Propagation of scratches on m-GaN substrates during polishing
Authors: J.Serafińczuk , G. Jóźwiak , P. Pałetko , R. Kudrawiec , R. Kucharski , M. Zajac , and T.P. Gotszalk
Published in: THE INTERNATIONAL WORKSHOP ON NITRIDE SEMICONDUCTORS 2014(), Wydawca:Institute of High Pressure Physics, EIT+, Wroclaw University
Publication type: conference