Title: High-k oxides by Atomic Layer Deposition - applications in biology and medicine
Authors: M. Godlewski, S. Gieraltowska, L. Wachnicki, R. Pietuszka, M. M. Godlewski, A. Slonska, Z. Gajewski
Journal: 16th International Conference on Atomic Layer Deposition, ALD2016
Publication type: conference