Assertion: borosilicate glass | /r/HasAspect | application
Facets:
value: in the development of microelectromechanical systems
type: TRANSITIVE-OBJECT
value: in the semiconductor industry
type: LOCATION
Source sentences:
text: Borosilicate glasses also have an application in the semiconductor industry in the development of microelectromechanical systems (MEMS), as part of stacks of etched silicon wafers bonded to the etched borosilicate glass.