Title: Improved diamond‐like carbon coating deposition uniformity on cylindrical sample by its suspension in RF PECVD chamber
Authors: Mateusz Śmietana, Marcin Koba, Predrag Mikulic, Robert Bogdanowicz, Wojtek J Bock
Journal: physica status solidi (a)
Publication type: article
DOI: 10.1002/pssa.201532226