Title: Chemical structure and optical properties of SixNyCz coatings synthesized from two organosilicone precursors with the RF PECVD technique - a comparative study
Authors: A. Sobczyk-Guzenda, K. Oleśko, M. Gazicki-Lipman, W. Szymanski, J. Balcerzak, B. Wendler,H. Szymanowski
Journal: Materials Research Express
Publication type: article
DOI: 10.1088/2053-1591/aae4f9