Title: Tip-based nano-manufacturing and -metrology
Authors: Teodor Gotszalk, Grzegorz Jóźwiak, Jacek Radojewski, Thomas Fröhlich, Roland Füssl, Eberhard Manske, Mathias Holz, Tzvetan Ivanow, Ahmad AhmadIvo. W.Rangelow
Journal: Journal of Vacuum Science & Technology B
Publication type: article
DOI: 10.1116/1.5083044