Assertion: semiconductor's type | /r/CapableOf | fabricate nmos devices
Facets:
value: with 20 µm
type: OTHER
Source sentences:
text: Both types were developed by Atalla and Kahng when they originally invented the MOSFET, fabricating both PMOS and NMOS devices at 20 µm and 10 µm scales.
text: Both types were developed by Atalla and Kahng when they originally invented the MOSFET, fabricating both PMOS and NMOS devices with 20 µm