Assertion: distilled water's use | /r/CapableOf | dilute chemical
Facets:
value: in optics systems for immersion photolithography
type: PURPOSE
Source sentences:
text: The use of UPW varies; it may be used to rinse the wafer after application of chemicals, to dilute the chemicals themselves, in optics systems for immersion photolithography, or as make-up to cooling fluid in some critical applications.