Title: Selective etching of GaAs over AlAs etch-stop layer in buffered citric acid/H2O2 solution
Authors: Aleksandr Kuźmicz; Krzysztof Chmielewski; Olga Serebrennikova; Jan Muszalski
Journal: Materials Science in Semiconductor Processing
Publication type: article
DOI: 10.1016/j.mssp.2017.01.020