Title: Hydrogen in As-Grown and Annealed ZnO Films Grown by Atomic Layer Deposition
Authors: E. Guziewicz, W. Wozniak, S. Mishra, R. Jakiela, M. Guziewicz, V. Y. Ivanov, E. Lusakowska, and R. Schifano
Journal: Phys. Status Solidi A
Publication type: article
DOI: 10.1002/pssa.202000318