AnalysisParameters Aux[] Example: Pos.X = 204, Pos.Y = 25 Aux[] are auxiliary identifiers, which the SPC AE stores together with the sample data, but they are not used for associations and groupings. These could contain detailed information; e.g., the location on the wafer. C N Array of name/value pairs of auxiliary identifiers. AnalysisParameters Comment External comment attached to the sample and displayed in the charts. C N String. AnalysisParameters DistributionType Normal, Poisson etc. Distribution type to base limits. C N String. AnalysisParameters DisplayRule 0 – never display charts 1 – display affected charts always 2 – display affected charts only in the case that a violation was detected This is used to override the display rules for charts. D N Enumeration. AnalysisParameters RejectFromEval If true, this sample is not taken into SPC evaluations, like a repeated measurement, or a false measurement. D N Boolean. AnalysisParameters ParamDef An array of all parameters with their statistical values for this sample. D Y An array of structured elements from table SPC2. Where, in the Role column D indicates ‘ and C indicates ‘ SPC2 — Examples of Structured Elements for ParamDef DataItem Element Name#3 Element Value Examples Description Role#1 Reqd Form Name Thickness, FT-Oxid Parameter name. D Y String. Index 1, 2, … Parameter index. D #2 Integer. Unit ‘nm’, ‘in’ Parameter unit. D #2 String. MeanUCL Externally provided upper control limit for sample mean value. D #2 Floating point real. MeanCenter Externally provided center line (expectation value) of sample mean value. D #2 Floating point real. MeanLCL Externally provided lower control limit for sample mean value. D #2 Floating point real.
SPC4 — Example by PCSAddMoreData Input Message for an SPC AE Name Value Description Role#1 Reqd Form Globals RawDate a UTC time The timestamp of the raw value measurement. This timestamp does not have to reflect the actual date. It is allowed to be in the past. C N DateTime according to SEMI E148 format. AnalysisParameters StoreFlag Boolean If true, raw values will be stored, otherwise only used for calculation. C N Boolean. AnalysisParameters RawDataIndex 1 .. n After the PCSStartJob message has occurred, multiple PCSAddMoreData messages for the given PCSJobID may occur. The value is the index (1 .. n) of each successive message. Any PCSAddMoreData message out of the scope of a PCSStartJob and PCSEndJob is not allowed (will be omitted if sent). C Y Integer. AnalysisParameters Comment External comment attached to the sample and displayed in the charts. C N String. AnalysisParameters FlagExternaly Boolean If true, this sample is not taken into SPC evaluations. C N Boolean. AnalysisParameters RawValue_nnn Raw values for the associated parameters. ‘nnn’ is replaced with the index number (001, 002, 003, …) of the corresponding parameter index from the previous PCSStartJob message. D Y Floating point real values. Where, in the Role column D indicates ‘ and C indicates ‘ SPC5 — Example by PCSEndJob Input (Request) Message to an SPC AE Name Value Description Role#1 Reqd Form Globals FinishDate a UTC time The timestamp of the end of the sample period. This timestamp does not have to reflect the actual date. It is allowed to be in the past. C N DateTime according to SEMI E148 format.
AnalysisParameters DisplayRule 0 – never display charts 1 – display affected charts always 2 – display affected charts only in the case that a violation was detected This is used to override the display rules for charts. D N Integer. Where, in the Role column D indicates ‘ and C indicates ‘ SPC6 — Example by SPCUpdateModel Input (Request) Message to an SPC AE Name Value Description Role#1 Reqd Form AnalysisParameters DataChannel A string identifier which is known and administered in the SPC AE. Same as in SPC1. C Y String. ProcessData Key Example: XYZ3, Etch05, BA4711 Same as in SPC1. C Y Array of name/value pairs of sample key identifiers. A minimum of 20 array elements should be supported. AnalysisParameters ParamDef Example: +0.7, −1.3 An array of all parameter names and new centering values D Y Array of the structured elements ‘Name’ and ‘Median’ from Table SPC2. Where, in the Role column D indicates ‘ and C indicates ‘ SPC7 — Example by PCSAnalyze and PCSEndJob Output (Response) Messages for an SPC AE which Indicates Success Name Value Description Role#1 Reqd Form Calculated Outputs OOC_nnn {1, ‘raw above upper spec’, ‘thickness’} An array of out of control reasons which have occurred for this sample: each OOC_nnn (where nnn is from 001 to the highest OOC). These OOC_nnn codes may be composed of several western electric rule violations and additional violations. D Y A structure with three elements: – OOC indicator (integer) from SPC8 below – description (string) from SPC8 below – ParamDef. Name (string): the name of the parameter of the OOC reason. Where, in the Role column D indicates ‘ and C indicates ‘.’ SPC8 — An of OOC Indicator Codes Used as Fields in Structure for in Table SPC7 OOC#2 Description WECO Reqd 0 Not out of control. Y 1 Raw value above upper given specification limit from input process. N 2 Raw value below lower given specification limit from input process. N 3 Mean value above upper control limit. N 4 Mean value below lower control limit. N