Title: Study of the Efficiency of Microcantilevers: Cases of Electrothermal and Electromagnetic Actuation
Authors: Bartosz Pruchnik, Tomasz Piasecki, Karolina Orlowska, Wojciech Majstrzyk, Andrzej Sierakowski, Teodor Gotszalk, Ivo Rangelow
Journal: Journal of Microelectromechanical Systems(), Wydawca:IEEE
Publication type: article
DOI: 10.1109/JMEMS.2022.3187793