Patent application 14236942 (US), filed 2014-02-04
Publication number: US20140159321A1
Title: HOLDING DEVICE FOR HOLDING A PATTERNED WAFER
CPC codes: H10P  72/78
Y10T 279/11
Y10T  29/49998
Y10T  29/53191
Y10T  29/53265
H10P  72/7616
B25B  11/005
B25B  11/007
Office action: rejection, dated 2015-10-13
Rejection reasons: obviousness_103
indefiniteness_112
Prior art cited: ref_id: 2366935
ref_type: patent
severity: obviousness
ref_id: 20070152690
ref_type: patent
severity: obviousness
ref_id: 4906011
ref_type: patent
severity: obviousness
ref_id: 7488145
ref_type: patent
severity: obviousness
Final disposition: granted (2015-10-13)