Optical diagnostics of the magnetron sputtering process of copper in argon-oxygen atmosphere
Authors: A. Rydosz, K. Kollbek, Kim-Ngan Nhu-Tarnawska, A. Czapla, A. Brudnik
Published in: Journal of Material Science: Materials in Electronics
Publication type: article
Subject areas: Biochemistry, Genetics and Molecular Biology; Chemical Engineering; Engineering; Materials Science; Physics and Astronomy
SJR best quartile: Q2