Assertion: purity silicon | /r/CapableOf | use the siemens process
Facets:
Source sentences:
text: Very high purity silicon for semiconductors is obtained using the Siemens process; the silicon is reacted to produce trichlorosilane, which is first purified by distillation, then reacted with purified hydrogen on high purity silicon rods at 1150 oC to yield high purity, polycrystalline silicon with hydrochloric acid byproduct.