Login Main menu PRODUCTS APPLICATIONS EDUCATION & RESOURCES SUPPORT ABOUT US BLOG CONTACT Semiconductor Applications Chemical & Pharmaceutical Processes Coil Coating Oil & Gas Industry Pollution Control Process Ovens & Dryers Pulp Mills Semiconductor Solvent Based Printing Storage Wastewater Treatment Semiconductor manufacturing facilities employ a number of hazardous gases in their production processes. Whenever these gases are stored, distributed or used in manufacturing processes, there exists the potential for a hazardous condition. The primary hazards associated with these gases include fire, explosion, and contamination resulting in product loss or unscheduled preventative maintenance. These gases must be continuously monitored to ensure the health and safety of employees, to protect property, as well as to maintain regulatory compliance. Continuous gas monitoring in semiconductor facilities is a requirement of local and state regulations. Monitoring within the semiconductor plant requires gas detection systems that can accommodate a variety of combustible and toxic gas applications with both single and multi-sensor network solutions. The SmartMaxII gas detection system is excellent for both large and small gas detection applications. It is designed to work with Control Instruments’ catalytic and electrochemical sensors for LFL/LEL and PPM monitoring. Examples of semiconductor applications include: Parts per million detection in ventilated gas cabinets, enclosures, process equipment chases and clean rooms, Flammability monitoring of LFL/LEL levels in and around process tools Area monitoring for toxics and combustibles in storage areas, distribution, delivery piping and equipment chases Hydrogen monitoring of CVD process tools Request a Price Quote White Paper Related Products Gas Sensors Specifications Application Notes Case History SmartMaxII Specifications Learn More Download PDF Oxygen Sensor Specifications Learn More Download PDF Hydrogen Sulfide Specifications Learn More Download PDF Hydrogen Sensor Specifications Learn More Download PDF General Product Brochure Learn More Download PDF Catalytic Sensor Specifications Learn More Download PDF Carbon Monoxide Sensor Specifications Learn More Download PDF +1-973-575-9114 Request Additional Information Search Twitter Facebook LinkedIn PRODUCTS: PrevEx Flammability Analyzer CalorVal BTU Analyzer Flame Ionization Detector Gas Sensors AcuPro Infrared Process Analyzer TECHNOLOGIES: Flame Temperature Analyzer Micro Combustion Calorimeter Flame Ionization Detector Infrared Analyzers Catalytic Sensors Electrochemical Sensors SUPPORT: Factory Repair Service Support FAQ Terms and Conditions Control Instruments Corporation • 25 Law Drive STE 1 • Fairfield, NJ • 07004-3295 • 973-575-9114 Copyright © 1998,2002 Control Instruments Corporation. All rights reserved