Title: Enhanced activation of Mg ion-implanted GaN at decreasing annealing temperature by prolonging duration
Authors: Takuya Nakashima, Emi Kano, Keita Kataoka, Shigeo Arai, Hideki Sakurai, Tetsuo Narita, Kacper Sierakowski, Michal Bockowski, Masahiro Nagao, Jun Suda, Tetsu Kachi, and Nobuyuki Ikarashi
Journal: Applied Physics Express
Publication type: article
DOI: 10.35848/1882-0786/abd308