Oxide-based Materials by Atomic Layer Deposition
Authors: Marek Godlewski, Rafał Pietruszka, Jarosław Kaszewski, Bartłomiej S. Witkowski, Sylwia Gieraltowska, Łukasz Wachnicki, Michał M. Godlewski, Anna Slonska, Zdzislaw Gajewski
Published in: Photonics West, The Moscone Center, San Francisco, California, USA
Publication type: conference