Microbots were born thanks to the appearance of the microcontroller in the last decade of the 20th century, and the appearance of miniature mechanical systems on silicon (MEMS), although many microbots do not use silicon for mechanical components other than sensors.
Mikrorobotet u linden fale shfaqjes se mikrokontrollorit ne vitet 1990, dhe shfaqjes se sistemeve mekanike miniaturike te silikonit ; megjithse shume mikrorobote nuk perdorin silikon për perberesit mekanike por ndijues (sensore).