Title: Mg-implanted bevel edge termination structure for GaN power device applications
Authors: Maciej Matys, Takashi Ishida, Kyung Pil Nam, Hideki Sakurai, Tetsuo Narita, Tsutomu Uesugi, Michal Bockowski, Jun Suda, and Tetsu Kachi
Journal: Applied Physics Letters
Publication type: article
DOI: 10.1063/5.0039183