Fabrication and characterization of a miniaturezed octupole deflection system for MEMS electrone microscope
Authors: M. Krysztof, M. Białas, P. szyszka, T. Grzebyk, A. Górecka-Drzazga
Published in: Ultramicroscopy
Publication type: article
Subject areas: Materials Science; Physics and Astronomy
SJR best quartile: Q2