Assertion: scanner's field | /r/HasProperty | exposed with compared
Facets:
value: with 5x reduction on a stepper
type: OTHER
Source sentences:
text: The field can be exposed with a lesser reduction of size from the reticle to the wafer (such as 4x reduction on a scanner, compared with 5x reduction on a stepper), while allowing a field size much larger than that which can be exposed with a typical stepper.