Assertion: chemical reaction | /r/HasProperty | low-pressure cvd
Facets:
Source sentences:
text: process used when metal-organics are used as precursors (e.g., trimethylaluminum, Al 2 (CH 3 ) 6 , trimethylgallium, Ga(CH 3 ) 3 ) • Plasma-enhanced CVD (PECVD): when plasma is used to promote chemical reactions (e.g., RF- or microwave-based plasmas) • Low-pressure CVD (LPCVD): it works at low gas pressure ∼0.6–1.33