what is sputtering
Sputtering is a process whereby particles are ejected from a solid target material due to bombardment of the target by energetic particles.It only happens when the kinetic energy of the incoming particles is much higher than conventional thermal energies (â« 1 eV).hysical sputtering has a well-defined minimum energy threshold equal to or larger than the ion energy at which the maximum energy transfer of the ion to a sample atom equals the binding energy of a surface atom. This threshold typically is somewhere in the range 10â100 eV.