Title: Low frequency measurements using piezoresistive cantilever MEMS devices-the problem of thermal drift
Authors: Grzegorz Jóźwiak, Daniel Kopiec, Teodor Gotszalk, Piotr Grabiec, Ivo Rangelow
Journal: Procedia Engeeniring
Publication type: article
DOI: 10.1016/j.proeng.2014.11.414