Assertion: phosphoric acid | /r/HasProperty | common wet etching agent
Facets:
value: in compound semiconductor processing
type: LOCATION
Source sentences:
text: In compound semiconductor processing, phosphoric acid is a common wet etching agent: for example, in combination with hydrogen peroxide and water it is used to etch InGaAs selective to InP.
text: In compound semiconductor processing, phosphoric acid is a common wet etching agent: for example, in combination with hydrogen peroxide and water it is used to etch InGaAs selective to InP.