Languages MENU PVD for Photonics Home Markets Photonics PVD For Photonics PVD for Photonics and Optoelectonics SPTS offers PVD processes depositing metals on compound semiconductor substrates for VCSELs, LEDs and other optoelectronic devices, along with 300 mm Si for Integrated Photonics Advanced Packaging. Applications include diffusion barriers, Au interconnect, stress compensation layers and Si UBM/RDL. Key Benefits Single wafer processing for improved yield Reliable handling of fragile compound semiconductor substrates ESC compatible with sapphire carriers without the need for a back-coat Related Product Information Plasma Processes for Photonic Devices Download this datasheet giving an overview of SPTS's etch and deposition processes used to manufacture a range of photonic products such as LEDS, optical waveguides, VCSELs and lasers. DOWNLOAD Plasma Processes for VCSELs New applications for VCSELs include proximity sensing for automotives and gesture/face recognition for consumer products and SPTS offers a range of processes for VCSEL manufacturing including ICP etch, PVD, and PECVD. DOWNLOAD Markets Advanced Packaging MEMS Photonics Etch PECVD PVD LPCVD Vapor Release Etch Power Devices RF-IC Silicon Semi Contact General Inquiries SPTS Contacts Social Media Quick Links Legal Forward-Looking Statements Coronavirus Supplier Policy Privacy Policy Cookies Policy Modern Slavery Statement Gender Pay Report Tax Strategy Statement Sitemap Company SPTS Technologies Ltd. Ringland Way, Newport, NP18 2TA Tel: +44 (0)1633 414000 Email: enquiries@spts.com SPTS Technologies Ltd is a company registered in England and Wales. Registered number 07037852. VAT number GB 945 7792 67. Cookie settings Copyright © 2021 SPTS Technologies Ltd. Information on this site contains forward looking information — for more information click here This website uses cookies Please click okay to accept use of cookies. If you do not want cookies to be set, please use the show details button to see options and de-select to opt-out. Show details Okay