Patent application 14348006 (US), filed 2014-03-27
Publication number: US20150056373A1
Title: DEPOSITION METHOD AND DEPOSITION APPARATUS
CPC codes: H10P  14/69393
C23C  14/0063
H10P  14/6329
C23C  14/0068
C23C  14/083
C23C  16/4412
C23C  16/455
H01J  37/32449
H01J  37/34
H01J  37/3411
H01J2237/006
Office action: rejection, dated 2015-10-15
Rejection reasons: obviousness_103
Prior art cited: ref_id: 20040262155
ref_type: patent
severity: obviousness
ref_id: JP 2009200405
ref_type: patent
severity: obviousness
ref_id: 5167789
ref_type: patent
severity: obviousness
Final disposition: rejected (2015-10-15)