Free poster on SARS-CoV-2 variants Download now › Search All Home›Semiconductor Analysis SEMICONDUCTOR ANALYSIS Semiconductor Analysis Semiconductor manufacturing solutions for logic, 3D NAND, DRAM, display, power, analog and MEMS devices. Contact us Applications Techniques Samples Products Resources Contact Us The need for a more connected, more autonomous, and smarter world drives innovation in semiconductor and microelectronic devices, which require consistent improvements in performance, energy efficiency, security, cost, and reliability. Focus must also be given to improving time-to-market and time-to-yield. However, shrinking geometries, new materials, and novel 3D architectures make these continual improvements increasingly more challenging. As a result, current 2D metrology and inspection workflows are no longer adequate for device manufacturing. Instead, high-productivity 3D analysis workflows are now essential to the fabrication process. Overall, these 3D analysis tools and workflows give manufacturers the ability to provide high-productivity characterization of a broad range of devices. This includes equipment for ESD compliance testing, efficient pathfinding, advanced imaging and analysis, layer-by-layer device de-processing, laser ablation, and for maximizing yield in the shortest time possible. Thermo Fisher Scientific provides the broadest portfolio of high-productivity 3D analysis workflows that accelerate development, maximize yields, and ensure the production of high-quality devices that meet current and future industry demands. Explore the pages below to learn how our applications and workflows can address your specific needs. Resources Infographic Documents Infographic: 40 years of semiconductor analysis innovation Thermo Fisher: 40 years of semiconductor analysis innovation With more than four decades innovating physical and electrical analysis solutions for the electronics industry, Thermo Fisher Scientific is one of the world’s premier providers of ultra-high-resolution tools for imaging and analysis at the nanoscale. Download our fact sheet to learn more › Applications Semiconductor Pathfinding and Development Advanced electron microscopy, focused ion beam, and associated analytical techniques for identifying viable solutions and design methods for the fabrication of high-performance semiconductor devices. Yield Ramp and Metrology We offer advanced analytical capabilities for defect analysis, metrology, and process control, designed to help increase productivity and improve yield across a range of semiconductor applications and devices. Semiconductor Failure Analysis Increasingly complex semiconductor device structures result in more places for failure-inducing defects to hide. Our next-generation workflows help you localize and characterize subtle electrical issues that affect yield, performance, and reliability. Physical and Chemical Characterization Ongoing consumer demand drives the creation of smaller, faster, and cheaper electronic devices. Their production relies on high-productivity instruments and workflows that image, analyze, and characterize a broad range of semiconductor and display devices. ESD Semiconductor Qualification Every electrostatic discharge (ESD) control plan is required to identify devices that are sensitive to ESD. We offer a complete suite of test systems to help with your device qualification requirements. Advanced Memory Technology Modern data demands are driving innovation in 3D NAND, DRAM and other memory structures. Our memory analysis tools and workflows offer high-productivity characterization so that manufacturers can meet performance, latency, and capacity demands. Power Semiconductor Device Analysis Power devices pose unique challenges for localizing faults, primarily as a result of power device architecture and layout. Our power device analysis tools and workflows quickly pinpoint fault locations at operating conditions and provide precise, high-throughput analysis for characterization of materials, interfaces and device structures. Display Module Failure Analysis Evolving display technologies aim to improve display quality and light conversion efficiency to support applications in different industry sectors, while continuing to reduce production costs. Our process metrology, failure analysis and research and development solutions help display companies solve these challenges. Techniques TEM Metrology TEM Imaging and Analysis Circuit Edit & Nanoprototyping SEM Metrology SEM Imaging and Analysis Optical Fault Isolation Thermal Fault Isolation TEM Sample Preparation NanoProbing Atom Probe Preparation Laser Ablation Device Delayering ESD Compliance Testing TEM Metrology Advanced and automated TEM metrology routines deliver significantly greater precision than manual methods. This allows users to generate large amounts of statistically relevant data, with sub-angstrom-level specificity, that is free of operator bias. Learn more › Samples Semiconductor Materials and Device Characterization As semiconductor devices shrink and become more complex, new designs and structures are needed. High-productivity 3D analysis workflows can shorten device development time, maximize yield, and ensure that devices meet the future needs of the industry. Learn more › Products Spectra 300 Highest-resolution structural and chemical information at the atomic level Flexible high-tension range from 30-300 kV Three lens condenser system View product Download datasheet Spectra Ultra New imaging and spectroscopy capabilities on the most beam sensitive materials A leap forward in EDX detection with Ultra-X Column designed to maintain sample integrity. View product Download datasheet Helios 5 PFIB DualBeam Gallium-free STEM and TEM sample preparation Multi-modal subsurface and 3D information Next-generation 2.5 μA xenon plasma FIB column View product Download datasheet Helios 5 PXL PFIB Wafer DualBeam PFIB beam current from 1pA–2.6µA Faster yield learning and increased productivity Automated handling of 300 mm FOUP with EFEM (GEM300 compliant View product Download datasheet Helios 5 EXL DualBeam Low-voltage performance for high sample preparation quality Ultra-high-resolution immersion-lens field-emission SEM column Automated handling of 300 mm FOUP with EFEM (GEM300 compliant) View product Download datasheet Helios 5 DualBeam Fully automated, high-quality, ultra-thin TEM sample preparation High throughput, high resolution subsurface and 3D characterization Rapid nanoprototyping capabilities View product Download datasheet Talos F200E TEM High-quality (S)TEM imaging of semiconductor and microelectronic devices Precise, high-speed chemical characterization with EDS Dedicated semiconductor-related applications View product Download datasheet Metrios AX TEM Automation options to support quality, consistency, metrology, and reduced OPEX Leverages machine learning for superior autofunctions and feature recognition Workflows for both in-situ and ex-situ lamella preparation View product Download datasheet Scios 2 DualBeam Full support of magnetic and non-conductive samples High throughput subsurface and 3D characterization Advanced ease of use and automation capabilities View product Download datasheet ExSolve WTP DualBeam Can prepare site-specific, 20 nm thick lamellae on whole wafers up to 300 mm in diameter Addresses needs requiring automated, high-throughput sampling at advanced technology nodes View product Learn more Verios 5 XHR SEM Monochromated SEM for sub-nanometer resolution over the full 1 keV to 30 keV energy range Easy access to beam landing energies as low as 20 eV Excellent stability with piezo stage as standard View product Download datasheet Quattro ESEM Ultra-versatile high-resolution FEG SEM with unique environmental capability (ESEM) Observe all information from all samples with simultaneous SE and BSE imaging in every mode of operation View product Download datasheet Prisma E SEM Entry-level SEM with excellent image quality Easy and quick sample loading and navigation for multiple samples Compatible with a wide range of materials thanks to dedicated vacuum modes View product Download datasheet Apreo 2 SEM High-performance SEM for all-round nanometer or sub-nanometer resolution In-column T1 backscatter detector for sensitive, TV-rate materials contrast Excellent performance at long working distance (10 mm) View product Download datasheet VolumeScope 2 SEM Isotropic 3D data from large volumes High contrast and resolution in high and low vacuum modes Simple switch between normal SEM use and serial block-face imaging View product Download datasheet Phenom ProX G6 Desktop SEM High performance desktop SEM with integrated EDS detector Resolution <6 nm (SE) and <8 nm (BSE); magnification up to 350,000x Optional SE detector View product Download datasheet Taipan G2+ Circuit Edit System Imaging and milling resolution to meet 10nm node specifications Superb etch selectivity and deposition control for conductors and insulators Excellent navigation and ion beam placement accuracy View product Download datasheet Centrios CE Superior image / milling resolution Enhanced milling precision and control Built on the Thermo Scientific Helios DualBeam platform View product Download datasheet MK.4TE ESD and Latch-Up Test System Rapid-relay-based operations—up to 2304 channels Advanced device preconditioning with six separate vector drive levels Fully compliant Latch-Up stimulus and device biasing View product Download datasheet ELITE System Completely non-destructive Quickly identifies defective component on assembly board for accurate dispositioning Localizes defect in x-y with micrometer accuracy, with depth location accurate to 20 µm View product Download datasheet nProber IV Localize transistor and BEOL faults Thermal nanoprobing (-40°C to 150°C) Semi-automated operation View product Download datasheet Hyperion II System Atomic Force Probing Localize transistor faults Integrated PicoCurrent (CAFM) View product Download datasheet Meridian S System Fault Diagnostic with Active Probe Technology Static laser stimulation (SLS / OBIRCH) and photon emission options Supports both micro-probing and probe card device stimulation View product Download datasheet Meridian WS-DP System High-sensitivity, low-noise, low-voltage photon emission detection with broadband DBX or InGaAs camera systems Multi-wavelength laser scanning microscope for scan chain analysis, frequency mapping, transistor probing and isolation of faults View product Download datasheet Meridian 7 System Dynamic Optical Fault Isolation for 10nm node and below High resolution visible and Infrared light High-yield sample preparation to 5μm widely available View product Learn more Meridian IV System High sensitivity extended-wavelength DBX photon emission detection Standard InGaAs photon emission detection Laser Scanning Microscope with multiple wavelength options View product Learn more Celestron Test System Wafer and package level TLP testing High current TLP pulse generato Can be interfaced with semiautomatic probers Intuitive software for control and report generation View product Download datasheet Orion3 Test System Charged device model testing Dual high resolution color cameras Test densities to less than 0.4mm pitch View product Download datasheet Pegasus Testing per the latest industry standards True system level ESD 150pF/330Ω network 2 pin connection via wafer probes to any device View product Download datasheet AutoTEM 5 Fully automated in situ S/TEM sample preparation Support of top-down, planar and inverted geometry Highly configurable workflow Easy to use, intuitive user interface View product Download datasheet Auto Slice and View 4.0 Software Automated serial sectioning for DualBeam Multi-modal data acquisition (SEM, EDS, EBSD) On-the-fly editing capabilities Edge based cut placement View product Download datasheet Maps Software Acquire high-resolution images over large areas Easily find regions of interest Automate image acquisition process Correlate data from different sources View product Download datasheet Avizo Software Materials Science Support for multi-data/multi-view, multi-channel, time series, very large data Advanced multi-mode 2D/3D automatic registration Artifact reduction algorithms View product Download brochure iFast Software Macro recorder for faster recipe creating Runner for unattended overnight operation Alignment tools: Image recognition and edge finding View product Learn more Inspect 3D Software Image processing tools and filters for cross-correlation Feature tracking for image alignment Algebraic reconstruction technique for iterative projection comparison View product Learn more NEXS Software Auto-syncs position/magnification between NEXS and Circuit Edit system for a more seamless user experience Connects to most Thermo Scientific tools used for EFA, PFA and Circuit Edit space View product Download datasheet AutoScript 4 improved reproducibility and accuracy Unattended, high throughput imaging and patterning Supported by Python 3.5-based scripting environment View product Download datasheet Contact us Electron microscopy services for semiconductors To ensure optimal system performance, we provide you access to a world-class network of field service experts, technical support, and certified spare parts. 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