Spreadsheet: abb2d8be-ccd5-4a57-85e1-ed3cbaf0bc11
Sheet: Sheet1

Unnamed: 0 | SVG Coater and [NAME] Use Only | Unnamed: 2 | Unnamed: 3 | Unnamed: 4 | Unnamed: 5 | Unnamed: 6 | Unnamed: 7 | Unnamed: 8 | Unnamed: 9 | Unnamed: 10
 | Week of June 14 - June 18, 2010
 |  | 1um | 1.6um | 7um | 1um | 1.6um | 3um | 1um | 1.6um | 3um
SVG                         Coater | Date (Coat)
 | Track | 1 | 1 | 1 | 2 | 2 | 2 | 2 | 2 | 2
 | Prime Program | Yes Oven | Yes Oven | Yes Oven | Yes Oven | Yes Oven | Yes Oven | Yes Oven | Yes Oven | Yes Oven
 | Coat Program | 7 | 8 | 4 | 7 | 8 | 4 | 7 | 8 | 4
 | Oven Program | 1 | 2 | 3 | 1 | 2 | 3 | 1 | 2 | 3
 | Problems
Thickness Measurements                                (NanoSpec) | Date (Measurement) | 2010-06-15 00:00:00 | 2010-06-15 00:00:00 | 2010-06-15 00:00:00 | 2010-06-15 00:00:00 | 2010-06-15 00:00:00 | 2010-06-15 00:00:00 | 2010-06-15 00:00:00 | 2010-06-15 00:00:00 | 2010-06-15 00:00:00
 | Top (A) | 10209 | 16891 | 70546 | 10227 | 17096 | 29956 | - | - | -
 | Center (A) | 10168 | 16872 | 70619 | 10195 | 17080 | 29847 | - | - | -
 | Flat (A) | 10190 | 16891 | 70716 | 10230 | 17131 | 29920 | - | - | -
 | Left  (A) | 10206 | 16860 | 70658 | 10217 | 17121 | 29813 | - | - | -
 | Right (A) | 10201 | 16873 | 70700 | 10255 | 17130 | 29925 | - | - | -
 | Average (A) | 10194.8 | 16877.4 | 70647.8 | 10224.8 | 17111.6 | 29892.2 | - | - | -
 | [NAME]  (A) | 16.63430190909676 | 13.42758355073321 | 68.32422703411481 | 21.75316068995447 | 22.6119437468768 | 59.6548405416332 | - | - | -
 | Comments
Exposure | Date (Exposure) | 2010-06-15 00:00:00 | 2010-06-15 00:00:00 | 2010-06-15 00:00:00 | 2010-06-15 00:00:00 | 2010-06-15 00:00:00 | 2010-06-15 00:00:00 | 2010-06-15 00:00:00 | 2010-06-15 00:00:00 | 2010-06-15 00:00:00
 | Tool | [NAME] | [NAME] | [NAME] | [NAME] | [NAME] | [NAME] | EValign | EValign | EValign
 | Contact Type | Vac. | Vac. | Vac. | Vac. | Vac. |  | Hard | Hard | Hard
 | Exposure Time | 1 | 1.6 | 3.2 x2 | 1 | 1.6 |  | 1.2 | 1.7 | 3.1
 | Problems
SVG                            Developer | Date (Develop) | 2010-06-15 00:00:00 | 2010-06-15 00:00:00 | 2010-06-15 00:00:00 | 2010-06-15 00:00:00 | 2010-06-15 00:00:00 | 2010-06-15 00:00:00 | 2010-06-15 00:00:00 | 2010-06-15 00:00:00 | 2010-06-15 00:00:00
 | Track | 2 | 2 | 2 | 1 | 1 |  | 1 | 1 | 1
 | Pre-bake Program | 1 | 2 | none | 1 | 2 |  | 1 | 2 | none
 | Develop Program | 3 | 4 | 6 | 3 | 4 |  | 3 | 4 | 7
 | Post-base Program | 1 | 2 | none | 1 | 2 |  | 1 | 2 | none
 | Problems
Resolution                         Measurements                         (Dark Field) | Date (Measurement) | 2010-06-15 00:00:00 | 2010-06-15 00:00:00 | 2010-06-15 00:00:00 | 2010-06-15 00:00:00 | 2010-06-15 00:00:00 | 2010-06-15 00:00:00 | 2010-06-15 00:00:00 | 2010-06-15 00:00:00 | 2010-06-15 00:00:00
 | Top (H/V) (um) | 1 | 1.5 | 2 | 1.5 | 1.5 |  | 1.5 | 1.5 | 1.5
 | Center (H/V) (um) | 1 | 1.5 | 2.5 | 1.5 | 1 |  | 1.5 | 1.5 | 1.5
 | Flat (H/V) (um) | 1.5 | 1.5 | 2 | 1.5 | 1.5 |  | 1.5 | 1.5 | 1.5
 | Left (H/V) (um) | 1.5 | 1.5 | 2 | 1.5 | 1.5 |  | 2 | 2 | 1.5
 | Right (H/V) (um) | 1.5 | 1 | 2 | 1.5 | 1.5 |  | 1.5 | 2 | 1.5
 | Comments
Resolution                         Measurements                         (Light Field) | Date (Measurement) | 2010-06-15 00:00:00 | 2010-06-15 00:00:00 | 2010-06-15 00:00:00 | 2010-06-15 00:00:00 | 2010-06-15 00:00:00 | 2010-06-15 00:00:00 | 2010-06-15 00:00:00 | 2010-06-15 00:00:00 | 2010-06-15 00:00:00
 | Top (H/V) (um) | 1 | 1 | 2 | 1.5 | 2 |  | 1 | 1 | 1.5
 | Center (H/V) (um) | 1 | 1.5 | 2 | 1 | 1.5 |  | 1 | 1 | 1.5
 | Flat (H/V) (um) | 1.5 | 1.5 | 2.5 | 1.5 | 1.5 |  | 1.5 | 1.5 | 2
 | Left (H/V) (um) | 1.5 | 1 | 2 | 1 | 1 |  | 2 | 1.5 | 1.5
 | Right (H/V) (um) | 1.5 | 1.5 | 2 | 1.5 | 1 |  | 1.5 | 2 | 2
 | Comments