Problem: Zero AND Subsets

Given a multiset of nonnegative integers a_1, a_2, .., a_N.

How many non-empty subsets of this set have a value bitwiseAND of 0?

Find the remainder of the answer divided by 10 ^ 9 + 7.

input


N
a_1 a_2 ... a_N


output

Divide the answer by 10 ^ 9 + 7 and output the remainder.

Constraint

* 1 \ leq N \ leq 10 ^ 5
* 0 \ leq a_i \ leq 2 ^ {20} -1



Input example


6
8 6 9 1 2 1


Output example


51






Example

Input

6
8 6 9 1 2 1


Output

51

Solution (in CPP):

Solution:
#include<bits/stdc++.h>
using namespace std;
using Int = long long;
template<typename T1,typename T2> inline void chmin(T1 &a,T2 b){if(a>b) a=b;}
template<typename T1,typename T2> inline void chmax(T1 &a,T2 b){if(a<b) a=b;}


struct FastIO{
  FastIO(){
    cin.tie(0);
    ios::sync_with_stdio(0);
  }
}fastio_beet;


template<typename T,T MOD = 1000000007>
struct Mint{
  static constexpr T mod = MOD;
  T v;
  Mint():v(0){}
  Mint(signed v):v(v){}
  Mint(long long t){v=t%MOD;if(v<0) v+=MOD;}

  Mint pow(long long k){
    Mint res(1),tmp(v);
    while(k){
      if(k&1) res*=tmp;
      tmp*=tmp;
      k>>=1;
    }
    return res;
  }

  static Mint add_identity(){return Mint(0);}
  static Mint mul_identity(){return Mint(1);}

  Mint inv(){return pow(MOD-2);}

  Mint& operator+=(Mint a){v+=a.v;if(v>=MOD)v-=MOD;return *this;}
  Mint& operator-=(Mint a){v+=MOD-a.v;if(v>=MOD)v-=MOD;return *this;}
  Mint& operator*=(Mint a){v=1LL*v*a.v%MOD;return *this;}
  Mint& operator/=(Mint a){return (*this)*=a.inv();}

  Mint operator+(Mint a) const{return Mint(v)+=a;}
  Mint operator-(Mint a) const{return Mint(v)-=a;}
  Mint operator*(Mint a) const{return Mint(v)*=a;}
  Mint operator/(Mint a) const{return Mint(v)/=a;}

  Mint operator-() const{return v?Mint(MOD-v):Mint(v);}

  bool operator==(const Mint a)const{return v==a.v;}
  bool operator!=(const Mint a)const{return v!=a.v;}
  bool operator <(const Mint a)const{return v <a.v;}

  static Mint comb(long long n,Int k){
    Mint num(1),dom(1);
    for(Int i=0;i<k;i++){
      num*=Mint(n-i);
      dom*=Mint(i+1);
    }
    return num/dom;
  }
};
template<typename T,T MOD> constexpr T Mint<T, MOD>::mod;
template<typename T,T MOD>
ostream& operator<<(ostream &os,Mint<T, MOD> m){os<<m.v;return os;}

//INSERT ABOVE HERE
signed main(){
  Int n;
  cin>>n;
  vector<Int> as(n);
  for(Int i=0;i<n;i++) cin>>as[i];

  const Int m=20;
  Int sz=1<<m;

  vector<Int> cnt(sz,0);
  for(Int a:as) cnt[a]++;

  for(Int i=0;i<m;i++)
    for(Int b=0;b<sz;b++)
      if((~b>>i)&1) cnt[b]+=cnt[b|(1<<i)];

  using M = Mint<Int>;
  M ans{0};
  for(Int b=0;b<sz;b++){
    if(__builtin_parity(b)) ans-=M(2).pow(cnt[b]);
    else ans+=M(2).pow(cnt[b]);
  }
  cout<<ans<<endl;
  return 0;
}