Title: Methods of Characterization - Characterization of diamond-like carbon films deposited by RF ICP PECVD method - investigation of technologica process parameters influence on properties of deposited DLC films
Authors: W. Oleszkiewicz, W. Kijaszek, J. Kovac Jr, J. Kovac, A. Zakrzewski, S. Patela, M. Tlaczala
Journal: Vacuum Technique & Technology
Publication type: book