Patent application 13888858 (US), filed 2013-05-07
Publication number: US20130302937A1
Title: Film Formation Apparatus, Method for Forming Film, Method for Forming Multilayer Film or Light-Emitting Element, and Method for Cleaning Shadow Mask
CPC codes: C23C  14/24
H10K  50/13
H10K  71/00
H10K  71/164
H10K  85/626
H10K  85/6572
H10K  50/00
H10D  86/0214
C23C  14/042
C23C  14/12
C23C  14/562
C23C  14/568
C23C  14/5873
H01J  37/32568
H01J  37/32834
H01J2237/332
H01J2237/335
H01L  21/67
Office action: rejection, dated 2015-10-15
Rejection reasons: obviousness_103
indefiniteness_112
Prior art cited: ref_id: 20030124764
ref_type: patent
severity: obviousness
ref_id: 20090152103
ref_type: patent
severity: obviousness
ref_id: 20080187418
ref_type: patent
severity: obviousness
ref_id: 6358377
ref_type: patent
severity: obviousness
ref_id: 20080233669
ref_type: patent
severity: obviousness
ref_id: 20060240669
ref_type: patent
severity: obviousness
Final disposition: rejected (2015-10-15)