Fully Depleted, TrenchPinned Photo Gate for CMOS Image Sensor Applications Tackling issues of implantationcaused defects and contamination, this paper presents a new complementary metalxe2x80x93oxidexe2x80x93semiconductor (CMOS) image sensor (CIS) pixel design concept based on a native epitaxial layer for photon detection, charge storage, and charge transfer to the sensing node. To prove this concept, a backside illumination (BSI), ptype, 2xc2xb5mpitch pixel was designed. It integrates a vertical pinned photo gate (PPG), a buried vertical transfer gate (TG), sidewall capacitive deep trench isolation (CDTI), and backside oxidexe2x80x93nitridexe2x80x93oxide (ONO) stack. The designed pixel was fabricated with variations of key parameters for optimization. Testing results showed the following achievements: 13,000 h fullwell capacity with no lag for charge transfer, 80% quantum efficiency (QE) at 550nm wavelength, 5 hs dark current at 60 xc2xb0C, 2 h temporal noise floor, and 75 dB dynamic range. In comparison with conventional pixel design, the proposed concept could improve CIS performance.

An 8Tap CMOS LockIn Pixel Image Sensor for ShortPulse TimeofFlight Measurements An 8tap CMOS lockin pixel image sensor that has seven carriercapturing and a draining time window was developed for shortpulse timeofflight (TOF) measurements. The proposed pixel for the shortpulse TOF measurements has seven consecutive timegating windows, each of which has the width of 6 ns, which is advantageous for highresolution range imaging, particularly for relatively longer distances (u003e5 m) and under high ambient light operations. In order to enhance the depth resolution, a technique for the depthadaptive timegatingnumber assignment (DATA) for the shortpulse TOF measurement is proposed. A prototype of the 8tap CMOS lockin pixel image sensor is implemented with a 1POLY 4METAL 0.11xcexbcm CIS process. The maximum nonlinearity error of 1.56%FS for the range of 1xe2x80x936.4 m and the depth resolution of 6.4 mm was obtained at 6.2 m using the DATA technique.