Patent application 14310969 (US), filed 2014-06-20
Publication number: US20150371824A1
Title: METHOD OF MULTIPLE ZONE SYMMETRIC GAS INJECTION FOR INDUCTIVELY COUPLED PLASMA
CPC codes: H01J  37/3211
H01J  37/32165
H01J  37/3244
H01J2237/332
H01J2237/334
Office action: rejection, dated 2015-10-16
Rejection reasons: anticipation_102
obviousness_103
indefiniteness_112
Prior art cited: ref_id: 20080122367
ref_type: patent
severity: novelty_destroying
ref_id: 20070013284
ref_type: patent
severity: novelty_destroying
ref_id: 20120103523
ref_type: patent
severity: novelty_destroying
ref_id: 20080122367
ref_type: patent
severity: novelty_destroying
ref_id: 20070013284
ref_type: patent
severity: novelty_destroying
ref_id: 20060105104
ref_type: patent
severity: novelty_destroying
Final disposition: granted (2015-10-16)