CORRELATION OF SELECTED PROBLEMS DURING GaN MOVPE EPITAXY ON Si SUBSTRATES WITH IN–SITU INTERFEROMETER OBSERVATION
Authors: Tomasz Szymański, Mateusz Wośko, Bogdan Paszkiewicz, Kornelia Indykiewicz, Regina Paszkiewicz
Published in: Journal of ELECTRICAL ENGINEERING
Publication type: article
Subject areas: Engineering
SJR best quartile: Q3