Title: Effects of the sequential implantation of Mg and N ions into GaN for p-type doping
Authors: Hideki Sakurai, Tetsuo Narita, Keita Kataoka, Kazufumi Hirukawa, Kensuke Sumida, Shinji Yamada, Kacper Sierakowski, Masahiro Horita, Nobuyuki Ikarashi, Michal Bockowski Jun Suda and Tetsu Kachi
Journal: Applied Physics Express
Publication type: article
DOI: 10.35848/1882-0786/ac2ae7