Problem: Jzzhu have n non-negative integers a1, a2, ..., an. We will call a sequence of indexes i1, i2, ..., ik (1 ≤ i1 < i2 < ... < ik ≤ n) a group of size k. 

Jzzhu wonders, how many groups exists such that ai1 & ai2 & ... & aik = 0 (1 ≤ k ≤ n)? Help him and print this number modulo 1000000007 (109 + 7). Operation x & y denotes bitwise AND operation of two numbers.

Input

The first line contains a single integer n (1 ≤ n ≤ 106). The second line contains n integers a1, a2, ..., an (0 ≤ ai ≤ 106).

Output

Output a single integer representing the number of required groups modulo 1000000007 (109 + 7).

Examples

Input

3
2 3 3


Output

0


Input

4
0 1 2 3


Output

10


Input

6
5 2 0 5 2 1


Output

53

Solution (in JAVA):

Solution:
//package round257;
import java.io.ByteArrayInputStream;
import java.io.IOException;
import java.io.InputStream;
import java.io.PrintWriter;
import java.util.Arrays;
import java.util.InputMismatchException;

public class D {
	InputStream is;
	PrintWriter out;
	String INPUT = "";
	int mod = 1000000007;
	
	void solve()
	{
		int n = ni();
		int[] a = na(n);
		int Q = 20;
		long[] f = new long[1<<Q];
		long[] fac = new long[21];
		fac[0] = 1;
		for(int v : a){
			f[v]++;
		}
		
		for(int i = 0;i < Q;i++){
			for(int j = 0;j < 1<<Q;j++){
				if(j<<31-i<0){
					int v = j^1<<i;
					f[v] += f[j];
				}
			}
		}
		tr(f);
		long ret = 0;
		for(int i = 0;i < 1<<Q;i++){
			long o = pow(2, f[i], mod)+mod-1;
			if(Integer.bitCount(i) % 2 == 1){
				ret += mod-o;
			}else{
				ret += o;
			}
		}
		out.println(ret%mod);
	}
	
	public static long pow(long a, long n, long mod) {
		//		a %= mod;
		long ret = 1;
		int x = 63 - Long.numberOfLeadingZeros(n);
		for(;x >= 0;x--){
			ret = ret * ret % mod;
			if(n << 63 - x < 0)
				ret = ret * a % mod;
		}
		return ret;
	}
	
	void run() throws Exception
	{
		is = oj ? System.in : new ByteArrayInputStream(INPUT.getBytes());
		out = new PrintWriter(System.out);
		
		long s = System.currentTimeMillis();
		solve();
		out.flush();
		tr(System.currentTimeMillis()-s+"ms");
	}
	
	public static void main(String[] args) throws Exception { new D().run(); }
	
	private byte[] inbuf = new byte[1024];
	private int lenbuf = 0, ptrbuf = 0;
	
	private int readByte()
	{
		if(lenbuf == -1)throw new InputMismatchException();
		if(ptrbuf >= lenbuf){
			ptrbuf = 0;
			try { lenbuf = is.read(inbuf); } catch (IOException e) { throw new InputMismatchException(); }
			if(lenbuf <= 0)return -1;
		}
		return inbuf[ptrbuf++];
	}
	
	private boolean isSpaceChar(int c) { return !(c >= 33 && c <= 126); }
	private int skip() { int b; while((b = readByte()) != -1 && isSpaceChar(b)); return b; }
	
	private double nd() { return Double.parseDouble(ns()); }
	private char nc() { return (char)skip(); }
	
	private String ns()
	{
		int b = skip();
		StringBuilder sb = new StringBuilder();
		while(!(isSpaceChar(b))){ // when nextLine, (isSpaceChar(b) && b != ' ')
			sb.appendCodePoint(b);
			b = readByte();
		}
		return sb.toString();
	}
	
	private char[] ns(int n)
	{
		char[] buf = new char[n];
		int b = skip(), p = 0;
		while(p < n && !(isSpaceChar(b))){
			buf[p++] = (char)b;
			b = readByte();
		}
		return n == p ? buf : Arrays.copyOf(buf, p);
	}
	
	private char[][] nm(int n, int m)
	{
		char[][] map = new char[n][];
		for(int i = 0;i < n;i++)map[i] = ns(m);
		return map;
	}
	
	private int[] na(int n)
	{
		int[] a = new int[n];
		for(int i = 0;i < n;i++)a[i] = ni();
		return a;
	}
	
	private int ni()
	{
		int num = 0, b;
		boolean minus = false;
		while((b = readByte()) != -1 && !((b >= '0' && b <= '9') || b == '-'));
		if(b == '-'){
			minus = true;
			b = readByte();
		}
		
		while(true){
			if(b >= '0' && b <= '9'){
				num = num * 10 + (b - '0');
			}else{
				return minus ? -num : num;
			}
			b = readByte();
		}
	}
	
	private long nl()
	{
		long num = 0;
		int b;
		boolean minus = false;
		while((b = readByte()) != -1 && !((b >= '0' && b <= '9') || b == '-'));
		if(b == '-'){
			minus = true;
			b = readByte();
		}
		
		while(true){
			if(b >= '0' && b <= '9'){
				num = num * 10 + (b - '0');
			}else{
				return minus ? -num : num;
			}
			b = readByte();
		}
	}
	
	private boolean oj = System.getProperty("ONLINE_JUDGE") != null;
	private void tr(Object... o) { if(!oj)System.out.println(Arrays.deepToString(o)); }
}