Title: Low temperature plasmas induced in SF6 by extreme ultraviolet (EUV) pulses
Authors: A. Bartnik, W. Skrzeczanowski, J. Czwartos, J. Kostecki, H. Fiedorowicz, P. Wachulak, T. Fok
Journal: Physics of Plasmas
Publication type: article
DOI: 10.1063/1.5030965