EN DE ABOUT AMO RESEARCH PRODUCTS & SERVICES DOWNLOADS CONTACT Home » Products & Services » Services SERVICES The technology transfer from the laboratory to innovative fabrication sites is one of the major pillars in the mission of AMO. TRANSFER OF KEY ENABLING TECHNOLOGIES TO INNOVATIONS The transfer of key enabling technologies (KET) accumulated in AMICA, the nano laboratory of AMO GmbH, in past and current research projects to innovative groups at University and industries is therefore of major interest. Traditionally, technology transfer takes place within three routes: with AMO as an ordinary partner in a consortium for funded projects with AMO as a subcontractor within diverse R&D projects within joint developments with innovative partners For all these partners AMO offers the perfect equipped CMOS-Cleanroom. In the following list processes and products currently offered to partners and customers are summarized: ADVANCED LITHOGRAPHY A great amount of requests comprising the use of AMO’s advanced lithography targets the manufacturing of masters and templates used for imprinting purposes. By utilizing all available cleanroom equipment AMO offers a highly flexible platform for processing templates. The specifically used lithography technique depends on the requested minimum feature size, pitch and other specific parameters of the master. Available lithography tools are: i-line lithography Interference lithography Electron beam lithography The structures are then transferred into the substrate via Reactive Ion Etching. Other fields of application of advanced lithography comprise the processing of structures with a very low required minimum feature size, which is typically required for the highly accurate and flexible fabrication for nanoelectronics & nanophotonics. These demands are satisfied by the usage of the e-beam lithography. For more details on the possibilities in this realm please refer to the corresponding FactSheets (“Masters and Stamps” and “E-Beam Lithography“) in the sidebar on the right-hand side. ACTIVE AND PASSIVE PHOTONIC COMPONENTS GRAPHENE FLAKES AND DEVICES CMOS DEVICE PROTOTYPING PRODUCTS & SERVICES AMONIL®: UV NANOIMPRINT RESIST INTERFERENCE LITHOGRAPHY GRATINGS SERVICES CLEANROOM FACILITIES CONTACT Dipl.-Ing. Herbert Kleinjans Technology Transfer +49 (0) 241 - 8867 125 kleinjans@amo.de DOWNLOADS FACTSHEET AMONIL® FACTSHEET CMOS FACTSHEET EBEAM LITHOGRAPHY FACTSHEET GRAPHENE FACTSHEET INTERFERENCE LITHOGRAPHY FACTSHEET MASTERS AND STAMPS FACTSHEET NANOGRATINGS FACTSHEET NANOPHOTONICS FACTSHEET SERVICE AND PROTOTYPING FACTSHEET UV NANOIMPRINT LITHOGRAPHY About AMO »People at AMO »Contact/Directions »Meet Us »Career @ AMO »News »Spin-offs Research »Graphene Electronics »Nanophotonics »Nanoimprint »Sensor Technology »Publications Products & Services »AMONIL® »IL Gratings »Services »Cleanroom Facilities General Terms| Imprint| Privacy Policy| Intranet We use cookies to ensure that we give you the best experience on our website. If you continue to use this site we will assume that you are happy with it. Ok Read more