Measurement and Simulation of MEMS Dedicated to Investigation of Heat Transfer at Nanoscale
Authors: Marcin Janicki, Piotr Pietrzak, Jedrzej Topilko, Piotr Zajac, Artur Sobczak, Grzegorz Jablonski, Pawel Janus, Piotr Prokaryn, Andrzej Napieralski
Published in: 19th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)
Publication type: conference