Assertion: modern accelerometer | /r/HasProperty | the simplest mems devices
Facets:
Source sentences:
text: Modern accelerometers are often small micro-electro-mechanical systems (MEMS), and are indeed the simplest MEMS devices possible, consisting of little more than a cantilever beam with a proof mass (also known as seismic mass).
text: Modern accelerometers are often small micro-electro-mechanical systems (MEMS) and are indeed the simplest MEMS devices possible, consisting of little more than a cantilever beam with a proof mass (also known as seismic mass).