775.359.4442 Toll Free: 800.551.4422 sales@highvac.com 88200 / 28200 Series Rectangular / Slit Valve Home / Products / Valves / 88200 / 28200 Series Rectangular / Slit Valve 88200 Series Description The 88200 Series Direct Drive Rectangular Valves offer one of the smallest interior surface areas in the vacuum valve industry. In the open position, the seal plate O-ring is completely out of sight preventing any particulate or media flow to accumulate on the sealing surface. In the closed position the one piece solid block design prevents any material buildup on the back side of the valve mechanism dramatically reducing service and maintenance requirements. This valve is engineered to meet the mechanical interface and vacuum containment requirements of the industry. To meet the specific needs of modular integrated processing systems, the valves are designed to isolate vacuum pressure on either side of the gate. A narrow profile design, including both actuator and controller, allows tight mounting between central, load-lock, handling and process chambers. Request QuoteRequest Product Datasheet Standard Technical Specifications Materials Valve body and gate: 6061-T6 ALuminium Welded bellows shaft seal: AM-350 Driveshaft and pins: Hardened stainless steel Bonnet/gate seals: Viton® elastomer Bakeout Temperature without solenoid Elastomer sealed bonnet: 150°C Actuator: 60°C Mounting Position Any Cycles Until Service 1,000,000 cycles dependent on process Vacuum Pressure Range: 1×10-9 mbar Helium leak rate: <2x10-9 mbar l/s Differential pressure closed: 1 bar in either direction Maximum ? pressure before opening: < 30 mbar Mechanism Pneumatic air service: 80 psig Solenoid: 4.3 Watts (latching-type, Valve to remain in same position in the event of power loss) - supplied voltage: 120V AC, 50/60 Hz - optional voltages: 24, 200, 240 VAC, 50/60 Hz or 12, 24V DC Position indicator, max: 115 VAC or 28 VDC, 20 mA Use the table below to obtain 2D drawings (PDF) and 3D drawings (STP), or to request a quote. If you need help finding a model number use the following link: 88200 Series Model Key Guide Pneumatic with Elastomer Bonnet and Gate O-Ring(includes reed switch position indicators) DN Model Number J (Bolted Body) K (Clamped Body) mm inch 32 x 220 1.26 x 8.74 88212-0109RX_ 2D 3D Quote 2D 3D Quote 32 x 332 1.26 x 13.07 88212-0113RX_ 2D 3D Quote 2D 3D Quote 46 x 236 1.81 x 9.29 88212-0209RX_ 2D 3D Quote 2D 3D Quote 50 x 336 1.97 x 13.23 88212-0213RX_ 2D 3D Quote 2D 3D Quote Options Custom sizes Alternate o-ring material Alternate solenoid voltages Microswitches for position indicators Roughing ports Low-particulate and rapid service versions 28200 Series Description The 28200 Series Direct Drive Rectangular Valves offer one of the smallest interior surface areas in the vacuum valve industry. In the open position, the seal plate O-ring is completely out of sight preventing any particulate or media flow to accumulate on the sealing surface. In the closed position the one piece solid block design prevents any material buildup on the back side of the valve mechanism dramatically reducing service and maintenance requirements. This valve is engineered to meet the mechanical interface and vacuum containment requirements of the industry. To meet the specific needs of modular integrated processing systems, the valves are designed to isolate vacuum pressure on either side of the gate. A narrow profile design, including both actuator and controller, allows tight mounting between central, load-lock, handling and process chambers. Request QuoteRequest Product Datasheet Standard Technical Specifications Materials Valve body and gate: 304 stainless steel Welded bellows shaft seal: AM-350 Driveshaft and pins: Hardened stainless steel Bonnet/gate seals: Viton® elastomer Bakeout Temperature without solenoid Elastomer sealed bonnet: 150°C Actuator: 60°C Mounting Position Any Cycles Until Service 1,000,000 cycles dependent on process Vacuum Pressure Range: 1×10-9 mbar Helium leak rate: <2x10-9 mbar l/s Differential pressure closed: 1 bar in either direction Maximum ? pressure before opening: < 30 mbar Mechanism Pneumatic air service: 80 psig Solenoid: 4.3 Watts (latching-type, Valve to remain in same position in the event of power loss) - supplied voltage: 120V AC, 50/60 Hz - optional voltages: 24, 200, 240 VAC, 50/60 Hz or 12, 24V DC Position indicator, max: 115 VAC or 28 VDC, 20 mA Use the table below to obtain 2D drawings (PDF) and 3D drawings (STP), or to request a quote. If you need help finding a model number use the following link: 28200 Series Model Key Guide Pneumatic with Elastomer Bonnet and Gate O-Ring (includes reed switch position indicators) DN Model Number J (Bolted Body) K (Clamped Body) mm inch 32 x 220 1.26 x 8.74 28212-0109RX_ 2D 3D Quote 2D 3D Quote 32 x 332 1.26 x 13.07 28212-0113RX_ 2D 3D Quote 2D 3D Quote 46 x 236 1.81 x 9.29 28212-0209RX_ 2D 3D Quote 2D 3D Quote 50 x 336 1.97 x 13.23 28212-0213RX_ 2D 3D Quote 2D 3D Quote Options Custom sizes Alternate o-ring material Alternate solenoid voltages Microswitches for position indicators Roughing ports UHV version with copper bonnet HomeAbout UsService / SupportRequest QuoteNewsContact UsSitemap © 2021 HVA LLC 12880 Moya Blvd Reno NV 89506-2611 Web Application Development by Pulse