Spreadsheet: 1bffa812-b505-4b87-875f-e2ba684a42fc
Sheet: Sheet1

Unnamed: 0 | SVG Coater and [NAME] Use Only | Unnamed: 2 | Unnamed: 3 | Unnamed: 4 | Unnamed: 5 | Unnamed: 6 | Unnamed: 7 | Unnamed: 8 | Unnamed: 9 | Unnamed: 10
 | Week of Jan 17 - Jan 21, 2011
 |  | 1um | 1um | 1.6um | 1.6um | 1um | 1.6um | 1.6um | 1.6um | 3um
SVG                         Coater | Date (Coat) | 2011-01-17 00:00:00 | 2011-01-17 00:00:00 | 2011-01-17 00:00:00 | 2011-01-17 00:00:00 | 2011-01-17 00:00:00 | 2011-01-17 00:00:00 | 2011-01-17 00:00:00
 | Track | 1 | 1 | 1 | 1 | 2 | 2 | 2
 | Prime Program | Yes Oven | Yes Oven | Yes Oven | Yes Oven | Yes Oven | Yes Oven | Yes Oven
 | Coat Program | 7 | 8 | 7 | 8 | 7 | 8 | 8
 | Oven Program | 1 | 2 | 1 | 2 | 1 | 2 | 2
 | Problems
Thickness Measurements                                (NanoSpec) | Date (Measurement) | 2011-01-17 00:00:00 | 2011-01-17 00:00:00 | 2011-01-17 00:00:00 | 2011-01-17 00:00:00 | 2011-01-17 00:00:00 | 2011-01-17 00:00:00 | 2011-01-17 00:00:00
 | Top (A) | 10125 | 10121 | 16722 | 16802 | 10202 | 16842 | 16838 |  | -
 | Center (A) | 10090 | 10087 | 16679 | 16727 | 10153 | 16836 | 16885 |  | -
 | Flat (A) | 10110 | 10108 | 16715 | 16743 | 10196 | 16853 | 16887 |  | -
 | Left  (A) | 10107 | 10105 | 16696 | 16741 | 10196 | 16830 | 16892 |  | -
 | Right (A) | 10121 | 10131 | 16697 | 16758 | 10202 | 16849 | 16875 |  | -
 | Average (A) | 10110.6 | 10110.4 | 16701.8 | 16754.2 | 10189.8 | 16842 | 16875.4 |  | -
 | [NAME]  (A) | 13.72224471422295 | 16.72722331999605 | 17.02057578309497 | 28.89117512300389 | 20.78942038641242 | 9.354143466934854 | 21.80137610362981 |  | -
 | Comments
Exposure | Date (Exposure) | 2011-01-17 00:00:00 | 2011-01-17 00:00:00 | 2011-01-17 00:00:00 | 2011-01-17 00:00:00 | 2011-01-17 00:00:00 | 2011-01-17 00:00:00 | 2011-01-17 00:00:00
 | Tool | Ks1 | Ks1 | Ks1 | Ks1 | Ks1 | Ks1 | Ks1
 | Contact Type | Vac | Vac | Vac | Vac | Vac | Vac | Vac
 | Exposure Time | 0.9 | 1 | 1.5 | 1.6 | 0.9 | 1.5 | 1.6
 | Problems
SVG                            Developer | Date (Develop) | 2011-01-17 00:00:00 | 2011-01-17 00:00:00 | 2011-01-17 00:00:00 | 2011-01-17 00:00:00 | 2011-01-17 00:00:00 | 2011-01-17 00:00:00 | 2011-01-17 00:00:00
 | Track | 1 | 2 | 1 | 2 | 1 | 2 | 2
 | Pre-bake Program | 1 | 3 | 1 | 3 | 1 | 3 | 3
 | Develop Program | 3 | 4 | 3 | 4 | 3 | 4 | 4
 | Post-base Program | 1 | 2 | 1 | 2 | 1 | 2 | 2
 | Problems
Resolution                         Measurements                         (Dark Field) | Date (Measurement) | 2011-01-17 00:00:00 | 2011-01-17 00:00:00 | 2011-01-17 00:00:00 | 2011-01-17 00:00:00 | 2011-01-17 00:00:00 | 2011-01-17 00:00:00 | 2011-01-17 00:00:00
 | Top (H/V) (um) | 1 | 1 | 1 | 1 | 1 | 1 | 1.5
 | Center (H/V) (um) | 1 | 1 | 1 | 1.5 | 1 | 1 | 1.5
 | Flat (H/V) (um) | 1 | 1 | 1.5 | 1.5 | 1 | 1.5 | 1.5
 | Left (H/V) (um) | 1 | 1 | 1.5 | 1.5 | 1 | 1.5 | 1.5
 | Right (H/V) (um) | 1 | 1 | 1 | 1.5 | 1 | 1.5 | 1.5
 | Comments
Resolution                         Measurements                         (Light Field) | Date (Measurement) | 2011-01-17 00:00:00 | 2011-01-17 00:00:00 | 2011-01-17 00:00:00 | 2011-01-17 00:00:00 | 2011-01-17 00:00:00 | 2011-01-17 00:00:00 | 2011-01-17 00:00:00
 | Top (H/V) (um) | 1.5 | 1-1.5 | 2 | 1.5 | 1.5 | 2 | 1.5
 | Center (H/V) (um) | 1.5 | 1.5 | 1.5 | 1.5 | 1-1.5 | 1.5 | 2
 | Flat (H/V) (um) | 1-1.5 | 1.5 | 1-1.5 | 1.5 | 1-1.5 | 1.5 | 1.5
 | Left (H/V) (um) | 1.5 | 1.5 | 1-1.5 | 1.5 | 1-1.5 | 1.5 | 1.5
 | Right (H/V) (um) | 1-1.5 | 1 | 1.5 | 1.5 | 1-1.5 | 1.5 | 1.5
 | Comments