Assertion: hafnium's oxide | /r/HasProperty | hfo
Facets:
Source sentences:
text: Functional layers of nitrides, such as HfN as barrier layer or contact layer, or oxides (HfO 2 ), possibly also mixed oxides or oxynitrides with other elements, such as Al, Si, etc., are formed from such volatile, easily evaporable precursors with the aid of the CVD technique Dielectrics with a particularly high dielectric constant (DK), on a substrate such.