Title: Structural Properties of Thin ZnO Films Deposited by ALD under O-rich and Zn-rich Growth Conditions and Their Relationship with Electrical Parameters
Authors: 3.S. Mishra, E. Przezdziecka, W. Wozniak, A. Adhikari, R. Jakiela, W. Paszkowicz, A. Sulich, K. Kopalko and E. Guziewicz
Journal: Materials
Publication type: article
DOI: 10.3390/ma14144048