Technology and parameters of thin membrane-anode for MEMS transmission electron microscope
Authors: M. Krysztof, T. Grzebyk, P. Szyszka, K. Laszczyk, A. Górecka-Drzazga, J. Dziuban
Published in: Journal of Vacuum Science and Technology B
Publication type: article
Subject areas: Chemical Engineering; Engineering; Materials Science; Physics and Astronomy
SJR best quartile: Q3