Integration of a MEMS-type vacuum pump with a MEMS-type Pirani pressure gauge
Authors: Tomasz Grzebyk, Anna Górecka-Drzazga, Jan Dziuban, Khodr Maamari, Seyoung An, Tatjana Dankovic, Alan Feinerman, Heinz Busta
Published in: 27th International Vacuum Nanoelectronics Conference
Publication type: conference