Title: Propagation of scratches on GaN substrate crystals during polishing process
Authors: J.Serafińczuk, G. Jóźwiak, P. Pałetko, R. Kudrawiec, R. Kucharski, M. Zajac and T.P. Gotszalk
Journal: 4th National Conference on Nano- and Micromechanics (KKNM)
Publication type: conference