Problem: Jzzhu have n non-negative integers a1, a2, ..., an. We will call a sequence of indexes i1, i2, ..., ik (1 ≤ i1 < i2 < ... < ik ≤ n) a group of size k. 

Jzzhu wonders, how many groups exists such that ai1 & ai2 & ... & aik = 0 (1 ≤ k ≤ n)? Help him and print this number modulo 1000000007 (109 + 7). Operation x & y denotes bitwise AND operation of two numbers.

Input

The first line contains a single integer n (1 ≤ n ≤ 106). The second line contains n integers a1, a2, ..., an (0 ≤ ai ≤ 106).

Output

Output a single integer representing the number of required groups modulo 1000000007 (109 + 7).

Examples

Input

3
2 3 3


Output

0


Input

4
0 1 2 3


Output

10


Input

6
5 2 0 5 2 1


Output

53

Solution (in JAVA):

Solution:
import java.io.OutputStream;
import java.io.IOException;
import java.io.InputStream;
import java.io.PrintWriter;
import java.io.FilterInputStream;
import java.io.BufferedInputStream;
import java.io.InputStream;

/**
 * @author khokharnikunj8
 */

public class Main {
    public static void main(String[] args) {
        new Thread(null, new Runnable() {
            public void run() {
                new Main().solve();
            }
        }, "1", 1 << 26).start();
    }

    void solve() {
        InputStream inputStream = System.in;
        OutputStream outputStream = System.out;
        ScanReader in = new ScanReader(inputStream);
        PrintWriter out = new PrintWriter(outputStream);
        DJzzhuAndNumbers solver = new DJzzhuAndNumbers();
        solver.solve(1, in, out);
        out.close();
    }

    static class DJzzhuAndNumbers {
        public void solve(int testNumber, ScanReader in, PrintWriter out) {
            int n = in.scanInt();
            int[] ar = new int[n];
            long[] dp = new long[(1 << 20) | 5];
            for (int i = 0; i < n; i++)
                dp[(ar[i] = in.scanInt())]++;
            for (int i = 0; i < 20; i++) {
                for (int j = 0; j < (1 << 20); j++) {
                    if (((1 << i) & j) != 0) dp[j ^ (1 << i)] += dp[j];
                }
            }

            long mod = (1000000007);
            long ans = 0;
            for (int i = 0; i < (1 << 20); i++) {
                if (Integer.bitCount(i) % 2 == 1) {
                    ans -= (CodeHash.pow(2, dp[i], mod));
                    if (ans < 0) ans += mod;
                    if (ans >= mod) ans -= mod;
                } else {
                    ans += (CodeHash.pow(2, dp[i], mod));
                    if (ans < 0) ans += mod;
                    if (ans >= mod) ans -= mod;
                }
            }
            out.println(ans);
        }

    }

    static class CodeHash {
        public static long pow(long a, long b, long m) {
            long res = 1;
            a %= m;
            while (b > 0) {
                if ((b & 1) == 1) res = (res * a) % m;
                a = (a * a) % m;
                b >>= 1;
            }
            return res;
        }

    }

    static class ScanReader {
        private byte[] buf = new byte[4 * 1024];
        private int index;
        private BufferedInputStream in;
        private int total;

        public ScanReader(InputStream inputStream) {
            in = new BufferedInputStream(inputStream);
        }

        private int scan() {
            if (index >= total) {
                index = 0;
                try {
                    total = in.read(buf);
                } catch (Exception e) {
                    e.printStackTrace();
                }
                if (total <= 0) return -1;
            }
            return buf[index++];
        }

        public int scanInt() {
            int integer = 0;
            int n = scan();
            while (isWhiteSpace(n)) n = scan();
            int neg = 1;
            if (n == '-') {
                neg = -1;
                n = scan();
            }
            while (!isWhiteSpace(n)) {
                if (n >= '0' && n <= '9') {
                    integer *= 10;
                    integer += n - '0';
                    n = scan();
                }
            }
            return neg * integer;
        }

        private boolean isWhiteSpace(int n) {
            if (n == ' ' || n == '\n' || n == '\r' || n == '\t' || n == -1) return true;
            else return false;
        }

    }
}