Patent application 13189719 (US), filed 2011-07-25
Publication number: US20120225195A1
Title: Atomic Layer Deposition Carousel With Continuous Rotation And Methods Of Use
CPC codes: C23C  16/44
C23C  16/458
H10P  14/20
H10P  72/0462
H10P  72/7618
C23C  16/45551
C23C  16/45578
C23C  16/54
Office action: rejection, dated 2015-10-15
Rejection reasons: obviousness_103
Prior art cited: ref_id: 20040067641
ref_type: patent
severity: obviousness
ref_id: 20080193643
ref_type: patent
severity: obviousness
Final disposition: pending (2015-10-15)