Title: Towards high quality ITO coatings: The impact of nitrogen admixture in HiPIMS discharges
Authors: Stranak, V., Bogdanowicz, R., Sezemsky, P., Wulff, H., Kruth, A., Smietana, M., Kratochvil, J., Cada, M., Hubicka, Z.
Journal: Surface and Coatings Technology
Publication type: article
DOI: 10.1016/j.surfcoat.2017.12.030