Service Service Centre Systems Our Service for CMP Systems From our helpdesk and on-site field service assignments to spare parts delivery and process support. We are here for you. CONTACT US Our Service For Your Systems CUSTOMER SUPPORT The quick solution finder We take care of your systems and avoid downtimes. More information FIELD SERVICE Our service teams on site Our experienced field service engineers are on-site on request. More information REPAIR SERVICE For EBARA and third party pumps Reliable and first-class repair of assemblies and components. More information REFURBISHMENT From old to new We offer tool upgrades, set-up tests and trainings. More information SPARE PARTS Always available We supply original EBARA spare parts within 24 hours. More information PROCESS & SOLUTIONS Smooth production Solutions for the semiconductor process. More information Optimize your processes. CONTACT US Customer Support Systems The helpline to find solutions Our Service Team cares for all our tool platforms and options. If you have no on-site service, contact our team about technical requests and needs. CONTACT FORM Field Service Systems At your side by request Our CMP Systems experts for 200 mm & 300 mm, robotics, software, mechanics and endpoint, provide you with on-site support. All services are documented in a service report for follow-up actions. CONTACT FORM Repair Service Our service team in the refurbishment centre takes care of OEM items, repairs and refurbishes mechanical assemblies and electrical components. CONTACT FORM Repair Service for G3/GX Head Cylinder Assy Refurbishment G2/G3/GX Head Rebuilts T/R Shaft Refurbishment Mity Controllers Endpoint System Parts Repair Robots and Robots Controllers Scodip CLC T/R & D/R Spindle Assy Refurbishment Turn Table Motors Controllers and Motors by Yaskawa & Mitsubishi CONTACT US Refurbishment All tools are refurbished to a high quality following standard OEM procedures. We offer tool upgrades to meet your specifications. All set-up tests are done in a cleanroom at our service centre. CONTACT FORM Spare Parts Our warehouse stocks the original EBARA spare parts. The components are available within 24 hours. Spare parts from other manufacturers are available on request. CONTACT FORM You might also be interested in: CMP TOOLS Best in class performance for 200 mm and 300 mm We offer tool upgrades, set-up tests and trainings. More information BEVEL POLISHING High speed process solutions We supply original EBARA spare parts within 24 hours. More information Are you interested in CMP Systems? MORE INFORMATION EBARA Precision Machinery Europe GmbH Contact About EBARA Service Quick Links Privacy Policy Legal Notice © EPME 2021

Media EBARA Corp. Press Releases NEWS by EBARA Corp. Press Releases from EBARA Corporation, Tokyo, Japan 2020-10-05 EBARA SUPPORTS SEC 2020 Read more EBARA Precision Machinery Europe GmbH Contact About EBARA Service Quick Links Privacy Policy Legal Notice © EPME 2021