Surface modification for chemical sensing of thin films formed by remote hydrogen microwave plasma CVD using organosilane precursors
Authors: P. Uznański, B. Głębocki, A. Walkiewicz-Pietrzykowska, E. Bryszewska and A. M. Wróbel
Published in: The 6th International Workshop on Surface Modification for Chemical and Biochemical Sensing, SMCBS'2013
Publication type: conference