Title: Thermal Desorption of He Implanted into Ge
Authors: Marcin Turek, Andrzej Droździel, Krzysztof Pyszniak, Sławomir Prucnal, Jerzy Żuk, Yurij Vaganov
Journal: 12 th International Conference Ion Implantation and Other Applications of Ions and Electrons ION 2018
Publication type: conference