Title: Optical diagnostics of the magnetron sputtering process of copper in argon-oxygen atmosphere
Authors: A. Rydosz, K. Kollbek, Kim-Ngan Nhu-Tarnawska, A. Czapla, A. Brudnik
Journal: Journal of Material Science: Materials in Electronics
Publication type: article
DOI: 10.1007/s10854-020-03713-z