Title: Titanium (IV) isopropoxide as a source of titanium and oxygen atoms in carbon based coatings deposited by Radio Frequency Plasma Enhanced Chemical Vapour Deposition method
Authors: Anna Jedrzejczak, Damian Batory, Milena Prowizor, Magdalena Dominik, Mateusz Smietana, Michal Cichomski, Aneta Kisielewska, Witold Szymanski, Witold Kozlowski, Mariusz Dudek
Journal: Thin Solid Films
Publication type: article
DOI: 10.1016/j.tsf.2019.137697