Assertion: ultraviolet's wavelength | /r/CapableOf | span a 2% fwhm bandwidth
Facets:
value: roughly
type: DEGREE
Source sentences:
text: Extreme ultraviolet lithography (also known as EUV or EUVL) is a lithography technology using a range of extreme ultraviolet (EUV) wavelengths, roughly spanning a 2% FWHM bandwidth about 13.5 nm.