Assertion: focused beam | /r/HasProperty | operated at low beam currents
Facets:
value: for imaging
type: PURPOSE
Source sentences:
text: FIB systems operate in a similar fashion to a scanning electron microscope (SEM) except, rather than a beam of electrons and as the name implies, FIB systems use a finely focused beam of ions (usually gallium) that can be operated at low beam currents for imaging or at high beam currents for site specific sputtering or milling.