Title: Application of anisotropic etching of Si(11x) for deposition of c-axis inclined MOVPE GaN structures
Authors: T. Szymański, M. Wośko, I. Zubel, B. Paszkiewicz, R. Paszkiewicz,
Journal: 7th European Workshop on Metalorganic Vapour Phase Epitaxy, EWMOVPE XVII
Publication type: conference