Assertion: medium energy ion scattering | /r/HasProperty | mei
Facets:
Source sentences:
text: LEIS is closely related to both medium-energy ion scattering (MEIS) and high-energy ion scattering (HEIS, known in practice as Rutherford backscattering spectroscopy, or RBS), differing primarily in the energy range of the ion beam used to probe the surface.
text: Medium energy ion scattering (MEIS) and Rutherford backscattering (RBS) spectroscopies involve a similar setup to LEIS but use ions in the energy range of ~100 keV (MEIS) and ~1-2 MeV (RBS) to probe surfaces.