Title: Quality factor and resonant frequency measurement by ARMA process identification of randomly excited MEMS/NEMS cantilever
Authors: Grzegorz Jóźwiak, Daniel Kopiec, Wojciech Majstrzyk, Teodor Gotszalk, Piotr Grabiec
Journal: 2014 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)
Publication type: conference