Question: who survived order 66 canon?
Answer: Obi-Wan Kenobi. The first of the two most obvious survivors of Order 66 is Obi-Wan Kenobi. ... 
Yoda. The second obvious Jedi who survived Order 66 was the master Jedi Yoda. ... 
Ahsoka Tano. ... 
Kanan Jarrus. ... 
Quinlan Vos. ... 
Jocasta Nu. ... 
The Inquisitorius. ... 
K'Kruhk.