Assertion: cvd silicon carbide | /r/CapableOf | maintain a 1/4 wave flatness
Facets:
value: depending on thickness
type: OTHER
Source sentences:
text: CVD Silicon Carbide theoretically dense and intrinsically pure, is available as lapped or polished substrates and wafers from 2" diameter up to 300mm diameter with surface finishes to better than 10 angstroms, while maintaining a 1/4 wave flatness depending on thickness and size.