Title: Growth and coalescence control of inclined caxis polar and semipolar GaN multilayer structures grown on Si(111), Si(112), and Si(115) by metalorganic vapor phase epitaxy
Authors: Szymański Tomasz, Wośko Mateusz M, Paszkiewicz Bartłomiej, Paszkiewicz Bogdan, Paszkiewicz Regina, Sankowska Iwona
Journal: Journal of Vacuum Science & Technology A
Publication type: article
DOI: 10.1116/1.4958805