Energy dependence of nanopillars formation on InSb semiconductorsurfaces under gallium FIB and noble gas ions beam irradiationB.
Authors: B. R. Jany, K. Szajna, M. Nikiel, D. Wrana, E. Trynkiewicz, R. Pedrys, F. Krok
Published in: Applied Surface Science
Publication type: article
Subject areas: Chemistry; Materials Science; Physics and Astronomy
SJR best quartile: Q1