Problem: Jzzhu have n non-negative integers a1, a2, ..., an. We will call a sequence of indexes i1, i2, ..., ik (1 ≤ i1 < i2 < ... < ik ≤ n) a group of size k. 

Jzzhu wonders, how many groups exists such that ai1 & ai2 & ... & aik = 0 (1 ≤ k ≤ n)? Help him and print this number modulo 1000000007 (109 + 7). Operation x & y denotes bitwise AND operation of two numbers.

Input

The first line contains a single integer n (1 ≤ n ≤ 106). The second line contains n integers a1, a2, ..., an (0 ≤ ai ≤ 106).

Output

Output a single integer representing the number of required groups modulo 1000000007 (109 + 7).

Examples

Input

3
2 3 3


Output

0


Input

4
0 1 2 3


Output

10


Input

6
5 2 0 5 2 1


Output

53

Solution (in JAVA):

Solution:
import java.math.BigInteger;
import java.util.*;
import java.io.*;
import java.text.*;
public class Main{
    //SOLUTION BEGIN
    //Into the Hardware Mode
    void pre() throws Exception{}
    void solve(int TC) throws Exception{
        int n = ni(), B = 20;
        long[] a = new long[1<<B];
        long MOD = (long)1e9+7;
        for(int i = 0; i< n; i++)a[ni()]++;
        for(int b = 0; b< B; b++)
            for(int i = 0; i< 1<<B; i++)
                if(((i>>b)&1)==1)
                    a[i^(1<<b)] += a[i];
        long ans = 0;
        for(int i = 0; i< a.length; i++)ans = (ans+MOD+(bit(i)%2 == 0?1:-1)*pow(2, a[i], MOD))%MOD;
        pn(ans);
    }
    long pow(long a, long p, long MOD){
        long o = 1;
        for(;p>0;p>>=1){
            if((p&1)==1)o = (o*a)%MOD;
            a = (a*a)%MOD;
        }
        return o;
    }
    //SOLUTION END
    void hold(boolean b)throws Exception{if(!b)throw new Exception("Hold right there, Sparky!");}
    void exit(boolean b){if(!b)System.exit(0);}
    //    long IINF = (long)1e15;
    final int INF = (int)1e9+2, MX = (int)2e6+5;
    DecimalFormat df = new DecimalFormat("0.00000000000");
    double PI = 3.141592653589793238462643383279502884197169399, eps = 1e-8;
    static boolean multipleTC = false, memory = false, fileIO = false;
    FastReader in;PrintWriter out;
    void run() throws Exception{
        long ct = System.currentTimeMillis();
        if (fileIO) {
            in = new FastReader("");
            out = new PrintWriter("");
        } else {
            in = new FastReader();
            out = new PrintWriter(System.out);
        }
        //Solution Credits: Taranpreet Singh
        int T = (multipleTC) ? ni() : 1;
        pre();
        for (int t = 1; t <= T; t++) solve(t);
        out.flush();
        out.close();
        System.err.println(System.currentTimeMillis() - ct);
    }
    public static void main(String[] args) throws Exception{
        if(memory)new Thread(null, new Runnable() {public void run(){try{new Main().run();}catch(Exception e){e.printStackTrace();}}}, "1", 1 << 28).start();
        else new Main().run();
    }
    int[][] make(int n, int[] from, int[] to, boolean f){
        int[][] g = new int[n][];int[]cnt = new int[n];
        for(int i:from)cnt[i]++;if(f)for(int i:to)cnt[i]++;
        for(int i = 0; i< n; i++)g[i] = new int[cnt[i]];
        for(int i = 0; i< from.length; i++){
            g[from[i]][--cnt[from[i]]] = to[i];
            if(f)g[to[i]][--cnt[to[i]]] = from[i];
        }
        return g;
    }
    int[][][] makeS(int n, int[] from, int[] to, boolean f){
        int[][][] g = new int[n][][];int[]cnt = new int[n];
        for(int i:from)cnt[i]++;if(f)for(int i:to)cnt[i]++;
        for(int i = 0; i< n; i++)g[i] = new int[cnt[i]][];
        for(int i = 0; i< from.length; i++){
            g[from[i]][--cnt[from[i]]] = new int[]{to[i], i};
            if(f)g[to[i]][--cnt[to[i]]] = new int[]{from[i], i};
        }
        return g;
    }
    int find(int[] set, int u){return set[u] = (set[u] == u?u:find(set, set[u]));}
    int digit(long s){int ans = 0;while(s>0){s/=10;ans++;}return ans;}
    long gcd(long a, long b){return (b==0)?a:gcd(b,a%b);}
    int gcd(int a, int b){return (b==0)?a:gcd(b,a%b);}
    int bit(long n){return (n==0)?0:(1+bit(n&(n-1)));}
    void p(Object o){out.print(o);}
    void pn(Object o){out.println(o);}
    void pni(Object o){out.println(o);out.flush();}
    String n()throws Exception{return in.next();}
    String nln()throws Exception{return in.nextLine();}
    int ni()throws Exception{return Integer.parseInt(in.next());}
    long nl()throws Exception{return Long.parseLong(in.next());}
    double nd()throws Exception{return Double.parseDouble(in.next());}

    class FastReader{
        BufferedReader br;
        StringTokenizer st;
        public FastReader(){
            br = new BufferedReader(new InputStreamReader(System.in));
        }

        public FastReader(String s) throws Exception{
            br = new BufferedReader(new FileReader(s));
        }

        String next() throws Exception{
            while (st == null || !st.hasMoreElements()){
                try{
                    st = new StringTokenizer(br.readLine());
                }catch (IOException  e){
                    throw new Exception(e.toString());
                }
            }
            return st.nextToken();
        }

        String nextLine() throws Exception{
            String str;
            try{
                str = br.readLine();
            }catch (IOException e){
                throw new Exception(e.toString());
            }
            return str;
        }
    }
}