Search query: Laser nano-manufacturing technology and applications towards optical functional nanostructures and devices

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abstract: The rapid development of nanotechnology, such as microelectromechanical systems (MEMS) microelectronics and nanophotonics, has led to the emerging attentions in achieving functional optoelectronic structures and/or metamaterials at micro and nanoscale resolution. Multiphoton absorption nanofabrication has demonstrated its great potential for applications in preparation of complex three dimensional (3D) nanostructures at micro and nanoscales. Here, we report new laser nano manufacturing approaches, multiphoton polymerization (MPP) and multiphoton photoreduction (MPR) to fabricate optical functional nanostructures. The luminescent nanostructures have been created by the in situ synthesis of semiconductor nanoparticles in a polymer matrix with fine size control and the MPP process. This represents the first successful fabrication of multicolor 3D microstructures of semiconductor polymer nanocomposites using a laser microstereolithography technique. Ultra thin chiral metasurfaces with giant broadband optical activity in the infrared wavelength have been realized. The chiral metasurfaces consisting of periodic hole arrays of complementary asymmetric split ring resonators (SRRs) are fabricated by MPP. Enhanced transmission with strong polarization conversion up to 97% is observed owing to the chiral surface plasmons from mirror symmetry broken. Furthermore, a planar electromagnetic metamaterial made of U shaped SRRs has been fabricated by the MPR in the aqueous solution of gold ions with the assistance of ionic liquid (IL) The measured spectra are consistent with theoretical predictions for the metamaterial fabricated by laser direct writing technique. The proposed laser nano manufacturing technique would open up new avenues for the fabrication and application of micro and nanoscale devices in photonics, electronics, and biotechnology.
author_names: Mei-Ling Zheng

Xuanming Duan
title: Laser nano manufacturing technology and applications towards optical functional nanostructures and devices
venue: 2015 Opto Electronics and Communications Conference (OECC)
year: 2015

abstract: Nanoconstruction of metals is a significant challenge for the future manufacturing of plasmonic devices. Such a technology requires the development of ultra fast, high throughput and low cost fabrication schemes. Laser processing can be considered as such and can potentially represent an unrivalled tool towards the anticipated arrival of modules based in metallic nanostructures, with an extra advantage: the ease of scalability. Specifically, laser nanostructuring of either thin metal films or ceramic/metal multilayers and composites can result on surface or subsurface plasmonic patterns, respectively, with many potential applications. In this chapter, the photo thermal processes involved in surface and subsurface nanostructuring are discussed and processes to develop functional plasmonic nanostructures with pre determined morphology are demonstrated. For the subsurface plasmonic conformations, the temperature gradients that are developed spatially across the metal/dielectric structure during the laser processing can be utilized. For the surface plasmonic nanoassembling, the ability to tune the laser's wavelength to either match the absorption spectral profile of the metal or to be resonant with the plasma oscillation frequency can be utilised, i.e. different optical absorption mechanisms that are size selective can be probed. Both processes can serve as a platform for stimulating further progress towards the engineering of large scale plasmonic devices.
author_names: Nikolaos Kalfagiannis

Demosthenes C Koutsogeorgis

Elefterios Lidorikis

Panos Patsalas
title: Chapter 18 Laser Annealing as a Platform for Plasmonic
year: 2019

abstract: Recently, we show a method of color printing on nanoimprinted plasmonic metasurfaces using laser post writing. Laser pulses induce transient local heat generation that leads to melting and reshaping of the imprinted nanostructures. Depending on the laser pulse energy density, different surface morphologies that support different plasmonic resonances can be created. This technology creates a laser printer capable of producing color images with a resolution up to 127,000 DPI. With tailored trains of laser pulses, multiple optical states are flatiron onto the metasurface film with a nanoscale controlling. Thus, this diffraction limited resolution optical writing process can be further used to demonstrate a variety of applications in addition to large area structural color printing. Multi focus Fresnel zone plates with subwavelength focus, and more meta surfaces different functions, such as spectroscope filters, Raman substrates and biosensors are also applicable.
author_names: X Zhu

Marcus S Carstensen

Christoph Vannahme

Emil Hojlund-Nielsen

Niels Asger Mortensen

Anders Kristensen
title: Plasmonic laser printing for functional metasurfaces
venue: 2016 Progress in Electromagnetic Research Symposium (PIERS)
year: 2016

abstract: Abstract Nanophotonics research relies heavily on state of the art and costly nano and microfabrication technologies. While such technologies are fairly mature, their implementation in large scale manufacturing of photonic devices is not straightforward. This is a major roadblock for integrating nanophotonic functionalities, such as flat optics or high definition, ink free color printing, into real life applications. In particular, optical metasurfaces nanoscale textured surfaces with engineered optical properties hold great potential for a myriad of such applications. Digital laser printing has recently been introduced as a low cost lithography solution, which allows the fabrication of high resolution features on optical substrates. By exploiting resonant opto thermal modification of individual nanoscale elements, laser printing can achieve nanometer sized resolution. In addition, the concept of digital resonant laser printing at the nanoscale supports mass customization and may therefore convert nanophotonic science into everyday consumer products.
author_names: Xiaolong Zhu

Mehdi Keshavarz Hedayati

Soren Raza

Uriel Levy

Niels Asger Mortensen

Anders Kristensen
title: Digital resonant laser printing: Bridging nanophotonic science and consumer products
year: 2017

abstract: Fabrication of plasmonic nanostructures has been an important topic for their potential applications in photonic and optoelectronic devices. Among plasmonic materials, gold is one of the most promising materials due to its low ohmic loss at optical frequencies and high oxidation resistance. However, there are two major bottlenecks for its industrial applications: (1) the need for large scale fabrication technology for high precision plasmonic nanostructures; and (2) the need to integrate the plasmonic nanostructures on various substrates. While conventional top down approaches involve high cost and give low throughput, bottom up approaches suffer from irreproducibility and low precision. Herein, we report laser shock induced direct imprinting of large area plasmonic nanostructures from physical vapor deposited (PVD) gold thin film on a flexible commercial free standing aluminum foil. Among the important characteristics of the laser shock direct imprinting is their unique capabilities to reproducibly deliver designer plasmonic nanostructures with extreme precision and in an ultrafast manner. Excellent size tunability (from several mm down to 15 nm) has been achieved by varying mold dimensions and laser parameters. The physical mechanism of the hybrid film imprinting is elaborated by finite element modeling. A mechanical robustness test of the hybrid film validates a significantly improved interfacial contact between gold arrays and the underlying substrate. The strong optical field enhancement was realized in the large area fabricated engineered gold nanostructures. Low concentration molecular sensing was investigated employing the fabricated structures as surface enhanced Raman scattering (SERS) substrates. The ability to ultrafast direct imprint plasmonic nanoarrays on a flexible substrate at multiscale is a critical step towards roll to roll manufacturing of multi functional devices which is poised to inspire several emerging applications.
author_names: Yaowu Hu

Prashant Kumar

Rong Xu

Kejie Zhao

Gary J Cheng
title: Ultrafast direct fabrication of flexible substrate supported designer plasmonic nanoarrays.
venue: Nanoscale
year: 2016

abstract: Semiconductor lasers are ideal sources for efficient electrical to optical power conversion and for many applications where their small size and potential for low cost are required to meet market demands. Yellow lasers find use in a variety of bio related applications, such as photocoagulation, imaging, flow cytometry, and cancer treatment. However, direct generation of yellow light from semiconductors with sufficient beam quality and power has so far eluded researchers. Meanwhile, tapered semiconductor lasers at near infrared wavelengths have recently become able to provide neardiffraction limited, single frequency operation with output powers up to 8 W near 1120 nm. We present a 1.9 W single frequency laser system at 562 nm, based on single pass cascaded frequency doubling of such a tapered laser diode. The laser diode is a monolithic device consisting of two sections: a ridge waveguide with a distributed Bragg reflector, and a tapered amplifier. Using single pass cascaded frequency doubling in two periodically poled lithium niobate crystals, 1.93 W of diffraction limited light at 562 nm is generated from 5.8 W continuous wave infrared light. When turned on from cold, the laser system reaches full power in just 60 seconds. An advantage of using a single pass configuration, rather than an external cavity configuration, is increased stability towards external perturbations. For example, stability to fluctuating case temperature over a 30 K temperature span has been demonstrated. The combination of high stability, compactness and watt level power range means this technology is of great interest for a wide range of biological and biomedical applications.
author_names: Anders Kragh Hansen

Mathias Christensen

Danny Noordegraaf

Peter G Heist

Evangelos Papastathopoulos

Valentin Loyo-Maldonado

Ole Bjarlin Jensen

Michelle Lynn Stock

Peter M W Skovgaard
title: 1.9 W yellow, CW, high brightness light from a high efficiency semiconductor laser based system
venue: LASE
year: 2017

abstract: Recent breakthroughs in solid state photonic quantum technologies enable generating and detecting single photons with near unity efficiency as required for a range of photonic quantum technologies. The lack of methods to simultaneously generate and control photons within the same chip, however, has formed a main obstacle to achieving efficient multi qubit gates and to harness the advantages of chip scale quantum photonics. Here we propose and demonstrate an integrated voltage controlled phase shifter based on the electro optic effect in suspended photonic waveguides with embedded quantum emitters. The phase control allows building a compact Mach Zehnder interferometer with two orthogonal arms, taking advantage of the anisotropic electro optic response in gallium arsenide. Photons emitted by single self assembled quantum dots can be actively routed into the two outputs of the interferometer. These results, together with the observed sub microsecond response time, constitute a significant step towards chip scale single photon source de multiplexing, fiber loop boson sampling, and linear optical quantum computing. (c) 2017 Optical Society of America under the terms of the OSA Open Access Publishing Agreement OCIS codes: (230.5590) Quantum well, wire and dot devices; (230.3120) Integrated optics devices; (230.2090) Electro optical devices; (250.7360) Waveguide modulators. References and links 1. J. L. O'Brien, A. Furusawa, and J. Vuckovic, "Photonic quantum technologies," Nat. Photonics 3(12) 687 695 (2009) 2. P. Lodahl, S. Mahmoodian, and S. Stobbe, "Interfacing single photons and single quantum dots with photonic nanostructures," Rev. Mod. Phys. 87(2) 347 400 (2015) 3. C. P. Dietrich, A. Fiore, M. G. Thompson, M. Kamp, and S. 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Demory, C. Gomez, I. Sagnes, N. D. Lanzillotti Kimura, A. Lemaitre, A. Auffeves, A. G. White, L. Lanco, and P. Senellart, "Near optimal single photon sources in the solid state," Nat. Photonics 10(5) 340 345 (2016) 12. G. Kirsanske, H. Thyrrestrup, R. S. Daveau, C. L. Dreessen, T. Pregnolato, L. Midolo, P. Tighineanu, A. Javadi, S. Stobbe, R. Schott, A. Ludwig, A. D. Wieck, S. I. Park, J. D. Song, A. V. Kuhlmann, I. Sollner, M. C. Lobl, R. J. Warburton, and P. Lodahl, "Indistinguishable and efficient single photons from a quantum dot in a planar nanobeam waveguide," Phys. Rev. B 96, 165306 (2017) 13. C. Bentham, I. E. Itskevich, R. J. Coles, B. Royall, E. Clarke, J. O'Hara, N. Prtljaga, A. M. Fox, M. S. Skolnick, and L. R. Wilson, "On chip electrically controlled routing of photons from a single quantum dot," Appl. Phys. Lett. 106, 221101 (2015) 14. I. J. Luxmoore, N. A. Wasley, A. J. Ramsay, A. C. T. Thijssen, R. Oulton, M. Hugues, A. M. Fox, and M. S. 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author_names: H L
title: Electro optic routing of photons from a single quantum dot in photonic integrated circuits Midolo,
year: 2018

abstract: Condition monitoring is increasingly benefitting from the application of emerging technologies, such as mobile computing and wireless sensors, including photonics sensors. The latter can be applicable to diverse application needs, due to their versatility, low costs, installation and operational flexibility, as well as unique safety and reliable operation characteristics in real industrial environments of excessive electromagnetic interference and noise. Coupling the monitoring flexibility offered by photonics technologies, with the data transmission flexibility of wireless networking provides opportunities to develop hybrid wireless sensor solutions, incorporating optical sensors into wireless condition monitoring architectures. This paper presents ongoing work within an integrated architecture for condition monitoring and maintenance management support, exploiting the added value of optical technology, inherently safe with respect to electromagnetic compatibility. The reported results are part of a collaborative project involving technology providers in wireless sensor networking, embedded systems and maintenance engineering, as well as research organizations active on photonics technologies and informatics for wireless and intelligence enabled engineering asset management. The industrial test cases are from a lifts manufacturing industry, focusing on both production facilities assets, as well as on the end product. The photonic platform of plastic optical fibers was selected due to its versatility and suitability for rapid customization and prototyping. The platform can serve diverse sensing and monitoring needs, ranging from physical parameters as strain and displacement in machinery parts, to chemical and biochemical monitoring of industrial grade coolants' aging. Use of novel nanostructured optical materials together with laser based micromachining techniques enabled the functional enhancement through rapid prototyping of optical fiber devices towards highly customizable sensors. The integration of the sensing elements within the wireless sensor network architecture offers substantial flexibility for industrial applications.
author_names: Christos Emmanouilidis

Christos Riziotis
title: Wireless Condition Monitoring Integrating Smart Computing and Optical Sensor Technologies
year: 2015

abstract: This paper reports on chip based optical detection with threedimensional spatial resolution by integration of an optofluidic microscope (OFM) in a microfluidic pinched flow fractionation (PFF) separation device. This setup also enables on chip particle image velocimetry (PIV) The position in the plane perpendicular to the flow direction and the velocity along the flow direction of separated fluorescent labeled polystyrene microspheres with diameters of 1 mm, 2.1 mm, 3 mm and 4 mm is determined by the OFM. These results are bench marked against those obtained with a PFF device using conventional fluorescence microscope readout. The size separated microspheres are detected by OFM with an accuracy of =0.92mm. The position in the height of the channel and the velocity of the separated microspheres are detected with an accuracy of 1.4 mm and 0.08 mm/s respectively. Throughout the measurements of the height and velocity distribution, the microspheres are observed to move towards the center of the channel in regard to its height. (c) 2010 Optical Society of America OCIS codes: (110.0180) Microscopy; (110.2970) Image detection systems; (110.4235) Nanolithography; (120.1880) Detection; (130.3990) Micro optical devices; (220.4000) Microstructure fabrication; (220.4241) Nanostructure fabrication. References and links 1. S. Balslev, A. M. Jorgensen, B. Bilenberg, K. B. Mogensen, D. Snakenborg, O. Geshke, J. P. Kutter, and A. Kristensen, "Lab on a chip with integrated optical transducers," Lab Chip 6, 213 217 (2006) 2. T. L. Olesen, B. B. Buus, J. G. Howalt, and M. F. Hansen, "Magnetic micromixer: Influence og magnetic element geometry and field amplitude," Appl. Phys. 103, 07E902 (2008) 3. N. Pamme, "Continous flow separation in microfluidic devices," Lab Chip 7, 1644 1654 (2007) 4. D. Janasek, J. Franzke, and A. Manz, "Scaling and design of miniaturized chemical analysis systems," Nature 442, 374 380 (2006) 5. A. Manz, J. C. Fettinger, E. Verpoorte, H. Ldi, H. M. Widmer, and D. J. Harrison, "Micromachining of monocrystalline silicon and glass for chemical analysis systems A look into next century's technology or just a fasionable craze," Trends Anal. Chem. 10, 144 149 (1991) 6. X. Heng, D. Erickson, L. R. Baugh, Z. Yaqoob, P. W. Sternberg, D. Psaltis, and C. Yang, "Optofluidic microscopy a method for implementing a high resolution optical microscope on a chip," Lab Chip 6, 1274 1276 (2006) 7. X. Cui, L. M. Lee, X. Heng, W. Zhong, P. W. Sternberg, D. Psaltis, and C. Yang, "Lensless high resolution onchip optofluidic microscopes for Caenorhabditis elegans and cell imaging," Proc. Natl. Acad. Sci. U.S.A. 105, 10670 10675 (2008) 8. X. Heng, E. Hsiao, D. Psaltis, and C.Yang, "An optical tweezer actuated, nanoaperture grid based Optofluidic Microscope implementation method," Opt. Express 15, 16367 16375 (2007) 9. R. Lindken, M. Rossi, S. Grosse, and J. Westerweel, "Micro particle Image Velocimetry (mPIV) Recent developments, applications, and guidelines," Lab Chip 15, 2551 2567 (2009) 10. M. Yamada, M. Nakashima, and M. Seki, "Pinched Flow Fractionation: Continous Size Separation of Particles Utilizing a Laminar Flow Profile in a Pinched Microchannel," Anal. Chem. 76, 5465 5471 (2004) (C) 2010 OSA 1 March 2010 Vol. 18, No. 5 OPTICS EXPRESS 4158 #118773 $15.00 USD Received 22 Oct 2009; revised 8 Feb 2010; accepted 11 Feb 2010; published 17 Feb 2010 11. J. Takagi, M. Yamada, M. Yasuda, and M. Seki, "Continous particle separation in a microchannel having asymmetrically arranged multiple branches," Lab Chip 5, 778 784 (2005) 12. Y. Sai, M. Yamada, M. Yasuda, and M. Seki, "Continous separation of particles using a microfluidic device equipped with flow rate controle valves," J. Chromatogr. A 1127, 214 220 (2006) 13. H. Maenaka, M. Yamada, M. Yasuda, and M. Seki, "Continous and Size Dependent Sorting of Amulsion Droplets Using Hydrodynamics in Pinched Microchannels," Langmuir 24, 4405 4410 (2008) 14. A. V. Larsen, L. Poulsen, H. Birgens, M. Dufva, and A. Kristensen, "Pinched flow fractionation devices for detection of single nucleotide polymorphisms," Lab Chip 8, 818 821 (2008) 15. N. A. Mortensen, "Comment on 'Pinched Flow Fractionation: Contonous Size Separation of Particles Utilizing a Laminar Flow Profile in a Pinched Microchannel'" Anal. Chem. 79, 9240 9241 (2007) 16. A. L. Vig and A. Kristensen, "Separation enhancement in pinched flow fractionation," Appl. Phys. Lett. 93, 203507 (2008) 17. B. Bilenberg, M. Hansen, D. Johansen, V. Ozkapici, C. Jeppesen, P. Szabo, I. M. Obieta, O. Arroyo, J. O. Tegenfeldt, and A. Kristensen,"Topas based lab on a chip microsystems fabricated by thermal nanoimprint lithography," J. Vac. Sci. Technol. B 23, 2944 2949 (2005) 18. J. C. Giddings, Unified separation science, (Wiley and Sons, Inc, 1991) 19. K. Yapici, R. L. Powell, and R. J. Phillips,"Particle migration and suspension structure in a steady and oscillatory plane Poiseuille flow," Phys. Fluids 21, 053302 (2009)
author_names: Asger Laurberg Vig

Rodolphe Marie

Eric Jensen

Anders Kristensen
title: Optofluidic microscope with 3 D spatial resolution
year: 2018

abstract: The simplicity of synthesis of deterministically positioned inorganic semiconductor nanorods (NRs) and nanotubes (NTs) coupled with their chemical stability, high surface area, controllable optical properties and tunable surface functionality, have sparked worldwide research efforts towards biodiagnostic applications. Biosensors based on oriented and aligned one dimensional (1 D) inorganic semiconductor nanostructures have demonstrated remarkable detection sensitivity, high throughput and label free operability. In comparison to suspensions of nanoparticles and discrete randomly oriented nanowires, nanowire (NW) and nanotube arrays offer continuous charge transport pathways, a major advantage for all electrical detection and in exploiting electrokinetic effects. We review highly sensitive biosensors based on oriented and aligned NTs/NRs/NWs employing conventional detection methods, inclusive of fluorescence, electrochemistry and electromechanical sensing as well as detection methods unique to nanowires such as field effect transistors. Entirely new types of sensing applications such as the impaling of living cells to monitor cellular events in situ, and substrates with electrically controlled wetting for surface assisted laser desorption and ionization are emerging to take advantage of the unique properties of nanowire arrays. Concurrently, we explain the semiconductor materials and architectures employed, and the functionalization procedures used to construct the biosensors. Aligned semiconductor array based approaches are critically examined in relation to prevailing technologies to get a sense of the exclusive niches that nanotube/nanorod array biosensors inhabit. The versatility of the detection principles that nanowire/nanotube arrays are compatible with are enabling hybrid approaches where combinations of detection methods are used. Such advantages offset the complexity associated with changing the status quo with respect to the current state of the art in biodiagnostic platforms and devices.
author_names: Piyush Kar

Karthik Shankar
title: Biodiagnostics using oriented and aligned inorganic semiconductor nanotubes and nanowires.
venue: Journal of nanoscience and nanotechnology
year: 2013