Languages MENU About Home About About About SPTS SPTS Technologies, a KLA company, designs, manufactures, sells, and supports etch, PVD, CVD and MVD capital equipment, providing advanced wafer processing technologies and solutions for the semiconductor and microelectronics industry. End-market applications include micro-electromechanical systems (MEMS), advanced packaging, LED, high speed RF device IC’s and power semiconductors. Formed in 2009, SPTS brings together over 40 years wafer processing experience from companies including Trikon Technologies, STS, and Aviza Technology. The solutions offered by SPTS include industry leading silicon etch, dielectric etch, dry-release etch, PVD, PECVD, and MVD. SPTS supplies wafer processing equipment and technologies to the world's leading semiconductor and microelectronic device manufacturers and research institutions, offering dedicated local sales and customer support through a network of international offices and agents. Under agreement with SPP Technologies, Ltd., SPTS also offers APCVD solutions and a range of large batch vertical furnaces. SPTS Technologies has been recognized by leading industry experts, government agencies, and Her Majesty the Queen, having received the Queen’s Award for Enterprise in International Trade in 2013 and 2017 and for Innovation in 2018 and 2020. SPTS has also been given the prestigious Anchor Company status by the Welsh Government. Other accolades can be viewed on our Awards page. ETCH DEPOSITION Inductively Coupled Plasma (ICP) etch of silicon, dielectrics and polymers Plasma Enhanced Chemical Vapor Deposition (PECVD) Deep Reactive Ion Etching (DRIE) Physical Vapor Deposition (PVD) Dry Release Etch using HF vapor Molecular Vapor Deposition (MVD) Isotropic etching of silicon using xenon difluoride (XeF2) Company About SPTS Corporate Responsibility Awards Resource Library Affiliations SPTS Contacts Contact General Inquiries SPTS Contacts Social Media Quick Links Legal Forward-Looking Statements Coronavirus Supplier Policy Privacy Policy Cookies Policy Modern Slavery Statement Gender Pay Report Tax Strategy Statement Sitemap Company SPTS Technologies Ltd. Ringland Way, Newport, NP18 2TA Tel: +44 (0)1633 414000 Email: enquiries@spts.com SPTS Technologies Ltd is a company registered in England and Wales. Registered number 07037852. VAT number GB 945 7792 67. Cookie settings Copyright © 2021 SPTS Technologies Ltd. Information on this site contains forward looking information — for more information click here This website uses cookies Please click okay to accept use of cookies. If you do not want cookies to be set, please use the show details button to see options and de-select to opt-out. Show details Okay