Menü ausklappen HomeKnow HowListsFigures Figures 1 Introduction to Vacuum Technology Figure 1.1 Overview of vacuum Figure 1.2 Definition of total pressure Figure 1.3 Definition of partial pressure Figure 1.4 Mean free path between two collisions Figure 1.5 Molecular number density (red, right-hand y axis) and mean free path (blue, left-hand y axis) for nitrogen at a temperature of 273.15 K Figure 1.6 Profiles of the various types of flow regimes Figure 1.7 Flow ranges in vacuum as a function of p · d Figure 1.8 Conductance of a smooth round pipe as a function of the mean pressure in the pipe Figure 1.9 Vapor pressure curves of various substances Figure 1.10 Typical residual gas spectrum of a vessel evacuated by a turbomolecular pump 2 Basic calculations Figure 2.1 No-load compression ratio for air with Roots pumps Figure 2.2 Volume flow rate (pumping speed) of a pumping station with Hepta 100 and Okta 500 Figure 2.3 Drying system (schematic) Figure 2.4 Roots pumping station for vapor condensation Figure 2.5 Roots pumping station for vapor condensation Figure 2.6 Roots pumping station for transformer drying Figure 2.7 Gas throughput of different turbopumps at high process pressures Figure 2.8 Vacuum system with pressure and throughput regulation 3 Mechanical components in vacuum Figure 3.1 Temperature dependence of the elasticity modulus of austenitic stainless steel Figure 3.2 Temperature dependence of the 0.2% yield point of austenitic stainless steel Figure 3.3 De Long diagram Figure 3.4 Cross section image of a laser weld Figure 3.5 Cross section image of WIG orbital weld Figure 3.6 O-ring seals in rectangular groove, trapezoidal-groove and in an angular position Figure 3.7 ISO-KF connection with centering ring and clamping ring Figure 3.8 ISO-KF flange mounted on base plate with centering ring and claw clamps Figure 3.9 ISO-K connection with centering ring and double claw clamps Figure 3.10 ISO-K flange mounted on base plate with centering ring and claw clamps Figure 3.11 ISO-K flange mounted on base plate with O-ring nut and claw clamps for base plate with sealing groove Figure 3.12 ISO-K flange mounted on base plate with O-ring nut and claw clamps for base plate with sealing groove Figure 3.13 SO-F connection with centering ring and screws Figure 3.14 ISO-K flange with bolt ring mounted on ISO-F flange with centering ring and screws Figure 3.15 CF connection with copper flat gasket and screws Figure 3.16 COF connection with copper wire seal and screws Figure 3.17 EUV source chamber with cooling profiles and water-cooled flanges Figure 3.18 Space simulation chamber with pillow plate cooling Figure 3.19 CF viewport with glass-metal fusing Figure 3.20 Electrical feedthrough with ceramically insulated wire conductor made of copper Figure 3.21 Bellows-sealed angle valve Figure 3.22 Inline valve with electropneumatic actuation Figure 3.23 UHV gate valve Figure 3.24 UHV all-metal gas dosing valve Figure 3.25 Bellows-sealed UHV rotary feedthrough (cattail principle) Figure 3.26 Magnetically coupled UHV rotary feedthrough Figure 3.27 Elastomer-sealed rotary feedthrough Figure 3.28 Z-axis precision manipulator Figure 3.29 XY-axis precision manipulator 4 Vacuum generation Figure 4.1 Overview of vacuum pumps Figure 4.2 Operating principle of a rotary vane pump Figure 4.3 Pfeiffer Vacuum rotary vane pumps Figure 4.4 Accessories for rotary vane pumps Figure 4.5 Operating principle of a diaphragm vacuum pump Figure 4.6 Operating principle of a screw pump Figure 4.7 HeptaDry rotors Figure 4.8 HeptaDry with connections and accessories Figure 4.9 Operating principle of an air cooled multi-stage Roots pump Figure 4.10 Condensation of ammonium hexafluorosilicate (NH4)2SIF6 in a Roots pump operated at too low a temperature Figure 4.11 Operating principle of a multi-stage Roots pump, process pump Figure 4.12 ACP 120 Figure 4.13 A 100 L rear side with connections Figure 4.14 A 203 H cross-section Figure 4.15 A 1503 H process pumping station Figure 4.16 Operating principle of a Roots pump Figure 4.17 Operating principle of a gas-cooled Roots pump Figure 4.18 No-load compression ratio for air for Roots pumps Figure 4.19 Pumping speed of pumping stations with Okta 2000 and various backing pumps Figure 4.20 Operating principle of a side channel vacuum pump Figure 4.21 Degrees of freedom of a turbo-rotor Figure 4.22 Operating principle of the turbomolecular pump Figure 4.23 Specific turbopump pumping speeds Figure 4.24 Pumping speed as a function of relative molecular mass Figure 4.25 Pumping speed as a function of inlet pressure Figure 4.26 Operating principle of a Holweck stage Figure 4.27 Compression ratios of pure turbopumps and turbo drag pumps Figure 4.28 Typical UHV residual gas spectrum (turbopump) Figure 4.29 Standard HiPace turbopumps Figure 4.30 ATH M magnetic-levitation turbopump Figure 4.31 Example of turbopump accessories (for HiPace 300) 5 Vacuum measuring equipment Figure 5.1 Design of a diaphragm vacuum gauge Figure 5.2 Design of a capacitative diaphragm vacuum gauge Figure 5.3 Operating principle of the Pirani vacuum gauge Figure 5.4 Pirani vacuum gauge curves Figure 5.5 Design of an inverted magnetron Figure 5.6 Operating principle of an inverted magnetron Figure 5.7 Design of a Bayard-Alpert vacuum gauge Figure 5.8 Pressure measurement ranges and measurement principles Figure 5.9 Application concepts DigiLine Figure 5.10 ActiveLine application concepts Figure 5.11 TPG 300 control unit for ModulLine sensors 6 Mass spectrometers and residual gas analysis Figure 6.1 Total and partial pressure measurement Figure 6.2 Components of a mass spectrometer Figure 6.3 Operating principle of the 180° sector mass spectrometer Figure 6.4 Sector field mass spectrometers: (a) Ion source, (b) Detector Figure 6.5 Quadrupole deflection voltage Figure 6.6 Stability diagram of a quadrupole filter Figure 6.6b Section through an axial ion source Figure 6.7 Ionization as a function of electron energy Figure 6.8 Fragment ion distribution of CO2 Figure 6.9 Grid ion source Figure 6.10 Discrimination of EID ions Figure 6.11 Crossbeam ion source Figure 6.12 Gas-tight axial ion source Figure 6.13 SPM ion source Figure 6.14 PrismaPlus ion sources Figure 6.15 Operating principle of a Faraday Cup Figure 6.16 Secondary electron multiplier (SEM) SEV Figure 6.17 Operating principle of continuous secondary electron multiplier (C-SEM) Figure 6.18 QMS with gas inlet system and crossbeam ion source Figure 6.19 Differentially pumped QMS with various gas inlets Figure 6.20 Potential curve in an electrically biased ion source Figure 6.21 90° off axis SEM 7 Leak detection Figure 7.1 Bubble leak test on a bicycle tube Figure 7.2 Working principle of a sector mass spectrometer Figure 7.3 General leak detector flow chart Figure 7.4 Operating principle of quartz window sensor Figure 7.5 Vacuum diagram of the MiniTest quartz window leak detector on a system Figure 7.6 Local leak detection with sniffing and vacuum methods Figure 7.7 Integral leak detection with the vacuum method Figure 7.8 Integral leak detection of enclosed objects with the sniffer method Figure 7.9 Mass spectrum of a recipient with air leak Figure 7.10 Leak testing unit for refrigerant hoses Figure 7.11 Helium recovery unit 8 Contamination management solutions Figure 8.1 Moore’s Law (documented by the number of transistors in Intel and AMD microprocessors) Figure 8.2 Wafer handling with cassettes (left) and FOUPs (right) Figure 8.3 Diamondlike crystal structure of Silicon Figure 8.4 Classification of airborne molecular contamination AMC Figure 8.5 AMC Sources in FOUPs Figure 8.6 Airborne polar and non polar molecules Figure 8.7 Gas-solid interaction at a surface Figure 8.8 Surface sites Figure 8.9 Surface after etching Figure 8.10 Crystal growth at the edge of a wafer pattern Figure 8.11 Pod regenerator process cycle « ‹ 1 2 3 4 › » Newsletter Sitemap Data Protection Legal Notice General Terms and Conditions Newsletter Literature Ordering Downloads Contact Group Press Investor Relations Careers © 2021 Pfeiffer Vacuum GmbH