Improvement of MEMS Thermomechanical Actuation Efficiency by Focused Ion Beam-Induced Deposition
Authors: Bartosz Pruchnik, Tomasz Piasecki, Ewelina Gacka, Mateus G. Masteghin, David C. Cox, Teodor Gotszalk
Published in: Journal of Microelectromechanical Systems(), Wydawca:IEEE
Publication type: article
Subject areas: Engineering
SJR best quartile: Q2