All NASA-borne, extreme-ultraviolet observation instruments have been calibrated at SURF since the 1970s, and SURF is used for measurement and characterization of systems for extreme ultraviolet lithography.
自七十年代以来，所有NASA生产的极紫外观测装置都由SURF来进行校准，SURF还用于测量和规格化超紫外光刻系统。