Industries General Vacuum General Vacuum The unique technical features of EBARA dry vacuum pumps ensure a universal utilization for all vacuum needs. COMPONENTS Small Footprint Vacuum components for highly automated production lines, e.g. in the automotive industry, are found in press shops, car body construction and final assembly. The pumps must attain the highest quality requirements. The unique technical features of EBARA dry vacuum pumps are applied with standalone pumps, in coating processes and coating systems. The special features of the ESA series, large roughing pump in combination with large pumping speed roots blower, make them the ideal pump for load lock and unload lock use. Core Benefits Robust and reliable equipment High return of investment Excellent cost of ownership ratio Learn more about our Components. COMPONENTS Applications for General Vacuum Requirements Diverse industries require high level vacuum, for example, coating industry, automotive sector with press shops, final assembly lines or body construction. EBARA has the right technological solutions. Industry Vacuum Drying Coating Leak Detection Systems Machine Tooling Flat Panel Display (FDP) Magnetic Media Medical Engineering Do your components need an overhaul? SERVICE EBARA Precision Machinery Europe GmbH Contact About EBARA Service Quick Links Privacy Policy Legal Notice © EPME 2021

Systems CMP Tools Leading Technology The Champions – CMP Tools for Perfection in Planarization Processes. To Be On Top. As a world market leader in CMP systems, we provide the semiconductor industry with state-of-the art design and performance to meet the most advanced fabrication demands such as perfect planarization technology for 150 mm, 200 mm and 300 mm wafer production. Fast Growing Installation Base – the F-REX200M2 The F-REX200M2 polishes 200 mm wafers with high k-materials and aluminium layers. Equipped with user-oriented system configuration, the modular design is suitable for multiple process setups. Also available for 150 mm wafers is the F-REX150M2. GET IN TOUCH The Best-in-Class CMP Tool – the F-REX300X The F-REX300X polishes 300 mm wafers. With four platens and a layout for different parallel and serial polishing modes to target Cu and other advanced applications. CONTACT US Core Benefits High process performance High volume manufacturing Energy saving design concept Customer specific options High reliability Experience in CMP since 1992 Applications for F-REX Oxide ILD (Interlevel Dielectric) STI (Shallow Trench Isolation) Tungsten Copper for IC Fabrication MEMS SOI (Silicon On Insulator) Magnetic Media You might also be interested in: PROCESS Gain leverage Accelerate product and process development. More information SUBSTRATE PLATING Pick up speed Advanced mask plating processes with high performance. More information SERVICE By your side Support, field service assignments and spare parts. More information Do you need Service support? GET IN TOUCH Best reliability in class. Best return on investment in class. 100% Peace of Mind LEARN MORE EBARA Precision Machinery Europe GmbH Contact About EBARA Service Quick Links Privacy Policy Legal Notice © EPME 2021