Title: Characterization of dielectric layers grown at low temperature by atomic layer deposition
Authors: Sylwia Gieraltowska, Lukasz Wachnicki, Bartlomiej S.Witkowski, Robert Mroczynski, Piotr Dluzewski, Marek Godlewski
Journal: Thin Solid Films
Publication type: article
DOI: 10.1016/j.tsf.2015.01.059