Characterization of dielectric layers grown at low temperature by atomic layer deposition
Authors: Sylwia Gieraltowska, Lukasz Wachnicki, Bartlomiej S.Witkowski, Robert Mroczynski, Piotr Dluzewski, Marek Godlewski
Published in: Thin Solid Films
Publication type: article
Subject areas: Materials Science; Physics and Astronomy
SJR best quartile: Q2