Please read the following table in HTML format from a webpage and then answer the question in detail according to the table. Each table cell is defined by a <td> and a </td> tag. Each table row starts with a <tr> and ends with a </tr> tag. 'rowspan=m' and 'colspan=n' represents a cell spaning over 'm' rows and 'n' columns.

Webpage title:
Cobalt RaQ
Table title:
Server specifications
Table:
<table id='hittask' contenteditable='False'>
<tr> <th colspan=1 rowspan=1 > Model </th><th colspan=1 rowspan=1 > CPU type </th><th colspan=1 rowspan=1 > Default CPU Speed </th></tr>
<tr> <th colspan=1 rowspan=1 > Cobalt RaQ </th><td class="highlighted"  colspan=1 rowspan=1 > RM5230 </td><td colspan=1 rowspan=1 > 150 MHz </td></tr>
<tr> <th colspan=1 rowspan=1 > Cobalt RaQ 2 </th><td class="highlighted"  colspan=1 rowspan=1 > RM5231 </td><td colspan=1 rowspan=1 > 250 MHz </td></tr>
<tr> <th colspan=1 rowspan=1 > Cobalt RaQ 3 </th><td class="highlighted"  colspan=1 rowspan=1 > AMD K6-2 </td><td colspan=1 rowspan=1 > 300 MHz </td></tr>
<tr> <th colspan=1 rowspan=1 > Cobalt RaQ 4 </th><td colspan=1 rowspan=1 > AMD K6 3D </td><td colspan=1 rowspan=1 > 450 MHz </td></tr>
<tr> <th colspan=1 rowspan=1 > Cobalt RaQ XTR </th><td class="highlighted"  colspan=1 rowspan=1 > Intel Pentium III </td><td colspan=1 rowspan=1 > 733 MHz or 933 MHz (original release) 850 MHz or 1 GHz (re-release) </td></tr>
<tr> <th colspan=1 rowspan=1 > Cobalt RaQ 550 </th><td class="highlighted"  colspan=1 rowspan=1 > Intel Pentium III </td><td colspan=1 rowspan=1 > 1 GHz or 1.26 GHz </td></tr>
</table>
Question:
The RaQ systems were equipped with RM5230 or RM5231 CPUs but later models used AMD K6-2 chips and which CPUs were used for the final models?
Answer:
The RaQ systems were equipped with RM5230 or RM5231 CPUs but later models used AMD K6-2 chips and then Intel Pentium III CPUs for the final models.