Assertion: mem cantilever | /r/HasProperty | fabricated
Facets:
value: from silicon
type: OTHER
value: commonly
type: TEMPORAL
value: from si
type: LOCATION
value: from silicon nitride
type: OTHER
Source sentences:
text: MEMS cantilevers are commonly fabricated from silicon (Si), silicon nitride (Si 3 N 4 ), or polymers.