Title: Depth Profile Analysis of Phosphorus Implanted SiC Structures
Authors: P. Konarski, K. Król, M. Miśnik, M. Sochacki, J. Szmidt, M. Turek, J. Żuk
Journal: Acta Physica Polonica A
Publication type: article
DOI: 10.12693/APhysPolA.128.864