Search query: 3d silicon

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abstract: This paper investigates the opportunity and challenges of 3D silicon photonic electronic integrated circuits (3D EPICs) scaling to wafer scale and beyond. The continuing demand for more data and information is driving new computing, communications, imaging, and information processing at higher throughput and energy efficiency at lower manufacturing cost. The newly developed 3D silicon photonic devices including vertical U turns and vertical lightpipes enable through silicon optical vias (TSOVs) that can interconnect multiple layers of 2D silicon photonic electronic integrated circuits consistently with the industry's through silicon via (TSV) based 3D electronic integrated circuit manufacturing. Heterogeneous integration technology based on transfer printing allows wafer scale (or beyond wafer scale) heterogeneous integration of dissimilar materials (e.g. III V semiconductor layers) on silicon at room temperature and 3D ultrafast laser inscription technologies allow arbitrary optical interfaces for high density input/output between the 3D EPICs and many strands of multi core fibers (MCFs) We will discuss applications in neuromorphic computing, 3D LiDAR, photonic integrated interferometric telescopes, 3D fine grain memory, and 3D processor memory realized by large scale 3D EPICs.
author_names: Yuchuan Zhang

Anirban Samanta

Kuanping Shang

S J Ben Yoo
title: Scalable 3D Silicon Photonic Electronic Integrated Circuits and Their Applications
venue: IEEE Journal of Selected Topics in Quantum Electronics
year: 2020

abstract: Abstract A silicon 3D detector with a single cell of 50 x 50 m m2 was produced and evaluated for timing applications. The measurements of time resolution were performed for 90Sr electrons with dedicated electronics used also for determining time resolution of Low Gain Avalanche Detectors (LGADs) The measurements were compared to those with LGADs and also simulations. The studies showed that the dominant contribution to the timing resolution comes from the time walk originating from different induced current shapes for hits over the cell area. This contribution decreases with higher bias voltages, lower temperatures and smaller cell sizes. It is around 30 ps for a 3D detector of 50 x 50 m m2 cell at 150 V and 20 degC, which is comparable to the time walk due to Landau fluctuations in LGADs. It even improves for inclined tracks and larger pads composed of multiple cells. A good agreement between measurements and simulations was obtained, thus validating the simulation results.
author_names: David Flores

Salvador Hidalgo

Maria Manna

Igor Mandi'c

David Quirion

Giulio Pellegrini

Marko Zavrtanik
title: Timing performance of small cell 3D silicon detectors
venue: Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
year: 2019

abstract: Hierarchical three dimensional (3D) microstructures integrated with low dimensional nanomaterials can realize novel properties or improved performance. We report a unique conductive and highly ordered 3D silicon micro mesh structure, which is fabricated by standard lithography using a modified plasma etch process. Zinc oxide (ZnO) nanowires are then integrated with the micro mesh, and the density of ZnO nanowires (NWs) can be increased by around one order of magnitude compared with ZnO NWs on a 2D substrate. Owing to the high spatial density of ZnO NWs on the robust 3D silicon micro mesh structures, improved photocatalytic activity and stability can be achieved. A remarkable enhancement of photocurrent response is also observed. The ZnO can be converted into ZnS NWs and 2 ZnO@ZIF 8 as on the micromesh. This method is low cost and compatible with traditional complementary metal oxide semiconductor industries, and provides new possibilities for a wide range of devices based on micro nano electro mechanical and chemical systems.
author_names: Bingdong Chang

Yingying Tang

Mingli Liang

Henri V Jansen

Flemming Jensen

Bo Wang

Kristian Molhave

Jorg Hubner

Hongyu Sun
title: Highly Ordered 3D Silicon Micro Mesh Structures Integrated with Nanowire Arrays: A Multifunctional Platform for Photodegradation, Photocurrent Generation, and Materials Conversion
year: 2019

abstract: Design and manufacturing technology of 3D silicon photonic structures with optical interconnections through microchannel vias interposers were developed. Silicon chips placed over each other were separated by the silicon microchannel vias interposer served as a light waveguide. Light emitting diodes and photodiodes were formed at the inner surfaces of silicon chips from nanostructured silicon clusters embedded into alumina matrix. The developed structure is characterized by the current conversion efficiency of 0.1% and can operate in the GHz frequency range.
author_names: S K Lazarouk

A A Leshok

Tamara A Kozlova

A V Dolbik

Le Dinh Vi

V K Ilkov

Vladimir A Labunov
title: 3D Silicon Photonic Structures Based on Avalanche LED with Interconnections through Optical Interposer
venue: International Journal of Nanoscience
year: 2019

abstract: Abstract Graphite composite electrodes mixed with silicon are proposed as next generation anode material for high energy and high power applications. In order to overcome drawbacks caused by volume changes of silicon particles during electrochemical cycling and to maintain high specific capacities at enhanced C rates, free standing structures are generated on silicon/graphite electrodes by applying ultrafast laser ablation. Electrochemical properties are systematically investigated by means of galvanostatic measurements, cyclic voltammetry, and electrochemical impedance spectroscopy. Cells with structured electrodes exhibit improved battery performances and lithium ion transport kinetics in comparison to cells with unstructured electrodes. Furthermore, the cells with structured electrodes exhibit a lower impedance at fully lithiated state. After cycling, post mortem analysis is performed revealing that the mechanical stress within the electrodes and current collector can be significantly reduced due to laser generated free standing structures.
author_names: Yijing Zheng

Hans Juergen Seifert

Huifeng Shi

Yuefei Zhang

Christian Kubel

Wilhelm Pfleging
title: 3D silicon/graphite composite electrodes for high energy lithium ion batteries
venue: Electrochimica Acta
year: 2019

abstract: This paper presents a new version of the 3D mesa "bridge" microdosimeter comprised of an array of 4248 silicon cells fabricated on 10 um thick silicon on insulator substrate. This microdosimeter has been designed to overcome limitations existing in previous generation silicon microdosimeters and it provides well defined sensitive volumes and high spatial resolution. The charge collection characteristics of the new 3D mesa microdosimeter were investigated using the ANSTO heavy ion microprobe, utilizing 5.5 MeV He2+ ions. Measurement of microdosimetric quantities allowed for the determination of the Relative Biological Effectiveness of 290 MeV/u and 350 MeV/u 12C heavy ion therapy beams at the Heavy Ion Medical Accelerator in Chiba (HIMAC) Japan. The microdosimetric RBE obtained showed good agreement with the tissue equivalent proportional counter. Utilizing the high spatial resolution of the SOI microdosimeter, the LET spectra for 70 MeV 12C+6 ions, like those present at the distal edge of 290 and 350 MeV/u beams, were obtained as the ions passed through thin layers of polyethylene film. This microdosimeter can provide useful information about the lineal energy transfer (LET) spectra downstream of the protective layers used for shielding of electronic devices for single event upset prediction.
author_names: Linh T Tran

Lachlan Chartier

David Bolst

Dale A Prokopovich

Susanna Guatelli

Marco Petasecca

Michael L F Lerch

Mark I Reinhard

Vladimir L Perevertaylo

Michael Jackson

Naruhiro Matsufuji

D J Hinde

Mahananda Dasgupta

Andrew E Stuchbery

Anatoly B Rosenfeld
title: 3D silicon microdosimetry and RBE study using 12C ion of different energies
year: 2017

abstract: 3D silicon pixel detectors have been investigated as radiation hard candidates for the innermost layers of the HL LHC upgrade of the ATLAS pixel detector. 3D detectors are already in use today in the ATLAS IBL and AFP experiments. These are based on 50 x 250 mm2 large pixels connected to the FE I4 readout chip. Detectors of this generation were irradiated to HL LHC fluences and demonstrated excellent radiation hardness with operational voltages as low as 180 V and power dissipation of 12 15 mW/cm2 at a fluence of about 1016 neq/cm2, measured at 25degC. Moreover, to cope with the higher occupancies expected at the HL LHC, a first run of a new generation of 3D detectors designed for the HL LHC was produced at CNM with small pixel sizes of 50 x 50 and 25 x 100 mm2, matched to the FE I4 chip. They demonstrated a good performance in the laboratory and in beam tests with hit efficiencies of about 97% at already 1 2 V before irradiation.
author_names: J orn Christian Lange

M Carulla Areste

E Cavallaro

Fabian Forster

Sebastian Grinstein

I L'opez Paz

Maria Manna

Giulio Pellegrini

David Quirion

S Terzo

D V'azquez Furelos
title: 3D silicon pixel detectors for the High Luminosity LHC
year: 2016

abstract: Abstract Carbon nanotubes have attracted widespread attention as ideal materials for Lithium ion batteries (LIBs) due to their excellent conductivity, mechanical flexibility, chemical stability and extremely large surface area. Here, three dimensional (3D) silicon/carbon nanotube capsule composites (Si/CNCs) are firstly prepared via water in oil (W/O) emulsion technique with more than 75 wt% loading amount of silicon. CNCs with unique hollow sphere structure act as a 3D interconnected conductive network skeleton, and the cross linked carbon nanotubes (CNTs) of CNCs can effectively enhance the strength, flexibility and conductivity of the electrode. This Si/CNCs can not only alleviate the volume expansion, but also effectively improve the electrochemical performance of the LIBs. Such Si/CNCs electrode with the unique structure achieves a high initial discharge specific capacity of 2950 mAh g 1 and retains 1226 mAh g 1 after 100 cycles at 0.5 A g 1 as well as outstanding rate performance of 547 mAh g 1 at 10 A g 1
author_names: Xinyang Yue

Wang Sun

Jing Zhang

Fang Wang

Kening Sun
title: Facile synthesis of 3D silicon/carbon nanotube capsule composites as anodes for high performance lithium ion batteries
year: 2016

abstract: Abstract Herein, mesoporous 3D silicon carbide (SiC) carbonitride (Si C N) and nitride (Si3N4) structures have been synthesized by nanocasting and pyrolysis using commercial organosilicon polymers as precursors of the different compositions. Detailed characterizations by BET and XRD allowed us to fix the most appropriate parameters to design mesoporous 3D structures with high specific surface areas and high pore volume. Then, the series of 3D structures has been used as supports to grow platinum nanoparticles (Pt NPs) by wet impregnation followed by reduction in hydrogen/argon flow. The Pt supported mesoporous 3D supports kept the mesoporosity of the virgin supports to be used for catalytic hydrolysis of sodium borohydride (NaBH4) A hydrogen generation rate of 24.2 L min 1 gPt 1 is measured for the Pt supported mesoporous 3D Si3N4 structure, which is notably higher than the catalytic hydrolysis using Pt supported mesoporous 3D SiC and Si C N structures. HRTEM investigations demonstrated the homogeneous distribution of Pt NPs over the Si3N4 support.
author_names: Abhijeet Lale

Awin Wasan

Ravinder Kumar

Philippe Miele

Umit B Demirci

Samuel Bernard
title: Organosilicon polymer derived mesoporous 3D silicon carbide, carbonitride and nitride structures as platinum supports for hydrogen generation by hydrolysis of sodium borohydride
year: 2016

abstract: Abstract Herein, the three dimensional free standing nano silicon soft carbon embedded in graphene scaffold composite is prepared to boost the lithium storage property of the silicon anode. For the aspect of "single" the own volume expansion is relieved by the encapsulated soft carbon layer and the soft carbon layer can suppress the repeated formation of solid electrolyte interface films onto the "single" silicon nanoparticle (SNP) Moreover, the soft carbon layer possesses alternating amorphous and crystalline regions to provide the rapid lithium ion diffusion channel. On the side of "monolithic" the 3D free standing graphene scaffold loading with evenly distributed SNPs eliminates collisions between SNPs during the charging/discharging cycles, and endows the 'monolithic' electrode with excellent electronic conductivity, fast lithium ion diffusion pathway and high SNPs content. Thus, the above composite anode exhibits superior specific capacity, cycling performance and rate performance, such as around 2600 mA h g 1 (8.34 mA h cm 2) of specific capacity at a current density of 0.2 A/g and almost no capacity attenuation after 100 cycles. The design thinking (from 'single' to 'monolithic' paves a new avenue towards high performance anodes of silicon and transition metal oxides.
author_names: Feng-Xia Wang

Zhenglong Hu

Limin Mao

Jian Mao
title: Nano silicon soft carbon embedded in graphene scaffold: High performance 3D free standing anode for lithium ion batteries
year: 2020