775.359.4442 Toll Free: 800.551.4422 sales@highvac.com Home / Archives for Inderjit Matharu flange-hardwareinstallation-kits 11000 Series Stainless Steel Gate Valves 81000 Series Aluminum Gate Valves 21700 Series Stainless Steel 3-Position Gate Valves 71000 Series Stainless Steel Harsh Process Gate Valves 88200 / 28200 Series Rectangular / Slit Valve 4000 Series Angle Valve 21200 Series Stainless Steel Million Cycle Gate Valves 2000 Series Stainless Steel Ball Valves 13000 Series Stainless Steel Laminar Flow Gate Valves 16000 Series Stainless Steel Shielded Gate Valves Valves 11000 Series Stainless Steel Gate Valves Description The KF, ISO-F, ISO-K, ASA and JIS flanged 11000 Series Standard Cycle Gate Valves are designed for high vacuum applications. These valves provide valving for cryopumps, turbo pumps, ion pumps and other applications requiring clean, low outgassing valves. Metal-sealed CF flanges provide compatibility with UHV systems when pressure ranges approximate 1 x 10-10 mbar and higher bakeout temperatures of 200°C are needed. These valves can also be configured for higher temperatures. Request QuoteRequest Product Datasheet Standard Technical Specifications Materials Valve body and gate: 304 stainless steel Welded bellows shaft seal: AM-350 Vacuum Pressure Range: - HV: 1×10-9 mbar - UHV: 1×10-10 mbar Helium leak rate: <2×10-9 mbar I/s Differential pressure closed: 1 bar in either direction Maximum Δ pressure before opening: <30 mbar Mechanism Manual: hand crank Pneumatic air service: 80 psig Solenoid : - supplied voltage: 120V AC, 50/60 Hz - optional voltages: 24, 200, 240 VAC 50/60 Hz or 12, 24V DC Position indicator, max: 115 VAC or 28 VDC, 20 mA Bonnet / gate seals HV: Viton® elastomer UHV: Copper / Viton® elastomer Bakeout Temperature without solenoid Elastomer sealed bonnet: 150°C Metal sealed bonnet: - Value open: 200°C - Value closed: 150°C Actuator: - Manual: 60°C - Pneumatic: 60°C Mounting Position Any Cycles Until Service 100,000 Cycles dependent on process To obtain 2D drawings (PDF),3D drawings (STP), and to request a quote follow the links below 11000 Series Manual with Elastomer Bonnet 11000 Pneumatic with Elastomer Bonnet 11000 Manual with Copper Bonnet Pneumatic with Copper Bonnet 81000 Series Aluminum Gate Valves Description The 81000 Series Aluminum Gate Valves are designed for high vacuum applications specifically when pressure ranges approximate 1 x 10-7 mbar and bakeout temperatures do not exceed 150°C. These valves are designed for system integrators, designers and OEM’s within the Semiconductor, Solar, LED/FPD, Coating and BioPharm industries due to their robust design and low cost. They feature precision machined high strength aluminum bodies from solid 6061-T6 billet, dual quad ring long life shaft seals and high performance PEEK components. Request QuoteRequest Product Datasheet Standard Technical Specifications Materials Valve body and gate: 6061-T6 aluminium Shaft: [DN40-80 AL/[DN100-500]304SS] Carriage: 6061-T6 Aluminium/PEEK Bonnet/gate/shaft seals: Viton® elastomer Bakeout Temperature without solenoid Valve Body and Gate: 120°C Actuator: 80°C Vacuum Pressure Range HV: 1x10-9 mbar Helium leak rate: <2x10-9 mbar l/s Differential pressure closed: 1 bar in either direction Maximum Δ pressure before opening: ≤30 mbar Mounting Position Any Vacuum Pressure Range: 1x10-7 mbar Helium leak rate: < 2x10-9 mbar l/s Differential pressure: ≤ 1.6 bar in either direction Differential pressure at opening: ≤30 mbar Mechanism Manual: hand crank Pneumatic air service: 80 psig Solenoid: 4.0 Watts - supplied voltage: 120V AC, 50/60 Hz - optional voltages: 24, 200, 240 VAC, 50/60 Hz or 12.24V DC Position indicator, max: 115 VAC or 28 VDC, 20mA Cycles Until Service [DN40-160]: 400,000 cycles [DN200-320]: 250000 cycles Options Use the table below to obtain 2D drawings (PDF) and 3D drawings (STP), or to request a quote. If you need help finding a model number use the following link: 81000 Series Model Key Guide Pneumatic with Elastomer Bonnet and Gate O-Ring (includes reed switch position indicators) Pneumatic – Viton Seals without Solenoid and Position Indicator DN Model Number KF/ISO-F 3 (Bolted) ISO-K 6 (Clamped) CF-F* 0 or 4 (Conflat) mm inch 40 1.50 81210-015_R 2D 3D Quote – – – 2D 3D Quote 50 2.00 81210-020_R 2D 3D Quote – – – 2D 3D Quote 63 2.50 81210-025_R 2D 3D Quote 2D 3D Quote 2D 3D Quote 80 3.00 81210-030_R 2D 3D Quote 2D 3D Quote 2D 3D Quote 100 4.00 81210-040_R 2D 3D Quote 2D 3D Quote 2D 3D Quote 160 6.00 81210-060_R 2D 3D Quote 2D 3D Quote 2D 3D Quote 200 8.00 81210-080_R 2D 3D Quote 2D 3D Quote 2D 3D Quote 250 10.00 81210-100_R 2D 3D Quote – – – 2D 3D Quote 320 12.00 81210-120_R 2D 3D Quote – – – 2D 3D Quote Flange Types 0 = CF-F Port with UNF Thread (81210-0400) 3 = KF/ISO-F Bolted (81210-0403) 4 = CF-F Port with UNF Thread (81210-0404) 6 = ISO-K Clamped (81210-0406) Manual with Elastomer Bonnet and Gate O-Rings (no position indicators) DN Model Number KF/ISO-F 3 (Bolted) ISO-K 6 (Clamped) CF-F* 0 or 4 (Conflat) mm inch 40 1.50 81110-015_ 2D 3D Quote – – – 2D 3D Quote 50 2.00 81110-020_ 2D 3D Quote – – – 2D 3D Quote 63 2.50 81110-025_ 2D 3D Quote 2D 3D Quote 2D 3D Quote 80 3.00 81110-030_ 2D 3D Quote 2D 3D Quote 2D 3D Quote 100 4.00 81110-040_ 2D 3D Quote 2D 3D Quote 2D 3D Quote 160 6.00 81110-060_ 2D 3D Quote 2D 3D Quote 2D 3D Quote 200 8.00 81110-080_ 2D 3D Quote 2D 3D Quote 2D 3D Quote Flange Types 0 = CF-F Port with UNF Thread (81110-0400) 3 = KF/ISO-F Bolted (81110-0403) 4 = CF-F Port with UNF Thread (81110-0404) 6 = ISO-K Clamped (81110-0406) 21700 Series Stainless Steel 3-Position Gate Valves Description The 3-Position Gate Valves are designed for use in etching, CVD and any other process that requires pressure control. When used in conjunction with upstream mass flow controllers, this series valve will contribute to an exceptional pressure control capability. These valves may also be utilized to smooth the transition from rough to high vacuum. The valves employ two pneumatic solenoids and an air pressure regulator to achieve the three positions of fully open, fully closed, and an adjustable third position. One solenoid controls the fully open and fully closed positions while a second solenoid controls the third position. Request QuoteRequest Product Datasheet Standard Technical Specifications Materials Valve body and gate: 304 stainless steel Welded bellows shaft seal: AM-350 Drive shaft and pin: Hardened stainless steel Vacuum Pressure Range: 1×10-9 mbar Helium leak rate: <2×10-9 mbar l/s Differential pressure closed: 1 bar in either direction Maximum Δ pressure before opening: < 30 mbar Mechanism Pneumatic air service: 80 psig Solenoid: 4.0 Watts - supplied voltage: 120V AC, 50/60 Hz - optional voltages: 24, 200, 240 VAC, 50/60 Hz Position indicator, max - Reed switch for open & closed: 115 VAC or 28 VDC, 20 mA - Microswitch for third position: 115 VAC, 5 A - optional voltages: 250 VA, 5 A or 28 VDC, 5 A resistive load 28 VDC, 3 A inductive load Cycles 1,000,000 cycles Cycles until service: dependent on process Bonnet/gate seals HV: Viton® elastomer Helium leak rate: <2×10-9 mbar l/s Differential pressure closed: 1 bar Temperature Body: 150°C Actuator: 60°C Mounting Position Any Use the table below to obtain 2D drawings (PDF) and 3D drawings (STP), or to request a quote. If you need help finding a model number use the following link: 21700 Series Model Key Guide 3-Position (includes elastomer seals with 120V AC solenoid and position indicators) DN Model Number KF/ISO-F 3 (Bolted) ISO-K 6 (Clamped) CF-F* 0 or 4 (Conflat) mm inch 100 4.00 21712-040_R 2D 3D Quote 2D 3D Quote 2D 3D Quote 160 6.00 21712-060_R 2D 3D Quote 2D 3D Quote 2D 3D Quote 200 8.00 21712-080_R 2D 3D Quote 2D 3D Quote 2D 3D Quote 250 10.00 21712-100_R 2D 3D Quote – – – 2D 3D Quote 320 12.00 21712-120_R 2D 3D Quote – – – 2D 3D Quote Flange Types 0 = CF-F Port with UNF Thread (21712-0400R) 3 = KF/ISO-F Bolted (21712-0403R) 4 = CF-F Port with Metric Thread (21712-0404R) 6 = ISO-K Clamped (21712-0406R) Options JIS, ASA and Custom flanges Alternate o-ring material Alternate solenoid voltages UHV copper bonnet version Roughing ports 71000 Series Stainless Steel Harsh Process Gate Valves Description The 71000 Series HPV (Harsh Process Valves) are designed for the harshest of vacuum environments. In typical harsh applications like MOCVD, ALD, PECVD the valves are subject to aggressive chemicals and high temperatures. The byproducts can affect the operation of the wheels/bearings, linkages and can cause the valve to seize so our HPV addresses this issue with no moving parts and a bellows that stays isolated from the process. The valves feature a robust dual containment design for increased safety, sealed bellows isolated from process for less maintenance, easy in-situ cleaning and o-ring replacement for reduced downtime and an optional integrated soft pump feature for lower particles. Request QuoteRequest Product Datasheet Extreme Durability – For your most demanding process applications Increased Safety – Robust dual containment design Maintenance Free – Sealed bellows isolated from process Reduced Downtime – Easy in-situ cleaning and o-ring replacement Improved Pump Performance – Pump overload protection/isolation Lower Particles – Intergrated soft pump feature Standard Technical Specifications Materials Valve body and gate: 304 stainless steel Welded bellows shaft seal: AM-350 Bonnet / gate seals: FKM or FKKM/FFPM elastometer Temperature Body: 150°C Actuator: 100°C Mounting Position Any Cycles Cycles until service: > 250,000 cycles dependent on process Vacuum Pressure Range: 1×10-9 mbar Helium leak rate: < 1x10-9 mbar l/s Differential pressure closed: tested up to 7 bar in any direction Differential pressure at opening: 1 bar Mechanism Manual: hand crank Pneumatic air service: 55-80 psi Solenoid: 120V AC, 24V DC 50/60 Hz Position indicator, max: 115VAC or 28 VDC, 20mA Use the table below to obtain 2D drawings (PDF) and 3D drawings (STP), or to request a quote. If you need help finding a model number use the following link: 71000 Series Model Key Guide Pneumatic with Elastomer Bonnet and Gate O-Ring(includes reed switch position indicator) DN Model Number KF/ISO-F 3 (Bolted) ISO-K 6 (Clamped) CF-F* 0 or 4 (Conflat) mm inch 50 2.00 71210-020_R 2D 3D Quote – – – 2D 3D Quote 63 2.50 71210-025_R 2D 3D Quote 2D 3D Quote 2D 3D Quote 80 3.00 71210-030_R 2D 3D Quote 2D 3D Quote 2D 3D Quote 100 4.00 71210-040_R 2D 3D Quote 2D 3D Quote 2D 3D Quote 160 6.00 71210-060_R 2D 3D Quote 2D 3D Quote 2D 3D Quote Flange Types 0 = CF-F Port with UNF Thread (71210-0400R) 3 = KF/ISO-F Bolted (71210-0403R) 4 = CF-F Port with Metric thread (71210-0404R) 6 = ISO-K Clamped (71210-0406R) Manual with Elastomer Bonnet and Gate O-Rings(includes visual position indicator) DN Model Number KF/ISO-F 3 (Bolted) ISO-K 6 (Clamped) CF-F* 0 or 4 (Conflat) mm inch 50 2.00 71110-020_V 2D 3D Quote – – – 2D 3D Quote 63 2.50 71110-025_V 2D 3D Quote 2D 3D Quote 2D 3D Quote 80 3.00 71110-030_V 2D 3D Quote 2D 3D Quote 2D 3D Quote 100 4.00 71110-040_V 2D 3D Quote 2D 3D Quote 2D 3D Quote 160 6.00 71110-060_V 2D 3D Quote 2D 3D Quote 2D 3D Quote Flange Types 0 = CF-F Port with UNF Thread (71210-0400R) 3 = KF/ISO-F Bolted (71210-0403R) 4 = CF-F Port with Metric thread (71210-0404R) 6 = ISO-K Clamped (71210-0406R) 88200 / 28200 Series Rectangular / Slit Valve 88200 Series Description The 88200 Series Direct Drive Rectangular Valves offer one of the smallest interior surface areas in the vacuum valve industry. In the open position, the seal plate O-ring is completely out of sight preventing any particulate or media flow to accumulate on the sealing surface. In the closed position the one piece solid block design prevents any material buildup on the back side of the valve mechanism dramatically reducing service and maintenance requirements. This valve is engineered to meet the mechanical interface and vacuum containment requirements of the industry. To meet the specific needs of modular integrated processing systems, the valves are designed to isolate vacuum pressure on either side of the gate. A narrow profile design, including both actuator and controller, allows tight mounting between central, load-lock, handling and process chambers. Request QuoteRequest Product Datasheet Standard Technical Specifications Materials Valve body and gate: 6061-T6 ALuminium Welded bellows shaft seal: AM-350 Driveshaft and pins: Hardened stainless steel Bonnet/gate seals: Viton® elastomer Bakeout Temperature without solenoid Elastomer sealed bonnet: 150°C Actuator: 60°C Mounting Position Any Cycles Until Service 1,000,000 cycles dependent on process Vacuum Pressure Range: 1×10-9 mbar Helium leak rate: <2x10-9 mbar l/s Differential pressure closed: 1 bar in either direction Maximum ? pressure before opening: < 30 mbar Mechanism Pneumatic air service: 80 psig Solenoid: 4.3 Watts (latching-type, Valve to remain in same position in the event of power loss) - supplied voltage: 120V AC, 50/60 Hz - optional voltages: 24, 200, 240 VAC, 50/60 Hz or 12, 24V DC Position indicator, max: 115 VAC or 28 VDC, 20 mA Use the table below to obtain 2D drawings (PDF) and 3D drawings (STP), or to request a quote. If you need help finding a model number use the following link: 88200 Series Model Key Guide Pneumatic with Elastomer Bonnet and Gate O-Ring(includes reed switch position indicators) DN Model Number J (Bolted Body) K (Clamped Body) mm inch 32 x 220 1.26 x 8.74 88212-0109RX_ 2D 3D Quote 2D 3D Quote 32 x 332 1.26 x 13.07 88212-0113RX_ 2D 3D Quote 2D 3D Quote 46 x 236 1.81 x 9.29 88212-0209RX_ 2D 3D Quote 2D 3D Quote 50 x 336 1.97 x 13.23 88212-0213RX_ 2D 3D Quote 2D 3D Quote Options Custom sizes Alternate o-ring material Alternate solenoid voltages Microswitches for position indicators Roughing ports Low-particulate and rapid service versions 28200 Series Description The 28200 Series Direct Drive Rectangular Valves offer one of the smallest interior surface areas in the vacuum valve industry. In the open position, the seal plate O-ring is completely out of sight preventing any particulate or media flow to accumulate on the sealing surface. In the closed position the one piece solid block design prevents any material buildup on the back side of the valve mechanism dramatically reducing service and maintenance requirements. This valve is engineered to meet the mechanical interface and vacuum containment requirements of the industry. To meet the specific needs of modular integrated processing systems, the valves are designed to isolate vacuum pressure on either side of the gate. A narrow profile design, including both actuator and controller, allows tight mounting between central, load-lock, handling and process chambers. Request QuoteRequest Product Datasheet Standard Technical Specifications Materials Valve body and gate: 304 stainless steel Welded bellows shaft seal: AM-350 Driveshaft and pins: Hardened stainless steel Bonnet/gate seals: Viton® elastomer Bakeout Temperature without solenoid Elastomer sealed bonnet: 150°C Actuator: 60°C Mounting Position Any Cycles Until Service 1,000,000 cycles dependent on process Vacuum Pressure Range: 1×10-9 mbar Helium leak rate: <2x10-9 mbar l/s Differential pressure closed: 1 bar in either direction Maximum ? pressure before opening: < 30 mbar Mechanism Pneumatic air service: 80 psig Solenoid: 4.3 Watts (latching-type, Valve to remain in same position in the event of power loss) - supplied voltage: 120V AC, 50/60 Hz - optional voltages: 24, 200, 240 VAC, 50/60 Hz or 12, 24V DC Position indicator, max: 115 VAC or 28 VDC, 20 mA Use the table below to obtain 2D drawings (PDF) and 3D drawings (STP), or to request a quote. If you need help finding a model number use the following link: 28200 Series Model Key Guide Pneumatic with Elastomer Bonnet and Gate O-Ring (includes reed switch position indicators) DN Model Number J (Bolted Body) K (Clamped Body) mm inch 32 x 220 1.26 x 8.74 28212-0109RX_ 2D 3D Quote 2D 3D Quote 32 x 332 1.26 x 13.07 28212-0113RX_ 2D 3D Quote 2D 3D Quote 46 x 236 1.81 x 9.29 28212-0209RX_ 2D 3D Quote 2D 3D Quote 50 x 336 1.97 x 13.23 28212-0213RX_ 2D 3D Quote 2D 3D Quote Options Custom sizes Alternate o-ring material Alternate solenoid voltages Microswitches for position indicators Roughing ports UHV version with copper bonnet 4000 Series Angle Valve Description The 4000 Series angle valves have been designed to offer maximum conductance with minimum size. These valves are ideally suited for systems where reliability and vacuum integrity are a major concern. The DN16-50 sizes have completed over 1.5 million cycles in reliability testing. They have replaced our previous 14000 angle valve series. Please contact HVA if you need support.. Request QuoteRequest Product Datasheet Standard Technical Specifications Materials Valve body and poppet: 304L stainless steel Welded bellows seal: AM-350 Poppet / Bonnet Seals: Viton® Temperature Bake: 120°C Operating: 90°C Mounting Position Any Cycles Until Service DN16-40: 1,500,000 cycles DN50-250: 1,000,000 cycles DN320-630: 100,000 cycles Vacuum Pressure Range: 1×10-9 mbar Helium leak rate: <1×10-9 mbar l/s Differential pressure closed: 1 bar Mechanism Manual: hand crank Pneumatic air service: 60-95 psi DN16-50 are air-to-open / spring-to-close DN63-630 are air-to-open / air-to-close Ordering Guides If you need help finding a model number use the following the link: 4000 Series Model Key Guide Pneumatic – Viton Seals without Solenoid and Position Indicator DN Model Number KF/ISO-K Model Number ISO-F Model Number CF-F mm inch 16 0.625 04510-0073 – 04510-0070 25 1.0 04510-0103 – 04510-0100 40 1.5 04510-0153 – 04510-0150 50 2.0 04510-0203 – 04510-0200 63 2.5 04210-0256 04210-0253 04210-0250 80 3.0 04210-0306 04210-0303 04210-0300 100 4.0 04210-0406 04210-0403 04210-0400 160 6.0 04210-0606 04210-0603 04210-0600 200 8.0 04210-0806 04210-0803 – 250 10.0 04210-1006 04210-1003 – 320 12.0 04210-1206 04210-1203 – 400 16.0 04210-1606 04210-1603 – 500 20.0 04210-2006 04210-2003 – 630 25.0 04210-2506 04210-2503 – Flange Types 0 = CF-F Port with Through Holes (04210-0400) 3 = KF/ISO-F Bolted (04210-0403) 6 = ISO-K Clamped (04210-0406) Manual – Viton Seals without Position Indicator DN Model Number KF Model Number CF-F mm inch 16 .625 04110-0073 04110-0070 25 1.0 04110-0103 04110-0100 40 1.5 04110-0153 04110-0150 50 2.0 04110-0203 04110-0200 63 2.5 – 04110-0250 Flange Types 0 = CF-F Port with Through Holes (04110-0100) 3 = KF (04110-0103) 21200 Series Stainless Steel Million Cycle Gate Valves Description The 21200 Series Million Cycle Gate Valves are designed for high vacuum applications specifically when pressure ranges approximate 1 x 10-9 mbar and bakeout temperatures do not exceed 150°C. There are no mechanical locks inside vacuum, which is extremely beneficial for semiconductor and sensitive processes requiring vibration-free operation. All moving joints have hardened shafts, reducing particulate generation and providing smoother actuation. These valves provide valving for cryopumps, turbo pumps, ion pumps and other applications requiring clean, high cycle, low outgassing valves. Request QuoteRequest Product Datasheet Standard Technical Specifications Materials Valve body and gate: 304 stainless steel Welded bellows shaft seal: AM-350 Driveshaft and pins: Hardened stainless steel Bonnet/gate seals: Viton® elastomer Bakeout Temperature without solenoid Elastomer sealed bonnet: 150°C Actuator: 60°C Mounting Position Any Cycles Until Service 1,000,000 cycles dependent on process Vacuum Pressure Range: 1×10-9 mbar Helium leak rate: <2×10-9 mbar l/s Differential pressure closed: 1 bar in either direction Maximum Δ pressure before opening: ≤30 mbar Mechanism Manual: hand crank Pneumatic air service: 80 psig Solenoid: 4.0 Watts - supplied voltage: 120V AC, 50/60 Hz - optional voltages: 24, 200, 240 VAC, 50/60 Hz or 12, 24V DC Position indicator, max: 115 VAC or 28 VDC, 20 mA Use the table below to obtain 2D drawings (PDF) and 3D drawings (STP), or to request a quote. If you need help finding a model number use the following link: 21200 Series Model Key Guide Pneumatic with Elastomer Bonnet and Gate O-Rings (includes reed switch position indicators) DN Model Number KF/ISO-F 3 (Bolted) ISO-K 6 (Clamped) CF-F* 0 or 4 (Conflat) mm inch 16 0.625 21212-006_ 2D 3D Quote – – – 2D 3D Quote 40 1.50 21212-015_R 2D 3D Quote – – – 2D 3D Quote 50 2.00 21212-020_R 2D 3D Quote – – – 2D 3D Quote 63 2.50 21212-025_R 2D 3D Quote 2D 3D Quote 2D 3D Quote 80 3.00 21212-030_R 2D 3D Quote 2D 3D Quote 2D 3D Quote 100 4.00 21212-040_R 2D 3D Quote 2D 3D Quote 2D 3D Quote 160 6.00 21212-060_R 2D 3D Quote 2D 3D Quote 2D 3D Quote 200 8.00 21212-080_R 2D 3D Quote 2D 3D Quote 2D 3D Quote 250 10.00 21212-100_R 2D 3D Quote – – – 2D 3D Quote 320 12.00 21212-120_R 2D 3D Quote – – – 2D 3D Quote Flange Types 0 = CF-F Port with UNF Thread (21212-0400R) 3 = KF/ISO-F Bolted (21212-0403R) 4 = CF-F Port with Metric Thread (21212-0404R) 6 = ISO-K Clamped (21212-0406R) Options Custom flanges UHV version with copper bonnet Alternate o-ring material Alternate solenoid voltages Microswitches for position indicators Roughing ports Motor operator High temperature components including o-rings, microswitches and actuator. Larger Sizes 2000 Series Stainless Steel Ball Valves Description HVA ball valves are the best choice for isolating gauges, foreline traps, petrochemical, abatement scrubbers, vacuum coating roughing lines, food processing lines and many more industrial applications. Easy In-Situ Maintenance – Performed without disconnecting the valve from the sytem Blow-Out Proof Stem – Assuring safety under high pressure conditions Maximum Conductance – Offers full bore in the open position Increased Service Intervals – Due to precision ball/seat design Harsh and Corrosive Environments – Designed to withstand your harshest and most corrosive processes High Quality 316L Stainless Steel – All wetted components Fluoroelastomers – Guarantee vacuum tight sealing PTFE Wiper – Removes any particulate from the ball Request QuoteRequest Product Datasheet Standard Technical Specifications Materials Body/stem/ball/end caps: 316L stainless steel Seat/gasket/stem packing: PTFE Other components: 304L stainless steel Temperature Standard operating: -20°C to 150°C Intermittent: Up to 200°C Connections KF, ISO, weld tube Vacuum Pressure Range: 1x10-8 mbar Helium leak rate: < 1x10-8 mbar l/s Differential pressure: 100 PSI Mechanism Manual: Easy turn handle Pneumatic air service: 80 to 120 psi (Fail safe option: air to open / spring to close) To request a quote follow the links below Manual Ball Valve Slide Valves Pneumatic Ball Valve Slide Valves 13000 Series Stainless Steel Laminar Flow Gate Valves Description The HVA 13000 Series Laminar Flow Gate Valve features a laminar flow port orifice that effectively seals the valve mechanism from the gas stream. For additional protection, purge ports are installed in both the upper and lower body areas to allow an insert gas flow to prevent intrusion of the process gas into these areas. Extensive semiconductor applications have proven these valves to be a valuable asset in process systems. Laminar flow valves may be used in etching, CVD and any other process that uses highly corrosive gases which may be damaging to other valves. Request QuoteRequest Product Datasheet Standard Technical Specifications Materials Valve body and gate: 304 stainless steel Welded bellows shaft seal: AM-350 Vacuum Pressure Range HV: 1x10-9 mbar Helium leak rate: <2x10-9 mbar l/s Differential pressure closed: 1 bar in either direction Maximum Δ pressure before opening: ≤30 mbar Mechanism Manual: hand crank Pneumatic air service: 80 psig Solenoid: 4.0 Watts - supplied voltage: 120V AC, 50/60 Hz Position indicator, max: 115 VAC or 28 VDC, 20 mA Cycles Until Service 100,000 cycles dependent on process Bonnet/gate seals HV: Viton® elastomer Bakeout Temperature - Standard: 150°C - Optional: 250°C Actuator - Pneumatic: 60°C Mounting Position Any Purge Port Fittings Standard: 1/4-inch female VCR Optional: Swagelock, NW16 KF, Custom Options Custom flange sizes, Alternate voltage controls, Gauge ports, Microswitches, Million cycle option, QuickClamp Bonnet, Roughing ports, High-temp components 16000 Series Stainless Steel Shielded Gate Valves Description The HVA 16000 Series Shielded Gate Valve features a travelling shield that moves with the gate to protect it from debris. These valves are used in extremely aggressive applications where reoccuring down time is not an option. The Shield greatly reduces particulate migration and prolongs the sealing integrity of the gate O-ring. The body material is 304 stainless steel, which can be changed to other high temperature, non corrosive materials for exceptionally aggressive applications. Alternative elastomer O-rings are also available. Request QuoteRequest Product Datasheet Standard Technical Specifications Materials Valve body and gate: 304 stainless steel Welded bellows shaft seal: AM-350 Vacuum Pressure Range - HV: 1×10-9 mbar Helium leak rate: <2x10-9 mbar l/s Differential pressure closed: 1 bar in either direction Maximum Δ pressure before opening: ≤ 30 mbar Mechanism Manual: hand crank Pneumatic air service: 80 psig Solenoid: 4.0 Watts - supplied voltage: 120V AC, 50/60 Hz Position indicator, max: 115 VAC or 28 VDC, 20 mA Bonnet/gate seals HV: Viton® elastomer mbar Bakeout Temperature without solenoid - Standard: 150°C - Optional: 250°C Actuator: - Manual: 60°C - Pneumatic: 60°C Mounting Position Any Cycles Until Service 1,000,000 cycles dependent on process Options Custom flanges, roughing ports, gauge ports, heater jackets, high temperature components including O-rings, microswitches and actuator HomeAbout UsService / SupportRequest QuoteNewsContact UsSitemap © 2021 HVA LLC 12880 Moya Blvd Reno NV 89506-2611 Web Application Development by Pulse