Home Company Products News Contact Us Semiconductor Diffusion Heater Main Product Page DS Fibertech Corporation is a world leader in the manufacturing of semiconductor diffusion heaters. Each year, we supply thousands of direct replacement diffusion furnace heater elements to wafer fabs and semiconductor foundries across the globe. Currently, we support close to 100 fabrication facilities, OEMs, and contract maintenance providers, in countries located throughout North America, Asia, Europe, and Australia. DS Fibertech Corporation also provides refurbisment and burn-in services. Please click on links to view various model configurations, features, and cross-sections. Vulcan Diffusion Heater (1350°C) Hercules Diffusion Heater (1300°C) Mercury Diffusion Heater (350°C-1250°C) Apollo Diffusion Heater (1000°C) Diffusion Heater Related Products Heater Element Refurb & Services DS Fibertech Corporation offers direct replacements of diffusion heater elements from OEMs, such as: Tokyo Electron (TEL): VMM-56-002APM, VMM-56-201APM, VMM-40-101APM, VMM40-102APM, VMU-40-102EXAPM, VMM-35-001APM, VMM-35-002APM, VMU-54-001APM, VMU-40-009APM, VMU40-007APM, VMU-40-007EXAPM, VMU-40-007SEAPM, VMU-40-003APM, VMU-28-017APM, VMU-28-014APM, VOS-56-003, VOS-56-002, VOS-40-017, VMU-40-007, VMU-40-103, VMM-40-101, VMM-40-102, VMM-40-005, VMU-28-017, VMU-54-001 Hitachi Kokusai: F-330C-88V-4Z, F-330C-93V-4Z, D4EX04882, D4EX03531, D4EX02648 Axcelis: ST-200 Silicon Valley Group (SVG): 602783-02, 602783-03 Various Other OEM Models: UL-260-08H-MK3(W), HDS-610A5-C, F-210V-87, FC-200, FC200L, DC-1300, DC-1300PLUS, DCHT-500 If you are looking for a diffusion heater that is not listed, please contact us. Home Company Products Certifications News Documents Contact Us Reps By Region Copyright DS Fibertech Corporation. All Rights Reserved.

Home Company Products News Contact Us Contact Us Thank you for your interest in our products and services. Please call us or fill out the form, submit, and we will get back to you shortly. Send 11015 Mission Park Court Santee, CA. 92071 Telephone: (619) 562-7001 Toll Free: 1 (800) 432-8101 Fax: (619) 562-0074 Email: websales@dsfibertech.com Home Company Products Certifications News Documents Contact Us Reps By Region Copyright DS Fibertech Corporation. All Rights Reserved.