Integration of a MEMS-type vacuum pump with a MEMS-type Pirani pressure gauge
Authors: Tomasz Grzebyk, Anna Górecka-Drzazga, Jan Dziuban, Khodr Maamari, Seyoung An, Tatjana Dankovic, Alan Feinerman, Heinz Busta
Published in: Journal of Vacuum Science and Technology B
Publication type: article
Subject areas: Chemical Engineering; Engineering; Materials Science; Physics and Astronomy
SJR best quartile: Q3