Title: Modification of various properties of HfO2 thin films obtained by changing magnetron sputtering conditions
Authors: Michal Mazur, Torsten Howind, Des Gibson, Danuta Kaczmarek, Jerzy Morgiel, Damian Wojcieszak, Wenzhong Zhu, Piotr Mazur
Journal: Surface & Coatings Technology
Publication type: article
DOI: 10.1016/j.surfcoat.2016.12.001