Title: Hydrogen in as grown and annealed ZnO films grown by Atomic Layer Deposition
Authors: E. Guziewicz, W. Wozniak, S. Mishra, R. Jakiela, M. Guziewicz, V. Yu. Ivanov, E. Lusakowska, R. Schifano
Journal: Physica Status Solidi A
Publication type: article
DOI: 10.1002/pssa.202000318