Languages MENU PECVD for Photonics Home Markets Photonics PECVD For Photonics PECVD for Photonics & Optoelectronics SPTS offers PECVD dielectric films for both active and passive photonics devices. PECVD dielectrics are used as anti-reflective coatings, isolation and passivation layers for VCSELs and LEDs, and as stress compensation layers in a variety of photonic applications. Doped and undoped silica and amorphous silicon films are used for planar waveguides while low loss PECVD SiON is used for multilayer reflector stacks. Benefits of SPTS PECVD for Photonic Applications Low stress (<20MPa), thick (>5µm) silica films Tuned stress for bow compensation Low H for low optical loss Tuneable refractive with low within-wafer RI non-uniformity High SiOx deposition rates >1µm/min Remote Plasma Source (RPS) NF3 chamber cleaning for highest productivity and uptime Related Product Information PECVD for Photonics Download this datasheet illustrating how SPTS's PECVD processes can be used for depositing dielectrics for a number of photonic applications, such as thick doped/undoped films for optical waveguides or anti-reflective coating for VCSELs. DOWNLOAD Plasma Processes for Photonic Devices Download this datasheet giving an overview of SPTS's etch and deposition processes used to manufacture a range of photonic products such as LEDS, optical waveguides, VCSELs and lasers. DOWNLOAD Markets Advanced Packaging MEMS Photonics Etch PECVD PVD LPCVD Vapor Release Etch Power Devices RF-IC Silicon Semi Contact General Inquiries SPTS Contacts Social Media Quick Links Legal Forward-Looking Statements Coronavirus Supplier Policy Privacy Policy Cookies Policy Modern Slavery Statement Gender Pay Report Tax Strategy Statement Sitemap Company SPTS Technologies Ltd. Ringland Way, Newport, NP18 2TA Tel: +44 (0)1633 414000 Email: enquiries@spts.com SPTS Technologies Ltd is a company registered in England and Wales. Registered number 07037852. VAT number GB 945 7792 67. Cookie settings Copyright © 2021 SPTS Technologies Ltd. Information on this site contains forward looking information — for more information click here This website uses cookies Please click okay to accept use of cookies. If you do not want cookies to be set, please use the show details button to see options and de-select to opt-out. Show details Okay