Title: Role of heat accumulation in the multi-shot damage of silicon irradiated with femtosecond XUV pulses at a 1 MHz repetition rate
Authors: Ryszard Sobierajski, Iwanna Jacyna, Piotr Dłużewski, Marcin T. Klepka, Dorota Klinger, Jerzy B. Pełka, Tomáš Burian, Věra Hájková, Libor Juha, Karel Saksl, Vojtěch Vozda, Igor Makhotkin, Eric Louis, Bart Faatz, Kai Tiedtke, Sven Toleikis, Hartmut Enkisch, Martin Hermann, Sebastian Strobel, Rolf A. Loch, And Jaromir Chalupsky
Journal: Optics Express
Publication type: article
DOI: 10.1364/OE.24.015468