Patent application 13760845 (US), filed 2013-02-06
Publication number: US20140216498A1
Title: METHODS OF DRY STRIPPING BORON-CARBON FILMS
CPC codes: G03F   7/427
H01J  37/32853
H10P  70/00
H10P  50/283
B08B   7/0035
Office action: rejection, dated 2015-10-16
Rejection reasons: obviousness_103
indefiniteness_112
Prior art cited: ref_id: 6817369
ref_type: patent
severity: obviousness
ref_id: 7994070
ref_type: patent
severity: obviousness
Final disposition: rejected (2015-10-16)