Title: Optical properties of highly doped ZnO:Al films deposited by ALD process on Si substrate in visible and near infrared region
Authors: V. Romanyuk, N. Dmytruk, O. Kondratenko, M. Taborska, G. Lashkarev, V. Karpyna, V. Popovych, M. Dranchuk, G. Dovbeshko, I. Dmytruk, R. Pietruszka, M. Godlewski
Journal: Acta Physica Polonica A
Publication type: article
DOI: 10.12693/APhysPolA.129.A-36