Careers Investor Relations News EN PRODUCTS & SOLUTIONS COMPANY CONTACT AS8 / AS12 DETAILS DOWNLOADS PUBLICATIONS AS8 and AS12 Coater Manual Spray Coater for High Topographies SUSS MicroTec AS8/AS12 is the ideal tool for R&D and low-volume fabrication. Substrates up to 200 mm or 300 mm in diameter and square substrates up to 6" edge length can be processed. The system can be equipped with up to two separate spray dispense systems. The sophisticated resist supply system offers unmatched process stability and reproducibility. All spray and cleaning parameters can be programmed in the recipe. The manual product line of SUSS MicroTec coaters offers easy recipe transfer to automated platforms. Highlights Enabling technology for patterning across severe topography Conformal coating with top edge coverage while avoiding resists accumulation in trenches Proprietary spray design for optimal process stability and reproducibility Substrate sizes up to 200mm in diameter and square substrates up to 6" edge length Up to 2 separate spray dispense systems to avoid cross contamination Touch screen with MMC controller software All process parameters are programmable in the recipe Details : Coating Spray Coating Spray coating involves spray application of the solution to the wafer through a nozzle. The path traveled by the nozzle over the wafer is optimized to ensure that the coating is applied evenly to the substrate. The solutions used in spray coating usually feature a very low viscosity, which guarantees that fine droplets form. Spray coating ensures a uniform layer even with high topography substrates, making it the preferred technique for structures of this kind. Even square substrates can be easily coated using the spray technique. Features and Benefits Uniform coating even of highly structured surface Available for: Automated Coater and Developer ACS300 Gen2 ACS200 Gen3 Semi-Automated Coater AS8/AS12 Downloads SUSS Product Portfolio Publications Optimizing Spray Coating Yield and Throughput Optimizing Spray Coater Process Parameters SÜSS MICROTEC SE Schleissheimer Str. 90 85748 Garching Germany +49 89 32007-0 +49 89 444433-422 CONTACT FORM PRODUCTS AND SOLUTIONS Coater & Developer Inkjet Printing Mask Aligner Wafer Bonder Photomask Equipment Imprint Lithography SUSS Imprint Excellence Center Micro-Optics Remanufactured Equipment Customer Service Training Process Technologies COMPANY Organization Research & Development Quality Management Purchasing Events Customer Magazine INVESTOR RELATIONS Investor Relations Corporate Governance Share Shareholders’ Meeting 2021 Publications IR Contact CAREERS Careers Who we are What we offer Professionals FAQs Open Positions Young Professionals NEWS Corporate News Investor Relations News Image Archive I read the terms and accept it. SEND © 2021 SÜSS MicroTec SE | Imprint | Privacy Policy | Terms of Use | Terms & Conditions