Title: Technology and parameters of thin membrane-anode for MEMS transmission electron microscope
Authors: M. Krysztof, T. Grzebyk, P. Szyszka, K. Laszczyk, A. Górecka-Drzazga, J. Dziuban
Journal: Journal of Vacuum Science and Technology B
Publication type: article
DOI: 10.1116/1.5006151