Assertion: micron | /r/CapableOf | research eventual transition
Facets:
value: to extreme ultraviolet lithography
type: OTHER
Source sentences:
text: Micron has an aggressive roadmap when it comes to fabrication proceses that includes four more 10 nm-class nodes (i.e., for a total of six 10 nm class technologies), and the company is researching an eventual transition to extreme ultraviolet lithography (EUVL).