Referenced Standards and Documents SEMI Standards and Safety Guidelines SEMI E15 — Specification for Tool Load Port SEMI E15.1 — Specification for 300 mm Tool Load Port SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM) SEMI E39 — Object Services Standard: Concepts, Behavior, and Services (OSS) SEMI E40 — Standard for Processing Management (PM) SEMI E62 — Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS) SEMI E84 — Specification for Enhanced Carrier Handoff Parallel I/O Interface SEMI E87 — Specification for Carrier Management (CMS) SEMI E94 — Specification for Control Job Management (CJM) ISO Standard ISO 8601:2004 — Internet Standard for Date/Time Format NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions. Terminology Abbreviations and Acronyms AMHS — automated material handling system CEW — Carrier Exchange Window CFJ — Carrier Flow Job CLJ — Carrier Logistics Job FIMS — front-opening interface mechanical standard FOUP — front opening unified pod GEM — generic equipment model PCL — Predictive Carrier Logistics LR — Load Request LS — Load Stagnation UR — Unload Request US — Unload Stagnation Definitions automated material handling system (AMHS) — an automated system to store and transport materials within the factory. buffer — a set of one or more locations for holding carriers at or inside the production equipment. carrier — a container, such as a FOUP or open cassette, with one or more positions for holding substrates. Carrier Exchange Window (CEW) — a time slot which is allowed for a load port to unload a used carrier and then load a new carrier between AMHS without disturbing the continuous wafer processing of the equipment. Internal Buffer Equipment may have a CEW with multiple load ports to unload multiple used carriers and load multiple new carriers.
CFJ Object Attribute Definition Attribute Name Definition Access#1 Reqd Form ObjID CFJ object identifier RO Y Text CFJID. Numerical text expression of positive integer ObjID is equipment defined ObjType Object Type RO Y Text = “CarrierFlowJob” MaxCarrierNumber Maximum number of carriers the CFJ can handle Maximum number of CLJs with a carrier which is physically assigned (loaded) RO Y Positive integer CFJData Ordered list of attributes of CLJs RO Y Ordered list of: CLJ attributes <#7> except ObjType </#7> : Defined in CLJ Even though a value may be marked as RO (read only), the initial value for the attribute may be provided by the host. CFJ State Model — The following diagrams and tables define the state model of CFJ object. Equipment shall maintain an appropriate number of CFJs. CFJ State Model Diagram CFJ State Model Diagram CFJ State Model Definition <#3> CFJ State Model Definition State Transition No. Name Abstract of Definition No.#1 Abstract of Trigger Abstract of Action#2 New State Comments - - (No state) Tf00 Equipment is started Create CFJ Sf01 Sf00 CFJ Created CFJ is created - - - - Sf01 CFJ Inactive CFJ is not active Tf01 Activation of CFJ function is done CFJ Event Sf02 Sf02 CFJ Active CFJ is active CFJData is valid Tf02 CFJData change occurred CFJ Event Sc03 Tf03 Set CFJ to inactive CFJ Event Sc01 Numeric portion of the transition numbers in this column shall be used as event numbers. Events in the Action column report following information. CFJ Event reports CFJID and CFJData. </#3> CFJ State Definition Table
CLJState The main state of CLJ State Model RO Y Enumerated: LoadQueued, LoadRequest, CarrierValid, UnloadRequest LRPState Optional Current state of LR Prediction parallel state RO O Enumerated: LRNotPredicted, LRPredicted LRPTime Optional Predicted time of LR Prediction RO O Uses format defined for TimeReport LSPState Optional Current state of LS Prediction parallel state RO O Enumerated: LSNotPredicted, LSPredicted LSPTime Optional Predicted time of LS Prediction RO O Uses format defined for TimeReport URPState Current state of UR Prediction parallel state RO Y Enumerated: URNotPredicted, URPredicted URPTime Predicted time of UR Prediction RO Y Uses format defined for TimeReport USPState Optional Current state of US Prediction parallel state RO O Enumerated: USNotPredicted, USPredicted USPTime Optional Predicted time of US Prediction RO O Uses format defined for TimeReport CLJCarrierType Optional Type of carrier RO O Enumerated: ProcessCarrier, EmptyCarrier, NPWCarrier CLJCarrierID ID of carrier which is dealt with the CLJ. Carrier ID may not be assigned until a carrier is loaded and confirmed. When carrier ID is not specified yet, this attribute shall inform it. RO Y Text 0–80 characters Identifier of a carrier. The CLJCarrierID shall be same as the CarrierID defined in SEMI E87. A zero length is used for ‘CarrierID is not yet specified’ CLJLPID Load port ID ID of load port which will be used by the CLJ RO Y Unsigned integer. 0 = Load port is not assigned Non 0 = Load port number The CLJLPID is compatible with the load port number defined in SEMI E87 which says “The load port number shall be assigned incrementally from the bottom left to bottom right, then top left to top right when facing the front of the equipment.” Even though a value may be marked as RO (read only), the initial value for the attribute may be provided by the host. CLJ State Model — The following diagrams and tables define the state model of CLJ object. Equipment shall maintain appropriate number of CLJs to achieve continuous substrate processing. CLJ State Model Diagram CLJ State Model Diagram CLJ State Model Definition
Sc43 US Predicted Start timing of US is predicted Tc42 Prediction is changed USP Event Sc43 Prediction update Tc43 Prediction is withdrawn USP Event Sc42 Sc50 Load Port Assignment Load Port assignment. Tc50 None None Sc51 Parallel state of Sc00 Sc51 LP Not Assigned CLJ is not assigned on load port Tc51 Load port assignment LP Event Sc52 Sc52 LP Assigned CLJ is assigned on load port Tc52 Load port re-assignment LP Event Sc52 Tc53 Load port assignment withdrawal LP Event Sc51 Sc60 Carrier ID Assignment Carrier ID assignment. Tc60 None None Sc61 Parallel state of Sc00 Sc61 CID Not Assigned Carrier ID is not assigned Tc61 Carrier ID assignment CID Event Sc62 Sc62 CID Assigned Carrier ID is assigned Tc62 Carrier ID reassignment CID Event Sc62 Tc63 Carrier ID withdrawal CID Event Sc61 Numeric portion of the transition numbers in this column shall be used as event numbers. Events in the Action column report the following information. CLJ Event reports CLJID and CLJState CLD Event reports CLJID and previous CLJState LRP Event reports CLJID, LRPState and LRPTime LSP Event reports CLJID, LSPState and LSPTime URP Event reports CLJID, URPState and URPTime USP Event reports CLJID, USPState and USPTime CID Event reports CLJID, CLJCarrierType and CLJCarrierID LP Event reports CLJID and CLJLPID </#4> CLJ State Definition Table State Definition Table No. Mnemonic State Definition Comments Sc00 CLJ Created A state in which a CLJ is created and in operation. Sc01 Load Queued Optional The CLJ is queued in CFJ, but is not requesting load of a carrier yet. This state may not be required when Load Request Prediction is not used.
Tc21 LS Not Predicted Start timing of Load Stagnation is predicted. LS Predicted LSP Event Tc22 LS Predicted Predicted start timing of Load Stagnation is changed. LS Predicted LSP Event Tc23 LS Predicted Predicted start timing of Load Stagnation is withdrawn. LS Not Predicted LSP Event Tc30 UR Prediction None UR Not Predicted None Tc31 UR Not Predicted Start timing of Unload Request state is predicted. UR Predicted URP Event Tc32 UR Predicted Predicted start timing of Unload Request state is changed. UR Predicted URP Event Tc33 UR Predicted Predicted start timing of Unload Request state is withdrawn. UR Not Predicted URP Event Tc40 <#1> EoUR Assignment US Prediction </#1> None US Not Predicted None Tc41 US Not Predicted Start timing of Unload Stagnation is predicted. US Predicted USP Event Tc42 US Predicted Predicted start timing of Unload Stagnation is changed. US Predicted USP Event Tc43 US Predicted Predicted start timing of Unload Stagnation is withdrawn. US Not Predicted <#1> ESoUR Event USP Event </#1> Tc50 Load Port Assignment None. LP Not Assigned None Tc51 LP Not Assigned CLJ is assigned on load port. LP Assigned LP Event Tc52 LP Assigned CLJ is re-assigned on load port. LP Assigned LP Event Tc53 LP Assigned Load port assignment withdrawal. LP Not Assigned LP Event Tc60 Carrier ID Assignment None. CID Not Assigned None Tc61 CID Not Assigned Carrier ID assignment. CID Assigned CID Event Tc62 CID Assigned Carrier ID reassignment. CID Assigned CID Event Tc63 CID Assigned Carrier ID withdrawal. CID Not Assigned CID Event Numeric portion of the transition numbers in this column shall be used as event numbers. Events in the Action column report the following information. CLJ Event reports CLJID and CLJState
CLD Event reports CLJID and previous CLJState LRP Event reports CLJID, LRPState and LRPTime LSP Event reports CLJID, LSPState and LSPTime URP Event reports CLJID, URPState and URPTime USP Event reports CLJID, USPState and USPTime CID Event reports CLJID, CLJCarrierType and CLJCarrierID LP Event reports CLJID and CLJLPID CLJ Services and Events — This section defines the message services and events required to support CLJ functionalities. CLJ Service Message Description — The following table is a list of CLJ services. CLJ Service Message Description Service Name Type#1 Description GetCLJList R Optional This service gets a list of the CLJ objects from the equipment. Use SEMI E39 OSS to get ObjIDList by specifying ObjType and ObjID for ATTRID. GetCLJAttributes R Optional This service gets the attributes of specified CLJ from the equipment. Use GetAttr service of SEMI E39 OSS for this purpose. The ‘Type’ column is used to indicate whether the service consists of a request/response message pair, ‘R’, or a single notification message, ‘N’. CLJ Events — The following table shows CLJ Events. CLJ Events are internal events and are reported to the host through the associated CFJ Event. CLJ Events trigger the associated CFJ Event with the latest value of parameters shown in the table below. CLJ Events Description Report Name Parameters Description CLJ Event CLJID CLJState Reports creation or state change of the CLJ CLD Event - Reports deletion of the CLJ by the absence of the CLJID in CFJData LRP Event CLJID LRPState LRPTime Reports a change of Load Request Prediction of the CLJ. LSP Event CLJID LSPState LSPTime Reports a change of Load Stagnation Prediction of the CLJ. URP Event CLJID URPState URPTime Reports a change of Unload Request Prediction of the CLJ. USP Event CLJID USPState USPTime Reports a change of Unload Stagnation Prediction of the CLJ. CID Event CLJID CLJCarrierType CLJCarrierID Reports a change of Carrier ID assignment of the CLJ.
CLJLPID Optional Load port ID ID of load port which will be used by the CLJ Unsigned integer 0 = Load port is not assigned Non 0 = Load port number The CLJLPID is compatible with the load port number defined in SEMI E87 which says “The load port number shall be assigned incrementally from the bottom left to bottom right, then top left to top right when facing the front of the equipment.” RO Requirements for Compliance Following table provides a checklist for PCL compliance. PCL Compliance Statement Fundamental PCL Requirements PCL Section Implemented PCL Compliant PCL Requirements 8 PCL Requirements 8.1 Carrier Flow Job (CFJ) Object 8.1.1  Yes  No Carrier Logistics Job (CLJ) Object 8.1.2  Yes  No Reporting Scheme of Time for PCL 8.2  Yes  Prediction Resubmission Threshold for PCL 8.3  Yes  PCL Value Data Definitions 8.4  Yes  TimeReport 8.5  Yes  CFJ Object Requirements 9 CFJ Object Definition 9.1  Yes  No CFJ Object Descriptions 9.2  Yes  No CFJ Object Functional Requirements 9.3 Order Management of CLJs 9.3.1  Yes  No Load/Unload Timing Management of CLJs 9.3.2  Yes  Load Port Assignment to CLJs 9.3.3 Load Port Assignment for Fixed Buffer Equipment 9.3.3.1  Yes  No Load Port Assignment for Internal Buffer Equipment 9.3.3.2  Yes  No CFJ Attribute Definitions 9.4  Yes  No CFJ State Model 9.5  Yes  CFJ Services <#3> and Events </#3> 9.6  Yes  CFJ Variable Data Definitions 9.7  Yes  CLJ Object Requirements 10 CLJ Object Definition 10.1  Yes  No CLJ Object Description 10.2  Yes  No CLJ Object Functional Requirements 10.3 CLJ Main State Management 10.3.1  Yes  No Predictions 10.3.2
Load Request (LR) Prediction (Optional) 10.3.2.1  Yes  Load Stagnation (LS) Prediction (Optional) 10.3.2.2  Yes  Unload Request (UR) Prediction 10.3.2.3  Yes  Unload Stagnation (US) Prediction (Optional) 10.3.2.4  Yes  Carrier ID Assignment (Optional) 10.3.3  Yes  Load Port Assignment (Optional) 10.3.4  Yes  CLJ Object Attribute Definitions 10.4  Yes  No CLJ State Model 10.5  Yes  No CLJ Services <#4> and Events </#4> 10.6  Yes  No CLJ Variable Date Definitions 10.7  Yes  Related Documents SEMI Standards and Safety Guidelines SEMI E148 — Specification for Time Synchronization and Definition of the TS-CLOCK Object
2 CLJ1,CLJ2 Created & Load Request FE CLJ Event LR LR 3 CLJ1,CLJ2 LS Predicted FE LSP Event Time = Now LS Predicted LS Predicted 4 FE Start of E84 TB 5 CLJ1 Carrier Valid (Loaded) FE CLJ Event (@ End of E84) CV 6 CLJ1 Slot Map Verification PJ Creation Created /Execute 7 CLJ1 UR Predicted FE URP Event Time = T1 UR Predicted 8 FE Start of E84 TB 9 CLJ2 Carrier Valid (Loaded) FE CLJ Event (@ End of E84) CV 10 CLJ2 Slot Map Verification PJ Creation Created /Execute 11 CLJ2 UR Predicted FE URP Event Time = T2 UR Predicted 12 CLJ3 Load Request FE CLJ Event LR 13 CLJ3 LS Predicted FE LSP Event Time = T3 (CEW Started) LS Predicted 14 CLJ1 Unload Request FE CLJ Event RU UR 15 FE Start of E84 TB 16 CLJ1 Deleted (Unloaded) FE CLJ Event (@End of E84) RL Deleted Deleted 17 FE Start of E84 TB None None 18 CLJ3 Carrier Valid (Loaded) FE CLJ Event (@ End of E84) CV 19 CLJ3 Slot Map Verification PJ Creation 20 CLJ3 UR Predicted FE URP Event Time = T4 UR Predicted 21 CLJ4 Load Request FE CLJ Event LR
5 CLJ1 Carrier Valid (Loaded) FE CLJ Event (@ End of E84) CV 6 CLJ1 Recognition of Carrier and Wafer 7 CLJ1 Carrier Move to IB RL 8 FE Start of E84 TB 9 CLJ2 Carrier Valid (Loaded) FE CLJ Event (@ End of E84) CV 10 CLJ2 Recognition of Carrier and Wafer 11 CLJ2 Carrier Move to IB RL 12 FE Start of E84 TB 13 CLJ3 Carrier Valid (Loaded) FE CLJ Event (@ End of E84) CV 14 CLJ3 Recognition of Carrier and Wafer 15 CLJ3 Carrier Move to IB RL 16 FE Start of E84 TB 17 CLJ4 Carrier Valid (Loaded) FE CLJ Event (@ End of E84) CV 18 CLJ4 Recognition of Carrier and Wafer 19 CLJ4 Carrier Move to IB RL 20 PJ Creation 21 CLJ1~4 UR Predicted FE URP Event Time = T2 URP URP URP URP 22 CLJ5~8 LS Predicted FE LSP Event Time CLJ5~8 =T1 LSP LSP LSP LSP 23 FE Start of E84 TB 24 CLJ5 Carrier Valid (Loaded) FE CLJ Event (@ End of E84) CV 25 CLJ5 Recognition of Carrier and Wafer 26 CLJ1 Carrier Move to IB RL 27 FE Start of E84 TB
28 CLJ6 Carrier Valid (Loaded) FE CLJ Event (@ End of E84) CV 29 CLJ6 Recognition of Carrier and Wafer 30 CLJ6 Carrier Move to IB RL 31 FE Start of E84 TB 32 CLJ7 Carrier Valid (Loaded) FE CLJ Event (@ End of E84) CV 33 CLJ7 Recognition of Carrier and Wafer 34 CLJ7 Carrier Move to IB RL 35 FE Start of E84 TB 36 CLJ8 Carrier Valid (Loaded) FE CLJ Event (@ End of E84) CV 37 CLJ8 Recognition of Carrier and Wafer 38 CLJ8 Carrier Move to IB RL 39 PJ Completed (Job1) D 40 PJ Creation (Job2) N 41 CLJ9~12 Load Queued LQ LQ LQ LQ 42 CLJ9~12 LS Predicted FE LSP Event Time = T5 LSP LSP LSP LSP 43 CLJ5~8 UR Predicted FE URP Event Time = T6 URP URP URP URP 44 CLJ1 Unload Request FE CLJ Event RU UR 45 CLJ2 Unload Request FE CLJ Event RU UR 46 FE Start of E84 TB 47 CLJ1 Deleted (Unloaded) RL D LR 48 CLJ9 Load Request FE CLJ Event N 49 CLJ3 Unload Request FE CLJ Event RU UR 50 FE Start of E84 TB 51 CLJ2 Deleted (Unloaded) RL D LR E
52 CLJ10 Load Request FE CLJ Event N 53 CLJ4 Unload Request FE CLJ Event RU UR 54 FE Start of E84 TB 55 CLJ3 Deleted (Unloaded) RL D LR 56 CLJ11 Load Request FE CLJ Event N 57 FE Start of E84 TB 58 CLJ4 Deleted (Unloaded) RL D LR 59 CLJ12 Load Request FE CLJ Event N 60 FE Start of E84 TB CV 61 CLJ9 Carrier Valid (Loaded) FE CLJ Event (@ End of E84) 62 CLJ9 Recognition of Carrier and Wafer 63 CLJ9 Carrier Move to IB RL 64 FE Start of E84 TB CV 65 CLJ10 Carrier Valid (Loaded) FE CLJ Event (@ End of E84) 66 CLJ10 Recognition of Carrier and Wafer 67 CLJ10 Carrier Move to IB RL 68 FE Start of E84 TB CV 69 CLJ11 Carrier Valid (Loaded) FE CLJ Event (@ End of E84) 70 CLJ11 Recognition of Carrier and Wafer 71 CLJ11 Carrier Move to IB RL 72 FE Start of E84 TB CV 73 CLJ13~16 Load Queued 74 CLJ12 Carrier Valid (Loaded) FE CLJ Event (@ End of E84) 75 CLJ12 Recognition of Carrier and Wafer
76 CLJ12 Carrier Move to IB RL 77 PJ Completed D 78 PJ Creation LQ LQ LQ LQ N 79 CLJ13~16 LS Predicted FE LSP Event Time = T9 LSP LSP LSP LSP 80 CLJ9~12 UR Predicted FE URP Event Time = T10 URP URP URP URP 81 CLJ5 Unload Request FE CLJ Event RU UR 82 CLJ6 Unload Request FE CLJ Event RU UR 83 FE Start of E84 TB 84 CLJ5 Deleted (Unloaded) RL D 85 CLJ13 Load Request FE CLJ Event LR N 86 CLJ7 Unload Request FE CLJ Event RU UR 87 FE Start of E84 TB 88 CLJ6 Deleted (Unloaded) RL D 89 CLJ14 Load Request FE CLJ Event LR N 90 CLJ8 Unload Request FE CLJ Event RU UR 91 FE Start of E84 TB 92 CLJ7 Deleted (Unloaded) RL D 93 CLJ15 Load Request FE CLJ Event LR N 94 FE Start of E84 TB 95 CLJ8 Deleted (Unloaded) RL D 96 CLJ16 Load Request FE CLJ Event LR N 97 FE Start of E84 TB CV 98 CLJ13 Carrier Valid (Loaded) FE CLJ Event (@ End of E84) 99 CLJ13 Recognition of Carrier and Wafer 100 CLJ13 Carrier Move to IB RL 101 FE Start of E84 TB CV 102 CLJ14 Carrier Valid (Loaded) FE CLJ Event (@ End of E84) E
This Standard was technically approved by the Information & Control Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on February 10, 2015. Available at www.semiviews.org and www.semi.org in May 2015. Purpose The purpose of this Standard is to provide a mapping of the services and data of SEMI E171 Specification for Predictive Carrier Logistics to SECS-II message protocol. Scope The scope of this Standard is to map the services and data of SEMI E171 to SECS-II streams, functions, and items. NOTICE: SEMI Standards and Safety Guidelines do not purport to address all safety issues associated with their use. It is the responsibility of the users of the Documents to establish appropriate safety and health practices, and determine the applicability of regulatory or other limitations prior to use. Referenced Standards and Documents SEMI Standards and Safety Guidelines SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II) SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM) SEMI E39 — Object Services Standard: Concepts, Behavior, and Services SEMI E39.1 — SECS-II Protocol for Object Services Standard (OSS) SEMI E87 — Specification for Carrier Management (CMS) SEMI E171 — Specification for Predictive Carrier Logistics (PCL) NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions. Terminology None. NOTICE: SEMI makes no warranties or representations as to the suitability of the Standards and Safety Guidelines set forth herein for any particular application. The determination of the suitability of the Standard or Safety Guideline is solely the responsibility of the user. Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant literature, respecting any materials or equipment mentioned herein. Standards and Safety Guidelines are subject to change without notice. By publication of this Standard or Safety Guideline, SEMI takes no position respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this Standard or Safety Guideline. Users of this Standard or Safety Guideline are expressly advised that determination of any such patent rights or copyrights and the risk of infringement of such rights are entirely their own responsibility.