Title: ZrO2:RE films grown by the spin-coating and atomic layer deposition method
Authors: Łukasz Wachnicki, Sylwia Gierałtowska, Bartłomiej S. Witkowski, Marek Godlewski
Journal: Baltic ALD 2015 - The 13th International Baltic Conference on Atomic Layer Deposition(), Wydawca:Institute of Physics of the University of Tartu
Publication type: conference