Assertion: medium energy ion scattering | /r/HasProperty | known in practice
Facets:
value: as rutherford backscattering spectroscopy
type: MANNER
value: as rbs
type: OTHER
Source sentences:
text: LEIS is closely related to both medium-energy ion scattering (MEIS) and high-energy ion scattering (HEIS, known in practice as Rutherford backscattering spectroscopy, or RBS), differing primarily in the energy range of the ion beam used to probe the surface.