Microscope na lantarkin duba muhalli

**microscope na lantarki na muhalli** (**ESEM**) microscope ne na lantarki (SEM) wanda ke ba da damar zaɓin tattara micrographs na lantarki na samfuran da ke da jika, ba a rufe su, ko duka biyu ta hanyar ba da izinin yanayin gas a cikin ɗakin samfurin.  Kodayake an sami nasarorin da aka samu a baya a kallon samfuran rigar a cikin ɗakunan ciki a cikin gyare-gyaren SEMs, ESEM tare da na'urorin gano na'urorin lantarki na musamman (maimakon daidaitaccen mai ganowa na Everhart-Thornley) da tsarin sarrafa famfo daban-daban, don ba da damar canja wurin katako na lantarki daga babban injin a cikin yankin gun zuwa babban matsi don samun damar yin amfani da shi a cikin ɗakin sa.  samfurori a cikin yanayin yanayin su.  Gerasimos Danilatos ne ya tsara kayan aikin a asali yayin da yake aiki a Jami'ar New Sout

## Tarihi

An fara da Manfred von Ardenne,[1] an ba da rahoton yunƙurin farko na gwajin samfuran a cikin sel "muhalli" tare da ruwa ko iskar gas, tare da na al'ada da na'urorin watsawa na microscopes na lantarki. Duk da haka, hotunan farko na jika a cikin SEM sun ruwaito ta hanyar Lane a cikin 1970 lokacin da ya yi amfani da jet mai kyau na tururin ruwa a kan abin dubawa a saman samfurin;  iskar gas ta watsar zuwa cikin injin dakin samfurin ba tare da wani gyara ga kayan aiki ba.  Shah da Beckett sun ba da rahoton yin amfani da sel daban-daban ko ɗakuna don ƙila su kula da samfuran halitta don ba da damar amfani da yanayin halin yanzu don gano sigina a cikin 1977 da kuma a cikin 1979.[8].  Spivak et al.  ya ba da rahoton ƙira da amfani da tsarin gano ƙwayoyin muhalli daban-daban a cikin SEM ciki har da yin famfo daban-daban, ko amfani da fina-finai masu gaskiya na lantarki don kula da samfuran a cikin yanayin rigar su a cikin 1977. Waɗancan sel, ta yanayinsu, suna da iyakacin amfani da aikace-aikacen kuma ba a yi wani ci gaba ba.  A cikin 1974, Robinson .ya ba da rahoton ingantacciyar hanya tare da yin amfani da na'urar ganowa ta lantarki ta baya da kuma yin famfo daban-daban tare da buɗaɗɗe guda ɗaya da shigar da tururin ruwa a kusa da matsa lamba 600 Pa a wurin daskarewa na zafin jiki.  Koyaya, babu ɗayan waɗannan hanyoyin da suka samar da ingantaccen kayan aiki don aiki na yau da kullun.  Fara aiki tare da Robinson a cikin 1978 a Jami'ar New South Wales a Sydney, Danilatos ya gudanar da bincike mai zurfi da gwaji wanda ya haifar da ingantaccen aiki na microscope a dakin da zafin jiki da matsanancin matsin lamba har zuwa 7000 Pa, kamar yadda aka ruwaito a cikin 1979.. A cikin shekaru masu zuwa, Danilatos, yana aiki da kansa, ya ba da rahoton jerin ayyuka akan ƙira da gina wani mahalli ko na'ura mai ba da hanya tsakanin hanyoyin sadarwa (ASEM) wanda ke iya aiki a kowane matsin lamba daga vacuum har zuwa yanayi ɗaya.  Waɗannan ayyukan farko sun haɗa da inganta tsarin famfo daban-daban tare da na'urorin gano na'urorin lantarki na baya-bayan nan (BSE) har zuwa 1983, lokacin da ya ƙirƙira amfani da iskar gas ɗin kanta a matsayin hanyar ganowa.  Shekaru goma na 1980 sun rufe tare da buga ayyukan biyu da suka shafi tushen ESEM[16] da ka'idar na'urar gano gaseous (GDD). Bugu da ƙari, a cikin 1988, an nuna ESEM na kasuwanci na farko a cikin New Orleans ta ElectroScan Corporation, [18] babban kamfani na babban kamfani da ke son yin kasuwanci da Danilatos ESEM.  Kamfanin ya ba da fifiko kan yanayin lantarki na biyu (SE) na GDD [19] kuma ya tabbatar da ikon mallakar ESEM na kasuwanci tare da ƙarin ƙarin haƙƙin mallaka. Kamfanonin Philips da FEI sun yi nasarar ElectroScan wajen samar da kayan aikin ESEM na kasuwanci.  Tare da ƙarewar mahimman haƙƙin mallaka da taimako ta Danilatos, LEO  an ƙara sabbin kayan kasuwanci zuwa kasuwa daga baya (Carl Zeiss SMT ya ci nasara).  An ba da rahoton ƙarin haɓakawa har zuwa yau daga aiki akan ainihin samfurin gwaji na ESEM a Sydney da kuma daga sauran ma'aikata da yawa masu amfani da ESEM na kasuwanci a cikin aikace-aikace iri-iri a duniya.  Danilatos ne ya shirya wani littafi na farko a cikin 1993, [25] yayin da ana iya samun ƙarin binciken kwanan nan a cikin Ph.D.  Littafin Morgan (2005).

## Microscope

Wani ESEM yana amfani da igiyar lantarki da aka zana da ruwan tabarau na lantarki don mayar da hankali da jagorantar katako akan saman samfurin ta hanya iri ɗaya azaman SEM na al'ada.  Ana duba ƙananan tabo na lantarki (bincike) a cikin sigar raster akan ƙaramin yanki na samfuri.  Na'urorin lantarki na katako suna yin hulɗa tare da ƙirar saman samfurin kuma suna samar da sigina daban-daban (bayani) waɗanda aka tattara tare da masu gano masu dacewa.  Fitowar waɗannan na'urori suna daidaitawa, ta hanyar na'urorin lantarki masu dacewa, allon mai duba don samar da hoton da ya dace da ƙaramin raster da bayanai, pixel by pixel, wanda ke fitowa daga saman samfurin.  Bayan waɗannan ƙa'idodin gama gari, ESEM ya bambanta sosai daga SEM ta fuskoki da yawa, duk waɗannan suna da mahimmanci a daidaitaccen ƙira da aiki na kayan aiki.  Bayanin da ke ƙasa yana nuna waɗannan buƙatun da yadda tsarin ke aiki.

### Binciken famfo daban-daban

ya keɓanta ɗakin samfurin da ke ɗorewa yanayin iskar gas mai matsananciyar matsananciyar matsa lamba daga ɗimbin sarari na ginshiƙi na na'urorin lantarki tare da aƙalla ƙananan bango biyu waɗanda aka saba kira da matsi-limiting apertures (PLA).  Ana cire iskar gas da ke zubowa ta hanyar buɗewar farko (PLA1) da sauri daga tsarin tare da famfo wanda ke kula da ƙananan matsa lamba a cikin yankin ƙasa (watau nan da nan sama da buɗewar).[1]  Ana kiran wannan nau'in famfo daban-daban.  Wasu iskar gas suna tserewa daga yankin ƙananan matsa lamba (mataki na 1) ta hanyar matsa lamba na biyu da ke iyakance buɗewa (PLA2) zuwa cikin yanki mara ruwa na ginshiƙin da ke sama, wanda ya ƙunshi nau'ikan famfo na biyu (mataki na 2).  Zane mai tsari yana nuna ainihin matakan matsi na iskar gas na ESEM wanda ya haɗa da ɗakin samfurin, rami na tsakiya da ginshiƙin na gani na lantarki na sama. Matsakaicin matsi da aka samu shine p0>>p1>>p2, wanda shine isashen yanayi don na'urar hangen nesa mai amfani da nau'in bindigar tungsten.  Ana iya ƙara ƙarin matakan yin famfo don cimma madaidaicin wuri kamar yadda ake buƙata na LaB6 da nau'in filaye na bindigogin lantarki.  Zane da siffar matsi mai iyakance buɗaɗɗen buɗe ido suna da mahimmanci wajen samun mafi girman yuwuwar matsa lamba (canzawa) ta cikinsa.  Ana samun wannan tare da bangon bangon da aka yi akan faranti na bakin ciki kuma an lika shi a cikin hanyar ƙasa kamar yadda aka nuna a cikin rakiyar keɓancewar iskar gas da ke gudana ta cikin PLA1.  Anyi hakan ne tare da kwamfyutan kwamfyuta na karon ƙwayoyin iskar gas da motsi ta sararin samaniya a ainihin lokacin.[3][4]  Nan da nan za mu iya gani a cikin siffa na isodensity contours na iskar gas ta hanyar budewa cewa yawan iskar gas yana raguwa da kusan umarni biyu na girma sama da tsayin radiyoyin budewa.  Wannan ƙa'idar farko ce ta nuna ƙididdigewa wanda ke ba da damar rarrabuwar ɗaki mai matsa lamba daga ƙananan matsi da wuraren da ke sama.

Ta hanyar irin wannan, an yi nazarin filayen iskar gas a cikin yanayi daban-daban na kayan aiki, wanda daga baya aka ƙididdige canja wurin wutar lantarki.

Ta hanyar amfani da famfo na bambanci, ana samar da wutar lantarki kuma ana yaduwa kyauta a cikin iska na shafi na sama, daga bindigar lantarki zuwa PLA2, daga inda daga nan gaba wutar lantarki sannu a hankali ta rasa wutar lantarki saboda yaduwar lantarki ta kwayoyin gas. Da farko, adadin yaduwar lantarki ba shi da mahimmanci a cikin ramin tsakiya, amma yayin da katako ya haɗu da jet din gas da ke ƙaruwa wanda PLA1 ya kafa, asarar ta zama mai mahimmanci. Bayan katako ya shiga cikin ɗakin samfurin, asarar lantarki yana ƙaruwa sosai dangane da matsin lamba, yanayin gas da ƙarfin ƙarfin lantarki na katako. Za'a iya ganin ɓangaren katako da aka watsa tare da axis na PLA1 ta hanyar saiti na halaye don samfurin da aka ba da p0,  inda D shine diamita na buɗewa. A ƙarshe, hasken lantarki ya warwatse gaba ɗaya kuma ya ɓace, amma kafin wannan ya faru, ana riƙe adadi mai amfani na electrons a cikin asalin da aka mayar da hankali a kan iyakar nesa, wanda har yanzu ana iya amfani dashi don ɗaukar hoto. Wannan yana yiwuwa saboda an cire electrons kuma an rarraba su a wani yanki mai faɗi kamar skirt (kayan lantarki) da ke kewaye da wurin da aka mayar da hankali. Saboda faɗin takalmin lantarki shine umarni na girma da ya fi faɗin tabo, tare da umarni na girma da ba su da yawa a yanzu, takalmin yana ba da gudummawa kawai ba tare da shiga cikin bambancin da aka samar da tsakiya ba. Takamaiman yanayi na matsin lamba, nesa da ƙarfin lantarki wanda katako na lantarki ya kasance mai amfani don dalilai na hoto an kira shi tsarin watsawa na oligo  a bambanci daga tsarin watsawa guda ɗaya, jam'i da yawa da aka yi amfani da su a cikin wallafe-wallafen da suka gabata.

Ga wani hasken da aka ba da hanzarta ƙarfin lantarki da gas, nisan L daga PLA1, wanda ke da amfani da hotuna, ya dace da matsin lamba na ɗakin p0. A matsayin doka ta yatsa, don hasken 5 kV a cikin iska, ana buƙatar samfurin p0 = 1 Pa·m ko ƙasa. Ta hanyar wannan ka'ida ta biyu ta canja wurin wutar lantarki, ƙira da aiki na ESEM yana mai da hankali kan tsaftacewa da ƙarami duk na'urorin da ke sarrafa motsi da sarrafawa, da kuma gano sigina. Matsalar ta rage zuwa cimma isasshen daidaito na injiniya don kayan aiki don aiki kusa da iyakar jiki, wanda ya dace da mafi kyawun aiki da kewayon iyawa. An gabatar da adadi na cancanta don lissafin duk wani karkatarwa ta hanyar na'urar da aka ba shi daga mafi kyawun damar aiki.

### Binciken sigina
Hasken lantarki yana tafe akan samfurin kuma yana shiga wani zurfin zurfi dangane da saurin ƙarfin lantarki da yanayin samfurin.  Daga hulɗar da ta biyo baya, ana samar da sigina kamar yadda yake a cikin SEM.  Don haka, muna samun electrons na biyu da na baya, X-ray da cathodoluminescence (haske).  Duk waɗannan sigina kuma ana gano su a cikin ESEM amma tare da wasu bambance-bambance a cikin ƙirar ganowa da ƙa'idodin da aka yi amfani da su

#### Electrons na biyu
Ba za a iya amfani da na'urar gano wutar lantarki ta SEM (mai ganowa na Everhart-Thornley) a gaban iskar gas ba saboda fitar da wutar lantarki (arcing) wanda ya haifar da son zuciya na kilovolt da ke da alaƙa da wannan mai ganowa. Maimakon haka, an yi amfani da iskar muhalli kanta a matsayin mai ganowa don daukar hoto a cikin wannan yanayin: 

##### Na'urar gano gas

A cikin tsa***'r***' mai sauƙi, na'urar gano gas (G**d**) tana amfani da wutar lantarki tare da ƙarfin lantarki har zuwa daruruwan ***'V***' don tattara electrons na biyu a cikin ESEM. Ka'idar wannan mai gano SE an fi bayyana ta hanyar la'akari da faranti biyu masu layi daya a nesa d ban da bambancin V wanda ke samar da filin lantarki guda ɗaya E = V / d, kuma an nuna shi a cikin zane mai zuwa na GDD. Electrons na biyu da aka saki daga samfurin a lokacin da aka yi amfani da katako yana motsawa ta hanyar ƙarfin filin zuwa ga anode electrode amma electrons suma suna motsawa ta radially saboda yaduwar zafi daga haɗuwa da kwayoyin gas. Bambancin ɓangaren tarin lantarki R a cikin radius r vs. r / d, don ƙayyadaddun ƙimar anode V, a samfuri na yau da kullun na (matsi·n nisa) **p·d = 1** Pa·m, an ba shi ta hanyar halayen halayen da ke tattare da ingancin GDD. Dukkanin na'urorin lantarki na biyu ana gano su idan an tsara sigogi na wannan na'urar yadda ya kamata. Wannan a bayyane yake yana nuna cewa kusan 100% inganci yana yiwuwa a cikin karamin radius na mai tarawa tare da kawai matsakaici nuna bambanci. A waɗannan matakan nuna bambanci, babu wani mummunan fitarwa da ke faruwa. Maimakon haka, ana samar da ninkawar daidaitattun electrons yayin da electrons suka haɗu da kwayoyin gas da ke sakin sabbin electrons a kan hanyarsu zuwa anode. Wannan ka'idar fadadawar avalanche tana aiki iri ɗaya da ma'auni mai ma'ana da aka yi amfani da shi don gano radiation mai ƙarfi. Sakamakon da aka karɓa ta hanyar anode an kara fadada shi kuma an sarrafa shi don daidaita allon nuni da kuma samar da hoto kamar a cikin SEM. Musamman, a cikin wannan ƙirar da haɓaka wutar lantarki mai haɗawa, samfurin p·d shine siginar mai zaman kanta, don haka akwai ƙimar ƙimar matsin lamba da lissafin lantarki wanda za'a iya bayyana shi ta hanyar halaye iri ɗaya. Sakamakon wannan bincike shine cewa ana iya gano electrons na biyu a cikin yanayin gas har ma a matsin lamba, dangane da ingancin injiniya na kowane kayan aiki da aka ba su.

A matsayin ƙarin halayyar GDD, gaseous **scintillation** avalanche kuma yana tare da electron avalanche da, ta hanyar gano hasken da aka samar tare da photo-multiplier, ana iya yin hotunan SE masu dacewa akai-akai. Amsawar mitar wannan yanayin ya ba da damar amfani da ƙimar binciken talabijin na gaskiya. Wannan yanayin na'urar ganowa an yi amfani da shi ta hanyar sabbin kayan kasuwanci.

GDD ya zama mai yiwuwa na farko a cikin ESEM kuma ya samar da kusan 100% SE tarin inganci ba a baya ba tare da mai gano Everhart-Thornley SE inda ba za a iya karkatar da hanyoyin lantarki kyauta a cikin iska ba. Kamar yadda aka kara bayyana a kasa, ana iya gano electrons da aka rarraba ta hanyar hulɗar sigina-gas, don haka dole ne a sarrafa sigogi daban-daban na wannan mai gano gas don raba ɓangaren BSE daga hoton SE. Sabili da haka, an yi hankali don samar da kusan hotunan SE masu tsabta tare da waɗannan masu ganowa, sannan ake kira ESD (mai ganowa na muhalli)  da GSED (mai gano wutar lantarki na biyu). 

#### Electrons da aka rarraba a baya

Backscattered electrons (BSE) sune wadanda aka fitar da su daga samfurin saboda hulɗar ƙwayoyin cuta inda electrons ke fuskantar yaduwa da yaduwa. Suna da makamashi daga 50 eV har zuwa makamashi na katako na farko ta hanyar ma'anar al'ada. Don ganowa da daukar hoto tare da waɗannan electrons, an yi amfani da kayan aiki masu haske da kayan aiki a cikin SEM. Wadannan kayan an daidaita su kuma an yi amfani da su a cikin ESEM ban da amfani da GDD don gano BSE da hotuna. [ana buƙatar ƙa'ida]&#x5B;**'&#x5D;</sup>

BSE yana wucewa ta hanyar ƙarar gas tsakanin electrodes na GDD kuma yana samar da ƙarin ionization da haɓaka avalanche. Akwai ƙarar ciki inda na biyu electrons suka mamaye tare da ƙaramin ko gudummawar BSE, yayin da ƙarar gas ta waje ta yi aiki da BSE. Yana yiwuwa a raba nau'ikan ganowa masu dacewa don a iya yin hotunan BSE masu tsabta tare da GDD. Dangantakar ƙarfin dangi na siginar biyu, SE da BSE, an yi aiki da su ta hanyar cikakkun daidaitattun rarraba caji a cikin ESEM. Binciken wutar lantarki na jirgin sama yana da mahimmanci wajen fahimtar ka'idoji da bukatun da ke ciki kuma ba ya nuna mafi kyawun zaɓi na tsarin wutar lantarki, kamar yadda aka tattauna a cikin ka'idar da aka buga na GDD.

===== Masu ganowa da aka daidaita =====
Duk da abubuwan da ke sama, masu gano BSE masu sadaukarwa a cikin ESEM sun taka muhimmiyar rawa, tunda BSE ya kasance yanayin ganowa mai amfani wanda ke samar da bayanai da ba zai yiwu a samu ba tare da SE. An daidaita hanyoyin gano BSE na al'ada don aiki a cikin yanayin gas na ESEM. BSE da ke da babban makamashi suna motsa kansu zuwa mai ganowa ba tare da wata babbar matsala ta kwayoyin gas ba. An yi amfani da masu ganowa masu ƙarfi ko masu tsayi don wannan dalili amma tsarin su ba shi da sauƙin daidaitawa da bukatun ESEM don aiki mafi kyau. A sakamakon haka, ba a bayar da rahoton amfani da yawa na waɗannan masu ganowa a kan kayan aikin ESEM na gaske a matsin lamba ba. An kunna mai gano BSE na "Robinson"  don aiki har zuwa kusan 100 Pa a nesa da aiki na al'ada na SEM don murkushe cajin samfurin, yayin da tarin lantarki a gajeren nesa da yanayin matsin lamba ya sa bai dace da ESEM ba. Koyaya, an yi amfani da kayan fashewar filastik da ke da sauƙin daidaitawa don BSE kuma an yi su don auna bisa ga ƙa'idodin tsarin. Irin wannan aikin ya ƙare a cikin amfani da na'urori masu ganowa guda biyu da ke hawa da PLA1 mai laushi kuma suna kusanci da gefen sa, don haka an rage sararin ganowar matattu zuwa mafi ƙaranci, kamar yadda aka nuna a cikin adadi mai zuwa na'urorin gano BSE mafi kyau. Hakanan ana inganta jagorancin photon ta hanyar lissafin bututun haske, yayin da masu ganowa biyu na daidaitattun suna ba da damar rabuwa da yanayin ƙasa (ƙaddamar da sigina) da bambancin lambar atom (ƙarin sigina) na saman samfurin don nunawa tare da mafi kyawun sigina-da-hargitsi-hargami. Wannan makircin ya ci gaba da ba da damar amfani da launi ta hanyar sanya sigina daban-daban a hanya mai ma'ana. Wadannan masu ganowa masu sauki amma na musamman sun zama masu yiwuwa a cikin yanayin ESEM, tunda filastik ba ya caji ta BSE. An gabatar da ma'auni mai kyau tare da sarari mai dacewa  a matsayin GDD lokacin da iskar gas ta kasance kuma don gudanar da cajin mara kyau daga masu gano filastik lokacin da aka fitar da iskar, zuwa ga ESEM na duniya. Tunda kayan lantarki da ke hade sun haɗa da photomultiplier tare da amsawar mitar, ana samun ƙimar binciken TV na gaskiya. Wannan halayyar kiyayewa ce tare da ESEM wanda ke ba da damar nazarin matakai a wurin a ainihin lokacin. Idan aka kwatanta, ba a bayar da rahoton irin wannan hoton ba tare da yanayin guguwar lantarki na GDD har yanzu (kamar Maris, 2025). [ana buƙatar ƙa'ida]<sup class="noprint Inline-Template Template-Fact" style="white-space:nowrap;">&#x5B;**'&#x5D;

Amfani da masu gano BSE masu haske a cikin ESEM ya dace da GDD don gano SE a lokaci guda, ta hanyar maye gurbin wutar lantarki ta sama da wutar lantarki mai kyau (mai ganowa), wanda za'a iya sauƙaƙe shi tare da waɗannan masu gano BES. An kuma bincika mai gano allurar da lissafin cylindrical (wire). 

#### Hasken wuta
Cathodoluminescence wani yanayin ganowa ne wanda ya shafi photons da aka samar ta hanyar hulɗar katako-samfurori. An nuna wannan yanayin don aiki a cikin ESEM ta hanyar amfani da bututun haske bayan an share su daga murfin da aka yi amfani da shi a baya don gano BSE. Koyaya, ba a san abubuwa da yawa game da amfani da shi a waje da samfurin gwaji da aka gwada da farko ba. A bayyane yake, ESEM yana da fa'idodi a cikin wannan yanayin ganowa idan aka kwatanta da SEM, tunda za'a iya bincika yanayin kowane samfurin a cikin tsarin hoto. Cathodoluminescence dukiya ce ta kayan aiki, amma tare da magunguna daban-daban da ake buƙata da sauran iyakoki a cikin SEM \ wannan yanayin ganowa bai shahara ba a baya. Koyaya, yanzu ana samun wannan don nazarin samfurori marasa magani.

#### X-rays
Ana iya gano halayen X-rays na asali da aka samar a cikin ESEM ta hanyar masu ganowa iri ɗaya da aka yi amfani da su a cikin SEM. Koyaya, akwai ƙarin rikitarwa da ke tasowa daga X-rays da aka samar daga rigar lantarki. Wadannan X-rays sun fito ne daga wani yanki mafi girma fiye da SEM kuma ƙudurin sararin samaniya ya ragu sosai, tunda ba za a iya "kusa" siginar X-ray kawai daga sautin hulɗar binciken ba. Koyaya, an ba da shawarar makirci daban-daban don warware wannan matsalar. Wadannan hanyoyin sun haɗa da rufe fuska, ko kuma dabarar extrapolation ta hanyar canza matsin lamba da daidaita tasirin skirt, inda aka sami ci gaba.

#### Samfurin yanzu
A cikin SEM mai iska, ana amfani da yanayin da aka shawo kan samfurin a matsayin madadin yanayin don ɗaukar hoto na samfurori masu gudanarwa. Sakamakon samfurin yanzu daga bambancin wutar lantarki na yanzu minus jimlar SE da BSE na yanzu. Koyaya, a gaban iskar gas da ionization da ke biyowa, zai zama matsala don raba wannan yanayin ganowa daga na'urar gano gas ɗin da ke aiki gaba ɗaya. Saboda haka wannan yanayin, ta hanyar ma'anarsa, ana iya ɗaukarsa a matsayin wanda ba zai iya jurewa ba a cikin ESEM. Shah da Becket  sun ɗauka aikin samfurin ya shawo kan yanayin yanzu idan an tabbatar da halayen samfurin su yayin binciken samfurori masu laushi; a zahiri, Shah ta 1987  har yanzu yana la'akari da samfuran ionisation a cikin gas ta SE da BSE a matsayin babbar cikas, tunda ya yi imanin cewa ionisation bai ɗauki wani bayani game da samfurin ba. Koyaya, daga baya ya rungumi don gyara rawar da iskar gas ke takawa yayin samar da hoto.

### Caji na samfurin
Hasken lantarki da ke shawo kan samfurori masu rufi yana tara caji mara kyau, wanda ke haifar da yiwuwar lantarki wanda ke karkatar da hasken lantarki daga maɓallin da aka bincika a cikin SEM na al'ada. Wannan ya bayyana a matsayin kayan caji a kan hoton, wanda aka kawar a cikin SEM ta hanyar saka wani nau'i mai kaiwa a saman samfurin kafin a bincika. Maimakon wannan murfin, iskar gas a cikin ESEM yana da wutar lantarki yana hana tara caji mara kyau. Kyakkyawan halayyar gas ɗin saboda ionization da yake fuskanta ta hanyar wutar lantarki da kuma siginar ionizing SE da BSE. Wannan ka'idar ta zama wani karkatarwa daga microscopy na lantarki na al'ada.

Hoton bambancin caji shine yanayin hotunan microscope na lantarki wanda zai iya samar da hotuna na ba haka ba microstructures marar ganuwa a cikin kayan rufewa  da kuma burbushin.  An yi amfani da dabarar don gano canje-canje a cikin ma'adanai waɗanda ke nuna bambance-bambance na abun da ke ciki. Tunda an hana caji a cikin ESEM a isasshen matsin gas, yana yiwuwa a daidaita adadin caji ta hanyar canza matsin lamba tsakanin iska ta SEM da wasu matsin lamba yayin lura da tasirin bambancin caji. Dubi misalai tare da jerin hotuna, har ma da hotuna huɗu na wannan filin, kuma tare da launi.

### Bambanci da ƙuduri
A sakamakon yadda ESEM ke aiki, an adana ƙuduri dangane da SEM. Wannan shi ne saboda ikon warwarewa na kayan aikin an ƙayyade shi ta hanyar diamita na lantarki wanda iskar gas ba ta shafar shi a kan nisan tafiye-tafiye mai amfani kafin ya ɓace gaba ɗaya. An nuna wannan a kan ESEMs na kasuwanci waɗanda ke ba da mafi kyawun wuraren katako ta hanyar hotunan samfurori na gwaji, watau al'ada ƙwayoyin zinariya a kan carbon, a cikin iska da gas. Koyaya, bambanci yana raguwa daidai da haka yayin da binciken lantarki ya rasa halin yanzu tare da nisan tafiya da karuwar matsin lamba. Rashin ƙarfin yanzu, idan ya cancanta, za'a iya rama shi ta hanyar kara yawan wutar lantarki wanda ke tare da karuwar girman wuri. Sabili da haka, ƙuduri mai amfani ya dogara da bambancin samfurin asali na fasalin da aka ba shi, akan ƙirar kayan aikin da ya kamata ya samar da ƙaramin katako da asarar sigina da kuma kan mai aiki da ke zaɓar sigogi daidai don kowane aikace-aikace. An ƙaddara fannoni na bambanci da ƙuduri a cikin aikin da aka ambata akan tushe na ESEM  da sauran ayyukan da suka danganci.   Bugu da ƙari, dangane da wannan, dole ne mu yi la'akari da tasirin radiation akan samfurin. [ana buƙatar ƙa'ida]&#x5B;**'&#x5D;</sup>

=== Canjin samfurin ===
Yawancin kayan aikin da ke akwai suna fitar da ɗakin samfurin su zuwa matsin yanayi (100 kPa) tare da kowane canjin samfurin. Dole ne a fitar da iskar gas mai yawa kuma a maye gurbinsa da iskar mai ban sha'awa, yawanci tururin ruwa da aka bayar daga tafkin ruwa da aka haɗa da ɗakin ta hanyar wasu matsin lamba (misali allura). A cikin aikace-aikace da yawa wannan ba ya gabatar da matsala, amma tare da waɗanda ke buƙatar ɗumi na 100% ba tare da katsewa ba, an gano cewa cire iskar gas yana tare da rage ɗumi na ƙasa da matakin 100% yayin canja wurin samfurin. Wannan a bayyane yake ya kayar da ainihin manufar ESEM don wannan aji na aikace-aikace. Koyaya, irin wannan matsala ba ta tasowa tare da asalin samfurin ESEM ta amfani da ɗakin canja wurin samfurin matsakaici, don haka ana kiyaye babban ɗakin a 100% na dangi ba tare da katsewa ba yayin binciken. Gidan canja wurin samfurin (tr-ch) wanda aka nuna a cikin zane na matakan matsin gas na ESEM ya ƙunshi ƙaramin tafkin ruwa don a iya fitar da iska ta farko da sauri kuma kusan nan take an maye gurbin ta da tururin ruwa ba tare da wucewa ta hanyar iyakantaccen bututun da bawul ba. Za'a iya kiyaye babban ɗakin samfurin a 100% na ɗanɗano, idan kawai ɓarkewar tururi ta hanyar ƙaramin PLA1, amma ba a lokacin tashin hankali ba tare da kowane canjin samfurin. Da zarar samfurin mai laushi yana cikin daidaituwa tare da 100% dangi a cikin ɗakin canja wuri, a cikin seconds, wani bawul na ƙofar ya buɗe kuma an canja samfurin a cikin babban ɗakin samfurin da aka kiyaye a wannan matsin lamba. Wani madadin hanyar da ta shafi sarrafa famfo na babban ɗakin  bazai warware matsalar gaba ɗaya ba ko dai saboda ba za a iya kusantar danshi na 100% ba tare da bushewa ba, ko kuma tsarin yana da jinkiri sosai; hada tafkin ruwa a cikin babban ɗakin yana nufin cewa mutum ba zai iya rage yawan danshi ba har sai bayan an fitar da duk ruwan (watau rashin kulawar danshi na dangi). Dubi "Aiki" a shafi na 238 na Tushen ESEM . 

== Sakamakon radiation ==
A lokacin hulɗar wutar lantarki tare da samfurin, canje-canje ga samfurin a matakai daban-daban kusan ba za a iya gujewa ba. Wadannan canje-canje, ko tasirin radiation, na iya ko bazai zama bayyane a cikin SEM da ESEM ba. Koyaya, irin waɗannan tasirin suna da mahimmanci a cikin ESEM da ke da'awar ikon duba samfurori a cikin yanayin su na halitta. Cirewar iska babbar nasara ce ga wannan manufar, don haka duk wani sakamako mai lahani daga wutar lantarki kanta yana buƙatar kulawa ta musamman. Hanyar da ta fi dacewa game da wannan matsala ita ce rage waɗannan tasirin zuwa cikakkiyar mafi ƙaranci tare da ƙirar ESEM mafi kyau. Bayan wannan, mai amfani ya kamata ya san yiwuwar wanzuwarsu yayin kimanta sakamakon. Yawancin lokaci, waɗannan tasirin suna bayyana a kan hotuna a cikin siffofi daban-daban saboda hulɗar nau'ikan lantarki daban-daban da matakai.

Gabatar da iskar gas a cikin microscope na lantarki daidai yake da sabon girman. Don haka, hulɗar tsakanin wutar lantarki da iskar gas tare da hulɗar iskar gas (da samfurori) tare da samfurin yana gabatar da sabon yanki na bincike tare da sakamakon da ba a sani ba. Wasu daga cikin wadannan na iya bayyana da farko marasa amfani amma daga baya an shawo kansu, wasu na iya samar da sakamako ba zato ba tsammani. Mataki na ruwa a cikin samfurin tare da radicals na hannu na iya samar da tarin abubuwan da suka faru kamar lalacewar samfurin amma kuma yana ba da damar ɗaukar hoto kai tsaye na tsarin kwayoyin. [ana buƙatar ƙa'ida]<sup class="noprint Inline-Template Template-Fact" style="white-space:nowrap;">&#x5B;**'&#x5D;

## Fa'idodi
Kasancewar iskar gas a kusa da samfurin yana haifar da sabbin damar da ta dace da ESEM: (a) microscopy na lantarki na ruwa  yana yiwuwa tunda duk wani matsin lamba da ya fi 609 Pa yana ba da damar kiyaye ruwa a cikin yanayin ruwa don yanayin zafi sama da 0 ° C, ya bambanta da SEM inda samfurori ke bushewa ta yanayin iska.  (b) Samfurori marasa amfani da lantarki ba sa buƙatar dabarun shirye-shiryen da aka yi amfani da su a cikin SEM don yin amfani da farfajiyar, kamar sanya zinariya ko carbon, ko wasu jiyya, dabarun da ke buƙatar iska a cikin tsari. Samfurori masu rufewa suna caji ta hanyar hasken lantarki wanda ke sa hotunan ya zama matsala ko ma ba zai yiwu ba.  (c) Ana amfani da iskar gas kanta a matsayin matsakaiciyar ganowa wanda ke samar da damar daukar hoto na zamani, sabanin masu gano SEM.  (d) Masu ganowa na filastik masu haske na filastic na iya aiki ba tare da caji ba. Saboda haka, waɗannan masu ganowa suna samar da mafi girman sigina-da-hargitsi-rashin hankali a mafi ƙarancin ƙarfin lantarki, saboda BSE ba ya watsar da kowane makamashi a cikin murfin aluminum da aka yi amfani da shi don SEM.&nbsp;

As a result, specimens can be examined faster and more easily, avoiding complex and time-consuming preparation methods, without modifying the natural surface or creating artifacts by the preceding preparation work, or the vacuum of the SEM. Gas/liquid/solid interactions can be studied dynamically in situ and in real time, or recorded for post processing. Temperature variations from subzero to above 1000&nbsp;°C and various ancillary devices for specimen micro-manipulation have become a new reality. Biological specimens can be maintained fresh and live. Therefore, ESEM constitutes a radical breakthrough from conventional electron microscopy, where the vacuum condition precluded the advantages of electron beam imaging becoming universal.&#x5B;**&#x5D;

## Rashin fa'idodi
Babban rashin amfani ya samo asali ne daga iyakancewar nesa a cikin ɗakin samfurin wanda za'a iya amfani da shi a cikin yanayin gas. Tsakanin amfani na samfurin daga PLA1 aiki ne na hanzarta ƙarfin lantarki, halin yanzu, yanayi da matsin gas, da kuma diamita da aka yi amfani da shi. Wannan nisan ya bambanta daga kusan 10 mm zuwa wani ɓangare na millimeter kamar yadda matsin gas na iya bambanta daga ƙananan iska zuwa yanayi ɗaya. Don aiki mafi kyau, duka masana'anta da mai amfani dole ne su dace, a cikin ƙira da aiki, don gamsar da wannan muhimmiyar buƙata. Bugu da ƙari, yayin da za'a iya kawo matsin lamba zuwa matakin ƙasa, ESEM zai koma aikin SEM na yau da kullun ba tare da rashin amfani da ke sama ba. Sabili da haka, mutum na iya cinikin halaye na ESEM tare da na SEM ta hanyar aiki a cikin iska. Ana iya samun sulhu da duk waɗannan rashin fa'idodi da fa'idori ta hanyar ESEM na duniya da aka tsara da kuma sarrafawa.&nbsp;

Tare da iyakancewar nisan samfurin mai amfani shine mafi ƙarancin girma mai yiwuwa, tunda a matsin lamba mai girma nisan ya zama ƙarami sosai har filin kallo yana iyakance ta girman PLA1. A cikin ƙananan girman girman SEM, wanda ya mamaye girman sama na microscope mai haske, filin da ya fi girma yana iyakance zuwa digiri daban-daban ta hanyar yanayin ESEM. Matsayin wannan iyakancewa ya dogara sosai da ƙirar kayan aiki.

Kamar yadda X-rays kuma ke haifar da iskar gas da ke kewaye da su kuma sun fito ne daga wani yanki mafi girma fiye da SEM, ana buƙatar algorithms na musamman don cire tasirin iskar gas akan bayanin da aka cire yayin bincike.

Kasancewar iskar gas na iya haifar da tasirin da ba a so a wasu aikace-aikace, amma girman waɗannan zai bayyana ne kawai yayin da ake ci gaba da bincike da ci gaba don ragewa da sarrafa tasirin radiation.

Babu wani kayan aiki na kasuwanci har yanzu (a shekara ta 2009) wanda ke samuwa daidai da dukkan ka'idodin ƙirar ƙira mafi kyau, don haka duk wani ƙarin iyakancewar da aka lissafa alama ce ta kayan aikin da ke akwai kuma ba na dabarar ESEM ba, gabaɗaya.

## Rarrabawar ESEM
Hakanan ana iya amfani da ESEM a cikin yanayin watsawa (TESEM) ta hanyar ganowa mai dacewa na sakonnin filin haske da duhu ta hanyar sashi mai laushi. Ana yin wannan ta hanyar amfani da masu ganowa masu ƙarfi a ƙasa da samfurin,  ko amfani da na'urar gano gas (GDD).  Gabaɗaya ƙananan ƙarfin lantarki da aka yi amfani da su a cikin ESEM suna haɓaka bambancin samfuran da ba a shafa ba yayin da suke ba da damar ɗaukar hoto na nanometer kamar yadda aka samu a yanayin watsawa musamman tare da nau'in fitar da wutar lantarki.

## Ranar Ranar Rana
ESEM-DIA taƙaice ce da ke tsaye don tsarin da ke kunshe da microscope na ESEM tare da shirin nazarin hoto na dijital (DIA). Yana ba da damar yin amfani da adadi na hotunan ESEM da aka samu ta hanyar dijital, kuma yana ba da damar gane hoto da sarrafa hoto ta hanyar ilmantarwa ta inji bisa ga cibiyar sadarwa ta jijiyoyi.  

## Aikace-aikacen
Wasu aikace-aikacen wakilan ESEM suna cikin waɗannan yankuna: 

### Ilimin halittu
Aikace-aikacen farko ya haɗa da nazarin sabbin kayan shuke-shuke masu rai ciki har da nazarin *Leptospermum flavescens* .  An nuna fa'idodin ESEM a cikin nazarin microorganisms  da kuma kwatanta dabarun shirye-shirye. 

### Magunguna da kiwon lafiya
An yi nazarin tasirin magunguna a kan sel na ciwon daji tare da ESEM-STEM.

### Archaeology
A cikin kimiyyar kiyayewa, sau da yawa ya zama dole a adana samfurori ba tare da lalacewa ba ko kuma a cikin yanayin su.

### Masana'antu
An yi nazarin ESEM a kan fiber a cikin masana'antar ulu tare da kuma ba tare da takamaiman maganin sunadarai da na inji ba. A cikin masana'antar siminti, yana da mahimmanci a bincika matakai daban-daban a cikin wuri mai laushi da bushewa.

### Nazarin da ake yi ''A wurin''
Ana iya yin karatu *a wurin* tare da taimakon na'urori daban-daban. Wadannan sun haɗa da matakai masu zafi don lura da matakai a yanayin zafi mai girma,  microinjectors na ruwa  da tsawo na samfurin ko na'urorin lalacewa. 

### Kimiyya ta kayan aiki gaba ɗaya
Ana iya nazarin biofilms ba tare da kayan tarihi da aka gabatar ba yayin shirye-shiryen SEM,   da kuma dentin  da detergents  an bincika su tun farkon shekarun ESEM.

## ESEM na Kasuwanci
ESEM ya bayyana a ƙarƙashin sunayen masana'antu daban-daban. Kalmar ESEM sunan gama gari ne da aka fara gabatar da shi a fili a cikin 1980  kuma daga baya aka yi amfani da shi a duk wallafe-wallafen da Danilatos da kusan dukkanin masu amfani da dukkan kayan aikin ESEM. An samo alamar kasuwanci ta ELECTROSCAN ESEM a lokaci-lokaci har zuwa 1999, lokacin da aka ba shi izinin ɓace. Kalmar "muhalli" an gabatar da ita ne da farko a ci gaba da amfani da ƙwayoyin "muhallu" a cikin microscopy na watsawa, kodayake an yi amfani da kalmar "atmospheric" don komawa ga ESEM a matsin yanayi ɗaya (ASEM)  amma ba tare da kayan kasuwanci ba. Sauran masana'antun da ke fafatawa sun yi amfani da kalmomin "Natural SEM"  (Hitachi), "Wet-SEM"  (ISI), "Bio-SEM' (gajeren rayuwa, AMRAY), "VP-SEM""  (matsin lamba SEM; LEO / Zeiss-SMT), "LVSEM  (low-vacuum SEM, sau da yawa kuma yana nuna low-voltage SEM; [4] JEOL), dukansu suna da alama suna da ɗan gajeren lokaci bisa ga tsarin masana'antu. Har zuwa kwanan nan, duk waɗannan sunayen suna nufin kayan aiki da ke aiki har zuwa kusan 100 Pa kuma tare da masu gano BSE kawai. Kwanan nan, an tsawaita Zeiss-SMT VP-SEM zuwa matsin lamba mafi girma tare da ionization na gas ko scintillation na gas a matsayin hanyar SE don samar da hoto. Sabili da haka, bai dace ba a gano kalmar ESEM tare da nau'in kayan kasuwanci guda ɗaya kawai a cikin juxtaposition zuwa wasu alamun kasuwanci (ko dakin gwaje-gwaje) masu gasa tare da sunaye daban-daban, kamar yadda wasu rikice-rikice na iya tasowa daga amfani da alamun kasuwanci da suka gabata.

Hakazalika, kalmar GDD tana da alaƙa da dukan ka'idar gano gas a cikin ESEM. Kalmomin ESD da GSED, musamman, an yi amfani da su tare da ESEM na kasuwanci don nuna yanayin lantarki na biyu na wannan mai ganowa.

## Hotunan ESEM
Wadannan misalai ne na hotunan da aka dauka ta amfani da ESEM.
Fayil:ESEM_color_mineral.jpg|Ma'adinan Aluminium/iron/Siliki tare da sauran ƙazanta da gurɓataccen ƙasa wanda aka kwatanta a cikin ESEM ta amfani da na'urorin ganowa na lantarki guda biyu na simmetrical scintillating da na'urar gano gaseous (GDD)
Fayil:ESEM_gas_jet.svg|Jirgin sama ta hanyar buɗaɗɗen micrometer 100 cikin ɗakin ESEM wanda aka riƙe a 200 Pa, hoton da aka ɗauka tare da na'urar gano gas, 15 kV
Fayil:ESEM_tv_imaging.svg|Hoto a ƙimar sikanin TV na gaskiya a cikin ESEM: Ruwan microdroplets daga allurar capillary akan takarda nama.  Hotuna daga duban talabijin masu nuna firam guda na rikodin bidiyo.  Siginar BSE mara aiki, faɗin filin 380 μm.
Fayil:Pollen.jpg|Pollen Orchid da aka duba a cikin ElectroScan 2020 ESEM, tare da GSED, 23 kV da 4.9 torr (= 653 Pa).
Fayil:Compound_flower_with_pollen2.jpg|Furen haɗe tare da pollen, hoton SE, ElectroSscan E3 ESEM..

Fayil:Compound_flower_with_pollen_no_scale_bar.jpg|Furen haɗe tare da pollen, hoton SE, ElectroSscan E3 ESEM.
Fayil:ESEM_resolution.jpg|Samfurin gwajin ƙuduri na gwal akan carbon a cikin ESEM, a babban haɓakawa.  Faɗin filin 1.2 μm
Fayil:Bone_marrow_cow.jpg|Marrow na saniya, hoton SE, ElectroSscan E3 ESEM.
Fayil:Hair_in_spiders_web.jpg|Gashi a cikin yanar gizo gizo-gizo, hoton SE, ElectroSscan E3 ESEM.
Fayil:Feather_2.jpg|Feather, hoton SE, ElectroSscan E3 ESEM.
Fayil:Lavender_leaf.jpg|Ganyen Lavender, Hoton SE, ElectroSscan E3 ESEM.
Fayil:Potato_starch.jpg|Potato starch, SE image, ElectroSscan E3 ESEM.
Fayil:Bone_marrow_cow_horizontal.jpg|Bone marrow of cow (horizontal), SE image, ElectroSscan E3 ESEM.
Fayil:Wet_bottle_brush_leaf_stomata_and_leaf_hairs_no_scale_bar.jpg|Wet bottle brush leaf stomata and leaf hairs, ElectroSscan E3 ESEM.
Fayil:Fungal_spores_in_spiders_web.jpg|Fungal spores in spiders web, SE image, ElectroSscan E3 ESEM.
Fayil:4T1_tumor_cell_line._Multinucleated_cell._SEM-BSE.jpg|4T1 cells line. The micrograph of mouse breast tumor cells on cultural plastic, BSE image, ZEISS EVO LS10.
Fayil:ESEM_greasy_wool.svg|Greasy wool fibers going from wet to dry in ESEM, at room temperature. Field width 270&nbsp;μm, BSE, 10 kV.

Fayil:ESEM_color_salt_hydrationx.png|Hydration of NaCl crystals on Teflon, as water vapor pressure rises, at room temperature, in an ESEM by the use of two symmetrical plastic scintillating backscattered electron detectors. Field width 300&nbsp;μm, 10 kV
Fayil:ESEM_Leptospermum.svg|Live *Leptospermum flavescens* stem cells with water film on left, at room temperature