Title: Novel oxide materials with antibacterial properties deposited by low-temperature ALD
Authors: A. Slonska-Zielonka, J. Cymerys-Bulenda, S. Gieraltowska, R. Pietuszka, B. S. Witkowski, K. Amaro, H. Buksinski, Z. Gajewski, M. M. Godlewski, M. Godlewski
Journal: High-k oxides by ALD
Publication type: conference