Title: High-k oxides by Atomic Layer Deposition - applications in biology and medicine
Authors: M. Godlewski, S. Gieraltowska, L. Wachnicki, R. Pietuszka, B. S. Witkowski, A. Slonska, Z. Gajewski, M. M. Godlewski
Journal: J. Vac. Sci. Technol. A
Publication type: article
DOI: 10.1116/1.4974314