Title: Towards high quality ITO coatings: the impact of nitrogen admixture in HiPIMS discharges
Authors: Stranak V., Bogdanowicz R., Sezemsky P., Wulff H., Kruth A., Smietana M., Kratochvil J., Cada M., Hubicka Z.
Journal: Surface and Coatings Technology
Publication type: article
DOI: 10.1016/j.surfcoat.2017.12.030