Patent application 13787385 (US), filed 2013-03-06
Publication number: US20140251214A1
Title: HEATED SUBSTRATE SUPPORT WITH FLATNESS CONTROL
CPC codes: H10P  72/0432
G01K   3/10
Office action: rejection, dated 2015-10-15
Rejection reasons: obviousness_103
double_patenting
Prior art cited: ref_id: 20120292305
ref_type: patent
severity: obviousness
ref_id: 20110303145
ref_type: patent
severity: obviousness
Final disposition: rejected (2015-10-15)