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Home Products Software PDF Docs Gallery About Contact Documents Wafer Handling WHP Robot Application Manual LRC-x31g2 Multi-Axis Robot Controllers LRC-x31g3 Multi-Axis Robot Controllers Diamond H1 Wafer Handling Robot Diamond H3 Wafer Handling Robot Diamond H4 Wafer Handling Robot Diamond H5 Wafer Handling Robot Diamond E5 Vacuum Elevator Prealigners LPA Series Wafer Prealigners LPA Series Prealigners Ordering Guide Standalone LPA26-3 Standalone Prealigner LPA38-3 Standalone Prealigner LPA58-3 Standalone Prealigner LPA312-3 Standalone Prealigner LPA812-3 Standalone Prealigner LPA1218-3 Standalone Prealigner Embedded LPA25-1E Embedded Prealigner LPA38-1E Embedded Prealigner LPA58-1E Embedded Prealigner LPA312-1E Embedded Prealigner LPA812-1E Embedded Prealigner LPA1218-1E Embedded Prealigner Edge Handling LPA6EH-3 Edge Handling Prealigner LPA8EH-3 Edge Handling Prealigner LPA68EH-3 Edge Handling Prealigner LPA8ET-3 Edge Handling Prealigner LPA12ET-3 Edge Handling Prealigner LPA812EH-3 Edge Handling Prealigner Fast Swap LPA12FS-3 Fast Swap Prealigner CNC CNC Components and Systems (Brochure) CNC Multi-Axis Servo Controller CNC Software Setup Guide CNC Software Operator’s Manual LS-231g3 Advanced Multifunctional Servo Drive LS-2310g2 Supervisor I/O Controller LS-2315 High Performance Spindle Drive LS-2317 Manual Pulse Generator Controller Distributed Control Intelligent Sevo Drives LS-231g2 Advanced Multifunctional Servo Drive LS-231g3 Advanced Multifunctional Servo Drive LS-132 Intelligent Servo Drive LS-173E Intelligent Servo Drive LS-173CM Servo Drive for Coordinated Control LS-173CMWP Servo Drive for Coordinated Control LS-182SE Intelligent Servo Drive with Step & Direction LS-182AP Absolute Positioning Servo Drive Intelligent Stepper Drives LS-143RJ Intelligent Microstepping Drive LS-146 Intelligent Microstepping Drive Intelligent Piezo Drives LS-138 Intelligent Piezo Motor Drive LS-139 Intelligent Piezo Motor Servo Drive Network I/O Nodes & Joysticks LS-731 Joystick Node LS-773 Network I/O Node LS-783RJ Network I/O Node LS-784 Network I/O Node Network Master Controllers LS-980 Network Master Controller LS-981 Network Master Controller with Digital I/O LS-984 Network Master Controller with Ethernet Port Communication Accessories LS-802 RS-232 to LDCN Converter LDCN-1250-PCI Adapter LS-821 LDCN Master to RS-232 Converter LS-832L USB to LDCN Node Isolated Converter © 1991-2021 Logosol, Inc.