Assertion: germanium | /r/CapableOf | use tilt
Facets:
value: compared to sims measurement
type: OTHER
value: compared to sims profiles
type: OTHER
Source sentences:
text: Ge using a dose of cm and a tilt of compared to SIMS profiles.
text: Ge using a dose of cm and a tilt of compared to SIMS measurement.
text: Ge at doses of , , and cm using a tilt of .