Influence of purge, time of waiting and TiCl4 dosing time in a low-pressure atomic layer deposition (ALD) reactor on properties of TiO2 layer
Authors: Witold Walke, Marcin Kaczmarek, Marcin Staszuk, Marcin Basiaga
Published in: METALURGIJA
Publication type: article
Subject areas: Engineering; Materials Science; Physics and Astronomy
SJR best quartile: Q3