Tip-based nano-manufacturing and -metrology
Authors: Teodor Gotszalk, Grzegorz Jóźwiak, Jacek Radojewski, Thomas Fröhlich, Roland Füssl, Eberhard Manske, Mathias Holz, Tzvetan Ivanow, Ahmad AhmadIvo. W.Rangelow
Published in: Journal of Vacuum Science & Technology B
Publication type: article
Subject areas: Chemical Engineering; Engineering; Materials Science; Physics and Astronomy
SJR best quartile: Q3