About CORIAL History Meet the team Careers Career Opportunities Community News Media Center International Network A Plasma-Therm Company myCORIAL LinkedIn Twitter Menu MARKETS Microelectromechanical Systems (MEMS) Failure Analysis Optoelectronics Compound Semiconductor Power Devices Advanced Packaging Wireless Communication Photomask Integrated Optics R&D Close TECHNOLOGIES Plasma etch RIE ICP-RIE DRIE Plasma enhanced deposition ICP-CVD PECVD Atomic layer processing ALE ALD Close PRODUCTS HARDWARE CORIAL 200 SERIES Systems for R&D and Small Production Corial 200FA RIE Corial 200S RIE Corial 200R RIE Corial 210RL RIE Corial 200I ICP-RIE Corial 210IL ICP-RIE Corial 210D ICP-CVD Corial D250 PECVD Corial D250L PECVD CORIAL 300 SERIES Systems for 24/7 production environment Corial 300S RIE Corial 360RL RIE Corial 360IL ICP-RIE Corial D350 PECVD Corial D350L PECVD CORIAL 500 SERIES Very large area batch system CORIAL D500 CORIAL PS SERIES Modular cluster based platform Corial PS200, 200 mm platform SOFTWARE COSMA Process control software COSMA Pulse Control software for time multiplexed processes COSMA RS Reprocessing Software Close SERVICES CONTACT US Plasma-Therm completes acquisition of CORIAL Combination to accelerate the development of innovative stand-alone equipment and advance our commercialization initiatives globally READ THE ANNOUNCEMENT Intuitive products, capable processes, world-class service CORIAL is driving innovation in plasma etching and deposition technologies for specialty semiconductor markets FIND OUT MORE Our corporate magazine is out now In this issue of substrate, focus is on our team, business areas, scope for further hardware and process developments READ THE 2018 EDITION CORIAL expands its global presence We are opening offices around the world and seeking to expand partnership with distributors and agents. If you are interested, we look forward to hearing from you! GET IN TOUCH News Oct 4 CORPORATE Plasma-Therm holds Grand Opening Celebration for Grenoble, France Facility Guests enjoyed a large selection of hand-crafted cheeses carefully paired with wine, while... LEARN MORE Jun 12 CORPORATE Plasma-Therm completes acquisition of CORIAL This transaction is expected to produce significant cost savings from operational synergies while increasing the group’s top line revenue by … LEARN MORE May 29 EVENTS Rejoignez-nous à Nanotech France 2018 La conférence se tiendra du 27 au 29 Juin 2018 à Paris, France. CORIAL sera représentée à cet évènement par INNODYS. LEARN MORE Our know-how Built on more than 30 years of combined experience and expertise, CORIAL is the technology leader driving innovation in plasma etch and deposition equipment for specialty semiconductor markets. Advanced Equipment We invest 15% of our revenues in R&D, in order to provide the most versatile, reliable, and highest-performing etch and deposition systems for specialty semiconductor markets. We deliver the only control software that broadens the process capabilities of conventional ICP tools to enable time-multiplexed processes such as the Bosch process, and Atomic Layer Etching (ALE). LEARN MORE Team Expertise Our engineers combine a thorough knowledge of plasma physics and chemistry with rigorous experimental design techniques (D.O.E.) to develop our products and processes. That technical expertise plus our distribution network enables CORIAL to offer a highly flexible suite of products with low cost of ownership. LEARN MORE Extensive Process Library At CORIAL, we address a range of end-market applications including MEMS, optoelectronics, failure analysis, power devices, advanced packaging, wireless devices and integrated optics. Our R&D team continuously develops and fine-tunes the etching and deposition processes that will enable our customers to structure the materials of today and tomorrow. LEARN MORE CORIAL in brief years of customer support in research institutes, universities, and fabs specialty semiconductor markets served by our process solutions different wafer processing technologies Learn more quote>newsletter quote contact About CORIAL News Media Center International Network Follow us on LinkedIn Twitter Copyright CORIAL 2017 – All rights reserved | Legal informations | Credits We use cookies to ensure that we give you the best experience on our website. If you continue to use this site we will assume that you are happy with it.Ok