Title: Preparation of multicomponent thin films by magnetron co-sputtering method: The Cu-Ti case study
Authors: B. Adamiak, A. Wiatrowski, J. Domaradzki, D. Kaczmarek, D. Wojcieszak, M. Mazur
Journal: Vacuum
Publication type: article
DOI: 10.1016/j.vacuum.2019.01.012