Parts Upgrades Services About Contact Setting a standard of excellence for customer satisfaction. Previous Next © 2007– 2021 Concept Part Solutions, Inc. ISO 9001 - 2015 Certified. 408-748-1244 info@conceptpartsolutions.com

Parts Upgrades Services About Contact About Previous Next Concept Part Solutions, Inc. (CPS) was founded in 2007 as an OEM support company dedicated to maturing product portfolios. CPS is Lam Research’s only authorized and licensed partner for the Novellus Concept One, GaSonics and Speedfam/IPEC CMP equipment lines and is empowered to provide OEM Spare Parts, Upgrades, Service, and Engineering support for these toolsets. This unique, non-competitive partnership perpetuates streamlined and focused attention on these maturing products. We are committed to this relationship and have made it our mission to represent this partnership as a business unit of the OEM. We continually strive at every level of our operation for perfection. CPS has grown to become a global organization of dedicated, experienced individuals. Each area of expertise is staffed with former OEM employees of the same field that have a wealth of knowledge to share with our customers. CPS is a global company founded on the principles of quality, integrity and respect. We continually strive at every level of our operation for perfection. We are dedicated to providing a service that exceed our customer’s expectations. This is achieved by working with our customers as partners and a continuous review of deliverables. All aspects of our operation and business systems are subject to review and continuous improvement to maintain efficiency, satisfy compliance requirements, and uphold our standard of excellence. © 2007– 2021 Concept Part Solutions, Inc. ISO 9001 - 2015 Certified. 408-748-1244 info@conceptpartsolutions.com

Parts Upgrades Services About Contact Training Previous Next CPS offers both In House and Customer Site equipment training classes. From Periodic Maintenance and Equipment Troubleshooting to Software Familiarization and Basic Process Support Guidance, we can customize a training curriculum to meet each specific customer’s unique requirements. In House Training Courses: Concept One Dielectric Gasonics On Site Training Courses: Concept One PEP Iridia PEP3510A PEP3010 L3510 A3010 MV200 776 676 372 472 Unique Courses: Concept One Robot Repair and Maintenance © 2007– 2021 Concept Part Solutions, Inc. ISO 9001 - 2015 Certified. 408-748-1244 info@conceptpartsolutions.com