what is epitaxy
Epitaxy refers to the deposition of a crystalline overlayer on a crystalline substrate. The overlayer is called an epitaxial film or epitaxial layer. The term epitaxy comes from the Greek roots epi (á¼ÏÎ¯), meaning above, and taxis (ÏÎ¬Î¾Î¹Ï), meaning an ordered manner. It can be translated as arranging upon.