baber/WOPTO huggingface dataset:
Patent KR-20060102934-A (KR)
Inventor: JUN HO KYUNG
IPC: G01S5/18
Filed: 2005-03-25
Abstract: 수중에서 저주파 음원을 연속적으로 발생할 수 있는 저주파 음원 발생장치가 개시된다. 저주파 음원 발생장치는 복수개의 벌브, 벌브를 소정의 경로를 따라 이송하는 벌브 이송부, 및 벌브의 이송 경로에 인접하게 장착된 벌브 타격부를 포함한다. 해양 환경에서 저주파 음원을 발생함으로써 해양 저면에 대한 자료를 수집할 수 있으며, 저주파 음원을 1회만 발생할 수 있는 종래의 음원 발생장치에 비해 저주파 음원을 여러 회 발생할 수 있어 해양 환경을 탐지하는 데에 많은 이로움이 있다. 
       
     저주파 음원, 벌브, 전구
Patent KR-20060103581-A (KR)
Inventor: KIM CHOUL GEUN
IPC: D06F58/20
Filed: 2005-03-28
Abstract: 본 발명은 건조기의 소화장치에 관한 것으로서, 건조기 내부의 화재를 감지하는 화재감지센서와; 상기 건조기 내부의 화재를 소화하도록 설치된 소화 기구와; 상기 화재감지센서에서 출력된 감지신호에 따라 상기 소화 기구를 온(on)/오프(off)시키는 제어부를 포함하여 구성되어, 건조기 내부의 히터나 모터 등의 과열 혹은 합선으로 인해 발생하는 화재를 신속히 진화하는데 그 효과가 있다. 
       
     건조기, 드럼, 히터, 모터, 화재감지센서, 스프링클러
Patent KR-20050037451-A (KR)
Inventor: LEE CHUN SOO
IPC: G11B20/10
Filed: 2005-03-31
Abstract: USB OTG(On-The-Go) 기능과 Card Reader기를 내장한 외장형 HDD
Patent KR-20060116087-A (KR)
Title: Air conditioner for vehicle
Inventor: KIM YOUNG CHUL
IPC: B60H1/00
Filed: 2005-05-09
Abstract: An air conditioner for a vehicle is provided to improve the mixing efficiency of cold air and hot air by mixing cold air and hot air by a temp door and remixing the cold air which has bypassed the temp door and hot air. An air conditioner for a vehicle includes a blower(25), an evaporator(21), a heater core(22), and a temp door(10). The temp door controls the amount of cold air passing through the evaporator and the amount of hot air passing through the heater core to control the temperature of the air discharged into the vehicle. The evaporator is disposed vertically to an outlet of a blower. The heater core(23) is disposed in parallel to the outlet of the blower. The temp door is disposed downstream of the evaporator and the heater core to open and close a hot air passage or a cool air passage to mix cold air and hot air.
Patent KR-20060119252-A (KR)
Title: System and method for informing of air pollution
Inventor: JUNG YONG SIK
IPC: H04W4/02
Filed: 2005-05-19
Abstract: An air pollution notify system and a method thereof are provided to collect a degree of pollution of the air in real time, and to confirm whether a certain area is an air polluted area according to a condition registered by a user, thereby notifying the user that the area is the air polluted area in message type. A user manager of an air pollution notify server requests and receives an air pollution notify condition, and stores the condition in a user information DB(S101). A terminal location confirmer receives a location of a mobile communication terminal of an air pollution notify service user, and stores the received location in a terminal location information DB(S103). An air pollution notifier confirms whether an air polluted area is identical with the perceived location of the terminal(S105). If so, the air pollution notifier generates an air pollution notify message, and sends the message to the terminal(S107).
Patent KR-20060119606-A (KR)
Title: Poly ethylene pipe stopping machine
Inventor: KIM PAN SANG
IPC: F16L41/04
Filed: 2005-05-20
Abstract: An equipment for blocking a poly ethylene pipe is provided to preclude the pipe from being deformed due to the quizzer and lengthen the life span by boring the PE pipe and inserting the liquid blocking equipment in the perforation unit. An equipment for blocking a poly ethylene pipe is composed of a step of installing a saddle(4), a valve(3), and a piercing machine(1) to bore a PE pipe(5); a step of inserting a screw in the perforation unit by a tap after the upper step; a step of blocking the liquid by inserting the blocking apparatus in the pipe after the upper step; a step of repairing/connecting the pipe after the upper step; and a step of finishing the perforated area with the plug.
Patent KR-20060121002-A (KR)
Title: Rotor structure of washer motor
Inventor: PARK JIN HYUNG
IPC: D06F37/30
Filed: 2005-05-23
Abstract: A rotor structure of a washing machine motor is provided to reduce the number of components and the production cost by not producing various components using separate components, and to thereby reduce the number of working steps by removing a combining step. A rotor structure of a washing machine motor comprises: a stator(40) fixed with a main body frame(44) and wound with a coil(42) forming the magnetic field; a rotor(50) mounted with a magnet(52) along the circumference and formed with radiating vanes(72) on the bottom surface to be rotated by interacting with the magnetic field generated at the stator; a combining unit(76) formed at the central portion of the rotor to connect a driving shaft with the rotor; a first frame(60) made of a metallic material and formed with the bottom surface and the lateral surface of the rotor; and a second frame(70) made of a synthetic resin material integrally formed with the radiating vane and the combining unit by injection-molding along the bottom surface of the first frame.
Patent KR-20060122050-A (KR)
Title: Device for car audio control panel attachment using electromagnet
Inventor: KIM SUNG SOO
IPC: G11B33/02
Filed: 2005-05-25
Abstract: An apparatus for attaching and detaching a car audio control panel is provided to reduce the breakage possibility of the car audio control panel when the car audio control panel is attached and detached, simplify a manufacturing process, and reduce manufacturing cost by attaching and detaching the car audio control panel by using an electromagnet. An attachment sensing unit(320) senses whether a car audio control panel is attached to a car audio body. An ejection sensing unit(330) senses whether a command indicating that the car audio control panel is ejected from the car audio body is provided. An electromagnet attaching unit(340) attaches or ejects the car audio control panel to or from the car audio body according to whether power is supplied. A control unit(310) supplies the power to the electromagnet attaching unit(340) or blocks the power according to signals sensed in the attachment sensing unit(320) and the ejection sensing unit(330), and controls the attachment sensing unit(320) and the ejection sensing unit(330) so that the electromagnet attaching unit(340) is attached or ejected to or from the car audio body.
Patent KR-20050061418-A (KR)
Inventor: KUDOU YASUYUKI
IPC: G09G5/02
Filed: 2005-05-30
Abstract: 프레임 메모리(105)는 인터페이스(103)를 통해 상위 장치(102)로부터 수신되는 원화상 데이터를 저장한다.  감색 처리 수단은 상위 장치(102)로부터의 전송, 스위치 등의 수동 설정 수단 또는 단자 설정을 통해 감색율 데이터를 수신한다.  이러한 감색율 데이터에 기초하여, 원화상의 계조 데이터에서의 색수가 삭감되고, 원화상의 색 수는 상기 삭감된 색 수를 이용하여 의사적으로 표현된다.  또한, 타이밍 발생 회로(106)와 계조 전압 생성 회로(107)가 포함된다.  계조 전압 셀렉터(108)는 감색율에 기초하여 구동 동작의 부분적 정지를 수행한다.
Patent KR-20060124311-A (KR)
Title: Integrated gis software
Inventor: LEE IN MOOK
IPC: G06F9/46
Filed: 2005-05-31
Abstract: Integrated GIS(Geographic Information System) software is provided to support a series of data construction processes such as data construction, data reception, structured edition, and attribute information construction by linking with external survey equipment. The integrated GIS software(100) constructs GIS data from survey data by integrating functions of CAD(Computer-Aided Design) software and GIS software by comprising a GIS engine(111), a data input part(112), a data structuring part(113), an attribute information editor(114), a data converter(115), and a data output part(116). The integrated GIS software constructs the GIS data by transmitting the survey data generated from the external survey equipment(200) to a PC including a GIS through the wired/wireless communication.
Patent KR-20060127646-A (KR)
Title: Community integrated management method based internet
Inventor: KIM KWANG YUN
IPC: G06Q99/00
Filed: 2005-06-08
Abstract: A method for integrally managing communities based on the Internet is provided to enable a user to integrally search the communities having a similar character and effectively advertise the user community by integrating the communities scattered over portal sites and community providing sites. Registration information for the community opened or operated by a community operator is received and stored to a database(S12). The registration information includes a community kind, name, URL(Uniform Resource Locator) address, class information, and keyword field. A community user searches community information by using community registration information(S20). An integrated community management server provides community AD(ADvertisement) and a search result for the community information requested from the community user(S30).
Patent KR-20060129811-A (KR)
Title: Liquid crystal display
Inventor: KIM HYUN WUK
IPC: G02F1/1343
Filed: 2005-06-13
Abstract: An LCD is provided to use a lateral field between pixel electrodes like a fringe field, thereby improving the transmittance and enhancing the brightness, by arranging pixel electrodes such that a boundary between neighboring pixel electrodes forms a predetermined angle with respect to a gate line. Gate lines(120) and data lines(160) are arranged in row and column directions, respectively, above a first substrate. Pixel electrodes(180) are formed above the first substrate, wherein each of the pixel electrodes has first opening patterns(190a). A second substrate is opposite to the first substrate. Liquid crystal molecules are injected between the first substrate and the second substrate. A common electrode is formed above the second substrate. The common electrode has second opening patterns(200a) for division-aligning the liquid crystal molecules together with the first opening patterns. The pixel electrodes are divided in the row direction by the data lines. Each boundary for dividing the pixel electrodes in the column direction forms a predetermined angle with respect to the gate lines.
Patent KR-20060134283-A (KR)
Title: Organic electrical bistable memory device using polythiophene derivatives
Inventor: KO JANG MYOUN
IPC: H01L51/30
Filed: 2005-06-22
Abstract: A memory device using a polylthiophene-based derivative is provided to enable migration of electrons by making a thiophene-based derivative and POTB(poly(3-octylthiophene-co-3-(3-thienyl)benzonitrile)) as a copolymer of the thiophene-based derivative have a conjugated structure. A memory device includes an OBD(organic electrical bistable device) composed of a three-layered structure of organic, metal and organic such that the OBD is formed between a cathode and an anode. A heterocyclic thiophene derivative or its copolymer is used as the organic material. The heterocyclic thiophene derivative and the copolymer can be poly(3-octylthiophene-co-3-(4-fluorophenyl))thiophene.
Patent KR-20070002572-A (KR)
Title: Method for providing ideal type person searching service
Inventor: SOHN SUNG CHUL
IPC: G06Q30/06
Filed: 2005-06-30
Abstract: A method for offering an ideal type searching service is provided to offer an image/location of a matched person to both sides if the person included in a range registered as an ideal type is placed within a reference radius range while monitoring the location of a mobile in real-time. A PAN(Personal Area Network) coordinator securing ID information of the mobile terminal entering a managed area transmits the ID information of the mobile terminal and the PAN coordinator to a section management server(S16). The section management server checks the location of the mobile terminal with the ID information of the PAN coordinator(S18). The checked location/ID information of the mobile terminal is transmitted to an ideal type location information providing server(S20). The server updates the current location information of the mobile terminal based on the location/ID information of the mobile terminal(S22). It is checked whether the person included in the ideal type is present in to the reference radius range of the mobile terminal based on the current location information and ideal type information of a mobile terminal user(S24).
Patent KR-20070005229-A (KR)
Title: The air flex clutch transfering handle equipment
Inventor: LEE JIN SUK
IPC: B29D30/08
Filed: 2005-07-05
Abstract: A handling device for transferring an air flex clutch installed to/separated from an inner liner half-finished product truck is provided to reduce pushing force of a worker in combining the inner liner half-finished product truck and the air flex clutch and to remove the cost due to the loss of parts by preventing bursting of the air flex clutch. The handling device(100) for transferring an air flex clutch(AC) installed to/separated from an inner liner half-finished product truck is horizontally installed at the end of an input part inserting inner liner half-finished products of an inner liner half-finished product conveyor(C-2), and composed of a screw rod(110) rotatively combined and provided with a spiral screw; a handle(120) installed at one end of the screw rod and rotated by the worker's hands; and a transfer bar(130) installed on the other end of the screw rod facing the handle, provided with screws formed on an inner diametral surface and engaged with the screw formed on the outer peripheral surface of the screw rod, and horizontally moved in rotating the screw rod. The air flex clutch is transferred to the left or right side by moving the transfer bar joined with the air flex clutch by turning the handle.
Patent KR-20070010570-A (KR)
Title: System and method for providing supplement information classified by broadcasting program
Inventor: LEE GOON SEOP
IPC: H04N7/08
Filed: 2005-07-19
Abstract: A system and method for providing additional information for each broadcasting program, and a mobile communication terminal for the system are provided to offer additional information based on index information about specific image frame/time information transmitted according to a choice of a user who listens to broadcasting programs using a mobile communication terminal. A system for providing additional information for each broadcasting program includes a controller(410), a database(470), an additional information extracting unit(430), and an additional information transmitter(450). The controller controls the operation of the system. The database stores additional information according to index information matched to image frame/time information for each broadcasting program under the control of the controller. The additional information extracting unit extracts additional information matched to the index information when receiving specific index information transmitted from a mobile communication terminal. The additional information transmitter transmits the extracted additional information to the mobile communication terminal.
Patent KR-20070012044-A (KR)
Title: Character sculpture production method
Inventor: HONG JOON PYO
IPC: B44B3/00
Filed: 2005-07-22
Abstract: A method for manufacturing a character sculpture is provided to raise the satisfaction of a user by producing a character wanted by the user. A method for manufacturing a character sculpture includes the steps of: determining whether a drive signal of a scanner(30) is applied and driving the scanner and receiving scanning data if the corresponding signal is applied, converting the two-dimensional data to three-dimensional data and storing the converted data; producing a sculpture image by synthesizing a selected three-dimensional image and an expression image with a scanning image; and determining whether a sculpture recognition signal is input and manufacturing the same sculpture as a sculpture image if the sculpture recognition signal is input.
Patent KR-20070013164-A (KR)
Title: The series valve which has a counterflow prevention function
Inventor: MIN TAE SIK
IPC: F16K31/126
Filed: 2005-07-25
Abstract: A water supply valve having a reverse flow preventing function is provided to prevent the reverse flow in a circulation pipe when the pressure at an outlet is larger than the pressure at an inlet. A water supply valve having a reverse flow preventing function includes a pipe section(20), a bellows(30), and a cover section(40). In the pipe section, an open-topped absorption tank is formed. A circulated water introducing pipe having a bent upper side is formed on one side of the absorption tank. A discharge pipe is formed on the other side of the absorption tank. The bellows is stacked on the upper side of the absorption tank of the pipe section to open and close the outlet of the introduction pipe. A water discharge hole is formed on one side of the bellows. The cover section fixes the upper side of the bellows and the upper side of the absorption tank. An absorption spring is inserted into a spring recess to press the bellows.
Patent KR-20060116133-A (KR)
Title: Hardmask composition having antireflective property
Inventor: UH DONG SEON
IPC: G03F7/039
Filed: 2005-07-27
Abstract: Hard-mask composition having minimum residual acid content and anti-reflective property is provided to give extremely excellent optical and mechanical properties and etching selectivity by comprising aromatic-ring containing polymer with strong absorbance at short wavelength. The hard-mask composition comprises: (a) 1 to 20wt.% of at least one of aromatic ring containing polymer represented by any one of formulae(1) to (3) wherein for the formula(1), n ranges from 1 to 190, R1 and R2 are independently hydroxyl group(-OH), alkyl or aryl group having carbon atoms ranging from 1 to 10, allyl group or halogen atoms, and R3 and R4 are independently hydrogen or include active fraction reacting with cross-linkable component or chromophore fraction; (b) 0.1 to 5wt.% of the cross-linkable component; (c) 0.001 to 0.05wt.% of acid catalyst; and the balance of organic solvent. The aromatic ring containing polymer has weight average molecular weight ranging from 1,000 to 30,000.
Patent KR-20070016321-A (KR)
IPC: F25D17/06
Filed: 2005-08-03
Abstract: 본 발명은 냉장실과 냉동실, 그리고 증발기를 포함하고, 냉장실 내부에 적어도 2실 이상의 야채실이 구비된 냉장고용 냉기유동시스템에 관한 것으로, 각 야채실은 그 주변이 공간부로 이루어지고, 각 공간부는 냉동실과 야채실 사이의 격벽면에 천공된 각각의 냉기홀을 통해서 서로 연결되며, 각 냉기홀은 냉동실에서 공급되는 냉기의 양을 조절하기 위해 댐퍼를 구비하고, 격벽의 내부에는 각 야채실 냉각에 사용된 냉기의 회수를 위한 냉기통로가 구비되어 이 냉기통로가 증발기에 연결되며, 각 공간부에는 야채실을 향한 냉기의 흐름이 원활하게 이루어지도록 적어도 하나의 휀이 설치되고, 각 공간부의 휀은 냉기홀과 야채실 사이에 설치되며, 상기 냉기통로의 일 단부에는 가지유로가 분기되어 냉장실 안으로 연장하고 이 가지유로를 통해서는 야채실 냉각 후 여전히 낮은 온도로 회수되는 냉기 중 일부가 상기 증발기로부터 분배되는 냉기와 혼합되어 냉장실 안으로 다시 공급될 수 있도록 한 구성이다. 이와 같은 구성은 증발기의 냉각효율을 향상시킴은 물론, 냉장실의 냉기 유입측에 결빙 발생의 우려도 제거할 수 있는 것이다.  
       
     냉장, 냉동, 증발기, 야채실, 냉기유동, 휀, 냉각효율, 결빙
Patent KR-20070018341-A (KR)
IPC: H04N1/00
Filed: 2005-08-09
Abstract: RF 기능을 가진 메모리를 이용한 화상형성장치의 사용자 옵션제공 장치 및 방법이 개시된다. 그 RF기능이 있는 메모리를 이용한 화상형성장치의 사용자 옵션 제공 장치는, 소정의 사용자 옵션이 저장되어 있는 RF기능이 있는 RF메모리; 및 화상형성장치에 전원이 인가되면 RF메모리를 읽어 상기 RF메모리에 저장된 사용자 옵션대로 화상형성장치를 세팅하는 옵션세팅부를 포함함을 특징으로 하고, 그 사용자 옵션 제공 방법은 소정의 사용자 옵션을 RF기능이 있는 RF메모리에 저장하는 단계; 및 화상형성장치에 전원이 인가되면 상기 RF메모리를 읽어 RF메모리에 저장된 사용자 옵션대로 화상형성장치를 세팅하는 단계를 포함함을 특징으로 한다. 
     본 발명에 의하면, 사용자는 여러 옵션 설정 없이 자동으로 원하는 설정할 수 있게 하여 사용자 편이성을 제공한다.
Patent KR-20070018391-A (KR)
IPC: G06Q10/00
Filed: 2005-08-09
Abstract: 본 발명은 다양한 언어를 사용하는 사용자와 대화 에이전트 사이의 대화를 가능하게 하는 번역 방법 및 시스템에 관한 것으로, 특히 사용자가 다른 언어를 사용하여 그 언어로 된 질문/응답 쌍이 없는 경우에도 사용자와 대화 에이전트 사이에 대화를 행할 수 있는 대화 에이전트 서비스에서의 번역 방법 및 시스템에 관한 것이다. 
       
     대화 에이전트, 대화, 에이전트, 번역, 인터넷, 언어
Patent KR-20060050359-A (KR)
Inventor: INNAMI TAKAHARU
IPC: H04W52/04
Filed: 2005-08-10
Abstract: 이동 단말기에 대한 소프트 핸드 오버에 관련된 기지국들은 선정된 수의 프레임들의 간격마다 무선 네트워크 제어기에 제어값의 합을 통지한다.  각 기지국에서, 제어값들은 프레임보다 더 짧은 타임 슬롯의 간격마다 이동 단말기에 의해 전송된 공통 송신 전력 제어 신호들을 복호함으로써 구해진다.  이동 단말기는 기지국들에 의해 전송된 공통 파일럿 신호들에 관한 신호 전력 대 노이즈 전력의 비율을 통지한다.  무선 네트워크 제어기는 신호 전력 대 노이즈 전력의 비율에 따라 기지국들 중 하나를 기준 기지국으로서 선택한다.  무선 네트워크 제어기는 기준 기지국 이외의 기지국(들)의 송신 전력을 기준 기지국의 것과 일치되도록 기지국들에 지시한다.  
       
     이동 통신 시스템, 하향 송신 전력 제어, 기준 기지국, 무선 네트워크 제어기
Patent KR-20070021745-A (KR)
IPC: H01L21/22
Filed: 2005-08-19
Abstract: 본 발명은 확산장치의 페데스탈 상부에 다수 적층된 소형보트, 상기 소형보트를 이송할 수 있는 보트 이송장치 및 2개의 보트 받침대를 설치한 소형보트 방식의 확산장치 및 그 작동방법에 관한 것이다. 
     확산공정에서 웨이퍼를 보트에 로딩하거나 언로딩하기 위하여 웨이퍼 이송장치를 이용한다. 웨이퍼 이송장치는 한번에 5매 정도의 웨이퍼를 이송시킨다. 배치 형태(Batch Type)의 특성상 6롯트(Lot)의 웨이퍼를 로딩하는데 20~30분 정도의 시간이 소요되고, 언로딩 시간까지 고려하면 1회 공정 진행시 40~60분의 시간을 필요로하게 되어 공정시간이 긴 문제점이 있다. 
     이러한 문제점은 도 2에 도시된 보트의 형태에서 비롯되는 것으로서 종래의 보트 형태에서는 도 1에 도시된 보트 엘리베이터(5) 상면에 보트를 올려놓고 웨이퍼를 적재함으로써 웨이퍼를 모두 적재할 때까지는 확산로에 보트를 반입할 수 없었다.  
     본 발명은 1롯트 단위로 웨이퍼를 탑재할 수 있는 소형보트를 이용하여, 미리 웨이퍼가 탑재된 소형보트를 페데스탈 상면에 여러층으로 탑재하는 방식으로 공정을 진행함으로써 웨이퍼의 적재 및 적출에 소요되는 시간을 단축하고자 한다. 
       
      보트 이송장치, 롯트(lot), 페데스탈, 소형보트
Patent KR-20070023920-A (KR)
Title: Query curves processing method
Inventor: CHOI SUNG JIN
IPC: G06T7/60
Filed: 2005-08-25
Abstract: An arbitrary curve processing method is provided to obtain high work efficiency when processing a detailed and complicated curve by controlling a path point located on a curve. An arbitrary curve processing method comprises the following steps. Path point coordinates are input(S310). An average slope is computed at each path point(S320). A parameter value of each partial curve function is determined(S330). A partial curve is represented using the determined parameter value. And the represented partial curve is rendered and outputted to an output unit(S340). A virtual straight line is drawn by connecting path points. An angle between a reference line segment and a target line segment is computed. An average slope at the path point is computed using the computed angle.
Patent KR-20070024141-A (KR)
Title: Micro-mirror device and micro-mirror device array of using the same
Inventor: JI CHANG HYEON
IPC: G02B26/08
Filed: 2005-08-26
Abstract: A micro-mirror device and a micro-mirror device array using the same are provided to decrease dynamic deflection in driving a mirror plate and to prevent the degradation of the light reflected from the mirror plate by forming an outer frame separated from the mirror plate except for a connecting unit correspondingly to the circumference of the mirror plate. A micro-mirror device is composed of a mirror plate(51) comprising a thin film having a reflection surface for reflecting the input light and a frame for supporting the thin film; an outer frame(52) formed along the circumference of the mirror plate with the same gravity center as the mirror plate and separated from the mirror plate; a plurality of connecting units(53,54) for coupling the mirror plate and the outer frame; and elastic structures(55) formed symmetrically to each other to float the mirror plate and the outer frame from the lower side by connecting the outer frame to a support unit.
Patent KR-20070027318-A (KR)
Title: Method of processing three-d image and three-d image processing system using the same
Inventor: PARK JAE SANG
IPC: H04N13/00
Filed: 2005-09-06
Abstract: A 3D image processing method and a 3D image processing system using the method are provided to effectively compress a large-capacity 3D image to reduce the size of 3D image data. A method of processing a 3D image includes a step of acquiring left-eye image data and right-eye image data of an object using two cameras(ST10), a step of two-dimensionally combining the left-eye image data and the right-eye image data(ST20), and a step of compressing the two-dimensionally combined image data(ST30). The step of two-dimensionally combining the left-eye image data and the right-eye image data divides an image frame into left and right regions, displays the whole or a part of the left-eye image data in the left region, and displays the whole or a part of the right-eye image data in the right region.
Patent KR-20070035346-A (KR)
IPC: H01L21/00
Filed: 2005-09-27
Abstract: 본 발명은 플라즈마 감지 시스템이 구비된 플라즈마 처리장치에 관해 개시한다. 개시된 본 발명은 공정챔버, 광센서, 검출기, 비교기 및 제어기를 포함한다. 상기 공정챔버는 플라즈마가 형성될 수 있는 공간을 제공한다. 상기 광센서는 상기 공정챔버에 제공된다. 상기 검출기는 상기 광센서에서 읽어들인 상기 플라즈마 파장에 대한 정보를 전송받아 상기 플라즈마 파장에서 전압을 검출하도록 제공된다. 상기 비교기는 상기 검출기에서 검출된 상기 플라즈마 파장의 전압이 정상적인 플라즈마 파장의 오차 범위 안에 있는 지를 비교하고, 검출한 상기 플라즈마 파장의 전압이 상기 오차범위를 벗어날 경우 인터락 신호를 전송하도록 제공된다. 상기 제어기는 상기 비교기에서 전송된 인터락 신호가 입력되면 공정챔버 내의 플라즈마 형성공정을 중지시키도록 제공된다.  
     상기한 구성에 의하면, 본 발명은 공정챔버의 뷰포트에 광센서를 설치함으로써, 작업자의 육안 확인 없이 플라즈마가 적절한 시기에 온/오프되었는 지를 자동으로 검출할 수 있다. 따라서, 공정챔버 내의 플라즈마 공정 불량 확률을 현저하게 낮출 수 있는 이점이 있다.