Title: Metrology and control of electromagnetically actuated cantilevers using optical beam deflection method
Authors: Daniel Kopiec, Wojciech Majstrzyk, Bartosz Pruchnik, Ewelina Gacka, Dominik Badura, Andrzej Sierakowski, Paweł Janus, TeodorGotszalk
Journal: METROLOGY AND MEASUREMENT SYSTEMS(), Wydawca:Polish Academy of Sciences
Publication type: article
DOI: 10.24425/mms.2021.137698