Title: Manufacturing and Characterisation of MEMS Test Nanostructures
Authors: Grzegorz Jabłoński, Paweł Janus, Piotr Pietrzak, Tomasz Torzewicz, Artur Sobczak, Marcin Janicki, Andrzej Napieralski, Andrzej Sierakowski, Anna Brzezińska, Piotr Prokaryn
Journal: 23rd International Workshop on Thermal Investigations of ICs and Systems (THERMINIC)
Publication type: conference