Assertion: hot phosphoric acid | /r/HasProperty | selective
Facets:
value: highly
type: DEGREE
value: in etching
type: LOCATION
Source sentences:
text: It is highly selective in etching Si 3 N 4 instead of SiO 2 , silicon dioxide.
text: It is highly selective in etching Si 3 N 4 instead of SiO 2 , silicon dioxide.