Patent application 13790340 (US), filed 2013-03-08
Publication number: US20140054168A1
Title: APPARATUS FOR CYLINDRICAL MAGNETRON SPUTTERING
CPC codes: H01J  37/3452
C23C  14/3407
C23C  14/35
C23C  14/352
C23C  14/562
H01J  37/3405
H01J  37/347
H01J2237/334
Office action: rejection, dated 2015-10-15
Rejection reasons: anticipation_102
obviousness_103
Prior art cited: ref_id: 6375814
ref_type: patent
severity: novelty_destroying
ref_id: 6375814
ref_type: patent
severity: novelty_destroying
ref_id: 20080047831
ref_type: patent
severity: novelty_destroying
ref_id: 20110062022
ref_type: patent
severity: novelty_destroying
Final disposition: granted (2015-10-15)