Assertion: thin film circuit board | /r/HasAspect | high etching rate
Facets:
value: excluding a prescribed portion
type: OTHER
value: by etching
type: OTHER
value: relatively
type: DEGREE
Source sentences:
text: This thin film circuit board can be manufactured by a method including: forming an insulator layer having a relatively high etching rate at a prescribed thickness on an insulator layer having a relatively low etching rate and relatively high dielectric constant; arranging a conductor layer on said insulator layer having a relatively high etching rate; selectively removing the insulator having a relatively high etching rate, excluding a prescribed portion located beneath the conductor layer, by etching; forming an insulator portion that contains the insulator layer having a relatively high etching rate and supports the above-mentioned conductor layer in the undercut state; forming an insulator layer having a relatively low dielectric constant so as to surround the entire conductor layer; and, forming an insulator layer having a relatively high dielectric constant on top of the insulator layer having a relatively low dielectric constant so as to surround said entire insulator layer having a relatively low dielectric constant.