Application of deep reactive ion etching for nanostructurisation of GaN structures
Authors: S. Owczarzak, A. P. Stafiniak, R. Paszkiewicz
Published in: 2017 International Students and Young Scientists Workshop,, Szklarska Poręba, Poland, Wydawnictwo , 2018, s.(), Wydawca:Wydawnictwo Gmork
Publication type: conference