Title: Optical diagnostics of the magnetron sputtering process of copper in an argon-oxygen atmoshere
Authors: Artur Rydosz, Kamila Kollbek, Nhu-Tarnawska H. Kim-Ngan, Adam Czapla, Andrzej Brudnik
Journal: Journal of Materials Science: Materials in Electronics
Publication type: article
DOI: 10.1007/s10854-020-03713-z