Title: Two-stage reactive ion etching of AlGaN/GaN high electron mobility transistor type heterostructures
Authors: Sławomir Owczarzak, Andrzej P. Stafiniak, Regina Paszkiewicz
Journal: Journal of Vacuum Science and Technology. B, Nanotechnology & Microelectronics.
Publication type: article
DOI: 10.1116/1.5064778