Plasma (CCP) + static magnetic field simulation ( published in "Discharge Research" Vol. 57, No. 3 ) Introducing Quantemol-N, software for estimating electron impact cross-section data A source of information to help you get started with plasma and thermal CVD simulations Click here for the past major update history ☆ At Athenasys, in addition to the experience of experiments and measurements related to semiconductor manufacturing equipment, we make use of the know-how cultivated from the simulation of equipment / reactor thermal analysis, CVD / plasma / etching, etc., and use fluid / CAE / CFD software as a meaningful tool. By utilizing it, we will help you to accumulate results together with our customers. ☆ The blog is currently closed. © 2008 --2017 ATHENASYS Co., Ltd. All Rights Reserved. (Our web has been confirmed to be safe by Norton Safe Web [external site]) * We do not use LINE (app) from the viewpoint of security.