Assertion: boron impurity | /r/HasProperty | determined by sims
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text: In fact, it has been shown that boron impurities ranging from 40-80 parts per billion (ppb) can result in boron concentrations in the deposited film of 1017 atoms/cc as determined by SIMS (see R. K. Laxman, A. K. Hochberg and M. J. Jahl, “Boron Determination in TEOS and Reduction of Boron in SIMOX-SOI Process”).