Title: Fabrication and characterization of boron-doped nanocrystalline diamond-coated MEMS probes
Authors: Robert Bogdanowicz, Michał Sobaszek, Mateusz Ficek, Daniel Kopiec, Magdalena Moczała, Karolina Orłowska, Mirosław Sawczak, Teodor Gotszalk
Journal: Applied Physics A
Publication type: article
DOI: 10.1007/s00339-016-9829-9