Optical diagnostics of the magnetron sputtering process of copper in an argon-oxygen atmoshere
Authors: Artur Rydosz, Kamila Kollbek, Nhu-Tarnawska H. Kim-Ngan, Adam Czapla, Andrzej Brudnik
Published in: Journal of Materials Science: Materials in Electronics
Publication type: article
Subject areas: Biochemistry, Genetics and Molecular Biology; Chemical Engineering; Engineering; Materials Science; Physics and Astronomy
SJR best quartile: Q2