Title: Effect of porous silicon substrate on structural, mechanical and optical properties of MOCVD and ALD ruthenium oxide nanolayers
Authors: I. Brytavskyi, K. Hušeková, V. Myndrul, M. Pavlenko, E. Coy, K. Zaleski, D. Gregušová, L. Yate, V. Smyntyna, I. Iatsunskyi
Journal: Applied Surface Science
Publication type: article
DOI: 10.1016/j.apsusc.2018.12.022