Parts Upgrades Services About Contact Engineering Previous Next Concept Part Solutions is first and foremost an engineering company. Our engineering team focuses on Hardware, Software, and Continuous improvement solutions to extend the lifetime for the mature products we are licensed to support. Component obsolescence is a growing issue, whether part vendor OEMs no longer can supply materials or technology has moved beyond the ability to support aged IC components, our team finds and qualifies replacement solutions that minimally impact our customers. CPS employs former OEM engineers and contracts with OEM and industry experts to ensure continuity of support for our product lines. Obsolescence Drawing and BOM packages for replacement parts Engineering documentation control for all part revisions or replacements Replacement part validation testing per original specifications In-house Engineering lab with process tools, test fixtures and simulators Product Improvement Software Performance Optimization Resolve reliability and safety issues Productivity Upgrades Respond to Customer issues/requests on legacy toolsets © 2007– 2021 Concept Part Solutions, Inc. ISO 9001 - 2015 Certified. 408-748-1244 info@conceptpartsolutions.com

Parts Upgrades Services About Contact Parts Previous Next CPS provides only new, OEM material from the approved OEM vendors. CPS uses the same parts manufacturers/suppliers, follows the same quality and testing protocols, and adheres to the same packaging requirements as the original OEM. The original part drawings serve as the specification for this material and cannot be altered by CPS unless forced by obsolescence. CPS does NOT alternate source parts—this ensures customer confidence and eliminates the need to re-qualify components. Spare Parts Available for: OEM – GaSonics PEP Iridia PEP3510A PEP3510C PEP Plus PEP3010 L3510 A1000 A3010 A3000 A2000LL AE2000LL AE2001 Speedfam/IPEC 372 472 676 776 MV200 Auriga Novellus Concept One Dielectric Concept One Tungsten Obsolescence support for many Sabre Classic and Sabre xT parts Gamma 2100 Gamma 2130 unique material CPS maintains a robust refurbishment and core exchange program. Many spare robots, controllers, spindles, etc. are supported. Contact your CPS representative for details. © 2007– 2021 Concept Part Solutions, Inc. ISO 9001 - 2015 Certified. 408-748-1244 info@conceptpartsolutions.com