Menü ausklappen HomeServiceService PortfolioPreventative Service Preventative Service Shutdowns should not occur, except at times when you can afford them. To ensure the operability of your machine and to prevent cost-intensive downtimes, regular preventative maintenance or even overhauls are necessary. Preventative maintenance means: maximum availability. Maintenance when you can afford it – scheduled according to your specific operational schedule. When properly maintained with genuine Pfeiffer Vacuum spare parts & tools, our products distinguish themselves with an exceptionally long service life – even in the most demanding operational conditions. This can drastically lower the total cost of ownership. The recommended service intervals can be found in our operating manuals, or you may contact us. You can find information on how to request preventative maintenance from us here. Documents Declaration of Contamination Declaration of Service Request Social Networks: Newsletter Sitemap Data Protection Legal Notice General Terms and Conditions Newsletter Literature Ordering Downloads Contact Group Press Investor Relations Careers © 2021 Pfeiffer Vacuum GmbH

Menü ausklappen HomeMarketsSemiconductorFacilities & Maintenance Leak Detection Facilities & Maintenance Any single leak present on a semiconductor tool and its related facilities can impact manufacturing throughput and yield. Consequences vary from loss of production due to process specs not met, to critical safety hazard. Therefore, leak detection is a critical and mandatory step of any new tool commissioning in the clean room or after any maintenance intervention. At the basement level, forelines & dry pumps are also regularly exchanged for cleaning or repair. We provide comprehensive leak detection solutions which guarantee vacuum integrity of your installation from process chambers down to gas abatement. Our goal: Maximize your production yield. Applications Leak Detection Social Networks: Newsletter Sitemap Data Protection Legal Notice General Terms and Conditions Newsletter Literature Ordering Downloads Contact Group Press Investor Relations Careers © 2021 Pfeiffer Vacuum GmbH