IC MANUFACTURING COMPOUND SEMICONDUCTORS WAFER LEVEL PACKAGING TECH PAPERS COMPANY INVESTORS CONTACT Plating System — Ultra ECP map For front-end dual-damascene applications For dual-dual damascene applications, copper metal plating is product dependent and has a major impact on yield and reliability. Major process features include filling, metal thickness and thickness uniformity; with film properties, defects, impurities also key process indicators of ECP process performance. Building on our proven Electro-Chemical-Plating (ECP) technology, the Ultra ECP map is configured with ACM’s exclusive Multi-Anode Partial Plating function, which allows the deposition of the copper metal layer on a dual-damascene structure, which is compatible for 55nm/40nm/28nm/14nm applications and beyond. ACM has numerous patents, awarded and pending, in many areas of plating technology—such as multizone anodes for superior uniformity control, rubber-seal plating chucks for superior sealing, partial pulse plating for pattern structure filling, etc. Main Benefits Partial pulse plating technology Independent module design Compatible with ultra-thin seed layer High throughput and uptime Lower cost of consumables and cost of ownership Extends to Cu plating application Features & Specifications System for 300mm wafers Up to 3 Load Ports Up to 4 plating chambers with partial pulse plating system Up to 4 cleaning chambers Up to 8 anneal chambers Plating uniformity: WIWNU < 1.5%, WTWNU < 1.5% Interested in Plating System — Ultra ECP map? Contact Us News © 2021 ACM Research, Inc.. All rights reserved.

IC MANUFACTURING COMPOUND SEMICONDUCTORS WAFER LEVEL PACKAGING TECH PAPERS COMPANY INVESTORS CONTACT To Contact ACM Simply call us or submit the form below ACM USA • Headquarters ACM Research 42307 Osgood Rd, Unit I Fremont, California 94539 Tel: +1-510-445-3700 Fax:+1-510-445-3708 ACM Shanghai ACM Research Building 4, No. 1690 Cailun Rd. Zhangjiang Hi-Tech Park Shanghai, China 201203 Tel: +86-21-50808868 Fax: +86-21-50808860 Sales: +86-21-50276550 ACM Wuxi ACM Research Building IC Design 604-1 No.33-1 Xinda Rd. Wuxi, Jiangsu, China 214208 Tel: +86-510-85205052 Fax: +86-510-85205052 ACM Korea ACM Research 402,Hyundai City Plaza, 2106 Gyeong chung-daero, Bubal-eup,Icheon-si, Gyeonggi-do,Republic of Korea 17332 Tel :+82-70-41006699 Fax :+82-31-6356697 Whistleblower Hotline Tel: +1-888-702-0023 To contact ACM Research and get more information, simply submit this form — we’ll get back to you very shortly Name:* Company:* State / Province:* Email:* Phone:* Message:* Product of Interest / Application / Substrate Size: Where did you FIRST learn about ACM?* Online Search From a Colleague Magazine Article or Ad Trade Show Other If online search, what did you search for? News © 2021 ACM Research, Inc.. All rights reserved.