BONDING SERVICE PROCESS CONTROL SPUTTERING TARGETS REPAIR SERVICE SPARE PARTS CONTACT OUR TEAM SPM WET CLEAN IMPROVED ESC Would you like to avoid arcing, sticking, high Helium flow, and achieve 2 times longer lifetime? Original Bi-polar ESC’s and the second source ESC’s on the market all have the same lifetime limitations. They lifetime ends too early because of: High helium flow High ESC current Arcing Sticking SPM improved everything needed for a longer ESC lifetime: The ESC is not attacked by chemical solutions formed during the wet clean The ESC can withstand the WAC much better (Waferless Auto Clean) The usual arcing spots are determined Nice round edges, without sharp corners The principle and base materials of our ESC are the same as at the OEM, which means that your process will stay exactly the same. Not like when you would change over to ceramic or Yttria coated products, which will change your process dramatically. Qualification of our Bipolar ESC in your production line will prove that. We have Wet clean proof ESC’s replacing the following OEM numbers: 718-094523-281 718-043893-801 718-092326-081 718-043893-818 718-094756-081 718-043893-811 Let's comunicate! For all the further information please contact Philipp Quaderer via mail: philipp@spm.li or via Phone: +4237928027. Product and services Bonding service Process control Sputtering targets Resources Blog PDF's Checklists Repair service Company About Us Our team Contact Us Join Our Team Legal Terms and Conditions SPM Privacy Policy SPM Cookie Policy Impressum Spare Parts Follow us SUBSCRIBE TO OUR NEWSLETTER +423 375 80 20 sales@spm.li Bendererstrasse 29 9494 Schaan I Liechtenstein

BONDING SERVICE PROCESS CONTROL SPUTTERING TARGETS REPAIR SERVICE SPARE PARTS CONTACT OUR TEAM GROUNDSTRAPS Grounding of your moving module with quality static eliminator Are you suffering from rupture of copper bands due to thin and sensitive copper wires? Do you need to replace your groundstraps every few weeks or even often? Would you like to increase your lifetime for 2-4 times? You can achieve a longer lifetime and reduce costs with our improved, more resistant Inconel Groundstraps vs your existing copper groundstraps. Inconel materials offer you more resistant and bendable groundstraps for more process uptime. SPM OEM Picture 2. Comparison of our groundstraps vs OEM after 3 weeks Picture 1. Parallel installation of our Inconel groundstraps and Copper groundstraps Let's comunicate! For all the further information please contact: Diana Olan via mail: diana@spm.li or via Phone: +423 794 57 91 or Estera Bujny via mail: estera@spm.li or via Phone: +423 791 79 24. Product and services Bonding service Process control Sputtering targets Resources Blog PDF's Checklists Repair service Company About Us Our team Contact Us Join Our Team Legal Terms and Conditions SPM Privacy Policy SPM Cookie Policy Impressum Spare Parts Follow us SUBSCRIBE TO OUR NEWSLETTER +423 375 80 20 sales@spm.li Bendererstrasse 29 9494 Schaan I Liechtenstein