Title: Improvement of MEMS Thermomechanical Actuation Efficiency by Focused Ion Beam-Induced Deposition
Authors: Bartosz Pruchnik, Tomasz Piasecki, Ewelina Gacka, Mateus G. Masteghin, David C. Cox, Teodor Gotszalk
Journal: Journal of Microelectromechanical Systems(), Wydawca:IEEE
Publication type: article
DOI: 10.1109/JMEMS.2024.3377595