Assertion: hot phosphoric acid | /r/ObjectUse | used in microfabrication
Facets:
value: to etch silicon nitride
type: PURPOSE
Source sentences:
text: Hot phosphoric acid is used in microfabrication to etch silicon nitride (Si 3 N 4 ).
text: Hot phosphoric acid is used in micro-fabrication to etch silicon nitride.
text: Hot phosphoric acid is used in microfabrication to etch silicon nitride (Si 3 N 4 ).