Title: Design of pulsed neon injection in the synthesis of W-B-C films using magnetron sputtering from a surface-sintered single powder cathode
Authors: B. Wicher, R. Chodun, M. Trzcinski, A. Lachowski, M. Kubis, K. Nowakowska - Langier, K. Zdunek
Journal: Thin Solid Films
Publication type: article
DOI: 10.1016/j.tsf.2020.138426