Title: Thin SixNyCz films deposited from hexamethyldisilazane by RF PECVD technique for optical filter applications
Authors: K. Oleśko. H. Szymanowski, M. Gazicki-Lipman, J. Balcerzak, W. Szymański, W. Pawlak, A. Sobczyk-Guzenda
Journal: Materials Science - Poland
Publication type: article
DOI: 10.1515/msp-2017-0109