Title: Manufacturing and Characterization of Test Structures Dedicated for The Investigation of Heat Transfer Processes at Nanoscale
Authors: J. Topiłko, A. Sobczak, P. Pietrzak, P. Zając, M. Janicki, P. Janus, M. Zubert, A. Napieralski
Journal: 25th International Workshop on Thermal Investigations of ICs and Systems THERMINIC
Publication type: conference