Patent application 13453994 (US), filed 2012-04-23
Publication number: US20120268725A1
Title: LITHOGRAPHY SYSTEM FOR PROCESSING A TARGET, SUCH AS A WAFER, AND A METHOD FOR OPERATING A LITHOGRAPHY SYSTEM FOR PROCESSING A TARGET, SUCH AS A WAFER
CPC codes: H10P  76/00
G03F   9/7088
G03F   7/20
G03F   7/70616
G03F   7/70666
G03F   7/70775
G03F   7/7085
G03F   9/00
G03F   9/7023
G03F   9/7053
H01J2237/2482
H01J2237/30438
H01J2237/31774
Office action: rejection, dated 2015-10-13
Rejection reasons: indefiniteness_112
Final disposition: granted (2015-10-13)