Title: Relation between modulation frequency of electric power oscillation during pulse magnetron sputtering deposition of MoNx thin films
Authors: Bartosz Wicher, Rafał Chodun, Katarzyna Nowakowska-Langier, Sebastian Okrasa, Marek Trzciński, Krystian Król, Roman Minikayev, Łukasz Skowroński, Łukasz Kurpaska, Krzysztof Zdunek
Journal: Applied Surface Science
Publication type: article
DOI: 10.1016/j.apsusc.2018.06.179