Relation between modulation frequency of electric power oscillation during pulse magnetron sputtering deposition of MoNx thin films
Authors: Bartosz Wicher, Rafał Chodun, Katarzyna Nowakowska-Langier, Sebastian Okrasa, Marek Trzciński, Krystian Król, Roman Minikayev, Łukasz Skowroński, Łukasz Kurpaska, Krzysztof Zdunek
Published in: Applied Surface Science
Publication type: article
Subject areas: Chemistry; Materials Science; Physics and Astronomy
SJR best quartile: Q1