Section 4: Work in Process Storage (specific to wafer cassettes) Section Indicator Acceptance Criteria Metric Units (US Customary Units) Reference Pictogram Actual/ Conforms? 4.1 Integral wafer cassette/lot box storage shelf height (150 and 200 mm [6 and 8 in.] wafer cassette/lot boxes only). Maximum (1 item deep) 1520 mm (60 in.) Maximum (2 items deep) 1220 mm (48 in.) Minimum 460 mm (18 in.) Actual Conforms? Yes No N/A Section 5: Manual Wafer Cassette Rotation Device Design Section Indicator Acceptance Criteria Metric Units (US Customary Units) Reference Pictogram Actual/ Conforms? 5.1 Handle height, couple point for hand(s) from standing surface. Maximum 1206 mm (47.5 in.) Minimum 838 mm (33 in.) Actual Conforms? Yes No N/A 5.2 Hand grip(s) shall allow for a full “power grip” similar to grabbing a rung on a ladder or holding a pistol. Allows for a full power grip in either pronated (palm facing down) or neutral (handshake position) posture. Actual Conforms? Yes No N/A 5.3 Single hand lift force Maximum 37.8 N (8.5 lbf). This value includes a 15% capacity reduction due to cleanroom glove use. Wrist deviation reduces further strength capacity by 15%. — Actual Conforms? Yes No N/A 5.4 Two hand lift force Maximum 64.5 N (14.5 lbf). This value includes a 15% capacity reduction due to cleanroom glove use. Wrist deviation reduces further strength capacity by 15%. — Actual Conforms? Yes No N/A
Section 6: Handle Design (Handle dimensions are correct for use of bare hand or use of typical cleanroom gloves) Section Indicator Acceptance Criteria Metric Units (US Customary Units) Reference Pictogram Actual/ Conforms? 6.1 Handle surface finish All edges radiused — Conforms? Yes No N/A 6.2 Cylindrical Handle — 6.2.1 Cylindrical handle diameter Maximum 38 mm (1.5 in.) Minimum 25 mm (1 in.) Actual Conforms? Yes No N/A 6.2.2 Cylindrical handle length Minimum 127 mm (5 in.) Actual Conforms? Yes No N/A 6.3 Circular or Triangular Handle — 6.3.1 Circular or triangular handle diameter Maximum 90 mm (3.5 in.) Minimum 50 mm (2 in.) Actual Conforms? Yes No N/A 6.3.2 Circular or triangular handle height (thickness) Maximum 25 mm (1 in.) Minimum 19 mm (0.75 in.) Actual Conforms? Yes No N/A 6.4 Ball Handle — 6.4.1 Ball handle diameter Maximum 63 mm (2.5 in.) Minimum 19 mm (1.5 in.) Actual Conforms? Yes No N/A
No N/A 6.7.1.3 Diameter, requiring no greater than 180 N (40 lbf) force. Minimum 19 mm (0.75 in.) 6.7.2 Enclosed handle, three fingers. Width, minimum 90 mm (3.5 in.) Depth, minimum 38 mm (1.5 in.) Diameter, minimum 6.3 mm (0.25 in.) Force, maximum 71 N (16 lbf) Actual Conforms? Yes No N/A 6.7.3 Enclosed handle, two fingers. Width, minimum 60 mm (2.5 in.) Depth, minimum 38 mm (1.5 in.) Diameter, minimum 6.3 mm (0.25 in.) Force, maximum 51 N (11.5 lbf) Actual Conforms? Yes No N/A 6.7.4 Enclosed handle, one finger. Width, minimum 38 mm (1.5 in.) Depth, minimum 38 mm (1.5 in.) Diameter, minimum 3.2 mm (0.13 in.) Force, maximum 27 N (6 lbf) Actual Conforms? Yes No N/A 6.8 Hook Grasp Handle — 6.8.1 Hook grasp handle (four fingers). Opening length, minimum 90 mm (3.5 in.) Opening width, minimum 38 mm (1.5 in.) Depth, minimum 50 mm (2 in.) Lip length, minimum 50 mm (2 in.) Actual Conforms? Yes No N/A 6.8.2 Hook grasp handle pull force (four fingers) Maximum 80 N (18 lbf) 6.9 Finger Pull Handle — 6.9.1 Finger pull handles (four fingers) Opening length, minimum 90 mm (3.5 in.) Opening width, minimum 25 mm (1 in.) Depth, minimum 19 mm (0.75 in.) Lip length, minimum 19 mm (0.75 in.) Actual Conforms? Yes No N/A 6.9.2 Finger pull handles pull force (four fingers) Maximum 9.8 N (2.2 lbf)
8.1.6 Height of touch screen monitor. See § 9 for horizontal reach criteria. Maximum 1470 mm (58 in.) measured from floor to uppermost active pad on screen. Minimum 910 mm (36 in.) measured from floor to lowest active pad on the screen. Conforms? Yes No N/A 8.1.7 Tilt angle of touch screen monitor between 1041 mm (41 in.) and 1219 mm (48 in.) in height to top of screen. Upward minimum 30° Conforms? Yes No N/A 8.1.8 Tilt angle of touch screen monitor less than 1041 mm (41 in.) in height to top of screen. Upward minimum 45° Conforms? Yes No N/A 8.2 Location for Operator Primary Interface, Seated Station NOTE: A seated station is where a short cylinder office-style chair is used. — 8.2.1 Height of video display terminal (single monitor). Does not include touchscreens, measured from the underside of the work surface to the centerline of monitor. Maximum 517 mm (20.5 in.) Minimum 267 mm (10.5 in.) Conforms? Yes No N/A 8.2.2 Height of video display terminal (stacked monitors), does not include touchscreens, measured from the underside of the work surface to the top line of top monitor. The primary monitor in a stacked configuration is the bottom monitor. Maximum 727 mm (28.5 in.) Minimum 267 mm (10.5 in.) Conforms? Yes No N/A 8.2.3 Tilt angle of video display terminal greater than 1397 mm (55 in.) from underside of work surface to top of display. Note: This line item becomes significant in the event that the maximum height criteria cannot be met. Downward minimum 15° Conforms? Yes No N/A
7.2.1 Any posture: upper body clearance (shoulder width) Minimum 610 mm (24 in.) Actual Conforms? Yes No N/A ______ Conforms? Yes No N/A 7.2.2 Standing A. Overhead clearance, minimum 1980 mm (78 in.) B. Forward horizontal clearance#1, minimum 690 mm (27 in.) Actual Conforms? Yes No N/A A ______ B ______ Conform? Yes No N/A 7.2.3 Sitting-on-floor A. Overhead clearance, minimum 1000 mm (39 in.) B. Forward horizontal clearance#1, minimum 690 mm (27 in.) C. Working height, minimum 280 mm (11 in.) Actual Conforms? Yes No N/A A ______ B ______ C ______ Conform? Yes No N/A Modify Appendix 1, SESC Checklist ¶ 6.4.1 so the metric measurement is consistent with the US Customary dimension (OPTIONAL Before Effective Date). Replace the incorrect SI dimension with the correct SI dimension derived from the US Customary dimension. This change is to correct a transcription error from the previous version of SEMI S8 (1103).
6.7.1 Enclosed handle, full hand power grip (suitcase handle). Width, minimum 127 mm (5 in.) Depth, minimum 45 mm (1.75 in.) Diameter, maximum 25 mm (1 in.) Opening width, minimum 122 mm (4.8 in.) Opening depth, minimum 41 mm (1.6 in.) Maximum push/pull force Actual Conforms? Yes No N/A Force ________ Opening depth ________ Opening width ________ Radius ________ Conforms? Yes No N/A 6.7.1.1 Diameter, requiring no greater than 71 N (16 lbf) force. Minimum 6.3 mm (0.25 in.) Actual Conforms? Yes No N/A 6.7.1.2 Diameter, requiring no greater than 89 N (20 lbf) force. Minimum 13 mm (0.5 in.) 6.7.1.3 Diameter, requiring no greater than 180 N (40 lbf) force. Minimum 19 mm (0.75 in.) 6.7.2 Enclosed handle, three fingers. Width, minimum 90 mm (3.5 in.) Depth, minimum 38 mm (1.5 in.) Diameter, minimum 6.3 mm (0.25 in.) Force, maximum 71 N (16 lbf) Actual Conforms? Yes No N/A 6.7.3 Enclosed handle, two fingers. Width, minimum 60 mm (2.5 in.) Depth, minimum 38 mm (1.5 in.) Diameter, minimum 6.3 mm (0.25 in.) Force, maximum 51 N (11.5 lbf) Actual Conforms? Yes No N/A 6.7.4 Enclosed handle, one finger. Width, minimum 38 mm (1.5 in.) Depth, minimum 38 mm (1.5 in.) Diameter, minimum 3.2 mm (0.13 in.) Force, maximum 27 N (6 lbf) Actual Conforms? Yes No N/A
6.9.1 Finger pull handles (four fingers) Opening length, minimum 90 mm (3.5 in.) Opening width, minimum 25 mm (1 in.) Depth, minimum 19 mm (0.75 in.) Lip length, minimum 19 mm (0.75 in.) Finger clearance width, minimum 91 mm (3.6 in.) Finger clearance height, minimum 22 mm (0.8 in.) Knuckle clearance height, minimum 28 mm (1.1 in.) Lip length, minimum 18 mm (0.7 in.) Maximum push/pull force Actual Conforms? Yes No N/A Force ________ Finger clearance height ________ Finger clearance width ________ Lip ________ Knuckle clearance height ________ Conforms? Yes No N/A 6.9.2 Finger pull handles pull force (four fingers) Maximum 9.8 N (2.2 lbf) Table A1-1 Supplier Ergonomic Success Criteria Checklist (continued) 7 Hand/Arm Clearance {no changes to this section for line item 3} 8 Display Location {no changes to this section for line item 3} 9 Hand Control Location {no changes to this section for line item 3} 10 Workstation Design {no changes to this section for line item 3}
Section Indicator Acceptance Criteria Metric Units (US Customary Units) Reference Pictogram Actual/ Conforms? 7.1.1 7.2.1 Any posture: upper body clearance (shoulder width) Clearance for walking (operator tasks) Minimum 610 mm (24 in.) A. Vertical clearance, minimum. 1980 mm (78 in.) B. Passage width, minimum 610 mm (24 in.) A. ______ B. ______ Conforms? Yes No N/A 7.1.2 Any posture: upper body clearance (shoulder width) Clearance for walking (maintenance and service activity only) Minimum 610 mm (24 in.) A. Vertical clearance, minimum 1900 mm (74.8 in.) B. Upper body passage width, minimum 610 mm (24 in.) C. Walking surface width minimum 457 mm (18 in.) D. Elbow/hip clearance height, maximum height of sloped area 1002 mm (39.8 in.) A. ______ B. ______ C. ______ D. ______ Conforms? Yes No N/A 7.1.3 Clearance for walking through vertical hatchways (maintenance and service activity only) A. Overhead clearance, minimum 1524 mm (60 in.) B. Upper body passage width, minimum 610 mm (24 in.) C. Height of threshold, maximum 406 mm (16 in.) A. ______ B. ______ C. ______ Conforms? Yes No N/A 7.1.4 Clearance for moving sideways (maintenance and service activity only) A. Overhead clearance, minimum 1900 mm (74.8 in.) B. Forward horizontal clearance, minimum 477 mm (18.8 in.) A. ______ B. ______ Conforms? Yes No N/A 7.1.5 7.2.6 Kneeling crawl (maintenance and service activity only) A. Overhead clearance measured from floor, minimum 740 mm (29 in.) B. Forward horizontal clearance, minimum 1520 mm (60 in.) C. Elbow clearance, minimum 635 mm (25 in.) A. ______ B. ______ C. ______ Conforms? Yes No N/A
7.2.3 7.2.7 Stooping A. Overhead clearance, minimum 1450 mm (57 in.) B. Forward horizontal clearance#1, minimum 1020 mm (40 in.) C. Working height, minimum 640 mm (25.2 in.) Actual Conforms? Yes No N/A A. ______ B. ______ Conforms? Yes No N/A 7.2.4 7.2.5 Kneeling A. Overhead clearance (from floor), minimum 1450 mm (57 in.) B. Forward horizontal clearance#1, minimum 1220 mm (48 in.) C. Working height, minimum 640 mm (25.2 in.) Actual Conforms? Yes No N/A A. ______ B. ______ Conforms? Yes No N/A 7.2.5 Sitting The given clearance dimensions do not provide room for movement of seating devices. Thickness of chair backrest is not included. Room for movement of the seating device is not included. A. Overhead clearance measured from sitting surface, minimum 1010 mm (39.8 in.) B. Forward horizontal clearance (as measured from any obstruction, or front [user] side of backrest, if present) #1 B1.Clearance for operation tasks (relaxed posture), minimum 1034 mm (40.7 in.) B2. Clearance for maintenance tasks (upright posture), minimum 867 mm (34.1 in.) A. ______ B1. _____ B2. _____ Conforms? Yes No N/A