白崎博公
of SPIE, Metrology, Inspection, and Process Control for Microlithography XVII,5038, pp.748-756(2003)
Hirokimi Shirasaki,Kunio Ueta,"Linewidth measurement simulations for semiconductor circuits by scatterometry using the FDTD and the time shortening calculation method",Proc. of SPIE, Metrology, Inspection, and Process Control for Microlithography XVIII, 5375, pp.1331-1338(2004)
Hirokimi Shirasaki,"Arbitrary 3D linewidth forms measurement simulations for the next-generation semiconductor circuits by scatterometry using the FDTD method",Proc.
白崎博公、"直線およびn乗コサインテーパ形マイクロストリップ線路の導波管モデルによる階段近似解析”、電子情報通信学会論文誌, C1, Vol.J79-C-1, 8, pp.303-309(平08-8-25).
H. Shirasaki,"Steps approximate analysis and design charts of raised cosine impedance tapered microstrip lines by waveguide model", 1997 6th Internal Symposium on Recent Advances in Microwave Technology Proceedings, pp.187-190(1997-08-06).
H.Shirasaki :"Optimum design by waveguide model and mode matching technique of microstrip line taper shapes for satellite broadcast planar antenna," 1999 IEEE AP-S International symposium and USNC/URSI national radio science meeting, AP-16-065,Vol.1,pp.238-241(1999-7).
H.
61523O1-61523O8(2006)
Hirokimi Shirasaki,“ 3D anisotropic semiconductor grooves measurement simulations (scatterometry) using FDTD Methods.”,Proceedings of SPIE, 65184D 1-8 (2007)
Hirokimi Shirasaki,“3D Semiconductor Grooves Measurement Simulations (Scatterometry) using Nonstandard FDTD Methods”,Proceedings of SPIE, 6922, 69223T 1-9(2008)
Hirokimi Shirasaki,“Scatterometry simulator for multi-core CPU”, Proceedings of SPIE, 7638, 7638V 1-6(2010)
白﨑博公,“スキャトロメトリにおけるナノ形状センシング”,光波センシングのための偏光技術の進展シンポジウム・2011年春季 第58回 応用物理学関係連合講演会 講演予稿集 2011 26p-BJ-7(2011)(招待講演)
H. Shirasaki, "Scatterometry simulator using GPU and Evolutionary Algorithm," Proc.
of SPIE, Metrology, Inspection, and Process Control for Microlithography XVIII, 5375,pp.1339-1345(2004)
Hirokimi Shirasaki,"Arbitrary Cross Sections and Stack Forms Measurement Simulations for Semiconductor Circuits by Scatterometry ",Proc. of SPIE, Metrology, Inspection, and Process Control for Microlithography XIX, 5752,pp.790-797(2005)
Hirokimi Shirasaki,"3D Isolated and Periodic Grooves Measurement Simulations for the Semiconductor Circuits by Scatterometry Using the FDTD Methods and the Time Shortening Calculation Method.", Proceedings of SPIE, Microlithography 2006,6152, pp.
弾性表面波
白崎博公, 牧本利夫「Cubic結晶における弾性表面波のエネルギー伝搬特性(技術談話室)」『電子通信学会論文誌. B』第59巻第12号、電子通信学会、1976年12月、595-596頁、doi:10.11501/2289966、ISSN 03736105、NAID 40002552933。
H.Shirasaki and T.Makimoto,"Energy propergation properties of piezoelectric surface waves on cubic crystals," J.Appl.Phys., Vol.49(2), pp.658-660 (1978).
H.Shirasaki and T.