プレーナー プロセス
↑ US 3064167 Hoerni, J. A.: "Semiconductor device" filed May 15, 1960
↑ Bassett, Ross Knox (2007). To the Digital Age: Research Labs, Start-up Companies, and the Rise of MOS Technology. Johns Hopkins University Press. p. 46. ISBN 9780801886393. https://books.google.com/books?id=UUbB3d2UnaAC&pg=PA46
↑ “1959: Practical Monolithic Integrated Circuit Concept Patented”. Computer History Museum. 2019年8月13日閲覧。
↑ “Integrated circuits”. NASA. 2019年8月13日閲覧。
↑ Shannon Hill. "UV Lithography: Taking Extreme Measures". National Institute of Standards and Technology (NIST).