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Site Map | English Product SearchSite search Search WEB catalog Product Information » WEB Catalog Product Line Direction control equipment Air cylinder Rotary actuator / air chuck Vacuum equipment Compressed air purification equipment Modular FRL / pressure control equipment Lubrication equipment Pipe fittings & tubes Drive control equipment Silencer / exhaust cleaner / blow gun / pressure gauge Switch / sensor Anti-static equipment / ionizer (static electricity elimination equipment) Fluid control equipment Chemical Valve / Pipe Fitting & Needle Valve / Tube Process pump (diaphragm pump) Equipment for process gas Industrial filter / sintered metal element Temperature control equipment Electric actuator / electric cylinder High vacuum equipment Hydraulic equipment Auxiliary equipment for instrumentation Catalog by theme / industry Clean / low dust generation Copper-based / Fluorine-based non-specification 20-series Rechargeable battery compatible series 25A-series Rechargeable battery compatible series 90-, 91-, 25-series ISO standard compliant product Equipment for arc welding process Adobe Flash Player 10 or above is required to view the digital catalog . Please download it from the button below. Name / series name / model search Please search by name, series name, model Search within the WEB catalog site Model search A B C D E F G H I J K L M N O P Q R S T U V W X Y Z Please select a model acronym Always closed high vacuum solenoid valve XSA Category » High Vacuum Equipment » High Vacuum Valve Category » Fluid control equipment » 2/3 port solenoid valve for fluid control / 5MPa / water / air / dry air / chemical ・ Minimum working pressure: 1 × 10 -6 Pa (abs) ・ Leakage amount: Internal 1.3 × 10 -9 Pa ・ m 3 / s, External 1.3 × 10 -11 Pa ・ m 3 / s ・ Two types of joints are available ・ Power consumption: Up to 25% reduction ・ Mass: Up to 18% reduction 0.5kg → 0.41kg download CAD instruction manual Catalog PDF (3MB) Other materials Safety Precautions 　Specific Development Product Information series Valve type Fluid used Piping connection method Piping size XSA Always closed Air inert gas Face seal fittings Compression fittings 1/4, 3/8 Aluminum high vacuum L-shaped valve XLA Category » High Vacuum Equipment » High Vacuum Valve ・ Aluminum body adopted Uniform baking temperature Light weight ・ Compact Outgas less Heavy metal contamination ・ Bellows can be replaced download CAD instruction manual Catalog PDF (2.2MB) Other materials Safety Precautions 　Specific Development Product Information series Operation method Shaft seal method Valve type Material Flange size XLA Air operated Bellows seal Single action (NC) Body: Aluminum alloy bellows: SUS316L 16-80 ▲ To the top of the page HOME Inquiries Before using ・ Personal information Company Profile IR information New graduate recruitment information English Copyright © SMC Corporation. All Rights Reserved.