Patent application 13801127 (US), filed 2013-03-13
Publication number: US20140206263A1
Title: METHODS AND APPARATUS FOR CONDITIONING OF CHEMICAL MECHANICAL POLISHING PADS
CPC codes: B24B  53/017
B24B  37/34
Office action: rejection, dated 2015-10-15
Rejection reasons: anticipation_102
obviousness_103
Prior art cited: ref_id: JP 20010712156
ref_type: patent
severity: novelty_destroying
ref_id: 5738574
ref_type: patent
severity: novelty_destroying
ref_id: JP 20010712156
ref_type: patent
severity: novelty_destroying
Final disposition: granted (2015-10-15)