Assertion: reaction mechanism | /r/HasProperty | type of ald temperature
Facets:
Source sentences:
text: ALD reaction mechanisms Type of ALD Temperature range Viable precursors Reactants Applications Catalytic ALD >32 °C with Lewis base catalyst Metal oxides (i.e. TiO 2 , ZrO 2 ,SnO2 2 ) (Metal)Cl 4 , H 2