Title: Fabrication and characterization of a miniaturezed octupole deflection system for MEMS electrone microscope
Authors: M. Krysztof, M. Białas, P. szyszka, T. Grzebyk, A. Górecka-Drzazga
Journal: Ultramicroscopy
Publication type: article
DOI: 10.1016/j.ultramic.2021.113288