Note 2: In this document, remarkable amendments from published Standard are distinguished by color. In addition, the added parts are typically highlighted with underline; the removed parts are typically denoted with double strikeout marks (on the bottom for figure). Deleted figures may also be denoted with Delete, added figures may also be denoted with Add for better readability. These markings are for highlight in the ballot only. They are not proposed to be included in the updated standard. Revision Control This revision control records activity within the task force as well as formal submit and resubmit dates and results per SEMI. Entries have been made by the task force. Date Version Name Edits Review Information Task Force Review Committee Review Group: Japan GEM300 TF Japan TC Chapter of Information & Control Global Technical Committee Date: Thursday, December 10, 2015 Friday, December 18, 2015 Time & Time Zone: 1:00 p.m.- 5:00 p.m. [JST] 10:00 a.m.- 5:00 p.m. [JST] Location: SEMI Japan, Ichigaya office Tokyo Big Sight Conference Tower City, State/Country: Tokyo, Japan Tokyo, Japan Leader(s): Yoshihisa Takasaki (SCREEN Semiconductor Solution) Yuko Toyoshima (Hitachi Takayuki Nishimura (SCREEN Semiconductor Solutions Co., Ltd) Mitsuhiro Matsuda (Hitachi Kokusai Electric Inc.) Standards Staff: Chie Yanagisawa (SEMI Japan) 81.3.3222.5863 / Chie Yanagisawa (SEMI Japan) 81.3.3222.5863 / Task Force Review meeting’s details are subject to change, and additional review sessions may be scheduled if necessary. Contact the task force leaders or Standards staff for confirmation. SEMI E170-mmyy: SPECIFICATION FOR SECURED FOUNDATION OF RECIPE MANAGEMENT SYSTEM (SFORMS) PRODUCTION RECIPE CACHE (PRC) This Standard was technically approved by the Information & Control Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on Mmmm Dd, 2015. Available at www.semiviews.org and www.semi.org in Mmmmmm 2015.
PRC Object (PRCOBJ) Requirement 109.5  Yes  No  Yes  No PRCOBJ Object Descriptions 109.6  Yes  No  Yes  No PRCOBJ Object Attribute Definitions 109.7  Yes  No  Yes  No State Management of PRCOBJ 109.8  Yes  No  Yes  No PRCOBJ Services 109.9  Yes  No  Yes  No Remote Access Cache Requirements 11 Use of RAC Space 11.2  Yes   Yes  One RAC Space for One Session 11.3  Yes   Yes  Initialization and Termination of RAC Space 11.4  Yes   Yes  Authentication of Operator 11.5  Yes   Yes  Opening of a Session 11.5.1  Yes   Yes  During the Session 11.5.2  Yes   Yes  Closing of a Session 11.5.3  Yes   Yes  Remote Access Operations 11.6  Yes   Yes  Open Remote Access Operation 11.6.1  Yes   Yes  Close Remote Access Operation 11.6.2  Yes   Yes  Request Directory Operation 11.6.3  Yes   Yes  Query Recipe Operation 11.6.4  Yes   Yes  Upload Recipe Operation 11.6.5  Yes   Yes  RAC Object (RACOBJ) Requirement 11.7  Yes   Yes  RACOBJ Object Descriptions 11.8  Yes   Yes  RACOBJ Object Attribute Definitions 11.9  Yes   Yes  State Management of RACOBJ 11.10  Yes   Yes  RACOBJ Services 11.11  Yes   Yes  Related Documents Subordinate Standards SEMI E170.1 — Specification for SECS-II Protocol for Secured Foundation Of Recipe Management System Production Recipe Cache
INCREMENTAL IMPLEMENTATION STEPS NOTICE: This Related Information is not an official part of SEMI E170 and was derived from the work of the global Information and Control Technical Committee. This Related Information was approved for publication by full letter ballot procedures on [A&R approval date]. Purpose of Incremental Implementation Steps Introduction of Incremental Implementation Steps — To make implementation barrier lower, following deployment steps are considered and recommended. Step 3A and Step 3B are independent and can be implemented in either order. Step 4 is the completion of E170 implementation with both 3A and 3B implemented. Incremental Implementation Steps Steps Step 1 Step 2 Step 3A1 Step 3A2 Step 3B Step 4 Introduced E170 Capability Message Set with RecipeXID SRS Management PRC Space PRC Operation RAC Operation All Purpose Introduce E170 recipe transaction capability (Preparation of Extended Recipe ID capability) Introduce E170 Secured Recipe Space management capability Introduce recipe space switching function for production execution Introduce cache operation for production recipe transaction efficiency Introduce Remote Access function for SPORM Completion of E170 implementation Precondition None (Decision to go with E170) Step 1 Step 2 Step 3A1 Step 2 (PEMFlag is not needed) Step 3A or 3B Implementation E170 Messages for Recipe Upload and Download SRS Object except PEMFlag PRC Space PEMFlag PRC Object RAC Space RAC Object All components Expected Effects Multiple recipe upload or download by single message is supported (Conventional messaging are not affected and are also usable) Secured Recipe Spaces are usable Optional Recipe Spaces can be assigned to differently privileged operator groups PRC Space is usable for secure production recipe handling (Pre-Download Mode, Full Download Mode) Efficient transaction of recipe by cache operation (Cache Mode, Full Query Mode) Remote Access of recipes on Recipe Server by using supplier provided recipe applications on equipment or workstation Full effect of E170 Available Operations and Functions Extended recipe identification by RecipeXID Multiple recipes by single message SRS Management (Security Class management by SecurityID) PEMFlag which selects recipe space for E40 PJ PRC operations RAC operations All E170 functionalities for SPORM
WriteRecipeResp List of ObjectActionParameterResult List of RecipeTransferResult List of EachRecipeTransfer L,2 1.L,2 1.<SPNAME> 2. <SPVAL> 2.L,n 1.L,2 1.<SPNAME1> 2.<SPVAL1> : n.L,2 1.<SPNAMEn> 2.<SPVALn> SPNAME=‘RecipeTransferResult’ SPNAMEn=‘EachRecipeTransfer’ SPVAL [51] 0=Done 1=Error 2=Full SPVALn [51] 0=OK 1=NG RecipeCheckNotifResp List of ObjectActionParameterResult L,n 1.L,2 1.<SPNAME1> 2. <SPVAL1> : n.L,2 1.<SPNAMEn> 2. <SPVALn> SPNAMEn= ‘EachRecipeCheck’ SPVALn [51] 0=OK 1=NG GetRecipeXIDListResp ObjectActionParameterResult L,2 1.<SPNAME> 2. <SPVAL> SPNAME= ‘GetREcipeXIDListResp’ SPVAL [51] 0=OK 1=NG
ReadRecipeResp ObjectActionParameterResult L,2 1.<SPNAME> 2. <SPVAL> SPNAME= ‘ReadRecipeResp’ SPVAL [51] 0=OK 1=NG PreSpecifyRecipe Resp ObjectActionParameterResult L,2 1.<SPNAME> 2. <SPVAL> SPNAME= ‘PreSpecifyRecipeResp’ SPVAL [51] 0=OK 1=NG PresetRecipeXID Resp ObjectActionParameterResult L,2 1.<SPNAME> 2. <SPVAL> SPNAME= ‘PresetREcipeXIDResp’ SPVAL [51] 0=OK 1=NG
Pre-ExeCheckResp List of ObjectActionParameterResult List of WriteRecipeResp i.e. List of 2.List of 1.RecipeTransferResult 2.List of EachRecipeTransfer L,2 1.L,2 1.<SPNAMEa> 2. <SPVALa> 2.L,2 1.L,2 1.<SPNAMEb> 2. <SPVALb> 2.L,n 1.L,2 1.<SPNAME1> 2.<SPVAL1> : n.L,2 1.<SPNAMEn> 2.<SPVALn> SPNAMEa=‘Pre-ExeCheckResultAck’ SPNAMEb=‘RecipeTransferResult’ SPNAMEn=‘EachRecipeTransfer’ SPVALa,SPVALn [51] 0=OK 1=NG SPVALb [51] 0=Done 2=Full 5=Error QueryRecipeXIDListResp ObjectActionParameterResult L,2 1.<SPNAME> 2. <SPVAL> SPNAME= ‘QueryRecipeXIDListResp’ SPVAL [51] 0=OK 1=NG RecipeTransferResult ObjectActionParameterResult L,2 1.<SPNAME> 2. <SPVAL> SPNAME= ‘RecipeTransferResult’ SPVAL [51] 0=OK 1=NG
--- Status L,n 1.L,2 1.<ERRCODE1> 2.<ERRTEXT1> : n.L,2 1.<ERRCODEn> 2.<ERRTEXTn> ERRCODE [5( )] ERRTEXT [20] --- ObjectLinkID LINKID [54] Mapping of PRCOBJ Services PRCOBJ Service Messages Mapping PRCOBJ Service Message Name E39 Object Service Message Name Stream, Function SECS-II Name SetPRCAttributes ObjectAction S14F19,F20 Generic Service Request/Acknowledge GetPRCAttributes GetAttr S14F1,F2 GetAttr Request/GetAttr Data Mapping of PRCOBJ Parameter Parameter to SECS-II Data Items Mapping PRCOBJ Service Parameter E39 Object Service Message Parameter Range SECS-II Data Item --- OperationID OPID [5( )] --- ObjSpec OBJSPEC [20] --- ObjectAction ‘SetPRCAttributes’ SVCNAME [20] ObjID for GetPRCAttributes ObjID 1-80 characters OBJID ObjID for SetPRCAttributes ObjectActionParameterRequest L,2 1.<SPNAME> 2. <SPVAL> SPNAME= ‘ObjID’ SPVAL 1-80 characters PRCSwitch ObjectActionParameterRequest L,2 1.<SPNAME> 2. <SPVAL> SPNAME= ‘PRCSwitch’ SPVAL [51] 0=Disabled 1=Enabled