Assertion: thermal oxidation | /r/HasProperty | performed at temperature
Facets:
value: usually
type: TEMPORAL
value: between °c
type: OTHER
value: between 1200
type: TEMPORAL
value: between 800
type: TEMPORAL
Source sentences:
text: Thermal oxidation of silicon is usually performed at a temperature between 800 and 1200 °C, resulting in so called High Temperature Oxide layer (HTO).