Patent application 13505385 (US), filed 2012-05-01
Publication number: US20120211024A1
Title: METHOD AND APPARATUS FOR TREATING SUBSTRATES
CPC codes: B08B   3/10
B08B   7/00
H10P  72/0414
B08B   6/00
B08B   7/0035
B08B   7/0057
G03F   1/82
Office action: rejection, dated 2015-10-13
Rejection reasons: obviousness_103
Prior art cited: ref_id: 6685890
ref_type: patent
severity: obviousness
ref_id: JP 2008108997
ref_type: patent
severity: obviousness
Final disposition: granted (2015-10-13)