Assertion: corrosion | /r/CapableOf | inhibit slurry composition
Facets:
Source sentences:
text: The corrosion inhibiting slurry composition includes an oxidizing agent and effective amounts of a corrosion inhibiting compound to inhibit corrosion of a metal plug in an integrated circuit.
text: The corrosion inhibiting slurry composition may further include a plurality of abrasive particles.
text: By way of example, the corrosion inhibiting slurry composition may include benzotriazole that is between about 0.0001% (in volume) to a value that is limited by the solubility of benzotriazole in the slurry composition.