Components Dry vacuum pumps EV-L EV-L THE GENIUS Excellent performance for wide range of medium duty applications. Description|Core Benefits Product Information|Downloads Applications Success Story Description The EV-L has no limits. Numerous applications use this model. Two types are available, with small footprints and pumping speeds of 10,000 and 18,000 l/min. Core Benefits High temperature modules Corrosion proof Zero maintenance Wide range of applications Fab space saving Low consumable consumption Product Information APPLICATION RANGE light harsh PUMPING SPEED 10.000 – 18.000 l/min MODELS EV-L100N EV-L200N INDUSTRIES General Vacuum Photovoltaic Semiconductors EBARA_pump model_EV_L_datasheet, pdf, 650.32 KB Do you need a quote? CONTACT US Applications for EV-L Physical Vapor Deposition (PVD) Atomic Layer Deposition (ALD) LED Manufacturing Metal Etch Poly Etch Low Pressure Chemical Vapour Deposition (LPCVD) Organic Light-emitting Diode (OLED) Photovoltaics (PV) Success Story Smart, clean and green. The chemical industry profits from our integrated solution for the disposal of fluorine-containing gases through highly efficient and reliable gas abatement systems and vacuum pumps. READ MORE You might also be interested in: SERVICE More information OVERHAUL More information Are you interested in engineering? CONTACT US Best reliability in class. Best return on investment in class. 100% Peace of Mind LEARN MORE EBARA Precision Machinery Europe GmbH Contact About EBARA Service Quick Links Privacy Policy Legal Notice © EPME 2021