Title: CORRELATION OF SELECTED PROBLEMS DURING GaN MOVPE EPITAXY ON Si SUBSTRATES WITH IN–SITU INTERFEROMETER OBSERVATION
Authors: Tomasz Szymański, Mateusz Wośko, Bogdan Paszkiewicz, Kornelia Indykiewicz, Regina Paszkiewicz
Journal: Journal of ELECTRICAL ENGINEERING
Publication type: article
DOI: 10.2478/jee-2014-0047