Title: Atomic layer deposition of palladium coated TiO2/Si nanopillars: ToF-SIMS, AES and XPS characterization study
Authors: Igor Iatsunskyi, Gloria Gottardi, Victor Micheli, Roberto Canteri, Emerson Coy, mikhael Bechelany
Journal: Applied Surface Science
Publication type: article
DOI: 10.1016/j.apsusc.2020.148603