Patent application 13588011 (US), filed 2012-08-17
Publication number: US20130048603A1
Title: METHOD OF FORMING MICROPATTERNS
CPC codes: H10P  76/2041
G03F   7/0035
B44C   1/22
G03F   7/00
Office action: rejection, dated 2015-10-16
Rejection reasons: indefiniteness_112
Final disposition: granted (2015-10-16)