Assertion: phosphoric acid | /r/HasProperty | use
Facets:
value: as a wet etching agent
type: MANNER
value: in compound semiconductor processing
type: LOCATION
value: commonly
type: DEGREE
value: as an etching solution
type: MANNER
Source sentences:
text: It is uses as an etching solution and is usually used to clean the teeth.
text: In compound semiconductor processing, it is a commonly used as a wet etching agent.