Title: Vapor phase deposition of fluoroalkyl trichlorosilanes on silicon and glass: Influence of deposition conditions and chain length on wettability and adhesion forces
Authors: Maciej Psarski, Grzegorz Celichowski, Ewelina Bystrzycka, Daniel Pawlak, Jarosław Grobelny, Michał Cichomski
Journal: Materials Chemistry and Physics
Publication type: article