Assertion: warp | /r/HasProperty | different
Facets:
value: between the maximum
type: OTHER
value: from the reference plane
type: OTHER
Source sentences:
text: WARP is different, so these test sites don’t give particularly accurate readings.
text: Warp is the difference between the maximum and the minimum distances of the median surface of a free, un-clamped wafer from the reference plane defined above.