Assertion: scanner | /r/CapableOf | move the wafer
Facets:
value: during the exposure
type: TEMPORAL
value: with respect to each other
type: MANNER
Source sentences:
text: As of 2008, the most detailed patterns in semiconductor device fabrication are transferred using a type of stepper called a scanner, which moves the wafer and reticle with respect to each other during the exposure, as a way of increasing the size of the exposed area and increasing the imaging performance of the lens.