Selective etching of GaAs over AlAs etch-stop layer in buffered citric acid/H2O2 solution
Authors: Aleksandr Kuźmicz; Krzysztof Chmielewski; Olga Serebrennikova; Jan Muszalski
Published in: Materials Science in Semiconductor Processing
Publication type: article
Subject areas: Engineering; Materials Science; Physics and Astronomy
SJR best quartile: Q1