Spreadsheet: 045ab1a3-c48d-4556-a2e9-2b060a8e03cc
Sheet: Sheet1

Unnamed: 0 | SVG Coater and [NAME] Use Only | Unnamed: 2 | Unnamed: 3 | Unnamed: 4 | Unnamed: 5 | Unnamed: 6 | Unnamed: 7 | Unnamed: 8 | Unnamed: 9 | Unnamed: 10
 | Week of July 25 - July 30, 2010
 |  | 1um | 1.6um | 7um | 1um | 1.6um | 3um | 1um | 1um
SVG                         Coater | Date (Coat) | 2010-07-28 00:00:00 | 2010-07-28 00:00:00 | 2010-07-28 00:00:00 | 2010-07-28 00:00:00 | 2010-07-28 00:00:00 | 2010-07-28 00:00:00 | 2010-07-28 00:00:00 | 2010-07-28 00:00:00
 | Track | 1 | 1 | 1 | 2 | 2 | 2 | 1 | 2
 | Prime Program | Yes Oven | Yes Oven | Yes Oven | Yes Oven | Yes Oven | Yes Oven | Yes Oven | Yes Oven
 | Coat Program | 7 | 8 | 4 | 7 | 8 | 4 | 7 | 7
 | Oven Program | 1 | 2 | 3 | 1 | 2 | 3 | 1 | 1
 | Problems
Thickness Measurements                                (NanoSpec) | Date (Measurement) | 2010-07-28 00:00:00 | 2010-07-28 00:00:00 | 2010-07-28 00:00:00 | 2010-07-28 00:00:00 | 2010-07-28 00:00:00 | 2010-07-28 00:00:00 | 2010-07-28 00:00:00 | 2010-07-28 00:00:00
 | Top (A) | 10172 | 16849 | 71965 | 10349 | 17110 | 29442 |  |  | -
 | Center (A) | 10143 | 16847 | 72397 | 10331 | 17066 | 29194 |  |  | -
 | Flat (A) | 10201 | 16860 | 72052 | 10316 | 17103 | 28771 |  |  | -
 | Left  (A) | 10159 | 16869 | 72064 | 10322 | 17106 | 29307 |  |  | -
 | Right (A) | 10153 | 16855 | 72027 | 10318 | 17100 | 28877 |  |  | -
 | Average (A) | 10165.6 | 16856 | 72101 | 10327.2 | 17097 | 29118.2 |  |  | -
 | [NAME]  (A) | 22.40089283928254 | 8.888194417315589 | 169.821965599271 | 13.47961423791424 | 17.72004514666935 | 285.0275425288715 |  |  | -
 | Comments
Exposure | Date (Exposure) | 2010-07-30 00:00:00 | 2010-07-30 00:00:00 | 2010-07-30 00:00:00 | 2010-07-30 00:00:00 | 2010-07-30 00:00:00 | 2010-07-30 00:00:00 | 2010-07-30 00:00:00 | 2010-07-30 00:00:00 | 2010-07-30 00:00:00
 | Tool | KS1 | KS1 | KS1 | KS2 | KS2 | KS2
 | Contact Type | Vac | Vac | Vac | Vac | Vac | Vac
 | Exposure Time | 1.1 | 1.6 | 3.3x2 | 1.1 | 1.5 | 3.3
 | Problems
SVG                            Developer | Date (Develop) | 2010-07-30 00:00:00 | 2010-07-30 00:00:00 | 2010-07-30 00:00:00 | 2010-07-30 00:00:00 | 2010-07-30 00:00:00 | 2010-07-30 00:00:00 | 2010-07-30 00:00:00 | 2010-07-30 00:00:00 | 2010-07-30 00:00:00
 | Track | 1 | 1 | 1 | 1 | 1 | 1
 | Pre-bake Program
 | Develop Program
 | Post-base Program
 | Problems
Resolution                         Measurements                         (Dark Field) | Date (Measurement) | 2010-07-30 00:00:00 | 2010-07-30 00:00:00 | 2010-07-30 00:00:00 | 2010-07-30 00:00:00 | 2010-07-30 00:00:00 | 2010-07-30 00:00:00 | 2010-07-30 00:00:00 | 2010-07-30 00:00:00 | 2010-07-30 00:00:00
 | Top (H/V) (um) | 1.5 | 3.0 | 3.0 | 1.5 | 2.5 | 2.0
 | Center (H/V) (um) | 1.5 | 2.0 | 2.5 | 1.5 | 2.0 | 2.0
 | Flat (H/V) (um) | 1.5 | 2.5 | 3.0 | 2.0 | 2.5 | 2.0
 | Left (H/V) (um) | 2.0 | 2.0 | 2.5 | 2.0 | 2.0 | 2.5
 | Right (H/V) (um) | 1.5 | 2.5 | 2.5 | 2.0 | 2.0 | 2.5
 | Comments
Resolution                         Measurements                         (Light Field) | Date (Measurement) | 2010-07-30 00:00:00 | 2010-07-30 00:00:00 | 2010-07-30 00:00:00 | 2010-07-30 00:00:00 | 2010-07-30 00:00:00 | 2010-07-30 00:00:00 | 2010-07-30 00:00:00 | 2010-07-30 00:00:00 | 2010-07-30 00:00:00
 | Top (H/V) (um) | 2.0 | 2.0 | 3.5 | 2.0 | 2.5 | 2.5
 | Center (H/V) (um) | 1.5 | 2.0 | 2.5 | 1.5 | 2.0 | 2.0
 | Flat (H/V) (um) | 2.0 | 2.5 | 3.5 | 2.0 | 2.5 | 2.5
 | Left (H/V) (um) | 2.0 | 2.5 | 3.0 | 2.0 | 2.0 | 2.5
 | Right (H/V) (um) | 2.0 | 2.5 | 3.0 | 2.0 | 2.5 | 2.5
 | Comments