GasShield® Gasket Filters Mott GasShield® Gasket Filters are built to withstand extreme operating conditions and deliver optimum filtration performance. GasShield Gasket Filters allow integration of a filter without adding length to the gas system and are compatible with most inert and specialty gases, fit inside 1/4 ” face seal fittings, with either 1” or 3” long porous elements, and come complete with integral face seal gasket. DOWNLOAD DATA SHEET INFORMATION REQUEST Product Interest ▾ Market ▾ Country ▾ Call us at 860.747.6333, or submit an information request form and someone will get back to you within 48 hours. SUBMIT Login or Create a My Mott Account to Download Files from our Configurator Literature & Data Sheets TYPICAL APPLICATIONS In-line filtration in tool components Protect components in gas boxes Mott Semiconductor Products Catalog Explore Mott’s wide range of high purity filters, diffusers and flow restrictors designed exclusively for semiconductor manufacturers. Gasket Filter Installation and Replacement Instructions Gasket Filter basic installation and replacement instructions GasShield Gasket Filters Overview Nickel and stainless steel gasket filter specifications Product Specs Operating Conditions » Maximum Operating Temperature for Inert Gas: 450°C » Maximum Differential Pressure: 1000 psid Forward or Reverse (68.9 barg) Materials » Hardware: 316LSS or Nickel » Filter Medium: 316L SS or Nickel » Hastelloy or custom materials contact us Specifications Particle Removal Size: ≥ 0.003 μm Helium Leak Rating: 1 x 10-9 atm cc/sec Moisture Contribution: <10 ppb after 1 hour at low-flow ambient purge per SEMI F27 test method Total Hydrocarbons: Below detectable limits per SEMASPEC 90120396B test method Particle Shedding: Zero particle contribution above background (<1 particle/ft³) per SEMI F43-0308 test method Flow Data More flow curves available, consult factory or spec sheets. Fittings & Dimensions Typical Installation Part Description Flow Rating (SLPM) Filter Material Face Seal Gasket Size (Inches) Element Length (Inches) Changeout Interval GSG-V4-1-N 1 Nickel ¼ 1 System Dependent GSG-V4-3-N 3 Nickel ¼ 3 System Dependent GSMM-75-010-33 GSMM-75-030-33 20 Nickel ¼ 1 System Dependent GSG-V5-1-2N 50 Nickel ½ 1 System Dependent GSG-V4-1-S 1 316L SS ¼ 1 System Dependent GSG-V4-3-S 3 316L SS ¼ 3 System Dependent GSG-V4-1-2S 20 316L SS ¼ 1 System Dependent GSG-V5-1-2S 50 316L SS ½ 1 System Dependent *Custom designs and fittings available. Videos & Articles How to Tackle the Top 10 Semiconductor Filtration Challenges, Part 1: Maximize Die Yield, Filter Particles as Small as 1.5 nm How To Tackle The Top 10 Semiconductor Filtration Challenges: Series Intro Our Design Capabilities Flow/pressure drop curves and filtration efficiency for virtually any system design Gas compatibility considerations Custom filter media, fitting material and hardware design configurations available Relevant Services Design Expertise – From start to finish, we customize solutions based on your design parameters – challenge us! Fluid Modeling – Our extensive applications have built a library of data to increase the accuracy of our flow models to provide initial performance and feasibility estimates prior to building prototypes. Extensive Partner Network – If a material is not listed or capability not in-house, we maintain an extensive network of partners for new material procurement, advanced manufacturing capabilities, and validation testing. Engineering Support – Utilize our expert project engineers to select the right gasket filter for your application. 860-747-6333 Headquarters: 75 Spring Lane Farmington, CT 06032 Customer Innovation Center: 84 Spring Lane Farmington, CT 06032 About Find a Distributor Credit Application Careers Terms & Conditions Privacy Policy Sitemap SUBSCRIBE Join our newsletter to stay up to date on features and releases © 2021 Mott. All rights reserved. Privacy Policy Terms of Service