Assertion: silicon carbide's advantage | /r/ObjectUse | used in rtp
Facets:
value: traditionally
type: OTHER
Source sentences:
text: Advantages of CVD Silicon Carbide in Semiconductor Processing CVD SiC has traditionally been used in semiconductor processing applications, such as RTP and oxide etch chamber components that take advantage of SiC’s excellent resistance to thermal shock and erosion by high energy plasmas.