English (EN) Services Contact Menu Lithography EV Group Products Lithography Lithography EVG’s key competencies in lithographic technology lie in the high-throughput contact and proximity exposure capabilities of its mask aligners and its newly developed, revolutionary and highly versatile maskless exposure lithography systems. These capabilities are complemented by its resist coating and resist development systems with advanced in-house process competences and hands-on development skills. Most of EVG’s lithography equipment platforms are 300-mm ready, can be fully integrated into EVG’s HERCULES® lithography track systems, and are complemented by its metrology tools for top-to-bottom-side alignment verification. EVG constantly looks ahead to future market trends and thus provides application-specific solutions, particularly in advanced packaging, MEMS, compound semiconductors, photonics and biomedical markets where EVG’s process and materials expertise – derived from extensive research with a wide range of resist materials – is unsurpassed. Understanding customer needs and providing efficient worldwide support are important ingredients in the success of EVG’s lithography solutions. Select your desired category Mask Alignment Systems Accommodating wafers and substrates up to 300 mm, varying in size, shape and thickness, EVG’s mask alignment systems aim to provide sophisticated solutions with a high grade of automation for advanced applications and full flexibility for research and development. Explore now LITHOSCALE® Maskless Exposure Lithography Systems Maskless exposure lithography systems represent an entirely new platform of EVG lithography equipment. The world’s first highly scalable maskless lithography technology for high-volume manufacturing, MLE delivers unsurpassed flexibility to enable extremely short development cycles for new devices. Explore now Resist Processing Systems The EVG100 series resist processing systems establish new standards in quality and flexibility for photoresist coating and developing. Explore now Integrated Lithography Track Systems Lithography track systems complete the EVG lithography product family with a fully integrated production system and high grade of automation combining mask alignment and exposure with integrated pre- and post-processing. Explore now Talk to our EVG product experts! Questions? Contact form Questions about our products and technologies? Contact the EVG experts Send us a message Related News EV Group Brings Maskless Lithography to High-Volume Manufacturing with LITHOSCALE Sep, 2020 EV Group Wins Global Technology Award for MLE™ Maskless Exposure Technology at productronica and SEMICON Europa Nov, 2019 EV Group and SCHOTT Partner to Demonstrate Readiness of 300-mm Nanoimprint Lithography for High-Volume Augmented/Mixed Reality Glass Manufacturing Aug, 2019 Explore our other product categories Nanoimprint Lithography (NIL) Discover now Bonding Discover now EV Group Products Technologies Company Careers Social Media LinkedIn Facebook Twitter YouTube Join our newsletter We will send you updates on new products and technologies. Your Email Subscribe © 2021, EV Group (EVG) Imprint Privacy Policy Terms of use