Patent application 13883042 (US), filed 2013-05-02
Publication number: US20130224396A1
Title: PLASMA ANNEALING METHOD AND DEVICE FOR THE SAME
CPC codes: H10P  14/3818
H10P  14/3411
B05D   3/04
H10P  95/90
H10P  95/80
H10P  14/6514
Office action: rejection, dated 2015-10-16
Rejection reasons: obviousness_103
Prior art cited: ref_id: 5685949
ref_type: patent
severity: obviousness
ref_id: 6130397
ref_type: patent
severity: obviousness
ref_id: JP 2008053634
ref_type: patent
severity: obviousness
Final disposition: granted (2015-10-16)