Title: ALD Grown Zinc Oxide with Controllable Electrical Properties
Authors: E. Guziewicz, M. Godlewski, L. Wachnicki, T. A. Krajewski, G. Luka,S. Gieraltowska, R. Jakiela, A. Stonert, W. Lisowski, M. Krawczyk,J. W. Sobczak and A. Jablonski
Journal: Semiconductor Science and Technology
Publication type: article
DOI: 10.1088/0268-1242/27/7/074011