Megaturion™ Bulk Specialty Gas Systems SEMI-GAS® Megaturion™ Bulk Specialty Gas Systems The Megaturion™ line of Bulk Specialty Gas Systems, by SEMI-GAS®, sets the standard for safe, precise, and pure distribution and delivery of bulk hazardous process gases. Built for the high-volume handling and delivery of hazardous gases such as NH3, HCl, AsH3, and SiH4, Megaturion™ bulk specialty gas systems conform to the SEMI S2 standard and are renowned for their intuitive operating systems, enabling the highest level of precision and control as needed in ultra high purity production applications. The control comes from the GigaGuard™ PLC-based, UL labeled technology that SEMI-GAS® systems are known for, which include touchscreen interfaces and LED displays for safe and continuous gas management. Available in a variety of configurations to suit your bulk specialty gas process requirements, Megaturion™ systems are ideal for advanced production environments and high throughput demands. Megaturion™ Line Design Standards Conforms to SEMI S2 UL Labeled Conforms to Uniform Building and Fire Codes Upholds Sample Validation Testing Standards Equipped with GigaGuard™ Controller Helium Leak Tested to 1×10-9 atm-cm3/sec SEMI-GAS® for Specialized UHP Demands Our premier line of gas delivery systems, SEMI-GAS® is ideal for industries such as: Semiconductor Electronics Aerospace & Defense High-Tech Manufacturing FIND YOUR APPLICATION HERE Explore our Megaturion™ Bulk Specialty Gas Systems Offerings Bulk Gas Distribution System DOWNLOAD SPEC SHEET » DOWNLOAD MANUAL » Bulk Gas Source System DOWNLOAD SPEC SHEET » Bulk MultiCylinder Gas Source System DOWNLOAD SPEC SHEET » Looking to Order? To order any of our Megaturion™ Bulk Specialty Gas Systems offerings, contact a SEMI-GAS® sales representative today. EQUIPMENT QUOTE CONFIGURATOR CONTACT US NOW Connect With Us twitter facebook linkedin ©2021 Applied Energy Systems Inc. Privacy Policy Terms of Use P: 610.647.8744 F: 610.640.4548 Applied Energy Systems, Inc. 180 Quaker Lane Malvern, PA 19355