ebook,Thomas B. Jones, Nenad G. Nenadic,Electromechanics and MEMS,Cambridge University Press,ANF: Technology,Electrical engineering,Electronics - Optoelectronics,Electronics engineering,Engineering & Technology: Textbooks & Study Guides,Mechanical engineering,Microelectromechanical systems,Microelectromechanical systems.,Nanotechnology,Science/Mathematics,TECHNOLOGY & ENGINEERING / Electronics / Optoelectronics,TECHNOLOGY & ENGINEERING / Electronics / Optoelectronics.,Technology & Engineering,Technology & Industrial Arts,bisacsh,Electronics - Optoelectronics,TECHNOLOGY & ENGINEERING / Electronics / Optoelectronics,Technology & Industrial Arts,bisacsh,Technology & Engineering,Science/Mathematics,Engineering & Technology: Textbooks & Study Guides,Electrical engineering,Electronics engineering,Mechanical engineering" />