Propagation of scratches on GaN substrates during polishing
Authors: J.Serafińczuk, G. Jóźwiak, P. Pałetko, R. Kudrawiec, R. Kucharski, M. Zajac, and T.P. Gotszalk
Published in: The International Union of Materials Research Societies – International Conference on Electronic Materials 2014 (IUMRS-ICEM 2014)(), Wydawca:National Taiwan University of Science and Technology
Publication type: conference