Title: Integration of a MEMS-type vacuum pump with a MEMS-type Pirani pressure gauge
Authors: Tomasz Grzebyk, Anna Górecka-Drzazga, Jan Dziuban, Khodr Maamari, Seyoung An, Tatjana Dankovic, Alan Feinerman, Heinz Busta
Journal: Journal of Vacuum Science and Technology B
Publication type: article
DOI: 10.1116/1.4903448