Title: High-k oxides by Atomic Layer Deposition - applications as anti-microbal layers
Authors: M. Godlewski, S. Gieraltowska, L. Wachnicki, R. Pietuszka, B. S. Witkowski, M. M. Godlewski, A. Slonska, Z. Gajewski
Journal: EMRS Spring Meeting 2017
Publication type: conference