occurred under aerobic condition. The raw materials are allowed as food additives, so that post-treatment of products is not required. CONSTITUTION: The alcohol resistant medium composition for yeasts contains defatted milk as a nitrogen source, high concentration of sugar, which inhibits infection of various bacteria and induces increase of alcohol yield, and yeast extract, wherein the yeast is Saccharomyces cerevisiae(KCTC 7107) or (KCTC 7928). The alcohol fermentation or the cultivation of yeast cells is independently carried out by anaerobically or aerobically culturing Saccharomyces cerevisiae(KCTC 7107) or (KCTC 7928) in the alcohol resistant medium composition in a batch reactor at 25 to 35 deg. C for 1 to 3 days.
Patent KR-20010109101-A (KR)
Title: 덮개체의 개폐지지기구
IPC: B60R7/04
Filed: 2001-05-18
Abstract: (과제) 2축 회동식 덮개체의 개폐지지기구에 있어서, 덮개체의 개폐동작시의 마찰저항을 저감화함에 의해서 그리스 등의 윤활제를 사용하지 않고서도 원활한 개폐조작을 할 수 있게 함으로써, 그리스를 폐지하는 것을 가능하게 하는 것을 목적으로 한다. 
     (해결수단) 가이드구멍(12)의 내면과 제 2 슬라이드축(32)의 마찰계수를 μ, 회동축(11)과 제 1 슬라이드축(31)을 연결한 선(D)과 회동축(11)과 제 2 슬라이드축(32)을 연결한 선(C)이 이루는 각을 α라 한 경우, α≥2 μtan -1 이 되는 식을 만족하도록 회동축(11), 제 1 슬라이드축(31) 및 제 2 슬라이드축(32)을 형성한다.
Patent KR-20010069971-A (KR)
Inventor: LEE TAE HEE
IPC: G06Q30/06
Filed: 2001-05-23
Abstract: 본 발명은 인터넷을 비롯한 모든 통신망 상의 3차원 가상 현실 공간에서의 가상 생활이 실제 현실 생활에 직접적으로 미칠 수 있는 영향을 극대화 시키고 다양한 오락적 요소, 게임적 요소, 전자상거래 요소 등을 포함한 가상 객체등의 커뮤니티 방법들을 제어 체계에 의해서 구성하여 현실 생활과 밀접하거나 또는 포함된 또 하나의 세계를 만드는 방법이다. 본 발명에서는 3차원 가상 현실 공간의 제어 체계 속에서 실명인의 가상 객체가 가상 활동을 통하여 얻어지는 가상 수익 생성을 구현하고 데이터베이스화 하며 제어하는 서버. 
     상기의 가상수익을 가상 객체의 실명인의 컴퓨터 상에 가상 화폐로 표시하고 이 가상 화폐를 현실의 화폐와 제어 체계에 의한 환율을 적용하여 교환하는 방법. 
     상기 방법을 제어하고 실시간으로 환율을 표시하고 계산해 주며 그 정보를 각각의 서버와 각각의 컴퓨터 상에 작용하고 종합 운용 서버에 지시하는 환전 제어서버. 
     상기 현실 화폐로의 교환에 필요한 가입을 통하여 3차원 가상 현실 공간에 건축되는 가상 상가의 실명 상가 가 납부하는 금액을 총합하거나 실시간 계산하며 제어 체계를 통하여 환전을 위한 금액으로 가상 예치하는 시스템이 포함됨을 특징으로 하는 실명인이 생성한 가상 객체의 가상 수익을 실명인의 실수익으로 전환하는 방법이다. 
     또한 상기의 가상 객체가 3차원 가상 현실 공간에 입주하여 건축된 가상 상가에 진입하거나 상가 내외부에 디스플레이된 항목 또는 버튼에 접속 또는 이용하는 행위를 통하여 가상 수익을 생성하게 하는 방법; 
     상기의 3차원 가상 현실 공간의 가상 정치 구현을 위한 선거 게임에 참여하고, 투표하는 행위를 통하여 가상 수익을 생성하게 하는 방법; 
     상기의 가상 수익 생성을 위한 이용 증대를 통하여 인지도를 높이고 상기의 상가 내외부에 디스플레이된 항목 또는 버튼에 접속 또는 이용하는 행위를 통하여 실명 상가의 세부적인 영업 홍보 사항의 인지도를 증대시키는 광고 방법; 
     상기의 디스플레이 된 항목 또는 버튼에 디스플레이의 제어 체계를 구축하고 각기 다른 역할을 수행하도록 구현하는 시스템 등을 포함하는 가상 객체의 활동을 제어하는 실명인이 실명 상가의 인지도를 높이는 방법이다. 
     또한 인터넷을 비롯한 모든 통신 망 상에서 구현되는 3차원 가상 현실 공간에서 가상 객체를 통한 전자상거래 가운데 구매자가 구매하고자 하는 상품의 품목을 정하면 구매하고자 하는 상품을 판매하는 여러 쇼핑몰 중에서 배송거리, 배송시간, 배송방법, 판매가격, 지불방법 등으로 분류하여 최적의 쇼핑몰 순으로 표시하고 바로가기 기능을 주는 전자상거래 시스템; 
     상기의 전자상거래에 있어서 가상 객체를 통한 2인 이상의 구매자가 동일한 쇼핑몰의 동일한 화면으로 공유 접속하고 서로 문자 또는 음성을 통하여 대화를 하며 구매할 수 있는 전자상거래 시스템을 포함하는 전자상거래 방법이다. 
     또한 인터넷을 비롯한 모든 통신망 상에서 구현되는 선거 또는 투표에 있어서 실명인이 생성한 가상 객체가 출마하고 실명인이 생성한 가상 객체를 통하거나그 실명인이 투표하는 3차원 가상 현실 공간의 선거를 구현하는 방법; 
     상기 선거 구현 방법을 통하여 선출된 가상 위정자의 역할을 규정하고 제어하는 서버; 
     상기의 가상 위정자가 소속된 3차원 가상 현실 공간의 제어 체계 내에서 소속된 3차원 가상현실 공간을 가상 위정자의 실명인의 의지에 따라 발전시키거나 변화 시키는 과정; 
     상기의 3차원 가상 현실 공간의 발전 또는 변화에 필요한 가상 화폐를 제세, 공과금, 헌금, 모금, 수수료, 출자의 형태로 모집하는 방법이 포함 됨을 특징으로 하는 3차원 가상 현실 위정 시스템이다. 
     상기의 방법들을 통해 가상 세계 또는 3차원 가상 현실 공간을 발전시키는 방법 또는 가상과 현실과의 연결 방법으로 본 발명에 의하면 현실 사회에 종속 된 또 하나의 사회 공간으로 문화를 생산하고 수익을 창출하며 직접적인 영향을 주는 세계로 발전하게 된다.
Patent KR-20020090814-A (KR)
Title: Roller apparatus for preventing a inclination in a strip's tail
Inventor: CHO SEONG UK
IPC: B21C47/00
Filed: 2001-05-29
Abstract: PURPOSE: A roller apparatus for preventing skewness of strip tail part is provided to prevent skewness of a strip by simultaneously rotating rollers in the state that the rollers are closely adhered onto a strip coil and moving the strip coil in an axial direction of the rollers, and positioning the center of the rollers to a neutral position. CONSTITUTION: The roller apparatus for preventing skewness of strip tail part comprises a roll part comprising a roll(110) that is axially moved with both ends of the roll(110) being inserted into a sliding block on the inner surface of which a plurality of sliding bearings are arranged; a roll frame part the front side end of which is adhered onto the upper surface of the sliding block of the roll part, into the central bent part of which a frame shaft(202) is inserted so that the frame shaft(202) is axially installed on frame shaft blocks(207), and the rear side end of which is connected to cylinders(203,203') supported to cylinder brackets(204,204'); and a roller centering part comprising push bars(310) which are positioned at both sides of the roll(110) of the roll part by a support base(301) and are moved side to side by a driving motor(314) that is attached to one side of the push bars(310) with screws being inserted into the driving motor(314).
Patent KR-20010110649-A (KR)
Title: 자동차용 점화코일
IPC: F02P3/02
Filed: 2001-05-31
Abstract: 직선축을 가진 자성코아(12)와, 이 자성코아(12)와 동축상으로 배치되어 고전압코일(18)을 지지하도록 된 2차스풀(16), 이 2차스풀(16)의 외부에 동축상으로 배치되어 저전압코일(22)을 지지하도록 된 1차스풀(20), 내부에 상기 자성코아(12)와 2개의 스풀(16, 20)로 이루어진 조립체가 수납되는 원통형상 케이싱(24) 및, 플라스틱재질로 된 콘넥터몸체(30)와 이 콘넥터몸체(30)에 고정된 복수의 금속제 접촉부(32)로 이루어진 저전압콘넥터(28)를 갖추어 이루어진 자동차용 점화코일에서, 상기 콘넥터본체(30)가 상기 1차스풀(20)과 일체적으로 구성된 것을 특징으로 한다.
Patent KR-20020092674-A (KR)
Title: Variable displacement swash plate type compressor
Inventor: LEE MIN JU
IPC: F04B27/08
Filed: 2001-06-05
Abstract: PURPOSE: A variable displacement swash plate compressor is provided to improve durability of the compressor. CONSTITUTION: A compressor includes a front housing part(21), a second housing part(22) and a cylinder block joined between the housing parts; a rotary axis(27) extending from the front housing part inwardly; radial bearings(28) supporting the rotary axis to rotate; a rotating body(200) joined to the rotary axis to rotate together; a swash plate(210) joined to the rotating body to slide and having sloping angle according to cooling load; a sealing part installed on a peripheral surface of the rotary axis to prevent leakage of pressure from the housing parts; and an oil supply device having a first oil supply passage formed as at least one hole from an inside wall of the front housing part to a front side of the front housing part corresponding with the radial bearings and the sealing part to supply the radial bearings and the sealing part with oil, a plurality of second oil supply passages formed for oil to flow through the inside wall of the front housing part and a third oil supply passage fluidically connecting the first oil supply passage and the second oil supply passages.
Patent KR-20030007983-A (KR)
Title: Method for searching and providing information on a company and computer readable record medium on which a program therefor is recorded
Inventor: KANG HAN GU
IPC: G06F17/30
Filed: 2001-06-08
Abstract: PURPOSE: A method for searching and supplying company information is provided to simplify a searching stage of a searcher by classifying and storing company information in an operator server, receiving a signal including a URL of an operator site and an index followed from a searcher computer, and transmitting company information corresponded to the index to the searcher computer. CONSTITUTION: A user who wishes to supply company information to an operator site joins to an operator site as a member through one's computer(S2). At this time, a web server receives company information from the company, and a DB server stores the company information in a company information DB and stores other information in a member DB(S4). The web server endows a local index, a detailed local index, a businessman classification index, and an index according to business categories to the company using basic information stored in the member DB, stores each index with respect to the company in an index DB, and a company information database is constructed(S6). If a searcher inputs an index of company information for a search after a URL of the operator site and transmits a search request to the web server, the web server searches a company requested by the searcher in the constructed DB, and transmits company information corresponded to the company to the searcher(S8).
Patent KR-20010113523-A (KR)
Title: Solid semiconductor element, ink tank, ink jet recording apparatus provided with ink tank, liquid information acquiring method and liquid physical property change discriminating method
IPC: B41J29/393
Filed: 2001-06-16
Abstract: A communication system in which a solid semiconductor element is used, comprising: a plurality of liquid containers in which said respective solid semiconductor elements are disposed; an oscillation circuit formed in said solid semiconductor element and provided with a conductor coil; information acquiring means for acquiring the information in said container; receiving means for receiving a signal from the outside; information communicating means for transmitting the information to the outside when a predetermined response condition is satisfied; an outside resonance circuit, disposed outside said plurality of liquid containers, for generating a power with respect to the oscillation circuit of said solid semiconductor element by electromagnetic induction; and outside communication means for bidirectionally communicating with said receiving means and said information communicating means of said solid semiconductor element.
Patent KR-20030000327-A (KR)
Title: Front Floor Pannel in Vehicle
Inventor: LEE SANG SEOL
IPC: B62D25/20
Filed: 2001-06-23
Abstract: PURPOSE: A front floor panel is provided to use as a storage space and to function as a reinforcing structure to be coped with a side shock of a vehicle by arranging a reinforcing panel. CONSTITUTION: A reinforcing panel(20) is combined with a cross member(12), a center sill, a rear sill(16) and a seal side in the back of a front floor panel. Thereby, a foothold is offered on the basis of the center sill. A closed section of the foothold is extended to the cross member. Thereby, the closed section is functioned as a reinforcing structure. A lid(26) is formed in the reinforcing panel with an opening(24). Thereby, small goods are stored easily.
Patent KR-20030003849-A (KR)
Title: Copper electrode-based electrochemical sensor for measurement of COD and the method of measuring of COD and the automatic analyzer thereof
Inventor: HWANG HO JAE
IPC: G01N27/30
Filed: 2001-07-04
Abstract: PURPOSE: A copper electrode-based electrochemical sensor, method for measurement of chemical oxygen demand using the same and automatic analyzer system thereof is provided to shorten measurement time and improve accuracy of measurement by oxidizing organic substances at a low oxidation potential and measuring current generated from the oxidation. CONSTITUTION: An electrochemical sensor comprises an operating electrode(1), a relative electrode(2) and a reference electrode(3), wherein the operating electrode is a copper electrode. The reference electrode is a silver/silver chloride electrode, and the relative electrode is a platinum electrode. A method for measurement of chemical oxygen demand, comprises the steps of making a calibration line by measuring oxidation current in proportion to the chemical oxygen demand with respect to the standard solution; and measuring oxidation current with respect to a sample and applying the oxidation current to the calibration line.
Patent KR-20020009418-A (KR)
Inventor: BALSAN CHRISTOPHE
IPC: H01L21/768
Filed: 2001-07-14
Abstract: PURPOSE: A method of depositing a conformal hydrogen-rich silicon nitride layer onto a patterned structure is provided to use the SACVD Centura tool with a SiH4 based chemistry at a temperature and a pressure in the 600-950 deg.C and 50-200 Torr ranges respectively. CONSTITUTION: In the fabrication of EDRAM/SDRAM silicon chips with ground rules beyond 0.18 microns, a Si3N4 barrier layer is deposited onto the patterned structure during the borderless polysilicon contact fabrication. It is required that this layer be conformal and has a high hydrogen atom content to prevent junction leakage. These objectives are met with the method of the present invention. In the first embodiment, the Si3N4 layer is deposited in an RTCVD(Rapid Thermal Chemical Vapor Deposition) reactor using a NH3/SiH4 chemistry at a temperature and a pressure in the 600-950 deg.C and 50-200 Torr ranges respectively. In the second embodiment, it is deposited in an LPCVD(Low Pressure Chemical Vapor Deposition) furnace using a NH3/SiH2Cl2 chemistry(preferred ratio 1:1) at a temperature and a pressure in the 640-700 deg.C and 0.2-0.8 Torr ranges respectively.
Patent KR-20010088459-A (KR)
Inventor: JEON BYUNG GUN
Filed: 2001-07-11
Abstract: PURPOSE: An electronic commerce method is provided to enable a user to purchase a commodity in an online shopping mall by using a voice, a moving picture and a shopping host as well as in a real world shop so that it enables the user to negotiate the purchase deal over the Internet like in a real world shop. CONSTITUTION: The method comprises steps of arranging various commodity data on a main server, constructing various stores over a network, e,g, a large sized discount market or a lingerie store, publicizing the shopping mall, collecting members by enabling users to input personal data, storing the personal data at a member management database, enabling the member to receive a mobile service after receiving a shopping host service at first, offering a moving picture of a commodity to the member, enabling the member to purchase thee commodity, enabling the member to make a conversation with a seller via a voice service system if the member wants to know detailed information on the commodity, and delivering the commodity to the member by using an order and a delivery system.
Patent KR-20020011093-A (KR)
Inventor: DOCANTO MANUEL
IPC: G03F7/09
Filed: 2001-07-28
Abstract: PURPOSE: Provided is an antireflective coating composition obtained by the addition of a basic material to an antireflective composition to significantly decrease or even completely eliminate notching of an overcoated photoresist relief image. Therefore, the antireflective compositions can be effectively used at a variety of wavelengths used to expose an overcoated photoresist layer, including 248nm and 193nm. CONSTITUTION: The antireflective coating composition comprises a basic material and a crosslinking agent. A coated substrate comprises: an antireflective composition layer containing the basic material and crosslinking agent; and a photoresist layer on the antireflective composition layer, wherein the basic material has a pKa of about 3 or more, contains one or more of N, O, S, amine group, hydroxy, ether and sulfide, and has a molecular weight of about 500 or less.
Patent KR-20030012112-A (KR)
Title: Method of forming a semiconductor dielectric layer
Inventor: CHO JIK HO
IPC: H01L21/76
Filed: 2001-07-30
Abstract: PURPOSE: A method for forming an insulating layer in a semiconductor device is provided to be capable of preventing dishing phenomenon by performing high density plasma processing. CONSTITUTION: The first insulating pattern(22) made of nitride is formed on a semiconductor substrate(20). A trench isolation region is formed by etching the exposed substrate(20). The second insulating layer(24) is then formed in the trench isolation region. By performing O2 plasma treatment into the surface of the second insulating layer(24), a plasma treated region(26) having densified oxide components is formed. Then, the second insulating layer(24) is planarized by CMP(Chemical Mechanical Polishing).