Assertion: fluorine's use | /r/CapableOf | include as common etching chemical
Facets:
value: in semiconductor manufacturing
type: LOCATION
value: for silicon substrates
type: TRANSITIVE-OBJECT
value: as the etching compound hydrofluoric acid
type: OTHER
value: for glass
type: PURPOSE
value: in its elemental form
type: OTHER
Source sentences:
text: In its elemental form, the uses of fluorine also include as a common etching chemical for glass or silicon substrates in semiconductor manufacturing and as the etching compound hydrofluoric acid (HF).