Line Item Revision to SEMI S2-0712b, ENVIRONMENTAL, HEALTH, AND SAFETY GUIDELINE FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT Developing/Revising Body Name/Type: S2 Chemical Exposure Task Force Technical Committee: Environmental, Health and Safety Region: North America Leadership Position Last First Affiliation Leader Visty John Salus Engineering International Technical Editor Larsen Sean Lam Research * Only necessary if different from leaders Documents, Conflicts, and Consideration Safety related codes, standards, and practices used in developing the safety guideline, and the manner in which each item was considered by the technical committee # and Title Manner of Consideration SEMI S6-0707 – EHS Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment Align criteria and terminology Known inconsistencies between the safety guideline and any other safety related codes, standards, and practices cited in the safety guideline # and Title Inconsistency with This Safety Guideline 2014 ACGIH TLVs® and BEIs® – Based on the Documentation of the Threshold Limit Values for Chemical Substances and Physical Agents & Biological Exposure Indices The exposure limits in this Safety Guideline (both as published and as proposed) are more stringent than the limits published in the referenced documents. OSHA 29CFR 1910.1000 – Toxic and Hazardous Substances, Air Contaminants The MAK-Collection for Occupational Health and Safety: Part I: MAK Value Documentations, Volume 25 Other conflicts with known codes, standards, and practices or with commonly accepted safety and health principles to the extent practical # and Title Nature of Conflict with This Safety Guideline NONE Participants and Contributors Last First Affiliation Barsky Joe TUV Rheinland Belk Bill DECON Breder Paul ESTEC Solutions Brody Steve Product EHS Consulting Claes Brian Lam Research Crockett Alan KLA-Tencor DeFrain Steve ESTEC Derbyshire Pauline TUV Sud Ergete Nigusu Intertek-GS3 Fessler Mark TEL Frankfurth Mark Cymer Galatis Ermias TEL Giles Andy Estec Solutions Greenberg Cliff Nikon Precision Hamilton Jeff Tokyo Electron
SEMI S7 — Safety Guidelines for Environmental, Safety, and Health (ESH) Evaluation of Semiconductor Manufacturing Equipment SEMI S8 — Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment SEMI S10 — Safety Guideline for Risk Assessment and Risk Evaluation Process SEMI S12 — Guidelines for Equipment Decontamination SEMI S13 — Environmental, Health and Safety Guideline for Documents Provided to the Equipment User for Use with Semiconductor Manufacturing Equipment SEMI S14 — Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment SEMI S22 — Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment ANSI Standards ANSI/RIA R15.06 — Industrial Robots and Robot Systems – Safety Requirements ANSI/ISA S84.01 — Application of Safety Instrumented Systems for the Process Industry CEN/CENELEC Standards CEN EN 775 — Manipulating Industrial Robots – Safety CEN EN 1050 — Safety of Machinery – Principles of Risk Assessment CEN EN 1127-1 — Explosive Atmospheres – Explosion Prevention and Protection – Part 1: Basic Concepts and Methodology DIN Standards DIN V VDE 0801 — Principles for Computers in Safety-Related Systems IEC Standards IEC 60825-1 — Safety of Laser Products – Part 1: Equipment Classification, Requirements IEC 61010-1 — Safety Requirements for Electrical Equipment for Measurement, Control, and Laboratory Use – Part 1: General Requirements IEC 61508 — Functional Safety of Electrical/Electronic/Programmable Electronic Safety-Related Systems IEEE Standards IEEE C95.1 — Standard for Safety Levels with Respect to Human Exposure to Radio Frequency Electromagnetic Fields, 3 kHz to 300 GHz ISO Standards ISO 10218-1 — Robots for Industrial Environments – Safety Requirements – Part 1: Robot ISO 13849-1 — Safety of Machinery – Safety-Related Parts of Control Systems – Part 1: General Principles for Design NFPA Standards NFPA 12 — Standard on Carbon Dioxide Extinguishing Systems NFPA 13 — Standard for Installation of Sprinkler Systems NFPA 72 — National Fire Alarm Code NFPA 497 — Recommended Practice for the Classification of Flammable Liquids, Gases, or Vapors and of Hazardous (Classified) Locations for Electrical Installations in Chemical Process Areas NFPA 704 — Standard System for the Identification of the Hazards of Materials for Emergency Response NFPA 2001 — Standard on Clean Agent Fire Extinguishing Systems