GasShield® Bulk and Utility Filters Mott High Purity Bulk and Utility Filters provide 9-log filtration of particles at 0.0015 μm resulting in particle-free gas. These bulk filters are ideally suited to the higher temperatures often encountered downstream of a purifier during heated, dry down operations. DOWNLOAD DATA SHEET INFORMATION REQUEST Product Interest ▾ Market ▾ Country ▾ Call us at 860.747.6333, or submit an information request form and someone will get back to you within 48 hours. SUBMIT Login or Create a My Mott Account to Download Files from our Configurator Literature & Data Sheets TYPICAL APPLICATIONS Filters for gas flow streams at the gas pad. Semiconductor Products Catalog Explore Mott’s wide range of high purity filters, diffusers and flow restrictors designed exclusively for semiconductor manufacturers. BGF12P23 GasShield Fiber Bulk Gas Filter Models BGF12P23 GasShield Fiber Bulk Gas Filters Penta® Nickel Filter Media with 316L SS Housing (BGF310) Penta® Nickel Filter Media with 316L SS Housing (BGF315) Penta® Nickel Filter Media with 316L SS Housing (BGF610) Penta® Nickel Filter Media with 316L SS Housing (BGF615) Penta® Nickel Filter Media with 316L SS Housing (BGF315H) BGF-610H GasShield Penta® Bulk Gas Filter BGF615H GasShield Penta® Bulk Gas Filters Product Specs Operating Conditions » Maximum Operating Pressure: up to 650 psig (44.8 barg) » Maximum Operating Temperature for Inert Gas: up to 450°C » Maximum Differential Pressure: up to 250 psid (17.2 barg) Materials » Hardware: 316L SS » Filter Medium: 316L SS Fiber or Penta® Nickel » Wetted Hardware Surface Finish: 10 Ra, Electro-polished » Custom materials also available Specifications Particle Removal Size: ≥ 0.0015 μm Helium Leak Rating: 1 x 10-9 atm cc/sec Moisture Contribution: <10 ppb after 1 hour at low-flow ambient purge per SEMI F27 test method Total Hydrocarbons: Below detectable limits per ASTM F1398 test method Particle Shedding: Zero particle contribution above background (<1 particle/ft³) per SEMI F43-0308 test method Flow Data Bulk filters with rated flows up to 170,000 SLPM are available. Consult factory or spec sheets for flow curve information. Fittings & Dimensions BGF-310 & BGF-315 Part Description Fitting Type A in/mm B in/mm C in/mm BGF-310-2TS-N-4M BGF-310H-2TS-N-13M 2” Tube Stub 17.95/455.9 3.00/76.2 2.00/50.8 BGF-310-1.5TS-N-4M 1.5” Tube Stub 24.39/619.5 3.00/76.2 1.50/38.1 BGF-310-1TS-N-4M 1” Tube Stub 25.17/639.3 3.00/76.2 1.00/25.4 BGF-315-2TS-N-6M 2” Tube Stub 22.98/583.7 3.00/76.2 2.00/50.8 BGF-315-1.5TS-N-6M 1.5” Tube Stub 29.42/747.3 3.00/76.2 1.50/38.1 BGF-315H-40A5S-N-15M JIS40A5S 21.26/540.0 3.00/76.2 1.91/48.5 BGF-610 Part Description Fitting Type A in/mm B in/mm C in/mm BGF-610-4TS-N-19M BGF-610H-4TS-N-30M 4” Tube Stub 18.40/467.4 6.00/152.4 4.00/101.6 BGF-610-2TS-N-19M 2” Tube Stub 24.86/631.4 6.00/152.4 2.00/50.8 BGF-610-1.5TS-N-19M 1.5” Tube Stub 24.86/631.4 6.00/152.4 1.50/38.1 BGF-610-1TS-N-19M 1” Tube Stub 24.86/631.4 6.00/152.4 1.00/25.4 BGF-615 Part Description Fitting Type A in/mm B in/mm C in/mm BGF-615-6TS-N-28M BGF-615H-6TS-N-35M BGF-615HF-6TS-N-60M 6” Tube Stub 28.81/731.8 6.00/152.4 6.00/152.4 BGF-615-4TS-N-28M BGF-615H-4TS-N-35M BGF-615HF-4TS-N-60M 4” Tube Stub 23.41/594.6 6.00/152.4 4.00/101.6 BGF-615-2TS-N-28M BGF-615H-2TS-N-35M BGF-615HF-2TS-N-60M 2” Tube Stub 29.89/759.2 6.00/152.4 2.00/50.8 BGF-815 Part Description Fitting Type A in/mm B in/mm C in/mm BGF-815HF-6TS-N-170M 6” Tube Stub 22.81/579.3 8.63/219.0 6.00/152.4 BGF12P23 Part Description Fitting Type A in/mm B in/mm C in/mm BGF12P23-150A5S-F-175M JIS150A5S 39.40/1000.6 12.75/323.9 6.50/165.1 *Custom designs and fittings available. Videos & Articles Semiconductor Wafer Fabs Improve the Safety of Bulk Oxygen Gas Systems with Mott’s Penta® Nickel Porous Metal Filters Mott High Purity Filters Help Shorten Commissioning of Wafer Fabs Our Design Capabilities Flow/pressure drop curves and filtration efficiency for virtually any system design Gas compatibility considerations Custom filter media, pressure vessel, and fitting material and configurations available Relevant Services Design Expertise – From start to finish, we customize solutions based on your design parameters – challenge us! Quality Certifications – Need markings to show conformity to health, safety, and environmental protection standards like CE marking? We can handle that. Extensive Partner Network – If a material is not listed or capability not in-house, we maintain an extensive network of partners for new material procurement, advanced manufacturing capabilities, and validation testing. Engineering Support – Utilize our project engineers to consult about your process and select the right bulk & utility filter for your application. 860-747-6333 Headquarters: 75 Spring Lane Farmington, CT 06032 Customer Innovation Center: 84 Spring Lane Farmington, CT 06032 About Find a Distributor Credit Application Careers Terms & Conditions Privacy Policy Sitemap SUBSCRIBE Join our newsletter to stay up to date on features and releases © 2021 Mott. All rights reserved. Privacy Policy Terms of Service