Optical examination of high contrast grating fabricated by focused-ion beam etching
Authors: D. Urbańczyk, A. Wójcik-Jedlińska, J. Muszalski, A. Łaszcz, M. Płuska, M. Gębski, T. Czyszanowski, A. Czerwinski, M. Bugajski
Published in: Optical and Quantum Electronics
Publication type: article
Subject areas: Engineering; Materials Science; Physics and Astronomy
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