Title: Influence of biofunctionalization process on properties of silicon oxynitride substrate layer
Authors: M. Kalisz, M. Szymańska, A. K. Dębowska, B. Michalak, E. Brzozowska, S. Górska, M. Śmietana
Journal: Surface and Interface Analysis
Publication type: article
DOI: 10.1002/sia.5379