Languages MENU Photonics Home Markets Photonics Photonics The market for photonics devices is driven by diverse end applications including low energy LED lighting, 3D imaging sensors for facial recognition in mobile phones, LIDAR for the ‘smart car’, communications infrastructure and also cloud-based data storage systems. In general, photonics devices can be classified as either active or passive. Active devices, built from semiconductors, produce or sense light and include LEDs, lasers and photodiodes. Passive devices, on the other hand, are used to channel light in a controlled manner and are built using dielectric materials such as silicon oxide. Both active and passive components can be combined into a photonic integrated circuit (PIC). SPTS offers a range of technologies which can be employed to manufacture both passive and active optoelectronic devices. Processes for Photonics: Plasma Etch – etch processes for silicon, oxides, nitrides and compound semiconductors used in LEDs, laser, VCSELs and waveguides PECVD – deposition of a-Si, SiOx, SiN, and SiON for optical waveguides, stress relief layers and anti-reflective coatings PVD - High productivity deposition of metal layers for diffusion barriers, TSV seed, and UBM/RDL LPCVD – thermal annealing of TCOs, epitaxial and Ag layers in LED applications and silicon smoothing applications Vapor Release Etch - dry, isotropic etch of silicon and oxide in waveguides, µLEDs and optical MEMS Plasma Processes for Photonic Devices Download this datasheet giving an overview of SPTS's etch and deposition processes used to manufacture a range of photonic products such as LEDS, optical waveguides, VCSELs and lasers. DOWNLOAD Markets Advanced Packaging MEMS Photonics Etch PECVD PVD LPCVD Vapor Release Etch Power Devices RF-IC Silicon Semi Contact General Inquiries SPTS Contacts Social Media Quick Links Legal Forward-Looking Statements Coronavirus Supplier Policy Privacy Policy Cookies Policy Modern Slavery Statement Gender Pay Report Tax Strategy Statement Sitemap Company SPTS Technologies Ltd. Ringland Way, Newport, NP18 2TA Tel: +44 (0)1633 414000 Email: enquiries@spts.com SPTS Technologies Ltd is a company registered in England and Wales. Registered number 07037852. VAT number GB 945 7792 67. Cookie settings Copyright © 2021 SPTS Technologies Ltd. Information on this site contains forward looking information — for more information click here This website uses cookies Please click okay to accept use of cookies. If you do not want cookies to be set, please use the show details button to see options and de-select to opt-out. Show details Okay