Spreadsheet: 863897d1711298453-splitting-the-content-of-one-cell-into-individual-cells-and-combining-cells-afterwards-all-unique-words-in-a-claim-set-excel-forum
Sheet: Sheet1

[EN] CLAIMS 1. An end-effector for handling a substrate, comprising: a base; a clamping body comprising an actuator configured to switch between a first position, wherein the substrate is fixed in position with respect to the clamping body, and a second position, wherein the substrate is released; a guidance mechanism connecting the clamping body to the base while allowing freedom of movement of the clamping body relative to the base within a predetermined range of motion; and a fixation mechanism for switching a connection between the clamping body and the base between a fixed position, wherein the clamping body is fixated relative to the base, and a free position, wherein the clamping body can move relative to the base. 2. The end-effector of claim 1, wherein the clamping body comprises at least one fixed finger and at least one actuating finger being provided with the actuator, wherein in the first position the substrate is fixed in position between ends of the at least one fixed finger and the actuator of the at least one actuating finger. 3. The end-effector of claim 1 or 2, wherein the guidance mechanism comprises at least one spring element, each spring element having one end connected to the base and an opposite end connected to the clamping body. 4. The end-effector of claim 3, wherein the at least one spring element comprises a leaf spring, or a bent piece of flexible material, such as spring steel or a similar material. 5. The end-effector of claims 3 or 4, wherein the ends of the at least one spring element are connected to the base and to the clamping body by one or more of an adhesive, welding, or soldering. 6. The end-effector of claims 3 to 5, wherein the at least one spring element has a shape allowing relative motion of its opposite ends in the horizontal plane (x, y) while preventing or at least limiting movement in the vertical direction (z). 7. The end-effector of any of the previous claims, wherein the predetermined range of motion allowed by the guidance mechanism includes lateral movement in the horizontal plane of +/- 5 mm, for instance about +/- 4 mm, for instance about +/- 3 mm, for instance about 2.5 mm, for instance about +/- 2 mm, for instance about +/- 1.5 mm, for instance about +/- 1 mm, for instance about +/- 500 |im, for instance about +/- 250 |im, for instance about +/- 200 |im, for instance about +/- 150 |im, for instance about +/- 100 |im, for instance about +/- 50 |im, for instance about +/- 20 |im, for instance about +/- 10 |im. 8. The end-effector of any of the previous claims, wherein the predetermined range of motion allowed by the guidance mechanism includes rotation 0, wherein 0 is in a range of +/- 5 degrees, for instance +/- 4 degrees, for instance +/- 3 degrees, for instance +/- 2 degrees, for instance +/- 1 degree, for instance +/- 0.5 degrees, for instance +/- 0.4 degrees, for instance +/- 0.3 degrees, for instance +/- 0.2 degrees, for instance +/- 0.1 degree. 9. The end effector of any of the previous claims, wherein the guidance mechanism is adapted to move the clamping body to a reference position with respect to the base when the fixation mechanism is in the free position. 10. The end-effector of any of the previous claims, wherein the fixation mechanism is connected to at least one vacuum line to control the fixation mechanism. 11. The end-effector of claim 10, wherein the at least one vacuum line comprises a first section included in the base, the first section being connected to a vacuum bridge having one or more openings connecting the first section in the base to a corresponding vacuum line section in the clamping body, the vacuum line section in the clamping body being connected to the actuator. 12. The end-effector of claim 11, the vacuum line section in the clamping body being provided with a check valve and/or a flow restrictor. 13. The end-effector of one of the previous claims, the actuator comprising a spring for pretensioning a gripper, the spring pushing the gripper outward in a position allowing engagement with an edge of the substrate. 14. A lithographic apparatus comprising the end-effector according to one of claims 1 to 13. 15. A method of using an end-effector for handling a substrate, the end-effector comprising: a base; a clamping body comprising an actuator configured to switch between a first position, wherein the substrate is fixed in position with respect to the clamping body, and a second position, wherein the substrate is released; a guidance mechanism connecting the clamping body to the base while allowing freedom of movement of the clamping body relative to the base within a predetermined range of motion; and a fixation mechanism for switching a connection between the clamping body and the base between a fixed position, wherein the clamping body is fixated relative to the base, and a free position, wherein the clamping body can move relative to the base, the method comprising the steps of: moving the clamping body in lateral direction covering a substrate; lowering the clamping body onto the substrate; switching the fixation mechanism to the free position; switching the actuator to the first position; switching the fixation mechanism to the fixed position; lifting the clamping body and the substrate and moving the clamping body to another location; switching the actuator to the second position; lifting the clamping body without the substrate. 16. The method of claim 15, wherein the step of switching the fixation mechanism to the fixed position includes decreasing a pressure in a first vacuum line below a first threshold Pthri ¦ 17. The method of claim 15 or 16, wherein the step of switching the fixation mechanism to the free position includes increasing a pressure in the first vacuum line to exceed a second threshold [NAME] 18. The method of one of claims 15 to 17, wherein the step of switching the actuator to the second position includes decreasing a pressure in a second vacuum line to below a third threshold Pthr3 and/or wherein the step of switching the actuator to the first position includes increasing a pressure in the second vacuum line to exceed a fourth threshold Pthr4- 19. The method of one of claims 15 to 18, comprising the step of projecting a patterned beam of radiation onto the substrate.
[EN] | CLAIMS | 1 | An | end-effector | for | handling | a | substrate | comprising | a | base | a | clamping | body | comprising | an | actuator | configured | to | switch | between | a | first | position | wherein | the | substrate | is | fixed | in | position | with | respect | to | the | clamping | body | and | a | second | position | wherein | the | substrate | is | released | a | guidance | mechanism | connecting | the | clamping | body | to | the | base | while | allowing | freedom | of | movement | of | the | clamping | body | relative | to | the | base | within | a | predetermined | range | of | motion | and | a | fixation | mechanism | for | switching | a | connection | between | the | clamping | body | and | the | base | between | a | fixed | position | wherein | the | clamping | body | is | fixated | relative | to | the | base | and | a | free | position | wherein | the | clamping | body | can | move | relative | to | the | base. | 2 | The | end-effector | of | claim | 1 | wherein | the | clamping | body | comprises | at | least | one | fixed | finger | and | at | least | one | actuating | finger | being | provided | with | the | actuator | wherein | in | the | first | position | the | substrate | is | fixed | in | position | between | ends | of | the | at | least | one | fixed | finger | and | the | actuator | of | the | at | least | one | actuating | finger. | 3 | The | end-effector | of | claim | 1 | or | 2 | wherein | the | guidance | mechanism | comprises | at | least | one | spring | element | each | spring | element | having | one | end | connected | to | the | base | and | an | opposite | end | connected | to | the | clamping | body. | 4 | The | end-effector | of | claim | 3 | wherein | the | at | least | one | spring | element | comprises | a | leaf | spring | or | a | bent | piece | of | flexible | material | such | as | spring | steel | or | a | similar | material. | 5 | The | end-effector | of | claims | 3 | or | 4 | wherein | the | ends | of | the | at | least | one | spring | element | are | connected | to | the | base | and | to | the | clamping | body | by | one | or | more | of | an | adhesive | welding | or | soldering. | 6 | The | end-effector | of | claims | 3 | to | 5 | wherein | the | at | least | one | spring | element | has | a | shape | allowing | relative | motion | of | its | opposite | ends | in | the | horizontal | plane | (x | y) | while | preventing | or | at | least | limiting | movement | in | the | vertical | direction | (z). | 7 | The | end-effector | of | any | of | the | previous | claims | wherein | the | predetermined | range | of | motion | allowed | by | the | guidance | mechanism | includes | lateral | movement | in | the | horizontal | plane | of | +/- | 5 | [NAME] | for | instance | about | +/- | 4 | [NAME] | for | instance | about | +/- | 3 | [NAME] | for | instance | about | 2.5 | [NAME] | for | instance | about | +/- | 2 | [NAME] | for | instance | about | +/- | 1.5 | [NAME] | for | instance | about | +/- | 1 | [NAME] | for | instance | about | +/- | 500 | |im | for | instance | about | +/- | 250 | |im | for | instance | about | +/- | 200 | |im | for | instance | about | +/- | 150 | |im | for | instance | about | +/- | 100 | |im | for | instance | about | +/- | 50 | |im | for | instance | about | +/- | 20 | |im | for | instance | about | +/- | 10 | |im. | 8 | The | end-effector | of | any | of | the | previous | claims | wherein | the | predetermined | range | of | motion | allowed | by | the | guidance | mechanism | includes | rotation | 0 | wherein | 0 | is | in | a | range | of | +/- | 5 | degrees | for | instance | +/- | 4 | degrees | for | instance | +/- | 3 | degrees | for | instance | +/- | 2 | degrees | for | instance | +/- | 1 | degree | for | instance | +/- | 0.5 | degrees | for | instance | +/- | 0.4 | degrees | for | instance | +/- | 0.3 | degrees | for | instance | +/- | 0.2 | degrees | for | instance | +/- | 0.1 | degree. | 9 | The | end | effector | of | any | of | the | previous | claims | wherein | the | guidance | mechanism | is | adapted | to | move | the | clamping | body | to | a | reference | position | with | respect | to | the | base | when | the | fixation | mechanism | is | in | the | free | position. | 10 | The | end-effector | of | any | of | the | previous | claims | wherein | the | fixation | mechanism | is | connected | to | at | least | one | [NAME] | line | to | control | the | fixation | mechanism. | 11 | The | end-effector | of | claim | 10 | wherein | the | at | least | one | [NAME] | line | comprises | a | first | section | included | in | the | base | the | first | section | being | connected | to | a | [NAME] | bridge | having | one | or | more | openings | connecting | the | first | section | in | the | base | to | a | corresponding | [NAME] | line | section | in | the | clamping | body | the | [NAME] | line | section | in | the | clamping | body | being | connected | to | the | actuator. | 12 | The | end-effector | of | claim | 11 | the | [NAME] | line | section | in | the | clamping | body | being | provided | with | a | check | valve | and/or | a | flow | restrictor. | 13 | The | end-effector | of | one | of | the | previous | claims | the | actuator | comprising | a | spring | for | pretensioning | a | gripper | the | spring | pushing | the | gripper | [NAME] | in | a | position | allowing | engagement | with | an | edge | of | the | substrate. | 14 | A | lithographic | apparatus | comprising | the | end-effector | according | to | one | of | claims | 1 | to | 13 | 15 | A | method | of | using | an | end-effector | for | handling | a | substrate | the | end-effector | comprising | a | base | a | clamping | body | comprising | an | actuator | configured | to | switch | between | a | first | position | wherein | the | substrate | is | fixed | in | position | with | respect | to | the | clamping | body | and | a | second | position | wherein | the | substrate | is | released | a | guidance | mechanism | connecting | the | clamping | body | to | the | base | while | allowing | freedom | of | movement | of | the | clamping | body | relative | to | the | base | within | a | predetermined | range | of | motion | and | a | fixation | mechanism | for | switching | a | connection | between | the | clamping | body | and | the | base | between | a | fixed | position | wherein | the | clamping | body | is | fixated | relative | to | the | base | and | a | free | position | wherein | the | clamping | body | can | move | relative | to | the | base | the | method | comprising | the | steps | of | moving | the | clamping | body | in | lateral | direction | covering | a | substrate | lowering | the | clamping | body | onto | the | substrate | switching | the | fixation | mechanism | to | the | free | position | switching | the | actuator | to | the | first | position | switching | the | fixation | mechanism | to | the | fixed | position | lifting | the | clamping | body | and | the | substrate | and | moving | the | clamping | body | to | another | location | switching | the | actuator | to | the | second | position | lifting | the | clamping | body | without | the | substrate. | 16 | The | method | of | claim | 15 | wherein | the | step | of | switching | the | fixation | mechanism | to | the | fixed | position | includes | decreasing | a | pressure | in | a | first | [NAME] | line | below | a | first | threshold | Pthri | [NAME] | 17 | The | method | of | claim | 15 | or | 16 | wherein | the | step | of | switching | the | fixation | mechanism | to | the | free | position | includes | increasing | a | pressure | in | the | first | [NAME] | line | to | exceed | a | second | threshold | Pthi-2- | 18 | The | method | of | one | of | claims | 15 | to | 17 | wherein | the | step | of | switching | the | actuator | to | the | second | position | includes | decreasing | a | pressure | in | a | second | [NAME] | line | to | below | a | third | threshold | Pthr3 | and/or | wherein | the | step | of | switching | the | actuator | to | the | first | position | includes | increasing | a | pressure | in | the | second | [NAME] | line | to | exceed | a | fourth | threshold | Pthr4- | 19 | The | method | of | one | of | claims | 15 | to | 18 | comprising | the | step | of | projecting | a | patterned | beam | of | radiation | onto | the | substrate.
end-effector |  |  |  |  |  | Before |  | After |  |  | How to get words like
for |  |  |  |  |  | a |  | ( |  |  | clamping body
handling |  |  |  |  |  | an |  | allowing |  |  | guidance mechanism
a |  |  |  |  |  | as |  | and |  |  | free position
substrate |  |  |  |  |  | its |  | are
comprising |  |  |  |  |  | one |  | by |  |  | as such in the selection?
base |  |  |  |  |  | the |  | can |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  | a clamping
clamping |  |  |  |  |  |  |  | comprises |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  | body comprising
body |  |  |  |  |  |  |  | comprising
actuator |  |  |  |  |  |  |  | configured
configured |  |  |  |  |  |  |  | connected
to |  |  |  |  |  |  |  | each
switch |  |  |  |  |  |  |  | for
between |  |  |  |  |  |  |  | in
first |  |  |  |  |  |  |  | includes
position |  |  |  |  |  |  |  | is
wherein |  |  |  |  |  |  |  | of
the |  |  |  |  |  |  |  | or
is |  |  |  |  |  |  |  | to
fixed |  |  |  |  |  |  |  | wherein
in |  |  |  |  |  |  |  | while
with |  |  |  |  |  |  |  | .
respect
and
second
released
guidance
mechanism
connecting
while
allowing
freedom
of
movement
relative
within
predetermined
range
motion
fixation
switching
connection
fixated
free
can
move
base.
2
claim
1
comprises
at
least
one
finger
actuating
being
provided
ends
finger.
3
or
spring
element
each
having
end
connected
opposite
body.
4
leaf
bent
piece
flexible
material
such
as
steel
similar
material.
5
claims
are
by
more
adhesive
welding
soldering.
6
has
shape
its
horizontal
plane
(x
y)
preventing
limiting
vertical
direction
(z).
7
any
previous
allowed
includes
lateral
+/-
[NAME]
instance
about
2.5
1.5
500
|im
250
200
150
100
50
20
10
|im.
8
rotation
0
degrees
degree
0.5
0.4
0.3
0.2
0.1
degree.
9
effector
adapted
reference
when
position.
[NAME]
line
control
mechanism.
11
section
included
bridge
openings
corresponding
actuator.
12
check
valve
and/or
flow
restrictor.
13
pretensioning
gripper
pushing
[NAME]
engagement
edge
substrate.
14
lithographic
apparatus
according
15
method
using
steps
moving
covering
lowering
onto
lifting
another
location
without
16
step
decreasing
pressure
below
threshold
Pthri
[NAME]
17
increasing
exceed
Pthi-2-
18
third
Pthr3
fourth
Pthr4-
19
projecting
patterned
beam
radiation