Title: Growth and thermal annealing for acceptor activation of p-type (Al)GaN epitaxial structures: Technological challenges and risks
Authors: Sebastian Zlotnik, Jakub Sitek, Krzysztof Rosiński, Paweł P. Michałowski, Jarosław Gaca, Marek Wójcik and Mariusz Rudziński
Journal: Applied Surface Science
Publication type: article
DOI: 10.1016/j.apsusc.2019.05.306