Title: Quartz tuning fork mass change sensing for FIB/SEM technology
Authors: Piotr Kunicki, Magdalena Moczała-Dusanowska, Grzegorz Jóźwiak, Paulina Szymanowska, Tomasz Piasecki, Teodor Gotszalk
Journal: Micron
Publication type: article
DOI: 10.1016/j.micron.2019.102792