High-k oxides by atomic layer deposition—Applications in biology and medicine
Authors: Marek GodlewskiSylwia Gierałtowska, Łukasz Wachnicki, Rafał Pietuszka, and Bartłomiej S. WitkowskiAnna SłońskaZdzisław GajewskiMichał M. Godlewski
Published in: J. Vac. Sci. Technol. A
Publication type: article
Subject areas: Materials Science; Physics and Astronomy
SJR best quartile: Q2