Title: Fourier analysis of scratches generated on m-GaN substrates during polishing
Authors: Jaroslaw Serafinczuk, Grzegorz Jóźwiak , Piotr Pałetko , Robert Kudrawiec , Robert Kucharski , Marcin Zajac , Teodor Gotszalk
Journal: Crystal Research & Technology
Publication type: article
DOI: 10.1002/crat.201400465