Title: Substrate effect in electron beam litography
Authors: K. Indykiewicz, B. Paszkiewicz, R. Paszkiewicz
Journal: Advances in Electrical and Electronic Engineering(tom: vol. 16, nr 2, strony: 246-252), Wydawca:VSB-Technical University of Ostrava
Publication type: article
DOI: 10.15598/aeee.v16i2.2756