Patent application 13601739 (US), filed 2012-08-31
Publication number: US20140061033A1
Title: SYSTEM AND METHOD FOR DIFFERENTIAL ETCHING
CPC codes: H01J  37/32825
G11B   5/3163
H01J  37/32816
H01J  37/3411
H01J2237/334
Office action: rejection, dated 2015-10-15
Rejection reasons: anticipation_102
obviousness_103
indefiniteness_112
Prior art cited: ref_id: 4229247
ref_type: patent
severity: novelty_destroying
ref_id: 6140655
ref_type: patent
severity: novelty_destroying
ref_id: 3994793
ref_type: patent
severity: novelty_destroying
ref_id: 5188705
ref_type: patent
severity: novelty_destroying
ref_id: 4620898
ref_type: patent
severity: novelty_destroying
ref_id: 6580586
ref_type: patent
severity: novelty_destroying
ref_id: 5188705
ref_type: patent
severity: novelty_destroying
ref_id: 4082637
ref_type: patent
severity: novelty_destroying
ref_id: 6140655
ref_type: patent
severity: novelty_destroying
ref_id: 4918554
ref_type: patent
severity: novelty_destroying
Final disposition: granted (2015-10-15)