Spreadsheet: ad847ffa-0d7e-48e3-8983-65f0200d6846
Sheet: Sheet1

Unnamed: 0 | SVG Coater and [NAME] Use Only | Unnamed: 2 | Unnamed: 3 | Unnamed: 4 | Unnamed: 5 | Unnamed: 6 | Unnamed: 7 | Unnamed: 8 | Unnamed: 9 | Unnamed: 10 | Unnamed: 11 | Unnamed: 12 | Unnamed: 13 | Unnamed: 14 | Unnamed: 15 | Unnamed: 16 | Unnamed: 17 | Unnamed: 18 | Unnamed: 19
 | Week of July 04 - July 10, 2010
 |  | 1um | 1.6um | 7um | 1um | 1.6um | 3um | 1um | 1.6um | 3um |  |  | 1um | 1.6um | 7um | 1um | 1.6um | 3um | 1um
SVG                         Coater | Date (Coat) | 2010-07-08 00:00:00 | 2010-07-08 00:00:00 | 2010-07-08 00:00:00 | 2010-07-08 00:00:00 | 2010-07-08 00:00:00 | 2010-07-08 00:00:00 | 2010-07-08 00:00:00 | 2010-07-08 00:00:00 |  |  | Date (Coat)
 | Track | 1 | 1 | 1 | 2 | 2 | 2 | 2 | 1 |  |  | Track | 1 | 1 | 1 | 1 | 1 | 2 | 1
 | Prime Program | Yes Oven | Yes Oven | Yes Oven | Yes Oven | Yes Oven | Yes Oven | Yes Oven | Yes Oven |  |  | Prime Program | Yes Oven | Yes Oven | Yes Oven | Yes Oven | Yes Oven | Yes Oven | Yes Oven
 | Coat Program | 7 | 8 | 4 | 7 | 8 | 4 | 7 | 8 |  |  | Coat Program | 7 | 8 | 4 | 7 | 8 | 4 | 7
 | Oven Program | 1 | 2 | 3 | 1 | 2 | 3 | 1 | 2 |  |  | Oven Program | 1 | 2 | 3 | 1 | 2 | 3 | 1
 | Problems
Thickness Measurements                                (NanoSpec) | Date (Measurement) | 2010-07-08 00:00:00 | 2010-07-08 00:00:00 | 2010-07-08 00:00:00 | 2010-07-08 00:00:00 | 2010-07-08 00:00:00 | 2010-07-08 00:00:00 | 2010-07-08 00:00:00 | 2010-07-08 00:00:00 |  |  | Date (Measurement) | 2010-07-01 00:00:00 | 2010-07-01 00:00:00 | 2010-07-01 00:00:00 | 2010-07-01 00:00:00 | 2010-07-01 00:00:00 | 2010-07-01 00:00:00 | 2010-07-01 00:00:00
 | Top (A) | 10144 | 15797 | 72225 | 10307 | 17153 | 30028 | 10320 | 15844 | - |  | Top (A) | 10234 | 16864 | 72052 | 10166 | 16785 | 30013 | 10183
 | Center (A) | 10142 | 15779 | 71873 | 10278 | 17110 | 30013 | 10267 | 15799 | - |  | Center (A) | 10194 | 16841 | 72206 | 10148 | 16775 | 29944 | 10169
 | Flat (A) | 10145 | 15824 | 71948 | 10300 | 17144 | 30014 | 10282 | 15843 | - |  | Flat (A) | 10231 | 16863 | 72097 | 10163 | 16778 | 29999 | 10779
 | Left  (A) | 10148 | 15805 | 71973 | 10302 | 17139 | 30033 | 10305 | 15839 | - |  | Left  (A) | 10227 | 16848 | 72232 | 10168 | 16802 | 30042 | 10194
 | Right (A) | 10143 | 15798 | 72039 | 10311 | 17129 | 30010 | 10292 | 15854 | - |  | Right (A) | 10224 | 16863 | 72145 | 10164 | 16780 | 29986 | 10182
 | Average (A) | 10144.4 | 15800.6 | 72011.6 | 10299.6 | 17135 | 30019.6 | 10293.2 | 15835.8 | - |  | Average (A) | 10222 | 16855.8 | 72146.4 | 10161.8 | 16784 | 29996.8 | 10301.4
 | [NAME]  (A) | 2.302172886644267 | 16.22652150067663 | 133.2621476646341 | 12.81795615521522 | 16.44688420339853 | 10.21273714301491 | 20.43771024363982 | 21.30023474021071 | - |  | [NAME]  (A) | 16.10900369358701 | 10.61602562111071 | 74.55400727117714 | 7.949842765928156 | 10.70046727951635 | 36.10678606644025 | 267.1334872306297
 | Comments
Exposure | Date (Exposure) | 2010-07-09 00:00:00 | 2010-07-09 00:00:00 | 2010-07-09 00:00:00 | 2010-07-09 00:00:00 | 2010-07-09 00:00:00 | 2010-07-09 00:00:00 | 2010-07-09 00:00:00 | 2010-07-09 00:00:00 | 2010-07-09 00:00:00
 | Tool | [NAME] | [NAME] | [NAME] | [NAME] | [NAME] | [NAME] | EValign | EValign | EValign
 | Contact Type | Vac | Vac | Vac | Vac | Vac | Vac
 | Exposure Time | 1 | 1.7 | 3.3x2 | 1.1 | 1.7 | 3.4
 | Problems
SVG                            Developer | Date (Develop) | 2010-07-09 00:00:00 | 2010-07-09 00:00:00 | 2010-07-09 00:00:00 | 2010-07-09 00:00:00 | 2010-07-09 00:00:00 | 2010-07-09 00:00:00 | 2010-07-09 00:00:00 | 2010-07-09 00:00:00 | 2010-07-09 00:00:00
 | Track | 2 | 1 | 1 | 2 | 1 | 1
 | Pre-bake Program
 | Develop Program
 | Post-base Program
 | Problems
Resolution                         Measurements                         (Dark Field) | Date (Measurement) | 2010-07-09 00:00:00 | 2010-07-09 00:00:00 | 2010-07-09 00:00:00 | 2010-07-09 00:00:00 | 2010-07-09 00:00:00 | 2010-07-09 00:00:00 | 2010-07-09 00:00:00 | 2010-07-09 00:00:00 | 2010-07-09 00:00:00
 | Top (H/V) (um) | 2 | 3.5 | 4.5 | 1.5 | 2.5
 | Center (H/V) (um) | 2 | 2 | 3 | 1 | 2 | 2
 | Flat (H/V) (um) | 1.5 |  | 3.5 | 1.5
 | Left (H/V) (um) | 2.5 | 2.5 |  | 2 |  | 2
 | Right (H/V) (um) | 1.5 |  |  | 1.5 | 2.5
 | Comments
Resolution                         Measurements                         (Light Field) | Date (Measurement) | 2010-07-09 00:00:00 | 2010-07-09 00:00:00 | 2010-07-09 00:00:00 | 2010-07-09 00:00:00 | 2010-07-09 00:00:00 | 2010-07-09 00:00:00 | 2010-07-09 00:00:00 | 2010-07-09 00:00:00 | 2010-07-09 00:00:00
 | Top (H/V) (um) | 2 | 2 | 5 | 2 | 2
 | Center (H/V) (um) | 2 | 2 | 3.5 | 1.5 | 2 | 3
 | Flat (H/V) (um) | 1.5 |  | 3.5 | 1.5
 | Left (H/V) (um) | 2 | 2.5 |  | 2 |  | 3.5
 | Right (H/V) (um) | 1.5 |  |  | 1.5 | 2.5
 | Comments