Patent application 13270276 (US), filed 2011-10-11
Publication number: US20130087447A1
Title: METHODS OF PREVENTING PLASMA INDUCED DAMAGE DURING SUBSTRATE PROCESSING
CPC codes: C23C  14/046
H10P  72/72
C23C  14/0641
C23C  14/165
C23C  14/3492
Office action: rejection, dated 2015-10-15
Rejection reasons: obviousness_103
indefiniteness_112
Prior art cited: ref_id: 20010002871
ref_type: patent
severity: obviousness
ref_id: 6413383
ref_type: patent
severity: obviousness
ref_id: 20020029958
ref_type: patent
severity: obviousness
ref_id: EP 1076110
ref_type: patent
severity: obviousness
ref_id: 20060189060
ref_type: patent
severity: obviousness
ref_id: 5976327
ref_type: patent
severity: obviousness
Final disposition: granted (2015-10-15)