English (EN) Services Contact Menu Wafer Level Optics EV Group Technologies Wafer Level Optics Wafer-Level Optics (WLO) Market-leading WLO manufacturing portfolio, including step-and-repeat mastering, lens molding, nanoimprint lithography and stacking Introduction Features Figures Introduction EVG's wafer-level optics (WLO) manufacturing solutions enable a multitude of novel optical sensing devices for mobile consumer electronics products. Key examples include 3D sensing, biometric authentication, environmental sensing, infrared sensing and microlens arrays. Other applications include automotive front-lights, light carpets, optical diffusers and medical imaging. EVG's WLO solutions are supported by the company's NILPhotonics Competence Center. Step-and-Repeat Mastering Master stamps are wafer-size templates fully populated with microlens molds, each replicated from a single lens or lens array template in a step-and-repeat (S&R) approach. Starting from a single lens master made out of metal, silicon or glass, EV Group offers all essential process steps for the fabrication of master stamps featuring unmatched lens position accuracies and lens shape repeatability. Find out more about the EVG®770 NT Step-and-Repeat Nanoimprint Lithography System UV Microlens Molding Lens patterns are transferred into optical polymer materials by soft UV imprint lithography using working stamps replicated from the wafer-size master stamps. EV Group offers hybrid and monolithic microlens molding processes, which can be easily adapted to various material combinations for working stamp and microlens materials. EVG systems are our customers’ first choice for high-volume wafer-level lens replication. Find out more about the IQ Aligner® Automated UV Nanoimprint Lithography System SmartNIL® EVG provides market-leading UV-nanoimprinting equipment with its robust and field-proven SmartNIL technology. Progress in photonic manufacturing processes and technologies as well as applications is closely linked to advances in equipment capabilities. Among these, recent developments in SmartNIL offer additional degrees of freedom to manufacture innovative photonic structures with the highest functionality and smallest form factors at high volumes. With this technology, diffractive optical elements (DOEs) and optical waveguides can be easily integrated into miniaturized optical modules. Find out more about our SmartNIL® technology Lens Stacking The final micro optics stack is fabricated by UV bonding of all elements, including individual double-side microlens wafers as well as spacer wafers, to achieve the final stack height. Crucial parameters are lens-to-lens alignment accuracy, total thickness variation and tilt of the resulting bond interface. Find out more about the IQ Aligner® Automated UV Nanoimprint Lithography System Features Efficient step-and-repeat master fabrication Volume-proven imprinting technology with superior replication fidelity Precision aligned lens molding and stacking Proprietary SmartNIL® technology Multiple-use polymer stamp technology Open materials platform Figures Elements of a typical wafer-level camera module include a CMOS image sensor, polymeric lenses molded onto glass carriers using UV imprint lithography, spacers and aperture layers, as shown in this exploded view. Photograph of lens wafer and a stacked wafer with fully functional optical modules Events SEMICON Europa 2021 MESSE MÜNCHEN | Co-located with Productronica 16.11. - 19.11.2021 Munich, Germany SEMICON Japan 2021 Venue: Tokyo Big Sight/Online 15.12. - 17.12.2021 Tokyo, Japan Show all events Related downloads EVG Solutions for MEMS Brochure - 2.28 MB Talk to our EVG technology experts! Questions? Contact form Related products EVG®620 NT Smart NIL® UV Nanoimprint Lithography System EVG®6200 NT SmartNIL UV Nanoimprint Lithography System EVG®720 Automated SmartNIL® UV Nanoimprint Lithography System EVG®7200 Automated SmartNIL® UV Nanoimprint Lithography System IQ Aligner® Automated UV Nanoimprint Lithography System EVG®770 Step-and-Repeat Nanoimprint Lithography System HERCULES® NIL Fully Integrated SmartNIL® UV-NIL System EVG®40 NT Automated Measurement System Questions about our technologies? Contact the EVG experts Send us a message EVG in the Press Europhotonics featured our article "Wafer-Level Optics Enables Small-Form Photonics Sensors" in its 2020 spring edition Related News From wafers to power electronic applications: new consortium to create European supply chain for silicon carbide semiconductors Oct, 2021 EV Group Celebrates “40+1 Year” Anniversary with Exciting Live Event at Corporate Headquarters Sep, 2021 Applied Materials Introduces New Technologies and Capabilities for Accelerating the Semiconductor Industry's Heterogeneous Integration Roadmap Sep, 2021 EV Group Products Technologies Company Careers Social Media LinkedIn Facebook Twitter YouTube Join our newsletter We will send you updates on new products and technologies. Your Email Subscribe © 2021, EV Group (EVG) Imprint Privacy Policy Terms of use