Patent application 13589174 (US), filed 2012-08-20
Publication number: US20120305186A1
Title: METAL ETCHING METHOD, METAL ETCHING CONTROL METHOD AND CONTROL DEVICE THEREOF
CPC codes: C23F   1/00
G01N  21/55
G02F   1/1303
G02F   1/136286
G05B2219/45212
Office action: rejection, dated 2015-10-19
Rejection reasons: anticipation_102
obviousness_103
indefiniteness_112
Prior art cited: ref_id: 5501766
ref_type: patent
severity: novelty_destroying
ref_id: 20100151770
ref_type: patent
severity: novelty_destroying
ref_id: 5501766
ref_type: patent
severity: novelty_destroying
Final disposition: pending (2015-10-19)