Patent application 13344738 (US), filed 2012-01-06
Publication number: US20120108075A1
Title: Gas-Phase Functionalization of Surfaces of Microelectronic Structures
CPC codes: H10K  85/225
B82Y  10/00
Y10T 428/2918
C01B  32/174
H10K  10/701
H10K  10/491
B82Y  30/00
B82Y  40/00
C01B2202/02
C01F   7/304
C01P2004/13
Y10S 977/734
Y10S 977/755
Y10S 977/842
Y10S 977/847
Y10S 977/89
Office action: rejection, dated 2015-10-13
Rejection reasons: indefiniteness_112
Final disposition: pending (2015-10-13)