Search query: magnetic field probe station

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abstract: We report on a novel electron paramagnetic resonance (EPR) technique that merges electrically detected magnetic resonance (EDMR) with a conventional semiconductor wafer probing station. This union, which we refer to as wafer level EDMR (WL EDMR) allows EDMR measurements to be performed on an unaltered, fully processed semiconductor wafer. Our measurements replace the conventional EPR microwave cavity or resonator with a very small non resonant near field microwave probe. Bipolar amplification effect, spin dependent charge pumping, and spatially resolved EDMR are demonstrated on various planar 4H silicon carbide metal oxide semiconductor field effect transistor (4H SiC MOSFET) structures. 4H SiC is a wide bandgap semiconductor and the leading polytype for high temperature and high power MOSFET applications. These measurements are made via both "rapid scan" frequency swept EDMR and "slow scan" frequency swept EDMR. The elimination of the resonance cavity and incorporation with a wafer probing station greatly simplifies the EDMR detection scheme and offers promise for widespread EDMR adoption in semiconductor reliability laboratories.
author_names: Duane J McCrory

Mark Anders

Jason T Ryan

Pragya R Shrestha

Kin P Cheung

Patrick M Lenahan

Jason P Campbell
title: Slow and rapid scan frequency swept electrically detected magnetic resonance of MOSFETs with a non resonant microwave probe within a semiconductor wafer probing station.
venue: The Review of scientific instruments
year: 2019

abstract: We present a rotary stage microwave probe station suitable for magnetic films and spintronic devices. Two stages, one for field rotation from parallel to perpendicular to the sample plane (out of plane) and the other intended for field rotation within the sample plane (in plane) have been designed. The sample probes and micro positioners are rotated simultaneously with the stages, which allows the field orientation to cover th from 0( to 90( and ph from 0( to 360( th and ph being the angle between the direction of current flow and field in a out of plane and an in plane rotation, respectively. The operation frequency is up to 40 GHz and the magnetic field up to 1 T. The sample holder vision system and probe assembly are compactly designed for the probes to land on a wafer with diameter up to 3 cm. Using homemade multi pin probes and commercially available high frequency probes, several applications including 4 probe DC measurements, the determination of domain wall velocity, and spin transfer torque ferromagnetic resonance are demonstrated.
author_names: Shikun He

Zhaoliang Meng

Lisen Huang

Lee Koon Yap

Tiejun Zhou

Christos Panagopoulos
title: A versatile rotary stage high frequency probe station for studying magnetic films and devices.
venue: The Review of scientific instruments
year: 2016

abstract: With a growing effort in research and development of an alternative material to bulk Nb for a superconducting radiofrequency (SRF) cavity, it is important to have a cost effective method to benchmark new materials of choice. At Old Dominion University's Center for Accelerator Science, a cryogenic probe station (CPS) will be used to measure the response of superconductor samples under RF fields. The setup consists of a closed cycle refrigerator for cooling a sample wafer to the cryogenic temperature, a superconducting magnet providing a field parallel to the sample, and DC probes in addition to RF probes. The RF probes will extract a quality factor from a sample patterned in a coplanar waveguide resonator structure on a 2in wafer. From the measured quality factor, the surface resistance and the penetration depth as a function of temperature and magnetic field will be calculated. This paper will discuss the design and measurement procedures of the current CPS setup.
author_names: Junki Makita

Jean Roger Delayen

Alexander V Gurevich

Gianluigi Ciovati
title: CRYOGENIC PROBE STATION AT OLD DOMINION UNIVERSITY CENTER FOR ACCELERATOR SCIENCE*
year: 2018

abstract: The biaxial magnetic field setup for angular dependent measurements of magnetic thin films and spintronic nanodevices is designed and presented. The setup allows for the application of the in plane magnetic field using a quadrupole electromagnet, controlled by power supply units and integrated with an electromagnet biaxial magnetic field sensor. The setup may be used in a wide range of experiments, where the application of precise in plane magnetic field is needed. In our experiment, the probe station is equipped with a microwave circuitry, which enables angle resolved spin torque measurements. The angular dependences of magnetoresistance and spin diode effect in a multilayer patterned into \mu \text{m} scale strips are shown as an operational verification of the experimental setup. We adapted an analytical macrospin model to reproduce both the resistance and spin diode angular dependence measurements.
author_names: Piotr Rzeszut

Witold Skowronski

Slawomir Zietek

Piotr Ogrodnik

Tomasz Stobiecki
title: Biaxial Magnetic Field Setup for Angular Dependent Measurements of Magnetic Thin Films and Spintronic Nanodevices
venue: IEEE Transactions on Magnetics
year: 2018

abstract: A conduction cooled cryostat has been developed for NbTi superconducting magnet used in a cryogenic probe station. In a cryogenic probe station, a sample stage for transient measurement is located in the bore of a low temperature superconducting (LTS) magnet and thermally connected to the second stage cold head of a cryocooler to cool the sample down to the liquid helium temperature. Two separate structures exist in order to maintain isolation between the LTS magnet and sample stage. The system is cooled by a two stage cryocooler, and the LTS magnet is charged and generates the designed magnetic field. When the magnet is charged and maintains a certain magnetic field, the temperature of sample stage is varied depending on the amount of heating. The thermal linkage between the LTS magnet and second stage cold head as well as the sample stage and second stage cold head is investigated in terms of the stability of LTS magnet, magnetic field, and temperature of sample stage. The mechanical module including the thermal link to control the sample stage is integrated into the system and the results of the performance test are reported.
author_names: Myung Su Kim

Seungyung Park

Yeon Suk Choi
title: Development of Conduction Cooled Cryostat for Superconducting Probe Station
venue: IEEE Transactions on Applied Superconductivity
year: 2017

abstract: Permanent magnets are one of the basic components of magnetic passive suspension system using superconductors. Generating magnetic field neodymium magnets are placed along the system's guide. Presented experimental studies were conducted to measure the intensity of the magnetic field, generated by a single neodymium magnet. The Brockhaus Measurements magnetic field gauge BGM 101 was used to build the measuring station. The mechanical part was based on the D4128R110 stepper motor and the ATmega2560 microcontroller, which controlled the Motor Shield module containing L293D. Configuration of proposed measuring station allows to move the gaussmeter probe horizontally, above the magnet. The controllable speed of measurement table enables to obtain accurate and reproducible magnetic field measurements.
author_names: Edyta Ladyzynska-Kozdras

Anna Sibilska-Mroziewicz

Slawomir Czubaj
title: Experimental Measurement of Magnetic Field Generated by Neodymium Magnet
year: 2017

abstract: A state of the art ellipsometer for user operations is being implemented at ELI Beamlines in Prague, Czech Republic. It combines three of the most promising and exotic forms of ellipsometry: VUV, pump probe and magneto optical ellipsometry. This new ellipsometer covers a spectral operational range from the NIR up to the VUV, with high through put between 1 and 40 eV. The ellipsometer also allows measurements of magneto optical spectra with a 1 kHz switchable magnetic field of up to 1.5 T across the sample combining ellipsometry and Kerr spectroscopy measurements in an unprecedented spectral range. This form of generalized ellipsometry enables users to address diagonal and off diagonal components of the dielectric tensor within one measurement. Pump probe measurements enable users to study the dynamic behaviour of the dielectric tensor in order to resolve the time domain phenomena in the femto to 100 ns range.
author_names: Shirly Espinoza

G Neuber

Christopher D Brooks

Bastian Besner

Maryam Hashemi

Michael Rubhausen

Jakob Andreasson
title: User oriented end station on VUV pump probe magneto optical ellipsometry at ELI beamlines
year: 2017

abstract: We report on a novel semiconductor reliability technique that incorporates an electrically detected magnetic resonance (EDMR) spectrometer within a conventional semiconductor wafer probing station. EDMR is an ultrasensitive electron paramagnetic resonance technique with the capability to provide detailed physical and chemical information about reliability limiting defects in semiconductor devices. EDMR measurements have generally required a complex apparatus, not typically found in solid state electronics laboratories. The union of a semiconductor probing station with EDMR allows powerful analytical measurements to be performed within individual devices at the wafer level. Our novel approach replaces the standard magnetic resonance microwave cavity or resonator with a small non resonant near field microwave probe. Using this new approach we have demonstrated bipolar amplification effect and spin dependent charge pumping in various SiC based MOSFET structures. Although our studies have been limited to SiC based devices, the approach will be widely applicable to other types of MOSFETs, bipolar junction transistors, and various memory devices. The replacement of the resonance cavity with the very small non resonant microwave probe greatly simplifies the EDMR detection scheme and allows for the incorporation of this powerful tool with a wafer probing station. We believe this scheme offers great promise for widespread utilization of EDMR in semiconductor reliability laboratories.
author_names: Duane J McCrory

Mark Anders

Jason T Ryan

Pragya R Shrestha

Kin P Cheung

Patrick M Lenahan

Jason P Campbell
title: Wafer Level Electrically Detected Magnetic Resonance: Magnetic Resonance in a Probing Station
venue: IEEE Transactions on Device and Materials Reliability
year: 2018

abstract: Simulation studies established that the main (core) crustal and electrojet components of the Earth's magnetic field can be observed with greater resolution or over a longer time base than is presently possible by using the capabilities provided by the space station. Two systems are studied. The first, a large lifetime, magnetic monitor would observe the main field and its time variation. The second, a remotely piloted, magnetic probe would observe the crustal field at low altitude and the electrojet field in situ. The system design and the scientific performance of these systems is assessed. The advantages of the space station are reviewed.
author_names: William J Webster

James J Frawley

Milan Stefanik
title: Observations of the Earth's magnetic field from the Space Station: Measurement at high and extremely low altitude using Space Station controlled free flyers
year: 1984

abstract: We report on a novel semiconductor reliability technique that merges electrically detected magnetic resonance (EDMR) with a conventional semiconductor wafer probing station. This union with a semiconductor probing station allows EDMR measurements to be performed at the wafer level. Our measurements forgo a microwave cavity or resonator for a very small non resonant near field microwave probe [1] Bipolar amplification effect (BAE) [4] and spin dependent charge pumping (SDCP) [5] were demonstrated on various SiC MOSFET structures. These measurements were made via frequency swept EDMR. The elimination of the resonance cavity, and incorporation with a wafer probing station, greatly simplifies the EDMR detection scheme and offers promise for widespread EDMR adoption in semiconductor reliability laboratories.
author_names: Duane J McCrory

Mark Anders

Jason T Ryan

Pragya R Shrestha

Jason P Campbell

Patrick M Lenahan

Kin P Cheung
title: Wafer level EDMR: Magnetic resonance in a probing station
venue: 2017 IEEE International Integrated Reliability Workshop (IIRW)
year: 2017