Title: Thermal annealing of GaN implanted with Be
Authors: M. A. Reshchikov, O. Andrieiev, M. Vorobiov, D. Ye, D. O. Demchenko, K. Sierakowski, M. Bockowski, B. McEwen, V. Meyers, and F. Shahedipour-Sandvik
Journal: JOURNAL OF APPLIED PHYSICS
Publication type: article
DOI: 10.1063/5.0080060