Patent application 13646403 (US), filed 2012-10-05
Publication number: US20140096716A1
Title: HEATING/COOLING PEDESTAL FOR SEMICONDUCTOR-PROCESSING APPARATUS
CPC codes: C23C  16/4586
H10P  72/0434
F27D   5/0037
H01J  37/32724
Office action: rejection, dated 2015-10-15
Rejection reasons: obviousness_103
Prior art cited: ref_id: 7235137
ref_type: patent
severity: obviousness
ref_id: 20070224777
ref_type: patent
severity: obviousness
ref_id: 20040212947
ref_type: patent
severity: obviousness
ref_id: 20070175393
ref_type: patent
severity: obviousness
ref_id: 6740853
ref_type: patent
severity: obviousness
Final disposition: granted (2015-10-15)