リモート・プラズマ
↑ Tommi Kääriäinen; David Cameron; Marja-Leena Kääriäinen; Arthur Sherman (17 May 2013). Atomic Layer Deposition: Principles, Characteristics, and Nanotechnology Applications. Wiley. pp. 21–. ISBN 978-1-118-74742-1. https://books.google.com/books?id=Yjeid_cf5AcC&pg=PA21
↑ Alexander Fridman (5 May 2008). Plasma Chemistry. Cambridge University Press. pp. 532–. ISBN 978-1-139-47173-2. https://books.google.com/books?id=ZzmtGEHCC9MC&pg=PA532