Assertion: extreme ultraviolet | /r/HasProperty | euvwavelength
Facets:
Source sentences:
text: Lithographic technique using an extreme ultraviolet (EUV) wavelength, usually 13.5 nm.
text: Extreme ultraviolet lithography (also known as EUV or EUVL) is a lithography technology using a range of extreme ultraviolet (EUV) wavelengths, roughly spanning a 2% FWHM bandwidth about 13.5 nm.