Title: Effect of annealing time and pressure on electrical activation and surface morphology of Mg-implanted GaN annealed at 1300 °C in ultra-high-pressure nitrogen ambient
Authors: Kensuke Sumida, Kazufumi Hirukawa, Hideki Sakurai, Kacper Sierakowski, Masahiro Horita, Michal Bockowski, Tetsu Kachi, and Jun Suda
Journal: Applied Physics Express
Publication type: article
DOI: 10.35848/1882-0786/ac39b0