Home Products » Applications » Services » About Us » Contact Us MEMS (Micro Electro Mechanical Systems) MEMS devices are manufactured using processes on silicon adapted from the semiconductor industry to provide small-scale sensors, actuators, accelerometers and gyroscopes. MEMS devices generally require thicker films with: low intrinsic stress, uniform properties excellent step coverage. Using Expertech’s vast MEMS process experience and our standard recipes, we can help you to rapidly characterize your MEMS film processes. Expertech can provide one or more horizontal or vertical furnace systems configured for the following MEMS device processing steps: LPCVD Processes Low Stress Nitride (Si Rich Nitride) < 250 MPa Ultra-low Stress Silicon Nitride < 100 MPa Undoped Polysilicon or α-Silicon Phosphorous Doped Polysilicon or α-Silicon Boron Doped Polysilicon or α-Silicon Undoped Poly-SiGe Phosphorous or Boron Doped Poly-SiGe LTO TEOS Atmospheric Pressure Processes Wet or Dry Oxidation/Densification Inert Gas Anneals/Densification (N2, Ar, He) Reducing Atmosphere Anneals (Forming Gas) Semiconductor Solar MEMS Follow Our Blog Partner Log In © 2021 Expertech. All Rights Reserved.