Patent application 14136951 (US), filed 2013-12-20
Publication number: US20140183498A1
Title: Thin Film Silicon Nitride Barrier Layers On Flexible Substrate
CPC codes: H10K  50/844
C23C  16/345
Y10T 428/269
H10K  30/88
H10K2102/301
B32B  27/06
C23C  16/505
Y02E  10/549
Office action: rejection, dated 2015-10-15
Rejection reasons: obviousness_103
Prior art cited: ref_id: 20040021820
ref_type: patent
severity: obviousness
ref_id: 20120034451
ref_type: patent
severity: obviousness
ref_id: 6630980
ref_type: patent
severity: obviousness
ref_id: 20060054987
ref_type: patent
severity: obviousness
ref_id: 20090087998
ref_type: patent
severity: obviousness
Final disposition: granted (2015-10-15)