Improved diamond‐like carbon coating deposition uniformity on cylindrical sample by its suspension in RF PECVD chamber
Authors: Mateusz Śmietana, Marcin Koba, Predrag Mikulic, Robert Bogdanowicz, Wojtek J Bock
Published in: physica status solidi (a)
Publication type: article
Subject areas: Engineering; Materials Science; Physics and Astronomy
SJR best quartile: Q2