Spreadsheet: 10be2c3f-7aae-499f-81f9-742833726e74
Sheet: Sheet1

Line | ID | Location | Equipment | Gas | Sensor | Date | Test Gas Conc. | Result | Notes
1 | D20 | CIS  Clean Room | Tylan # 2 | HCl | HCl | 2008-12-20 00:00:00 | 7.8 ppm HCl | 7 to 8 ppm | audible in the area
2 | D21 | CIS  Clean Room | Implanter | BF3 | HF |  |  |  | removed from service
3 | D26 | CIS  Clean Room | Rm. 106  Ambient | F2 | F2 |  |  |  | disabled
4 | D27 | CIS  Clean Room | L116   ASM  EPI | HCl | HCl | 2008-12-20 00:00:00 | 7.8 ppm HCl | 7 ppm | audible in the area
5 | D28 | CIS  Clean Room | L116   ASM  EPI | NH3 | NH3 | 2008-12-21 00:00:00 | 32 ppm NH3 | 42 ppm | audible in the area
6 | D29 | CIS  Clean Room | L116   ASM  EPI | WF6 | HF | 2008-12-20 00:00:00 | 7.8 ppm HCl | 4.3 ppm as HF | audible in the area, discrepancy in the matrix
7 | D30 | CIS  Clean Room | WBDIFF | HCl | HCl | 2008-12-20 00:00:00 | 7.8 ppm HCl | 7 ppm | audible in the area
8 | [NAME] | CIS  Clean Room | Service Isle Ambient | NH3 | NH3 | 2008-12-21 00:00:00 | 32 ppm NH3 | 40 ppm | audible in the area
9 | D32 | CIS  Clean Room | Service Isle Ambient | HCl | HCl | 2008-12-20 00:00:00 | 7.8 ppm HCl | 6+ ppm | audible in the area
10 | D33 | CIS  Clean Room | PlasmaQuest | HCl | HCl | 2008-12-20 00:00:00 | 7.8 ppm HCl | 8 ppm | audible in the area
11 | D34 | CIS  Clean Room | Lam | HBr | HBr | 2008-12-20 00:00:00 | 7.8 ppm HCl | 10 ppm as HBr | audible in the area
12 | D35 | CIS  Clean Room | AMT 5000 | HBr | HBr | 2008-12-20 00:00:00 | 7.8 ppm HCl | 12 ppm as HBr | audible in the area
13 | [NAME] | CIS  Clean Room | AMT 5000 | Cl2 | Cl2 | 2008-12-20 00:00:00 | 1.35 ppm Cl2 | 2.9 ppm | audible in the area
14 | D37 | CIS  Clean Room | AMT 5000 | HCl | HCl | 2008-12-20 00:00:00 | 7.8 ppm HCl | 7.1 ppm | audible in the area
15 | D38 | CIS  Clean Room | AG4108 | NH3 | NH3 |  |  |  | not tested, overlooked
16 | D39 | CIS  Clean Room | THERMCO K | LEL | LEL | 2008-12-20 00:00:00 | 2% H2 | 0.65 | audible in the area
17 | D40 | CIS  Clean Room | Tylan | LEL | LEL | 2008-12-20 00:00:00 | 2% H2 | 0.59 | audible in the area
18 | D41 | CIS  Clean Room | THERMCO | HCl | HCl | 2008-12-20 00:00:00 | 7.8 ppm HCl | 8.1 ppm | audible in the arae
19 | MST69 | CIS  Clean Room | EPI 2 Exhaust Duct | HCl | HCl | 2008-12-20 00:00:00 | 7.8 ppm HCl | 7.6 ppm | audible in the area
20 | MST70 | CIS  Clean Room | EPI 2 Exhaust Duct | H2 | H2 | 2008-12-20 00:00:00 | 2% H2 | 0.033 | audible in the area
21 | D22 | CIS  Basement | Cabinet  14 | SiCl4 | HCl |  |  |  | not tested, overlooked
22 | [NAME] | CIS  Basement | Cabinet  47 | WF6 | HF |  |  |  | disabled
23 | MST 54 | CIS  Basement | Ambient | O2 | O2 | 2008-12-27 00:00:00 | 10% O2 | 0.099 | audible and strobe in the area
24 | MST 55 | CIS  Basement | Ambient-Freight Elevator | O2 | O2 | 2008-12-27 00:00:00 | 10% O2 | 0.099 | audible and strobe in the area
25 | MST 56 | CIS  Basement | Ambient | O2 | O2 | 2008-12-27 00:00:00 | 10% O2 | 0.099 | audible in the area
26 | MST 57 | CIS  Basement | Ambient  Above-Freight Elevator | H2 | H2 | 2008-12-27 00:00:00 | 2% H2 | 6+ % | no audible
27 | MST 58 | CIS  Basement | Ambient  Above-Column E5 | H2 | H2 | 2008-12-27 00:00:00 | 2% H2 | 4+ % | no audible
28 | MST 59 | CIS  Basement | Piping Rack | H2 | H2 | 2008-12-27 00:00:00 | 2% H2 | 6+ % | no audible
29 | MST 61 | CIS  Basement | Ambient  Above-Column G6 | H2 | H2 | 2008-12-27 00:00:00 | 2% H2 | 5+ % | no audible
30 | MST 62 | CIS  Basement | Substation-Column F5 | H2 | H2 | 2008-12-27 00:00:00 | 2% H2 | 4+ % | no audible
31 | MST 64 | CIS  Basement | Column | H2 | H2 | 2008-12-27 00:00:00 | 2% H2 | 4+ % | no audible
32 | MST 68 | CIS  Basement |  | HCL | HCl |  |  |  | not tested, overlooked
33 | MST 60 | CIS Interstitial | 227A | H2 | H2 | 2008-12-21 00:00:00 | 2% H2 | 0.03 | label incorrect, should be MST 63, alarm shut down all gas cabinets
34 | MST 63 | CIS Interstitial | EPI Scrubber Room | H2 | H2 | 2008-12-21 00:00:00 | 2% H2 | 0.042 | label incorrect, should be MST 60, alarm shut down all gas cabinets
35 | MST 47 | CISX | B 107X | O2 | O2 | 2008-12-27 00:00:00 | 10% O2 | 0.099 | audible in the area
36 | MST 48 | CISX | B 105X | O2 | O2 | 2008-12-27 00:00:00 | 10% O2 | 0.099 | audible in the area
37 | MST 49 | CISX | B 106X | O2 | O2 | 2008-12-27 00:00:00 | 10% O2 | 0.099 | audible in the area
38 | MST 50 | CISX | B 108X | O2 | O2 | 2008-12-27 00:00:00 | 10% O2 | 0.099 | audible in the area
39 | MST 10 | CISX | 113X | HF | HF | 2008-12-27 00:00:00 | 7.8 ppm HCl | 4 ppm as HF | audible in the area
40 | MST 14 | CISX | 113X | Cl2 | Cl2 |  |  |  | not tested, overlooked
41 | MST 18 | CISX | 113X | NH3 | NH3 | 2008-12-27 00:00:00 | 32 ppm NH3 | 41 ppm | audible in the area
42 | MST 35 | CISX | 113X  HOOD | H2 | H2 | 2008-12-27 00:00:00 | 2% H2 | 4+ % | no audible
43 | MST 44 | CISX | 113X | O2 | O2 | 2008-12-27 00:00:00 | 10% O2 | 0.096 | audible in the area, disabled in programming
44 | MST 09 | CISX | 110X | HCl | HCl | 2008-12-27 00:00:00 | 7.8 ppm HCl | 8 ppm | audible in the area
45 | MST 29 | CISX | 110X  Ambient | AsH3 | AsH3 |  |  |  | point disabled
46 | MST 30 | CISX | 110X  Ambient | B2H6 | B2H6
47 | MST 31 | CISX | 110X  Ambient | GeH4 | GeH4 | 2008-12-27 00:00:00 | 220 ppb PH3 | 0.9 ppm GeH4 | audible in the area
48 | MST 32 | CISX | 110X  Ambient | PH3 | PH3 | 2008-12-27 00:00:00 | 220 ppb PH3 | 330 ppb | audible in the area
49 | MST 36 | CISX | 110X | H2 | H2 | 2008-12-27 00:00:00 | 2% H2 | 0.032 | local audible
50 | MST 39 | CISX | 110X | H2 | H2 | 2008-12-27 00:00:00 | 2% H2 | 0.032 | local audible
51 | MST 43 | CISX | 110X | O2 | O2 | 2008-12-27 00:00:00 | 10% O2 | 0.097 | audible in the area
52 | MST 11 | CISX | 121X  Ambient | HCl | HCl | 2008-12-27 00:00:00 | 7.8 ppm HCl | 7 ppm | audible in the area
53 | MST 41 | CISX | 122X | O2 | O2 | 2008-12-27 00:00:00 | 10% O2 | 0.103 | audible in the area
54 | MST 42 | CISX | 121X | O2 | O2 | 2008-12-27 00:00:00 | 10% O2 | 0.099 | audible in the area
55 | MST 51 | CISX | 122X  Ambient | NH3 | NH3 |  |  |  | point disabled
56 | MST 52 | CISX | 120X | NH3 | NH3 |  |  |  | point disabled
57 | MST 38 | CISX | 213X | H2 | H2 | 2008-12-27 00:00:00 | 2% H2 | 0.037 | no audible, relocated to 113X
58 | MST 45 | CISX | 213X | O2 | O2 | 2008-12-27 00:00:00 | 10% O2 | 0.099 | audible in the area, not on MST matrix
59 | MST 46 | CISX | 217X | O2 | O2 | 2008-12-27 00:00:00 | 10% O2 | 0.098 | no audible, red light only
60 | MST 65 | CISX | 213X | O2 | O2 | 2008-12-27 00:00:00 | 10% O2 | 0.099 | local audible
61 | MST 66 | CISX | 213X -Tool | BF3 | HF |  |  |  | point disabled
62 | MST 67 | CISX | 213X - Ambient | BF3 | HF |  |  |  | point disabled
63 | MST  1 | Gas Vault 115X | C  8 | SiH2Cl2 | HCl | 2008-12-21 00:00:00 | 7.8 ppm HCl | 6.2 ppm | audible in the area, [NAME]
64 | MST  2 | Gas Vault 115X | C 46 | SiH2Cl2 | HCl | 2008-12-21 00:00:00 | 7.8 ppm HCl | 9.8 ppm | audible in the area, [NAME]
65 | MST  3 | Gas Vault 115X | C 48 | SiH2Cl2 | HCl | 2008-12-21 00:00:00 | 7.8 ppm HCl | 7.8 ppm | audible in the area, [NAME]
66 | MST 15 | Gas Vault 115X | C  9 | NH3 | NH3 | 2008-12-21 00:00:00 | 32 ppm NH3 | 40 ppm | audible in the area, [NAME]
67 | MST 16 | Gas Vault 115X | C 43 | NH3 | NH3 | 2008-12-21 00:00:00 | 32 ppm NH3 | 36 ppm | audible in the area, [NAME]
68 | MST 17 | Gas Vault 115X | C 54B | NH3 | NH3 | 2008-12-21 00:00:00 | 32 ppm NH3 | 42 ppm | audible in the area, [NAME]
69 | MST 19 | Gas Vault 115X | C 51 | B2H6 | B2H6 | 2008-12-21 00:00:00 | 410 ppb PH3 | 580 ppb B2H6 | audible in the area, [NAME]
70 | MST 20 | Gas Vault 115X | C 53A | PH3 | PH3 | 2008-12-21 00:00:00 | 410 ppb PH3 | 350 ppb | audible in the area, [NAME]
71 | MST 21 | Gas Vault 115X | C 53B | B2H6 | B2H6 | 2008-12-21 00:00:00 | 410 ppb PH3 | 640 ppb B2H6 | audible in the area, [NAME]
72 | MST 22 | Gas Vault 115X | C 59 | GeH4 | GeH4 | 2008-12-21 00:00:00 | 410 ppb PH3 | 1 ppm GeH4 | audible in the area, [NAME]
73 | MST 23 | Gas Vault 115X | C12-B | GeH4 | GeH4 | 2008-12-21 00:00:00 | 410 ppb PH3 | 1.1 ppm GeH4 | audible in the area, [NAME]
74 | MST 24 | Gas Vault 115X | C12-A | AsH3 | AsH3 | 2008-12-21 00:00:00 | 410 ppb PH3 | 440 ppb AsH3 | audible in the area, [NAME]
75 | MST 25 | Gas Vault 115X | C-3 | PH3 | PH3 | 2008-12-21 00:00:00 | 410 ppb PH3 | 350 ppb PH3 | audible in the area, [NAME]
76 | MST 26 | Gas Vault 115X | C 30 | GeH4 | GeH4 | 2008-12-21 00:00:00 | 410 ppb PH3 | 0.9 ppm GeH4 | audible in the area, [NAME]
77 | MST 27 | Gas Vault 115X | C31-A | B2H6 | B2H6 | 2008-12-21 00:00:00 | 410 ppb PH3 | 0.53 ppm B2H6 | audible in the area, [NAME]
78 | MST 28 | Gas Vault 115X | C-13 | PH3 | PH3 | 2008-12-21 00:00:00 | 410 ppb PH3 | 350 ppb PH3 | audible in the area, [NAME]
79 | MST 40 | Gas Vault 115X | Corridor | O2 | O2 | 2008-12-21 00:00:00 | 10% O2 | 0.097 | audible in the corridor
80 | MST 53 | Gas Vault 116 | C 10B | HBr | HBr | 2008-12-21 00:00:00 | 7.8 ppm HCl | 5 ppm HBr | audible, shut down C10-B, scaling problem
81 | MST  4 | Gas Vault 116 | C  39 | HCl | HCl | 2008-12-21 00:00:00 | 7.8 ppm HCl | 7.6 ppm | audible, shut down GC39 right side
82 | MST  5 | Gas Vault 116 | AMBIENT | HF | HF |  |  |  | see additional notes
83 | MST  6 | Gas Vault 116 | C  60 | HCl | HCl | 2008-12-21 00:00:00 | 7.8 ppm HCl | 13.6 ppm | audible, shut down C60
84 | MST  7 | Gas Vault 116 | C  62 | BCl3 | HCl | 2008-12-21 00:00:00 | 7.8 ppm HCl | 10.4 ppm | audible, no GC shutdown, GC not in use
85 | MST  8 | Gas Vault 116 | C  2 | HCL | HCL | 2008-12-21 00:00:00 | 7.8 ppm HCl | 22 ppm | audible, corroded sensor, GC shutdown
86 | MST 12 | Gas Vault 116 | C 10A | Cl2 | Cl2 | 2008-12-21 00:00:00 | 1.35 ppm Cl2 | 3.6 ppm | audible in the area
87 | MST 13 | Gas Vault 116 | C 58B | BCl3 | BCl3 | 2008-12-21 00:00:00 | 7.8 ppm HCl | 6.8 ppm | audible, shut down GC 58, scaling problem
88 | MST 71 | CIS  Clean Room | TEL | H2 | H2 | 2008-12-20 00:00:00 | 0.8% H2 | 0.0176 | audible in the area
89 | MST 72 | CIS  Clean Room | TEL | H2 | H2 | 2008-12-20 00:00:00 | 0.8% H2 | 0.016 | audible in the area
90 | MST 73 | CIS  Clean Room | PlasmaQuest 2 Ambient | H2 | H2 | 2008-12-20 00:00:00 | 2% H2 | 0.042 | no audible, label incorrect (73/74)
91 | MST 74 | CIS  Clean Room | PlasmaQuest 2 Tool | H2 | H2 | 2008-12-20 00:00:00 | 2% H2 | 0.045 | no audible, label incorrect (73/74)
92 | MST 75 | CIS  Clean Room | PlasmaQuest 2 Tool | Cl2 | Cl2 | 2008-12-20 00:00:00 | 1.35 ppm Cl2 | 3.4 ppm | no audible, not labeled
93 | MST 76 | CIS  Clean Room | PlasmaQuest 2 Ambient | Cl2 | Cl2 | 2008-12-20 00:00:00 | 1.35 ppm Cl2 | 3.6 ppm | audible in the area
94 | MST 77 | CIS  Clean Room | PlasmaQuest 2 Ambient | HCl | HCl | 2008-12-20 00:00:00 | 7.8 ppm HCl | 7.2 ppm | audible in the area
95 | MST 78 | CIS  Clean Room | PlasmaQuest 2 Tool | HCl | HCl | 2008-12-20 00:00:00 | 7.8 ppm HCl | 8,2 ppm | audible in the area