Assertion: furnace | /r/HasProperty | a heat treatment system
Facets:
value: for silicon wafer
type: PURPOSE
value: for thin wafer oxidation
type: PURPOSE
value: for cvd
type: PURPOSE
value: for igbt
type: TRANSITIVE-OBJECT
value: for polyimide
type: PURPOSE
value: for diffusion
type: PURPOSE
Source sentences:
text: This furnace is a heat treatment system for silicon wafer, IGBT, polyimide and thin wafer oxidation, diffusion and CVD.