Title: Miniature plasma generator made of low temperature co-fired ceramics (LTCC) for gas characterization using optical emission spectroscopy (OES)
Authors: Karol Malecha, Henryk Roguszczak, Sergiusz Patela, Leszek Golonka
Journal: Przegląd Elektrotechniczny
Publication type: article
DOI: 10.12915/pe.2014.09.19