News/Events Investors Career Tools My X-FAB Contact Search ABOUT US MARKETS TECHNOLOGY MANUFACTURING DESIGN SUPPORT Connecting the two worlds of microelectronics and microfluidics TECHNOLOGY OFFER APPLICATIONS PROTOTYPING PLATFORM OUR COMMITMENT RELATED NEWS Silicon-based Microfluidics Connecting the two worlds of microelectronics and microfluidics is a challenge and an opportunity at the same time. Smart integrated microfluidic systems are the key to connecting both worlds. Our extensive MEMS-oriented technology offering enables such innovative applications, including devices for next-generation DNA sequencing and liquid biopsy or microelectrode arrays for drug development or food safety testing. The benefits that come along with microfluidic devices, such as fast response time, low system costs or efficient handling of small fluid quantities, increase with growing level of integration. By linking the places of fluid handling and data analysis in the smallest space, we pave the way for the most successful point-of-care or point-of-need applications. As a side effect of this high level of integration, the system efficiency and reproducibility improve significantly. The parallel analysis of a large number of samples is then possible, resulting in much better statistics and ultimately improving the quality of the measured results. Silicon-based microfluidics refers first of all to micromanufactured devices for the chip-scale handling of small quantities of fluids. We create such devices by using proven silicon technologies, such as photolithography, etching or bonding, and combining silicon with other materials, like glass or polymers. In addition, silicon-based microfluidics involves the integration of microfluidic structures on silicon ASICs as on-chip combination. This combination is the key to creating smart integrated microfluidic devices. Technology Offer Our technology offer for silicon-based microfluidics comprises various elements that provide a sound basis for the design and manufacture of integrated microsystems. Our offer ranges from tailored interfaces between CMOS wafers and microfluidic elements to wafer-level assembly techniques like through-silicon via (TSV) and wafer bonding. It also includes various process capabilities, such as noble-metal processing, high-aspect-ratio deep reactive-ion etching (DRIE) or the deposition of various organic and inorganic materials. CMOS base wafer The basis for system integration are our mixed signal CMOS/SOI technologies combined with a tailored interface and noble metal electrodes ... more Microfluidic layer On top of our CMOS base wafer, you can add additional layers to enhance the existing surface with customized wetting or flow properties. ... more Integration layer Beyond integrated noble metal electrodes and additional functional cap layers the technology portfolio also covers ... more At home in both worlds – silicon and microfluidics As the leading analog/mixed-signal and MEMS foundry group, we have been at home in the field of silicon processing and microelectronics for decades. In the last years, we have received a growing number of requests to implement silicon-based microfluidics, especially for medical applications. As a consequence, we are striving to bring the world of silicon-based microelectronics together with the world of microfluidics. Our goal is to combine the deep understanding of physiology and fluid analysis of medical OEMs with our knowledge of high-volume semiconductor manufacturing technologies. To this end, we are continuously extending our capabilities for silicon-based microfluidics and have built up a track record with several customers for various applications in the area of microfluidics. We are at home in both worlds already – a home we call silicon-based microfluidics. Applications Point-of-care platform Provides diagnosis in five minutes and increases the survival rate after sepsis by 80% Lab-on-a-chip technologies Enable measurements of the effect of drugs on individual cells Cell sorters Isolate individual cells from liquid biopsy samples with 100% purity Prototyping Platform With our unique prototyping platform, we bring together the distinct worlds of microelectronics and microfluidics by implementing microfluidic structures directly on CMOS dies. Leveraging our XH035 350 nm high-voltage analog/mixed-signal CMOS process, we can carry out numerous microfluidic post-processing activities at our state-of-the-art MEMS manufacturing sites in Germany. Our customers benefit from the various standard process blocks we have developed, which are proven in silicon. Available process options include: Initial preparation of the CMOS wafer for microfluidic integration by means of planarized passivation along with through-passivation vias Attaching of noble-metal electrodes (either gold- or platinum-based) to act as interfaces for the fluidic samples Addition of a dry-film resist top layer (into which microfluidic channels can be scored) with an optional glass cap wafer To provide further assistance, the design house, testing operations and full turnkey suppliers in our X-Chain partner network can also be called upon, enabling even customers with limited prior expertise of creating a custom chip to always gain access to the services they need. Making Silicon-based Microfluidics Work – Solutions for Cost-effective Integrated Microfluidic Systems This webinar addresses the challenges that arise when combining integrated circuits with microfluidics. It focuses on process integration know-how including the creation of tailored interfaces between CMOS wafers and microfluidics elements. Replay of webinar organized by EUROPRACTICE can be watched here: Microfluidics is a highly challenging application-specific market, requiring fully optimized custom solutions and considerable investment. Thanks to our new microfluidics prototyping platform, we are helping to accelerate development cycles and lower financial thresholds, so that our customers can embark on innovative silicon-based microfluidics projects. DR. STEFAN ERNST, GROUP MANAGER BUSINESS & STRATEGY, BU MEMS Our Commitment Process integration expertise for on-chip microfluidics Scale-up to high-volume manufacturing, supporting long market entry cycles Fast time to market and competitive pricing thanks to the use of standard process blocks Capability of clean, dry and DNA-free device handling We are excited to help our customers develop their smart integrated microfluidic systems through the multitude of new process capabilities we can now offer. VOLKER HERBIG, VICE PRESIDENT BU MEMS Related news Oct 28, 2020 Unique Prototyping Platform from X-FAB Brings Together the Distinct Worlds of Microelectronics and Fluid Handling X-FAB Silicon Foundries SE has taken further steps to establish itself as the go-to foundry for silicon-based microfluidics. The company is now able to offer a series of solutions… READ MORE May 19, 2020 X-FAB Expands Foundry Offering for Silicon-based Microfluidics Enhanced process capabilities enable faster time-to-market of Smart Integrated Systems READ MORE MORE NEWS Contact Oliver Foellmer Technical Marketing Manager Silicon-based Microfluidics Oliver.Foellmer(at)xfab.com For more information, please contact us: NAME* E-MAIL* MESSAGE* By submitting the form you agree to our privacy policy. I agree to my data being stored and processed by X-FAB. 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