Basic Implementation for Typical Fixed Buffer Equipment Relationship Model of Objects — The CFJ and CLJ relationship for typical Fixed Buffer Equipment is shown below. Number of CFJs — One CFJ is assigned to whole equipment (one CFJ manages two load ports) Number of CLJs — Up to four CLJs are created Maximum Number of Carriers (MaxCarrierNumber) — Two (one for one load port) Load Port Assignment — Used Carrier ID Assignment — Used LR Prediction — Not used LS Prediction — Used UR Prediction — Used US Prediction — Not used CFJ and CLJ Relationship for Basic Implementation for Typical Fixed Buffer Equipment CLJ State Model — The CLJ uses the following portion of the CLJ State Model. CLJ State Model for Basic Implementation for Typical Fixed Buffer Equipment CFJ for Typical Fixed Buffer Equipment — CFJ which is assigned to the equipment has the following configuration. The following figure only shows the highlighted attributes of CLJs. CFJ for Basic Implementation for Typical Fixed Buffer Equipment Transaction and States of Basic Implementation for Typical Fixed Buffer Equipment — Transactions and states are shown in the following table. Transactions and States # Action Dir#1 Message & Event E87#2 LPTS PCL#3 PJ/CJ LP1 LP2 CLJ1 CLJID =0001 CLJ2 CLJID =0002 CLJ3 CLJID =0003 CLJ4 CLJID =0004 Job1 (CLJ1,3) Job2 (CLJ2,4) 1 Initial State RL RL None None None None None None
2 CLJ1,CLJ2 Created & Load Request FE CLJ Event LR LR 3 CLJ1,CLJ2 LS Predicted FE LSP Event Time = Now LS Predicted LS Predicted 4 FE Start of E84 TB 5 CLJ1 Carrier Valid (Loaded) FE CLJ Event (@ End of E84) CV 6 CLJ1 Slot Map Verification PJ Creation Created /Execute 7 CLJ1 UR Predicted FE URP Event Time = T1 UR Predicted 8 FE Start of E84 TB 9 CLJ2 Carrier Valid (Loaded) FE CLJ Event (@ End of E84) CV 10 CLJ2 Slot Map Verification PJ Creation Created /Execute 11 CLJ2 UR Predicted FE URP Event Time = T2 UR Predicted 12 CLJ3 Load Request FE CLJ Event LR 13 CLJ3 LS Predicted FE LSP Event Time = T3 (CEW Started) LS Predicted 14 CLJ1 Unload Request FE CLJ Event RU UR 15 FE Start of E84 TB 16 CLJ1 Deleted (Unloaded) FE CLJ Event (@End of E84) RL Deleted Deleted 17 FE Start of E84 TB None None 18 CLJ3 Carrier Valid (Loaded) FE CLJ Event (@ End of E84) CV 19 CLJ3 Slot Map Verification PJ Creation 20 CLJ3 UR Predicted FE URP Event Time = T4 UR Predicted 21 CLJ4 Load Request FE CLJ Event LR
6 CLJ1 Recognition of Carrier and Wafer 7 CLJ1 Carrier Move to IB RL 8 FE Start of E84 TB 9 CLJ2 Carrier Valid (Loaded) FE CLJ Event (@ End of E84) CV 10 CLJ2 Recognition of Carrier and Wafer 11 CLJ2 Carrier Move to IB RL 12 FE Start of E84 TB 13 CLJ3 Carrier Valid (Loaded) FE CLJ Event (@ End of E84) CV 14 CLJ3 Recognition of Carrier and Wafer 15 CLJ3 Carrier Move to IB RL 16 FE Start of E84 TB 17 CLJ4 Carrier Valid (Loaded) FE CLJ Event (@ End of E84) CV 18 CLJ4 Recognition of Carrier and Wafer 19 CLJ4 Carrier Move to IB RL 20 PJ Creation 21 CLJ1~4 UR Predicted FE URP Event Time = T2 URP URP URP URP 22 CLJ5~8 LS Predicted FE LSP Event Time CLJ5~8 =T1 LSP LSP LSP LSP 23 FE Start of E84 TB 24 CLJ5 Carrier Valid (Loaded) FE CLJ Event (@ End of E84) CV 25 CLJ5 Recognition of Carrier and Wafer 26 CLJ1 Carrier Move to IB RL 27 FE Start of E84 TB 28 CLJ6 Carrier Valid (Loaded) FE CLJ Event (@ End of E84) CV
29 CLJ6 Recognition of Carrier and Wafer 30 CLJ6 Carrier Move to IB RL 31 FE Start of E84 TB 32 CLJ7 Carrier Valid (Loaded) FE CLJ Event (@ End of E84) CV 33 CLJ7 Recognition of Carrier and Wafer 34 CLJ7 Carrier Move to IB RL 35 FE Start of E84 TB 36 CLJ8 Carrier Valid (Loaded) FE CLJ Event (@ End of E84) CV 37 CLJ8 Recognition of Carrier and Wafer 38 CLJ8 Carrier Move to IB RL 39 PJ Completed (Job1) D 40 PJ Creation (Job2) N 41 CLJ9~12 Load Queued LQ LQ LQ LQ 42 CLJ9~12 LS Predicted FE LSP Event Time = T5 LSP LSP LSP LSP 43 CLJ5~8 UR Predicted FE URP Event Time = T6 URP URP URP URP 44 CLJ1 Unload Request FE CLJ Event RU UR 45 CLJ2 Unload Request FE CLJ Event RU UR 46 FE Start of E84 TB 47 CLJ1 Deleted (Unloaded) RL D LR 48 CLJ9 Load Request FE CLJ Event N 49 CLJ3 Unload Request FE CLJ Event RU UR 50 FE Start of E84 TB 51 CLJ2 Deleted (Unloaded) RL D LR 52 CLJ10 Load Request FE CLJ Event N E
53 CLJ4 Unload Request FE CLJ Event RU UR 54 FE Start of E84 TB 55 CLJ3 Deleted (Unloaded) RL D LR 56 CLJ11 Load Request FE CLJ Event N 57 FE Start of E84 TB 58 CLJ4 Deleted (Unloaded) RL D LR 59 CLJ12 Load Request FE CLJ Event N 60 FE Start of E84 TB CV 61 CLJ9 Carrier Valid (Loaded) FE CLJ Event (@ End of E84) 62 CLJ9 Recognition of Carrier and Wafer 63 CLJ9 Carrier Move to IB RL 64 FE Start of E84 TB CV 65 CLJ10 Carrier Valid (Loaded) FE CLJ Event (@ End of E84) 66 CLJ10 Recognition of Carrier and Wafer 67 CLJ10 Carrier Move to IB RL 68 FE Start of E84 TB CV 69 CLJ11 Carrier Valid (Loaded) FE CLJ Event (@ End of E84) 70 CLJ11 Recognition of Carrier and Wafer 71 CLJ11 Carrier Move to IB RL 72 FE Start of E84 TB CV 73 CLJ13~16 Load Queued 74 CLJ12 Carrier Valid (Loaded) FE CLJ Event (@ End of E84) 75 CLJ12 Recognition of Carrier and Wafer 76 CLJ12 Carrier Move to IB RL
77 PJ Completed D 78 PJ Creation LQ LQ LQ LQ N 79 CLJ13~16 LS Predicted FE LSP Event Time = T9 LSP LSP LSP LSP 80 CLJ9~12 UR Predicted FE URP Event Time = T10 URP URP URP URP 81 CLJ5 Unload Request FE CLJ Event RU UR 82 CLJ6 Unload Request FE CLJ Event RU UR 83 FE Start of E84 TB 84 CLJ5 Deleted (Unloaded) RL D 85 CLJ13 Load Request FE CLJ Event LR N 86 CLJ7 Unload Request FE CLJ Event RU UR 87 FE Start of E84 TB 88 CLJ6 Deleted (Unloaded) RL D 89 CLJ14 Load Request FE CLJ Event LR N 90 CLJ8 Unload Request FE CLJ Event RU UR 91 FE Start of E84 TB 92 CLJ7 Deleted (Unloaded) RL D 93 CLJ15 Load Request FE CLJ Event LR N 94 FE Start of E84 TB 95 CLJ8 Deleted (Unloaded) RL D 96 CLJ16 Load Request FE CLJ Event LR N 97 FE Start of E84 TB CV 98 CLJ13 Carrier Valid (Loaded) FE CLJ Event (@ End of E84) 99 CLJ13 Recognition of Carrier and Wafer 100 CLJ13 Carrier Move to IB RL 101 FE Start of E84 TB CV 102 CLJ14 Carrier Valid (Loaded) FE CLJ Event (@ End of E84) E
CFJ Service Parameters to SECS-Ⅱ Data Item Mapping CFJ Service Parameter SEMI E39 Object Service Message Parameter Range SECS-II Data Item GetCFJList GetAttr --- ObjSpec OBJSPEC [20] --- ObjType OBJTYPE: ‘CarrierFlowJob’ OBJTYPE [20] --- AttrName ATTRID ‘ObjID’ ATTRID [20] GetCFJListResp CFJlist List of ObjSetting OBJID 1–80 characters ATTRID ‘ObjID’ ATTRDATA for ObjID 1–80 characters 1. L,n n = number of CFJ 1. L,2 1. <OBJID1> 2. L,1 1.L,2 1. <ATTRID1-1> 2. <ATTRDATA1-1> : n. L,2 1. <OBJIDn> 2. L,1 1.L,2 1. <ATTRIDn-1> 2. <ATTRDATAn-1> OBJID [20] ATTRID [20] ATTRDATA [20] ObjStatus OBJACK 0=Successful completion 1=Error ERRTEXT: 1–120 characters 1. L,2 1. <OBJACK> 2. L,p 1. L,2 1. <ERRCODE1> 2. <ERRTEXT1> : p. L,2 1. <ERRCODEp> 2. <ERRTEXTp> OBJACK [51] ERRCODE [5( )] ERRTEXT [20] GetCFJData GetAttr --- ObjSpec OBJSPEC [20] --- ObjType OBJTYPE: ‘CarrierFlowJob’ OBJTYPE [20] CFJID ObjID OBJID: 1–80 characters OBJID [20]
CFJData AttrName ATTRID ‘CFJData’ ATTRID [20] GetCFJDataResp CFJData ObjSetting OBJID 1–80 characters ATTRID ‘CFJData’ ATTRDATA for CFJData CLJ attributes: Defined in CLJ 1. L,i i= number of CFJ 1. L,2 1. <OBJID1> 2. L,1 1.L,2 1. <ATTRID1-1> 2. <ATTRDATA1-1> : i. L,2 1. <OBJIDi> 2. L,1 1.L,2 1. <ATTRIDi-1> 2. <ATTRDATAi-1> OBJID [20] ATTRID [20] ATTRDATA [0] Refer to CLJ attributes ObjStatus Same ObjStatus range with GetCFJListResp Same ObjStatus Data Item structure with GetCFJListResp PutAMHSArrival Info ObjectAction service --- OperationID OPID [5( )] --- ObjSpec OBJSPEC [20] --- ObjectAction ‘PutAMHSArrivalInfo’ SVCNAME [20] AMHSArrivalInfo SPNAME ‘CFJID’ ‘CLJID’ ‘EstimatedArrivalTime’ SPVAL: for CLJID, CFJID 1–80 characters for EstimatedArrivalTime Defined in SEMI E171 TimeReport L,m m=number of CFJ 1.L,2 1.<SPNAME1> 2.L,a a=number of CLJ in specified CFJ 1. L,2 1. L,2 1.< SPNAME1-1-1> 2.<SPVAL1-1-1> 2. L,2 1.< SPNAME1-1-2> 2.<SPVAL1-1-2> : a. L,2 1. L,2 1.< SPNAME1-a-1> 2.<SPVAL1-a-1> 2. L,2 1.< SPNAME1-a-2> 2.<SPVAL1-a-2>
: m.L,2 1.<SPNAMEm> 2.L,b b=number of CLJ in specified CFJ 1. L,2 1. L,2 1.< SPNAMEm-1-1> 2.<SPVALm-1-1> 2. L,2 1.< SPNAMEm-1-2> 2.<SPVALm-1-2> : b. L,2 1. L,2 1.< SPNAME m-b-1> 2.<SPVAL m-b-1> 2. L,2 1.< SPNAME m-b-2> 2.<SPVAL m-b-2> SPNAME [20] SPVAL [20] ObjectActionStatus SVCACK 0=Acknowledge, service has been performed 1=Service does not exist 2=Cannot perform now 3=At least parameter is invalid 4=Acknowledge, service will be performed with completion notified later with parameters for response 5=Service is not completed or prohibited 6=No such object exists ERRTEXT: 1–120 characters L,2 1.<SVCACK> 2. L,n 1.L,2 1.<ERRCODE1> 2.<ERRTEXT1> : n.L,2 1.<ERRCODEn> 2.<ERRTEXTn> SVCACK [10] ERRCODE [5( )] ERRTEXT [20] --- ObjectLinkID LINKID [54] Mapping of CLJ Services Services Message Mapping — The following table defines the relationships between SEMI E171 CLJ services and SECS-II messages.
ObjStatus OBJACK 0=Successful completion 1=Error ERRTEXT: 1–120 characters 1. L,2 1. <OBJACK> 2. L,p 1. L,2 1. <ERRCODE1> 2. <ERRTEXT1> : p. L,2 1. <ERRCODEp> 2. <ERRTEXTp> OBJACK [51] ERRCODE [5( )] ERRTEXT [20] GetCLJAttributes GetAttr --- ObjSpec OBJSPEC [20] --- ObjType OBJTYPE: ‘CarrierLogisticsJob’ OBJTYPE [20] CLJD ObjID OBJID: 1–80 characters OBJID [20] CLJState AttrName ATTRID ‘CLJState’ ‘LRPState SoLRPState’ ‘LRPTime SoLRPTime’ ‘LSPState EoLRPState’ ‘LSPTime EoLRPTime’ ‘URPState SoURPState’ ‘URPTime SoURPTime’ ‘USPState EoURPState’ ‘USPTime EoURPTime’ ‘CLJCarrierType’ ‘CLJCarrierID’ ‘CLJLPID’ ATTRID [20] LRPState SoLRPState LRPTime SoLRPTime LSPState EoLRPState LSPTime EoLRPTime URPState SoURPState URPTime SoURPTime USPState EoURPState USPTime EoURPTime CLJCarrierType CLJCarrierID CLJLPID