Assertion: ion | /r/HasProperty | accelerated to high energy
Facets:
value: electrostatically
type: MANNER
Source sentences:
text: Ion implantation equipment typically consists of an ion source, where ions of the desired element are produced, an accelerator, where the ions are electrostatically accelerated to a high energy, and a target chamber, where the ions impinge on a target, which is the material to be implanted.