Newsletter TRIOPTICS Global | English µPhase® Interferometer for measurements of the surface and wavefront deformation μPhase® interferometers permit fast, high-precision measurements of the surface and wavefront deformation of reflective and transmitting components made from glass, plastics, metal, ceramics or similar materials. The objective and reliable results fulfill the highest quality management requirements. The non-contact measurement process helps prevent damage to the sample. Highly precise The high-precision measurement is carried out over the entire surface and wavefront deformation of flat, spherical, cylindrical, toric and aspherical components Mulitpurpose µPhase® can be used universally for all surfaces with a reflectivity ranging from 0.2 % to 100 % made from materials such as glass, plastics, metal and ceramics Reliable The objective digital measurement prevents operator influence. Likewise the robust and dustproof housing ensures high reliability. Product Overview μPhase® interferometers are very compact, small and lightweight digital devices that can be used in almost any work environment. With support from the μShape software, extensive measurement analyses can be performed. The μPhase® sensor is the basis for interferometry measurements at TRIOPTICS. The sensor is modular and can be configured with various measurement diameters and stands for specific measurement tasks. In addition, customized solutions can be offered at low cost. µPhase® 3.1/3.2/3.3. Highly flexible The Twyman Green interferometer sensor µPhase® is available in identical designs for different resolutions and can be integrated into your setup. Focusing and adjustment of surface reflectivity is possible (µPhase® 3.3 only) Integration in manufacturing machines and production lines is possible µPhase® VERTICAL Versatile Highly flexible and fully equipped interferometer system for manufacturing, workshops and laboratories Motorized vertical z axis Unique design for all types of reflection and transmission measurements Integrated automatic radius measurement More information µPhase® VERTICAL PRO Automation With its tray, the µPhase® VERTICAL PRO can automatically measure 20 to 30 samples. Measurement of spherical, torical and aspherical lenses as well as samples made out of glass, plastik or metal Highest reprecision for radii of up to 50 nm Freely configurable and quickly exchangeable sample holder µPhase® PLANO DOWN Compact structure µPhase® PLANO DOWN with its compact design is suitable for the measurement of flat components in research and development as well as in production Measurement range for diameters of up to 150 mm Samples are placed on the granite plate and measured from the top Vibration insulation is usually not required since the unit has a solid granite base Compact design and small footprint More information µPhase® PLANO UP Plan lenses in production For a cost-efficient quality control of optical flat surfaces in production µPhase® PLANO UP is the perfect choice. Measurement range for diameters of up to 100 mm Compact design for small spaces, can be placed right next to the production machine Samples are positioned at the top of the unit on a ring chuck or three-point support and measured from below More information µPhase® SPHERO UP Spheres in production Spherical surfaces can be controlled fast and cost-effectively in production with the µPhase® SPHERO UP. Measurement range for diameters of up to 50 mm Compact design for small spaces, can be placed right next to the production machine Samples are positioned at the top of the unit on a ring chuck or three-point support and measured from below More information µPhase® ST/ST+R Flexible and cost-efficient µPhase® ST/ST+R can be used flexibly and cost-effectively in research and development as well as in production. Measurement of flat and spherical samples Compact table top stand for vertical measurements with small footprint Optimal sample alignment with integrated tip/tilt and xy translation stage More information µPhase® UNIVERSAL Highest variability Due to its multi-purpose structure and modular design µPhase® UNIVERSAL offers highest variability in research and development 2, 4 or 6-inch measurement system for the testing of flat and spherical surfaces Horizontal structure for the measurement of long radii Compatible with other conventional 4-inch lenses More information µPhase® Customized Solutions Application specific development Its modular structure and compact design make the µPhase® a highly versatile interferometer – even beyond usual measurement requirements. Customized solutions for special applications can be implemented based on standard components Development of additional customized components and software modules More information Request μPhase® Applications µPhase® interferometers enable the following measurements and applications: Measurement of flat, spherical, cylindrical, toric and aspherical surfaces in reflection Measurement of the absolute radius of spherical, toric and aspherical lenses Testing of adaptive mirrors Measurement of wavefront deformation of transparent samples Measurement of contact lenses and forming tools Quick offline or online measurement of the tool offset of ultra-precision diamond lathes after tool changes Testing of numerous high-precision, non-optical components Automotive applications Medical applications Software µShape Interferometer Software Description With the freely configurable µShape software in the current version 8, µPhase® is ideally equipped for use in both production as well as research and development. The software controls the measurement, provides comprehensive options for analysis and offers full documentation. Measurement templates provide maximum transparency about the measurement process and permit the quick documentation of test results. The clearly structured, menu-based user interface of µShape always complies with the comprehensive use of µPhase® and can be expanded in many different ways via the available modules. These modules can be added at any time, even after purchasing the µPhase® system. The µShape software was developed primarily for µPhase® operation but can also be used for operating laboratory and workshop interferometers from other manufacturers. The development of customized functions is possible. Features Functions Technical Data Parameter µPhase® PLANO DOWN µPhase® PLANO UP µPhase® SPHERO UP µPhase® ST/ ST+R µPhase® VERTICAL µPhase® VERTICAL PRO µPhase UNIVERSAL Utilization Production Production Production R&D, Production R&D, Production Production Measurement in batches R&D Sample type Flat Flat Spherical Flat Spherical Flat Spherical Toric Aspheric Cylindrical Spherical Toric Aspheric Flat Spherical Toric Aspheric Cylindrical Sample size (measurement range) Different versions up to max. Ø 150 mm Different versions up to max. Ø 150 mm Sample size depending on measurement objective (Measurement objective as link to the overview from the brochure page 16 + 17 Max. Ø50 mm Sample size depending on version and test lens (Measurement objective as link to the overview from the brochure page 16 + 17) Max. Ø 100 mm Sample size depending on measurement objective (Measurement objective as link to the overview from the brochure page 16 + 17) Ideal for small diameters Max. Ø 150 mm Sample size depending on version and test lens (Measurement objective as link to the overview from the brochure page 16 + 17) Max. sample weight 5 kg 1.5 kg (depending onconfiguration) 1.5 kg (depending on configuration) 1.5 kg 1.5 kg 1.5 kg 1.5 kg Alignment tools Manual tilt Manual tilt Manual XY adjustment, tilt table and z-focusing (a few mm) Manual XY adjustment, tilt table and Z-focusing Manual tilt table Manual XY table Motorized, computer-controlled Z-axis Motorized, computer-controlled X/Y/Z-axis Manual tilt table Manual XY table Manual Z-axis Test range radii measurement Not available Not available Typically 10 mm ... 200 mm Relative radius measurement compared to a radius normal, range depends on test objective and holder Approx. 220 mm Absolute radius measurement with gauge (analog or digital) Approx. 300 mm Integrated, automated absolute radius measurement Max. 50 mm Integrated, automated absolute radius measurement Up to 2 m, depending on test objective and length of the radii measuring rail Integrated absolute radius measurement especially for long radii Accuracy radius measurement - - Depends on the accuracy of the radius normal Depends on gauge: 0,5-5 µm Depends on gauge: 0,1-5 µm ±0.1 µm 30 µm Dimensions (h x w x d) Base: S: 300 x 300 mm² (free working distance 180 x 180 mm²) L: 440 x 440 mm² (free working distance 330 x 330 mm²) Free working height : 110 mm / 155 mm / 200 mm 500 x 200 x 200 mm³ 500 x 200 x 200 mm³ 500 x 300 x 400 mm³ moving range between 160-300 mm (depends on configuration) 830 x 350 x 420 mm³ 350 x 530 x 750 mm³ 500 x 2500 x 400 mm³ (width depends on length of the rail) Weight S: 25 kg L: 45 kg 5 kg ... 20 kg (depends on configuration) 5 kg ... 20 kg (depends on configuration) 20 kg 55 kg 100 kg 30 kg (depends on configuration) Type Table top device Table top device Table top device Table top device Table top device Table top device Table top device Options Transmission measurement CGH bracket for measurements of aspheres, cylinder or toric surfaces MTF measurements Transmission measurement CGH bracket for measurements of aspheres, cylinder or toric surfaces MTF measurements Transmission measurement Download Technical Data µPhase® Technical Data µPhase® Sensor Parameter µPhase® 3.1 µPhase® 3.2 µPhase® 3.3 µPhase® 3.3 (FIZ) Camera resolution 608 x 608 pixels 1216 x 1216 pixels 1216 x 1216 pixels 1216 x 1216 pixels Reflection settings Fixed setting, suitable for 4 % … 80 % Fixed setting, suitable for 4 % … 80 % 0.5 %, 1 %, 4 %, 80 % 0.0 %, 1 %, 4 %, 80 % Measurement wavelength 632.8 nm others on request 632.8 nm, others on request 632.8 nm, others on request 632.8 nm, others on request Focusing option No No Yes Yes Dimensions (h x w x d) 121 mm x 97 mm x 57 mm 121 mm x 97 mm x 57 mm 121 mm x 97 mm x 57 mm 121 mm x 97 mm x 57 mm Weight 1,1 kg 1,1 kg 1,1 kg 1,1 kg Type Twyman-Green phase-shifting interferometer Twyman-Green phase-shifting interferometer Twyman-Green phase-shifting interferometer Twyman-Green phase-shifting interferometer convertable to Fizeau measurement mode PV Repeatability λ/400 λ/400 λ/400 λ/400 RMS Rep eatability λ/1200 λ/6500 λ/6500 λ/6500 Measurement uncertainty with PC-based evaluation λ/20 others on request λ/20 others on request λ/20 others on request λ/20 others on request Download Technical Data µPhase® Sensor Request μPhase® Upgrades & Accessories Generell Replacement of the µPhase® sensor from µPhase®1 to µPhase®3.3 for a camera resolution increase from 608 x 608 pixels to 1216 x 1216 pixels Standard wavelength of 632.8 nm, wavelength between 355 nm and 1100 nm possible on request Horizontal or vertical stands The basic µPhase® units and flat lenses have a bayonet connection that permits quick and easy changes between various system structures. Flat and spherical calibration surfaces with various diameters Uncoated Mirrored License for offline analysis and documentation at office workstations without direct access to µPhase® hardware Camera lenses Partnership with InterOptics Our exclusive partnership with InterOptics, LLC offers additional possibilities. In Germany and selected countries we market our µPhase® as well as the interferometer OptoFlat – a specialist for plano optics. OptoFlat Specialist for flat optics The short coherence interferometer OptoFlat is specialized in the measurement of flat optics. Production ready and research capable flatness interferometer with sub-nanometer precision LED illumination system minimizes coherent artifacts Hand-wave no-touch sensor starts measurement without keyboard inputs Request OptoFlat Knowledge Base Interferometer Twyman-Green setup The most flexible interferometer setup A Twyman-Green interferometer is a modified Michelson interferometer. Here the beam splitter is separated from the reference surface. The advantage of this configuration is greater flexibility, because both interferometer arms can be modified independently of each other. So the intensity of the reference and test arm can be easily adapted to each other depending on different sample reflectivities in order to get maximum fringe contrast. This increases the range of applications enormously. Only a maximum fringe contrast enables a maximum resolution in depth. The reference surface can be a surface that is inexpensive and accurately producible regardless of the sample size. The adaption to the sample size is done by conventional beam shaping optics introduced to the test arm. Contrary to the beam shaping optics for Fizeau interferometers these optics do not require an expensive Fizeau surface as a final surface. As a consequence of this flexibility, the interference patterns are not caused by the sample errors only but also by the aberrations of the additional optics in the individual interferometer arms. However, nowadays samples are no longer evaluated by visual inspection of the fringe pattern but by computer controlled analysis of the phase map causing the fringe pattern. During this analysis the aberrations of the additional optics can easily be taken into account. Finally, the software provides an objective digital measurement result. More knowledge for experts This article inspired you? Are you looking for further knowledge transfer? Then you might also be interested in the following topics … Wavefront measurement Twyman-Green construction Fizeau construction Fizeau interferometer for wavefront and surface measurement Fizeau setup The most commonly used interferometer setup The last surface of the beam shaping optics is the so called Fizeau surface. It has to have the same shape as the sample to be tested (commonly spherical or flat) and is placed concentrically into the optical path, so the individual rays intersect perpendicular to the Fizeau surface. The majority of the light passes the Fizeau surface and is reflected at the test surface. The returning light interferes with the part of the light reflected at the Fizeau surface. So the Fizeau surface acts as beam splitter as well as reference surface. So the cavity is formed by the gap between the Fizeau and the test surface containing no additional optics. That is the reason why a Fizeau interferogram commonly directly shows the deviations of the test sample from the reference surface, i.e. Fizeau surface. The quality of the Fizeau surface determines the accuracy of the Fizeau interferometer. Fizeau surfaces are commonly available with a quality of λ/10 – λ/20 PV, better on request. 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