Stress engineering in GaN structures grown on Si(111) substrates by SiN masking layer application
Authors: Szymański Tomasz, Wośko Mateusz M, Paszkiewicz Bogdan, Paszkiewicz Regina, Drzik Milan
Published in: Journal of Vacuum Science & Technology A
Publication type: article
Subject areas: Materials Science; Physics and Astronomy
SJR best quartile: Q2