Chlorine-enhanced thermal oxides growth and significant trap density reduction at SiO2/SiC interface by incorporation of phosphorus
Authors: Krystan Król, Mariusz Sochacki, Włodzimierz Strupiński, Katarzyna Racka, Marek Guziewicz, Piotr Konarski, Maciej Miśnik, Jan Szmidt
Published in: Thin Solid Films
Publication type: article
Subject areas: Materials Science; Physics and Astronomy
SJR best quartile: Q2