Effect of porous silicon substrate on structural, mechanical and optical properties of MOCVD and ALD ruthenium oxide nanolayers
Authors: I. Brytavskyi, K. Hušeková, V. Myndrul, M. Pavlenko, E. Coy, K. Zaleski, D. Gregušová, L. Yate, V. Smyntyna, I. Iatsunskyi
Published in: Applied Surface Science
Publication type: article
Subject areas: Chemistry; Materials Science; Physics and Astronomy
SJR best quartile: Q1