Patent application 14075923 (US), filed 2013-11-08
Publication number: US20140054212A1
Title: SYSTEM AND METHOD FOR REPLACING RESIST FILTER TO REDUCE RESIST FILTER-INDUCED WAFER DEFECTS
CPC codes: B01D  35/02
G03F   7/162
G03F   7/3092
Office action: rejection, dated 2015-10-14
Rejection reasons: obviousness_103
Prior art cited: ref_id: 20040144736
ref_type: patent
severity: obviousness
ref_id: 20020158079
ref_type: patent
severity: obviousness
ref_id: 6200633
ref_type: patent
severity: obviousness
Final disposition: pending (2015-10-14)