Title: Energy dependence of nanopillars formation on InSb semiconductorsurfaces under gallium FIB and noble gas ions beam irradiationB.
Authors: B. R. Jany, K. Szajna, M. Nikiel, D. Wrana, E. Trynkiewicz, R. Pedrys, F. Krok
Journal: Applied Surface Science
Publication type: article
DOI: 10.1016/j.apsusc.2014.11.140