Kuddeɣ as daɣ asinti net olah id scanning confocal microscope wa ikna Marvin Minsky daɣ awatay wan 1961 d scanning acoustic microscope (SAM) wa ikna Calvin Quate d imidiwan net win alxidmat daɣ awatay wan 1970, scanning probe microscopes tan iknanen teynaya ilan amukin maqqoran fal as war akkimalan ɣur wavelength n emasli meɣ annur.