Assertion: arsine | /r/ObjectUse | used in the semiconductor industry
Facets:
value: extensively
type: DEGREE
value: for epitaxial growth of gallium arsenide
type: PURPOSE
value: for epitaxial growth of gaas
type: PURPOSE
value: as doping agents
type: MANNER
Source sentences:
text: Arsine is extensively used in the semiconductor industry for epitaxial growth of GaAs and as a dopant for silicon-based electronic devices.
text: Arsine is extensively used in the semiconductor industry for epitaxial growth of GaAs and as a dopant for silicon-based electronic devices.
text: Arsine is extensively used in the semiconductor industry for epitaxial growth of gallium arsenide, as a doping agent for silicon-based solid-state electronic devices, and in the manufacture of light-emitting diodes.
text: Arsine is extensively used in the semiconductor industry for epitaxial growth of gallium arsenide and as a dopant for silicon-based electronic devices (Zukauskas & Gavriusinas, 2002).
text: Arsine is extensively used in the semiconductor industry for epitaxial growth of gallium arsenide, as a doping agent for silicon-based solid-state electronic devices, and in the manufacture of light-emitting diodes.
text: Arsine and stibine are extensively used in the semiconductor industry as doping agents.