Assertion: medium energy ion scattering | /r/CapableOf | use ion
Facets:
value: to probe surfaces
type: PURPOSE
Source sentences:
text: Medium energy ion scattering (MEIS) and Rutherford backscattering (RBS) spectroscopies involve a similar setup to LEIS but use ions in the energy range of ~100 keV (MEIS) and ~1-2 MeV (RBS) to probe surfaces.