Application of non-contact sheet resistance measurement for MOVPE AlGaN/GaN HEMT structures uniformity
Authors: B. Paszkiewicz, B. K. Paszkiewicz, M. Wośko, P. Pokryszka, T. Szymański, R. Paszkiewicz,
Published in: 7th European Workshop on Metalorganic Vapour Phase Epitaxy, EWMOVPE XVII
Publication type: conference