Please select the most similar patent number from A, B, C and D. Which number is?
An accelerometer and environmental sensor integrated chip, comprising a support part (2) and a mass block (4) connected to the support part (2) by means of a cantilever beam (3); a first pressure-sensitive resistor (6) is arranged on the cantilever beam (3); the first pressure-sensitive resistor (6) is configured to detect the degree of deformation of the cantilever beam (3) when the mass block (4) is affected by acceleration; the mass block (4) is provided with a recessed groove (13); also comprising a sensitive film (5) arranged on the mass block (4) and covering the recessed groove (13); a second pressure-sensitive resistor (7) is arranged on the sensitive film (5); and the second pressure-sensitive resistor (7) is configured to detect the degree to which the sensitive film (5) is deformed by environmental change. The accelerometer and the environment sensor are integrated into the same chip, greatly reducing the space occupied by the chip and being conducive to the development of miniaturisation of electronic devices.
A: A biomimetic microcantilever structure (1) and manufacturing method therefor, and a piezoresistive sensor. The biomimetic microcantilever structure (1) comprises: a silicon substrate (2) in the form of a cantilever structure, biomimetic slit groups (3) provided in the silicon substrate (2), and an on-cantilever varistor (4), a substrate varistor (5), and an electrode lead (6) provided on the upper surface of the silicon substrate (2). The two biomimetic slit groups (3) are symmetrically arranged on the left and right sides of the central axis of the silicon substrate (2). The biomimetic slit group (3) comprises at least one biomimetic slit (7). The biomimetic slit (7) is formed by mimicing the slit sense organs of scorpions. The on-cantilever varistor (4) and the substrate varistor (5) constitute a Wheatstone bridge by means of the electrode lead (6). The biomimetic microcantilever structure (1) capable of hypersensitively sensing microinformation is designed on the basis of the stress amplification principle of slit sense organs at tarsal joints of Heterometrus petersii by using micro-nano manufacturing technology, and has the characteristics of high sensitivity, high detection precision, and easy use in mass production.
B: A display substrate integrated in a display panel, comprising a base substrate (10) and a pressure sensing structure (2) that is located on the base substrate (10) and used for testing an environment pressure. The pressure sensing structure (2) comprises: a first pressure-sensitive electrode (201) and a second pressure-sensitive electrode (202) that are disposed opposite to each other, and multiple insulating supports (203) that are disposed between the first pressure-sensitive electrode (201) and the second pressure-sensitive electrode (202) at intervals. The first pressure-sensitive electrode (201) is in contact with the base substrate (10). The display substrate can integrate an environment pressure testing function therein, and is easy to carry when people go out. Also disclosed are a display apparatus, a pressure detection system and a detection method thereof.
C: A sensor and an electronic device. The sensor comprises a substrate and a sensitive membrane (1) connected on the substrate, the sensitive membrane (1) is suspended on the substrate and is configured to deform in a direction perpendicular to the membrane surface thereof when subjected to an external force, and a magnetoresistor is further provided on the sensitive membrane (1); the sensor further comprises a fixed part (5) connected on the substrate, and the fixed part (5) is insensitive to the external force; the fixed part (5) and the sensitive membrane (1) are located in a same plane, a wire (6) is provided on the fixed part (5) at a position adjacent to the magnetoresistor, and the wire (6) is configured to transmit a current to generate a magnetic field induced by the magnetoresistor. The sensitive membrane (1) and the fixed part (5) are located in the same plane, and thus, the problem such as alignment during manufacturing of a conventional sensor structure can be avoided, thereby improving the manufacturing accuracy of a detection structure and ensuring the performance of a sensor.
D: An acceleration sensor (100), comprising: a flexible substrate (11); a deformation layer (12), the deformation layer (12) being disposed on the flexible substrate (11), the deformation layer (12) being capable of conducting electricity, and when the deformation layer (12) deforms under the action of an external force, the resistance of the deformation layer (12) changing with the amount of deformation of the deformation layer (12); and a detector (13) electrically connected to the deformation layer (12), and used for obtaining an acceleration according to the change value of the resistance of the deformation layer (12). The acceleration sensor (100) has simple processing technology and low costs, and can be used for the surface of a curved object.
Answer: D