Assertion: thin film | /r/CapableOf | separate conducting aluminum lines
Facets:
value: electrically
type: MANNER
value: from the embedding insulator
type: OTHER
Source sentences:
text: Another example is represented by thin TiN films in microelectronic chips separating electrically conducting aluminum lines from the embedding insulator SiO 2 in order to suppress the formation of Al 2 O 3 .