Title: Carbon coatings with high concentrations of silicon deposited by RF PECVD method at relatively high self bias
Authors: Anna Jedrzejczak; Damian Batory; Magdalena Dominik;Mateusz Smietana; Michal Cichomski; Witold Szymanski; Ewelina Bystrzycka;Milena Prowizor; Witold Kozlowski; Mariusz Dudek
Journal: Surface and Coatings Technology
Publication type: article
DOI: 10.1016/j.surfcoat.2017.09.044