Title: Chlorine-enhanced thermal oxides growth and significant trap density reduction at SiO2/SiC interface by incorporation of phosphorus
Authors: Krystan Król, Mariusz Sochacki, Włodzimierz Strupiński, Katarzyna Racka, Marek Guziewicz, Piotr Konarski, Maciej Miśnik, Jan Szmidt
Journal: Thin Solid Films
Publication type: article
DOI: 10.1016/j.tsf.2015.08.028