Assertion: garnet | /r/HasProperty | deposited as cladding
Facets:
value: through pulsed laser deposition
type: MANNER
value: on silicon waveguides
type: LOCATION
value: typically
type: DEGREE
value: through sputtering
type: MANNER
Source sentences:
text: [ 1 - 5 ] Garnets are typically deposited as claddings on silicon waveguides through sputtering or pulsed laser deposition.