Contact HOME ABOUT SOLUTIONS TECHNOLOGY NEWS ROOM SUPPORT CAREERS INVESTORS SolutionsProductsPlasma Enhanced ALD SOLUTIONS Products Atomic Layer Deposition - products EmerALD XP ALD Pulsar XP ALD Low Pressure Chemical Vapor Deposition & Diffusion - products Advance vertical furnace Epitaxy - products Epsilon Epitaxy Intrepid XP Epitaxy Plasma Enhanced Chemical Vapor Deposition Dragon XP8 Plasma Enhanced ALD Eagle XP8 PEALD Patents Trademark list PLASMA ENHANCED ATOMIC LAYER DEPOSITION - PRODUCTS Plasma Enhanced Atomic Layer Deposition (PEALD) uses chemical precursors just like in thermal ALD but it also cycles an RF-plasma creating the necessary chemical reactions in a highly controlled manner. XP8 HIGH CAPACITY PLATFORM XP8 is the latest in ASM’s XP family of standard platforms for 300mm wafers, and accommodates up to eight chambers for PEALD or PECVD, which can also be integrated on the same platform. MAJOR FEATURES A central robot designed to move two wafers simultaneously to dual chamber modules (DCMs) makes XP8 the highest-productivity single-wafer process tool in the industry. A total of four dual chamber modules (DCMs) can be integrated with the XP8 platform to minimize footprint and maximize productivity for an industry-leading low cost of ownership (CoO) solution. Our Plasma Enhanced Atomic Layer Deposition product is the Eagle® XP8 . © 2014 ASM International NV Terms of use Privacy statement

Contact HOME ABOUT SOLUTIONS TECHNOLOGY NEWS ROOM SUPPORT CAREERS INVESTORS AboutCorporate responsibilityHealth & safety ABOUT Company profile Our story Layering the future History Strategy & focus areas Corporate responsibility Executive Commitment Statement Environmental Ethics Health & safety Labor Supply chain Organization Supplier management Corporate calendar Research and our partners Locations Contact us HEALTH & SAFETY At ASM, we know that it takes a team to create a safe working environment. This includes management support and commitment and every employee setting aside sufficient time before each task to assess potential risks. We foster a cooperative spirit throughout the company in order to cause no harm or injury. At ASM, health and safety is everyone’s business. We maintain an industry-leading Recordable Injury Case Rate (RCR) that we continuously strive to improve. STOP WORK At ASM, every employee has the right to STOP WORK for any safety reason, without any repercussions. This applies regardless of the location they are working at or circumstances they are working under. STOP WORK is an ASM employee right in any case of any safety concern. PREVENTION We believe that prevention is key to a successful safety program. We strongly endorse a “Safety Management By Walking Around” and “Good Catch” program for all employees to participate in. This program encourages everybody to proactively look for and fix hazards in the working environment. © 2014 ASM International NV Terms of use Privacy statement