High-k oxides by Atomic Layer Deposition - applications in biology and medicine
Authors: M. Godlewski, S. Gieraltowska, L. Wachnicki, R. Pietuszka, B. S. Witkowski, A. Slonska, Z. Gajewski, M. M. Godlewski
Published in: J. Vac. Sci. Technol. A
Publication type: article
Subject areas: Materials Science; Physics and Astronomy
SJR best quartile: Q2