Patent application 13798021 (US), filed 2013-03-12
Publication number: US20140262764A1
Title: METHODS AND APPARATUS FOR REDUCING SPUTTERING OF A GROUNDED SHIELD IN A PROCESS CHAMBER
CPC codes: C23C  14/34
H01J  37/3441
C23C  14/358
H01J  37/32504
H01J  37/32651
H01J  37/3405
H01J  37/3411
Office action: rejection, dated 2015-10-15
Rejection reasons: obviousness_103
indefiniteness_112
Prior art cited: ref_id: 20050284372
ref_type: patent
severity: obviousness
ref_id: 6444099
ref_type: patent
severity: obviousness
Final disposition: granted (2015-10-15)