Title: Influence of oxygen-rich and zinc-rich conditions on donor and acceptor states and conductivity mechanism of ZnO films grown by ALD-Experimental studies
Authors: E. Przezdziecka, E. Guziewicz, D. Jarosz, D. Snigurenko, Sulich, P. Sybilski, R. Jakiela and W. Paszkowicz
Journal: Journal of Applied Physics
Publication type: article
DOI: 10.1063/1.5120355