Assertion: gaseous hydrogen fluoride | /r/HasProperty | supplied into the reactor
Facets:
Source sentences:
text: In one embodiment of the present invention, gaseous hydrogen fluoride is supplied into the reactor in order to increase the partial pressure of gaseous hydrogen fluoride in the reactor, as compared with the conventional case.
text: For example, gaseous hydrogen fluoride is supplied into the reactor by returning a part of the gaseous substance extracted from the reactor including the hydrogen fluoride generated by the reaction to the reactor using, for example, a pump or the like.