This Standard covers specifications for services to and events from CLJ and CFJ models. This Standard covers PCL specifications for both Fixed Buffer Equipment and Internal Buffer Equipment. This Standard covers compatibility with non-slot-integrity operation. NOTICE: SEMI Standards and Safety Guidelines do not purport to address all safety issues associated with their use. It is the responsibility of the users of the Documents to establish appropriate safety and health practices, and determine the applicability of regulatory or other limitations prior to use. Limitations On the Fly Control Purpose — This Standard is not for metrics (especially not for postmortem analysis) of waste times that may be contained in several time slots defined in this Standard due to the design of equipment and/or fab system. It only cares about synchronization between equipment and fab system. Those metrics should be standardized separately if needed. Best Effort Basis — The requirements regarding prediction are on a best effort basis, as a prediction has limited accuracy in nature; moreover, in some cases prediction itself might not be provided. No Prediction Algorithm Covered — This Standard does not cover calculation algorithms for predictions. Only for Critical Equipment — This Standard is intended to be used for equipment for which carrier logistics are critical, and, application of this Standard especially prediction portions may not be needed for equipment to which carrier logistics are not critical. Not for Physical Synchronization of Load Port — This Standard is not intended to provide physical status of load ports. Referenced Standards and Documents SEMI Standards and Safety Guidelines SEMI E15 — Specification for Tool Load Port SEMI E15.1 — Specification for 300 mm Tool Load Port SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM) SEMI E39 — Object Services Standard: Concepts, Behavior, and Services (OSS) SEMI E40 — Standard for Processing Management (PM) SEMI E62 — Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS) SEMI E84 — Specification for Enhanced Carrier Handoff Parallel I/O Interface SEMI E87 — Specification for Carrier Management (CMS) SEMI E94 — Specification for Control Job Management (CJM) ISO Standard ISO 8601:2004 — Internet Standard for Date/Time Format NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions. Terminology Abbreviations and Acronyms AMHS — automated material handling system CEW — Carrier Exchange Window CFJ — Carrier Flow Job CLJ — Carrier Logistics Job
CLJ State Transition Table No.#1 Previous State Trigger New State Actions#2 Comments Tc00 (No state) New Carrier Logistics demand occurred. Load Queued Create CLJ CLJ Event Early creation of CLJ Tc01 Load Queued Request loading of a carrier. Load Request CLJ Event Tc02 (No state) New Carrier Logistics demand occurred and is requesting load of a carrier. Load Request Create CLJ CLJ Event Normal creation of CLJ Tc03 Load Request A carrier is loaded and SEMI E84 sequence is completed. Carrier Valid CLJ Event Factory level timing which indicates that the carrier is under control of equipment Tc04 (No state) New Carrier Logistics demand occurred by arrival of AMHS while no CLJ is assigned on the load port. Carrier Valid Create CLJ CLJ Event For Interim solution only Tc05 Carrier Valid The carrier is ready to unload. Carrier door shall be closed and undocked before this transition. In case the load port has a purge capability, it shall also be done before this transition. Unload Request CLJ Event Load port may not be assigned yet Tc06 Unload Request The carrier is unloaded. (No state) Delete CLJ CLD Event Normal completion Tc07 CLJ Created Any fatal error. (No state) Delete CLJ CLD Event Error report Abnormal end Tc10 LR Prediction None. LR Not Predicted None Tc11 LR Not Predicted Start timing of Load Request state is predicted. LR Predicted LRP Event Tc12 LR Predicted Predicted start timing of Load Request state is changed. LR Predicted LRP Event Tc13 LR Predicted Predicted start timing of Load Request state is withdrawn. LR Not Predicted LRP Event Tc20 LS Prediction None LS Not Predicted None Tc21 LS Not Predicted Start timing of Load Stagnation is predicted. LS Predicted LSP Event Tc22 LS Predicted Predicted start timing of Load Stagnation is changed. LS Predicted LSP Event Tc23 LS Predicted Predicted start timing of Load Stagnation is withdrawn. LS Not Predicted LSP Event Tc30 UR Prediction None UR Not Predicted None Tc31 UR Not Predicted Start timing of Unload Request state is predicted. UR Predicted URP Event Tc32 UR Predicted Predicted start timing of Unload Request state is changed. UR Predicted URP Event Tc33 UR Predicted Predicted start timing of Unload Request state is withdrawn. UR Not Predicted URP Event
USPTime Optional Predicted time of US Prediction Uses format defined for TimeReport RO CLJCarrierType Optional Type of carrier Enumerated: ProcessCarrier, EmptyCarrier, NPWCarrier RO CLJCarrierID Optional ID of carrier which is dealt with the CLJ. Carrier ID may not be assigned until a carrier is loaded and confirmed. In case carrier ID is not specified yet, this variable shall inform it. Text 0–80 characters Identifier of a carrier. The CLJCarrierID shall be same as the CarrierID defined in SEMI E87. A zero length is used for ‘CarrierID is not yet specified’ RO CLJLPID Optional Load port ID ID of load port which will be used by the CLJ Unsigned integer 0 = Load port is not assigned Non 0 = Load port number The CLJLPID is compatible with the load port number defined in SEMI E87 which says “The load port number shall be assigned incrementally from the bottom left to bottom right, then top left to top right when facing the front of the equipment.” RO Requirements for Compliance Following table provides a checklist for PCL compliance. PCL Compliance Statement Fundamental PCL Requirements PCL Section Implemented PCL Compliant PCL Requirements 8 PCL Requirements 8.1 Carrier Flow Job (CFJ) Object 8.1.1  Yes  No Carrier Logistics Job (CLJ) Object 8.1.2  Yes  No Reporting Scheme of Time for PCL 8.2  Yes  Prediction Resubmission Threshold for PCL 8.3  Yes  PCL Value Data Definitions 8.4  Yes  TimeReport 8.5  Yes  CFJ Object Requirements 9 CFJ Object Definition 9.1  Yes  No CFJ Object Descriptions 9.2  Yes  No CFJ Object Functional Requirements 9.3 Order Management of CLJs 9.3.1  Yes  No Load/Unload Timing Management of CLJs 9.3.2  Yes  Load Port Assignment to CLJs 9.3.3 Load Port Assignment for Fixed Buffer Equipment 9.3.3.1  Yes  No
Load Port Assignment for Internal Buffer Equipment 9.3.3.2  Yes  No CFJ Attribute Definitions 9.4  Yes  No CFJ State Model 9.5  Yes  CFJ Services 9.6  Yes  CFJ Variable Data Definitions 9.7  Yes  CLJ Object Requirements 10 CLJ Object Definition 10.1  Yes  No CLJ Object Description 10.2  Yes  No CLJ Object Functional Requirements 10.3 CLJ Main State Management 10.3.1  Yes  No Predictions 10.3.2 Load Request (LR) Prediction (Optional) 10.3.2.1  Yes  Load Stagnation (LS) Prediction (Optional) 10.3.2.2  Yes  Unload Request (UR) Prediction 10.3.2.3  Yes  Unload Stagnation (US) Prediction (Optional) 10.3.2.4  Yes  Carrier ID Assignment (Optional) 10.3.3  Yes  Load Port Assignment (Optional) 10.3.4  Yes  CLJ Object Attribute Definitions 10.4  Yes  No CLJ State Model 10.5  Yes  No CLJ Services 10.6  Yes  No CLJ Variable Date Definitions 10.7  Yes  Related Documents SEMI Standards and Safety Guidelines SEMI E148 — Specification for Time Synchronization and Definition of the TS-CLOCK Object
Transaction and States of Basic Implementation for Typical Fixed Buffer Equipment — Transactions and states are shown in the following table. Transactions and States # Action Dir#1 Message & Event E87#2 LPTS PCL#3 PJ/CJ LP1 LP2 CLJ1 CLJID =0001 CLJ2 CLJID =0002 CLJ3 CLJID =0003 CLJ4 CLJID =0004 Job1 (CLJ1,3) Job2 (CLJ2,4) Initial State RL RL None None None None None None 2 CLJ1,CLJ2 Created & Load Request FE CLJ Event LR LR 3 CLJ1,CLJ2 LS Predicted FE LSP Event Time = Now LS Predicted LS Predicted 4 FE Start of E84 TB 5 CLJ1 Carrier Valid (Loaded) FE CLJ Event (@ End of E84) CV 6 CLJ1 Slot Map Verification PJ Creation Created /Execute 7 CLJ1 UR Predicted FE URP Event Time = T1 UR Predicted 8 FE Start of E84 TB 9 CLJ2 Carrier Valid (Loaded) FE CLJ Event (@ End of E84) CV 10 CLJ2 Slot Map Verification PJ Creation Created /Execute 11 CLJ2 UR Predicted FE URP Event Time = T2 UR Predicted 12 CLJ3 Load Request FE CLJ Event LR 13 CLJ3 LS Predicted FE LSP Event Time = T3 (CEW Started) LS Predicted 14 CLJ1 Unload Request FE CLJ Event RU UR 15 FE Start of E84 TB 16 CLJ1 Deleted (Unloaded) FE CLJ Event (@End of E84) RL Deleted Deleted 17 FE Start of E84 TB None None 18 CLJ3 Carrier Valid (Loaded) FE CLJ Event (@ End of E84) CV
19 CLJ3 Slot Map Verification PJ Creation 20 CLJ3 UR Predicted FE URP Event Time = T4 UR Predicted 21 CLJ4 Load Request FE CLJ Event LR 22 CLJ4 LS Predicted FE LSP Event Time = T5 (CEW Started) LS Predicted 23 CLJ2 Unload Request FE CLJ Event RU UR 24 FE Start of E84 TB 25 CLJ2 Deleted (Unloaded) FE CLJ Event (@ End of E84) RL Deleted Deleted 26 FE Start of E84 TB None None 27 CLJ4 Carrier Valid (Loaded) FE CLJ Event (@ End of E84) CV 28 CLJ4 Slot Map Verification PJ Creation Created /Execute 29 CLJ4 UR Predicted FE URP Event Time = T6 UR Predicted 30 CLJ3 Unload Request FE CLJ Event RU UR 31 FE Start of E84 TB 32 CLJ3 Deleted (Unloaded) FE CLJ Event (@ End of E84) RL Deleted Deleted 33 CLJ4 Unload Request FE CLJ Event RU None UR None 34 FE Start of E84 TB 35 CLJ4 Deleted (Unloaded) FE CLJ Event (@ End of E84) RL Deleted Deleted F = Factory system, E = Equipment. LPTS = Load Port Transfer State, RL = Ready to Load, TB = Transfer Blocked, RU = Ready to Unload. LR = Load Request, CV = Carrier Valid, UR = Unload Request.
3 CLJ1~8 LS Predicted FE LSP Event Time CLJ1~4= Now LSP LSP LSP LSP 4 FE Start of E84 TB 5 CLJ1 Carrier Valid (Loaded) FE CLJ Event (@ End of E84) CV 6 CLJ1 Recognition of Carrier and Wafer 7 CLJ1 Carrier Move to IB RL 8 FE Start of E84 TB 9 CLJ2 Carrier Valid (Loaded) FE CLJ Event (@ End of E84) CV 10 CLJ2 Recognition of Carrier and Wafer 11 CLJ2 Carrier Move to IB RL 12 FE Start of E84 TB 13 CLJ3 Carrier Valid (Loaded) FE CLJ Event (@ End of E84) CV 14 CLJ3 Recognition of Carrier and Wafer 15 CLJ3 Carrier Move to IB RL 16 FE Start of E84 TB 17 CLJ4 Carrier Valid (Loaded) FE CLJ Event (@ End of E84) CV 18 CLJ4 Recognition of Carrier and Wafer 19 CLJ4 Carrier Move to IB RL 20 PJ Creation 21 CLJ1~4 UR Predicted FE URP Event Time = T2 URP URP URP URP 22 CLJ5~8 LS Predicted FE LSP Event Time CLJ5~8 =T1 LSP LSP LSP LSP 23 FE Start of E84 TB 24 CLJ5 Carrier Valid (Loaded) FE CLJ Event (@ End of E84) CV
25 CLJ5 Recognition of Carrier and Wafer 26 CLJ1 Carrier Move to IB RL 27 FE Start of E84 TB 28 CLJ6 Carrier Valid (Loaded) FE CLJ Event (@ End of E84) CV 29 CLJ6 Recognition of Carrier and Wafer 30 CLJ6 Carrier Move to IB RL 31 FE Start of E84 TB 32 CLJ7 Carrier Valid (Loaded) FE CLJ Event (@ End of E84) CV 33 CLJ7 Recognition of Carrier and Wafer 34 CLJ7 Carrier Move to IB RL 35 FE Start of E84 TB 36 CLJ8 Carrier Valid (Loaded) FE CLJ Event (@ End of E84) CV 37 CLJ8 Recognition of Carrier and Wafer 38 CLJ8 Carrier Move to IB RL 39 PJ Completed (Job1) D 40 PJ Creation (Job2) N 41 CLJ9~12 Load Queued LQ LQ LQ LQ 42 CLJ9~12 LS Predicted FE LSP Event Time = T5 LSP LSP LSP LSP 43 CLJ5~8 UR Predicted FE URP Event Time = T6 URP URP URP URP 44 CLJ1 Unload Request FE CLJ Event RU UR 45 CLJ2 Unload Request FE CLJ Event RU UR 46 FE Start of E84 TB 47 CLJ1 Deleted (Unloaded) RL D LR E
48 CLJ9 Load Request FE CLJ Event N 49 CLJ3 Unload Request FE CLJ Event RU UR 50 FE Start of E84 TB 51 CLJ2 Deleted (Unloaded) RL D LR 52 CLJ10 Load Request FE CLJ Event N 53 CLJ4 Unload Request FE CLJ Event RU UR 54 FE Start of E84 TB 55 CLJ3 Deleted (Unloaded) RL D LR 56 CLJ11 Load Request FE CLJ Event N 57 FE Start of E84 TB 58 CLJ4 Deleted (Unloaded) RL D LR 59 CLJ12 Load Request FE CLJ Event N 60 FE Start of E84 TB CV 61 CLJ9 Carrier Valid (Loaded) FE CLJ Event (@ End of E84) 62 CLJ9 Recognition of Carrier and Wafer 63 CLJ9 Carrier Move to IB RL 64 FE Start of E84 TB CV 65 CLJ10 Carrier Valid (Loaded) FE CLJ Event (@ End of E84) 66 CLJ10 Recognition of Carrier and Wafer 67 CLJ10 Carrier Move to IB RL 68 FE Start of E84 TB CV 69 CLJ11 Carrier Valid (Loaded) FE CLJ Event (@ End of E84) 70 CLJ11 Recognition of Carrier and Wafer 71 CLJ11 Carrier Move to IB RL 72 FE Start of E84 TB CV