Assertion: atomic fluorine | /r/ObjectUse | used for plasma etching
Facets:
value: in semiconductor manufacturing
type: LOCATION
Source sentences:
text: Atomic fluorine and molecular fluorine are used for plasma etching in semiconductor manufacturing, flat panel display production and MEMs fabrication.
text: Atomic fluorine and molecular fluorine are used for plasma etching in semiconductor manufacturing, flat panel display production and MEMS (microelectromechanical systems)