Automated Parameter Extraction Of ScAlN MEMS Devices Using An Extended Eulerxe2x80x93Bernoulli Beam Theory Magnetoelectric sensors provide the ability to measure magnetic fields down to the pico tesla range and are currently the subject of intense research. Such sensors usually combine a piezoelectric and a magnetostrictive material, so that magnetically induced stresses can be measured electrically. Scandium aluminium nitride gained a lot of attraction in the last few years due to its enhanced piezoelectric properties. Its usage as resonantly driven microelectromechanical system (MEMS) in such sensors is accompanied by a manifold of influences from crystal growth leading to impacts on the electrical and mechanical parameters. Usual investigations via nanoindentation allow a fast determination of mechanical properties with the disadvantage of lacking the access to the anisotropy of specific properties. Such anisotropy effects are investigated in this work in terms of the Youngxe2x80x99s modulus and the strain on basis of a MEMS structures through a newly developed fully automated procedure of eigenfrequency fitting based on a new nonLorentzian fit function and subsequent analysis using an extended Eulerxe2x80x93Bernoulli theory. The introduced procedure is able to increase the resolution of the derived parameters compared to the common nanoindentation technique and hence allows detailed investigations of the behavior of magnetoelectric sensors, especially of the magnetic field dependent Youngxe2x80x98s modulus of the magnetostrictive layer.

Design and Development of Magnetostrictive Actuators and Sensors for Structural Health Monitoring Carbon Fibre Reinforced Polymer composite (CFRP) is widely used in the aerospace industry, but is prone to delamination, which is a major causes of failure. Structural Health Monitoring (SHM) systems need to be developed to determine the damage occurring within it. Our motivation is to design costeffective new sensors and a data acquisition system for magnetostrictive structural health monitoring of aerospace composites using a simple RLC circuit. The developed system is tested on magnetostrictive FeSiB and CoSiB actuator ribbons using a bending rig. Our results show detectable sensitivity of inductors as low as 0.6 xcexbcH for a bending rig radii between 600 to 300 mm (equivalent to 0.8 to 1.7 mStrain), which show a strain sensitivity resolution of 0.01 xcexbcStrain (surface area: 36 mm2). This value is at the detectability limit of our fabricated system. The best resolution (1.86 xcexbcStrain) was obtained from a 70turn copper (64 xcexbcH) wire inductor (surface area: 400 mm2) that was paired with a FeSiB actuator.