Patent application 14835140 (US), filed 2015-08-25
Publication number: US20150364383A1
Title: METHOD OF CALIBRATING OR EXPOSING A LITHOGRAPHY TOOL
CPC codes: H10P  74/203
H10P  76/2043
H10P  76/4085
H10P  50/71
H10P  50/73
H10P  50/242
G03F   7/0035
G03F   7/0752
G03F   7/091
G03F   7/095
G03F   7/40
G03F   7/70633
Office action: rejection, dated 2015-10-13
Rejection reasons: double_patenting
Final disposition: pending (2015-10-13)