Assertion: cristobalite's expansion coefficient | /r/HasAspect | the problem
Facets:
Source sentences:
text: In light of the above drawback, a silica glass jig the surface of which is covered with a vapor deposited thin film made of metal or ceramic thereon has been proposed, but since the thermal expansion coefficient of silica glass is usually smaller than those of the metal or ceramic, the thin film contracts to a great extent and thereby has the problem that a crack occurs in the thin film when it is used in a high temperature treatment of a silicon wafer.
text: In light of the above fault, a silica glass jig the surface of which is covered with a vapor deposited thin film made of metal or ceramic thereon has been proposed, but since the thermal expansion coefficient of silica glass is usually smaller than those of the metal or ceramic, the thin film contracts to a great extent and thereby has a problem that a crack occurs in the thin film when it is used in a high temperature treatment of a silicon wafer.
text: In light of the above drawback, a silica glass jig the surface of which is covered with a vapor deposited thin film made of metal or ceramic thereon has been proposed, but since the thermal expansion coefficient of silica glass is usually smaller than those of the metal or ceramic, the thin film contracts to a great extent and thereby has the problem that a crack occurs in the thin film when it is used in a high temperature treatment of a silicon wafer.