DEEN EUV-RETICLE-HANDLING EUV-Reticle-Handling These handling systems for EUV-Reticles by Fabmatics fulfill requirements like reliablitiy and cleanliness in EUV-Reticle handling. High Cleanroom Quality Handling As a special lighting technology used to manufacture high-end microelectronic construction elements, EUV technology sets the highest standards for reliability and cleanliness when handling EUV reticles. Fabmatics solutions comply with these standards. Handling systems for EUV reticles are available as stand-alone devices, e.g. as reticle sorters, and as equipment-front modules, e.g. as loading systems. An Fabmatics load port for RSP pods and dual pods, a wide range of detection modules, grippers and flip equipment are important components here. Contact us! Sales Team Europe Phone: +49 351 65237-215 E-Mail Sales Team USA Phone: +1 801 7480476 E-Mail Sales Contact Singapur & Malaysia Phone: +65 9106 2386 E-Mail Sales Contact Taiwan & China Phone: +886 963050367 E-Mail MORE PRODUCTS PREVIOUS HERO®FAB Mobile robot system for quick transport and automatic handling of wafer cassettes HERO®FAB SCOUT Autonomously navigating vehicle as the flexible alternative to fixed installed transport systems SCOUT NEXT Back to Overview © 2021SitemapLegalData protection informationGTCNewsletter To provide you with the best service online, this website uses cookies (see our privacy policy for more information). By clicking "Allow All" you agree to the use of cookies that help us improve this website and your user experience. By checking or unchecking the boxes and clicking on “Confirm selection", you can individually determine which cookies you wish to activate. STRICTLY NECESSARY MARKETING FUNCTIONALITY ALLOW ALL DECLINE NON-ESSENTIAL SHOW DETAILS