Patent application 13708028 (US), filed 2012-12-07
Publication number: US20140158786A1
Title: GAS DISPERSION DISC ASSEMBLY
CPC codes: H01J  37/32853
C23C  16/45565
H01J  37/3244
H01J  37/32449
H01J  37/3288
Office action: rejection, dated 2015-10-19
Rejection reasons: anticipation_102
obviousness_103
Prior art cited: ref_id: 20040129211
ref_type: patent
severity: novelty_destroying
ref_id: 20040129211
ref_type: patent
severity: novelty_destroying
ref_id: 5216330
ref_type: patent
severity: novelty_destroying
Final disposition: granted (2015-10-19)