Title: Impedance spectroscopy of electrostatically driven MEMS resonators
Authors: Krzysztof Kwoka, Tomasz Piasecki, Karolina Orłowska, Paulina Grabarczyk, Andrzej Sierakowski, Teodor Gotszalk, Ewelina Gacka, Adrianna Piejko, Krzysztof Gajewski
Journal: Measurement, Wydawca:Elsevier
Publication type: article
DOI: 10.1016/j.measurement.2023.112845