Patent application 13529223 (US), filed 2012-06-21
Publication number: US20120266821A1
Title: REACTION SYSTEM FOR GROWING A THIN FILM
CPC codes: H10P  72/7624
C23C  16/4408
C23C  16/455
H10P  72/7604
H10P  72/7612
H10P  72/0478
C23C  16/45517
C23C  16/45525
C23C  16/45544
C23C  16/45561
C23C  16/45563
C23C  16/45582
C23C  16/45587
C23C  16/45591
C23C  16/458
C23C  16/4582
C23C  16/4583
C23C  16/4586
C30B  25/14
C30B  35/00
Office action: rejection, dated 2015-10-15
Rejection reasons: obviousness_103
Prior art cited: ref_id: 6539891
ref_type: patent
severity: obviousness
ref_id: 20060065636
ref_type: patent
severity: obviousness
ref_id: 4589369
ref_type: patent
severity: obviousness
Final disposition: pending (2015-10-15)