SIGN IN CONTACT EUROPE LANGUAGE BASKET (0) Pressure Control Mass Flow Controller Comparison Chart All Vacuum Products Pressure Control Comparison Charts Pressure Control MKS® 1179C MKS® GE50A MKS® GM50A MKS® GV50A MKS® GM100A MKS® GE250A MFC Type Thermal Thermal Thermal Thermal Thermal Thermal Full Scale Flow Range, sccm 10 to 20,000 5 to 50,000 5 to 50,000 5 to 50,000 50,000 to 100,000 250,000 Maximum Inlet Pressure, psid 150 150 150 150 150 150 Normal Operating Pressure Differential, psid 10 to 5000 sccm; 10 to 40 10000 to 30000 sccm; 15 to 40 10 to 5000 sccm; 10 to 40 10000 to 20000 sccm; 15 to 40 30000 to 50000 sccm; 25 to 40 (N2 Full Scale) (with atmospheric pressure at the MFC outlet) 10 to 5000 sccm; 10 to 40 10000 to 20000 sccm; 15 to 40 30000 to 50000 sccm; 25 to 40 (N2 Full Scale) (with atmospheric pressure at the MFC outlet) 10 to 5000 sccm; 10 to 40 10000 to 20000 sccm; 15 to 40 30000 to 50000 sccm; 25 to 40 (N2 Full Scale) (with atmospheric pressure at the MFC outlet) 50,000 - 100,000 sccm; 40 to 80 (N2 Full Scale with atmospheric pressure at the MFC outlet) 30 to 55 (dependent on fitting type) (with atmospheric pressure at the MFC outlet) Seal Type Elastomer Elastomer Metal Elastomer Metal Elastomer Integrated Software No Yes Yes Yes Yes Yes Accuracy (typical) ±1% of Full Scale ±1% of set point for 20 to 100% Full Scale ±0.2% of Full Scale for 2 to 20% Full Scale ±1% of set point for 20 to 100% Full Scale ±0.2% of Full Scale for 2 to 20% Full Scale ±1% of set point for 20 to 100% Full Scale ±0.2% of Full Scale for 2 to 20% Full Scale ±1% of set point for 20 to 100% Full Scale ±0.2% of Full Scale for 2 to 20% Full Scale ±1% of set point for > 20% to 100% Full Scale ±0.25% of Full Scale for 5% to 20% Full Scale Repeatability ±0.2% of Full Scale ±0.3% of Full Scale ±0.3% of Full Scale ±0.3% of Full Scale ±0.3% of Full Scale ±0.5% of Full Scale Resolution 0.1% of Full Scale 0.1% of Full Scale 0.1% of Full Scale 0.1% of Full Scale 0.1% of Full Scale 0.1% of Full Scale Control Range 2% to 100% of Full Scale (range on mech.) 2% to 100% of Full Scale (range on mech.) 2% to 100% of Full Scale (range on mech.) 2% to 100% of Full Scale (range on mech.) 2% to 100% of Full Scale (range on mech.) 2% to 100% of Full Scale (range on mech.) Warm-Up time <2 minutes (to within 0.2% of Full Scale of steady state performance) <30 minutes (to within 0.2% of Full Scale of steady state performance) <30 minutes (to within 0.2% of Full Scale of steady state performance) <30 minutes (to within 0.2% of Full Scale of steady state performance) <30 minutes (to within 0.2% of Full Scale of steady state performance) >60 minutes Typical Setting Time, sec <0.8 seconds (to within 2% of set point) <0.750, typical above 5% Full Scale <0.750, typical above 5% Full Scale <0.750, typical above 5% Full Scale <0.750, typical above 5% Full Scale 1 to 2 seconds typical above 10% Full Scale @ 50 psi Temperature - Operating Range, °C (°F) 10 to 50 (50 to 122) 10 to 50 10 to 50 10 to 50 10 to 50 10 to 50 Analog Output 0 to 5 VDC into >10K Ω 0 to 5 VDC (9 Pin Sub D Male and 15 Pin Sub D Male) 4 to 20 mA (15 Pin Sub D Male) 0 to 5 VDC (9 Pin Sub D Male and 15 Pin Sub D Male) 4 to 20 mA (15 Pin Sub D Male) 0 to 5 VDC (9 Pin Sub D Male and 15 Pin Sub D Male) 4 to 20 mA (15 Pin Sub D Male) 0 to 5 VDC (9 Pin Sub D Male and 15 Pin Sub D Male) 4 to 20 mA (15 Pin Sub D Male) 0 to 5 VDC (9 Pin Sub D Male and 15 Pin Sub D Male) 4 to 20 mA (15 Pin Sub D Male) Input Power Max. current at start-up (first 2 sec): ±15 VDC (±5%) @ 200 mA Typical current at steady state: ±15 VDC (±5%) @ 100 mA +15 to +24 VDC @ (<4 watts) +15 to +24 VDC @ (<4 watts) +15 to +24 VDC @ (<4 watts) +15 to +24 VDC @ (<4 watts) +15 to +24 VDC @ (<4 watts) Communications, Standard Analog Analog Analog Analog Analog Analog Communications, Optional N/A RS485 (optional) EtherCat (optional) DeviceNet (optional) Profibus (optional) Profinet (optional) RS485 (optional) EtherCat (optional) DeviceNet (optional) Profibus (optional) Profinet (optional) RS485 (optional) EtherCat (optional) DeviceNet (optional) Profibus (optional) Profinet (optional) RS485 (optional) EtherCat (optional) DeviceNet (optional) Profibus (optional) Profinet (optional) RS485 (optional) EtherCat (optional) DeviceNet (optional) Profibus (optional) Profinet (optional) Compliance and Standards CE CE CE CE CE CE Learn More Learn More Learn More Learn More Learn More Learn More Would You Like More Information? 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